JP2019123136A - Printing device and printing method - Google Patents
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- JP2019123136A JP2019123136A JP2018004757A JP2018004757A JP2019123136A JP 2019123136 A JP2019123136 A JP 2019123136A JP 2018004757 A JP2018004757 A JP 2018004757A JP 2018004757 A JP2018004757 A JP 2018004757A JP 2019123136 A JP2019123136 A JP 2019123136A
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- 238000007639 printing Methods 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims abstract description 40
- 239000003595 mist Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 230000005684 electric field Effects 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 239000002994 raw material Substances 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims description 30
- 238000000059 patterning Methods 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 239000008204 material by function Substances 0.000 description 2
- 239000005871 repellent Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000004992 fission Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Abstract
Description
本発明は、インク材料をミスト化して、ミストコーティングによりパターンを印刷する印刷装置及び印刷方法に関する。 BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a printing apparatus and printing method for forming ink material into a mist and printing a pattern by mist coating.
印刷は、印刷版にインクを盛り、紙などの媒体へ転写することで、大量の画像や文字の複製をしてきた。従来の印刷では、印刷版に形成したインクパターンを、媒体へ精度良く転写することに注力されており、数多くの印刷手法が提案されてきた。 In printing, a large amount of images and characters have been reproduced by applying ink to a printing plate and transferring the ink to a medium such as paper. Conventional printing is focused on accurately transferring an ink pattern formed on a printing plate to a medium, and many printing methods have been proposed.
一方、印刷版を要しない無版印刷には、インクジェットや電子写真の手法があり、印刷版を用いることなく任意のパターンデータをオンデマンドで印刷できる。 On the other hand, plateless printing that does not require a printing plate includes ink jet and electrophotographic methods, and arbitrary pattern data can be printed on demand without using a printing plate.
さらに、材料を微細液滴化してコーティングするミストコート技術がある。ミストコート技術とは、材料液を物理的に小さい液滴のミスト状態にして、基材にコートする手法である。材料に混ぜ物をする必要がなく、より純度の高い材料をコーティングすることが可能であり、機能材料のパターンを形成する場合には有利である。前記ミストコート技術でパターン化された膜を得るには、貫通孔のパターンがあるマスク版を通じてミストコートすることでパターン膜を形成する手法が用いられている。 Furthermore, there is a mist coating technology in which the material is formed into fine droplets and coated. The mist coating technique is a method of coating a substrate with the material liquid in the form of a mist of physically small droplets. There is no need to mix the materials, and it is possible to coat higher purity materials, which is advantageous when forming a pattern of functional materials. In order to obtain a film patterned by the mist coating technique, a method of forming a pattern film by mist coating through a mask plate having a pattern of through holes is used.
また、特許文献１のミスト手法では、基材に予め親水と撥水からなるパターンを形成しておき、ミスト材料を搬送してミストを基材に噴霧し、ミスト液滴の基材への付着度合いにより、すなわち親水部にミストが付着し、撥水部にはミストが付着しないようにすることで、マスク版を用いずにパターンを形成する手法が提案されている。 Moreover, in the mist method of patent document 1, the pattern which consists of hydrophilicity and water repellency is previously formed in a base material, mist material is conveyed, mist is sprayed on a base material, and adhesion of a mist droplet to a base material is carried out. Depending on the degree, that is, mist is attached to the hydrophilic portion and the mist is not attached to the water-repellent portion, and a method of forming a pattern without using a mask plate has been proposed.
しかしながら機能性の材料をパターン形成しようとする場合、従来の有版印刷や無版のインクジェット技術では、印刷工程に適したインク特性を得るため機能を有する主材料以外にも混ぜ物をする必要があり、印刷後のパターンは目的材料の純度が低くなり機能特性が低下する問題がある。電子写真方式では、材料をトナー化する必要があり、主剤を帯電制御する材料で覆う必要があり機能性のパターン形成には向かない。 However, when trying to pattern functional materials, conventional plate printing and plateless ink jet technologies need to be mixed in addition to the main materials having functions in order to obtain ink properties suitable for the printing process. However, the pattern after printing has a problem that the purity of the target material is lowered and the functional characteristics are lowered. In the electrophotographic system, it is necessary to make the material into a toner, and it is necessary to cover the main agent with a material for charge control, which is not suitable for forming a functional pattern.
