JP2017216705A - 分波器及びモジュール - Google Patents
分波器及びモジュール Download PDFInfo
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- JP2017216705A JP2017216705A JP2017135786A JP2017135786A JP2017216705A JP 2017216705 A JP2017216705 A JP 2017216705A JP 2017135786 A JP2017135786 A JP 2017135786A JP 2017135786 A JP2017135786 A JP 2017135786A JP 2017216705 A JP2017216705 A JP 2017216705A
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- 230000005540 biological transmission Effects 0.000 claims abstract description 106
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 239000000203 mixture Substances 0.000 claims abstract description 45
- 238000007789 sealing Methods 0.000 claims abstract description 13
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims abstract description 6
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000002356 single layer Substances 0.000 claims description 3
- 238000010897 surface acoustic wave method Methods 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 19
- 239000010410 layer Substances 0.000 description 10
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 9
- 229910018182 Al—Cu Inorganic materials 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 7
- 229910052594 sapphire Inorganic materials 0.000 description 7
- 239000010980 sapphire Substances 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 102000006463 Talin Human genes 0.000 description 4
- 108010083809 Talin Proteins 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000113 differential scanning calorimetry Methods 0.000 description 1
- 238000004455 differential thermal analysis Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011067 equilibration Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
26 分波器
26a 受信フィルタ
26b 送信フィルタ
28b 送信端子
40 基板
50 封止部
52 リッド
54 空隙
60、62 圧電基板
61a、63a IDT
61b、63b 反射器
70、71 FBAR
S1〜S6 直列共振器
P1〜P4 並列共振器
100 モジュール
Claims (11)
- 基板と、
ストイキオメトリ組成のタンタル酸リチウムまたはニオブ酸リチウムにより形成された圧電基板、及び前記圧電基板の表面に設けられたIDTを有し、前記基板にフリップチップ実装された送信フィルタと、
コングルエント組成のタンタル酸リチウムまたはニオブ酸リチウムにより形成された圧電基板、及び前記圧電基板の表面に設けられたIDTを有し、前記基板にフリップチップ実装された受信フィルタと、
前記送信フィルタの圧電基板及び前記受信フィルタの圧電基板と接触して設けられ、前記送信フィルタの圧電基板および前記受信フィルタの圧電基板を覆う封止構造と、
を具備することを特徴とする分波器。 - 前記封止構造は、前記送信フィルタの圧電基板および前記受信フィルタの圧電基板を囲む封止部を有することを特徴とする請求項1記載の分波器。
- 前記封止部は、樹脂または金属であることを特徴とする請求項2記載の分波器。
- 前記封止構造は、前記封止部と、前記送信フィルタ及び前記受信フィルタの前記基板と対向する面とは反対側の面に接触して設けられた金属リッドと、を有する請求項2または3記載の分波器。
- 前記送信フィルタのIDT及び前記受信フィルタのIDTは弾性表面波共振器であることを特徴とする請求項1から4のいずれか一項記載の分波器。
- 前記受信フィルタと前記送信フィルタとは互いに離間して、前記基板に実装されていることを特徴とする請求項1から5のいずれか一項記載の分波器。
- 前記送信フィルタのIDTの材料は、前記受信フィルタのIDTの材料と異なることを特徴とする請求項1から6のいずれか一項記載の分波器。
- 前記送信フィルタのIDTは多層膜により形成され、
前記受信フィルタのIDTは単層膜により形成されていることを特徴とする請求項7記載の分波器。 - 前記送信フィルタは、複数の共振器を含み送信端子とアンテナ端子との間に接続されたラダー型フィルタであり、
前記複数の共振器のうち、前記送信端子に最も近い直列共振器及び並列共振器の少なくとも一方は2つに分割されていることを特徴とする請求項1から8のいずれか一項記載の分波器。 - 前記送信フィルタは、複数の共振器を含み送信端子とアンテナ端子との間に接続されたラダー型フィルタであり、
前記複数の共振器のうち、前記アンテナ端子に最も近い直列共振器及び並列共振器の少なくとも一方は2つに分割されていることを特徴とする請求項1から8のいずれか一項記載の分波器。 - 請求項1から10のいずれか一項記載の分波器を含むモジュール。
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JP2013151111A Division JP6193035B2 (ja) | 2013-07-19 | 2013-07-19 | 分波器 |
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JP6626862B2 JP6626862B2 (ja) | 2019-12-25 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11621689B2 (en) | 2019-10-18 | 2023-04-04 | The Board of Trustees of the University of llllinois | Low-loss and wide-band acoustic delay lines using Z-cut lithium niobate piezoelectric thin films |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1126623A (ja) * | 1997-06-30 | 1999-01-29 | Oki Electric Ind Co Ltd | 電子装置、電子装置の製造方法 |
JP2006074749A (ja) * | 2004-08-04 | 2006-03-16 | Matsushita Electric Ind Co Ltd | アンテナ共用器、ならびに、それを用いた高周波モジュールおよび通信機器 |
JP2010109694A (ja) * | 2008-10-30 | 2010-05-13 | Murata Mfg Co Ltd | 分波器 |
JP2011135245A (ja) * | 2009-12-24 | 2011-07-07 | Panasonic Corp | 弾性波デバイスとこれを用いた電子機器、及び弾性波デバイスの製造方法 |
JP2012160847A (ja) * | 2011-01-31 | 2012-08-23 | Taiyo Yuden Co Ltd | 分波器 |
JP2013046106A (ja) * | 2011-08-22 | 2013-03-04 | Taiyo Yuden Co Ltd | 通信モジュール |
JP2013131711A (ja) * | 2011-12-22 | 2013-07-04 | Taiyo Yuden Co Ltd | 電子部品 |
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2017
- 2017-07-11 JP JP2017135786A patent/JP6626862B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1126623A (ja) * | 1997-06-30 | 1999-01-29 | Oki Electric Ind Co Ltd | 電子装置、電子装置の製造方法 |
JP2006074749A (ja) * | 2004-08-04 | 2006-03-16 | Matsushita Electric Ind Co Ltd | アンテナ共用器、ならびに、それを用いた高周波モジュールおよび通信機器 |
JP2010109694A (ja) * | 2008-10-30 | 2010-05-13 | Murata Mfg Co Ltd | 分波器 |
JP2011135245A (ja) * | 2009-12-24 | 2011-07-07 | Panasonic Corp | 弾性波デバイスとこれを用いた電子機器、及び弾性波デバイスの製造方法 |
JP2012160847A (ja) * | 2011-01-31 | 2012-08-23 | Taiyo Yuden Co Ltd | 分波器 |
JP2013046106A (ja) * | 2011-08-22 | 2013-03-04 | Taiyo Yuden Co Ltd | 通信モジュール |
JP2013131711A (ja) * | 2011-12-22 | 2013-07-04 | Taiyo Yuden Co Ltd | 電子部品 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11621689B2 (en) | 2019-10-18 | 2023-04-04 | The Board of Trustees of the University of llllinois | Low-loss and wide-band acoustic delay lines using Z-cut lithium niobate piezoelectric thin films |
US11942920B2 (en) | 2019-10-18 | 2024-03-26 | The Board Of Trustees Of The University Of Illinois | Low-loss and wide-band acoustic delay lines using x-cut and y-cut lithium niobate piezoelectric thin films |
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