JP2016151633A - Pellicle-housing container - Google Patents

Pellicle-housing container Download PDF

Info

Publication number
JP2016151633A
JP2016151633A JP2015028273A JP2015028273A JP2016151633A JP 2016151633 A JP2016151633 A JP 2016151633A JP 2015028273 A JP2015028273 A JP 2015028273A JP 2015028273 A JP2015028273 A JP 2015028273A JP 2016151633 A JP2016151633 A JP 2016151633A
Authority
JP
Japan
Prior art keywords
pellicle
storage container
pellicle storage
water absorption
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015028273A
Other languages
Japanese (ja)
Inventor
一敏 関原
Kazutoshi Sekihara
一敏 関原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2015028273A priority Critical patent/JP2016151633A/en
Priority to KR1020160009839A priority patent/KR20160101661A/en
Priority to TW105103070A priority patent/TWI574102B/en
Priority to CN201610076428.3A priority patent/CN105883122A/en
Publication of JP2016151633A publication Critical patent/JP2016151633A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
    • B65D1/02—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents
    • B65D1/0207—Bottles or similar containers with necks or like restricted apertures, designed for pouring contents characterised by material, e.g. composition, physical features

Abstract

PROBLEM TO BE SOLVED: To provide a pellicle-housing container which is small in dimension change over time, does not deteriorate interior cleanliness even if it is used for a long time, and is favorable for a large pellicle with at least one side exceeding 1,000 mm in length.SOLUTION: A pellicle-housing container 10 for housing a rectangular pellicle with at least one side exceeding 1,000 mm in length comprises a pellicle-housing container main body 11 for placing a pellicle, and a lid body 12 which are composed of a resin material having a water absorption percentage of not greater than 0.2% (by JIS K7209, A method for a material thickness of 3 mm and an absorption time of 24 hours). The resin material favorably has a water absorption percentage after 30 days passage of not greater than 0.5% (by JIS K7209, A method for a material thickness of 3 mm), and the pellicle-housing container main body 11 may be composed of a metal material instead of a resin material.SELECTED DRAWING: Figure 2

Description

本発明は、半導体デバイス、ＩＣパッケージ、プリント基板、液晶ディスプレイまたは有機ＥＬディスプレイ等を製造する際のゴミよけとして使用されるペリクルの収納容器であって、少なくとも一つの辺長が１０００ｍｍを超える大型のペリクルに好適なペリクル収納容器に関するものである。   The present invention relates to a pellicle storage container used as a dust guard when manufacturing a semiconductor device, an IC package, a printed circuit board, a liquid crystal display, an organic EL display, or the like, and has a large size with at least one side length exceeding 1000 mm. The present invention relates to a pellicle storage container suitable for the pellicle.

ＬＳＩ、超ＬＳＩなどの半導体或は液晶ディスプレイ等の製造においては、半導体ウエハあるいは液晶用ガラス板に紫外光を照射してパターンを作製するが、この時に用いるフォトマスクにゴミが付着していると、このゴミが紫外光を遮ったり、反射するために、転写したパターンの変形、短絡などが発生し、品質が損なわれるという問題がある。   In manufacturing semiconductors such as LSI and VLSI, or liquid crystal displays, patterns are created by irradiating semiconductor wafers or glass plates for liquid crystals with ultraviolet light, and dust is attached to the photomask used at this time. Since the dust blocks or reflects the ultraviolet light, there is a problem that the transferred pattern is deformed, short-circuited, and the quality is deteriorated.

このため、これらの作業は通常クリーンルームで行われているが、それでもフォトマスクを常に清浄に保つことが難しい。そこで、フォトマスク表面にゴミよけとしてペリクルを貼り付けした後に露光を行っている。この場合、異物はフォトマスクの表面には直接付着せず、ペリクル上に付着するため、リソグラフィー時に焦点をフォトマスクのパターン上に合わせておけば、ペリクル上の異物は転写に無関係となる。   For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, exposure is performed after a pellicle is attached to the surface of the photomask to prevent dust. In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer.

このペリクルは、一般に、光を良く透過させるニトロセルロース、酢酸セルロースあるいはフッ素樹脂などからなる透明なペリクル膜を、アルミニウム、ステンレス鋼、エンジニアリングプラスチックなどからなるペリクルフレームの上端面に接着して構成される。また、ペリクルフレームの下端には、フォトマスクに装着するためのポリブデン樹脂、ポリ酢酸ビニル樹脂、アクリル樹脂、シリコーン樹脂等からなる粘着層、及び粘着層の保護を目的とした離型層（セパレータ）が設けられる。   This pellicle is generally constructed by adhering a transparent pellicle film made of nitrocellulose, cellulose acetate, fluororesin, or the like that transmits light well to the upper end surface of a pellicle frame made of aluminum, stainless steel, engineering plastic, or the like. . At the lower end of the pellicle frame, there is an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. for mounting on a photomask, and a release layer (separator) for the purpose of protecting the adhesive layer Is provided.

一方、このようなペリクル、特に、辺長が１０００ｍｍを超えるような大型のペリクルを収納するためのペリクル収納容器は、ペリクルを載置するペリクル収納容器本体とそれに周縁部で嵌合し密封する蓋体の部材から構成されている。そして、これら部材は、厚さ２〜８ｍｍ程度の樹脂板を真空成形または圧空成形することにより製作されているが、この製法は、大型のものも一体成形できるために、内部に発塵源が少ないことに加え、生産性が高く低コストで製造できるという利点がある。   On the other hand, a pellicle storage container for storing such a pellicle, in particular, a large pellicle having a side length exceeding 1000 mm, includes a pellicle storage container main body on which the pellicle is placed and a lid that fits and seals at the peripheral part. It is composed of body members. These members are manufactured by vacuum forming or pressure forming a resin plate having a thickness of about 2 to 8 mm. However, since this method can also be integrally formed with a large-sized member, a dust generation source is provided inside. In addition to being small, there is an advantage that it can be manufactured at high cost with high productivity.