ミストコーティング技術からのパターニングでは、マスク版を使う必要があり、貫通孔によるパターン制約やマスク作製のコストが付加される問題がある。また、特許文献１の手法では、マスク版が不要になるが、予め基材側に親水部及び撥水部のパターンを形成する必要があった。 In the patterning from the mist coating technique, it is necessary to use a mask plate, and there is a problem that the pattern restriction due to the through holes and the cost of mask production are added. Further, in the method of Patent Document 1, although the mask plate becomes unnecessary, it was necessary to form in advance a pattern of a hydrophilic portion and a water repellent portion on the substrate side.
ミストコーティング手法に、エレクトロスプレー方式がある。この方式でパターンを形成するひとつの手法として、ミスト液滴が荷電体であることを利用して、基材に静電潜像を予め形成しておき、電子写真の要領でパターンを現像する手法が挙げられる。この手法では、ミスト手法により無版でのパターン形成を可能とする。 There is an electrospray method as a mist coating method. As one method of forming a pattern by this method, a method of forming an electrostatic latent image in advance on a substrate by utilizing that a mist droplet is a charged body, and developing the pattern in the manner of electrophotography Can be mentioned. In this method, it is possible to form a pattern without printing by the mist method.
しかしながら、従来技術の装置構成で荷電ミストを静電潜像で現像しようとすると、ミ
スト吐出ノズルから基材裏面に設置された対向電極の間に印加された搬送電場により、基材表面の静電潜像の電荷電位が相対的に小さくなり、現像できないという問題があった。
また荷電ミスト液滴は、電場で加速され運動量をもって基材に衝突することから、クーロン力の引力、斥力による静電場による力が弱く、静電潜像の非パターン部にも荷電ミスト液滴が付着してしまい、高精細なパターンを形成することが出来なくなるという問題があった。
However, when attempting to develop charged mist with an electrostatic latent image in the apparatus configuration of the prior art, the electrostatic field of the substrate surface is applied by the transport electric field applied between the mist discharge nozzle and the counter electrode disposed on the back surface of the substrate. There is a problem that the charge potential of the latent image becomes relatively small and development is impossible.
In addition, since the charged mist droplets are accelerated by an electric field and collide with the substrate with momentum, the attractive force of the coulomb force and the electrostatic field due to repulsion are weak, and the charged mist droplets are also formed on the nonpatterned portion of the electrostatic latent image. There is a problem that it adheres and it becomes impossible to form a high definition pattern.
本発明では、このような問題に鑑みて、本発明の課題とするところは、エレクトロスプレー法を生成手段とした荷電ミスト液滴を静電潜像を用いて現像でき、高精細な無版印刷パターニングを可能とする、印刷装置及び印刷方法を提供することである。 In the present invention, in view of such problems, it is an object of the present invention to develop a high-resolution plate-free printing by which charged mist droplets can be developed using an electrostatic latent image with electrospray method as a generation means. It is an object of the present invention to provide a printing apparatus and a printing method that enable patterning.
上記の課題を解決するために、本発明の第一の発明は、
静電潜像が形成された基材と、原料液をエレクトロスプレーノズルから荷電ミストとして噴射するエレクトロスプレー機構と、前記基材と前記エレクトロスプレー機構との間に位置する中間電極と、前記ノズル及び前記中間電極に電場を印加する電場印加機構とを少なくとも備えることを特徴とする印刷装置である。
In order to solve the above problems, a first invention of the present invention is
A substrate on which an electrostatic latent image is formed, an electrospray mechanism which jets a raw material liquid as charged mist from an electrospray nozzle, an intermediate electrode positioned between the substrate and the electrospray mechanism, the nozzle, A printing apparatus comprising at least an electric field application mechanism for applying an electric field to the intermediate electrode.
また、第二の発明は、
前記中間電極と基材との間の距離を調整する調整機構を備えることを特徴とする請求項１に記載の印刷装置である。
Also, the second invention is
The printing apparatus according to claim 1, further comprising: an adjusting mechanism that adjusts a distance between the intermediate electrode and the substrate.
第三の発明は、
前記中間電極が、前記荷電ミストが通過可能な複数の網目形状を有することを特徴とする請求項１または２に記載の印刷装置である。
The third invention is
The printing apparatus according to claim 1, wherein the intermediate electrode has a plurality of mesh shapes through which the charged mist can pass.
