JP2015103927A - Tuning folk type piezoelectric vibration piece, and piezoelectric vibrator - Google Patents

Tuning folk type piezoelectric vibration piece, and piezoelectric vibrator Download PDF

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JP2015103927A
JP2015103927A JP2013242351A JP2013242351A JP2015103927A JP 2015103927 A JP2015103927 A JP 2015103927A JP 2013242351 A JP2013242351 A JP 2013242351A JP 2013242351 A JP2013242351 A JP 2013242351A JP 2015103927 A JP2015103927 A JP 2015103927A
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base
electrodes
electrode
extraction electrode
pair
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JP5825331B2 (en
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藤井　智
Satoshi Fujii
智 藤井
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Daishinku Corp
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Daishinku Corp
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Priority to PCT/JP2014/004781 priority patent/WO2015072056A1/en
Priority to PCT/JP2014/004784 priority patent/WO2015072057A1/en
Priority to EP14862071.9A priority patent/EP3070843B1/en
Priority to CN201480058178.XA priority patent/CN105706363B/en
Priority to US15/036,734 priority patent/US10211807B2/en
Priority to CN201480058543.7A priority patent/CN105684309B/en
Priority to US15/036,752 priority patent/US10224898B2/en
Priority to TW103138856A priority patent/TWI644459B/en
Priority to TW103138855A priority patent/TWI663757B/en
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Abstract

PROBLEM TO BE SOLVED: To prevent electrostatic breakdown of extraction electrodes on a base even when discharge occurs between the extraction electrodes.SOLUTION: The present piezoelectric vibration piece 2 has a base 5, and a pair of vibration arm parts 6 and 7 arranged in parallel projecting from one end surface of the base. On the base, base extraction electrodes 20c1 to 20c6 extracting excitation electrodes are formed. The base extraction electrodes 20c1 to 20c6 on the base 5 are thicker than the excitation electrodes 9a1, 9b1, 10b1, and 10b2 formed on both front and rear principal surfaces of the vibration arm parts.

Description

本発明は、基部の一端面に一対の振動腕部を備えた音叉型圧電振動片及びこの圧電振動片がパッケージ内に支持された圧電振動子に係り、より詳細には、前記圧電振動片において、前記一対の振動腕部それぞれの励振電極を基部上に引き出した引出電極が、当該基部上で静電破壊することを防止することに関する。   The present invention relates to a tuning fork-type piezoelectric vibrating piece having a pair of vibrating arms on one end surface of a base and a piezoelectric vibrator in which the piezoelectric vibrating piece is supported in a package. More specifically, in the piezoelectric vibrating piece, Further, the present invention relates to prevention of electrostatic breakdown on the base portion of the extraction electrode in which the excitation electrode of each of the pair of vibrating arms is pulled out on the base portion.

音叉型圧電振動片は、基部と、その一端面から突出して並設された一対の振動腕部とを備えたものである（例えば、特許文献１参照。）。   The tuning fork-type piezoelectric vibrating piece includes a base and a pair of vibrating arms that protrude from one end face of the tuning-fork type piezoelectric vibrating piece (see, for example, Patent Document 1).

かかる音叉型圧電振動片においては、振動腕部上の励振電極から基部上に引出された引出電極に電圧を印加することで、振動腕部を屈曲振動させるようになっている。   In such a tuning-fork type piezoelectric vibrating piece, a voltage is applied to an extraction electrode drawn on the base from the excitation electrode on the vibration arm, so that the vibration arm is bent and vibrated.

このような音叉型圧電振動片は、圧電振動デバイスのパッケージ内に搭載されて圧電振動子として組み込まれる。   Such a tuning-fork type piezoelectric vibrating piece is mounted in a package of a piezoelectric vibrating device and incorporated as a piezoelectric vibrator.

特開２００９−１５２９８９号公報JP 2009-152989 A

近年における圧電振動デバイスの一層の小型化に伴い、それに搭載される圧電振動片の基部の面積は益々狭小化してきている。   With the further miniaturization of the piezoelectric vibration device in recent years, the area of the base portion of the piezoelectric vibration piece mounted thereon has been increasingly narrowed.

基部の面積が狭小化すると、基部上に形成される引出電極は、その電極幅を細く、また、それらの対向間距離を短くして基部上に形成する必要がある。   When the area of the base is reduced, the extraction electrode formed on the base needs to be formed on the base with a narrower electrode width and a shorter distance between the electrodes.

しかしながら、基部上で引出電極の電極幅を細く、対向間距離を短くすると、これら電極対向間の角部等で電荷集中による放電が起き易く、その放電により引出電極が静電破壊されてしまう虞があるという課題がある。   However, if the electrode width of the extraction electrode is narrowed on the base and the distance between the electrodes is shortened, discharge due to charge concentration is likely to occur at the corners between the electrodes and the extraction electrode may be electrostatically destroyed by the discharge. There is a problem that there is.

本発明は、上記に鑑みて為されたものであり、引出電極の対向間に発生する放電により、引出電極が静電破壊することから防止可能として、所要の振動特性を維持できる音叉型圧電振動片を提供することを目的とする。   The present invention has been made in view of the above, and is a tuning fork type piezoelectric vibration capable of preventing the extraction electrode from being electrostatically damaged by the discharge generated between the extraction electrodes and maintaining the required vibration characteristics. The purpose is to provide a piece.

上記目的を達成するため、
本発明に係る音叉型圧電振動片は、基部と、一対の振動腕部とを有し、前記一対の振動腕部は、前記基部の一端面から突出した状態に並設されており、前記一対の振動腕部の表裏両主面及び両側面のそれぞれには、複数の励振電極が形成され、前記基部上には、前記複数の励振電極の一部を共通接続する接続用基部引出電極と、前記複数の励振電極の一部を外部へ引き出す一対の外部用基部引出電極とから構成される基部引出電極が形成されている音叉型圧電振動片であって、前記基部引出電極が、前記振動腕部の前記表裏両主面に形成された前記励振電極よりも厚肉であることを特徴とする。 To achieve the above objective,
The tuning-fork type piezoelectric vibrating piece according to the present invention has a base and a pair of vibrating arms, and the pair of vibrating arms are arranged in parallel so as to protrude from one end surface of the base. A plurality of excitation electrodes are formed on each of the front and back main surfaces and both side surfaces of the vibrating arm portion, and a base extraction electrode for connection that commonly connects a part of the plurality of excitation electrodes on the base, and A tuning fork-type piezoelectric vibrating piece in which a base lead electrode composed of a pair of external base lead electrodes for pulling out a part of the plurality of excitation electrodes to the outside is formed, wherein the base lead electrode is the vibrating arm It is characterized in that it is thicker than the excitation electrodes formed on the front and back main surfaces of the part.

