JP2020137237A - Vibration wave motor, and lens barrel driving apparatus having vibration wave motor - Google Patents

Vibration wave motor, and lens barrel driving apparatus having vibration wave motor Download PDF

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JP2020137237A
JP2020137237A JP2019027136A JP2019027136A JP2020137237A JP 2020137237 A JP2020137237 A JP 2020137237A JP 2019027136 A JP2019027136 A JP 2019027136A JP 2019027136 A JP2019027136 A JP 2019027136A JP 2020137237 A JP2020137237 A JP 2020137237A
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vibration wave
wave motor
relative movement
folded
flexible substrate
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山本　泰史
Yasushi Yamamoto
泰史 山本
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Canon Inc
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Canon Inc
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Abstract

To provide a vibration wave motor in which a movable part is miniaturized in a driving direction.SOLUTION: A vibration wave motor 100 includes: a vibrator 104 that is formed of a piezoelectric element 103 and a vibration plate 102; a holding member 106 that holds the vibrator 104; a flexible substrate 116 that is fixed to the piezoelectric element 103 and feeds a power to the piezoelectric element 103; a friction member 101 that comes in frictional contact with the vibrator 104; and pressurizing means 111 that pressurizes the vibrator 104 and the friction member 101. The vibrator 104 and the friction member 101 relatively move, and the flexible substrate 116 has a first folding portion 116c that is fixed to the holding member 106 and a second folding portion 116d of which the folding position changes with the relative movement, in the direction of the relative movement. A pressurizing center A of the pressurizing means 111 is arranged so as to overlap a range B of position change of the second folding portion 116d, in the direction of the relative movement.SELECTED DRAWING: Figure 1

Description

本発明は、振動波モータおよび振動波モータを備えた鏡筒駆動装置に関する。 The present invention relates to a vibration wave motor and a lens barrel drive device including a vibration wave motor.

従来、超音波モータには可動側に駆動源が配置され、駆動源へ電力を供給するためのフレキシブル基板が接続されるものがある。特許文献１では、駆動部の振動を阻害しないようにフレキシブル基板が屈曲変形する屈曲部を備えている超音波モータ、およびそのフレキシブル基板の配置と固定が開示されている。 Conventionally, some ultrasonic motors have a drive source arranged on the movable side and a flexible substrate for supplying electric power to the drive source is connected. Patent Document 1 discloses an ultrasonic motor having a bent portion in which the flexible substrate is bent and deformed so as not to hinder the vibration of the drive portion, and arrangement and fixing of the flexible substrate.

特開２０１６−１００９２８号公報Japanese Unexamined Patent Publication No. 2016-100928

特許文献１の超音波モータの駆動部の構成では、駆動距離が長くなった際に必要以上に駆動部が大型化してしまうことがある。また、駆動方向に大型化した駆動部を駆動させるために、超音波モータユニットとしても駆動方向に更に大型化してしまうことがある。 In the configuration of the drive unit of the ultrasonic motor of Patent Document 1, when the drive distance becomes long, the drive unit may become larger than necessary. Further, in order to drive the drive unit that is enlarged in the drive direction, the ultrasonic motor unit may be further increased in size in the drive direction.

本発明の目的は、可動部を駆動方向に小型化した振動波モータを提供することである。 An object of the present invention is to provide a vibration wave motor in which a movable portion is miniaturized in the driving direction.

本発明の振動波モータは、圧電素子と振動板とからなる振動子と、該振動子を保持する保持部材と、前記圧電素子に固定され、前記圧電素子に給電するフレキシブル基板と、前記振動子と摩擦接触する摩擦部材と、前記振動子と該摩擦部材とを加圧する加圧手段と、を備え、前記振動子と前記摩擦部材とが相対移動し、前記フレキシブル基板は、前記相対移動の方向において、前記保持部材に固定される第１の折り返し部と、前記相対移動に伴い折り返し位置が変化する第２の折り返し部と、を備え、前記加圧手段の加圧中心は、前記相対移動の方向において前記第２の折り返し部の位置変化範囲と重なるように配置されることを特徴とする。 The vibration wave motor of the present invention includes a vibrator composed of a piezoelectric element and a vibrating plate, a holding member that holds the vibrator, a flexible substrate that is fixed to the piezoelectric element and supplies power to the piezoelectric element, and the vibrator. A friction member that makes frictional contact with the vibrator and a pressurizing means that pressurizes the vibrator and the friction member are provided, and the vibrator and the friction member move relative to each other, and the flexible substrate moves in the direction of the relative movement. The first folded portion fixed to the holding member and the second folded portion whose folding position changes with the relative movement are provided, and the pressurizing center of the pressurizing means is of the relative movement. It is characterized in that it is arranged so as to overlap the position change range of the second folded portion in the direction.

本発明によれば、可動部を駆動方向に小型化した振動波モータを提供することができる。 According to the present invention, it is possible to provide a vibration wave motor in which the movable portion is miniaturized in the driving direction.

（Ａ）実施例１の振動波モータ１００の構成を示す平面図である。（Ｂ）同側面図である。(A) It is a top view which shows the structure of the vibration wave motor 100 of Example 1. FIG. (B) It is the same side view. （Ａ）実施例１の振動波モータ１００の構成を示す断面図である。（Ｂ）同底面図である。(A) It is sectional drawing which shows the structure of the vibration wave motor 100 of Example 1. FIG. (B) It is the same bottom view. （Ａ）実施例１の振動波モータ１００の可動部の相対移動を示す平面図である。（Ｂ）同側面図である。(A) It is a top view which shows the relative movement of the movable part of the vibration wave motor 100 of Example 1. FIG. (B) It is the same side view. 実施例１の振動波モータ１００の可動部の底面図である。It is a bottom view of the movable part of the vibration wave motor 100 of Example 1. FIG. （Ａ）実施例２の振動波モータ２００の構成を示す平面図である。（Ｂ）同側面図である。(A) It is a top view which shows the structure of the vibration wave motor 200 of Example 2. FIG. (B) It is the same side view. 実施例３の振動波モータ３００の可動部の底面図である。It is a bottom view of the movable part of the vibration wave motor 300 of Example 3. 振動波モータ１００を適用した撮像装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the image pickup apparatus which applied the vibration wave motor 100.

