JP2019067941A - Member for mounting - Google Patents

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JP2019067941A
JP2019067941A JP2017192508A JP2017192508A JP2019067941A JP 2019067941 A JP2019067941 A JP 2019067941A JP 2017192508 A JP2017192508 A JP 2017192508A JP 2017192508 A JP2017192508 A JP 2017192508A JP 2019067941 A JP2019067941 A JP 2019067941A
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aluminum oxide
mounting member
spinel
mass
nickel
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JP6976799B2 (en
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昌浩 原田
Masahiro Harada
昌浩 原田
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Kyocera Corp
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Abstract

To provide a member for mounting that has a reduced reflectance, is not easily charged, and has moderate conductivity.SOLUTION: A member for mounting of the present disclosure has an adsorption part including an adsorption surface for adsorbing and holding a mounting object; the adsorption part is formed of aluminum oxide ceramics; the aluminum oxide ceramics contain oxides of cobalt, iron, nickel, and titanium. The aluminum oxide ceramics may contain, in a grain boundary phase, at least any one of cobalt spinel, iron spinel, and nickel spinel.SELECTED DRAWING: Figure 1

Description

本開示は、載置用部材に関するものである。   The present disclosure relates to a mounting member.

例えばガラス基板等の光透過性基板を露光するための露光装置では、光透過性基板の載置用部材として、着色された金属やセラミックスからなる低反射部材が用いられている。   For example, in an exposure apparatus for exposing a light transmitting substrate such as a glass substrate, a low reflection member made of colored metal or ceramic is used as a mounting member for the light transmitting substrate.

例えば特許文献１では、表面にアルマイト処理が施されたアルミニウムからなるホルダベースを備えたフィルムホルダが提案されている。また特許文献２では、アルミナの粉末に酸化チタンの粉末をＴｉＯ２換算で０．１〜１．０質量％，炭素源をＣ換算で１．２質量％以下になるように添加した混合粉末を焼成してなり，体積抵抗率が１００〜１０４Ωｃｍ（１０−２〜１０２Ω・ｍ）であるアルミナ質焼結体が提案されている。 For example, in patent document 1, the film holder provided with the holder base which consists of aluminum in which the alumite process was given to the surface is proposed. Moreover, in Patent Document 2, a mixed powder obtained by adding titanium oxide powder to alumina powder in an amount of 0.1 to 1.0% by mass in terms of TiO 2 and a carbon source of 1.2% by mass or less in terms of C is obtained. An alumina-based sintered body which has been fired and has a volume resistivity of 10 0 to 10 4 Ωcm (10 -2 to 10 2 Ω · m) has been proposed.

特開２０００−２０６６７３号公報JP 2000-206673 A 特許第４２３０１７５号公報Patent No. 4230175

特許文献１で提案された載置用部材は、表面がアルマイト処理されていることから、表面の絶縁性が高く静電気が帯電し易く、載置用部材に帯電した静電気が載置対象体に一気に流れて露光対象体に不具合を生じさせるという問題があった。また、表面に帯電した静電気によって、載置対象体が載置用部材へ貼り付いた場合など、載置対象体を引きはがす際の応力によって載置対象体が破損してしまうといった虞があった。   The surface of the mounting member proposed in Patent Document 1 is alumite treated, so the surface has high insulation and is likely to be charged with static electricity, and the static electricity charged on the mounting member is rapidly spread over the mounting object. There is a problem that it flows and causes problems in the object to be exposed. In addition, when the placement target body is stuck to the placement member due to static electricity charged on the surface, there is a risk that the placement target body may be damaged by the stress when peeling off the placement target body. .

一方、特許文献２で提案された載置用部材は導電性が高いため、例えば静電気を帯びた露光対象体を吸着面に載置する際、露光対象体から載置用部材を経て静電気が一気に流れて露光装置の電子部品に不具合が生じたり、大電流によるスパークによって載置対象体が破損する場合があるという問題があった。   On the other hand, since the mounting member proposed in Patent Document 2 has high conductivity, for example, when mounting an electrostatically exposed exposure object on an adsorption surface, static electricity rapidly passes from the exposure object through the mounting member. There is a problem that the flow may cause problems in the electronic components of the exposure apparatus, and the object to be placed may be damaged by a spark due to a large current.

本開示の載置用部材は、載置対象体を吸着して保持するための吸着面を備えた吸着部を有し、該吸着部が酸化アルミニウム質セラミックスからなり、該酸化アルミニウム質セラミックスは、コバルト、鉄、ニッケルおよびチタンの酸化物を含むことを特徴とするものである。   The mounting member of the present disclosure has an adsorption portion provided with an adsorption surface for adsorbing and holding a mounting target object, the adsorption portion is made of aluminum oxide ceramic, and the aluminum oxide ceramic is It is characterized in that it contains oxides of cobalt, iron, nickel and titanium.

