JP2016186475A - Position prediction device and position detection device - Google Patents

Position prediction device and position detection device Download PDF

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JP2016186475A
JP2016186475A JP2015067498A JP2015067498A JP2016186475A JP 2016186475 A JP2016186475 A JP 2016186475A JP 2015067498 A JP2015067498 A JP 2015067498A JP 2015067498 A JP2015067498 A JP 2015067498A JP 2016186475 A JP2016186475 A JP 2016186475A
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operating body
rotation angle
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勇一郎 山地
Yuichiro Yamaji
勇一郎 山地
慎一郎 望月
Shinichiro Mochizuki
慎一郎 望月
啓 平林
Hiroshi Hirabayashi
啓 平林
剛 梅原
Takeshi Umehara
剛 梅原
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TDK Corp
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
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    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

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Abstract

PROBLEM TO BE SOLVED: To provide a position prediction device that can accurately predict a position of a continuously-operating operating body at a predetermined time, and a position detection device including the position prediction device.SOLUTION: A position prediction device comprises: an arithmetic processing part that calculates information on the position of an operating body 11 on the basis of a signal related to the position of the operating body 11 output from a detection part 3 that is provided on the operating body 11 to detect an external magnetic field of a magnetic field generation part 2; and a prediction part that predicts the position of the operating body 11 at a predetermined time on the basis of an N-order differential value obtained by differentiating N-times (N is an integer of 1 or more) the position information calculated by the arithmetic processing part by time.SELECTED DRAWING: Figure 1

Description

本発明は、動作体の作動による位置を予測する装置及び当該動作体の作動による位置を検出する装置に関する。   The present invention relates to an apparatus for predicting a position due to operation of an operating body and an apparatus for detecting a position due to operation of the operating body.

従来、工作機械等における機械可動部に取り付けられるサーボモータ等の動作体の回転動作等による物理量の変化を検出することで、当該動作体の位置を検出する位置検出装置が用いられている。この位置検出装置による出力を通じて動作体の回転動作等を連続的に追尾し、動作体にフィードバックすることで、当該動作体の動作制御が行われる。   2. Description of the Related Art Conventionally, a position detecting device that detects the position of an operating body by detecting a change in a physical quantity caused by a rotating operation of an operating body such as a servo motor attached to a machine moving part in a machine tool or the like is used. By continuously tracking the rotational motion of the operating body through the output from the position detecting device and feeding back to the operating body, the motion control of the operating body is performed.

このような位置検出装置としては、磁界を発生する磁界発生部と磁気検出装置とを備えるものが知られている。かかる磁気検出装置は、一般に、磁界発生部により発生する外部磁界を検知し、磁界発生部が相対的に移動した物理量を示すアナログ信号を出力する磁気検出素子と、上記アナログ信号をデジタル信号に変換し、当該デジタル信号に基づいて現在時刻における動作体の位置を算出することのできる演算回路とを備え、磁気検出素子と演算回路とが同一の半導体チップ上に集積されて一体化された集積回路として構成される。   As such a position detection device, a device including a magnetic field generation unit that generates a magnetic field and a magnetic detection device is known. In general, such a magnetic detection device detects an external magnetic field generated by a magnetic field generation unit and outputs an analog signal indicating a physical quantity to which the magnetic field generation unit has relatively moved, and converts the analog signal into a digital signal. And an arithmetic circuit capable of calculating the position of the operating body at the current time based on the digital signal, and an integrated circuit in which the magnetic detection element and the arithmetic circuit are integrated on the same semiconductor chip. Configured as

このような磁気検出装置の演算回路において算出された、現在時刻における動作体の位置情報に基づき、動作体の動作制御が行われる。しかし、磁気検出素子から出力されるアナログ信号をデジタル信号に変換する処理、当該デジタル信号に含まれるノイズを除去するフィルタリング処理、当該デジタル信号に基づいて現在時刻における動作体の位置を算出する処理等により、遅延が生じ得る。そのため、特に高速に作動する動作体を精確に動作制御するために、上記遅延を取り戻すべく、動作体の位置情報から将来時刻における動作体の位置を予測し、当該予測値に基づいて動作体を制御する方法が採用されている。   Based on the position information of the operating body at the current time calculated by the arithmetic circuit of such a magnetic detection device, motion control of the operating body is performed. However, processing for converting an analog signal output from the magnetic detection element into a digital signal, filtering processing for removing noise included in the digital signal, processing for calculating the position of the operating body at the current time based on the digital signal, etc. Can cause a delay. Therefore, in order to accurately control the operating body that operates particularly fast, in order to recover the delay, the position of the operating body at a future time is predicted from the position information of the operating body, and the operating body is determined based on the predicted value. The control method is adopted.

このような方法を実施可能な位置検出装置として、従来、回転体に設けられた磁石の磁界強度を計測する磁気センサ素子、磁気センサ素子の計測値から磁石の回転角度を演算する角度計算手段、角度計算手段の出力する回転角度のデータを記憶しておく記憶手段、記憶手段の記憶内容を統計処理することにより回転状態を推定する回転状態推定手段、回転状態推定手段で推定された回転状態から以降の回転角度を予測する外挿処理手段、及び外挿処理手段で予測した回転角度に基づいて回転角度を算出し出力する出力手段を備える回転検出装置が提案されている（特許文献１参照）。   Conventionally, as a position detection device capable of performing such a method, a magnetic sensor element that measures the magnetic field strength of a magnet provided on a rotating body, an angle calculation means that calculates the rotation angle of the magnet from the measurement value of the magnetic sensor element, Storage means for storing rotation angle data output by the angle calculation means, rotation state estimation means for estimating the rotation state by statistically processing the stored contents of the storage means, and the rotation state estimated by the rotation state estimation means A rotation detection device including an extrapolation processing unit that predicts a subsequent rotation angle and an output unit that calculates and outputs the rotation angle based on the rotation angle predicted by the extrapolation processing unit has been proposed (see Patent Document 1). .

特開２００８−１１６２９２号公報JP 2008-116292 A

上記特許文献１に記載の回転検出装置において、磁気センサ素子により一定サンプリング周期で現在時刻の角度が出力され、記憶手段に記憶、蓄積される。そして、記憶手段に記憶、蓄積されている現在時刻の角度データに至る過去の角度データに、平均化フィルタ等の処理を行い、予測すべきサンプリング時刻における角度（予測角度）が求められる。   In the rotation detection device described in Patent Document 1, the angle of the current time is output at a constant sampling period by the magnetic sensor element, and is stored and accumulated in the storage means. Then, the past angle data that has been stored and stored in the storage means and reaches the angle data at the current time is processed by an averaging filter or the like, and the angle (predicted angle) at the sampling time to be predicted is obtained.

磁気センサ素子により一定サンプリング周期で出力される、現在時刻の角度データには所定のノイズが含まれる。このようなノイズを含む角度データを用いて、上記特許文献１のように線形外挿処理により予測角度を求めると、予測角度の精度が低下してしまうという問題がある。図９に示す予測モデルから明らかなように、現在時刻Ｔnの角度θnと過去の時刻Ｔn-1の角度θn-1とが、それぞれ所定のノイズ（図９中、矢印はノイズ幅を表す。）を含み、それらの角度データを用いて次回サンプリング時刻Ｔn+1における予測角度θn+1を線形外挿予測する場合、予測角度θn+1に含まれるノイズは角度θn，θn-1よりも増幅されてしまう。 The angle data at the current time that is output by the magnetic sensor element at a constant sampling cycle includes predetermined noise. When the angle data including such noise is used to obtain the predicted angle by linear extrapolation processing as in Patent Document 1, there is a problem that the accuracy of the predicted angle decreases. As is apparent from the predictive model shown in FIG. 9, the angle theta n the current time T n and the angle theta n-1 of the past time T n-1, respectively predetermined noise (in FIG. 9, the arrows noise width And the prediction angle θ n + 1 at the next sampling time T n + 1 is predicted by linear extrapolation using the angle data, the noise included in the prediction angle θ n + 1 is the angle θ n. , Θ n−1 is amplified.

また、上記角度データを用いた平均フィルタ処理等により予測角度を求めようとすると、それによる群遅延が生じてしまい、予測すべきサンプリング時刻を未来に設定する必要がある。予測すべきサンプリング時刻を未来に設定すると、ノイズの増幅を抑制することができず、予測角度の精度が低下してしまうという問題がある。   In addition, if an attempt is made to obtain a predicted angle by means of an average filter process using the angle data, a group delay is caused thereby, and it is necessary to set a sampling time to be predicted in the future. If the sampling time to be predicted is set in the future, there is a problem that noise amplification cannot be suppressed and the accuracy of the prediction angle is lowered.

