JP2019122052A - Vibration wave motor and lens drive device - Google Patents

Abstract

To provide a vibration wave motor that achieves both high thrust and space-saving.SOLUTION: A vibration wave motor 100 includes a plurality of transducer 12, a plurality of friction members 13 in frictional contact with the plurality of transducer 12, a pressing member 14 for pressing the plurality of transducer 12 against the plurality of friction members 13, a plurality of guide members 15 for guiding relative movement of the plurality of transducer 12 and the plurality of friction members 13, and a connecting member 16 for transmitting thrust due to the relative movement to another member, in which the plurality of transducers 12 are arranged in parallel to a direction of the relative movement, a connection member 16 restricts rotation around an axis Ob formed by the plurality of transducer 12 or the plurality of guide members 15 of the plurality of friction members 13, and the connection member 16 is arranged in a region surrounded by the plurality of transducer 12 or the plurality of friction members 13 and the plurality of guide members 15 when viewed in a pressing direction of the pressing member 14.SELECTED DRAWING: Figure 6

Description

本発明は、デジタルカメラなどのレンズ鏡筒に備えられ、特に、振動波モータを用いたレンズ駆動装置に関する。   The present invention relates to a lens driving device provided in a lens barrel such as a digital camera, and in particular to a vibration wave motor.

合焦動作の高速化や、高精度化、静粛化を目的として、超音波モータを駆動源とするレンズ駆動装置が注目されている。特に、被駆動体を直進方向に駆動することが可能なリニア超音波モータは、制御性や駆動特性が優れている。特許文献１では、推力伝達部材と加圧部材を一直線に配置したリニア超音波モータによって駆動するレンズ駆動装置が提案されている。   A lens drive device using an ultrasonic motor as a drive source has attracted attention for the purpose of speeding up focusing operation, achieving high accuracy, and quieting. In particular, a linear ultrasonic motor capable of driving a driven body in a straight direction has excellent controllability and drive characteristics. Patent Document 1 proposes a lens driving device driven by a linear ultrasonic motor in which a thrust transmission member and a pressing member are arranged in a straight line.

特開２０１４−２１２６８２号公報JP 2014-212682 A

しかしながら、大きな推力を得るために振動子と摩擦部材を２つ配置すると、３つの転動部材を避けるように部材を配置する必要があるため、装置が大型化してしまうという課題がある。   However, if two vibrators and two friction members are arranged to obtain a large thrust, the members need to be arranged so as to avoid the three rolling members, so there is a problem that the apparatus becomes large.

本発明の目的は、高推力化と省スペース化を両立した振動波モータを提供することである。   An object of the present invention is to provide a vibration wave motor that achieves both high thrust and space saving.

上記課題を解決するために、本発明の振動波モータでは、複数の振動子と、前記複数の振動子にそれぞれ摩擦接触する複数の摩擦部材と、前記複数の振動子を前記複数の摩擦部材に加圧する加圧部材と、前記複数の振動子と前記複数の摩擦部材との相対移動を案内する案内部材と、前記相対移動による推力を他の部材に伝達する連結部材と、を備え、前記複数の振動子は、前記相対移動の方向に対して並列に配置されており、前記連結部材は、前記複数の振動子、もしくは、前記複数の摩擦部材の前記複数の案内部材により形成される軸周りの回転を規制し、前記連結部材は、前記加圧部材の加圧方向から見たときに、前記複数の振動子、もしくは、前記複数の摩擦部材と、前記複数の案内部材に囲まれた領域内に配置されることを特徴とする。   In order to solve the above problems, in the vibration wave motor according to the present invention, a plurality of transducers, a plurality of friction members in frictional contact with the plurality of transducers, and a plurality of transducers are used as the plurality of friction members. A plurality of pressing members for pressing, a guide member for guiding relative movement between the plurality of vibrators and the plurality of friction members, and a connecting member for transmitting a thrust by the relative movement to another member, The vibrators are arranged in parallel with respect to the direction of the relative movement, and the connection member is an axis formed by the plurality of vibrators or the plurality of guide members of the plurality of friction members. Restricting the rotation of the connecting member, and the connecting member is a region surrounded by the plurality of vibrators or the plurality of friction members and the plurality of guiding members when viewed from the pressing direction of the pressing member. It is characterized by being placed inside .

本発明によれば、高推力化と省スペース化を両立した振動波モータを提供することができる。   According to the present invention, it is possible to provide a vibration wave motor that achieves both high thrust and space saving.

実施例１に係る振動波モータ１００の分解斜視図である。FIG. 1 is an exploded perspective view of a vibration wave motor 100 according to a first embodiment. （Ａ）実施例１に係る移動部材１１の構成を示す断面図である。（Ｂ）同底面図である。(A) It is sectional drawing which shows the structure of the movement member 11 which concerns on Example 1. FIG. (B) It is a bottom view. 実施例１に係る第１の振動子１２Ａ及び第２の振動子１２Ｂの分解斜視図である。FIG. 7 is an exploded perspective view of the first vibrator 12A and the second vibrator 12B according to the first embodiment. （Ａ）実施例１に係る連結部材１６と移動部材１１の案内部１１ｇを示す斜視図である。（Ｂ）同平面図である。（Ｃ）同断面図である。(A) It is a perspective view which shows the connection part 16 which concerns on Example 1, and the guide part 11g of the movement member 11. FIG. (B) It is a top view. (C) It is the same sectional view. （Ａ）、（Ｂ）実施例１に係る第１の振動子１２Ａの動作を示す模式図である。(A), (B) is a schematic diagram which shows operation | movement of 1st vibrator | oscillator 12A which concerns on Example 1. FIG. （Ａ）実施例１に係る振動波モータ１００に発生する力を示す平面図である。（Ｂ）同断面図である。(A) It is a top view which shows the force which generate | occur | produces in the vibration wave motor 100 which concerns on Example 1. FIG. (B) It is the same sectional view. 実施例２に係る振動波モータ２００の分解斜視図である。FIG. 7 is an exploded perspective view of a vibration wave motor 200 according to a second embodiment. （Ａ）、（Ｃ）実施例１に係る特徴を示す図である。（Ｂ）、（Ｄ）実施例３に係る特徴を示す図である。(A), (C) is a figure which shows the characteristic based on Example 1. FIG. (B), (D) is a figure which shows the characteristic based on Example 3. FIG. 振動波モータ１００を適用した固定筒１０４の断面図である。FIG. 6 is a cross-sectional view of a fixed cylinder 104 to which the vibration wave motor 100 is applied. 振動波モータ１００を適用したレンズ駆動装置１のブロック線図である。FIG. 1 is a block diagram of a lens driving device 1 to which a vibration wave motor 100 is applied. 振動波モータ１００を適用したレンズ駆動装置１のフローチャートである。5 is a flowchart of the lens driving device 1 to which the vibration wave motor 100 is applied.

（実施例１）
本発明の実施例１における振動波モータ１００の構成について、図１〜図６を参照して説明する。図１は、振動波モータ１００の分解斜視図である。図２（Ａ）は、図２（Ｂ）の断面線ＩＩＡ−ＩＩＡにおける移動部材１１の構成を示す断面図であり、（Ｂ）は同底面図である。図３は、第１の振動子１２Ａ及び第２の振動子１２Ｂを加圧方向の反対側から見た分解斜視図である。図４（Ａ）は、連結部材１６と移動部材１１の案内部１１ｇを示す斜視図、（Ｂ）は同平面図、（Ｃ）は同断面図である。図５（Ａ）、（Ｂ）は、第１の振動子１２Ａの動作を示す模式図である。図６（Ａ）は、振動波モータ１００に発生する力を示す平面図、（Ｂ）は同断面図である。なお、図において、後述の相対移動の方向をＸ方向、後述の加圧方向をＺ方向、Ｘ方向及びＺ方向に直交する方向をＹ方向とする。 Example 1
The configuration of the vibration wave motor 100 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 6. FIG. 1 is an exploded perspective view of a vibration wave motor 100. FIG. 2A is a cross-sectional view showing the configuration of the movable member 11 along the cross-sectional line IIA-IIA in FIG. 2B, and FIG. 2B is a bottom view thereof. FIG. 3 is an exploded perspective view of the first vibrator 12A and the second vibrator 12B as viewed from the side opposite to the pressing direction. FIG. 4A is a perspective view showing the connecting member 16 and the guide portion 11g of the moving member 11, FIG. 4B is a plan view of the same, and FIG. 4C is a cross-sectional view of the same. 5A and 5B are schematic views showing the operation of the first vibrator 12A. FIG. 6A is a plan view showing a force generated in the vibration wave motor 100, and FIG. 6B is a sectional view of the same. In the drawings, the direction of relative movement described later is taken as the X direction, the pressure direction described later is taken as the Z direction, and the direction orthogonal to the X direction and the Z direction is taken as the Y direction.

