JP2017193409A - Container support shelf - Google Patents

Container support shelf Download PDF

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JP2017193409A
JP2017193409A JP2016084655A JP2016084655A JP2017193409A JP 2017193409 A JP2017193409 A JP 2017193409A JP 2016084655 A JP2016084655 A JP 2016084655A JP 2016084655 A JP2016084655 A JP 2016084655A JP 2017193409 A JP2017193409 A JP 2017193409A
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container
support
supported
shelf
portions
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JP6504105B2 (en
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健輔 池永
Kensuke Ikenaga
健輔 池永
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Daifuku Co Ltd
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Daifuku Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a container support shelf on which a container supported by a support medium hardly falls forward.SOLUTION: A bottom part 16 of a container W has three supported parts 17 recessed upward, in which two supported parts of the three supported parts 17 are front supported parts 17A positioned on a front side X1 of a centroid of the container W, and residual one of the three supported parts 17 is a rear supported part 17B positioned on a rear side X2 of the centroid of the container W. A support medium 21 comprises: two front support parts 25 for supporting, from a lower side, the bottom part 16 of the container W in a state of engaging with the two front supported parts 17A from a lower side; and a rear support part 23 for supporting, from a lower side, a portion which is positioned on a rear side X2 of the centroid on the bottom part 16 of the container W. The container W is supported in a state in which the two front supported parts 17A are positioned above the rear supported part 17B by the two front support parts 25 and the rear support part 23.SELECTED DRAWING: Figure 2

Description

本発明は、半導体基板を収容する容器の底部を下方から支持する支持体を備えた容器支持棚に関する。   The present invention relates to a container support shelf including a support body that supports a bottom portion of a container that accommodates a semiconductor substrate from below.

かかる容器支持棚の従来例が、特開２０１５−０１２０４１号公報（特許文献１）に記載されている。特許文献１の容器支持棚には、半導体基板を収容する容器の底面を下方から支持する支持体（載置支持部１０ａ）を備えている。支持体は、底部の基準位置に対して放射状に配置された３つの支持部を備え、これら３つの支持部を容器の被支持部に下方から係合した状態で、３つの支持部により容器の底部を下方から支持するように構成されている。   A conventional example of such a container support shelf is described in Japanese Patent Application Laid-Open No. 2015-012041 (Patent Document 1). The container support shelf of Patent Document 1 includes a support body (mounting support portion 10a) that supports the bottom surface of a container that accommodates a semiconductor substrate from below. The support body includes three support portions arranged radially with respect to the reference position of the bottom portion, and the three support portions engage the supported portion of the container from below and the three support portions support the container. The bottom portion is configured to be supported from below.

特開２０１５−０１２０４１号公報JP2015-012041A

半導体基板を収容する容器は、収容物を収容する収容空間が前方寄りに形成されている等により、上下方向に見た場合の容器の重心が、底部における基準位置より前方に位置している場合がある。このように、容器の重心が３つの支持部の基準位置に対して前方に位置している場合は、地震により容器支持棚が揺れたときに支持体に支持されている容器が前方に転倒し易い。   When the container for housing the semiconductor substrate is positioned in front of the reference position at the bottom when the container is viewed in the vertical direction because the housing space for housing the object is formed closer to the front. There is. As described above, when the center of gravity of the container is positioned forward with respect to the reference position of the three support portions, the container supported by the support body falls forward when the container support shelf is shaken due to the earthquake. easy.

そこで、支持体に支持されている容器が前方に転倒し難い容器支持棚が求められる。   Therefore, there is a need for a container support shelf that makes it difficult for the container supported by the support body to fall forward.

本発明に係る容器支持棚の特徴構成は、半導体基板を収容する容器の底部を下方から支持する支持体を備えた容器支持棚において、
前記容器の前記底部は、上方に窪む３つの被支持部を備え、前記３つの被支持部は、前記底部の基準位置に対して放射状に配置され、上下方向に見て、前記容器の前記基準位置と前記容器の重心とが並ぶ方向を前後方向とし、前記前後方向における前記基準位置に対して前記容器の重心が存在する方向を前方とし、その反対方向を後方として、前記３つの被支持部のうちの２つが、前記容器の重心より前記前方に位置する前被支持部であり、前記３つの被支持部のうちの残り１つが、前記容器の重心より前記後方に位置する後被支持部であり、前記支持体は、前記２つの前被支持部に下方から係合した状態で前記容器の前記底部を下方から支持する２つの前支持部と、前記容器の前記底部における重心より前記後方に位置する部分を下方から支持する後支持部と、を備えて、前記２つの前支持部と前記後支持部とにより、前記２つの前被支持部が前記後被支持部より上方に位置する傾斜姿勢で、前記容器を支持する点にある。 The characteristic configuration of the container support shelf according to the present invention is a container support shelf including a support body that supports a bottom portion of a container containing a semiconductor substrate from below.
The bottom portion of the container includes three supported portions that are recessed upward, and the three supported portions are arranged radially with respect to a reference position of the bottom portion and viewed in the vertical direction, The direction in which the reference position and the center of gravity of the container are aligned is the front-rear direction, the direction in which the center of gravity of the container exists with respect to the reference position in the front-rear direction is the front, and the opposite direction is the rear. Two of the parts are front supported parts located in front of the center of gravity of the container, and the remaining one of the three supported parts is rear supported in rear of the center of gravity of the container And the support body includes two front support portions that support the bottom portion of the container from below while engaged with the two front support portions from below, and the center of gravity of the bottom portion of the container from the center of gravity of the bottom portion. The part located behind from below And holding the container in an inclined posture in which the two front supported portions are positioned above the rear supported portion by the two front support portions and the rear support portion. There is in point to support.

この特徴構成によれば、支持体は、容器における３つの被支持部のうちの少なくとも２つの前被支持部に２つの前支持部が下方から係合している状態で、容器を支持している。２つの前被支持部は、容器の底部における基準位置に対して放射状に形成されているため、少なくとも２つの前被支持部に２つの前支持部を下方から係合させることで、支持体により容器を規定位置に位置決めした状態で容器を支持できる。
また、支持体は、２つの前支持部と後支持部とにより、２つの前被支持部が後被支持部より上方に位置する傾斜姿勢で、容器を支持することで、２つの前被支持部と後被支持部とが同じ高さとなる姿勢に比べて、容器の重心が前方に位置する。そのため、支持体に支持されている容器が前方に転倒し難くなる。 According to this characteristic configuration, the support supports the container in a state where the two front support portions are engaged with at least two of the three supported portions of the container from below. Yes. Since the two front supported portions are formed radially with respect to the reference position at the bottom of the container, the two front supported portions are engaged with the two front supported portions from below by the support body. The container can be supported with the container positioned at the specified position.
In addition, the support body has two front supported parts by supporting the container in an inclined posture in which the two front supported parts are located above the rear supported part by the two front supported parts and the rear supported part. The center of gravity of the container is positioned in front of the posture in which the portion and the rear supported portion are at the same height. Therefore, it becomes difficult for the container supported by the support body to fall forward.

ここで、前記容器は、前記半導体基板を収容する収容空間と、前記収容空間に対して前記半導体基板を出し入れするための開口と、を備え、前記開口は、前記収容空間に対して前記前方に備えられ、前記後支持部は、前記底部の後端部を支持すると好適である。   Here, the container includes an accommodation space for accommodating the semiconductor substrate, and an opening for taking the semiconductor substrate into and out of the accommodation space, and the opening is located forward of the accommodation space. Preferably, the rear support portion supports the rear end portion of the bottom portion.

