JP2019168380A - Outside diameter measuring instrument, method for adjusting temperature characteristic thereof, and grinding device - Google Patents
Outside diameter measuring instrument, method for adjusting temperature characteristic thereof, and grinding device Download PDFInfo
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本発明は、例えば円柱状のワークの外径等を高精度に測定する接触式の外径測定器及びその温度特性を調整する方法に関し、特に工作機械、研削装置等に外径測定器を取り付けて自動測定するのに好適である。 The present invention relates to a contact-type outer diameter measuring instrument that measures, for example, the outer diameter of a cylindrical workpiece with high accuracy and a method for adjusting the temperature characteristics thereof, and in particular, the outer diameter measuring instrument is attached to a machine tool, a grinding device, etc. It is suitable for automatic measurement.
従来、製品の多様化、商品寿命の短期化といった市場の流れに対応する生産設備の手段として加工機のフレキシブル化、自動化については、小中量、大量生産に係らず、加工品質の維持、監視など、インプロセス計測が必要となる。インプロセス計測は、加工現場での環境下で信頼性の高い、高精度かつ高能率な測定が必要とされる。また、切粉、切削液、温度変動、機械振動などの影響を十分回避するために、接触子をマスタ、ワークに当接させる接触式の外径測定装置が広く用いられている。 Conventionally, as a means of production equipment that responds to market flows such as diversification of products and shortening of product life, flexible and automated processing machines are used to maintain and monitor processing quality regardless of small to medium volume and mass production. In-process measurement is required. In-process measurement requires highly reliable, highly accurate and highly efficient measurement under the environment at the processing site. Further, in order to sufficiently avoid the influence of chips, cutting fluid, temperature fluctuation, mechanical vibration, etc., a contact-type outer diameter measuring device in which a contact is brought into contact with a master and a workpiece is widely used.
例えば自動車のエンジン等に用いられるクランクシャフト研削盤等のクランクシャフト加工機において、ジャーナルの軸線を中心に回転するクランクピンの外径寸法をクランクピンの研削加工中に外径測定用ゲージで測定することでインプロセス計測が行われている。外径測定器としては、Ｖ字に広がったブロックとブロックの間にある接触子との三点でクランクピンの外周に接触してその半径を測定することが知られ、例えば、特許文献１に記載されている。 For example, in a crankshaft machine such as a crankshaft grinder used in an engine of an automobile, the outer diameter of the crankpin that rotates about the axis of the journal is measured with an outer diameter measuring gauge during the grinding of the crankpin. In-process measurement is performed. As an outer diameter measuring device, it is known to contact the outer periphery of a crankpin at three points of a V-shaped block and a contact between the blocks, and measure the radius thereof. Are listed.
また、測定装置の組み立て誤差に基づく測定変動の恐れやワークの加工中にびびり等の振動が発生しても、ワークをより確実に保持して正確なワーク径を得るため、ワークに当接する接触子を先端部に有するデジタルセンサと、デジタルセンサを収容する貫通穴が中央部に形成され長手方向に延びるＶベースと、を設けること、センサとしては、その先端部が測定対象に当接し、測定対象を押圧するように付勢され、測定対象のサイズの変動を先端部の移動距離として検出するリニアセンサとすることが知られ、特許文献２に記載されている。 In addition, even if there is a risk of measurement fluctuations due to assembly errors of the measuring device or vibration such as chatter during machining of the workpiece, contact with the workpiece is achieved in order to hold the workpiece more reliably and obtain an accurate workpiece diameter. Providing a digital sensor having a child at the tip and a V base having a through hole formed in the central portion and extending in the longitudinal direction to accommodate the digital sensor. It is known to be a linear sensor that is urged to press an object and detects a change in the size of the object to be measured as the movement distance of the tip, and is described in Patent Document 2.
上記特許文献１、２に記載の外径測定用ゲージは、クランクピンの外径寸法をクランクピンの研削加工中に測定するので、機械振動ばかりでなく、加工現場の環境下での大きな温度変動、加工中のワークからの伝熱によって精度への影響を大きく受ける。したがって、クランクピンの測定のように加工中のワークを測定する場合、特に、外径測定器の温度特性を調整する必要がある。また、外径測定器の温度特性は、同じ形状の異なる熱膨張係数の部品を組み付けて調整を行う方法をとっている。 The outer diameter measuring gauges described in Patent Documents 1 and 2 measure the outer diameter of the crank pin during grinding of the crank pin, so that not only mechanical vibration but also large temperature fluctuations in the environment of the processing site The accuracy is greatly affected by heat transfer from the workpiece being processed. Therefore, when measuring a workpiece being machined, such as measuring a crankpin, it is particularly necessary to adjust the temperature characteristics of the outer diameter measuring instrument. In addition, the temperature characteristics of the outer diameter measuring instrument are adjusted by assembling parts having the same shape and different thermal expansion coefficients.
そのため、温度特性を調整するための部品は、複数の材料で同一形状の部品を事前に複数用意して交換しなければならず、在庫を管理することが困難であった。さらに、複数の材料で同一形状の部品を用意することは少量生産となること、調整時の部品交換の度に工数が掛かること、より、コスト高となっていた。 Therefore, the parts for adjusting the temperature characteristics must be prepared and replaced in advance with a plurality of parts having the same shape made of a plurality of materials, and it is difficult to manage the inventory. Furthermore, preparing parts having the same shape with a plurality of materials requires a small amount of production, and requires more man-hours for each replacement of parts during adjustment, resulting in higher costs.
本発明の目的は、上記従来技術の課題を解決し、少ない種類、理想的には一種類の材料、一つの形状の部品で幅広く外径測定器の温度特性を調整することにある。また、それによって、在庫管理を容易とし、簡単で簡素化した調整、工数の削減、コスト低減を行うことにある。さらに、他の目的としては、加工現場の環境条件、特に温度条件に係らず、高精度で、安定した測定精度、繰り返し精度を確保することにある。 An object of the present invention is to solve the above-mentioned problems of the prior art and to adjust the temperature characteristics of an outer diameter measuring instrument widely with a small number of parts, ideally one kind of material and one shape of parts. In addition, it is to facilitate inventory management, and to perform simple and simplified adjustment, reduction of man-hours, and cost reduction. Another object is to ensure high accuracy, stable measurement accuracy, and repeatability regardless of the environmental conditions of the processing site, particularly temperature conditions.
