JP2020136507A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP2020136507A JP2020136507A JP2019028481A JP2019028481A JP2020136507A JP 2020136507 A JP2020136507 A JP 2020136507A JP 2019028481 A JP2019028481 A JP 2019028481A JP 2019028481 A JP2019028481 A JP 2019028481A JP 2020136507 A JP2020136507 A JP 2020136507A
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Abstract
Description
図1〜図4に基づき、第1実施形態にかかる半導体装置A10について説明する。半導体装置A10は、基板1、絶縁層15、配線部20、柱状体25、電極パッド26、半導体素子31、接合層32、封止樹脂4、第1金属層51、および、第2金属層52を備えている。
図20および図21に基づき、第2実施形態にかかる半導体装置A20について説明する。これらの図において、上記した半導体装置A10と同一または類似の要素には同一の符号を付して、重複する説明を省略する。
図29および図30に基づき、第3実施形態にかかる半導体装置A30について説明する。これらの図において、上記した半導体装置A10,A20と同一または類似の要素には同一の符号を付して、重複する説明を省略する。
図37〜図39に基づき、第4実施形態にかかる半導体装置A40について説明する。これらの図において、上記した半導体装置A10,A20,A30と同一または類似の要素には同一の符号を付して、重複する説明を省略する。
図46に基づき、第5実施形態にかかる半導体装置A50について説明する。この図において、上記した半導体装置A10,A20,A30,A40と同一または類似の要素には同一の符号を付して、重複する説明を省略する。
[付記1]
厚さ方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子と、
前記半導体素子に導通する配線部と、
前記配線部に導通する電極パッドと、
前記半導体素子の一部を覆う封止樹脂と、
前記素子裏面に接し、前記封止樹脂から露出する第1金属層と、
を備えており、
前記半導体素子は、前記厚さ方向から見て、前記第1金属層に重なる、半導体装置。
[付記2]
前記第1金属層と前記電極パッドとは、同じ素材からなる、付記1に記載の半導体装置。
[付記3]
前記素材は、互いに積層されたNi層、Pd層、および、Au層である、付記2に記載の半導体装置。
[付記4]
前記電極パッドと前記第1金属層とは絶縁されている、付記2または付記3に記載の半導体装置。
[付記5]
前記配線部から絶縁された第2金属層をさらに備えており、
前記第2金属層は、前記厚さ方向において前記半導体素子よりも前記素子主面が向く方向に配置され、かつ、少なくとも一部が前記厚さ方向から見て前記半導体素子と重なる、付記1ないし付記4のいずれかに記載の半導体装置。
[付記6]
前記第2金属層および前記配線部はともに、互いに積層された下地層およびめっき層から構成される、付記5に記載の半導体装置。
[付記7]
前記下地層は、互いに積層されたTi層およびCu層から構成され、
前記めっき層は、Cuから構成される、付記6に記載の半導体装置。
[付記8]
半導体材料から構成され、前記配線部が配置された基板と、
前記基板と前記配線部とを絶縁するための絶縁層と、をさらに備えている、付記1ないし付記7のいずれかに記載の半導体装置。
[付記9]
半導体材料から構成され、前記配線部が配置された基板と、
前記基板と前記配線部とを絶縁するための絶縁膜と、をさらに備えており、
前記基板は、前記半導体素子を搭載する搭載面を有し、
前記搭載面は、前記絶縁膜が形成された被覆領域と前記絶縁膜から露出する露出領域とを含んでおり、
前記第2金属層は、前記露出領域の少なくとも一部において前記搭載面に接する、付記5ないし付記7のいずれかに記載の半導体装置。
[付記10]
前記半導体材料は、Siである、付記8または付記9に記載の半導体装置。
[付記11]
導電性を有し、前記配線部から前記厚さ方向に突き出た柱状体をさらに備えており、
前記電極パッドは、前記柱状体に接する、付記1ないし付記10のいずれかに記載の半導体装置。
[付記12]
前記柱状体は、前記素子裏面と同じ方向を向き、前記封止樹脂から露出した頂面を有し、
前記封止樹脂は、前記素子裏面と同じ方向を向く樹脂主面を有し、
前記頂面および前記樹脂主面はともに、前記素子裏面と面一である、付記11に記載の半導体装置。
[付記13]
前記頂面は、前記電極パッドに覆われており、
前記電極パッドと前記第1金属層とは、前記厚さ方向において一致する、付記12に記載の半導体装置。
[付記14]
前記封止樹脂は、第1樹脂側面および第2樹脂側面を有しており、
前記第1樹脂側面は、前記樹脂主面に繋がり、
