JP2016179853A - Tank for liquid chemical substance - Google Patents

Tank for liquid chemical substance Download PDF

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Publication number
JP2016179853A
JP2016179853A JP2015061949A JP2015061949A JP2016179853A JP 2016179853 A JP2016179853 A JP 2016179853A JP 2015061949 A JP2015061949 A JP 2015061949A JP 2015061949 A JP2015061949 A JP 2015061949A JP 2016179853 A JP2016179853 A JP 2016179853A
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chemical substance
valve means
flow path
gas
tank body
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JP6420702B2 (en
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山根　淳
Atsushi Yamane
淳 山根
伸二 徳永
Shinji Tokunaga
伸二 徳永
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Tokuyama Corp
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Tokuyama Corp
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Priority to JP2015061949A priority Critical patent/JP6420702B2/en
Priority to KR1020177018576A priority patent/KR102468539B1/en
Priority to PCT/JP2016/054709 priority patent/WO2016152342A1/en
Priority to CN201680004463.2A priority patent/CN107108117B/en
Priority to TW105105047A priority patent/TWI676762B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00—Component parts, details or accessories for large containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves

Abstract

PROBLEM TO BE SOLVED: To provide a tank for a liquid chemical substance which is suitably usable as a tank for the liquid chemical substance of high purity such as high purity trichlorosilane, and in which contamination of the liquid chemical substance is prevented as much as possible.SOLUTION: A connection unit 6 includes a chemical substance flow passage 8 that has an immersion part 8a immersed in a chemical substance in a tank body 4 and an extension part 8b extending from the tank body 4, and a gas flow passage 10 extending from one end that is put in communication with the inside of the tank body 4. In the extension part 8b of the chemical substance flow passage 8, there are arranged first shut-off valve means 14 situated on a downstream side as viewed in a chemical substance filling direction into the tank body 4 and second shut-off valve means 16 situated on an upstream side as viewed in the chemical substance filling direction. In the gas flow passage 10, there are arranged third shut-off valve means 20 situated on a downstream side as viewed in a gas inflow direction into the tank body 4 and fourth shut-off valve means 22 situated on an upstream side as viewed in the gas inflow direction.SELECTED DRAWING: Figure 1

Description

本発明は、液状化学物質製造装置の如き化学物質供給源から液状化学物質が充填され、化学物質供給源から離隔して位置する化学物質消費装置が装備されている位置まで搬送されて化学物質消費装置に液状化学物質を供給するのに繰り返し使用されるタンクに関する。   The present invention is filled with a liquid chemical substance from a chemical substance supply source such as a liquid chemical substance manufacturing apparatus and transported to a position equipped with a chemical substance consumption apparatus located away from the chemical substance supply source. The present invention relates to a tank that is repeatedly used to supply liquid chemicals to an apparatus.

周知の如く、エピタキシャルウエーハ製造装置には高純度トリクロロシランを供給することが必要であり、一般に、次のとおりの供給様式が採用されている。高純度トリクロロシラン製造装置において製造された液状高純度トリクロロシランをタンクに充填し、かかるタンクをエピタキシャルウエーハ製造装置が装備されている領域まで搬送し、タンク内に充填されている高純度トリクロロシランをエピタキシャル製造装置に供給する。タンク内の高純度トリクロロシランが消費されると、再利用のためにタンクをトリクロロシラン製造装置が装備されている領域まで返送し、再びタンクに高純度トリクロロシランを充填する。   As is well known, it is necessary to supply high-purity trichlorosilane to an epitaxial wafer manufacturing apparatus. Generally, the following supply mode is adopted. Liquid high-purity trichlorosilane produced in a high-purity trichlorosilane production device is filled into a tank, the tank is transported to an area equipped with an epitaxial wafer production device, and the high-purity trichlorosilane filled in the tank is Supply to epitaxial manufacturing equipment. When the high-purity trichlorosilane in the tank is consumed, the tank is returned to an area equipped with a trichlorosilane production apparatus for reuse, and the tank is again filled with the high-purity trichlorosilane.

高純度トリククロシランの如き液状化学物質の上記のとおりの供給様式において使用されるタンクとしては、下記特許文献１に開示されているタンクを挙げることができる。かかるタンクはタンク本体とこのタンク本体に付設された接続ユニットとから構成されている。接続ユニットは、タンク本体内の高純度トリクロロシランの如き液状化学物質内に浸漬される浸漬部及びタンク本体から延出する延出部を有する化学物質流路とタンク本体に連通された片端から延出する気体流路とを含んでいる。化学物質流路中には開閉弁手段が配設され、気体流路中にも開閉弁手段が配設されている。更に、化学物質流路中の開閉弁手段と気体流路中の開閉弁手段とを連結する連結流路も配設され、この連結流路中にも開閉弁手段が配設されている。特許文献１には、接続ユニットをヘリウムの如き不活性気体で洗浄することも記載されている（しかしながら、洗浄様式については必ずしも明確に記載されていない）。   As a tank used in the above-described supply mode of a liquid chemical substance such as high-purity trichlorosilane, a tank disclosed in Patent Document 1 below can be exemplified. Such a tank is composed of a tank body and a connection unit attached to the tank body. The connecting unit extends from one end connected to the chemical substance flow path and the tank main body having an immersion part immersed in a liquid chemical substance such as high-purity trichlorosilane in the tank main body and an extension part extending from the tank main body. And a gas flow path exiting. On-off valve means is disposed in the chemical substance flow path, and on-off valve means is also disposed in the gas flow path. Further, a connecting flow path for connecting the opening / closing valve means in the chemical substance flow path and the opening / closing valve means in the gas flow path is also provided, and the opening / closing valve means is also provided in this connection flow path. Patent Document 1 also describes that the connection unit is cleaned with an inert gas such as helium (however, the cleaning mode is not always described clearly).

特公表２０１１−５００４７０号公報Japanese Patent Publication No. 2011-500470

而して、高純度トリクロロシランの如き化学物質は大気或いは水液等に接触して汚染されることが可及的に防止され高純度が維持されることが重要であるが、上記特許文献１に開示されているタンクにおいては、化学物質流路及び気体流路の各々には単一の開閉弁手段しか配設されておらず、汚染の防止が必ずしも充分ではない。   Thus, it is important that a chemical substance such as high-purity trichlorosilane is prevented from being contaminated by contact with the atmosphere or water liquid, and the high purity is maintained. In the tank disclosed in (1), only a single on-off valve means is provided in each of the chemical substance flow path and the gas flow path, and the prevention of contamination is not always sufficient.

