JP2016106405A - Electrostatic actuator and variable capacitance device - Google Patents

Electrostatic actuator and variable capacitance device Download PDF

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JP2016106405A
JP2016106405A JP2016001353A JP2016001353A JP2016106405A JP 2016106405 A JP2016106405 A JP 2016106405A JP 2016001353 A JP2016001353 A JP 2016001353A JP 2016001353 A JP2016001353 A JP 2016001353A JP 2016106405 A JP2016106405 A JP 2016106405A
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movable beam
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electrostatic actuator
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JP6038362B2 (en
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甲二 埴原
Koji Haniwara
甲二 埴原
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Pioneer Corp
Pioneer Micro Technology Corp
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Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic actuator of a simple configuration, capable of obtaining a strong pull-away force when a first movable beam is pulled away from a fixed electrode.SOLUTION: An electrostatic actuator includes: a fixed driving electrode 21 provided on a silicon substrate 2; and a movable part 22 including a plurality of movable beams 31, 32 which have a folded structure configured to be expandable and are connected together via a coupling part 34 comprising an insulator. In the movable part 22, an electrostatic force between the first movable beam 31 located on a fixed driving electrode 21 side of the plurality of movable beams 31, 32 and the fixed driving electrode 21 causes an expansion between the plurality of movable beams 31, 32 so that the first movable beam 31 approaches the fixed driving electrode 21. An interactive electrostatic force between the movable beams 31, 32 adjacent to each other causes a contraction between the movable beams 31, 32 so that the first movable beam 31 moves away from the fixed driving electrode 21.SELECTED DRAWING: Figure 1

Description

本発明は、固定電極とこれに対向する可動梁とを有し、静電気力を利用して、固定電極に対し可動梁を離接させる静電アクチュエーターおよび可変容量デバイスに関するものである。   The present invention relates to an electrostatic actuator and a variable capacitance device that have a fixed electrode and a movable beam opposite to the fixed electrode, and make use of electrostatic force to separate the movable beam from and to the fixed electrode.

従来、シグナル線と、シグナル線の上方にこれと対向して設けられた電極とから成る可変容量を駆動する静電型アクチュエーターが知られている。この静電型アクチュエーターは、絶縁層を介して可変容量の電極に繋がった可動側の上部電極と、上部電極に対向する固定側の下部電極と、上部電極に接続されたばね構造部とを備えている。そして、上部電極および下部電極間にプルイン電圧を印加することで、上部電極および下部電極間に静電気力が働き、上部電極が下部電極に近づく。これにより、上部電極に繋がった可変容量の電極が下方に駆動してシグナル線上の絶縁膜と接触する。また、プルイン電圧の印加を停止すると、ばね構造部の復元力により、上部電極が下部電極から引き離され、これに伴って電極が上方に駆動してシグナル線から引き離される。このように、電極とシグナル線との間の距離を変化させることで、可変容量の容量値が変化する。   Conventionally, there is known an electrostatic actuator that drives a variable capacitor including a signal line and an electrode provided above the signal line so as to face the signal line. The electrostatic actuator includes a movable upper electrode connected to a variable capacitance electrode through an insulating layer, a fixed lower electrode facing the upper electrode, and a spring structure connected to the upper electrode. Yes. Then, by applying a pull-in voltage between the upper electrode and the lower electrode, an electrostatic force acts between the upper electrode and the lower electrode, and the upper electrode approaches the lower electrode. As a result, the variable capacitance electrode connected to the upper electrode is driven downward to come into contact with the insulating film on the signal line. Further, when the application of the pull-in voltage is stopped, the upper electrode is separated from the lower electrode by the restoring force of the spring structure portion, and accordingly, the electrode is driven upward to be separated from the signal line. Thus, the capacitance value of the variable capacitor changes by changing the distance between the electrode and the signal line.

特開２００８−２７８６３４号公報JP 2008-278634 A

ところで、この種の静電型アクチュエーター（静電アクチュエーター）では、可変容量（可変容量素子）に電圧を印加した状態で駆動するホットスイッチング時などにおいて、下部電極（固定電極）から上部電極（第１可動梁）を引き離すときに、強い引離し力を必要とする場合がある。そのため、従来の静電型アクチュエーターでは、ばね構造部のバネ定数を高くすることが考えられるが、これでは、上部電極を下部電極に近づける際に強い静電気力を必要とするため、プルイン電圧を高くするか、上部電極と下部電極との対向面積を広くしなければならない。   By the way, in this type of electrostatic actuator (electrostatic actuator), during hot switching in which a voltage is applied to a variable capacitor (variable capacitor element), the lower electrode (fixed electrode) is changed to the upper electrode (first electrode). When pulling apart the movable beam, a strong pulling force may be required. For this reason, it is conceivable to increase the spring constant of the spring structure in the conventional electrostatic actuator, but this requires a strong electrostatic force when bringing the upper electrode closer to the lower electrode, so the pull-in voltage is increased. Alternatively, the facing area between the upper electrode and the lower electrode must be increased.

これに対し、上部電極の上方に、第３の電極を上部電極と平行に設け、上部電極と第３の電極との間に静電気力を生じさせて、上部電極を下部電極から引き離す構成とすることも考えられる。しかしながら、この構成では、上部電極を下部電極から引き離す離間動作の開始時には、上部電極が下部電極に近づいた状態であり、上部電極が第３の電極から最大限離れた状態となっているため、離間動作の開始時に、上部電極と第３の電極との間に強い静電気力を作用させることができない。このため、離間動作の初動が遅く離間動作全体の動作速度が遅くなってしまい、静電アクチュエーターの動作を安定的に行うことができない。   On the other hand, a third electrode is provided above the upper electrode in parallel with the upper electrode, an electrostatic force is generated between the upper electrode and the third electrode, and the upper electrode is separated from the lower electrode. It is also possible. However, in this configuration, at the start of the separating operation to separate the upper electrode from the lower electrode, the upper electrode is in a state of approaching the lower electrode, and the upper electrode is in a state of being farthest from the third electrode. At the start of the separation operation, a strong electrostatic force cannot be applied between the upper electrode and the third electrode. For this reason, the initial movement of the separation operation is slow, and the operation speed of the whole separation operation is slow, and the operation of the electrostatic actuator cannot be stably performed.

本発明は、簡単な構成で、固定電極から第１可動梁を引き離す際に強い引離し力を得ることができる静電アクチュエーターおよび可変容量デバイスを提供することを目的とする。   An object of the present invention is to provide an electrostatic actuator and a variable capacitance device that can obtain a strong pulling force when pulling a first movable beam away from a fixed electrode with a simple configuration.

本発明の静電アクチュエーターは、基板に設けられた固定電極と、伸縮可能に構成された折り返し構造を為し、絶縁体で構成される連結部を介して連なる複数の可動梁を有する可動部と、を備え、可動部は、複数の可動梁のうち固定電極側に位置する第１可動梁と固定電極との間の静電気力により複数の可動梁間が拡開することで、第１可動梁が固定電極に近づき、隣り合う可動梁の相互の静電気力により可動梁間が縮むことで、第１可動梁が固定電極から離れることを特徴とする。   An electrostatic actuator according to the present invention includes a fixed electrode provided on a substrate, a movable portion having a folded structure configured to be stretchable and having a plurality of movable beams connected via a connecting portion formed of an insulator. The movable portion is expanded by the electrostatic force between the first movable beam located on the fixed electrode side of the plurality of movable beams and the fixed electrode, so that the first movable beam is expanded. The first movable beam is separated from the fixed electrode by approaching the fixed electrode and contracting between the movable beams by the mutual electrostatic force of the adjacent movable beams.

この構成によれば、複数の可動梁が相互に折り返し構造を為して連なると共に伸縮可能に構成されていることから、可動梁相互の折り返し部分近傍において、可動梁同士が常に近接して対向した状態となるため、可動梁相互間に強い静電気力を生じさせることができる。その結果、第１可動梁を固定電極から引き離す離間動作の開始時にも、強い引離し力を得ることができる。このように、簡単な構成で、固定電極から第１可動梁を引き離す際に強い引離し力を得ることができる。
なお、当該構成において、可動梁同士は非導通となるように構成されている。 According to this configuration, since the plurality of movable beams are connected to each other in a folded structure and are configured to be stretchable, the movable beams are always close to each other in the vicinity of the folded portions of the movable beams. Therefore, a strong electrostatic force can be generated between the movable beams. As a result, a strong separating force can be obtained even at the start of the separating operation for separating the first movable beam from the fixed electrode. Thus, with a simple configuration, a strong pulling force can be obtained when pulling the first movable beam away from the fixed electrode.
In this configuration, the movable beams are configured to be non-conductive.

この場合、複数の可動梁の少なくとも１本は、主体を為す絶縁体部と、絶縁体部の固定電極側の面および固定電極とは反対側の面の少なくとも一方に形成された導電体層と、を有することが好ましい。   In this case, at least one of the plurality of movable beams includes an insulator part that forms a main body, and a conductor layer formed on at least one of the surface of the insulator part on the fixed electrode side and the surface opposite to the fixed electrode; It is preferable to have.

この場合、第１可動梁が固定電極に近づく際、複数の可動梁の少なくとも１本が、弾性を持って変形すると共に、当該変形の復元力が、第１可動梁を固定電極から引き離す引離し力として作用することが好ましい。   In this case, when the first movable beam approaches the fixed electrode, at least one of the plurality of movable beams is deformed with elasticity, and the restoring force of the deformation separates the first movable beam away from the fixed electrode. It preferably acts as a force.

