JP2018166091A - Discharge lamp, and ozone generating method - Google Patents

Discharge lamp, and ozone generating method Download PDF

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JP2018166091A
JP2018166091A JP2017063805A JP2017063805A JP2018166091A JP 2018166091 A JP2018166091 A JP 2018166091A JP 2017063805 A JP2017063805 A JP 2017063805A JP 2017063805 A JP2017063805 A JP 2017063805A JP 2018166091 A JP2018166091 A JP 2018166091A
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discharge
discharge vessel
electrodes
pair
vessel
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JP6885765B2 (en
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小林　剛
Takeshi Kobayashi
剛 小林
今井　正人
Masato Imai
正人 今井
芹澤　和泉
Izumi Serizawa
和泉 芹澤
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Orc Manufacturing Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To irradiate ultraviolet rays such that unnecessary ozone is not generated, in a discharge lamp such as an excimer lamp.SOLUTION: In a discharge lamp 10 including a cylindrical discharge vessel 20, a pair of electrodes 30, 40 having polarities different from each other is disposed at both ends 20T1, 20T2 of the discharge vessel 20, respectively. Accordingly, a local discharge occurs in the discharge vessel 20.SELECTED DRAWING: Figure 3

Description

本発明は、エキシマランプなどの放電ランプに関し、特に、人に対して安全に低濃度オゾンを生成可能なランプ構成に関する。   The present invention relates to a discharge lamp such as an excimer lamp, and more particularly to a lamp configuration capable of generating low-concentration ozone safely for humans.

エキシマランプでは、放電容器の外表面などに電極対を配置し、放電容器内に希ガスなどを封入する、電極間に電圧を印加させることで誘電体バリア放電が生じ、放電容器からランプ外に向けて紫外線を放射する。紫外線照射によって生じるオゾンは、殺菌能力（酸化力）があるため、脱臭装置、除菌／殺菌装置などの光源としてエキシマランプを使用することができる。   In an excimer lamp, an electrode pair is arranged on the outer surface of the discharge vessel, and a rare gas is sealed in the discharge vessel. A dielectric barrier discharge is generated by applying a voltage between the electrodes. It emits ultraviolet rays. Since ozone generated by ultraviolet irradiation has a sterilizing ability (oxidizing power), an excimer lamp can be used as a light source for a deodorizing device, a sterilizing / sterilizing device, or the like.

例えば、２つのエキシマランプを容器内に配置し、第１のエキシマランプから紫外線を照射してオゾンを生成させるとともに、第２のエキシマランプから異なる波長の紫外線を照射することで、活性酸素を生成する（特許文献１参照）。   For example, two excimer lamps are placed in a container, and ozone is generated by irradiating ultraviolet rays from the first excimer lamp, and active oxygen is generated by irradiating ultraviolet rays of different wavelengths from the second excimer lamp. (See Patent Document 1).

特開２００２−３１６０４１号公報JP 2002-316041 A

殺菌、脱臭などを行う場合、その対象物に対して効果のある範囲でオゾンを生成すればよい。したがって、対象物のサイズや構成によっては、エキシマランプを小型化するのが望ましい。しかしながら、従来のエキシマランプでは、必要以上に高濃度（多量）のオゾンが生成されるので、低濃度（少量）のオゾンを生成するためには複雑なランプ点滅制御回路を必要としている。そのため、装置故障により連続点灯状態や過電力点灯状態となったときには、高濃度のオゾンが流出するおそれがある。また、高濃度オゾンの流出を防ぐために、オゾンセンサを用いる等の安全対策が必要となり、装置が大型化して大きな消費電力を伴う。   When performing sterilization, deodorization, etc., ozone may be generated within a range that is effective for the object. Therefore, it is desirable to reduce the excimer lamp depending on the size and configuration of the object. However, since the conventional excimer lamp generates ozone with a higher concentration (large amount) than necessary, a complicated lamp blinking control circuit is required to generate ozone with a low concentration (small amount). Therefore, when a continuous lighting state or an overpower lighting state occurs due to a device failure, high-concentration ozone may flow out. Moreover, in order to prevent the outflow of high-concentration ozone, safety measures such as the use of an ozone sensor are required, and the apparatus becomes large and involves a large amount of power consumption.