図１に示すように、振動波モータ１００は、固定部材１０、移動部材１１、複数の振動子１２、複数の摩擦部材１３、加圧部材１４、複数の案内部材１５、連結部材１６、緩衝部材１７、イコライズ機構１８、給電部材１９で構成される。複数の振動子１２は、第１の振動子１２Ａ及び第２の振動子１２Ｂ、複数の摩擦部材１３は、第１の摩擦部材１３Ａ及び第２の摩擦部材１３Ｂ、複数の案内部材１５は、第１の案内部材１５Ａ及び第２の案内部材１５Ｂでそれぞれ構成される。   As shown in FIG. 1, the vibration wave motor 100 includes a fixed member 10, a moving member 11, a plurality of vibrators 12, a plurality of friction members 13, a pressure member 14, a plurality of guide members 15, a coupling member 16, and a buffer member. 17, an equalizing mechanism 18, and a feed member 19. The plurality of vibrators 12 are a first vibrator 12A and a second vibrator 12B, the plurality of friction members 13 are a first friction member 13A and a second friction member 13B, and the plurality of guide members 15 are The first guide member 15A and the second guide member 15B respectively.

固定部材１０は、基部材１０Ａ、第１の保持部材１０Ｂ（加圧部材保持部材）及び第２の保持部材１０Ｃ（案内部材保持部）で構成される。基部材１０Ａは、不図示の鏡筒１０１に固定されており、後述する付勢部材１８Ｃによって振動子保持部材１８Ａが連結されるとともに、第２の保持部材１０Ｃにビスなどで締結される。第１の保持部材１０Ｂは、板状部材であり、基部材１０Ａに設けられた回動軸１０ｄを中心として回動可能に基部材１０Ａに保持される。また、第１の保持部材１０Ｂには、後述する加圧部材１４の一端を保持する保持部１０ｅが２つ設けられており、加圧部材１４からの加圧力を受けることで、円弧面１８ｆを有するイコライズ部材１８Ｂに当接するように付勢される。このように構成することで、第１の保持部材１０Ｂの接触面が所望の加圧方向であるＺ方向に対してずれたとしても、効率よく加圧力を伝達することができる。第２の保持部材１０Ｃには、第１の案内部材１５Ａ及び第２の案内部材１５Ｂが当接するようにＶ溝１０ｇが形成されている。また、連結部材１６の係合部１６ｄ、１６ｅが貫通する開口部１０ｈがＶ溝１０ｇを挟むように２つ形成されている。さらに、加圧部材１４の他端を保持する保持部１０ｉが設けられている。   The fixing member 10 includes a base member 10A, a first holding member 10B (pressure member holding member), and a second holding member 10C (guide member holding portion). The base member 10A is fixed to a lens barrel 101 (not shown), and the vibrator holding member 18A is connected by a biasing member 18C described later, and is fastened to the second holding member 10C with a screw or the like. The first holding member 10B is a plate-like member, and is held by the base member 10A so as to be pivotable about a pivot shaft 10d provided on the base member 10A. The first holding member 10B is also provided with two holding portions 10e for holding one end of a pressure member 14 described later, and receives the pressing force from the pressure member 14 to form the arc surface 18f. It is biased to abut on the equalizing member 18B. With such a configuration, the pressing force can be efficiently transmitted even if the contact surface of the first holding member 10B is shifted with respect to the Z direction which is the desired pressing direction. In the second holding member 10C, a V groove 10g is formed so that the first guide member 15A and the second guide member 15B abut. Further, two openings 10 h through which the engaging portions 16 d and 16 e of the connecting member 16 pass are formed so as to sandwich the V groove 10 g. Further, a holder 10i for holding the other end of the pressure member 14 is provided.

移動部材１１は、図２（Ｂ）の底面図で示すように、略枠形状であり、第１の摩擦部材１３Ａ及び第２の摩擦部材１３Ｂが底面側に固定されている。そして、案内部１１ｇが第１の摩擦部材１３Ａ及び第２の摩擦部材１３Ｂの間に設けられており、案内部１１ｇには、第１の案内部材１５Ａ及び第２の案内部材１５Ｂが当接するＶ溝１１ａ、１１ｂがそれぞれ形成されている。また、連結部材１６と係合する突出部１１ｃが形成されている。案内部１１ｇは、移動部材１１にビスなどで締結されている。   The moving member 11 has a substantially frame shape as shown in the bottom view of FIG. 2B, and the first friction member 13A and the second friction member 13B are fixed to the bottom side. Further, a guide portion 11g is provided between the first friction member 13A and the second friction member 13B, and the guide portion 11g is configured to contact the first guide member 15A and the second guide member 15B. Grooves 11a and 11b are respectively formed. Moreover, the protrusion part 11c engaged with the connection member 16 is formed. The guide portion 11 g is fastened to the moving member 11 with a screw or the like.

第１の振動子１２Ａは、図３の斜視図に示すように振動板１２ｐと圧電素子１２ｅを接着して構成されている。振動板１２ｐには、突起部１２ｃが長手方向に２つ設けられ、さらに振動子保持部材１８Ａに固定されるための腕１２ｄが長手方向の両端部に設けられ、その腕１２ｄには穴１２ｈが形成されている。振動子保持部材１８Ａが有する突出部１８ｄが穴１２ｈに係合することにより、第１の振動子１２Ａは振動子保持部材１８Ａに保持される。振動子保持部材１８Ａは、付勢部材１８Ｃを介して基部材１０Ａに連結されており、基部材１０Ａは第２の保持部材１０Ｃにビスなどで締結されることで、第１の振動子１２Ａは、固定部材１０に固定される。また、圧電素子１２ｅには、給電部材１９が電気的に接続されており、給電部材１９から特定の振幅及び位相差を有する高周波電圧が圧電素子１２ｅに印加されると、第１の振動子１２Ａが変形して突起部１２ｃが楕円運動（図５（Ａ））を行う。なお、第２の振動子１２Ｂは第１の振動子１２Ａと同様の構成のため、説明を省略する。   The first vibrator 12A is configured by bonding a vibrating plate 12p and a piezoelectric element 12e as shown in the perspective view of FIG. In the diaphragm 12p, two protrusions 12c are provided in the longitudinal direction, and further, arms 12d for fixing to the vibrator holding member 18A are provided at both ends in the longitudinal direction, and holes 12h are provided in the arms 12d. It is formed. The first vibrator 12A is held by the vibrator holding member 18A by the protrusion 18d of the vibrator holding member 18A being engaged with the hole 12h. The vibrator holding member 18A is connected to the base member 10A via the biasing member 18C, and the base member 10A is fastened to the second holding member 10C with a screw or the like, whereby the first vibrator 12A is , Fixed to the fixing member 10. Further, when the power feeding member 19 is electrically connected to the piezoelectric element 12 e and a high frequency voltage having a specific amplitude and phase difference is applied from the power feeding member 19 to the piezoelectric element 12 e, the first vibrator 12 A Is deformed and the projection 12c performs an elliptic motion (FIG. 5A). The second vibrator 12B has the same configuration as the first vibrator 12A, and thus the description thereof will be omitted.