本発明は上記事実に鑑みてなされたものであり、その主たる技術的課題は、特にそれに限定されるものではないが、高純度トリクロロシランの如き高純度の液状化学物質のためのタンクとして好適に使用ことができる、液状化化学物質の汚染が可及的に防止される改良された液状化学物質のためのタンクを提供することである。   The present invention has been made in view of the above facts, and its main technical problem is not particularly limited to this, but it is suitable as a tank for a high-purity liquid chemical such as high-purity trichlorosilane. It is to provide a tank for an improved liquid chemical that can be used and where possible the contamination of the liquefied chemical is prevented as much as possible.

本発明者等は、鋭意研究及び事件の結果、タンク本体に付設する接続ユニットを、化学物質流路及び気体流路の各々に２重の開閉弁手段を配設した独特な構成にすることによって上記主たる技術的課題を解決することができることを見出した。   As a result of diligent research and incidents, the inventors have made the connection unit attached to the tank main body a unique structure in which double on-off valve means are provided in each of the chemical substance flow path and the gas flow path. It has been found that the main technical problems can be solved.

即ち、本発明によれば、上記主たる技術的課題を達成することができる液状化学物質のためのタンクとして、タンク本体と該タンク本体に付設された接続ユニットとを具備する液状化学物質のためのタンクにして、
該接続ユニットは、該タンク本体内の化学物質に浸漬される浸漬部及び該タンク本体から延出する延出部を有する化学物質流路と、該タンク本体内に連通された片端から延出する気体流路と含み、
該化学物質流路の該延出部には、該タンク本体内への化学物質充填方向に見て下流側に位置する第一の開閉弁手段及び該化学物質充填方向に見て上流側に位置する第二の開閉弁手段が配設されており、
該気体流路には、該タンク本体への気体流入方向に見て下流側に位置する第三の開閉弁手段及び該気体流入方向見て上流側に位置する第四の開閉弁手段が配設されており、
更に、該化学物質流路における該第一の開閉弁手段と該第二の開閉弁手段との間の部位と該気体流路における該第三の開閉弁部材と該第四の開閉弁手段との間の部位とを連結する連結流路を含み、該連結流路には第五の開閉弁手段が配設されている、
ことを特徴とするタンクが提供される。 That is, according to the present invention, as a tank for a liquid chemical substance capable of achieving the main technical problem, the liquid chemical substance comprising a tank body and a connection unit attached to the tank body. In the tank
The connection unit extends from a chemical substance flow path having an immersion part immersed in a chemical substance in the tank body and an extension part extending from the tank body, and one end communicated in the tank body. Including gas flow path,
The extension part of the chemical substance flow path has a first on-off valve means positioned on the downstream side in the chemical substance filling direction into the tank body and an upstream side in the chemical substance filling direction. Second on-off valve means is disposed,
The gas flow path is provided with a third on-off valve means located on the downstream side in the gas inflow direction to the tank body and a fourth on-off valve means located on the upstream side in the gas inflow direction. Has been
Further, a portion between the first on-off valve means and the second on-off valve means in the chemical substance flow path, the third on-off valve member and the fourth on-off valve means in the gas flow path, Including a connecting flow path for connecting a portion between, a fifth on-off valve means is disposed in the connecting flow path,
A tank is provided.

好適には、接続アダプターが付設された化学物質供給源及び接続アダプターが付設された化学物質消費装置に適用され、
該接続アダプターの各々は、片端は化学物質供給源又は該化学物質消費装置に接続され他端は該化学物質流路の延出端に接続される化学物質接続流路と、片端は除害手段を介して大気に連通され他端は該気体流路の延出端に接続される気体接続流路と、片端は該化学物質接続流路に接続され他端は気体供給源に接続されている第一の気体供給流路と、片端は該気体接続流路に接続され他端は該気体供給源に接続されている第二の気体供給流路とを含み、
該化学物質接続流路には、該タンク本体内に向かう方向に見て該第一の気体供給流路の該片端よりも下流側に位置する第六の開閉弁手段及び該タンク本体内に向かう方向に見て該第一の気体供給流路の該片端よりも上流側に位置する第七の開閉弁手段が配設されており、
該気体接続流路には、該タンク本体内に向かう方向に見て該第二の気体供給流路の該片端よりも下流側に位置する第八の開閉弁手段及び該タンク本体内に向かう方向に見て該第二の気体供給流路の該片端よりも上流側に位置する第九の開閉弁手段が配設されており、
該第一の気体供給流路には、第十の開閉弁手段が配設されており、
該第二の気体供給流路には、第十一の開閉弁手段が配設されている。 Preferably, the present invention is applied to a chemical substance supply source provided with a connection adapter and a chemical substance consumption device provided with a connection adapter.
Each of the connection adapters has one end connected to a chemical substance supply source or the chemical substance consuming apparatus and the other end connected to an extended end of the chemical substance flow path, and one end is a detoxifying means. The other end is connected to the chemical substance connection channel and the other end is connected to the gas supply source. A first gas supply flow path, and a second gas supply flow path having one end connected to the gas connection flow path and the other end connected to the gas supply source,
The chemical substance connection flow path is directed to the inside of the tank body and the sixth on-off valve means positioned on the downstream side of the one end of the first gas supply flow path when viewed in the direction toward the tank body. A seventh on-off valve means located upstream from the one end of the first gas supply flow path when viewed in the direction is disposed;
The gas connection channel has an eighth on-off valve means positioned downstream from the one end of the second gas supply channel when viewed in the direction toward the tank body and a direction toward the tank body. A ninth on-off valve means located on the upstream side of the one end of the second gas supply flow path is disposed,
A tenth on-off valve means is disposed in the first gas supply flow path,
The eleventh on-off valve means is disposed in the second gas supply channel.

本発明のタンクによれば、後の説明から明確に理解される如く、液状化学物質製造装置が装備されている領域においてタンク本体に液状化学物質を充填する際、液状化学物質が充填されたタンクを化学物質消費装置が装備されている領域迄タンクを搬送する際、化学物質消費装置が装備されている領域においてタンク本体の化学物質を化学物質消費装置に供給する際、及びタンク本体内の化学物質が消費されたタンクを化学物質製造装置が装備されている領域に返送する際のいずれにおいても、化学物質が汚染されてしまうことが充分確実に防止される。   According to the tank of the present invention, as will be clearly understood from the following description, when the tank body is filled with the liquid chemical substance in the area where the liquid chemical substance production apparatus is equipped, the tank filled with the liquid chemical substance When transporting the tank to the area equipped with the chemical substance consuming device, when supplying the chemical substance in the tank body to the chemical substance consuming device in the area equipped with the chemical substance consuming device, and the chemistry in the tank body In any case when the tank in which the substance is consumed is returned to the area where the chemical substance manufacturing apparatus is installed, the chemical substance is sufficiently prevented from being contaminated.