上記目的を達成する本発明は、ワークの外径を測定する接触式の外径測定器において、一端が前記ワークに当接する接触子を有する先端部とされ、他端は前記接触子の移動距離を検出するセンサ部のリニアスケールに接続されたセンサロッドを有し、前記センサ部は、前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、前記基板の少なくとも２つの基板取付穴を介して前記基板が固定される取付板と、前記取付板に対して、より低熱膨張材とされたセンサ部本体と、前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数のねじと、を備えたものである。 The present invention that achieves the above object is a contact-type outer diameter measuring instrument for measuring the outer diameter of a workpiece, wherein one end is a tip portion having a contact that abuts against the workpiece, and the other end is a moving distance of the contact. A sensor rod connected to a linear scale of the sensor unit for detecting the sensor, and the sensor unit is provided with a substrate provided with a sensor for detecting the moving distance of the contact by detecting the moving distance of the linear scale; A mounting plate to which the substrate is fixed through at least two substrate mounting holes of the substrate, a sensor unit body that is a lower thermal expansion material with respect to the mounting plate, and a second plate provided on the mounting plate. And a plurality of screws for fixing the mounting plate to the sensor section main body through each of the mounting holes at the locations.
また、上記のものにおいて、前記取付穴は左右に複数ずつ設けられ、いずれか二箇所を選択して前記ねじにより前記取付板を前記センサ部本体へ固定することにより、前記取付板の拘束される間隔を可変可能としたことが望ましい。 Also, in the above, a plurality of the mounting holes are provided on the left and right sides, and the mounting plate is restrained by selecting any two places and fixing the mounting plate to the sensor unit body with the screws. It is desirable to make the interval variable.
さらに、前記取付板は、前記二箇所の取付穴の間の中央部に左右対称のＶ字状の切込みが設けられていることが望ましい。 Furthermore, it is desirable that the mounting plate is provided with a symmetrical V-shaped cut at the center between the two mounting holes.
さらに、前記被測定物を挿入して前記被測定物の姿勢を規制するガイドを備えたことが望ましい。 Furthermore, it is desirable to provide a guide for inserting the device under test and regulating the posture of the device under test.
さらに、前記取付板には、前記中央部で前記切込みに対して前記センサ部側の位置に前記センサ部方向へ膨らんだ円弧が設けられ、該円弧の左右端は、前記二箇所の取付穴の中心を結ぶ直線からの最短距離が前記中央部に比べて小さくなっていることが望ましい。 Furthermore, the mounting plate is provided with an arc that bulges in the direction of the sensor unit at a position on the sensor unit side with respect to the notch at the center, and the left and right ends of the arc are the two mounting holes. It is desirable that the shortest distance from the straight line connecting the centers is smaller than that of the central portion.
さらに、前記取付板は、前記センサ部方向において前記切込みと前記円弧との間に貫通穴を設けたことが望ましい。 Furthermore, it is desirable that the mounting plate is provided with a through hole between the cut and the arc in the sensor portion direction.
さらに、前記センサは前記基板の中央部で少なくとも２つの前記基板取付穴とは左右方向で略一直線上に位置することが望ましい。 Furthermore, it is preferable that the sensor is positioned in a substantially straight line in the left-right direction with respect to at least two of the board mounting holes at the center of the board.
さらに、上記のものにおいて、前記取付板は、前記二箇所の取付穴の間に設けられた円弧状で細いリブＪと、前記基板取付穴が設けられたリブＬと、前記リブＪと前記リブＬとを繋げるＸ字状のリブＫと、を備えたことが望ましい。 Further, in the above, the mounting plate includes an arc-shaped thin rib J provided between the two mounting holes, a rib L provided with the board mounting hole, the rib J and the rib. It is desirable to have an X-shaped rib K connecting L.
また、本発明は、一端がワークに当接する接触子を有する先端部とされ、他端は前記接触子の移動距離を検出するセンサ部のリニアスケールに接続されたセンサロッドを有し、前記ワークの外径を測定する接触式の外径測定器の温度特性を調整する方法であって、前記センサ部は、前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、前記基板の基板取付穴を介して前記基板が固定される取付板と、前記取付板に対して、より低熱膨張材とされたセンサ部本体と、前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数ねじと、を有し、前記取付穴は左右に複数ずつ設けられ、いずれか二箇所を選択して前記ねじにより前記取付板を前記センサ部本体へ固定して前記取付板の拘束される間隔を可変することを特徴とする外径測定器の温度特性を調整することを特徴とする。 In the present invention, one end is a tip portion having a contact that abuts against the workpiece, and the other end has a sensor rod connected to a linear scale of a sensor unit that detects a moving distance of the contact. A method for adjusting a temperature characteristic of a contact-type outer diameter measuring instrument for measuring an outer diameter of the contact, wherein the sensor unit detects a moving distance of the contact by detecting a moving distance of the linear scale Provided on the mounting plate, a mounting plate to which the substrate is fixed via a substrate mounting hole of the substrate, a sensor unit body that is a lower thermal expansion material than the mounting plate, and the mounting plate A plurality of screws for fixing the mounting plate to the sensor body through each of the two mounting holes provided, and a plurality of the mounting holes are provided on the left and right, The mounting plate is attached by the screw. Serial fixed to the sensor body and adjusting the temperature characteristics of the outer diameter measuring device, characterized in that variable constrained by spacing the mounting plate.
