JP2016082611A - Drive unit - Google Patents

Drive unit Download PDF

Info

Publication number
JP2016082611A
JP2016082611A JP2014208811A JP2014208811A JP2016082611A JP 2016082611 A JP2016082611 A JP 2016082611A JP 2014208811 A JP2014208811 A JP 2014208811A JP 2014208811 A JP2014208811 A JP 2014208811A JP 2016082611 A JP2016082611 A JP 2016082611A
Authority
JP
Japan
Prior art keywords
friction
base member
vibrator
rolling
friction member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014208811A
Other languages
Japanese (ja)
Inventor
大樹 伊藤
Daiki Ito
大樹 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2014208811A priority Critical patent/JP2016082611A/en
Publication of JP2016082611A publication Critical patent/JP2016082611A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a guide mechanism which can realize a thin ultrasonic motor with a simple constitution in the ultrasonic motor as a drive device for driving a driven part with elliptic motion due to ultrasonic vibration generated in a vibrator.SOLUTION: A drive device comprises: a vibrator to which a piezoelectric element is fixed; a friction member which has a frictional contact surface brought into contact with the vibrator; a holding member which holds the vibrator; pressure means which energizes the vibrator toward the friction member; a base member which receives reaction force of the pressure means by storing the holding member and the pressure means; and a rolling member which is brought into contact with the friction member and the base member. The base member is provided with a groove for guiding the rolling member. The rolling member is configured to be held between the side surface of the friction member facing a groove part of the base member and the groove part, and roll at the time of relative movement of the friction member and the base member.SELECTED DRAWING: Figure 6

Description

本発明は振動子に超音波振動を発生させることにより駆動力を発生する超音波モータに関する。   The present invention relates to an ultrasonic motor that generates a driving force by generating ultrasonic vibration in a vibrator.

従来から、動作音が無く、低速から高速までの駆動が可能であり、高トルク出力などの特徴を活かして、例えば、カメラやレンズの駆動源として超音波モータが採用されている。特許文献１に開示された超音波モータは、半円筒状の摩擦部材に対して、振動子が付勢された状態、所謂、加圧接触状態で保持されている。その加圧接触状態下で当該振動子に超音波振動が励起されると、振動子の摩擦部材と接している接触部に楕円運動が生じ、振動子が直進駆動される。この際、振動子は、転動部材を介して摩擦部材と連結され、転動部材が転動することにより案内される。   Conventionally, there is no operation sound, driving from low speed to high speed is possible, and for example, an ultrasonic motor is used as a drive source for a camera or a lens, taking advantage of features such as high torque output. The ultrasonic motor disclosed in Patent Document 1 is held in a so-called pressure contact state in which a vibrator is biased against a semi-cylindrical friction member. When ultrasonic vibration is excited in the vibrator under the pressure contact state, elliptical motion is generated in the contact portion in contact with the friction member of the vibrator, and the vibrator is driven straight. At this time, the vibrator is connected to the friction member via the rolling member, and is guided by the rolling member rolling.

特開２００９−２６８２３７号公報JP 2009-268237 A 特開２００４−３０４８８７号公報Japanese Patent Laid-Open No. 2004-304877

しかしながら、特許文献１に開示された超音波モータでは、摩擦部材は半円弧部において転動部材と接する為、振動子との摩擦接触面とこれに対向する面との間に転動部材を配置する必要が生じる。その為振動子を被駆動部材に加圧接触させる為の機構に加え、被駆動部材を案内する転動部材と、転動部材を保持するベース部材との厚みが加わり、超音波モータの厚みが大きくなってしまう。   However, in the ultrasonic motor disclosed in Patent Document 1, since the friction member contacts the rolling member in the semicircular arc portion, the rolling member is disposed between the friction contact surface with the vibrator and the surface facing the friction member. Need to be done. Therefore, in addition to the mechanism for pressing and contacting the vibrator to the driven member, the thickness of the rolling member for guiding the driven member and the base member for holding the rolling member is added, and the thickness of the ultrasonic motor is reduced. It gets bigger.

本発明は、上述の問題に鑑み、振動子に発生する超音波振動による楕円運動により駆動する駆動装置としての超音波モータにおいて、簡単な構成により薄型化を実現する案内機構を提供することを目的とする。   The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a guide mechanism that achieves thinning with a simple configuration in an ultrasonic motor as a drive device that is driven by elliptical motion caused by ultrasonic vibration generated in a vibrator. And

本発明の駆動装置は、圧電素子が固定された振動子と、振動子と接触する摩擦接触面を有する摩擦部材と、振動子を保持する保持部材と、振動子を摩擦部材に向かって付勢する加圧手段と、保持部材及び加圧手段を収容して加圧手段の反力を受けるベース部材と、摩擦部材及びベース部材に当接する転動部材とを備え、圧電素子に印加された電圧により振動子が超音波振動することによって摩擦部材とベース部材とが相対移動するように構成されている。ベース部材には転動部材を案内する溝部が設けられており、転動部材は、ベース部材の溝部と対向する摩擦部材の側面と溝部との間に挟持され、摩擦部材とベース部材との相対移動の際に転動するように構成されている。   The drive device according to the present invention includes a vibrator having a piezoelectric element fixed thereto, a friction member having a friction contact surface that comes into contact with the vibrator, a holding member that holds the vibrator, and biases the vibrator toward the friction member. Voltage applied to the piezoelectric element, a pressure member that holds the holding member and the pressure member and receives a reaction force of the pressure member, a friction member and a rolling member that contacts the base member Thus, the vibrator is ultrasonically vibrated so that the friction member and the base member move relative to each other. The base member is provided with a groove for guiding the rolling member, and the rolling member is sandwiched between the side of the friction member facing the groove of the base member and the groove, and the relative friction between the friction member and the base member. It is configured to roll when moving.