ペリクル収納容器本体は、付着した異物の視認性向上のために、黒色が良いとされており、また蓋体は、内部に収納したペリクルを視認できるように透明または有色半透明が良いとされている（特許文献１参照）。そして、このような観点から、殆どの場合、収納容器本体の素材としては、ＡＢＳ樹脂が、また蓋体の素材としては、ＡＢＳ樹脂またはアクリル樹脂が用いられている。   The pellicle storage container body should be black to improve the visibility of attached foreign matter, and the lid should be transparent or colored translucent so that the pellicle stored inside can be visually recognized. (See Patent Document 1). From such a viewpoint, in most cases, ABS resin is used as the material of the storage container body, and ABS resin or acrylic resin is used as the material of the lid.

そして、近年のディスプレイパネルの大型化に伴って、ペリクルのサイズの大型化も進み、その辺長が１０００ｍｍを超えるものも多く使用されるようになってきているが、その一方で、ペリクルの大型化に伴って、ペリクル収納容器については、その経時的な寸法変化の問題が顕著になっている。そのため、例えば、特許文献２には、この対策として、樹脂製の容器本体と組み合わせる補強体の構造が提案されている。   With the recent increase in size of display panels, the size of the pellicle has also increased, and many pellicles with a side length exceeding 1000 mm have come to be used. As the size of the pellicle storage container increases, the problem of dimensional changes over time has become more prominent. Therefore, for example, Patent Document 2 proposes a structure of a reinforcing body combined with a resin container body as a countermeasure.

しかしながら、ペリクル収納容器の経時的な寸法変化は、成形前の素材自体の癖、吸湿、成形時に発生した内部応力の緩和、また温度などの使用環境条件によるものなど様々な要因が複合化されて生じると考えられるため、その解決が困難であるという問題がある。   However, the dimensional change over time of the pellicle storage container is a combination of various factors such as wrinkles of the material before molding, moisture absorption, relaxation of internal stress generated during molding, and due to environmental conditions such as temperature. There is a problem that it is difficult to solve the problem.

特開２００１−１００３９４JP 2001-1000039 特開２０１３−２０５６９０JP2013-205690

そして、この経時的な寸法変化が生じてペリクル収納容器本体と蓋体との嵌合がずれると、それらの間隙が大きくなり、外部からペリクル収納容器内に異物が侵入するほか、擦れが生じて発塵する恐れがある。また、ペリクルを固定するために内部に位置決め手段を有するペリクル収納容器では、その寸法変化によって位置が正規の位置から外れてしまうために、ペリクルが収納できなくなる事態が発生したり、がたつきが大きくなって異物が発生しやすくなるという問題がある。   When the dimensional change with time occurs and the fitting between the pellicle storage container main body and the lid is displaced, the gap between them increases, foreign matter enters the pellicle storage container from the outside, and rubbing occurs. There is a risk of dust generation. In addition, in the pellicle storage container having a positioning means for fixing the pellicle, the position of the pellicle storage container deviates from the normal position due to the dimensional change, so that the pellicle cannot be stored or rattling occurs. There is a problem that it becomes large and foreign matter is easily generated.

そこで、本発明は、上記の問題に鑑みなされたものであり、その目的は、経時的な寸法変化が小さく、長期間使用しても内部の清浄度が低下しない、少なくとも一つの辺長が１０００ｍｍを超える大型のペリクルに好適なペリクル収納容器を提供することである。   Therefore, the present invention has been made in view of the above problems, and its purpose is that the dimensional change over time is small and the internal cleanliness does not decrease even when used for a long period of time. At least one side length is 1000 mm. It is an object to provide a pellicle storage container suitable for a large pellicle exceeding the above.

本発明者らは、上記の目的を達成するために鋭意検討を行ったところ、経時的な寸法変化に影響を及ぼす様々な要因の中で、特にペリクル収納容器に用いられる素材の吸水率が経時的な寸法変化に大きく影響することが判明した。そこで、さらに素材の吸水率について検討を重ねたところ、吸水率０．２％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ、２４ｈ）の樹脂材料の場合に、経時的な寸法変化を極めて小さく抑えることができることを知見し、本発明に至ったものである。   The inventors of the present invention have made extensive studies to achieve the above-described object. As a result, among various factors that affect the dimensional change over time, the water absorption rate of the material used for the pellicle storage container is particularly time-dependent. It has been found that there is a great influence on the dimensional change. Therefore, when the water absorption rate of the material was further examined, in the case of a resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness 3 mm, 24 h), the dimensional change over time is extremely small. The present inventors have found that this can be achieved, and have reached the present invention.

すなわち、本発明は、少なくとも一つの辺長が１０００ｍｍを超える矩形のペリクルを収納するペリクル収納容器であって、ペリクルを載置するペリクル収納容器本体と蓋体が吸水率０．２％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ、２４ｈ）の樹脂材料で構成されていることを特徴とする。   That is, the present invention is a pellicle storage container for storing a rectangular pellicle having at least one side length exceeding 1000 mm, wherein the pellicle storage container main body and the lid for mounting the pellicle have a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness 3 mm, 24 h).

また、本発明のペリクル収納容器では、その蓋体は、吸水率０．２％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ、２４ｈ）の樹脂材料で構成され、その本体は、樹脂材料に替えて金属材料で構成されていてもよい。そして、本発明で用いる樹脂材料は、その吸水率が３０日経過後で０．５％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ）であるものが好ましい。   In the pellicle storage container of the present invention, the lid is made of a resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness 3 mm, 24 h), and the main body is replaced with the resin material. And may be made of a metal material. The resin material used in the present invention preferably has a water absorption of 0.5% or less after 30 days (JIS K7209, method A, material thickness 3 mm).

