JP2016134321A - Charged particle beam device - Google Patents
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- JP2016134321A JP2016134321A JP2015009050A JP2015009050A JP2016134321A JP 2016134321 A JP2016134321 A JP 2016134321A JP 2015009050 A JP2015009050 A JP 2015009050A JP 2015009050 A JP2015009050 A JP 2015009050A JP 2016134321 A JP2016134321 A JP 2016134321A
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本発明は荷電粒子線装置に係り、特に像揺れの抑制が可能な荷電粒子線装置に関する。 The present invention relates to a charged particle beam apparatus, and more particularly to a charged particle beam apparatus capable of suppressing image shaking.
走査型電子顕微鏡、透過型電子顕微鏡、半導体計測・検査装置等の荷電粒子線装置では、超高真空環境下の鏡筒内で発生させた荷電粒子線（電子線）を試料に照射し、試料から放出された二次電子、反射電子、または透過電子を検出することによって試料の観察画像を取得している。鏡筒が振動すると、電子線の照射位置が本来の位置から変動し、変動量が分解能以上になると観察画像の歪み（以下、像揺れと呼ぶ）が生じ、観察画像が不鮮明になる。深穴深溝観察や高分解能化に対応するために検出器等が増え、鏡筒が長軸化することで鏡筒の振動が増大する可能性がある。 In charged particle beam devices such as scanning electron microscopes, transmission electron microscopes, and semiconductor measurement / inspection devices, the sample is irradiated with a charged particle beam (electron beam) generated in a lens barrel in an ultra-high vacuum environment. An observation image of the sample is acquired by detecting secondary electrons, reflected electrons, or transmitted electrons emitted from the sample. When the lens barrel vibrates, the irradiation position of the electron beam fluctuates from the original position. When the fluctuation amount exceeds the resolution, distortion of the observation image (hereinafter referred to as image fluctuation) occurs, and the observation image becomes unclear. There is a possibility that the number of detectors and the like increase in order to cope with deep hole deep groove observation and high resolution, and that the length of the lens barrel increases, causing vibration of the lens barrel to increase.
荷電粒子線はコンデンサレンズ、対物レンズにより粒子線径を縮小されながら目的位置に収束される。そのため、コンデンサレンズ、対物レンズの位置ずれは、荷電粒子線を変動させ、像揺れを引き起こす。鏡筒の最下端にある対物レンズは試料に最も近く、その位置ずれが像揺れに及ぼす影響も大きい。 The charged particle beam is converged to the target position while the particle beam diameter is reduced by the condenser lens and the objective lens. For this reason, the displacement of the condenser lens and the objective lens fluctuates the charged particle beam and causes image shake. The objective lens at the lowermost end of the lens barrel is closest to the sample, and its positional deviation has a great influence on image shake.
半導体計測・検査装置においては、半導体デバイスの微細化により、高分解能化への要求が高まる一方で、試料の大口径化、高スループット化が進んでおり、装置の大型化に伴う剛性低下や高スループット化に伴うステージ反力の増大が予測される。また、装置に作用する加振力には、ステージ反力の他に床振動や環境音があり、これらはいずれも像揺れを増大させる要因となる。 In semiconductor measurement / inspection equipment, the demand for higher resolution is increasing due to the miniaturization of semiconductor devices, while the diameter of specimens and high throughput are increasing. It is predicted that the stage reaction force will increase with increasing throughput. In addition to the stage reaction force, the vibration force acting on the apparatus includes floor vibrations and environmental sounds, all of which are factors that increase image shaking.
鏡筒の取付け剛性を向上させた電子ビーム描画装置が特許文献１に記載されている。特許文献１には、電子ビームを照射するための電子光学鏡筒の下部にフランジを設け、当該フランジと試料室との間に軟金属材料の薄い層を挿入することが説明されている。 Patent Document 1 describes an electron beam drawing apparatus in which the mounting rigidity of a lens barrel is improved. Patent Document 1 describes that a flange is provided at the bottom of an electron optical column for irradiating an electron beam, and a thin layer of a soft metal material is inserted between the flange and the sample chamber.
特許文献２には、荷電粒子光学鏡体に一端が取り付けられ、且つ試料室天板に他端が取り付けられることによって、荷電粒子光学鏡体を側方から支持する制振部材を備えた荷電粒子線装置が説明されている。 Patent Document 2 discloses a charged particle having a damping member that supports a charged particle optical mirror from the side by attaching one end to the charged particle optical mirror and the other end to the sample chamber top plate. A wire device is described.
特許文献１では、電子光学鏡筒と試料室との間の締結部剛性を高めることを志向し、両者間に軟金属材料の薄い層を挿入しているが、両者の連結部剛性が強固になる程、電子光学鏡筒の振動が試料室側に伝播することになる。鏡筒下部には試料に焦点を合わせる対物レンズがあり、対物レンズの振動は像揺れへの影響が大きい。最終レンズである対物レンズが振動の影響を受けると、試料に対するビームの到達位置を変化させてしまうことになる。そのため、鏡筒上部の振動エネルギーはできるだけ対物レンズに伝えない方が像揺れを小さくする上で有利である。 In Patent Document 1, it is aimed to increase the rigidity of the fastening portion between the electron optical column and the sample chamber, and a thin layer of soft metal material is inserted between the two, but the rigidity of the connecting portion between the two is strong. The vibration of the electron optical column propagates to the sample chamber side. There is an objective lens for focusing on the sample at the bottom of the lens barrel, and the vibration of the objective lens has a great influence on image shake. If the objective lens which is the final lens is affected by vibration, the position where the beam reaches the sample is changed. For this reason, it is advantageous in reducing the image shake to transmit the vibration energy at the upper part of the lens barrel to the objective lens as much as possible.
特許文献２では、鏡筒と試料室との間に、支持板で粘弾性シートを挟んだ長板状の制振部材を配置し、鏡筒の振動によって発生する粘弾性体シートのせん断歪みにより鏡筒に減衰を付与することで、鏡筒の低振動化を図っている。大きな減衰効果を得るためには、制振部材を鏡筒と試料室の相対変位の大きい位置に取付ける必要がある。鏡筒が傾斜する振動の場合は鏡筒上部に取付けることが望ましい。また、粘弾性体を変形させるためには、粘弾性体を支持する支持板やブロックの変形ができるだけ小さくなるように剛性を確保する必要があるが、鏡筒上部に制振部材を取付ける場合、制振部材が長くなり、剛性確保のために支持板やブロックが大型化する。作業性やコストの面から、制振部材はできるだけ小型化するか、もしくは、制振部材は取付けずに像揺れを低減することが望ましい。 In Patent Document 2, a long plate-shaped damping member having a viscoelastic sheet sandwiched by a support plate is disposed between a lens barrel and a sample chamber, and due to shear strain of the viscoelastic material sheet generated by vibration of the lens barrel. The vibration of the lens barrel is reduced by attenuating the lens barrel. In order to obtain a large damping effect, it is necessary to attach the damping member to a position where the relative displacement between the lens barrel and the sample chamber is large. In the case of vibration in which the lens barrel is inclined, it is desirable to attach it to the upper part of the lens barrel. In addition, in order to deform the viscoelastic body, it is necessary to ensure rigidity so that the deformation of the support plate and block supporting the viscoelastic body is as small as possible. The damping member becomes longer, and the support plate and the block become larger to ensure rigidity. From the viewpoints of workability and cost, it is desirable to reduce the size of the vibration damping member as much as possible, or to reduce image shake without attaching the vibration damping member.