本発明に従って構成されたタンクの好適実施形態を示す簡略図。1 is a simplified diagram illustrating a preferred embodiment of a tank constructed in accordance with the present invention. 図１に図示するタンクの部分平面図。FIG. 2 is a partial plan view of the tank illustrated in FIG. 1. 図１に図示するタンクのタンク本体内に液状化学物質を充填する際の、タンク使用様式を説明するための簡略図。The simplified view for demonstrating the tank usage style at the time of filling a liquid chemical substance in the tank main body of the tank shown in FIG. 図１図示するタンクのタンク本体内から化学物質消費装置に液状化学物質を供給する際の、タンク使用様式を説明するための簡略図。1 is a simplified diagram for explaining a tank usage mode when supplying a liquid chemical substance from the tank body of the tank shown in FIG. 図１に図示するタンクに適用される付加接続ユニットを示す簡略図。FIG. 2 is a simplified diagram illustrating an additional connection unit applied to the tank illustrated in FIG. 1.

以下、添付図面を参照して本発明に従って構成されたタンクについて更に詳細に説明する。   Hereinafter, a tank constructed according to the present invention will be described in more detail with reference to the accompanying drawings.

図１を参照して説明すると、本発明に従って構成されたタンク２は、タンク本体４とこのタンク本体４に付設された接続ユニット６とから構成されている。ステンレス鋼の如き適宜の材料から構成することができるタンク本体４は、適宜の中空構造でよいが、図示の実施形態においては横方向（図１において左右方向）に細長く延在する円筒形状であり且つ両側面（図１において左側面及び右側面）は凸形状である。そして、かようなタンク本体４の上面に接続ユニット６が付設されている。   Referring to FIG. 1, the tank 2 configured according to the present invention includes a tank body 4 and a connection unit 6 attached to the tank body 4. The tank body 4 that can be made of an appropriate material such as stainless steel may have an appropriate hollow structure, but in the illustrated embodiment, it has a cylindrical shape that extends in the lateral direction (left-right direction in FIG. 1). And both side surfaces (left side surface and right side surface in FIG. 1) are convex. A connection unit 6 is attached to the upper surface of the tank body 4.

図１と共に図２を参照して説明を続けると、接続ユニット６は化学物質流路８、気体流路１０及び連結流路１２を含んでいる。   The connection unit 6 includes a chemical substance flow path 8, a gas flow path 10, and a connection flow path 12.

化学物質流路８はタンク本体４内に充填される液状化学物質（図示していない）に浸漬される浸漬部８ａとタンク本体４から延出する延出部８ｂとを有する。化学物質流路８の延出部８ｂには、タンク本体４への化学物質充填方向（図１において下向）に見て下流側に位置する開閉弁手段即ち第一の開閉弁手段１４と上記化学物質充填方向に見て上流側に位置する開閉弁手段即ち第二の開閉弁手段１６とが配設されている。図示の実施形態においては、第二の開閉弁手段１６は化学物質流路８の延出端に配設されている。かような化学物質流路８は、図２を参照することによって理解される如く、流路を規定する真直に延びる真直管部材及び略直角に湾曲されたエルボ管部材を、第一の開閉弁手段１４及び第二の開閉弁手段１６を構成する適宜の弁部材、図示の実施形態においては手動操作ハンドルを備えたボール弁部材、を所要とおりに介在せしめて連結することによって好都合に構成することができる。管部材間の相互連結は溶接の如き適宜の連結様式によって達成することができ、真直管部材及びエルボ管部材に対する弁部材の連結は、弁部材の端に配設されている連結フランジを管部材の端に配設されている連結フランジに適宜のパッキンを介在させてボルト及びナットの如き適宜の締結手段によって締結することによって達成することができる。タンク本体４との連結は、管部材の所要部位に付設されたフランジ１８（図２）をタンク本体４に形成された開口を気密に閉じる状態に連結することによって遂行することができる。   The chemical substance flow path 8 has an immersion part 8 a immersed in a liquid chemical substance (not shown) filled in the tank body 4 and an extension part 8 b extending from the tank body 4. The extension part 8b of the chemical substance flow path 8 has an on-off valve means, that is, a first on-off valve means 14 located on the downstream side when viewed in the chemical substance filling direction (downward in FIG. 1) to the tank body 4, and the above-mentioned On-off valve means, that is, second on-off valve means 16 positioned upstream in the chemical substance filling direction is disposed. In the illustrated embodiment, the second opening / closing valve means 16 is disposed at the extended end of the chemical substance flow path 8. Such a chemical substance flow path 8 includes, as will be understood by referring to FIG. 2, a straight pipe member that defines the flow path and an elbow pipe member that is curved at a substantially right angle. An appropriate valve member constituting the means 14 and the second on-off valve means 16, in the illustrated embodiment, a ball valve member provided with a manual operation handle is intervened and connected as necessary. Can do. The interconnection between the pipe members can be achieved by an appropriate connection mode such as welding, and the connection of the valve member to the straight pipe member and the elbow pipe member is performed by connecting a connection flange disposed at the end of the valve member. This can be achieved by interposing an appropriate packing on a connecting flange disposed at the end of the bolt and fastening it with appropriate fastening means such as bolts and nuts. The connection with the tank body 4 can be achieved by connecting the flange 18 (FIG. 2) attached to a required portion of the pipe member in a state in which the opening formed in the tank body 4 is airtightly closed.

上記気体流路１０はタンク本体４内に連通された片端から延出している。かかる気体流路１０には、タンク本体４への気体流入方向（図１において下向）に見て下流側に位置する開閉弁手段即ち第三の開閉弁手段２０と上記気体流入方向に見て上流側に位置する開閉弁手段即ち第四の開閉弁手段２２とが配設されている。図示の実施形態においては、第四の開閉弁手段２２は気体流路１０の延出端に配設されている。かような気体流路１０も、上記化学物質流路８と同様に、流路を規定する真直に延びる真直管部材及び略直角に湾曲されたエルボ管部材を、第三の開閉弁手段２０及び第四の開閉弁手段２２を構成する適宜の弁部材、図示の実施形態においては手動操作ハンドルを備えたボール弁部材、を所要とおりに介在せしめて連結することによって好都合に構成することができる。タンク本体４との連結は、管部材の所要部位に付設されたフランジ２３（図２）をタンク本体４に形成されている開口を気密に閉じる状態に連結することによって遂行することができる。   The gas flow path 10 extends from one end communicating with the tank body 4. In the gas flow path 10, the on-off valve means located at the downstream side when viewed in the gas inflow direction (downward in FIG. 1) into the tank body 4, that is, the third on-off valve means 20 and the gas inflow direction. On-off valve means located on the upstream side, that is, fourth on-off valve means 22 is disposed. In the illustrated embodiment, the fourth on-off valve means 22 is disposed at the extended end of the gas flow path 10. Similarly to the chemical substance flow path 8, such a gas flow path 10 includes a straight pipe member that defines a flow path and an elbow pipe member that is curved substantially at right angles with the third on-off valve means 20 and An appropriate valve member constituting the fourth on-off valve means 22, in the illustrated embodiment, a ball valve member provided with a manual operation handle, can be conveniently constructed by interposing and connecting as required. The connection with the tank body 4 can be achieved by connecting a flange 23 (FIG. 2) attached to a required part of the pipe member in a state in which the opening formed in the tank body 4 is airtightly closed.