本発明によれば、ペリクル収納容器の経時的な寸法変化が極めて小さく、ペリクル収納容器本体と蓋体との嵌合が適切に保持されるとともに、ペリクル収納容器内に設置したペリクル固定部品の位置変動もないため、収納したペリクルの清浄度を長期間に渡って保つことができるという効果がある。   According to the present invention, the dimensional change of the pellicle storage container over time is extremely small, the fitting between the pellicle storage container main body and the lid is appropriately held, and the position of the pellicle fixing component installed in the pellicle storage container Since there is no fluctuation, there is an effect that the cleanness of the stored pellicle can be maintained over a long period of time.

図１は、本発明のペリクル収納容器の概要を示す平面図である。FIG. 1 is a plan view showing an outline of a pellicle storage container of the present invention. 図２は、本発明のペリクル収納容器の概要を示す図１のＡＡ断面図である。2 is a cross-sectional view taken along the line AA in FIG. 1 showing an outline of the pellicle storage container of the present invention. 図３は、本発明のペリクル収納容器の概要を示す図１のＢＢ断面図である。3 is a cross-sectional view taken along the line BB of FIG. 1 showing an outline of the pellicle storage container of the present invention. 図４は、本発明のペリクル収納容器の蓋体を外した平面図である。FIG. 4 is a plan view of the pellicle storage container according to the present invention with the lid removed. 図５は、本発明のペリクル収納容器の斜視図である。FIG. 5 is a perspective view of the pellicle storage container of the present invention.

以下、本発明の一実施形態を図面に基づいて詳細に説明するが、本発明はこれに限定されるものではない。   Hereinafter, although one embodiment of the present invention is described in detail based on a drawing, the present invention is not limited to this.

本発明は、経時的な寸法変化による内部の清浄度低下が問題となる全てのペリクル収納容器に適用することができるが、特に、辺長が１０００ｍｍを超える極めて大型のペリクルを収納するペリクル収納容器として好適なものである。   The present invention can be applied to all pellicle storage containers in which deterioration of the internal cleanliness due to dimensional changes over time is a problem, and in particular, a pellicle storage container that stores an extremely large pellicle having a side length exceeding 1000 mm. Is suitable.

本発明のペリクル収納容器１０は、ペリクル収納容器本体１１と蓋体１２から構成されている。ペリクル収納容器本体１１は、ペリクル２０を載置するものであり、蓋体１２は、ペリクル収納容器本体１１に周縁部で嵌合し、密閉することでペリクル２０を外部の塵埃から保護するものである。また、ペリクル収納容器本体１１上に載置されるペリクル２０は、フレーム側面に設けられた非貫通の孔（図示しない）に挿入したピン１３と、そのピンを支持するピン支持手段１４からなる固定手段によりペリクル収納容器本体１１上に固定されている。   A pellicle storage container 10 according to the present invention includes a pellicle storage container main body 11 and a lid 12. The pellicle storage container main body 11 is for mounting the pellicle 20, and the lid body 12 is fitted to the pellicle storage container main body 11 at the peripheral edge and sealed to protect the pellicle 20 from external dust. is there. The pellicle 20 placed on the pellicle storage container main body 11 is fixed by a pin 13 inserted into a non-through hole (not shown) provided on the side surface of the frame and a pin support means 14 for supporting the pin. It is fixed on the pellicle storage container main body 11 by means.

本発明のペリクル収納容器本体１１及び蓋体１２の素材は、ＪＩＳ Ｋ７２０９（Ａ法、２４ｈ、素材厚３ｍｍ）の測定方法において、吸水率０．２％以下の樹脂材料である。吸水は、樹脂材料を構成する分子の網目の中に水分が侵入する現象であるが、吸水率が０．２％を超えるものでは特に寸法変化が大きくなり好ましくない。このような吸水率の条件を満たす樹脂材料としては、硬質ＰＶＣ、ＰＥ、ＰＰ、ＰＣなどが挙げられる。また、ＡＢＳなど吸水率の大きい材料であっても、フィラーを混入することにより吸水率を低下させることもできる。   The material of the pellicle storage container body 11 and the lid body 12 of the present invention is a resin material having a water absorption rate of 0.2% or less in the measurement method of JIS K7209 (A method, 24h, material thickness 3 mm). Water absorption is a phenomenon in which water penetrates into the network of molecules constituting the resin material. However, when the water absorption exceeds 0.2%, the dimensional change is particularly large, which is not preferable. Examples of the resin material that satisfies such a water absorption rate include hard PVC, PE, PP, and PC. Moreover, even if it is a material with a big water absorption rate, such as ABS, a water absorption rate can also be reduced by mixing a filler.

