JP2019028023A - Appearance inspection device - Google Patents

Appearance inspection device Download PDF

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JP2019028023A
JP2019028023A JP2017150777A JP2017150777A JP2019028023A JP 2019028023 A JP2019028023 A JP 2019028023A JP 2017150777 A JP2017150777 A JP 2017150777A JP 2017150777 A JP2017150777 A JP 2017150777A JP 2019028023 A JP2019028023 A JP 2019028023A
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inspection
light
illumination
inspection apparatus
inspection surface
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JP6935262B2 (en
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将幸 伴
Masayuki Ban
将幸 伴
幸延 岡田
Yukinobu Okada
幸延 岡田
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Hitachi Omron Terminal Solutions Corp
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Hitachi Omron Terminal Solutions Corp
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Abstract

To inspect an inspection surface while preventing halation without increasing the size and deteriorating operability of an inspection device.SOLUTION: An appearance inspection device comprises: a first illumination that irradiates an inspection surface of an inspection target body with light; and an imaging device that picks up an image of the inspection surface of the inspection target body irradiated with the light from the first illumination, as well as a diffusion member that is provided on the periphery of the first illumination on the inspection surface for diffusing the light from the first illumination; and a dimming member that is provided between the diffusion member and inspection surface and dims the light from the first illumination.SELECTED DRAWING: Figure 5

Description

本発明は、検査面の状態を検査する装置に関し、特に、撮像装置を用いて取得した画像により外観の異常を判別する装置に関する。   The present invention relates to an apparatus for inspecting the state of an inspection surface, and more particularly to an apparatus for discriminating an appearance abnormality from an image acquired using an imaging apparatus.

検査面の異常を検査する方法には、被検査体の検査面に照明の光を照射し、カメラで撮影した画像から検査面の傷・異物などを検出する方法がある。しかし、金属面など光沢を有する検査面に照明の光を直接照射すると、検査面で反射する強い光がカメラに入り込み、撮像した画像に白いぼやけが写るハレーションが発生し、その結果として傷や異物の見逃しや誤検出を発生させ、検査の精度が低下する。   As a method for inspecting an abnormality of the inspection surface, there is a method of irradiating the inspection surface of the object to be inspected with illumination light and detecting a scratch or a foreign object on the inspection surface from an image taken by a camera. However, if illumination light is directly irradiated onto a glossy inspection surface such as a metal surface, strong light reflected from the inspection surface enters the camera, and halation occurs where white blur appears in the captured image, resulting in scratches and foreign matter. Misses and false detections, and the accuracy of the inspection decreases.

従来の検査面の検査方法ではハレーションの防止策として、被検査体の検査面に近接する位置に設置した拡散板を通して照明の光を通過させて検査面に光を照射し、リング状の照明の孔と拡散板に設けた小型孔を通して、カメラで被検査体の表面を撮影し、検査する方法が存在する（例えば、特許文献１）。   In the conventional inspection method for the inspection surface, as a measure to prevent halation, the illumination light is passed through a diffusion plate installed at a position close to the inspection surface of the object to be inspected to irradiate the inspection surface with light. There is a method of photographing and inspecting the surface of an object to be inspected with a camera through a small hole provided in the hole and the diffusion plate (for example, Patent Document 1).

特開２００７−１０８０４９号公報JP 2007-108049 A

上述した特許文献１に記載の方法では、検査範囲が照明および拡散板の孔の形状、大きさに依存する。そのため、特許文献１の主な被検査体物である電子部品よりさらに広範囲の表面を、ハレーションを防止して検査するためには、照明と拡散板を大型化する必要がある。その結果、検査装置の大型化や、操作性の悪化等の課題がある。   In the method described in Patent Document 1 described above, the inspection range depends on the shape and size of the holes in the illumination and the diffusion plate. For this reason, in order to inspect a wider range of surfaces than the electronic component, which is the main object to be inspected in Patent Document 1, while preventing halation, it is necessary to increase the size of the illumination and the diffusion plate. As a result, there exist problems, such as enlargement of an inspection apparatus and deterioration of operativity.

本発明は、検査装置の大型化や操作性を悪化させることなくハレーションを防止して検査面を検査することが可能な外観検査装置を提供することを目的とする。   An object of the present invention is to provide an appearance inspection apparatus capable of inspecting an inspection surface by preventing halation without deteriorating the size and operability of the inspection apparatus.

本発明にかかる外観検査装置は、被検査体の検査面に光を照射する第一照明と、前記第一照明による光が照射された前記被検査体の検査面を撮像する撮像装置と、を備え、前記第一照明の前記検査面側の周囲に設けられた前記第一照明による光を拡散するための拡散部材と、前記拡散部材と前記検査面との間に設けられた前記第一照明による光を減光する減光部材と、を備えることを特徴とする外観検査装置として構成される。   An appearance inspection apparatus according to the present invention includes: a first illumination that irradiates light on an inspection surface of an object to be inspected; and an imaging device that captures an image of the inspection surface of the object to be inspected that is irradiated with light from the first illumination. A diffusion member for diffusing light from the first illumination provided around the inspection surface side of the first illumination, and the first illumination provided between the diffusion member and the inspection surface And a light-reducing member for reducing light caused by the above.

本発明によれば、検査装置の大型化や操作性を悪化させることなくハレーションを防止して検査面を検査することができる。   According to the present invention, it is possible to inspect the inspection surface while preventing halation without increasing the size and operability of the inspection apparatus.

本実施例に係る外観検査装置のブロック図である。It is a block diagram of the external appearance inspection apparatus which concerns on a present Example. 筐体の外観検査装置の外観斜視図である。It is an external appearance perspective view of the external appearance inspection apparatus of a housing | casing. 図2の外観検査装置の作業者が装置を操作する側を示す外観斜視図である。FIG. 3 is an external perspective view showing a side where an operator of the appearance inspection apparatus in FIG. 2 operates the apparatus. 外観検査装置へ被検査体がセットされた状態の外観斜視図である。It is an external appearance perspective view of the state by which the to-be-inspected object was set to the external appearance inspection apparatus. 図4において外観検査装置を上面から見たときのA-A断面図である。FIG. 5 is a cross-sectional view taken along line AA when the appearance inspection apparatus is viewed from above in FIG. 第二照明のハレーション対策前後の第二照明の配置の概略図である。It is the schematic of arrangement | positioning of the 2nd illumination before and behind the halation countermeasures of a 2nd illumination. 固定式外観検査装置の外観斜視図である。It is an external appearance perspective view of a fixed type visual inspection apparatus. 回転機構を有する外観検査装置の断面図である。It is sectional drawing of the external appearance inspection apparatus which has a rotation mechanism. 検知装置の構造のスイッチＯＮ／ＯＦＦ状態の断面図である。It is sectional drawing of the switch ON / OFF state of the structure of a detection apparatus. 伸縮機構を持つ外観検査装置の外観斜視図である。It is an external appearance perspective view of the external appearance inspection apparatus with an expansion-contraction mechanism.