（実施例１）
以下に、本発明の好ましい実施の形態を、添付の図面に基づいて詳細に説明する。なお、図面において、振動波モータ１００の相対移動の方向をＸ軸方向、後述の加圧手段による加圧方向をＺ軸方向、Ｘ軸方向およびＺ軸方向のいずれにも直交する方向をＹ軸方向とする。各軸方向において、ある一方の方向を正側の方向、正側の反対方向を負側の方向とする。 (Example 1)
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the relative movement direction of the vibration wave motor 100 is the X-axis direction, the pressurization direction by the pressurizing means described later is the Z-axis direction, and the direction orthogonal to any of the X-axis direction and the Z-axis direction is the Y-axis. The direction. In each axial direction, one direction is the positive direction and the opposite direction is the negative direction.

図１（Ａ）、図１（Ｂ）、図２（Ａ）、図２（Ｂ）は、いずれも実施例１の振動波モータ１００の構成を示している。図１（Ａ）は、実施例１の振動波モータ１００の平面図であり、図１（Ｂ）は、振動波モータ１００をＹ軸方向からみた側面図である。図２（Ａ）は、図１（Ａ）で示す断面線ＩＩＡ−ＩＩＡにおける断面図であり、図２（Ｂ）は、振動波モータ１００の底面図である。実施例１の振動波モータ１００は、以下に述べる各部材により構成されている。 1 (A), 1 (B), 2 (A), and 2 (B) all show the configuration of the vibration wave motor 100 of the first embodiment. FIG. 1A is a plan view of the vibration wave motor 100 of the first embodiment, and FIG. 1B is a side view of the vibration wave motor 100 as viewed from the Y-axis direction. FIG. 2A is a cross-sectional view taken along the cross-sectional line IIA-IIA shown in FIG. 1A, and FIG. 2B is a bottom view of the vibration wave motor 100. The vibration wave motor 100 of the first embodiment is composed of the following members.

図２（Ａ）に示すように、振動波モータ１００（超音波モータ）は、摩擦部材１０１、振動子１０４、振動子保持部材、フレキシブル基板１１６、加圧手段、案内手段等から構成されている。振動子１０４は、弾性を有する振動板１０２と圧電素子１０３により構成されている。振動板１０２と圧電素子１０３は、公知の接着剤等により固着されている。圧電素子１０３へ給電するためのフレキシブル基板１１６が圧電素子１０３に固定され、超音波領域の周波数を有する高周波電圧が印加されることにより超音波振動が励振される。 As shown in FIG. 2A, the vibration wave motor 100 (ultrasonic motor) is composed of a friction member 101, an oscillator 104, an oscillator holding member, a flexible substrate 116, a pressurizing means, a guiding means, and the like. .. The vibrator 104 is composed of an elastic diaphragm 102 and a piezoelectric element 103. The diaphragm 102 and the piezoelectric element 103 are fixed to each other with a known adhesive or the like. The flexible substrate 116 for supplying power to the piezoelectric element 103 is fixed to the piezoelectric element 103, and ultrasonic vibration is excited by applying a high frequency voltage having a frequency in the ultrasonic region.

振動子１０４と第１の保持部材１０５とは、公知の接着剤等により固定されているが、固定されればその方法は限定されない。第２の保持部材１０６は、薄板板金１０７を介して第１の保持部材１０５と連結されている。第１の保持部材１０５、第２の保持部材１０６と薄板板金１０７により振動子保持部材が構成される。摩擦部材１０１と固定側レール部材１１３はネジ等の公知の技術により固定枠部材１１２に固定されている。なお、第２の保持部材１０６は、被駆動部材（例えば、後述の光学レンズ３）に接続するための接続部１０６ｂを備える。 The vibrator 104 and the first holding member 105 are fixed by a known adhesive or the like, but the method is not limited as long as they are fixed. The second holding member 106 is connected to the first holding member 105 via a thin sheet metal 107. The oscillator holding member is composed of the first holding member 105, the second holding member 106, and the thin sheet metal 107. The friction member 101 and the fixed side rail member 113 are fixed to the fixed frame member 112 by a known technique such as a screw. The second holding member 106 includes a connecting portion 106b for connecting to a driven member (for example, an optical lens 3 described later).

図１（Ａ）、図２（Ｂ）に示すように、本発明の加圧手段であるバネ１１１は、４か所において加圧プレート１１０と可動側レール部材１１５を連結し、振動子１０４を摩擦部材１０１へ摩擦接触させる加圧力を付与している。位置Ａを示すＸ印は４つのバネ１１１が発生する加圧力の加圧中心を示している。また、位置Ａは後述する案内手段の案内中心とも一致している。図２（Ａ）に示すように、加圧プレート１１０は、弾性部材１０８を貼り付ける貼付部材１０９と接触し、また貼付部材１０９と圧電素子１０３との間には、弾性部材１０８が配置されており、加圧力が伝達される。貼付部材１０９および弾性部材１０８は、加圧プレート１１０と圧電素子１０３との直接接触を妨げ、圧電素子１０３の損傷を防止している。 As shown in FIGS. 1 (A) and 2 (B), the spring 111, which is the pressurizing means of the present invention, connects the pressurizing plate 110 and the movable rail member 115 at four places to form the vibrator 104. A pressing force is applied to the friction member 101 for frictional contact. The X mark indicating the position A indicates the pressurizing center of the pressing force generated by the four springs 111. Further, the position A also coincides with the guide center of the guide means described later. As shown in FIG. 2A, the pressure plate 110 is in contact with the sticking member 109 to which the elastic member 108 is attached, and the elastic member 108 is arranged between the sticking member 109 and the piezoelectric element 103. The pressure is transmitted. The sticking member 109 and the elastic member 108 prevent direct contact between the pressure plate 110 and the piezoelectric element 103, and prevent damage to the piezoelectric element 103.

