JP2015516500A - 製造機構及び製造方法 - Google Patents
製造機構及び製造方法 Download PDFInfo
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- JP2015516500A JP2015516500A JP2014556502A JP2014556502A JP2015516500A JP 2015516500 A JP2015516500 A JP 2015516500A JP 2014556502 A JP2014556502 A JP 2014556502A JP 2014556502 A JP2014556502 A JP 2014556502A JP 2015516500 A JP2015516500 A JP 2015516500A
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- manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0207—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/36—Successively applying liquids or other fluent materials, e.g. without intermediate treatment
- B05D1/38—Successively applying liquids or other fluent materials, e.g. without intermediate treatment with intermediate treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Paper (AREA)
Abstract
Description
−蒸着ゾーンにおいて、第1の蒸着工程によって箔上に第1の層を蒸着しS1、
−前記第1の層を有する箔を、前記蒸着ゾーンから離れる第1の方向の第1の通路に沿って蒸着ゾーンの外側に案内しS2、前記蒸着ゾーンに向かう第2の通路に沿って後戻りさせて、一方で第1の及び/又は第2の通路に沿って前記第1の層を処理しS3、
−前記蒸着ゾーンに戻った後、第2の蒸着工程によって箔上に第2の層を蒸着するS4
工程を含む。
Claims (15)
- 箔(FO)上に製品を製造するための製造機構であって、製造機構が、蒸着ゾーン(10)を含み、第1の蒸着機構(21)が、箔上に材料の層を蒸着するために配置され、製造機構が、蒸着された層を処理するための少なくとも1つの処理機構(31)をさらに含み、前記処理機構が、前記蒸着ゾーンの外に配置され、前記蒸着ゾーンから離れて回動機構(41)に向かう第1の方向に第1の通路(31a)と、前記回動機構から前記蒸着ゾーンに向かって戻る第2の通路(31b)とを有する処理経路を含み、製造機構が、蒸着ゾーン内部の箔を方向転換するためのリダイレクティング機構(51a、51b)をさらに含み、蒸着ゾーン(10)が、出口(11a)及び入口(11b)を有するクリーンルームであり、前記第1の通路(31a)が、前記出口(11a)から離れる第1の方向に導かれ、前記入口(11b)に向かって戻る、製造機構であって、
少なくとも第2の蒸着機構(22)が、蒸着ゾーンに配置され、箔が、処理機構を介して、前記第1及び前記少なくとも第2の蒸着機構に沿って案内されることを特徴とする、製造機構。 - 第1及び第2のリダイレクティング機構(51a、51b)が、少なくとも第2の蒸着機構(22)の入力部に向かって箔を方向転換する、請求項1記載の製造機構。
- 蒸着ゾーンが、第1及び少なくとも第2の蒸着機構(21、22)が配置された第1のサブゾーン(10a)と、少なくとも第1、及び第2のリダイレクション機構51a、51bが配置され、第2のサブゾーンが第1のサブゾーンから分断された第2のサブゾーン(10b)とを含む、請求項1記載の製造機構。
- 並んで配置された少なくとも3つの蒸着機構(21、22、23、24)を含む、請求項1記載の製造装置。
- 処理機構(31)の第1及び第2の通路(31a、31b)が、最大で20倍、好ましくは最大で箔(FO)の幅の10倍の距離(D)で、互いに対して平行に配置される、請求項1記載の製造装置。
- 前記回動機構(41)が、各々が第1の方向(−x)に対して斜めである方向を有する、箔用の第1及び第2のガイダンスバー(411、412)を含み、第1及び第2のガイダンスバーが、互いに対して横に配置される、請求項1記載の製造機構。
- 前記回動機構(41)及び前記処理機構(31)が、共通のハウジング(35)を共有する、請求項1記載の製造機構。
- 回動機構(41)に、及び/又はリダイレクション機構(52)に組み込まれたアライメント機構(413;523)を含む、請求項1記載の製造機構。
- 少なくとも1つの処理機構(31)の経路が、ハウジング(35)によって囲まれて、処理室(60)内に配置され、処理室が、クリーンルーム(10)のものよりも少なくとも10倍高いクリーンルームクラスを有する、請求項1記載の製造機構。
- 第1及び/又は第2の蒸着機構(21、22)が、印刷機構及びコーティング機構から選択される、請求項1記載の製造機構。
- 少なくとも1つの処理機構(31)が、乾燥機構、焼結機構、アニーリング機構、硬化機構及び溶融機構、アブレーション機構から選択される、請求項1記載の製造機構。
- 第1及び少なくとも第2の蒸着機構(21、22)の1つ又はそれ以上が、箔(FO)上に層を蒸着するための蒸着ユニット(213)に加えて、アンワインドユニット(211)、第1の洗浄及び/又はアライメントユニット(212)、第1のアライメントユニット(212)、後硬化(214)、検査ユニット、第2の洗浄及び/又はアライメントユニット(215)及び巻きユニット(216)の1つ又はそれ以上を含む、請求項1記載の製造機構。