この構成によれば、可動梁相互間の静電気力に加え、弾性変形した可動梁の復元力によって、第１可動梁を固定電極から引き離すため、より強い引離し力を得ることができる。   According to this configuration, since the first movable beam is separated from the fixed electrode by the restoring force of the elastically deformable movable beam in addition to the electrostatic force between the movable beams, a stronger separation force can be obtained.

この場合、固定電極は、第１可動梁が固定電極に近づくための所要のプルイン動作電圧を印加する第１印加電源に接続され、複数の可動梁のうち第１可動梁側から数えて奇数番目の可動梁は、基準電位点に接続され、複数の可動梁のうち第１可動梁側から数えて偶数番目の可動梁は、第１可動梁が固定電極から離れるための所要のプルアウト動作電圧を印加する第２印加電源に接続されることが好ましい。   In this case, the fixed electrode is connected to a first applied power source that applies a required pull-in operating voltage for the first movable beam to approach the fixed electrode, and is an odd number counted from the first movable beam side among the plurality of movable beams. The movable beams are connected to a reference potential point. Among the plurality of movable beams, even-numbered movable beams counted from the first movable beam side have a pull-out operation voltage required for the first movable beam to move away from the fixed electrode. It is preferable to connect to the 2nd application power supply to apply.

第１可動梁が固定電極に近づく近接動作の際に、可動梁相互間に電位差が生じていると、それによる静電気力が近接動作の妨げになる。また、第１可動梁が固定電極から離れる離間動作の際に、固定電極と第１可動梁との間に電位差が生じていると、それによる静電気力が離間動作の妨げになる。そのため、近接動作時には、可動梁同士が同一の電位を有していることが好ましく、離間動作時には、固定電極と第１可動梁とが同一の電位を有していることが好ましい。そのため、例えば、近接動作時には、固定電極、奇数番目の可動梁（第１可動梁を含む）および偶数番目の可動梁に対し、それぞれ、基準電圧、プルイン動作電圧およびプルイン動作電圧を印加し、離接動作時には、それぞれ、プルアウト動作電圧、プルアウト動作電圧および基準電圧を印加することが考えられる。しかしながら、この場合、固定電極、奇数番目の可動梁および偶数番目の可動梁のそれぞれに対して電位制御を行うことになるため、煩雑である。
これに対し、上記構成によれば、近接動作時には、固定電極、奇数番目の可動梁（第１可動梁を含む）および偶数番目の可動梁に対し、それぞれ、プルイン電圧、基準電圧および基準電圧を印加し、離接動作時には、それぞれ、基準電圧、基準電圧およびプルアウト動作電圧を印加すれば、近接動作時には、可動梁同士が同一の電位を有し、離間動作時には、固定電極と第１可動梁とが同一の電位を有することになる。このため、奇数番目の可動梁に対して電位制御を行う必要がなく、固定電極に対して第１可動梁を離接動作させるための電位制御を、簡易な構成で行うことができる。 If a potential difference is generated between the movable beams during the proximity operation in which the first movable beam approaches the fixed electrode, the electrostatic force caused by the potential difference hinders the proximity operation. In addition, if a potential difference is generated between the fixed electrode and the first movable beam during the separation operation in which the first movable beam is separated from the fixed electrode, the electrostatic force caused thereby prevents the separation operation. Therefore, it is preferable that the movable beams have the same potential during the proximity operation, and it is preferable that the fixed electrode and the first movable beam have the same potential during the separation operation. Therefore, for example, during the proximity operation, a reference voltage, a pull-in operation voltage, and a pull-in operation voltage are applied to the fixed electrode, the odd-numbered movable beam (including the first movable beam), and the even-numbered movable beam, respectively. In the contact operation, it is conceivable to apply a pull-out operation voltage, a pull-out operation voltage, and a reference voltage, respectively. However, in this case, the potential control is performed for each of the fixed electrode, the odd-numbered movable beams, and the even-numbered movable beams, which is complicated.
On the other hand, according to the above configuration, the pull-in voltage, the reference voltage, and the reference voltage are respectively applied to the fixed electrode, the odd-numbered movable beam (including the first movable beam), and the even-numbered movable beam during the proximity operation. When the reference voltage, the reference voltage, and the pull-out operation voltage are respectively applied during the separation operation, the movable beams have the same potential during the proximity operation, and the fixed electrode and the first movable beam during the separation operation. Have the same potential. For this reason, it is not necessary to perform potential control on the odd-numbered movable beams, and potential control for operating the first movable beam to be separated from the fixed electrode can be performed with a simple configuration.

この場合、可動部が、３本以上の可動梁を有することが好ましい。   In this case, the movable part preferably has three or more movable beams.

この構成によれば、可動部が２本の可動梁を有する場合に比べ、より強い引離し力を得ることができる。   According to this configuration, a stronger pulling force can be obtained as compared with the case where the movable portion has two movable beams.

本発明の可変容量デバイスは、請求項１ないし４のいずれかに記載の静電アクチュエーターと、静電アクチュエーターを駆動源として駆動し、静電容量を可変する可変容量素子と、を備えたことを特徴とする。   A variable capacitance device according to the present invention includes the electrostatic actuator according to any one of claims 1 to 4 and a variable capacitance element that is driven using the electrostatic actuator as a drive source to vary the capacitance. Features.

この構成によれば、簡単な構成で、固定電極から第１可動梁を引き離す際に強い引離し力を得ることができる静電アクチュエーターを備えたことで、動作安定性の高い可変容量デバイスを提供することができる。
なお、可変容量デバイスとは、可変容量コンデンサーおよび可変容量型のスイッチ等を含む概念である。 According to this configuration, a variable capacitance device with high operational stability is provided by providing an electrostatic actuator that can obtain a strong pulling force when pulling the first movable beam away from the fixed electrode with a simple configuration. can do.
The variable capacitance device is a concept including a variable capacitance capacitor, a variable capacitance type switch, and the like.

この場合、静電アクチュエーターは、可変容量素子に電圧を印加した状態で、固定電極に対する第１可動梁の離接動作を行うことが好ましい。   In this case, it is preferable that the electrostatic actuator perform the separation / contact operation of the first movable beam with respect to the fixed electrode in a state where a voltage is applied to the variable capacitance element.

可変容量素子に電圧を印加した状態で第１可動梁の離接動作を行う、いわゆるホットスイッチングを行うと、その印加電圧に起因して、可変容量素子を構成する対向電極間に静電引力が生じるため、固定電極から第１可動梁を引き離す際の引離し力が弱いと、固定電極に第１可動梁が貼り付いて（スティッキング）しまう場合がある。
これに対し、上記構成によれば、固定電極から第１可動梁を引き離す際に強い引離し力を得ることができる静電アクチュエーターを備えたことで、スティッキングを効果的に防止することができ、ホットスイッチングを安定的に行うことができる。 When so-called hot switching is performed in which the first movable beam is separated and connected while a voltage is applied to the variable capacitance element, an electrostatic attractive force is generated between the counter electrodes constituting the variable capacitance element due to the applied voltage. Therefore, if the pulling force when pulling the first movable beam away from the fixed electrode is weak, the first movable beam may stick to the fixed electrode (sticking).
On the other hand, according to the above configuration, by providing an electrostatic actuator that can obtain a strong pulling force when pulling the first movable beam away from the fixed electrode, sticking can be effectively prevented, Hot switching can be performed stably.

本発明の一実施形態に係る可変容量コンデンサーであって、図２のＩ−Ｉ切断線による断面図である。FIG. 3 is a cross-sectional view taken along the line II of FIG. 可変容量コンデンサーの平面図である。It is a top view of a variable capacitor. 可変容量コンデンサーの分解図である。It is an exploded view of a variable capacitor. 可変容量コンデンサーにおける静電アクチュエーターの断面図である。It is sectional drawing of the electrostatic actuator in a variable capacitor. 静電アクチュエーターにおいて、固定駆動電極に対する第１可動梁の離接動作および離間動作を示した説明図である。It is explanatory drawing which showed the separation | separation operation | movement and separation operation | movement of the 1st movable beam with respect to a fixed drive electrode in an electrostatic actuator. 静電アクチュエーターにおける可動部の変形例であって、第１可動梁および第２可動梁にビアが形成されたもの示した断面図である。FIG. 10 is a cross-sectional view showing a modification of the movable part in the electrostatic actuator, in which vias are formed in the first movable beam and the second movable beam. 静電アクチュエーターにおける可動部の他の変形例であって、第１可動梁や第２可動梁において上下面の一方のみに導電体層が形成されたものを示す断面図である。It is sectional drawing which shows the other modification of the movable part in an electrostatic actuator, Comprising: A conductor layer was formed only in one of the upper and lower surfaces in the 1st movable beam or the 2nd movable beam. 静電アクチュエーターにおける可動部の他の変形例であって、第１可動梁の全体を導電体で構成したものを示した断面図である。It is sectional drawing which was another modification of the movable part in an electrostatic actuator, Comprising: What comprised the whole 1st movable beam with the conductor. 静電アクチュエーターにおける可動部の他の変形例であって、第２可動梁の全体を導電体で構成したものを示した断面図である。It is sectional drawing which was another modification of the movable part in an electrostatic actuator, Comprising: What comprised the whole 2nd movable beam with the conductor. 静電アクチュエーターの変形例であって、第３可動梁をさらに備えたものを示した断面図である。It is sectional drawing which was a modification of an electrostatic actuator, Comprising: What further provided with the 3rd movable beam. 可変容量コンデンサーにおける可変容量素子の変形例を示した断面図である。It is sectional drawing which showed the modification of the variable capacitance element in a variable capacitance capacitor.