したがって、余剰なオゾンを生成させないように紫外線を照射することが可能なエキシマランプなどの放電ランプが求められる。   Accordingly, there is a demand for a discharge lamp such as an excimer lamp that can be irradiated with ultraviolet rays so as not to generate excessive ozone.

本発明の放電ランプは、放電ガスが封入された筒状の放電容器と、放電容器の外周面に沿って、それぞれ軸方向に延びる一対の電極とを備える。例えば、放電容器の外径は、３ｍｍ〜１０ｍｍの範囲であり、放電容器の軸方向長さが、１０ｍｍ〜３０ｍｍの範囲であり、放電ガスが、０．１ｋＰａ〜３０ｋＰａの範囲内に定められた希ガスで構成することが可能である。   The discharge lamp of the present invention includes a cylindrical discharge vessel filled with a discharge gas, and a pair of electrodes extending in the axial direction along the outer peripheral surface of the discharge vessel. For example, the outer diameter of the discharge vessel is in the range of 3 mm to 10 mm, the axial length of the discharge vessel is in the range of 10 mm to 30 mm, and the discharge gas is set in the range of 0.1 kPa to 30 kPa. It can be composed of a noble gas.

本発明の放電ランプでは、放電容器内において局所的に生じた放電から放射された紫外線が、少なくとも一方の電極により遮られる。ここで、「局所的に生じた放電」とは、電極軸に関して、両端部側などに偏った放電を示す。   In the discharge lamp of the present invention, ultraviolet rays radiated from the discharge generated locally in the discharge vessel are blocked by at least one of the electrodes. Here, “locally generated discharge” refers to a discharge that is biased toward both ends with respect to the electrode axis.

本発明では、偏った放電による紫外線が電極によって遮光されるため、余剰のオゾン生成を抑えることができる。例えば、少なくとも一方の電極が、放電容器の軸方向もしくは径方向に関して偏って強い放電が生じる空間領域に対向する位置に配置されている。   In the present invention, since the ultraviolet rays due to the biased discharge are shielded by the electrodes, excessive ozone generation can be suppressed. For example, at least one of the electrodes is disposed at a position facing a spatial region in which strong discharge is generated with a bias with respect to the axial direction or radial direction of the discharge vessel.

例えば一対の電極が、放電容器の軸方向に沿って対向配置され、それぞれ、放電容器と面接触する筒状電極で構成され、筒状電極の電極軸方向長さが２ｍｍ〜１５ｍｍの範囲に定めることが可能である。   For example, a pair of electrodes are arranged to be opposed to each other along the axial direction of the discharge vessel, and each is configured by a cylindrical electrode that is in surface contact with the discharge vessel, and the length of the cylindrical electrode in the axial direction is set in a range of 2 mm to 15 mm. It is possible.

本発明の他の態様のおける放電ランプは、放電ガスが封入された放電容器内で放電容器の軸方向もしくは径方向に関して偏って生じた強い放電から放電容器の外部に向けて放射された紫外線の少なくとも一部を遮ることによって局所的にオゾンを生成する。   A discharge lamp according to another aspect of the present invention is a discharge lamp in which ultraviolet rays emitted toward the outside of a discharge vessel from a strong discharge that is generated in a discharge vessel in which discharge gas is sealed and are biased with respect to the axial direction or radial direction of the discharge vessel. Ozone is generated locally by blocking at least part of it.