さらに、内燃機関のクランク軸が有するクランクピンであるワークを回転させる駆動機構と、回転運動し回転軸に直角な方向に進退自在な砥石と、前記砥石に当接して配置される前記ワークに接触子が当接する位置に配置される外径測定器と、一端側を前記砥石の駆動機構に回動可能に固定されたアームと、を有し、前記外径測定器が前記ワークの位置に追随可能になるように前記アームが回動可能である研削装置において、前記外径測定器は、一端が前記ワークに当接する接触子を有する先端部とされ、他端は前記接触子の移動距離を検出するセンサ部のリニアスケールに接続されたセンサロッドを有し、前記センサ部は、前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、前記基板の基板取付穴を介して前記基板が固定される取付板と、前記取付板に対して、より低熱膨張材とされたセンサ部本体と、前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数のねじと、を備えたものである。 Furthermore, a drive mechanism that rotates a workpiece, which is a crank pin included in the crankshaft of the internal combustion engine, a grindstone that rotates and moves in a direction perpendicular to the rotation shaft, and a contact with the workpiece that is disposed in contact with the grindstone An outer diameter measuring device disposed at a position where the child abuts, and an arm that is rotatably fixed at one end side to the driving mechanism of the grindstone, and the outer diameter measuring device follows the position of the workpiece. In the grinding apparatus in which the arm can be rotated so that it is possible, the outer diameter measuring instrument has a tip portion having a contact that abuts against the workpiece at one end, and the moving distance of the contact at the other end. A sensor rod connected to the linear scale of the sensor unit to be detected, and the sensor unit is provided with a substrate provided with a sensor for detecting the moving distance of the contact by detecting the moving distance of the linear scale; Above A mounting plate to which the substrate is fixed via a substrate mounting hole of the plate, a sensor unit body that is a lower thermal expansion material with respect to the mounting plate, and two mounting holes provided in the mounting plate And a plurality of screws for fixing the mounting plate to the sensor section main body via each of them.
本発明によれば、先端部に接触子を有するセンサロッドで接触子の移動距離を検出する外径測定器において、センサが設けられた基板の取付板は、取付板の二箇所の取付穴を介して、取付板より低熱膨張材とされたセンサ部本体へ固定されるので、温度上昇した際に、取付板の左右方向の歪を長手方向に変換することができる。そして、少ない種類の形状である取付板によって幅広く外径測定器の温度特性を調整することができる。 According to the present invention, in the outer diameter measuring device that detects the moving distance of the contact with a sensor rod having a contact at the tip, the mounting plate of the board provided with the sensor has two mounting holes on the mounting plate. Therefore, when the temperature rises, the strain in the left-right direction of the mounting plate can be converted into the longitudinal direction. And the temperature characteristic of an outer diameter measuring device can be widely adjusted with the mounting plate which is a few kinds of shapes.
したがって、在庫管理を容易とし、簡単で簡素化した調整、工数の削減を可能とし、加工現場の環境条件、特に温度条件に係らず、高精度で、安定した測定精度、繰り返し精度を確保できる。 Therefore, inventory management is facilitated, simple and simplified adjustments and man-hours can be reduced, and highly accurate and stable measurement accuracy and repeatability can be ensured regardless of the environmental conditions of the processing site, particularly temperature conditions.
以下、本発明の実施形態について図面を参照して詳細に説明する。
図１及び図２は、本発明の一実施例に係る外径測定器１０及びそれを備える研削装置８０の概略図であり、図１は研削装置８０の正面図、図２は研削装置８０の側面図である。研削対象であるワーク５５は、内燃機関のクランク軸が有するクランクピン５５である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 and 2 are schematic views of an outer diameter measuring instrument 10 and a grinding apparatus 80 including the outer diameter measuring instrument 10 according to an embodiment of the present invention. FIG. 1 is a front view of the grinding apparatus 80, and FIG. It is a side view. The workpiece 55 to be ground is a crankpin 55 included in the crankshaft of the internal combustion engine.
図１において、研削装置８０では、回転運動（図１では反時計回りの回転）する砥石８４が砥石支持部材８３に回転可能に支持されている。なお、砥石８４は図２に示すように、回転駆動機構（モータ）８８により回転駆動される。砥石支持部材８３は、砥石８４の回転軸に直角な方向に進退（Ｂ／Ｆ）可能に設けられた砥石ベース８２に固定されている。 In FIG. 1, in the grinding device 80, a grindstone 84 that rotates (counterclockwise in FIG. 1) is rotatably supported by a grindstone support member 83. The grindstone 84 is rotationally driven by a rotational drive mechanism (motor) 88 as shown in FIG. The grindstone support member 83 is fixed to a grindstone base 82 provided so as to be able to advance and retreat (B / F) in a direction perpendicular to the rotation axis of the grindstone 84.
砥石ベース８２の下面には、間隔を置いてガイドレール８１に係合する直動ガイド８５が設けられている。直動ガイド８５は、基礎に固定されたレール上を滑動する。砥石ベース８２を進退させる直動機構８６が砥石ベース８２上に配置されている。 On the lower surface of the grindstone base 82, a linear motion guide 85 that engages with the guide rail 81 is provided at an interval. The linear motion guide 85 slides on a rail fixed to the foundation. A linear motion mechanism 86 for moving the grinding wheel base 82 back and forth is disposed on the grinding wheel base 82.
砥石支持部材８３の上部には、アーム１２の一端が、回転中心１２ａで回転可能に取り付けられている。アーム１２の他端には、外径測定器１０が回転中心１２ｂで回転可能に取り付けられている。砥石８４にはワークであるクランクピン５５が当接しており、外径測定器１０の先端部はクランクピン５５と砥石８４との当接部とは異なる周方向位置で、クランクピン５５に当接する。砥石８４とクランクピン５５とが安定して当接する。クランクピン５５が旋回運動すると、それに応じて砥石８４が進退（Ｆ／Ｂ）するが、外径測定器１０はクランクピン５５に追従して移動する。 One end of the arm 12 is attached to the upper portion of the grindstone support member 83 so as to be rotatable about the rotation center 12a. An outer diameter measuring instrument 10 is attached to the other end of the arm 12 so as to be rotatable at a rotation center 12b. The grindstone 84 is in contact with a crank pin 55 that is a workpiece, and the tip of the outer diameter measuring instrument 10 is in contact with the crank pin 55 at a circumferential position different from the contact portion between the crank pin 55 and the grindstone 84. . The grindstone 84 and the crank pin 55 are in stable contact. When the crankpin 55 turns, the grindstone 84 advances and retreats (F / B) accordingly, but the outer diameter measuring instrument 10 moves following the crankpin 55.
図２において、紙面の前側にはクランクシャフト５０を駆動するクランクシャフト駆動部が、後側には砥石部がそれぞれ配置されている。クランクシャフト駆動部は、クランクシャフト５０の両端部を回転支持する回転支持部６２を有し、クランクシャフト５０の一方端に取り付けた回転駆動機構（モータ）６４により、クランクシャフト５０は回転駆動される。 In FIG. 2, a crankshaft drive unit for driving the crankshaft 50 is disposed on the front side of the paper surface, and a grindstone unit is disposed on the rear side. The crankshaft drive portion has a rotation support portion 62 that rotatably supports both ends of the crankshaft 50, and the crankshaft 50 is rotationally driven by a rotation drive mechanism (motor) 64 attached to one end of the crankshaft 50. .