本開示によれば、反射率が抑制されており、帯電が少なくかつ適度な導電性を有する載置用部材を提供することができる。   According to the present disclosure, it is possible to provide a placement member that has low reflectance, low charging, and appropriate conductivity.

本開示の載置用部材の一例を示す、（ａ）は斜視図であり、（ｂ）は（ａ）のＸＸ’線における断面図である。An example of the mounting member of this indication is shown, (a) is a perspective view, (b) is a sectional view in the XX 'line of (a).

以下、図面を参照して、本開示の載置用部材について詳細に説明する。   Hereinafter, the mounting member of the present disclosure will be described in detail with reference to the drawings.

図１は、本開示の載置用部材の一例を示す、（ａ）は斜視図であり、（ｂ）は（ａ）のＸＸ’線における断面図である。   FIG. 1 shows an example of the mounting member of the present disclosure, wherein (a) is a perspective view, and (b) is a cross-sectional view taken along line XX ′ of (a).

図１に示す載置用部材１０は、光透過性基板等の載置対象体（図示しない）を吸着して保持するための吸着面１を備えた吸着部２を有し、吸着面１に開口する貫通孔３を多数備えている。   The mounting member 10 shown in FIG. 1 has a suction unit 2 provided with a suction surface 1 for suctioning and holding a mounting object (not shown) such as a light transmissive substrate, and the suction surface 1 is provided on the suction surface 1. A large number of through holes 3 are provided.

吸着部の裏面側には、貫通孔３に接続する内部空間４を備えている。載置対象体の形状は、例えば、角板状である。   An inner space 4 connected to the through hole 3 is provided on the back side of the suction portion. The shape of the placement object is, for example, a square plate.

吸着部２の下方には、吸着部２を支持する支持部５が備えられており、その厚み方向には吸引用の配管（図示しない）と接続する吸引路６が設けられている。   Below the suction unit 2, a support unit 5 for supporting the suction unit 2 is provided, and in the thickness direction thereof, a suction passage 6 connected to a suction pipe (not shown) is provided.

支持部５は、例えば、酸化アルミニウム質セラミックスからなり、外周側に略等間隔に設置された取付孔７にボルト（図示しない）を挿入することによって、基部（図示しない）に固定される。   The support portion 5 is fixed to a base (not shown) by inserting bolts (not shown) into attachment holes 7 which are made of, for example, aluminum oxide-based ceramics and arranged at substantially equal intervals on the outer peripheral side.

載置対象体を吸着する場合、配管を真空ポンプに接続して、吸引路６および内部空間４を介して貫通孔３から空気を吸引し、載置対象体を吸着して保持する。   When adsorbing the mounting object, the piping is connected to a vacuum pump, air is sucked from the through hole 3 through the suction passage 6 and the internal space 4, and the mounting object is adsorbed and held.

本開示の載置用部材１０は、酸化アルミニウム質セラミックスからなる。ここで、酸化アルミニウム質セラミックスとは、セラミックスを構成する全成分の合計１００質量％のうち、酸化アルミニウムの含有量が５２質量％以上の主成分であるセラミックスのことを指す。   The mounting member 10 of the present disclosure is made of an aluminum oxide ceramic. Here, the aluminum oxide-based ceramic refers to a ceramic which is a main component having a content of aluminum oxide of 52% by mass or more in a total of 100% by mass of all the components constituting the ceramic.

そして、載置用部材１０を構成する酸化アルミニウム質セラミックスは、コバルト、鉄、ニッケルおよびチタンの酸化物を含む。コバルト、鉄、ニッケルおよびチタンの酸化物を含む、載置用部材１０を構成する酸化アルミニウム質セラミックスは、色調が暗色（黒色）であるため、波長域３６０ｎｍ〜４４０ｎｍにおける反射率が比較的低い。載置用部材１０を露光装置に用いた場合、載置用部材１０に起因する余分な反射光や、これにともなう迷光が抑制されており、比較的高精度に露光することができる。   Then, the aluminum oxide ceramic forming the mounting member 10 contains oxides of cobalt, iron, nickel and titanium. Since the aluminum oxide-based ceramic forming the mounting member 10, which contains oxides of cobalt, iron, nickel and titanium, has a dark color (black), the reflectance in the wavelength range of 360 nm to 440 nm is relatively low. When the mounting member 10 is used in an exposure apparatus, excessive reflected light due to the mounting member 10 and stray light associated therewith are suppressed, and exposure can be performed with relatively high accuracy.

