JP2015230936A5 - - Google Patents
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- JP2015230936A5 JP2015230936A5 JP2014115517A JP2014115517A JP2015230936A5 JP 2015230936 A5 JP2015230936 A5 JP 2015230936A5 JP 2014115517 A JP2014115517 A JP 2014115517A JP 2014115517 A JP2014115517 A JP 2014115517A JP 2015230936 A5 JP2015230936 A5 JP 2015230936A5
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- JP
- Japan
- Prior art keywords
- substrate
- transport
- upper roller
- width direction
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 41
- 239000007788 liquid Substances 0.000 claims description 3
Description
本発明の基板搬送装置は、
基板を所定方向に搬送する搬送装置であって、
軸方向の両端部が回転可能に支持され前記基板の搬送方向に対して軸線を交差させて所定間隔で平行に配置された複数の搬送軸と、
前記搬送軸に設けられ前記基板の幅方向両端部の下面を支持する端部支持ローラと、
前記搬送軸に設けられ前記基板の幅方向両端部を除く部分の下面を支持する複数の搬送ローラと、
前記搬送軸の少なくとも一端部と他端部の上方に軸線を前記搬送軸と平行に対向させて回転可能に支持された上載せローラ軸と、
前記上載せローラ軸の前記一対の端部支持ローラと対向する部分に設けられ、前記端部支持ローラによって幅方向の端部下面が支持された前記基板の幅方向の端部上面を押圧する一対の上載せローラと、を有し、
前記上載せローラには切り欠き部が形成され、
前記切り欠き部は、前記上載せローラの前記基板との当接部が撓み得る形状であることを特徴とする。
The substrate transfer apparatus of the present invention is
A transport device for transporting a substrate in a predetermined direction,
A plurality of conveying shaft arranged on a flat row at predetermined intervals by intersecting the axis relative to both end portions in the axial direction is rotatably supported transport direction of the substrate,
An end support roller that is provided on the transport shaft and supports lower surfaces of both end portions in the width direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting lower surfaces of portions excluding both ends in the width direction of the substrate;
An upper roller shaft supported rotatably at least at one end and the other end of the transport shaft with an axis line facing the transport shaft in parallel.
A pair of the upper roller shafts, which are provided in a portion facing the pair of end support rollers, and press the upper end surface in the width direction of the substrate with the lower end surface in the width direction supported by the end support roller. An upper roller, and
The upper roller is formed with a notch,
The cutout portion has a shape in which a contact portion of the upper roller with the substrate can be bent.
本発明の基板処理装置は、
基板を所定方向に搬送装置によって搬送しながら処理する処理装置であって、
前記基板を搬入する搬入口と前記基板を搬出する搬出口とが形成されたチャンバと、
前記搬送装置によって搬送される基板に対して処理液を供給するノズルとを有し、
前記搬送装置は、
軸方向の両端部が回転可能に支持され前記基板の搬送方向に対して軸線を交差させて所定間隔で平行に配置された複数の搬送軸と、
前記搬送軸に設けられ前記基板の幅方向両端部の下面を支持する端部支持ローラと、
前記搬送軸に設けられ前記基板の幅方向両端部を除く部分の下面を支持する複数の搬送ローラと、
前記搬送軸の少なくとも一端部と他端部の上方に軸線を前記搬送軸と平行に対向させて回転可能に支持された上載せローラ軸と、
前記上載せローラ軸の前記一対の端部支持ローラと対向する部分に設けられ、前記端部支持ローラによって幅方向の端部下面が支持された前記基板の幅方向の端部上面を押圧する一対の上載せローラと、を有し、
前記上載せローラには切り欠き部が形成され、
前記切り欠き部は、前記上載せローラの前記基板との当接部が撓み得る形状であることを特徴とする。
The substrate processing apparatus of the present invention comprises:
A processing apparatus for processing a substrate while being transferred by a transfer device in a predetermined direction,
A chamber in which a carry-in port for carrying in the substrate and a carry-out port for carrying out the substrate are formed;
A nozzle for supplying a processing liquid to a substrate transported by the transport device;
The transfer device
A plurality of conveying shaft arranged on a flat row at predetermined intervals by intersecting the axis relative to both end portions in the axial direction is rotatably supported transport direction of the substrate,
An end support roller that is provided on the transport shaft and supports lower surfaces of both end portions in the width direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting lower surfaces of portions excluding both ends in the width direction of the substrate;
An upper roller shaft supported rotatably at least at one end and the other end of the transport shaft with an axis line facing the transport shaft in parallel.
A pair of the upper roller shafts, which are provided in a portion facing the pair of end support rollers, and press the upper end surface in the width direction of the substrate with the lower end surface in the width direction supported by the end support roller. An upper roller, and
The upper roller is formed with a notch,
The cutout portion has a shape in which a contact portion of the upper roller with the substrate can be bent.