本発明によれば、振動子に発生する超音波振動による楕円運動により被駆動部を駆動する駆動装置としての超音波モータにおいて、簡単な構成により薄型化を実現する案内機構を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, in the ultrasonic motor as a drive device which drives a to-be-driven part by the elliptical motion by the ultrasonic vibration which generate | occur | produces in a vibrator | oscillator, the guide mechanism which implement | achieves thickness reduction by simple structure can be provided. .

本発明の実施例１における超音波モータの分解斜視図である。It is a disassembled perspective view of the ultrasonic motor in Example 1 of the present invention. 図１に示される各部材を組み込んだ状態の斜視図である。It is a perspective view of the state which incorporated each member shown by FIG. 本発明の実施例１における超音波モータの振動子と保持部材の接合状態を示す拡大斜視図である。It is an expansion perspective view which shows the joining state of the vibrator | oscillator and holding member of the ultrasonic motor in Example 1 of this invention. 本発明の実施例１における超音波モータの振動板と圧電素子の接合状態を示す拡大斜視図である。It is an expansion perspective view which shows the joining state of the diaphragm of the ultrasonic motor in Example 1 of this invention, and a piezoelectric element. 本発明の実施例１における超音波モータの駆動方向の断面図である。It is sectional drawing of the drive direction of the ultrasonic motor in Example 1 of this invention. 本発明の実施例１における超音波モータの駆動方向と直交する方向の断面図である。It is sectional drawing of the direction orthogonal to the drive direction of the ultrasonic motor in Example 1 of this invention. 本発明の実施例１における超音波モータの転動部材部を振動子との摩擦接触面と逆側から見た断面図である。It is sectional drawing which looked at the rolling member part of the ultrasonic motor in Example 1 of this invention from the friction contact surface with a vibrator | oscillator from the opposite side. 本発明の実施例２における超音波モータの駆動方向と直交する方向の断面図である。It is sectional drawing of the direction orthogonal to the drive direction of the ultrasonic motor in Example 2 of this invention.

以下、図面を参照しながら本発明の好適な実施の形態を説明する。尚、以下の実施形態によりこの発明が限定されるものではない。また、以下の各実施例の説明において図面との関連において理解を容易ならしめるべく、振動子と摩擦部材との相対移動方向を「Ｘ軸」、加圧ばねにより振動子が摩擦部材に対して加圧される方向を「Ｚ軸」、Ｘ軸とＺ軸とに直交する方向を「Ｙ軸」と規定し、説明を行う。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited by the following embodiment. In the following description of each embodiment, in order to facilitate understanding in relation to the drawings, the relative movement direction of the vibrator and the friction member is “X axis”, and the vibrator is moved relative to the friction member by a pressurizing spring. The direction to be pressurized is defined as “Z axis”, and the direction perpendicular to the X axis and Z axis is defined as “Y axis”.