また、この素材は、その吸水率が長期的にも低いことが求められるために、ＪＩＳ Ｋ７２０９（Ａ法、素材厚３ｍｍ）の測定方法において、３０日経過後で０．５％以下の樹脂材料であることがより好ましい。ペリクル収納容器は、湿度のある環境下で使用されるものであり、如何に吸水性の低い材料を用いても吸水自体を避けることはできない。ペリクル収納容器を製造した後に、時間の経過とともに吸水は進行するので、実際のペリクル収納容器は、水分量がほぼ飽和した状態で使用されることになる。この飽和した状態の吸水率が低く、なおかつ初期の吸水率との差が小さければ、寸法安定性が高いと考えることができる。その目安として、３０日経過後で０．５％以下の吸水率とすることが良い。そして、この条件を満たす樹脂材料としては、前記したものと同様に、硬質ＰＶＣ、ＰＥ、ＰＰ、ＰＣなどが挙げられる。   In addition, since this material is required to have a low water absorption rate in the long term, the measurement method of JIS K7209 (A method, material thickness 3 mm) is a resin material of 0.5% or less after 30 days. More preferably. The pellicle storage container is used in a humid environment, and water absorption itself cannot be avoided no matter how a low water absorption material is used. Since water absorption proceeds with the lapse of time after the pellicle storage container is manufactured, the actual pellicle storage container is used in a state where the amount of water is almost saturated. If the saturated water absorption is low and the difference from the initial water absorption is small, it can be considered that the dimensional stability is high. As a guideline, the water absorption rate should be 0.5% or less after 30 days. And as a resin material which satisfy | fills this condition, hard PVC, PE, PP, PC etc. are mentioned similarly to what was mentioned above.

そして、この素材を用いたペリクル収納容器本体１１及び蓋体１２は、厚さ２〜８ｍｍの樹脂板を真空成形または圧空成形して製作されると、品質やコストの点から好適である。   And if the pellicle storage container main body 11 and the cover body 12 using this material are manufactured by vacuum forming or pressure forming a resin plate having a thickness of 2 to 8 mm, it is preferable from the viewpoint of quality and cost.

ペリクル収納容器１０の経時的な寸法変化の要因としては、様々なものが挙げられるが、中でも、ペリクル収納容器１０に用いられる素材の吸水率が経時的な寸法変化に大きく影響を及ぼすことから、本発明の条件を満足する樹脂材料を用いれば、経時的な寸法変化を大幅に低減させることができる。その結果、長期間に渡ってペリクル収納容器の嵌合状態やペリクルの固定状態が変動なく維持されるとともに、ペリクル収納容器内の清浄度を保つことができるので、実用上支障のないペリクル収納容器として、収納したペリクルの品質を良好に保つことができる。   Various factors can be cited as a cause of the dimensional change of the pellicle storage container 10 over time, and among them, the water absorption rate of the material used for the pellicle storage container 10 greatly affects the dimensional change over time. If a resin material that satisfies the conditions of the present invention is used, dimensional changes over time can be greatly reduced. As a result, the fitting state of the pellicle storage container and the fixed state of the pellicle can be maintained without fluctuations over a long period of time, and the cleanliness within the pellicle storage container can be maintained, so that there is no practical problem. As a result, the quality of the stored pellicle can be kept good.

本発明の樹脂材料としては、その吸水率が上記範囲である他に、異物付着を減らすために、樹脂中に帯電防止成分を混練するか、その表面に塗装するなどして、帯電防止性能を持たせたものが好ましい。また、ハロゲン化合物などの難燃剤を添加するなどして難燃性を付与させたものとするか、樹脂自体が難燃性を有するものも好ましい。   As the resin material of the present invention, in addition to the water absorption rate being in the above range, in order to reduce the adhesion of foreign matter, antistatic components are kneaded in the resin, or coated on the surface, etc. What was provided is preferable. In addition, it is preferable that flame retardancy is imparted by adding a flame retardant such as a halogen compound or the resin itself has flame retardancy.

本発明のように、少なくとも一つの辺長が１０００ｍｍを超える本発明のペリクル収納容器の場合、可燃物としての容積、重量も大きいために、その素材が難燃性であれば安全上からも利点がある。これらの条件を満たす好適な樹脂としては、例えば、ＰＣ、無機フィラーを混入したＰＶＣやＡＢＳ等が挙げられる。   In the case of the pellicle storage container of the present invention in which at least one side length exceeds 1000 mm as in the present invention, the volume and weight as a combustible material are large. There is. Examples of suitable resins that satisfy these conditions include PC, PVC mixed with inorganic filler, ABS, and the like.

また、ペリクル収納容器本体１１及び蓋体１２には、必要に応じて、リブなどの補強構造を設けることができるし、金属または樹脂製の補強手段、取扱いのためのハンドルや、蓋体を固定するバックルなどを設けることも良い。   The pellicle storage container main body 11 and the lid 12 can be provided with a reinforcing structure such as a rib, if necessary, and a metal or resin reinforcing means, a handle for handling, or a lid is fixed. It is also possible to provide a buckle or the like.

さらに、ペリクル辺長が１５００ｍｍを超える極めて大型な場合は、ペリクル収納容器に特に剛性が要求されるため、蓋体１２だけを樹脂製とし、ペリクル収納容器本体１１を金属製とすることが特に好ましい。ペリクル収納容器本体１１を金属製とする場合は、アルミニウム合金、マグネシウム合金などの軽量材料のほか、鉄鋼、ステンレス鋼などの高剛性材料を使用することができる。   Furthermore, when the pellicle side length is very large exceeding 1500 mm, it is particularly preferable that the pellicle storage container is particularly rigid, so that only the lid 12 is made of resin and the pellicle storage container body 11 is made of metal. . In the case where the pellicle storage container body 11 is made of metal, high-rigidity materials such as steel and stainless steel can be used in addition to lightweight materials such as aluminum alloy and magnesium alloy.

そして、この場合の成形加工方法としては、薄板を曲げ加工、プレス成型、溶接などして造形するか、または鋳造を利用しても良い。その表面は、防錆、発塵防止のため塗装を施すことが好ましく、特に、帯電防止性能を付与することに加えて付着異物の視認性向上のために、黒色とされていることが好ましい。   And as a shaping | molding method in this case, you may shape | mold a thin plate by bending, press molding, welding, etc., or you may utilize casting. The surface is preferably coated to prevent rust and dust generation, and in particular, it is preferable to be black in order to improve the visibility of attached foreign matter in addition to imparting antistatic performance.

