JP2016124086A - Coated tool - Google Patents
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- JP2016124086A JP2016124086A JP2015001399A JP2015001399A JP2016124086A JP 2016124086 A JP2016124086 A JP 2016124086A JP 2015001399 A JP2015001399 A JP 2015001399A JP 2015001399 A JP2015001399 A JP 2015001399A JP 2016124086 A JP2016124086 A JP 2016124086A
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本発明は、例えば、切削工具や金型等の工具に適用される硬質皮膜を被覆した被覆工具に関する。 The present invention relates to a coated tool coated with a hard coating applied to a tool such as a cutting tool or a mold.
従来、切削工具や金型等に用いられる工具では、その耐久性を向上させることを目的に、物理蒸着法で多元系のセラミックス皮膜を被覆した被覆工具が採用されている。硬質皮膜の中でも、耐熱性と耐摩耗性に優れる膜種として、ＡｌとＣｒを主体とするＡｌＣｒＮやＡｌＣｒＮＣが知られている（特許文献１、２）。また、ＡｌＣｒＮとＡｌＴｉＮとを交互に積層させた交互積層皮膜を設けた被覆工具も提案されている（特許文献３、４）。
ＡｌとＣｒを主体とする窒化物または炭窒化物をベースに第三元素の添加や様々な皮膜構造が検討されているが、通常、ＡｌとＣｒを主体とする窒化物または炭窒化物は、Ａｌの含有量を高くすると皮膜中に脆弱なＺｎＳ型の六方最密充墳（ｈｃｐ；以下、単に「ｈｃｐ」と省略する）構造が増加して被覆工具の耐久性が低下する傾向にある。そのため、実際の被覆工具においては、ＡｌとＣｒを主体とする窒化物または炭窒化物は、Ａｌの含有比率を金属（半金属を含む）元素の原子比率（原子％）で７０％未満の範囲で適用されている。
2. Description of the Related Art Conventionally, in tools used for cutting tools, dies, and the like, a coated tool in which a multi-component ceramic film is coated by a physical vapor deposition method has been adopted for the purpose of improving the durability. Among hard coatings, AlCrN and AlCrNC mainly composed of Al and Cr are known as film types having excellent heat resistance and wear resistance (Patent Documents 1 and 2). In addition, a coated tool provided with an alternating laminated film in which AlCrN and AlTiN are alternately laminated has been proposed (Patent Documents 3 and 4).
Addition of a third element and various coating structures based on nitrides or carbonitrides mainly composed of Al and Cr have been studied. Usually, nitrides or carbonitrides mainly composed of Al and Cr are When the Al content is increased, the fragile ZnS-type hexagonal close-packed (hcp; hereinafter simply abbreviated as “hcp”) structure increases in the coating, and the durability of the coated tool tends to decrease. Therefore, in an actual coated tool, a nitride or carbonitride mainly composed of Al and Cr has an Al content ratio in a range of less than 70% in terms of atomic ratio (atomic%) of metal (including metalloid) elements. Has been applied.
近年、金型や切削工具等の工具には、高硬度材等の高能率加工および高精度加工がより高いレベルで要求されており、工具の使用環境はより過酷になっている。そのため、従来のＡｌとＣｒを主体とする窒化物または炭窒化物を被覆した被覆工具では満足する耐久性が得られ難い場合があった。
本発明は上記のような事情に鑑み行われたものであり、耐久性に優れる被覆工具を提供することを目的とする。
In recent years, high-efficiency machining and high-precision machining of high-hardness materials and the like are required for tools such as molds and cutting tools at a higher level, and the usage environment of tools has become more severe. For this reason, it is sometimes difficult to obtain satisfactory durability with a conventional coated tool coated with a nitride or carbonitride mainly composed of Al and Cr.
The present invention has been made in view of the above circumstances, and an object thereof is to provide a coated tool having excellent durability.
本発明は、基材と、前記基材の上に配置される交互積層皮膜と、を有し、
前記交互積層皮膜は、金属元素（半金属を含む。以下同様である）の総量に対し、Ａｌの含有比率（原子％）が７５％以上９５％以下、Ｃｒの含有比率（原子％）が５％以上２５％以下、を含有する窒化物または炭窒化物からなるａ１層と、金属元素の総量に対し、Ａｌの含有比率（原子％）が６５％以上８５％以下、Ｔｉの含有比率（原子％）が１５％以上３５％以下、を含有する窒化物または炭窒化物からなるａ２層とが交互に形成されたものであり、前記交互積層皮膜の金属元素の原子比率（原子％）をＡ、窒素元素の原子比率（原子％）をＢとした場合、１．０２≦Ｂ／Ａ≦１．０７である被覆工具である。
The present invention has a base material, and an alternating laminated film disposed on the base material,
The alternating laminated film has an Al content ratio (atomic%) of 75% or more and 95% or less and a Cr content ratio (atomic%) of 5% with respect to the total amount of metal elements (including metalloid, the same applies hereinafter). The Al content ratio (atomic%) is 65% or more and 85% or less with respect to the total amount of metal elements and the a1 layer made of nitride or carbonitride containing at least 25% and less than 25%. %) Is formed alternately with a2 layers made of nitride or carbonitride containing 15% or more and 35% or less, and the atomic ratio (atomic%) of the metal elements of the alternately laminated film is A When the atomic ratio (atomic%) of the nitrogen element is B, the coated tool satisfies 1.02 ≦ B / A ≦ 1.07.
前記ａ１層は、Ａｌの含有比率（原子％）が８５％以下であることが好ましい。 The a1 layer preferably has an Al content (atomic%) of 85% or less.
本発明は、耐久性に優れる被覆工具を提供することができる。 The present invention can provide a coated tool having excellent durability.
本発明者の検討によれば、ＡｌとＣｒの窒化物または炭窒化物に含まれるＡｌの含有量を増加させることで、皮膜自体の耐熱性が向上するとともに、加工中の工具刃先への溶着が減少し、切削抵抗が低減することを確認した。但し、ＡｌとＣｒの窒化物または炭窒化物に含まれるＡｌの含有量が増加すると、脆弱なｈｃｐ構造のＡｌＮの含有量が増大するため被覆工具の耐久性が低下する傾向にある。
本発明者は、皮膜のＡｌ含有量を高めることを検討し、ＡｌとＣｒを主体とする窒化物または炭窒化物からなるａ１層と、ＡｌとＴｉを主体とする窒化物または炭窒化物からなるａ２層との交互積層皮膜を適用し、その交互積層皮膜における金属元素に対する窒素元素の含有比率を高めることで、交互積層皮膜が一定量のｈｃｐ構造のＡｌＮを含有する場合でも被覆工具の耐久性が低下し難くなることを見出し、発明に到達した。以下、本発明の構成要件について説明をする。
According to the inventor's study, by increasing the Al content in Al and Cr nitrides or carbonitrides, the heat resistance of the coating itself is improved and welding to the tool edge during processing is performed. It was confirmed that the cutting resistance was reduced. However, when the content of Al contained in the nitrides and carbonitrides of Al and Cr increases, the content of AlN having a fragile hcp structure increases, so that the durability of the coated tool tends to decrease.