第２の保持部材１０６と可動側レール部材１１５は、不図示のネジ等で固定されるが、固定されればその方法は限定されない。可動側レール部材１１５は、Ｖ溝形状を有する可動側案内部１１５ａを２つ備えており、それぞれのＶ溝に本発明の転動手段である転動ボール１１４が配置されている。一方、固定側レール部材１１３においても、Ｖ溝形状を有する固定側案内部１１３ａが２つ備えられている。そして、固定側レール部材１１３が有する固定側案内部１１３ａと、可動側レール部材１１５が有する可動側案内部１１５ａにより転動ボール１１４が挟持されている。このような構成により相対移動の方向であるＸ軸方向への案内手段が構成される。 The second holding member 106 and the movable side rail member 115 are fixed by screws or the like (not shown), but the method is not limited as long as they are fixed. The movable side rail member 115 includes two movable side guide portions 115a having a V-groove shape, and a rolling ball 114, which is a rolling means of the present invention, is arranged in each V-groove. On the other hand, the fixed-side rail member 113 is also provided with two fixed-side guide portions 113a having a V-groove shape. Then, the rolling ball 114 is sandwiched between the fixed side guide portion 113a included in the fixed side rail member 113 and the movable side guide portion 115a included in the movable side rail member 115. With such a configuration, the guiding means in the X-axis direction, which is the direction of relative movement, is configured.

この際、転動ボール１１４を挟持する力は、４つのバネ１１１により発生する。そのため、２つの転動ボール１１４がバネ１１１の加圧中心である位置Ａを挟むように配置されなければ力のバランスが崩れ、転動ボール１１４を介して可動側レール部材１１５が浮いてしまう。上記の理由から、可動側レール部材１１５の可動側案内部１１５ａは加圧中心である位置Ａに対し、対称に配置される。その結果、可動側案内部１１５ａの案内中心も位置Ａと一致する。この構成において、駆動距離が長い振動波モータ１００を構成するためには、案内距離が長い案内手段が必要になり、そのため可動側案内部１１５ａを相対移動の方向であるＸ軸方向に長くする必要がある。 At this time, the force for holding the rolling ball 114 is generated by the four springs 111. Therefore, if the two rolling balls 114 are not arranged so as to sandwich the position A which is the pressurizing center of the spring 111, the balance of the force is lost and the movable side rail member 115 floats via the rolling balls 114. For the above reason, the movable side guide portion 115a of the movable side rail member 115 is arranged symmetrically with respect to the position A which is the center of pressurization. As a result, the guide center of the movable side guide portion 115a also coincides with the position A. In this configuration, in order to configure the vibration wave motor 100 having a long drive distance, a guide means having a long guide distance is required, and therefore, the movable side guide portion 115a needs to be lengthened in the X-axis direction, which is the direction of relative movement. There is.

振動板１０２は、接触部１０２ａを備え、接触部１０２ａは前述のバネ１１１の加圧力により加圧付勢された状態で摩擦部材１０１に接触している。フレキシブル基板１１６を介して圧電素子１０３に駆動電圧が印加されると超音波振動が励振され、振動子１０４に共振現象が起こる。この時、振動子１０４には２種の定在波が発生し、振動板１０２の接触部１０２ａに略楕円運動がおこる。前述の振動板１０２と摩擦部材１０１の加圧接触状態において、振動子１０４に発生した略楕円運動が効率的に摩擦部材１０１へ伝達される。その結果、振動子１０４に接続する第２の保持部材１０６までの構成は、固定部材に対してＸ軸方向へ相対移動する。また、第２の保持部材１０６に接続する被駆動部材も一体となりＸ軸方向へと移動する。上記のように、振動子１０４から第２の保持部材１０６までの構成により振動波モータ１００の可動部が構成される。 The diaphragm 102 includes a contact portion 102a, and the contact portion 102a is in contact with the friction member 101 in a state of being pressurized and urged by the pressing force of the spring 111 described above. When a driving voltage is applied to the piezoelectric element 103 via the flexible substrate 116, ultrasonic vibration is excited and a resonance phenomenon occurs in the vibrator 104. At this time, two types of standing waves are generated in the vibrator 104, and a substantially elliptical motion occurs in the contact portion 102a of the diaphragm 102. In the pressure contact state between the diaphragm 102 and the friction member 101, the substantially elliptical motion generated in the vibrator 104 is efficiently transmitted to the friction member 101. As a result, the configuration up to the second holding member 106 connected to the vibrator 104 moves relative to the fixed member in the X-axis direction. Further, the driven member connected to the second holding member 106 is also integrated and moves in the X-axis direction. As described above, the movable portion of the vibration wave motor 100 is configured by the configuration from the vibrator 104 to the second holding member 106.

次にフレキシブル基板１１６の配置について説明する。なお、図面においてフレキシブル基板１１６は梨地で示されており、また、フレキシブル基板１１６が他の部材に隠れてしまう部分は破線で示されている。図１（Ａ）に示すように、フレキシブル基板１１６は、固定部１１６ａで圧電素子１０３に固定され、Ｙ軸方向へ延在したのち、屈曲部１１６ｂで相対移動の方向であるＸ軸方向に略９０度曲がり、そのまま延在する。そして、第１の折り返し部１１６ｃにおいてフレキシブル基板１１６は、フレキシブル基板１１６の面内で相対移動の方向に折り返し、そのまま延在する。この第１の折り返し部１１６ｃは、第２の保持部材１０６の屈曲ガイド１０６ａのＸ軸方向の端部付近に固定されるため平面ターン形状を形成する。次に、フレキシブル基板１１６は、第２の折り返し部１１６ｄにおいて、略Ｒ形状で面外へと屈曲変形して相対移動の方向に折り返し、延在する。そして固定部１１６ｅで固定枠部材１１２に固定される。その後、フレキシブル基板１１６はＹ軸方向へ延在し、不図示の外部接続部へ接続される。 Next, the arrangement of the flexible substrate 116 will be described. In the drawings, the flexible substrate 116 is shown in satin finish, and the portion where the flexible substrate 116 is hidden by other members is shown by a broken line. As shown in FIG. 1 (A), the flexible substrate 116 is fixed to the piezoelectric element 103 by the fixing portion 116a, extends in the Y-axis direction, and then is substantially moved in the bending portion 116b in the X-axis direction. It bends 90 degrees and continues as it is. Then, in the first folded portion 116c, the flexible substrate 116 is folded back in the direction of relative movement in the plane of the flexible substrate 116 and extends as it is. The first folded-back portion 116c is fixed in the vicinity of the end portion of the bending guide 106a of the second holding member 106 in the X-axis direction, so that it forms a flat turn shape. Next, the flexible substrate 116 is bent and deformed out of the plane in a substantially R shape at the second folded portion 116d, folded back in the direction of relative movement, and extends. Then, it is fixed to the fixed frame member 112 by the fixing portion 116e. After that, the flexible substrate 116 extends in the Y-axis direction and is connected to an external connection portion (not shown).