本発明によれば、基部上の前記基部引出電極の肉厚が、前記一対の振動腕部それぞれの表裏両主面の励振電極よりも厚肉であるので、前記基部引出電極の機械的強度が増大している。その結果、基部面積の狭小化により、前記基部引出電極の幅や対向間距離等を狭小にしても、前記基部引出電極が放電により静電破壊されにくくなり、圧電振動片の振動特性を長期にわたり安定に維持できるようになる。   According to the present invention, since the thickness of the base extraction electrode on the base is thicker than the excitation electrodes on both the front and back main surfaces of the pair of vibrating arms, the mechanical strength of the base extraction electrode is It is increasing. As a result, even if the width of the base extraction electrode or the distance between the opposing electrodes is reduced due to the narrowing of the base area, the base extraction electrode is less likely to be electrostatically damaged by discharge, and the vibration characteristics of the piezoelectric vibrating piece can be improved over a long period of time. It can be maintained stably.

好ましい実施態様は、前記振動腕部の先端側に、前記複数の励振電極の一部を共通接続する腕先引出電極が形成され、前記腕先引出電極は前記励振電極よりも厚肉に形成されており、前記基部引出電極は、前記腕先引出電極と少なくとも実質同一の肉厚を有する。   In a preferred embodiment, an arm tip extraction electrode that commonly connects a part of the plurality of excitation electrodes is formed on the distal end side of the vibrating arm portion, and the arm tip extraction electrode is formed thicker than the excitation electrode. The base extraction electrode has at least substantially the same thickness as the arm tip extraction electrode.

この実施態様では、通常、前記基部引出電極は、励振電極と同様、薄膜に形成されるが、前記腕先引出電極は、圧電振動片の周波数調整のために、その表層が金属鍍金されるので、当該腕先引出電極が金属鍍金される工程を利用して、前記基部引出電極の肉厚を前記励振電極よりも厚肉に形成できることとなり、前記基部引出電極の厚肉化コストを低減することができる。   In this embodiment, normally, the base extraction electrode is formed in a thin film like the excitation electrode, but the arm tip extraction electrode is metal-plated for adjusting the frequency of the piezoelectric vibrating piece. The thickness of the base extraction electrode can be made thicker than that of the excitation electrode by using a process in which the arm tip extraction electrode is plated with metal, thereby reducing the thickness of the base extraction electrode. Can do.

好ましい実施態様は、前記基部の他端面から突出した接合部を備え、前記接合部は、前記基部の他端面の前記一対の振動腕部の並設位置間の中央線上から突出した基端部と、前記基端部から前記並設方向一方側に延出した延出部とで、平面視Ｌ字状に形成されており、前記基端部の表面には、前記一対のうちの外部用基部引出電極の一方が引き出された外部用接合部第1引出電極が形成され、その外部用接合部第1引出電極の上部に第１金属バンプが設けられ、前記延出部の表面には、前記一対のうちの外部用基部引出電極の他方が引き出された外部用接合部第２引出電極が形成され、その外部用接合部第２引出電極の上部に第２金属バンプが設けられていると共に、前記第１金属バンプは、その平面視サイズが、前記第２金属バンプの平面視サイズより大きい。   A preferred embodiment includes a joint portion projecting from the other end surface of the base portion, and the joint portion projects from a center line between the juxtaposed positions of the pair of vibrating arm portions on the other end surface of the base portion; And an extended portion that extends from the base end portion to the one side in the juxtaposed direction, and is formed in an L shape in plan view, and the base end portion has an external base portion on the surface of the base end portion. An external junction first extraction electrode from which one of the extraction electrodes is extracted is formed, and a first metal bump is provided on an upper portion of the external junction first extraction electrode. An external junction second extraction electrode in which the other of the pair of external base extraction electrodes is extracted is formed, and a second metal bump is provided above the external junction second extraction electrode. The size of the first metal bump in plan view is the size of the second metal bump in plan view. Larger than size.

この実施態様では、前記両金属バンプにおいてパッケージ内に片持ち支持した状態で圧電振動片を搭載して圧電振動子とする場合、接合部が平面視Ｌ字状であっても、前記第１金属バンプの平面視サイズが前記第２金属バンプの平面視サイズよりも大きく、且つ、前記第１金属バンプは、前記基部の他端面の前記一対の振動腕部の並設位置間の中央線上から突出した前記基端部に設けられているので、基部上で基部引出電極の肉厚を励振電極よりも厚肉としても、圧電振動片全体の振動バランスが確保される。   In this embodiment, when the piezoelectric vibrating piece is mounted in a state where the both metal bumps are cantilevered in the package to form a piezoelectric vibrator, the first metal is used even if the joint is L-shaped in plan view. The size in plan view of the bump is larger than the size in plan view of the second metal bump, and the first metal bump protrudes from the center line between the juxtaposed positions of the pair of vibrating arm portions on the other end surface of the base portion. Therefore, even if the thickness of the base extraction electrode is thicker than that of the excitation electrode on the base, the vibration balance of the entire piezoelectric vibrating piece is ensured.

好ましい実施態様は、前記腕先引出電極が、その表層に鍍金金属を有しており、前記外部用基部引出電極の上部、または前記外部用接合部引出電極の上部に金属バンプが形成されており、前記金属バンプは、その表層に、前記鍍金金属と同じ鍍金金属が形成されている。   In a preferred embodiment, the arm tip lead electrode has a plated metal on a surface layer thereof, and a metal bump is formed on the upper part of the external base lead electrode or on the upper part of the external joint lead electrode. The metal bump has the same plating metal as the plating metal on its surface layer.