また、コバルトの酸化物（Ｃｏ３Ｏ４）、鉄の酸化物（Ｆｅ２Ｏ３）、ニッケルの酸化物（ＮｉＯ）およびチタンの酸化物（ＴｉＯ２）は、いずれも半導電性（体積抵抗率が、例えば、１０−４〜１０７Ω・ｍ）を有し、室温における体積抵抗率は、以下の通りである。Ｃｏ３Ｏ４：２〜４×１０２Ω・ｍ、 ・Ｆｅ２Ｏ３：１０３〜１０８Ω・ｍ、 ・ＮｉＯ ：１０２Ω・ｍ、 ・ＴｉＯ２：１０９Ω・ｍ。また、チタンの酸化物（ＴｉＯ２）は、還元されて、組成式がＴｉＯ２―ｘ（０＜ｘ＜２）として示される酸化物になると、室温における体積抵抗率は、１０３〜１０６Ω・ｍとなる。 In addition, oxides of cobalt (Co 3 O 4 ), oxides of iron (Fe 2 O 3 ), oxides of nickel (NiO) and oxides of titanium (TiO 2 ) are all semiconductive (volume resistance The rate is, for example, 10 −4 to 10 7 Ω · m), and the volume resistivity at room temperature is as follows. Co 3 O 4 : 2 to 4 × 10 2 Ω · m, Fe 2 O 3 : 10 3 to 10 8 Ω · m, NiO: 10 2 Ω · m, TiO 2 : 10 9 Ω · m. In addition, when the oxide of titanium (TiO 2 ) is reduced to an oxide represented by the composition formula TiO 2 -x (0 <x <2), the volume resistivity at room temperature is 10 3 to 10 6. It becomes Ω · m.

これらを含有する載置用部材１０を構成する酸化アルミニウム質セラミックスは、室温における体積抵抗率が１０５〜１０１１Ωｃｍ（１０３〜１０９Ω・ｍ）であり、吸着面１の帯電が少なくかつ適度な導電性を有する。このため、載置用部材１０を用いた露光装置では、吸着面１への載置対象体の貼り付きも少なく、静電気が大電流として流れることで生じる、露光装置内部の電子部品の破損や、載置対象体の破損等が抑制されている。 The aluminum oxide ceramic forming the mounting member 10 containing these has a volume resistivity of 10 5 to 10 11 Ωcm (10 3 to 10 9 Ω · m) at room temperature, and the adsorption surface 1 is less charged. And it has moderate conductivity. For this reason, in the exposure apparatus using the placement member 10, the attachment of the placement target to the suction surface 1 is also small, and damage to the electronic components inside the exposure apparatus caused by static electricity flowing as a large current, Damage or the like of the placement object is suppressed.

コバルトの酸化物の含有量は、例えば、コバルト（Ｃｏ）をＣｏ３Ｏ４に換算した値で８質量％以上１２質量％以下である。また、鉄の酸化物の含有量は、例えば、鉄（Ｆｅ）をＦｅ２Ｏ３に換算した値で４質量％以上２０質量％以下である。また、ニッケルの酸化
物の含有量は、例えば、ニッケル（Ｎｉ）をＮｉＯに換算した値で３質量％以上４質量％以下である。また、チタンの酸化物の含有量は、例えば、チタン（Ｔｉ）をＴｉＯ２に換算した値で１質量％以上２質量％以下である。この場合、載置用部材の室温における体積抵抗率は、１０４Ω・ｍ以上１０８Ω・ｍ以下とすることができる。体積抵抗率がこの範囲にあることで、露光装置内部の電子部品や載置対象体が破損する確率がより低くなる。 The content of the oxide of cobalt is, for example, 8% by mass or more and 12% by mass or less in the value obtained by converting cobalt (Co) into Co 3 O 4 . The content of the oxide of iron, for example, is iron (Fe) less than 20 wt% 4 wt% or more values in terms of Fe 2 O 3. Further, the content of the oxide of nickel is, for example, 3% by mass or more and 4% by mass or less in the value obtained by converting nickel (Ni) into NiO. Further, the content of the oxide of titanium is, for example, 1% by mass or more and 2% by mass or less in terms of a value obtained by converting titanium (Ti) into TiO 2 . In this case, the volume resistivity of the mounting member at room temperature can be 10 4 Ω · m or more and 10 8 Ω · m or less. When the volume resistivity is in this range, the probability of breakage of the electronic component and the placement target inside the exposure apparatus becomes lower.

体積抵抗率は、ＪＩＳ Ｃ ２１４１：１９９２に準拠して求めればよい。また、酸化アルミニウム質セラミックスは、上記成分以外に、焼結助剤としての作用をなし、主に粒界相を構成する成分として、珪素、マグネシウムおよびカルシウムの酸化物を含んでいてもよい。以下、珪素、マグネシウムおよびカルシウムの酸化物（ＳｉＯ２、ＭｇＯ、ＣａＯ）を総称して助剤成分と記載する。助剤成分の含有量は、酸化アルミニウム質セラミックスを構成する全成分の合計１００質量％のうち、例えば、０．６質量％以上２質量％以下である。 The volume resistivity may be determined in accordance with JIS C 2141: 1992. In addition to the above components, the aluminum oxide-based ceramic may function as a sintering aid and may contain oxides of silicon, magnesium and calcium as components mainly constituting the grain boundary phase. Hereinafter, oxides of silicon, magnesium and calcium (SiO 2 , MgO, CaO) are collectively referred to as an auxiliary component. The content of the auxiliary agent component is, for example, 0.6% by mass or more and 2% by mass or less in a total of 100% by mass of all the components constituting the aluminum oxide ceramic.