ペリクル収納容器本体１１にペリクル２０を固定するための固定手段としては、公知の様々な方法が適用できる。図４に示す実施形態では、ペリクル収納容器本体１１上にピン支持手段１４を設け、それに支持されたピン１３をペリクルフレーム側面に設けた非貫通の孔（図示しない）に挿入することでペリクル２０を固定しているが、この他の公知の方法であっても良い。   Various known methods can be applied as fixing means for fixing the pellicle 20 to the pellicle storage container body 11. In the embodiment shown in FIG. 4, the pin support means 14 is provided on the pellicle storage container main body 11, and the pin 13 supported by the pin support means 14 is inserted into a non-through hole (not shown) provided on the side surface of the pellicle frame. However, other known methods may be used.

また、図４に示す実施形態では、ペリクルフレーム２１の下面にマスク粘着層２２が設けられ、その下にはマスク粘着層２２を保護するセパレータ２３が取り付けられているが、マスク粘着層２２がペリクル収納容器本体１１に接触しないように、ペリクルフレーム２１を支持する手段等を別に設けて、セパレータを省略した構成とすることも良い。   In the embodiment shown in FIG. 4, the mask adhesive layer 22 is provided on the lower surface of the pellicle frame 21, and the separator 23 for protecting the mask adhesive layer 22 is attached below the mask adhesive layer 22. A means for supporting the pellicle frame 21 may be provided separately so as not to come into contact with the storage container main body 11, and the separator may be omitted.

以下、本発明の実施例について詳細に説明する。   Examples of the present invention will be described in detail below.

実施例では、先ず、ペリクル収納容器本体１１と蓋体１２を厚さ５ｍｍのＰＣ（ポリカーボネート）板で真空成形にて製造したが、この真空成形に先立って、このポリカーボネート板から６０ｘ６０ｍｍのサンプルを切り出して、片面を切削して厚さ３ｍｍに仕上げた後に、ＪＩＳ Ｋ７２０９（Ａ法、２４ｈ）に従って、２４ｈ後の吸水率を測定したところ、その値は０．１５％であった。また、さらに、３０日後の吸水率を測定したところ、その値は０．３４％であった。   In the embodiment, first, the pellicle storage container body 11 and the lid body 12 were manufactured by vacuum forming with a PC (polycarbonate) plate having a thickness of 5 mm. Prior to this vacuum forming, a 60 × 60 mm sample was cut out from the polycarbonate plate. Then, after one side was cut and finished to a thickness of 3 mm, the water absorption after 24 h was measured according to JIS K7209 (A method, 24 h), and the value was 0.15%. Furthermore, when the water absorption after 30 days was measured, the value was 0.34%.

次に、真空成形後のペリクル収納容器本体１１と蓋体１２については、その周囲をＮＣルーターにて切削加工して仕上げて、その表面に帯電防止塗料（商品名；セプルジーダ、信越ポリマー（株））を塗布して硬化させた。また、ペリクル収納容器本体１１上には、ピン支持手段１３を外面からボルト固定（図示しない）にて取り付けた。このように製作したペリクル収納容器１０の寸法は、外寸１１００ｘ１２８０ｘ高さ１２０ｍｍである。なお、ペリクル収納容器本体１１と蓋体１２の嵌合部は、各辺ともその間隙が０．３〜０．５ｍｍになるように調整した。   Next, about the pellicle storage container main body 11 and the lid 12 after vacuum forming, the periphery is cut by an NC router and finished, and an antistatic coating (trade name; Sepulzeda, Shin-Etsu Polymer Co., Ltd.) is applied to the surface. ) Was applied and cured. Further, on the pellicle storage container main body 11, a pin support means 13 was attached from the outer surface by bolt fixing (not shown). The size of the pellicle storage container 10 manufactured in this way is 1100 × 1280 × 120 mm in height. The fitting portion between the pellicle storage container main body 11 and the lid body 12 was adjusted so that the gap between each side was 0.3 to 0.5 mm.

一方、本発明のペリクル収納容器１０に収納するペリクル２０を次の仕様で製作した。すなわち、ペリクルフレーム２１は、Ａ５０５２アルミニウム合金を機械切削にて加工したもので、その寸法を外寸９１０ｘ１１３０ｍｍ、内寸８９０ｘ１１１０ｍｍ、高さ５．８ｍｍとし、その表面には黒色アルマイト処理を施した。また、各長辺中央付近には直径１．５ｍｍの通気孔を４箇所（図示しない）、各辺の角部付近に直径２．５ｍｍの非貫通の治具孔（図示しない）を設けた。   On the other hand, the pellicle 20 to be stored in the pellicle storage container 10 of the present invention was manufactured with the following specifications. That is, the pellicle frame 21 was obtained by machining an A5052 aluminum alloy by mechanical cutting. Four vent holes (not shown) having a diameter of 1.5 mm were provided near the center of each long side, and non-through jig holes (not shown) having a diameter of 2.5 mm were provided near the corners of each side.

