JP2016065937A - Variable wavelength optical filter and manufacturing method therefor - Google Patents

Variable wavelength optical filter and manufacturing method therefor Download PDF

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JP2016065937A
JP2016065937A JP2014193779A JP2014193779A JP2016065937A JP 2016065937 A JP2016065937 A JP 2016065937A JP 2014193779 A JP2014193779 A JP 2014193779A JP 2014193779 A JP2014193779 A JP 2014193779A JP 2016065937 A JP2016065937 A JP 2016065937A
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substrate
optical filter
reflective film
tunable optical
wavelength tunable
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北澤　正吾
Shogo Kitazawa
正吾 北澤
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Pioneer Corp
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Pioneer Electronic Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a variable wavelength optical filter that features reduced distribution of unnecessary pressure exerted when substrates are bonded together, and to provide a manufacturing method therefor.SOLUTION: A variable wavelength optical filter 10 includes a first substrate 100, a second substrate 200 positioned opposite the first substrate, a first reflective film 130 provided on the first substrate, a second reflective film 210 provided on the second substrate and positioned opposite the first reflective film with an inter-reflective film gap G, and bonded sections 400 that bond the first substrate and second substrate together. The first substrate has a loading surface opposite a surface provided with the first reflective film, where all or a portion of an area overlapping the bonded section protrudes relative to other areas of the loading surface toward a direction crossing the substrate plane to form a protrusion 150.SELECTED DRAWING: Figure 1

Description

本発明は、光の干渉効果を利用した波長可変光フィルタ及び波長可変光フィルタの製造方法の技術分野に関する。   The present invention relates to a technical field of a wavelength tunable optical filter using a light interference effect and a method of manufacturing the wavelength tunable optical filter.

この種の光フィルタとして、ファブリ・ペロー干渉計の原理を利用したものが知られている。ファブリ・ペロー干渉計は、多重反射光の干渉効果を用いたシンプルな干渉計であり、対向する２枚の反射膜の間で入射光が多重反射を繰り返すことで、その光路長に応じた波長帯の光を選択的に取り出すことができる。   As this type of optical filter, an optical filter using the principle of a Fabry-Perot interferometer is known. The Fabry-Perot interferometer is a simple interferometer that uses the interference effect of multiple reflected light. The incident light repeats multiple reflections between the two reflecting films facing each other, and the wavelength according to the optical path length. The band light can be selectively extracted.

特許文献１では、光学膜を有する２枚の基板を接合して構成される光フィルタが提案されている。このような構成の光フィルタでは、波長分解能を高めるために、光学膜間のギャップを高精度に制御することが要求される。具体的には、例えば２枚の基板を接合する際に、各基板を傾斜させず、平行度を確保することが重要であるとされている。   Patent Document 1 proposes an optical filter configured by joining two substrates having an optical film. In the optical filter having such a configuration, it is required to control the gap between the optical films with high accuracy in order to increase the wavelength resolution. Specifically, for example, when two substrates are bonded, it is important to ensure parallelism without tilting each substrate.

特開２０１２−１４５６７５号公報JP 2012-145675 A

特許文献１に記載されている技術では、２枚の基板を貼り合わせた状態での荷重印加により、基板の接合が実現される。しかしながら、平坦基板に荷重印加しようとする場合、不要な圧力分布が生ずるおそれがある。不要な圧力分布は、例えば基板にたわみや傾きを生じさせる原因となり、結果として光フィルタの性能を低下させてしまうという技術的問題点が生ずる。   In the technique described in Patent Document 1, bonding of substrates is realized by applying a load in a state where two substrates are bonded together. However, when a load is applied to the flat substrate, an unnecessary pressure distribution may occur. Unnecessary pressure distribution causes, for example, deflection or tilting of the substrate, resulting in a technical problem that the performance of the optical filter is degraded.

不要な圧力分布に対しては、例えば治具等により接合装置側で対策を講じることも考えられるが、治具等に高い加工精度が求められるだけでなく、荷重印加時の治具と基板との位置合わせも容易ではない。   For the unnecessary pressure distribution, it is conceivable to take measures on the joining device side with a jig, for example, but not only high processing accuracy is required for the jig, but also the jig and substrate at the time of applying a load. It is not easy to align.

本発明が解決しようとする課題には上記のようなものが一例として挙げられる。本発明は、基板接合時の不要な圧力分布を低減することが可能な波長可変光フィルタ及び波長可変光フィルタの製造方法を提供することを課題とする。   Examples of problems to be solved by the present invention include the above. An object of the present invention is to provide a wavelength tunable optical filter and a method for manufacturing the wavelength tunable optical filter that can reduce unnecessary pressure distribution during substrate bonding.

上記課題を解決する波長可変光フィルタは、第１基板と、前記第１基板に対向する第２基板と、前記第１基板に設けられた第１反射膜と、前記第２基板に設けられ、前記第１反射膜と反射膜間ギャップを介して対向する第２反射膜と、前記第１基板及び前記第２基板を接合する接合部とを備え、前記第１基板は、前記第１反射膜が設けられる面とは反対側の荷重面において、前記接合部と重なる部分の全部又は一部が、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成されている。   A wavelength tunable optical filter that solves the above problems is provided on a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, and the second substrate, A second reflective film facing the first reflective film via a gap between the reflective films; and a bonding portion for bonding the first substrate and the second substrate, wherein the first substrate includes the first reflective film In the load surface on the opposite side to the surface on which the contact surface is provided, all or part of the portion overlapping with the joint portion is formed as a protruding portion protruding in a direction intersecting the substrate surface with respect to the other portion of the load surface. .

上記課題を解決する波長可変光フィルタの製造方法は、第１基板に第１反射膜を形成する第１反射膜形成工程と、第２基板に第２反射膜を形成する第２反射膜形成工程と、前記第１基板の前記第１反射膜が設けられる面とは反対側の荷重面において、前記第２基板との接合部と重なる部分の全部又は一部を、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成する突出部形成工程と、前記第１基板及び前記第２基板を、前記第１反射膜と前記第２反射膜とが反射膜間ギャップを介して対向するように接合する接合工程とを備える。   A method of manufacturing a wavelength tunable optical filter that solves the above problems includes a first reflective film forming step of forming a first reflective film on a first substrate, and a second reflective film forming step of forming a second reflective film on a second substrate. And all or a part of the portion of the load surface opposite to the surface on which the first reflective film is provided on the first substrate that overlaps with the joint portion with the second substrate is the other portion of the load surface. A projecting portion forming step for forming a projecting portion projecting in a direction intersecting the substrate surface, and the first reflecting film and the second reflecting film having a gap between the reflecting films. And a joining step of joining so as to face each other.