この実施態様では、前記両金属バンプの表層が前記腕先引出電極の表層の鍍金金属と同じであるので、前記腕先引出電極の表層に周波数調整錘用電極を鍍金で形成する場合、その形成の工程で、同時に、前記両金属バンプの表層を金属鍍金して、その肉厚を励振電極よりも厚肉にでき、前記両金属バンプの厚肉化コストを低減することができる。   In this embodiment, since the surface layer of the both metal bumps is the same as the plating metal of the surface layer of the arm tip extraction electrode, when the frequency adjusting weight electrode is formed on the surface layer of the arm tip extraction electrode, the formation thereof At the same time, the surface layers of the two metal bumps can be plated with metal to make the wall thickness thicker than the excitation electrode, and the thickness of the two metal bumps can be reduced.

好ましい実施態様は、前記基部が、前記一対の振動腕部の並設位置間の中央線に対して平面視両側部分が対称同形状であると共に、前記基部引出電極は、互いに電気的に分離された状態で前記基部の表裏面のほぼ全面に同等の肉厚で形成されている。   In a preferred embodiment, the base is symmetrically shaped on both sides in plan view with respect to a center line between the parallel positions of the pair of vibrating arms, and the base extraction electrodes are electrically separated from each other. In this state, it is formed with substantially the same thickness on almost the entire front and back surfaces of the base.

この実施態様では、前記基部引出電極を厚肉にしても、圧電振動片の振動バランスを良好に維持でき、動作特性を長期に安定して維持できる圧電振動片が得られる。   In this embodiment, even if the base extraction electrode is thick, a piezoelectric vibrating piece can be obtained in which the vibration balance of the piezoelectric vibrating piece can be maintained well and the operating characteristics can be stably maintained over a long period of time.

好ましい実施態様は、前記音叉型圧電振動片が、パッケージ内で支持された圧電振動子である。   In a preferred embodiment, the tuning fork type piezoelectric vibrating piece is a piezoelectric vibrator supported in a package.

本発明によれば、基部上の基部引出電極の肉厚が、励振電極よりも厚肉となっているので、その機械的強度が増し、これにより、基部上で基部引出電極間に前記放電が起きても、基部引出電極を静電破壊から防止することができる。   According to the present invention, since the thickness of the base extraction electrode on the base is thicker than that of the excitation electrode, its mechanical strength is increased, whereby the discharge is generated between the base extraction electrodes on the base. Even if it happens, the base extraction electrode can be prevented from electrostatic breakdown.

本発明の実施形態に係る音叉型圧電振動片の表面図。The surface view of the tuning fork type piezoelectric vibrating piece according to the embodiment of the present invention. 同音叉型圧電振動片の裏面図。The back view of the tuning fork type piezoelectric vibrating piece. 同音叉型圧電振動片の側面図。The side view of the tuning fork type piezoelectric vibrating piece.

以下、添付した図面を参照して、本発明の実施形態に係る音叉型圧電振動片を説明する。なお、実施形態では水晶Ｚ板(Ｘ面カット)である水晶ウエハを用いるが、本発明は、水晶ウエハに限定されず、水晶ウエハ以外のタンタル酸リチウムやニオブ酸リチウムなどの圧電材料からなる圧電ウエハを用いた場合にも適用できるものである。また、実施形態では、音叉型圧電振動片で説明するが、本発明は、音叉型以外の圧電振動片にも適用することができる。   Hereinafter, a tuning fork type piezoelectric vibrating piece according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the embodiment, a crystal wafer which is a crystal Z plate (X-plane cut) is used. However, the present invention is not limited to the crystal wafer, and a piezoelectric material made of a piezoelectric material such as lithium tantalate or lithium niobate other than the crystal wafer. The present invention can also be applied when a wafer is used. In the embodiment, a tuning fork type piezoelectric vibrating piece will be described. However, the present invention can also be applied to a piezoelectric vibrating piece other than a tuning fork type.

図１〜図３を参照して、同実施形態を説明する。図１は、音叉型水晶振動片の表面図、図２は同音叉型水晶振動片の裏面図、図３は、同音叉型水晶振動片の側面図、である。   The embodiment will be described with reference to FIGS. FIG. 1 is a front view of the tuning fork type crystal vibrating piece, FIG. 2 is a back view of the tuning fork type crystal vibrating piece, and FIG. 3 is a side view of the tuning fork type crystal vibrating piece.

これらの図において、符号２は、実施形態の音叉型水晶振動片(以下の説明では、単に、水晶振動片という)を示す。水晶振動片２は、基部５と、基部５の一端面から平行に並設された一対の第１、第２振動腕部６，７と、基部５の他端面に設けられた接合部８と、を有する。   In these drawings, reference numeral 2 denotes a tuning-fork type quartz vibrating piece (hereinafter simply referred to as a quartz vibrating piece in the following description). The quartz crystal resonator element 2 includes a base portion 5, a pair of first and second vibrating arm portions 6 and 7 arranged in parallel from one end surface of the base portion 5, and a joint portion 8 provided on the other end surface of the base portion 5. Have.

基部５は、第１、第２振動腕部６，７の並設方向中央線Ｌ０上に対して左右両側部分が、平面視対称の同形状とされ、且つ、第１、第２振動腕部６，７よりも前記並設方向に幅広に形成されている。なお、中央線Ｌ０は、第１、第２振動腕部６，７の並設間の中央を下方に前記突出方向に沿い当該突出方向とは反対側方向に延びる線を示す。   The base 5 has the same shape in which both left and right sides are symmetrical with respect to the center line L0 in the juxtaposition direction of the first and second vibrating arm portions 6 and 7, and the first and second vibrating arm portions. It is formed wider than 6 and 7 in the juxtaposed direction. The center line L0 indicates a line extending downward along the protruding direction in the center between the juxtaposed first and second vibrating arm portions 6 and 7 in the direction opposite to the protruding direction.