第１の摩擦部材１３Ａは、図１、図２（Ｂ）に示すように、第１の振動子１２Ａに摩擦接触するとともに、移動部材１１に保持されている。第１の振動子１２Ａに高周波電圧が印加され、突起部１２ｃが楕円運動すると、突起部１２ｃと第１の摩擦部材１３Ａとの間に摩擦力が断続的に発生する。そして、この摩擦力は第１の振動子１２Ａが第１の摩擦部材１３Ａに対して相対移動の方向（Ｘ方向）への相対移動の推力となる。なお、第２の摩擦部材１３Ｂも第１の摩擦部材１３Ａと同様に、第２の振動子１２Ｂに摩擦接触するとともに、移動部材１１に保持されており、第２の振動子１２Ｂに高周波電圧が印加されると、相対移動の方向への相対移動の推力が発生する。そして、第１の振動子１２Ａと第２の振動子１２Ｂは、相対移動の方向に対して並列に配置されており、第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂも同様に、相対移動の方向に対して並列に配置されている。   The first friction member 13A is in frictional contact with the first vibrator 12A and is held by the moving member 11, as shown in FIG. 1 and FIG. 2 (B). When a high frequency voltage is applied to the first vibrator 12A and the projection 12c performs an elliptical motion, a frictional force is intermittently generated between the projection 12c and the first friction member 13A. Then, this frictional force is a thrust of relative movement of the first vibrator 12A relative to the first friction member 13A in the direction of relative movement (X direction). Similarly to the first friction member 13A, the second friction member 13B is in frictional contact with the second vibrator 12B and is held by the moving member 11, and the high frequency voltage is transmitted to the second vibrator 12B. When applied, a thrust of relative movement in the direction of relative movement is generated. The first vibrator 12A and the second vibrator 12B are arranged in parallel with respect to the direction of relative movement, and the first friction member 13A and the second friction member 13B are similarly relative movement. Are arranged in parallel to the direction of.

加圧部材１４は、第１の振動子１２Ａと第２の振動子１２Ｂをそれぞれ第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂに摩擦接触させるための弾性を有する部材である。そして、加圧部材１４は、第１の保持部材１０Ｂの保持部１０ｅ及び第２の保持部材１０Ｃの保持部１０ｉに保持されている。この構成により、保持部１０ｅと保持部１０ｉを近づける方向に加圧力を発生させ、第１の保持部材１０Ｂをイコライズ機構１８に付勢する。このとき、加圧部材１４の加圧方向（Ｚ方向）は、第１の振動子１２Ａ及び第２の振動子１２Ｂをそれぞれ第１の摩擦部材１３Ａ及び第２の摩擦部材１３Ｂに押し付ける方向である。   The pressure member 14 is an elastic member for causing the first vibrator 12A and the second vibrator 12B to frictionally contact the first friction member 13A and the second friction member 13B. The pressing member 14 is held by the holding portion 10e of the first holding member 10B and the holding portion 10i of the second holding member 10C. With this configuration, a pressing force is generated in the direction in which the holding portion 10 e and the holding portion 10 i are brought close to each other, and the first holding member 10 B is biased to the equalizing mechanism 18. At this time, the pressing direction (Z direction) of the pressing member 14 is a direction in which the first vibrator 12A and the second vibrator 12B are pressed against the first friction member 13A and the second friction member 13B, respectively. .

複数の案内部材１５は、第１の振動子１２Ａと第２の振動子１２Ｂをそれぞれ第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂに対して相対移動させるための部材であり、第１の案内部材１５Ａと第２の案内部材１５Ｂにより構成される。第１の案内部材１５Ａ及び第２の案内部材１５Ｂはともに転動ボールであり、移動部材１１の案内部１１ｇに設けられたＶ溝１１ａ、１１ｂを介して移動部材１１と当接し、固定部材１０のＶ溝１０ｇを介して固定部材１０と当接する。このとき、連結部材１６の係合部１６ｄ、１６ｅが貫通する開口部１０ｈは加圧方向（Ｚ方向）から見て第１の案内部材１５Ａ及び第２の案内部材１５Ｂと重ならないように配置されている。このような第１の案内部材１５Ａ及び第２の案内部材１５Ｂの構成により、移動部材１１は固定部材１０に対して相対移動の方向へ平行移動する。また、移動部材１１は、第１の案内部材１５Ａと第２の案内部材１５Ｂにより形成される軸Ｏｂ（図６（Ｂ））の周りに回転可能に支持される。   The plurality of guide members 15 are members for moving the first vibrator 12A and the second vibrator 12B relative to the first friction member 13A and the second friction member 13B, respectively. It comprises a guide member 15A and a second guide member 15B. The first guide member 15A and the second guide member 15B are both rolling balls, and contact the moving member 11 through the V grooves 11a and 11b provided in the guide portion 11g of the moving member 11, and the fixing member 10 Contact with the fixing member 10 through the V groove 10g. At this time, the openings 10h through which the engaging portions 16d and 16e of the connecting member 16 pass are disposed so as not to overlap the first guide member 15A and the second guide member 15B when viewed from the pressure direction (Z direction). ing. By the configuration of such first guide member 15A and second guide member 15B, the moving member 11 moves in parallel in the direction of relative movement with respect to the fixed member 10. In addition, the moving member 11 is rotatably supported around an axis Ob (FIG. 6B) formed by the first guide member 15A and the second guide member 15B.

緩衝部材１７は、略板形状の弾性部材であり、第１の振動子１２Ａとイコライズ部材１８Ｂ、第２の振動子１２Ｂとイコライズ部材１８Ｂにそれぞれ挟まれるように配置されている。給電部材１９は、第１の振動子１２Ａの圧電素子１２ｅ及び第２の振動子１２Ｂの圧電素子１２ｅに電圧を印加するフレキシブル基板である。   The buffer member 17 is a substantially plate-shaped elastic member, and is disposed so as to be sandwiched between the first vibrator 12A and the equalize member 18B and the second vibrator 12B and the equalize member 18B. The feed member 19 is a flexible substrate that applies a voltage to the piezoelectric element 12e of the first vibrator 12A and the piezoelectric element 12e of the second vibrator 12B.

次に図４（Ａ）〜（Ｃ）を参照して、連結部材１６について説明する。図４（Ａ）に示すように、連結部材１６は、回転規制部１６ａ、付勢部１６ｂ、Ｖ溝１６ｇ及び係合部１６ｄ、１６ｅを備えている。また、図４（Ｃ）の断面図に示すように、連結部材１６は、第１の案内部材１５Ａと第２の案内部材１５Ｂとにより構成される軸Ｏｂと同一直線に配置される。Ｖ溝１６ｇは、回転規制部１６ａに備えられ、移動部材１１の突出部１１ｃと係合する。このような構成により、第１の案内部材１５Ａと第２の案内部材１５Ｂによって形成される軸Ｏｂ周りにおける、移動部材１１の回転が規制され、移動部材１１がＸ方向（光軸Ｏａの方向）にのみ移動できるようになる。また、係合部１６ｄ、１６ｅは、回転規制部１６ａからＺ方向に延在するように形成され、それぞれ第２の保持部材１０Ｃの開口部１０ｈを貫通して、被駆動部材であるレンズ１０２を保持するレンズ枠１０３と係合するようになっている。すなわち、連結部材１６は、複数の振動子１２と複数の摩擦部材１３の相対移動による推力をレンズ枠１０３に伝達する部材である。そして、付勢部１６ｂは、圧縮バネ等の弾性部材を収容しており、回転規制部１６ａと移動部材１１の軸Ｏｂの方向のガタを無くすように付勢する。   Next, referring to FIGS. 4A to 4C, the connecting member 16 will be described. As shown in FIG. 4A, the connecting member 16 includes a rotation restricting portion 16a, a biasing portion 16b, a V groove 16g, and engaging portions 16d and 16e. Further, as shown in the cross-sectional view of FIG. 4C, the connecting member 16 is disposed on the same straight line as the axis Ob constituted by the first guide member 15A and the second guide member 15B. The V groove 16 g is provided in the rotation restricting portion 16 a and engages with the protrusion 11 c of the moving member 11. With such a configuration, the rotation of the movable member 11 is restricted around the axis Ob formed by the first guide member 15A and the second guide member 15B, and the movable member 11 is in the X direction (direction of the optical axis Oa). You can only move to The engaging portions 16d and 16e are formed to extend in the Z direction from the rotation restricting portion 16a, respectively pass through the opening 10h of the second holding member 10C, and the lens 102, which is a driven member, is formed. It engages with the lens frame 103 to be held. That is, the connecting member 16 is a member that transmits the thrust due to the relative movement of the plurality of vibrators 12 and the plurality of friction members 13 to the lens frame 103. The biasing portion 16 b accommodates an elastic member such as a compression spring, and biases the rotation restricting portion 16 a so as to eliminate backlash in the direction of the axis Ob of the moving member 11.

以上の構成から、連結部材１６は、複数の振動子１２、もしくは、複数の摩擦部材１３の、複数の案内部材１５により形成される軸Ｏｂの周りの回転を規制することができる。すなわち、第１の振動子１２Ａと第２の振動子１２Ｂ、もしくは、第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂの第１の案内部材１５Ａと第２の案内部材１５Ｂとにより形成される軸Ｏｂの周りの回転が規制される。   From the above configuration, the connecting member 16 can restrict rotation of the plurality of vibrators 12 or the plurality of friction members 13 around the axis Ob formed by the plurality of guiding members 15. That is, it is formed of the first vibrator 12A and the second vibrator 12B, or the first friction member 13A and the first guide member 15A and the second guide member 15B of the second friction member 13B. The rotation about the axis Ob is restricted.