上述した主成分、着色成分および助剤成分の含有量は、酸化アルミニウム質セラミックスの一部を粉砕し、得られた粉体を塩酸などの溶液に溶解した後、ＩＣＰ（Inductively Coupled Plasma）発光分光分析装置（ＩＣＰ 例えば、(株)島津製作所製（ＩＣＰＳ−８１００））を用いて得られる金属成分の含有量からそれぞれ酸化物に換算することによって求められる。例えば、Ａｌの含有量からＡｌ２Ｏ３に換算し、Ｃｏの含有量からＣｏ３Ｏ４に換算する。 The contents of the main component, the coloring component and the auxiliary agent component mentioned above are obtained by crushing a part of aluminum oxide ceramic and dissolving the obtained powder in a solution such as hydrochloric acid, and then ICP (Inductively Coupled Plasma) emission spectroscopy It is calculated | required by converting into the oxide, respectively from content of the metal component obtained using an analyzer (ICP, for example, Shimadzu Corp. make (ICPS-8100)). For example, the content of Al is converted to Al 2 O 3 , and the content of Co is converted to Co 3 O 4 .

載置用部材１０は、酸化アルミニウム質セラミックスが、粒界相に、コバルトスピネル、鉄スピネルおよびニッケルスピネルの少なくともいずれかを含んでいてもよい。一般的な酸化アルミニウム質セラミックスの反射率は、結晶相部分よりも粒界相部分で高い傾向があり、粒界相部分の反射率が酸化アルミニウム質セラミックスの表面の全体的な反射率を高めていることが多い。載置用部材１０が、粒界相に、コバルトスピネル、鉄スピネルおよびニッケルスピネルの少なくともいずれかを含んでいるときには、これらのスピネルの屈折率は１．７４〜１．８０程度で酸化アルミニウムの屈折率１．７７と近似しているため、粒界相部分の反射率の相対的な高さの程度が抑制されることから、酸化アルミニウム質セラミックスの表面の全体的な反射率がより低くなる。コバルトスピネル、鉄スピネルおよびニッケルスピネルは、組成式が不定比であってもよいが、組成式が定比であるＣｏＡｌ２Ｏ４、ＦｅＡｌ２Ｏ４およびＮｉＡｌ２Ｏ４であることが好ましい。 In the mounting member 10, the aluminum oxide-based ceramic may contain at least one of cobalt spinel, iron spinel and nickel spinel in the grain boundary phase. The reflectivity of common aluminum oxide ceramics tends to be higher at grain boundary phase than crystal phase, and the reflectivity of grain boundary phase increases the overall reflectivity of the surface of aluminum oxide ceramics. Often When the mounting member 10 contains at least one of cobalt spinel, iron spinel and nickel spinel in the grain boundary phase, the refractive index of these spinels is about 1.74 to 1.80 and the refraction of aluminum oxide is Since the ratio is close to 1.77, the relative height of the reflectivity of the grain boundary phase portion is suppressed, so that the overall reflectivity of the surface of the aluminum oxide ceramic is lower. Cobalt spinel, iron spinel and nickel spinel may have a non-stoichiometric composition formula, but preferably are CoAl 2 O 4 , FeAl 2 O 4 and NiAl 2 O 4 whose composition formula is a fixed ratio.

なお、組成式がＣａＡｌ２Ｓｉ２Ｏ５として示されるアノーサイトは、屈折率が１．５８であり、酸化アルミニウムの屈折率との差が大きく、反射率が高くなるため、載置用部材１０は、アノーサイトの含有割合がより低いことが好ましい。 The anorthite whose compositional formula is shown as CaAl 2 Si 2 O 5 has a refractive index of 1.58, and the difference from the refractive index of aluminum oxide is large, and the reflectance is high. Preferably, the content of anorthite is lower.

また、酸化アルミニウム質セラミックスは、粒界相に、チタン酸アルミニウムを含むときには、酸化アルミニウムの結晶粒子の異常な粒成長を抑制することができるため、酸化アルミニウム質セラミックスの機械的強度を高くすることができる。チタン酸アルミニウムは、組成式は不定比であってもよいが、組成式が定比であるＡｌ２ＴｉＯ５であることが好ましい。 Also, when aluminum oxide-based ceramics contain aluminum titanate in the grain boundary phase, abnormal grain growth of aluminum oxide crystal grains can be suppressed, so the mechanical strength of aluminum oxide-based ceramics should be increased. Can. The compositional formula of aluminum titanate may have a nonstoichiometric ratio, but is preferably Al 2 TiO 5 having a constant compositional formula.