予測角度の精度を高めるために、磁気センサ素子により出力される角度データについてフィルタ回路等による処理を行い、当該角度データに含まれるノイズを低減することが考えられる。フィルタ回路等による処理によって、角度データに含まれるノイズを低減することは可能である。しかし、フィルタ回路等による処理により、さらなる遅延が生じてしまうため、予測すべきサンプリング時刻をさらに未来に設定せざるを得ない。このように予測すべきサンプリング時刻をさらに未来に設定すると、フィルタ回路等により低減されたノイズが再び増幅して予測角度に含まれてしまうため、結果として予測角度の精度が低下してしまうという問題がある。   In order to increase the accuracy of the predicted angle, it is conceivable that the angle data output from the magnetic sensor element is processed by a filter circuit or the like to reduce noise included in the angle data. It is possible to reduce noise included in the angle data by processing using a filter circuit or the like. However, since further delay occurs due to processing by the filter circuit or the like, the sampling time to be predicted has to be set in the future. If the sampling time to be predicted is set in the future in this way, the noise reduced by the filter circuit or the like is amplified again and included in the prediction angle, resulting in a decrease in accuracy of the prediction angle as a result. There is.

上記課題に鑑み、本発明は、連続的に作動する動作体の所定時刻における位置を精確に予測することのできる位置予測装置及び当該位置予測装置を含む位置検出装置を提供することを目的とする。   In view of the above-described problems, an object of the present invention is to provide a position prediction device capable of accurately predicting a position at a predetermined time of an operating body that operates continuously, and a position detection device including the position prediction device. .

上記課題を解決するために、本発明は、連続的に作動する動作体の所定時刻における位置を予測する装置であって、前記動作体に設けられてなる磁界発生部の外部磁界を検出する検出部から出力される前記動作体の位置に関する信号に基づき、前記動作体の位置情報を算出する演算処理部と、前記演算処理部により算出された前記位置情報を時刻でＮ回（Ｎは１以上の整数である。）微分したＮ次微分値に基づき、前記動作体の前記所定時刻における位置を予測する予測部とを備えることを特徴とする位置予測装置を提供する（発明１）。   In order to solve the above problems, the present invention is an apparatus for predicting the position of a continuously operating operating body at a predetermined time, and detecting an external magnetic field of a magnetic field generating unit provided in the operating body. Based on a signal related to the position of the operating body output from the unit, and an arithmetic processing unit for calculating the position information of the operating body, and the position information calculated by the arithmetic processing unit N times (N is 1 or more) A position predicting device comprising: a predicting unit that predicts the position of the operating body at the predetermined time based on the differentiated Nth order differential value (Invention 1).

上記発明（発明１）によれば、連続的に作動する動作体の位置情報にノイズが含まれている場合であっても、当該位置情報のＮ次微分値に基づいて所定時刻における動作体の位置を予測することで、当該所定時刻における動作体の位置を精確に予測することができる。   According to the said invention (invention 1), even if it is a case where the noise is contained in the positional information on the action | operation body which operate | moves continuously, based on the Nth derivative value of the said position information, the action | operation body in predetermined time By predicting the position, it is possible to accurately predict the position of the operating body at the predetermined time.

上記発明（発明１）において、前記予測部は、前記Ｎ次微分値についてフィルタ処理を行うことで、前記所定時刻における前記Ｎ次微分値に相当する値を算出し、当該算出した前記Ｎ次微分値に相当する値に基づいて、前記動作体の前記所定時刻における位置を予測するのが好ましい（発明２）。   In the said invention (invention 1), the said prediction part calculates the value equivalent to the said Nth derivative value in the said predetermined time by performing a filter process about the said Nth derivative value, The said calculated Nth derivative It is preferable to predict the position of the operating body at the predetermined time based on a value corresponding to the value (Invention 2).

上記発明（発明１，２）において、前記予測部は、前記動作体の位置情報のうち、最新の位置情報を時刻でＮ回（Ｎは１以上の整数である。）微分したＮ次微分値を少なくとも用いて、前記動作体の前記所定時刻における位置を予測するのが好ましい（発明３）。   In the said invention (invention 1 and 2), the said prediction part differentiates the newest position information among the position information of the said operation body N times (N is an integer greater than or equal to 1) N times (N is an integer greater than or equal to 1). It is preferable to predict the position of the operating body at the predetermined time by using at least (Invention 3).

上記発明（発明１〜３）において、前記動作体の位置情報が、角度情報であるのが好ましく（発明４）、上記発明（発明１〜４）において、前記予測部は、前記位置情報としての角度情報を時刻で１回微分した角速度情報に基づき、前記動作体の前記所定時刻における位置を予測してもよいし（発明５）、前記位置情報としての角度情報を時刻で２回微分した角加速度情報に基づき、前記動作体の前記所定時刻における位置を予測してもよい（発明６）。   In the said invention (invention 1-3), it is preferable that the positional information on the said operation body is angle information (invention 4), In the said invention (invention 1-4), the said estimation part is as said positional information. Based on the angular velocity information obtained by differentiating the angle information once in time, the position of the operating body at the predetermined time may be predicted (invention 5), or the angle information obtained by differentiating the angle information as the position information twice in time. Based on the acceleration information, the position of the operating body at the predetermined time may be predicted (invention 6).

また、本発明は、上記発明（発明１〜６）に係る位置予測装置と、前記動作体に設けられてなる前記磁界発生部に対向して配置され、前記動作体の位置を検出可能な前記検出部とを備えることを特徴とする位置検出装置を提供する（発明７）。   Moreover, this invention is arrange | positioned facing the said magnetic field generation | occurrence | production part provided in the said operation body and the position prediction apparatus which concerns on the said invention (invention 1-6), The said position which can detect the said operation body Provided is a position detection device comprising a detection unit (Invention 7).

上記発明（発明７）において、前記検出部は、磁気抵抗効果素子を含むことができ（発明８）、かかる発明（発明７，８）において、前記動作体が、所定の回転軸を中心とし、前記検出部に対して相対的に回転する回転動作体であるのが好ましい（発明９）。   In the above invention (Invention 7), the detection unit may include a magnetoresistive effect element (Invention 8). In the invention (Inventions 7 and 8), the operating body is centered on a predetermined rotation axis. It is preferable that it is a rotary action body which rotates relatively with respect to the said detection part (invention 9).

本発明によれば、連続的に作動する動作体の所定時刻における位置を精確に予測することのできる位置予測装置及び当該位置予測装置を含む位置検出装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the position detection apparatus which can predict the position in the predetermined time of the operating body which act | operates continuously accurately can be provided, and the position detection apparatus containing the said position prediction apparatus can be provided.

図１は、本発明の一実施形態に係る回転角度検出装置の概略構成を示す斜視図である。FIG. 1 is a perspective view showing a schematic configuration of a rotation angle detection device according to an embodiment of the present invention. 図２は、本発明の一実施形態に係る回転角度検出装置の概略構成を示す側面図である。FIG. 2 is a side view showing a schematic configuration of the rotation angle detection device according to the embodiment of the present invention. 図３は、本発明の一実施形態における磁気検出装置の概略構成を示すブロック図である。FIG. 3 is a block diagram showing a schematic configuration of a magnetic detection device according to an embodiment of the present invention. 図４は、本発明の一実施形態における検出部の回路構成を概略的に示す回路図である。FIG. 4 is a circuit diagram schematically showing a circuit configuration of the detection unit in one embodiment of the present invention. 図５は、本発明の一実施形態における磁気検出素子としてのＭＲ素子の概略構成を示す斜視図である。FIG. 5 is a perspective view showing a schematic configuration of an MR element as a magnetic detection element in one embodiment of the present invention. 図６は、実施例１におけるシミュレーション結果を示すグラフである。FIG. 6 is a graph showing a simulation result in the first embodiment. 図７は、比較例１におけるシミュレーション結果を示すグラフである。FIG. 7 is a graph showing a simulation result in Comparative Example 1. 図８は、比較例２におけるシミュレーション結果を示すグラフである。FIG. 8 is a graph showing simulation results in Comparative Example 2. 図９は、ノイズを含む角度データを用いた線形予測モデルにおいて予測値に含まれるノイズが増幅することを説明するためのグラフである。FIG. 9 is a graph for explaining that noise included in a prediction value is amplified in a linear prediction model using angle data including noise.