図１（Ｂ）に示すように、第２の折り返し部１１６ｄは、第２の保持部材１０６の有する屈曲ガイド１０６ａと、固定枠部材１１２が有する案内面１１２ａによりガイドされ、加圧方向に略Ｕ字形状の屈曲形状（立ち上がりＵターン形状）を形成する。屈曲ガイド１０６ａおよび案内面１１２ａは、相対移動の方向であるＸ軸方向に延在しており、振動波モータ１００の可動部のＸ軸方向の相対移動に伴い、第２の折り返し部１１６ｄの折り返し位置は変化することができる。このように可動部の相対移動に伴い、第２の折り返し部１１６ｄの位置が相対移動の方向に変化することで、フレキシブル基板１１６の可動側（第１の折り返し部１１６ｃ）と固定側（固定部１１６ｅ）の固定位置の相対位置変化が吸収される。 As shown in FIG. 1 (B), the second folded-back portion 116d is guided by the bending guide 106a included in the second holding member 106 and the guide surface 112a included in the fixed frame member 112, and is substantially U in the pressurizing direction. A bent shape (rising U-turn shape) is formed. The bending guide 106a and the guide surface 112a extend in the X-axis direction, which is the direction of relative movement, and the second folded-back portion 116d is folded back as the movable portion of the vibration wave motor 100 moves relative to the X-axis direction. The position can change. In this way, the position of the second folded-back portion 116d changes in the direction of the relative movement with the relative movement of the movable portion, so that the movable side (first folded-back portion 116c) and the fixed side (fixed portion) of the flexible substrate 116 The relative position change of the fixed position of 116e) is absorbed.

次に、実施例１における振動波モータ１００の可動部の相対移動について説明する。図３（Ａ）は平面図を、図３（Ｂ）はＹ軸方向から見た側面図を示している。図３（Ａ）および図３（Ｂ）の上半分に示す図は、振動波モータ１００の可動部がＸ軸方向の正側のユニット端部に位置している状態を示している。この時、第２の折り返し部１１６ｄは振動波モータ１００の可動部内でＸ軸方向の負側の端部に位置している。図３（Ｂ）に示すように、屈曲ガイド１０６ａおよび案内面１１２ａが相対移動の方向であるＸ軸方向に延在しているため、可動部がＸ軸方向の正側のユニット端部に位置していても、第２の折り返し部１１６ｄは屈曲形状を形成することができる。また第１の折り返し部１１６ｃは、固定されているのでＸ軸方向の負側の端部に位置している。 Next, the relative movement of the moving portion of the vibration wave motor 100 in the first embodiment will be described. FIG. 3A shows a plan view, and FIG. 3B shows a side view seen from the Y-axis direction. The figures shown in the upper half of FIGS. 3A and 3B show a state in which the movable portion of the vibration wave motor 100 is located at the end of the unit on the positive side in the X-axis direction. At this time, the second folded-back portion 116d is located at the end on the negative side in the X-axis direction in the movable portion of the vibration wave motor 100. As shown in FIG. 3B, since the bending guide 106a and the guide surface 112a extend in the X-axis direction, which is the direction of relative movement, the movable portion is located at the end of the unit on the positive side in the X-axis direction. Even so, the second folded-back portion 116d can form a bent shape. Further, since the first folded-back portion 116c is fixed, it is located at the end portion on the negative side in the X-axis direction.

図３（Ａ）および図３（Ｂ）の下半分に示す図は、振動波モータ１００の可動部がＸ軸方向の負側のユニット端部に位置している状態を示している。この時、第２の折り返し部１１６ｄは、振動波モータ１００の可動部内でＸ軸方向の正側の端に位置している。図３（Ｂ）に示すように、屈曲ガイド１０６ａおよび案内面１１２ａが相対移動の方向であるＸ軸方向に延在しているため、可動部がＸ軸方向の負側のユニット端部に位置していても、第２の折り返し部１１６ｄは屈曲形状を形成することができる。また第１の折り返し部１１６ｃは、固定されているのでＸ軸方向の負側の端部に位置したままである。 The figures shown in the lower halves of FIGS. 3A and 3B show a state in which the movable portion of the vibration wave motor 100 is located at the end of the unit on the negative side in the X-axis direction. At this time, the second folded-back portion 116d is located at the positive end in the X-axis direction in the movable portion of the vibration wave motor 100. As shown in FIG. 3B, since the bending guide 106a and the guide surface 112a extend in the X-axis direction, which is the direction of relative movement, the movable portion is located at the end of the unit on the negative side in the X-axis direction. Even so, the second folded-back portion 116d can form a bent shape. Further, since the first folded-back portion 116c is fixed, it remains located at the end portion on the negative side in the X-axis direction.