コバルトスピネル、鉄スピネル、ニッケルスピネルおよびチタン酸アルミニウムは、Ｘ線回折装置（ＸＲＤ）を用いて同定することができる。また、存在箇所については、粒界相について、Ｘ線マイクロアナライザー（ＥＰＭＡ）を用いて確認すればよい。   Cobalt spinel, iron spinel, nickel spinel and aluminum titanate can be identified using an X-ray diffractometer (XRD). Further, with regard to the location, the grain boundary phase may be confirmed using an X-ray microanalyzer (EPMA).

特に、本実施形態の載置用部材１０は、酸化アルミニウムが５２質量％以上８０質量％以下であり、コバルトスピネル、鉄スピネルおよびニッケルスピネルの含有量の合計が１９質量％以上４７質量％以下であり、チタン酸アルミニウムの含有量が１質量％以上５質量％以下であってもよい。酸化アルミニウム、コバルトスピネル、鉄スピネル、ニッケルスピネルおよびチタン酸アルミニウムのそれぞれの含有量が上述した範囲を満たしているときには、低い反射率および高い機械的強度を有することができる。コバルトスピネル、鉄スピネル、ニッケルスピネルおよびチタン酸アルミニウムの含有量は、リートベルト解析によって求めればよい。   In particular, the mounting member 10 of the present embodiment has 52% by mass to 80% by mass of aluminum oxide, and the total content of cobalt spinel, iron spinel and nickel spinel is 19% by mass to 47% by mass The content of aluminum titanate may be 1% by mass or more and 5% by mass or less. When the content of each of aluminum oxide, cobalt spinel, iron spinel, nickel spinel and aluminum titanate falls within the above-mentioned range, it can have low reflectance and high mechanical strength. The contents of cobalt spinel, iron spinel, nickel spinel and aluminum titanate may be determined by Rietveld analysis.

また、本実施形態の載置用部材１０では、吸着面は、粗さ曲線における２５％の負荷長さ率と７５％の負荷長さ率との間の切断レベル差（Ｒδｃ）が０．７μｍ以上１μｍ以下であってもよい。   In addition, in the mounting member 10 of the present embodiment, the suction surface has a cutting level difference (Rδc) of 0.7 μm between the 25% load length ratio and the 75% load length ratio in the roughness curve. It may be 1 μm or less.

ここで、切断レベル差（Ｒδｃ）とは、ＪＩＳ Ｂ０６０１：２００１で規定されている粗さ曲線における負荷長さ率Ｒｍｒ１、Ｒｍｒ２にそれぞれ一致する切断レベルＣ（Ｒｒｍ１）、Ｃ（Ｒｒｍ２）の高さ方向の差である。切断レベル差（Ｒδｃ）が大きい場合、測定の対象とする表面の凹凸は大きくなり、小さい場合、その表面の凹凸は小さくなる。吸着面における切断レベル差（Ｒδｃ）が０．７μｍ以上であると、吸着面での光拡散が大きくなることで反射率を低くすることができるとともに、吸着面に対する載置対象体のリンキングが緩和されるため、脱離応答性を高くすることができる。また、吸着面の切断レベル差（Ｒδｃ）は、１μｍ以下であると、吸着面に生じる凸部の急峻性が抑制されるため、凸部先端からパーティクルが発生しにくくなるとともに、吸着面の平滑性が高くなって吸引時のリークが抑制され、高い吸着力が得られる。   Here, the cutting level difference (Rδc) is the height of the cutting levels C (Rrm1) and C (Rrm2) that respectively match the load length ratios Rmr1 and Rmr2 in the roughness curve defined in JIS B0601: 2001. It is a difference in direction. When the cutting level difference (Rδc) is large, the unevenness of the surface to be measured becomes large, and when it is small, the unevenness of the surface becomes small. When the cutting level difference (Rδc) at the adsorption surface is 0.7 μm or more, the light diffusion at the adsorption surface is increased, whereby the reflectance can be lowered and the linking of the mounting object to the adsorption surface is alleviated Thus, the detachment response can be enhanced. Further, if the cutting level difference (Rδc) of the suction surface is 1 μm or less, the steepness of the convex portion generated on the suction surface is suppressed, so particles are less likely to be generated from the tip of the convex portion and the suction surface is smooth. The property is high, the leak at the time of suction is suppressed, and high adsorption power can be obtained.