第１、第２振動腕部６，７は、基部５の一端面から突出して隙間部９を介して互いに平行になって並設されている。隙間部９は、基部５の一端面において、第１、第２振動腕部６，７の並設方向の中央位置上に設けられている。   The first and second vibrating arm portions 6 and 7 protrude from one end surface of the base portion 5 and are arranged in parallel with each other through the gap portion 9. The gap portion 9 is provided on the center position in the juxtaposed direction of the first and second vibrating arm portions 6 and 7 on one end face of the base portion 5.

第１、第２振動腕部６，７の先端部は、前記並設方向に幅広に成形されている。第１振動腕部６には、表裏面の励振電極９ａ１，９ａ２と両側面の励振電極９ｂ１，９ｂ２とが形成されている。第２振動腕部７には、表裏面の励振電極１０ａ１，１０ａ２と両側面の励振電極１０ｂ１，１０ｂ２とが形成されている。第１振動腕部６の表裏両主面の励振電極９ａ１，９ａ２同士、両側面の励振電極９ｂ１，９ｂ２同士は共通接続され、第２振動腕部７の表裏両主面の励振電極１０ａ１，１０ａ２同士、両側面の励振電極１０ｂ１，１０ｂ２同士は共通接続される。そして、第１振動腕部６の表裏両主面の励振電極９ａ１，９ａ２と、第２振動腕部７の両側面の励振電極１０ｂ１，１０ｂ２は、一対の電圧印加用の引出電極の一方に共通接続され、当該一方の引出電極を介して一方の極性の電圧が印加される。また、第１振動腕部６の両側面の励振電極９ｂ１，９ｂ２と、第２振動腕部７の表裏両主面の励振電極１０ａ１，１０ａ２は、引出電極の他方に共通接続され、当該他方の引出電極を介して他方の極性の電圧が印加される。   The tip portions of the first and second vibrating arm portions 6 and 7 are formed wide in the parallel direction. The first vibrating arm portion 6 is formed with excitation electrodes 9a1 and 9a2 on the front and back surfaces and excitation electrodes 9b1 and 9b2 on both side surfaces. The second vibrating arm portion 7 is formed with excitation electrodes 10a1 and 10a2 on the front and back surfaces and excitation electrodes 10b1 and 10b2 on both side surfaces. The excitation electrodes 9a1 and 9a2 on the front and back main surfaces of the first vibrating arm 6 and the excitation electrodes 9b1 and 9b2 on both sides are connected in common, and the excitation electrodes 10a1 and 10a2 on the front and back main surfaces of the second vibrating arm 7 are connected. The excitation electrodes 10b1 and 10b2 on both sides are connected in common. The excitation electrodes 9a1 and 9a2 on both front and back main surfaces of the first vibrating arm portion 6 and the excitation electrodes 10b1 and 10b2 on both side surfaces of the second vibrating arm portion 7 are common to one of a pair of voltage application lead electrodes. A voltage of one polarity is applied through the one extraction electrode. The excitation electrodes 9b1 and 9b2 on both sides of the first vibrating arm 6 and the excitation electrodes 10a1 and 10a2 on both front and back main surfaces of the second vibrating arm 7 are connected in common to the other of the extraction electrodes, A voltage of the other polarity is applied through the extraction electrode.

これら第１、第２振動腕部６，７の励振電極の一部は、基部５の表裏面上に基部引出電極２０ｃ１〜２０ｃ６で引き出される。   Some of the excitation electrodes of the first and second vibrating arm portions 6 and 7 are drawn out by the base lead electrodes 20 c 1 to 20 c 6 on the front and back surfaces of the base portion 5.

基部引出電極２０ｃ１〜２０ｃ６のうち、基部５表裏両主面側の基部引出電極２０ｃ１〜２０ｃ３，２０ｃ６は、前記複数の励振電極の一部を共通接続する接続用基部引出電極２０ｃ１〜２０ｃ３，２０ｃ６を構成し、基部５の裏面側の一対の引出電極２０ｃ４，２０ｃ５は、前記複数の励振電極の一部を外部に引出す外部用基部引出電極２０ｃ４，２０ｃ５を構成する。これら基部引出電極２０ｃ１〜２０ｃ６は、絶縁分離ライン１４ａ１，１４ａ２，１４ｂ１，１４ｂ２で互いに電気的に絶縁分離されている。   Of the base lead electrodes 20c1 to 20c6, the base lead electrodes 20c1 to 20c3 and 20c6 on the front and back main surfaces of the base 5 are connected to the base lead electrodes 20c1 to 20c3 and 20c6 for connecting a part of the plurality of excitation electrodes in common. The pair of extraction electrodes 20c4 and 20c5 on the back side of the base 5 constitutes external base extraction electrodes 20c4 and 20c5 for extracting a part of the plurality of excitation electrodes to the outside. These base lead electrodes 20c1 to 20c6 are electrically insulated and separated from each other by insulation separation lines 14a1, 14a2, 14b1, and 14b2.

接合部８は、基部５の他端面における第１、第２振動腕部６，７の並設方向の中央位置から下方に若干突出された基端部８ａと、基端部８ａから第１、第２振動腕部６，７の並設方向一方に延出された延出部８ｂとにより、基部５に対して平面視Ｌ字状に形成されている。   The joint portion 8 includes a base end portion 8a slightly projecting downward from a central position in the juxtaposed direction of the first and second vibrating arm portions 6 and 7 on the other end surface of the base portion 5, and a first end portion from the base end portion 8a, The second vibrating arm portions 6 and 7 are formed in an L shape in a plan view with respect to the base portion 5 by an extending portion 8 b extending in one side of the juxtaposed direction.