この構成によれば、容器に、開口を塞ぐ蓋体を備えた場合は、その蓋体の存在により容器の重心が前方に寄り易いが、このような容器を前方に転倒し難い状態で支持体により支持できる。また、後支持部は、底部の後端部を支持することで、この後支持部を容器の後被係合部に下方から係合する形状に形成する必要がないため、後支持部を形成し易くなる。   According to this configuration, when the container is provided with a lid that closes the opening, the center of gravity of the container tends to move forward due to the presence of the lid, but the support body is in a state in which such a container is difficult to tip forward. Can be supported. Further, the rear support portion supports the rear end portion of the bottom portion, so that it is not necessary to form the rear support portion into a shape to be engaged with the rear engagement portion of the container from below, so the rear support portion is formed. It becomes easy to do.

また、前記支持体は、前記支持体により支持している前記容器の前方が、前記支持体に前記容器を搬送する搬送装置の移動空間を向く姿勢で、前記容器を支持すると好適である。   In addition, it is preferable that the support body supports the container in a posture in which a front side of the container supported by the support body faces a moving space of a transport device that transports the container to the support body.

この構成によれば、支持体に支持されている容器が前方に転倒し難くすることで、容器が搬送装置の移動空間に落下することを抑制できる。そのため、例えば、地震等により容器収納棚が揺れた場合に、搬送装置の移動空間に落下する容器の数を抑えることができるため、地震後の復旧作業が行い易くなる。   According to this structure, it can suppress that a container falls to the movement space of a conveying apparatus by making it difficult for the container currently supported by the support body to fall ahead. For this reason, for example, when the container storage shelf is shaken due to an earthquake or the like, the number of containers falling into the moving space of the transfer device can be suppressed, so that recovery work after the earthquake can be easily performed.

また、前記支持体は、板状の板状部と、前記板状部の上面より上方に突出する前記２つの前支持部と、を備え、前記後支持部は、前記板状部により構成され、前記容器が前記支持体に支持されている状態において、前記容器における前記２つの前支持部と前記前後方向で同じ位置に位置し且つ最も下方に位置する前記容器の部分を第一対象部とすると共に、前記板状部の上面における前記第一対象部の直下に位置する部分を第二対象部とし、前記２つの前支持部は、前記第一対象部と前記第二対象部との上下方向の間隔が１ｍｍ以下となる高さに形成されていると好適である。   The support includes a plate-like plate-like portion and the two front support portions protruding upward from the upper surface of the plate-like portion, and the rear support portion is configured by the plate-like portion. In the state where the container is supported by the support, the first target portion is a portion of the container that is located at the same position in the front-rear direction and the lowermost portion of the container as the first front portion. In addition, a portion located immediately below the first target portion on the upper surface of the plate-like portion is used as a second target portion, and the two front support portions are arranged above and below the first target portion and the second target portion. It is preferable that the distance between the directions is 1 mm or less.

この構成によれば、支持体に支持されている容器は、２つの前支持部により２つの前被支持部が支持され、容器の後端部が板状部により支持されている。そして、第一対象部と第二対象部との上下方向の間隔が１ｍｍ以下であるため、前支持部における板状体の上面からの突出量を小さくして前支持部の高さを比較的低くできる。従って、当該前支持部により支持する容器を安定よく支持し易い。   According to this configuration, in the container supported by the support body, the two front supported portions are supported by the two front support portions, and the rear end portion of the container is supported by the plate-like portion. And since the space | interval of the up-down direction of a 1st object part and a 2nd object part is 1 mm or less, the protrusion amount from the upper surface of the plate-shaped body in a front support part is made small, and the height of a front support part is comparatively set. Can be lowered. Therefore, it is easy to stably support the container supported by the front support portion.

また、前記支持体は、前記支持体により支持している前記容器の前端よりも前記前方に延在する延在部を備え、前記延在部は、前記支持体により支持している前記容器と前記前後方向に見て重複する規制部を有していると好適である。   In addition, the support includes an extension portion extending forward from the front end of the container supported by the support, and the extension portion is supported by the container supported by the support. It is preferable to have a restricting portion that overlaps when viewed in the front-rear direction.

この構成によれば、支持体に対して容器が前方に移動したときに、その移動する容器に規制体が接触することで容器の前方への移動を規制できる。そのため、支持体に対して容器が前方に移動したときに容器が支持体から落下することや容器が前方に転倒することを規制できる。また、容器の前端の下方には、支持体の延在部が存在しているため、前方に転倒しようとする容器を延在部により下方から受け止めることで、容器が前方に転倒することを規制できる。   According to this configuration, when the container moves forward with respect to the support, the forward movement of the container can be restricted by contacting the restricting body with the moving container. Therefore, when the container moves forward with respect to the support body, the container can be prevented from dropping from the support body and the container from falling forward. In addition, since the extended part of the support exists below the front end of the container, the container is prevented from tipping forward by receiving the container about to fall forward from below by the extending part. it can.

容器収納設備の側面図Side view of container storage equipment 収納部の側面図Side view of storage 収納部の平面図Top view of storage 容器収納棚の平面図Top view of container storage shelf 第一支持体の斜視図Perspective view of first support 第一支持体の分解斜視図Exploded perspective view of first support

以下、本発明にかかる容器支持棚としての容器収納棚を容器収納設備に用いた実施形態を図面に基づいて説明する。
図１に示すように、容器収納設備は、容器Ｗを収納する収納部１Ａを複数備えた容器収納棚１と、容器収納棚１の棚前方向Ｘ１に形成された移動空間Ｓを走行して容器Ｗを搬送する搬送装置としてのスタッカークレーン２と、を備えている。また、容器収納設備は、容器収納棚１やスタッカークレーン２が設置される領域の側周囲を覆う壁体Ｋと、壁体Ｋを貫通する状態で設置されて容器Ｗを搬送する搬送コンベヤ４と、を備えている。尚、本実施形態では、ＦＯＵＰ（Front Opening Unified Pod）を容器Ｗとしており、容器Ｗは、収容物として半導体基板（ウェハ）を収容する。 Hereinafter, an embodiment in which a container storage shelf as a container support shelf according to the present invention is used in a container storage facility will be described with reference to the drawings.
As shown in FIG. 1, the container storage facility travels in a container storage shelf 1 having a plurality of storage units 1A for storing containers W and a moving space S formed in the shelf front direction X1 of the container storage shelf 1. And a stacker crane 2 as a transport device for transporting the container W. The container storage facility includes a wall body K that covers the periphery of the region where the container storage rack 1 and the stacker crane 2 are installed, and a transport conveyor 4 that is installed in a state of penetrating the wall body K and transports the containers W. It is equipped with. In this embodiment, a FOUP (Front Opening Unified Pod) is used as a container W, and the container W stores a semiconductor substrate (wafer) as a container.

図１に示すように、搬送コンベヤ４は、壁体Ｋの外側に位置する外側箇所４Ａと壁体Ｋの内側に位置する内側箇所４Ｂとの間で容器Ｗを搬送するように構成されている。高い位置に設置されている搬送コンベヤ４の外側箇所４Ａに対しては、天井搬送車６が容器Ｗの載せ降しを行い、低い位置に設置されている搬送コンベヤ４（図示せず）の外側箇所４Ａに対しては、作業者が容器Ｗの載せ降しを行う。   As shown in FIG. 1, the transport conveyor 4 is configured to transport the containers W between an outer portion 4 </ b> A located outside the wall body K and an inner portion 4 </ b> B located inside the wall body K. . For the outer portion 4A of the conveyor 4 installed at a high position, the overhead carriage 6 loads and unloads the container W, and the outside of the conveyor 4 (not shown) installed at a low position. An operator loads and unloads the container W on the location 4A.

