JP2019138696A - Visual inspection method and visual inspection device - Google Patents

Visual inspection method and visual inspection device Download PDF

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JP2019138696A
JP2019138696A JP2018020190A JP2018020190A JP2019138696A JP 2019138696 A JP2019138696 A JP 2019138696A JP 2018020190 A JP2018020190 A JP 2018020190A JP 2018020190 A JP2018020190 A JP 2018020190A JP 2019138696 A JP2019138696 A JP 2019138696A
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inspection object
ultraviolet light
light
image
inspection
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亘 平田
Wataru Hirata
亘 平田
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Ueno Seiki Co Ltd
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Ueno Seiki Co Ltd
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Abstract

To provide a visual inspection device with which it is possible to stably detect a damaged portion existing in a translucent part of an inspection object.SOLUTION: A visual inspection device comprises: lighting means 11 for irradiating, with ultraviolet light, a translucent part T of an inspection object W having a translucent part T which visible light passes through; imaging means 12 capable of capturing ultraviolet light; and information processing means 13 for inspecting the appearance of the translucent part T on the basis of the image of the translucent part T captured by the imaging means 12. Thus, visual inspection is carried out on the basis of an image in which is imaged an inspection object W in a state of the translucent part T being irradiated with ultraviolet light. As a result, it is possible to stably detect a damaged portion such as chipping or crack existing in the translucent part T.SELECTED DRAWING: Figure 2

Description

本発明は、検査対象物の外観を検査する外観検査装置に関する。 The present invention relates to an appearance inspection apparatus for inspecting the appearance of an inspection object.

ダイオード、トランジスタ、コンデンサ、インダクタ、ＩＣ（Ｉｎｔｅｇｒａｔｅｄ Ｃｉｒｃｕｉｔ）等の各種電子部品やセンサやレンズは、出荷前に、チッピングやクラック等の有無が検査される。当該検査を行う装置の具体例が、例えば特許文献１に記載されている。
特許文献１に記載の装置では、素体供給テーブルから回転テーブルに供給された電子部品（素体）が、回転テーブルに搬送されながら、カメラによって撮像される。各カメラは異なる角度から電子部品を撮像することから、カメラが撮像した画像の解析によって、直方体形状の電子部品の６面全てについてチッピング等の有無を検査することができる。 Various electronic components such as diodes, transistors, capacitors, inductors, ICs (Integrated Circuits), sensors, and lenses are inspected for chipping and cracks before shipment. A specific example of an apparatus that performs the inspection is described in Patent Document 1, for example.
In the apparatus described in Patent Document 1, an electronic component (element body) supplied from an element body supply table to a turntable is imaged by a camera while being conveyed to the turntable. Since each camera images electronic parts from different angles, it is possible to inspect the presence or absence of chipping or the like for all six surfaces of the rectangular parallelepiped electronic parts by analyzing the images captured by the cameras.

特開２００８−２４１３４２号公報JP 2008-241342 A

しかしながら、可視光が透過する透光部を有する対象物を、従来の方法で外観検査すると、透光部に存在するチッピングやクラック等の損傷部を安定的に検知できないという課題が生じることが判明した。そして、この課題は、電子部品、センサ及びレンズに限定されず、透光部を有する物に共通している。
本発明は、かかる事情に鑑みてなされたもので、検査対象物の透光部に存在する損傷部を安定的に検知可能な外観検査装置を提供することを目的とする。 However, when an object having a translucent part that transmits visible light is visually inspected by a conventional method, it has been found that there is a problem that a damaged part such as a chipping or a crack existing in the translucent part cannot be detected stably. did. And this subject is not limited to an electronic component, a sensor, and a lens, but is common to the thing which has a translucent part.
This invention is made | formed in view of this situation, and it aims at providing the external appearance inspection apparatus which can detect the damaged part which exists in the translucent part of a test target object stably.

前記目的に沿う本発明に係る外観検査装置は、可視光が透過する透光部を有する検査対象物の前記透光部に到達する紫外光を照射する照明手段と、前記紫外光をとらえることが可能な撮像手段と、前記撮像手段によって撮像された前記透光部の画像を基に前記透光部の外観を検査する情報処理手段とを備える。 The visual inspection apparatus according to the present invention that meets the above-described object is capable of capturing the ultraviolet light and an illuminating unit that irradiates the ultraviolet light that reaches the light transmitting part of the inspection target having a light transmitting part through which visible light is transmitted. And an information processing unit that inspects the appearance of the light-transmitting part based on the image of the light-transmitting part imaged by the imaging means.

本発明に係る外観検査装置は、可視光が透過する透光部を有する検査対象物の透光部に到達する紫外光を照射する照明手段を備え、撮像手段が、照明手段が照射する紫外光をとらえることが可能であるので、検査対象物の透光部に存在するチッピングやクラック等の損傷部を安定的に検知可能である。これは、実験的検証によって確認している。 An appearance inspection apparatus according to the present invention includes an illuminating unit that irradiates ultraviolet light that reaches a translucent part of an object to be inspected having a translucent part through which visible light is transmitted. Therefore, it is possible to stably detect a damaged part such as a chipping or a crack existing in the light transmitting part of the inspection object. This is confirmed by experimental verification.

（Ａ）は本発明の一実施の形態に係る外観検査装置の検査対象物の正面図であり、（Ｂ）は（Ａ）のＨ−Ｈ’断面図である。(A) is a front view of the inspection target of the appearance inspection apparatus according to the embodiment of the present invention, and (B) is a cross-sectional view taken along the line H-H ′ of (A). 同外観検査装置の説明図である。It is explanatory drawing of the same external appearance inspection apparatus. 撮像手段側から検査対象物を見た様子を示す説明図である。It is explanatory drawing which shows a mode that the test target object was seen from the imaging means side.

続いて、添付した図面を参照しつつ、本発明を具体化した実施の形態につき説明し、本発明の理解に供する。
図１（Ａ）、（Ｂ）、図２に示すように、本発明の一実施の形態に係る外観検査装置１０は、可視光が透過する透光部Ｔを有する検査対象物Ｗの透光部Ｔに到達する紫外光を照射する照明手段１１と、当該紫外光をとらえることが可能な撮像手段１２と、撮像手段１２によって撮像された透光部Ｔの画像を基に透光部Ｔの外観を検査する情報処理手段１３とを備える装置である。以下、詳細に説明する。 Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
As shown in FIGS. 1A, 1 </ b> B, and 2, an appearance inspection apparatus 10 according to an embodiment of the present invention transmits light of an inspection object W having a light transmitting portion T that transmits visible light. The illumination unit 11 that irradiates the ultraviolet light reaching the part T, the imaging unit 12 that can capture the ultraviolet light, and the image of the translucent part T captured by the imaging unit 12 It is an apparatus provided with the information processing means 13 which inspects an external appearance. Details will be described below.