以下に本発明の実施の形態を説明する。   Embodiments of the present invention will be described below.

図１は、本実施例における外観検査装置１のブロック図を示す図である。図２は、図１に示した外観検査装置１の外観斜視図である。図３は、外観検査装置１の作業者が操作する側の外観斜視図である。図４は、図２に示した外観検査装置１が被検査体である筐体２にセットされた状態の外観斜視図である。図５は、図４に示すＡ−Ａ断面図である。   FIG. 1 is a block diagram of an appearance inspection apparatus 1 according to this embodiment. FIG. 2 is an external perspective view of the visual inspection apparatus 1 shown in FIG. FIG. 3 is an external perspective view on the side operated by the operator of the visual inspection apparatus 1. FIG. 4 is an external perspective view of the appearance inspection apparatus 1 shown in FIG. 2 set in a housing 2 that is an object to be inspected. 5 is a cross-sectional view taken along line AA shown in FIG.

本実施例において、外観検査装置１は、図１に示すように、第一照明３で光を照射した被検査体１０の検査面１１をカメラ６で撮影した画像のデータを、画像解析ソフトを導入したＰＣ（Personal Computer）２１に送り、ＰＣ２１が画像解析を行った結果を表示部２２に出力するものとする。以下では、画像を撮像するカメラ６を用いた場合について説明しているが、映像を撮像するビデオカメラ等の撮像装置を用いてもよい。   In the present embodiment, as shown in FIG. 1, the appearance inspection apparatus 1 uses image analysis software for image data obtained by photographing the inspection surface 11 of the inspected object 10 irradiated with the first illumination 3 with the camera 6. It is assumed that the result is sent to an introduced PC (Personal Computer) 21 and the result of image analysis performed by the PC 21 is output to the display unit 22. Although the case where the camera 6 that captures an image is used is described below, an imaging device such as a video camera that captures an image may be used.

本実施例における構成部品の配置は、図５に示すように、傷や異物の有無を検査する対象である被検査体１０の検査面１１と対向する正面方向から光を照射する第一照明３を設置し、第一照明３の光を検査面１１側の広範囲に照射する拡散板４を第一照明３に取り付け、第一照明３から照射される検査面１１側の正面の光の一部を遮り減光するための減光板５が、拡散板４と被検査体１０の検査面１１との間に設置される。   As shown in FIG. 5, the arrangement of the component parts in the present embodiment is such that the first illumination 3 that irradiates light from the front direction facing the inspection surface 11 of the object 10 to be inspected for the presence or absence of scratches or foreign objects. A diffusion plate 4 that irradiates the light of the first illumination 3 over a wide area on the inspection surface 11 side is attached to the first illumination 3, and a part of the front light on the inspection surface 11 side that is irradiated from the first illumination 3 A light-reducing plate 5 for shielding and dimming is installed between the diffusion plate 4 and the inspection surface 11 of the object 10 to be inspected.

さらに、検査面１１に対して左右両側方から光を照射する第二照明９ａ、９ｂ（以下、両方を指す場合には単に第二照明９とも呼ぶ。）による光の照射方向が、被検査体１０の検査面１１から離れる仰角方向に傾斜させて設置され、検査面１１を撮影するためのカメラ６ａ、６ｂ（以下、両方を指す場合には単にカメラ６とも呼ぶ。）は、検査面１１からみて第一照明３の背後であって検査面１１と対向する正面方向に設置される。そして、第一照明３、カメラ６、第二照明９を囲うように反射板７が配置され、反射板７を覆うように遮光部材８が設置される。   Furthermore, the direction of light irradiation by the second illuminations 9a and 9b that irradiate light from both the left and right sides with respect to the inspection surface 11 (hereinafter also referred to simply as the second illumination 9 when referring to both) is the object to be inspected. Cameras 6 a and 6 b (hereinafter also referred to simply as camera 6 when referring to both) that are installed inclining in the elevation direction away from the inspection surface 11 and image the inspection surface 11. Thus, it is installed behind the first illumination 3 and in the front direction facing the inspection surface 11. Then, the reflection plate 7 is arranged so as to surround the first illumination 3, the camera 6, and the second illumination 9, and the light shielding member 8 is installed so as to cover the reflection plate 7.

第一照明３は、被検査体１０に光を照射することにより、カメラ６で撮影するための光量を確保する。しかし、第一照明３の光を被検査体１０に直接照射するとき、照度が高すぎると検査面１１からの強い反射光がカメラ６に入り込むことでハレーションが発生する。この場合、撮影画像に白いぼやけが生じることで検査面１１の傷・異物の見逃しや誤検出につながり、検査面１１の表面状態を正確に撮影できない。したがって、照明の光を、ハレーションを起こさず広範囲の検査面１１に均一に照射させるため、下記で説明する拡散板４を第一照明３に取り付けている。   The first illumination 3 secures an amount of light for photographing with the camera 6 by irradiating the inspection object 10 with light. However, when the light of the first illumination 3 is directly applied to the inspection object 10, if the illuminance is too high, halation occurs due to strong reflected light from the inspection surface 11 entering the camera 6. In this case, white blurring occurs in the photographed image, leading to missing or erroneous detection of scratches / foreign matter on the inspection surface 11, and the surface state of the inspection surface 11 cannot be accurately imaged. Therefore, the diffuser plate 4 described below is attached to the first illumination 3 in order to uniformly irradiate the illumination light to the wide inspection surface 11 without causing halation.