図１は、本発明の実施例１である駆動装置としての超音波モータ１の分解斜視図である。なお、同一部材は同一記号で図示される。１０１は後述する振動子１０４が加圧接触する摩擦接触面１０１ａを備える摩擦部材である。１０２は摩擦部材１０１の摩擦接触面１０１ａに接触する接触部を備える振動板であり、１０３は振動板１０２に対して接着材などにより圧着されている圧電素子である。そして、振動板１０２に圧電素子１０３が圧着された状態で圧電素子１０３に電圧を印加することにより超音波振動を発生させ、振動板１０２に楕円運動を発生させることができる。なお、振動子１０４は振動板１０２と圧電素子１０３により構成される。１０５は振動子１０４を保持するための保持部材である。１０６は振動子をコイルばね１０７により摩擦部材１０１へ付勢する加圧部材であり、このコイルばね１０７と加圧部材１０６とが本発明の加圧手段となる。尚、振動子１０４を加圧できる加圧手段であればコイルばねに限定されない。コイルばね１０７はばねの弾性による加圧反力を受けるベース部材１０８と当接している。加圧部材１０６は摩擦部材１０１の摩擦接触面１０１ａに対しおおよそ垂直な方向のみ移動可能にベース部材１０８により支持され、振動子１０４を摩擦部材１０１の摩擦接触面１０１ａに対し垂直に加圧している。ベース部材１０８は、保持部材１０５が駆動される方向において保持部材１０５の接触部１０５ａに当接して係合するようにして保持部材１０５を収容する。振動子１０４が圧電素子１０３により発生した超音波振動による楕円運動により摩擦部材１０１の長手方向（Ｘ軸方向）に駆動されると、振動子１０４が接着固定された保持部材１０５も移動する。保持部材１０５の接触部１０５ａに当接して係合するようにして保持部材１０５を収容するベース部材１０８も同様に駆動される。   FIG. 1 is an exploded perspective view of an ultrasonic motor 1 serving as a driving apparatus that is Embodiment 1 of the present invention. In addition, the same member is illustrated with the same symbol. Reference numeral 101 denotes a friction member having a friction contact surface 101a with which a vibrator 104, which will be described later, is in pressure contact. Reference numeral 102 denotes a diaphragm having a contact portion that comes into contact with the friction contact surface 101a of the friction member 101. Reference numeral 103 denotes a piezoelectric element that is pressure-bonded to the diaphragm 102 with an adhesive or the like. Then, by applying a voltage to the piezoelectric element 103 in a state where the piezoelectric element 103 is pressure-bonded to the diaphragm 102, ultrasonic vibration can be generated, and elliptical motion can be generated in the diaphragm 102. Note that the vibrator 104 includes a diaphragm 102 and a piezoelectric element 103. Reference numeral 105 denotes a holding member for holding the vibrator 104. A pressure member 106 biases the vibrator to the friction member 101 by a coil spring 107. The coil spring 107 and the pressure member 106 serve as a pressure unit of the present invention. Note that the pressurizing unit is not limited to the coil spring as long as it can pressurize the vibrator 104. The coil spring 107 is in contact with a base member 108 that receives a pressure reaction force due to the elasticity of the spring. The pressure member 106 is supported by a base member 108 so as to be movable only in a direction substantially perpendicular to the friction contact surface 101a of the friction member 101, and presses the vibrator 104 perpendicularly to the friction contact surface 101a of the friction member 101. . The base member 108 accommodates the holding member 105 so as to contact and engage the contact portion 105a of the holding member 105 in the direction in which the holding member 105 is driven. When the vibrator 104 is driven in the longitudinal direction (X-axis direction) of the friction member 101 by the elliptical motion generated by the ultrasonic vibration generated by the piezoelectric element 103, the holding member 105 to which the vibrator 104 is bonded and moved also moves. The base member 108 that accommodates the holding member 105 so as to contact and engage the contact portion 105a of the holding member 105 is also driven in the same manner.

一方、ベース部材１０８を摩擦部材１０１の長手方向に案内する為に、摩擦部材１０１の摩擦接触面１０１ａに隣接する側面部１０１ｄには、Ｖ字形状の断面を有する第一の溝部１０１ｂが設けられている。但し、第一の溝部１０１ｂの断面の形状はＶ字形状に限定されるものではなく、例えば、後述する実施例２のように台形形状に構成したものであってもよい。   On the other hand, in order to guide the base member 108 in the longitudinal direction of the friction member 101, a side surface portion 101d adjacent to the friction contact surface 101a of the friction member 101 is provided with a first groove portion 101b having a V-shaped cross section. ing. However, the shape of the cross section of the first groove portion 101b is not limited to the V shape, and may be a trapezoidal shape as in Example 2 described later, for example.

同様にベース部材１０８も第一の溝部１０１ｂに対向する内面にＶ字形状の断面を有する第二の溝部１０８ａを備え、ベース部材１０８は、転動部材１０９を介して摩擦部材１０１の第一の溝部１０１ｂに沿って案内される。   Similarly, the base member 108 also includes a second groove portion 108a having a V-shaped cross section on the inner surface facing the first groove portion 101b, and the base member 108 is connected to the first friction member 101 via the rolling member 109. Guided along the groove 101b.

図２は図１の各部品を組み込んだ状態を示す斜視図である。１１０はベース部材１０８の駆動方向の移動量を規制する移動範囲規制部材であり、１１１は移動範囲規制部材１１０を摩擦部材１０１に固定するねじである。以上のように上述した各部材が組み込まれて超音波モータとしてユニット化される。   FIG. 2 is a perspective view showing a state in which the components of FIG. 1 are incorporated. Reference numeral 110 denotes a moving range restricting member that restricts the amount of movement of the base member 108 in the driving direction, and 111 denotes a screw that fixes the moving range restricting member 110 to the friction member 101. As described above, the above-described members are incorporated into a unit as an ultrasonic motor.

次に、超音波モータの構成部材の詳細について説明する。図３は、図１における振動板１０２と保持部材１０５の接合状態を説明する拡大斜視図であり、摩擦部材１０１側から見た図である。振動板１０２と保持部材１０５とは接着材、溶接などにより接合部１０２ｂにおいて接合される。図において振動板１０２の中央部には、２箇所の突起部１０２ａが形成されている。突起部１０２ａの上端面、すなわち、摩擦部材１０１の摩擦接触面１０１ａと当接する面は同一平面上に形成される。   Next, details of components of the ultrasonic motor will be described. FIG. 3 is an enlarged perspective view illustrating a joined state of the diaphragm 102 and the holding member 105 in FIG. 1 and is a view seen from the friction member 101 side. The diaphragm 102 and the holding member 105 are joined at the joint 102b by an adhesive, welding, or the like. In the figure, two protrusions 102 a are formed at the center of the diaphragm 102. The upper end surface of the protrusion 102a, that is, the surface that contacts the friction contact surface 101a of the friction member 101 is formed on the same plane.