Claims (5)
軸方向の両端部が回転可能に支持され前記基板の搬送方向に対して軸線を交差させて所定間隔で平行に配置された複数の搬送軸と、
前記搬送軸に設けられ前記基板の幅方向両端部の下面を支持する端部支持ローラと、
前記搬送軸に設けられ前記基板の幅方向両端部を除く部分の下面を支持する複数の搬送ローラと、
前記搬送軸の少なくとも一端部と他端部の上方に軸線を前記搬送軸と平行に対向させて回転可能に支持された上載せローラ軸と、
前記上載せローラ軸の前記一対の端部支持ローラと対向する部分に設けられ、前記端部支持ローラによって幅方向の端部下面が支持された前記基板の幅方向の端部上面を押圧する一対の上載せローラと、を有し、
前記上載せローラには切り欠き部が形成され、
前記切り欠き部は、前記上載せローラの前記基板との当接部が撓み得る形状であることを特徴とする基板搬送装置。 A transport device for transporting a substrate in a predetermined direction,
A plurality of conveying shaft arranged on a flat row at predetermined intervals by intersecting the axis relative to both end portions in the axial direction is rotatably supported transport direction of the substrate,
An end support roller that is provided on the transport shaft and supports lower surfaces of both end portions in the width direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting lower surfaces of portions excluding both ends in the width direction of the substrate;
An upper roller shaft supported rotatably at least at one end and the other end of the transport shaft with an axis line facing the transport shaft in parallel.
A pair of the upper roller shafts, which are provided in a portion facing the pair of end support rollers, and press the upper end surface in the width direction of the substrate with the lower end surface in the width direction supported by the end support roller. An upper roller, and
The upper roller is formed with a notch,
The substrate transport apparatus according to claim 1, wherein the notch has a shape in which a contact portion of the upper roller with the substrate can be bent.
前記基板を搬入する搬入口と前記基板を搬出する搬出口とが形成されたチャンバと、
前記搬送装置によって搬送される基板に対して処理液を供給するノズルとを有し、
前記搬送装置は、
軸方向の両端部が回転可能に支持され前記基板の搬送方向に対して軸線を交差させて所定間隔で平行に配置された複数の搬送軸と、
前記搬送軸に設けられ前記基板の幅方向両端部の下面を支持する端部支持ローラと、
前記搬送軸に設けられ前記基板の幅方向両端部を除く部分の下面を支持する複数の搬送ローラと、
前記搬送軸の少なくとも一端部と他端部の上方に軸線を前記搬送軸と平行に対向させて回転可能に支持された上載せローラ軸と、
前記上載せローラ軸の前記一対の端部支持ローラと対向する部分に設けられ、前記端部支持ローラによって幅方向の端部下面が支持された前記基板の幅方向の端部上面を押圧する一対の上載せローラと、を有し、
前記上載せローラには切り欠き部が形成され、
前記切り欠き部は、前記上載せローラの前記基板との当接部が撓み得る形状であることを特徴とする基板処理装置。 A processing apparatus for processing a substrate while being transferred by a transfer device in a predetermined direction,
A chamber in which a carry-in port for carrying in the substrate and a carry-out port for carrying out the substrate are formed;
A nozzle for supplying a processing liquid to a substrate transported by the transport device;
The transfer device
A plurality of conveying shaft arranged on a flat row at predetermined intervals by intersecting the axis relative to both end portions in the axial direction is rotatably supported transport direction of the substrate,
An end support roller that is provided on the transport shaft and supports lower surfaces of both end portions in the width direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting lower surfaces of portions excluding both ends in the width direction of the substrate;
An upper roller shaft supported rotatably at least at one end and the other end of the transport shaft with an axis line facing the transport shaft in parallel.
A pair of the upper roller shafts, which are provided in a portion facing the pair of end support rollers, and press the upper end surface in the width direction of the substrate with the lower end surface in the width direction supported by the end support roller. An upper roller, and
The upper roller is formed with a notch,
The substrate processing apparatus, wherein the notch has a shape in which a contact portion of the upper roller with the substrate can be bent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014115517A JP6320849B2 (en) | 2014-06-04 | 2014-06-04 | Substrate transfer apparatus and substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014115517A JP6320849B2 (en) | 2014-06-04 | 2014-06-04 | Substrate transfer apparatus and substrate processing apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015230936A JP2015230936A (en) | 2015-12-21 |
| JP2015230936A5 true JP2015230936A5 (en) | 2017-03-16 |
| JP6320849B2 JP6320849B2 (en) | 2018-05-09 |
Family
ID=54887592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014115517A Active JP6320849B2 (en) | 2014-06-04 | 2014-06-04 | Substrate transfer apparatus and substrate processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6320849B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6531039B2 (en) * | 2015-12-28 | 2019-06-12 | 信越ポリマー株式会社 | Elastic roller and image forming apparatus |
| JP7096746B2 (en) * | 2018-09-21 | 2022-07-06 | 株式会社荏原製作所 | A board processing device including a board transfer device and a board transfer device. |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4881575B2 (en) * | 2005-04-28 | 2012-02-22 | 芝浦メカトロニクス株式会社 | Substrate transfer device |
| JP5502443B2 (en) * | 2009-12-05 | 2014-05-28 | 芝浦メカトロニクス株式会社 | Substrate transfer device |
| JP2013195667A (en) * | 2012-03-19 | 2013-09-30 | Bridgestone Corp | Oa roller |
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2014
- 2014-06-04 JP JP2014115517A patent/JP6320849B2/en active Active
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