第一照明３に設置している拡散板４は、第一照明３の光を透過させると、透過した光を周囲に均等に拡散させる効果がある。拡散板４の材料には、第一照明３の光を透過するときに照明の光源部分の輪郭が消える程度に均一に発光することができる材質のものを使用することが望ましい。第一照明３の光源部分の輪郭が拡散板４に残ると、その光模様部分からは他の部分より強く光が照射されているため、被検査体１０の検査面１１に均等に拡散して照射できない場合がある。このため、本実施例においては、透明な部材に比べて拡散板４の内部で光が反射する乳白色の樹脂製シートを半円状の円筒の形状にして、第一照明３として使用するバー型のＬＥＤ（Light Emitting Diode）照明を覆うように設置している。第一照明３を覆う拡散板４の形状は、四角のような角型の形状より、半円状の円筒に近い形状で覆う方が第一照明３の光を拡散し、より広範囲の検査面１１に光を照射できる。   The diffuser plate 4 installed in the first illumination 3 has an effect of uniformly diffusing the transmitted light around when the light of the first illumination 3 is transmitted. The material of the diffusing plate 4 is desirably a material that can emit light uniformly to such an extent that the outline of the light source portion of the illumination disappears when the light of the first illumination 3 is transmitted. When the outline of the light source portion of the first illumination 3 remains on the diffuser plate 4, the light pattern portion is irradiated with light more strongly than the other portions, so that the light diffuses evenly on the inspection surface 11 of the object 10 to be inspected. Irradiation may not be possible. For this reason, in this embodiment, the bar-type used as the first illumination 3 is made of a milky white resin sheet that reflects light inside the diffusion plate 4 in the shape of a semicircular cylinder as compared with a transparent member. LED (Light Emitting Diode) lighting is installed. The diffuser plate 4 covering the first illumination 3 has a shape closer to a semicircular cylinder than the square shape such as a square, so that the light of the first illumination 3 is diffused, and a wider range of inspection surfaces. 11 can be irradiated with light.

拡散板４と被検査体１０の間に設置される減光板５は、第一照明３に拡散板４を取り付け、光を均等に拡散させるようにした場合でも、第一照明３から近い位置の検査面１１に照射される光は強く、遠い位置ほど光が弱くなる。このため、検査面１１が広範囲のとき、位置によって照射される光にむらが生じることで、光のむらにより一部で光量過多によるハレーションまたは光量不足が発生し、全体の照度を均一にした状態で検査面１１を撮影できなくなる場合がある。減光板５を設置することで、第一照明３から近い位置の被検査体１０の検査面１１に照射される光を遮り、減光板５で透過する光の一部を反射、吸収することで検査面１１で強く照射される位置の光量を減らし、被検査体１０の検査面１１に対する光量や照度を均一な状態に近づける効果がある。減光板５は透過率が低く、第一照明３に近い検査面１１に照射される光を反射、吸収することで透過する光量を減らし、拡散透過することができる材料が望ましい。透過率が低い材質から減光板５が構成されていても、光を透過せず完全に遮光する材質の場合、光が検査面１１に照射されにくい箇所が生じ、検査面１１で光のむらを発生させ、検査精度を低下させる。そのため、拡散板４から照射される光を完全に遮光する材料は適さない。   The dimming plate 5 installed between the diffusing plate 4 and the object to be inspected 10 is located at a position close to the first illuminating 3 even when the diffusing plate 4 is attached to the first illuminating 3 and the light is evenly diffused. The light irradiated onto the inspection surface 11 is strong, and the light becomes weaker as it is farther away. For this reason, when the inspection surface 11 is in a wide range, unevenness occurs in the light irradiated depending on the position, causing halation due to excessive light amount or insufficient light amount due to the unevenness of the light, and in a state where the entire illuminance is uniform. In some cases, the inspection surface 11 cannot be imaged. By installing the light reducing plate 5, the light irradiated on the inspection surface 11 of the object 10 to be inspected near the first illumination 3 is blocked, and a part of the light transmitted by the light reducing plate 5 is reflected and absorbed. There is an effect of reducing the amount of light at a position that is strongly irradiated on the inspection surface 11 and bringing the amount of light and illuminance of the inspection object 11 toward the inspection surface 11 closer to a uniform state. The light reducing plate 5 is preferably made of a material having a low transmittance and capable of reducing the amount of light transmitted by reflecting and absorbing the light irradiated on the inspection surface 11 close to the first illumination 3 and diffusing and transmitting the light. Even if the light reducing plate 5 is made of a material having a low transmittance, when the material does not transmit light and completely blocks light, a portion where light is not easily irradiated on the inspection surface 11 occurs, and unevenness of light occurs on the inspection surface 11. Reduce the inspection accuracy. Therefore, a material that completely blocks the light irradiated from the diffusion plate 4 is not suitable.

拡散板４及び減光板５を取り付けた第一照明３で筐体２のような広範囲の検査面１１に光を照射する場合に、ハレーションが起きないように光量を抑えて照射すると、被検査体１０の検査面１１全体の光量が不足し、カメラ６で検査面１１の撮影ができない場合がある。被検査体１０の検査面１１に、第一照明３から照射された光の反射板７からの反射光も照射することで、検査面１１全体を明るくして光量を補う効果がある。反射板７は、反射する光を様々な方向に分散させる拡散反射を起こしやすく、検査面１１に光を分散できずに反射光が一部に集中して照射することで発生するハレーションを防ぐことが可能な光沢の無い材質にするのが望ましく、本実施例では光沢が無い白色の布を使用している。   When the first illumination 3 to which the diffuser plate 4 and the dimming plate 5 are attached irradiates light to a wide inspection surface 11 such as the housing 2, if the light is suppressed so as not to cause halation, the object to be inspected There are cases where the light quantity of the entire 10 inspection surfaces 11 is insufficient, and the inspection surface 11 cannot be imaged by the camera 6. By irradiating the inspection surface 11 of the inspection object 10 with the reflected light from the reflection plate 7 of the light irradiated from the first illumination 3, the entire inspection surface 11 is brightened and the amount of light is compensated. The reflection plate 7 easily causes diffuse reflection that disperses the reflected light in various directions, and prevents halation that occurs when the reflected light concentrates and irradiates part of the inspection surface 11 without being able to disperse the light. It is desirable to use a non-glossy material, and in this embodiment, a non-glossy white cloth is used.