次に、このペリクルフレーム２１の下面には、マスク粘着層２２としてシリコーン粘着剤（商品名；ＫＲ−３７００、信越化学工業（株））を厚さ１．３ｍｍで形成し、その表面には離型剤を塗布したＰＥＴフィルムからなるセパレータ２３を取り付けた。また、ペリクルフレーム２１側面の通気孔は、ＰＴＦＥ多孔質膜製のフィルタをアクリル粘着剤にて貼り付けた（図示しない）。さらに、ペリクルフレーム２１の上面には、ペリクル膜接着層２４としてシリコーン粘着剤（商品名；ＫＲ−３７００、信越化学工業（株））を塗布し、その上にフッ素樹脂（商品名；サイトップ、旭硝子（株））からなる厚さ４．５μｍのペリクル膜２５を張設した。   Next, a silicone adhesive (trade name: KR-3700, Shin-Etsu Chemical Co., Ltd.) having a thickness of 1.3 mm is formed as a mask adhesive layer 22 on the lower surface of the pellicle frame 21 and the surface thereof is separated. A separator 23 made of a PET film coated with a mold was attached. Further, the vent hole on the side surface of the pellicle frame 21 was a PTFE porous membrane filter attached with an acrylic adhesive (not shown). Further, a silicone pressure-sensitive adhesive (trade name: KR-3700, Shin-Etsu Chemical Co., Ltd.) is applied to the upper surface of the pellicle frame 21 as the pellicle film adhesive layer 24, and a fluororesin (trade name; Cytop, A pellicle film 25 having a thickness of 4.5 μm made of Asahi Glass Co., Ltd. was stretched.

このように製作したペリクル２０を異物検査の上、ピン１３とピン支持手段１４にてペリクル収納容器本体１１上に固定し、蓋体１２で密閉した。その後に、嵌合部周囲をＰＶＣ製粘着テープにてシールし、帯電防止ポリエチレン製袋にて梱包した。なお、ペリクル２０の収納に際し、ペリクル収納容器１０をＣｌａｓｓ１０のクリーンルーム内で界面活性剤と純水にて良く洗浄処理し、乾燥した。   The pellicle 20 produced in this way was inspected for foreign matter, fixed on the pellicle storage container body 11 with the pins 13 and the pin support means 14, and sealed with the lid 12. Thereafter, the periphery of the fitting portion was sealed with PVC adhesive tape and packed in an antistatic polyethylene bag. When storing the pellicle 20, the pellicle storage container 10 was thoroughly washed with a surfactant and pure water in a Class 10 clean room and dried.

最後に、このようにペリクル２０を収納したペリクル収納容器１０を室温２２〜２８℃、湿度３０〜５５％の範囲に空調された室内に搬送して、１年間静置保管した。   Finally, the pellicle storage container 10 storing the pellicle 20 as described above was transported into a room that was air-conditioned at a room temperature of 22 to 28 ° C. and a humidity of 30 to 55%, and was left to stand for one year.

そして、1年後にこのペリクル収納容器１０をＣｌａｓｓ１０のクリーンルームに搬入し、開梱して内部の状況を確認したところ、ペリクル収納容器本体１１と蓋体１２の嵌合状態に特に不具合がなく、スムーズに開閉をすることができた。また、嵌合部周辺をハロゲンランプにて照射しながら目視観察したところ、特に強く擦れた痕跡などは見られなかった。さらに、収納したペリクル２０の異物検査を行ったところ、付着異物や損傷は全く見られず、正常な状態が保たれていた。   After one year, the pellicle storage container 10 was carried into a Class 10 clean room, unpacked, and the internal condition was confirmed. As a result, the pellicle storage container body 11 and the lid 12 were not particularly in troublesome and smooth. It was possible to open and close. Further, when the periphery of the fitting portion was visually observed while irradiating with a halogen lamp, no particularly rubbing traces were found. Furthermore, when the foreign matter inspection of the housed pellicle 20 was performed, no adhered foreign matter or damage was found, and the normal state was maintained.

比較例Comparative example

比較例では、先ず、実施例と全く同様にして、ペリクル収納容器を製造した。この比較例は、ペリクル収納容器本体の材質に厚さ５ｍｍのＡＢＳ（アクリロニトリルブタジエンスチレン）樹脂を、また蓋体に厚さ５ｍｍのＰＭＭＡ（アクリル）樹脂を用いている点だけが実施例と異なっている。なお、成形に用いた金型は、各素材の熱膨張率に合わせて寸法の微調整を行い、ペリクル収納容器本体と蓋体の間隙が各辺において０．３〜０．５ｍｍとなるように調整した。   In the comparative example, first, a pellicle storage container was manufactured in exactly the same manner as in the example. This comparative example differs from the example only in that 5 mm thick ABS (acrylonitrile butadiene styrene) resin is used for the material of the pellicle storage container body and 5 mm thick PMMA (acrylic) resin is used for the lid. Yes. The mold used for the molding is finely adjusted according to the thermal expansion coefficient of each material so that the gap between the pellicle storage container body and the lid is 0.3 to 0.5 mm on each side. It was adjusted.

そして、この比較例のペリクル収納容器についても、上記実施例と同じ工程にて１年間の保管試験を行った。すなわち、ペリクル収納容器本体と蓋体の成形に先立って、この素材の吸水率をＪＩＳ Ｋ７２０９（Ａ法）に従って測定したところ、ペリクル収納容器本体に用いたＡＢＳ樹脂は、２４ｈ後で０．３％であり、３０日後で０．８％であった。一方、蓋体に用いたアクリル樹脂は、２４ｈ後で０．３％であり、３０日後で１．６％であった。   And also about the pellicle storage container of this comparative example, the storage test for one year was done in the same process as the said Example. That is, prior to molding of the pellicle storage container body and the lid, the water absorption rate of this material was measured according to JIS K7209 (A method). The ABS resin used for the pellicle storage container body was 0.3% after 24 hours. It was 0.8% after 30 days. On the other hand, the acrylic resin used for the lid was 0.3% after 24 hours and 1.6% after 30 days.