一方、図４は摩擦部材１０１側とは逆側から振動子１０４を見た図である。図４に示す振動板１０２の突起部１０２ａが形成されている面の裏面部には圧電素子１０３が接着材などにより圧着されている。なお、振動板１０２と圧電素子１０３の圧着は、圧着されればその態様は限定されない。この圧着素子１０３は複数の圧電素子膜を積層して一体化したものである。そしてこの圧電素子１０３に所望の交流電圧を印加することで励振させ、圧電素子１０３が圧着された振動板１０２に２つの振動モードを励起する。このとき２つの振動モードの振動位相が所望の位相差となるように設定することで、突起部１０２ａには図３の矢印で示すような楕円運動が発生する。この楕円運動を図１に示すように振動子１０４で発生させ、摩擦部材１０１の摩擦接触面１０１ａに伝達することで、摩擦部材１０１に対して振動子１０４を並進駆動させることが可能となる。なお、前述の圧電素子の積層構造や振動モードに関する詳細は特許文献２に記載された内容と同様である為、それらの説明は割愛する。   On the other hand, FIG. 4 is a view of the vibrator 104 viewed from the side opposite to the friction member 101 side. The piezoelectric element 103 is pressure-bonded with an adhesive or the like on the back surface of the surface on which the protrusion 102a of the diaphragm 102 shown in FIG. 4 is formed. Note that the mode of the pressure bonding between the vibration plate 102 and the piezoelectric element 103 is not limited as long as the pressure bonding is performed. The crimping element 103 is formed by laminating and integrating a plurality of piezoelectric element films. The piezoelectric element 103 is excited by applying a desired AC voltage, and two vibration modes are excited on the diaphragm 102 to which the piezoelectric element 103 is pressure-bonded. At this time, by setting the vibration phases of the two vibration modes to have a desired phase difference, an elliptical motion as indicated by an arrow in FIG. This elliptical motion is generated by the vibrator 104 as shown in FIG. 1 and transmitted to the friction contact surface 101a of the friction member 101, whereby the vibrator 104 can be driven to translate with respect to the friction member 101. Note that details regarding the laminated structure and vibration mode of the piezoelectric element described above are the same as the contents described in Patent Document 2, and therefore their description is omitted.

図５は、振動子１０２の２つの突起部１０２ａの中心部を通る長手（Ｘ軸）方向に沿う直線を含むＸＺ面における断面で超音波モータ１を切断した縦断面図である。加圧部材１０６は圧電素子１０３と当接し、振動板１０２の突起部１０２ａは、摩擦部材１０１の摩擦接触面１０１ａに向かう方向（Ｚ軸方向）にコイルばね１０７により摩擦部材１０１の摩擦接触面１０１ａへ付勢される。振動子１０４は、加圧部材１０６によりコイルばね１０７からの加圧力（付勢力）が付与され、摩擦部材１０１の摩擦接触面１０１ａに対し加圧接触することが可能となっている。そして、前記のとおり突起部１０２ａが楕円運動することにより、振動子１０４は摩擦部材１０１に対し図５の矢印のように図面左右方向（Ｘ軸方向）に駆動される。   FIG. 5 is a longitudinal cross-sectional view of the ultrasonic motor 1 cut along a cross-section in the XZ plane including a straight line along the longitudinal (X-axis) direction passing through the center of the two protrusions 102 a of the vibrator 102. The pressing member 106 is in contact with the piezoelectric element 103, and the protrusion 102 a of the vibration plate 102 is caused to move toward the friction contact surface 101 a of the friction member 101 (Z-axis direction) by the coil spring 107 and the friction contact surface 101 a of the friction member 101. To be energized. The vibrator 104 is applied with a pressing force (biasing force) from the coil spring 107 by the pressing member 106, and can be brought into pressure contact with the friction contact surface 101 a of the friction member 101. Then, as described above, the protrusion 102a is elliptically moved, so that the vibrator 104 is driven in the horizontal direction (X-axis direction) in the drawing as indicated by the arrow in FIG.

一方、振動板１０２が固定された保持部材１０５は振動板１０２に追従して摩擦部材１０１に対し相対的に駆動される。保持部材１０５はベース部材１０８と２箇所の接触部１０５ａで当接し、ベース部材１０８は保持部材１０５に追従して摩擦部材１０１に対し相対的に駆動される。ここで本実施例では保持部材１０５とベース部材１０８は振動子１０４の超音波振動を阻害しない為に適度にクリアランスをもった構成としているが、これは、この当接を有して収容する構造に限ったものではない。保持部材とおおよそ一対に駆動する為に当接されていればよく、例えば、ばね部材により保持部材１０５をＸ軸方向の駆動方向へベース部材１０８に対し付勢を行い、反転駆動時におけるヒステリシスを打ち消す構成等も考えられる。一方、ベース部材１０８は駆動方向に保持部材１０５から駆動力を与えられると同時にコイルばね１０７からの加圧力の反力をうける。   On the other hand, the holding member 105 to which the diaphragm 102 is fixed follows the diaphragm 102 and is driven relative to the friction member 101. The holding member 105 contacts the base member 108 at two contact portions 105 a, and the base member 108 follows the holding member 105 and is driven relative to the friction member 101. Here, in this embodiment, the holding member 105 and the base member 108 are configured to have an appropriate clearance so as not to inhibit the ultrasonic vibration of the vibrator 104. It is not limited to. For example, the holding member 105 is biased toward the base member 108 in the driving direction in the X-axis direction by a spring member, and hysteresis during reverse driving is reduced. A configuration that cancels out is also conceivable. On the other hand, the base member 108 is applied with a driving force from the holding member 105 in the driving direction and simultaneously receives a reaction force of the applied pressure from the coil spring 107.