外観検査装置１０によって検査される検査対象物Ｗは、図１（Ａ）、（Ｂ）に示すように、矩形の板状であり、可視光を反射する反射部Ｒを内側に有している。反射部Ｒは矩形の板状であり、検査対象物Ｗの反射部Ｒを除く領域は可視光が透過する透光部Ｔで形成されている。なお、可視光が透光部Ｔを透過するとは、外部から透光部Ｔに入射した可視光の全部又は一部が透光部Ｔを透過することを意味する。検査対象物Ｗは平行配置された表面Ｐ及び裏面Ｑと４つの側面Ｄ、Ｅ、Ｆ、Ｇとを有し、表面Ｐの角部近傍には検査対象物Ｗの向きを示すマークＭが設けられている。本実施の形態では、表面Ｐをレーザで削ることによって円形のマークＭを形成している。よって、マークＭは表面Ｐに設けられた溝である。 As shown in FIGS. 1A and 1B, the inspection object W to be inspected by the appearance inspection apparatus 10 has a rectangular plate shape and has a reflection portion R that reflects visible light inside. . The reflection part R has a rectangular plate shape, and the region excluding the reflection part R of the inspection target W is formed by a light transmission part T that transmits visible light. In addition, that visible light permeate | transmits the translucent part T means that all or one part of the visible light which injected into the translucent part T from the outside permeate | transmits the translucent part T. FIG. The inspection object W has a front surface P and a rear surface Q arranged in parallel and four side surfaces D, E, F, and G, and a mark M indicating the direction of the inspection object W is provided in the vicinity of the corner of the front surface P. It has been. In the present embodiment, the circular mark M is formed by cutting the surface P with a laser. Therefore, the mark M is a groove provided on the surface P.

外観検査装置１０は、図２、図３に示すように、検査対象物Ｗを支持する支持部材１４と、検査対象物Ｗに紫外光を照射する照明手段１１と、検査対象物Ｗを表面Ｐ側から撮像する撮像手段１２と、撮像手段１２に接続された情報処理手段１３を備えている。
支持部材１４は、図２に示すように、真空圧によって検査対象物Ｗの裏面Ｑを吸着して検査対象物Ｗを保持するノズルであり、図示しない駆動源の作動によって移動する。支持部材１４に吸着保持された検査対象物Ｗは、支持部材１４と共に移動し、撮像位置Ｓに配置される。以下、特に記載しない限り、検査対象物Ｗは撮像位置Ｓに配置されているものとする。 As shown in FIGS. 2 and 3, the appearance inspection apparatus 10 includes a support member 14 that supports the inspection object W, an illumination unit 11 that irradiates the inspection object W with ultraviolet light, and a surface P on the inspection object W. An image pickup means 12 for picking up an image from the side and an information processing means 13 connected to the image pickup means 12 are provided.
As shown in FIG. 2, the support member 14 is a nozzle that holds the inspection object W by adsorbing the back surface Q of the inspection object W by vacuum pressure, and moves by the operation of a drive source (not shown). The inspection object W sucked and held by the support member 14 moves together with the support member 14 and is arranged at the imaging position S. Hereinafter, the inspection object W is assumed to be disposed at the imaging position S unless otherwise specified.

検査対象物Ｗの表面Ｐ側に検査対象物Ｗから距離を有して配置された照明手段１１は、図２、図３に示すように、一側（検査対象物Ｗに近い側）に拡散部材１５が取り付けられた円環状のベース部材１６と、ベース部材１６に固定された複数の発光部１７を備えている。複数の発光部１７は、それぞれ検査対象物Ｗに向かって紫外光を発する発光ダイオードであり、周方向に間隔を空けて（本実施の形態では等ピッチで）円環状に配列されている。 The illumination means 11 arranged at a distance from the inspection object W on the surface P side of the inspection object W diffuses to one side (side closer to the inspection object W) as shown in FIGS. An annular base member 16 to which the member 15 is attached, and a plurality of light emitting portions 17 fixed to the base member 16 are provided. The plurality of light emitting portions 17 are light emitting diodes that emit ultraviolet light toward the inspection object W, and are arranged in an annular shape at intervals in the circumferential direction (equal pitch in the present embodiment).

本実施の形態では各発光部１７から検査対象物Ｗまでの距離が等しく、各発光部１７は直進性（指向性）が高い紫外光（波長が１０〜４００ｎｍの光）を照射する。
拡散部材１５は、円環状の板状物であり、撮像手段１２と検査対象物Ｗの間に位置している。拡散部材１５は、発光部１７から発せられる紫外光の吸収を抑制する素材（例えば、石英ガラス、ホウケイ酸ガラス、紫外光透過型のアクリル）によって形成され、各発光部１７から検査対象物Ｗに向かって進行する紫外光を散乱させる。 In the present embodiment, the distances from the light emitting units 17 to the inspection object W are equal, and each light emitting unit 17 irradiates ultraviolet light (light having a wavelength of 10 to 400 nm) having high straightness (directivity).
The diffusion member 15 is an annular plate-like object, and is located between the imaging unit 12 and the inspection object W. The diffusing member 15 is formed of a material that suppresses absorption of ultraviolet light emitted from the light emitting unit 17 (for example, quartz glass, borosilicate glass, or ultraviolet light transmitting acrylic). Scatters the ultraviolet light that travels toward it.

各発光部１７から発せられた紫外光は拡散部材１５を透過して散乱し、散乱した紫外光の一部又は大半が検査対象物Ｗ（即ち、透光部Ｔ）の表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇに到達する。検査対象物Ｗの表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇに到達した紫外光はそれぞれ、全部又は一部が表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇで反射される。本実施の形態では、拡散部材１５で紫外光が散乱することから、拡散部材が無い場合と比較して、検査対象物Ｗ（透光部Ｔ）に到達する紫外光の検査対象物Ｗ（透光部Ｔ）に対する進行方向は多様となる。 The ultraviolet light emitted from each light emitting portion 17 is transmitted through the diffusing member 15 and scattered, and a part or most of the scattered ultraviolet light is the surface P and side surface D of the inspection object W (that is, the light transmitting portion T). E, F, G are reached. The ultraviolet light that has reached the surface P and the side surfaces D, E, F, and G of the inspection object W is reflected by the surface P and the side surfaces D, E, F, and G, respectively. In the present embodiment, since ultraviolet light is scattered by the diffusing member 15, the ultraviolet light inspection object W (translucent light) reaching the inspection object W (translucent portion T) is compared with the case where there is no diffusing member. The traveling direction with respect to the optical part T) varies.