イコライズ機構１８は、図１に示すように、２つの振動子保持部材１８Ａ、２つのイコライズ部材１８Ｂ、１つの付勢部材１８Ｃで構成される。それぞれの振動子保持部材１８Ａは、複数の突出部１８ｄを備えており、それぞれの突出部１８ｄが振動板１２ｐの対応する穴１２ｈと係合することで、第１の振動子１２Ａ及び第２の振動子１２Ｂを保持する。また、振動子保持部材１８Ａには、付勢部材１８Ｃに係合する突出部１８ｅがそれぞれ２つ形成されている。イコライズ部材１８Ｂは、Ｙ方向に延在する半円筒形状で構成された円弧面１８ｆを備えており、円弧面１８ｆは第１の保持部材１０Ｂと当接し、第１の保持部材１０Ｂから加圧力を受けるように配置される。そして、この加圧力を受けることで、イコライズ部材１８Ｂの円弧面１８ｆが形成された面の反対側の面が緩衝部材１７に当接する。円弧面１８ｆを有することで、第１の保持部材１０ＢがＸ方向に傾いても加圧部材１４による加圧力を緩衝部材１７に効率よく伝達することができる。付勢部材１８Ｃは、略板状の弾性部材であり、一方の方向には剛性が低く、他の方向には剛性が高い部材である。本実施例１では加圧方向には剛性が低く、他の方向には剛性が高い特性となっている。付勢部材１８Ｃの穴部１８ｈは、振動子保持部材１８Ａの突出部１８ｅと係合する。したがって、付勢部材１８Ｃによって振動子保持部材１８Ａは、加圧方向のみに変位することが可能である。以上のような構成とすることで、製造誤差等のばらつきによって第１の振動子１２Ａ及び第２の振動子１２Ｂと第１の保持部材１０Ｂが平行でなくても、加圧部材１４の加圧力を第１の振動子１２Ａ及び第２の振動子１２Ｂに伝達することができる。   As shown in FIG. 1, the equalizing mechanism 18 includes two vibrator holding members 18A, two equalizing members 18B, and one biasing member 18C. Each transducer holding member 18A is provided with a plurality of protrusions 18d, and the respective protrusions 18d engage with the corresponding holes 12h of the diaphragm 12p, whereby the first transducer 12A and the second The vibrator 12B is held. Further, two projections 18e that engage with the biasing member 18C are formed on the vibrator holding member 18A. The equalizing member 18B is provided with an arc surface 18f formed in a semi-cylindrical shape extending in the Y direction, and the arc surface 18f abuts on the first holding member 10B, and pressure is applied from the first holding member 10B. Arranged to receive. Then, the surface opposite to the surface on which the arc surface 18 f of the equalizing member 18 B is formed abuts on the buffer member 17 by receiving the pressure. By having the circular arc surface 18 f, even if the first holding member 10B is inclined in the X direction, the pressing force by the pressing member 14 can be efficiently transmitted to the buffer member 17. The biasing member 18C is a substantially plate-like elastic member, and is a member having low rigidity in one direction and high rigidity in the other direction. In the first embodiment, the rigidity is low in the pressing direction, and the rigidity is high in the other directions. The hole 18h of the biasing member 18C engages with the projection 18e of the vibrator holding member 18A. Therefore, the vibrator holding member 18A can be displaced only in the pressing direction by the biasing member 18C. With the above configuration, even if the first vibrator 12A, the second vibrator 12B, and the first holding member 10B are not parallel due to variations in manufacturing error etc., the pressure force of the pressure member 14 is obtained. Can be transmitted to the first vibrator 12A and the second vibrator 12B.

以上の構成から、振動波モータ１００は、給電部材１９によって印加される電圧によって第１の振動子１２Ａ及び第２の振動子１２Ｂが駆動され、移動部材１１が第１の摩擦部材１３Ａ及び第２の摩擦部材１３Ｂを保持する固定部材１０に対して相対移動する。移動部材１１にかかる推力が連結部材１６を介して被駆動部材であるレンズ１０２に伝達されて駆動することにより、ピント合わせを行うことができる。   From the above configuration, in the vibration wave motor 100, the first vibrator 12A and the second vibrator 12B are driven by the voltage applied by the power feeding member 19, and the moving member 11 is the first friction member 13A and the second Relative to the fixed member 10 holding the friction member 13B. When the thrust applied to the moving member 11 is transmitted to the lens 102 which is a driven member via the connecting member 16 and driven, focusing can be performed.

次に、図５（Ａ）、（Ｂ）を参照して、振動波モータ１００（超音波モータ）の動作について説明する。図５（Ａ）は、第１の振動子１２Ａの動作を示す模式図であり、図５（Ｂ）は第１の振動子１２Ａと第１の摩擦部材１３Ａの間に発生する力を示す模式図である。なお、第２の振動子１２Ｂの基本動作は第１の振動子１２Ａと同様であるので、不図示である。   Next, with reference to FIGS. 5A and 5B, the operation of the vibration wave motor 100 (ultrasonic motor) will be described. FIG. 5A is a schematic view showing an operation of the first vibrator 12A, and FIG. 5B is a schematic view showing a force generated between the first vibrator 12A and the first friction member 13A. FIG. The basic operation of the second vibrator 12B is not shown because it is the same as that of the first vibrator 12A.

第１の振動子１２Ａの圧電素子１２ｅには、給電部材１９が接続されており、高周波電圧が印加される。圧電素子１２ｅに二相の高周波電圧を印加すると、圧電素子１２ｅが変形しながら振動し、それに伴って振動板１２ｐが変形する。高周波電圧の周波数（超音波領域の周波数）を所定の値に設定することで、第１の振動子１２Ａの突起部１２ｃは、図５（Ａ）の矢印で示すように楕円運動し、第１の摩擦部材１３Ａと接触・離間を繰り返す。第１の振動子１２Ａの突起部１２ｃと第１の摩擦部材１３Ａが接触している間は、図５（Ｂ）に示すように各突起部１２ｃにおいてＸ方向の摩擦力Ｆ／２が発生し、離間している間は、摩擦力が発生しない。したがって、第１の振動子１２Ａと第１の摩擦部材１３Ａの間には、断続的にＸ方向の摩擦力Ｆが発生するため、この摩擦力Ｆによって第１の振動子１２Ａと第１の摩擦部材１３Ａが相対移動する。また、不図示の第２の振動子１２Ｂは第２の摩擦部材１３Ｂに対して同様の動作を行うため、複数の振動子１２による総摩擦力２Ｆが発生する。この総摩擦力２Ｆは、振動波モータ１００が発生する推力であり、移動部材１１の突出部１１ｃを介して連結部材１６へ伝達される。以上から、第１の振動子１２Ａ及び第２の振動子１２Ｂによって発生する総摩擦力２Ｆにより推力が発生し、移動部材１１は、相対移動の方向に駆動される。   A feed member 19 is connected to the piezoelectric element 12e of the first vibrator 12A, and a high frequency voltage is applied. When a high frequency voltage of two phases is applied to the piezoelectric element 12e, the piezoelectric element 12e is deformed and vibrated, and the diaphragm 12p is accordingly deformed. By setting the frequency of the high frequency voltage (the frequency of the ultrasonic wave region) to a predetermined value, the projection 12 c of the first transducer 12 A performs an elliptical motion as shown by the arrow in FIG. Contact and separation with the friction member 13A. While the projection 12c of the first vibrator 12A and the first friction member 13A are in contact with each other, as shown in FIG. 5B, the frictional force F / 2 in the X direction is generated in each projection 12c. During separation, no frictional force is generated. Therefore, since the frictional force F in the X direction is generated intermittently between the first vibrator 12A and the first friction member 13A, the frictional force F causes the first vibrator 12A and the first friction to be generated. The members 13A move relative to each other. Further, since the second vibrator 12B (not shown) performs the same operation on the second friction member 13B, a total friction force 2F is generated by the plurality of vibrators 12. The total friction force 2F is a thrust generated by the vibration wave motor 100, and is transmitted to the connecting member 16 through the projection 11c of the moving member 11. From the above, a thrust is generated by the total frictional force 2F generated by the first vibrator 12A and the second vibrator 12B, and the moving member 11 is driven in the direction of relative movement.