The present inventor has studied to increase the Al content of the film, from the a1 layer made of nitride or carbonitride mainly composed of Al and Cr, and from the nitride or carbonitride mainly composed of Al and Ti. By applying an alternate layer coating with the a2 layer and increasing the content ratio of nitrogen element to metal element in the alternate layer coating, durability of the coated tool is maintained even when the alternate layer coating contains a certain amount of AlN having an hcp structure. The inventors have found that the property is hardly lowered and have reached the invention. Hereinafter, the configuration requirements of the present invention are described.
ａ１層は、金属元素の総量に対し、Ａｌの含有比率（原子％）が７５％以上９５％以下、Ｃｒの含有比率（原子％）が５％以上２５％以下、を含有する窒化物または炭窒化物とする。
ａ１層のＡｌの含有比率が小さくなり過ぎれば、交互積層皮膜の全体でＡｌの含有量が低下して耐熱性が低下するとともに、加工中の切削抵抗も増加する傾向にある。一方、ａ１層のＡｌの含有比率が大きくなり過ぎれば、脆弱なｈｃｐ構造のＡｌＮの含有量が増大するため被覆工具の耐久性が低下する傾向にある。よって、ａ１層は、金属元素の総量に対し、Ａｌの含有比率（原子％）が７５％以上９５％以下とする。
交互積層皮膜に含まれるｈｃｐ構造のＡｌＮをより低減するには、ａ１層のＡｌの含有比率（原子％）は８５％以下とすることが好ましい。交互積層皮膜の耐熱性をより高め、切削抵抗をより低減するには、ａ１層のＡｌの含有比率（原子％）は、８０％以上とすることが好ましい。
また、ａ１層のＣｒの含有比率が小さくなり過ぎれば、脆弱なｈｃｐ構造のＡｌＮの含有量が増大するため被覆工具の耐久性が低下する。一方、ａ１層のＣｒの含有比率が大きくなり過ぎれば、相対的にＡｌの含有量が低下して、皮膜全体の耐熱性が低下するとともに、加工中の切削抵抗も増加する傾向にある。よって、ａ１層は、金属元素の総量に対し、Ｃｒの含有比率（原子％）を５％以上２５％以下とする。
交互積層皮膜に含まれるｈｃｐ構造のＡｌＮをより低減するには、ａ１層のＣｒの含有比率は、１５％以上とすることが好ましい。ａ１層のＣｒの含有比率（原子％）は、２０％以下とすることが好ましい。
The a1 layer is a nitride or charcoal containing an Al content ratio (atomic%) of 75% to 95% and a Cr content ratio (atomic%) of 5% to 25% with respect to the total amount of metal elements. Nitride.
If the Al content ratio of the a1 layer becomes too small, the Al content in the entire alternating laminated film decreases, heat resistance decreases, and cutting resistance during processing tends to increase. On the other hand, if the Al content ratio of the a1 layer becomes too large, the content of AlN having a fragile hcp structure increases, and the durability of the coated tool tends to be lowered. Therefore, the a1 layer has an Al content ratio (atomic%) of 75% to 95% with respect to the total amount of metal elements.
In order to further reduce the AlN having an hcp structure contained in the alternately laminated film, the Al content ratio (atomic%) in the a1 layer is preferably 85% or less. In order to further increase the heat resistance of the alternately laminated film and further reduce the cutting resistance, the Al content ratio (atomic%) of the a1 layer is preferably 80% or more.
Further, if the content ratio of Cr in the a1 layer becomes too small, the content of AlN having a fragile hcp structure increases, so that the durability of the coated tool decreases. On the other hand, if the content ratio of Cr in the a1 layer is too large, the Al content is relatively lowered, the heat resistance of the entire film is lowered, and the cutting resistance during processing tends to be increased. Therefore, the a1 layer has a Cr content ratio (atomic%) of 5% to 25% with respect to the total amount of metal elements.
In order to further reduce the AlN having an hcp structure contained in the alternately laminated film, the content ratio of Cr in the a1 layer is preferably 15% or more. The content ratio (atomic%) of Cr in the a1 layer is preferably 20% or less.
ａ２層は、金属元素の総量に対し、Ａｌの含有比率（原子％）が６５％以上８５％以下、Ｔｉの含有比率（原子％）が１５％以上３５％以下、を含有する窒化物または炭窒化物とする。
ａ２層のＡｌの含有比率が小さくなり過ぎれば、皮膜全体の耐熱性が低下するとともに、加工中の切削抵抗も増加する傾向にある。一方、ａ２層のＡｌの含有比率が大きくなり過ぎれば、脆弱なｈｃｐ構造のＡｌＮの含有量が増大するため被覆工具の耐久性が低下する傾向にある。よって、ａ２層は、金属元素の総量に対し、Ａｌの含有比率（原子％）を６５％以上８５％以下とする。
交互積層皮膜に含まれるｈｃｐ構造のＡｌＮをより低減するには、ａ２層のＡｌの含有比率（原子％）は、８０％以下とすることが好ましい。交互積層皮膜の耐熱性をより高め、切削抵抗をより低減するには、ａ２層のＡｌの含有比率（原子％）は、７０％以上とすることが好ましい。
また、ａ２層のＴｉの含有比率が小さくなり過ぎれば、被覆工具の耐久性が低下する傾向にある。一方、ａ２層のＴｉの含有比率が大きくなり過ぎれば、皮膜全体の耐熱性が低下するとともに、加工中の切削抵抗も増加する傾向にある。よって、ａ２層は、金属元素の総量に対し、Ｔｉの含有比率（原子％）を１５％以上３５％以下とする。
交互積層皮膜に含まれるｈｃｐ構造のＡｌＮをより低減するには、ａ２層のＴｉの含有比率（原子％）は、２０％以上とすることが好ましい。ａ２層のＴｉの含有比率（原子％）は、３０％以下とすることが好ましい。
The a2 layer is a nitride or charcoal containing an Al content ratio (atomic%) of 65% to 85% and a Ti content ratio (atomic%) of 15% to 35% with respect to the total amount of metal elements. Nitride.
If the Al content ratio of the a2 layer becomes too small, the heat resistance of the entire film is lowered and the cutting resistance during processing tends to increase. On the other hand, if the Al content ratio of the a2 layer becomes too large, the content of AlN having a fragile hcp structure increases, and the durability of the coated tool tends to decrease. Therefore, the a2 layer has an Al content ratio (atomic%) of 65% to 85% with respect to the total amount of metal elements.
In order to further reduce the AlN having an hcp structure contained in the alternately laminated film, the Al content ratio (atomic%) in the a2 layer is preferably 80% or less. In order to further increase the heat resistance of the alternately laminated film and further reduce the cutting resistance, the Al content ratio (atomic%) of the a2 layer is preferably set to 70% or more.