クランクシャフト５０の回転を図示しないセンサで検出して、制御装置１００に入力信号９４として入力する。一方、制御装置１００からはモータ６４を制御する制御出力信号９６が指令される。同様に、砥石８４と砥石ベース８２を駆動する直動機構８６から回転信号９３や位置信号９２が制御装置１００に入力され、制御装置１００からそれぞれ指令信号９７，９８が出力される。この時、外径測定器１０からワークであるクランクピン５５の外径が制御装置１００に入力信号９１として入力される。 The rotation of the crankshaft 50 is detected by a sensor (not shown) and input to the control device 100 as an input signal 94. On the other hand, a control output signal 96 for controlling the motor 64 is commanded from the control device 100. Similarly, a rotation signal 93 and a position signal 92 are input to the control device 100 from the linear motion mechanism 86 that drives the grindstone 84 and the grindstone base 82, and command signals 97 and 98 are output from the control device 100, respectively. At this time, the outer diameter of the crank pin 55 that is a workpiece is input from the outer diameter measuring instrument 10 to the control device 100 as the input signal 91.
制御装置１００は、これらの各入力信号９２〜９４に基づいて各駆動装置６４、８８、８６を駆動し、ピン径測定装置１０の入力信号９１に基づいて、研削装置８０がクランクピン５５を所定値まで研削したか否かを判断する。そして、クランクピン５５の外径が所定の許容範囲に入ったら、研削を終了する。 The control device 100 drives the drive devices 64, 88, 86 based on these input signals 92 to 94, and the grinding device 80 determines the crank pin 55 based on the input signal 91 of the pin diameter measuring device 10. Judge whether or not grinding to the value. Then, when the outer diameter of the crankpin 55 is within a predetermined allowable range, the grinding is finished.
図３から図５に、外径測定器１０の詳細を示す。図３は、外径測定器１０の先端部Ｓを一部断面とした平面図、図４は、センサ部Ｇを拡大した平面図、図５は、センサ部Ｇの断面図である。図１に示したように外径測定器１０は、一端側をアーム１２に回転可能に取り付けられた細長い概略矩形で箱状のゲージ本体１０-１と、それに固定されたセンサ部本体１０-２を有している。ゲージ本体１０-１の先端部Ｓには、中央部に外径測定センサであるセンサロッド２０が保持されるように断面矩形状または台形状または円形の穴が貫通したＶベース１９が固定されている。 The details of the outer diameter measuring instrument 10 are shown in FIGS. 3 is a plan view in which the tip portion S of the outer diameter measuring instrument 10 is partially sectioned, FIG. 4 is an enlarged plan view of the sensor unit G, and FIG. 5 is a cross-sectional view of the sensor unit G. As shown in FIG. 1, the outer diameter measuring instrument 10 has an elongated, generally rectangular, box-shaped gauge body 10-1 which is rotatably attached to an arm 12 at one end side, and a sensor section body 10-2 fixed thereto. have. A V base 19 having a rectangular cross section, a trapezoidal shape, or a circular hole is fixed to the distal end S of the gauge body 10-1 so that a sensor rod 20 as an outer diameter measuring sensor is held at the center. Yes.
Ｖベース１９の先端部Ｓに設けられた接触子２１は、測定対象であるワーク５５に当接し、測定対象を押圧するように付勢される。また、センサロッド２０は、先端部Ｓからゲージ本体１０-１を貫通してセンサ部Ｇまで伸びて接続されている。測定対象のサイズの変動は、センサロッド２０の接触子２１の移動距離として捉えられ、ゲージ本体１０-１の他端側に設けられたセンサ部Ｇで検出するタイプである。 The contact 21 provided at the tip S of the V base 19 abuts on the workpiece 55 that is a measurement target and is urged so as to press the measurement target. Further, the sensor rod 20 extends from the distal end portion S through the gauge body 10-1 to the sensor portion G and is connected thereto. The variation in the size of the measurement target is captured as the movement distance of the contact 21 of the sensor rod 20 and is detected by the sensor unit G provided on the other end side of the gauge body 10-1.
Ｖベース１９のワーク５５に当接する側は、矩形断面をＶ字型にカットした形状であり、さらに、研削装置８０に取り付けられた場合に上側になる部分は、砥石８４との干渉を避けるため、上下方向をカットされた形状となっている。Ｖベース１９の中央部を貫通して配置されるセンサロッド２０はセンサ部Ｇでリニアスケール６と接続され、センサ４と共に、リニアセンサを構成する。先端部にルビー等の球で形成された接触子２１を有する。 The side of the V base 19 that comes into contact with the workpiece 55 has a rectangular cross-section cut into a V shape, and the upper portion when attached to the grinding device 80 is for avoiding interference with the grindstone 84. The shape is cut in the vertical direction. The sensor rod 20 disposed through the central portion of the V base 19 is connected to the linear scale 6 at the sensor portion G and constitutes a linear sensor together with the sensor 4. A contact 21 formed of a ball such as ruby is provided at the tip.
Ｖベース１９のＶ字を構成する斜面には、断面が台形状の上側取付板４４と下側取付板４５が取り付けられており、各取付板４４、４５にはワーク５５に点接触するように配置された上側保持部材４１と下側保持部材４２が固定されている。ここで、上側保持部材４１と下側保持部材４２には、ワーク５５を傷つける恐れがないようまた研削加工中変形しないよう、金属製の丸棒または丸チューブを用いている。 An upper mounting plate 44 and a lower mounting plate 45 having a trapezoidal cross section are attached to the slope forming the V-shape of the V base 19, and the mounting plates 44 and 45 are in point contact with the workpiece 55. The arranged upper holding member 41 and lower holding member 42 are fixed. Here, a metal round bar or a round tube is used for the upper holding member 41 and the lower holding member 42 so as not to damage the work 55 and to prevent deformation during grinding.