第四の発明は、
原料液をエレクトロスプレーノズルにより帯電させて噴射し荷電ミストを生成する工程と、エレクトロスプレーノズルと中間電極に印加した電場により生じた電界に沿って荷電ミストを搬送する工程と、荷電ミストが中間電極を通過し、基材上に付着して、荷電ミストによる印刷パターンを形成する工程と、を備えることを特徴とする印刷方法である。
The fourth invention is
The step of charging the raw material liquid by the electrospray nozzle and spraying to generate charged mist, the step of transporting the charged mist along the electric field generated by the electric field applied to the electrospray nozzle and the intermediate electrode, and the charged mist serving as the intermediate electrode And depositing on the substrate to form a printing pattern with charged mist.
第五の発明は、
前記基材を中間転写体として、基材上に形成された印刷パターンを他の基材に転写する転写工程をさらに備えることを特徴とする、請求項４に記載の印刷方法である。
The fifth invention is
5. The printing method according to claim 4, further comprising a transfer step of transferring the printing pattern formed on the base material to another base material by using the base material as an intermediate transfer member.
本発明の印刷装置及び印刷方法によれば、ミストコート技術を基にした材料純度の高いパターン形成を可能とし、機能性材料の高精細なパターンの無版印刷を可能とするものである。 According to the printing apparatus and printing method of the present invention, it is possible to form a pattern with high material purity based on the mist coating technology, and enable plateless printing of a high-definition pattern of a functional material.
本発明の印刷装置の構成を図１に示し、従来のエレクトロスプレー法を用いた印刷装置の構成を図２に示す。 The configuration of the printing apparatus of the present invention is shown in FIG. 1, and the configuration of the printing apparatus using the conventional electrospray method is shown in FIG.
まず図２により、従来のミストコーティング手法を用いたエレクトロスプレー法の装置構成およびパターニング方法を説明する。
溶媒に材料が溶解または分散された原料液が原料液供給器１０に充填されており、ここからミスト液滴１２をノズル１から吐出し、ノズル１とターゲットとなる基材４背後にある対向電極２との間に、電場印加機構１１により概ね数キロから数万Ｖの電場を印加する。
First, the apparatus configuration and patterning method of the electrospray method using the conventional mist coating method will be described with reference to FIG.
The raw material liquid in which the material is dissolved or dispersed in the solvent is filled in the raw material liquid supply device 10, from which the mist droplets 12 are discharged from the nozzle 1, and the counter electrode behind the nozzle 1 and the base material 4 serving as the target. The electric field application mechanism 11 applies an electric field of approximately several kilos to several tens of thousands of volts between the two and V.2.
吐出されたミスト液滴１２はこの電場電圧によって帯電し電荷チャージされ、ミスト液滴１２内の同極のクーロン力斥力により、レーリー***を引き起こす。
これにより、ノズル１と対向電極２間の空間を移動する際に、逐次微細化していく荷電ミスト液滴を形成する。そしてノズル１と対向電極２間の電場により荷電ミストが搬送されて、基材４に着弾する。
The ejected mist droplet 12 is charged and charged by this electric field voltage, and the Coulomb repulsion of the same polarity in the mist droplet 12 causes Rayleigh fission.
Thereby, when moving the space between the nozzle 1 and the counter electrode 2, charged mist droplets are formed which are successively miniaturized. Then, the charged mist is conveyed by the electric field between the nozzle 1 and the counter electrode 2 and lands on the substrate 4.
このとき材料選択と印加電界、ノズルと基材間距離等の条件を最適化することで、ナノオーダーの成膜を可能とする。基材４上にパターニングする場合には、基材４とノズル１との間に遮蔽物となるマスク版３を設置して、荷電ミスト流を遮蔽して所望のパターンを得る方法がとられている。 At this time, by optimizing the conditions such as the material selection and the applied electric field, the distance between the nozzle and the substrate, etc., it is possible to form a film in nano order. In the case of patterning on the substrate 4, the mask plate 3 serving as a shield is disposed between the substrate 4 and the nozzle 1, and a method of shielding a charged mist flow to obtain a desired pattern is taken. There is.
次に、図１を用いて本発明を説明する。図１は、本発明の印刷装置の装置構成を示す図である。
この装置は、前述の図２に示した従来方式と同様に、原料液供給器１０とノズル１と対向する電極からなる。ノズル１は、前述のエレクトロスプレー方式に基づくエレクトロスプレーノズルであって、原料液供給器１０から供給される原料液をミスト液滴をとして噴射するものであり、ノズル１と原料液供給器１０を併せてエレクトロスプレー機構と称する。
Next, the present invention will be described with reference to FIG. FIG. 1 is a view showing an apparatus configuration of a printing apparatus of the present invention.