吸着面１の粗さ曲線における２５％の負荷長さ率と７５％の負荷長さ率との間の切断レベル差（Ｒδｃ）は、いずれもＪＩＳ Ｂ ０６０１：２００１に準拠し、レーザー顕微鏡（例えば、(株)キーエンス社製（ＶＫ−９５１０））を用いて求めればよい。レーザー顕微鏡ＶＫ−９５１０を用いる場合、例えば、測定モードをカラー超深度、測定倍率を４００倍、１箇所当りの測定範囲を１１２μｍ×８４μｍ、測定ピッチを０．０５μｍ、λｓ輪郭曲線フィルタを２．５μｍ、λｃ輪郭曲線フィルタを０．０８ｍｍ、測定箇所を８箇所として求めればよい。   The cutting level difference (Rδc) between the load length ratio of 25% and the load length ratio of 75% in the roughness curve of the adsorption surface 1 is all in accordance with JIS B 0601: 2001, and a laser microscope (for example, , And manufactured by Keyence Corporation (VK-9510)). When using a laser microscope VK-9510, for example, the measurement mode is color depth, the measurement magnification is 400 times, the measurement range per point is 112 μm × 84 μm, the measurement pitch is 0.05 μm, and the λs contour curve filter is 2.5 μm. The λc contour curve filter may be 0.08 mm, and eight measurement points may be obtained.

また、本開示の載置用部材１０では、吸着面１は、波長域３６０ｎｍ〜４４０ｎｍ
における反射率の平均値が７％以下であってもよい。 Further, in the mounting member 10 of the present disclosure, the adsorption surface 1 has a wavelength range of 360 nm to 440 nm.
The average value of the reflectance at may be 7% or less.

反射率は分光測色計（例えば、コニカミノルタ(株)製ＣＭ−２６００ｄまたはその後継機種）を用い、測定条件としては、光源をＣＩＥ標準光源Ｄ６５、視野角度を１０°、ＵＶ条件をＵＶ１００％に設定し、全反射率を測定し、その平均値を求めればよい。   The reflectance is measured using a spectrocolorimeter (for example, CM-2600d manufactured by Konica Minolta Co., Ltd. or its successor model). As the measurement conditions, CIE standard light source D65, viewing angle 10 °, UV condition 100% The total reflectance may be measured and the average value may be determined.

また、本開示の載置用部材１０では、吸着面１は、ＣＩＥ１９７６Ｌ＊ａ＊ｂ＊色空間における明度指数Ｌ*が３０以下であって、クロマティクネス指数ａ＊，ｂ＊がいずれも
−２以上２以下であってもよい。 Further, in the mounting member 10 of the present disclosure, the suction surface 1 has a lightness index L * of 30 or less in the CIE 1976 L * a * b * color space, and both the chromaticness indices a * and b * are −2 It may be 2 or more.

このような範囲であると、吸着面１は、黒色系の無彩色化の傾向が強くなるので、反射率を低減することができる。さらに、無彩色化の傾向が強くなることにより、色むらが抑制される。   In such a range, since the adsorption surface 1 has a strong tendency of achromatic coloration of black, the reflectance can be reduced. In addition, as the tendency toward achromatic color becomes stronger, color unevenness is suppressed.

明度指数Ｌ＊およびクロマティクネス指数ａ＊，ｂ＊の値は、ＪＩＳ Ｚ ８７２２：２００９に準拠して求めることができる。例えば、分光色差計（日本電色工業(株)製ＮＦ７７７またはその後継機種）を用い、測定条件としては、光源をＣＩＥ標準光源Ｄ６５、視野角度を２°に設定すればよい。 The values of the lightness index L * and the chromaticness indexes a * and b * can be determined in accordance with JIS Z 8722: 2009. For example, using a spectral color difference meter (Nippon Denshoku Kogyo Co., Ltd. NF 777 or its successor model), the light source may be a CIE standard light source D65, and the viewing angle may be 2 °.

次に、本開示の載置用部材の製造方法の一例について説明する。   Next, an example of a method of manufacturing the mounting member of the present disclosure will be described.

まず、主成分の原料である酸化アルミニウム（Ａｌ２Ｏ３）粉末と、着色成分として酸化コバルト（Ｃｏ３Ｏ４）粉末、酸化鉄（Ｆｅ２Ｏ３）粉末、酸化ニッケル（ＮｉＯ）粉末および酸化チタン（ＴｉＯ２）粉末を準備する。また、焼結助剤として、炭酸カルシウム（ＣａＣＯ３）粉末、水酸化マグネシウム（Ｍｇ（ＯＨ）２）粉末および酸化珪素（ＳｉＯ２）粉末を準備する。 First, aluminum oxide (Al 2 O 3 ) powder as a main component material, cobalt oxide (Co 3 O 4 ) powder as a coloring component, iron oxide (Fe 2 O 3 ) powder, nickel oxide (NiO) powder and oxide Prepare titanium (TiO 2 ) powder. In addition, calcium carbonate (CaCO 3 ) powder, magnesium hydroxide (Mg (OH) 2 ) powder and silicon oxide (SiO 2 ) powder are prepared as sintering aids.