センサ部Ｇでは、センサ部本体１０-２に取付板１が取付穴２を介して、ねじ５で固定される。取付穴２は複数、図４で左右に三箇所ずつ取付板１の先端部Ｓ側に設けられ、固定はそのいずれか二箇所で行われる。いずれか二箇所を選択することにより、取付板１の固定される間隔を可変することができる。 In the sensor unit G, the mounting plate 1 is fixed to the sensor unit main body 10-2 with the screws 5 through the mounting holes 2. A plurality of mounting holes 2 are provided on the side of the tip end S of the mounting plate 1 at three positions on the left and right in FIG. 4, and fixing is performed at any two of them. By selecting any two places, the interval at which the mounting plate 1 is fixed can be varied.
基板３の中央部にはセンサ４が設けられ、基板３は取付板１の少なくとも２つの基板取付穴７を介して例えばネジなどで固定される。センサロッド２０は、一端にワークに当接させるための接触子２１を有し、他端にセンサ部Ｇ内に収納されるリニアスケール６が接続されている。リニアスケール６は、センサロッド２０の移動と共に移動する。リニアスケール６には、例えば白黒の細かいパターンが描かれ、センサ４はリニアスケール６のパターンへ発光して受光し、その移動量を検出する。 A sensor 4 is provided at the center of the substrate 3, and the substrate 3 is fixed by, for example, screws or the like through at least two substrate attachment holes 7 of the attachment plate 1. The sensor rod 20 has a contact 21 for contacting a workpiece at one end, and a linear scale 6 housed in the sensor unit G is connected to the other end. The linear scale 6 moves with the movement of the sensor rod 20. For example, a black and white fine pattern is drawn on the linear scale 6, and the sensor 4 emits light to the pattern of the linear scale 6, and detects the amount of movement.
図６は外径測定器１０に熱が加わったときの実施形態１による取付板１の変位を説明する図である。取付板１の材質はステンレスであり、センサ部本体１０-２の材質は取付板１に対して、より低熱膨張材であるＮｉ系合金を用いる。熱膨張率の大きい取付板１が低熱膨張材であるセンサ部本体１０-２に二箇所、ねじ５で拘束される。 FIG. 6 is a diagram for explaining the displacement of the mounting plate 1 according to the first embodiment when heat is applied to the outer diameter measuring instrument 10. The mounting plate 1 is made of stainless steel, and the sensor body 10-2 is made of a Ni-based alloy which is a lower thermal expansion material than the mounting plate 1. The mounting plate 1 having a large coefficient of thermal expansion is restrained by two screws 5 at the sensor unit main body 10-2 which is a low thermal expansion material.
したがって、取付板１はポアソン効果によって、拘束された部分の伸び（左右方向Ｂの歪）が拘束されていない方向（長手方向Ａ）への変形（歪み）に変換される。つまり、拘束した部分の伸び量に応じて拘束されていない方向への伸び量を変えることができる。 Therefore, the mounting plate 1 is converted by the Poisson effect into the deformation (distortion) in the direction (longitudinal direction A) in which the elongation of the constrained portion (distortion in the left-right direction B) is not constrained. That is, the amount of elongation in the unconstrained direction can be changed according to the amount of elongation of the constrained portion.
図６の（ａ）では、左右にそれぞれ三箇所に設けられた取付穴２のうち一番外側の位置で取付板１がセンサ部本体１０-２へ固定されている。（ｂ）では一番内側の位置で取付板１が固定される。したがって、（ａ）の方が矢印方向の伸び量が（ｂ）よりも大きくなる。 In FIG. 6A, the mounting plate 1 is fixed to the sensor unit main body 10-2 at the outermost position among the mounting holes 2 provided at three positions on the left and right. In (b), the mounting plate 1 is fixed at the innermost position. Therefore, (a) has a larger amount of elongation in the direction of the arrow than (b).
同じ温度上昇であれば、基板取付穴７の位置は（ａ）の方が図６で長手方向Ａへ大きく移動することになる。少なくとも２つの基板取付穴７には基板３が取り付けられ、センサ４は基板３の中央部で基板取付穴７とは左右方向で略一直線上に位置するので、センサ４の位置がモーメントを受けて回転せずに長手方向Ａに移動することとなる。したがって、センサ４による検出誤差が少なくなり、温度上昇が有っても高精度化を図ることができる。 If the temperature rises the same, the position of the board mounting hole 7 will be greatly moved in the longitudinal direction A in FIG. The substrate 3 is mounted in at least two substrate mounting holes 7, and the sensor 4 is positioned in a substantially straight line with the substrate mounting hole 7 at the center of the substrate 3 in the left-right direction. It will move in the longitudinal direction A without rotating. Therefore, the detection error by the sensor 4 is reduced, and high accuracy can be achieved even if the temperature rises.
また、取付板１、基板３は、図４に示すように取り付けられているので、図６の長手方向Ａの伸び量は、センサ４がリニアスケール６に対して図３、４、５で矢印Ａの方向へ移動したこととなる。外径測定器１０の環境条件として温度上昇が有った場合、センサロッド２０の矢印Ａ方向への、伸び量、移動量が大きくなり、ワーク５５の径が大きく測定される。それに対して、センサ４がリニアスケール６に対して図３、４、５で矢印Ａの方向へ移動することは、この温度上昇によるセンサロッド２０（図３）の伸び量、移動量を補償することになる。 Further, since the mounting plate 1 and the substrate 3 are mounted as shown in FIG. 4, the extension amount in the longitudinal direction A of FIG. It has moved in the direction of A. When there is a temperature rise as an environmental condition of the outer diameter measuring instrument 10, the amount of elongation and movement of the sensor rod 20 in the direction of arrow A increases, and the diameter of the workpiece 55 is measured to be large. On the other hand, the movement of the sensor 4 in the direction of the arrow A in FIGS. 3, 4 and 5 with respect to the linear scale 6 compensates for the amount of extension and movement of the sensor rod 20 (FIG. 3) due to this temperature rise. It will be.
しかし、この補償量は加工現場の環境下が異なること、外径測定器１０自体の特性などで外径測定器１０の温度特性として調整する必要がある。これに対して、図６（ａ）（ｂ）に示すように取付板１のセンサ部本体１０-２への固定位置を取付穴２の位置を変えることにより、外径測定器１０の温度特性として調整することができる。したがって、取付板１として、一種類の材料、一つの形状の部品で幅広く外径測定器の温度特性を調整でき、在庫管理を容易とし、簡単で簡素化した調整、工数の削減を行いコスト低減となる。 However, this compensation amount needs to be adjusted as the temperature characteristic of the outer diameter measuring instrument 10 due to the fact that the environment at the processing site is different and the characteristics of the outer diameter measuring instrument 10 itself. On the other hand, as shown in FIGS. 6A and 6B, the temperature characteristics of the outer diameter measuring instrument 10 are changed by changing the position of the mounting hole 2 to fix the mounting plate 1 to the sensor body 10-2. Can be adjusted as. Therefore, the temperature characteristics of the outer diameter measuring instrument can be widely adjusted with one kind of material and one shape part as the mounting plate 1, making inventory management easy, simplifying and simplifying adjustment, reducing man-hours and reducing costs. It becomes.