Moreover, if the Ti content ratio of the a2 layer becomes too small, the durability of the coated tool tends to be lowered. On the other hand, if the content ratio of Ti in the a2 layer becomes too large, the heat resistance of the entire film is lowered and the cutting resistance during processing tends to increase. Therefore, the a2 layer has a Ti content ratio (atomic%) of 15% to 35% with respect to the total amount of metal elements.
In order to further reduce the AlN having an hcp structure contained in the alternately laminated film, the Ti content ratio (atomic%) in the a2 layer is preferably 20% or more. The Ti content (atomic%) in the a2 layer is preferably 30% or less.
交互積層皮膜における全体の金属元素の原子比率（原子％）をＡ、窒素元素の原子比率（原子％）をＢとした場合、１．０２≦Ｂ／Ａ≦１．０７とする。
本発明では、交互積層皮膜の個々の組成を制御することに加えて、交互積層皮膜における金属元素の原子比率（原子％）に対して窒素元素の原子比率（原子％）を一定範囲に制御することが重要である。交互積層皮膜に含まれる窒素元素の原子比率（原子％）を高めて、Ｂ／Ａを１．０２以上とすることで、交互積層皮膜の結晶性および耐熱性が向上し、一定量のｈｃｐ構造のＡｌＮを含有しても、優れた耐久性を再現できることを確認した。更には、Ｂ／Ａは、１．０４以上とすることが好ましい。
一方、窒素元素の原子比率（原子％）が大きくなり過ぎ、Ｂ／Ａが１．０７よりも大きくなると、皮膜の残留圧縮応力が大きくなりすぎて被覆工具の耐久性が低下する。そのため、Ｂ／Ａは１．０７以下とする。
When the atomic ratio (atomic%) of the entire metal element in the alternating laminated film is A and the atomic ratio (atomic%) of the nitrogen element is B, 1.02 ≦ B / A ≦ 1.07.
In the present invention, in addition to controlling the individual composition of the alternating laminated film, the atomic ratio (atomic%) of the nitrogen element is controlled within a certain range with respect to the atomic ratio (atomic%) of the metal element in the alternating laminated film. This is very important. By increasing the atomic ratio (atomic%) of the nitrogen element contained in the alternating laminated film and setting B / A to 1.02 or more, the crystallinity and heat resistance of the alternating laminated film are improved, and a certain amount of hcp structure is obtained. It was confirmed that excellent durability can be reproduced even if AlN is contained. Furthermore, B / A is preferably 1.04 or more.
On the other hand, if the atomic ratio (atomic%) of the nitrogen element becomes too large and B / A becomes larger than 1.07, the residual compressive stress of the coating becomes too large and the durability of the coated tool is lowered. Therefore, B / A is 1.07 or less.
本発明において、交互積層皮膜は、酸素等を不可避的に含有する。そのため、交互積層皮膜の分析において、金属元素と窒素、酸素、炭素元素との合計を１００％としてＢ／Ａの比率を求める。交互積層皮膜の組成分析は、例えば、波長分散型電子プローブ微小分析（ＷＤＳ−ＥＰＭＡ）で測定するとができる。 In the present invention, the alternately laminated film inevitably contains oxygen and the like. Therefore, in the analysis of the alternately laminated film, the ratio of B / A is obtained by setting the total of metal elements and nitrogen, oxygen, and carbon elements as 100%. The composition analysis of the alternately laminated film can be measured by, for example, wavelength dispersion type electron probe microanalysis (WDS-EPMA).
ａ１層は、Ａｌの含有比率（原子％）が７５％以上９５％以下、Ｃｒの含有比率（原子％）が５％以上２５％以下、を含有する範囲で、ＡｌとＣｒ以外の金属元素を含有することができる。また、ａ２層は、Ａｌの含有比率（原子％）が６５％以上８５％以下、Ｔｉの含有比率（原子％）が１５％以上３５％以下、を含有する範囲で、ＡｌとＴｉ以外の金属元素を含有することができる。
ａ１層とａ２層に他の金属元素を含有する場合、ａ１層とａ２層のそれぞれに含有する他の金属元素の含有比率（原子％）を１０％以下にすることで、皮膜特性を低下させることなく、被覆工具が優れた耐久性を発揮することができ好ましい。ａ１層とａ２層に添加する金属元素は、周期律表の４ａ族、５ａ族、６ａ族の金属元素およびＳｉ、Ｂから選択される１種または２種以上の元素であることが好ましい。
ａ１層とａ２層は、窒化物または炭窒化物であれば、皮膜の一部に酸素等の非金属元素を含有してもよい。ａ１層とａ２層は、耐熱性が優れる皮膜種である窒化物であることがより好ましい。
The a1 layer contains a metal element other than Al and Cr within a range that the Al content ratio (atomic%) is 75% to 95% and the Cr content ratio (atomic%) is 5% to 25%. Can be contained. Further, the a2 layer has a content ratio of Al (atomic%) of 65% to 85% and a Ti content ratio (atomic%) of 15% to 35%. It can contain elements.
When other metal elements are contained in the a1 layer and the a2 layer, the film characteristics are lowered by setting the content ratio (atomic%) of other metal elements contained in each of the a1 layer and the a2 layer to 10% or less. Therefore, the coated tool is preferable because it can exhibit excellent durability. The metal element added to the a1 layer and the a2 layer is preferably one or more elements selected from the group 4a group, 5a group, and 6a group metal elements of the periodic table, and Si and B.
If the a1 layer and the a2 layer are nitrides or carbonitrides, a part of the film may contain a nonmetallic element such as oxygen. The a1 layer and the a2 layer are more preferably nitrides which are film types having excellent heat resistance.
ａ１層とａ２層の個々の膜厚が大きくなり過ぎると、ｈｃｐ構造のＡｌＮが増大し易くなり被覆工具の耐久性が低下する傾向にある。そのため、ａ１層とａ２層の個々の膜厚は７０ｎｍ以下とすることが好ましい。より好ましい膜厚は５０ｎｍ以下である。被覆工具の性能をより安定化させるには、ａ１層とａ２層の個々の膜厚は５ｎｍ以上とすることが好ましく、更には１０ｎｍ以上とすることが好ましい。 If the individual film thicknesses of the a1 layer and the a2 layer are too large, the AlN of the hcp structure tends to increase and the durability of the coated tool tends to decrease. Therefore, the individual film thicknesses of the a1 layer and the a2 layer are preferably 70 nm or less. A more preferable film thickness is 50 nm or less. In order to further stabilize the performance of the coated tool, the individual film thicknesses of the a1 layer and the a2 layer are preferably 5 nm or more, and more preferably 10 nm or more.