以下、添付の図面を参照して、本発明の一実施形態に係る静電アクチュエーターおよびこれを備えた可変容量デバイスについて説明する。本実施形態では、可変容量デバイスとして、可変容量コンデンサーを例示する。この可変容量コンデンサーは、ＭＥＭＳ（Micro Electro Mechanical Systems）デバイスであり、半導体集積回路作製技術を用いて、シリコン基板などの半導体基板上に、電子回路および機械構造を作り込むことで構成されている。   Hereinafter, an electrostatic actuator and a variable capacitance device including the same according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the present embodiment, a variable capacitor is exemplified as the variable capacitance device. This variable capacitor is a MEMS (Micro Electro Mechanical Systems) device and is configured by forming an electronic circuit and a mechanical structure on a semiconductor substrate such as a silicon substrate using a semiconductor integrated circuit manufacturing technique.

図１ないし図４に示すように、可変容量コンデンサー１は、シリコン基板２と、シリコン基板２上に設けられた可変容量素子３と、シリコン基板２上に設けられ、可変容量素子３の両側に連なる一対の静電アクチュエーター４とを備えている。この可変容量コンデンサー１においては、可変容量素子３にＲＦ（Radio Frequency）電圧が印加された状態で、静電アクチュエーター４を駆動源として可変容量素子３を駆動して静電容量を可変する、いわゆるホットスイッチングが行われる。
なお、本実施形態では、シリコン基板２の表面において、可変容量素子３に対して一対の静電アクチュエーター４が連なる方向（図２の左右方向）を左右方向とし、それに直交する方向（図２の上下方向）を前後方向とする。また、シリコン基板２の厚さ方向（図２の紙面に直交する方向）を上下方向とする。 As shown in FIGS. 1 to 4, the variable capacitor 1 includes a silicon substrate 2, a variable capacitor 3 provided on the silicon substrate 2, and provided on the silicon substrate 2 on both sides of the variable capacitor 3. A pair of continuous electrostatic actuators 4 is provided. In this variable capacitor 1, in a state where an RF (Radio Frequency) voltage is applied to the variable capacitor 3, the capacitance is varied by driving the variable capacitor 3 using the electrostatic actuator 4 as a drive source. Hot switching is performed.
In the present embodiment, on the surface of the silicon substrate 2, the direction in which the pair of electrostatic actuators 4 are connected to the variable capacitance element 3 (the left-right direction in FIG. 2) is the left-right direction, and the direction orthogonal to the direction (FIG. 2). The vertical direction is the front-rear direction. In addition, the thickness direction of the silicon substrate 2 (the direction perpendicular to the paper surface of FIG. 2) is the vertical direction.

シリコン基板２の表面には、例えばＳｉＯ2（シリコン酸化膜）から成る絶縁層５が形成されており、この絶縁層５上に、可変容量素子３および一対の静電アクチュエーター４が設けられている。 An insulating layer 5 made of, for example, SiO 2 (silicon oxide film) is formed on the surface of the silicon substrate 2, and a variable capacitance element 3 and a pair of electrostatic actuators 4 are provided on the insulating layer 5. .

可変容量素子３は、シリコン基板２上に設けられた固定容量電極１１と、固定容量電極１１の上方に設けられ、これに対向（対面）する可動容量電極１２と、固定容量電極１１の表面を覆う絶縁膜１３とを備えており、可動容量電極１２が静電アクチュエーター４により上下に駆動するようになっている。固定容量電極１１および可動容量電極１２は、Ａｌ（アルミニウム）などの導電体で構成され、絶縁膜１３は、例えばＳｉＯ2で構成されている。また、固定容量電極１１がグランド電極に電気的に接続されると共に、可動容量電極１２が取出し部１４を介してシグナル電極に接続されており、固定容量電極１１と可動容量電極１２との間に所定のＲＦ電圧が印加され、ＲＦ電圧に起因した静電引力が生じる。 The variable capacitance element 3 includes a fixed capacitance electrode 11 provided on the silicon substrate 2, a movable capacitance electrode 12 provided above the fixed capacitance electrode 11 and facing (facing) the fixed capacitance electrode 11, and a surface of the fixed capacitance electrode 11. The movable capacitive electrode 12 is driven up and down by the electrostatic actuator 4. The fixed capacitor electrode 11 and the movable capacitor electrode 12 are made of a conductor such as Al (aluminum), and the insulating film 13 is made of, for example, SiO 2 . In addition, the fixed capacitance electrode 11 is electrically connected to the ground electrode, and the movable capacitance electrode 12 is connected to the signal electrode via the extraction portion 14, and between the fixed capacitance electrode 11 and the movable capacitance electrode 12. A predetermined RF voltage is applied, and electrostatic attraction resulting from the RF voltage is generated.

そして、可変容量素子３は、可動容量電極１２が静電アクチュエーター４により上下に駆動し、固定容量電極１１と可動容量電極１２との距離が変化することで、静電容量が２段階に可変するようになっている。なお、本実施形態では、可動容量電極１２は、絶縁膜１３と接触するまで下方に駆動するが、絶縁膜１３を設けずに、エアギャップを介して固定容量電極１１と対向するようにしてもよい。   In the variable capacitance element 3, the movable capacitance electrode 12 is driven up and down by the electrostatic actuator 4 to change the distance between the fixed capacitance electrode 11 and the movable capacitance electrode 12, thereby changing the capacitance in two stages. It is like that. In the present embodiment, the movable capacitor electrode 12 is driven downward until it comes into contact with the insulating film 13. However, the movable capacitor electrode 12 may be opposed to the fixed capacitor electrode 11 through the air gap without providing the insulating film 13. Good.

静電アクチュエーター４は、可変間隔型のものであり、シリコン基板２上に設けた固定駆動電極２１と、固定駆動電極２１の上方に設けられた可動部２２と、シリコン基板２上に立設され、可動部２２を支持する電極支持部２３とを備えている。   The electrostatic actuator 4 is of a variable interval type, and is erected on the silicon substrate 2, a fixed drive electrode 21 provided on the silicon substrate 2, a movable part 22 provided above the fixed drive electrode 21, and the silicon substrate 2. And an electrode support portion 23 that supports the movable portion 22.

固定駆動電極２１は、Ａｌなどの導電体で構成されている。固定駆動電極２１は、第１印加電源Ｗ１に接続されており、固定駆動電極２１に所要のプルイン動作電圧が印加される。なお、プルイン動作電圧とは、固定駆動電極２１と可動部２２の第１可動梁３１（後述する）との間の静電気力（静電引力）により、第１可動梁３１が固定駆動電極２１と接触する状態（プルイン状態）が生じる電圧（いわゆるプルイン電圧）以上の電圧である。また、固定駆動電極２１は、例えばＳｉＯ2から成る絶縁膜２４で覆われており、可動部２２の第１可動梁３１は、絶縁膜２４と接触するまで下方に引き寄せられる。 The fixed drive electrode 21 is made of a conductor such as Al. The fixed drive electrode 21 is connected to the first applied power source W1, and a required pull-in operating voltage is applied to the fixed drive electrode 21. Note that the pull-in operating voltage means that the first movable beam 31 and the fixed drive electrode 21 are caused by an electrostatic force (electrostatic attractive force) between the fixed drive electrode 21 and the first movable beam 31 (described later) of the movable portion 22. The voltage is equal to or higher than a voltage (so-called pull-in voltage) at which a contact state (pull-in state) occurs. Further, the fixed drive electrode 21 is covered with an insulating film 24 made of, for example, SiO 2 , and the first movable beam 31 of the movable portion 22 is drawn downward until it comes into contact with the insulating film 24.

可動部２２は、固定駆動電極２１側（下側）から順に、第１可動梁３１および第２可動梁３２を有している。第１可動梁３１および第２可動梁３２は、絶縁体で構成された連結部３４を介して、相互に折り返し構造を為して連なっている。すなわち、第１可動梁３１と第２可動梁３２とは、左右方向における外側（可変容量素子３側とは反対側）の端部において、連結部３４を介して互いに連結（接続）されている。   The movable part 22 has a first movable beam 31 and a second movable beam 32 in order from the fixed drive electrode 21 side (lower side). The first movable beam 31 and the second movable beam 32 are connected in a folded structure to each other via a connecting portion 34 formed of an insulator. That is, the first movable beam 31 and the second movable beam 32 are connected (connected) to each other via the connecting portion 34 at the outer end in the left-right direction (the side opposite to the variable capacitance element 3 side). .

第１可動梁３１は、その内側の略半部（先端部）において、固定駆動電極２１と対向すると共に、その外側略半部（基端部）が前後に余地を残して矩形状にくり抜いたように形成されている。また、可動部２２は、第２可動梁３２の内側端部に形成された前後一対の被支持部３５により、電極支持部２３に支持されている。そして、可動部２２は、被支持部３５により電極支持部２３に支持された状態で、第１可動梁３１および第２可動梁３２が、蛇腹状（べローズ状）に伸縮可能となっている。   The first movable beam 31 is opposed to the fixed drive electrode 21 in a substantially half portion (tip portion) on the inner side, and the substantially half portion (base end portion) on the outer side is hollowed out in a rectangular shape leaving room for front and rear. It is formed as follows. The movable portion 22 is supported on the electrode support portion 23 by a pair of front and rear supported portions 35 formed at the inner end of the second movable beam 32. The first movable beam 31 and the second movable beam 32 can expand and contract in a bellows shape (bellows shape) while the movable portion 22 is supported by the electrode support portion 23 by the supported portion 35. .