接合部８の基端部８ａの裏面上に外部用基部引出電極２０ｃ４が引出されて外部用接合部第１引出電極２０ｃ７が形成され、その外部用接合部第１引出電極２０ｃ７の上部に平面視楕円状の第１金属バンプ１１ａが、また、接合部８の延出部８ｂの裏面上に前記外部用基部引出電極２０ｃ５が引出されて外部用接合部第２引出電極２０ｃ８が形成され、さらに、その外部用接合部第２引出電極２０ｃ８の上部に平面視楕円状の第２金属バンプ１１ｂが、それぞれ、形成されている。なお、第１、第２金属バンプ１１ａ，１１ｂは、平面視楕円状に限定されず平面視円状でもよい。   An external base lead electrode 20c4 is drawn on the back surface of the base end portion 8a of the joint 8 to form an external joint first lead electrode 20c7, and a plan view above the external joint first lead electrode 20c7. The oval first metal bump 11a is formed on the back surface of the extended portion 8b of the joint portion 8, and the external base lead electrode 20c5 is drawn to form the external joint portion second lead electrode 20c8. The second metal bumps 11b having an elliptical shape in plan view are formed on the outer joint second extraction electrodes 20c8, respectively. The first and second metal bumps 11a and 11b are not limited to an elliptical shape in plan view, and may be circular in plan view.

第１、第２金属バンプ１１ａ，１１ｂは、水晶振動片２を図示省略の水晶振動デバイスに搭載するため、当該デバイスのパッケージ内の段差上或いは底面上の一対の対向する電極パッド上のそれぞれに超音波ボンディングするためのものである。   The first and second metal bumps 11a and 11b are mounted on a pair of opposing electrode pads on a step or a bottom surface in a package of the device in order to mount the crystal resonator element 2 on a crystal resonator device (not shown). For ultrasonic bonding.

第１金属バンプ１１ａは、基端部８ａ上において、第１、第２振動腕部６，７の並設方向の中央位置、より詳しくは前記中央位置から、若干、並設方向他方寄りの位置に形成され、第２金属バンプ１１ｂは、延出部８ｂ上において、第１、第２振動腕部６，７の並設方向中央位置から並設方向一方にずれた位置に形成されている。そして、第１金属バンプ１１ａの平面視サイズは、第２金属バンプ１１ｂの平面視サイズよりも大きい。   The first metal bump 11a has a central position in the juxtaposed direction of the first and second vibrating arm portions 6 and 7 on the base end portion 8a, more specifically, a position slightly closer to the other in the juxtaposed direction from the central position. The second metal bump 11b is formed on the extended portion 8b at a position shifted from the center position in the juxtaposition direction of the first and second vibrating arm portions 6 and 7 to one side in the juxtaposition direction. And the planar view size of the 1st metal bump 11a is larger than the planar view size of the 2nd metal bump 11b.

第１金属バンプ１１ａが、基端部８ａ上の上記の位置に形成され、且つ、第２金属バンプ１１ｂよりも、その平面視サイズが大きいので、水晶振動片２全体の振動バランスを良好に維持できる。   Since the first metal bump 11a is formed at the above position on the base end portion 8a and is larger in size in plan view than the second metal bump 11b, the vibration balance of the entire crystal vibrating piece 2 is maintained well. it can.

第１、第２振動腕部６，７それぞれの先端側に前記複数の励振電極の一部を共通接続する腕先引出電極１２ａ，１２ｂが形成されている。   Arm tip lead-out electrodes 12a and 12b for commonly connecting a part of the plurality of excitation electrodes are formed on the distal ends of the first and second vibrating arm portions 6 and 7, respectively.

腕先引出電極１２ａ，１２ｂは、腕先引出下層電極部１２ａ１，１２ｂ１と、その腕先引出下層電極部１２ａ１，１２ｂ１表面の一部領域上の周波数調整錘用電極部１２ａ２，１２ｂ２とで形成されて、全体が前記励振電極よりも厚肉に形成されている。   The arm tip lead electrodes 12a and 12b are formed by arm tip lead lower electrode portions 12a1 and 12b1 and frequency adjusting weight electrode portions 12a2 and 12b2 on partial areas of the surface of the arm tip lead lower electrode portions 12a1 and 12b1. Thus, the entirety is formed thicker than the excitation electrode.

なお、腕先引出下層電極部１２ａ１，１２ｂ１は、第１、第２振動腕部６，７の表裏面に形成され、第１、第２振動腕部６，７の表面の腕先引出下層電極部１２ａ１，１２ｂ１の一部領域上に前記周波数調整錘用電極部１２ａ２，１２ｂ２が形成されている。   The arm tip extraction lower layer electrode portions 12a1 and 12b1 are formed on the front and back surfaces of the first and second vibration arm portions 6 and 7, and the arm tip extraction lower layer electrodes on the surfaces of the first and second vibration arm portions 6 and 7 are formed. The frequency adjusting weight electrode portions 12a2 and 12b2 are formed on partial regions of the portions 12a1 and 12b1.

そして、基部引出電極２０ｃ１〜２０ｃ６は、腕先引出電極１２ａ，１２ｂと実質同一の肉厚を有する。周波数調整錘用電極部１２ａ２，１２ｂ２は、腕先引出下層電極部１２ａ１，１２ｂ１の一部領域上に、金属膜からなる鍍金により、形成されている。   The base lead electrodes 20c1 to 20c6 have substantially the same thickness as the arm tip lead electrodes 12a and 12b. The frequency adjusting weight electrode portions 12a2 and 12b2 are formed by plating made of a metal film on partial regions of the arm tip leading lower electrode portions 12a1 and 12b1.

なお、腕先引出電極１２ａ，１２ｂは、実施形態では、腕先引出下層電極部１２ａ１，１２ｂ１を薄肉にし、周波数調整錘用電極部１２ａ２，１２ｂ２を厚肉にしているが、腕先引出下層電極部１２ａ１，１２ｂ１を厚肉にし、周波数調整錘用電極部１２ａ２，１２ｂ２を薄肉にしてもよく、また、両者を同等の肉厚にしてもよく、その全体の肉厚が、基部引出電極２０ｃ１〜２０ｃ６と実質同一の肉厚を有すればよい。また、腕先引出電極１２ａ，１２ｂは、前記励振電極と実質同一の肉厚とし、周波数調整錘用電極部１２ａ２，１２ｂ２のみを厚肉にしてもよい。   In the embodiment, the arm tip extraction electrodes 12a and 12b are formed such that the arm tip extraction lower layer electrode portions 12a1 and 12b1 are thin and the frequency adjustment weight electrode portions 12a2 and 12b2 are thick. The portions 12a1 and 12b1 may be made thick, the frequency adjusting weight electrode portions 12a2 and 12b2 may be made thin, or both may be made equivalent, and the overall thickness of the base extraction electrodes 20c1 to 20c1 What is necessary is just to have the substantially same thickness as 20c6. Further, the arm tip extraction electrodes 12a and 12b may have substantially the same thickness as the excitation electrode, and only the frequency adjusting weight electrode portions 12a2 and 12b2 may be thick.