本発明の実施の形態について、図面を参照しながら詳細に説明する。図１は、本実施形態に係る回転角度検出装置の概略構成を示す斜視図であり、図２は、本実施形態に係る回転角度検出装置の概略構成を示す側面図であり、図３は、本実施形態における磁気検出装置の概略構成を示すブロック図であり、図４は、本実施形態における検出部の回路構成を概略的に示す回路図であり、図５は、本実施形態における磁気検出素子としてのＭＲ素子の概略構成を示す斜視図である。   Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view illustrating a schematic configuration of a rotation angle detection device according to the present embodiment, FIG. 2 is a side view illustrating a schematic configuration of the rotation angle detection device according to the present embodiment, and FIG. FIG. 4 is a block diagram illustrating a schematic configuration of a magnetic detection device according to the present embodiment, FIG. 4 is a circuit diagram schematically illustrating a circuit configuration of a detection unit according to the present embodiment, and FIG. 5 illustrates magnetic detection according to the present embodiment. It is a perspective view which shows schematic structure of the MR element as an element.

図１及び図２に示すように、本実施形態に係る回転角度検出装置１は、磁石２と、磁石２に対向して配置される磁気検出装置３とを備える。磁石２は、回転軸Ｃを中心として連続的に回転する軸部１１（例えばサーボモータ等のモータ軸等）の軸方向の一端部に固定されており、軸部１１の回転に連動して、回転軸Ｃを中心として回転する。   As shown in FIG. 1 and FIG. 2, the rotation angle detection device 1 according to the present embodiment includes a magnet 2 and a magnetic detection device 3 disposed to face the magnet 2. The magnet 2 is fixed to one end in the axial direction of a shaft portion 11 (for example, a motor shaft such as a servomotor) that rotates continuously around the rotation axis C, and in conjunction with the rotation of the shaft portion 11, It rotates around the rotation axis C.

磁石２は、回転軸Ｃに直交する端面２１と、回転軸Ｃを含む仮想平面を中心として対称に配置されたＮ極２２及びＳ極２３とを有し、回転軸Ｃに直交する方向（Ｓ極２３からＮ極２２に向かう方向であって、Ｎ極２２とＳ極２３との境界に直交する方向）に磁化されている。磁石２は、それが有する磁化に基づいて磁界を発生する。   The magnet 2 has an end face 21 orthogonal to the rotation axis C, and N poles 22 and S poles 23 arranged symmetrically about a virtual plane including the rotation axis C, and a direction orthogonal to the rotation axis C (S It is magnetized in a direction from the pole 23 toward the N pole 22 and in a direction perpendicular to the boundary between the N pole 22 and the S pole 23. The magnet 2 generates a magnetic field based on the magnetization it has.

磁気検出装置３は、磁石２の端面２１に対向するように配置されており、磁石２による磁界を検出する。本実施形態に係る回転角度検出装置１は、磁気検出装置３の出力に基づいて磁石２の回転角度、すなわち回転移動する軸部１１の回転角度を検出することができる。   The magnetic detection device 3 is disposed so as to face the end face 21 of the magnet 2 and detects a magnetic field generated by the magnet 2. The rotation angle detection device 1 according to the present embodiment can detect the rotation angle of the magnet 2, that is, the rotation angle of the shaft portion 11 that rotates and moves based on the output of the magnetic detection device 3.

図３に示すように、磁気検出装置３は、磁石２（図１、図２参照）の磁界を検出する検出部３１と、検出部３１から出力されるアナログ信号をデジタル信号に変換するＡ／Ｄ（アナログ−デジタル）変換部３２、Ａ／Ｄ変換部３２によりデジタル変換されたデジタル信号を演算処理し、回転角度θを算出する演算処理部３３、及び演算処理部３３により算出された回転角度θを１回微分するとともに、当該微分値、すなわち角速度ωに基づいて次回サンプリング時刻Ｔn+1における回転角度θn+1を予測する予測部３４を有する。本実施形態においては、少なくとも演算処理部３３及び予測部３４により、連続的に作動する動作体（例えば連続的に回転するサーボモータのモータ軸等）の位置（回転位置）を予測可能な位置予測装置が構成される。 As shown in FIG. 3, the magnetic detection device 3 includes a detection unit 31 that detects a magnetic field of the magnet 2 (see FIGS. 1 and 2), and an A / A that converts an analog signal output from the detection unit 31 into a digital signal. An arithmetic processing unit 33 for calculating a rotation angle θ by performing arithmetic processing on the digital signal digitally converted by the D (analog-digital) conversion unit 32 and the A / D conversion unit 32, and a rotation angle calculated by the arithmetic processing unit 33 It has a prediction unit 34 that differentiates θ once and predicts the rotation angle θ n + 1 at the next sampling time T n + 1 based on the differential value, that is, the angular velocity ω. In the present embodiment, position prediction that can predict the position (rotational position) of a continuously operating operating body (for example, a motor shaft of a servo motor that rotates continuously) by at least the arithmetic processing unit 33 and the prediction unit 34. The device is configured.

図４に示すように、検出部３１は、第１の検出部３１Ａ及び第２の検出部３１Ｂを含み、第１及び第２の検出部３１Ａ，３１Ｂのそれぞれは、少なくとも１つの磁気検出素子を含む。検出部３１は、所定のサンプリング周期（例えば、５０〜１００μｓｅｃ程度）で、磁石２の磁界の方向が所定の方向に対するなす角度（回転角度）に関する検出信号（アナログ信号）を生成し、出力する。   As shown in FIG. 4, the detection unit 31 includes a first detection unit 31A and a second detection unit 31B, and each of the first and second detection units 31A and 31B includes at least one magnetic detection element. Including. The detection unit 31 generates and outputs a detection signal (analog signal) regarding an angle (rotation angle) formed by the direction of the magnetic field of the magnet 2 with respect to the predetermined direction at a predetermined sampling period (for example, about 50 to 100 μsec).

第１及び第２の検出部３１Ａ，３１Ｂのそれぞれは、少なくとも１つの磁気検出素子として、直列に接続された一対の磁気検出素子を含んでいてもよい。この場合において、第１及び第２の検出部３１Ａ，３１Ｂのそれぞれは、直列に接続された第１の一対の磁気検出素子と、直列に接続された第２の一対の磁気検出素子とを含むホイートストンブリッジ回路を有する。   Each of the first and second detection units 31A and 31B may include a pair of magnetic detection elements connected in series as at least one magnetic detection element. In this case, each of the first and second detection units 31A and 31B includes a first pair of magnetic detection elements connected in series and a second pair of magnetic detection elements connected in series. It has a Wheatstone bridge circuit.

第１の検出部３１Ａが有するホイートストンブリッジ回路３１１は、電源ポートＶ１と、グランドポートＧ１と、２つの出力ポートＥ１１，Ｅ１２と、直列に接続された第１の一対の磁気検出素子Ｒ１１，Ｒ１２と、直列に接続された第２の一対の磁気検出素子Ｒ１３，Ｒ１４とを含む。磁気検出素子Ｒ１１，Ｒ１３の各一端は、電源ポートＶ１に接続されている。磁気検出素子Ｒ１１の他端は、磁気検出素子Ｒ１２の一端と出力ポートＥ１１とに接続されている。磁気検出素子Ｒ１３の他端は、磁気検出素子Ｒ１４の一端と出力ポートＥ１２とに接続されている。磁気検出素子Ｒ１２，Ｒ１４の各他端は、グランドポートＧ１に接続されている。電源ポートＶ１には、所定の大きさの電源電圧が印加され、グランドポートＧ１はグランドに接続される。   The Wheatstone bridge circuit 311 included in the first detection unit 31A includes a power supply port V1, a ground port G1, two output ports E11 and E12, and a first pair of magnetic detection elements R11 and R12 connected in series. , And a second pair of magnetic detection elements R13 and R14 connected in series. One end of each of the magnetic detection elements R11 and R13 is connected to the power supply port V1. The other end of the magnetic detection element R11 is connected to one end of the magnetic detection element R12 and the output port E11. The other end of the magnetic detection element R13 is connected to one end of the magnetic detection element R14 and the output port E12. The other ends of the magnetic detection elements R12 and R14 are connected to the ground port G1. A power supply voltage having a predetermined magnitude is applied to the power supply port V1, and the ground port G1 is connected to the ground.

