JP2018082120A - マルチ荷電粒子ビーム描画装置 - Google Patents
マルチ荷電粒子ビーム描画装置 Download PDFInfo
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- 238000002039 particle-beam lithography Methods 0.000 title abstract 2
- 238000007689 inspection Methods 0.000 claims abstract description 51
- 201000009310 astigmatism Diseases 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 230000005284 excitation Effects 0.000 claims description 20
- 239000002245 particle Substances 0.000 claims description 19
- 239000006185 dispersion Substances 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 abstract description 7
- 238000010894 electron beam technology Methods 0.000 description 40
- 238000012937 correction Methods 0.000 description 28
- 238000005259 measurement Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 230000009467 reduction Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 4
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- 238000010586 diagram Methods 0.000 description 3
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- 238000005286 illumination Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
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- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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Abstract
【解決手段】本実施形態によるマルチ荷電粒子ビーム描画装置は、描画対象の基板が載置され、XY方向に移動可能なステージと、マルチビームの焦点位置を調整する対物レンズと、前記マルチビームの非点収差を補正するコイルと、前記ステージに設けられ、前記マルチビームのうち1本のビームを通過させる検査アパーチャと、前記マルチビームを偏向する偏向器と、前記マルチビームを前記検査アパーチャ上でXY方向にスキャンして前記検査アパーチャを通過した前記マルチビームの各ビームのビーム電流を検出する電流検出器と、検出されたビーム電流に基づいてビーム画像を作成し、前記ビーム画像の特徴量を算出し、前記特徴量に基づいて前記対物レンズ又は前記コイルを制御する制御部と、を備える。
【選択図】図1
Description
4 電子銃
6 照明レンズ
8 アパーチャ部材
10 ブランキングアパーチャアレイ
12 縮小レンズ
14 制限アパーチャ部材
16 対物レンズ
17 偏向器
18 非点補正コイル
20 描画室
22 XYステージ
32 制御計算機
34 偏向制御回路
36 レンズ制御回路
38 コイル制御回路
40 マルチビーム検査用アパーチャ(検査アパーチャ)
41 散乱層
43 吸収層
50 電流検出器
60 描画データ処理部
61 描画制御部
62 ビームアレイ認識部
63 特徴量算出部
66 最適レンズ値検出部
67 最適コイル値検出部
Claims (5)
- 複数の穴が形成され、前記複数の穴を荷電粒子ビームが通過することによりマルチビームを形成するアパーチャ部材と、
前記マルチビームのうち、それぞれ対応するビームのオンオフを切り替える複数のブランカが配置されたブランキングアパーチャアレイと、
描画対象の基板が載置され、XY方向に移動可能なステージと、
前記マルチビームの焦点位置を調整する対物レンズと、
前記マルチビームの非点収差を補正するコイルと、
前記ステージに設けられ、前記マルチビームのうち1本のビームを通過させる検査アパーチャと、
前記マルチビームを偏向する偏向器と、
前記マルチビームを前記検査アパーチャ上でXY方向にスキャンして前記検査アパーチャを通過した前記マルチビームの各ビームのビーム電流を検出する電流検出器と、
検出されたビーム電流に基づいてビーム画像を作成し、前記ビーム画像の特徴量を算出し、前記特徴量に基づいて前記対物レンズ又は前記コイルを制御する制御部と、
を備えるマルチ荷電粒子ビーム描画装置。 - 複数の焦点位置で前記検査アパーチャをスキャンし、
前記制御部は、前記複数の焦点位置に対応する複数のビーム画像を作成し、前記特徴量として各ビーム画像の輝度分散を算出し、算出した輝度分散から第1最適焦点位置を求めて、前記対物レンズを制御することを特徴とする請求項1に記載のマルチ荷電粒子ビーム描画装置。 - 前記マルチビームの複数の領域のビームで前記検査アパーチャをスキャンし、
前記制御部は、前記複数の領域に対応する複数の第1最適焦点位置を求め、前記複数の第1最適焦点位置から第2最適焦点位置を求め、前記第2最適焦点位置に基づいて前記対物レンズを制御することを特徴とする請求項2に記載のマルチ荷電粒子ビーム描画装置。 - 複数の焦点位置及び前記コイルの複数の励磁電流値で前記検査アパーチャをスキャンし、
前記制御部は、前記複数の焦点位置及び前記複数の励磁電流値に対応する複数のビーム画像を作成し、前記ビーム画像内のビーム形状を楕円にフィッティングし、前記特徴量として楕円の長径と短径との比率を算出し、励磁電流値毎の前記比率の分散から、最適励磁電流値を求めて、前記コイルを制御することを特徴とする請求項1乃至3のいずれかに記載のマルチ荷電粒子ビーム描画装置。 - 複数の焦点位置及び前記コイルの複数の励磁電流値で前記検査アパーチャをスキャンし、
前記制御部は、前記複数の焦点位置及び前記複数の励磁電流値に対応する複数のビーム画像を作成し、前記ビーム画像内の複数のビーム形状を楕円にフィッティングし、前記特徴量として、直交する二軸上での複数の楕円の配列ピッチを算出し、励磁電流値毎の前記配列ピッチから、最適励磁電流値を求めて、前記コイルを制御することを特徴とする請求項1乃至3のいずれかに記載のマルチ荷電粒子ビーム描画装置。
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JP2016225166A JP2018082120A (ja) | 2016-11-18 | 2016-11-18 | マルチ荷電粒子ビーム描画装置 |
TW106134336A TWI675262B (zh) | 2016-11-18 | 2017-10-05 | 多帶電粒子束描繪裝置及多帶電粒子束描繪方法 |
US15/806,872 US10497539B2 (en) | 2016-11-18 | 2017-11-08 | Multi charged particle beam writing apparatus and multi charged particle beam writing method |
KR1020170154677A KR102026648B1 (ko) | 2016-11-18 | 2017-11-20 | 멀티 하전 입자빔 묘화 장치 및 멀티 하전 입자빔 묘화 방법 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2022209517A1 (ja) * | 2021-03-31 | 2022-10-06 | 株式会社ニューフレアテクノロジー | マルチ荷電粒子ビーム描画装置およびマルチ荷電粒子ビームの測定方法 |
US11740546B2 (en) | 2021-03-22 | 2023-08-29 | Nuflare Technology, Inc. | Multi charged particle beam writing apparatus and method of adjusting same |
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Publication number | Priority date | Publication date | Assignee | Title |
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US10157723B2 (en) * | 2016-08-03 | 2018-12-18 | Nuflare Technology, Inc. | Multi charged particle beam writing apparatus and method of adjusting the same |
TWI786705B (zh) * | 2019-03-05 | 2022-12-11 | 日商紐富來科技股份有限公司 | 多電子束照射裝置 |
JP2020187876A (ja) * | 2019-05-13 | 2020-11-19 | 株式会社日立ハイテク | 荷電粒子線装置 |
JP7316106B2 (ja) * | 2019-06-14 | 2023-07-27 | 株式会社ニューフレアテクノロジー | 収差補正器及びマルチ電子ビーム照射装置 |
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US10497539B2 (en) | 2019-12-03 |
US20180144905A1 (en) | 2018-05-24 |
KR20180056409A (ko) | 2018-05-28 |
KR102026648B1 (ko) | 2019-10-04 |
TWI675262B (zh) | 2019-10-21 |
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