図７は、取付板１の詳細な形状を示す平面図である。この形状は、熱膨張で左右方向Ｂの伸びを長手方向Ａに効率良く変換するように定められる。固定部であるＥ部は、既に述べたように、取付穴２を複数設け、固定個所の間隔を変えることでセンサロッド２０の伸び量などに応じて長手方向Ａの伸び量を変えることができる。 FIG. 7 is a plan view showing the detailed shape of the mounting plate 1. This shape is determined so that the expansion in the left-right direction B can be efficiently converted into the longitudinal direction A by thermal expansion. As described above, the E portion which is the fixing portion can be provided with a plurality of mounting holes 2 and the amount of extension in the longitudinal direction A can be changed according to the amount of extension of the sensor rod 20 by changing the interval between the fixing points. .
Ｆ部は、Ｖ字状の切込みＦを左右の取付穴２の中央部に設けている。このＶ字状の切込みＦによって、取付板１は切込みがない場合に比べて、左右方向Ｂから力が加わった場合、長手方向Ａへの伸びに変換される。さらに、取付穴２で低熱膨張材であるセンサ部本体１０-２に固定されるので、取付板１にはセンサ部本体が取付板１に相当する熱膨張材の場合と比較してより大きく逆方向へ圧縮応力が掛かる。そして、左右方向Ｂに大きくなった伸びは長手方向Ａに効率良く変換される。つまり、温度に対する長手方向Ａの補償量を大きく、感度を高くする効果がある。 The F portion is provided with a V-shaped cut F at the center of the left and right mounting holes 2. Due to the V-shaped cut F, the mounting plate 1 is converted into an extension in the longitudinal direction A when a force is applied from the left-right direction B as compared to the case where there is no cut. Furthermore, since the mounting hole 2 is fixed to the sensor unit main body 10-2, which is a low thermal expansion material, the mounting plate 1 is largely reversed compared to the case where the sensor unit main body is a thermal expansion material corresponding to the mounting plate 1. Compressive stress is applied in the direction. And the elongation which became large in the left-right direction B is efficiently converted into the longitudinal direction A. That is, there is an effect of increasing sensitivity in the longitudinal direction A with respect to temperature and increasing sensitivity.
また、Ｖ字状の切込みＦの各角部は応力集中を避けるため、丸味を持たせるためＲが付けられている。Ｖ字状の切込みＦが無い形状、四角の切込み形状では、中央部で圧縮応力が相殺され縦方向への歪み（伸び）は大きく得られない。Ｖ字状の深さは、取付穴２の位置より深くすること、左右対称のＶ字とすること、が望ましい。 In addition, each corner of the V-shaped cut F is provided with an R to give it a roundness to avoid stress concentration. In the case of the shape without the V-shaped cut F or the square cut shape, the compressive stress is canceled out at the center, and a large strain (elongation) in the vertical direction cannot be obtained. It is desirable that the V-shaped depth is deeper than the position of the mounting hole 2 and that the V-shape is symmetrical.
Ｈ部は、図７で左右の略取付穴２の下側（ゲージ本体１０-１からセンサ部Ｇへ向けて、Ａ方向）に設けた貫通穴Ｈであり、Ｖ字状の切込みＦと同様の作用がある。Ｉ部は、貫通穴Ｈのさらに下側（Ａ方向）に位置し、左右の略取付穴２の中央部、左右方向Ｂの中央部が下側（Ａ方向）に膨んだ円弧Ｉaとされている。つまり、貫通穴Ｈはセンサ部方向において切込みＦと円弧Ｉaとの間に設けられている。 The H portion is a through hole H provided on the lower side of the left and right substantially mounting holes 2 in FIG. 7 (A direction from the gauge body 10-1 to the sensor portion G), and is the same as the V-shaped cut F There is an effect of. The I portion is located further down (A direction) of the through hole H, and is a circular arc Ia in which the central portion of the left and right mounting holes 2 and the central portion of the left and right direction B swell downward (A direction). ing. That is, the through hole H is provided between the cut F and the arc Ia in the sensor part direction.
円弧Ｉaの左右端Ｉbは、図７のように取付穴２から長手方向Ａの距離が、中央部に比べて小さくなっている。ここで取付穴２から長手方向Ａの距離とは、複数の取付け穴の中心（ネジ止めをする二箇所の取付穴２の中心）を結ぶ直線からの最短距離を意味する。したがって、温度上昇による伸び量は、中央部に比べて円弧Ｉaの左右端では小さくなり、基板取付穴７の間隔が広がることを防いでいる。これにより、基板３に加わる温度上昇による左右方向Ｂの応力を低減している。なお、ねじ５はセンサ部本体１０-２に取付板１を固定しているが、温度上昇によって、拘束力が変化しないように取り付けられる。 At the left and right ends Ib of the arc Ia, the distance in the longitudinal direction A from the mounting hole 2 is smaller than that at the center as shown in FIG. Here, the distance in the longitudinal direction A from the mounting hole 2 means the shortest distance from a straight line connecting the centers of the plurality of mounting holes (centers of the two mounting holes 2 to be screwed). Therefore, the amount of elongation due to the temperature rise is smaller at the left and right ends of the arc Ia than in the central portion, and the interval between the board mounting holes 7 is prevented from widening. Thereby, the stress in the left-right direction B due to the temperature rise applied to the substrate 3 is reduced. The screw 5 fixes the mounting plate 1 to the sensor unit main body 10-2, but is attached so that the restraining force does not change due to the temperature rise.
図８は、取付板１を温度上昇させたときの変形方向などを示す数値解析によるシミュレーション結果であり、図中の矢印が方向と大きさを表しており、Ａ方向に伸びることが分かる。 FIG. 8 is a simulation result by numerical analysis showing the deformation direction when the temperature of the mounting plate 1 is raised, and it can be seen that the arrows in the figure indicate the direction and size, and extend in the A direction.