第２の検出部３１Ｂが有するホイートストンブリッジ回路３１２は、第１の検出部３１Ａのホイートストンブリッジ回路３１１と同様の構成を有し、電源ポートＶ２と、グランドポートＧ２と、２つの出力ポートＥ２１，Ｅ２２と、直列に接続された第１の一対の磁気検出素子Ｒ２１，Ｒ２２と、直列に接続された第２の一対の磁気検出素子Ｒ２３，Ｒ２４とを含む。磁気検出素子Ｒ２１，Ｒ２３の各一端は、電源ポートＶ２に接続されている。磁気検出素子Ｒ２１の他端は、磁気検出素子Ｒ２２の一端と出力ポートＥ２１とに接続されている。磁気検出素子Ｒ２３の他端は、磁気検出素子Ｒ２４の一端と出力ポートＥ２２とに接続されている。磁気検出素子Ｒ２２，Ｒ２４の各他端は、グランドポートＧ２に接続されている。電源ポートＶ２には、所定の大きさの電源電圧が印加され、グランドポートＧ２はグランドに接続される。   The Wheatstone bridge circuit 312 included in the second detection unit 31B has the same configuration as the Wheatstone bridge circuit 311 of the first detection unit 31A, and includes a power supply port V2, a ground port G2, and two output ports E21 and E22. And a first pair of magnetic detection elements R21, R22 connected in series, and a second pair of magnetic detection elements R23, R24 connected in series. One end of each of the magnetic detection elements R21 and R23 is connected to the power supply port V2. The other end of the magnetic detection element R21 is connected to one end of the magnetic detection element R22 and the output port E21. The other end of the magnetic detection element R23 is connected to one end of the magnetic detection element R24 and the output port E22. The other ends of the magnetic detection elements R22 and R24 are connected to the ground port G2. A power supply voltage having a predetermined magnitude is applied to the power supply port V2, and the ground port G2 is connected to the ground.

本実施形態において、ホイートストンブリッジ回路３１１，３１２に含まれるすべての磁気検出素子Ｒ１１〜Ｒ１４，Ｒ２１〜Ｒ２４として、ＴＭＲ素子、ＧＭＲ素子等のＭＲ素子を用いることができ、特にＴＭＲ素子を用いるのが好ましい。ＴＭＲ素子、ＧＭＲ素子は、磁化方向が固定された磁化固定層と、印加される磁界の方向に応じて磁化方向が変化する自由層と、磁化固定層及び自由層の間に配置される非磁性層とを有する。   In the present embodiment, MR elements such as TMR elements and GMR elements can be used as all the magnetic detection elements R11 to R14 and R21 to R24 included in the Wheatstone bridge circuits 311 and 312, and in particular, TMR elements are used. preferable. The TMR element and the GMR element are a magnetization fixed layer whose magnetization direction is fixed, a free layer whose magnetization direction changes according to the direction of an applied magnetic field, and a nonmagnetic layer disposed between the magnetization fixed layer and the free layer. And having a layer.

具体的には、図５に示すように、ＭＲ素子は、複数の下部電極４１と、複数のＭＲ膜５０と、複数の上部電極４２とを有する。複数の下部電極４１は、基板（図示せず）上に設けられている。各下部電極４１は細長い形状を有する。下部電極４１の長手方向に隣接する２つの下部電極４１の間には、間隙が形成されている。下部電極４１の上面における、長手方向の両端近傍にそれぞれＭＲ膜５０が設けられている。ＭＲ膜５０は、下部電極４１側から順に積層された自由層５１、非磁性層５２、磁化固定層５３及び反強磁性層５４を含む。自由層５１は、下部電極４１に電気的に接続されている。反強磁性層５４は、反強磁性材料により構成され、磁化固定層５３との間で交換結合を生じさせることで、磁化固定層５３の磁化の方向を固定する役割を果たす。複数の上部電極４２は、複数のＭＲ膜５０上に設けられている。各上部電極４２は細長い形状を有し、下部電極４１の長手方向に隣接する２つの下部電極４１上に配置され、隣接する２つのＭＲ膜５０の反強磁性層５４同士を電気的に接続する。なお、ＭＲ膜５０は、上部電極４２側から順に自由層５１、非磁性層５２、磁化固定層５３及び反強磁性層５４が積層されてなる構成を有していてもよい。   Specifically, as shown in FIG. 5, the MR element has a plurality of lower electrodes 41, a plurality of MR films 50, and a plurality of upper electrodes 42. The plurality of lower electrodes 41 are provided on a substrate (not shown). Each lower electrode 41 has an elongated shape. A gap is formed between two lower electrodes 41 adjacent to each other in the longitudinal direction of the lower electrode 41. MR films 50 are provided in the vicinity of both ends in the longitudinal direction on the upper surface of the lower electrode 41. The MR film 50 includes a free layer 51, a nonmagnetic layer 52, a magnetization fixed layer 53, and an antiferromagnetic layer 54, which are sequentially stacked from the lower electrode 41 side. The free layer 51 is electrically connected to the lower electrode 41. The antiferromagnetic layer 54 is made of an antiferromagnetic material and plays a role of fixing the magnetization direction of the magnetization fixed layer 53 by generating exchange coupling with the magnetization fixed layer 53. The plurality of upper electrodes 42 are provided on the plurality of MR films 50. Each upper electrode 42 has an elongated shape, is disposed on two lower electrodes 41 adjacent to each other in the longitudinal direction of the lower electrode 41, and electrically connects the antiferromagnetic layers 54 of the two adjacent MR films 50 to each other. . The MR film 50 may have a configuration in which a free layer 51, a nonmagnetic layer 52, a magnetization fixed layer 53, and an antiferromagnetic layer 54 are stacked in this order from the upper electrode 42 side.

ＴＭＲ素子においては、非磁性層５２はトンネルバリア層である。ＧＭＲ素子においては、非磁性層５２は非磁性導電層である。ＴＭＲ素子、ＧＭＲ素子において、自由層５１の磁化の方向が磁化固定層５３の磁化の方向に対してなす角度に応じて抵抗値が変化し、この角度が０°（互いの磁化方向が平行）のときに抵抗値が最小となり、１８０°（互いの磁化方向が反平行）のときに抵抗値が最大となる。   In the TMR element, the nonmagnetic layer 52 is a tunnel barrier layer. In the GMR element, the nonmagnetic layer 52 is a nonmagnetic conductive layer. In the TMR element and the GMR element, the resistance value changes according to the angle formed by the magnetization direction of the free layer 51 with respect to the magnetization direction of the magnetization fixed layer 53, and this angle is 0 ° (the magnetization directions of each other are parallel). The resistance value is minimized at 180 °, and the resistance value is maximized at 180 ° (mutual magnetization directions are antiparallel).

図４において、磁気検出素子Ｒ１１〜Ｒ１４，Ｒ２１〜Ｒ２４の磁化固定層の磁化の方向を塗りつぶした矢印で表し、自由層の磁化の方向を白抜きの矢印で表す。第１の検出部３１Ａにおいて、磁気検出素子Ｒ１１，Ｒ１４の磁化固定層の磁化の方向は第１の方向Ｄ１に平行な方向であり、磁気検出素子Ｒ１２，Ｒ１３の磁化固定層の磁化の方向は、磁気検出素子Ｒ１１，Ｒ１４の磁化固定層の磁化の方向と反平行方向である。第１の検出部３１Ａにおいて、磁石２の磁界の第１の方向Ｄ１の成分の強度に応じて、出力ポートＥ１１，Ｅ１２の電位差が変化し、磁石２の磁界の第１の方向Ｄ１の強度を表す信号が出力される。   In FIG. 4, the magnetization directions of the magnetization fixed layers of the magnetic detection elements R11 to R14 and R21 to R24 are represented by solid arrows, and the magnetization directions of the free layers are represented by white arrows. In the first detection unit 31A, the magnetization direction of the magnetization fixed layer of the magnetic detection elements R11 and R14 is a direction parallel to the first direction D1, and the magnetization direction of the magnetization fixed layer of the magnetic detection elements R12 and R13 is The magnetization direction of the magnetization fixed layer of the magnetic detection elements R11 and R14 is antiparallel to the magnetization direction. In the first detection unit 31A, the potential difference between the output ports E11 and E12 changes according to the strength of the component in the first direction D1 of the magnetic field of the magnet 2, and the strength of the magnetic field of the magnet 2 in the first direction D1 is changed. A representative signal is output.

第２の検出部３１Ｂにおいて、磁気検出素子Ｒ２１，Ｒ２４の磁化固定層の磁化の方向は第２の方向Ｄ２（第１の方向Ｄ１に直交する方向）であり、磁気検出素子Ｒ２２，Ｒ２３の磁化固定層の磁化の方向は、磁気検出素子Ｒ２１，Ｒ２４の磁化固定層の磁化の方向と反平行方向である。第２の検出部３１Ｂにおいて、磁石２の磁界の第２の方向Ｄ２の成分の強度に応じて、出力ポートＥ２１，Ｅ２２の電位差が変化し、磁石２の磁界の第２の方向Ｄ２の強度を表す信号が出力される。   In the second detection unit 31B, the magnetization direction of the magnetization fixed layers of the magnetic detection elements R21 and R24 is the second direction D2 (the direction orthogonal to the first direction D1), and the magnetizations of the magnetic detection elements R22 and R23 The magnetization direction of the fixed layer is antiparallel to the magnetization direction of the magnetization fixed layers of the magnetic detection elements R21 and R24. In the second detection unit 31B, the potential difference between the output ports E21 and E22 changes according to the strength of the component in the second direction D2 of the magnetic field of the magnet 2, and the strength of the magnetic field of the magnet 2 in the second direction D2 is changed. A representative signal is output.