実施例に係る波長可変光フィルタの構成を示す断面図である。It is sectional drawing which shows the structure of the wavelength variable optical filter which concerns on an Example. 実施例に係る波長可変光フィルタの上面部及び下面部の構成を示す平面図である。It is a top view which shows the structure of the upper surface part and lower surface part of the wavelength variable optical filter which concerns on an Example. 比較例に係る波長可変光フィルタの構成を示す断面図である。It is sectional drawing which shows the structure of the wavelength variable optical filter which concerns on a comparative example. 比較例に係る波長可変光フィルタの上面部及び下面部の構成を示す平面図である。It is a top view which shows the structure of the upper surface part and lower surface part of the wavelength variable optical filter which concerns on a comparative example. 比較例に係る波長可変光フィルタの接合方法を示す断面図である。It is sectional drawing which shows the joining method of the wavelength tunable optical filter which concerns on a comparative example. 比較例に係る波長可変光フィルタの接合時の圧力分布を示す平面図である。It is a top view which shows the pressure distribution at the time of joining of the wavelength variable optical filter which concerns on a comparative example. 実施例に係る波長可変光フィルタの接合方法を示す断面図である。It is sectional drawing which shows the joining method of the wavelength variable optical filter which concerns on an Example. 実施例に係る波長可変光フィルタのサイズ上のメリットを示す比較図である。It is a comparison figure which shows the merit on the size of the wavelength variable optical filter which concerns on an Example. 第１変形例に係る波長可変光フィルタの構成を示す断面図である。It is sectional drawing which shows the structure of the wavelength variable optical filter which concerns on a 1st modification. 第２変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。It is the top view and sectional drawing which show the structure of the wavelength variable optical filter which concerns on a 2nd modification. 第３変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。It is the top view and sectional drawing which show the structure of the wavelength variable optical filter which concerns on a 3rd modification. 第４変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。It is the top view and sectional drawing which show the structure of the wavelength variable optical filter which concerns on a 4th modification. 第５変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。It is the top view and sectional drawing which show the structure of the wavelength variable optical filter which concerns on a 5th modification. 第６変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。It is the top view and sectional drawing which show the structure of the wavelength variable optical filter which concerns on a 6th modification. 第７変形例に係る波長可変光フィルタの構成を示す断面図（その１）である。It is sectional drawing (the 1) which shows the structure of the wavelength variable optical filter which concerns on a 7th modification. 第７変形例に係る波長可変光フィルタの構成を示す断面図（その２）である。It is sectional drawing (the 2) which shows the structure of the wavelength variable optical filter which concerns on a 7th modification. 第７変形例に係る波長可変光フィルタの構成を示す断面図（その３）である。It is sectional drawing (the 3) which shows the structure of the wavelength variable optical filter which concerns on a 7th modification.

＜１＞
本実施形態に係る波長可変光フィルタは、第１基板と、前記第１基板に対向する第２基板と、前記第１基板に設けられた第１反射膜と、前記第２基板に設けられ、前記第１反射膜と反射膜間ギャップを介して対向する第２反射膜と、前記第１基板及び前記第２基板を接合する接合部とを備え、前記第１基板は、前記第１反射膜が設けられる面とは反対側の荷重面において、前記接合部と重なる部分の全部又は一部が、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成されている。 <1>
The wavelength tunable optical filter according to the present embodiment is provided on the first substrate, the second substrate facing the first substrate, the first reflective film provided on the first substrate, and the second substrate, A second reflective film facing the first reflective film via a gap between the reflective films; and a bonding portion for bonding the first substrate and the second substrate, wherein the first substrate includes the first reflective film In the load surface on the opposite side to the surface on which the contact surface is provided, all or part of the portion overlapping with the joint portion is formed as a protruding portion protruding in a direction intersecting the substrate surface with respect to the other portion of the load surface. .

本実施形態に係る波長可変光フィルタは、第１反射膜が設けられた第１基板と、第２反射膜が設けられた第２基板とを備えて構成されている。第１反射膜及び第２反射膜は、所望の周波数帯の光に対して高い反射率を有する材料（例えば、Ａｇ等）を含んで構成されており、スパッタリング等の手法を用いて形成される。第１基板及び第２基板は、接合部において、例えば樹脂による接着や活性化接合等により接合される。第１基板及び第２基板は、第１反射膜と第２反射膜とが、反射膜間ギャップを介して対向して配置されるように接合される。反射膜間ギャップは、取り出そうとする光の波長帯に応じて適宜設定すればよい。   The wavelength tunable optical filter according to the present embodiment includes a first substrate provided with a first reflective film and a second substrate provided with a second reflective film. The first reflective film and the second reflective film are configured to include a material (for example, Ag) having a high reflectance with respect to light in a desired frequency band, and are formed using a technique such as sputtering. . The first substrate and the second substrate are bonded to each other at the bonding portion, for example, by bonding with resin or activation bonding. The first substrate and the second substrate are bonded so that the first reflective film and the second reflective film are arranged to face each other with a gap between the reflective films. What is necessary is just to set the gap between reflecting films suitably according to the wavelength range of the light which it is going to take out.

第１基板及び第２基板の接合の際には、例えば接合機による荷重印加が行われる。具体的には、重ね合わされた第１基板及び第２基板を挟みこむようにして設置された接合機によって、第１基板及び第２基板の第１反射膜及び第２反射膜が設けられる面とは反対側の荷重面に対して荷重が印加される。この際、ただ荷重を印加するだけでは、荷重面に不要な圧力分布が生ずるおそれがある。不要な圧力分布は、例えば基板にたわみや傾きを生じさせる原因となり、第１反射膜と第２反射膜との平行度が損なわれてしまう結果、光フィルタの性能を低下させてしまう。   When bonding the first substrate and the second substrate, for example, a load is applied by a bonding machine. Specifically, it is opposite to the surface on which the first reflective film and the second reflective film of the first substrate and the second substrate are provided by the bonding machine installed so as to sandwich the superimposed first substrate and the second substrate. A load is applied to the load surface on the side. At this time, simply applying a load may cause an unnecessary pressure distribution on the load surface. Unnecessary pressure distribution causes, for example, the substrate to bend or tilt, and the parallelism between the first reflective film and the second reflective film is impaired, resulting in a decrease in the performance of the optical filter.

しかるに本実施形態では、第１基板に不要な圧力分布を低減するための突出部が形成されている。具体的には、荷重面の接合部と重なる部分の全部又は一部が、荷重面における他の部分よりも基板面に交わる方向（即ち、荷重印加方向）に突出するように形成されている。なお、ここでの「接合部と重なる部分」とは、第１基板を平面的に見て、接合部と重なる領域を意味しており、接合部への荷重に大きく寄与する部分である。   However, in the present embodiment, a protrusion for reducing unnecessary pressure distribution is formed on the first substrate. Specifically, all or a part of the portion of the load surface that overlaps the joint portion is formed so as to protrude in a direction intersecting the substrate surface (that is, the load application direction) more than the other portion of the load surface. Here, the “portion overlapping the bonding portion” means a region overlapping the bonding portion when the first substrate is viewed in plan, and is a portion that greatly contributes to the load applied to the bonding portion.

上述した構成によれば、突出部が他の部分より相対的に荷重印加方向に押し出されている（言い換えれば、他の部分が突出部より相対的に荷重印加方向に押し下げられている）ため、荷重印加による不要な圧力分布を低減することができる。また本実施形態では特に、接合機側の調整を必要としないため、治具加工精度や治具と基板の位置合わせの精度等が要求されず、極めて容易に不要な圧力分布を低減できる。   According to the configuration described above, the protrusion is pushed out in the load application direction relative to the other part (in other words, the other part is pushed down in the load application direction relative to the protrusion). Unnecessary pressure distribution due to load application can be reduced. Also, in this embodiment, since adjustment on the bonding machine side is not particularly required, jig processing accuracy, accuracy of jig and substrate alignment, etc. are not required, and unnecessary pressure distribution can be reduced very easily.