すなわち、可動部２２は、第１可動梁３１と固定駆動電極２１とが離間した定常状態において、第１可動梁３１と固定駆動電極２１との間に静電気力が生ずると、第１可動梁３１および第２可動梁３２が蛇腹状に伸び、第１可動梁３１が固定駆動電極２１に近づく（近接動作）。このとき、第１可動梁３１は、固定駆動電極２１との間の静電気力により、第２可動梁３２に連結された連結部３４を中心に下方に回動するようにして弾性変形しながら固定駆動電極２１に近づき、内側略半部が絶縁膜２４と接触する。また、第２可動梁３２も、電極支持部２３に支持された被支持部３５を中心に下方に回動するようにして弾性変形する。つまり、第１可動梁３１および第２可動梁３２は、連結部３４を中心に横「Ｖ」字状に拡開するようにして弾性変形する。   That is, when an electrostatic force is generated between the first movable beam 31 and the fixed drive electrode 21 in a steady state where the first movable beam 31 and the fixed drive electrode 21 are separated from each other, the movable unit 22 The second movable beam 32 extends in a bellows shape, and the first movable beam 31 approaches the fixed drive electrode 21 (proximity operation). At this time, the first movable beam 31 is fixed while being elastically deformed by rotating downward about the connecting portion 34 connected to the second movable beam 32 due to electrostatic force between the first movable beam 31 and the fixed drive electrode 21. Approaching the drive electrode 21, the inner half portion is in contact with the insulating film 24. The second movable beam 32 is also elastically deformed so as to rotate downward about the supported portion 35 supported by the electrode support portion 23. That is, the first movable beam 31 and the second movable beam 32 are elastically deformed so as to expand in a horizontal “V” shape around the connecting portion 34.

また、可動部２２は、蛇腹状に伸びて第１可動梁３１が固定駆動電極２１に近づいた状態で、第１可動梁３１と第２可動梁３２との間に静電気力が生じると、その静電気力と、弾性変形した第１可動梁３１および第２可動梁３２のバネ力（復元力）とにより、第１可動梁３１および第２可動梁３２が蛇腹状に縮み、第１可動梁３１が固定駆動電極２１から離れる（離間動作）。このとき、第１可動梁３１および第２可動梁３２は、連結部３４側からファスナー状（ジッパー状）に閉じるようにして、弾性変形した状態から復元する。   In addition, when the movable portion 22 extends in a bellows shape and an electrostatic force is generated between the first movable beam 31 and the second movable beam 32 with the first movable beam 31 approaching the fixed drive electrode 21, The first movable beam 31 and the second movable beam 32 are contracted into a bellows shape by the electrostatic force and the spring force (restoring force) of the first movable beam 31 and the second movable beam 32 which are elastically deformed, and the first movable beam 31 is compressed. Is separated from the fixed drive electrode 21 (separation operation). At this time, the first movable beam 31 and the second movable beam 32 are restored from the elastically deformed state by closing in a fastener shape (zipper shape) from the connecting portion 34 side.

以上のようにして、第１可動梁３１は、固定駆動電極２１に対して離接する。また、第１可動梁３１は、その内側（可変容量素子３側）で、絶縁体で構成された接続部３６を介して、可変容量素子３の可動容量電極１２と接続している。これにより、第１可動梁３１が固定駆動電極２１に対して離接することに伴って、可動容量電極１２が上下に駆動する。   As described above, the first movable beam 31 is separated from the fixed drive electrode 21. Further, the first movable beam 31 is connected to the movable capacitive electrode 12 of the variable capacitive element 3 via a connection portion 36 formed of an insulator on the inner side (variable capacitive element 3 side). As a result, the movable capacitive electrode 12 is driven up and down as the first movable beam 31 comes into contact with the fixed drive electrode 21.

第１可動梁３１は、主体を為す第１絶縁体部３１ａと、第１絶縁体部３１ａの固定駆動電極２１側の面（下面）に形成された第１下側導電体層３１ｂおよび固定駆動電極２１とは反対側の面（上面）に形成された第１上側導電体層３１ｃとを有している。第１絶縁体部３１ａは、ＳｉＯ2（酸化シリコン）などの絶縁体から構成されている。また、第１下側導電体層３１ｂおよび第１上側導電体層３１ｃは、Ａｌなどの導電体から構成されており、基準電位点ＧＮＤに接続され、常に基準電位（グランド電位）を有している。 The first movable beam 31 includes a first insulator portion 31a which is a main body, a first lower conductor layer 31b formed on a surface (lower surface) of the first insulator portion 31a on the fixed drive electrode 21 side, and a fixed drive. A first upper conductor layer 31c formed on the surface (upper surface) opposite to the electrode 21 is provided. The first insulator portion 31a is made of an insulator such as SiO 2 (silicon oxide). The first lower conductor layer 31b and the first upper conductor layer 31c are made of a conductor such as Al, are connected to the reference potential point GND, and always have a reference potential (ground potential). Yes.

第２可動梁３２は、第１可動梁３１と同様に構成され、主体を為す第２絶縁体部３２ａと、第２絶縁体部３２ａの下面に形成された第２下側導電体層３２ｂおよび上面に形成された第２上側導電体層３２ｃとを有している。第２下側導電体層３２ｂおよび第２上側導電体層３２ｃは、取出し部３７を介して、第２印加電源Ｗ２に接続されており、第２下側導電体層３２ｂおよび第２上側導電体層３２ｃに所要のプルアウト動作電圧が印加される。なお、プルアウト動作電圧とは、第１可動梁３１と第２可動梁３２との間の静電気力により、第１可動梁３１が固定駆動電極２１から離間する状態（プルアウト状態）が生じる電圧以上の電圧である。   The second movable beam 32 is configured in the same manner as the first movable beam 31, and includes a second insulator portion 32a that forms the main body, a second lower conductor layer 32b formed on the lower surface of the second insulator portion 32a, and And a second upper conductor layer 32c formed on the upper surface. The second lower conductor layer 32b and the second upper conductor layer 32c are connected to the second applied power source W2 via the take-out part 37, and the second lower conductor layer 32b and the second upper conductor A required pull-out operating voltage is applied to the layer 32c. The pull-out operating voltage is equal to or higher than a voltage at which the first movable beam 31 is separated from the fixed drive electrode 21 (pull-out state) by the electrostatic force between the first movable beam 31 and the second movable beam 32. Voltage.

電極支持部２３は、第２可動梁３２の前後一対の被支持部３５を支持する前後一対の第１アンカー部４６および第２アンカー部４７を有している。一対の静電アクチュエーター４において、前方（図２の下方）の第１アンカー部４６同士は、一体に形成されており、後方（図２の上方）の第２アンカー部４７同士は、可動容量電極１２の取出し部１４を避けるように離間して別体で形成されている。   The electrode support portion 23 has a pair of front and rear first anchor portions 46 and a second anchor portion 47 that support the pair of supported portions 35 of the second movable beam 32. In the pair of electrostatic actuators 4, the first anchor portions 46 in the front (lower side in FIG. 2) are integrally formed, and the second anchor portions 47 in the rear (upper side in FIG. 2) are movable capacitive electrodes. They are formed separately so as to avoid the twelve extraction portions 14.

図５を参照しつつ、静電アクチュエーター４における、固定駆動電極２１や第２可動梁３２へのプルイン動作電圧やプルアウト動作電圧の印加による、可動部２２の近接動作および離間動作について説明する。なお、上述したように、第１可動梁３１（第１下側導電体層３１ｂおよび第１上側導電体層３１ｃ）には、常に基準電圧が印加されている。   With reference to FIG. 5, the proximity operation and separation operation of the movable portion 22 by applying the pull-in operation voltage and the pull-out operation voltage to the fixed drive electrode 21 and the second movable beam 32 in the electrostatic actuator 4 will be described. As described above, the reference voltage is always applied to the first movable beam 31 (the first lower conductor layer 31b and the first upper conductor layer 31c).

図５（ａ）に示すように、定常状態において、固定駆動電極２１には、基準電圧が印加され、固定駆動電極２１と第１可動梁３１とは同一の電位を有している。同様に、第２可動梁３２（第２下側導電体層３２ｂおよび第２上側導電体層３２ｃ）には、基準電圧が印加され、第１可動梁３１と第２可動梁３２とは同一の電位を有している。   As shown in FIG. 5A, in a steady state, a reference voltage is applied to the fixed drive electrode 21, and the fixed drive electrode 21 and the first movable beam 31 have the same potential. Similarly, a reference voltage is applied to the second movable beam 32 (second lower conductor layer 32b and second upper conductor layer 32c), and the first movable beam 31 and the second movable beam 32 are the same. Has a potential.