本発明の他の態様におけるオゾン生成方法は、放電ガスが封入された筒状の放電容器の外周面に沿ってそれぞれ軸方向に延びる一対の電極を配置し、局所的にオゾンが生成されるように、一対の電極の間に高周波電圧を印加することによって放電容器内において生じた放電から放射された紫外線を少なくとも一方の電極により遮る。   According to another aspect of the present invention, there is provided an ozone generation method in which a pair of electrodes extending in the axial direction are arranged along the outer peripheral surface of a cylindrical discharge vessel filled with a discharge gas so that ozone is locally generated. In addition, by applying a high-frequency voltage between the pair of electrodes, ultraviolet rays radiated from the discharge generated in the discharge vessel are blocked by at least one of the electrodes.

本発明によれば、不要なオゾンを生成させないように、局所的に紫外線を照射して、局所的にオゾンを生成することで、高濃度のオゾンが生成されて流出することを防ぐことができる。   According to the present invention, it is possible to prevent generation and outflow of high-concentration ozone by locally irradiating ultraviolet rays and generating ozone locally so as not to generate unnecessary ozone. .

本発明の実施形態である放電ランプの概略的側面図である。It is a schematic side view of the discharge lamp which is embodiment of this invention. 放電ランプを端部側から見た概略的正面図である。It is the schematic front view which looked at the discharge lamp from the edge part side. 図２のラインＡ−Ａ’に沿った放電ランプの概略的断面図である。FIG. 3 is a schematic cross-sectional view of the discharge lamp along line A-A ′ of FIG. 2.

以下では、図面を参照して本発明の実施形態について説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の実施形態である放電ランプの概略的側面図である。図２は、放電ランプを端部側から見た概略的正面図である。   FIG. 1 is a schematic side view of a discharge lamp according to an embodiment of the present invention. FIG. 2 is a schematic front view of the discharge lamp as viewed from the end side.

放電ランプ１０は、内部に放電空間Ｓを形成し、石英ガラスなどで成形される筒状の放電容器２０を備える。放電容器２０の両端部２０Ｔ１、２０Ｔ２側には、互いに極性の異なる一対の電極３０、４０が配置されている。放電ランプ１０は、ここでは小型エキシマランプとして構成されており、放電容器の軸方向長さＷは、１０ｍｍ〜３０ｍｍの範囲、放電容器２０の外径Ｄは、３ｍｍ〜１０ｍｍの範囲であり、一対の電極３０、４０の間の軸方向距離（電極間距離Ｌ）は、２ｍｍ〜１５ｍｍの範囲にそれぞれ設定することが可能である。   The discharge lamp 10 includes a cylindrical discharge vessel 20 that forms a discharge space S therein and is formed of quartz glass or the like. A pair of electrodes 30 and 40 having different polarities are arranged on both ends 20T1 and 20T2 side of the discharge vessel 20. Here, the discharge lamp 10 is configured as a small excimer lamp, the axial length W of the discharge vessel is in the range of 10 mm to 30 mm, and the outer diameter D of the discharge vessel 20 is in the range of 3 mm to 10 mm. The axial distance between the electrodes 30 and 40 (interelectrode distance L) can be set in the range of 2 mm to 15 mm.

例えば、放電容器の軸方向長さＷを２０ｍｍ、放電容器２０の外径Ｄを５．２ｍｍ、電極間距離Ｌを１０ｍｍに定めることができる。ただし、放電容器２０の軸方向長さＷは、一対の電極３０、４０の外側両端間の距離を表す。また、一対の電極３０、４０は同じ形状であり、例えば各電極の軸方向長さＭを３ｍｍ〜１０ｍｍ未満の範囲（例えば５ｍｍ）に定めることができる。   For example, the axial length W of the discharge vessel can be set to 20 mm, the outer diameter D of the discharge vessel 20 can be set to 5.2 mm, and the distance L between the electrodes can be set to 10 mm. However, the axial length W of the discharge vessel 20 represents the distance between the outer ends of the pair of electrodes 30 and 40. Moreover, a pair of electrodes 30 and 40 are the same shape, For example, the axial direction length M of each electrode can be defined in the range (for example, 5 mm) below 3 mm-10 mm.