第一照明３付近の強い光が反射板７で反射し、検査面１１に照射されることにより発生するハレーションを防ぐように、反射板７を設置する必要がある。本実施例においては、第一照明３の検査面１１側である正面側の周囲に設けられた拡散板４を透過して照射される光が第一照明３の背面部分の反射板7（図５では、部分反射板７ａ、７ｂ）に照射され、強い反射光が検査面１１に投影されないようにする必要がある。このため、第一照明３の背面側の周囲に設けられ、反射板７の一部を構成する部分反射板７ａ、７ｂを着脱可能とし、これらの反射板７ａ、７ｂを外した状態にすることでハレーションへの対策をする方法を取っている。   It is necessary to install the reflecting plate 7 so as to prevent halation that occurs when strong light near the first illumination 3 is reflected by the reflecting plate 7 and is irradiated on the inspection surface 11. In the present embodiment, the light irradiated through the diffusion plate 4 provided around the front side which is the inspection surface 11 side of the first illumination 3 is reflected on the reflection plate 7 (see FIG. 5, it is necessary to irradiate the partial reflection plates 7 a and 7 b) so that strong reflected light is not projected onto the inspection surface 11. For this reason, the partial reflectors 7a and 7b that are provided around the back side of the first illumination 3 and constitute a part of the reflector 7 are detachable, and the reflectors 7a and 7b are removed. I am taking measures to prevent halation.

反射板７に汚れが付着すると、汚れに光が吸収され反射率が低下し、検査面１１へ照射される光量が減少する。その結果、カメラ６で検査面１１を撮影できない場合がある。このため、砂埃などの汚れへの対策を行う必要があるが、その対策として布などで汚れを拭き落とす方法や、反射板７が白い布のように洗濯可能な材質であれば洗濯で、反射板７の汚れを落とせばよい。   When dirt adheres to the reflecting plate 7, light is absorbed by the dirt and the reflectance decreases, and the amount of light applied to the inspection surface 11 decreases. As a result, the inspection surface 11 may not be photographed with the camera 6. For this reason, it is necessary to take countermeasures against dirt such as dust. As countermeasures for this, a method of wiping off dirt with a cloth or the like, and if the reflector 7 is a washable material such as a white cloth, it is washed and reflected. What is necessary is just to remove the dirt on the plate 7.

前記反射板７を覆うように配置している遮光部材８は、太陽光や室内照明などの外光を遮断することで、外光が被検査体１０の検査面１１に照射されることで発生するハレーションまたは光のむらを防ぎ、検査面１１を安定して撮影できるようにする効果がある。遮光部材８は、外観検査装置１の外部からの光を通さない材質のものであれば使用することができ、本実施例においては黒色の布を使用している。   The light shielding member 8 arranged so as to cover the reflection plate 7 is generated by irradiating the inspection surface 11 of the object 10 to be inspected by blocking external light such as sunlight or indoor lighting. This has the effect of preventing halation or unevenness of light and enabling the inspection surface 11 to be imaged stably. The light shielding member 8 can be used as long as it is made of a material that does not allow light from the outside of the appearance inspection apparatus 1 to pass through. In this embodiment, a black cloth is used.

第一照明３と異なる方向から光を照射する第二照明９は、被検査体１０の検査面１１に対して側方から照射するように設置することで、検査面１１の傷や異物に陰影をつけ、カメラ６で取得する画像に傷や異物の影が写りやすくなる効果がある。   The second illumination 9 that irradiates light from a direction different from that of the first illumination 3 is installed so as to irradiate the inspection surface 11 of the inspection object 10 from the side, so that the inspection surface 11 is not affected by scratches or foreign matter. The image acquired by the camera 6 can be easily reflected in the image acquired by the camera 6.

しかし、前記第二照明９を図６の（ａ）に示すように、被検査体１０の検査面１１に対して平行に光軸Ａを向けて側方から光を照射すると、通常の照明は光の照射範囲１２が広がるように光を照射するため、第二照明９付近の被検査体１０の検査面１１の方向に光Ｘが強く照射され、ハレーション箇所１３が発生する。その結果、第二照明９付近の被検査体１０の検査面１１の撮影画像に白いぼやけが生じ、光を均一に照射した検査面１１の表面状態を撮影できなくなる。前図６の（ｂ）に示すように、被検査体１０の検査面１１に対して第二照明９から照射される光のうち検査面１１側の光が、検査面１１と平行になるように光軸Ａを向けて第二照明９に傾斜をつけて配置して光を照射する。このような配置とすることで、第二照明９付近の検査面１１に照射される光を弱め、ハレーションの発生を避けることができる。   However, as shown in FIG. 6A, when the second illumination 9 is irradiated with light from the side with the optical axis A directed parallel to the inspection surface 11 of the object 10 to be inspected, In order to irradiate the light so that the light irradiation range 12 is widened, the light X is strongly irradiated in the direction of the inspection surface 11 of the inspection object 10 near the second illumination 9, and a halation site 13 is generated. As a result, white blurring occurs in the captured image of the inspection surface 11 of the inspection object 10 near the second illumination 9, and the surface state of the inspection surface 11 irradiated with light uniformly cannot be imaged. As shown in FIG. 6B, the light on the inspection surface 11 side out of the light irradiated from the second illumination 9 to the inspection surface 11 of the inspection object 10 is parallel to the inspection surface 11. The second illumination 9 is arranged with an inclination with the optical axis A directed to irradiate light. With such an arrangement, it is possible to weaken the light applied to the inspection surface 11 near the second illumination 9 and avoid the occurrence of halation.

第二照明９に使用する照明は、直管蛍光灯のような指向性を持たず１８０度以上の広範囲に広がるように光を照射する照明では、第二照明９付近の検査面１１に照射される光量を減らし、ハレーションを起こさないように配置することが難しい。ハレーションを防ぐためには指向性を持つ照明の方が望ましく、本実施例においては、ＬＥＤのバー型照明の照射角度約６０度の照明を使用し、図６の（ｂ）に示すように検査面１１に強い光が照射されない状態になるように２０度〜３０度程度、検査面１１から離す方向に傾斜させるのが望ましい。   The illumination used for the second illumination 9 is irradiated on the inspection surface 11 near the second illumination 9 in the illumination that irradiates light so as to spread over a wide range of 180 degrees or more without directivity like a straight tube fluorescent lamp. It is difficult to arrange so as to reduce the amount of light that is generated and not cause halation. In order to prevent halation, directional illumination is desirable. In this embodiment, illumination with an illumination angle of about 60 degrees of LED bar-type illumination is used, and an inspection surface as shown in FIG. It is desirable to incline in a direction away from the inspection surface 11 by about 20 degrees to 30 degrees so that strong light is not irradiated to 11.