なお、第１基板と第２基板との間に、第３の基板を配置するような場合でも同様の効果を得ることができる。即ち、接合する基板の数が増加した場合であっても、本実施形態に係る効果は相応に得られる。   The same effect can be obtained even when a third substrate is arranged between the first substrate and the second substrate. That is, even if the number of substrates to be bonded is increased, the effects according to the present embodiment can be obtained accordingly.

以上説明したように、本実施形態に係る波長可変光フィルタによれば、接合時の荷重印加による基板のたわみや傾きを低減することで、品質の低下を防止することが可能である。   As described above, according to the wavelength tunable optical filter according to the present embodiment, it is possible to prevent the deterioration of the quality by reducing the deflection and the inclination of the substrate due to the load application at the time of bonding.

＜２＞
本実施形態に係る波長可変光フィルタの一態様では、前記第２基板は、前記第２反射膜が設けられる面とは反対側の荷重面において、前記接合部と重なる部分の全部又は一部が、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成されている。 <2>
In one aspect of the wavelength tunable optical filter according to this embodiment, the second substrate has a load surface on the side opposite to the surface on which the second reflective film is provided, all or a part of the portion overlapping the bonding portion. The protrusion is formed as a protrusion that protrudes in a direction intersecting the substrate surface with respect to the other portions of the load surface.

この態様によれば、第１基板に加えて、第２基板の荷重面にも突出部が形成されている。よって、第１基板及び第２基板の両側からの荷重印加について、不要な圧力分布を低減できる。従って、より効果的に基板のたわみや傾きを低減できる。   According to this aspect, in addition to the first substrate, the protruding portion is also formed on the load surface of the second substrate. Therefore, an unnecessary pressure distribution can be reduced with respect to load application from both sides of the first substrate and the second substrate. Therefore, it is possible to reduce the deflection and inclination of the substrate more effectively.

＜３＞
上述した第２基板にも突出部が形成されている態様では、前記第１基板の突出部及び前記第２基板の突出部は、基板面に交わる方向で平面的に見て、互いに同一の形状であってもよい。 <3>
In the aspect in which the protrusions are also formed on the second substrate described above, the protrusions of the first substrate and the protrusions of the second substrate have the same shape when viewed in plan in a direction intersecting the substrate surface. It may be.

この態様によれば、第１基板の突出部と第２基板の突出部とが同一の形状（即ち、荷重面の同一の領域が突出されている）ため、不要な圧力分布の低減を図りつつ、効率的な荷重印加を実現できる。なお、本実施形態における「同一の形状」とは、完全に形状が一致する場合だけを意味するのではなく、同一と呼べるまでに近い形状も含むものとする。即ち、第１基板の突出部と第２基板の突出部との形状が完全に同一ではなくとも、近い形状であれば、上述した本実施形態の効果は相応に発揮される。   According to this aspect, since the protruding portion of the first substrate and the protruding portion of the second substrate have the same shape (that is, the same region of the load surface protrudes), an unnecessary pressure distribution is reduced. Efficient load application can be realized. Note that the “same shape” in this embodiment does not mean only the case where the shapes completely match, but also includes shapes that are close to being called the same. That is, even if the shape of the protruding portion of the first substrate and the protruding portion of the second substrate are not completely the same, if the shapes are close, the effects of the above-described embodiment will be exhibited accordingly.

＜４＞
本実施形態に係る波長可変光フィルタの他の態様では、前記突出部は、基板面に交わる方向で平面的に見て、円形又は円環状である。 <4>
In another aspect of the wavelength tunable optical filter according to this embodiment, the protrusion is circular or annular when viewed in a plane in a direction intersecting the substrate surface.

この態様によれば、突出部が円形又は円環状であるため、基板にかかる圧力を効果的に分散することができる。従って、不要な圧力分布を効果的に低減できる。   According to this aspect, since the protrusion is circular or annular, the pressure applied to the substrate can be effectively dispersed. Therefore, unnecessary pressure distribution can be effectively reduced.

＜５＞
本実施形態に係る波長可変光フィルタの他の態様では、前記第１基板及び前記第２基板の少なくとも一方は、前記第１反射膜又は前記第２反射膜を可動とする可動部を有しており、前記可動部は、前記突出部よりも、基板面に交わる方向に低くなるように形成されている。 <5>
In another aspect of the wavelength tunable optical filter according to this embodiment, at least one of the first substrate and the second substrate has a movable part that makes the first reflective film or the second reflective film movable. The movable portion is formed so as to be lower in the direction intersecting the substrate surface than the protruding portion.

この態様によれば、第１反射膜又は第２反射膜は、可動部によって位置調整等が可能とされている。そして、可動部（具体的には、可動機構が設けられた基板部分）は、突出部よりも基板面に交わる方向に低くなるように形成されている。言い換えれば、可動部は突出部のように荷重印加方向に突出しないように形成されている。   According to this aspect, the position of the first reflective film or the second reflective film can be adjusted by the movable part. The movable portion (specifically, the substrate portion on which the movable mechanism is provided) is formed to be lower in the direction intersecting the substrate surface than the protruding portion. In other words, the movable part is formed so as not to protrude in the load application direction like the protruding part.

上述した構成によれば、荷重印加時においても、可動部には圧力は殆ど或いは全くかからない。よって、高い精度での調整等が要求される可動部が、荷重印加時の圧力によって悪影響を受けてしまうことを防止できる。また、可動部上の異物等に起因して、荷重印加時に可動部が予期せぬダメージを受けてしまうことを防止できる。   According to the above-described configuration, even when a load is applied, little or no pressure is applied to the movable part. Therefore, it is possible to prevent the movable part, which requires adjustment with high accuracy, from being adversely affected by the pressure when applying the load. In addition, it is possible to prevent the movable part from being unexpectedly damaged when a load is applied due to foreign matters on the movable part.

＜６＞
本実施形態に係る波長可変光フィルタの他の態様では、前記第１基板及び前記第２基板は、基板面に交わる方向で平面的に見て互いに同一の形状であり、所定角度回転された状態で接合されている。 <6>
In another aspect of the wavelength tunable optical filter according to the present embodiment, the first substrate and the second substrate have the same shape as viewed in plan in a direction intersecting the substrate surface, and are rotated by a predetermined angle. It is joined with.

この態様によれば、第１基板及び第２基板が同一の形状であるものの、所定角度回転された状態で接合されるため、互いにぴったりと重なるような状態では接合されず、他の部位に比べて相対的に荷重変形しやすい部位が生じる。具体的には、第１基板及び第２基板の端部や角部等であるが、第１基板及び第２基板に突出部を設けることで、前記相対的に荷重変形しやすい部位への荷重の印加を低減し、不要な圧力分布を低減できる。従って、接合時の荷重印加による基板のたわみや傾きを低減することでき、品質の低下を防止することが可能である。   According to this aspect, although the first substrate and the second substrate have the same shape, they are bonded in a state where they are rotated by a predetermined angle. As a result, a portion that is relatively easily deformed by load is generated. Specifically, it is an end portion or a corner portion of the first substrate and the second substrate, but by providing protrusions on the first substrate and the second substrate, the load on the portion that is relatively easily deformed by the load. Application pressure can be reduced, and unnecessary pressure distribution can be reduced. Therefore, it is possible to reduce the deflection and inclination of the substrate due to the application of a load at the time of bonding, and it is possible to prevent a deterioration in quality.