以下に、比較的簡単な構成で鏡筒の振動に起因する像揺れを低減することを目的とする荷電粒子線装置について説明する。 Hereinafter, a charged particle beam apparatus that aims to reduce image shake caused by vibration of a lens barrel with a relatively simple configuration will be described.
上記目的を達成するための一態様として、以下に、荷電粒子源から放出される荷電粒子ビームを試料に照射するための光学素子を備えた荷電粒子ビームカラムと、当該荷電粒子ビームカラムを通過した前記荷電粒子ビームを試料上に集束させる対物レンズを備えた荷電粒子線装置であって、前記対物レンズと前記荷電粒子ビームカラムとの間に、前記荷電粒子ビームカラムに対して相対的に前記荷電粒子ビームの照射方向の剛性が低い第１の部材を介在させると共に、当該部材と前記荷電粒子ビームカラムとを固定する第１の固定部材と、当該第１の部材と前記対物レンズとの間を固定、或いは前記対物レンズと、当該対物レンズと前記第１の部材との間に配置される第２の部材とを固定する第２の固定部材とを備えた荷電粒子線装置を提案する。 As an embodiment for achieving the above object, a charged particle beam column including an optical element for irradiating a sample with a charged particle beam emitted from a charged particle source, and the charged particle beam column passed through A charged particle beam apparatus comprising an objective lens for focusing the charged particle beam on a sample, wherein the charging is relatively performed with respect to the charged particle beam column between the objective lens and the charged particle beam column. A first member having low rigidity in the irradiation direction of the particle beam is interposed, a first fixing member that fixes the member and the charged particle beam column, and a space between the first member and the objective lens. Proposed charged particle beam apparatus comprising: a fixed or a second fixing member that fixes the objective lens and a second member disposed between the objective lens and the first member. That.
上記構成によれば、比較的簡単な構成で鏡筒の振動に起因する像揺れを低減することが可能になる。 According to the above configuration, it is possible to reduce image shake caused by vibration of the lens barrel with a relatively simple configuration.
以下に説明する実施例では、主に、試料を内部に配置する試料室と、前記試料を搭載するステージと、荷電粒子線を照射する荷電粒子源と、前記荷電粒子源を搭載すると共に、複数の円筒状の鏡筒部材から構成される鏡筒と、前記鏡筒の下端に配置されると共に、前記試料に焦点を合わせる対物レンズと、前記鏡筒の内部を真空排気するポンプを備えた荷電粒子線装置であって、前記対物レンズと前記鏡筒部材の間に前記鏡筒の傾斜を容易にする連結部を備えていることを特徴とする荷電粒子線装置を提案する。 In the embodiments described below, mainly a sample chamber in which a sample is placed, a stage on which the sample is mounted, a charged particle source that irradiates a charged particle beam, the charged particle source, and a plurality of charged particle sources are mounted. A lens barrel comprising a cylindrical lens barrel member, an objective lens that is disposed at the lower end of the lens barrel and focuses on the sample, and a pump that evacuates the interior of the lens barrel The present invention proposes a charged particle beam apparatus comprising a connecting portion that facilitates the inclination of the lens barrel between the objective lens and the lens barrel member.
具体的には、荷電粒子ビームカラムと、対物レンズとの間に、荷電粒子ビームカラム外枠の下端形状に沿った部材を介在させ、当該介在部材の第１の部分と荷電粒子ビームカラムを固定する固定部材と、当該第１の部分とは位置が異なる介在部材の第２の部分と対物レンズとを固定する第２の固定部材とを備えた荷電粒子線装置を提案する。介在部材に対する固定位置が、荷電粒子ビームカラムと、対物レンズとの間で異なる理由は、荷電粒子ビームカラムが傾斜したときの影響を、介在部材の第１の部分と第２の部分との間の変形によって吸収させることを目的とすることにある。 Specifically, a member along the lower end shape of the charged particle beam column outer frame is interposed between the charged particle beam column and the objective lens, and the first portion of the interposed member and the charged particle beam column are fixed. A charged particle beam apparatus is provided that includes a fixing member to be fixed, and a second fixing member for fixing the objective lens and the second portion of the interposition member having a position different from that of the first portion. The reason why the fixed position with respect to the interposition member is different between the charged particle beam column and the objective lens is that the influence when the charged particle beam column is tilted is between the first portion and the second portion of the interposition member. It is intended to be absorbed by deformation.
第１の部分と第２の部分との間に、荷電粒子ビームカラム壁面に対して、相対的に荷電粒子ビームの照射方向（Ｚ方向）の剛性が低い部分を形成しておくことによって、荷電粒子ビームカラムの傾斜に基づく、対物レンズへの影響を抑制することが可能となる。 By forming a portion having relatively low rigidity in the irradiation direction (Z direction) of the charged particle beam with respect to the charged particle beam column wall surface between the first portion and the second portion, It is possible to suppress the influence on the objective lens based on the inclination of the particle beam column.
以下に説明する実施例によれば、鏡筒の高剛性化や大掛かりな制振装置を取付けることなく、鏡筒の振動が要因の像揺れを低減する荷電粒子線装置を提供することができる。上記した以外の課題、構成及び効果は、以下の実施形態の説明により明らかにされる。以下、実施例を、図面を用いて説明する。 According to the embodiment described below, it is possible to provide a charged particle beam apparatus that reduces image shake caused by vibration of the lens barrel without attaching a high rigidity of the lens barrel or attaching a large damping device. Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments. Hereinafter, examples will be described with reference to the drawings.
図１は、対物レンズと鏡筒部材の間に鏡筒の傾斜を容易にする連結部材が設けられた荷電粒子線装置の一例を示す図である。なお、説明のため、座標系は直交座標系として、図１において、紙面奥行き方向をＹ方向、左右方向をＸ方向、上下方向をＺ方向とする。 FIG. 1 is a diagram illustrating an example of a charged particle beam apparatus in which a connecting member that facilitates inclination of a lens barrel is provided between an objective lens and a lens barrel member. For the sake of explanation, the coordinate system is an orthogonal coordinate system, and in FIG. 1, the depth direction in the drawing is the Y direction, the left and right direction is the X direction, and the vertical direction is the Z direction.