交互積層皮膜の全体組成は、金属元素の総量に対し、Ａｌの含有比率（原子％）を７０％以上とすることが好ましい。交互積層皮膜の全体でＡｌの含有比率を７０％以上とすることで、皮膜全体の耐熱性が向上するとともに、加工中の溶着を抑制することができる。更には、交互積層皮膜の全体でＡｌの含有比率（原子％）を７５％以上とすることが好ましく、更には８０％以上とすることが好ましい。
一方、交互積層皮膜の全体組成のＡｌの含有比率が大きくなり過ぎると、ｈｃｐ構造のＡｌＮが増大する傾向を示す。そのため、より高い耐久性を確保するには、交互積層皮膜の全体組成でＡｌの含有比率（原子％）を８５％以下とすることが好ましい。
The total composition of the alternating laminated film is preferably such that the Al content ratio (atomic%) is 70% or more with respect to the total amount of metal elements. By setting the Al content ratio to 70% or more in the entire laminated film, the heat resistance of the entire film is improved and welding during processing can be suppressed. Furthermore, the Al content ratio (atomic%) is preferably 75% or more, and more preferably 80% or more in the entire alternating multilayer coating.
On the other hand, when the Al content ratio of the overall composition of the alternating laminated film becomes too large, AlN having an hcp structure tends to increase. Therefore, in order to ensure higher durability, it is preferable that the Al content ratio (atomic%) is 85% or less in the entire composition of the alternately laminated film.
本発明の交互積層皮膜は、Ｘ線回折等で特定される結晶構造において、面心立方格子（ｆｃｃ；以下、単に「ｆｃｃ」と略記する）構造に対応するピーク強度が最大である。本発明において、ｆｃｃ構造が主体とは、例えば、Ｘ線回折においてｆｃｃ構造に対応するピーク強度が最大であることをいう。Ｘ線回折による結晶構造の同定が困難な場合、透過電子顕微鏡（ＴＥＭ）を用いた制限視野回折法によって結晶構造の同定することができる。
本発明の交互積層皮膜は、ｆｃｃ構造のピーク強度のうち、ｆｃｃ構造の（２００）面または（１１１）面の何れかが最大強度を示すものである。ｆｃｃ構造の（２００）面または（１１１）面の何れかが最大強度を示すことで、より高い耐久性を発揮する傾向にある。本発明の交互積層皮膜は、ｆｃｃ構造に対応するピーク強度が最大であれば、ｈｃｐ構造に起因するピークが確認されてもよい。
The alternating multilayer coating of the present invention has the maximum peak intensity corresponding to a face-centered cubic lattice (fcc; hereinafter simply abbreviated as “fcc”) structure in a crystal structure specified by X-ray diffraction or the like. In the present invention, “mainly fcc structure” means that, for example, the peak intensity corresponding to the fcc structure is maximum in X-ray diffraction. When it is difficult to identify a crystal structure by X-ray diffraction, the crystal structure can be identified by a limited field diffraction method using a transmission electron microscope (TEM).
In the alternating laminated film of the present invention, either the (200) plane or the (111) plane of the fcc structure shows the maximum intensity among the peak intensities of the fcc structure. When either the (200) plane or the (111) plane of the fcc structure shows the maximum strength, higher durability tends to be exhibited. If the peak intensity corresponding to the fcc structure is the maximum, the peak resulting from the hcp structure may be confirmed in the alternately laminated film of the present invention.
本発明の交互積層皮膜は、ｈｃｐ構造のＡｌＮを含有する場合でも、Ｘ線回折におけるｈｃｐ構造の（１００）面に起因するピーク強度をＩｈ、ｆｃｃ構造の（１１１）面、ｆｃｃ構造の（２００）面、ｆｃｃ構造の（２２０）面に起因するピーク強度の合計をＩｆとした場合、Ｉｈ／（Ｉｆ＋Ｉｈ）を０．４以下にすることが好ましい。Ｉｈ／（Ｉｆ＋Ｉｈ）を０．４以下にすることで、ｈｃｐ構造のＡｌＮがより減少して耐久性が向上する傾向にある。更には、Ｉｈ／（Ｉｆ＋Ｉｈ）を０．２以下とすることが好ましい。 Even when the alternating laminated film of the present invention contains AlN having an hcp structure, the peak intensity due to the (100) plane of the hcp structure in X-ray diffraction is Ih, the (111) plane of the fcc structure, and the (200) of the fcc structure (200). ) Plane and the total peak intensity due to the (220) plane of the fcc structure is set to If, Ih / (If + Ih) is preferably set to 0.4 or less. By setting Ih / (If + Ih) to 0.4 or less, the AlN of the hcp structure is further reduced and the durability tends to be improved. Furthermore, Ih / (If + Ih) is preferably 0.2 or less.
交互積層皮膜の全体の膜厚が薄くなり過ぎても、厚くなり過ぎても被覆工具の耐久性を向上する効果が小さい場合がある。そのため、交互積層皮膜の全体の膜厚は０．５μｍ以上１０．０μｍ以下とすることが好ましい。更には、交互積層皮膜の膜厚の下限は、１．０μｍ以上とすることが好ましい。更には、交互積層皮膜の膜厚の上限は、５．０μｍ以上とすることが好ましい。
本発明においては、交互積層皮膜の上層に金属、窒化物、炭窒化物、炭化物、硼化物からなる別層を設けてもよい。また、基材と交互積層皮膜の間に金属、窒化物、炭窒化物、炭化物からなる中間皮膜を設けてもよい。
The effect of improving the durability of the coated tool may be small even if the total thickness of the alternating laminated film becomes too thin or too thick. Therefore, it is preferable that the total film thickness of the alternating laminated film is 0.5 μm or more and 10.0 μm or less. Furthermore, it is preferable that the minimum of the film thickness of an alternating laminated film shall be 1.0 micrometer or more. Furthermore, the upper limit of the film thickness of the alternately laminated film is preferably 5.0 μm or more.
In the present invention, another layer made of metal, nitride, carbonitride, carbide, or boride may be provided on the upper layer of the alternately laminated film. Further, an intermediate film made of metal, nitride, carbonitride, or carbide may be provided between the base material and the alternately laminated film.
本発明の基材は、特に制限されるものではなく、用途や目的等に応じて適宜選択することができる。例えば、超硬合金、セラミックス、サーメット、冷間工具鋼、高速度工具鋼、プラスチック金型用鋼、熱間工具鋼等を適用することができる。また、基材には窒化処理や浸炭処理等を施したものを用いてもよい。 The base material of the present invention is not particularly limited, and can be appropriately selected according to the use and purpose. For example, cemented carbide, ceramics, cermet, cold tool steel, high speed tool steel, plastic mold steel, hot tool steel, etc. can be applied. Moreover, you may use what performed the nitriding process, the carburizing process, etc. to a base material.