This apparatus comprises an electrode facing the raw material liquid supply device 10 and the nozzle 1 as in the conventional method shown in FIG. 2 described above. The nozzle 1 is an electrospray nozzle based on the above-mentioned electrospray system, and sprays the raw material liquid supplied from the raw material liquid supply device 10 as mist droplets, and the nozzle 1 and the raw material liquid supply device 10 are It is also called an electrospray mechanism.
図１と図２の構成の違いとして、対向電極は基材の裏側ではなく、基材４とノズル１の間の中間電極５として配している。すなわちこれによって、基材表面に電極による電場が影響を及ぼすことがなく、前述のように対向電極の間に印加された搬送電場により基材表面の静電潜像の電荷電位が相対的に小さくなり現像できないという問題は解決される。 As a difference in the configuration of FIG. 1 and FIG. 2, the counter electrode is disposed not as the back side of the base but as an intermediate electrode 5 between the base 4 and the nozzle 1. That is, the electric field by the electrode does not affect the surface of the substrate, and the charge potential of the electrostatic latent image on the surface of the substrate is relatively small by the transport electric field applied between the opposing electrodes as described above. The problem of being unable to develop is solved.
まず、ノズル１から吐出された原料液を帯電して、ミスト液滴１２は荷電ミスト化する。荷電ミストを駆動する電場は、電場印加機構１１によりノズル１と中間電極５に印加され、駆動電場により運動量を得た荷電ミストは、中間電極５を透過して基材表面に到達する。 First, the raw material liquid discharged from the nozzle 1 is charged, and the mist droplet 12 is charged. An electric field for driving the charged mist is applied to the nozzle 1 and the intermediate electrode 5 by the electric field application mechanism 11, and the charged mist having obtained momentum by the driving electric field passes through the intermediate electrode 5 and reaches the substrate surface.
この間、荷電ミストは電界中で電気的な力を受け、空気抵抗と重力とバランスするまで加速する。また、中間電極５を透過した荷電ミストは、ノズル１と中間電極５の間の電場の外側に配され電気的駆動力は受けなくなり、空気抵抗と重力により運動量を失い、移動速度が低下する。荷電ミストが運動量を失って、速度がゼロになる位置に基材４に形成された静電潜像６が配されていれば、荷電ミストが静電潜像６から受けるクーロン力の引力と斥力により選択的に基材表面に吸着されてパターンを形成する。 During this time, the charged mist receives an electric force in the electric field and accelerates to balance with air resistance and gravity. Further, the charged mist transmitted through the intermediate electrode 5 is disposed outside the electric field between the nozzle 1 and the intermediate electrode 5 and no longer receives an electric driving force, loses momentum due to air resistance and gravity, and the moving speed decreases. If the electrostatic latent image 6 formed on the substrate 4 is disposed at a position where the charged mist loses its momentum and the velocity becomes zero, the attractive and repulsive forces of the Coulomb force that the charged mist receives from the electrostatic latent image 6 Thus, it is selectively adsorbed on the surface of the substrate to form a pattern.
中間電極５は、電圧印加に耐える導電性を有する材料からなり、かつミスト液滴が通過できる構造をしており、具体的には網目形状のような複数の開口部を有する構造を成している。網目のサイズは、例えばミスト液滴が通過できる大きさであるが、中間電極５の電極構造体にミストが当たればトラップされてしまうので、網目の縁にあたる電極構造体の面積は少ないほど良い。また、その網目パターンは、電場が偏在しないよう一定の繰り返しパターンが好ましい。 The intermediate electrode 5 is made of an electrically conductive material that can withstand voltage application, and has a structure through which mist droplets can pass, and more specifically, has a structure having a plurality of openings such as a mesh shape. There is. The size of the mesh is, for example, a size through which mist droplets can pass, but if the mist hits the electrode structure of the intermediate electrode 5, the mesh is trapped. Therefore, the smaller the area of the electrode structure corresponding to the edge of the mesh, the better. Moreover, the network pattern is preferably a fixed repetitive pattern so that the electric field is not unevenly distributed.
中間電極５の材料は、導電性の高い材料であれば何でも良いが、導電性、加工性を考慮すると、例えばＡｇ、Ａｕ、Ｃｕ、Ａｌ、Ｎｉなどの金属やそれらの合金によるワイヤーを用いればよい。中間電極５は、網目やスリット構造を持ち、荷電ミスト液滴が通過でき、導電性をもつなら何でも良く、その材料や構成を限定されるものではない。 The material of the intermediate electrode 5 may be any material having high conductivity, but in consideration of conductivity and processability, for example, a wire of a metal such as Ag, Au, Cu, Al, Ni or their alloy is used Good. The intermediate electrode 5 has a mesh or slit structure, can pass charged mist droplets, and can be anything as long as it has conductivity, and the material and configuration thereof are not limited.