一般に、荷電粒子線装置は、荷電粒子源１から放出される荷電粒子線９を光軸１０（荷電粒子線９を偏向しないときの軌道）に沿って観察対象物に照射することにより得られる二次電子強度から観察像を得ている。荷電粒子源１を内部に備えた鏡筒２は、イオンポンプ３により超高真空状態に保たれている。本実施例では、イオンポンプ３はＸ方向に１つ取付けられているが、取付けられる方向、個数はこの限りではない。また、鏡筒２は、円筒状の鏡筒部材を複数積層したものであり、各鏡筒部材は光軸１０を中心軸とした同心円の周方向に複数配置された締結部材により結合される。荷電粒子源１より照射された荷電粒子線９は、コンデンサレンズ１１によって細く絞られて物点１６に収束する。物点１６に収束した荷電粒子線９は、対物レンズ２Ｂにより更に細く絞られると共に、試料４上の像点１７に焦点を合わせるように収束する。 Generally, the charged particle beam apparatus is obtained by irradiating an observation object with a charged particle beam 9 emitted from the charged particle source 1 along an optical axis 10 (orbit when the charged particle beam 9 is not deflected). An observation image is obtained from the secondary electron intensity. A lens barrel 2 having a charged particle source 1 therein is maintained in an ultrahigh vacuum state by an ion pump 3. In this embodiment, one ion pump 3 is attached in the X direction, but the direction and number of attachments are not limited to this. The lens barrel 2 is formed by stacking a plurality of cylindrical lens barrel members, and each lens barrel member is coupled by a plurality of fastening members arranged in a circumferential direction of a concentric circle with the optical axis 10 as a central axis. The charged particle beam 9 irradiated from the charged particle source 1 is narrowed down by the condenser lens 11 and converges to the object point 16. The charged particle beam 9 converged on the object point 16 is further narrowed down by the objective lens 2B and converged so as to be focused on the image point 17 on the sample 4.
鏡筒２の傾斜を容易にする連結部材２Ｃ（介在部材、第１の部材）は対物レンズ２Ｂと鏡筒上部２Ａの間に配置されている。連結部材２Ｃは対物レンズ２Ｂと複数の下締結部材１４（第２の固定部材）で締結され、鏡筒上部２Ａと複数の上締結部材１５（第１の固定部材）で締結される。下締結部材１４と上締結部材１５は光軸１０を中心軸として直径の異なる同心円上に軸対称に複数、等ピッチに配置される。 A connecting member 2C (interposition member, first member) that facilitates tilting of the lens barrel 2 is disposed between the objective lens 2B and the upper portion 2A of the lens barrel. The connecting member 2C is fastened by the objective lens 2B and a plurality of lower fastening members 14 (second fixing members), and fastened by the lens barrel upper portion 2A and the plurality of upper fastening members 15 (first fixing members). A plurality of lower fastening members 14 and upper fastening members 15 are arranged at equal pitches on a concentric circle having different diameters with the optical axis 10 as the central axis.
図２は荷電粒子線装置の概略外観図である。鏡筒２は円筒状の鏡筒部材が積み重なった構成となっている。図２の鏡筒２は５つの鏡筒部材より構成されているが、個数はこの限りではない。鏡筒２は試料室６に取付けられている。図３は鏡筒２の固有振動モードを模式的に示したものである。鏡筒２は巨視的に見ると、下端を固定端、上端を自由端とした片持ち梁の曲げのような変形をしている。しかしながら、微視的に見ると、鏡筒部材の結合部のＺ軸方向の局所変形のために、鏡筒部材がＹ軸回りに回転することで鏡筒全体が傾斜している。なお、実際には、鏡筒部材間にはシール部材があるため、図３に示すような隙間は生じず、鏡筒２内部の真空状態は保たれている。 FIG. 2 is a schematic external view of the charged particle beam apparatus. The lens barrel 2 has a configuration in which cylindrical lens barrel members are stacked. The lens barrel 2 in FIG. 2 is composed of five lens barrel members, but the number is not limited to this. The lens barrel 2 is attached to the sample chamber 6. FIG. 3 schematically shows the natural vibration mode of the lens barrel 2. When viewed macroscopically, the lens barrel 2 is deformed like a cantilever beam having a lower end as a fixed end and an upper end as a free end. However, when viewed microscopically, due to local deformation in the Z-axis direction of the coupling portion of the lens barrel member, the lens barrel member rotates around the Y axis so that the entire lens barrel is inclined. Actually, since there is a seal member between the lens barrel members, a gap as shown in FIG. 3 does not occur, and the vacuum state inside the lens barrel 2 is maintained.
鏡筒２は試料室６に取付けられており、試料室６は除振マウント７によって架台８に固定されている。試料４は試料室６の内部にあるステージ５に搭載される。本実施例では、ステージ５の移動方向をＸ方向としているが、ステージの移動方向はこの限りではない。試料４から検出された二次電子の強度は照射位置の座標とその座標における二次電子強度に対応した濃淡として画像化されて表示される。そのため、荷電粒子線装置に何らかの振動が作用し、鏡筒２やステージ５が振動すると、本来照射されるべき位置に荷電粒子線９が照射されず、観察像が揺れて見えることで像質や測定精度の低下を招く。荷電粒子線装置を振動させる加振力には、地上から架台８、除振マウント７を介して伝わる床振動１２や空調設備や装置内のファン等から発生する環境音１３、試料４の位置を変更する際のステージ５移動に伴うステージ反力がある。 The lens barrel 2 is attached to a sample chamber 6, and the sample chamber 6 is fixed to a gantry 8 by a vibration isolation mount 7. The sample 4 is mounted on the stage 5 inside the sample chamber 6. In this embodiment, the moving direction of the stage 5 is the X direction, but the moving direction of the stage is not limited to this. The intensity of the secondary electrons detected from the sample 4 is imaged and displayed as the coordinates of the irradiation position and the shade corresponding to the secondary electron intensity at the coordinates. Therefore, when some vibration acts on the charged particle beam apparatus and the lens barrel 2 and the stage 5 vibrate, the charged particle beam 9 is not irradiated at the position where the original irradiation should be performed, and the observation image appears to be shaken. Measurement accuracy is reduced. The excitation force that vibrates the charged particle beam device includes the floor vibration 12 transmitted from the ground via the gantry 8 and the vibration isolation mount 7, the environmental sound 13 generated from the air conditioner, the fan in the device, and the position of the sample 4. There is a stage reaction force accompanying the movement of the stage 5 when changing.