アークイオンプレーティング法では、成膜する金属成分で形成されたターゲットをカソード（陰極）として、該カソードとアノード（陽極）との間に真空アーク放電を発生させ、ターゲット表面から材料を蒸発、イオン化して、負のバイアス電圧を印加した基材の表面にイオン化したターゲット成分を堆積させて皮膜を形成する。このとき、アーク放電によりカソード（ターゲット）から放電された電子はアノードに向かって飛び、その電子が供給された窒素ガス等の反応ガスと衝突することでガス成分がイオン化し、イオン化したガス成分とターゲット成分とが反応して基材の表面に皮膜を形成する。ここで、電子エネルギー（ｅＶ）は電圧に比例することから、カソード電圧を高めることで電子エネルギーが高まり、反応ガスのイオン化がより促進されて、ｆｃｃ構造の比率がより高まるとともに、皮膜中の窒素の含有比率を高めることができる。
本発明者の検討によると、Ａｌの含有量が多いＡｌとＣｒの窒化物または炭窒化物の被覆において、カソード電圧を高めることが皮膜中のｈｃｐ構造を低減して、皮膜中の窒素含有比率を高めるのに有効であることを知見した。
In the arc ion plating method, a target formed of a metal component to be deposited is used as a cathode (cathode), a vacuum arc discharge is generated between the cathode and the anode (anode), and the material is evaporated and ionized from the target surface. Then, an ionized target component is deposited on the surface of the substrate to which a negative bias voltage is applied to form a film. At this time, the electrons discharged from the cathode (target) by the arc discharge fly toward the anode, and the gas components are ionized by colliding with the reaction gas such as nitrogen gas supplied with the electrons, and the ionized gas components and The target component reacts to form a film on the surface of the substrate. Here, since the electron energy (eV) is proportional to the voltage, the electron energy is increased by increasing the cathode voltage, the ionization of the reaction gas is further promoted, the ratio of the fcc structure is further increased, and the nitrogen in the film is increased. The content ratio of can be increased.
According to the inventor's study, in the coating of Al and Cr nitrides or carbonitrides with a high Al content, increasing the cathode voltage reduces the hcp structure in the film, and the nitrogen content ratio in the film It was found to be effective in increasing
交互積層皮膜の全体でｈｃｐ構造のＡｌＮを低減して窒素含有量を高めるには、ＡｌとＣｒの窒化物または炭窒化物であるａ１層の被覆において、カソード電圧を２０Ｖよりも大きくすることが好ましい。更には、ａ１層の被覆においてカソード電圧を２２Ｖ以上とすることが好ましい。一方、カソード電圧が高くなり過ぎるとａ１層の成膜が安定し難くなるので、カソード電圧は３５Ｖ以下とすることが好ましい。更には、ａ１層の被覆ではカソード電圧を３０Ｖ以下とすることが好ましい。
ＡｌとＴｉの窒化物または炭窒化物であるａ２層の被覆では、カソード電圧は２０Ｖ以上３５Ｖ以下とすることが好ましい。
In order to reduce the hcp-structured AlN and increase the nitrogen content in the entire laminated film, the cathode voltage should be made higher than 20 V in the coating of the a1 layer which is a nitride or carbonitride of Al and Cr. preferable. Furthermore, it is preferable that the cathode voltage is 22 V or more in the coating of the a1 layer. On the other hand, if the cathode voltage becomes too high, the formation of the a1 layer becomes difficult to stabilize, so the cathode voltage is preferably set to 35 V or less. Furthermore, it is preferable that the cathode voltage is 30 V or less in the coating of the a1 layer.
In the coating of the a2 layer made of Al and Ti nitride or carbonitride, the cathode voltage is preferably set to 20 V or more and 35 V or less.
そして、交互積層皮膜の全体でｈｃｐ構造を低減した上で窒素含有量を高めるには、被覆中の基材に印加する負のバイアス電圧を制御することも重要である。ａ１層の被覆においてカソード電圧を高めたとしても基材に印加するバイアス電圧の絶対値が小さいと、皮膜中の窒素含有量が低下するとともに、皮膜中のｈｃｐ構造のＡｌＮが増加し易くなる。また、基材に印加するバイアス電圧の絶対値が大きいと成膜が安定し難くなる。そのため、基材に印加するバイアス電圧を−２２０Ｖ以上−８０Ｖ以下で被覆することが好ましい。 And, in order to increase the nitrogen content while reducing the hcp structure in the entire alternating laminated film, it is also important to control the negative bias voltage applied to the substrate being coated. Even if the cathode voltage is increased in the coating of the a1 layer, if the absolute value of the bias voltage applied to the substrate is small, the nitrogen content in the film is lowered and the AlN of the hcp structure in the film is likely to increase. In addition, when the absolute value of the bias voltage applied to the substrate is large, film formation becomes difficult. Therefore, it is preferable that the bias voltage applied to the substrate is covered with −220V or more and −80V or less.
本発明の交互積層皮膜は、上述したバイアス電圧とカソード圧力の制御に加えて、ターゲット中心付近の垂直方向成分の平均磁束密度が１４ｍＴ以上のカソードを用いて被覆することが好ましい。このようなカソードを用いて硬質皮膜を被覆することで、皮膜の結晶性がより高まり、皮膜中のｈｃｐ構造のＡｌＮが低減し易くなる。更に、ターゲット中心付近から基材付近まで磁力線が到達するように磁場配置を調整したカソードを用いることが好ましい。 In addition to the control of the bias voltage and the cathode pressure described above, the alternating laminated film of the present invention is preferably coated with a cathode having an average magnetic flux density of 14 mT or more in the vertical direction component near the target center. By coating the hard coating using such a cathode, the crystallinity of the coating is further increased, and the AlN of the hcp structure in the coating is easily reduced. Furthermore, it is preferable to use a cathode whose magnetic field arrangement is adjusted so that the lines of magnetic force reach from the vicinity of the target center to the vicinity of the substrate.
ＷＣ基超硬合金からなる切削評価用のエンドミルと物性評価用のインサートを基材に用い、各条件で交互積層皮膜等の硬質皮膜を被覆して被覆試料を作製して特性評価を行った。
硬質皮膜の成膜にはアークイオンプレーティング成膜装置を用いた。真空容器内に設置した基材にはバイアス電源が接続されおり、基材に負のＤＣバイアス電圧を印加して硬質皮膜を被覆した。
表１に成膜に用いたカソードおよびバイアス条件について示す。本発明のａ１層とａ２層の被覆には、ターゲットの外周および背面に永久磁石を配備し、１５ｍＴの平均磁束密度のカソード（以下、Ｃ１、Ｃ２と記載する）を用いた。
Using an end mill for cutting evaluation made of a WC-based cemented carbide and an insert for evaluating physical properties as a base material, a coated film was prepared by coating a hard film such as an alternating laminated film under each condition, and the characteristics were evaluated.
An arc ion plating film forming apparatus was used for forming the hard film. A bias power source was connected to the base material installed in the vacuum vessel, and a negative DC bias voltage was applied to the base material to coat the hard film.
Table 1 shows cathodes and bias conditions used for film formation. For covering the a1 layer and the a2 layer of the present invention, permanent magnets were provided on the outer periphery and the back surface of the target, and cathodes (hereinafter referred to as C1 and C2) having an average magnetic flux density of 15 mT were used.