次に、これらの粉末を所望量秤量して１次原料粉末とする。例えば、焼結助剤は、セラミック焼結体を構成する全成分１００質量％のうち、カルシウムをＣａＯに換算、マグネシウムをＭｇＯに換算、珪素をＳｉＯ２に換算した含有量の合計が０．６質量％以上２質量％以下となるように秤量する。また、着色成分は、セラミック焼結体を構成する全成分１００質量％のうち、コバルトをＣｏ３Ｏ４に換算した含有量が８質量％以上１２質量％以下、鉄をＦｅ２Ｏ３に換算した含有量が４質量％以上６質量％以下、ニッケルをＮｉＯに換算した含有量が３質量％以上４質量％以下、チタンをＴｉＯ２に換算した含有量が１質量％以上２質量％以下となるように秤量する。そして、残部が酸化アルミニウム（Ａｌ２Ｏ３）粉末となるように秤量する。着色成分の含有量をこのような範囲とすることにより、主面および載置面のＣＩＥ１９７６Ｌ＊ａ＊ｂ＊色空間における明度指数Ｌ*が、３
０以下であって、クロマティクネス指数ａ＊，ｂ＊がいずれも−２以上２以下である載置用部材とすることができる。 Next, a desired amount of these powders are weighed to obtain primary raw material powders. For example, the sintering aid converts the calcium into CaO, the magnesium into MgO, and the silicon into SiO 2 in 100% by mass of all the components constituting the ceramic sintered body. It measures so that it may become more than 2 mass% in mass%. In addition, the coloring component is 8 mass% or more and 12 mass% or less of cobalt converted to Co 3 O 4 in 100 mass% of all components constituting the ceramic sintered body, and iron is converted to Fe 2 O 3 The content is 4% to 6% by mass, the content of nickel converted to NiO is 3% to 4% by mass, and the content of titanium converted to TiO 2 is 1% to 2% by mass Weigh to be Then, the balance is weighed so as to be aluminum oxide (Al 2 O 3 ) powder. By setting the content of the coloring component in such a range, the lightness index L * in the CIE 1976 L * a * b * color space of the main surface and the mounting surface is 3
It is 0 or less, and it can be set as the mounting member which is -2 or more and 2 or less in chromaticness index a * , b * of all.

酸化アルミニウム質セラミックスの粒界相がコバルトスピネル、鉄スピネルおよびニッケルスピネルの少なくともいずれかを含む載置用部材を得るには、まず、酸化アルミニウム（Ａｌ２Ｏ３）粉末を分級して、平均粒径の小さい酸化アルミニウム（Ａｌ２Ｏ３）粉末を得る。そして、上述した含有量の範囲の酸化コバルト（Ｃｏ３Ｏ４）粉末、酸化鉄（Ｆｅ２Ｏ３）粉末および酸化ニッケル（ＮｉＯ）粉末を平均粒径の小さい酸化アルミニウム（Ａｌ２Ｏ３）粉末とともに混合して、１１００℃以上１３００℃以下の温度で仮焼合成した後、ボールミルなどの粉砕機を用いて所望の平均粒径となるまで粉砕した粉末を用いればよい。 In order to obtain a mounting member in which the grain boundary phase of the aluminum oxide ceramic contains at least one of cobalt spinel, iron spinel and nickel spinel, first, aluminum oxide (Al 2 O 3 ) powder is classified to obtain an average grain size. A small diameter aluminum oxide (Al 2 O 3 ) powder is obtained. Then, cobalt oxide (Co 3 O 4 ) powder, iron oxide (Fe 2 O 3 ) powder and nickel oxide (NiO) powder having the above-mentioned range of contents, aluminum oxide (Al 2 O 3 ) powder having a small average particle diameter The powders are mixed together and calcined and synthesized at a temperature of 1100 ° C. or more and 1300 ° C. or less, and then a powder milled to a desired average particle diameter may be used using a grinder such as a ball mill.

酸化アルミニウム質セラミックスの粒界相がチタン酸アルミニウムを含む載置用部材を得るには、上述した含有量の範囲の酸化チタン（ＴｉＯ２）粉末を混合し、１１００℃以上１３００℃以下の温度で仮焼合成した後、ボールミルなどの粉砕機を用いて所望の平均粒径となるまで粉砕した粉末を用いればよい。 In order to obtain a mounting member in which the grain boundary phase of the aluminum oxide ceramic contains aluminum titanate, titanium oxide (TiO 2 ) powder in the above-mentioned content range is mixed, and the temperature is 1100 ° C. or more and 1300 ° C. or less After the calcination and synthesis, a powder milled to a desired average particle diameter may be used using a grinder such as a ball mill.