床振動１２や環境音１３、ステージ反力が荷電粒子線装置に作用すると、図３に示す鏡筒２の固有振動モードが励起される。鏡筒２が傾斜する場合に、像揺れへの影響が大きいのは、最終的に試料４に像を収束させる対物レンズ２Ｂの変形である。鏡筒部材間の結合力が高い場合、鏡筒２全体の変形量は小さくなるが、結合部を介して互いの鏡筒部材に伝達する力は大きくなる。対物レンズ２Ｂは鏡筒２の下端にあり、鏡筒上部２Ａが傾斜するときの力が全て対物レンズ２Ｂへと伝わるため、対物レンズ２Ｂの変形は大きくなる。 When the floor vibration 12, the environmental sound 13, and the stage reaction force act on the charged particle beam device, the natural vibration mode of the lens barrel 2 shown in FIG. 3 is excited. When the lens barrel 2 is tilted, the influence on the image shake is a deformation of the objective lens 2B that finally converges the image on the sample 4. When the coupling force between the lens barrel members is high, the deformation amount of the entire lens barrel 2 is small, but the force transmitted to each lens barrel member via the coupling portion is large. The objective lens 2B is at the lower end of the lens barrel 2, and all the force when the lens barrel upper portion 2A is tilted is transmitted to the objective lens 2B, so that the deformation of the objective lens 2B becomes large.
本実施例は、対物レンズ２Ｂと鏡筒上部２Ａの間に、鏡筒上部２Ａから対物レンズ２Ｂへと伝わる力を低減するための連結部材２Ｃを設けるものである。図１は鏡筒上部２Ａと対物レンズ２Ｂの間に連結部材２Ｃを取付けたものである。連結部材２Ｃは鏡筒上部２Ａや対物レンズ２ＢよりもＺ軸方向の剛性が低く、Ｚ軸方向への曲げ変形が容易である。そのため、鏡筒２としての曲げ剛性は連結部材２Ｃの位置で低下し、鏡筒２の傾斜は連結部材２Ｃから上で大きくなる。このとき、光軸１０のＸＹ方向へのずれは、連結部材２Ｃの位置で最小となる。鏡筒上部２Ａから対物レンズ２Ｂへと伝わる力は、連結部材２Ｃが鏡筒上部２Ａから伝わる力によって大きく変形することで吸収され、対物レンズ２Ｂへと伝わりにくくなる。 In the present embodiment, a connecting member 2C for reducing the force transmitted from the lens barrel upper part 2A to the objective lens 2B is provided between the objective lens 2B and the lens barrel upper part 2A. FIG. 1 shows a connecting member 2C attached between the upper part 2A of the lens barrel and the objective lens 2B. The connecting member 2C has lower rigidity in the Z-axis direction than the lens barrel upper part 2A and the objective lens 2B, and is easy to bend and deform in the Z-axis direction. Therefore, the bending rigidity as the lens barrel 2 decreases at the position of the connecting member 2C, and the inclination of the lens barrel 2 increases from the connecting member 2C. At this time, the displacement of the optical axis 10 in the XY direction is minimized at the position of the connecting member 2C. The force transmitted from the lens barrel upper part 2A to the objective lens 2B is absorbed when the connecting member 2C is greatly deformed by the force transmitted from the lens barrel upper part 2A, and is not easily transmitted to the objective lens 2B.
図４は、図１の連結部材２ＣのＡ−Ａ断面における水平断面図（荷電粒子ビームの照射方向から見た図）である。連結部材２Ｃは、光軸１０を中心軸とした直径Ｄ１の円周上に複数配置された下締結部材１４を用いて対物レンズ２Ｂと結合され、光軸１０を中心軸とした直径Ｄ２の円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと結合される。ここで、Ｄ１≠Ｄ２であり、下締結部材１４と上締結部材１５は直径の異なる同心円状に、それぞれ４個ずつ周方向に９０度ピッチで配置されている。連結部材２Ｃは、径方向の異なる位置を上下それぞれ別の部材に締結されるため、Ｚ軸方向に変形し易い構成となっている。そのため、鏡筒上部２Ａは連結部材２Ｃの位置で大きく傾斜し、そのときの鏡筒上部２Ａから伝わる力の多くが連結部材２ＣのＺ軸方向への曲げ変形に吸収されることで、対物レンズ２Ｂの変形は小さくなる。 FIG. 4 is a horizontal sectional view (a view seen from the irradiation direction of the charged particle beam) of the connecting member 2C of FIG. The connecting member 2C is coupled to the objective lens 2B using a plurality of lower fastening members 14 arranged on the circumference of the diameter D1 with the optical axis 10 as the central axis, and has a diameter D2 with the optical axis 10 as the central axis. A plurality of upper fastening members 15 arranged on the periphery are used to couple the lens barrel upper part 2A. Here, D1 ≠ D2, and the lower fastening member 14 and the upper fastening member 15 are arranged in concentric circles having different diameters, each at a pitch of 90 degrees in the circumferential direction. The connecting member 2C is configured to be easily deformed in the Z-axis direction because the connecting member 2C is fastened to different members in the upper and lower positions in the radial direction. Therefore, the upper part 2A of the lens barrel is largely inclined at the position of the connecting member 2C, and most of the force transmitted from the upper part 2A of the lens barrel at that time is absorbed by the bending deformation in the Z-axis direction of the connecting member 2C. The deformation of 2B is reduced.
図４の下締結部材１４、上締結部材１５はそれぞれ４個ずつ９０度ピッチで配置されているが、個数やピッチはこの限りではない。但し、荷電粒子ビームの光軸に対して、軸対称に配置されることが望ましい。 Although four lower fastening members 14 and four upper fastening members 15 in FIG. 4 are arranged at a pitch of 90 degrees, the number and pitch are not limited to this. However, it is desirable to arrange them symmetrically with respect to the optical axis of the charged particle beam.
また、図１の連結部材２Ｃは下締結部材１４を用いて対物レンズ２Ｂに直接締結されているが、対物レンズ２Ｂと連結部材２Ｃの間に鏡筒部材（第２の部材）が存在したとして、鏡筒部材と対物レンズ２Ｂ、連結部材２Ｃをそれぞれ締結した構成でも良い。但し、鏡筒部材から対物レンズ２Ｂへと伝わる力は、連結部材２Ｃでは低減できないため、できるだけ少ないことが望ましい。 Further, the connecting member 2C in FIG. 1 is directly fastened to the objective lens 2B using the lower fastening member 14, but it is assumed that a lens barrel member (second member) exists between the objective lens 2B and the connecting member 2C. The lens barrel member, the objective lens 2B, and the connecting member 2C may be fastened. However, since the force transmitted from the lens barrel member to the objective lens 2B cannot be reduced by the connecting member 2C, it is desirable that the force be as small as possible.