放電容器２０の放電空間Ｓには、キセノンガス１Ｔｏｒｒ〜２２５Ｔｏｒｒ（０．１ｋＰａ〜３０ｋＰａ、更に好ましくは７ｋＰａ〜２０ｋＰａ）が封入されている。一対の電極３０、４０には、直流電源部（図示せず）と接続される一対の導線（図示せず）が接続されており、一対の電極３０、４０間には高周波（１ｋＨｚ〜５００ｋＨｚ、更に好ましくは１ｋＨｚ〜１００ｋＨｚの範囲であり、例えば６０ｋＨｚ）の高電圧（５ｋＶ〜１０ｋＶ）が印加される。放電容器２０と電極３０、４０は、図示しない保持部材によってそれぞれ保持されている。   The discharge space S of the discharge vessel 20 is filled with xenon gas 1 Torr to 225 Torr (0.1 kPa to 30 kPa, more preferably 7 kPa to 20 kPa). A pair of conductive wires (not shown) connected to a direct current power source (not shown) is connected to the pair of electrodes 30 and 40, and a high frequency (1 kHz to 500 kHz, between the pair of electrodes 30 and 40, More preferably, a high voltage (5 kV to 10 kV) of 1 kHz to 100 kHz, for example, 60 kHz, is applied. The discharge vessel 20 and the electrodes 30 and 40 are held by holding members (not shown).

図２に示すように、一対の電極３０、４０は、放電容器２０の外周面２０Ｓに沿って周方向全体に渡り密接する筒状電極として構成されており、光を透過するような隙間が設けられていない曲面状の電極部材によって構成されている。一対の電極３０、４０は、放電容器の軸方向Ｘに沿って対向配置されており、軸方向Ｘに対して互いに異なる極性をもつ電極配置となっている。なお、図２では、放電容器２０の肉厚部分を省略しているが、肉厚については、０．２ｍｍ〜４ｍｍの範囲（例えば１．５ｍｍ）に定めることができる。   As shown in FIG. 2, the pair of electrodes 30 and 40 is configured as a cylindrical electrode that is in close contact with the entire circumferential direction along the outer peripheral surface 20 </ b> S of the discharge vessel 20, and has a gap that allows light to pass therethrough. It is constituted by a curved electrode member which is not formed. The pair of electrodes 30, 40 are arranged to face each other along the axial direction X of the discharge vessel, and have an electrode arrangement having mutually different polarities with respect to the axial direction X. In FIG. 2, the thickness portion of the discharge vessel 20 is omitted, but the thickness can be set in a range of 0.2 mm to 4 mm (for example, 1.5 mm).

一対の電極３０、４０に対して高周波電圧を印加すると、放電容器２０内において誘電体バリア放電が生じ、紫外線が放電容器２０の外部へ向けて放射される。本実施形態では、一対の電極３０、４０が放電容器２０の中央部を間に挟んで軸方向Ｘに沿って対向配置されていることによって、放電容器２０内において局所的な放電が生じる。以下、これについて説明する。   When a high frequency voltage is applied to the pair of electrodes 30, 40, dielectric barrier discharge occurs in the discharge vessel 20, and ultraviolet rays are radiated toward the outside of the discharge vessel 20. In the present embodiment, the pair of electrodes 30 and 40 are disposed to face each other along the axial direction X with the central portion of the discharge vessel 20 interposed therebetween, whereby local discharge occurs in the discharge vessel 20. This will be described below.

図３は、図２のラインＡ−Ａ’に沿った放電ランプの概略的断面図である。   FIG. 3 is a schematic cross-sectional view of the discharge lamp taken along line A-A ′ of FIG.