容器収納設備では、搬送コンベヤ４の外側箇所４Ａに容器Ｗが載せられると、当該容器Ｗは、搬送コンベヤ４により外側箇所４Ａから内側箇所４Ｂに搬送された後、スタッカークレーン２により搬送コンベヤ４の内側箇所４Ｂから容器収納棚１の収納部１Ａに搬送される。また、容器収納設備では、スタッカークレーン２により容器Ｗが容器収納棚１の収納部１Ａから搬送コンベヤ４の内側箇所４Ｂに搬送されると、当該容器Ｗは、搬送コンベヤ４にて内側箇所４Ｂから外側箇所４Ａに搬送された後、天井搬送車６又は作業者により外側箇所４Ａから降ろされる。   In the container storage facility, when the container W is placed on the outer portion 4A of the transport conveyor 4, the container W is transported from the outer portion 4A to the inner portion 4B by the transport conveyor 4, and then the stacker crane 2 is used to It is conveyed from the inner portion 4B to the storage portion 1A of the container storage shelf 1. In the container storage facility, when the container W is transported from the storage portion 1A of the container storage shelf 1 to the inner portion 4B of the transport conveyor 4 by the stacker crane 2, the container W is transferred from the inner portion 4B by the transport conveyor 4. After being transported to the outer portion 4A, it is lowered from the outer portion 4A by the ceiling transport vehicle 6 or the operator.

以下、容器収納設備の各構成について説明するが、容器収納棚１と移動空間Ｓとが並ぶ方向を棚前後方向Ｘとし、容器収納棚１に対して移動空間Ｓが存在する方向を棚前方向Ｘ１とし、その反対方向を棚後方向Ｘ２として説明する。また、上下方向Ｚに見て、棚前後方向Ｘに対して直交する方向を幅方向Ｙとし、幅方向Ｙの一方向を第一幅方向Ｙ１とし、幅方向Ｙの他方向（第一幅方向Ｙ１の反対方向）を第二幅方向Ｙ２として説明する。尚、容器Ｗについては、容器Ｗを収納部１Ａに収納した状態に基づいて棚前後方向Ｘ及び幅方向Ｙを定義して説明する。   Hereinafter, although each structure of a container storage equipment is demonstrated, the direction in which the container storage shelf 1 and the movement space S are arranged is set to the shelf front-back direction X, and the direction in which the movement space S exists with respect to the container storage shelf 1 X1 and the opposite direction will be described as a shelf rear direction X2. Further, when viewed in the vertical direction Z, the direction perpendicular to the shelf longitudinal direction X is defined as the width direction Y, one direction of the width direction Y is defined as the first width direction Y1, and the other direction of the width direction Y (first width direction). The direction opposite to Y1) will be described as the second width direction Y2. The container W will be described by defining the shelf front-rear direction X and the width direction Y based on the state in which the container W is stored in the storage unit 1A.

〔容器〕
図２に示すように、容器Ｗは、半導体基板を収容する収容空間１１を有する収容部１２と、容器Ｗの上端部に備えられているフランジ部１３と、収容部１２の前面に形成された開口１４を閉じる着脱自在な蓋体１５と、が備えられている。このように、容器Ｗは、半導体基板を収容する収容空間１１と、収容空間１１に対して半導体基板を出し入れするための開口１４と、を備えており、開口１４は、収容空間１１に対して棚前方向Ｘ１に備えられている。 〔container〕
As shown in FIG. 2, the container W is formed on the front surface of the housing portion 12, the housing portion 12 having the housing space 11 for housing the semiconductor substrate, the flange portion 13 provided at the upper end portion of the container W, and the housing portion 12. A detachable lid 15 that closes the opening 14 is provided. As described above, the container W includes the accommodation space 11 that accommodates the semiconductor substrate, and the opening 14 for taking the semiconductor substrate into and out of the accommodation space 11. It is provided in the shelf front direction X1.

図２及び図３に示すように、容器Ｗの底部１６は、上方に窪む３つの溝状の被支持部１７を備えている。３つの被支持部１７は長尺状に形成されており、３つの被支持部１７は、基準位置Ｐ１に対して放射状に配置されている。
収容空間１１は、その収容空間１１に収容されている半導体基板の中心が、容器Ｗの棚前後方向Ｘの中心より棚前方向Ｘ１に位置するように形成されている。そのため、収容空間１１に収容する半導体基板の枚数が増えるに従って容器Ｗの重心Ｐ２は棚前方向Ｘ１に移動する。
基準位置Ｐ１は、上下方向Ｚに見て容器Ｗの重心Ｐ２より棚後方向Ｘ２に設定されている。重心Ｐ２は、容器Ｗの収容空間１１に収容可能な最大枚数の半導体基板を収容している状態における容器Ｗの重心である。本実施形態では、容器Ｗの収容空間１１に全く半導体基板を収容していない状態の重心も、基準位置Ｐ１より棚前方向Ｘ１に位置している。 As shown in FIGS. 2 and 3, the bottom portion 16 of the container W includes three groove-shaped supported portions 17 that are recessed upward. The three supported portions 17 are formed in a long shape, and the three supported portions 17 are arranged radially with respect to the reference position P1.
The accommodation space 11 is formed such that the center of the semiconductor substrate accommodated in the accommodation space 11 is positioned in the front shelf direction X1 from the center in the longitudinal direction X of the shelf of the container W. Therefore, the center of gravity P2 of the container W moves in the shelf front direction X1 as the number of semiconductor substrates accommodated in the accommodation space 11 increases.
The reference position P1 is set in the rear shelf direction X2 from the center of gravity P2 of the container W when viewed in the vertical direction Z. The center of gravity P2 is the center of gravity of the container W in a state where the maximum number of semiconductor substrates that can be stored in the storage space 11 of the container W is stored. In the present embodiment, the center of gravity in a state where no semiconductor substrate is accommodated in the accommodation space 11 of the container W is also located in the shelf front direction X1 from the reference position P1.

上下方向Ｚに見て、容器Ｗの基準位置Ｐ１と容器Ｗの重心Ｐ２とが並ぶ方向が、容器Ｗの前後方向であり、容器Ｗの前後方向における基準位置Ｐ１に対して容器Ｗの重心Ｐ２が存在する方向が容器Ｗの前方であり、その反対方向が容器Ｗの後方である。容器Ｗを収納部１Ａに収納している状態では、容器Ｗの前後方向と棚前後方向Ｘとが同じ方向であり、容器Ｗの前方と棚前方向Ｘ１とが同じ方向であり、容器Ｗの後方と棚後方向Ｘ２とは同じ方向である。   The direction in which the reference position P1 of the container W and the center of gravity P2 of the container W are aligned in the vertical direction Z is the front-rear direction of the container W, and the center of gravity P2 of the container W with respect to the reference position P1 in the front-back direction of the container W. The direction in which is present is the front of the container W, and the opposite direction is the rear of the container W. In the state in which the container W is stored in the storage unit 1A, the front-rear direction of the container W and the front-rear direction X of the shelf are the same direction, the front of the container W and the front direction X1 of the shelf are the same direction, The rear direction and the rear shelf direction X2 are the same direction.