図６は駆動方向と垂直なＹＺ面における超音波モータ１のほぼ中央における横断面図である。ここで１０９は球状形状を有する転動部材である。転動部材は、摩擦部材１０１の側面に形成された第一の溝部１０１ｂとベース部材１０８の内面に形成された第二の溝部１０８ａにそれぞれ当接してこれら溝部の間に挟持される部位である。図６において矢印Ｆは振動子１０４に加圧力を与えるコイルばね１０７の加圧反力であって、作用点１０８ｂにおいてベース部材１０８に作用する。摩擦部材１０１は、作用点１０８ｂに作用する加圧反力を転動部材１０９を介して当接部１０１ｃで受けることで、ベース部材１０８は摩擦部材１０１に対してガタ無く作動することが可能となる。   FIG. 6 is a transverse cross-sectional view at substantially the center of the ultrasonic motor 1 in the YZ plane perpendicular to the driving direction. Here, 109 is a rolling member having a spherical shape. The rolling member is a portion that is in contact with and sandwiched between the first groove portion 101b formed on the side surface of the friction member 101 and the second groove portion 108a formed on the inner surface of the base member 108. . In FIG. 6, an arrow F is a pressure reaction force of the coil spring 107 that applies pressure to the vibrator 104, and acts on the base member 108 at the point of application 108b. The friction member 101 receives the pressure reaction force acting on the action point 108b at the contact portion 101c via the rolling member 109, so that the base member 108 can operate without any play against the friction member 101. Become.

図７はそれぞれの転動部材の中心を含み、摩擦接触面１０１ａと平行なＸＹ面における超音波モータ１の断面図となる。本実施例では転動部材１０９は３個より構成されるが、これは３個に限られることは無い。ここで、ベース部材１０８は３箇所の第二の溝部１０８ａを有し、それぞれの第二の溝部１０８ａの長さは超音波モータの駆動可能な長さよりも短く設定されている。これは転動部材１０９が、例えば組み立て直後に衝撃や外部からの予期しない力によって移動したとき、転動部材１０９がベース部材１０８の第二の溝部１０８ａの端面１０８ｃに接触した状態で超音波モータが動くことがありうる。その際、転動部材１０８が転動せず滑りながら作動することで摩擦力による影響が増大する。超音波モータの性能劣化の発生を防いでリセット動作を行う為に超音波モータの駆動可能な長さよりも短くして第二の溝部１０８ａが設けられている。具体的なリセット動作は、移動量規制部材１１０の片端、ここでは図７における左側端と当接する位置まで超音波モータを駆動し、その後右側端まで超音波モータを駆動する一連の動作を指す。ここで、第二の溝部１０８ａは移動量規制部材１１０により規制されるベース部材１０８の移動量よりも短く設けられているので、一連の動作の中で転動部材１０９はベース部材の溝の端部の端面１０８ｃに少なくとも１回は当接しながら滑り移動する。   FIG. 7 is a cross-sectional view of the ultrasonic motor 1 in the XY plane including the center of each rolling member and parallel to the frictional contact surface 101a. In this embodiment, the rolling member 109 is composed of three pieces, but this is not limited to three pieces. Here, the base member 108 has three second groove portions 108a, and the length of each second groove portion 108a is set to be shorter than the driveable length of the ultrasonic motor. This is because the rolling member 109 is in contact with the end face 108c of the second groove portion 108a of the base member 108 when the rolling member 109 is moved by an impact or an unexpected external force immediately after assembly, for example. Can move. At that time, the rolling member 108 does not roll but operates while sliding, so that the influence of the frictional force increases. In order to prevent the performance deterioration of the ultrasonic motor and perform the reset operation, the second groove portion 108a is provided with a length shorter than the driveable length of the ultrasonic motor. The specific reset operation refers to a series of operations in which the ultrasonic motor is driven to a position where it comes into contact with one end of the movement amount regulating member 110, here the left end in FIG. 7, and then the ultrasonic motor is driven to the right end. Here, since the second groove portion 108a is provided shorter than the movement amount of the base member 108 regulated by the movement amount regulating member 110, the rolling member 109 is the end of the groove of the base member in a series of operations. The sliding movement while abutting at least once on the end surface 108c of the portion.