- 前記処理経路が処理室(60)内に配置され、クリーンルーム(10)の面積が、クリーンルーム(10)及び処理室(60)によって占有される総面積の最大で1/3である、請求項1記載の製造機構。
- 前記回動機構が、空気浮上式軸受を含む、請求項1記載の製造機構。
- クリーンルームである蒸着ゾーンにおいて、第1の蒸着工程によって箔上に第1の層を蒸着する(S1)工程と、
−前記蒸着ゾーンから離れる第1の方向の第1の通路に沿って、前記第1の層を有する箔を蒸着ゾーンの外に案内し(S2)、前記蒸着ゾーンに向かって戻る第2の通路に沿って回動させ、同時に第1及び/又は第2の通路に沿って前記第1の層を処理する(S3)工程と、
を有する、箔上に製品を製造するための方法であって、
−蒸着ゾーンに戻った後、第2の蒸着工程によって、箔上に第2の層を蒸着する(S4)ことを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12154222.9A EP2626144A1 (en) | 2012-02-07 | 2012-02-07 | Roll to roll manufacturing system having a clean room deposition zone and a separate processing zone |
EP12154222.9 | 2012-02-07 | ||
PCT/NL2013/050063 WO2013119110A1 (en) | 2012-02-07 | 2013-02-06 | Manufacturing facility and method of manufacturing |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017252985A Division JP2018076599A (ja) | 2012-02-07 | 2017-12-28 | 製造機構及び製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015516500A true JP2015516500A (ja) | 2015-06-11 |
JP2015516500A5 JP2015516500A5 (ja) | 2016-03-03 |
JP6373193B2 JP6373193B2 (ja) | 2018-08-15 |
Family
ID=47722529
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2014556502A Active JP6373193B2 (ja) | 2012-02-07 | 2013-02-06 | 製造機構及び製造方法 |
JP2017252985A Pending JP2018076599A (ja) | 2012-02-07 | 2017-12-28 | 製造機構及び製造方法 |
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JP2017252985A Pending JP2018076599A (ja) | 2012-02-07 | 2017-12-28 | 製造機構及び製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9610602B2 (ja) |
EP (2) | EP2626144A1 (ja) |
JP (2) | JP6373193B2 (ja) |
KR (1) | KR102152354B1 (ja) |
CN (1) | CN104203433B (ja) |
WO (1) | WO2013119110A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS57107267A (en) * | 1980-12-25 | 1982-07-03 | Daido Steel Co Ltd | Continuous drying and baking device |
JPH0237775U (ja) * | 1988-09-06 | 1990-03-13 | ||
JP2000093870A (ja) * | 1998-09-25 | 2000-04-04 | Konica Corp | 塗布乾燥装置 |
JP2002001196A (ja) * | 2000-06-21 | 2002-01-08 | Fuji Photo Film Co Ltd | ウェブ塗布方法及び装置 |
JP2005212980A (ja) * | 2004-01-30 | 2005-08-11 | Nankai:Kk | 帯状シートの位置ずれ修正装置 |
JP2008083244A (ja) * | 2006-09-26 | 2008-04-10 | Fujifilm Corp | 長尺状搬送物の加工方法及び装置 |
JP2010046647A (ja) * | 2008-08-25 | 2010-03-04 | Fujifilm Corp | 塗布装置及び塗布方法 |
JP2010182621A (ja) * | 2009-02-09 | 2010-08-19 | Toyota Motor Corp | 電極製造装置及び電極の製造方法 |
JP2010188229A (ja) * | 2009-02-16 | 2010-09-02 | Fujifilm Corp | 塗布装置及び塗布方法 |
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JPS5754269A (en) * | 1980-09-17 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Apparatus for forming film in vacuum |