撮像手段１２は、発光部１７が照射する紫外光をとらえること（発光部１７が照射する波長域の紫外光を画像中に表すこと）が可能なカメラであり、ベース部材１６の内側空間越しに検査対象物Ｗを撮像するように配置されている（撮像手段１２は検査対象物Ｗを撮像可能な方向に向けられている）。撮像手段１２によって撮像された画像には、図１（Ａ）に示すように、検査対象物Ｗの表面Ｐ全体（マークＭを含む）及び透光部Ｔ越しの反射部Ｒが撮像される。よって、撮像手段１２は撮像により透光部Ｔの表面Ｐ全体がとらえられた画像を得ることとなる。 The imaging means 12 is a camera capable of capturing the ultraviolet light irradiated by the light emitting unit 17 (representing ultraviolet light in the wavelength region irradiated by the light emitting unit 17 in the image), and over the inner space of the base member 16. It arrange | positions so that the test target object W may be imaged (the imaging means 12 is orient | assigned to the direction which can image the test target object W). As shown in FIG. 1A, the entire surface P (including the mark M) of the inspection target W and the reflection portion R through the translucent portion T are captured in the image captured by the imaging unit 12. Therefore, the imaging unit 12 obtains an image in which the entire surface P of the translucent part T is captured by imaging.

撮像手段１２には、図２に示すように、情報処理手段１３が接続されており、情報処理手段１３は、撮像手段１２が撮像した画像を取得し、取得した画像（透光部Ｔをとらえた画像）を基に検査対象物Ｗ（透光部Ｔ）の表面Ｐにチッピングやクラック等の異常（以下、「損傷部」とも言う）が存在しないか否か、マークＭが所定の位置（例えば、表面Ｐの右上）に配置されているか否かを判定する（即ち、透光部Ｔの外観を検査する）。更に、情報処理手段１３は、画像中でマークＭが所定の位置に配されていることから、検査対象物Ｗが裏面Ｑを支持手段１４によって吸着保持された状態であること、及び、画像内でマークＭが右上に配される向きで検査対象物Ｗが支持手段１４に支持されていることを検知する。なお、本実施の形態では、情報処理手段１３が主としてＣＰＵ及びメモリによって構成されている。 As shown in FIG. 2, an information processing unit 13 is connected to the imaging unit 12, and the information processing unit 13 acquires an image captured by the imaging unit 12 and captures the acquired image (transparent portion T). Whether or not there is an abnormality (hereinafter also referred to as “damaged portion”) such as chipping or cracks on the surface P of the inspection object W (translucent portion T) based on the image). For example, it is determined whether or not it is arranged on the upper right side of the surface P (that is, the appearance of the translucent portion T is inspected). Furthermore, since the mark M is arranged at a predetermined position in the image, the information processing means 13 is in a state where the inspection object W is attracted and held by the support means 14 and the inside of the image Then, it is detected that the inspection object W is supported by the support means 14 in the direction in which the mark M is arranged on the upper right. In the present embodiment, the information processing means 13 is mainly composed of a CPU and a memory.

撮像手段１２によって撮像された画像中の検査対象物Ｗは、図１（Ａ）に示すように、透光部Ｔの大半及びマークＭの大半が反射部Ｒと重なっている。そのため、検査対象物Ｗの画像を基にして、反射部Ｒに重なった状態のマークＭを検出する必要があり、仮に、検査対象物Ｗの表面Ｐの透光部Ｔと反射部Ｒが重なっている領域に損傷部が存在する場合、情報処理手段１３は該当の損傷部を反射部Ｒと判別して検出する必要がある。 As shown in FIG. 1A, the inspection object W in the image imaged by the imaging means 12 has most of the translucent portion T and most of the mark M overlapping the reflecting portion R. For this reason, it is necessary to detect the mark M in a state of being overlapped with the reflection portion R based on the image of the inspection target W. The light transmission portion T and the reflection portion R on the surface P of the inspection target W overlap. If there is a damaged portion in the area, the information processing means 13 needs to detect the corresponding damaged portion as the reflecting portion R and detect it.

この点、撮像手段１２によって撮像された画像では、マークＭ及び反射部Ｒに重なった損傷部が明瞭に表れており、情報処理手段１３によって安定的に検出可能であることが確認されている。照明手段１１の代わりに可視光を照射する照明を採用した際には、撮像された画像中で、マークＭ及び反射部Ｒに重なった損傷部が視覚的に不明瞭となり安定的に検出できなかったことから、紫外光を検査対象物Ｗに照射することで、撮像された画像においてマークＭや反射部Ｒに重なった損傷部が明瞭に視認可能な状態となったと言える。なお、反射部を有さない、透光部のみの検査対象物においても、検査対象物（即ち、透光部）に紫外光を照射することで、検査対象物に可視光を照射するよりも、マークや損傷部を安定的に検出できることを確認している。 In this regard, in the image picked up by the image pickup means 12, the damaged portion overlapping the mark M and the reflection portion R appears clearly, and it has been confirmed that the information processing means 13 can stably detect it. When using illumination that irradiates visible light instead of the illumination means 11, the damaged part that overlaps the mark M and the reflection part R in the captured image is visually unclear and cannot be detected stably. From this, it can be said that by irradiating the inspection object W with the ultraviolet light, the damaged portion overlapping the mark M and the reflection portion R in the captured image is clearly visible. In addition, even in an inspection object having only a translucent part that does not have a reflection part, by irradiating the inspection object (that is, the translucent part) with ultraviolet light, the inspection object is irradiated with visible light. It has been confirmed that marks and damaged parts can be detected stably.