また、超音波モータをレンズ装置等に搭載した場合、レンズ装置等の駆動範囲を超音波モータ１のベース部材１０８に設けられた第二の溝部１０８ａの長さよりも短く設定しておくことで、常に転動部材１０９が転動して滑り摩擦を発生させることなく超音波モータ１を駆動することが可能となる。本実施例では移動量規制部材１１０は摩擦部材１０１とは別部材による構成とした。しかし、超音波モータの移動量が規制されていればよく、例えば摩擦部材に移動量を規制する形状を構成するか、レンズ装置等に組み込んだ際に組み込む対象に突起部を設けて超音波モータの移動量を規制する構成としてもよい。   Further, when the ultrasonic motor is mounted on the lens device or the like, the driving range of the lens device or the like is set shorter than the length of the second groove portion 108a provided on the base member 108 of the ultrasonic motor 1, The ultrasonic motor 1 can be driven without causing the rolling member 109 to always roll and generate sliding friction. In this embodiment, the movement amount regulating member 110 is constituted by a member different from the friction member 101. However, the movement amount of the ultrasonic motor only needs to be regulated. For example, the ultrasonic motor is configured by forming a shape that regulates the movement amount in the friction member, or by providing a protrusion on the object to be incorporated when incorporated in a lens device or the like. The amount of movement may be restricted.

一方、振動子１０４への加圧手段であるコイルばね１０７の加圧力の作用点１０８ｂは、図７に示すように、３個配置された転動部材同士を線で結んだ三角形内側に配置している。すなわち、３箇所設けられた転動部材を頂点とする三角形の内側にコイルばね１０７の加圧力の作用点１０８ｂが配置されている。これにより加圧反力を３つの転動ボール１０９でバランス良く受けることができる。   On the other hand, the action point 108b of the pressure force of the coil spring 107, which is a pressurizing means to the vibrator 104, is arranged inside the triangle in which the three rolling members are connected by a line as shown in FIG. ing. That is, the application point 108b of the pressing force of the coil spring 107 is arranged inside the triangle having the rolling members provided at three points as apexes. Thereby, the pressure reaction force can be received by the three rolling balls 109 in a well-balanced manner.

摩擦部材１０１に設けられた第一の溝部１０１ｂは振動子１０２と摩擦接触する摩擦接触面１０１ａの側面部１０１ｄに設けているので、本実施例の構成においては、摩擦接触面１０１ａの対向面１０１ｅに案内機構を設ける必要が無い。本実施例の構成によれば、図６に示すように、振動子１０２と摩擦接触する摩擦部材１０１の摩擦接触面１０１ａに対向する対向面１０１ｅとベース部材の上端面１０８ｄとの間の超音波モータ厚み２００を簡単な構成で薄型化することが可能となる。また、ベース部材と転動部材１０９は、加圧手段の加圧方向において摩擦部材１０１の摩擦接触面１０１ａの対向面１０１ｅから突出しないように配置することにより超音波モータの薄型化を図ることができる。   Since the first groove portion 101b provided in the friction member 101 is provided in the side surface portion 101d of the friction contact surface 101a that is in frictional contact with the vibrator 102, in the configuration of this embodiment, the opposing surface 101e of the friction contact surface 101a. There is no need to provide a guide mechanism. According to the configuration of the present embodiment, as shown in FIG. 6, the ultrasonic wave between the opposing surface 101e facing the frictional contact surface 101a of the frictional member 101 that frictionally contacts the vibrator 102 and the upper end surface 108d of the base member. The motor thickness 200 can be reduced with a simple configuration. Further, the ultrasonic motor can be thinned by disposing the base member and the rolling member 109 so as not to protrude from the opposing surface 101e of the friction contact surface 101a of the friction member 101 in the pressing direction of the pressing means. it can.

実施例１の変形例である実施例２を図８に示す。図８は、駆動方向と垂直なＹＺ面における超音波モータ１のほぼ中央における横断面図である。本実施例においては、転動部材を案内する摩擦部材１２１の案内部の形状が実施例１の摩擦部材１０１のそれと異なる。それ以外の構成については実施例１と同様な構成である。   A second embodiment, which is a modification of the first embodiment, is shown in FIG. FIG. 8 is a transverse cross-sectional view at substantially the center of the ultrasonic motor 1 on the YZ plane perpendicular to the driving direction. In the present embodiment, the shape of the guide portion of the friction member 121 that guides the rolling member is different from that of the friction member 101 of the first embodiment. Other configurations are the same as those in the first embodiment.

転動部材１０９と当接して案内する摩擦部材１２１の案内部は、Ｖ字形状の断面を有するものとはせず、摩擦部材１２１の形状そのものの断面を略台形形状としている。摩擦部材１２１の断面略台形形状の互いに対抗する非平行面１２１ａにおいて転動部材１０９と当接させることにより、ベース部材１０８に発生する加圧反力を受ける構成としている。即ち、ベース部材の溝部と対向する摩擦部材１２１の互いに対向する側面１２１ａは、加圧手段の付勢の方向に向かって互いに近づくように傾斜しており、転動部材１０９との当接により、ベース部材１０８に発生する加圧反力を受ける構成としている。これにより、薄型の超音波モータを構成することができる。   The guide portion of the friction member 121 that contacts and guides the rolling member 109 does not have a V-shaped cross section, and the cross section of the shape of the friction member 121 itself has a substantially trapezoidal shape. The friction member 121 is configured to receive a pressure reaction force generated in the base member 108 by bringing it into contact with the rolling member 109 on the non-parallel surfaces 121a opposed to each other having a substantially trapezoidal cross section. That is, the mutually facing side surfaces 121a of the friction member 121 facing the groove portion of the base member are inclined so as to approach each other toward the urging direction of the pressurizing means, and by contact with the rolling member 109, The pressure reaction force generated in the base member 108 is received. Thereby, a thin ultrasonic motor can be comprised.