差分検出器３５は、出力ポートＥ１１，Ｅ１２の電位差に対応する信号を第１の信号Ｓ１としてＡ／Ｄ変換部３２に出力する。差分検出器３６は、出力ポートＥ２１，Ｅ２２の電位差に対応する信号を第２の信号Ｓ２としてＡ／Ｄ変換部３２に出力する。   The difference detector 35 outputs a signal corresponding to the potential difference between the output ports E11 and E12 to the A / D converter 32 as the first signal S1. The difference detector 36 outputs a signal corresponding to the potential difference between the output ports E21 and E22 to the A / D converter 32 as the second signal S2.

図４に示すように、第１の検出部３１Ａにおける磁気検出素子Ｒ１１〜Ｒ１４の磁化固定層の磁化方向と、第２の検出部３１Ｂにおける磁気検出素子Ｒ２１〜Ｒ２４の磁化固定層の磁化方向とは、互いに直交する。この場合、第１の信号Ｓ１の波形は、回転角度θに依存したコサイン（Ｃｏｓｉｎｅ）波形になり、第２の信号Ｓ２の波形は、回転角度θに依存したサイン（Ｓｉｎｅ）波形になる。本実施形態において、第２の信号Ｓ２の位相は、第１の信号Ｓ１の位相に対して信号周期の１／４、すなわちπ／２（９０°）異なっている。   As shown in FIG. 4, the magnetization direction of the magnetization fixed layer of the magnetic detection elements R11 to R14 in the first detection unit 31A, and the magnetization direction of the magnetization fixed layer of the magnetic detection elements R21 to R24 in the second detection unit 31B Are orthogonal to each other. In this case, the waveform of the first signal S1 is a cosine waveform depending on the rotation angle θ, and the waveform of the second signal S2 is a sine waveform depending on the rotation angle θ. In the present embodiment, the phase of the second signal S2 differs from the phase of the first signal S1 by ¼ of the signal period, that is, π / 2 (90 °).

Ａ／Ｄ変換部３２は、検出部３１から所定のサンプリング周期で出力される、第１及び第２の信号（回転角度θに関するアナログ信号）Ｓ１，Ｓ２をデジタル信号に変換し、当該デジタル信号が演算処理部３３に入力される。   The A / D conversion unit 32 converts the first and second signals (analog signals related to the rotation angle θ) S1 and S2 output from the detection unit 31 at a predetermined sampling period into digital signals, and the digital signals are Input to the arithmetic processing unit 33.

演算処理部３３は、Ａ／Ｄ変換部３２によりアナログ信号から変換されたデジタル信号についての演算処理を行い、磁石２の回転角度θを算出する。この演算処理部３３は、例えば、マイクロコンピュータ等により構成される。演算処理部３３により算出された磁石２の回転角度θは、演算処理部３３に含まれる記憶部（図示せず）に記憶される。   The arithmetic processing unit 33 performs arithmetic processing on the digital signal converted from the analog signal by the A / D conversion unit 32 and calculates the rotation angle θ of the magnet 2. The arithmetic processing unit 33 is configured by, for example, a microcomputer. The rotation angle θ of the magnet 2 calculated by the arithmetic processing unit 33 is stored in a storage unit (not shown) included in the arithmetic processing unit 33.

磁石２の回転角度θは、例えば下記式で示すアークタンジェント計算によって算出され得る。
θ＝ａｔａｎ（Ｓ１／Ｓ２） The rotation angle θ of the magnet 2 can be calculated by, for example, arc tangent calculation represented by the following formula.
θ = atan (S1 / S2)

なお、３６０°の範囲内で、上記式における回転角度θの解には、１８０°異なる２つの値がある。しかし、第１の信号Ｓ１及び第２の信号Ｓ２の正負の組み合わせにより、回転角度θの真の値が、上記式における２つの解のいずれかであるかを判別することができる。すなわち、第１の信号Ｓ１が正の値のときは、回転角度θは０°よりも大きく１８０°よりも小さい。第１の信号Ｓ１が負の値のときは、回転角度θは１８０°よりも大きく３６０°よりも小さい。第２の信号Ｓ２が正の値のときは、回転角度θは０°以上９０°未満及び２７０°より大きく３６０°以下の範囲内である。第２の信号Ｓ２が負の値のときは、回転角度θは９０°よりも大きく２７０°よりも小さい。演算処理部３３は、上記式と、第１の信号Ｓ１及び第２の信号Ｓ２の正負の組み合わせの判定とにより、３６０°の範囲内で回転角度θを算出する。   Note that, within the range of 360 °, the solution of the rotation angle θ in the above formula has two values that differ by 180 °. However, it is possible to determine whether the true value of the rotation angle θ is one of the two solutions in the above expression, by the positive / negative combination of the first signal S1 and the second signal S2. That is, when the first signal S1 is a positive value, the rotation angle θ is greater than 0 ° and smaller than 180 °. When the first signal S1 is a negative value, the rotation angle θ is greater than 180 ° and smaller than 360 °. When the second signal S2 is a positive value, the rotation angle θ is in the range of 0 ° to less than 90 ° and greater than 270 ° to 360 °. When the second signal S2 has a negative value, the rotation angle θ is greater than 90 ° and smaller than 270 °. The arithmetic processing unit 33 calculates the rotation angle θ within the range of 360 ° based on the above formula and the determination of the positive / negative combination of the first signal S1 and the second signal S2.

予測部３４は、演算処理部３３により算出され、記憶部に記憶された磁石２の回転角度θを１回微分した１次微分値に基づいて、次回サンプリング時刻Ｔn+1における磁石２の回転角度θn+1を予測する。具体的には、予測部３４は、記憶部に記憶された磁石２の回転角度θを１回微分した角速度ωを算出し、当該角速度ωについて、例えば移動平均フィルタ処理等のフィルタ処理を行うことで、次回サンプリング時刻Ｔn+1における角速度ωn+1の予測値を算出する。そして、当該角速度ωn+1の予測値を積分して、次回サンプリング時刻Ｔn+1における磁石２の回転角度θn+1の予測値を算出する。 The prediction unit 34 calculates the rotation of the magnet 2 at the next sampling time T n + 1 based on the primary differential value obtained by differentiating the rotation angle θ of the magnet 2 once calculated by the arithmetic processing unit 33 and stored in the storage unit. Predict the angle θ n + 1 . Specifically, the prediction unit 34 calculates an angular velocity ω obtained by differentiating the rotation angle θ of the magnet 2 stored in the storage unit once, and performs a filtering process such as a moving average filter process on the angular velocity ω. Thus, the predicted value of the angular velocity ω n + 1 at the next sampling time T n + 1 is calculated. Then, the predicted value of the angular velocity ω n + 1 is integrated to calculate the predicted value of the rotation angle θ n + 1 of the magnet 2 at the next sampling time T n + 1 .

上記構成を有する回転角度検出装置１において、軸部１１の回転に伴い磁石２が回転すると、磁石２の磁界が変化する。その磁界の変化に応じ、検出部３１の磁気検出素子Ｒ１１〜Ｒ１４，Ｒ２１〜Ｒ２４の抵抗値が変化し、第１の検出部３１Ａ及び第２の検出部３１Ｂのそれぞれの出力ポートＥ１１，Ｅ１２，Ｅ２１，Ｅ２２の電位差に応じ、所定のサンプリング周期で第１の方向Ｄ１及び第２の方向Ｄ２における磁石２の磁界強度を表す信号Ｓ１，Ｓ２が差分検出器３５，３６から出力される。そして、差分検出器３５，３６から出力された第１の信号Ｓ１及び第２の信号Ｓ２が出力され、Ａ／Ｄ変換部３２によりデジタル信号に変換される。その後、演算処理部３３により、磁石２の回転角度θ（現在時刻ｎにおける回転角度θn）が算出される。 In the rotation angle detection apparatus 1 having the above configuration, when the magnet 2 rotates with the rotation of the shaft portion 11, the magnetic field of the magnet 2 changes. In accordance with the change in the magnetic field, the resistance values of the magnetic detection elements R11 to R14 and R21 to R24 of the detection unit 31 change, and the output ports E11, E12, and the second detection unit 31B of the first detection unit 31A and the second detection unit 31B, respectively. In accordance with the potential difference between E21 and E22, signals S1 and S2 representing the magnetic field strength of the magnet 2 in the first direction D1 and the second direction D2 are output from the difference detectors 35 and 36 at a predetermined sampling period. Then, the first signal S1 and the second signal S2 output from the difference detectors 35 and 36 are output, and are converted into digital signals by the A / D converter 32. Thereafter, the calculation processing unit 33 calculates the rotation angle θ of the magnet 2 (the rotation angle θ n at the current time n ).