また、検査対象物の中には、透光部の表面に、損傷部に該当しない、形成パターンが不規則な凹凸が存在するものがある。
本願の発明者が行った実験的検証において、表面に凹凸が存在する検査対象物では、表面に一定方向のみから紫外光を到達させた場合や、表面に様々な方向から到達する紫外光のうち一定方向から表面に到達する紫外光の光量を他方向から表面に到達する紫外光の光量より多くした場合に、１）画像中の透光部の表面の輝度が透光部の表面に存在する凹凸の形成パターンの影響を受けること、２）個々の検査対象物によって画像中の透光部の表面の輝度にばらつきが生じて、表面の損傷部を安定的に検出できないことが確認された。 Some inspection objects have irregularities with irregular formation patterns that do not correspond to damaged portions on the surface of the light transmitting portion.
In the experimental verification performed by the inventor of the present application, in the inspection object having unevenness on the surface, when the ultraviolet light reaches the surface only from a certain direction, or among the ultraviolet light reaching the surface from various directions When the amount of ultraviolet light reaching the surface from a certain direction is greater than the amount of ultraviolet light reaching the surface from another direction, 1) the brightness of the surface of the light transmitting part in the image exists on the surface of the light transmitting part 2) It was confirmed that the brightness of the surface of the translucent part in the image varies depending on the individual inspection object, and the damaged part of the surface cannot be detected stably.

そして、透光部の表面に対し様々な方向から紫外光が到達し、かつ、透光部の表面に到達する紫外光の光量が透光部の表面に対する紫外光の到達方向によって偏りがないようにすること（以下、「紫外光の均一化」とも言う）で、画像中の透光部の表面の輝度の検査対象物の個体差が抑制され、透光部の凹凸が設けられた表面の損傷部を安定的に検出できることを確認した。本実施の形態では、発光部１７が等ピッチで円環状に配置された照明手段１１と各発光部１７が発した紫外光を散乱させる拡散部材１５とを採用することによって、紫外光の均一化を図り、形成パターンが不明な凹凸が表面に存在する検査対象物（透光部）の検査精度を向上させている。 Then, the ultraviolet light reaches the surface of the light transmitting part from various directions, and the amount of the ultraviolet light reaching the surface of the light transmitting part is not biased depending on the arrival direction of the ultraviolet light with respect to the surface of the light transmitting part. (Hereinafter, also referred to as “uniformization of ultraviolet light”), the individual difference in the inspection object of the surface of the light transmitting part in the image is suppressed, and the unevenness of the surface of the light transmitting part is provided. It was confirmed that the damaged part could be detected stably. In the present embodiment, the ultraviolet light is made uniform by adopting the illumination means 11 in which the light emitting portions 17 are arranged in an annular shape at an equal pitch and the diffusing member 15 that scatters the ultraviolet light emitted from each light emitting portion 17. Thus, the inspection accuracy of the inspection object (translucent portion) having irregularities with unknown formation patterns on the surface is improved.

以上、本発明の実施の形態を説明したが、本発明は、上記した形態に限定されるものでなく、要旨を逸脱しない条件の変更等は全て本発明の適用範囲である。
例えば、検査対象物は、矩形の板状以外の形状（例えば、円形の板状、直方体状）であってもよく、マークが無くてもよい。マークが無い場合、損傷部の有無のみが検査される。マークが有る場合、マークの配置のみを検査するようにしてもよい。そして、マークは円形に限定されず、例えば、アルファベット等の文字であってもよい。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions and the like that do not depart from the gist are within the scope of the present invention.
For example, the inspection object may have a shape other than a rectangular plate shape (for example, a circular plate shape or a rectangular parallelepiped shape), or may have no mark. If there is no mark, only the presence or absence of a damaged part is inspected. If there is a mark, only the arrangement of the mark may be inspected. And a mark is not limited to a circle, For example, characters, such as an alphabet, may be sufficient.

検査対象物の側面や裏面に照明手段から照射された紫外光が到達するように設計してもよい。
また、支持部材はノズルである必要は無く、例えば、電子部品を左右から挟んで支持する部材であってもよい。 You may design so that the ultraviolet light irradiated from the illumination means may reach the side surface and back surface of the inspection object.
Further, the support member does not need to be a nozzle, and may be a member that supports the electronic component by sandwiching it from the left and right, for example.

更に、拡散部材は必ずしも必要ではない。
拡散部材を設ける場合、拡散部材は照明手段から検査対象物までの光学経路上に位置して、発光部から照射された紫外光を散乱できればよく、前記実施の形態のように、照明手段及び検査対象物を両端とする仮想線分上に配置されている必要はない。例えば、照明手段から照射された紫外光をミラーで反射して検査対象物に向かわせる光学経路においては、拡散部材をミラーと検査対象物の間に配置してもよい。 Furthermore, the diffusion member is not always necessary.
When the diffusing member is provided, the diffusing member only needs to be positioned on the optical path from the illumination unit to the inspection object and to scatter the ultraviolet light emitted from the light emitting unit. It is not necessary to arrange on an imaginary line segment with the object as both ends. For example, in an optical path in which ultraviolet light emitted from the illumination unit is reflected by a mirror and directed toward the inspection object, a diffusion member may be disposed between the mirror and the inspection object.

１０：外観検査装置、１１：照明手段、１２：撮像手段、１３：情報処理手段、１４：支持部材、１５：拡散部材、１６：ベース部材、１７：発光部、Ｄ、Ｅ、Ｆ、Ｇ：側面、Ｍ：マーク、Ｐ：表面、Ｑ：裏面、Ｒ：反射部、Ｓ：撮像位置、Ｔ：透光部、Ｗ：検査対象物 10: Appearance inspection apparatus, 11: Illumination means, 12: Imaging means, 13: Information processing means, 14: Support member, 15: Diffusion member, 16: Base member, 17: Light emitting part, D, E, F, G: Side surface, M: mark, P: front surface, Q: back surface, R: reflection portion, S: imaging position, T: translucent portion, W: inspection object

本発明は、検査対象物の外観を検査する外観検査方法及び外観検査装置に関する。 The present invention relates to an appearance inspection method and an appearance inspection apparatus for inspecting the appearance of an inspection object.

ダイオード、トランジスタ、コンデンサ、インダクタ、ＩＣ（Ｉｎｔｅｇｒａｔｅｄ Ｃｉｒｃｕｉｔ）等の各種電子部品やセンサやレンズは、出荷前に、チッピングやクラック等の有無が検査される。当該検査を行う装置の具体例が、例えば特許文献１に記載されている。
特許文献１に記載の装置では、素体供給テーブルから回転テーブルに供給された電子部品（素体）が、回転テーブルに搬送されながら、カメラによって撮像される。各カメラは異なる角度から電子部品を撮像することから、カメラが撮像した画像の解析によって、直方体形状の電子部品の６面全てについてチッピング等の有無を検査することができる。 Various electronic components such as diodes, transistors, capacitors, inductors, ICs (Integrated Circuits), sensors, and lenses are inspected for chipping and cracks before shipment. A specific example of an apparatus that performs the inspection is described in Patent Document 1, for example.
In the apparatus described in Patent Document 1, an electronic component (element body) supplied from an element body supply table to a turntable is imaged by a camera while being conveyed to the turntable. Since each camera images electronic parts from different angles, it is possible to inspect the presence or absence of chipping or the like for all six surfaces of the rectangular parallelepiped electronic parts by analyzing the images captured by the cameras.