次に、１次原料粉末１００質量部に対し、０．１質量部以上１質量部以下のＰＥＧ（ポリエチレングリコール）などのバインダと、１００質量部の溶媒とを秤量し、１次原料粉末とともに混合・攪拌してスラリーを得る。   Next, with respect to 100 parts by mass of the primary material powder, a binder such as PEG (polyethylene glycol) of 0.1 parts by mass or more and 1 part by mass or less and 100 parts by mass of a solvent are weighed and mixed with the primary material powder Stir to obtain a slurry.

その後、噴霧造粒装置（スプレードライヤー）を用いてスラリーを噴霧造粒して顆粒を得た後、粉末プレス成形法や静水圧プレス成形法（ラバープレス法）により所望形状の成形体を成形する。   Thereafter, the slurry is spray-granulated using a spray granulator (spray dryer) to obtain granules, and then a molded body of a desired shape is molded by a powder press molding method or a hydrostatic press molding method (rubber press method). .

次に、得られた成形体に必要に応じて切削加工を施し、大気（酸化）雰囲気中、例えば、１４００℃以上１５００℃以下で所望時間保持して焼成することにより、平板状の焼結体を得ることができる。   Next, the obtained molded body is subjected to cutting processing as necessary, and is held in an air (oxidizing) atmosphere, for example, at a temperature of 1400 ° C. or more and 1500 ° C. or less for a desired time to be sintered. You can get

そして、焼結体の主面に、研磨加工を施すことによって本実施形態の載置用部材を構成する基板の主面とすることができる。研磨加工で用いる砥粒は、ダイヤモンドを主成分とし、ＪＩＳ Ｒ ６００１−２：２０１７の沈降試験法で規定する粒度が＃２０００以上＃３０００以下である精密研磨用微粉を用いればよい。   Then, by subjecting the main surface of the sintered body to polishing, the main surface of the substrate constituting the mounting member of the present embodiment can be obtained. The abrasive used in the polishing process may be a fine powder for precision polishing, which is mainly composed of diamond and the particle size specified by the sedimentation test method of JIS R 6001-2: 2017 is # 2000 or more and # 3000 or less.

なお、切断レベル差（Ｒδｃ）切断レベル差（Ｒδｃ）が０．７μｍ以上１μｍ以下
である載置用部材を得るには、研磨加工で用いる砥粒は、ダイヤモンドを主成分とする、上記粒度が＃２５００である精密研磨用微粉を用い、研磨時間を適宜調整すればよい。 In order to obtain a mounting member having a cutting level difference (Rδc) and a cutting level difference (Rδc) of at least 0.7 μm and at most 1 μm, the abrasive grains used in the polishing process are mainly composed of diamond and have the above particle size What is necessary is just to adjust polishing time suitably, using the fine powder for precision polishing which is # 2500.

本発明は前述した実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良、組合せ等が可能である。   The present invention is not limited to the embodiments described above, and various changes, improvements, combinations, and the like can be made without departing from the scope of the present invention.

１ 吸着面
２ 吸着部
３ 貫通孔
４ 内部空間
５ 支持部
６ 吸引路
７ 取付孔
１０ 載置用部材 Reference Signs List 1 suction surface 2 suction portion 3 through hole 4 internal space 5 support portion 6 suction path 7 mounting hole 10 mounting member

Claims (4)

載置対象体を吸着して保持するための吸着面を備えた吸着部を有し、該吸着部が酸化アルミニウム質セラミックスからなり、該酸化アルミニウム質セラミックスは、コバルト、鉄、ニッケルおよびチタンの酸化物を含む、載置用部材。 It has an adsorption section provided with an adsorption surface for adsorbing and holding an object to be placed, and the adsorption section is made of an aluminum oxide ceramic, which is an oxide of cobalt, iron, nickel and titanium. Mounting member including objects. 前記酸化アルミニウム質セラミックスは、粒界相に、コバルトスピネル、鉄スピネルおよびニッケルスピネルの少なくともいずれかを含む、請求項１に記載の載置用部材。 The mounting member according to claim 1, wherein the aluminum oxide-based ceramic contains at least one of cobalt spinel, iron spinel and nickel spinel in a grain boundary phase. 前記酸化アルミニウム質セラミックスは、粒界相に、チタン酸アルミニウムを含む、請求項１または請求項２に記載の載置用部材。 The mounting member according to claim 1, wherein the aluminum oxide-based ceramic contains aluminum titanate in a grain boundary phase. 前記吸着面は、粗さ曲線における２５％の負荷長さ率と７５％の負荷長さ率との間の切断レベル差（Ｒδｃ）が０．７μｍ以上１μｍ以下である、請求項１乃至請求項３のいずれかに記載の載置用部材。 The said adsorption | suction surface is a cutting level difference (R (delta) c) between 25% load length rate and 75% load length rate in a roughness curve is 0.7 micrometer-1 micrometer or less. The mounting member according to any one of 3.
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