振動波モータ１００の可動部が相対移動した際にも、相対移動の方向に延在した屈曲ガイド１０６ａおよび案内面１１２ａにフレキシブル基板１１６が案内されることで第２の折り返し部１１６ｄの屈曲形状が維持される。もし、振動波モータ１００の駆動距離を長くする場合、可動部側に設けられる屈曲ガイド１０６ａの寸法を長くすることが必要である。この要求に対して、振動波モータ１００では、屈曲ガイド１０６ａが相対移動の方向に長くなっており、この構成によって長い駆動距離を得ることができる一方、相対移動の方向には振動波モータ１００が大型化していない。 Even when the movable portion of the vibration wave motor 100 moves relative to each other, the flexible substrate 116 is guided to the bending guide 106a and the guide surface 112a extending in the direction of the relative movement, so that the bending shape of the second folded portion 116d is formed. Be maintained. If the driving distance of the vibration wave motor 100 is to be lengthened, it is necessary to lengthen the dimension of the bending guide 106a provided on the movable portion side. In response to this requirement, in the vibration wave motor 100, the bending guide 106a is elongated in the direction of relative movement, and a long driving distance can be obtained by this configuration, while the vibration wave motor 100 is in the direction of relative movement. It has not become large.

次に、第２の折り返し部１１６ｄの可動部内における位置変化範囲Ｂについて説明する。第２の折り返し部１１６ｄの可動部内における位置変化範囲Ｂは矢印で示されている。フレキシブル基板１１６が第１の折り返し部１１６ｃにおいて一度折り返されることで、第２の折り返し部１１６ｄの位置変化範囲Ｂは、振動波モータ１００の加圧中心（すなわち可動部の中心）である位置Ａから相対移動の方向の前後に延在させることができる。前述のとおり位置Ａにおいて、加圧中心および案内中心は一致しているため、加圧中心および案内中心は第２の折り返し部１１６ｄの位置変化範囲Ｂと相対移動の方向で重なることになる。一方、第１の折り返し部１１６ｃは、相対移動の方向において加圧中心および案内中心である位置Ａと重ならないように配置される。 Next, the position change range B in the movable portion of the second folded-back portion 116d will be described. The position change range B in the movable portion of the second folded portion 116d is indicated by an arrow. When the flexible substrate 116 is folded once at the first folded portion 116c, the position change range B of the second folded portion 116d is from the position A which is the pressurizing center (that is, the center of the movable portion) of the vibration wave motor 100. It can be extended back and forth in the direction of relative movement. As described above, at the position A, the pressurizing center and the guiding center coincide with each other, so that the pressurizing center and the guiding center overlap with the position change range B of the second folded-back portion 116d in the direction of relative movement. On the other hand, the first folded-back portion 116c is arranged so as not to overlap the position A which is the pressurizing center and the guiding center in the direction of relative movement.

上記のような構成によって、振動波モータ１００を大型化すること無しに、長い駆動距離を得ることができる。言い換えれば、従来と同程度の駆動距離を得るには、振動波モータ１００の可動部を駆動方向に小型化することが可能である。次に、図４を用いて実施例１における可動部を駆動方向に小型化したことの効果について説明する。図４は、振動波モータ１００の可動部をＺ軸方向の負側から見た場合の拡大図である。矢印で示す長さＣ１は、第２の折り返し部１１６ｄの屈曲形状を案内するために必要な屈曲ガイド１０６ａの相対移動の方向の長さを示している。矢印で示す長さＤ１は、案内手段を構成する２つの可動側案内部１１５ａを直線状に配置した場合の駆動方向の長さを示している。 With the above configuration, a long drive distance can be obtained without increasing the size of the vibration wave motor 100. In other words, in order to obtain the same driving distance as the conventional one, the movable portion of the vibration wave motor 100 can be miniaturized in the driving direction. Next, the effect of miniaturizing the movable portion in the driving direction in the first embodiment will be described with reference to FIG. FIG. 4 is an enlarged view of the movable portion of the vibration wave motor 100 when viewed from the negative side in the Z-axis direction. The length C1 indicated by the arrow indicates the length in the relative movement direction of the bending guide 106a required to guide the bending shape of the second folded-back portion 116d. The length D1 indicated by the arrow indicates the length in the driving direction when the two movable side guide portions 115a constituting the guide means are arranged in a straight line.

実施例１の振動波モータ１００では、相対移動の方向において、屈曲形状を案内する屈曲ガイド１０６ａの長さＣ１が案内手段を構成する可動側案内部１１５ａの長さＤ１の相対移動の方向の内側に含まれている。一方、例えば特許文献１の図１１（ａ）に示された状態は、駆動部が駆動端開始位置に位置する場合を示しており、屈曲部が駆動部の長さの範囲から逸脱している。従来の構成の超音波モータでは、長い駆動距離を得るために駆動部の相対移動の方向の寸法が必要以上に大型化することとなる。 In the vibration wave motor 100 of the first embodiment, in the direction of relative movement, the length C1 of the bending guide 106a that guides the bending shape is inside the length D1 of the movable side guide portion 115a that constitutes the guiding means in the direction of relative movement. Included in. On the other hand, for example, the state shown in FIG. 11A of Patent Document 1 indicates a case where the drive portion is located at the drive end start position, and the bent portion deviates from the range of the length of the drive portion. .. In the ultrasonic motor having the conventional configuration, the dimension in the direction of relative movement of the drive unit becomes larger than necessary in order to obtain a long drive distance.

しかしながら、実施例１の振動波モータ１００では、長さＣ１と長さＤ１の不一致による可動部の必要以上の大型化を抑制することができるので、長い駆動距離を得ることできるという優れた効果がある。また、可動部を駆動方向に小型化した振動波モータ１００を提供することができる。 However, in the vibration wave motor 100 of the first embodiment, since it is possible to suppress an unnecessarily large size of the movable portion due to the mismatch between the length C1 and the length D1, there is an excellent effect that a long driving distance can be obtained. is there. Further, it is possible to provide a vibration wave motor 100 in which the movable portion is miniaturized in the driving direction.

（実施例２）
以下に、実施例２を添付の図面に基づいて詳細に説明する。実施例２は、実施例１に対して第２の保持部材２０６とフレキシブル基板２１６の形状が異なっている。実施例２の説明では実施例１との差異のみを説明し、共通する部分の説明は省く。 (Example 2)
The second embodiment will be described in detail below with reference to the accompanying drawings. In the second embodiment, the shapes of the second holding member 206 and the flexible substrate 216 are different from those of the first embodiment. In the explanation of the second embodiment, only the difference from the first embodiment will be described, and the common parts will be omitted.