特開２００８−２４１３４２号公報JP 2008-241342 A

しかしながら、可視光が透過する透光部を有する対象物を、従来の方法で外観検査すると、透光部に存在するチッピングやクラック等の損傷部を安定的に検知できないという課題が生じることが判明した。そして、この課題は、電子部品、センサ及びレンズに限定されず、透光部を有する物に共通している。
本発明は、かかる事情に鑑みてなされたもので、検査対象物の透光部に存在する損傷部を安定的に検知可能な外観検査方法及び外観検査装置を提供することを目的とする。 However, when an object having a translucent part that transmits visible light is visually inspected by a conventional method, it has been found that there is a problem that a damaged part such as a chipping or a crack existing in the translucent part cannot be detected stably. did. And this subject is not limited to an electronic component, a sensor, and a lens, but is common to the thing which has a translucent part.
The present invention has been made in view of such circumstances, and an object thereof is to provide an appearance inspection method and an appearance inspection apparatus capable of stably detecting a damaged portion present in a light transmitting portion of an inspection object.

前記目的に沿う第１の発明に係る外観検査方法は、可視光が透過する透光部及び可視光を反射する反射部を有する検査対象物の前記透光部に紫外光を照射して到達させ、前記紫外光をとらえることが可能な撮像手段で、前記透光部の前記紫外光が到達している面を撮像する第１工程と、前記撮像手段によって撮像された前記透光部の前記面の画像を基に、前記透光部の前記面について、マークの検出及び損傷部の有無の検査の一方又は双方を行う第２工程とを有し、前記検査対象物には、前記透光部の前記面に、前記マーク及び前記損傷部に該当しない形成パターンが不規則な凹凸が存在し、前記第１工程で、前記反射部は、前記撮像手段の光軸に沿って前記検査対象物を見て、前記透光部の前記面の奥側に配される。
前記目的に沿う第２の発明に係る外観検査装置は、可視光が透過する透光部及び可視光を反射する反射部を有する検査対象物の前記透光部に到達する紫外光を照射する照明手段と、前記紫外光をとらえることが可能で、前記透光部の前記紫外光が到達し、かつ、形成パターンが不規則な凹凸が存在する面を撮像する撮像手段と、前記撮像手段によって撮像された前記透光部の前記面の画像を基に、前記透光部の前記面について、前記凹凸に該当しないマークの検出及び該凹凸に該当しない損傷部の有無の検査の一方又は双方を行う情報処理手段と、前記電子部品を支持して、前記反射部を、前記撮像手段の光軸に沿って前記検査対象物を見て、前記透光部の前記面の奥側に配させる支持部材とを備える。 According to the first aspect of the visual inspection method that meets the above-mentioned object, ultraviolet light is irradiated to reach the light-transmitting portion of the inspection object having a light-transmitting portion that transmits visible light and a reflecting portion that reflects visible light. A first step of imaging the surface of the translucent part on which the ultraviolet light has reached, with the imaging unit capable of capturing the ultraviolet light, and the surface of the translucent part captured by the imaging unit A second step of performing one or both of detecting a mark and inspecting the presence or absence of a damaged portion of the surface of the light transmitting portion based on the image of the light transmitting portion, and the inspection object includes the light transmitting portion. There is irregular irregularities in the formation pattern that does not correspond to the mark and the damaged portion on the surface, and in the first step, the reflecting portion moves the inspection object along the optical axis of the imaging means. As seen, it is arranged on the back side of the surface of the translucent part.
The visual inspection apparatus according to the second invention that meets the above object is an illumination that irradiates ultraviolet light that reaches the light transmitting portion of the inspection object having a light transmitting portion that transmits visible light and a reflecting portion that reflects visible light. An imaging means for capturing the surface on which the ultraviolet light of the light-transmitting portion reaches the ultraviolet light and has irregular irregularities on the formation pattern; and imaging by the imaging means based on the image of the surface of the light transmitting portion that is, for the surface of the light transmitting portion, performs one or both of the inspection of the detection and the presence or absence of lesions that do not correspond to the unevenness of marks which does not correspond to the uneven An information processing means and a support member that supports the electronic component, and disposes the reflecting portion on the back side of the surface of the light transmitting portion when viewing the inspection object along the optical axis of the imaging means. With .

本発明に係る外観検査装置は、可視光が透過する透光部を有する検査対象物の透光部に到達する紫外光を照射する照明手段を備え、撮像手段が、照明手段が照射する紫外光をとらえることが可能であるので、検査対象物の透光部に存在するチッピングやクラック等の損傷部を安定的に検知可能である。これは、実験的検証によって確認している。 An appearance inspection apparatus according to the present invention includes an illuminating unit that irradiates ultraviolet light that reaches a translucent part of an object to be inspected having a translucent part through which visible light is transmitted. Therefore, it is possible to stably detect a damaged part such as a chipping or a crack existing in the light transmitting part of the inspection object. This is confirmed by experimental verification.

（Ａ）は本発明の一実施の形態に係る外観検査装置の検査対象物の正面図であり、（Ｂ）は（Ａ）のＨ−Ｈ’断面図である。(A) is a front view of the inspection target of the appearance inspection apparatus according to the embodiment of the present invention, and (B) is a cross-sectional view taken along the line H-H ′ of (A). 同外観検査装置の説明図である。It is explanatory drawing of the same external appearance inspection apparatus. 撮像手段側から検査対象物を見た様子を示す説明図である。It is explanatory drawing which shows a mode that the test target object was seen from the imaging means side.

続いて、添付した図面を参照しつつ、本発明を具体化した実施の形態につき説明し、本発明の理解に供する。
図１（Ａ）、（Ｂ）、図２に示すように、本発明の一実施の形態に係る外観検査装置１０は、可視光が透過する透光部Ｔを有する検査対象物Ｗの透光部Ｔに到達する紫外光を照射する照明手段１１と、当該紫外光をとらえることが可能な撮像手段１２と、撮像手段１２によって撮像された透光部Ｔの画像を基に透光部Ｔの外観を検査する情報処理手段１３とを備える装置である。以下、詳細に説明する。 Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
As shown in FIGS. 1A, 1 </ b> B, and 2, an appearance inspection apparatus 10 according to an embodiment of the present invention transmits light of an inspection object W having a light transmitting portion T that transmits visible light. The illumination unit 11 that irradiates the ultraviolet light reaching the part T, the imaging unit 12 that can capture the ultraviolet light, and the image of the translucent part T captured by the imaging unit 12 It is an apparatus provided with the information processing means 13 which inspects an external appearance. Details will be described below.