底部１６に備えられている３つの被支持部１７のうちの２つは、容器Ｗの重心Ｐ２より棚前方向Ｘ１に位置しており、この２つの被支持部１７が前被支持部１７Ａである。底部１６に備えられている３つの被支持部１７のうちの残り１つは、容器Ｗの重心Ｐ２より棚後方向Ｘ２に位置しており、この１つの被支持部１７が後被支持部１７Ｂである。
図３に示すように、２つの前被支持部１７Ａのうちの一方は、幅方向Ｙにおいて、底部１６における容器Ｗの重心Ｐ２に対して第一幅方向Ｙ１に備えられている。２つの前被支持部１７Ａのうちの他方は、幅方向Ｙにおいて、底部１６における容器Ｗの重心Ｐ２に対して第二幅方向Ｙ２に備えられている。これら２つの前被支持部１７Ａは、棚前後方向Ｘにおいて同じ位置に備えられている。後被支持部１７Ｂは、幅方向Ｙにおいて、底部１６における容器Ｗの重心Ｐ２と同じ位置に備えられている。 Two of the three supported portions 17 provided in the bottom portion 16 are located in the shelf front direction X1 with respect to the center of gravity P2 of the container W, and these two supported portions 17 are the front supported portions 17A. is there. The remaining one of the three supported parts 17 provided in the bottom part 16 is located in the shelf rear direction X2 from the center of gravity P2 of the container W, and this one supported part 17 is the rear supported part 17B. It is.
As shown in FIG. 3, one of the two front supported portions 17A is provided in the first width direction Y1 with respect to the center of gravity P2 of the container W in the bottom portion 16 in the width direction Y. The other of the two front supported portions 17A is provided in the second width direction Y2 with respect to the center of gravity P2 of the container W in the bottom portion 16 in the width direction Y. These two front supported portions 17A are provided at the same position in the shelf front-rear direction X. The rear supported portion 17B is provided at the same position as the center of gravity P2 of the container W in the bottom portion 16 in the width direction Y.

容器Ｗが収納部１Ａの第一支持体２１により支持されている状態において、上下方向Ｚに見て、容器Ｗの底部１６における第一支持体２１と重複する部分を収納重複部１８としている。また、容器Ｗがスタッカークレーン２の第二支持体３６により支持されている状態において、上下方向Ｚに見て、容器Ｗの底部１６における第二支持体３６と重複する部分を搬送重複部１９としている。２つの前被支持部１７Ａの夫々は、収納重複部１８と搬送重複部１９とに亘って形成されている。１つの後被支持部１７Ｂは、少なくとも搬送重複部１９に形成されており、本実施形態では、収納重複部１８と搬送重複部１９とに亘って形成されている。尚、搬送重複部１９が、「搬送用被支持部」に相当する。   In a state where the container W is supported by the first support 21 of the storage unit 1 </ b> A, a portion overlapping the first support 21 at the bottom 16 of the container W when viewed in the vertical direction Z is used as the storage overlap portion 18. Further, in a state where the container W is supported by the second support 36 of the stacker crane 2, a portion overlapping with the second support 36 in the bottom 16 of the container W when viewed in the vertical direction Z is defined as a transport overlap portion 19. Yes. Each of the two front supported portions 17 </ b> A is formed across the storage overlap portion 18 and the transport overlap portion 19. One rear supported portion 17B is formed at least in the transport overlap portion 19, and is formed across the storage overlap portion 18 and the transport overlap portion 19 in this embodiment. The transport overlap portion 19 corresponds to a “supported portion for transport”.

〔容器収納棚〕
図１及び図４に示すように、容器収納棚１は、容器Ｗを収納可能な複数の収納部１Ａを上下方向Ｚ及び幅方向Ｙに並ぶ状態で複数備えている。複数の収納部１Ａの夫々は、容器Ｗの底部１６を下方から支持する第一支持体２１を備えている。このように、容器収納棚１には第一支持体２１を備えている。
図４に示すように、容器収納棚１は、上下方向Ｚに沿う姿勢で設置された複数の縦枠体２２Ａと、幅方向Ｙに沿う姿勢で設置された横枠体２２Ｂと、を備えており、これら縦枠体２２Ａと横枠体２２Ｂとを組み合わせて枠組み２２が形成されている。
枠組み２２は、容器収納棚１における棚後方向Ｘ２側の端部に設置されており、第一支持体２１は、横枠体２２Ｂから棚前方向Ｘ１に延びる姿勢で横枠体２２Ｂに支持されている。つまり、第一支持体２１は、その棚後方向Ｘ２側の端部が横枠体２２Ｂに連結された状態で枠組み２２に支持されている。尚、壁体Ｋは、容器収納棚１の枠組み２２に固定されている。 [Container storage shelf]
As shown in FIGS. 1 and 4, the container storage shelf 1 includes a plurality of storage portions 1 </ b> A capable of storing containers W in a state of being arranged in the vertical direction Z and the width direction Y. Each of the plurality of storage units 1A includes a first support 21 that supports the bottom 16 of the container W from below. As described above, the container storage shelf 1 includes the first support 21.
As shown in FIG. 4, the container storage shelf 1 includes a plurality of vertical frame bodies 22A installed in a posture along the vertical direction Z, and a horizontal frame body 22B installed in a posture along the width direction Y. The frame 22 is formed by combining the vertical frame 22A and the horizontal frame 22B.
The frame 22 is installed at the end of the container storage shelf 1 on the side of the rear shelf direction X2, and the first support body 21 is supported by the horizontal frame body 22B in a posture extending from the horizontal frame body 22B to the front shelf direction X1. ing. That is, the first support body 21 is supported by the frame 22 in a state where the end of the shelf rear direction X2 side is connected to the horizontal frame body 22B. The wall body K is fixed to the frame 22 of the container storage shelf 1.

図５及び図６に示すように、第一支持体２１は、１つの板状部２３と、２つの補強部２４と、２つの前支持部２５と、を備えて構成されている。板状部２３は板状に形成されており、その下方を向く面に２つの補強部２４が締結部２６を用いて連結されている。本実施形態では、板状部２３と補強部２４とを連結する締結部２６としてリベットを用いている。
具体的には、板状部２３と補強部２４との夫々にリベット挿通用の孔が形成されている。そして、板状部２３と補強部２４とを上下方向に重ねた状態でこれらのリベット挿通用の孔にリベットを上方から挿通させた後、リベットの先端（下端）を潰してリベットの先端を棚前後方向Ｘや幅方向Ｙに押し広げ、リベットの頭と先端とで板状部２３と補強部２４とを上下方向に挟むようにして板状部２３と補強部２４とを連結している。このようにリベットを用いて板状部２３と補強部２４とを連結することで、例えば、板状部２３と補強部２４とを溶接により連結する場合のように板状部２３や補強部２４が熱によって変形することを回避できると共に板状部２３と補強部２４との連結に要するコストを抑えることができる。 As shown in FIGS. 5 and 6, the first support body 21 is configured to include one plate-like portion 23, two reinforcing portions 24, and two front support portions 25. The plate-like portion 23 is formed in a plate shape, and two reinforcing portions 24 are connected to the surface facing downward using a fastening portion 26. In the present embodiment, a rivet is used as the fastening portion 26 that connects the plate-like portion 23 and the reinforcing portion 24.
Specifically, a rivet insertion hole is formed in each of the plate-like portion 23 and the reinforcing portion 24. Then, after the plate-like portion 23 and the reinforcing portion 24 are overlapped in the vertical direction, the rivet is inserted into the rivet insertion hole from above, and then the tip (lower end) of the rivet is crushed and the tip of the rivet is placed on the shelf. The plate-like portion 23 and the reinforcing portion 24 are connected so that the plate-like portion 23 and the reinforcing portion 24 are sandwiched in the vertical direction between the head and tip of the rivet. By connecting the plate-like portion 23 and the reinforcing portion 24 using rivets in this way, the plate-like portion 23 and the reinforcing portion 24 are connected, for example, when the plate-like portion 23 and the reinforcing portion 24 are connected by welding. Can be prevented from being deformed by heat, and the cost required for the connection between the plate-like portion 23 and the reinforcing portion 24 can be suppressed.