前記第2樹脂側面は、前記厚さ方向に見て、前記第1樹脂側面よりも、前記封止樹脂の内側に配置されている、付記12に記載の半導体装置。
[付記15]
前記電極パッドは、前記樹脂主面および前記頂面に跨って形成された第1電極部と、前記第1電極部に繋がり、かつ、前記第1樹脂側面を覆う第2電極部と、を含んでいる、付記14に記載の半導体装置。
[付記16]
前記配線部に導通し、前記半導体素子を接合する接合層を、さらに備える、付記1ないし付記15のいずれかに記載の半導体装置。
[付記17]
半導体材料から構成された基板を用意する工程と、
基板上に配置された配線部を形成する配線部形成工程と、
厚さ方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子を、前記素子主面が前記基板に対向する姿勢で、前記配線部に導通させる半導体素子搭載工程と、
前記半導体素子を覆う封止樹脂を形成する封止樹脂形成工程と、
前記封止樹脂の一部を除去し、前記素子裏面を露出させる半導体素子露出工程と、
前記封止樹脂から露出した前記素子裏面に接する第1金属層を形成する第1金属層形成工程と、
前記配線部に導通する電極パッドを形成する電極パッド形成工程と、を有する半導体装置の製造方法。
[付記18]
前記第1金属層および前記電極パッドの形成はともに、無電解めっきによる、付記17に記載の半導体装置の製造方法。
[付記19]
前記第1金属層形成工程と前記電極パッド形成工程とは、一括して行う、付記18に記載の半導体装置の製造方法。
[付記20]
前記厚さ方向において前記半導体素子と前記基板との間に配置された第2金属層を形成する第2金属層形成工程をさらに有する、付記17ないし付記19のいずれかに記載の半導体装置の製造方法。
[付記21]
前記第2金属層形成工程と前記配線部形成工程とはともに、スパッタリング法により下地層を形成する工程と、電解めっきによりめっき層を形成する工程とを含む、
請求項20に記載の半導体装置の製造方法。
[付記22]
前記第2金属層形成工程と前記配線部形成工程とは、一括して行う、付記21に記載の半導体装置の製造方法。
[付記23]
導電性を有し、かつ、前記配線部から前記厚さ方向に突き出た柱状体を形成する柱状体形成工程をさらに有しており、
前記柱状体は、前記素子裏面と同じ方向を向き、かつ、前記封止樹脂から露出する頂面を有しており、
前記電極パッド形成工程において、前記頂面を覆う前記電極パッドを形成する、付記17ないし付記22のいずれかに記載の半導体装置の製造方法。
1 :基板
11 :基板主面
111 :被覆領域
112 :露出領域
12 :基板裏面
13 :基板側面
14 :凹部
141 :底面
142 :連絡面
15 :絶縁層
16,16’:貫通孔
17 :切り欠き部
171 :側壁面
172 :底面
20 :配線部
201 :下地層
202 :めっき層
21 :主面配線
22 :連絡面配線
23 :底面配線
24 :貫通配線
241 :露出面
25 :柱状体
251 :頂面
252 :側面
26 :電極パッド
26a :第1電極部
26b :第2電極部
261 :Ni層
262 :Pd層
263 :Au層
27 :金属膜
31 :半導体素子
31a :電極バンプ
311 :素子主面
312 :素子裏面
313 :素子側面
32,32’:接合層
33 :半導体素子
4 :封止樹脂
41 :樹脂主面
43 :樹脂側面
431 :第1樹脂側面
432 :第2樹脂側面
45 :充填部
51 :第1金属層
511 :Ni層
512 :Pd層
513 :Au層
52 :第2金属層
521 :下地層
522 :めっき層
6 :樹脂膜
801,802,803,804,806,807:レジスト層
801a,803a,804a:開口部
805 :マスク層
81 :基材
811 :表面
811a :領域
811b :領域
812 :裏面
813 :凹部
814 :凹部
814a :底面
814b :連絡面
815 :絶縁層
815a :開口
816 :貫通孔
817 :凹部
817a :側壁面
817b :底面
820 :配線部
820a :下地層
820b :めっき層
820z :下地層
824 :貫通配線
824a :露出面
825 :柱状体
825a :露出面
826 :電極パッド
826d :下地層
826e :めっき層
831 :半導体素子
831a :素子主面
831b :素子裏面
832 :接合層
839 :電極バンプ
84 :封止樹脂
84a :表面
841 :樹脂主面
844 :凹部
851 :第1金属層
851d :下地層
851e :めっき層
852 :第2金属層
852a :下地層
852b :めっき層
86 :樹脂膜
890 :下地層
Claims (23)
- 厚さ方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子と、
前記半導体素子に導通する配線部と、
前記配線部に導通する電極パッドと、
前記半導体素子の一部を覆う封止樹脂と、
前記素子裏面に接し、前記封止樹脂から露出する第1金属層と、
を備えており、
前記半導体素子は、前記厚さ方向から見て、前記第1金属層に重なる、