連結部材２Ｃも鏡筒部材の１つとなるため、連結部材２Ｃと鏡筒部材の間にも真空を保持するためのシール部材が必要となる。シール部材は圧縮に対する反力によって鏡筒部材との間の隙間を封止し、真空を保持する。連結部材２Ｃは剛性が低いほど変形が大きくなり、鏡筒上部２Ａから伝わる力を吸収する。しかしながら、シール部材の圧縮量以上に連結部材２Ｃが変形してしまうと、シールからの反力が得られず、真空を保持できなくなる。そのため、連結部材２Ｃの変形量がシール部材の圧縮量以下となる剛性が必要である。 Since the connecting member 2C is also one of the lens barrel members, a sealing member for maintaining a vacuum is also required between the connecting member 2C and the lens barrel member. The sealing member seals a gap between the lens barrel member and a vacuum by a reaction force against compression. The lower the rigidity of the connecting member 2C, the larger the deformation, and the force transmitted from the lens barrel upper part 2A is absorbed. However, if the connecting member 2C is deformed more than the compression amount of the seal member, the reaction force from the seal cannot be obtained and the vacuum cannot be maintained. Therefore, the rigidity that the deformation amount of the connecting member 2C is equal to or less than the compression amount of the seal member is required.
図５は、連結機構の有用性を示すＦＥＭ解析結果の一例である。連結機構を備えていない場合の像揺れ量を基準として、連結機構を備えた場合の像揺れ量をプロットしている。連結機構を備えていない場合に比べて、連結機構を備えることで像揺れ量は低減しており、連結機構の有用性が確認できる。 FIG. 5 is an example of an FEM analysis result showing the usefulness of the coupling mechanism. The amount of image shake when the coupling mechanism is provided is plotted on the basis of the amount of image shake when the connection mechanism is not provided. Compared to the case where the connection mechanism is not provided, the image shake amount is reduced by providing the connection mechanism, and the usefulness of the connection mechanism can be confirmed.
図４に例示するように、荷電粒子ビームの照射方向から見たときに、連結部材２Ｃ内の異なる位置で、荷電粒子ビームカラムと対物レンズを固定することによって、連結部材２Ｃの下締結部材１４と上締結部材１５との間の部分を、荷電粒子ビームカラムの傾斜を、変形によって吸収する部分として適用することが可能となる。 As illustrated in FIG. 4, the lower fastening member 14 of the connecting member 2 </ b> C is secured by fixing the charged particle beam column and the objective lens at different positions in the connecting member 2 </ b> C when viewed from the irradiation direction of the charged particle beam. It is possible to apply the portion between the upper fastening member 15 and the upper fastening member 15 as a portion that absorbs the inclination of the charged particle beam column by deformation.
図６は、連結機構を備えた荷電粒子線装置の他の例を示す鏡筒全体の概略断面図である。図７は、図６における連結部材２ＤのＢ−Ｂ断面における水平断面図である。連結部材２Ｄは、光軸１０を中心軸とした直径Ｄ３の円周上に複数配置された下締結部材１４を用いて対物レンズ２Ｂと結合され、同円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと結合される。下締結部材１４と上締結部材１５は直径が同じ同心円状に互い違いに配置される。連結部材２Ｄは、周方向の異なる位置を上下それぞれ別の部材に締結されるため、Ｚ軸方向の変形が容易となり、連結部材２Ｄの位置で鏡筒２の傾斜が大きくなる。図７において、締結部材はそれぞれ４個ずつ９０度ピッチで配置されているが、個数、ピッチはこの限りではない。また、連結部材２Ｄは、隣り合う締結部材の距離が大きくなるにつれ、Ｚ軸方向の変形も大きくなる。本実施形態の場合、上下の締結部材が等間隔に配置される場合に変形が最も大きくなる。例えば、上締結部材１５がＸ軸から０度、９０度、１８０度、２７０度の位置に配置される場合、下締結部材１４はＸ軸から４５度、１３５度、２２５度、３１５度の位置に配置されるのが望ましい。 FIG. 6 is a schematic cross-sectional view of the entire lens barrel showing another example of a charged particle beam apparatus provided with a coupling mechanism. FIG. 7 is a horizontal sectional view taken along the line BB of the connecting member 2D in FIG. The connecting member 2D is coupled to the objective lens 2B using a plurality of lower fastening members 14 arranged on a circumference having a diameter D3 with the optical axis 10 as a central axis, and a plurality of upper fastening members arranged on the circumference. 15 is coupled to the upper part 2A of the lens barrel. The lower fastening members 14 and the upper fastening members 15 are alternately arranged in a concentric shape having the same diameter. Since the connecting member 2D is fastened to different members in the upper and lower positions in the circumferential direction, deformation in the Z-axis direction is facilitated, and the inclination of the lens barrel 2 is increased at the position of the connecting member 2D. In FIG. 7, four fastening members are arranged at a pitch of 90 degrees, but the number and pitch are not limited to this. Further, the connecting member 2D is also greatly deformed in the Z-axis direction as the distance between adjacent fastening members increases. In the case of the present embodiment, the deformation is greatest when the upper and lower fastening members are arranged at equal intervals. For example, when the upper fastening member 15 is disposed at 0, 90, 180, and 270 degrees from the X axis, the lower fastening member 14 is located at 45, 135, 225, and 315 degrees from the X axis. It is desirable to be arranged in
図８は、連結機構を備えた荷電粒子線装置の更に他の例を示す鏡筒全体の概略断面図である。鏡筒部材２Ｅは、光軸１０を中心軸とした円周上に複数配置された下締結部材１４を用いて対物レンズ２Ｂと締結され、光軸１０を中心軸とした円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと締結される。締結部材の個数、ピッチに制約はない。実施例１、実施例２では、鏡筒部材とは別に連結機構を設けていたが、鏡筒部材２Ｅのように、鏡筒部材の一部に、Ｚ軸方向に低剛性な連結部を設けた構成であっても良い。鏡筒部材２Ｅは、対物レンズ２Ｂとの締結部分の板厚を小さくすることで、Ｚ軸方向の剛性を低下させている。これにより、鏡筒２は連結部の位置で大きく傾斜し、鏡筒上部２Ａから対物レンズ２Ｂに伝わる力を低減する。このように薄肉部と厚肉部が連結されたリング形状とし、薄肉部の面方向をカラム壁面に対して直交するように形成し、且つ薄肉部の面方向に直交する方向から締結部材を用いて固定することによって、カラム壁面と平行な方向の剛性を低下させることができるため、薄肉部でカラムからレンズに伝達する振動の低減が可能となる。また、薄肉部に対して相対的に厚い厚肉部は高い剛性を持っているため、当該部分の剛性の低下を抑制しつつ、対物レンズに対する振動低減効果を得ることが可能となる。 FIG. 8 is a schematic cross-sectional view of the entire lens barrel showing still another example of the charged particle beam apparatus provided with the coupling mechanism. The lens barrel member 2E is fastened to the objective lens 2B using a plurality of lower fastening members 14 arranged on the circumference with the optical axis 10 as the central axis, and a plurality of lens barrel members 2E are arranged on the circumference with the optical axis 10 as the central axis. The upper fastening member 15 is used to fasten the lens barrel upper part 2A. There are no restrictions on the number and pitch of the fastening members. In the first and second embodiments, the connecting mechanism is provided separately from the lens barrel member. However, like the lens barrel member 2E, a low rigidity connecting portion is provided in a part of the lens barrel member in the Z-axis direction. The structure may be different. The lens barrel member 2E reduces the rigidity in the Z-axis direction by reducing the plate thickness of the fastening portion with the objective lens 2B. Thereby, the lens barrel 2 is largely inclined at the position of the connecting portion, and the force transmitted from the lens barrel upper part 2A to the objective lens 2B is reduced. In this way, the thin part and the thick part are connected to form a ring shape, the surface direction of the thin part is formed to be orthogonal to the column wall surface, and the fastening member is used from the direction orthogonal to the surface direction of the thin part. Since the rigidity in the direction parallel to the column wall surface can be reduced by the fixing, the vibration transmitted from the column to the lens at the thin portion can be reduced. In addition, since the thick part relatively thick with respect to the thin part has high rigidity, it is possible to obtain a vibration reduction effect on the objective lens while suppressing a decrease in rigidity of the part.