本実施形態に係る回転角度検出装置１において、検出部３１からの出力をアナログ信号として読み出す処理（すなわち、第１及び第２の検出部３１Ａ，３１Ｂの出力ポートＥ１１，Ｅ１２，Ｅ２１，Ｅ２２の電位差に対応して差分検出器３５，３６から第１及び第２の信号Ｓ１，Ｓ２を出力する処理）、Ａ／Ｄ変換部３２にて当該第１及び第２の信号Ｓ１，Ｓ２をデジタル信号に変換する処理等により遅延が生じる。この遅延を取り戻すために、予測部３４による回転角度の予測が重要となる。   In the rotation angle detection device 1 according to the present embodiment, a process of reading the output from the detection unit 31 as an analog signal (that is, the potential difference between the output ports E11, E12, E21, and E22 of the first and second detection units 31A and 31B) Corresponding to the processing of outputting the first and second signals S1, S2 from the difference detectors 35, 36), the A / D converter 32 converts the first and second signals S1, S2 into digital signals. A delay occurs due to the conversion process or the like. In order to recover this delay, the prediction of the rotation angle by the prediction unit 34 is important.

ここで、演算処理部３３により算出される磁石の回転角度θには、所定のノイズが含まれる。このノイズを含む回転角度θに基づいて次回サンプリング時刻Ｔn+1における回転角度θn+1を予測すると、回転角度θn+1の予測値に含まれるノイズが増幅してしまい、正確な予測が困難となる。 Here, the magnet rotation angle θ calculated by the arithmetic processing unit 33 includes predetermined noise. If the rotation angle θ n + 1 at the next sampling time T n + 1 is predicted based on the rotation angle θ including this noise, the noise included in the predicted value of the rotation angle θ n + 1 is amplified, and accurate prediction is performed. It becomes difficult.

この点、上記サンプリング周期のうちの極めて短時間（例えば、現在サンプリング時刻Ｔnから遡って３サンプリング周期以下程度）においては、磁石２の回転運動を、等速回転運動であると仮定することができる。すなわち、次回サンプリング時刻Ｔn+1における角速度ωn+1は、現在サンプリング時刻Ｔnにおける角速度ωnと実質的に同一であるとの仮定が成立する。そのため、本実施形態において、予測部３４は、極めて短時間において算出された回転角度θ（例えば、現在サンプリング時刻Ｔnから遡って３サンプリング周期以下程度に算出された回転角度θn〜θn-3）を１回微分した１次微分値である角速度ωn〜ωn-3を算出し、当該角速度ωn〜ωn-3に基づいて次回サンプリング時刻Ｔn+1の角速度ωn+1を予測する。そして、予測部３４は、当該角速度ωn+1の予測値から回転角度θn+1を算出する。これにより、後述する実施例からも明らかなように、回転角度θに含まれるノイズが増幅されることなく、次回サンプリング時刻Ｔn+1における回転角度θn+1の正確な予測が可能となる。 In this regard, it is assumed that the rotational motion of the magnet 2 is a constant-speed rotational motion in a very short time (for example, about 3 sampling cycles or less retroactively from the current sampling time T n ) in the sampling cycle. it can. That is, it is assumed that the angular velocity ω n + 1 at the next sampling time T n + 1 is substantially the same as the angular velocity ω n at the current sampling time T n . Therefore, in the present embodiment, the prediction unit 34, the rotation angle calculated in a very short time theta (e.g., the rotation angle theta n the currently calculated degree 3 sampling periods below retroactively from the sampling time T n through? N- 3) calculate the angular velocity ω n ~ω n-3 is a first-order differential value obtained by differentiating once the angular velocity omega n + 1 of the next on the basis of the angular velocity ω n ~ω n-3 sampling time T n + 1 Predict. Then, the prediction unit 34 calculates the rotation angle θ n + 1 from the predicted value of the angular velocity ω n + 1 . Thus, as is clear from the examples described below, without noise included in the rotation angle theta is amplified, it is possible to accurately predict the rotation angle theta n + 1 at the next sampling time T n + 1 .

予測部３４は、例えば、現在サンプリング時刻Ｔnから遡って３サンプリング周期以下の回転角度θn〜θn-3をそれぞれ１回微分した角速度ωn〜ωn-3を用いた移動平均フィルタ処理により、次回サンプリング時刻Ｔn+1の角速度ωn+1を予測し、当該角速度ωn+1の予測値から、次回サンプリング時刻Ｔn+1の回転角度θn+1を算出する。このようにして算出された回転角度θn+1は、軸部１１を含む動作体（例えばモータ軸を含むサーボモータ等）の駆動回路等（図示せず）に入力され、当該動作体の動作制御が行われる。 The prediction unit 34, for example, uses moving average filter processing using angular velocities ω n to ω n-3 obtained by differentiating rotation angles θ n to θ n-3 that are three sampling periods or less from the current sampling time T n. by predicts an angular velocity omega n + 1 of the next sampling time T n + 1, from the prediction value of the angular velocity omega n + 1, to calculate the rotation angle theta n + 1 of the next sampling time T n + 1. The rotation angle θ n + 1 calculated in this way is input to a drive circuit or the like (not shown) of an operating body including the shaft portion 11 (for example, a servo motor including a motor shaft) and the operation of the operating body Control is performed.

上述したように、本実施形態に係る回転角度検出装置１によれば、磁石２の回転に伴い算出される、所定のノイズを含む回転角度θを１回微分した角速度ωに基づいて次回サンプリング時刻Ｔn+1の角速度ωn+1及びそれから算出される回転角度θn+1を予測するため、次回サンプリング時刻Ｔn+1における回転角度θn+1を精確に予測することができる。 As described above, according to the rotation angle detection device 1 according to the present embodiment, the next sampling time is calculated based on the angular velocity ω obtained by differentiating the rotation angle θ including the predetermined noise calculated once with the rotation of the magnet 2. to predict the rotation angle theta n + 1 calculated T n + 1 of the angular velocity omega n + 1 and from, it is possible to accurately predict the rotation angle theta n + 1 at the next sampling time T n + 1.

また、本実施形態に係る回転角度検出装置１によれば、回転角度θに含まれるノイズを除去することなくそのまま１回微分した角速度ωに基づいて次回サンプリング時刻Ｔn+1の回転角度θn+1を予測することで、回転角度θのフィルタリング処理によるさらなる遅延が生じることがない。そのため、当該遅延による次回サンプリング時刻Ｔn+1の回転角度θn+1に含まれるノイズが増幅するのを抑制することができ、次回サンプリング時刻Ｔn+1の回転角度θn+1を精確に予測することができる。 Further, according to the rotation angle detection device 1 according to the present embodiment, the rotation angle of the next sampling time T n + 1 on the basis of the angular velocity ω obtained by differentiating it once without removing the noise included in the rotational angle theta theta n By predicting +1 , there is no further delay due to the filtering process of the rotation angle θ. Therefore, it is possible to noise included in the rotational angle theta n + 1 of the next by the delay sampling time T n + 1 can be inhibited from amplifying, precise rotation angle theta n + 1 of the next sampling time T n + 1 Can be predicted.

さらに、本実施形態に係る回転角度検出装置１によれば、次回サンプリング時刻Ｔn+1における回転角度θn+1を精確に予測するために、現在サンプリング時刻Ｔnの回転角度θnと、当該現在サンプリング時刻Ｔnから遡って、例えば３サンプリング時刻（Ｔn-1，Ｔn-2，Ｔn-3）に演算処理部３３にて算出された回転角度θn〜θn-3とを用いればよいため、当該回転角度θn+1の予測のために必要な情報量（サンプル数）を少なくすることができるという効果も奏し得る。 Furthermore, according to the rotation angle detection device 1 according to the present embodiment, in order to accurately predict the rotation angle theta n + 1 at the next sampling time T n + 1, the rotation angle theta n of the current sampling time T n, From the current sampling time T n , for example, rotation angles θ n to θ n-3 calculated by the arithmetic processing unit 33 at three sampling times (T n−1 , T n−2 , T n−3 ) Therefore, the amount of information (number of samples) required for predicting the rotation angle θ n + 1 can be reduced.