外観検査装置１０によって検査される検査対象物Ｗは、図１（Ａ）、（Ｂ）に示すように、矩形の板状であり、可視光を反射する反射部Ｒを内側に有している。反射部Ｒは矩形の板状であり、検査対象物Ｗの反射部Ｒを除く領域は可視光が透過する透光部Ｔで形成されている。なお、可視光が透光部Ｔを透過するとは、外部から透光部Ｔに入射した可視光の全部又は一部が透光部Ｔを透過することを意味する。検査対象物Ｗは平行配置された表面Ｐ及び裏面Ｑと４つの側面Ｄ、Ｅ、Ｆ、Ｇとを有し、表面Ｐの角部近傍には検査対象物Ｗの向きを示すマークＭが設けられている。本実施の形態では、表面Ｐをレーザで削ることによって円形のマークＭを形成している。よって、マークＭは表面Ｐに設けられた溝である。 As shown in FIGS. 1A and 1B, the inspection object W to be inspected by the appearance inspection apparatus 10 has a rectangular plate shape and has a reflection portion R that reflects visible light inside. . The reflection part R has a rectangular plate shape, and the region excluding the reflection part R of the inspection target W is formed by a light transmission part T that transmits visible light. In addition, that visible light permeate | transmits the translucent part T means that all or one part of the visible light which injected into the translucent part T from the outside permeate | transmits the translucent part T. FIG. The inspection object W has a front surface P and a rear surface Q arranged in parallel and four side surfaces D, E, F, and G, and a mark M indicating the direction of the inspection object W is provided in the vicinity of the corner of the front surface P. It has been. In the present embodiment, the circular mark M is formed by cutting the surface P with a laser. Therefore, the mark M is a groove provided on the surface P.

外観検査装置１０は、図２、図３に示すように、検査対象物Ｗを支持する支持部材１４と、検査対象物Ｗに紫外光を照射する照明手段１１と、検査対象物Ｗを表面Ｐ側から撮像する撮像手段１２と、撮像手段１２に接続された情報処理手段１３を備えている。
支持部材１４は、図２に示すように、真空圧によって検査対象物Ｗの裏面Ｑを吸着して検査対象物Ｗを保持するノズルであり、図示しない駆動源の作動によって移動する。支持部材１４に吸着保持された検査対象物Ｗは、支持部材１４と共に移動し、撮像位置Ｓに配置される。以下、特に記載しない限り、検査対象物Ｗは撮像位置Ｓに配置されているものとする。 As shown in FIGS. 2 and 3, the appearance inspection apparatus 10 includes a support member 14 that supports the inspection object W, an illumination unit 11 that irradiates the inspection object W with ultraviolet light, and a surface P on the inspection object W. An image pickup means 12 for picking up an image from the side and an information processing means 13 connected to the image pickup means 12 are provided.
As shown in FIG. 2, the support member 14 is a nozzle that holds the inspection object W by adsorbing the back surface Q of the inspection object W by vacuum pressure, and moves by the operation of a drive source (not shown). The inspection object W sucked and held by the support member 14 moves together with the support member 14 and is arranged at the imaging position S. Hereinafter, the inspection object W is assumed to be disposed at the imaging position S unless otherwise specified.

検査対象物Ｗの表面Ｐ側に検査対象物Ｗから距離を有して配置された照明手段１１は、図２、図３に示すように、一側（検査対象物Ｗに近い側）に拡散部材１５が取り付けられた円環状のベース部材１６と、ベース部材１６に固定された複数の発光部１７を備えている。複数の発光部１７は、それぞれ検査対象物Ｗに向かって紫外光を発する発光ダイオードであり、周方向に間隔を空けて（本実施の形態では等ピッチで）円環状に配列されている。 The illumination means 11 arranged at a distance from the inspection object W on the surface P side of the inspection object W diffuses to one side (side closer to the inspection object W) as shown in FIGS. An annular base member 16 to which the member 15 is attached, and a plurality of light emitting portions 17 fixed to the base member 16 are provided. The plurality of light emitting portions 17 are light emitting diodes that emit ultraviolet light toward the inspection object W, and are arranged in an annular shape at intervals in the circumferential direction (equal pitch in the present embodiment).

本実施の形態では各発光部１７から検査対象物Ｗまでの距離が等しく、各発光部１７は直進性（指向性）が高い紫外光（波長が１０〜４００ｎｍの光）を照射する。
拡散部材１５は、円環状の板状物であり、撮像手段１２と検査対象物Ｗの間に位置している。拡散部材１５は、発光部１７から発せられる紫外光の吸収を抑制する素材（例えば、石英ガラス、ホウケイ酸ガラス、紫外光透過型のアクリル）によって形成され、各発光部１７から検査対象物Ｗに向かって進行する紫外光を散乱させる。 In the present embodiment, the distances from the light emitting units 17 to the inspection object W are equal, and each light emitting unit 17 irradiates ultraviolet light (light having a wavelength of 10 to 400 nm) having high straightness (directivity).
The diffusion member 15 is an annular plate-like object, and is located between the imaging unit 12 and the inspection object W. The diffusing member 15 is formed of a material that suppresses absorption of ultraviolet light emitted from the light emitting unit 17 (for example, quartz glass, borosilicate glass, or ultraviolet light transmitting acrylic). Scatters the ultraviolet light that travels toward it.

各発光部１７から発せられた紫外光は拡散部材１５を透過して散乱し、散乱した紫外光の一部又は大半が検査対象物Ｗ（即ち、透光部Ｔ）の表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇに到達する。検査対象物Ｗの表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇに到達した紫外光はそれぞれ、全部又は一部が表面Ｐ及び側面Ｄ、Ｅ、Ｆ、Ｇで反射される。本実施の形態では、拡散部材１５で紫外光が散乱することから、拡散部材が無い場合と比較して、検査対象物Ｗ（透光部Ｔ）に到達する紫外光の検査対象物Ｗ（透光部Ｔ）に対する進行方向は多様となる。 The ultraviolet light emitted from each light emitting portion 17 is transmitted through the diffusing member 15 and scattered, and a part or most of the scattered ultraviolet light is the surface P and side surface D of the inspection object W (that is, the light transmitting portion T). E, F, G are reached. The ultraviolet light that has reached the surface P and the side surfaces D, E, F, and G of the inspection object W is reflected by the surface P and the side surfaces D, E, F, and G, respectively. In the present embodiment, since ultraviolet light is scattered by the diffusing member 15, the ultraviolet light inspection object W (translucent light) reaching the inspection object W (translucent portion T) is compared with the case where there is no diffusing member. The traveling direction with respect to the optical part T) varies.