上記連結流路１２は、上記化学物質流路８における第一の開閉弁手段１４と第二の開閉弁手段１６との間の部位と上記気体流路１０における上記第三の開閉弁手段２０と第四の開閉弁手段２２との間の部位とを連結している。そして、かかる連結流路１２には、開閉弁手段即ち第五の開閉弁手段２４が配設されている。かような連結流路１２は、図２に図示する如く、流路を規定する真直に延びる真直管部材を、第五の開閉弁手段２４を構成する適宜の弁部材、図示の実施形態においては手動操作ハンドルを備えたボール弁部材、を介在せしめて連結することによって好都合に構成することができる。連結流路１２の片端（図１において右端）は上記化学物質流路８の延出部８ｂに連通され、他端（図１においおて左端）は上記気体流路１０に連通されている。更に詳細には、図２に図示する如く、連結流路１２を構成する管部材の片端は上記化学物質流路８を構成する管部材の側面に形成されている接続部に接続されて上記化学物質流路８に連通され、連結流路１２を構成する他の管部材の片端は上記気体流路１０を構成する管部材の側面に形成されている接続部に接続されて上記気体流路１０に連通されている。   The connecting flow path 12 includes a portion between the first on-off valve means 14 and the second on-off valve means 16 in the chemical substance flow path 8 and the third on-off valve means 20 in the gas flow path 10. The part between the fourth on-off valve means 22 is connected. The connection channel 12 is provided with on-off valve means, that is, fifth on-off valve means 24. As shown in FIG. 2, such a connecting flow path 12 is a straight pipe member that defines a flow path, an appropriate valve member that constitutes the fifth on-off valve means 24, in the illustrated embodiment. It can be conveniently constructed by interposing and connecting a ball valve member with a manually operated handle. One end (the right end in FIG. 1) of the connection channel 12 communicates with the extension 8b of the chemical substance channel 8, and the other end (the left end in FIG. 1) communicates with the gas channel 10. More specifically, as shown in FIG. 2, one end of the tube member constituting the connection channel 12 is connected to a connecting portion formed on the side surface of the tube member constituting the chemical substance channel 8, thereby One end of another pipe member that communicates with the substance flow path 8 and constitutes the connection flow path 12 is connected to a connection portion that is formed on a side surface of the pipe member that constitutes the gas flow path 10, thereby the gas flow path 10. It is communicated to.

次に、上記のとおりタンク２の使用様式について説明する。
［化学物質の充填］
図３を参照して説明すると、タンク２のタンク本体４内にトリクロロシランの如き液状化学物質を充填する際には、液状化学物質製造設備或いは液状化学物質貯留設備の如き化学物質供給源２６が存在する領域に搬入される。化学物質供給源２６には接続アダプター２８が付設されている。この接続アダプター２８は、化学物質接続流路３０及び気体接続流路３２を含んでいる。化学物質接続流路３０の片端は化学物質供給源２６に接続されており、気体接続流路３２の片端は化学物質を無害化する適宜の除害手段（図示していない）を介して大気に開放されている。一方、化学物質接続流路３０の他端及び気体接続流路３２の他端は、タンク本体４内に液状化学物質を充填する際に、夫々、タンク２の接続ユニット６における化学物質流路８の延出端及び気体流路１０の延出端に接続される。接続アダプター２８は、更に、第一の気体供給流路３４及び第二の気体供給流路３６を含んでいる。第一の気体供給流路３４の片端は化学物質接続流路３０に接続され、第二の気体供給流路３６の片端は気体接続流路３２に接続されている。第一の気体供給流路３４の他端及び第二の気体供給流路３６の他端は、アルゴン、水素、窒素及びヘリウムの如き不活性ガスから構成されるシールガスを供給するための気体供給源３７に接続されている。上記化学物質接続流路３０には、タンク本体４内に向かう方向（図１において左向）に見て上記第一の気体供給流路３４の上記片端よりも下流側位置する開閉弁手段即ち第六の開閉弁手段３８とタンク本体４内に向かう方向に見て上記第一の気体供給流路３４の上記片端よりも上流側位置する開閉弁手段即ち第七の開閉弁手段４０が配設されている。上記気体接続流路３２には、タンク本体４内に向かう方向（図１において左向）に見て上記第二の気体供給流路３６の上記片端よりも下流側に位置する開閉弁手段即ち第八の開閉弁手段４２とタンク本体４内に向かう方向に見て上記第二の気体供給流路３６の上記片端よりも上流側位置する開閉弁手段即ち第九の開閉弁手段４４が配設されている。上記第一の空気供給流路３４及び第二の空気供給流路３６には、夫々、開閉弁手段即ち第十の開閉弁手段４６及び開閉弁手段即ち第十一の開閉弁手段４８が配設されている。上記化学物質接続流路３０、気体接続流路３２、第一の気体供給流路３４及び第二の気体供給流路３６は、適宜の管部材を所要開閉弁手段を介して適宜に連結することによって構成することができる。開閉弁手段は手動操作ハンドルを備えたボール弁から好都合に構成することができる。 Next, the usage mode of the tank 2 will be described as described above.
[Chemical filling]
Referring to FIG. 3, when a liquid chemical substance such as trichlorosilane is filled in the tank body 4 of the tank 2, a chemical substance supply source 26 such as a liquid chemical substance production facility or a liquid chemical substance storage facility is provided. It is carried into the existing area. A connection adapter 28 is attached to the chemical substance supply source 26. The connection adapter 28 includes a chemical substance connection channel 30 and a gas connection channel 32. One end of the chemical substance connection flow path 30 is connected to the chemical substance supply source 26, and one end of the gas connection flow path 32 is brought into the atmosphere via an appropriate detoxification means (not shown) for detoxifying the chemical substance. It is open. On the other hand, the other end of the chemical substance connection flow path 30 and the other end of the gas connection flow path 32 are respectively connected to the chemical substance flow path 8 in the connection unit 6 of the tank 2 when the tank body 4 is filled with the liquid chemical substance. And the extended end of the gas flow path 10. The connection adapter 28 further includes a first gas supply channel 34 and a second gas supply channel 36. One end of the first gas supply channel 34 is connected to the chemical substance connection channel 30, and one end of the second gas supply channel 36 is connected to the gas connection channel 32. The other end of the first gas supply channel 34 and the other end of the second gas supply channel 36 are gas supplies for supplying a sealing gas composed of an inert gas such as argon, hydrogen, nitrogen and helium. Connected to source 37. The chemical substance connection channel 30 has an on-off valve means, that is, a first on-off valve means positioned downstream from the one end of the first gas supply channel 34 when viewed in the direction toward the tank body 4 (leftward in FIG. 1). Six open / close valve means 38 and open / close valve means 40 located upstream from the one end of the first gas supply channel 34 when viewed in the direction toward the inside of the tank body 4, that is, seventh open / close valve means 40 are provided. ing. The gas connection channel 32 has an opening / closing valve means, that is, a first valve means located downstream from the one end of the second gas supply channel 36 when viewed in the direction toward the tank body 4 (leftward in FIG. 1). Eight on-off valve means 42 and on-off valve means located on the upstream side of the one end of the second gas supply flow path 36 as viewed in the direction toward the inside of the tank body 4, that is, ninth on-off valve means 44 are provided. ing. In the first air supply flow path 34 and the second air supply flow path 36, on-off valve means, that is, a tenth on-off valve means 46, and on-off valve means, that is, an eleventh on-off valve means 48 are arranged. Has been. The chemical substance connection flow path 30, the gas connection flow path 32, the first gas supply flow path 34, and the second gas supply flow path 36 are appropriately connected with appropriate pipe members via required opening / closing valve means. Can be configured. The on-off valve means can advantageously be constructed from a ball valve with a manually operated handle.