以上本発明の好適な実施例について説明したが、本発明はこれらの実施例に限定されず、その要旨の範囲内で種々の変形及び変更が可能である。   The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist thereof.

１ 超音波モータ
１０１ 摩擦部材
１０１ａ 摩擦接触面
１０１ｂ 第一の溝部
１０１ｃ 当接部
１０１ｄ 側面部
１０１ｅ 対向面
１０２ 振動板
１０２ａ 突起部
１０２ｂ 接合部
１０３ 圧電素子
１０４ 振動子
１０５ 保持部材
１０５ａ 接触部
１０６ 加圧部材
１０７ コイルばね
１０８ ベース部材
１０８ａ 第二の溝部
１０８ｂ 作用点
１０８ｃ 端面
１０８ｄ 上端面
１０９ 転動部材
１１０ 移動範囲規制部材
１１１ ねじ
１２１ 摩擦部材
２００ 超音波モータ厚み DESCRIPTION OF SYMBOLS 1 Ultrasonic motor 101 Friction member 101a Friction contact surface 101b 1st groove part 101c Contact part 101d Side surface part 101e Opposing surface 102 Diaphragm 102a Projection part 102b Joining part 103 Piezoelectric element 104 Vibrator 105 Holding member 105a Contact part 106 Pressurization Member 107 Coil spring 108 Base member 108a Second groove 108b Action point 108c End surface 108d Upper end surface 109 Rolling member 110 Moving range regulating member 111 Screw 121 Friction member 200 Ultrasonic motor thickness

Claims (9)

圧電素子が固定された振動子と、前記振動子と接触する摩擦接触面を有する摩擦部材と、前記振動子を保持する保持部材と、前記振動子を前記摩擦部材に付勢する加圧手段と、前記保持部材及び前記加圧手段を収容して前記加圧手段の反力を受けるベース部材と、前記摩擦部材と前記ベース部材に当接する転動部材とを備え、前記圧電素子に印加された電圧により前記振動子が超音波振動することによって前記摩擦部材と前記ベース部材とが相対移動する駆動装置において、
前記ベース部材には前記転動部材を案内する溝部が設けられており、前記転動部材は、前記ベース部材の溝部と対向する前記摩擦部材の側面と前記溝部との間で挟持され、前記摩擦部材と前記ベース部材との相対移動の際に転動するように構成されていることを特徴とする駆動装置。 A vibrator to which a piezoelectric element is fixed; a friction member having a friction contact surface in contact with the vibrator; a holding member that holds the vibrator; and a pressurizing unit that biases the vibrator against the friction member; A base member that houses the holding member and the pressurizing unit and receives a reaction force of the pressurizing unit; and a rolling member that contacts the friction member and the base member, and is applied to the piezoelectric element In the drive device in which the friction member and the base member relatively move when the vibrator is ultrasonically vibrated by voltage,
The base member is provided with a groove for guiding the rolling member, and the rolling member is sandwiched between a side surface of the friction member facing the groove of the base member and the groove, and the friction member A drive device configured to roll when a member and the base member move relative to each other. 前記ベース部材と前記転動部材は、前記摩擦部材の前記摩擦接触面に対向する対向面から前記加圧手段の加圧方向において突出しないように配置されることを特徴とする請求項１に記載の駆動装置。   The said base member and the said rolling member are arrange | positioned so that it may not protrude in the pressurization direction of the said pressurization means from the opposing surface which opposes the said friction contact surface of the said friction member. Drive device. 前記摩擦部材と前記ベース部材が相対移動する際の移動範囲を規制する移動範囲規制部材を更に備えることを特徴とする請求項１又は請求項２に記載の駆動装置。   The drive device according to claim 1, further comprising a movement range regulating member that regulates a movement range when the friction member and the base member move relative to each other. 前記ベース部材の前記溝部の長さは、前記ベース部材の移動範囲の長さよりも短いことを特徴とする請求項１から請求項３のいずれか一項に記載の駆動装置。   4. The driving device according to claim 1, wherein a length of the groove portion of the base member is shorter than a length of a movement range of the base member. 5. 前記転動部材は球状形状を有することを特徴とする請求項１から４のいずれか一項に記載の駆動装置。   The drive device according to any one of claims 1 to 4, wherein the rolling member has a spherical shape. 前記加圧手段による付勢力に対する反力が作用する部位を含む三角形のそれぞれの頂点に前記転動部材が位置するように前記溝は前記ベース部材に３箇所設けられていることを特徴とする請求項１から５のいずれか一項に記載の駆動装置。   The groove is provided in three places in the base member so that the rolling member is positioned at each vertex of a triangle including a portion where a reaction force against the urging force by the pressurizing means acts. Item 6. The driving device according to any one of Items 1 to 5. 前記ベース部材の溝部と対向する前記摩擦部材の側面に溝部が設けられていることを特徴とする請求項１から６のいずれか一項に記載の駆動装置。   The drive device according to claim 1, wherein a groove portion is provided on a side surface of the friction member facing the groove portion of the base member. 前記ベース部材の溝部と前記摩擦部材の溝部は、Ｖ字形状の断面を有することを特徴とする請求項１から７のいずれか一項に記載の駆動装置。   8. The driving device according to claim 1, wherein the groove portion of the base member and the groove portion of the friction member have a V-shaped cross section. 9. 前記ベース部材の溝部と対向する前記摩擦部材の互いに対向する側面は、前記加圧手段の付勢の方向に向かって互いに近づくように傾斜していることを特徴とする請求項１から６のいずれか一項に記載の駆動装置。   The side surfaces facing each other of the friction member facing the groove portion of the base member are inclined so as to approach each other toward the urging direction of the pressurizing means. The driving device according to claim 1.
JP2014208811A 2014-10-10 2014-10-10 Drive unit Pending JP2016082611A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014208811A JP2016082611A (en) 2014-10-10 2014-10-10 Drive unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014208811A JP2016082611A (en) 2014-10-10 2014-10-10 Drive unit