図９は、他の実施形態による取付板１ｂを示す。取付穴２は左右にそれぞれ一箇所だけ設けている。取付穴２の間は円弧状で細いリブＪとされ、２つの基板取付穴７が設けられたリブＬとはＸ字状のリブＫで繋がっている。温度上昇に伴いリブＪが熱膨張で左右方向Ｂに伸びようとするが、取付穴２が低熱膨張材であるセンサ部本体１０-２へ固定される。したがって、リブＪは中央部Ｊ−１付近が図９で長手方向Ａへ歪む。リブＪは円弧状で細いので変形量は大きくなる。 FIG. 9 shows a mounting plate 1b according to another embodiment. Only one mounting hole 2 is provided on each of the left and right sides. The mounting holes 2 are arc-shaped and thin ribs J, and the ribs L provided with the two board mounting holes 7 are connected by X-shaped ribs K. As the temperature rises, the rib J tends to extend in the left-right direction B due to thermal expansion, but the mounting hole 2 is fixed to the sensor unit body 10-2, which is a low thermal expansion material. Therefore, the rib J is distorted in the longitudinal direction A in FIG. Since the rib J is arc-shaped and thin, the amount of deformation increases.
リブＫはＸ字状とされているので、変形し易く図９で下方向への伸びは緩和される。基板取付穴７の位置は温度上昇によって図９で上方向、長手方向Ａに移動する。したがって、センサ部本体１０-２への取り付け位置は、実施形態１の取付板１とは逆方向（図９で上がＡ方向）となるようにセンサ部本体１０-２へ取付穴２で固定する。これにより、実施形態１の取付板１と同様に温度上昇によるセンサロッド２０（図３）の伸び量、移動量を補償することができる。 Since the rib K has an X shape, it is easily deformed and the downward extension in FIG. 9 is alleviated. The position of the board mounting hole 7 moves upward and in the longitudinal direction A in FIG. Therefore, the mounting position on the sensor unit body 10-2 is fixed to the sensor unit body 10-2 with the mounting hole 2 so that the mounting position is opposite to the mounting plate 1 of the first embodiment (the upper direction is the A direction in FIG. 9). To do. Thereby, similarly to the mounting plate 1 of the first embodiment, it is possible to compensate for the amount of elongation and movement of the sensor rod 20 (FIG. 3) due to temperature rise.
図１０は、他の実施形態による取付板１ｂを用いたときのセンサ部Ｇを拡大した平面図であり、図４で示したものと異なり、取付穴２の位置が基板３の中央部に設けられたセンサ４よりＡ方向側になっている。基板３は取付板１ｂの基板取付穴７を介して固定される。センサ部本体１０-２に取付板１ｂが左右に設けられた取付穴２を介して、ねじ５で固定される。図１１では取付穴２が左右に一箇所とされているが、図４のものと同様に左右に複数ずつ設けてもよい。ただし、取付板１ｂの方が細いリブＪ、Ｋ、Ｌで構成されているので、図４のものより移動量を大きくすることができると共に、リブＪ、Ｋ、Ｌの太さ、特にＸ字部の太さを変えることで移動量を可変し易い。したがって、リブＪ、Ｋ、Ｌの太さ、特にＸ字部の太さを変えたものを用意することでもよい。 10 is an enlarged plan view of the sensor portion G when the mounting plate 1b according to another embodiment is used. Unlike the one shown in FIG. 4, the position of the mounting hole 2 is provided at the center of the substrate 3. FIG. The sensor 4 is located on the A direction side. The substrate 3 is fixed through the substrate mounting hole 7 of the mounting plate 1b. A mounting plate 1b is fixed to the sensor unit main body 10-2 with screws 5 through mounting holes 2 provided on the left and right. In FIG. 11, the mounting holes 2 are provided at one place on the left and right, but a plurality of attachment holes may be provided on the left and right as in FIG. 4. However, since the mounting plate 1b is composed of thinner ribs J, K, and L, the amount of movement can be made larger than that of FIG. 4, and the thickness of the ribs J, K, and L, particularly the X character, can be increased. It is easy to change the amount of movement by changing the thickness of the part. Therefore, it is also possible to prepare the ribs J, K, and L having different thicknesses, particularly the X-shaped portion.
図１１は、取付板１ｂを温度上昇させたときの変形方向などを示す数値解析によるシミュレーション結果であり、円弧状で細いリブＪが図１０で上方向に伸びることが分かり、基板取付穴７の位置は温度上昇によって、ゲージ本体１０-１からセンサ部Ｇへ向けて、Ａ方向へ移動することが分かる。 FIG. 11 is a simulation result by numerical analysis showing the deformation direction when the temperature of the mounting plate 1b is raised, and it can be seen that the arc-shaped thin rib J extends upward in FIG. It can be seen that the position moves in the A direction from the gauge body 10-1 toward the sensor unit G due to a temperature rise.