図５（ｂ）に示すように、定常状態において、第１印加電源Ｗ１を制御して固定駆動電極２１にプルイン動作電圧が印加されると、固定駆動電極２１と第１可動梁３１との間に電圧差が生じ、その電圧差で固定駆動電極２１と第１可動梁３１との間に静電気力が生じる。このとき、第１可動梁３１と第２可動梁３２とは同電位のままであり、第１可動梁３１と第２可動梁３２との間に静電気力は生じていない。そして、固定駆動電極２１と第１可動梁３１との間に生じた静電気力により、第１可動梁３１および第２可動梁３２が、それぞれのバネ力に抗して蛇腹状に伸び、第１可動梁３１が固定駆動電極２１に近づく（近接動作）。   As shown in FIG. 5B, when the pull-in operation voltage is applied to the fixed drive electrode 21 by controlling the first applied power source W <b> 1 in the steady state, the gap between the fixed drive electrode 21 and the first movable beam 31. A voltage difference is generated between the fixed drive electrode 21 and the first movable beam 31 due to the voltage difference. At this time, the first movable beam 31 and the second movable beam 32 remain at the same potential, and no electrostatic force is generated between the first movable beam 31 and the second movable beam 32. Then, due to the electrostatic force generated between the fixed drive electrode 21 and the first movable beam 31, the first movable beam 31 and the second movable beam 32 extend in a bellows shape against each spring force, and the first The movable beam 31 approaches the fixed drive electrode 21 (proximity operation).

図５（ｃ）に示すように、近接動作の後、第１可動梁３１が絶縁膜２４に接触したプルイン状態となる。プルイン状態でも、引き続き、固定駆動電極２１にはプルイン動作電圧が印加され、第１可動梁３１および第２可動梁３２は基準電位を有している。なお、プルイン状態を維持するのに必要なプルイン維持電圧は、プルイン状態にするプルイン電圧よりも低いため、プルイン状態では、固定駆動電極２１に、プルイン動作電圧よりも低い電圧（ただしプルイン維持電圧以上の電圧）を印加する構成であってもよい。   As shown in FIG. 5C, after the proximity operation, the first movable beam 31 is in a pull-in state in contact with the insulating film 24. Even in the pull-in state, the pull-in operation voltage is continuously applied to the fixed drive electrode 21, and the first movable beam 31 and the second movable beam 32 have the reference potential. Note that the pull-in sustain voltage necessary for maintaining the pull-in state is lower than the pull-in voltage for setting the pull-in state. The voltage may be applied.

図５（ｄ）に示すように、プルイン状態において、第１印加電源Ｗ１を制御して固定駆動電極２１に基準電圧が印加されると、固定駆動電極２１と第１可動梁３１とは同電位となり、固定駆動電極２１と第１可動梁３１との間の静電気力が解除される。これと共に、第２印加電源Ｗ２を制御して第２可動梁３２にプルアウト動作電圧が印加されると、第１可動梁３１と第２可動梁３２との間に電圧差が生じ、その電圧差で第１可動梁３１と第２可動梁３２との間に静電気力が生じる。   As shown in FIG. 5D, when the reference voltage is applied to the fixed drive electrode 21 by controlling the first applied power source W1 in the pull-in state, the fixed drive electrode 21 and the first movable beam 31 have the same potential. Thus, the electrostatic force between the fixed drive electrode 21 and the first movable beam 31 is released. At the same time, when a pull-out operation voltage is applied to the second movable beam 32 by controlling the second applied power source W2, a voltage difference is generated between the first movable beam 31 and the second movable beam 32, and the voltage difference. Thus, an electrostatic force is generated between the first movable beam 31 and the second movable beam 32.

ここで、特に連結部３４の近傍においては、第１可動梁３１が絶縁膜２４に接触した状態でも、第１可動梁３１と第２可動梁３２との距離が短いため、強い静電気力が生じる。例えば、離間動作において、プルアウト動作電圧Ｖを印加した場合、第１可動梁３１と第２可動梁３２との間の静電気力Ｆ１は以下のようになる。すなわち、第１可動梁３１の左右方向の長さをＬ、前後方向の長さをＷ、第１可動梁３１の基端部（連結部３４側の端部）での第２可動梁３２との離間距離をＧ０、先端部（連結部３４とは反対側の端部）での第２可動梁３２との離間距離をＧ１、第１可動梁３１と第２可動梁３２との空間の誘電率をεとする。そして、第１可動梁３１の基端部から先端部までにおける第２可動梁３２との離間距離ｆ（ｘ）を、一次線形近似で計算すると、
ｆ（ｘ）＝（（Ｇ１−Ｇ０）×ｘ／Ｌ）＋Ｇ０
となる。ここで、ｘは、基端部をゼロとした位置座標である。これを利用して、静電気力Ｆ１を計算すると、
Ｆ１＝（１／２）×ε×Ｗ×Ｌ×Ｖ2／（Ｇ０×Ｇ１）
となる。 Here, particularly in the vicinity of the connecting portion 34, even when the first movable beam 31 is in contact with the insulating film 24, a strong electrostatic force is generated because the distance between the first movable beam 31 and the second movable beam 32 is short. . For example, when the pull-out operation voltage V is applied in the separation operation, the electrostatic force F1 between the first movable beam 31 and the second movable beam 32 is as follows. That is, the length of the first movable beam 31 in the left-right direction is L, the length in the front-rear direction is W, and the second movable beam 32 at the base end portion (end portion on the connecting portion 34 side) of the first movable beam 31 Is the distance G0, the distance from the second movable beam 32 at the tip (the end opposite to the connecting portion 34) is G1, and the dielectric of the space between the first movable beam 31 and the second movable beam 32 is G1. Let ε be the rate. Then, when calculating the separation distance f (x) with the second movable beam 32 from the proximal end portion to the distal end portion of the first movable beam 31 by a linear linear approximation,
f (x) = ((G1-G0) * x / L) + G0
It becomes. Here, x is a position coordinate where the base end is zero. Using this, when calculating the electrostatic force F1,
F1 = (1/2) × ε × W × L × V 2 / (G0 × G1)
It becomes.

一方、単に、第１可動梁３１の上方に、第２可動梁３２を第１可動梁３１と平行に設けた場合には、第１可動梁３１と第２可動梁３２との離間距離が、第１可動梁３１の先端部から基端部までの全域でＧ１となるため、この場合の静電気力Ｆ０を計算すると、
Ｆ０＝（１／２）×ε×Ｗ×Ｌ×Ｖ2／（Ｇ１）2
となる。
Ｇ０＜＜Ｇ１であることから、本実施形態における静電気力Ｆ１の方が、静電気力Ｆ０よりも格段に大きい数値となる。 On the other hand, when the second movable beam 32 is simply provided above the first movable beam 31 in parallel with the first movable beam 31, the distance between the first movable beam 31 and the second movable beam 32 is as follows. Since it becomes G1 in the entire region from the distal end portion to the proximal end portion of the first movable beam 31, when the electrostatic force F0 in this case is calculated,
F0 = (1/2) × ε × W × L × V 2 / (G1) 2
It becomes.
Since G0 << G1, the electrostatic force F1 in the present embodiment is a much larger numerical value than the electrostatic force F0.

そして、第１可動梁３１と第２可動梁３２との間に生じた静電気力と、第１可動梁３１および第２可動梁３２のバネ力とにより、第１可動梁３１が固定駆動電極２１から離れ（離間動作）、プルイン状態から定常状態へと戻る。   The first movable beam 31 is fixed to the fixed drive electrode 21 by the electrostatic force generated between the first movable beam 31 and the second movable beam 32 and the spring force of the first movable beam 31 and the second movable beam 32. It moves away (separation operation) from the pull-in state and returns to the steady state.

以上のように、本実施形態の静電アクチュエーター４によれば、第１可動梁３１および第２可動梁３２が相互に折り返し構造を為して連なっているため、第２可動梁３２を支持する電極支持部２３を設ければよく、第１可動梁３１および第２可動梁３２それぞれに対して支持部材を設ける必要がない。また、可動部２２が、第１可動梁３１および第２可動梁３２により蛇腹状に伸縮可能に構成されていることから、第１可動梁３１と第２可動梁３２との折り返し部分（連結部３４）近傍において、第１可動梁３１と第２可動梁３２とが常に近接して対向した状態となるため、第１可動梁３１と第２可動梁３２との間に強い静電気力を生じさせることができる。その結果、第１可動梁３１を固定駆動電極２１から引き離す離間動作の開始時にも、強い引離し力を得ることができる。このように、簡単な構成で、固定駆動電極２１から第１可動梁３１を引き離す際に強い引離し力を得ることができる。したがって、本実施形態の可変容量コンデンサー１は、可変容量素子３においてスティッキングを効果的に防止することができ、ホットスイッチングを安定的に行うことができる。   As described above, according to the electrostatic actuator 4 of the present embodiment, since the first movable beam 31 and the second movable beam 32 are connected in a folded structure, the second movable beam 32 is supported. It is only necessary to provide the electrode support portion 23, and it is not necessary to provide a support member for each of the first movable beam 31 and the second movable beam 32. In addition, since the movable portion 22 is configured to be able to expand and contract in a bellows shape by the first movable beam 31 and the second movable beam 32, a folded portion (connecting portion) between the first movable beam 31 and the second movable beam 32 is provided. 34) Since the first movable beam 31 and the second movable beam 32 are always close to each other and face each other in the vicinity, a strong electrostatic force is generated between the first movable beam 31 and the second movable beam 32. be able to. As a result, a strong pulling force can be obtained even at the start of the separating operation for separating the first movable beam 31 from the fixed drive electrode 21. Thus, with a simple configuration, a strong pulling force can be obtained when the first movable beam 31 is pulled away from the fixed drive electrode 21. Therefore, the variable capacitor 1 of the present embodiment can effectively prevent sticking in the variable capacitor 3, and can perform hot switching stably.