図３に示すように、放電容器２０の中央部付近においては、細い領域（放電容器の中心軸付近のみ）で微弱な放電ＣＣが生じる。一方、一対の電極３０、４０で覆われている空間領域では、太い領域（放電容器の径方向全体）で強い放電ＣＣが生じる。放電容器２０内において、放電状態が電極３０、４０付近の空間領域と中央部付近の空間領域との間で相違して、放電が放電容器２０の両端部側に偏っていることにより、局所的な放電が放電容器２０内において生じる。   As shown in FIG. 3, in the vicinity of the central portion of the discharge vessel 20, a weak discharge CC is generated in a narrow region (only in the vicinity of the central axis of the discharge vessel). On the other hand, in the space region covered with the pair of electrodes 30 and 40, a strong discharge CC is generated in a thick region (the entire radial direction of the discharge vessel). In the discharge vessel 20, the discharge state is different between the space region near the electrodes 30 and 40 and the space region near the center, and the discharge is biased toward the both ends of the discharge vessel 20, thereby causing local discharge. Discharge occurs in the discharge vessel 20.

一対の電極３０、４０に覆われていない放電容器２０の中央部付近では、細い領域で微弱な放電が生じて、放射される紫外線の照度が低い。一方、放電容器２０の両端部側では、太い領域で強い放電ＣＣが生じて、放射される紫外線の照度は高いが、一対の電極３０、４０が放電容器の外周面２０Ｓを覆う位置に対向配置されて、放電から放射される紫外線を遮る遮光部となるため、強い放電ＣＣから放射された紫外線の一部が一対の電極３０、４０によって遮光される。電極以外の非導電性部材により紫外線を遮る遮光部として、放電容器の外周面を覆っても良い。   In the vicinity of the central portion of the discharge vessel 20 that is not covered by the pair of electrodes 30 and 40, a weak discharge is generated in a narrow region, and the illuminance of the emitted ultraviolet light is low. On the other hand, at both end portions of the discharge vessel 20, a strong discharge CC is generated in a thick region, and the illuminance of the emitted ultraviolet rays is high, but the pair of electrodes 30 and 40 are opposed to each other so as to cover the outer peripheral surface 20S of the discharge vessel. As a result, a part of the ultraviolet rays radiated from the strong discharge CC is shielded by the pair of electrodes 30 and 40. You may cover the outer peripheral surface of a discharge vessel as a light-shielding part which shields an ultraviolet-ray with nonelectroconductive members other than an electrode.

その結果、放電容器２０の中央部付近から、局所的に紫外線が放電容器２０外へ放射される。これにより、中央部付近においてのみオゾンが生成し、不要なオゾンが生成されず、局所的にオゾンが生成される。   As a result, ultraviolet rays are locally radiated outside the discharge vessel 20 from near the center of the discharge vessel 20. Thereby, ozone is generated only in the vicinity of the central portion, unnecessary ozone is not generated, and ozone is generated locally.

このように本実施形態によれば、筒状の放電容器２０を備えた放電ランプ１０に対して、互いに極性の異なる一対の電極３０、４０が放電容器２０の両端部２０Ｔ１、２０Ｔ２の外周面に沿って配置され、電圧を印加することにより、放電容器２０内において局所的な放電が生じ、局所的にオゾンが生成される。その結果、放電ランプを最大電力で点灯させ続けたとしても、生成できるオゾンの最大濃度は制限されているので、高濃度のオゾンが生成されて流出することを防ぐことができる。よって、安全で信頼性の高い放電ランプを提供することができる。   As described above, according to the present embodiment, with respect to the discharge lamp 10 including the cylindrical discharge vessel 20, the pair of electrodes 30 and 40 having different polarities are arranged on the outer peripheral surfaces of both end portions 20T1 and 20T2 of the discharge vessel 20. By being arranged along and applying a voltage, a local discharge is generated in the discharge vessel 20, and ozone is locally generated. As a result, even if the discharge lamp continues to be lit at the maximum power, the maximum concentration of ozone that can be generated is limited, so that high concentration ozone can be prevented from being generated and discharged. Therefore, a safe and reliable discharge lamp can be provided.