そして、図２に示すように、補強部２４の後端部が横枠体２２Ｂに連結されている。図５に示すように、板状部２３は、切欠き２７が形成されており、上下方向Ｚに見た形状が角ばったＵ字状に形成されている。前支持部２５は、板状部２３における切欠き２７の周縁部の２か所に、板状部２３の上面から上方に突出する状態で備えられている。尚、第一支持体２１については詳細を後述する。   And as shown in FIG. 2, the rear-end part of the reinforcement part 24 is connected with the horizontal frame 22B. As shown in FIG. 5, the plate-like portion 23 is formed with a notch 27, and is formed in a U shape with a square shape when viewed in the vertical direction Z. The front support portion 25 is provided at two locations on the peripheral portion of the notch 27 in the plate-like portion 23 so as to protrude upward from the upper surface of the plate-like portion 23. Details of the first support 21 will be described later.

〔スタッカークレーン〕
図１に示すように、スタッカークレーン２は、幅方向Ｙに沿って走行する走行台車３１と、走行台車３１に立設されたマスト３２と、マスト３２に沿って昇降する昇降体３３と、昇降体３３に支持された移載装置３４と、を備えている。移載装置３４は、移載対象箇所（収納部１Ａや搬送コンベヤ４の内側箇所４Ｂ）と自己との間で容器Ｗを移載できるように構成されている。 [Stacker crane]
As shown in FIG. 1, the stacker crane 2 includes a traveling cart 31 that travels along the width direction Y, a mast 32 that is erected on the traveling cart 31, an elevator body 33 that moves up and down along the mast 32, and an elevator A transfer device 34 supported by the body 33. The transfer device 34 is configured so that the container W can be transferred between the transfer target portion (the storage portion 1 </ b> A and the inner portion 4 </ b> B of the transport conveyor 4) and itself.

移載装置３４には、容器Ｗの底部１６を下方から支持する第二支持体３６（図３参照）と、当該第二支持体３６を引退位置と突出位置とに出退移動させる出退操作装置（図示せず）と、を備えている。引退位置は、第二支持体３６が昇降体３３の真上に位置する位置であり、突出位置は、図３に示すように第二支持体３６を引退位置から棚後方向Ｘ２に突出させた位置である。
そして、移載装置３４は、出退操作装置を縦軸心周りに回転させることで、第二支持体３６の引退位置から突出する方向を、一対の容器収納棚１の一方が存在する方向と、一対の容器収納棚１の他方が存在する方向と、に択一的に選択自在に構成されている。そのため、移載装置３４は、一対の容器収納棚１のいずれの収納部１Ａに対しても各収納部１Ａとの間で容器Ｗを移載できるように構成されている。 The transfer device 34 includes a second support 36 (see FIG. 3) that supports the bottom 16 of the container W from below, and an exit / retreat operation that moves the second support 36 back and forth between a retracted position and a protruding position. A device (not shown). The retreat position is a position where the second support 36 is located directly above the elevating body 33, and the projecting position is that the second support 36 is projected from the retreat position in the rear shelf direction X2 as shown in FIG. Position.
Then, the transfer device 34 rotates the exit / retreat operation device around the longitudinal axis so that the direction protruding from the retraction position of the second support 36 is the direction in which one of the pair of container storage shelves 1 exists. , And a direction in which the other of the pair of container storage shelves 1 is present. Therefore, the transfer device 34 is configured to be able to transfer the containers W between the storage units 1 </ b> A with respect to any of the storage units 1 </ b> A of the pair of container storage shelves 1.

図３に示すように、第二支持体３６は、突出位置に突出した状態で昇降体３３が昇降したときに第一支持体２１の切欠き２７を上下方向Ｚに通過可能な形状に形成されている。第二支持体３６は、容器Ｗの２つの被支持部１７に下方から係合して容器Ｗの底部１６を支持する搬送支持部３７が３つ備えられている。第二支持体３６は、３つの搬送支持部３７を容器Ｗの被支持部１７に係合させた状態で容器Ｗを支持することで、容器Ｗを第二支持体３６上における予め設定された支持位置に位置決めした状態で支持できるように構成されている。ちなみに、３つの搬送支持部３７は、被支持部１７における搬送重複部１９に位置する部分を下方から支持しており、第二支持体３６により、容器Ｗの底部１６における搬送重複部１９を下方から支持している。   As shown in FIG. 3, the second support 36 is formed in a shape that can pass through the notch 27 of the first support 21 in the up-down direction Z when the elevating body 33 moves up and down while protruding to the protruding position. ing. The second support 36 includes three transport support portions 37 that engage with the two supported portions 17 of the container W from below and support the bottom portion 16 of the container W. The second support 36 is set in advance on the second support 36 by supporting the container W in a state where the three conveyance support portions 37 are engaged with the supported portion 17 of the container W. It is comprised so that it can support in the state positioned in the support position. Incidentally, the three conveyance support portions 37 support a portion of the supported portion 17 located at the conveyance overlap portion 19 from below, and the second support 36 lowers the conveyance overlap portion 19 at the bottom portion 16 of the container W. I support from.

〔第一支持体の詳細〕
次に、第一支持体２１について説明を加える。
図２に示すように、第一支持体２１は、２つの前被支持部１７Ａに下方から係合した状態で容器Ｗの底部１６を下方から支持する２つの前支持部２５と、容器Ｗの底部１６における重心Ｐ２より棚後方向Ｘ２に位置する部分を下方から支持する板状部２３と、を備えている。板状部２３は、容器Ｗにおける底部１６の後端部１６Ａを支持しており、この板状部２３が、容器Ｗの底部１６における重心Ｐ２より棚後方向Ｘ２に位置する部分を下方から支持する後支持部に相当する。 [Details of the first support]
Next, the first support 21 will be described.
As shown in FIG. 2, the first support body 21 includes two front support portions 25 that support the bottom portion 16 of the container W from below while being engaged with the two front supported portions 17 </ b> A from below, A plate-like portion 23 that supports a portion located in the rear shelf direction X2 from the center of gravity P2 of the bottom portion 16 from below. The plate-like portion 23 supports the rear end portion 16A of the bottom portion 16 of the container W, and this plate-like portion 23 supports a portion located in the shelf rear direction X2 from the center of gravity P2 of the bottom portion 16 of the container W from below. It corresponds to the rear support part.