基材を真空容器内のパイプ状治具に固定し、約５００℃、１×１０−３Ｐａの真空中で加熱脱ガスを行った後、Ａｒプラズマによるクリーニングを行った。そして、８×１０−３Ｐａ以下になるように真空排気して、１５０Ａのアーク電流を供給してＴｉボンバード処理を４分間実施した。その後、炉内に窒素ガスを導入して炉内圧力を５Ｐａとした。
本発明例１〜３、比較例１の被覆では、基材にバイアス電圧を印加し、Ｃ１とＣ２のそれぞれにアーク電流を投入し、ａ１層とａ２層の個々の膜厚が約２０ｎｍになるように成膜し、約２．５μｍの交互積層皮膜を被覆した。
比較例２は、単層皮膜からなるＡｌＣｒＮの窒化物を約２．５μｍ被覆して作製した。
The substrate was fixed to a pipe-shaped jig in a vacuum vessel, heated and degassed in a vacuum of about 500 ° C. and 1 × 10 −3 Pa, and then cleaned with Ar plasma. And it vacuum-evacuated so that it might become 8 * 10 < -3 > Pa or less, the arc current of 150A was supplied, and Ti bombarding process was implemented for 4 minutes. Thereafter, nitrogen gas was introduced into the furnace so that the pressure in the furnace was 5 Pa.
In the coatings of Invention Examples 1 to 3 and Comparative Example 1, a bias voltage is applied to the substrate, an arc current is applied to each of C1 and C2, and the individual film thicknesses of the a1 layer and the a2 layer are about 20 nm. The film was formed in such a manner as to cover an alternating laminated film of about 2.5 μm.
Comparative Example 2 was fabricated by coating about 2.5 μm of AlCrN nitride composed of a single layer coating.
株式会社日本電子製の電子プローブマイクロアナライザー装置（型番：ＪＸＡ−８５００Ｆ）を用いて、付属の波長分散型電子プローブ微小分析（ＷＤＳ−ＥＰＭＡ）で交互積層皮膜の皮膜組成を測定した。物性評価用のインサートを断面加工して、加速電圧１０ｋＶ、照射電流５×１０−８Ａ、取り込み時間１０秒、分析領域直径１μｍ、分析深さが略１μｍで５点測定してその平均から皮膜組成を求めた。
Ｂ／Ａの値は、金属元素（半金属を含む）と、窒素元素、酸素元素、炭素元素の合計を１００％として求めた。
Using an electronic probe microanalyzer device (model number: JXA-8500F) manufactured by JEOL Ltd., the film composition of the alternately laminated film was measured by the attached wavelength dispersion type electron probe microanalysis (WDS-EPMA). Cross section processing of insert for physical property evaluation, acceleration voltage 10 kV, irradiation current 5 × 10 −8 A, uptake time 10 seconds, analysis area diameter 1 μm, analysis depth is approximately 1 μm, and 5 points are measured and the film is obtained from the average The composition was determined.
The value of B / A was determined by setting the total of metal elements (including metalloids), nitrogen elements, oxygen elements, and carbon elements as 100%.
日本電子株式会社製の電界放出型透過電子顕微鏡（型番：ＪＥＭ−２０１０Ｆ型）を用いて分析用のインサートを加工してＴＥＭ解析を行った。ａ１層とａ２層の組成分析は、付属のＵＴＷ型Ｓｉ（Ｌｉ）半導体検出器を用いてビーム径１ｎｍでａ１層とａ２層の中心付近を分析して求めた。 The insert for analysis was processed using a field emission transmission electron microscope (model number: JEM-2010F type) manufactured by JEOL Ltd., and TEM analysis was performed. The composition analysis of the a1 layer and the a2 layer was obtained by analyzing the vicinity of the center of the a1 layer and the a2 layer with a beam diameter of 1 nm using an attached UTW type Si (Li) semiconductor detector.
株式会社エリオニクス製のナノインデンテーション装置（型番：ＥＮＴ−１１００ａ）を用いて交互積層皮膜等の硬度皮膜の表面硬度を測定した。この硬度測定は、分析用のインサートの表面から、押込み荷重４９ｍＮ、最大荷重保持時間１秒、荷重負荷後の除去速度０．４９ｍＮ／秒の測定条件で１０点測定し、その平均値を求めた。 The surface hardness of a hardness film such as an alternating laminated film was measured using a nanoindentation device (model number: ENT-1100a) manufactured by Elionix Co., Ltd. This hardness measurement was performed by measuring 10 points from the surface of the insert for analysis under the measurement conditions of an indentation load of 49 mN, a maximum load holding time of 1 second, and a removal speed after loading of 0.49 mN / second, and the average value was obtained. .
株式会社リガク製のＸ線回折装置（型番：ＲＩＮＴ２５００Ｖ−ＰＳＲＣ／ＭＤＧ）を用いて皮膜の結晶構造を測定した。このＸ線回折は、物性評価用のインサートを用いて、管電圧４０ｋＶ、管電流３００ｍＡ、Ｘ線源Ｃｕｋα（λ＝０．１５４１８ｎｍ）、２θが２０〜７０度の測定条件で実施した。
バックグラウンドを除去し、ｈｃｐ構造の（１００）面に起因するピーク強度をＩｈ、ｆｃｃ構造の（１１１）面、ｆｃｃ構造の（２００）面、ｆｃｃ構造の（２２０）面に起因するピーク強度の合計をＩｆとし、Ｉｈ／（Ｉｆ+Ｉｈ）を測定した。
The crystal structure of the film was measured using an X-ray diffractometer (model number: RINT2500V-PSRC / MDG) manufactured by Rigaku Corporation. This X-ray diffraction was performed using an insert for evaluating physical properties under measurement conditions of a tube voltage of 40 kV, a tube current of 300 mA, an X-ray source Cukα (λ = 0.15418 nm), and 2θ of 20 to 70 degrees.
The background is removed, and the peak intensity attributed to the (100) plane of the hcp structure is represented by Ih, the (111) plane of the fcc structure, the (200) plane of the fcc structure, and the (220) plane of the fcc structure. The sum is If, and Ih / (If + Ih) is measured.
各試料の特性評価を表２に纏める。本発明例２と比較例１の比較から、ａ１層を被覆するときのカソード電圧を高めることで、交互積層皮膜のＢ／Ａが高くなることが確認された。
図１〜３に本発明例１〜３のＸ線回折結果を示す。図４、５に比較例１、２のＸ線回折結果を示す。ｆｃｃ構造の（１１１）面のピーク強度は３７．７°付近、ｆｃｃ構造の（２００）面のピーク強度は４３．７°付近、ｆｃｃ構造の（２２０）面のピーク強度は６３°付近、ｈｃｐ構造の（１００）面のピーク強度は３３°付近から求められる。これらのＸ線回折結果からバックグラウンド強度を除去して、Ｉｈ／（Ｉｆ＋Ｉｈ）を求めたところ、本発明例の中でも、本発明例１、２は、Ｉｈ／（Ｉｆ＋Ｉｈ）がより小さく、ｈｃｐ構造のＡｌＮがより少ないことが確認された。
The characteristic evaluation of each sample is summarized in Table 2. From comparison between Invention Example 2 and Comparative Example 1, it was confirmed that the B / A of the alternately laminated film was increased by increasing the cathode voltage when coating the a1 layer.