なお、実施形態では、周波数調整錘用電極部１２ａ２，１２ｂ２は、第１、第２振動腕部６，７の表面側に形成されているが、裏面側にも形成してよい。   In the embodiment, the frequency adjusting weight electrode portions 12a2 and 12b2 are formed on the front surface side of the first and second vibrating arm portions 6 and 7, but may also be formed on the back surface side.

腕先引出電極１２ａ，１２ｂの周波数調整錘用電極部１２ａ２，１２ｂ２は、水晶振動片２を駆動し、その周波数が所要の周波数に到達できるように、レーザビームの照射走査やイオンエッチング等で質量削除されて、その周波数の微調整を行うため形成されたものである。また、腕先引出下層電極部１２ａ１，１２ｂ１を厚肉にして、周波数調整錘用電極部１２ａ２，１２ｂ２を含めて前記周波数の微調整を行うようにしてもよい。   The frequency adjusting weight electrode portions 12a2 and 12b2 of the arm tip extraction electrodes 12a and 12b drive the quartz crystal vibrating piece 2 so that the frequency can reach a required frequency by mass irradiation by laser beam irradiation, ion etching, or the like. Deleted and formed to fine tune its frequency. Alternatively, the arm lead lower layer electrode portions 12a1 and 12b1 may be made thick so that the frequency is finely adjusted including the frequency adjusting weight electrode portions 12a2 and 12b2.

なお、基部引出電極２０ｃ１〜２０ｃ６は、放電による静電破壊防止の観点からは、前記腕先引出電極１２ａ，１２ｂの肉厚以上であってもよいことは勿論である。   Of course, the base lead electrodes 20c1 to 20c6 may be equal to or larger than the thickness of the arm tip lead electrodes 12a and 12b from the viewpoint of preventing electrostatic breakdown due to discharge.

以上の構成において、本実施形態の水晶振動片２では、基部５上の基部引出電極２０ｃ１〜２０ｃ６の肉厚が、図３に示すように、前記腕先引出電極１２ａ，１２ｂの肉厚と少なくとも実質同一の肉厚に形成されて、振動腕部６，７の表裏両主面の励振電極９ｂ１，９ｂ２，１０ｂ１，１０ｂ２よりも厚肉に形成されている。また、基部引出電極２０ｃ１〜２０ｃ６は、絶縁分離ライン１４ａ１，１４ａ２，１４ｂ１，１４ｂ２を除いた基部５の表裏面のほぼ全面において、同等の肉厚で形成されている。   In the above configuration, in the quartz crystal resonator element 2 of the present embodiment, the thickness of the base extraction electrodes 20c1 to 20c6 on the base 5 is at least as large as the thickness of the arm tip extraction electrodes 12a and 12b, as shown in FIG. It is formed to have substantially the same thickness, and is thicker than the excitation electrodes 9b1, 9b2, 10b1, and 10b2 on the front and back main surfaces of the vibrating arm portions 6 and 7. The base lead electrodes 20c1 to 20c6 are formed with the same thickness on almost the entire front and back surfaces of the base 5 except for the insulating separation lines 14a1, 14a2, 14b1, and 14b2.

本実施形態では、基部５上の基部引出電極２０ｃ１〜２０ｃ６の肉厚が、振動腕部６，７の表裏両主面の励振電極９ｂ１，９ｂ２，１０ｂ１，１０ｂ２よりも厚肉に形成されているので、その機械的強度が増強されている。   In the present embodiment, the thicknesses of the base extraction electrodes 20c1 to 20c6 on the base 5 are formed thicker than the excitation electrodes 9b1, 9b2, 10b1, and 10b2 on the front and back main surfaces of the vibrating arm portions 6 and 7. So its mechanical strength is enhanced.

このため、基部引出電極２０ｃ１〜２０ｃ６が基部５上で電極幅が細く、且つ、絶縁分離ライン１４ａ１，１４ａ２，１４ｂ１，１４ｂ２を介して対向する対向間距離が短いために、基部引出電極２０ｃ１〜２０ｃ６間の例えば角部等で放電が起きても、それら基部引出電極２０ｃ１〜２０ｃ６の静電破壊を有効に防止することができる。   For this reason, the base extraction electrodes 20c1 to 20c6 have a narrow electrode width on the base 5, and the distance between the opposing electrodes via the insulating separation lines 14a1, 14a2, 14b1, and 14b2 is short. Even if a discharge occurs at, for example, a corner portion, electrostatic breakdown of the base lead electrodes 20c1 to 20c6 can be effectively prevented.

本実施形態では、接合部８が平面視Ｌ字状であっても、第１金属バンプ１１ａの平面視サイズが、第２金属バンプ１１ｂの平面視サイズが大きく、且つ、第１金属バンプ１１ａは一対の第１、第２振動腕部６，７の並設位置間の略中央線上に設けられているので、水晶振動片２全体の振動バランスが確保されている。   In the present embodiment, even if the joint portion 8 is L-shaped in plan view, the size of the first metal bump 11a in plan view is larger than the size of the second metal bump 11b in plan view, and the first metal bump 11a is Since it is provided on a substantially central line between the juxtaposed positions of the pair of first and second vibrating arm portions 6 and 7, the vibration balance of the entire quartz vibrating piece 2 is ensured.