そして、第一支持体２１は、２つの前支持部２５と板状部２３とにより、２つの前被支持部１７Ａが後被支持部１７Ｂより上方に位置する傾斜姿勢で、容器Ｗを支持する。ここで、「傾斜姿勢」とは、基準姿勢の容器Ｗに対して容器Ｗの姿勢が後方に傾いている姿勢を表わしている。説明を加えると、基準姿勢は、３つのキネマティックピンにより容器Ｗの被支持部１７が支持されている状態において、前被支持部１７Ａにおけるキネマティックピンが下方から接触する部分と、後被支持部１７Ｂにおけるキネマティックピンが下方から接触する部分と、が同じ高さに位置している姿勢である。そして、傾斜姿勢は、上述のように２つの前支持部２５（キネマティックピン）を含む３つのキネマティックピンにより容器Ｗの被支持部１７を支持している状態を想定して、前被支持部１７Ａにおける前支持部２５が下方から接触する部分が、後被支持部１７Ｂにおけるキネマティックピンが下方から接触する部分より上方に位置している姿勢である。   The first support 21 supports the container W with the two front support portions 25 and the plate-like portion 23 in an inclined posture in which the two front supported portions 17A are positioned above the rear supported portion 17B. . Here, the “tilt posture” represents a posture in which the posture of the container W is inclined backward with respect to the container W in the reference posture. In other words, in the state where the supported portion 17 of the container W is supported by three kinematic pins, the reference posture is the portion where the kinematic pin in the front supported portion 17A contacts from below and the rear supported The part where the kinematic pin in the part 17B contacts from below is the same position. The inclined posture assumes that the supported portion 17 of the container W is supported by the three kinematic pins including the two front supporting portions 25 (kinematic pins) as described above. The part where the front support part 25 in the part 17A contacts from below is an attitude in which the kinematic pin in the rear supported part 17B is located above the part from which contact is made from below.

板状部２３における容器Ｗと上下方向Ｚに見て重複する部分は、その上面が平坦で且つ水平となっている。そして、２つの前支持部２５は、第一対象部４１と第二対象部４２との上下方向Ｚの間隔Ｌが、０ｍｍを超え且つ１ｍｍ以下となる高さに形成されている。第一対象部４１は、容器Ｗが第一支持体２１に支持されている状態において、容器Ｗにおける２つの前被支持部１７Ａと棚前後方向Ｘで同じ位置に位置し且つ最も下方に位置する容器Ｗの部分としている。また、第二対象部４２は、容器Ｗが第一支持体２１に支持されている状態において、板状部２３の上面における第一対象部４１の直下に位置する部分としている。要するに、容器Ｗが第一支持体２１に支持されている状態で、第一対象部４１と第二対象部４２とは上下方向Ｚに離間しているがその離間距離（間隔Ｌ）は１ｍｍ以下に抑えられている。本実施形態では、２つの前支持部２５は、間隔Ｌが１ｍｍとなる高さに形成されている。   The portion of the plate-like portion 23 that overlaps with the container W in the vertical direction Z has a flat upper surface and is horizontal. And the two front support parts 25 are formed in the height from which the space | interval L of the up-down direction Z of the 1st object part 41 and the 2nd object part 42 exceeds 0 mm and is 1 mm or less. In a state where the container W is supported by the first support body 21, the first target portion 41 is located at the same position as the two front supported portions 17 </ b> A of the container W in the shelf front-rear direction X and is located at the lowest position. The container W is a part. In addition, the second target portion 42 is a portion located directly below the first target portion 41 on the upper surface of the plate-like portion 23 in a state where the container W is supported by the first support 21. In short, in a state where the container W is supported by the first support body 21, the first target part 41 and the second target part 42 are separated in the vertical direction Z, but the separation distance (interval L) is 1 mm or less. Is suppressed. In the present embodiment, the two front support portions 25 are formed at a height at which the distance L is 1 mm.

第一支持体２１は、その棚前後方向Ｘの長さが容器Ｗの棚前後方向Ｘの長さより長く形成されている。そして、第一支持体２１は、第一支持体２１の棚前方向Ｘ１の前端より棚後方向Ｘ２に容器Ｗの前端が位置すると共に、第一支持体２１の棚後方向Ｘ２の後端より棚前方向Ｘ１に容器Ｗの前端が位置するように、容器Ｗを支持している。
つまり、第一支持体２１は、第一支持体２１により支持している容器Ｗの前端よりも棚前方向Ｘ１に延在する延在部としての前延在部４３を備えている。この前延在部４３は、第一支持体２１により支持されている容器Ｗと棚前後方向Ｘに見て重複する規制部としての前規制部４４を有している。前規制部４４は、その上端が第一支持体２１により支持している容器Ｗの前被支持部１７Ａよりも上方に位置する高さで、且つ、容器Ｗの高さの１／５を超えない高さに形成されている。ちなみに、前規制部４４の高さは、容器Ｗを支持している第二支持体３６が引退位置から突出位置に移動するときや突出位置から引退位置に移動するときに、前規制部４４が第二支持体３６に支持されている容器Ｗに干渉しない高さであればよい。 The first support 21 is formed such that the length in the longitudinal direction X of the shelf is longer than the length in the longitudinal direction X of the container W. The first support 21 has the front end of the container W in the rear shelf direction X2 from the front end in the front shelf direction X1 of the first support 21 and the rear end in the rear shelf direction X2 of the first support 21. The container W is supported so that the front end of the container W is positioned in the shelf front direction X1.
That is, the first support body 21 includes a front extending portion 43 as an extending portion extending in the shelf front direction X1 from the front end of the container W supported by the first support body 21. The front extending portion 43 has a front restricting portion 44 as a restricting portion overlapping with the container W supported by the first support 21 in the shelf front-rear direction X. The front regulating portion 44 has a height that is located above the front supported portion 17A of the container W supported by the first support 21 at the upper end thereof and exceeds 1/5 of the height of the container W. Not formed to height. Incidentally, the height of the front restricting portion 44 is such that the front restricting portion 44 is moved when the second support 36 supporting the container W moves from the retracted position to the protruded position or from the protruded position to the retracted position. Any height that does not interfere with the container W supported by the second support 36 may be used.

第一支持体２１は、その幅方向Ｙの長さが容器Ｗの幅方向Ｙの長さより長く形成されている。そして、第一支持体２１は、第一支持体２１の第一幅方向Ｙ１の端部より第二幅方向Ｙ２に容器Ｗの第一幅方向Ｙ１の端部が位置すると共に、第一支持体２１の第二幅方向Ｙ２の端部より第一幅方向Ｙ１に容器Ｗの第二幅方向Ｙ２の端部が位置するように、容器Ｗを支持している。
つまり、第一支持体２１は、第一支持体２１により支持した容器Ｗにおける第一幅方向Ｙ１の端部より第一幅方向Ｙ１に延在する第一幅延在部４５を備えている。この第一幅延在部４５は、幅方向Ｙに見て容器Ｗと重複する第一幅規制部４６を有している。また、第一支持体２１は、第一支持体２１により支持した容器Ｗにおける第二幅方向Ｙ２の端部より第二幅方向Ｙ２に延在する第二幅延在部４７を備えている。この第二幅延在部４７は、幅方向Ｙに見て容器Ｗと重複する第二幅規制部４８を有している。第一幅規制部４６及び第二幅規制部４８は、前規制部４４と同じ高さに形成されている。 The first support 21 is formed such that the length in the width direction Y is longer than the length in the width direction Y of the container W. And the 1st support body 21 has the edge part of the 1st width direction Y1 of the container W located in the 2nd width direction Y2 from the edge part of the 1st width direction Y1 of the 1st support body 21, and the 1st support body The container W is supported so that the edge part of the 2nd width direction Y2 of the container W may be located in the 1st width direction Y1 from the edge part of the 21st 2nd width direction Y2.
That is, the first support body 21 includes a first width extending portion 45 extending in the first width direction Y1 from the end portion in the first width direction Y1 of the container W supported by the first support body 21. The first width extending portion 45 has a first width regulating portion 46 that overlaps the container W when viewed in the width direction Y. The first support 21 includes a second width extending portion 47 extending in the second width direction Y2 from the end portion in the second width direction Y2 of the container W supported by the first support 21. The second width extending portion 47 has a second width regulating portion 48 that overlaps the container W when viewed in the width direction Y. The first width restricting portion 46 and the second width restricting portion 48 are formed at the same height as the front restricting portion 44.