図９は、連結機構を備えた荷電粒子線装置の更に他の例を示す鏡筒全体の概略断面図である。鏡筒部材２Ｆは、光軸１０を中心軸とした円周上に複数配置された下締結部材１４を用いて対物レンズ２Ｂと締結され、光軸１０を中心軸とした円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと締結される。締結部材の個数、ピッチに制約はない。実施例１、実施例２では、鏡筒部材とは別に連結部材を設けていたが、鏡筒部材２Ｆのように、鏡筒部材の一部に、Ｚ軸方向に低剛性な連結部を設けた構成であっても良い。鏡筒部材２Ｆは、鏡筒上部２Ａとの締結部分の板厚を小さくすることで、Ｚ軸方向の剛性を低下させている。これにより、鏡筒２は連結部の位置で大きく傾斜し、鏡筒上部２Ａから対物レンズ２Ｂに伝わる力を低減する。 FIG. 9 is a schematic cross-sectional view of the entire lens barrel showing still another example of the charged particle beam apparatus provided with the coupling mechanism. The lens barrel member 2F is fastened to the objective lens 2B using a plurality of lower fastening members 14 arranged on the circumference with the optical axis 10 as the central axis, and a plurality of lens barrel members 2F are arranged on the circumference with the optical axis 10 as the central axis. The upper fastening member 15 is used to fasten the lens barrel upper part 2A. There are no restrictions on the number and pitch of the fastening members. In the first and second embodiments, the connecting member is provided separately from the lens barrel member. However, like the lens barrel member 2F, a low rigidity connecting portion in the Z-axis direction is provided in a part of the lens barrel member. The structure may be different. The lens barrel member 2F reduces the rigidity in the Z-axis direction by reducing the plate thickness of the fastening portion with the lens barrel upper portion 2A. Thereby, the lens barrel 2 is largely inclined at the position of the connecting portion, and the force transmitted from the lens barrel upper part 2A to the objective lens 2B is reduced.
図１０は、連結機構を備えた荷電粒子線装置の更に他の例を示す鏡筒全体の概略断面図である。鏡筒部材２Ｇは、光軸１０を中心軸とした円周上に複数配置された下締結部材１４を用いて対物レンズ２Ｂと締結され、光軸１０を中心軸とした円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと締結される。締結部材の個数、ピッチに制約はない。実施例１、実施例２では、鏡筒部材とは別に連結部材を設けていたが、鏡筒部材２Ｇのように、鏡筒部材の一部に、Ｚ軸方向に低剛性な連結部を設けた構成であっても良い。鏡筒部材２Ｇは、鏡筒上部２Ａ及び対物レンズ２Ｂとの締結部分の板厚を小さくすることで、Ｚ軸方向の剛性を低下させている。実施例３、実施例４に比べて、連結部の径方向の長さが短くなっているが、連結部を上下２箇所に設けることで、径方向にスペースを確保できない場合にも対応できる。これにより、鏡筒上部２Ａから対物レンズ２Ｂに伝わる力を低減する。 FIG. 10 is a schematic cross-sectional view of the entire lens barrel showing still another example of the charged particle beam apparatus provided with the coupling mechanism. The lens barrel member 2G is fastened to the objective lens 2B using a plurality of lower fastening members 14 arranged on the circumference with the optical axis 10 as the central axis, and a plurality of lens barrel members 2G are arranged on the circumference with the optical axis 10 as the central axis. The upper fastening member 15 is used to fasten the lens barrel upper part 2A. There are no restrictions on the number and pitch of the fastening members. In the first and second embodiments, the connecting member is provided separately from the lens barrel member. However, like the lens barrel member 2G, a low rigidity connecting portion in the Z-axis direction is provided in a part of the lens barrel member. The structure may be different. The lens barrel member 2G reduces the rigidity in the Z-axis direction by reducing the plate thickness of the fastening portion between the lens barrel upper part 2A and the objective lens 2B. Compared with Example 3 and Example 4, although the length of the radial direction of a connection part is short, it can respond also to the case where a space cannot be ensured in radial direction by providing a connection part in two upper and lower places. Thereby, the force transmitted from the lens barrel upper part 2A to the objective lens 2B is reduced.