次に、図６（Ａ）、（Ｂ）を参照して、本発明の連結部材１６の配置及び振動波モータ１００に発生する力について説明する。図６（Ａ）は、本発明の振動波モータ１００に発生する力を示す平面図である。図６（Ｂ）は、図６（Ａ）の断面線ＶＩＢ−ＶＩＢにおける断面図である。第１の振動子１２Ａ及び第２の振動子１２Ｂによって移動部材１１には推力（総摩擦力２Ｆ）が発生する。そして、被駆動体（レンズ枠１０３）は、第１の規制部材１０５（図９）及び第２の規制部材１０６によって駆動負荷ｆを受けながら推力（総摩擦力２Ｆ）によって駆動される。このとき、レンズ枠１０３に発生する駆動負荷ｆが連結部材１６を介して移動部材１１に伝達されるため、駆動負荷ｆは、軸Ｏｂの近傍に伝達される。仮に、駆動負荷ｆが発生する位置が軸Ｏｂから離れた軸Ｏｃにあるとすると、軸Ｏｂを形成する第１の案内部材１５Ａ又は第２の案内部材１５Ｂを支点として回転するモーメントＭが発生する。このモーメントＭが所定の値以上になると、第１の案内部材１５Ａ又は第２の案内部材１５Ｂが浮いてしまい、制御性が低下してしまう。しかしながら、本発明のように駆動負荷ｆの発生位置が軸Ｏｂの近傍であると、モーメントＭの発生が抑制されるため、複数の案内部材１５のいずれかの浮きを防ぐことができる。軸Ｏｂと駆動負荷ｆの発生位置を近づけるためには、加圧力の方向（Ｚ方向）から見た時に、連結部材１６が第１の振動子１２Ａと第２の振動子１２Ｂの間、もしくは第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂの間に配置されることが必要になる。   Next, with reference to FIGS. 6A and 6B, the arrangement of the connection member 16 of the present invention and the force generated in the vibration wave motor 100 will be described. FIG. 6A is a plan view showing a force generated in the vibration wave motor 100 of the present invention. FIG. 6B is a cross sectional view taken along a cross sectional line VIB-VIB in FIG. The first vibrator 12A and the second vibrator 12B generate a thrust (total friction force 2F) on the moving member 11. The driven body (lens frame 103) is driven by the thrust (total friction force 2F) while receiving the driving load f by the first restricting member 105 (FIG. 9) and the second restricting member 106. At this time, the driving load f generated on the lens frame 103 is transmitted to the moving member 11 via the coupling member 16, so the driving load f is transmitted in the vicinity of the axis Ob. Assuming that the position where the drive load f is generated is on the axis Oc apart from the axis Ob, a moment M is generated that rotates around the first guide member 15A or the second guide member 15B that forms the axis Ob. . When the moment M becomes equal to or more than a predetermined value, the first guide member 15A or the second guide member 15B floats, and the controllability is reduced. However, as in the present invention, when the generation position of the drive load f is in the vicinity of the axis Ob, the generation of the moment M is suppressed, so that any floating of the plurality of guide members 15 can be prevented. In order to make the generation position of the axis Ob close to the generation position of the driving load f, the connecting member 16 may be between the first vibrator 12A and the second vibrator 12B, or viewed in the direction of the pressing force (Z direction). It is necessary to be disposed between the first friction member 13A and the second friction member 13B.

以上から、第１の振動子１２Ａと第２の振動子１２Ｂの加圧力の合力の方向から見た時に、連結部材１６が第１の振動子１２Ａと第２の振動子１２Ｂの間に配置されることで、移動部材１１にかかるモーメントＭを抑制し、制御性を良好に保つことができる。もしくは、連結部材１６が第１の摩擦部材１３Ａと第２の摩擦部材１３Ｂと、第１の案内部材１５Ａと第２の案内部材１５Ｂに囲まれた領域内に配置されることで、移動部材１１にかかるモーメントＭを抑制し、制御性を良好に保つことができる。   From the above, when viewed from the direction of the resultant force of the pressing forces of the first vibrator 12A and the second vibrator 12B, the connecting member 16 is disposed between the first vibrator 12A and the second vibrator 12B. Thus, the moment M applied to the moving member 11 can be suppressed, and the controllability can be kept good. Alternatively, the connecting member 16 is disposed in a region surrounded by the first friction member 13A, the second friction member 13B, the first guide member 15A, and the second guide member 15B, thereby the moving member 11 Can be suppressed, and controllability can be kept good.

次に、本発明の効果について説明する。本発明では、複数の案内部材１５を備え、複数の案内部材（２つ）が形成する軸Ｏｂ周りの回転を連結部材１６で規制することで、小型化を実現している。以上説明したように、本発明では、複数の振動子１２及び複数の摩擦部材１３を配置して高推力化が可能になるとともに、省スペース化を両立することができる振動波モータ１００を提供することができる。   Next, the effects of the present invention will be described. In the present invention, miniaturization is realized by providing the plurality of guide members 15 and restricting the rotation around the axis Ob formed by the plurality of guide members (two) by the connecting member 16. As described above, the present invention provides the vibration wave motor 100 capable of achieving high thrusting by arranging the plurality of vibrators 12 and the plurality of friction members 13 and achieving both space saving. be able to.

（実施例２）
次に、本発明の実施例２における振動波モータ２００について説明する。実施例１と異なる部材について、振動波モータ２００の分解斜視図である図７を参照して説明する。 (Example 2)
Next, a vibration wave motor 200 according to a second embodiment of the present invention will be described. The members different from the first embodiment will be described with reference to FIG. 7 which is an exploded perspective view of the vibration wave motor 200.

振動波モータ２００は、固定部材２０、移動部材２１、複数の振動子２２、複数の摩擦部材２３、加圧部材２４、複数の案内部材２５、連結部材２６、緩衝部材２７、イコライズ機構２８、給電部材２９で構成される。複数の振動子２２は、第１の振動子２２Ａ及び第２の振動子２２Ｂ、複数の摩擦部材２３は、第１の摩擦部材２３Ａ及び第２の摩擦部材２３Ｂ、複数の案内部材２５は、第１の案内部材２５Ａ及び第２の案内部材２５Ｂでそれぞれ構成される。   The vibration wave motor 200 includes a fixed member 20, a moving member 21, a plurality of vibrators 22, a plurality of friction members 23, a pressing member 24, a plurality of guiding members 25, a coupling member 26, a buffer member 27, an equalizing mechanism 28, and power feeding. It is composed of a member 29. The plurality of vibrators 22 are a first vibrator 22A and a second vibrator 22B, the plurality of friction members 23 are a first friction member 23A and a second friction member 23B, and the plurality of guide members 25 are The first guide member 25A and the second guide member 25B respectively.

固定部材２０は、基部材２０Ａ、第１の保持部材２０Ｂ（加圧部）、第２の保持部材２０Ｃ（案内部材保持部）で構成されている。基部材２０Ａは、実施例１における基部材１０Ａと基本的な構成は同様である。第１の保持部材２０Ｂは、板状部材であり、基部材２０Ａにビスなどで締結され、加圧部材２４の一端を支持している。第２の保持部材２０Ｃは、実施例１における第２の保持部材１０Ｃと基本的な構成は同様である。移動部材２１は、実施例１における移動部材１１と基本的な構成は同様である。   The fixing member 20 includes a base member 20A, a first holding member 20B (pressure unit), and a second holding member 20C (guide member holding portion). The basic member 20A has the same basic configuration as the base member 10A in the first embodiment. The first holding member 20B is a plate-like member, is fastened to the base member 20A with a screw or the like, and supports one end of the pressure member 24. The second holding member 20C has the same basic configuration as the second holding member 10C in the first embodiment. The moving member 21 has the same basic configuration as the moving member 11 in the first embodiment.