図５（Ａ）は、実施例２の振動波モータ２００の平面図を示している。図５（Ｂ）は、Ｙ軸方向からみた側面図を示している。以下、実施例２におけるフレキシブル基板２１６の配置について説明する。 FIG. 5A shows a plan view of the vibration wave motor 200 of the second embodiment. FIG. 5B shows a side view seen from the Y-axis direction. Hereinafter, the arrangement of the flexible substrate 216 in the second embodiment will be described.

フレキシブル基板２１６は、固定部２１６ａで不図示の圧電素子１０３に固定され、Ｙ軸方向へ延在したのち、屈曲部２１６ｂで相対移動の方向であるＸ軸方向に略９０度曲がり、そのまま延在する。そして、第１の折り返し部２１６ｃにおいてフレキシブル基板２１６は、フレキシブル基板２１６の面外の方向へ１８０度折り畳まれ、そのまま延在する。この第１の折り返し部２１６ｃは、第２の保持部材２０６のＸ軸方向の端部付近に固定される。次に、フレキシブル基板２１６は、第２の折り返し部２１６ｄにおいて、略Ｒ形状で面外へと屈曲変形して相対移動の方向に折り返し、延在する。そして固定部２１６ｅで固定枠部材１１２に固定される。その後、フレキシブル基板２１６はＹ軸方向へ延在し、不図示の外部接続部へ接続される。 The flexible substrate 216 is fixed to a piezoelectric element 103 (not shown) by a fixing portion 216a, extends in the Y-axis direction, then bends approximately 90 degrees in the X-axis direction, which is a relative movement direction, at the bent portion 216b, and extends as it is. To do. Then, in the first folded-back portion 216c, the flexible substrate 216 is folded 180 degrees in the out-of-plane direction of the flexible substrate 216 and extends as it is. The first folded-back portion 216c is fixed in the vicinity of the end portion of the second holding member 206 in the X-axis direction. Next, the flexible substrate 216 is bent and deformed out of the plane in a substantially R shape at the second folded portion 216d, folded back in the direction of relative movement, and extends. Then, it is fixed to the fixed frame member 112 by the fixing portion 216e. After that, the flexible substrate 216 extends in the Y-axis direction and is connected to an external connection portion (not shown).

第１の折り返し部２１６ｃは、面外へ折り畳まれる折り畳み形状であるため、第１の折り返し部２１６ｃと第２の折り返し部２１６ｄをＹ軸方向において重なる位置に配置することができる。そのため第１の折り返し部２１６ｃを固定するために第２の保持部材２０６をＹ軸方向に大型化する必要がない。結果として、長さＥ２で示す実施例２の振動波モータ２００の可動部のＹ軸方向の寸法は、図１（Ａ）における長さＥ１で示す実施例１の振動波モータ１００の可動部のＹ軸方向の寸法より、小型化されることができる。 Since the first folded portion 216c has a folded shape that is folded out of the plane, the first folded portion 216c and the second folded portion 216d can be arranged at overlapping positions in the Y-axis direction. Therefore, it is not necessary to increase the size of the second holding member 206 in the Y-axis direction in order to fix the first folded-back portion 216c. As a result, the dimensions of the movable part of the vibration wave motor 200 of the second embodiment shown by the length E2 in the Y-axis direction are the movable parts of the vibration wave motor 100 of the first embodiment shown by the length E1 in FIG. 1 (A). It can be made smaller than the dimensions in the Y-axis direction.

ここで、第１の折り返し部２１６ｃは、折り畳まれて形成されるため、第２の保持部材２０６が有する屈曲ガイド２０６ａと並行であり、Ｘ軸方向にその寸法が大型化しない。そのため、第２の折り返し部２１６ｄの屈曲形状の形成を阻害することはない。 Here, since the first folded-back portion 216c is formed by being folded, it is parallel to the bending guide 206a included in the second holding member 206, and its size does not increase in the X-axis direction. Therefore, it does not hinder the formation of the bent shape of the second folded portion 216d.

以上のように、実施例２の振動波モータ２００は、実施例１における効果と同様に、可動部の必要以上の大型化を抑制することができるので、長い駆動距離を得ることできるという優れた効果がある。また、加えて実施例２の振動波モータ２００では、フレキシブル基板２１６の第１の折り返し部２１６ｃを面外への折り畳み形状で構成することにより、可動部を駆動方向に小型化しつつ駆動直交方向にも小型化した振動波モータ２００を提供することができる。 As described above, the vibration wave motor 200 of the second embodiment is excellent in that a long driving distance can be obtained because it is possible to suppress an unnecessarily large size of the movable portion as in the effect of the first embodiment. effective. In addition, in the vibration wave motor 200 of the second embodiment, the first folded portion 216c of the flexible substrate 216 is formed in an out-of-plane fold shape, so that the movable portion can be miniaturized in the drive direction and in the drive orthogonal direction. Can also provide a miniaturized vibration wave motor 200.

（実施例３）
以下に、実施例３を添付の図面に基づいて詳細に説明する。実施例３は、実施例１および実施例２に対して可動側レール部材３１５と固定側レール部材３１３がそれぞれ有する案内部の構成が異なっている。実施例３の説明では実施例１と実施例２との差異のみを説明し、共通する部分の説明は省く。 (Example 3)
Hereinafter, Example 3 will be described in detail with reference to the accompanying drawings. In the third embodiment, the configurations of the guide portions of the movable side rail member 315 and the fixed side rail member 313 are different from those of the first and second embodiments. In the explanation of the third embodiment, only the difference between the first embodiment and the second embodiment will be described, and the description of the common part will be omitted.

図６は、実施例３における振動波モータ３００の可動部をＺ軸方向の負側から見た場合の拡大図である。実施例３では転動ボール３１４が３つ配置され、可動側案内部３１５ａおよび固定側案内部３１３ａ（不図示）も転動ボール３１４に対応した３か所に配置される。なお、図６においては、右側２つの転動ボール３１４が直線状に配置されている。しかしながら、固定側もしくは可動側の２か所の案内部がつながった構造であっても構わない。 FIG. 6 is an enlarged view of the movable portion of the vibration wave motor 300 according to the third embodiment when viewed from the negative side in the Z-axis direction. In the third embodiment, three rolling balls 314 are arranged, and the movable side guide portion 315a and the fixed side guide portion 313a (not shown) are also arranged at three places corresponding to the rolling balls 314. In FIG. 6, the two rolling balls 314 on the right side are arranged in a straight line. However, the structure may be such that two guide portions on the fixed side or the movable side are connected.