幅方向Ｙに見て、第一支持体２１における縦枠体２２Ａと重複する部分は、第一支持体２１における第一幅規制部４６や第二幅規制部４８が備えられている部分に比べて、幅方向Ｙに幅狭に形成されている。   When viewed in the width direction Y, the portion of the first support 21 that overlaps with the vertical frame 22A is compared to the portion of the first support 21 where the first width restricting portion 46 and the second width restricting portion 48 are provided. Thus, it is formed narrow in the width direction Y.

このように、容器Ｗにおける２つの被支持部１７に２つの前支持部２５を下方から係合させた状態で第一支持体２１により容器Ｗの底部１６を支持することで、第一支持体２１によって容器Ｗを規定位置に位置決めした状態で容器Ｗを支持できる。そして、２つの前支持部２５と板状部２３とにより容器Ｗを傾斜姿勢で支持することにより、容器Ｗが前方に転倒し難くい状態で容器Ｗを支持できる。   Thus, the first support 21 supports the bottom 16 of the container W by the first support 21 in a state where the two front support portions 25 are engaged with the two supported portions 17 of the container W from below. The container W can be supported in a state in which the container W is positioned at the specified position by 21. Then, by supporting the container W in an inclined posture by the two front support portions 25 and the plate-like portion 23, the container W can be supported in a state where it is difficult for the container W to fall forward.

〔別実施形態〕
（１）上記実施形態では、容器の底部における重心より前方に位置する部分を後支持部により下方から支持する構成として、後支持部としての板状部により容器の後端部を下方から支持する構成としたが、後支持部による容器を支持する構成はこれに限定されない。つまり、例えば、後支持部を、板状部から上方に突出するとともに板状部からの突出量が前支持部より小さい形状に形成して、後被支持部に下方から係合した状態で容器の底部を下方から支持してもよい。また、板状部に複数の突起を形成して、この複数の突起により容器の後端部を下方から支持する構成としてもよい。 [Another embodiment]
(1) In the above embodiment, the rear end portion of the container is supported from below by the plate-like portion serving as the rear support portion, with the rear support portion supporting the portion located in front of the center of gravity at the bottom of the container from the lower side. Although it was set as the structure, the structure which supports the container by a back support part is not limited to this. That is, for example, the rear support part protrudes upward from the plate-like part and the protruding amount from the plate-like part is formed in a shape smaller than the front support part, and the container is engaged with the rear support part from below. You may support the bottom part of from below. Moreover, it is good also as a structure which forms a some protrusion in a plate-shaped part and supports the rear-end part of a container from below by these some protrusion.

（２）上記実施形態では、第一支持部により支持した容器の姿勢を、容器の前方が棚前方向を向く姿勢としたが、第一支持部により支持した容器の姿勢を、容器の前方が棚幅方向の第一方向に向く姿勢や、容器の前方が棚幅方向の第二方向に向く姿勢や、容器の前方が棚後方向を向く姿勢としてもよい。 (2) In the above embodiment, the posture of the container supported by the first support portion is the posture in which the front of the container faces the front of the shelf, but the posture of the container supported by the first support portion is It is good also as the attitude | position which faces the 1st direction of a shelf width direction, the attitude | position which the front of a container faces the 2nd direction of a shelf width direction, and the attitude | position which the front of a container faces a shelf rear direction.

（３）上記実施形態では、第一支持体に、前延在部と第一幅延在部と第二幅延在部とを備えたが、第一支持体に、前延在部と第一幅延在部と第二幅延在部とのうちの一部のみ（例えば前延在部のみ）を備えてもよく、また、第一支持体に、前延在部と第一幅延在部と第二幅延在部との全てを備えないようにしてもよい。
また、第一支持体に、前規制部と第一幅規制部と第二幅規制部とを備えたが、第一支持体に、前規制部と第一幅規制部と第二幅規制部とのうちの一部のみ（例えば前規制部のみ）を備えてもよく、また、第一支持体に、前規制部と第一幅規制部と第二幅規制部との全てを備えないようにしてもよい。 (3) In the said embodiment, although the 1st support body was equipped with the front extension part, the 1st width extension part, and the 2nd width extension part, a front extension part and the 1st support body were provided. Only one part (for example, only the front extension part) of the one width extension part and the second width extension part may be provided, and the front extension part and the first width extension are provided on the first support. You may make it not provide all the existing parts and the 2nd width extension part.
Moreover, although the 1st support body was equipped with the front regulation part, the 1st width regulation part, and the 2nd width regulation part, the 1st support body was equipped with the front regulation part, the 1st width regulation part, and the 2nd width regulation part. May be provided (for example, only the front restriction part), and the first support body may not include all of the front restriction part, the first width restriction part, and the second width restriction part. It may be.

（４）上記実施形態では、第一支持体を上下方向及び幅方向に並ぶ状態で容器支持棚に複数備えたが、第一支持体を上下方向にのみ並ぶ状態で容器支持棚に複数備えてもよく、また、第一支持体を幅方向にのみ並ぶ状態で容器支持棚に複数備えてもよい。搬送装置をスタッカークレーンとしたが、第一支持体を上下方向にのみ並ぶ状態で容器支持棚に複数備えた場合は、搬送装置を、幅方向に走行しない昇降装置により構成してもよく、また、第一支持体を幅方向にのみ並ぶ状態で容器支持棚に複数備えた場合は、搬送装置を、床面上を走行する自動搬送車により構成してもよい。 (4) In the above embodiment, a plurality of first support bodies are provided on the container support shelf in a state where they are aligned in the vertical direction and the width direction, but a plurality of first support bodies are provided on the container support shelf in a state where they are aligned only in the vertical direction. Alternatively, a plurality of first supports may be provided on the container support shelf in a state where they are arranged only in the width direction. The transport device is a stacker crane, but if the container support shelf is provided with a plurality of first supports arranged only in the vertical direction, the transport device may be configured by a lifting device that does not travel in the width direction. When the container support shelf is provided with a plurality of first supports arranged in the width direction only, the transport device may be configured by an automatic transport vehicle that travels on the floor surface.

（５）上記実施形態では、容器を、工場内で搬送されるＦＯＵＰとしたが、容器を、工場間で搬送されるＦＯＳＢ等の他の半導体基板用の容器でもよい。 (5) In the above embodiment, the container is a FOUP transported in a factory, but the container may be a container for another semiconductor substrate such as a FOSB transported between factories.