前記の第一照明３と第二照明９については、照明の出力の変化によって、照明の光量過多によるハレーションまたは光量不足により、カメラ６の撮影による表面状態の検査において、検出漏れや誤検出を起こし表面状態を正確に撮影できない場合がある。前記のことから、出力の調整が可能な照明を使用することが望ましい。本実施例においてはコントローラを照明に取り付けることで、光量の調整ができるようにしている。   About the said 1st illumination 3 and the 2nd illumination 9, the omission of detection and a false detection are caused in the inspection of the surface state by photography of the camera 6 due to the halation due to the excessive light amount of the illumination or the insufficient light amount due to the change of the output of the illumination. The surface condition may not be accurately captured. In view of the above, it is desirable to use an illumination whose output can be adjusted. In this embodiment, the amount of light can be adjusted by attaching a controller to the illumination.

第一照明３と第二照明９の色については、傷や異物または検査面１１と同色の照明で検査面１１への照射を行うと、傷や異物または被検査体１０が周囲の色と同化し、表面状態の異常を撮影できない場合がある。カメラ６は、カラーとモノクロのどちらで撮影してもよいが、検査面１１で検出する必要がある傷や異物などの検査対象物と同色の照明を使用するのを避けるのが望ましい。   About the color of the 1st illumination 3 and the 2nd illumination 9, if the test | inspection surface 11 is irradiated with the illumination of the same color as a crack | scratch, a foreign material, or the test | inspection surface 11, a test | inspection 10 will be the same as the surrounding color. In some cases, the surface condition abnormality cannot be photographed. The camera 6 may shoot in either color or monochrome, but it is desirable to avoid using illumination of the same color as the inspection object such as scratches or foreign matters that need to be detected on the inspection surface 11.

カメラ６は、被検査体１０の検査面１１を撮影できるようにするため、カメラ６の撮影範囲に外観検査装置１の実装物が写りこみ、被検査体１０の検査面１１の検査を妨げず、さらに撮影画像が歪まない位置に設置する必要がある。本実施例においては、第一照明３の側方にカメラ６を設置し、被検査体１０の検査面１１に対向する正面方向から撮影している。このとき、複数台のカメラ６を並べて設置し被検査体１０の検査面１１を分割して撮影することで、被検査体１０とカメラ６の距離を近づけても広範囲を検査することができ、外観検査装置１の奥行き方向（図５では、上下方向）のサイズを薄くして小型化させることが可能となる。図５では、検査面１１に平行に並べられた２つのカメラ６が、それぞれ、検査面１１を２つの分割した左領域Ｒａと右領域Ｒｂとを撮像する。   In order for the camera 6 to be able to photograph the inspection surface 11 of the object to be inspected 10, the mounted product of the appearance inspection apparatus 1 is reflected in the photographing range of the camera 6, and does not interfere with the inspection of the inspection surface 11 of the object to be inspected 10. Furthermore, it is necessary to install the camera at a position where the captured image is not distorted. In the present embodiment, the camera 6 is installed on the side of the first illumination 3 and photographing is performed from the front direction facing the inspection surface 11 of the inspection object 10. At this time, by arranging a plurality of cameras 6 side by side and dividing and inspecting the inspection surface 11 of the object 10 to be inspected, a wide area can be inspected even if the distance between the object 10 and the camera 6 is reduced, It is possible to reduce the size of the appearance inspection apparatus 1 by reducing the size in the depth direction (vertical direction in FIG. 5). In FIG. 5, the two cameras 6 arranged in parallel to the inspection surface 11 respectively image the left region Ra and the right region Rb obtained by dividing the inspection surface 11 into two parts.

このように、カメラ６は、検査面１１に対して複数設けられ、それぞれのカメラ６ａ、６ｂが、検査面１１を複数の領域に分割した分割領域Ｒａ、Ｒｂのそれぞれを撮像している。また、魚眼レンズのように焦点距離の短いレンズを使用することでも、撮影範囲を大きくし、短い撮影距離にすることで装置の小型化をすることは可能である。ただし、被検査体１０の検査面１１の撮影画像が歪み、検査面１１の傷や異物などの表面状態を見逃す要因になる場合があるため、実際の撮影で検査面１１の画像の歪みが無いレンズの焦点距離と撮影距離を確認してカメラ６の設置位置を決定する必要がある。   As described above, a plurality of cameras 6 are provided for the inspection surface 11, and each of the cameras 6a and 6b images each of the divided regions Ra and Rb obtained by dividing the inspection surface 11 into a plurality of regions. Also, it is possible to reduce the size of the apparatus by using a lens with a short focal length, such as a fisheye lens, by increasing the shooting range and reducing the shooting distance. However, since the captured image of the inspection surface 11 of the inspection object 10 may be distorted and cause a surface condition such as a scratch or a foreign object on the inspection surface 11 to be overlooked, there is no distortion of the image of the inspection surface 11 in actual imaging. It is necessary to determine the installation position of the camera 6 by confirming the focal length of the lens and the shooting distance.

前記のカメラ６を複数台並べて固定して検査する方法以外にも、ロボットアームやモータとレール等の可動機構をカメラ６の設置位置に実装し、当該可動機構によって１台のカメラ６を検査面１１と平行に移動させて、上記左領域Ｒａと右領域Ｒｂのように被検査体１０の表面を分割して撮影し、検査させる方法を取ることもできる。例えば、カメラ６に検査面１１と平行に移動させるための可動機構を備え、その移動の前後で検査面１１を複数の領域に分割した分割領域Ｒａ、Ｒｂのそれぞれを撮像してもよい。このような構成とすることで、カメラ６を複数設ける必要がなくなり、より安価に検査面を検査することができる。   In addition to the method of inspecting a plurality of cameras 6 arranged side by side, a movable mechanism such as a robot arm, a motor and a rail is mounted at the installation position of the camera 6, and one camera 6 is inspected by the movable mechanism. 11, the surface of the object to be inspected 10 can be divided and photographed as in the left region Ra and the right region Rb. For example, a movable mechanism for moving the camera 6 in parallel with the inspection surface 11 may be provided, and each of the divided regions Ra and Rb obtained by dividing the inspection surface 11 into a plurality of regions before and after the movement may be captured. With such a configuration, it is not necessary to provide a plurality of cameras 6, and the inspection surface can be inspected at a lower cost.