実施例１と同様に転動ボール３１４を挟持する力は、４つのバネ１１１により発生する。そのため、３つの転動ボール３１４がバネ１１１の加圧中心である位置Ａを挟むように配置されなければ力のバランスが崩れ、転動ボール３１４を介して可動側レール部材３１５が浮いてしまう。上記の理由から、可動側レール部材３１５の可動側案内部３１５ａは加圧中心である位置Ａに対し、対称に配置される。その結果、可動側案内部３１５ａの案内中心も位置Ａと一致する。３つの転動ボール３１４を備えた構成であっても、実施例１と同様にＸ軸方向への案内手段が構成される。 Similar to the first embodiment, the force for holding the rolling ball 314 is generated by the four springs 111. Therefore, if the three rolling balls 314 are not arranged so as to sandwich the position A which is the pressurizing center of the spring 111, the balance of the force is lost and the movable side rail member 315 floats via the rolling balls 314. For the above reason, the movable side guide portion 315a of the movable side rail member 315 is arranged symmetrically with respect to the position A which is the center of pressurization. As a result, the guide center of the movable side guide portion 315a also coincides with the position A. Even in the configuration including the three rolling balls 314, the guiding means in the X-axis direction is configured as in the first embodiment.

次に、実施例３の効果について説明する。矢印で示す長さＣ３は実施例１と同様に屈曲ガイド３０６ａの相対移動の方向の長さを示している。矢印で示す長さＤ３は、案内手段を構成する転動ボール３１４が３つの場合において、２つの可動側案内部３１５ａを直線状に配置した場合の駆動方向の長さを示している。 Next, the effect of Example 3 will be described. The length C3 indicated by the arrow indicates the length in the relative movement direction of the bending guide 306a as in the first embodiment. The length D3 indicated by the arrow indicates the length in the driving direction when the two movable side guide portions 315a are arranged in a straight line when there are three rolling balls 314 constituting the guide means.

実施例３の振動波モータ３００では、相対移動の方向において、屈曲形状を案内する屈曲ガイド３０６ａの長さＣ３が案内手段を構成する可動側案内部３１５ａの長さＤ３の相対移動方向の内側に含まれている。それゆえ、長さＣ３と長さＤ３の不一致による可動部の必要以上の大型化を抑制することができるので、長い駆動距離を得ることできるという優れた効果がある。また、可動部を駆動方向に小型化した振動波モータ３００を提供することができる。 In the vibration wave motor 300 of the third embodiment, in the direction of relative movement, the length C3 of the bending guide 306a for guiding the bending shape is inside the length D3 of the movable side guide portion 315a constituting the guiding means in the relative moving direction. include. Therefore, it is possible to suppress an unnecessarily large size of the movable portion due to the mismatch between the length C3 and the length D3, so that there is an excellent effect that a long driving distance can be obtained. Further, it is possible to provide a vibration wave motor 300 in which the movable portion is miniaturized in the driving direction.

（適用例）
図７は、実施例１の振動波モータ１００を適用した撮像装置の構成を示している。なお、振動波モータ１００を備えた鏡筒駆動装置が撮像装置に搭載された場合について説明するが、これは本発明を限定するものではない。また、後述の撮像レンズ部１とカメラボディ２が一体となっている撮像装置について説明をするが、撮像レンズ部１は交換可能なレンズであっても構わない。 (Application example)
FIG. 7 shows the configuration of an image pickup device to which the vibration wave motor 100 of the first embodiment is applied. The case where the lens barrel drive device including the vibration wave motor 100 is mounted on the image pickup device will be described, but this does not limit the present invention. Further, although the image pickup device in which the image pickup lens unit 1 and the camera body 2 are integrated will be described later, the image pickup lens unit 1 may be an interchangeable lens.

撮像装置本体は、撮像レンズ部１とカメラボディ２によって構成されている。撮像レンズ部１の内部において、光学レンズ３は振動波モータ１００と連結されており、振動波モータ１００を構成する振動子１０４が移動することにより、光学レンズ３は光軸５と略平行な方向に移動可能となる。これら光学レンズ３を含む鏡筒と振動波モータ１００とにより、本発明の鏡筒駆動装置が構成される。光学レンズ３が合焦レンズである鏡筒駆動装置においては、撮像時に合焦レンズが光軸５と略平行な方向に移動し、被写体像はカメラボディ２の内部の撮像素子４の位置で結像し、合焦した像を生成することが可能となる。 The image pickup device main body is composed of an image pickup lens unit 1 and a camera body 2. Inside the image pickup lens unit 1, the optical lens 3 is connected to the vibration wave motor 100, and the vibrator 104 constituting the vibration wave motor 100 moves so that the optical lens 3 moves in a direction substantially parallel to the optical axis 5. It becomes possible to move to. The lens barrel drive device of the present invention is configured by the lens barrel including the optical lens 3 and the vibration wave motor 100. In a lens barrel drive device in which the optical lens 3 is a focusing lens, the focusing lens moves in a direction substantially parallel to the optical axis 5 at the time of imaging, and the subject image is formed at the position of the image sensor 4 inside the camera body 2. It is possible to image and generate a focused image.

以上、本発明の好ましい実施例、適用例について説明したが、本発明はこれらの形態に限定されず、その要旨の範囲内で種々の変形および変更が可能である。 Although preferable examples and application examples of the present invention have been described above, the present invention is not limited to these forms, and various modifications and changes can be made within the scope of the gist thereof.

