JP2020140961A - マルチビーム走査透過荷電粒子顕微鏡 - Google Patents
マルチビーム走査透過荷電粒子顕微鏡 Download PDFInfo
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
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- H—ELECTRICITY
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- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
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- H—ELECTRICITY
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- H01J2237/04—Means for controlling the discharge
- H01J2237/045—Diaphragms
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- H01J2237/0453—Diaphragms with fixed aperture multiple apertures
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
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- H—ELECTRICITY
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- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24578—Spatial variables, e.g. position, distance
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
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- H01J2237/2802—Transmission microscopes
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- H01J2237/2803—Scanning microscopes characterised by the imaging method
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Abstract
Description
Claims (12)
- 複数の荷電粒子ビームを生成し、前記複数の荷電粒子ビームの各々で試料を照射する荷電粒子ビームコラムと、
前記試料に対する前記複数の荷電粒子ビームの相対的な走査運動を生成する走査アセンブリと、
前記の照射中に前記試料を横断する前記複数の荷電粒子ビームのうちの前記荷電粒子ビームの各々の荷電粒子を収集し、前記試料を横断した後に前記複数の荷電粒子ビームのうちの各荷電粒子ビームを検出器に向ける画像化システムと、を備え、
前記複数の荷電粒子ビームのうちの各荷電粒子ビームが、重心を含み、かつ
前記検出器が、前記画像化システムの後焦点面と撮像面との間の中間位置に配置されており、前記中間位置は、前記複数の荷電粒子ビームの一致する位置と各荷電粒子ビームの前記重心がもはや区別できない位置とによって境界が定められている、走査透過荷電粒子顕微鏡。 - 前記検出器が、明視野検出器、暗視野検出器、位置感応検出器、およびこれらの組み合わせを含む群から選択される、請求項1に記載の顕微鏡。
- 前記検出器が、位置感応検出器であり、
前記顕微鏡に含まれるコントローラが、
前記位置感応検出器からの出力に基づいてベクトル場を生成し、
前記ベクトル場に2次元積分演算を適用するように構成されている、請求項1に記載の顕微鏡。 - 前記走査アセンブリが、試料ホルダの走査運動を生成するためのアクチュエータシステムを備える、請求項1または3に記載の顕微鏡。
- 前記走査アセンブリが、
前記複数のビームの走査運動を生成するための、前記試料の上流にある第1のビーム偏向器システムと、
前記第1のビーム偏向器システムによって生成された前記走査運動を無効にするための、前記試料の下流かつ検出器平面の上流にある第2のビーム偏向器システムと、を備える、請求項1または3に記載の顕微鏡。 - 前記複数の荷電粒子ビームが、原形荷電粒子ビームを、前記原形荷電粒子ビームのフットプリント内に複数の開口部を有する開口プレート上に向けることによって生成される、請求項1〜5のいずれかに記載の顕微鏡。
- 前記複数の荷電粒子ビームが、複数の荷電粒子ビームコラムによって生成される、請求項1〜5のいずれかに記載の顕微鏡。
- 中間予定は、前記複数の荷電粒子ビームの隣接重心が、前記荷電粒子ビームのプロファイルの直径の少なくとも2倍だけ中間面内で分離されるように設けられている、請求項1〜5のいずれかに記載の顕微鏡。
- 中間面は、個々の荷電粒子ビームおよびそれらのそれぞれの重心が個別に検出可能であるように、前記複数の荷電粒子ビームが前記一致する位置から十分に抜け出る位置によって前記後焦点面の方向にさらに境界が定められている、請求項1〜5のいずれかに記載の顕微鏡。
- 中間面は、前記複数の荷電粒子ビームの各々の前記重心が依然として検出可能である位置によって、前記撮像面の方向にさらに境界が定められている、請求項1〜5のいずれかに記載の顕微鏡。
- 走査透過荷電粒子顕微鏡を使用する方法であって、
複数の荷電粒子ビームで試料を同時に照射することであって、前記複数の荷電粒子ビームの各荷電粒子ビームが前記試料のそれぞれの領域を照射する、照射することと、
前記試料に対して前記荷電粒子ビームを走査することと、
前記の照射中に前記試料を横断する荷電粒子を収集し、前記収集された荷電粒子を検出器に向けることと、を含み、
前記検出器が、画像化システムの後焦点面と撮像面との間の中間の検出器面に配置され、
前記の中間位置が、前記複数の荷電粒子ビームの一致する位置と、各荷電粒子ビームの重心がもはや区別できない位置と、によって境界が定められている、方法。 - 前記中間位置は、前記複数の荷電粒子ビームのうちの少なくとも2つの隣接する荷電粒子ビームの明視野ディスクが、明視野ディスク半径の2倍の距離だけ分離されるように設けられている、請求項11に記載の方法。
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US16/289,292 US10607811B1 (en) | 2019-02-28 | 2019-02-28 | Multi-beam scanning transmission charged particle microscope |
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US (1) | US10607811B1 (ja) |
EP (1) | EP3706155B1 (ja) |
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EP3614414A1 (en) * | 2018-08-20 | 2020-02-26 | FEI Company | Method of examining a sample using a charged particle microscope |
US11211223B1 (en) * | 2020-08-25 | 2021-12-28 | Fei Company | System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150069235A1 (en) * | 2013-09-09 | 2015-03-12 | Carl Zeiss Microscopy Gmbh | Particle Optical System |
US20150170876A1 (en) * | 2013-12-18 | 2015-06-18 | Fei Company | Method of investigating the wavefront of a charged-particle beam |
JP2015159112A (ja) * | 2014-02-24 | 2015-09-03 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡内で試料を検査する方法 |
JP2016207651A (ja) * | 2015-04-15 | 2016-12-08 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡によるトモグラフィックイメージングを実行する方法 |
US20170025247A1 (en) * | 2015-03-18 | 2017-01-26 | Battelle Memorial Institute | Tem phase contrast imaging with image plane phase grating |
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- 2020-02-21 JP JP2020027747A patent/JP7278983B2/ja active Active
- 2020-02-27 CN CN202010123762.6A patent/CN111627787A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150069235A1 (en) * | 2013-09-09 | 2015-03-12 | Carl Zeiss Microscopy Gmbh | Particle Optical System |
US20150170876A1 (en) * | 2013-12-18 | 2015-06-18 | Fei Company | Method of investigating the wavefront of a charged-particle beam |
JP2015159112A (ja) * | 2014-02-24 | 2015-09-03 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡内で試料を検査する方法 |
US20170025247A1 (en) * | 2015-03-18 | 2017-01-26 | Battelle Memorial Institute | Tem phase contrast imaging with image plane phase grating |
JP2016207651A (ja) * | 2015-04-15 | 2016-12-08 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡によるトモグラフィックイメージングを実行する方法 |
Non-Patent Citations (1)
Title |
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IVAN LAZIC ET AL.: "Phase contrast STEM for thin samples: Integrated differential phase contrast", ULTRAMICROSCOPY, vol. Volume 160, Pages 265-280, JPN6023014487, January 2016 (2016-01-01), ISSN: 0005038539 * |
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CN111627787A (zh) | 2020-09-04 |
US10607811B1 (en) | 2020-03-31 |
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