撮像手段１２は、発光部１７が照射する紫外光をとらえること（発光部１７が照射する波長域の紫外光を画像中に表すこと）が可能なカメラであり、ベース部材１６の内側空間越しに検査対象物Ｗを撮像するように配置されている（撮像手段１２は検査対象物Ｗを撮像可能な方向に向けられている）。撮像手段１２によって撮像された画像には、図１（Ａ）に示すように、検査対象物Ｗの表面Ｐ全体（マークＭを含む）及び透光部Ｔ越しの反射部Ｒが撮像される。よって、撮像手段１２は撮像により透光部Ｔの表面Ｐ全体がとらえられた画像を得ることとなる。 The imaging means 12 is a camera capable of capturing the ultraviolet light irradiated by the light emitting unit 17 (representing ultraviolet light in the wavelength region irradiated by the light emitting unit 17 in the image), and over the inner space of the base member 16. It arrange | positions so that the test target object W may be imaged (the imaging means 12 is orient | assigned to the direction which can image the test target object W). As shown in FIG. 1A, the entire surface P (including the mark M) of the inspection target W and the reflection portion R through the translucent portion T are captured in the image captured by the imaging unit 12. Therefore, the imaging unit 12 obtains an image in which the entire surface P of the translucent part T is captured by imaging.

撮像手段１２には、図２に示すように、情報処理手段１３が接続されており、情報処理手段１３は、撮像手段１２が撮像した画像を取得し、取得した画像（透光部Ｔをとらえた画像）を基に検査対象物Ｗ（透光部Ｔ）の表面Ｐにチッピングやクラック等の異常（以下、「損傷部」とも言う）が存在しないか否か、マークＭが所定の位置（例えば、表面Ｐの右上）に配置されているか否かを判定する（即ち、透光部Ｔの外観を検査する）。更に、情報処理手段１３は、画像中でマークＭが所定の位置に配されていることから、検査対象物Ｗが裏面Ｑを支持手段１４によって吸着保持された状態であること、及び、画像内でマークＭが右上に配される向きで検査対象物Ｗが支持手段１４に支持されていることを検知する。なお、本実施の形態では、情報処理手段１３が主としてＣＰＵ及びメモリによって構成されている。 As shown in FIG. 2, an information processing unit 13 is connected to the imaging unit 12, and the information processing unit 13 acquires an image captured by the imaging unit 12 and captures the acquired image (transparent portion T). Whether or not there is an abnormality (hereinafter also referred to as “damaged portion”) such as chipping or cracks on the surface P of the inspection object W (translucent portion T) based on the image). For example, it is determined whether or not it is arranged on the upper right side of the surface P (that is, the appearance of the translucent portion T is inspected). Furthermore, since the mark M is arranged at a predetermined position in the image, the information processing means 13 is in a state where the inspection object W is attracted and held by the support means 14 and the inside of the image Then, it is detected that the inspection object W is supported by the support means 14 in the direction in which the mark M is arranged on the upper right. In the present embodiment, the information processing means 13 is mainly composed of a CPU and a memory.

撮像手段１２によって撮像された画像中の検査対象物Ｗは、図１（Ａ）に示すように、透光部Ｔの大半及びマークＭの大半が反射部Ｒと重なっている。そのため、検査対象物Ｗの画像を基にして、反射部Ｒに重なった状態のマークＭを検出する必要があり、仮に、検査対象物Ｗの表面Ｐの透光部Ｔと反射部Ｒが重なっている領域に損傷部が存在する場合、情報処理手段１３は該当の損傷部を反射部Ｒと判別して検出する必要がある。 As shown in FIG. 1A, the inspection object W in the image imaged by the imaging means 12 has most of the translucent portion T and most of the mark M overlapping the reflecting portion R. For this reason, it is necessary to detect the mark M in a state of being overlapped with the reflection portion R based on the image of the inspection target W. The light transmission portion T and the reflection portion R on the surface P of the inspection target W overlap. If there is a damaged portion in the area, the information processing means 13 needs to detect the corresponding damaged portion as the reflecting portion R and detect it.

この点、撮像手段１２によって撮像された画像では、マークＭ及び反射部Ｒに重なった損傷部が明瞭に表れており、情報処理手段１３によって安定的に検出可能であることが確認されている。照明手段１１の代わりに可視光を照射する照明を採用した際には、撮像された画像中で、マークＭ及び反射部Ｒに重なった損傷部が視覚的に不明瞭となり安定的に検出できなかったことから、紫外光を検査対象物Ｗに照射することで、撮像された画像においてマークＭや反射部Ｒに重なった損傷部が明瞭に視認可能な状態となったと言える。なお、反射部を有さない、透光部のみの検査対象物においても、検査対象物（即ち、透光部）に紫外光を照射することで、検査対象物に可視光を照射するよりも、マークや損傷部を安定的に検出できることを確認している。 In this regard, in the image picked up by the image pickup means 12, the damaged portion overlapping the mark M and the reflection portion R appears clearly, and it has been confirmed that the information processing means 13 can stably detect it. When using illumination that irradiates visible light instead of the illumination means 11, the damaged part that overlaps the mark M and the reflection part R in the captured image is visually unclear and cannot be detected stably. From this, it can be said that by irradiating the inspection object W with the ultraviolet light, the damaged portion overlapping the mark M and the reflection portion R in the captured image is clearly visible. In addition, even in an inspection object having only a translucent part that does not have a reflection part, by irradiating the inspection object (that is, the translucent part) with ultraviolet light, the inspection object is irradiated with visible light. It has been confirmed that marks and damaged parts can be detected stably.