Publications (1)

Publication Number Publication Date
JP2016082611A true JP2016082611A (en) 2016-05-16

Family

ID=55956566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014208811A Pending JP2016082611A (en) 2014-10-10 2014-10-10 Drive unit

Country Status (1)

Country Link
JP (1) JP2016082611A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11128239B2 (en) 2018-02-23 2021-09-21 Canon Kabushiki Kaisha Vibration wave motor and lens driving device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06303782A (en) * 1993-04-14 1994-10-28 Hitachi Ltd Driver
JP2005333749A (en) * 2004-05-20 2005-12-02 Olympus Corp Ultrasonic vibrator and ultrasonic motor using the same
JP2009268237A (en) * 2008-04-24 2009-11-12 Olympus Corp Linear drive type ultrasonic motor
JP2010041904A (en) * 2008-08-07 2010-02-18 Ind Technol Res Inst Ultrasonic linear motor
JP2010226940A (en) * 2009-02-25 2010-10-07 Olympus Corp Linear-drive type ultrasonic motor
JP2013230033A (en) * 2012-04-26 2013-11-07 Omron Corp Vibration power generator element
JP2014183724A (en) * 2013-03-21 2014-09-29 Canon Inc Linear ultrasonic motor and optical device employing the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06303782A (en) * 1993-04-14 1994-10-28 Hitachi Ltd Driver
JP2005333749A (en) * 2004-05-20 2005-12-02 Olympus Corp Ultrasonic vibrator and ultrasonic motor using the same
JP2009268237A (en) * 2008-04-24 2009-11-12 Olympus Corp Linear drive type ultrasonic motor
JP2010041904A (en) * 2008-08-07 2010-02-18 Ind Technol Res Inst Ultrasonic linear motor
JP2010226940A (en) * 2009-02-25 2010-10-07 Olympus Corp Linear-drive type ultrasonic motor
JP2013230033A (en) * 2012-04-26 2013-11-07 Omron Corp Vibration power generator element
JP2014183724A (en) * 2013-03-21 2014-09-29 Canon Inc Linear ultrasonic motor and optical device employing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11128239B2 (en) 2018-02-23 2021-09-21 Canon Kabushiki Kaisha Vibration wave motor and lens driving device

Similar Documents

Publication Publication Date Title
US9705426B2 (en) Ultrasonic motor and lens apparatus including the same
JP5955347B2 (en) Linear ultrasonic motor and optical apparatus using the same
JP2014183724A (en) Linear ultrasonic motor and optical device employing the same
JP6271963B2 (en) Vibration type actuator
JP2013158151A (en) Ultrasonic motor
KR101604991B1 (en) Ultrasonic motor and lens apparatus including the same
JP2017200366A (en) Vibration wave motor and electronic apparatus loading the same
CN108667341B (en) Vibration wave motor and optical device
US9653675B2 (en) Driving apparatus, lens apparatus including the same, and imaging apparatus
JP6257224B2 (en) Motor and lens device
JP6415195B2 (en) Drive device
JP2016082611A (en) Drive unit
JP2017173502A (en) Lens barrel and imaging apparatus
JP6708472B2 (en) Vibration wave motor and optical device equipped with the vibration wave motor
JP7207949B2 (en) Vibration wave motor and drive device with vibration wave motor
JP2016140130A (en) Vibration wave motor
JP5985013B2 (en) Motor and lens barrel
JP2019039997A (en) Vibration wave motor and driving device
JP6429516B2 (en) Ultrasonic motor
JP2018137859A (en) Vibration wave motor and optical device including vibration wave motor
JP5985012B2 (en) Motor and lens barrel
JP2014209819A (en) Driving device
JP2015159725A (en) Oscillation type motor and lens device including the same
JP2019187196A (en) Vibration wave motor and drive device including the same
JP2021022999A (en) Ultrasonic motor

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20171010

RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20171214

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20180126

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180531

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180531

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180730

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190311

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20190822