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US20040149959A1 (en) * | 2003-01-31 | 2004-08-05 | Mikhael Michael G. | Conductive flakes manufactured by combined sputtering and vapor deposition |
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DE502004009821D1 (de) * | 2004-04-13 | 2009-09-10 | Applied Materials Gmbh & Co Kg | Führungsanordnung mit mindestens einer Führungswalze für die Führung von Bändern in Bandbehandlungsanlagen |
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JP5241383B2 (ja) * | 2008-08-27 | 2013-07-17 | 株式会社神戸製鋼所 | 連続成膜装置 |
EP2292339A1 (en) | 2009-09-07 | 2011-03-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Coating method and coating apparatus |
-
2012
- 2012-02-07 EP EP12154222.9A patent/EP2626144A1/en not_active Withdrawn
-
2013
- 2013-02-06 KR KR1020147023121A patent/KR102152354B1/ko active IP Right Grant
- 2013-02-06 WO PCT/NL2013/050063 patent/WO2013119110A1/en active Application Filing
- 2013-02-06 JP JP2014556502A patent/JP6373193B2/ja active Active
- 2013-02-06 CN CN201380014696.7A patent/CN104203433B/zh active Active
- 2013-02-06 EP EP13704833.6A patent/EP2812129B1/en active Active
- 2013-02-06 US US14/376,955 patent/US9610602B2/en active Active
-
2017
- 2017-12-28 JP JP2017252985A patent/JP2018076599A/ja active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57107267A (en) * | 1980-12-25 | 1982-07-03 | Daido Steel Co Ltd | Continuous drying and baking device |
JPH0237775U (ja) * | 1988-09-06 | 1990-03-13 | ||
JP2000093870A (ja) * | 1998-09-25 | 2000-04-04 | Konica Corp | 塗布乾燥装置 |
JP2002001196A (ja) * | 2000-06-21 | 2002-01-08 | Fuji Photo Film Co Ltd | ウェブ塗布方法及び装置 |
JP2005212980A (ja) * | 2004-01-30 | 2005-08-11 | Nankai:Kk | 帯状シートの位置ずれ修正装置 |
JP2008083244A (ja) * | 2006-09-26 | 2008-04-10 | Fujifilm Corp | 長尺状搬送物の加工方法及び装置 |
JP2010046647A (ja) * | 2008-08-25 | 2010-03-04 | Fujifilm Corp | 塗布装置及び塗布方法 |
JP2010182621A (ja) * | 2009-02-09 | 2010-08-19 | Toyota Motor Corp | 電極製造装置及び電極の製造方法 |
JP2010188229A (ja) * | 2009-02-16 | 2010-09-02 | Fujifilm Corp | 塗布装置及び塗布方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2013119110A1 (en) | 2013-08-15 |
US9610602B2 (en) | 2017-04-04 |
CN104203433A (zh) | 2014-12-10 |
EP2626144A1 (en) | 2013-08-14 |
EP2812129A1 (en) | 2014-12-17 |
US20150037506A1 (en) | 2015-02-05 |
JP2018076599A (ja) | 2018-05-17 |
EP2812129B1 (en) | 2016-04-13 |
KR102152354B1 (ko) | 2020-09-07 |
KR20140133525A (ko) | 2014-11-19 |
CN104203433B (zh) | 2016-06-29 |
JP6373193B2 (ja) | 2018-08-15 |
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