また、第１可動梁３１が固定駆動電極２１に近づく際、第１可動梁３１および第２可動梁３２が、弾性を持って変形することで、上記の静電気力に加え、弾性変形した第１可動梁３１および第２可動梁３２のバネ力（復元力）によっても、第１可動梁３１を固定駆動電極２１から引き離すため、より強い引離し力を得ることができる。もっとも、第１可動梁３１および第２可動梁３２が弾性変形することなく、静電気力のみによって、第１可動梁３１を固定駆動電極２１から引き離す構成であってもよい。   Further, when the first movable beam 31 approaches the fixed drive electrode 21, the first movable beam 31 and the second movable beam 32 are elastically deformed, so that the first elastically deformed first in addition to the electrostatic force described above. Since the first movable beam 31 is separated from the fixed drive electrode 21 also by the spring force (restoring force) of the movable beam 31 and the second movable beam 32, a stronger separation force can be obtained. However, the first movable beam 31 and the second movable beam 32 may be separated from the fixed drive electrode 21 only by electrostatic force without elastically deforming the first movable beam 31 and the second movable beam 32.

また、本実施形態では、近接動作時には、固定駆動電極２１、第１可動梁３１および第２可動梁３２に対し、それぞれ、プルイン電圧、基準電圧および基準電圧を印加し、離接動作時には、それぞれ、基準電圧、基準電圧およびプルアウト動作電圧を印加することで、近接動作時には、第１可動梁３１および第２可動梁３２が同一の電位を有し、離間動作時には、固定駆動電極２１と第１可動梁３１とが同一の電位を有する。このため、固定駆動電極２１と第１可動梁３１との間や、第１可動梁３１と第２可動梁３２との間に、近接動作や離間動作の妨げとなる静電気力が生ずることがない。そして、第１可動梁３１に対して電位制御を行う必要がなく、固定駆動電極２１に対して第１可動梁３１を離接動作させるための電位制御を、簡易な構成で行うことができる。   In the present embodiment, a pull-in voltage, a reference voltage, and a reference voltage are applied to the fixed drive electrode 21, the first movable beam 31, and the second movable beam 32 during the proximity operation, respectively, and during the separation operation, By applying the reference voltage, the reference voltage, and the pull-out operation voltage, the first movable beam 31 and the second movable beam 32 have the same potential during the proximity operation, and the fixed drive electrode 21 and the first drive electrode 21 during the separation operation. The movable beam 31 has the same potential. For this reason, an electrostatic force that hinders the proximity operation and the separation operation does not occur between the fixed drive electrode 21 and the first movable beam 31 or between the first movable beam 31 and the second movable beam 32. . In addition, it is not necessary to perform potential control on the first movable beam 31, and potential control for causing the first movable beam 31 to be separated from and connected to the fixed drive electrode 21 can be performed with a simple configuration.

本実施形態では、第１可動梁３１および第２可動梁３２を、絶縁体部と導電体層とで構成したが、特に、絶縁体部をＳｉＯ2で構成し、導電体層をＡｌで構成すると共に、犠牲層（図示省略）をアモルファスシリコンで構成し、ＸｅＦ2（二フッ化キセノン）で犠牲層をドライエッチングすれば、その高いエッチング選択性により、導電体層（Ａｌ）や絶縁体部（ＳｉＯ2）にダメージを与えることがないため、好ましい。 In the present embodiment, the first movable beam 31 and the second movable beam 32 are configured by the insulator portion and the conductor layer. In particular, the insulator portion is configured by SiO 2 and the conductor layer is configured by Al. In addition, if the sacrificial layer (not shown) is made of amorphous silicon and the sacrificial layer is dry-etched with XeF 2 (xenon difluoride), the conductor layer (Al) and the insulator portion are formed by the high etching selectivity. This is preferable since it does not damage (SiO 2 ).

次に、第１可動梁３１や第２可動梁３２の変形例について説明する。図６に示したように、第１可動梁３１に形成した第１下側導電体層３１ｂと第１上側導電体層３１ｃとが、ビア３１ｄを介して相互に接続し、第２可動梁３２に形成した第２下側導電体層３２ｂと第２上側導電体層３２ｃとが、ビア３２ｄを介して相互に接続していてもよい。もちろん、第１可動梁３１および第２可動梁３２のいずれか一方のみにおいて、ビア３１ｄ或いは３２ｄを介して導電体層同士が接続していてもよい。   Next, modified examples of the first movable beam 31 and the second movable beam 32 will be described. As shown in FIG. 6, the first lower conductor layer 31b and the first upper conductor layer 31c formed on the first movable beam 31 are connected to each other via the via 31d, and the second movable beam 32 is connected. The second lower conductor layer 32b and the second upper conductor layer 32c formed in the above may be connected to each other through a via 32d. Of course, the conductor layers may be connected to each other through the via 31d or 32d in only one of the first movable beam 31 and the second movable beam 32.

また、本実施形態では、第１可動梁３１の上下両面に導電体層（第１下側導電体層３１ｂおよび第１上側導電体層３１ｃ）を形成すると共に、第２可動梁３２の上下両面に導電体層（第２下側導電体層３２ｂおよび第２上側導電体層３２ｃ）を形成したが、これに限定されるものではなく、第１可動梁３１の少なくとも上下一方の面に導電体層が形成されていればよく、第２可動梁３２の少なくとも上下一方の面に導電体層が形成されていればよい。例えば、上記の実施形態と比べ、第２上側導電体層３２ｃが形成されていなくてもよく（図７（ａ）参照）、さらに第１上側導電体層３１ｃ或いは第１下側導電体層３１ｂが形成されていなくてもよい（図７（ｂ）（ｃ）参照）。   In the present embodiment, the conductor layers (the first lower conductor layer 31b and the first upper conductor layer 31c) are formed on the upper and lower surfaces of the first movable beam 31, and the upper and lower surfaces of the second movable beam 32 are formed. The conductor layers (the second lower conductor layer 32b and the second upper conductor layer 32c) are formed on the first conductor beam 31. However, the present invention is not limited to this. It is only necessary that a layer is formed, and it is only necessary that a conductor layer is formed on at least one of the upper and lower surfaces of the second movable beam 32. For example, compared with the above embodiment, the second upper conductor layer 32c may not be formed (see FIG. 7A), and further the first upper conductor layer 31c or the first lower conductor layer 31b. May not be formed (see FIGS. 7B and 7C).

もっとも、上記の実施形態のように、第１可動梁３１や第２可動梁３２の上下両面に導電体層を形成することで、導電体層に生ずる内部応力に起因して、第１可動梁３１や第２可動梁３２に反りが発生することを防止できる。なお、第１可動梁３１や第２可動梁３２の上下両面に導電体層を形成した場合、上面に形成された導電体層と下面に形成された導電体層とに別電位を与えてもよく、上下いずれか一方の導電体層を、電気的にフローティング状態としてもよい。   However, as in the above-described embodiment, the first movable beam 31 is formed on the upper and lower surfaces of the first movable beam 31 and the second movable beam 32, thereby causing the first movable beam due to internal stress generated in the conductor layer. Warpage can be prevented from occurring in the 31 and the second movable beam 32. When the conductor layers are formed on the upper and lower surfaces of the first movable beam 31 and the second movable beam 32, different potentials may be applied to the conductor layer formed on the upper surface and the conductor layer formed on the lower surface. Alternatively, either the upper or lower conductor layer may be in an electrically floating state.

また、本実施形態では、第１可動梁３１および第２可動梁３２の双方を、絶縁体部と導電体層とで構成したが、第１可動梁３１および第２可動梁３２のいずれか一方の全体を、導電体で構成してもよい。すなわち、図８に示すように、第１可動梁３１の全体を導電体で構成してもよく、図９に示すように、第２可動梁３２の全体を導電体で構成してもよい。   In the present embodiment, both the first movable beam 31 and the second movable beam 32 are configured by the insulator portion and the conductor layer, but either the first movable beam 31 or the second movable beam 32 is used. The whole may be made of a conductor. That is, as shown in FIG. 8, the whole first movable beam 31 may be made of a conductor, and as shown in FIG. 9, the whole second movable beam 32 may be made of a conductor.

第１可動梁３１の全体を導電体で構成した場合、第２可動梁３２には、上記の変形例と同様に、第２下側導電体層３２ｂのみが形成されていてもよく（図８（ａ）参照）、第２上側導電体層３２ｃのみが形成されていてもよい（図８（ｂ）参照）。もっとも、図８（ａ）の構成は、第１可動梁３１と第２可動梁３２との間の静電気力が、図８（ｂ）の構成よりも大きいため、好ましい。もちろん、第２下側導電体層３２ｂおよび第２上側導電体層３２ｃの双方が形成されていてもよい。   When the entire first movable beam 31 is made of a conductor, only the second lower conductor layer 32b may be formed on the second movable beam 32 as in the above modification (FIG. 8). Only the second upper conductor layer 32c may be formed (see FIG. 8B). However, the configuration of FIG. 8A is preferable because the electrostatic force between the first movable beam 31 and the second movable beam 32 is larger than the configuration of FIG. Of course, both the second lower conductor layer 32b and the second upper conductor layer 32c may be formed.