タンク２の接続ユニット６と化学物質供給源２６に付設されている接続アダプター２８とを図３に示すとおりに接続した後には、次のとおりの工程が遂行される。
１．気密確認
第一乃至第十一の開閉弁手段１４、１６、２０、２２、２４、３８、４０、４２、４４、４６及び４８が閉である初期状態において、第六の開閉弁手段３８及び第八の開閉弁手段４２を開とし、そしてまた第十の開閉弁制御手段４６及び第十一の開閉弁手段４８を開とし、かくして化学物質接続流路３０及び気体接続流路３２にシールガスを送給する。次いで、全設備において気密が確保されているか否か、換言すれば化学物質及びシールガスの漏れが発生していないか否か、を検査する。そして、気密が確保されていることが確認された後に、第十の開閉弁制御手段４６及び第十一の開閉弁手段４８を閉じる。 After the connection unit 6 of the tank 2 and the connection adapter 28 attached to the chemical substance supply source 26 are connected as shown in FIG. 3, the following steps are performed.
1. Airtightness confirmation In the initial state where the first to eleventh on-off valve means 14, 16, 20, 22, 24, 38, 40, 42, 44, 46 and 48 are closed, the sixth on-off valve means 38 and the The eight on-off valve means 42 is opened, and the tenth on-off valve control means 46 and the eleventh on-off valve means 48 are opened, and thus the sealing gas is supplied to the chemical substance connection channel 30 and the gas connection channel 32. To send. Next, it is inspected whether or not airtightness is ensured in all facilities, in other words, whether or not leakage of chemical substances and seal gas has occurred. Then, after it is confirmed that airtightness is ensured, the tenth on-off valve control means 46 and the eleventh on-off valve means 48 are closed.

２．ガス置換
次に、第二の開閉弁手段１６、第四の開閉弁手段２２、第五の開閉弁手段２４及び第九の開閉弁手段４４を開き、そしてまた第十の開閉弁手段４６を開き、かくして化学物質接続流路３０及び気体接続流路３２にシールガスを流動せしめて、化学物質接続流路３０及び気体接続流路３２内に存在していた気体をパージする。しかる後に、第十の開閉弁手段４６を閉じ、第五の開閉弁手段２４を閉じる。 2. Next, the second on-off valve means 16, the fourth on-off valve means 22, the fifth on-off valve means 24 and the ninth on-off valve means 44 are opened, and the tenth on-off valve means 46 is also opened. Thus, the seal gas is caused to flow in the chemical substance connection flow path 30 and the gas connection flow path 32 to purge the gas existing in the chemical substance connection flow path 30 and the gas connection flow path 32. Thereafter, the tenth on-off valve means 46 is closed, and the fifth on-off valve means 24 is closed.

３．充填
次いで、第一の開閉弁手段１４、第三の開閉弁手段２０、及び第七の開閉弁手段４０を開き、かくして化学物質供給源２６から化学物質接続流路３０及び化学物質流路８を通してタンク本体４内に液状化学物質を流動せしめる。タンク本体４内への液状化学物質の充填量は、例えばタンク２の全体を適宜のシャーシ（図示していない）を介してロードセル（図示していない）上に載置し、タンク２の重量の変動を測定することによって認識することができる。或いは、化学物質流路８又は化学物質接続流路３０に配設した積算流量系で認識することもできる。所要量の液状化学物質がタンク本体４内に充填されると、第七の開閉弁手段４０を閉じて充填を停止すると共に、第十の開閉弁手段４６を開いてシールガスによって化学物質接続流路３０及び化学物質流路８内に滞留している液状化学物質をタンク本体４内に追い出す。 3. Filling Next, the first on-off valve means 14, the third on-off valve means 20, and the seventh on-off valve means 40 are opened, and thus from the chemical substance supply source 26 through the chemical substance connection channel 30 and the chemical substance channel 8. A liquid chemical substance is caused to flow in the tank body 4. The filling amount of the liquid chemical substance in the tank main body 4 is set, for example, by placing the entire tank 2 on a load cell (not shown) via an appropriate chassis (not shown) and measuring the weight of the tank 2. It can be recognized by measuring the variation. Alternatively, it can be recognized by an integrated flow rate system disposed in the chemical substance flow path 8 or the chemical substance connection flow path 30. When the required amount of liquid chemical substance is filled in the tank body 4, the seventh on-off valve means 40 is closed to stop the filling, and the tenth on-off valve means 46 is opened to open the chemical substance connection flow by the seal gas. The liquid chemical substance staying in the passage 30 and the chemical substance passage 8 is expelled into the tank body 4.