ことを特徴とする半導体装置。 - 前記第1金属層と前記電極パッドとは、同じ素材からなる、
請求項1に記載の半導体装置。 - 前記素材は、互いに積層されたNi層、Pd層、および、Au層である、
請求項2に記載の半導体装置。 - 前記電極パッドと前記第1金属層とは絶縁されている、
請求項2または請求項3に記載の半導体装置。 - 前記配線部から絶縁された第2金属層をさらに備えており、
前記第2金属層は、前記厚さ方向において前記半導体素子よりも前記素子主面が向く方向に配置され、かつ、少なくとも一部が前記厚さ方向から見て前記半導体素子と重なる、
請求項1ないし請求項4のいずれか一項に記載の半導体装置。 - 前記第2金属層および前記配線部はともに、互いに積層された下地層およびめっき層から構成される、
請求項5に記載の半導体装置。 - 前記下地層は、互いに積層されたTi層およびCu層から構成され、
前記めっき層は、Cuから構成される、
請求項6に記載の半導体装置。 - 半導体材料から構成され、前記配線部が配置された基板と、
前記基板と前記配線部とを絶縁するための絶縁層と、をさらに備えている、
請求項1ないし請求項7のいずれか一項に記載の半導体装置。 - 半導体材料から構成され、前記配線部が配置された基板と、
前記基板と前記配線部とを絶縁するための絶縁膜と、をさらに備えており、
前記基板は、前記半導体素子を搭載する搭載面を有し、
前記搭載面は、前記絶縁膜が形成された被覆領域と前記絶縁膜から露出する露出領域とを含んでおり、
前記第2金属層は、前記露出領域の少なくとも一部において前記搭載面に接する、
請求項5ないし請求項7のいずれか一項に記載の半導体装置。 - 前記半導体材料は、Siである、
請求項8または請求項9に記載の半導体装置。 - 導電性を有し、前記配線部から前記厚さ方向に突き出た柱状体をさらに備えており、
前記電極パッドは、前記柱状体に接する、
請求項1ないし請求項10のいずれか一項に記載の半導体装置。 - 前記柱状体は、前記素子裏面と同じ方向を向き、前記封止樹脂から露出した頂面を有し、
前記封止樹脂は、前記素子裏面と同じ方向を向く樹脂主面を有し、
前記頂面および前記樹脂主面はともに、前記素子裏面と面一である、
請求項11に記載の半導体装置。 - 前記頂面は、前記電極パッドに覆われており、
前記電極パッドと前記第1金属層とは、前記厚さ方向において一致する、
請求項12に記載の半導体装置。 - 前記封止樹脂は、第1樹脂側面および第2樹脂側面を有しており、
前記第1樹脂側面は、前記樹脂主面に繋がり、
前記第2樹脂側面は、前記厚さ方向に見て、前記第1樹脂側面よりも、前記封止樹脂の内側に配置されている、
請求項12に記載の半導体装置。 - 前記電極パッドは、前記樹脂主面および前記頂面に跨って形成された第1電極部と、前記第1電極部に繋がり、かつ、前記第1樹脂側面を覆う第2電極部と、を含んでいる、
請求項14に記載の半導体装置。 - 前記配線部に導通し、前記半導体素子を接合する接合層を、さらに備える、
請求項1ないし請求項15のいずれか一項に記載の半導体装置。 - 半導体材料から構成された基板を用意する工程と、
基板上に配置された配線部を形成する配線部形成工程と、
厚さ方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子を、前記素子主面が前記基板に対向する姿勢で、前記配線部に導通させる半導体素子搭載工程と、
前記半導体素子を覆う封止樹脂を形成する封止樹脂形成工程と、
前記封止樹脂の一部を除去し、前記素子裏面を露出させる半導体素子露出工程と、
前記封止樹脂から露出した前記素子裏面に接する第1金属層を形成する第1金属層形成工程と、
前記配線部に導通する電極パッドを形成する電極パッド形成工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記第1金属層および前記電極パッドの形成はともに、無電解めっきによる、
請求項17に記載の半導体装置の製造方法。 - 前記第1金属層形成工程と前記電極パッド形成工程とは、一括して行う、
請求項18に記載の半導体装置の製造方法。 - 前記厚さ方向において前記半導体素子と前記基板との間に配置された第2金属層を形成する第2金属層形成工程をさらに有する、
請求項17ないし請求項19のいずれか一項に記載の半導体装置の製造方法。 - 前記第2金属層形成工程と前記配線部形成工程とはともに、スパッタリング法により下地層を形成する工程と、電解めっきによりめっき層を形成する工程とを含む、
請求項20に記載の半導体装置の製造方法。 - 前記第2金属層形成工程と前記配線部形成工程とは、一括して行う、
請求項21に記載の半導体装置の製造方法。 - 導電性を有し、かつ、前記配線部から前記厚さ方向に突き出た柱状体を形成する柱状体形成工程をさらに有しており、
前記柱状体は、前記素子裏面と同じ方向を向き、かつ、前記封止樹脂から露出する頂面を有しており、
前記電極パッド形成工程において、前記頂面を覆う前記電極パッドを形成する、
請求項17ないし請求項22のいずれか一項に記載の半導体装置の製造方法。
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