一方、第２可動梁３２の全体を導電体で構成した場合、第１可動梁３１には、第１下側導電体層３１ｂおよび第１上側導電体層３１ｃの双方が形成されていてもよく（図９（ａ））、第１下側導電体層３１ｂのみが形成されていてもよく（図９（ｂ）参照）、第１上側導電体層３１ｃのみが形成されていてもよい（図９（ｃ）参照）。もっとも、図９（ａ）の構成や図９（ｃ）の構成は、第１可動梁３１と第２可動梁３２との間の静電気力が、図９（ｂ）の構成よりも大きいため、好ましい。また、図９（ａ）の構成や図９（ｂ）の構成は、固定駆動電極２１と第１可動梁３１との間の静電気力が、図９（ｃ）の構成よりも大きいため、好ましい。したがって、図９（ａ）〜（ｃ）の構成のなかでは、図９（ａ）が最も好ましい。   On the other hand, when the entire second movable beam 32 is formed of a conductor, both the first lower conductor layer 31b and the first upper conductor layer 31c may be formed on the first movable beam 31. (FIG. 9A), only the first lower conductor layer 31b may be formed (see FIG. 9B), or only the first upper conductor layer 31c may be formed (FIG. 9). 9 (c)). However, in the configuration of FIG. 9A and the configuration of FIG. 9C, the electrostatic force between the first movable beam 31 and the second movable beam 32 is larger than the configuration of FIG. preferable. Further, the configuration of FIG. 9A and the configuration of FIG. 9B are preferable because the electrostatic force between the fixed drive electrode 21 and the first movable beam 31 is larger than that of FIG. 9C. . Therefore, FIG. 9A is the most preferable among the configurations of FIGS.

次に、可動部２２の変形例について説明する。図１０に示すように、変形例の可動部２２は、固定駆動電極２１側（下側）から順に、第１可動梁３１、第２可動梁３２および第３可動梁３３を有している。第１可動梁３１、第２可動梁３２および第３可動梁３３は、連結部３４を介して、相互に折り返し構造を為して連なっている。すなわち、第１可動梁３１と第２可動梁３２とは、相互に対向すると共に、左右方向における外側（可変容量素子３側とは反対側）の端部において、連結部３４を介して互いに連結（接続）されている。また、第２可動梁３２と第３可動梁３３とは、相互に対向すると共に、左右方向における内側の端部において、連結部３４を介して互いに連結されている。さらに、可動部２２は、第３可動梁３３の外側端部において、被支持部３５により、電極支持部２３に支持されている。そして、可動部２２は、被支持部３５により電極支持部２３に支持された状態で、第１可動梁３１、第２可動梁３２および第３可動梁３３が、蛇腹状に伸縮可能となっている。   Next, a modified example of the movable part 22 will be described. As shown in FIG. 10, the movable portion 22 of the modification has a first movable beam 31, a second movable beam 32, and a third movable beam 33 in order from the fixed drive electrode 21 side (lower side). The first movable beam 31, the second movable beam 32, and the third movable beam 33 are connected in a folded structure to each other via the connecting portion 34. That is, the first movable beam 31 and the second movable beam 32 face each other and are connected to each other via the connecting portion 34 at the outer end in the left-right direction (the side opposite to the variable capacitance element 3 side). (It is connected. Further, the second movable beam 32 and the third movable beam 33 face each other and are connected to each other via a connecting portion 34 at an inner end in the left-right direction. Further, the movable portion 22 is supported by the electrode support portion 23 by the supported portion 35 at the outer end portion of the third movable beam 33. The first movable beam 31, the second movable beam 32, and the third movable beam 33 can expand and contract in a bellows shape while the movable portion 22 is supported by the electrode support portion 23 by the supported portion 35. Yes.

第３可動梁３３は、第１可動梁３１および第２可動梁３２と同様に、主体を為す第３絶縁体部３３ａと、第３絶縁体部３３ａの下面に形成された第３下側導電体層３３ｂおよび上面に形成された第３上側導電体層３３ｃとを有している。なお、第１可動梁３１や第２可動梁３２の変形例と同様に、第３可動梁３３は、第３下側導電体層３３ｂおよび第３上側導電体層３３ｃの一方のみを備えていてもよく、全体が導電体で構成されていてもよい。また、第３可動梁３３は、第１可動梁３１および第２可動梁３２と同様に、蛇腹状に伸びる際、弾性変形する。さらに、第３可動梁３３（第３下側導電体層３３ｂおよび第３上側導電体層３３ｃ）は、第１可動梁３１と同様に、基準電位点ＧＮＤに接続されている。   Similar to the first movable beam 31 and the second movable beam 32, the third movable beam 33 includes a third insulator portion 33a that forms the main body, and a third lower conductive member formed on the lower surface of the third insulator portion 33a. A body layer 33b and a third upper conductor layer 33c formed on the upper surface. As in the modification of the first movable beam 31 and the second movable beam 32, the third movable beam 33 includes only one of the third lower conductor layer 33b and the third upper conductor layer 33c. Alternatively, the whole may be made of a conductor. Further, like the first movable beam 31 and the second movable beam 32, the third movable beam 33 is elastically deformed when extending in a bellows shape. Further, the third movable beam 33 (the third lower conductor layer 33 b and the third upper conductor layer 33 c) is connected to the reference potential point GND in the same manner as the first movable beam 31.

そして、上記の実施形態と同様に、定常状態において固定駆動電極２１にプルイン動作電圧が印加されると、固定駆動電極２１と第１可動梁３１との間に静電気力が生じる。このとき、第１可動梁３１と第２可動梁３２とは同電位のままであり、その間に静電気力は生じていない。また、第２可動梁３２と第３可動梁３３とは同電位のままであり、その間に静電気力は生じていない。そして、固定駆動電極２１と第１可動梁３１との間に生じた静電気力により、第１可動梁３１、第２可動梁および第３可動梁が、それぞれのバネ力に抗して蛇腹状に伸び、第１可動梁が固定駆動電極２１に近づく。   As in the above embodiment, when a pull-in operation voltage is applied to the fixed drive electrode 21 in a steady state, an electrostatic force is generated between the fixed drive electrode 21 and the first movable beam 31. At this time, the first movable beam 31 and the second movable beam 32 remain at the same potential, and no electrostatic force is generated therebetween. Further, the second movable beam 32 and the third movable beam 33 remain at the same potential, and no electrostatic force is generated between them. Then, due to the electrostatic force generated between the fixed drive electrode 21 and the first movable beam 31, the first movable beam 31, the second movable beam, and the third movable beam have a bellows shape against each spring force. The first movable beam approaches the fixed drive electrode 21 by extending.

また、プルイン状態において、第２可動梁３２にプルアウト電圧が印加されると、第１可動梁３１と第２可動梁３２との間に電圧差が生じ、その電圧差で第１可動梁３１と第２可動梁３２との間に静電気力が生じることに加え、第２可動梁３２と第３可動梁３３との間にも電圧差が生じ、その電圧差で第２可動梁３２と第３可動梁３３との間にも静電気力が生じる。そして、これらの静電気力と、第１可動梁３１、第２可動梁および第３可動梁のバネ力とにより、第１可動梁３１が固定駆動電極２１から離れる。このように、第３可動梁３３を設けることで、第２可動梁３２と第３可動梁３３との間にも、第１可動梁３１が固定駆動電極２１から離れるための静電気力が生じるため、より強い引離し力を得ることができる。   In addition, when a pull-out voltage is applied to the second movable beam 32 in the pull-in state, a voltage difference is generated between the first movable beam 31 and the second movable beam 32, and the voltage difference causes the first movable beam 31 to In addition to the generation of electrostatic force between the second movable beam 32 and the second movable beam 32, the second movable beam 32 and the third movable beam 33 also generate a voltage difference. An electrostatic force is also generated between the movable beam 33. The first movable beam 31 is separated from the fixed drive electrode 21 by the electrostatic force and the spring force of the first movable beam 31, the second movable beam, and the third movable beam. As described above, by providing the third movable beam 33, an electrostatic force is generated between the second movable beam 32 and the third movable beam 33 so that the first movable beam 31 is separated from the fixed drive electrode 21. , Stronger pulling force can be obtained.

なお、本変形例では、可動部２２を、３本の可動梁で構成したが、４本以上の可動梁で構成し、４本以上の可動梁を、相互に押し返し構造を為して連ねると共に、蛇腹状に伸縮可能に構成してもよい。この場合、第１可動梁３１側から数えて奇数番目の可動梁（第１可動梁３１を含む）は、基準電位点ＧＮＤに接続され、偶数番目の可動梁は、プルアウト動作電圧を印加する第２印加電源Ｗ２に接続される。   In this modification, the movable portion 22 is composed of three movable beams. However, the movable portion 22 is composed of four or more movable beams, and the four or more movable beams are connected to each other in a reverse structure. Alternatively, the bellows may be configured to be extendable and contractible. In this case, the odd-numbered movable beams (including the first movable beam 31) counted from the first movable beam 31 side are connected to the reference potential point GND, and the even-numbered movable beams apply a pull-out operation voltage. 2 connected to an applied power source W2.