第１の振動子２２Ａは、略長方形の振動板２２ｐと圧電素子２２ｅを接着したものである。また、Ｘ方向及びＹ方向に直交するＺ’方向に直行する面に対して所定の角度をなすように配置されている。その他の構成は実施例１における第１の振動子１２Ａと同様である。第２の振動子２２Ｂは、Ｘ方向及びＹ方向に直交するＺ’方向に直行する面に対して所定の角度をなすとともに、相対移動の方向が形成する面に関して、第１の振動子２２Ａと対称になるように配置されている。その他の構成は第１の振動子２２Ａと同様である。そして、第１の振動子２２Ａと第２の振動子２２Ｂは、相対移動の方向に対して並列に配置されている。   The first vibrator 22A is formed by bonding a substantially rectangular diaphragm 22p and a piezoelectric element 22e. Moreover, it arrange | positions so that a predetermined angle may be made with respect to the surface orthogonal to Z 'direction orthogonal to a X direction and a Y direction. The other configuration is the same as that of the first vibrator 12A in the first embodiment. The second vibrator 22B makes a predetermined angle with respect to a plane orthogonal to the Z ′ direction orthogonal to the X direction and the Y direction, and the first vibrator 22A and the first vibrator 22A form a plane formed by the direction of relative movement. It is arranged to be symmetrical. The other configuration is the same as that of the first transducer 22A. The first vibrator 22A and the second vibrator 22B are disposed in parallel with respect to the relative movement direction.

第１の摩擦部材２３Ａは、第１の振動子２２Ａが摩擦接触する部材であり、移動部材２１に保持されている。また、第１の振動子２２Ａと同様に、Ｘ方向及びＹ方向に直交するＺ’方向に直行する面に対して所定の角度をなすように配置される。このとき、第１の振動子２２Ａと第１の摩擦部材２３Ａは略平行に配置される。その他の構成は実施例１における第１の摩擦部材１３Ａと同様である。第２の摩擦部材２３Ｂは、Ｘ方向及びＹ方向に直交するＺ’方向に直行する面に対して所定の角度をなすとともに、相対移動の方向が形成する面に関して、第１の摩擦部材２３Ａと対称になるように配置される。その他の構成は第１の摩擦部材２３Ａと同様である。   The first friction member 23A is a member with which the first vibrator 22A is in frictional contact, and is held by the moving member 21. Further, similarly to the first vibrator 22A, it is arranged to form a predetermined angle with respect to a plane orthogonal to the Z ′ direction orthogonal to the X direction and the Y direction. At this time, the first vibrator 22A and the first friction member 23A are disposed substantially in parallel. The other configuration is the same as that of the first friction member 13A in the first embodiment. The second friction member 23B makes a predetermined angle with a plane orthogonal to the Z ′ direction orthogonal to the X direction and the Y direction, and the first friction member 23A and the first friction member 23A form a plane formed by the direction of relative movement. It is arranged to be symmetrical. The other configuration is the same as that of the first friction member 23A.

加圧部材２４は、圧縮バネ等の弾性を有する部材であり、固定部材２０の基部材２０Ａと第１の保持部材２０Ｂの間に挟持される。この構成により、複数の振動子２２を移動部材２１に当接させるように加圧方向に加圧力を発生させる。その他の構成は実施例１における加圧部材１４と同様である。   The pressure member 24 is a member having elasticity, such as a compression spring, and is held between the base member 20A of the fixing member 20 and the first holding member 20B. With this configuration, a pressing force is generated in the pressing direction so that the plurality of transducers 22 abut on the moving member 21. The other configuration is the same as that of the pressure member 14 in the first embodiment.

複数の案内部材２５、連結部材２６、緩衝部材２７、イコライズ機構２８、給電部材２９は、それぞれ実施例１における複数の案内部材１５、連結部材１６、緩衝部材１７、イコライズ機構１８、給電部材１９と同様である。以上の構成から、振動波モータ２００は、実施例１と同様に給電部材２９によって印加される電圧によって、摩擦力（推力）を発生し、被駆動部材であるレンズ枠１０３が移動し、ピント合わせを行うことができる。また、このような構成にすることで、振動波モータ２００を配置する際に円筒形状に沿った配置がしやすく、鏡筒１０１の径方向に小型化することができる。本実施例２では、複数の振動子２２及び複数の摩擦部材２３を配置して高推力化が可能になるとともに、省スペース化を両立することができる振動波モータ２００を提供することができる。   The plurality of guide members 25, the connection member 26, the buffer member 27, the equalize mechanism 28, and the power supply member 29 are respectively the plurality of guide members 15, the connection member 16, the buffer member 17, the equalize mechanism 18, and the power supply member 19 in the first embodiment. It is similar. From the above configuration, the vibration wave motor 200 generates a frictional force (thrust) by the voltage applied by the power feeding member 29 as in the first embodiment, and the lens frame 103 as a driven member moves to focus the object. It can be performed. In addition, with such a configuration, when the vibration wave motor 200 is disposed, the disposition along the cylindrical shape can be easily performed, and the radial size of the lens barrel 101 can be reduced. In the second embodiment, it is possible to provide a vibration wave motor 200 capable of achieving high thrust by arranging the plurality of transducers 22 and the plurality of friction members 23 and achieving both space saving.

（実施例３）
本発明の実施例３における振動波モータ３００について説明する。実施例１と異なる構成について、図８（Ａ）〜（Ｄ）を参照して説明する。図８（Ａ）は、実施例１における振動波モータ１００の固定部材１０の特に第２の保持部材１０Ｃの模式図、図８（Ｂ）は振動波モータ３００の固定部材３０の特に第２の保持部材３０Ｃの模式図である。図８（Ｃ）は、振動波モータ１００の移動部材１１の特に案内部１１ｇの模式図、図８（Ｄ）は振動波モータ３００の移動部材３１の特に案内部３１ｇの模式図である。 (Example 3)
A vibration wave motor 300 according to a third embodiment of the present invention will be described. A configuration different from that of the first embodiment will be described with reference to FIGS. 8 (A) to (D). 8A is a schematic view of the second holding member 10C of the fixing member 10 of the vibration wave motor 100 according to the first embodiment, and FIG. 8B is a second schematic of the fixing member 30 of the vibration wave motor 300. It is a schematic diagram of 30 C of holding members. FIG. 8C is a schematic view of the guide portion 11g of the moving member 11 of the vibration wave motor 100, and FIG. 8D is a schematic view of the guide portion 31g of the moving member 31 of the vibration wave motor 300.

実施例３の振動波モータ３００は、固定部材３０の第２の保持部材３０Ｃ、移動部材３１の案内部３１ｇ及び連結部材３６以外は、実施例１における構成と同様である。図８（Ｂ）を参照すると、第２の保持部材３０Ｃには、第１の案内部材３５Ａが当接するようにＶ溝３０ｇが形成され、同様に第２の案内部材３５Ｂが当接するようにＶ溝３０ｇが形成される。ここで、２つのＶ溝３０ｇは互いに平行であるが同一直線に配置されない。また、２つのＶ溝３０ｇに挟まれるように開口部３０ｈが形成されており、連結部材３６が貫通するように配置されている。   The vibration wave motor 300 of the third embodiment has the same configuration as that of the first embodiment except for the second holding member 30C of the fixed member 30, the guide portion 31g of the moving member 31, and the connecting member 36. Referring to FIG. 8B, a V-shaped groove 30g is formed in the second holding member 30C so that the first guide member 35A abuts, and V in the same manner as the second guide member 35B abuts. Grooves 30g are formed. Here, the two V-grooves 30g are parallel to each other but not arranged in the same straight line. Further, an opening 30 h is formed so as to be sandwiched between the two V-grooves 30 g, and the connection member 36 is disposed to penetrate.

図８（Ｄ）を参照すると、移動部材３１の案内部３１ｇには、第１の案内部材３５Ａが当接するようにＶ溝３１ａが形成され、第２の案内部材３５Ｂが当接するようにＶ溝３１ｂが形成されている。ここで、Ｖ溝３１ａ、３１ｂは互いに平行であるが同一直線に配置されない。その他の構成は実施例１における移動部材１１の案内部１１ｇと同様である。   Referring to FIG. 8D, a V groove 31a is formed in the guide portion 31g of the moving member 31 so that the first guide member 35A abuts, and a V groove such that the second guide member 35B abuts. 31b is formed. Here, the V grooves 31a and 31b are parallel to each other but not arranged in the same straight line. The other configuration is the same as that of the guide portion 11 g of the moving member 11 in the first embodiment.