1-3 show the X-ray diffraction results of Examples 1 to 3 of the present invention. 4 and 5 show the X-ray diffraction results of Comparative Examples 1 and 2. FIG. The peak intensity of the (111) plane of the fcc structure is around 37.7 °, the peak intensity of the (200) plane of the fcc structure is around 43.7 °, the peak intensity of the (220) plane of the fcc structure is around 63 °, hcp The peak intensity of the (100) plane of the structure is obtained from around 33 °. The background intensity was removed from these X-ray diffraction results, and Ih / (If + Ih) was determined. Among the inventive examples, inventive examples 1 and 2 had a smaller Ih / (If + Ih) and an hcp structure. It was confirmed that there was less AlN.
切削評価は以下の条件１と条件２で実施した。評価結果を表３に示す。
＜切削試験 条件１＞
工具：ソリッドエンドミル
φ１０×２枚刃（日立ツール株式会社製 ＨＥＳ２１００）
基材：ＷＣ（ｂａｌ．）−Ｃｏ（１１質量％）−ＴａＣ（０．４質量％）−Ｃｒ３Ｃ２（０．９質量％）、ＷＣ平均粒径０．６μｍ、硬度９２．４ＨＲＡの超硬合金
切削方法：側面切削
被削材：質量％で、Ｎｉ−１９％Ｃｒ−１８．７％Ｆｅ−３．０％Ｍｏ−５．０％（Ｎｄ＋Ｔａ）−０．８％Ｔｉ−０．５％Ａｌ−０．０３％Ｃの組成を有するＮｉ基合金（時効硬化処理済み）
切込み：軸方向６ｍｍ、径方向０．３ｍｍ
切削速度：４０ｍ／ｍｉｎ
一刃送り量：０．０４ｍｍ／ｔｏｏｔｈ
切削油：水溶性切削油
切削距離：０．２ｍ
Cutting evaluation was performed under the following
<Cutting test condition 1>
Tool: Solid end mill φ10 × 2 flute (HES2100 manufactured by Hitachi Tool Co., Ltd.)
Base material: WC (bal.)-Co (11 mass%)-TaC (0.4 mass%)-Cr 3 C 2 (0.9 mass%), WC average particle diameter 0.6 μm, hardness 92.4HRA Cemented carbide cutting method: side cutting Work material: Ni-19% Cr-18.7% Fe-3.0% Mo-5.0% (Nd + Ta) -0.8% Ti-0. Ni-based alloy having a composition of 5% Al-0.03% C (age-hardened)
Cutting depth: 6mm in the axial direction, 0.3mm in the radial direction
Cutting speed: 40 m / min
Single blade feed rate: 0.04mm / tooth
Cutting oil: Water-soluble cutting oil Cutting distance: 0.2m
＜切削試験 条件２＞
工具：ボールノーズエンドミル
φ１×Ｒ０．５×２枚刃（日立ツール株式会社製）
基材：組成が、ＷＣ（ｂａｌ．）−Ｃｏ（８質量％）−ＴａＣ（０．２５質量％）−Ｃｒ３Ｃ２（０．９質量％）であり、ＷＣ平均粒径０．６μｍ、硬度９３．４ＨＲＡの超硬合金
切削方法：底面切削
被削材：ＨＰＭ（登録商標）３８ （５２ＨＲＣ）日立金属株式会社製
切込み：軸方向０．０４ｍｍ、径方向０．０４ｍｍ
切削速度：７８．５ｍ／ｍｉｎ
一刃送り量：０．０２ｍｍ／ｔｏｏｔｈ
切削油：エアーブロー
切削距離：１ｍ
<
Tool: Ball nose end mill φ1 × R0.5 × 2 flute (manufactured by Hitachi Tool Co., Ltd.)
Substrate: The composition is WC (bal.)-Co (8 mass%)-TaC (0.25 mass%)-Cr 3 C 2 (0.9 mass%), and the WC average particle diameter is 0.6 μm, Cemented carbide with a hardness of 93.4 HRA Cutting method: Bottom cutting Workpiece: HPM (registered trademark) 38 (52HRC) manufactured by Hitachi Metals, Ltd. Cutting: 0.04 mm in the axial direction, 0.04 mm in the radial direction
Cutting speed: 78.5 m / min
Single blade feed rate: 0.02mm / tooth
Cutting oil: Air blow Cutting distance: 1m
本発明例１〜３は何れの切削条件においても、最大摩耗幅が抑制されて、安定した摩耗形態を示すことが確認された。本発明例１と本発明例３の比較から、ａ１層のＡｌ含有比率がより好ましい本発明例１は、交互積層皮膜に含まれるｈｃｐ構造のＡｌＮが少ない傾向にあり、より優れた耐久性を示すことが確認された。
比較例１は、特に条件１において最大摩耗幅が大きくなり、本発明例よりも耐久性が低下することが確認された。
比較例２は、何れの加工条件においても最大摩耗幅が大きくなった。特に加工条件２においては、不安定な摩耗形態を示し、継続して切削加工することが困難であった。
It was confirmed that the inventive examples 1 to 3 showed a stable wear form with the maximum wear width being suppressed under any cutting conditions. From a comparison between Invention Example 1 and Invention Example 3, Invention Example 1 in which the Al content ratio of the a1 layer is more preferable tends to be less AlN of hcp structure contained in the alternating laminated film, and has better durability. It was confirmed to show.
In Comparative Example 1, it was confirmed that the maximum wear width was particularly large under Condition 1, and the durability was lower than that of the inventive example.