次に、可変容量素子３の変形例について説明する。図１１に示すように、変形例の可変容量素子３は、絶縁性基板６と、絶縁性基板６上に設けられた一対の固定容量電極１１と、一対の固定容量電極１１の上方に設けられて、これらに対向する可動容量電極１２と、絶縁性基板６に埋め込まれ、一対の固定容量電極１１の下面に絶縁層５を介して対向する一対の埋込容量電極６０とを備えている。一対の固定容量電極１１および可動容量電極１２は、静電容量が可変の２個の可変容量部６１を構成し、一対の固定容量電極１１および一対の埋込容量電極６０は、静電容量が固定の２個の固定容量部６２を構成している（図１１（ｃ）参照）。そして、一対の埋込容量電極６０には、可変容量素子３の電気接点（入力端子）をそれぞれ配しており、一対の固定容量電極１１、可動容量電極１２および一対の埋込容量電極６０は、一方の固定容量部６２、２個の可変容量部６１、他方の固定容量部６２の順で直列した電気回路を構成している。なお、一対の固定容量電極１１および可動容量電極１２は、電気的にフローティング状態となっている。   Next, a modified example of the variable capacitance element 3 will be described. As shown in FIG. 11, the variable capacitance element 3 of the modification is provided above the insulating substrate 6, the pair of fixed capacitance electrodes 11 provided on the insulating substrate 6, and the pair of fixed capacitance electrodes 11. In addition, the movable capacitive electrode 12 facing each other and a pair of buried capacitive electrodes 60 embedded in the insulating substrate 6 and opposed to the lower surfaces of the pair of fixed capacitive electrodes 11 via the insulating layer 5 are provided. The pair of fixed capacitance electrodes 11 and the movable capacitance electrode 12 constitutes two variable capacitance portions 61 whose capacitance is variable, and the pair of fixed capacitance electrodes 11 and the pair of embedded capacitance electrodes 60 have a capacitance. Two fixed fixed capacity portions 62 are formed (see FIG. 11C). The pair of embedded capacitor electrodes 60 are provided with electrical contacts (input terminals) of the variable capacitor 3, respectively. The pair of fixed capacitor electrode 11, the movable capacitor electrode 12, and the pair of embedded capacitor electrodes 60 are , One fixed capacitance section 62, two variable capacitance sections 61, and the other fixed capacitance section 62 are configured in series in this order. The pair of fixed capacitor electrode 11 and movable capacitor electrode 12 are in an electrically floating state.

本変形例の可変容量素子３によれば、２個の可変容量部６１と２個の固定容量部６２とを直列接続することにより、ホットスイッチング時のＲＦ電圧が分圧されるので、第１可動梁３１の引離しを妨げる静電気力、すなわち固定容量電極１１と可動容量電極１２との間の静電気力を全体として小さくすることができる。また、一対の固定容量電極１１および可動容量電極１２を、フローティング状態にすることができる。   According to the variable capacitance element 3 of the present modification, the RF voltage at the time of hot switching is divided by connecting the two variable capacitance portions 61 and the two fixed capacitance portions 62 in series. The electrostatic force that prevents the movable beam 31 from being separated, that is, the electrostatic force between the fixed capacitor electrode 11 and the movable capacitor electrode 12 can be reduced as a whole. Further, the pair of fixed capacitor electrode 11 and movable capacitor electrode 12 can be in a floating state.

なお、本変形例では、一対の埋込容量電極６０間が非導通となるように絶縁性基板６を用いたが、絶縁性基板６に代えてシリコン基板２を用いてもよい。ただし、隣接する埋込容量電極６０間の絶縁性を確保するにはシリコン基板２のＰＮ接合では十分とは言えないので、絶縁性基板６を用いる方が好ましい。また、本変形例では、２個の可変容量部６１の可動容量電極１２を、一体に形成する構成であったが、２個の可変容量部６１の可動容量電極１２を、別体で形成する構成であってもよい。   In this modification, the insulating substrate 6 is used so that the pair of embedded capacitor electrodes 60 are not electrically connected. However, the silicon substrate 2 may be used instead of the insulating substrate 6. However, it is preferable to use the insulating substrate 6 because the PN junction of the silicon substrate 2 is not sufficient to ensure the insulation between the adjacent embedded capacitance electrodes 60. In the present modification, the movable capacitive electrodes 12 of the two variable capacitor portions 61 are integrally formed. However, the movable capacitive electrodes 12 of the two variable capacitor portions 61 are formed separately. It may be a configuration.

また、以上の実施形態においては、可変容量デバイスとして、可変容量コンデンサー１を例示したが、可変容量素子３を用いた可変容量型のスイッチに本発明を適用してもよい。   In the above embodiment, the variable capacitor 1 is exemplified as the variable capacitor. However, the present invention may be applied to a variable capacitor switch using the variable capacitor 3.

なお、本実施形態においては、ホットスイッチング時におけるスティッキング対策として本発明を適用する構成であったが、ホットスイッチングを行う場合に限定されるものではなく、例えば、近接時の静電気力を低減する方策として、第１可動梁３１等のバネ定数を低くしつつ（もしくはゼロにしつつ）、本発明を適用する構成であってもよい。   In the present embodiment, the present invention is applied as a countermeasure against sticking at the time of hot switching. However, the present invention is not limited to the case where hot switching is performed. For example, a measure for reducing the electrostatic force at the time of proximity As a configuration, the present invention may be applied while lowering (or reducing to zero) the spring constant of the first movable beam 31 and the like.

１：可変容量コンデンサー、２：シリコン基板、３：可変容量素子、４：静電アクチュエーター、２１：固定駆動電極、２２：可動部、３１：第１可動梁、３１ａ：第１絶縁体部、３１ｂ：第１下側導電体層、３１ｃ：第１上側導電体層、３２：第２可動梁、３２ａ：第２絶縁体部、３２ｂ：第２下側導電体層、３２ｃ：第２上側導電体層   1: variable capacitor, 2: silicon substrate, 3: variable capacitance element, 4: electrostatic actuator, 21: fixed drive electrode, 22: movable part, 31: first movable beam, 31a: first insulator part, 31b : First lower conductor layer, 31c: first upper conductor layer, 32: second movable beam, 32a: second insulator part, 32b: second lower conductor layer, 32c: second upper conductor layer

Claims (7)

基板に設けられた固定電極と、
伸縮可能に構成された折り返し構造を為し、絶縁体で構成される連結部を介して連なる複数の可動梁を有する可動部と、を備え、
前記可動部は、前記複数の可動梁のうち前記固定電極側に位置する第１可動梁と前記固定電極との間の静電気力により前記複数の可動梁間が拡開することで、前記第１可動梁が前記固定電極に近づき、隣り合う前記可動梁の相互の静電気力により前記可動梁間が縮むことで、前記第１可動梁が前記固定電極から離れることを特徴とする静電アクチュエーター。 A fixed electrode provided on the substrate;
A movable part having a plurality of movable beams connected through a connecting part made of an insulator, having a folded structure configured to be stretchable;
The movable portion is configured such that the plurality of movable beams are expanded by an electrostatic force between the first movable beam positioned on the fixed electrode side and the fixed electrode among the plurality of movable beams, so that the first movable beam is expanded. An electrostatic actuator, wherein a beam approaches the fixed electrode, and the movable beam is contracted by an electrostatic force between adjacent movable beams, whereby the first movable beam is separated from the fixed electrode. 前記複数の可動梁の少なくとも１本は、
主体を為す絶縁体部と、
前記絶縁体部の前記固定電極側の面および前記固定電極とは反対側の面の少なくとも一方に形成された導電体層と、を有することを特徴とする請求項１に記載の静電アクチュエーター。 At least one of the plurality of movable beams is
An insulator part for the main body;
The electrostatic actuator according to claim 1, further comprising: a conductor layer formed on at least one of the surface on the fixed electrode side and the surface on the opposite side of the fixed electrode of the insulator portion. 前記第１可動梁が前記固定電極に近づく際、前記複数の可動梁の少なくとも１本が、弾性を持って変形すると共に、当該変形の復元力が、前記第１可動梁を前記固定電極から引き離す引離し力として作用することを特徴とする請求項１または２に記載の静電アクチュエーター。   When the first movable beam approaches the fixed electrode, at least one of the plurality of movable beams is deformed with elasticity, and the restoring force of the deformation pulls the first movable beam away from the fixed electrode. The electrostatic actuator according to claim 1, wherein the electrostatic actuator acts as a pulling force. 前記固定電極は、前記第１可動梁が前記固定電極に近づくための所要のプルイン動作電圧を印加する第１印加電源に接続され、
前記複数の可動梁のうち前記第１可動梁側から数えて奇数番目の前記可動梁は、基準電位点に接続され、
前記複数の可動梁のうち前記第１可動梁側から数えて偶数番目の前記可動梁は、前記第１可動梁が前記固定電極から離れるための所要のプルアウト動作電圧を印加する第２印加電源に接続されることを特徴とする請求項１ないし３のいずれかに記載の静電アクチュエーター。 The fixed electrode is connected to a first applied power source that applies a required pull-in operating voltage for the first movable beam to approach the fixed electrode;
Of the plurality of movable beams, the odd-numbered movable beams counted from the first movable beam side are connected to a reference potential point,
Among the plurality of movable beams, the even-numbered movable beams counted from the first movable beam side serve as a second applied power source for applying a required pull-out operation voltage for the first movable beam to move away from the fixed electrode. The electrostatic actuator according to claim 1, wherein the electrostatic actuator is connected. 前記可動部が、３本以上の前記可動梁を有することを特徴とする請求項１ないし４のいずれかに記載の静電アクチュエーター。   The electrostatic actuator according to claim 1, wherein the movable part includes three or more movable beams. 請求項１ないし５のいずれかに記載の静電アクチュエーターと、
前記静電アクチュエーターを駆動源として駆動し、静電容量を可変する可変容量素子と、
を備えたことを特徴とする可変容量デバイス。 An electrostatic actuator according to any one of claims 1 to 5,
A variable capacitance element that drives the electrostatic actuator as a drive source and varies the capacitance;
A variable capacity device comprising: 前記静電アクチュエーターは、前記可変容量素子に電圧を印加した状態で、前記固定電極に対する前記第１可動梁の離接動作を行うことを特徴とする請求項６に記載の可変容量デバイス。   The variable capacitance device according to claim 6, wherein the electrostatic actuator performs a separating operation of the first movable beam with respect to the fixed electrode in a state where a voltage is applied to the variable capacitance element.
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