第１の案内部材３５Ａ及び第２の案内部材３５Ｂは、移動部材３１の案内部３１ｇのＶ溝３１ａ、３１ｂを介して移動部材３１と当接する。また、第２の保持部材３０Ｃの２つのＶ溝３０ｇを介して固定部材３０と当接する。このとき、２つのＶ溝３０ｇと連結部材３６は同一直線になく、同様にＶ溝３１ａとＶ溝３１ｂと連結部材３６は同一直線にない。したがって、連結部材３６は、不図示の加圧部材３４の加圧方向から見て、第１の案内部材３５Ａと第２の案内部材３５Ｂとにより構成される軸Ｏｂと同一直線に配置されない。   The first guide member 35A and the second guide member 35B contact the moving member 31 via the V-grooves 31a and 31b of the guide portion 31g of the moving member 31. Further, it abuts on the fixing member 30 via the two V-grooves 30g of the second holding member 30C. At this time, the two V-grooves 30g and the connecting member 36 are not in the same straight line, and similarly, the V-grooves 31a, the V-groove 31b, and the connecting member 36 are not in the same straight line. Therefore, the connecting member 36 is not arranged in the same straight line as the axis Ob constituted by the first guide member 35A and the second guide member 35B when viewed from the pressing direction of the pressing member 34 (not shown).

実施例１の振動波モータ１００では、第１の案内部材１５Ａ及び第２の案内部材１５Ｂの移動領域と連結部材１６が直列に並んでいたため、相対移動の方向における長さが長くなっていた。しかしながら、振動波モータ３００では、第１の案内部材３５Ａ及び第２の案内部材３５Ｂの移動領域と連結部材３６がずれて配置されているため、間隔をつめることができ、相対移動の方向に小型化することができる。以上の構成から、振動波モータ３００は、実施例１と同様に印加される電圧によって、摩擦力（推力）を発生し、被駆動部材であるレンズ枠１０３が移動し、ピント合わせを行うことができる。また、このような構成にすることで、相対移動の方向の大きさを小型化することができる。本実施例３では、複数の振動子及び複数の摩擦部材を配置して高推力化が可能になるとともに、省スペース化を両立することができる振動波モータ３００を提供することができる。   In the vibration wave motor 100 according to the first embodiment, the moving region of the first guide member 15A and the second guide member 15B and the connecting member 16 are arranged in series, so the length in the relative movement direction is long. . However, in the vibration wave motor 300, since the movement region of the first guide member 35A and the second guide member 35B and the connection member 36 are disposed out of alignment, it is possible to close the gap and miniaturize in the direction of relative movement. Can be From the above configuration, the vibration wave motor 300 generates a frictional force (thrust) by the voltage applied as in the first embodiment, and moves the lens frame 103 as a driven member to perform focusing. it can. Further, with such a configuration, the size of the relative movement direction can be miniaturized. In the third embodiment, it is possible to provide a vibration wave motor 300 capable of achieving high thrust by arranging a plurality of vibrators and a plurality of friction members, and achieving both space saving.

（適用例）
次に、レンズ１０２の案内機構について図９を参照して説明する。図９は、振動波モータ１００を実装した固定筒１０４の断面図である。レンズ枠１０３は、略筒形状であり、中心にレンズ１０２を保持する。レンズ枠１０３には、第１の規制部材１０５を貫くように、丸穴１０３ａが形成され、第２の規制部材１０６が当接するように、Ｕ溝１０３ｂが形成されている。また、連結部材１６を介して振動波モータ１００と連結している。 (Example of application)
Next, the guide mechanism of the lens 102 will be described with reference to FIG. FIG. 9 is a cross-sectional view of the fixed cylinder 104 on which the vibration wave motor 100 is mounted. The lens frame 103 has a substantially cylindrical shape, and holds the lens 102 at the center. A round hole 103 a is formed in the lens frame 103 so as to penetrate the first restricting member 105, and a U groove 103 b is formed so that the second restricting member 106 abuts. Further, it is connected to the vibration wave motor 100 via the connection member 16.

固定筒１０４は、略筒形状であり、不図示の鏡筒１０１に保持されている。固定筒１０４は、第１の規制部材１０５、第２の規制部材１０６、振動波モータ１００をそれぞれ保持している。第１の規制部材１０５は、メインガイドバーであり、レンズ枠１０３の丸穴１０３ａを介してレンズ枠１０３と当接する。第１の規制部材１０５により、レンズ枠１０３の相対移動の方向に直交する方向（Ｙ方向）の平行移動が規制される。第２の規制部材１０６は、サブガイドバーであり、レンズ枠１０３のＵ溝１０３ｂを介してレンズ枠１０３と当接する。第２の規制部材１０６により、レンズ枠１０３の、第１の規制部材１０５周りの回転移動が規制される。第１の規制部材１０５及び第２の規制部材１０６により、レンズ枠１０３は相対移動の方向へ平行移動するように案内され、固定筒１０４に対して相対移動する。以上の構成から、レンズ枠１０３は相対移動の方向以外の方向への移動が規制される。したがって、レンズ枠１０３と連結している連結部材１６も同様であるため、連結部材１６は、第１の規制部材１０５と第２の規制部材１０６とにより複数の振動子１２と複数の摩擦部材１３の相対移動の方向以外の移動及び回転が規制される。   The fixed barrel 104 has a substantially tubular shape, and is held by a lens barrel 101 (not shown). The fixed cylinder 104 holds the first restricting member 105, the second restricting member 106, and the vibration wave motor 100, respectively. The first restricting member 105 is a main guide bar, and abuts on the lens frame 103 through the round hole 103 a of the lens frame 103. The parallel movement in the direction (Y direction) orthogonal to the direction of the relative movement of the lens frame 103 is restricted by the first restriction member 105. The second restriction member 106 is a sub guide bar, and abuts on the lens frame 103 via the U groove 103 b of the lens frame 103. The second restricting member 106 restricts the rotational movement of the lens frame 103 around the first restricting member 105. The lens frame 103 is guided to move in parallel in the direction of relative movement by the first restriction member 105 and the second restriction member 106, and is moved relative to the fixed barrel 104. From the above configuration, the movement of the lens frame 103 in directions other than the relative movement direction is restricted. Therefore, since the connecting member 16 connected to the lens frame 103 is also the same, the connecting member 16 includes the plurality of vibrators 12 and the plurality of friction members 13 by the first restricting member 105 and the second restricting member 106. The movement and rotation other than the direction of relative movement are restricted.

振動波モータ１００が駆動されると、移動部材１１が移動することにより、移動部材１１に連結された連結部材１６が移動し、連結部材１６に係合された被駆動部材であるレンズ枠１０３が移動する。そして、レンズ枠１０３に保持されるレンズ１０２が移動するため、被写体の像の結像位置が光軸Ｏａの方向に移動する。   When the vibration wave motor 100 is driven, the moving member 11 moves, whereby the connecting member 16 connected to the moving member 11 moves, and the lens frame 103 which is a driven member engaged with the connecting member 16 Moving. Then, since the lens 102 held by the lens frame 103 moves, the imaging position of the image of the subject moves in the direction of the optical axis Oa.

図１０は、本発明の振動波モータ１００を適用したレンズ駆動装置１の構成を示すブロック線図である。撮影光学系の一部であるレンズ１０２及びレンズ１０２を駆動する振動波モータ１００を含む鏡筒１０１と、撮像素子１１１を有するカメラ本体１１０でレンズ駆動装置１が構成される。ピント検出手段１２０によって撮像素子１１１に結像される像のピント状態が検出され、その信号が制御手段１２２に入力される。また、位置検出手段１２１によってレンズ１０２の現在位置が検出され、その信号が制御手段１２２に入力される。制御手段１２２はそれらの信号をもとに、振動波モータ駆動手段１２３に信号を出力し、振動波モータ１００を駆動する。これにより、レンズ１０２は目標位置まで駆動され、ピントずれを補正することで良好な画像を撮影することができる。以上の構成から、被写体の結像位置が、撮像素子１１１の位置に対して光軸Ｏａの方向にずれているとき、結像位置と撮像素子１１１の位置を合わせるようにレンズ１０２を移動させることで、ピント補正をすることができる。   FIG. 10 is a block diagram showing the configuration of a lens driving device 1 to which the vibration wave motor 100 of the present invention is applied. The lens driving device 1 is constituted by a lens barrel 101 including a lens 102 which is a part of a photographing optical system and a vibration wave motor 100 for driving the lens 102, and a camera body 110 having an imaging element 111. The focus detection unit 120 detects the focus state of the image formed on the imaging device 111, and the signal is input to the control unit 122. Further, the current position of the lens 102 is detected by the position detection means 121, and the signal is inputted to the control means 122. The control means 122 outputs a signal to the vibration wave motor drive means 123 based on these signals to drive the vibration wave motor 100. As a result, the lens 102 is driven to the target position, and a good image can be taken by correcting the focus shift. From the above configuration, when the imaging position of the subject is shifted in the direction of the optical axis Oa with respect to the position of the imaging device 111, the lens 102 is moved to align the imaging position with the imaging device 111. The focus can be corrected.