ノズル１と中間電極５と、中間電極５と基材４の間の距離はそれぞれ可変で、距離を調整する機構を設けてあることが好ましい。このようにすれば、ミスト液滴の原料が異なる場合でも原料の特性に合わせて、駆動電圧や距離を調整して、ミスト液滴サイズ、着弾速度を最適に合わせることができる。 It is preferable that the distance between the nozzle 1 and the intermediate electrode 5 and the distance between the intermediate electrode 5 and the substrate 4 be variable, and a mechanism for adjusting the distance be provided. In this way, even when the source of the mist droplet is different, the drive voltage and the distance can be adjusted according to the characteristics of the source, and the mist droplet size and the landing velocity can be optimally matched.
静電潜像６を形成する手法については、特に限定されるものではないが、公知の電子写真技術でも用いられるように、光電材料を基材上に形成しておいてもよいし、別の装置で静電潜像を形成して、基材４に静電転写して装置に設置してもよい。 The method of forming the electrostatic latent image 6 is not particularly limited, but the photoelectric material may be formed on the substrate as in the known electrophotographic technology, or another method may be used. An electrostatic latent image may be formed by the device and electrostatically transferred to the substrate 4 to be placed in the device.
基材４としては、静電潜像保持の為、誘電性の材料に限定される。
ただし、基材４に形成された印刷パターンを、基材４を中間転写体とし、別の基材に転写する手法もとることができる。この場合には、被転写基材は、それ自体に静電潜像を保持する必要がなくなり、自由な素材の基材を選択することができる。
The substrate 4 is limited to a dielectric material for holding an electrostatic latent image.
However, it is also possible to adopt a method in which the printing pattern formed on the substrate 4 is transferred to another substrate by using the substrate 4 as an intermediate transfer member. In this case, the transfer substrate does not have to hold the electrostatic latent image on its own, and a free material substrate can be selected.
次に、図３を用いて本発明の印刷工程を説明する。
図３（ａ）〜（ｄ）は、荷電ミストが搬送される際に加速・減速する工程を示す概略図である。
まず図３（ａ）において、原料液供給器１０に充填された原料液は、ノズル１から吐出される際に印加された電圧により、荷電ミスト液滴として帯電分離する。帯電した荷電ミスト７の液滴は、ノズル１と中間電極５の間に電場印加機構１１から印加された電場により基材４方向に駆動される。この際、荷電ミスト７は、内部応力と電荷同士のクーロン力斥力のバランスによりレーリー***を起こし、ミスト液滴は細分化する。中間電極５に到達するまで加速されたミスト液滴７は、中間電極５を通過した後は減速しながら基材４に達する。
Next, the printing process of the present invention will be described with reference to FIG.
FIGS. 3A to 3D are schematic views showing steps of acceleration / deceleration when the charged mist is conveyed.
First, in FIG. 3A, the raw material liquid filled in the raw material liquid supply device 10 is charged and separated as a charged mist droplet by a voltage applied when being discharged from the nozzle 1. The droplets of the charged mist 7 are driven in the direction of the substrate 4 by the electric field applied between the nozzle 1 and the intermediate electrode 5 from the electric field application mechanism 11. At this time, charge mist 7 causes Rayleigh division due to the balance between internal stress and coulomb force repulsion between charges, and mist droplets are subdivided. The mist droplets 7 accelerated to reach the intermediate electrode 5 reach the substrate 4 while decelerating after passing through the intermediate electrode 5.
基材４の位置は、中間電極までに得た運動量が、空気抵抗、重力により失う、つまり、速度がゼロとなる位置に配することで、荷電ミストに対する駆動力は基材４上に形成された静電潜像６の表面電位８が支配的な状態になっている。図３（ｂ）にその様子を示す。ここでは、静電潜像６のクーロン力による引力、斥力により、静電潜像６のパターンにしたがって荷電ミストが吸着して現像される。 The driving force for the charged mist is formed on the substrate 4 by arranging the substrate 4 at a position where the momentum obtained up to the intermediate electrode is lost by air resistance and gravity, that is, the velocity becomes zero. The surface potential 8 of the electrostatic latent image 6 is in a dominant state. The situation is shown in FIG. 3 (b). Here, the charged mist is attracted and developed in accordance with the pattern of the electrostatic latent image 6 by the attractive force and the repulsive force of the electrostatic latent image 6 due to the coulomb force.