また、検査対象物の中には、透光部の表面に、損傷部に該当しない、形成パターンが不規則な凹凸が存在するものがある。
本願の発明者が行った実験的検証において、表面に凹凸が存在する検査対象物では、表面に一定方向のみから紫外光を到達させた場合や、表面に様々な方向から到達する紫外光のうち一定方向から表面に到達する紫外光の光量を他方向から表面に到達する紫外光の光量より多くした場合に、１）画像中の透光部の表面の輝度が透光部の表面に存在する凹凸の形成パターンの影響を受けること、２）個々の検査対象物によって画像中の透光部の表面の輝度にばらつきが生じて、表面の損傷部を安定的に検出できないことが確認された。 Some inspection objects have irregularities with irregular formation patterns that do not correspond to damaged portions on the surface of the light transmitting portion.
In the experimental verification performed by the inventor of the present application, in the inspection object having unevenness on the surface, when the ultraviolet light reaches the surface only from a certain direction, or among the ultraviolet light reaching the surface from various directions When the amount of ultraviolet light reaching the surface from a certain direction is greater than the amount of ultraviolet light reaching the surface from another direction, 1) the brightness of the surface of the light transmitting part in the image exists on the surface of the light transmitting part 2) It was confirmed that the brightness of the surface of the translucent part in the image varies depending on the individual inspection object, and the damaged part of the surface cannot be detected stably.

そして、透光部の表面に対し様々な方向から紫外光が到達し、かつ、透光部の表面に到達する紫外光の光量が透光部の表面に対する紫外光の到達方向によって偏りがないようにすること（以下、「紫外光の均一化」とも言う）で、画像中の透光部の表面の輝度の検査対象物の個体差が抑制され、透光部の凹凸が設けられた表面の損傷部を安定的に検出できることを確認した。本実施の形態では、発光部１７が等ピッチで円環状に配置された照明手段１１と各発光部１７が発した紫外光を散乱させる拡散部材１５とを採用することによって、紫外光の均一化を図り、形成パターンが不明な凹凸が表面に存在する検査対象物（透光部）の検査精度を向上させている。 Then, the ultraviolet light reaches the surface of the light transmitting part from various directions, and the amount of the ultraviolet light reaching the surface of the light transmitting part is not biased depending on the arrival direction of the ultraviolet light with respect to the surface of the light transmitting part. (Hereinafter, also referred to as “uniformization of ultraviolet light”), the individual difference in the inspection object of the surface of the light transmitting part in the image is suppressed, and the unevenness of the surface of the light transmitting part is provided. It was confirmed that the damaged part could be detected stably. In the present embodiment, the ultraviolet light is made uniform by adopting the illumination means 11 in which the light emitting portions 17 are arranged in an annular shape at an equal pitch and the diffusing member 15 that scatters the ultraviolet light emitted from each light emitting portion 17. Thus, the inspection accuracy of the inspection object (translucent portion) having irregularities with unknown formation patterns on the surface is improved.

以上、本発明の実施の形態を説明したが、本発明は、上記した形態に限定されるものでなく、要旨を逸脱しない条件の変更等は全て本発明の適用範囲である。
例えば、検査対象物は、矩形の板状以外の形状（例えば、円形の板状、直方体状）であってもよく、マークが無くてもよい。マークが無い場合、損傷部の有無のみが検査される。マークが有る場合、マークの配置のみを検査するようにしてもよい。そして、マークは円形に限定されず、例えば、アルファベット等の文字であってもよい。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions and the like that do not depart from the gist are within the scope of the present invention.
For example, the inspection object may have a shape other than a rectangular plate shape (for example, a circular plate shape or a rectangular parallelepiped shape), or may have no mark. If there is no mark, only the presence or absence of a damaged part is inspected. If there is a mark, only the arrangement of the mark may be inspected. And a mark is not limited to a circle, For example, characters, such as an alphabet, may be sufficient.

検査対象物の側面や裏面に照明手段から照射された紫外光が到達するように設計してもよい。
また、支持部材はノズルである必要は無く、例えば、電子部品を左右から挟んで支持する部材であってもよい。 You may design so that the ultraviolet light irradiated from the illumination means may reach the side surface and back surface of the inspection object.
Further, the support member does not need to be a nozzle, and may be a member that supports the electronic component by sandwiching it from the left and right, for example.

更に、拡散部材は必ずしも必要ではない。
拡散部材を設ける場合、拡散部材は照明手段から検査対象物までの光学経路上に位置して、発光部から照射された紫外光を散乱できればよく、前記実施の形態のように、照明手段及び検査対象物を両端とする仮想線分上に配置されている必要はない。例えば、照明手段から照射された紫外光をミラーで反射して検査対象物に向かわせる光学経路においては、拡散部材をミラーと検査対象物の間に配置してもよい。 Furthermore, the diffusion member is not always necessary.
When the diffusing member is provided, the diffusing member only needs to be positioned on the optical path from the illumination unit to the inspection object and to scatter the ultraviolet light emitted from the light emitting unit. It is not necessary to arrange on an imaginary line segment with the object as both ends. For example, in an optical path in which ultraviolet light emitted from the illumination unit is reflected by a mirror and directed toward the inspection object, a diffusion member may be disposed between the mirror and the inspection object.

１０：外観検査装置、１１：照明手段、１２：撮像手段、１３：情報処理手段、１４：支持部材、１５：拡散部材、１６：ベース部材、１７：発光部、Ｄ、Ｅ、Ｆ、Ｇ：側面、Ｍ：マーク、Ｐ：表面、Ｑ：裏面、Ｒ：反射部、Ｓ：撮像位置、Ｔ：透光部、Ｗ：検査対象物 10: Appearance inspection apparatus, 11: Illumination means, 12: Imaging means, 13: Information processing means, 14: Support member, 15: Diffusion member, 16: Base member, 17: Light emitting part, D, E, F, G: Side surface, M: mark, P: front surface, Q: back surface, R: reflection portion, S: imaging position, T: translucent portion, W: inspection object

Claims (2)

可視光が透過する透光部を有する検査対象物の前記透光部に到達する紫外光を照射する照明手段と、
前記紫外光をとらえることが可能な撮像手段と、
前記撮像手段によって撮像された前記透光部の画像を基に前記透光部の外観を検査する情報処理手段とを備えることを特徴とする外観検査装置。 Illuminating means for irradiating ultraviolet light that reaches the light transmitting part of the inspection object having a light transmitting part through which visible light is transmitted;
Imaging means capable of capturing the ultraviolet light;
An appearance inspection apparatus comprising: information processing means for inspecting an appearance of the light transmitting part based on an image of the light transmitting part picked up by the image pickup means. 請求項１に記載の外観検査装置において、前記検査対象物は、可視光を反射する反射部を更に有することを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1, wherein the inspection object further includes a reflection portion that reflects visible light.
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JPH06174448A (en) * 1992-12-09 1994-06-24 Seiko Epson Corp Positioning device for liquid crystal panel and pattern inspection device
JPH06331559A (en) * 1993-05-18 1994-12-02 Hitachi Ltd Method and apparatus for inspection of foreign body
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