以上説明した実施形態は、本発明の理解を容易にするために記載されたものであって、本発明を限定するために記載されたものではない。したがって、上記実施形態に開示された各要素は、本発明の技術的範囲に属する全ての設計変更や均等物をも含む趣旨である。   The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

上記実施形態において、予測部３４は、回転角度θを１回微分した角速度ωに基づいて、次回サンプリング時刻Ｔn+1における角速度ωn+1の予測値を算出し、当該角速度ωn+1の予測値から回転角度θn+1の予測値を算出しているが、本発明はこのような態様に限定されるものではない。例えば、予測部３４は、回転角度θを２回微分した角加速度αに基づいて、次回サンプリング時刻Ｔn+1における角加速度αn+1の予測値を算出し、当該角加速度αn+1の予測値から回転角度θn+1の予測値を算出してもよい。すなわち、予測部３４は、回転角度θをＮ回（Ｎは１以上の整数である。）微分したＮ次微分値に基づいて、次回サンプリング時刻Ｔn+1における回転角度θn+1の予測値を算出してもよい。 In the above embodiment, the prediction unit 34 calculates a predicted value of the angular velocity ω n + 1 at the next sampling time T n + 1 based on the angular velocity ω obtained by differentiating the rotation angle θ once, and the angular velocity ω n + 1. Although the predicted value of the rotation angle θ n + 1 is calculated from the predicted value, the present invention is not limited to such a mode. For example, the prediction unit 34 calculates a predicted value of the angular acceleration α n + 1 at the next sampling time T n + 1 based on the angular acceleration α obtained by differentiating the rotation angle θ twice, and the angular acceleration α n + 1. The predicted value of the rotation angle θ n + 1 may be calculated from the predicted value. That is, the prediction unit 34 predicts the rotation angle θ n + 1 at the next sampling time T n + 1 based on the N-th order differential value obtained by differentiating the rotation angle θ N times (N is an integer equal to or greater than 1). A value may be calculated.

上記実施形態において、磁界発生部として軸部１１に固定された磁石２を用いているが、本発明はこのような態様に限定されるものではなく、例えば、少なくとも１組のＮ極及びＳ極が交互にリング状に配置された磁石を磁界発生部として用い、当該磁石の外周部に磁気検出装置を対向配置させてなるものであってもよいし、直線状スケールを磁界発生部として用いてもよい。   In the above embodiment, the magnet 2 fixed to the shaft portion 11 is used as the magnetic field generating portion. However, the present invention is not limited to such a mode, and for example, at least one set of N pole and S pole. May be configured such that magnets alternately arranged in a ring shape are used as a magnetic field generation unit, and a magnetic detection device is disposed opposite to the outer periphery of the magnet, or a linear scale is used as a magnetic field generation unit. Also good.

上記実施形態において、磁石２が固定された軸部１１が回転軸Ｃを中心に回転することにより磁石２が磁気検出装置３に対して相対的に回転移動するが、本発明はこのような態様に限定されるものではない。例えば、磁石２（軸部１１）と磁気検出装置３とが、互いに反対方向に回転するものであってもよいし、磁石２（軸部１１）が回転せずに磁気検出装置３が回転するものであってもよい。   In the above-described embodiment, the shaft 2 to which the magnet 2 is fixed rotates around the rotation axis C, so that the magnet 2 rotates relative to the magnetic detection device 3. It is not limited to. For example, the magnet 2 (shaft portion 11) and the magnetic detection device 3 may rotate in opposite directions, or the magnetism 2 (shaft portion 11) does not rotate and the magnetic detection device 3 rotates. It may be a thing.

以下、実施例等を挙げて本発明をさらに詳細に説明するが、本発明は下記の実施例等に何ら限定されるものではない。   EXAMPLES Hereinafter, although an Example etc. are given and this invention is demonstrated further in detail, this invention is not limited to the following Example etc. at all.

〔実施例１〕
図３及び図４に示す構成を有する磁気検出装置３における、予測部３４による次回サンプリング時刻Ｔn+1の回転角度θn+1の予測について、ＭＡＴＬＡＢを用いてシミュレーションを行い、回転角度θn+1の予測値に含まれるノイズを求めた。かかるシミュレーションにおいて、磁石２が９００００ｄｅｇ／ｓｅｃで等速回転運動し、検出部３１によるサンプリング周期が５０μｓｅｃであり、演算処理部３３により算出される回転角度θに含まれるノイズが±０．０１°であるとした。また、４サンプルの当該回転角度θn〜θn-3をそれぞれ１回微分した角速度ωn〜ωn-3を用いた移動平均フィルタ処理を行うことを通じて、予測部３４にて回転角度θn+1を予測するものとした。シミュレーション結果を図６に示す。 [Example 1]
The prediction of the rotation angle θ n + 1 at the next sampling time T n + 1 by the prediction unit 34 in the magnetic detection device 3 having the configuration shown in FIGS. 3 and 4 is simulated using MATLAB and the rotation angle θ n. The noise included in the predicted value of +1 was obtained. In this simulation, the magnet 2 rotates at a constant speed of 90000 deg / sec, the sampling period by the detection unit 31 is 50 μsec, and the noise included in the rotation angle θ calculated by the arithmetic processing unit 33 is ± 0.01 °. It was supposed to be. Further, by performing moving average filter processing using angular velocities ω n to ω n-3 obtained by differentiating the rotation angles θ n to θ n -3 of the four samples once, the rotation angle θ n is predicted by the prediction unit 34. +1 was predicted. The simulation result is shown in FIG.

上記シミュレーションの結果、回転角度θを１回微分した角速度ωを用いて次回サンプリング時刻Ｔn+1における回転角度θn+1を予測すると、当該回転角度の予測値に含まれるノイズを±０．００９°に抑えることができることが確認された。 As a result of the simulation, when the rotation angle θ n + 1 at the next sampling time T n + 1 is predicted using the angular velocity ω obtained by differentiating the rotation angle θ once, noise included in the predicted value of the rotation angle is ± 0. It was confirmed that it can be suppressed to 009 °.

〔比較例１〕
演算処理部３３により算出された１サンプルの回転角度θnを１回微分したωn用いて線形外挿処理を行うことでωn+1を求め、当該ωn+1を積分することにより回転角度θn+1の予測をすることとした以外は、実施例１と同様にして回転角度θn+1の予測値に含まれるノイズを求めた。シミュレーション結果を図７に示す。 [Comparative Example 1]
Ω n + 1 is obtained by performing linear extrapolation processing using ω n obtained by differentiating the rotation angle θ n of one sample calculated by the arithmetic processing unit 33 once, and rotation is performed by integrating the ω n + 1. except that the that the angle theta n + 1 predictive was determined noise contained in the prediction value of the rotation angle theta n + 1 in the same manner as in example 1. The simulation result is shown in FIG.

上記シミュレーションの結果、回転角度θnを用いて次回サンプリング時刻Ｔn+1における回転角度θn+1を予測すると、当該回転角度の予測値に含まれるノイズが±０．０３°に増幅することが確認された。 As a result of the simulation, when the rotation angle θ n + 1 at the next sampling time T n + 1 is predicted using the rotation angle θ n , noise included in the predicted value of the rotation angle is amplified to ± 0.03 °. Was confirmed.

〔比較例２〕
Ａ／Ｄ変換部３２にて変換されたデジタル信号について、ＦＩＲフィルタ処理を行うことで、回転角度θnに含まれるノイズを±０．００２７°まで低減させるとともに、ＦＩＲフィルタ処理による群遅延の増加に伴う予測すべきサンプリング時刻を５サンプリング周期分将来に設定した以外は、比較例１と同様にして予測すべきサンプリング時刻Ｔn+5における回転角度θn+5の予測値に含まれるノイズを求めた。シミュレーション結果を図８に示す。 [Comparative Example 2]
By performing FIR filter processing on the digital signal converted by the A / D converter 32, the noise included in the rotation angle θ n is reduced to ± 0.0027 ° and the group delay is increased by the FIR filter processing. The noise included in the predicted value of the rotation angle θ n + 5 at the sampling time T n + 5 to be predicted is the same as in Comparative Example 1 except that the sampling time to be predicted accompanying the sampling time is set in the future for five sampling periods. Asked. The simulation result is shown in FIG.

上記シミュレーションの結果、回転角度θnを用いて予測すべきサンプリング時刻Ｔn+5における回転角度θn+5を予測すると、当該回転角度の予測値に含まれるノイズが±０．０３２４°に増大することが確認された。 As a result of the simulation, when the rotation angle θ n + 5 at the sampling time T n + 5 to be predicted is predicted using the rotation angle θ n , the noise included in the predicted value of the rotation angle increases to ± 0.0324 °. Confirmed to do.