（６）上記実施形態では、第一支持体に１つの板状部と２つの補強部を備えて２つの補強部を枠組みに連結したが、第一支持体を枠組みに連結する構成はこれに限定されない。つまり、例えば、１つの板状部と２つの補強部とに代えて、１つの板状部と１つの補強部材とを第一支持体に備えて、この１つの補強体を枠組みに連結してもよく、また、１つの板状部と２つの補強部とに代えて、１つの板状部材を第一支持体に備えて、この１つの板状部材を枠組みに連結してもよい。 (6) In the above embodiment, the first support is provided with one plate-like portion and two reinforcing portions, and the two reinforcing portions are connected to the frame. It is not limited. That is, for example, instead of one plate-like portion and two reinforcing portions, one plate-like portion and one reinforcing member are provided in the first support body, and this one reinforcing body is connected to the frame. Alternatively, instead of one plate-like portion and two reinforcing portions, one plate-like member may be provided on the first support, and this one plate-like member may be connected to the frame.

１ 容器収納棚（容器支持棚）
２ スタッカークレーン（搬送装置）
１１ 収容空間
１４ 開口
１６ 底部
１６Ａ 後端部
１７ 被支持部
１７Ａ 前被支持部
１７Ｂ 後被支持部
２１ 支持体
２３ 板状部（後支持部）
２５ 前支持部
４１ 第一対象部
４２ 第二対象部
４３ 前延在部（延在部）
４４ 前規制部（規制部）
Ｌ 間隔
Ｐ１ 基準位置
Ｐ２ 重心
Ｓ 移動空間
Ｗ 容器
Ｘ 棚前後方向（前後方向）
Ｘ１ 棚前方向（前方）
Ｘ２ 棚後方向（後方）
1 Container storage shelf (container support shelf)
2 Stacker crane (conveying device)
DESCRIPTION OF SYMBOLS 11 Storage space 14 Opening 16 Bottom part 16A Rear end part 17 Supported part 17A Front supported part 17B Rear supported part 21 Support body 23 Plate-shaped part (rear support part)
25 front support part 41 first target part 42 second target part 43 front extension part (extension part)
44 Former Regulatory Department (Regulatory Department)
L interval P1 reference position P2 center of gravity S moving space W container X shelf front-rear direction (front-rear direction)
X1 shelf front direction (front)
X2 Shelf rear (back)

Claims (5)

半導体基板を収容する容器の底部を下方から支持する支持体を備えた容器支持棚であって、
前記容器の前記底部は、上方に窪む３つの被支持部を備え、
前記３つの被支持部は、前記底部の基準位置に対して放射状に配置され、
上下方向に見て、前記容器の前記基準位置と前記容器の重心とが並ぶ方向を前後方向とし、前記前後方向における前記基準位置に対して前記容器の重心が存在する方向を前方とし、その反対方向を後方として、
前記３つの被支持部のうちの２つが、前記容器の重心より前記前方に位置する前被支持部であり、前記３つの被支持部のうちの残り１つが、前記容器の重心より前記後方に位置する後被支持部であり、
前記支持体は、前記２つの前被支持部に下方から係合した状態で前記容器の前記底部を下方から支持する２つの前支持部と、前記容器の前記底部における重心より前記後方に位置する部分を下方から支持する後支持部と、を備えて、前記２つの前支持部と前記後支持部とにより、前記２つの前被支持部が前記後被支持部より上方に位置する傾斜姿勢で、前記容器を支持する容器支持棚。 A container support shelf including a support body that supports a bottom portion of a container that accommodates a semiconductor substrate from below,
The bottom portion of the container includes three supported portions that are recessed upward,
The three supported parts are arranged radially with respect to a reference position of the bottom part,
When viewed in the vertical direction, the direction in which the reference position of the container and the center of gravity of the container are aligned is the front-rear direction, and the direction in which the center of gravity of the container exists with respect to the reference position in the front-rear direction is the front, and vice versa With the direction as the back,
Two of the three supported parts are front supported parts positioned in front of the center of gravity of the container, and the remaining one of the three supported parts is behind the center of gravity of the container. A rear supported part located,
The support body is positioned behind the two front support portions that support the bottom portion of the container from below while engaged with the two front support portions from below, and the center of gravity of the bottom portion of the container. A rear support portion that supports the portion from below, and the two front support portions and the rear support portion are arranged in an inclined posture in which the two front support portions are positioned above the rear support portion. A container support shelf for supporting the container. 前記容器は、前記半導体基板を収容する収容空間と、前記収容空間に対して前記半導体基板を出し入れするための開口と、を備え、
前記開口は、前記収容空間に対して前記前方に備えられ、
前記後支持部は、前記底部の後端部を支持する請求項１記載の容器支持棚。 The container includes a housing space for housing the semiconductor substrate, and an opening for taking the semiconductor substrate into and out of the housing space,
The opening is provided in the front with respect to the accommodation space,
The container support shelf according to claim 1, wherein the rear support portion supports a rear end portion of the bottom portion. 前記支持体は、前記支持体により支持している前記容器の前方が、前記支持体に前記容器を搬送する搬送装置の移動空間を向く姿勢で、前記容器を支持する請求項１又は２記載の容器支持棚。   The said support body supports the said container in the attitude | position which the front of the said container currently supported by the said support body faces the movement space of the conveying apparatus which conveys the said container to the said support body. Container support shelf. 前記支持体は、板状の板状部と、前記板状部の上面より上方に突出する前記２つの前支持部と、を備え、
前記後支持部は、前記板状部により構成され、
前記容器が前記支持体に支持されている状態において、前記容器における前記２つの前支持部と前記前後方向で同じ位置に位置し且つ最も下方に位置する前記容器の部分を第一対象部とすると共に、前記板状部の上面における前記第一対象部の直下に位置する部分を第二対象部とし、
前記２つの前支持部は、前記第一対象部と前記第二対象部との上下方向の間隔が１ｍｍ以下となる高さに形成されている請求項１から３の何れか１項に記載の容器支持棚。 The support includes a plate-like plate-like portion, and the two front support portions projecting upward from the upper surface of the plate-like portion,
The rear support part is constituted by the plate-like part,
In a state where the container is supported by the support, the first target portion is a portion of the container that is located at the same position in the front-rear direction as the two front support portions in the container and located at the lowest position. And the portion located immediately below the first target part on the upper surface of the plate-like part is the second target part,
The said 2 front support part is formed in the height from which the space | interval of the up-down direction of said 1st object part and said 2nd object part is set to 1 mm or less, The any one of Claim 1 to 3 Container support shelf. 前記支持体は、前記支持体により支持している前記容器の前端よりも前記前方に延在する延在部を備え、
前記延在部は、前記支持体により支持している前記容器と前記前後方向に見て重複する規制部を有している請求項１から４のいずれか１項に記載の容器支持棚。 The support includes an extending portion extending forward from the front end of the container supported by the support.
The said extension part is a container support shelf of any one of Claim 1 to 4 which has a control part which overlaps seeing in the said front-back direction with the said container currently supported by the said support body.
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Citations (4)

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JP2014049585A (en) * 2012-08-31 2014-03-17 Renesas Electronics Corp Method of manufacturing semiconductor device

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JPH1025008A (en) * 1996-07-08 1998-01-27 Taisei Corp Stored article fall preventing method of rack type warehouse and device thereof
JP2000302214A (en) * 1999-04-20 2000-10-31 Murata Mach Ltd Article storage rack in rack device for automated storage and retrieval system
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