また、移動中にも溶媒は蒸発するが、吸着したあとの残りの溶媒を、例えば焼成などの加熱手段を用いて蒸発させることで、ミスト中の純度高い材料からなるパターン９が基材４に印刷されることになる。図３（ｃ）は基材４を焼成する様子を示し、図３（ｄ）は焼成後に印刷パターンが基材上に形成された様子を示している。 In addition, the solvent is evaporated also during movement, but the remaining solvent after adsorption is evaporated using heating means such as baking, for example, whereby the pattern 9 made of high purity material in the mist becomes the substrate 4 It will be printed. FIG. 3 (c) shows how the substrate 4 is fired, and FIG. 3 (d) shows how a print pattern is formed on the substrate after firing.
本発明の印刷方法では、静電潜像６の解像度と基材４に着弾したときのミスト液滴サイズが印刷解像度の限界を決める。すなわち、静電潜像の限界は、原理的には原子、分子レベルでの荷電状態に起因することから、分子サイズでの帯電が可能である。
従って、本発明の印刷装置及び印刷方法により、数ナノオーダーといわれるエレクトロスプレー法のミスト液滴を最小単位とする高精細な印刷パターンが形成できる。
In the printing method of the present invention, the resolution of the electrostatic latent image 6 and the mist droplet size when impacted on the substrate 4 determine the limit of the printing resolution. That is, since the limit of the electrostatic latent image is in principle caused by the charge state at the atomic and molecular levels, charging in molecular size is possible.
Therefore, the printing apparatus and the printing method of the present invention can form a high-definition print pattern in which mist droplets in the electrospray method, which is said to be several nano-orders, are the minimum unit.
このように本発明の印刷装置及び印刷方法によれば、原料が溶解または分散した原料液を荷電ミスト化し、駆動電場の外側に置いた静電潜像を用いて現像することで、目的材料によるパターン形成を可能とする。また、本発明によると、ミスト液滴サイズを画素単位
とする高精細な印刷パターンを可能とするものである。
As described above, according to the printing apparatus and printing method of the present invention, the raw material liquid in which the raw material is dissolved or dispersed is made into a charged mist and developed using an electrostatic latent image placed outside the driving electric field. Enables pattern formation. Further, according to the present invention, a high-definition print pattern in which the mist droplet size is in pixel units is made possible.
１ ノズル
２ 対向電極
３ マスク版
４ 基材
５ 中間電極
６ 静電潜像
７ 荷電ミスト
８ 静電潜像の表面電位
９ 印刷パターン
１０ 原料液供給器
１１ 電場印加機構
１２ ミスト液滴
DESCRIPTION OF SYMBOLS 1 nozzle 2 counter electrode 3 mask version 4 base material 5 intermediate electrode 6 electrostatic latent image 7 charged mist 8 surface potential of electrostatic latent image 9 printing pattern 10 raw material liquid supply device 11 electric field application mechanism 12 mist droplet
Claims (5)
原料液をエレクトロスプレーノズルから荷電ミストとして噴射するエレクトロスプレー機構と、
前記基材と前記エレクトロスプレー機構との間に位置する中間電極と、
前記ノズル及び前記中間電極に電場を印加する電場印加機構とを少なくとも備える、
ことを特徴とする印刷装置。 A substrate on which an electrostatic latent image is formed,
An electrospray mechanism that ejects the raw material liquid as charged mist from an electrospray nozzle;
An intermediate electrode located between the substrate and the electrospray mechanism;
At least an electric field application mechanism for applying an electric field to the nozzle and the intermediate electrode,
A printing apparatus characterized by
エレクトロスプレーノズルと中間電極に印加した電場により生じた電界に沿って荷電ミストを搬送する工程と、
荷電ミストが中間電極を通過し、基材上に付着して、荷電ミストによる印刷パターンを形成する工程と、を少なくとも備えることを特徴とする印刷方法。 Charging the raw material liquid with an electrospray nozzle and injecting it to generate charged mist;
Transporting the charged mist along an electric field generated by an electric field applied to the electrospray nozzle and the intermediate electrode;
And D. the charged mist passes through the intermediate electrode and adheres on the substrate to form a printed pattern by the charged mist.
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