設置したカメラ６のレンズに砂埃などの汚れが付着すると、撮影画像に異物が写り検査面１１の撮影を妨げるため、その対策として、レンズをガラスカバーなどで保護を行い、保護に用いるガラスカバーを布で汚れを拭き落とす。前記のような方法でカメラのレンズを保護することで検査時にカメラへの汚れの影響を受けずに検査することができる。   If dirt such as dust adheres to the lens of the installed camera 6, foreign matter appears in the photographed image and obstructs photographing of the inspection surface 11. Therefore, as a countermeasure, the lens is protected with a glass cover or the like, and a glass cover used for protection is provided. Wipe off dirt with a cloth. By protecting the camera lens by the method as described above, it is possible to inspect without being affected by dirt on the camera at the time of inspection.

以上の構成にすることで、被検査体１０の検査面１１を均一に照射し、ハレーションを起こさず、高い精度で検査面１１を撮影することができる。   With the above configuration, the inspection surface 11 of the object to be inspected 10 can be uniformly irradiated, and the inspection surface 11 can be imaged with high accuracy without causing halation.

図２に示す外観検査装置１の使用方法として、本実施例の形態では外観検査装置１の外形に有するキャスタ１４を回転させて、図４のように筐体２のような被検査体１０まで移動させ、被検査体１０の検査面１１に突き当てて密着させる。その後、外観検査装置１と被検査体１０の隙間から外光が入らないように遮光部材８で覆って検査する。この場合、筐体２のような被検査体１０の側面４箇所を、１面ずつ外観検査装置１を移動させて検査を行う。カメラ６で撮影した画像を、本実施例の場合は、図３に示すような画像解析ソフトを導入したＰＣ２１を用いて、傷や異物の表面の異常を画像解析ソフトで解析及び判定させ、解析結果を表示部２２に表示する。   As a method of using the appearance inspection apparatus 1 shown in FIG. 2, in the form of the present embodiment, the caster 14 provided on the outer shape of the appearance inspection apparatus 1 is rotated to reach the inspected object 10 such as the housing 2 as shown in FIG. It is moved and brought into close contact with the inspection surface 11 of the inspection object 10. After that, the light-shielding member 8 is covered and inspected so that external light does not enter through the gap between the appearance inspection apparatus 1 and the inspection object 10. In this case, inspection is performed by moving the appearance inspection apparatus 1 one by one on the four side surfaces of the object to be inspected 10 such as the housing 2. In the case of the present embodiment, an image photographed by the camera 6 is analyzed and determined by the image analysis software using the PC 21 with image analysis software introduced as shown in FIG. The result is displayed on the display unit 22.

外観検査装置１を動かすためのキャスタ１４は、床に段差が生じていても容易に乗り越えられるように、その径は大きいほうがよい。また、外観検査装置１の移動等で転倒する可能性を考慮し、本実施例では重い実装物が低い位置に来るようにすることで重心位置を下げ、転倒しにくくしている。   The caster 14 for moving the appearance inspection apparatus 1 should have a large diameter so that it can easily get over even if there is a step on the floor. Further, in consideration of the possibility of falling due to the movement of the appearance inspection apparatus 1 or the like, in this embodiment, the center of gravity is lowered by making the heavy package come to a low position, making it difficult to fall.

前記の使用方法で記載した可動式の外観検査装置１を用いた検査方法以外にも、外観検査装置１を固定し、筐体２などの被検査体１０を移動させる方法で検査することもできる。図７に開閉用扉１５を有し、内部が空洞構造の箱型の側面内壁部分の４面に図５に示す構成を有した、固定式の外観検査装置１の外観斜視図を示す。筐体２のような被検査体１０を移動させ、装置内部に設置した後に扉を閉じ、外光を遮断した状態で被検査体１０に照明の光を照射しカメラ６で撮影する。前記方法で検査を行うことで、１回の被検査体１０の移動で４面同時に検査することも可能になり、移動に掛かる時間を減らし検査時間を短縮することができる。   In addition to the inspection method using the movable appearance inspection device 1 described in the above usage method, the inspection device 1 such as the housing 2 can be inspected by fixing the appearance inspection device 1 and moving it. . FIG. 7 shows an external perspective view of the fixed appearance inspection apparatus 1 having the opening / closing door 15 and the structure shown in FIG. 5 on four sides of a box-shaped side wall portion having a hollow structure inside. The inspected object 10 such as the housing 2 is moved, installed inside the apparatus, the door is closed, and the inspected object 10 is irradiated with illumination light in a state where external light is blocked, and the camera 6 takes an image. By performing the inspection by the above-described method, it is possible to inspect four surfaces simultaneously by one movement of the object to be inspected 10, thereby reducing the time required for movement and shortening the inspection time.

外観検査装置１の使用方法で記載した被検査体１０の検査面１１に突き当てて密着させる際に、図８に示すように、外観検査装置１の筐体の両端に、外観検査装置１の進行方向である水平方向に回転軸を有した回転支点１６を設けることで、床の傾斜が外観検査装置１と被検査体１０の間に発生しても、外観検査装置１を被検査体１０に突き当てた際に、被検査体１０の表面の傾斜に追従して外観検査装置１も傾き、外観検査装置１’のような状態となる。したがって、被検査体１０の検査面１１と外観検査装置１とが常に平行な状態になり、カメラ６と検査面１１との間の撮影距離が変わらずに安定して検査することができる。   As shown in FIG. 8, as shown in FIG. 8, at the both ends of the housing of the appearance inspection apparatus 1, the appearance inspection apparatus 1 is provided at both ends of the inspection surface 11 of the inspection object 10 described in the usage method of the appearance inspection apparatus 1. By providing the rotation fulcrum 16 having a rotation axis in the horizontal direction which is the traveling direction, the appearance inspection apparatus 1 can be connected to the inspection object 10 even if the floor is inclined between the appearance inspection apparatus 1 and the inspection object 10. When it is abutted against, the appearance inspection apparatus 1 is also inclined following the inclination of the surface of the object 10 to be inspected, and a state like the appearance inspection apparatus 1 ′ is obtained. Therefore, the inspection surface 11 of the object to be inspected 10 and the appearance inspection apparatus 1 are always in a parallel state, and the imaging distance between the camera 6 and the inspection surface 11 can be stably inspected without changing.