In Comparative Example 2, the maximum wear width was large under any processing condition. In particular, in the
Claims (2)
前記交互積層皮膜は、金属元素（半金属を含む）の総量に対し、Ａｌの含有比率（原子％）が７５％以上９５％以下、Ｃｒの含有比率（原子％）が５％以上２５％以下、を含有する窒化物または炭窒化物からなるａ１層と、
Ａｌの含有比率（原子％）が６５％以上８５％以下、Ｔｉの含有比率（原子％）が１５％以上３５％以下、を含有する窒化物または炭窒化物からなるａ２層とが交互に形成されたものであり、
前記交互積層皮膜の金属（半金属を含む）元素の原子比率（原子％）をＡ、窒素元素の原子比率（原子％）をＢとした場合、１．０２≦Ｂ／Ａ≦１．０７である被覆工具。 A base material, and an alternately laminated film disposed on the base material,
The alternating layered film has an Al content ratio (atomic%) of 75% to 95% and a Cr content ratio (atomic%) of 5% to 25% with respect to the total amount of metal elements (including metalloids). A1 layer made of a nitride or carbonitride containing
Al2 layers made of nitride or carbonitride containing Al content (atomic%) of 65% to 85% and Ti content (atomic%) of 15% to 35% are alternately formed. It has been
When the atomic ratio (atomic%) of the metal (including metalloid) element of the alternating laminated film is A and the atomic ratio (atomic%) of the nitrogen element is B, 1.02 ≦ B / A ≦ 1.07 A coated tool.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019098363A1 (en) * | 2017-11-20 | 2019-05-23 | 三菱日立ツール株式会社 | Coated cutting tool |
| WO2020226088A1 (en) * | 2019-05-09 | 2020-11-12 | 株式会社Moldino | Coated cutting tool |
| US11666976B2 (en) | 2019-03-18 | 2023-06-06 | Moldino Tool Engineering, Ltd. | Coated cutting tool |
| WO2024048306A1 (en) * | 2022-08-29 | 2024-03-07 | 株式会社Moldino | Coated tool |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003071610A (en) * | 2000-12-28 | 2003-03-12 | Kobe Steel Ltd | Hard coating for cutting tool, manufacturing method therefor and target for forming hard coating |
| WO2006070730A1 (en) * | 2004-12-28 | 2006-07-06 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool and process for producing the same |
| JP2008031517A (en) * | 2006-07-28 | 2008-02-14 | Tungaloy Corp | Coated member |
| JP2009220260A (en) * | 2008-02-22 | 2009-10-01 | Hitachi Tool Engineering Ltd | Coated cutting tool and method for manufacturing the same |
| JP2010120100A (en) * | 2008-11-18 | 2010-06-03 | Hitachi Tool Engineering Ltd | Hard coating film coated tool for turning |
| JP2010131741A (en) * | 2008-10-31 | 2010-06-17 | Sumitomo Electric Hardmetal Corp | Surface-coated cutting tool |
| JP2010142932A (en) * | 2008-12-22 | 2010-07-01 | Sumitomo Electric Ind Ltd | Surface-coated cutting tool |
| JP2010284787A (en) * | 2009-06-15 | 2010-12-24 | Hitachi Tool Engineering Ltd | Hard film coated cutting tool |
| JP2011011286A (en) * | 2009-07-01 | 2011-01-20 | Sumitomo Electric Hardmetal Corp | Surface coated cutting tool |
| JP2011011287A (en) * | 2009-07-01 | 2011-01-20 | Sumitomo Electric Hardmetal Corp | Surface coated cutting tool |
| WO2011149064A1 (en) * | 2010-05-27 | 2011-12-01 | 京セラ株式会社 | Cutting tool |
| JP2012036506A (en) * | 2011-11-08 | 2012-02-23 | Tungaloy Corp | Coating member |
| JP2012157938A (en) * | 2011-02-01 | 2012-08-23 | Sumitomo Electric Hardmetal Corp | Surface coating cutting tool |
| JP2014087858A (en) * | 2012-10-29 | 2014-05-15 | Mitsubishi Materials Corp | Cutting tool |
-
2015
- 2015-01-07 JP JP2015001399A patent/JP6529262B2/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003071610A (en) * | 2000-12-28 | 2003-03-12 | Kobe Steel Ltd | Hard coating for cutting tool, manufacturing method therefor and target for forming hard coating |
| WO2006070730A1 (en) * | 2004-12-28 | 2006-07-06 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool and process for producing the same |
| JP2008031517A (en) * | 2006-07-28 | 2008-02-14 | Tungaloy Corp | Coated member |
| JP2009220260A (en) * | 2008-02-22 | 2009-10-01 | Hitachi Tool Engineering Ltd | Coated cutting tool and method for manufacturing the same |
| JP2010131741A (en) * | 2008-10-31 | 2010-06-17 | Sumitomo Electric Hardmetal Corp | Surface-coated cutting tool |
| JP2010120100A (en) * | 2008-11-18 | 2010-06-03 | Hitachi Tool Engineering Ltd | Hard coating film coated tool for turning |
| JP2010142932A (en) * | 2008-12-22 | 2010-07-01 | Sumitomo Electric Ind Ltd | Surface-coated cutting tool |
| JP2010284787A (en) * | 2009-06-15 | 2010-12-24 | Hitachi Tool Engineering Ltd | Hard film coated cutting tool |
| JP2011011286A (en) * | 2009-07-01 | 2011-01-20 | Sumitomo Electric Hardmetal Corp | Surface coated cutting tool |
| JP2011011287A (en) * | 2009-07-01 | 2011-01-20 | Sumitomo Electric Hardmetal Corp | Surface coated cutting tool |
| WO2011149064A1 (en) * | 2010-05-27 | 2011-12-01 | 京セラ株式会社 | Cutting tool |
| JP2012157938A (en) * | 2011-02-01 | 2012-08-23 | Sumitomo Electric Hardmetal Corp | Surface coating cutting tool |
| JP2012036506A (en) * | 2011-11-08 | 2012-02-23 | Tungaloy Corp | Coating member |
| JP2014087858A (en) * | 2012-10-29 | 2014-05-15 | Mitsubishi Materials Corp | Cutting tool |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102200169B1 (en) * | 2017-11-20 | 2021-01-07 | 가부시키가이샤 몰디노 | Cloth cutting tool |
| KR20200033352A (en) * | 2017-11-20 | 2020-03-27 | 미츠비시 히타치 쓰루 가부시키가이샤 | Cloth cutting tools |
| JPWO2019098363A1 (en) * | 2017-11-20 | 2020-04-16 | 三菱日立ツール株式会社 | Coated cutting tools |
| CN111511490A (en) * | 2017-11-20 | 2020-08-07 | 三菱日立工具株式会社 | Coated cutting tool |
| WO2019098363A1 (en) * | 2017-11-20 | 2019-05-23 | 三菱日立ツール株式会社 | Coated cutting tool |
| EP3715026A4 (en) * | 2017-11-20 | 2021-04-14 | Mitsubishi Hitachi Tool Engineering, Ltd. | Coated cutting tool |
| US11052464B2 (en) | 2017-11-20 | 2021-07-06 | Moldino Tool Engineering, Ltd. | Coated cutting tool |
| US11666976B2 (en) | 2019-03-18 | 2023-06-06 | Moldino Tool Engineering, Ltd. | Coated cutting tool |
| WO2020226088A1 (en) * | 2019-05-09 | 2020-11-12 | 株式会社Moldino | Coated cutting tool |
| JPWO2020226088A1 (en) * | 2019-05-09 | 2020-11-12 | ||
| JP7031791B2 (en) | 2019-05-09 | 2022-03-08 | 株式会社Moldino | Cover cutting tool |
| US11965235B2 (en) | 2019-05-09 | 2024-04-23 | Moldino Tool Engineering, Ltd. | Coated cutting tool |
| WO2024048306A1 (en) * | 2022-08-29 | 2024-03-07 | 株式会社Moldino | Coated tool |
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