＜７＞
本実施形態に係る波長可変光フィルタの他の態様では、前記第１基板及び前記第２基板は、基板面に交わる方向で平面的に見て互いに異なる形状である。 <7>
In another aspect of the wavelength tunable optical filter according to the present embodiment, the first substrate and the second substrate have shapes different from each other when viewed in plan in a direction intersecting the substrate surface.

この態様によれば、第１基板及び第２基板が異なる形状であるため、互いにぴったりと重なるような状態では接合されず、他の部位に比べて相対的に荷重変形しやすい部位が生じる。具体的には、第１基板及び第２基板の端部や角部等であるが、第１基板及び第２基板に突出部を設けることで、前記相対的に荷重変形しやすい部位への荷重の印加を低減し、不要な圧力分布を低減できる。従って、接合時の荷重印加による基板のたわみや傾きを低減することでき、品質の低下を防止することが可能である。   According to this aspect, since the first substrate and the second substrate have different shapes, the first substrate and the second substrate are not joined in a state where they are exactly overlapped with each other, and a portion that is relatively easily deformed by load as compared with other portions is generated. Specifically, it is an end portion or a corner portion of the first substrate and the second substrate, but by providing protrusions on the first substrate and the second substrate, the load on the portion that is relatively easily deformed by the load. Application pressure can be reduced, and unnecessary pressure distribution can be reduced. Therefore, it is possible to reduce the deflection and inclination of the substrate due to the application of a load at the time of bonding, and it is possible to prevent a deterioration in quality.

＜８＞
本実施形態に係る波長可変光フィルタの他の態様では、前記突出部の位置は、前記第１基板及び前記第２基板間の内部構造に基づいて決定されている。 <8>
In another aspect of the wavelength tunable optical filter according to this embodiment, the position of the protrusion is determined based on an internal structure between the first substrate and the second substrate.

この態様によれば、第１基板及び第２基板間の内部構造に基づいて突出部の位置（言い換えれば、形状）が決定されているため、不要な圧力分布を効果的に低減することができる。具体的には、例えば内部構造を再現した事前のシミュレーション等により、圧力のかかりやすい場所、かかりにくい場所等を判別すれば、内部構造に応じた最適な荷重印加パターンを決定できる。そして、最適な荷重印加パターンを実現できるように突出部の位置を決定すれば、極めて効果的に不要な圧力分布を低減できる。   According to this aspect, since the position (in other words, the shape) of the protrusion is determined based on the internal structure between the first substrate and the second substrate, unnecessary pressure distribution can be effectively reduced. . Specifically, for example, by determining a place where pressure is likely to be applied or a place where pressure is difficult to be applied by a preliminary simulation or the like reproducing the internal structure, an optimum load application pattern corresponding to the internal structure can be determined. If the position of the protruding portion is determined so as to realize an optimum load application pattern, the unnecessary pressure distribution can be reduced extremely effectively.

＜９＞
本実施形態に係る波長可変光フィルタの製造方法は、第１基板に第１反射膜を形成する第１反射膜形成工程と、第２基板に第２反射膜を形成する第２反射膜形成工程と、前記第１基板の前記第１反射膜が設けられる面とは反対側の荷重面において、前記第２基板との接合部と重なる部分の全部又は一部を、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成する突出部形成工程と、前記第１基板及び前記第２基板を、前記第１反射膜と前記第２反射膜とが反射膜間ギャップを介して対向するように接合する接合工程とを備える。 <9>
In the method for manufacturing a wavelength tunable optical filter according to the present embodiment, a first reflective film forming step of forming a first reflective film on a first substrate and a second reflective film forming step of forming a second reflective film on a second substrate. And all or a part of the portion of the load surface opposite to the surface on which the first reflective film is provided on the first substrate that overlaps with the joint portion with the second substrate is the other portion of the load surface. A projecting portion forming step for forming a projecting portion projecting in a direction intersecting the substrate surface, and the first reflecting film and the second reflecting film having a gap between the reflecting films. And a joining step of joining so as to face each other.

本実施形態に係る波長可変光フィルタの製造方法によれば、上述した波長可変光フィルタと同様に、第１基板に突出部を設けることで、荷重印加時の不要な圧力分布を低減できる。従って、接合時の荷重印加による基板のたわみや傾きが低減され、品質の低下を防止することが可能である。   According to the method for manufacturing a wavelength tunable optical filter according to the present embodiment, an unnecessary pressure distribution at the time of applying a load can be reduced by providing a protrusion on the first substrate, similarly to the wavelength tunable optical filter described above. Therefore, the deflection and the inclination of the substrate due to the load application at the time of bonding can be reduced, and the deterioration of the quality can be prevented.

本実施形態の各工程が実行される順序は特に限定されるものではなく、各工程は相前後して或いは並行して実行されてもよい。よって、例えば第１反射膜形成工程及び第２反射膜形成工程が実行される前に、突出部形成工程が実行されても構わない。   The order in which each process of this embodiment is performed is not specifically limited, Each process may be performed in succession or in parallel. Therefore, for example, the protrusion forming step may be executed before the first reflecting film forming step and the second reflecting film forming step.

なお、本実施形態に係る波長可変光フィルタの製造方法においても、上述した本実施形態に係る波長可変光フィルタにおける各種態様と同様の各種態様を採ることが可能である。   Note that the tunable optical filter manufacturing method according to the present embodiment can also adopt various aspects similar to the various aspects of the above-described tunable optical filter according to the present embodiment.

＜１０＞
本実施形態に係る波長可変光フィルタの製造方法の一態様では、前記突出部形成工程では、前記第１基板がエッチングされることにより前記突出部が形成される。 <10>
In one aspect of the method of manufacturing a wavelength tunable optical filter according to the present embodiment, in the protrusion forming step, the protrusion is formed by etching the first substrate.

この態様によれば、エッチングにより基板表面を加工することで、所望の形状の突出部を比較的容易に形成できる。   According to this aspect, by processing the substrate surface by etching, it is possible to relatively easily form a protrusion having a desired shape.

＜１１＞
本実施形態に係る波長可変光フィルタの製造方法の他の態様では、前記突出部形成工程では、前記第１基板に感光性樹脂材料を一体成型することで前記突出部が形成される。 <11>
In another aspect of the method for manufacturing a wavelength tunable optical filter according to the present embodiment, in the protrusion forming step, the protrusion is formed by integrally molding a photosensitive resin material on the first substrate.

この態様によれば、感光性樹脂材料の一体成型により、基板表面を直接加工することなく突出部を形成できる。   According to this aspect, the protrusion can be formed by directly molding the photosensitive resin material without directly processing the substrate surface.

本実施形態に係る波長可変光フィルタ及び波長可変光フィルタの製造方法の作用及び他の利得については、以下に示す実施例において、より詳細に説明する。   The operation and other gains of the wavelength tunable optical filter and the wavelength tunable optical filter according to the present embodiment will be described in more detail in the following examples.