４．ガス加圧
第三の開閉弁手段２０を閉じてタンク本体４内にシールガスを流入させて１００ｋＰａＧ前後の圧力をかけ、しかる後に第一の開閉弁手段１４を閉じる。化学物質内にシールガスが吸収されることによって圧力が下がった場合には第一の開閉弁手段１４を開きシールガスを流入させて圧力を上昇させる。 4). Gas pressurization The third on-off valve means 20 is closed and a seal gas is introduced into the tank body 4 to apply a pressure of about 100 kPaG, and then the first on-off valve means 14 is closed. When the pressure decreases due to the absorption of the sealing gas into the chemical substance, the first on-off valve means 14 is opened and the sealing gas is introduced to increase the pressure.

５．ガス置換
しかる後に、第五の開閉弁手段２４を開き、化学物質接続流路３０及び気体接続流路３２内の気体をシールガスによってパージする。 5. After the gas replacement, the fifth on-off valve means 24 is opened, and the gas in the chemical substance connection channel 30 and the gas connection channel 32 is purged with the seal gas.

６．封止
次に、第四の開閉弁手段２２、第八の開閉弁手段４２及び第九の開閉弁手段４４を閉じ、そしてまた第十の開閉弁手段４６を閉じ、更に第六の開閉弁手段３８、第二の開閉制御弁１６及び第五の開閉制御弁２４を閉じる。この際には、第二の開閉弁手段１６から第五の開閉弁手段２４を介して第四の開閉弁手段２２に至る流路内にシールガスによる正圧力が生成されている状態にせしめるのが好適である。 6). Sealing Next, the fourth on-off valve means 22, the eighth on-off valve means 42 and the ninth on-off valve means 44 are closed, and the tenth on-off valve means 46 is also closed, and the sixth on-off valve means is further closed. 38, the second opening / closing control valve 16 and the fifth opening / closing control valve 24 are closed. At this time, a positive pressure is generated by the seal gas in the flow path from the second on-off valve means 16 through the fifth on-off valve means 24 to the fourth on-off valve means 22. Is preferred.

７．脱圧
次いで、好ましくは、例えば化学物質接続流路３０におけるタンク本体４に向かう方向に見て第六の開閉弁手段３８よりも下流側に配設した脱圧用の開閉弁手段（図示していない）及び／又は気体接続流路３２におけるタンク本体４に向かう方向に見て第八の開閉弁手段４２よりも下流側に配設された開閉弁手段（図示していない）を開くことによって、化学物質接続流路３０及び／又は気体接続流路３２内の正圧力を解除する。しかる後に、化学物質接続流路３０及び気体接続流路３２を、夫々、タンク２の接続ユニット６における化学物質流路８及び気体流路１０から切り離す。従って、タンク２は化学物質供給源２６が装備されている領域から離隔した領域（後述する化学物質消費装置が装備されている領域）に搬送することが許容される。化学物質流路８の延出端及び気体流路１０の延出端には、被嵌キャップ或いは挿入栓の如き適宜の閉塞手段（図示していない）を着脱自在に装着するのが好都合である。 7). Depressurization Next, preferably, the depressurization on-off valve means (not shown) disposed downstream of the sixth on-off valve means 38 when viewed in the direction toward the tank body 4 in the chemical substance connection channel 30, for example. ) And / or by opening an on-off valve means (not shown) disposed downstream of the eighth on-off valve means 42 when viewed in the direction toward the tank body 4 in the gas connection channel 32, The positive pressure in the substance connection channel 30 and / or the gas connection channel 32 is released. Thereafter, the chemical substance connection channel 30 and the gas connection channel 32 are separated from the chemical substance channel 8 and the gas channel 10 in the connection unit 6 of the tank 2, respectively. Accordingly, the tank 2 is allowed to be transported to a region separated from a region where the chemical substance supply source 26 is equipped (a region equipped with a chemical substance consumption device described later). It is convenient to detachably attach appropriate closing means (not shown) such as a fitting cap or an insertion plug to the extended end of the chemical substance flow path 8 and the extended end of the gas flow path 10. .

［化学物質の供給］
図４を参照して説明すると、上述したとおりにしてタンク本体４内に所要量の液状化学物質が充填されたタンク２は、専用トラック車の如き適宜の搬送手段（図示していない）によって、エピタキシャルウエーハ製造装置の如き化学物質消費装置５０が装備されている領域に搬送される。化学物質消費装置５０には接続アダプター２８′が付設されている。この接続アダプター２８′は、図３に図示する接続アダプター２８、即ち化学物質供給源２６に付設されている接続アダプター２８、と実質上同一でよい。図４においては、接続アダプター２８′の各構成要素に、接続アダプター２８における対応する構成要素の番号に「′」を加えた番号を付している。説明の重複を避けるために接続アダプター２８′の構成については説明を省略する。 [Supply of chemical substances]
Referring to FIG. 4, as described above, the tank 2 in which the required amount of liquid chemical substance is filled in the tank body 4 is transferred by an appropriate transport means (not shown) such as a dedicated truck. It is transported to an area equipped with a chemical substance consuming apparatus 50 such as an epitaxial wafer manufacturing apparatus. The chemical substance consuming apparatus 50 is provided with a connection adapter 28 '. The connection adapter 28 ′ may be substantially the same as the connection adapter 28 shown in FIG. 3, that is, the connection adapter 28 attached to the chemical substance supply source 26. In FIG. 4, each component of the connection adapter 28 ′ is given a number obtained by adding “′” to the number of the corresponding component in the connection adapter 28. In order to avoid duplication of explanation, explanation of the configuration of the connection adapter 28 'is omitted.

接続アダプター２８′における片端が化学物質消費装置に接続された化学物質接続流路３０′の他端及び片端は大気に開放された気体接続流路３２′の他端は、夫々、タンク２の接続ユニット４における化学物質流路８の延出端及び気体流路１０の延出端に接続され、かくしてタンク２の接続ユニット４に化学物質消費装置５０に付設されている接続アダプター２８′が接続される。しかる後に次のとおりの工程が遂行される。   One end of the connection adapter 28 ′ is connected to the tank 2, and the other end of the chemical substance connection channel 30 ′ connected to the chemical substance consuming device and the other end of the gas connection channel 32 ′ open to the atmosphere are connected to the tank 2. The connection adapter 28 ′ connected to the chemical substance consuming device 50 is connected to the connection unit 4 of the tank 2 connected to the extended end of the chemical substance flow path 8 and the extended end of the gas flow path 10 in the unit 4. The Thereafter, the following steps are performed.

１．気密確認及び２．ガス置換
最初に、上記化学物質の充填において遂行された１．気密確認及び２．ガス置換と同様にして、気密確認及びガス置換が遂行される。次いで、第九の開閉弁手段４４′を閉じる。 1. Airtight confirmation and 2. Gas replacement Firstly performed in the above chemical filling 1. Airtight confirmation and 2. In the same manner as the gas replacement, airtightness confirmation and gas replacement are performed. Next, the ninth on-off valve means 44 'is closed.