１００、２００、３００ 振動波モータ
３ 光学レンズ
１０１ 摩擦部材
１０２ 振動板
１０３ 圧電素子
１０４ 振動子
１０６、２０６ 保持部材（第２の保持部材）
１１１ バネ（加圧手段）
１１３ａ 案内手段（固定側案内部）
１１４、３１４ 転動手段（転動ボール）
１１５ａ、３１５ａ 案内手段（可動側案内部）
１１６、２１６ フレキシブル基板
１１６ｃ、２１６ｃ 第１の折り返し部
１１６ｄ、２１６ｄ 第２の折り返し部
Ａ 加圧中心、案内中心
Ｂ 位置変化範囲 100, 200, 300 Vibration wave motor 3 Optical lens 101 Friction member 102 Diaphragm 103 Piezoelectric element 104 Oscillator 106, 206 Holding member (second holding member)
111 Spring (pressurizing means)
113a Guidance means (fixed side guide)
114, 314 Rolling means (rolling ball)
115a, 315a Guidance means (movable side guide)
116c, 216 Flexible Substrate 116c, 216c First Folded Part 116d, 216d Second Folded Part A Pressurized Center, Guide Center B Position Change Range

Claims (8)

圧電素子と振動板とからなる振動子と、
該振動子を保持する保持部材と、
前記圧電素子に固定され、前記圧電素子に給電するフレキシブル基板と、
前記振動子と摩擦接触する摩擦部材と、
前記振動子と該摩擦部材とを加圧する加圧手段と、
を備え、
前記振動子と前記摩擦部材とが相対移動し、
前記フレキシブル基板は、前記相対移動の方向において、前記保持部材に固定される第１の折り返し部と、前記相対移動に伴い折り返し位置が変化する第２の折り返し部と、を備え、
前記加圧手段の加圧中心は、前記相対移動の方向において前記第２の折り返し部の位置変化範囲と重なるように配置されることを特徴とする、振動波モータ。 An oscillator consisting of a piezoelectric element and a diaphragm,
A holding member that holds the oscillator and
A flexible substrate fixed to the piezoelectric element and supplying power to the piezoelectric element,
A friction member that makes frictional contact with the oscillator,
A pressurizing means for pressurizing the vibrator and the friction member, and
With
The vibrator and the friction member move relative to each other,
The flexible substrate includes a first folded portion fixed to the holding member in the direction of the relative movement, and a second folded portion whose folding position changes with the relative movement.
A vibration wave motor, wherein the pressurizing center of the pressurizing means is arranged so as to overlap the position change range of the second folded-back portion in the direction of the relative movement. 圧電素子と振動板とからなる振動子と、
該振動子を保持する保持部材と、
前記圧電素子に固定され、前記圧電素子に給電するフレキシブル基板と、
該振動子と摩擦接触する摩擦部材と、
前記振動子と該摩擦部材とを加圧する加圧手段と、
該加圧手段による加圧力を受ける転動手段と、
該転動手段を備え前記振動子と前記摩擦部材の相対移動を案内する案内手段と、
を備え、
前記フレキシブル基板は、前記相対移動の方向において、前記保持部材に固定される第１の折り返し部と、前記相対移動に伴い折り返し位置が変化する第２の折り返し部と、を備え、
前記案内手段の案内中心は、前記相対移動の方向において前記第２の折り返し部の位置変化範囲と重なるように配置されることを特徴とする、振動波モータ。 An oscillator consisting of a piezoelectric element and a diaphragm,
A holding member that holds the oscillator and
A flexible substrate fixed to the piezoelectric element and supplying power to the piezoelectric element,
A friction member that makes frictional contact with the oscillator,
A pressurizing means for pressurizing the vibrator and the friction member, and
A rolling means that receives pressure from the pressurizing means and
A guiding means provided with the rolling means and guiding the relative movement of the vibrator and the friction member, and
With
The flexible substrate includes a first folded portion fixed to the holding member in the direction of the relative movement, and a second folded portion whose folding position changes with the relative movement.
A vibration wave motor, characterized in that the guide center of the guide means is arranged so as to overlap the position change range of the second folded portion in the direction of the relative movement. 前記第１の折り返し部は、前記相対移動の方向において前記加圧中心と重ならないように配置されることを特徴とする、請求項１に記載の振動波モータ。 The vibration wave motor according to claim 1, wherein the first folded portion is arranged so as not to overlap the pressurizing center in the direction of the relative movement. 前記第１の折り返し部は、前記相対移動の方向において前記案内中心と重ならないように配置されることを特徴とする、請求項２に記載の振動波モータ。 The vibration wave motor according to claim 2, wherein the first folded portion is arranged so as not to overlap the guide center in the direction of the relative movement. 前記第１の折り返し部は、前記フレキシブル基板の面内で前記相対移動の方向に折り返すか、面外への折り畳み形状であることを特徴とする、請求項１乃至４のいずれか１項に記載の振動波モータ。 The first aspect of any one of claims 1 to 4, wherein the first folded portion is folded in the direction of the relative movement in the plane of the flexible substrate or has a folded shape outside the plane. Vibration wave motor. 前記第２の折り返し部は、略Ｒ形状で前記フレキシブル基板の面外へと屈曲変形することを特徴とする、請求項１乃至５のいずれか１項に記載の振動波モータ。 The vibration wave motor according to any one of claims 1 to 5, wherein the second folded portion has a substantially R shape and is bent and deformed out of the plane of the flexible substrate. 前記振動波モータは、前記振動子が超音波領域の周波数の振動をする超音波モータであることを特徴とする、請求項１乃至６のいずれか１項に記載の振動波モータ。 The vibration wave motor according to any one of claims 1 to 6, wherein the vibration wave motor is an ultrasonic motor in which the vibrator vibrates at a frequency in the ultrasonic region. 請求項１乃至７のいずれか１項に記載の振動波モータと、前記振動波モータにより駆動される光学レンズと、を有することを特徴とする、鏡筒駆動装置。 A lens barrel driving device comprising the vibration wave motor according to any one of claims 1 to 7 and an optical lens driven by the vibration wave motor.
JP2019027136A 2019-02-19 2019-02-19 Vibration wave motor, and lens barrel driving apparatus having vibration wave motor Pending JP2020137237A (en)

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