JP2015160260A - 研削装置及び研削方法 - Google Patents
研削装置及び研削方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000005259 measurement Methods 0.000 claims description 72
- 239000004065 semiconductor Substances 0.000 claims description 57
- 239000011347 resin Substances 0.000 claims description 45
- 229920005989 resin Polymers 0.000 claims description 45
- 238000012951 Remeasurement Methods 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 5
- 230000017525 heat dissipation Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49517—Additional leads
- H01L23/49524—Additional leads the additional leads being a tape carrier or flat leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
- H01L23/49562—Geometry of the lead-frame for devices being provided for in H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/41—Structure, shape, material or disposition of the strap connectors after the connecting process of a plurality of strap connectors
- H01L2224/4101—Structure
- H01L2224/4103—Connectors having different sizes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/848—Bonding techniques
- H01L2224/84801—Soldering or alloying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
【解決手段】研削装置は、チャックテーブルと、前記チャックテーブルに固定された複数のワークの相互に分離された複数の研削面に対して、回転しながら押し当てられて前記ワークを研削するグラインディングホイールと、前記研削面の高さを測定する測定機と、前記ワークの研削前に測定された複数の前記研削面の高さと、前記ワークの研削後に測定された複数の前記研削面の高さとから、前記ワークの研削量を制御する制御装置と、を備えている。
【選択図】図4
Description
図2(b)は、チャックテーブル102と、グラインディングホイール104との配置関係を示す模式側面図である。
図6(a)は、半導体装置1の模式上面図であり、図6(b)は、樹脂80を取り除いた模式上面図である。図6(b)において樹脂80は側面の外形線のみを図示している。
Claims (8)
- チャックテーブルと、
前記チャックテーブルに固定された複数のワークの相互に分離された複数の研削面に対して、回転しながら押し当てられて前記ワークを研削するグラインディングホイールと、
前記研削面の高さを測定する測定機と、
前記ワークの研削前に測定された複数の前記研削面の高さと、前記ワークの研削後に測定された複数の前記研削面の高さとから、前記ワークの研削量を制御する制御装置と、
を備えた研削装置。 - 前記研削前と前記研削後で、同じ複数箇所の高さを測定する請求項1記載の研削装置。
- 前記制御装置は、前記研削前の複数箇所の高さの測定値の平均値と、前記研削後の複数箇所の高さの測定値の平均値とを比較する請求項1または2に記載の研削装置。
- 前記制御装置は、前記研削前の複数箇所の高さの測定値の最大値と、前記研削後の複数箇所の高さの測定値の最大値とを比較する請求項1または2に記載の研削装置。
- 前記制御装置は、前記研削前の複数箇所の高さの測定値の最小値と、前記研削後の複数箇所の高さの測定値の最小値とを比較する請求項1または2に記載の研削装置。
- 前記研削前の測定値が規格範囲外の場合、前記制御装置は測定位置を変えて再測定する請求項1〜5のいずれか1つに記載の研削装置。
- チャックテーブルに固定された複数のワークの相互に分離された複数の研削面に対して、回転したグラインディングホイールを押し当てて前記ワークを研削する研削方法であって、
前記ワークの研削前に複数の前記研削面の高さを測定し、前記ワークの研削後にも複数の前記研削面の高さを測定し、
前記ワークの研削前に測定された複数の前記研削面の高さと、前記ワークの研削後に測定された複数の前記研削面の高さとから、前記ワークの研削量を制御する研削方法。 - 前記ワークは、リードフレームと、前記リードフレーム上に設けられた半導体チップと、前記半導体チップ上に設けられた板状のコネクタと、前記半導体チップおよび前記コネクタを覆う樹脂と、を有し、
前記コネクタ上の前記樹脂を研削することで前記コネクタの上面を露出させる請求項7記載の研削方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014035227A JP2015160260A (ja) | 2014-02-26 | 2014-02-26 | 研削装置及び研削方法 |
US14/318,092 US20150239093A1 (en) | 2014-02-26 | 2014-06-27 | Grinding apparatus, and grinding method |
CN201410335957.1A CN104858780A (zh) | 2014-02-26 | 2014-07-15 | 磨削装置以及磨削方法 |
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JP2014035227A JP2015160260A (ja) | 2014-02-26 | 2014-02-26 | 研削装置及び研削方法 |
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JP2015160260A true JP2015160260A (ja) | 2015-09-07 |
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JP2014035227A Pending JP2015160260A (ja) | 2014-02-26 | 2014-02-26 | 研削装置及び研削方法 |
Country Status (3)
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US (1) | US20150239093A1 (ja) |
JP (1) | JP2015160260A (ja) |
CN (1) | CN104858780A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018114580A (ja) * | 2017-01-17 | 2018-07-26 | 株式会社ディスコ | ウエーハの加工方法及び切削装置 |
US11646250B2 (en) | 2020-03-06 | 2023-05-09 | Kabushiki Kaisha Toshiba | Semiconductor device |
JP7472368B2 (ja) | 2019-03-27 | 2024-04-22 | 株式会社東京精密 | 基板加工装置 |
JP7474144B2 (ja) | 2020-07-20 | 2024-04-24 | 株式会社ディスコ | 研削装置および研削方法 |
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JP5814111B2 (ja) * | 2011-12-28 | 2015-11-17 | Ntn株式会社 | 研削盤の測定異常機能付き加工径測定装置 |
CN108705421A (zh) * | 2018-08-21 | 2018-10-26 | 德清明宇电子科技有限公司 | 一种e型磁芯打磨装置 |
CN113710419B (zh) * | 2019-01-23 | 2023-09-29 | 深圳市阿列夫图科技有限公司 | 一种地面研磨方法、装置、机器人及计算机可读存储介质 |
JP7417362B2 (ja) * | 2019-04-05 | 2024-01-18 | 株式会社ディスコ | 研削装置 |
JP7250637B2 (ja) * | 2019-07-01 | 2023-04-03 | 株式会社ディスコ | 加工装置及びチャックテーブル |
JP7405563B2 (ja) * | 2019-11-01 | 2023-12-26 | 株式会社ディスコ | クリープフィード研削方法及び研削装置 |
JP7430448B2 (ja) * | 2020-02-04 | 2024-02-13 | 株式会社ディスコ | 研削装置及び研削方法 |
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JP2022168720A (ja) * | 2021-04-26 | 2022-11-08 | 株式会社ディスコ | 加工方法 |
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- 2014-02-26 JP JP2014035227A patent/JP2015160260A/ja active Pending
- 2014-06-27 US US14/318,092 patent/US20150239093A1/en not_active Abandoned
- 2014-07-15 CN CN201410335957.1A patent/CN104858780A/zh active Pending
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JP2010238868A (ja) * | 2009-03-31 | 2010-10-21 | Honda Motor Co Ltd | 半導体装置の製造装置及び製造方法 |
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JP2018114580A (ja) * | 2017-01-17 | 2018-07-26 | 株式会社ディスコ | ウエーハの加工方法及び切削装置 |
JP7472368B2 (ja) | 2019-03-27 | 2024-04-22 | 株式会社東京精密 | 基板加工装置 |
US11646250B2 (en) | 2020-03-06 | 2023-05-09 | Kabushiki Kaisha Toshiba | Semiconductor device |
JP7474144B2 (ja) | 2020-07-20 | 2024-04-24 | 株式会社ディスコ | 研削装置および研削方法 |
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CN104858780A (zh) | 2015-08-26 |
US20150239093A1 (en) | 2015-08-27 |
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