３．供給前処理
しかる後に、第十一の開閉弁手段４８′、第八の開閉弁手段４２′、第四の開閉弁手段２２及び第三の開閉弁手段２０を開き、シールガスによってタンク本体４内に所要正圧力にする。 3. After the supply pretreatment, the eleventh on-off valve means 48 ′, the eighth on-off valve means 42 ′, the fourth on-off valve means 22, and the third on-off valve means 20 are opened, and the inside of the tank body 4 is sealed with the seal gas. To the required positive pressure.

４．供給
次いで、第一の開閉弁手段１４、第二の開閉弁手段１６、第六の開閉弁手段３８′及び第七の開閉弁手段４０′を開き、タンク本体４から排出される液状化学物質を化学物質流路及び化学物質接続流路３０′を通して化学物質消費装置５０に供給する。化学物質消費装置５０に対する液状化学物質の供給量、換言すればタンク本体４内の液状化学物質の残留量は、例えばタンク２の全体を適宜のシャーシ（図示していない）を介してロードセル（図示していない）上に載置し、タンク２の重量の変動を測定することによって認識すること ができる。 4). Next, the first on-off valve means 14, the second on-off valve means 16, the sixth on-off valve means 38 ′ and the seventh on-off valve means 40 ′ are opened, and the liquid chemical substance discharged from the tank body 4 is opened. It is supplied to the chemical substance consumption apparatus 50 through the chemical substance flow path and the chemical substance connection flow path 30 '. The supply amount of the liquid chemical substance to the chemical substance consuming apparatus 50, in other words, the residual amount of the liquid chemical substance in the tank body 4 is, for example, the entire tank 2 via a load cell (not shown) via an appropriate chassis (not shown). It can be recognized by measuring the variation in the weight of the tank 2.

５．供給停止及び洗浄
タンク本体４内の液状化学物質の実質上全量が排出され、化学物質消費装置５０に供給されると、第七の開閉弁手段４０′を閉じて化学物質消費装置５０への液状化学物質の供給を停止すると共に、第十一の開閉弁手段４８′を閉じ、第十の開閉弁手段４４′を開いてタンク本体４内を脱圧する。そして、第十の開閉弁手段４６を開いて、化学物質接続流路３０′及び化学物質流路８内に残留している液状化学物質をタンク本体４内に戻す。 5. Supply Stop and Washing When substantially all of the liquid chemical substance in the tank body 4 is discharged and supplied to the chemical substance consuming device 50, the seventh on-off valve means 40 'is closed and the liquid to the chemical substance consuming device 50 is liquidated. The supply of the chemical substance is stopped, the eleventh on-off valve means 48 'is closed, and the tenth on-off valve means 44' is opened to depressurize the tank body 4. Then, the tenth on-off valve means 46 is opened, and the liquid chemical substance remaining in the chemical substance connection channel 30 ′ and the chemical substance channel 8 is returned to the tank body 4.

６．ガス加圧７．ガス置換８．封止９．脱圧
しかる後に、上記化学物質の充填において遂行された４．ガス加圧、５．ガス置換、６．封止及び７．脱圧と同様にして、６．ガス加圧７．ガス置換、８．封止及び９．脱圧を遂行する。かくして、タンク２は化学物質消費装置５０が装備されている領域から離隔した化学物質供給源２６が装備されている領域に戻すことが許容される。この際にも、化学物質流路８の延出端及び気体流路１０の延出端には、被嵌キャップ或いは挿入栓の如き適宜の閉塞手段（図示していない）を着脱自在に装着するのが好都合である。 6). 6. Gas pressurization Gas replacement8. Seal 9. After depressurization, it was performed in the above chemical filling. 4. gas pressurization; Gas replacement, 6. 6. sealing and Similar to depressurization, 6. 6. Gas pressurization Gas replacement, 8. 8. sealing and Perform depressurization. Thus, the tank 2 is allowed to return to the region equipped with the chemical source 26 which is remote from the region equipped with the chemical consuming device 50. Also at this time, an appropriate closing means (not shown) such as a fitting cap or an insertion plug is detachably attached to the extending end of the chemical substance channel 8 and the extending end of the gas channel 10. Is convenient.

上述したとおりの液状化学物質の充填及び／又は液状化学物質の供給において、流路径の相異等に起因して、タンク２の接続ユニット４における化学物質流路８の延出端及び気体流路１０の延出端に対して接続ユニット２８（２８′）における化学物質接続流路３０（３０′）の上記他端及び気体接続流路３２（３２′）の上記他端との接続が困難な場合には、図５に図示する如く、補助接続アダプター５２を使用することができる。補助接続アダプター５２は、片端は化学物質流路８の延出端に接続するのに適し他端は化学物質接続流路３０（３０′）の上記他端に接続するのに適した化学物質補助接続流路５４と、片端は気体流路１０の延出端に接続するのに適し他端は気体接続流路３２（３２′）の上記他端に接続するのに適した気体補助接続流路５６とを含んでいる。化学物質補助接続流路５４及び補助接続流路５６には、夫々、第十二の開閉弁手段５８及び第十三の開閉弁手段６０が配設されている。かような補助アダプター５２が使用される場合には、第十二の開閉弁手段５８及び第十三の開閉弁手段６０は、夫々、第二の開閉弁手段１６及び第四の開閉弁手段２２の開閉に応じて開閉される。   In the filling of the liquid chemical substance and / or the supply of the liquid chemical substance as described above, the extended end of the chemical substance flow path 8 and the gas flow path in the connection unit 4 of the tank 2 due to the difference in the flow path diameter or the like It is difficult to connect the other end of the chemical substance connection flow path 30 (30 ') and the other end of the gas connection flow path 32 (32') in the connection unit 28 (28 ') with respect to the extending end of the ten. In this case, an auxiliary connection adapter 52 can be used as shown in FIG. The auxiliary connection adapter 52 has one end suitable for connecting to the extended end of the chemical substance flow path 8 and the other end suitable for connecting to the other end of the chemical substance connection flow path 30 (30 '). A gas flow connecting connection channel 54 and a gas auxiliary connection flow channel suitable for connecting one end to the extending end of the gas flow channel 10 and connecting the other end to the other end of the gas connection flow channel 32 (32 '). 56. A twelfth on-off valve means 58 and a thirteenth on-off valve means 60 are disposed in the chemical substance auxiliary connection channel 54 and the auxiliary connection channel 56, respectively. When such an auxiliary adapter 52 is used, the twelfth on-off valve means 58 and the thirteenth on-off valve means 60 are the second on-off valve means 16 and the fourth on-off valve means 22, respectively. It is opened and closed according to the opening and closing.