以下では、図面を参照して本発明の実施例について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

＜装置構成＞
初めに、実施例に係る波長可変光フィルタの装置構成について、図１から図４を参照して説明する。ここに図１は、実施例に係る波長可変光フィルタの構成を示す断面図であり、図２は、実施例に係る波長可変光フィルタの上面部及び下面部の構成を示す平面図である。また図３は、比較例に係る波長可変光フィルタの構成を示す断面図であり、図４は、比較例に係る波長可変光フィルタの上面部及び下面部の構成を示す平面図である。 <Device configuration>
First, the device configuration of the wavelength tunable optical filter according to the embodiment will be described with reference to FIGS. FIG. 1 is a cross-sectional view illustrating the configuration of the wavelength tunable optical filter according to the embodiment, and FIG. 2 is a plan view illustrating the configurations of the upper surface portion and the lower surface portion of the wavelength tunable optical filter according to the embodiment. FIG. 3 is a cross-sectional view illustrating a configuration of a wavelength tunable optical filter according to a comparative example, and FIG. 4 is a plan view illustrating configurations of an upper surface portion and a lower surface portion of the wavelength tunable optical filter according to the comparative example.

図１及び図２において、本実施例に係る波長可変光フィルタ１０は、第１基板１００と、第２基板２００とを備えて構成されている。   1 and 2, the tunable optical filter 10 according to the present embodiment includes a first substrate 100 and a second substrate 200.

第１基板１００は、可動部１１０を有している。可動部１１０は、その周辺に位置するメンブレン部１２０によって支持されている。可動部１１０の第２基板２００側には、第１反射膜１３０及び第１駆動電極１４０が設けられている。また、本実施例では特に、第１基板１００の荷重面におけるメンブレン部１２０の周囲に、第１基板の突出部１５０が設けられている。   The first substrate 100 has a movable part 110. The movable part 110 is supported by the membrane part 120 located in the periphery thereof. A first reflective film 130 and a first drive electrode 140 are provided on the movable substrate 110 on the second substrate 200 side. In this embodiment, in particular, the first substrate protrusion 150 is provided around the membrane portion 120 on the load surface of the first substrate 100.

第２基板２００は、接合部４００において第１基板１００と接合されている。第２基板２００の可動部１００と対向する位置には、第２反射膜２１０及び第２駆動電極２２０が設けられている。また、第１基板１００と同様に、第２基板２００の荷重面には第２基板の突出部２３０が設けられている。   The second substrate 200 is bonded to the first substrate 100 at the bonding portion 400. A second reflective film 210 and a second drive electrode 220 are provided at a position facing the movable part 100 of the second substrate 200. Similarly to the first substrate 100, the load surface of the second substrate 200 is provided with a protrusion 230 of the second substrate.

第１反射膜１３０及び第２反射膜２１０は、例えばＡｇ（銀）等の反射率の高い材料を含んで構成されており、例えばスパッタリング等の手法を用いて第１基板１００及び第２基板２００上に形成される。第１反射膜１３０及び第２反射膜２１０は、所定のギャップＧを隔てて互いに対向するように配置されている。なお、ギャップＧは、波長可変光フィルタの対象となる光の波長帯に応じて適宜設定すればよい。   The first reflective film 130 and the second reflective film 210 are configured to include a material having a high reflectance such as Ag (silver), for example, and the first substrate 100 and the second substrate 200 are formed using a technique such as sputtering. Formed on top. The first reflective film 130 and the second reflective film 210 are arranged to face each other with a predetermined gap G therebetween. Note that the gap G may be set as appropriate according to the wavelength band of light that is a target of the wavelength tunable optical filter.

第１駆動電極１４０及び下側電極２２０は、電圧を印加することにより静電アクチュエータとして機能する。よって、第１駆動電極１４０及び下側電極２２０に印加する電力を変化させることで、第１反射膜１３０及び第２反射膜２１０間のギャップＧを微調整することができる。   The first drive electrode 140 and the lower electrode 220 function as an electrostatic actuator by applying a voltage. Therefore, the gap G between the first reflective film 130 and the second reflective film 210 can be finely adjusted by changing the power applied to the first drive electrode 140 and the lower electrode 220.

第１基板の突出部１５０及び第２基板の突出部２３０は、荷重面の他の部分（具体的には、基板の４角周辺部分）よりも突出した構造となっている。以下では、第１基板の突出部１５０及び第２基板の突出部２３０を有しない比較例を用いて、第１基板の突出部１５０及び第２基板の突出部２３０の構成をより詳細に説明する。   The protruding portion 150 of the first substrate and the protruding portion 230 of the second substrate have a structure that protrudes from other portions of the load surface (specifically, the four corners of the substrate). Hereinafter, the configuration of the first substrate protrusion 150 and the second substrate protrusion 230 will be described in more detail using a comparative example that does not include the first substrate protrusion 150 and the second substrate protrusion 230. .

図３及び図４において、比較例に係る波長可変光フィルタ２０では、第１基板１００及び第２基板２００の荷重面は、メンブレン部１２０を除き平面とされている。即ち、第１基板１００の高さは、メンブレン部１２０以外はどこも同じである。また、第２基板２００にはメンブレン部１２０が存在しないため、第２基板２００の高さはどこも同じである。   3 and 4, in the wavelength tunable optical filter 20 according to the comparative example, the load surfaces of the first substrate 100 and the second substrate 200 are flat except for the membrane portion 120. That is, the height of the first substrate 100 is the same except for the membrane portion 120. Moreover, since the membrane part 120 does not exist in the 2nd board | substrate 200, the height of the 2nd board | substrate 200 is the same everywhere.

図１及び図２に戻り、本実施例に係る波長可変光フィルタ１０は、上述した比較例と比べると、基板の４角周辺の高さが低くなるように構成されている。言い換えれば、基板の中心付近の高さが、基板の４角周辺の高さよりも高くなるように構成されている。このように、本実施例に係る波長可変光フィルタ１０は、第１基板１００及び第２基板２００に、第１基板の突出部１５０及び第２基板の突出部２３０を設けることで、荷重面の一部が、他部と比べて突出するように構成されている。   Returning to FIG. 1 and FIG. 2, the tunable optical filter 10 according to the present embodiment is configured so that the height around the four corners of the substrate is lower than that of the comparative example described above. In other words, the height near the center of the substrate is configured to be higher than the height around the four corners of the substrate. As described above, the wavelength tunable optical filter 10 according to the present embodiment provides the first substrate 100 and the second substrate 200 with the protruding portion 150 of the first substrate and the protruding portion 230 of the second substrate. A part is configured to protrude as compared with the other part.

なお、第１基板の突出部１５０及び第２基板の突出部２３０は、例えば第１基板１００及び第２基板２００の表面をエッチング等により加工することで形成することができる。或いは、感光性樹脂材料を第１基板１００及び第２基板２００と一体的に成型することで形成してもよい。   The first substrate protrusion 150 and the second substrate protrusion 230 can be formed, for example, by processing the surfaces of the first substrate 100 and the second substrate 200 by etching or the like. Alternatively, it may be formed by integrally molding a photosensitive resin material with the first substrate 100 and the second substrate 200.