１、１ｂ…取付板、２…取付穴、５…ねじ、３…基板、４…センサ、６…リニアスケール、７…基板取付穴、Ｆ…Ｖ字状の切込み、Ｈ…貫通穴、Ｉa…円弧、Ｉb…左右端、Ｊ、Ｋ、Ｌ…リブ、Ｊ−１…中央部、１０…外径測定器、１０-１…ゲージ本体、１０-２…センサ部本体、Ｓ…先端部、Ｇ…センサ部、１２…アーム、１２ａ、１２ｂ…回転中心、１９…Ｖベース、２０…センサロッド、２１…接触子、３０…測定機構、４１…上側保持部材、４２…下側保持部材、４４…上側取付板、４５…下側取付板、５０…クランクシャフト、５２…リアフランジ、５３…ジャーナル、５４…クランクウェブ、５５…ワーク（クランクピン）、６１…クランクシャフト・ベース、６２、６３…回転支持部、６４…回転駆動機構（モータ）、８０…研削装置、８１…ガイドレール、８２…砥石ベース、８３…砥石支持部材、８４…砥石、８５…直動ガイド、８６…直動機構、８８…回転駆動機構（モータ）、９１〜９４…入力信号、９６〜９８…出力信号、１００…制御装置 DESCRIPTION OF SYMBOLS 1, 1b ... Mounting plate, 2 ... Mounting hole, 5 ... Screw, 3 ... Board, 4 ... Sensor, 6 ... Linear scale, 7 ... Board mounting hole, F ... V-shaped cut, H ... Through-hole, Ia ... Arc, Ib ... left and right ends, J, K, L ... ribs, J-1 ... central part, 10 ... outer diameter measuring instrument, 10-1 ... gauge body, 10-2 ... sensor part body, S ... tip part, G ... Sensor unit, 12 ... Arm, 12a, 12b ... Center of rotation, 19 ... V base, 20 ... Sensor rod, 21 ... Contact, 30 ... Measuring mechanism, 41 ... Upper holding member, 42 ... Lower holding member, 44 ... Upper mounting plate, 45 ... lower mounting plate, 50 ... crankshaft, 52 ... rear flange, 53 ... journal, 54 ... crank web, 55 ... work (crankpin), 61 ... crankshaft base, 62, 63 ... rotation Support part, 64 ... Rotation drive mechanism (motor), 80 ... Grinding Device: 81 ... Guide rail, 82 ... Whetstone base, 83 ... Whetstone support member, 84 ... Whetstone, 85 ... Linear movement guide, 86 ... Linear movement mechanism, 88 ... Rotary drive mechanism (motor), 91-94 ... Input signal, 96 to 98 ... output signal, 100 ... control device
Claims (9)
一端が前記ワークに当接する接触子を有する先端部とされ、他端は前記接触子の移動距離を検出するセンサ部のリニアスケールに接続されたセンサロッドを有し、
前記センサ部は、
前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、
前記基板の少なくとも２つの基板取付穴を介して前記基板が固定される取付板と、
前記取付板に対して、より低熱膨張材とされたセンサ部本体と、
前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数のねじと、
を備えたことを特徴とする外径測定器。 In a contact-type outer diameter measuring instrument that measures the outer diameter of a workpiece,
One end is a tip portion having a contact that contacts the workpiece, and the other end has a sensor rod connected to a linear scale of a sensor unit that detects a moving distance of the contact,
The sensor unit is
A substrate provided with a sensor for detecting a moving distance of the contact by detecting a moving distance of the linear scale;
A mounting plate to which the substrate is fixed through at least two substrate mounting holes of the substrate;
For the mounting plate, a sensor unit body that is a lower thermal expansion material,
A plurality of screws for fixing the mounting plate to the sensor body through each of two mounting holes provided in the mounting plate;
An outer diameter measuring instrument characterized by comprising:
該円弧の左右端は、前記二箇所の取付穴の中心を結ぶ直線からの最短距離が前記中央部に比べて小さくなっていることを特徴とする請求項３に記載の外径測定器。 The mounting plate is provided with an arc that swells in the direction of the sensor unit at a position on the sensor unit side with respect to the cut at the center portion,
The outer diameter measuring instrument according to claim 3, wherein the left and right ends of the arc have a shortest distance from a straight line connecting the centers of the two mounting holes smaller than that of the central portion.
前記センサ部は、前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、前記基板の基板取付穴を介して前記基板が固定される取付板と、前記取付板に対して、より低熱膨張材とされたセンサ部本体と、前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数ねじと、を有し、前記取付穴は左右に複数ずつ設けられ、いずれか二箇所を選択して前記ねじにより前記取付板を前記センサ部本体へ固定して前記取付板の拘束される間隔を可変することを特徴とする外径測定器の温度特性を調整する方法。 One end is a tip portion having a contact that contacts the workpiece, and the other end has a sensor rod connected to a linear scale of a sensor unit that detects a moving distance of the contact, and measures the outer diameter of the workpiece. A method for adjusting the temperature characteristics of a contact-type outer diameter measuring instrument,
The sensor unit includes a substrate provided with a sensor for detecting a moving distance of the contact by detecting a moving distance of the linear scale, and a mounting plate to which the substrate is fixed through a substrate mounting hole of the substrate. And a plurality of sensor parts that fix the mounting plate to the sensor part main body through a sensor part body that is a lower thermal expansion material with respect to the mounting plate, and two mounting holes that are provided in the mounting plate. A plurality of mounting holes are provided on the left and right sides, and the mounting plate is fixed to the sensor unit body with the screws by selecting any two locations, and the interval between the mounting plates is restricted. A method for adjusting a temperature characteristic of an outer diameter measuring instrument characterized by being variable.
前記外径測定器は、一端が前記ワークに当接する接触子を有する先端部とされ、他端は前記接触子の移動距離を検出するセンサ部のリニアスケールに接続されたセンサロッドを有し、前記センサ部は、前記リニアスケールの移動距離を検出することで前記接触子の移動距離を検出するセンサが設けられた基板と、前記基板の基板取付穴を介して前記基板が固定される取付板と、前記取付板に対して、より低熱膨張材とされたセンサ部本体と、前記取付板に設けられた二箇所の取付穴のそれぞれを介して前記取付板を前記センサ部本体へ固定する複数のねじと、を備えたことを特徴とする研削装置。 A drive mechanism for rotating a workpiece, which is a crank pin of a crankshaft of an internal combustion engine, a grindstone that rotates and moves in a direction perpendicular to the rotation shaft, and a contact that is disposed on the workpiece that is in contact with the grindstone An outer diameter measuring instrument arranged at a position to contact, and an arm that is rotatably fixed at one end to the driving mechanism of the grindstone, so that the outer diameter measuring instrument can follow the position of the workpiece In the grinding device in which the arm can be rotated,
The outer diameter measuring device has a sensor rod connected to a linear scale of a sensor unit that detects a moving distance of the contact, the other end is a tip having a contact that contacts the workpiece. The sensor unit includes a substrate provided with a sensor for detecting a moving distance of the contact by detecting a moving distance of the linear scale, and a mounting plate to which the substrate is fixed through a substrate mounting hole of the substrate. And a plurality of sensor parts that fix the mounting plate to the sensor part main body through a sensor part body that is a lower thermal expansion material with respect to the mounting plate, and two mounting holes that are provided in the mounting plate. A grinding apparatus comprising:
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| CN113231939A (en) * | 2021-05-21 | 2021-08-10 | 杨道国 | Petrochemical steel pressure container forming processing equipment and processing technology |
| CN113231939B (en) * | 2021-05-21 | 2022-07-15 | 烟台兴隆压力容器制造有限公司 | Petrochemical steel pressure container forming processing equipment and processing technology |
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