次に、実施例と同じ仕様のペリクルを異物検査の上、ピンとピン支持手段にてペリクル収納容器本体上に固定し、蓋体で密閉した。そして、嵌合部周囲をＰＶＣ製粘着テープにてシールし、帯電防止ポリエチレン製袋にて梱包した。なお、ペリクル２０の収納に際し、ペリクル収納容器１０をＣｌａｓｓ１０のクリーンルーム内で界面活性剤と純水にて良く洗浄処理し、乾燥した。そして、このペリクル収納容器を、実施例と同じく室温２２〜２８℃、湿度３０〜５５％の範囲に空調された室内に搬入し、１年間静置保管した。   Next, a pellicle having the same specifications as in the example was inspected for foreign matter, fixed on the pellicle storage container main body with pins and pin support means, and sealed with a lid. And the fitting part periphery was sealed with the adhesive tape made from PVC, and it packed with the bag made from an antistatic polyethylene. When storing the pellicle 20, the pellicle storage container 10 was thoroughly washed with a surfactant and pure water in a Class 10 clean room and dried. And this pellicle storage container was carried into the room air-conditioned in the range of room temperature 22-28 degreeC and humidity 30-55% like the Example, and left still for one year.

そして、1年後にこの梱包体をＣｌａｓｓ１０のクリーンルームに搬入し、開梱して内部の状況を確認したところ、蓋体とペリクル収納容器本体との嵌合がきつくなっていた。また、蓋体は、その一部が反り上がって、周囲をシールした粘着テープを引き剥がしながらペリクル収納容器本体から若干持ち上がっている状況であった。そして、取り外した蓋体の寸法を確認したところ、長辺方向で約５ｍｍ、短辺方向で約４ｍｍの伸びが観察された。ペリクル収納容器本体では、長辺方向で約１．５ｍｍ、短辺方向も約１．５ｍｍの伸びが観察された。   Then, after one year, this package was carried into a Class 10 clean room, unpacked, and the internal condition was confirmed. As a result, the lid and the pellicle storage container body were tightly fitted. Further, a part of the lid was warped, and the lid was slightly lifted from the pellicle storage container main body while peeling off the adhesive tape whose periphery was sealed. Then, when the dimensions of the removed lid were confirmed, an extension of about 5 mm in the long side direction and about 4 mm in the short side direction was observed. In the pellicle storage container main body, an extension of about 1.5 mm in the long side direction and about 1.5 mm in the short side direction was observed.

また、収納したペリクル２０の異物検査を行ったところ、膜面にφ３〜５μｍの異物が多数で、φ１０〜２０μｍの異物が５個付着していたが、これは、ペリクル収納容器本体と蓋体との嵌合の悪化により、ペリクル収納容器の内外が通気して、内部が汚染されたことが原因であると推察された。また、ピンを挿入していたペリクルフレームの治具孔周縁部には多数の粉塵が付着していたが、これは、ペリクル収納容器本体の寸法変化により、ピンの嵌合位置がずれてペリクルフレームと擦れが生じたことが原因であると推察された。   Further, when the foreign matter inspection of the stored pellicle 20 was performed, there were a large number of foreign matters having a diameter of 3 to 5 μm and five foreign matters having a diameter of 10 to 20 μm adhered to the film surface. It was inferred that this was caused by the inside and outside of the pellicle storage container being ventilated and the inside being contaminated due to the deterioration of the fitting. Also, a lot of dust adhered to the periphery of the jig hole of the pellicle frame where the pin was inserted. This is because the fitting position of the pin is shifted due to the dimensional change of the pellicle storage container body. It was inferred that this was caused by rubbing.

１０ ペリクル収納容器
１１ ペリクル収納容器本体
１２ 蓋体
１３ ピン
１４ ピン支持手段
２０ ペリクル
２１ ペリクルフレーム
２２ マスク粘着層
２３ セパレータ
２４ ペリクル膜接着層
２５ ペリクル膜
10 Pellicle storage container 11 Pellicle storage container body 12 Lid 13 Pin 14 Pin support means 20 Pellicle 21 Pellicle frame 22 Mask adhesive layer 23 Separator 24 Pellicle film adhesive layer 25 Pellicle film

Claims (3)

少なくとも一つの辺長が１０００ｍｍを超える矩形のペリクルを収納するペリクル収納容器であって、前記ペリクルを載置するペリクル収納容器本体と、その周縁部で嵌合して密閉する蓋体から成り、前記ペリクル収納容器本体と蓋体は、吸水率０．２％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ、２４ｈ）の樹脂材料で構成されていることを特徴とするペリクル収納容器。   A pellicle storage container for storing a rectangular pellicle having at least one side length exceeding 1000 mm, comprising a pellicle storage container main body on which the pellicle is mounted, and a lid body that is fitted and sealed at the periphery thereof, The pellicle storage container main body and the lid are made of a resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness 3 mm, 24 h). 少なくとも一つの辺長が１０００ｍｍを超える矩形のペリクルを収納するペリクル収納容器であって、前記ペリクルを載置するペリクル収納容器本体と、その周縁部で嵌合して密閉する蓋体から成り、前記ペリクル収納容器本体は、金属材料で構成され、前記蓋体は、吸水率０．２％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ、２４ｈ）の樹脂材料で構成されていることを特徴とするペリクル収納容器。   A pellicle storage container for storing a rectangular pellicle having at least one side length exceeding 1000 mm, comprising a pellicle storage container main body on which the pellicle is mounted, and a lid body that is fitted and sealed at the periphery thereof, The pellicle storage container body is made of a metal material, and the lid body is made of a resin material having a water absorption rate of 0.2% or less (JIS K7209, method A, material thickness 3 mm, 24 h). Pellicle storage container. 前記樹脂材料は、その吸水率が３０日経過後で０．５％以下（ＪＩＳ Ｋ７２０９、Ａ法、素材厚３ｍｍ）であることを特徴とする請求項１または２に記載のペリクル収納容器。
The pellicle storage container according to claim 1 or 2, wherein the resin material has a water absorption rate of 0.5% or less (JIS K7209, method A, material thickness 3 mm) after 30 days.
JP2015028273A 2015-02-17 2015-02-17 Pellicle-housing container Pending JP2016151633A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015028273A JP2016151633A (en) 2015-02-17 2015-02-17 Pellicle-housing container
KR1020160009839A KR20160101661A (en) 2015-02-17 2016-01-27 Pellicle container
TW105103070A TWI574102B (en) 2015-02-17 2016-02-01 Piege film assembly container
CN201610076428.3A CN105883122A (en) 2015-02-17 2016-02-03 Dust-proof pellicle assembly storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015028273A JP2016151633A (en) 2015-02-17 2015-02-17 Pellicle-housing container