＜接合時の問題点＞
次に、比較例に係る波長可変光フィルタの接合方法及び接合時に発生し得る問題点について、図５及び図６を参照して説明する。ここに図５は、比較例に係る波長可変光フィルタの接合方法を示す断面図である。また図６は、比較例に係る波長可変光フィルタの接合時の圧力分布を示す平面図である。 <Problems during joining>
Next, a method for joining the wavelength tunable optical filter according to the comparative example and problems that may occur at the time of joining will be described with reference to FIGS. FIG. 5 is a cross-sectional view showing a joining method of the wavelength tunable optical filter according to the comparative example. FIG. 6 is a plan view showing a pressure distribution when the wavelength tunable optical filter according to the comparative example is bonded.

図５において、一般的な波長可変光フィルタの製造時には、第１基板１００と第２基板２００とが、接合部４００において重ね合わされた状態で、接合機５００による荷重印加が行われる。この際、第１基板１００及び第２基板２００には、第１反射膜１３０及び第２反射膜２１０の平行度を維持するためにも均等に圧力がかかることが望ましい。しかしながら、比較例に係る波長可変光フィルタ２０のような基板形状では、圧力を均等にかけることは極めて難しく、圧力が集中してかかる部分（図中の破線で囲んだ部分）が多少なりとも生じてしまう。不要な圧力分布は、基板にたわみや傾きを生じさせる原因となり、結果として光フィルタとしての性能を低下させてしまう。   In FIG. 5, when a general tunable optical filter is manufactured, a load is applied by the bonding machine 500 in a state where the first substrate 100 and the second substrate 200 are overlapped at the bonding portion 400. At this time, it is desirable that the first substrate 100 and the second substrate 200 are evenly pressurized in order to maintain the parallelism of the first reflective film 130 and the second reflective film 210. However, in the substrate shape such as the tunable optical filter 20 according to the comparative example, it is extremely difficult to apply the pressure evenly, and the portion where the pressure is concentrated (the portion surrounded by the broken line in the figure) is somewhat generated. End up. The unnecessary pressure distribution causes the substrate to bend and tilt, and as a result, the performance as an optical filter is degraded.

図６に示すように、本願発明者の研究するところによれば、荷重印加時の圧力は基板の４角周辺に集中してかかる傾向があることが判明している。本実施例では、このような不要な圧力分布を低減するために、第１基板の突出部１５０及び第２基板の突出部２３０を設けている。   As shown in FIG. 6, according to a study by the present inventor, it has been found that the pressure at the time of applying a load tends to be concentrated around the four corners of the substrate. In this embodiment, in order to reduce such an unnecessary pressure distribution, the protrusion 150 of the first substrate and the protrusion 230 of the second substrate are provided.

＜本実施例の効果＞
次に、実施例に係る波長可変光フィルタにより発揮される効果について、図７及び図８を参照して説明する。ここに図７は、実施例に係る波長可変光フィルタの接合方法を示す断面図である。また図８は、実施例に係る波長可変光フィルタのサイズ上のメリットを示す比較図である。 <Effect of this embodiment>
Next, the effect exhibited by the wavelength tunable optical filter according to the embodiment will be described with reference to FIGS. FIG. 7 is a cross-sectional view illustrating a method of joining the wavelength tunable optical filter according to the embodiment. FIG. 8 is a comparison diagram showing the size advantage of the wavelength tunable optical filter according to the example.

図７において、本実施例に係る波長可変光フィルタ１０によれば、荷重印加時には主に第１基板の突出部１５０及び第２基板の突出部２３０に対応する部分（即ち、図中の破線で囲んだ部分に）圧力がかかる。即ち、本実施例は、基板の４角周辺に圧力がかかり易い比較例と比べて、基板の４角周辺に圧力がかかり難い構造となっている。これにより、荷重印加時の不要な圧力分布を低減できる。よって、基板のたわみや傾きに起因して、第１反射膜１３０及び第２反射膜２１０の平行度が維持できなくなる状況を回避できる。   In FIG. 7, according to the wavelength tunable optical filter 10 according to the present embodiment, the portions corresponding to the protrusions 150 of the first substrate and the protrusions 230 of the second substrate (ie, the broken lines in the figure) when the load is applied. Pressure is applied to the enclosed area. That is, this example has a structure in which pressure is hardly applied around the four corners of the substrate as compared with the comparative example in which pressure is easily applied around the four corners of the substrate. Thereby, the unnecessary pressure distribution at the time of load application can be reduced. Therefore, it is possible to avoid a situation in which the parallelism of the first reflective film 130 and the second reflective film 210 cannot be maintained due to the deflection or inclination of the substrate.

なお、不要な圧力分布を低減するための方法としては、接合機５００側の構成を変更することも考えられる。具体的には、例えば接合機５００の荷重印加面を凸型にするような例が考えられる。しかしながら、接合機５００側の構成を変更する場合、接合機５００に高い加工精度が求められるだけでなく、接合機５００と基板との位置合わせが非常に難しくなるという技術的問題点が生ずる。本実施例は、このような不都合を回避しつつ、好適に不要な圧力分布を回避できるという効果を有している。   Note that, as a method for reducing unnecessary pressure distribution, it is conceivable to change the configuration on the bonding machine 500 side. Specifically, for example, an example in which the load application surface of the bonding machine 500 is convex can be considered. However, when the configuration on the bonding machine 500 side is changed, not only high processing accuracy is required for the bonding machine 500 but also a technical problem that alignment of the bonding machine 500 and the substrate becomes very difficult. The present embodiment has an effect that an unnecessary pressure distribution can be suitably avoided while avoiding such an inconvenience.

図８において、不要な圧力分布を低減するための他の方法として、例えば基板全体の形状を円形にする方法（図中の第２比較例参照）も考えられる。しかしながら、基板全体を円形にしようとすると、図を見ても分かるように、基板のサイズが大型化してしまう。このように本実施例は、基板（ひいては接合後の素子）の小型化においても有利であるという効果を有している。   In FIG. 8, as another method for reducing the unnecessary pressure distribution, for example, a method of making the shape of the entire substrate circular (see the second comparative example in the figure) is also conceivable. However, if the entire substrate is made circular, the size of the substrate increases as can be seen from the figure. As described above, this embodiment has an effect that it is advantageous in reducing the size of the substrate (and thus the element after bonding).

＜変形例＞
次に、実施例に係る波長可変光フィルタの変形例について、図９から図１７を参照して説明する。ここに図９は、第１変形例に係る波長可変光フィルタの構成を示す断面図であり、図１０は、第２変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。また図１１は、第３変形例に係る波長可変光フィルタの構成を示す上面図及び断面図であり、図１２は、第４変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。更に図１３は、第５変形例に係る波長可変光フィルタの構成を示す上面図及び断面図であり、図１４は、第６変形例に係る波長可変光フィルタの構成を示す上面図及び断面図である。図１５から図１７は夫々、第７変形例に係る波長可変光フィルタの構成を示す断面図である。 <Modification>
Next, modifications of the wavelength tunable optical filter according to the embodiment will be described with reference to FIGS. FIG. 9 is a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the first modification, and FIG. 10 is a top view and a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the second modification. . FIG. 11 is a top view and a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the third modification, and FIG. 12 is a top view and a cross-sectional view showing the configuration of the wavelength tunable optical filter according to the fourth modification. It is. Further, FIG. 13 is a top view and a cross-sectional view showing a configuration of the wavelength tunable optical filter according to the fifth modification, and FIG. 14 is a top view and a cross-sectional view showing a configuration of the wavelength tunable optical filter according to the sixth modification. It is. 15 to 17 are cross-sectional views showing the configuration of the wavelength tunable optical filter according to the seventh modification.