図１１は、連結機構を備えた荷電粒子線装置の更に他の例を示す鏡筒全体の概略断面図である。鏡筒支持部材２Ｈは、光軸１０を中心軸とした円周上に複数配置された下締結部材１４を用いて試料室６と締結され、光軸１０を中心軸とした円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと締結される。締結部材の個数、ピッチに制約はない。これまでの実施例では、鏡筒上部２Ａは連結部材を介して対物レンズ２Ｂに結合されていたが、対物レンズ２Ｂとは別に試料室６に取付け可能な鏡筒部材２Ｈに鏡筒上部２Ａを結合することで、鏡筒上部２Ａと対物レンズ２Ｂを物理的に切り離し、鏡筒上部２Ａから対物レンズ２Ｂへと伝わる力を絶縁することができる。 FIG. 11 is a schematic cross-sectional view of the entire lens barrel showing still another example of the charged particle beam apparatus including the coupling mechanism. The lens barrel support member 2H is fastened to the sample chamber 6 using a plurality of lower fastening members 14 arranged on the circumference with the optical axis 10 as the central axis, and a plurality of lens barrel support members 2H are provided on the circumference with the optical axis 10 as the central axis. The upper fastening member 15 is used to fasten the lens barrel upper part 2A. There are no restrictions on the number and pitch of the fastening members. In the embodiments so far, the lens barrel upper part 2A is coupled to the objective lens 2B via the connecting member. However, the lens barrel upper part 2A is attached to the lens barrel member 2H that can be attached to the sample chamber 6 separately from the objective lens 2B. By coupling, the lens barrel upper part 2A and the objective lens 2B can be physically separated, and the force transmitted from the lens barrel upper part 2A to the objective lens 2B can be insulated.
図１２は、荷電粒子線の物点に連結機構を備えた荷電粒子線装置の鏡筒全体の概略断面図である。連結部材２Ｃは、物点１６と同じＺ座標位置に配置され、光軸１０を中心軸とした円周上に複数配置された下締結部材１４を用いて鏡筒部材２Ｉと締結され、光軸１０を中心軸とした円周上に複数配置された上締結部材１５を用いて鏡筒上部２Ａと締結される。鏡筒部材２Ｉは、連結部材２Ｃが物点１６と同じＺ座標位置に配置されるようにＺ方向の寸法が調整されている。ここで、連結部材２ＣのＺ座標位置が物点１６から離れている場合の荷電粒子線９について考える。物点１６から対物レンズ２Ｂへ向かう荷電粒子線９は、光軸１０に沿って対物レンズ２Ｂの反対側の一点、すなわち像点１７を通る。荷電粒子線９が物点１６で光軸１０からＸＹ方向にずれると、像点１７もＸＹ方向にずれてしまい、像揺れに影響を及ぼす。連結部材２Ｃから物点１６までのＺ方向の距離をｈ、鏡筒上部２ＡがＸ方向に傾斜した時の光軸１０からの傾斜角をΦとすると、物点１６の光軸１０からＸ方向へのずれ量ａは幾何学的に求まり、ａ＝ｈ×tanΦとなる。このことから、ｈが大きいと荷電粒子線９の物点１６でのＸ方向のずれ量ａが大きくなり、像揺れが大きくなる。そのため、連結部材２Ｃを物点１６と同じＺ座標位置にすることで、連結部材２Ｃを備えた場合の像揺れ量を最小限にすることができる。図１２において、連結機構として連結部材２Ｃを示しているが、他の連結部材や連結部を備えた鏡筒部材であっても良い。 FIG. 12 is a schematic cross-sectional view of the entire barrel of a charged particle beam apparatus provided with a coupling mechanism at an object point of the charged particle beam. The connecting member 2C is disposed at the same Z coordinate position as the object point 16, and is fastened to the lens barrel member 2I by using a plurality of lower fastening members 14 disposed on the circumference with the optical axis 10 as the central axis. A plurality of upper fastening members 15 arranged on the circumference with 10 as a central axis are used to fasten the lens barrel upper part 2A. The size of the lens barrel member 2 </ b> I is adjusted so that the connecting member 2 </ b> C is disposed at the same Z coordinate position as the object point 16. Here, consider the charged particle beam 9 when the Z coordinate position of the connecting member 2 </ b> C is away from the object point 16. The charged particle beam 9 from the object point 16 toward the objective lens 2B passes along one point on the opposite side of the objective lens 2B along the optical axis 10, that is, the image point 17. When the charged particle beam 9 deviates from the optical axis 10 at the object point 16 in the XY direction, the image point 17 also deviates in the XY direction, which affects image shake. When the distance in the Z direction from the connecting member 2C to the object point 16 is h, and the inclination angle from the optical axis 10 when the lens barrel upper part 2A is inclined in the X direction is Φ, the X direction from the optical axis 10 of the object point 16 is X direction. The shift amount a is obtained geometrically, and a = h × tanΦ. From this, when h is large, the amount of deviation a in the X direction at the object point 16 of the charged particle beam 9 becomes large, and the image shake becomes large. Therefore, by setting the connecting member 2C to the same Z coordinate position as the object point 16, the amount of image shake when the connecting member 2C is provided can be minimized. In FIG. 12, the connecting member 2 </ b> C is shown as the connecting mechanism, but a lens barrel member including another connecting member or a connecting portion may be used.
１…荷電粒子源、２…鏡筒、２Ａ…鏡筒上部、２Ｂ…対物レンズ、２Ｃ、２Ｄ…連結部材、２Ｅ、２Ｆ、２Ｇ…鏡筒部材、２Ｈ…鏡筒支持部材、３…イオンポンプ、４…試料、５…ステージ、６…試料室、７…除振マウント、８…架台、９…荷電粒子線、１０…光軸、１１…コンデンサレンズ、１２…床振動、１３…環境音、１４…下締結部材、１５…上締結部材、１６…物点、１７…像点。 DESCRIPTION OF SYMBOLS 1 ... Charged particle source, 2 ... Lens barrel, 2A ... Lens barrel upper part, 2B ... Objective lens, 2C, 2D ... Connecting member, 2E, 2F, 2G ... Lens barrel member, 2H ... Lens barrel support member, 3 ... Ion pump 4 ... sample, 5 ... stage, 6 ... sample chamber, 7 ... vibration mount, 8 ... mount, 9 ... charged particle beam, 10 ... optical axis, 11 ... condenser lens, 12 ... floor vibration, 13 ... environmental sound, 14 ... lower fastening member, 15 ... upper fastening member, 16 ... object point, 17 ... image point.
Claims (12)
前記対物レンズと前記荷電粒子ビームカラムとの間に、前記荷電粒子ビームカラムに対して相対的に前記荷電粒子ビームの照射方向の剛性が低い第１の部材を介在させると共に、当該部材と前記荷電粒子ビームカラムとを固定する第１の固定部材と、当該第１の部材と前記対物レンズとの間を固定、或いは前記対物レンズと、当該対物レンズと前記第１の部材との間に配置される第２の部材とを固定する第２の固定部材とを備えたことを特徴とする荷電粒子線装置。 A charged particle beam column including an optical element for irradiating a sample with a charged particle beam emitted from a charged particle source, and an objective lens for focusing the charged particle beam that has passed through the charged particle beam column on the sample In charged particle beam equipment,
A first member having a relatively low rigidity in the irradiation direction of the charged particle beam relative to the charged particle beam column is interposed between the objective lens and the charged particle beam column. A first fixing member that fixes the particle beam column; and a fixed portion between the first member and the objective lens, or is disposed between the objective lens and the objective lens and the first member. A charged particle beam apparatus comprising: a second fixing member that fixes the second member.