前記の設置位置を安定にするために、外観検査装置１の位置を決めるための検知装置を設ける。当該検知装置は、外観検査装置１に被検査体１０の検査面１１を突き当てて検査位置を決めるための位置決め機構を有している。その構造は図９の（ａ）に示すように、外観検査装置１が被検査態１０の検査面１１に突き当たる前の状態では、スイッチ１７は、固定ねじ１８を支点として、突き当てられる検査面１１の側に傾いた位置となっている。   In order to stabilize the installation position, a detection device for determining the position of the appearance inspection apparatus 1 is provided. The detection device has a positioning mechanism for determining the inspection position by abutting the inspection surface 11 of the inspection object 10 against the appearance inspection device 1. As shown in FIG. 9A, the structure of the switch 17 is an inspection surface that is abutted with the fixing screw 18 as a fulcrum before the appearance inspection device 1 abuts against the inspection surface 11 of the inspected state 10. 11 is inclined to the side.

しかし、図９の（ｂ）に示すように、被検査体１０の検査面１１が検知装置に突き当てられると、その時に外観検査装置１の最初に突き当たる位置に設置されたストッパ１９が作用する。そして、検査面１１とストッパ１９とが互いに平行になる位置まで固定ねじ１８を支点として回転し、上記位置よりも被検査体１０が進行方向（図９では右側）に押し込まれることがなくなり、その位置が被検査体１０の設置位置となる。   However, as shown in FIG. 9B, when the inspection surface 11 of the inspection object 10 is abutted against the detection device, the stopper 19 installed at the position where it first abuts on the appearance inspection device 1 acts at that time. . Then, the inspection surface 11 and the stopper 19 are rotated with the fixing screw 18 as a fulcrum to a position where the inspection surface 11 and the stopper 19 are parallel to each other, and the inspection object 10 is not pushed in the advancing direction (right side in FIG. 9) from the position. The position becomes the installation position of the device under test 10.

つまり、ストッパ１９が被検査体１０に突き当たることによって、スイッチ１７を押す向きに固定ねじ１８部分を支点に回転し、板金でスイッチ１７が押される状態になり、被検査体１０と外観検査装置１とが位置決めされて固定された状態にあることを検知することができる。作業者が、上記固定ができたことを確認できるように、本実施例ではスイッチ１７と電気的に接続され、連動して発光するランプＬを外観検査装置１に取り付け、作業者の目視による外観検査装置１の設置確認作業を不要にしている。このため、外観検査装置の設置も含めた検査に掛かる作業時間を短縮させることができる。本実施例では、上記位置決めされた場合にランプＬを発行させることとしたが、スピーカ等から音声を報知したり、表示部２２に位置決めされた旨を出力してもよい。   That is, when the stopper 19 hits the object 10 to be inspected, the switch 17 is rotated with the fixing screw 18 in a direction to push the switch 17, and the switch 17 is pushed by the sheet metal. Can be detected as being positioned and fixed. In this embodiment, a lamp L that is electrically connected to the switch 17 and emits light in conjunction with the lamp is attached to the appearance inspection apparatus 1 so that the operator can confirm that the fixing has been performed. The installation confirmation work of the inspection apparatus 1 is unnecessary. For this reason, the work time required for inspection including installation of the appearance inspection apparatus can be shortened. In the present embodiment, the lamp L is issued when the positioning is performed. However, a sound may be notified from a speaker or the like, or a message indicating that the positioning is performed on the display unit 22 may be output.

また、被検査体１０の検査面１１に外観検査装置１を突き当てたときに検査面１１に傷を付かないように、ストッパ１９の箇所に保護材を取り付ける必要がある。本実施例においては保護材としてゴム材をストッパ１９の箇所に取り付けている。   Further, it is necessary to attach a protective material to the stopper 19 so that the inspection surface 11 is not scratched when the appearance inspection device 1 is abutted against the inspection surface 11 of the object 10 to be inspected. In this embodiment, a rubber material is attached to the stopper 19 as a protective material.

外観検査装置１を被検査体２に突き当てた後に隙間から外光が入らないように、外観検査装置１を遮光部材８で覆う必要がある。その方法として、外観検査装置１に暗幕等の布状の遮光部材８を有するカーテンレールを取り付け、カーテンを掛けるように遮光部材８で覆う方法を取ってもよく、被検査体１０が磁性体であれば、外観検査装置１に暖簾状に取り付けた遮光部材８に磁石を取り付け、遮光部材８で覆う際に被検査体１０にくっつけるように固定する方法を取ってもよい。   It is necessary to cover the appearance inspection apparatus 1 with the light shielding member 8 so that external light does not enter through the gap after the appearance inspection apparatus 1 is abutted against the inspection object 2. As a method thereof, a method may be adopted in which a curtain rail having a cloth-shaped light shielding member 8 such as a black curtain is attached to the appearance inspection apparatus 1 and covered with the light shielding member 8 so as to hang the curtain. If present, a method may be adopted in which a magnet is attached to the light shielding member 8 attached in a warm manner to the appearance inspection apparatus 1 and fixed so as to be attached to the object 10 when covered with the light shielding member 8.

図１０に示すように、外観検査装置フレーム２０に幅方向に伸縮可能な機構を設けることで、幅Ｄを変化させることが可能な機構を有した外観検査装置１としてもよい。このような構成にすることで、被検査体１０の大きさに合わせて外観検査装置１の幅を変えることが可能になる。図１０に示す伸縮する機構を高さ方向にも設けることで汎用性を持つ外観検査装置にすることもできる。   As shown in FIG. 10, the appearance inspection apparatus 1 may have a mechanism capable of changing the width D by providing the appearance inspection apparatus frame 20 with a mechanism capable of expanding and contracting in the width direction. With this configuration, the width of the appearance inspection apparatus 1 can be changed in accordance with the size of the inspection object 10. By providing the extending and contracting mechanism shown in FIG. 10 also in the height direction, it is possible to provide a general-purpose appearance inspection apparatus.