実施例１、比較例１及び比較例２の結果から明らかなように、回転角度θを１回微分した角速度ωを用いた予測により、回転角度θにノイズが含まれていたとしても、そのノイズを増幅させることなく、次回サンプリング時刻Ｔn+1の回転角度θn+1を予測することができた。また、比較例２の結果から、検出部３１からの出力をアナログ信号として読み取り、当該アナログ信号がＡ／Ｄ変換部３２にて変換されたデジタル信号にフィルタ処理を行い、回転角度θに含まれるノイズを低減させたとしても、当該フィルタ処理による群遅延の増大に起因して、予測時刻をさらに未来に設定せざるを得なくなるため、結果として、回転角度の予測値に含まれるノイズが増大してしまうことが確認された。 As is clear from the results of Example 1, Comparative Example 1 and Comparative Example 2, even if the rotation angle θ includes noise by prediction using the angular velocity ω obtained by differentiating the rotation angle θ once, the noise is included. The rotation angle θ n + 1 at the next sampling time T n + 1 could be predicted without amplifying the signal. Further, from the result of Comparative Example 2, the output from the detection unit 31 is read as an analog signal, and the analog signal is filtered by the A / D conversion unit 32, and is included in the rotation angle θ. Even if the noise is reduced, the predicted time must be set in the future due to the increase in the group delay due to the filter processing. As a result, the noise included in the predicted value of the rotation angle increases. It was confirmed that.

〔実施例２〕
磁石２が−１８０００００ｄｅｇ／ｓｅｃ2で等加速回転運動しているものとし、演算処理部３３により算出された回転角度θを２回微分した角加速度αを用いるとともに、８サンプル（角加速度αn〜αn-7）を用いて移動平均フィルタ処理を行うことで予測部３４にて回転角度θn+1を予測した以外は、実施例１と同様にして回転角度θn+1の予測値に含まれるノイズを求めた。 [Example 2]
It is assumed that the magnet 2 is rotating at an equal acceleration speed of -1800000 deg / sec 2 , and the angular acceleration α obtained by differentiating the rotational angle θ calculated by the arithmetic processing unit 33 twice is used, and 8 samples (angular acceleration α n ˜ The predicted value of the rotation angle θ n + 1 is obtained in the same manner as in the first embodiment except that the prediction unit 34 predicts the rotation angle θ n + 1 by performing the moving average filter process using α n-7 ). The included noise was determined.

上記シミュレーションの結果、角加速度αを用いて次回サンプリング時刻Ｔn+1における回転角度θn+1を予測すると、当該回転角度の予測値に含まれるノイズが±０．０２９°であった。比較のために、演算処理部３３により算出された回転角度θを用いた移動平均フィルタ処理を行うことで予測部３４による回転角度の予測を同様にシミュレートした結果、当該回転角度の予測値に含まれるノイズが±０．０４７°であった。この結果から、角加速度αを用いた予測であっても、当該回転角度θn+1の予測値に含まれるノイズを増大させることなく、精確な予測が可能であることが確認された。 Results of the simulation, when predicting the rotation angle theta n + 1 at the next sampling time T n + 1 by using the angular acceleration alpha, noise contained in the predicted value of the rotational angle was ± 0.029 °. For comparison, as a result of similarly simulating the prediction of the rotation angle by the prediction unit 34 by performing the moving average filter process using the rotation angle θ calculated by the arithmetic processing unit 33, the predicted value of the rotation angle is obtained. The included noise was ± 0.047 °. From this result, it was confirmed that accurate prediction is possible without increasing the noise included in the predicted value of the rotation angle θ n + 1 even when the prediction is performed using the angular acceleration α.

実施例２の結果から、アプリケーションに応じ予測モデルが複雑になる場合であっても、最高次数の係数にフィルタリングすることで、ノイズを増大させることなく、精確な予測が可能であると推認することができる。   From the results of Example 2, it is inferred that accurate prediction is possible without increasing noise by filtering to the highest order coefficient even when the prediction model becomes complicated depending on the application. Can do.

１…回転角度検出装置（位置検出装置）
２…磁石（磁界発生部）
３…磁気検出装置
３１…検出部
３３…演算処理部
３４…予測部 1 ... Rotation angle detection device (position detection device)
2 ... Magnet (magnetic field generator)
DESCRIPTION OF SYMBOLS 3 ... Magnetic detection apparatus 31 ... Detection part 33 ... Operation processing part 34 ... Prediction part

Claims (9)

連続的に作動する動作体の所定時刻における位置を予測する装置であって、
前記動作体に設けられてなる磁界発生部の外部磁界を検出する検出部から出力される前記動作体の位置に関する信号に基づき、前記動作体の位置情報を算出する演算処理部と、
前記演算処理部により算出された前記位置情報を時刻でＮ回（Ｎは１以上の整数である。）微分したＮ次微分値に基づき、前記動作体の前記所定時刻における位置を予測する予測部と
を備えることを特徴とする位置予測装置。 An apparatus for predicting a position at a predetermined time of an operating body that operates continuously,
An arithmetic processing unit that calculates position information of the operating body based on a signal related to the position of the operating body that is output from a detection unit that detects an external magnetic field of a magnetic field generation unit provided in the operating body;
A prediction unit that predicts the position of the operating body at the predetermined time based on an Nth-order differential value obtained by differentiating the position information calculated by the arithmetic processing unit N times (N is an integer of 1 or more). A position prediction apparatus comprising: 前記予測部は、前記Ｎ次微分値についてフィルタ処理を行うことで、前記所定時刻における前記Ｎ次微分値に相当する値を算出し、当該算出した前記Ｎ次微分値に相当する値に基づいて、前記動作体の前記所定時刻における位置を予測することを特徴とする請求項１に記載の位置予測装置。   The predicting unit calculates a value corresponding to the Nth order differential value at the predetermined time by performing a filtering process on the Nth order differential value, and based on the calculated value corresponding to the Nth order differential value. The position prediction apparatus according to claim 1, wherein the position of the operating body at the predetermined time is predicted. 前記予測部は、前記動作体の位置情報のうち、最新の位置情報を時刻でＮ回（Ｎは１以上の整数である。）微分したＮ次微分値を少なくとも用いて、前記動作体の前記所定時刻における位置を予測することを特徴とする請求項１又は２に記載の位置予測装置。   The prediction unit uses at least an N-order differential value obtained by differentiating the latest position information among the position information of the action body N times (N is an integer equal to or greater than 1) with respect to time. The position prediction apparatus according to claim 1, wherein a position at a predetermined time is predicted. 前記動作体の位置情報が、角度情報であることを特徴とする請求項１〜３のいずれかに記載の位置予測装置。   The position prediction apparatus according to claim 1, wherein the position information of the operating body is angle information. 前記予測部は、前記位置情報としての角度情報を時刻で１回微分した角速度情報に基づき、前記動作体の前記所定時刻における位置を予測することを特徴とする請求項１〜４のいずれかに記載の位置予測装置。   The said prediction part predicts the position in the said predetermined time of the said operation body based on the angular velocity information which differentiated the angle information as said position information once with time. The position prediction apparatus described. 前記予測部は、前記位置情報としての角度情報を時刻で２回微分した角加速度情報に基づき、前記動作体の前記所定時刻における位置を予測することを特徴とする請求項１〜４のいずれかに記載の位置予測装置。   The said prediction part predicts the position in the said predetermined time of the said action body based on the angular acceleration information which differentiated the angle information as said position information twice with respect to time. The position prediction apparatus described in 1. 請求項１〜６のいずれかに記載の位置予測装置と、
前記動作体に設けられてなる前記磁界発生部に対向して配置され、前記動作体の位置を検出可能な前記検出部と
を備えることを特徴とする位置検出装置。 The position prediction apparatus according to any one of claims 1 to 6,
A position detection apparatus comprising: the detection unit arranged to face the magnetic field generation unit provided in the operation body and capable of detecting the position of the operation body. 前記検出部は、磁気抵抗効果素子を含むことを特徴とする請求項７に記載の位置検出装置。   The position detection apparatus according to claim 7, wherein the detection unit includes a magnetoresistive effect element. 前記動作体が、所定の回転軸を中心とし、前記検出部に対して相対的に回転する回転動作体であることを特徴とする請求項７又は８に記載の位置検出装置。   The position detecting device according to claim 7 or 8, wherein the operating body is a rotary operating body that rotates around a predetermined rotation axis relative to the detection unit.
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