前記第１の部材は、前記対物レンズの物点と同じ高さに配置されることを特徴とする荷電粒子線装置。 In claim 1,
The charged particle beam device, wherein the first member is disposed at the same height as an object point of the objective lens.
前記対物レンズと前記荷電粒子ビームカラムとの間に配置され、当該対物レンズと荷電粒子ビームカラムに固定される第１の部材と、
当該第１の部材の第１の位置にて、当第１の部材と前記荷電粒子ビームカラムを固定する第１の固定部材と、
前記荷電粒子ビームの照射方向から見て、前記第１の部材内であって、前記第１の位置とは異なる第２の位置にて、当該第１の部材と前記対物レンズとを固定、或いは前記対物レンズと、当該対物レンズと前記第１の部材との間に配置される第２の部材とを固定する第２の固定部材とを備えたことを特徴とする荷電粒子線装置。 A charged particle beam column including an optical element for irradiating a sample with a charged particle beam emitted from a charged particle source, and an objective lens for focusing the charged particle beam that has passed through the charged particle beam column on the sample In charged particle beam equipment,
A first member disposed between the objective lens and the charged particle beam column and fixed to the objective lens and the charged particle beam column;
A first fixing member for fixing the first member and the charged particle beam column at a first position of the first member;
The first member and the objective lens are fixed at a second position different from the first position in the first member when viewed from the irradiation direction of the charged particle beam, or A charged particle beam apparatus comprising: the objective lens; and a second fixing member that fixes a second member disposed between the objective lens and the first member.
前記第１の部材は、前記対物レンズの物点と同じ高さに配置されることを特徴とする荷電粒子線装置。 In claim 3,
The charged particle beam device, wherein the first member is disposed at the same height as an object point of the objective lens.
前記第１の部材は、前記荷電粒子ビームカラムに対し、相対的に前記荷電粒子ビーム照射方向の剛性が低い部材であることを特徴とする荷電粒子線装置。 In claim 3,
The charged particle beam apparatus according to claim 1, wherein the first member is a member having a relatively low rigidity in the charged particle beam irradiation direction relative to the charged particle beam column.
前記第１の位置は、前記荷電粒子ビーム光軸から距離Ｄ２の位置であり、前記第２の位置は、距離Ｄ２より大きい距離Ｄ１の位置であることを特徴とする荷電粒子線装置。 In claim 3,
The charged particle beam apparatus characterized in that the first position is a position at a distance D2 from the optical axis of the charged particle beam, and the second position is a position at a distance D1 larger than the distance D2.
前記第１の位置と前記第２の位置が異なる高さ位置となるように、前記第１の部材が形成されていることを特徴とする荷電粒子線装置。 In claim 6,
The charged particle beam apparatus, wherein the first member is formed so that the first position and the second position are at different height positions.
前記第１の部材は、厚肉部と薄肉部を有するリング状であって、薄板部と、前記対物レンズ、前記荷電粒子ビームカラム、及び前記第２の部材の内と１つと固定されることを特徴とする荷電粒子線装置。 In claim 7,
The first member has a ring shape having a thick part and a thin part, and is fixed to one of the thin plate part, the objective lens, the charged particle beam column, and the second member. Charged particle beam device characterized by the above.
前記第１の位置と前記第２の位置は、前記荷電粒子ビーム光軸から同じ距離に位置すると共に、当該第１の位置と、前記第２の位置は、前記第１の部材上で交互に配置されることを特徴とする荷電粒子線装置。 In claim 3,
The first position and the second position are located at the same distance from the charged particle beam optical axis, and the first position and the second position are alternately arranged on the first member. A charged particle beam device characterized by being arranged.
前記第２の部材は、前記荷電粒子ビームカラムの一部を構成する部材であることを特徴とする荷電粒子線装置。 In claim 3,
The charged particle beam apparatus, wherein the second member is a member constituting a part of the charged particle beam column.
前記第２の部材は、前記対物レンズが搭載される試料室の一部であることを特徴とする荷電粒子線装置。 In claim 3,
The charged particle beam apparatus, wherein the second member is a part of a sample chamber in which the objective lens is mounted.
前記対物レンズと前記荷電粒子ビームカラムとの間に配置され、当該対物レンズと荷電粒子ビームカラムに固定される第１の部材と、
当該第１の部材の第１の位置にて、当第１の部材と前記荷電粒子ビームカラムを固定する第１の固定部材と、
前記荷電粒子ビームの照射方向とは直交する方向から見て、第１の位置とは異なる高さ位置の第２の位置にて、当該第１の部材と前記対物レンズとを固定、或いは前記対物レンズと、当該対物レンズと前記第１の部材との間に配置される第２の部材とを固定する第２の固定部材とを備えたことを特徴とする荷電粒子線装置。 A charged particle beam column including an optical element for irradiating a sample with a charged particle beam emitted from a charged particle source, and an objective lens for focusing the charged particle beam that has passed through the charged particle beam column on the sample In charged particle beam equipment,
A first member disposed between the objective lens and the charged particle beam column and fixed to the objective lens and the charged particle beam column;
A first fixing member for fixing the first member and the charged particle beam column at a first position of the first member;
The first member and the objective lens are fixed at the second position different from the first position when viewed from the direction orthogonal to the irradiation direction of the charged particle beam, or the objective A charged particle beam apparatus comprising: a lens; and a second fixing member that fixes a second member disposed between the objective lens and the first member.
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| JPS4922845U (en) * | 1972-05-30 | 1974-02-26 | ||
| JPS61114452A (en) * | 1984-09-05 | 1986-06-02 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Charged particle beam apparatus |
| JPH0395844A (en) * | 1989-09-08 | 1991-04-22 | Jeol Ltd | Charged particle beam device |
| JP2013175377A (en) * | 2012-02-27 | 2013-09-05 | Hitachi High-Technologies Corp | Charged particle beam device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922845U (en) * | 1972-05-30 | 1974-02-26 | ||
| JPS61114452A (en) * | 1984-09-05 | 1986-06-02 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Charged particle beam apparatus |
| JPH0395844A (en) * | 1989-09-08 | 1991-04-22 | Jeol Ltd | Charged particle beam device |
| JP2013175377A (en) * | 2012-02-27 | 2013-09-05 | Hitachi High-Technologies Corp | Charged particle beam device |
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