図９において、第１変形例に係る波長可変光フィルタでは、第１基板１００における可動部１１０の高さが、第１基板の突出部１５０よりも低くなるように構成されている。このように構成すれば、可動部１１０上に異物が存在しているような場合であっても、荷重印加によって可動部１１０がダメージを受けてしまうことを防止できる。   In FIG. 9, the wavelength tunable optical filter according to the first modification is configured such that the height of the movable portion 110 in the first substrate 100 is lower than the protruding portion 150 of the first substrate. If comprised in this way, even if it is a case where the foreign material exists on the movable part 110, it can prevent that the movable part 110 receives a damage by load application.

図１０において、第２変形例に係る波長可変光フィルタでは、同一の形状である第１基板１００及び第２基板２００が所定角度（例えば４５度）回転された状態で接合される。接合する際に第１基板１００及び第２基板２００が重なり合わず、他の部位に比べて相対的に荷重変形しやすい部位（即ち、図中の丸で囲んだ部分）が生じるが、本構成によれば、相対的に荷重変形しやすい部位に印加される荷重を低減し、不要な圧力分布を低減できる。 図１１において、第３変形例に係る波長可変光フィルタでは、互いに異なる形状である第１基板１００及び第２基板２００が接合される。接合する際に第１基板１００及び第２基板２００が重なり合わず、他の部位に比べて相対的に荷重変形しやすい部位（即ち、図中の丸で囲んだ部分）が生じるが、本構成によれば、第２変形例と同様に、相対的に荷重変形しやすい部位に印加される荷重を低減し、不要な圧力分布を低減できる。   In FIG. 10, in the wavelength tunable optical filter according to the second modification, the first substrate 100 and the second substrate 200 having the same shape are joined in a state rotated by a predetermined angle (for example, 45 degrees). When bonding, the first substrate 100 and the second substrate 200 do not overlap each other, and a portion that is relatively easily deformed by load compared to other portions (that is, a portion surrounded by a circle in the drawing) is generated. According to this, it is possible to reduce the load applied to a portion that is relatively easily deformed by load, and to reduce unnecessary pressure distribution. In FIG. 11, in the wavelength tunable optical filter according to the third modification, the first substrate 100 and the second substrate 200 having different shapes are joined. When bonding, the first substrate 100 and the second substrate 200 do not overlap each other, and a portion that is relatively easily deformed by load compared to other portions (that is, a portion surrounded by a circle in the drawing) is generated. Accordingly, as in the second modified example, it is possible to reduce a load applied to a portion that is relatively susceptible to load deformation, and to reduce an unnecessary pressure distribution.

図１２において、第４変形例に係る波長可変光フィルタでは、内部構造に応じて第１基板の突出部１５０の形状が決定されている。内部構造によって、予め圧力がかかり易い或いはかかり難い場所が分かっている場合には、最適な荷重印加パターンを実現できるように第１基板の突出部１５０の形状を決定し、より好適に不要な圧力分布を低減させることができる。   In FIG. 12, in the wavelength tunable optical filter according to the fourth modification, the shape of the protrusion 150 of the first substrate is determined according to the internal structure. When the location where pressure is likely or difficult to be applied is known in advance depending on the internal structure, the shape of the protrusion 150 of the first substrate is determined so that an optimal load application pattern can be realized, and more preferably unnecessary pressure is applied. Distribution can be reduced.

図１３において、第５変形例に係る波長可変光フィルタでは、第２基板２００に第２基板の突出部２３０が設けられているのみで、第１基板１００には第１基板の突出部１５０は設けられていない。このように、いずれか一方の基板にのみ突出部を設ける場合であっても、上述した本実施例の効果は相応に発揮される。   In FIG. 13, in the wavelength tunable optical filter according to the fifth modification, the second substrate 200 has only the second substrate protrusion 230, and the first substrate 100 has the first substrate protrusion 150. Not provided. As described above, even when the protruding portion is provided only on one of the substrates, the above-described effects of the present embodiment are exhibited accordingly.

図１４において、第６変形例に係る波長可変光フィルタでは、第１基板１００と第２基板２００との間に第３の基板３００が配置されている。このように、３枚以上の基板を荷重印加によって接合する場合であっても、第１基板１００及び第２基板２００の荷重面に第１基板の突出部１５０及び第２基板の突出部２３０を設ければ、上述した本実施例の効果は相応に発揮される。   In FIG. 14, in the wavelength tunable optical filter according to the sixth modification, the third substrate 300 is disposed between the first substrate 100 and the second substrate 200. As described above, even when three or more substrates are bonded by applying a load, the first substrate protrusion 150 and the second substrate protrusion 230 are formed on the load surfaces of the first substrate 100 and the second substrate 200. If provided, the effect of the present embodiment described above is exhibited accordingly.

図１５から図１７において、第７変形例に係る波長可変光フィルタでは、第１基板の突出部１５０の形状と、第２基板の突出部２３０の形状が同一とされている。即ち、第１基板１００及び第２基板２００の同一部分（即ち、重なり合う領域）が突出するように構成されている。このように構成すれば、荷重印加時において、より好適に圧力をかけることができる。   15 to 17, in the wavelength tunable optical filter according to the seventh modification, the shape of the protrusion 150 of the first substrate is the same as the shape of the protrusion 230 of the second substrate. That is, the same part (namely, overlapping area) of the first substrate 100 and the second substrate 200 is configured to protrude. If comprised in this way, a pressure can be applied more suitably at the time of load application.

なお、図１５に示す例では、第１基板の突出部１５０及び第２基板の突出部２３０の大きさと、接合部４００の大きさとがイコールになっている。また、図１６に示す例では、第１基板の突出部１５０及び第２基板の突出部２３０の大きさが、接合部４００の大きさより小さくなっている。図１７に示す例では、第１基板の突出部１５０及び第２基板の突出部２３０の大きさが、接合部４００の大きさより大きくなっている。これらいずれの場合であっても、上述した本実施例の効果は相応に発揮される。   In the example shown in FIG. 15, the size of the projection 150 of the first substrate and the projection 230 of the second substrate and the size of the joint 400 are equal. In the example illustrated in FIG. 16, the size of the first substrate protrusion 150 and the second substrate protrusion 230 is smaller than the size of the bonding portion 400. In the example shown in FIG. 17, the size of the first substrate protrusion 150 and the second substrate protrusion 230 is larger than the size of the bonding portion 400. In any of these cases, the above-described effects of the present embodiment are exhibited accordingly.