本実施形態では、これに加えて、基部５が、第１、第２振動腕部６，７の並設位置間の略中央線上に対して平面視両側部分が左右対称の同形状であり、かつ、基部引出電極２０ｃ１〜２０ｃ６は、基部５の表裏面のほぼ全面に同等の肉厚で形成されているので、基部引出電極２０ｃ１〜２０ｃ６を静電破壊防止のために厚肉にしても、水晶振動片２の振動バランスは良好に維持され、その動作特性を長期に安定して維持できる。   In the present embodiment, in addition to this, the base 5 has the same shape in which both side portions in a plan view are symmetrical with respect to a substantially central line between the juxtaposed positions of the first and second vibrating arm portions 6 and 7, And since the base extraction electrodes 20c1 to 20c6 are formed with substantially the same thickness on the entire front and back surfaces of the base 5, the base extraction electrodes 20c1 to 20c6 are made thick to prevent electrostatic breakdown. The vibration balance of the crystal vibrating piece 2 is maintained well, and its operation characteristics can be stably maintained for a long time.

腕先引出電極１２ａ，１２ｂにおいて、一例として、腕先引出下層電極部１２ａ１，１２ｂ１はクロム（Ｃｒ）を下地とし、その上層にフォトリソグラフィ等の技術によって金（Ａｕ）が形成された薄膜であり、周波数調整錘用電極部１２ａ２，１２ｂ２は、金(Ａｕ)が電解金属鍍金された厚膜になって、質量付加され、前記周波数調整に対応できるようにされている。   In the arm tip extraction electrodes 12a and 12b, for example, the arm tip extraction lower electrode portions 12a1 and 12b1 are thin films in which chrome (Cr) is used as a base and gold (Au) is formed thereon by a technique such as photolithography. The frequency adjusting weight electrode portions 12a2 and 12b2 are made of a thick film in which gold (Au) is plated with an electrolytic metal, and mass is added so that the frequency adjustment can be performed.

引出電極２０ｃ１〜２０ｃ６の厚肉化の工程を説明する。   A process for thickening the extraction electrodes 20c1 to 20c6 will be described.

水晶振動片２は、水晶ウエハに対するフォトリソグラフィにより、外形が成形され、必要な電極が形成されたうえで、水晶ウエハから折り取られて個片化されたものである。   The quartz crystal vibrating piece 2 is formed by photolithography on a quartz wafer, and after the necessary electrodes are formed, the quartz vibrating piece 2 is broken from the quartz wafer and separated into individual pieces.

そして、この水晶振動片２の振動腕部６，７の各電極は、具体的には、Ｃｒを下地とし、その上層にＡｕが積層された薄膜構造となっている。また、腕先引出電極１２ａ，１２ｂの腕先引出下層電極部１２ａ１，１２ｂ１の一部領域上の周波数調整錘用電極部１２ａ２，１２ｂ２及び接合部８上の金属バンプ１１ａ，１１ｂは、電解金属(Ａｕ)鍍金で厚膜に形成されている。   The electrodes of the vibrating arm portions 6 and 7 of the quartz crystal vibrating piece 2 have a thin film structure in which Cr is used as a base and Au is stacked thereon. The metal bumps 11a and 11b on the frequency adjusting weight electrodes 12a2 and 12b2 on the partial regions of the armtip lead lower electrode portions 12a1 and 12b1 of the armtip lead electrodes 12a and 12b and the joint 8 are made of electrolytic metal ( Au) plating is used to form a thick film.

そして、基部引出電極２０ｃ１〜２０ｃ６は、励振電極と同じ薄膜状に形成された後、基部５上の基部引出電極２０ｃ１〜２０ｃ６は、腕先引出電極１２ａ，１２ｂの腕先引出下層電極部１２ａ１，１２ｂ１の上部に電解金属鍍金で周波数調整錘用電極部１２ａ２，１２ｂ２を形成する工程で同時に、その表層に電解金属鍍金されて、その肉厚が腕先引出電極１２ａ，１２ｂと実質同一の肉厚にされている。   Then, after the base lead electrodes 20c1 to 20c6 are formed in the same thin film shape as the excitation electrode, the base lead electrodes 20c1 to 20c6 on the base 5 are the arm tip lead lower electrode parts 12a1 and 12b1 of the arm tip lead electrodes 12a and 12b. Simultaneously in the step of forming the frequency adjusting weight electrode portions 12a2 and 12b2 by electrolytic metal plating on the top of 12b1, the electrolytic metal plating is applied to the surface layer, and the thickness thereof is substantially the same as that of the arm lead electrodes 12a and 12b. Has been.

腕先引出電極１２ａは、第１振動腕部６の側面励振電極９ｂ１，９ｂ２に、腕先引出電極１２ｂは、第２振動腕部７の側面励振電極１０ｂ１，１０ｂ２に接続されている。   The arm tip extraction electrode 12 a is connected to the side excitation electrodes 9 b 1 and 9 b 2 of the first vibrating arm portion 6, and the arm tip extraction electrode 12 b is connected to the side excitation electrodes 10 b 1 and 10 b 2 of the second vibration arm portion 7.

腕先引出電極１２ａ，１２ｂの周波数調整錘用電極部１２ａ２，１２ｂ２は、数μｍ程度、好ましくは、２〜８μｍ程度の肉厚に形成され、第１、第２金属バンプ１１ａ，１１ｂは、数μｍ程度、好ましくは、７〜１５μｍ程度の肉厚に形成されている。   The frequency adjusting weight electrode portions 12a2 and 12b2 of the arm tip extraction electrodes 12a and 12b are formed to a thickness of about several μm, preferably about 2 to 8 μm, and the first and second metal bumps 11a and 11b are It is formed to a thickness of about μm, preferably about 7 to 15 μm.

この場合、基部５上の基部引出電極２０ｃ１〜２０ｃ６は、前記鍍金前は、励振電極と同程度の薄膜であるが、前記周波数調整錘用電極部１２ａ２，１２ｂ２を電解金属鍍金する工程により、腕先引出電極１２ａ，１２ｂと実質同一程度の肉厚にするとよい。   In this case, the base lead-out electrodes 20c1 to 20c6 on the base 5 are thin films similar to the excitation electrodes before the plating, but the arm of the frequency adjusting weight electrode portions 12a2 and 12b2 is plated by electrolytic metal plating. The thickness should be substantially the same as that of the leading electrodes 12a and 12b.