前記の可動式の外観検査装置１には照明等を稼動させるために電源が必要で、電源バッテリ２３から電力を供給する方法以外にも、電源ケーブルを用いて外部コンセントから電力を供給する方法を取ることもできる。外部から電力供給をする場合、筐体２のような被検査体１０を検査するために周囲を移動する際に、電源ケーブルが被検査体１０または外観検査装置１に引っかからないようにするため、被検査体１０の上部に電源供給用コンセントを設けて電源ケーブルを上から垂らした状態にする方法を取ってもよい。   The movable visual inspection apparatus 1 requires a power source for operating lighting and the like, and in addition to a method of supplying power from the power battery 23, a method of supplying power from an external outlet using a power cable. It can also be taken. When power is supplied from the outside, in order to prevent the power cable from being caught by the inspected object 10 or the visual inspection apparatus 1 when moving around to inspect the inspected object 10 such as the housing 2, A method may be adopted in which a power supply outlet is provided on the upper part of the device under test 10 so that the power cable is hung from above.

このように、本実施例によれば、照明および拡散板に撮影に必要な孔を設ける必要が無くなることで、前記の孔の形状によって検査の範囲と照明及び拡散板の形状と配置が制限されず、外観検査装置の照明と拡散板の小型化と、検査範囲の拡大を両立させることが可能になる。周囲を反射板で覆い、外光が入らないように遮光部材を追加することで、検査範囲の大きさに依らずハレーションを防止し、検査面の傷や異物などの表面状態を撮影することができる。   As described above, according to the present embodiment, since it is not necessary to provide the illumination and the diffusion plate with holes necessary for photographing, the shape of the hole and the shape and arrangement of the illumination and the diffusion plate are limited by the shape of the hole. Therefore, it is possible to achieve both the illumination of the appearance inspection apparatus and the miniaturization of the diffusion plate and the expansion of the inspection range. By covering the surrounding area with a reflector and adding a light-shielding member to prevent external light from entering, it is possible to prevent halation regardless of the size of the inspection range and to photograph the surface state of the inspection surface such as scratches and foreign matter it can.

1. 外観検査装置、2. 筐体、3. 第一照明、4. 拡散板、5. 減光板、6. カメラ、
7. 反射板、8. 遮光部材、9. 第二照明、10. 被検査体、11. 検査面、12. 光の照射範囲、
13. ハレーション箇所、14. キャスタ、15. 開閉用扉、16. 回転支点、17. スイッチ、
18. 固定ねじ、19. ストッパ、20. 外観検査装置フレーム、21. PC、22. 表示部、
23. 電源バッテリ 1. Appearance inspection device, 2. Housing, 3. Primary illumination, 4. Diffuser, 5. Dimming plate, 6. Camera,
7. Reflector, 8. Light-shielding member, 9. Second illumination, 10. Inspected object, 11. Inspection surface, 12. Light irradiation range,
13. Halation point, 14. Casters, 15. Opening / closing door, 16. Rotating fulcrum, 17. Switch,
18. Fixing screw, 19. Stopper, 20. Visual inspection equipment frame, 21. PC, 22. Display section,
23. Power battery

Claims (8)

被検査体の検査面に光を照射する第一照明と、
前記第一照明による光が照射された前記被検査体の検査面を撮像する撮像装置と、を備え、
前記第一照明の前記検査面側の周囲に設けられた前記第一照明による光を拡散するための拡散部材と、前記拡散部材と前記検査面との間に設けられた前記第一照明による光を減光する減光部材と、
を備えることを特徴とする外観検査装置。 First illumination for irradiating light on the inspection surface of the object to be inspected;
An imaging device that images an inspection surface of the inspection object irradiated with light from the first illumination,
A diffusion member for diffusing light from the first illumination provided around the inspection surface side of the first illumination, and light from the first illumination provided between the diffusion member and the inspection surface A dimming member for dimming,
An appearance inspection apparatus comprising: 請求項１に記載の外観検査装置であって、
前記被検査体の検査面の側方に設けられ、前記検査面に対して光を照射する第二照明を備え、
前記第二照明は、当該第二照明による光が前記検査面と平行になる程度に光軸が前記検査面に対して傾斜して配置されている、
ことを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
Provided on the side of the inspection surface of the object to be inspected, and includes a second illumination for irradiating the inspection surface with light,
The second illumination is arranged such that the optical axis is inclined with respect to the inspection surface such that the light from the second illumination is parallel to the inspection surface.
An appearance inspection apparatus characterized by that. 請求項１に記載の外観検査装置であって、
前記外観検査装置の筐体には、前記外観検査装置が水平方向に回転可能な回転支点が設けられている、
ことを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
The housing of the appearance inspection apparatus is provided with a rotation fulcrum that allows the appearance inspection apparatus to rotate in the horizontal direction.
An appearance inspection apparatus characterized by that. 請求項１に記載の外観検査装置であって、
前記外観検査装置に前記被検査体の検査面を突き当てて検査位置を決めるための位置決め機構、
を備えることを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
A positioning mechanism for determining an inspection position by abutting an inspection surface of the object to be inspected on the appearance inspection device;
An appearance inspection apparatus comprising: 請求項４に記載の外観検査装置であって、
前記検査位置が決められた旨を作業者に知らせる出力部、
を備えることを特徴とする外観検査装置。 The visual inspection apparatus according to claim 4,
An output unit for notifying the operator that the inspection position has been determined;
An appearance inspection apparatus comprising: 請求項１に記載の外観検査装置であって、
前記被検査体の大きさに応じて、前記外観検査装置の幅方向または／および高さ方向に伸縮可能なフレーム、
を備えることを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
A frame that can be expanded and contracted in the width direction and / or the height direction of the appearance inspection apparatus according to the size of the object to be inspected,
An appearance inspection apparatus comprising: 請求項１に記載の外観検査装置において、
前記撮像装置は、前記検査面と平行に移動させるための可動機構を備え、前記移動の前後で前記検査面を複数の領域に分割した分割領域のそれぞれを撮像する、
ことを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
The imaging apparatus includes a movable mechanism for moving in parallel with the inspection surface, and images each of the divided regions obtained by dividing the inspection surface into a plurality of regions before and after the movement.
An appearance inspection apparatus characterized by that. 請求項１に記載の外観検査装置において、
前記撮像装置は、前記検査面に対して複数設けられ、それぞれの前記撮像装置が、前記検査面を複数の領域に分割した分割領域のそれぞれを撮像する、
ことを特徴とする外観検査装置。 The appearance inspection apparatus according to claim 1,
A plurality of the imaging devices are provided for the inspection surface, and each of the imaging devices images each of the divided regions obtained by dividing the inspection surface into a plurality of regions.
An appearance inspection apparatus characterized by that.
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