Publications (1)

Publication Number Publication Date
JP2016151633A true JP2016151633A (en) 2016-08-22

Family

ID=56695389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015028273A Pending JP2016151633A (en) 2015-02-17 2015-02-17 Pellicle-housing container

Country Status (4)

Country Link
JP (1) JP2016151633A (en)
KR (1) KR20160101661A (en)
CN (1) CN105883122A (en)
TW (1) TWI574102B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021060555A (en) * 2019-10-09 2021-04-15 信越化学工業株式会社 Assembly comprising pellicle and dedicated pellicle case thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007058033A1 (en) * 2005-11-15 2007-05-24 Asahi Kasei Chemicals Corporation Light diffusion plate for liquid crystal display
JP2010106181A (en) * 2008-10-31 2010-05-13 Teijin Chem Ltd Molding method of molded item of aromatic polycarbonate resin and molded item
JP2011007827A (en) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd Storage container for large precision member
JP2011232388A (en) * 2010-04-23 2011-11-17 Shin Etsu Chem Co Ltd Pellicle storage container
JP2013145328A (en) * 2012-01-16 2013-07-25 Shin Etsu Chem Co Ltd Pellicle accommodating container and pellicle storing method
JP2013205690A (en) * 2012-03-29 2013-10-07 Shin Etsu Chem Co Ltd Pellicle storage container

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4458310B2 (en) 1999-09-28 2010-04-28 旭化成イーマテリアルズ株式会社 Pellicle storage container and foreign object inspection method thereof
US6825916B2 (en) * 2002-07-05 2004-11-30 Entegris, Inc. Reticle carrier with positioning cover
JP4176138B2 (en) * 2005-01-27 2008-11-05 旭化成エレクトロニクス株式会社 Large pellicle storage container
JP4391435B2 (en) * 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container
JP2007328226A (en) * 2006-06-09 2007-12-20 Shin Etsu Chem Co Ltd Pellicle storage container and method for manufacturing the same
JP2011034020A (en) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP2011164404A (en) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP2011168312A (en) * 2010-02-19 2011-09-01 Sumitomo Chemical Co Ltd Method of packing resin plate and packed product
WO2013125500A1 (en) * 2012-02-22 2013-08-29 三菱瓦斯化学株式会社 Synthetic resin laminate

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007058033A1 (en) * 2005-11-15 2007-05-24 Asahi Kasei Chemicals Corporation Light diffusion plate for liquid crystal display
JP2010106181A (en) * 2008-10-31 2010-05-13 Teijin Chem Ltd Molding method of molded item of aromatic polycarbonate resin and molded item
JP2011007827A (en) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd Storage container for large precision member
JP2011232388A (en) * 2010-04-23 2011-11-17 Shin Etsu Chem Co Ltd Pellicle storage container
JP2013145328A (en) * 2012-01-16 2013-07-25 Shin Etsu Chem Co Ltd Pellicle accommodating container and pellicle storing method
JP2013205690A (en) * 2012-03-29 2013-10-07 Shin Etsu Chem Co Ltd Pellicle storage container

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
旭化成アミダス株式会社「プラスチック」編集部, プラスチック・データブック, vol. 初版, JPN6017045475, 1 December 1999 (1999-12-01), pages 599 - 603, ISSN: 0003740622 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021060555A (en) * 2019-10-09 2021-04-15 信越化学工業株式会社 Assembly comprising pellicle and dedicated pellicle case thereof

Also Published As

Publication number Publication date
KR20160101661A (en) 2016-08-25
TW201635011A (en) 2016-10-01
CN105883122A (en) 2016-08-24
TWI574102B (en) 2017-03-11

Similar Documents

Publication Publication Date Title
TWI537674B (en) Mask mask film, mask mask and mask mask the use of the box
JP5854511B2 (en) Pellicle and pellicle attaching method
TWI613511B (en) Dust-proof film assembly
JP2006267179A (en) Pellicle storage container
JP6376601B2 (en) Pellicle support means, pellicle support apparatus and pellicle mounting method using the same
KR102044230B1 (en) Pellicle frame and pellicle
KR102407079B1 (en) Pellicle
JP2011008082A (en) Pellicle
KR20230088663A (en) Pellicle storage container
JP6304884B2 (en) Pellicle pasting method
KR20230146493A (en) Pellicle container
JP2016151633A (en) Pellicle-housing container
TWI585517B (en) Dustproof film module containers for microfilm for developing dustproof film modules
JP6156998B2 (en) Pellicle
JP6604651B2 (en) Pellicle storage container
JP2015036791A (en) Pellicle frame body, and pellicle
JPWO2006006318A1 (en) Mask blanks, manufacturing method thereof, and transfer plate manufacturing method
TWI491977B (en) Manufacturing method of pellicle and divided frame assembly formed by combining multiple divided frame parallely
JP6351178B2 (en) Pellicle storage container and pellicle removal method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170125

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20171117

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20171129

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171213

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180219