２：タンク
４：タンク本体
６：続ユニット
８：化学物質流路
１０：気体流路
１２：連結流路
１４：第一の開閉弁手段
１６：第二の開閉弁手段
２０：第三の開閉弁手段
２２：第四の開閉弁手段
２４：第五の開閉弁手段
２６：化学物質供給源
２８及び２８′：接続アダプター
３０及び３０′：化学物質接続流路
３２及び３２′：気体接続流路
３４及び３４′：第一の気体供給流路
３６及び３６′：第二の気体供給流路
３７及び３７′：気体供給源
３８及び３８′：第六の開閉弁手段
４０及び４０′：第七の開閉弁手段
４２及び４２′：第八の開閉弁手段
４４及び４４′：第九の開閉弁手段
４６及び４６′：第十の開閉弁手段
４８及び４８′：第十一の開閉弁手段
５０：化学物質消費装置
５２：補助接続アダプター
５４：化学物質補助接続流路
５６：気体補助接続流路
５８：第十二の開閉弁手段
６０：第十三の開閉弁手段 2: Tank 4: Tank body 6: Connection unit 8: Chemical substance flow path 10: Gas flow path 12: Connection flow path 14: First on-off valve means 16: Second on-off valve means 20: Third on-off valve Means 22: Fourth on-off valve means 24: Fifth on-off valve means 26: Chemical substance supply sources 28 and 28 ': Connection adapters 30 and 30': Chemical substance connection flow path 32 and 32 ': Gas connection flow path 34 And 34 ': first gas supply channel 36 and 36': second gas supply channel 37 and 37 ': gas supply source 38 and 38': sixth on-off valve means 40 and 40 ': seventh On-off valve means 42 and 42 ': Eighth on-off valve means 44 and 44': Ninth on-off valve means 46 and 46 ': Tenth on-off valve means 48 and 48': Eleventh on-off valve means 50: Chemical substance consumption device 52: Auxiliary connection adapter 54: Chemical Auxiliary connection channel 56: air auxiliary connection channel 58: twelfth on-off valve means 60: a thirteenth-off valve means

Claims (2)

タンク本体と該タンク本体に付設された接続ユニットとを具備する液状化学物質のためのタンクにして、
該接続ユニットは、該タンク本体内の化学物質に浸漬される浸漬部及び該タンク本体から延出する延出部を有する化学物質流路と、該タンク本体内に連通された片端から延出する気体流路と含み、
該化学物質流路の該延出部には、該タンク本体内への化学物質充填方向に見て下流側に位置する第一の開閉弁手段及び該化学物質充填方向に見て上流側に位置する第二の開閉弁手段が配設されており、
該気体流路には、該タンク本体への気体流入方向に見て下流側に位置する第三の開閉弁手段及び該気体流入方向見て上流側に位置する第四の開閉弁手段が配設されており、
更に、該化学物質流路における該第一の開閉弁手段と該第二の開閉弁手段との間の部位と該気体流路における該第三の開閉弁部材と該第四の開閉弁手段との間の部位とを連結する連結流路を含み、該連結流路には第五の開閉弁手段が配設されている、
ことを特徴とするタンク。 A tank for a liquid chemical substance comprising a tank body and a connection unit attached to the tank body,
The connection unit extends from a chemical substance flow path having an immersion part immersed in a chemical substance in the tank body and an extension part extending from the tank body, and one end communicated in the tank body. Including gas flow path,
The extension part of the chemical substance flow path has a first on-off valve means positioned on the downstream side in the chemical substance filling direction into the tank body and an upstream side in the chemical substance filling direction. Second on-off valve means is disposed,
The gas flow path is provided with a third on-off valve means located on the downstream side in the gas inflow direction to the tank body and a fourth on-off valve means located on the upstream side in the gas inflow direction. Has been
Further, a portion between the first on-off valve means and the second on-off valve means in the chemical substance flow path, the third on-off valve member and the fourth on-off valve means in the gas flow path, Including a connecting flow path for connecting a portion between, a fifth on-off valve means is disposed in the connecting flow path,
A tank characterized by that. 接続アダプターが付設された化学物質供給源及び接続アダプターが付設された化学物質消費装置に適用され、
該接続アダプターの各々は、片端は化学物質供給源又は該化学物質消費装置に接続され他端は該化学物質流路の延出端に接続される化学物質接続流路と、片端は除害手段を介して大気に連通され他端は該気体流路の延出端に接続される気体接続流路と、片端は該化学物質接続流路に接続され他端は気体供給源に接続されている第一の気体供給流路と、片端は該気体接続流路に接続され他端は該気体供給源に接続されている第二の気体供給流路とを含み、
該化学物質接続流路には、該タンク本体内に向かう方向に見て該第一の気体供給流路の該片端よりも下流側に位置する第六の開閉弁手段及び該タンク本体内に向かう方向に見て該第一の気体供給流路の該片端よりも上流側に位置する第七の開閉弁手段が配設されており、
該気体接続流路には、該タンク本体内に向かう方向に見て該第二の気体供給流路の該片端よりも下流側に位置する第八の開閉弁手段及び該タンク本体内に向かう方向に見て該第二の気体供給流路の該片端よりも上流側に位置する第九の開閉弁手段が配設されており、
該第一の気体供給流路には、第十の開閉弁手段が配設されており、
該第二の気体供給流路には、第十一の開閉弁手段が配設されている、
請求項１記載のタンク。 Applied to chemical supply sources with connection adapters and chemical consumption devices with connection adapters,
Each of the connection adapters has one end connected to a chemical substance supply source or the chemical substance consuming apparatus and the other end connected to an extended end of the chemical substance flow path, and one end is a detoxifying means. The other end is connected to the chemical substance connection channel and the other end is connected to the gas supply source. A first gas supply flow path, and a second gas supply flow path having one end connected to the gas connection flow path and the other end connected to the gas supply source,
The chemical substance connection flow path is directed to the inside of the tank body and the sixth on-off valve means positioned on the downstream side of the one end of the first gas supply flow path when viewed in the direction toward the tank body. A seventh on-off valve means located upstream from the one end of the first gas supply flow path when viewed in the direction is disposed;
The gas connection channel has an eighth on-off valve means positioned downstream from the one end of the second gas supply channel when viewed in the direction toward the tank body and a direction toward the tank body. A ninth on-off valve means located on the upstream side of the one end of the second gas supply flow path is disposed,
A tenth on-off valve means is disposed in the first gas supply flow path,
The eleventh on-off valve means is disposed in the second gas supply flow path.
The tank according to claim 1.
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JP6420702B2 (en) 2018-11-07
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CN107108117A (en) 2017-08-29
WO2016152342A1 (en) 2016-09-29

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