以上説明したように、実施例に係る波長可変光フィルタによれば、荷重面の一部を突出させることにより、荷重印加時の不要な圧力分布を低減することができる。従って、基板のたわみや傾きに起因する品質の低下を好適に防止できる。   As described above, according to the wavelength tunable optical filter according to the embodiment, an unnecessary pressure distribution at the time of applying a load can be reduced by projecting a part of the load surface. Accordingly, it is possible to suitably prevent the deterioration of quality due to the deflection or inclination of the substrate.

本発明は、上述した実施形態に限られるものではなく、特許請求の範囲及び明細書全体から読み取れる発明の要旨或いは思想に反しない範囲で適宜変更可能であり、そのような変更を伴う波長可変光フィルタ及び波長可変光フィルタの製造方法もまた本発明の技術的範囲に含まれるものである。   The present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the spirit or concept of the invention that can be read from the claims and the entire specification. The filter and the method of manufacturing the wavelength tunable optical filter are also included in the technical scope of the present invention.

１０ 波長可変光フィルタ
１００ 第１基板
１１０ 可動部
１２０ メンブレン部
１３０ 第１反射膜
１４０ 第１駆動電極
１５０ 第１基板の突出部
２００ 第２基板
２１０ 第２反射膜
２２０ 第２駆動電極
２３０ 第２基板の突出部
３００ 第３の基板
４００ 接合部
５００ 接合機
６００ 異物
Ｇ ギャップ DESCRIPTION OF SYMBOLS 10 Wavelength variable optical filter 100 1st board | substrate 110 Movable part 120 Membrane part 130 1st reflection film 140 1st drive electrode 150 Projection part of 1st board | substrate 200 2nd board | substrate 210 2nd reflection film 220 2nd drive electrode 230 2nd board | substrate Projection part 300 Third substrate 400 Joining part 500 Joiner 600 Foreign matter G Gap

Claims (11)

第１基板と、
前記第１基板に対向する第２基板と、
前記第１基板に設けられた第１反射膜と、
前記第２基板に設けられ、前記第１反射膜と反射膜間ギャップを介して対向する第２反射膜と、
前記第１基板及び前記第２基板を接合する接合部と
を備え、
前記第１基板は、前記第１反射膜が設けられる面とは反対側の荷重面において、前記接合部と重なる部分の全部又は一部が、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成されている
ことを特徴とする波長可変光フィルタ。 A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A bonding portion for bonding the first substrate and the second substrate;
In the first substrate, in the load surface opposite to the surface on which the first reflective film is provided, all or a part of the portion overlapping with the joint portion intersects the substrate surface rather than other portions in the load surface. A tunable optical filter, characterized by being formed as a protruding portion protruding in the direction. 前記第２基板は、前記第２反射膜が設けられる面とは反対側の荷重面において、前記接合部と重なる部分の全部又は一部が、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成されていることを特徴とする請求項１に記載の波長可変光フィルタ。   In the second substrate, on the load surface opposite to the surface on which the second reflective film is provided, all or a part of the portion overlapping with the joint portion intersects the substrate surface rather than other portions on the load surface. The tunable optical filter according to claim 1, wherein the tunable optical filter is formed as a protruding portion protruding in a direction. 前記第１基板の突出部及び前記第２基板の突出部は、基板面に交わる方向で平面的に見て、互いに同一の形状であることを特徴とする請求項２に記載の波長可変光フィルタ。   3. The wavelength tunable optical filter according to claim 2, wherein the protruding portion of the first substrate and the protruding portion of the second substrate have the same shape as viewed in plan in a direction intersecting the substrate surface. . 前記突出部は、基板面に交わる方向で平面的に見て、円形又は円環状であることを特徴とする請求項１から３のいずれか一項に記載の波長可変光フィルタ。   4. The wavelength tunable optical filter according to claim 1, wherein the projecting portion is circular or annular when viewed in plan in a direction intersecting the substrate surface. 5. 前記第１基板及び前記第２基板の少なくとも一方は、前記第１反射膜又は前記第２反射膜を可動とする可動部を有しており、
前記可動部は、前記突出部よりも、基板面に交わる方向に低くなるように形成されている
ことを特徴とする請求項１から４のいずれか一項に記載の波長可変光フィルタ。 At least one of the first substrate and the second substrate has a movable part that makes the first reflective film or the second reflective film movable,
The wavelength tunable optical filter according to any one of claims 1 to 4, wherein the movable portion is formed so as to be lower than the projecting portion in a direction intersecting the substrate surface. 前記第１基板及び前記第２基板は、基板面に交わる方向で平面的に見て互いに同一の形状であり、所定角度回転された状態で接合されていることを特徴とする請求項１から５のいずれか一項に記載の波長可変光フィルタ。   The first substrate and the second substrate have the same shape as viewed in plan in a direction intersecting with the substrate surface, and are joined in a state of being rotated by a predetermined angle. The wavelength tunable optical filter according to any one of the above. 前記第１基板及び前記第２基板は、基板面に交わる方向で平面的に見て互いに異なる形状であることを特徴とする請求項１から５のいずれか一項に記載の波長可変光フィルタ。   6. The wavelength tunable optical filter according to claim 1, wherein the first substrate and the second substrate have shapes different from each other when viewed in plan in a direction intersecting the substrate surface. 前記突出部の位置は、前記第１基板及び前記第２基板間の内部構造に基づいて決定されていることを特徴とする請求項１から７のいずれか一項に記載の波長可変光フィルタ。   The wavelength tunable optical filter according to claim 1, wherein the position of the protrusion is determined based on an internal structure between the first substrate and the second substrate. 第１基板に第１反射膜を形成する第１反射膜形成工程と、
第２基板に第２反射膜を形成する第２反射膜形成工程と、
前記第１基板の前記第１反射膜が設けられる面とは反対側の荷重面において、前記第２基板との接合部と重なる部分の全部又は一部を、前記荷重面における他の部分よりも基板面に交わる方向に突出した突出部として形成する突出部形成工程と、
前記第１基板及び前記第２基板を、前記第１反射膜と前記第２反射膜とが反射膜間ギャップを介して対向するように接合する接合工程と
を備える波長可変光フィルタの製造方法。 A first reflective film forming step of forming a first reflective film on the first substrate;
A second reflective film forming step of forming a second reflective film on the second substrate;
In the load surface of the first substrate opposite to the surface on which the first reflective film is provided, all or part of the portion that overlaps with the joint portion with the second substrate is more than the other portions of the load surface. A protrusion forming step for forming a protrusion protruding in a direction intersecting the substrate surface;
A method for manufacturing a wavelength tunable optical filter, comprising: joining the first substrate and the second substrate so that the first reflective film and the second reflective film face each other via a gap between the reflective films. 前記突出部形成工程では、前記第１基板がエッチングされることにより前記突出部が形成されることを特徴とする請求項９に記載の波長可変光フィルタの製造方法。   The method for manufacturing a wavelength tunable optical filter according to claim 9, wherein, in the protruding portion forming step, the protruding portion is formed by etching the first substrate. 前記突出部形成工程では、前記第１基板に感光性樹脂材料を一体成型することで前記突出部が形成されることを特徴とする請求項９に記載の波長可変光フィルタの製造方法。   10. The method of manufacturing a wavelength tunable optical filter according to claim 9, wherein in the projecting portion forming step, the projecting portion is formed by integrally molding a photosensitive resin material on the first substrate.
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