次に、図１１を参照して、振動波モータ１００を適用したレンズ駆動装置１の制御方法について説明する。図１１は、合焦動作開始から合焦動作停止までを示すフローチャートである。ステップＳ１では、ピント検出手段１２０によって、撮像素子１１１に結像される像のピント状態が検出され、その信号が制御手段１２２に入力され、移動部材１１が移動すべき目標位置を算出して更新する。ステップＳ２では、位置検出手段１２１によって、振動波モータ１００に含まれる移動部材１１の位置が検出され、その信号が制御手段１２２に入力され、検出位置を更新する。ステップＳ３では、ステップＳ１で更新した目標位置とステップＳ２で更新した検出位置の差分をもとに、振動波モータ１００への通電を決定し、振動波モータ駆動手段１２３へ信号を入力する。ステップＳ４では、入力された信号をもとに振動波モータ１００を駆動し、移動部材１１を駆動する。ステップＳ５では、動作停止か否かの判別を行い、終了でなければステップＳ１に戻り、目標位置と移動部材１１の現在位置の差分がなくなるように制御を継続することとなる。   Next, with reference to FIG. 11, a control method of the lens driving device 1 to which the vibration wave motor 100 is applied will be described. FIG. 11 is a flowchart showing from the start of the focusing operation to the stop of the focusing operation. In step S1, the focus detection means 120 detects the focus state of the image formed on the imaging device 111, and the signal is input to the control means 122, and the target position to which the moving member 11 is to move is calculated and updated. Do. In step S2, the position detection unit 121 detects the position of the moving member 11 included in the vibration wave motor 100, and the signal is input to the control unit 122 to update the detected position. In step S3, on the basis of the difference between the target position updated in step S1 and the detected position updated in step S2, energization to the vibration wave motor 100 is determined, and a signal is input to the vibration wave motor drive means 123. In step S4, the vibration wave motor 100 is driven based on the input signal to drive the moving member 11. In step S5, it is determined whether the operation is stopped or not. If it is not ended, the process returns to step S1 and the control is continued so that the difference between the target position and the current position of the moving member 11 disappears.

以上、実施例１に係る振動波モータ１００を適用したレンズ駆動装置１について説明したが、適用例はこれに限られるものではなく、実施例２、３に係る振動波モータ２００、３００を適用することもできる。   The lens driving device 1 to which the vibration wave motor 100 according to the first embodiment is applied has been described above, but the application example is not limited thereto, and the vibration wave motors 200 and 300 according to the second and third embodiments are applied. You can also

１ レンズ駆動装置
１０、２０、３０ 固定部材
１０ｈ、３０ｈ 開口部
１２、２２ 複数の振動子
１２Ａ、２２Ａ 第１の振動子
１２Ｂ、２２Ｂ 第２の振動子
１３、２３ 複数の摩擦部材
１３Ａ、２３Ａ 第１の摩擦部材
１３Ｂ、２３Ｂ 第２の摩擦部材
１４、２４、３４ 加圧部材
１５、２５、３５ 複数の案内部材
１５Ａ、２５Ａ、３５Ａ 第１の案内部材
１５Ｂ、２５Ｂ、３５Ｂ 第２の案内部材
１６、２６、３６ 連結部材
１００、２００、３００ 振動波モータ
１０２ レンズ
１０３ レンズ枠
１０５ 第１の規制部材
１０６ 第２の規制部材
Ｏｂ 軸 DESCRIPTION OF SYMBOLS 1 Lens drive device 10, 20, 30 Fixing member 10h, 30h Opening 12, 22 Several vibrator 12A, 22A 1st vibrator 12B, 22B 2nd vibrator 13, 23 Several friction members 13A, 23A 1 friction member 13B, 23B second friction member 14, 24, 34 pressing member 15, 25, 35 multiple guide members 15A, 25A, 35A first guide member 15B, 25B, 35B second guide member 16 , 26, 36 Connecting member 100, 200, 300 Vibration wave motor 102 Lens 103 Lens frame 105 First restricting member 106 Second restricting member Ob Axis

Claims (6)

複数の振動子と、
前記複数の振動子にそれぞれ摩擦接触する複数の摩擦部材と、
前記複数の振動子を前記複数の摩擦部材に加圧する加圧部材と、
前記複数の振動子と前記複数の摩擦部材との相対移動を案内する複数の案内部材と、
前記相対移動による推力を他の部材に伝達する連結部材と、
を備え、
前記複数の振動子は、前記相対移動の方向に対して並列に配置されており、
前記連結部材は、前記複数の振動子、もしくは、前記複数の摩擦部材の前記複数の案内部材により形成される軸の周りの回転を規制し、
前記連結部材は、前記加圧部材の加圧方向から見たときに、前記複数の振動子、もしくは、前記複数の摩擦部材と、前記複数の案内部材に囲まれた領域内に配置されることを特徴とする振動波モータ。 With multiple transducers,
A plurality of friction members frictionally contacting each of the plurality of vibrators;
A pressure member for pressing the plurality of vibrators to the plurality of friction members;
A plurality of guide members for guiding relative movement of the plurality of transducers and the plurality of friction members;
A connecting member for transmitting the thrust due to the relative movement to another member;
Equipped with
The plurality of transducers are arranged in parallel to the direction of the relative movement,
The connection member restricts rotation around an axis formed by the plurality of vibrators or the plurality of guide members of the plurality of friction members,
The connection member is disposed in an area surrounded by the plurality of vibrators or the plurality of friction members and the plurality of guide members when viewed from the pressure direction of the pressure member. Vibration wave motor characterized by 前記複数の振動子は第１の振動子と第２の振動子とにより構成され、前記複数の摩擦部材は第１の摩擦部材と第２の摩擦部材とにより構成され、前記複数の案内部材は第１の案内部材と第２の案内部材とにより構成されることを特徴とする請求項１に記載の振動波モータ。   The plurality of vibrators are constituted by a first vibrator and a second vibrator, the plurality of friction members are constituted by a first friction member and a second friction member, and the plurality of guide members are The oscillatory wave motor according to claim 1, characterized by comprising a first guide member and a second guide member. 前記複数の振動子を保持する固定部材を備え、
該固定部材は、前記連結部材が貫通する開口部を備え、
該開口部は、前記加圧部材の加圧方向から見て前記第１の案内部材及び前記第２の案内部材と重ならないように配置されることを特徴とする請求項２に記載の振動波モータ。 A fixing member for holding the plurality of transducers;
The fixing member includes an opening through which the connection member passes,
The vibration wave according to claim 2, wherein the opening portion is disposed so as not to overlap with the first guide member and the second guide member when viewed from the pressing direction of the pressing member. motor. 前記連結部材は、前記加圧部材の加圧方向から見て、前記第１の案内部材と前記第２の案内部材とにより形成される軸と同一直線に配置されることを特徴とする請求項２又は３に記載の振動波モータ。   The connection member is disposed in the same straight line as an axis formed by the first guide member and the second guide member when viewed from the pressing direction of the pressing member. The oscillatory wave motor according to 2 or 3. 前記振動波モータは、超音波領域の周波数の振動を発生する超音波モータであることを特徴とする、請求項１乃至４のいずれか１項に記載の振動波モータ。   The vibration wave motor according to any one of claims 1 to 4, wherein the vibration wave motor is an ultrasonic wave motor that generates vibration of a frequency in an ultrasonic wave region. 請求項１乃至５のいずれか１項に記載の振動波モータと、
レンズと、
該レンズを保持するレンズ枠と、
該レンズ枠の前記相対移動の方向以外の移動及び回転を規制する第１の規制部材と第２の規制部材を備え、
前記連結部材は、該第１の規制部材と該第２の規制部材とにより前記相対移動の方向以外の移動及び回転が規制され、
前記振動波モータで前記レンズを駆動することを特徴とするレンズ駆動装置。 An oscillatory wave motor according to any one of claims 1 to 5,
With the lens,
A lens frame for holding the lens;
A first restricting member and a second restricting member for restricting movement and rotation of the lens frame other than the direction of the relative movement;
The first restricting member and the second restricting member restrict movement and rotation of the connecting member other than the direction of the relative movement,
A lens driving device characterized in that the lens is driven by the vibration wave motor.

Images