１０ 放電ランプ
２０ 放電容器
３０ 電極
４０ 電極 10 Discharge lamp 20 Discharge vessel 30 Electrode 40 Electrode

Claims (6)

放電ガスが封入された筒状の放電容器の外周面に沿って、それぞれ軸方向に延びる一対の電極が配置されることで、
前記放電容器内において局所的に生じた放電から放射された紫外線が、少なくとも一方の電極により遮られることを特徴とする放電ランプ。 By arranging a pair of electrodes extending in the axial direction along the outer peripheral surface of the cylindrical discharge vessel filled with the discharge gas,
A discharge lamp characterized in that ultraviolet rays radiated from a locally generated discharge in the discharge vessel are blocked by at least one electrode. 前記少なくとも一方の電極が、前記放電容器の軸方向もしくは径方向に関して偏って強い放電が生じる空間領域に対向する位置に配置されていることを特徴とする請求項１に記載の放電ランプ。   2. The discharge lamp according to claim 1, wherein the at least one electrode is disposed at a position facing a space region in which strong discharge is generated with a bias in the axial direction or radial direction of the discharge vessel. 前記一対の電極が、前記放電容器の軸方向に沿って対向配置され、それぞれ、前記放電容器と面接触する筒状電極で構成され、
前記筒状電極の電極軸方向長さが２ｍｍ〜１５ｍｍの範囲であることを特徴とする請求項１または２に記載の放電ランプ。 The pair of electrodes are arranged to face each other along the axial direction of the discharge vessel, and each is constituted by a cylindrical electrode in surface contact with the discharge vessel,
The discharge lamp according to claim 1 or 2, wherein a length of the cylindrical electrode in the electrode axial direction is in a range of 2 mm to 15 mm. 前記放電容器の外径が、３ｍｍ〜１０ｍｍの範囲であり、
前記放電容器の軸方向長さが、１０ｍｍ〜３０ｍｍの範囲であり、
前記放電ガスが、０．１ｋＰａ〜３０ｋＰａの範囲内に定められた希ガスであることを特徴とする請求項１乃至３のいずれかに記載の放電ランプ。 The outer diameter of the discharge vessel is in the range of 3 mm to 10 mm;
The axial length of the discharge vessel is in the range of 10 mm to 30 mm,
The discharge lamp according to any one of claims 1 to 3, wherein the discharge gas is a rare gas set within a range of 0.1 kPa to 30 kPa. 放電ガスが封入された放電容器内で前記放電容器の軸方向もしくは径方向に関して偏って生じた強い放電から前記放電容器の外部に向けて放射された紫外線の少なくとも一部を遮ることによって局所的にオゾンを生成することを特徴とする放電ランプ。   By locally blocking at least a part of the ultraviolet rays radiated to the outside of the discharge vessel from strong discharges that are biased with respect to the axial direction or radial direction of the discharge vessel in the discharge vessel filled with the discharge gas. A discharge lamp characterized by producing ozone. 放電ガスが封入された筒状の放電容器の外周面に沿ってそれぞれ軸方向に延びる一対の電極を配置し、
局所的にオゾンが生成されるように、前記一対の電極の間に高周波電圧を印加することによって前記放電容器内において生じた放電から放射された紫外線を少なくとも一方の電極により遮ることを特徴とするオゾン生成方法。 A pair of electrodes extending in the axial direction along the outer peripheral surface of the cylindrical discharge vessel filled with the discharge gas are arranged,
The ultraviolet rays emitted from the discharge generated in the discharge vessel are shielded by at least one electrode by applying a high frequency voltage between the pair of electrodes so that ozone is locally generated. Ozone generation method.
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