以上において、基部５の面積狭小化により、基部５上での基部引出電極２０ｃ１〜２０ｃ６の電極幅や電極間距離が狭小となっても、基部引出電極２０ｃ１〜２０ｃ６の肉厚が、励振電極よりも厚肉であるので、その機械的強度が増大している結果、基部５上の基部引出電極２０ｃ１〜２０ｃ６間に放電が発生しても、基部引出電極２０ｃ１〜２０ｃ６は、静電破壊から防止される。   In the above, even if the electrode width of the base extraction electrodes 20c1 to 20c6 and the distance between the electrodes on the base 5 are reduced due to the narrowing of the area of the base 5, the thickness of the base extraction electrodes 20c1 to 20c6 is larger than that of the excitation electrode. Since the mechanical strength is increased, the base lead electrodes 20c1 to 20c6 are prevented from electrostatic breakdown even if a discharge occurs between the base lead electrodes 20c1 to 20c6 on the base portion 5 because the mechanical strength is increased. Is done.

なお、基部５上の基部引出電極２０ｃ１〜２０ｃ６の肉厚が増大すると、基部５側で水晶振動片２を水晶振動子のパッケージ内で片持ち支持し、水晶振動子（圧電振動子）を構成する場合、水晶振動片２の支持強度が増大し、振動腕部６，７の振動作用が安定する効果も得られる。   When the thickness of the base extraction electrodes 20c1 to 20c6 on the base 5 is increased, the crystal resonator element 2 is cantilevered and supported in the crystal oscillator package on the base 5 side to form a crystal oscillator (piezoelectric oscillator). In this case, the support strength of the crystal vibrating piece 2 is increased, and an effect of stabilizing the vibration action of the vibrating arm portions 6 and 7 can be obtained.

以上説明したように、本実施形態によれば、基部５の表裏面の基部引出電極２０ｃ１〜２０ｃ６が、基部５の表裏面の励振電極９ａ１，９ｂ１，１０ｂ１，１０ｂ２よりも厚肉であるので、その機械的強度が大きくなり、これにより、基部引出電極２０ｃ１〜２０ｃ６の対向間に放電が発生しても、その放電により基部引出電極２０ｃ１〜２０ｃ６が静電破壊することを防止することができる。   As described above, according to the present embodiment, the base extraction electrodes 20c1 to 20c6 on the front and back surfaces of the base 5 are thicker than the excitation electrodes 9a1, 9b1, 10b1, and 10b2 on the front and back surfaces of the base 5. As a result, the mechanical strength of the base lead electrodes 20c1 to 20c6 can be prevented from electrostatic breakdown due to the discharge even when a discharge occurs between the base lead electrodes 20c1 to 20c6.

なお、実施形態では、第１、第２金属バンプ１１ａ，１１ｂは、接合部８の外部用接合部第１及び第２引出電極２０ｃ７，２０ｃ８上に形成されたが、接合部８を無くし、基部引出電極２０ｃ４，２０ｃ５それぞれの上部に個別に第１、第２金属バンプ１１ａ，１１ｂを形成してもよい。   In the embodiment, the first and second metal bumps 11a and 11b are formed on the external joint first and second lead electrodes 20c7 and 20c8 of the joint 8, but the joint 8 is eliminated and the base portion is formed. The first and second metal bumps 11a and 11b may be individually formed on the lead electrodes 20c4 and 20c5.

なお、本発明は、上述した実施形態に限定されずその精神または主要な特徴から逸脱することなく、他のいろいろな形態で実施できる。したがって、前述した実施形態は、単なる例示に過ぎず、本発明の範囲は特許請求の範囲に示すものであって、明細書本文には何ら拘束されない。さらに、特許請求の範囲に属する変形や変更は全て本発明の範囲内のものである。   Note that the present invention is not limited to the above-described embodiments, and can be implemented in various other forms without departing from the spirit or main features thereof. Therefore, the above-described embodiment is merely an example, and the scope of the present invention is shown in the claims, and is not limited to the text of the specification. Further, all modifications and changes belonging to the scope of the claims are within the scope of the present invention.

２ 水晶振動片(圧電振動片)
５ 基部
６，７ 振動腕部
８ 接合部
９ａ１，９ａ２，１０ａ１，１０ａ２ 励振電極
１１ａ，１１ｂ 金属バンプ
１２ａ，１２ｂ 腕先引出電極
１２ａ１，１２ｂ１ 腕先引出下層電極部
１２ａ２，１２ｂ２ 周波数調整錘用電極部
２０ｃ１〜２０ｃ６ 基部引出電極 2 Crystal vibrating piece (piezoelectric vibrating piece)
5 Base part 6, 7 Vibrating arm part 8 Joint part 9a1, 9a2, 10a1, 10a2 Excitation electrode 11a, 11b Metal bump 12a, 12b Arm tip extraction electrode 12a1, 12b1 Arm tip extraction lower layer electrode part 12a2, 12b2 Frequency adjustment weight electrode part 20c1-20c6 Base extraction electrode

Claims (6)

基部と、一対の振動腕部とを有し、
前記一対の振動腕部は、前記基部の一端面から突出した状態に並設されており、
前記一対の振動腕部の表裏両主面及び両側面のそれぞれには、複数の励振電極が形成され、
前記基部上には、前記複数の励振電極の一部を共通接続する接続用基部引出電極と、前記複数の励振電極の一部を外部へ引き出す一対の外部用基部引出電極とから構成される基部引出電極が形成されている音叉型圧電振動片であって、
前記基部引出電極が、前記振動腕部の前記表裏両主面に形成された前記励振電極よりも厚肉であることを特徴とする音叉型圧電振動片。 Having a base and a pair of vibrating arms,
The pair of vibrating arms are juxtaposed in a state protruding from one end surface of the base,
A plurality of excitation electrodes are formed on each of the front and back main surfaces and both side surfaces of the pair of vibrating arms,
On the base, a base composed of a connection base lead electrode for commonly connecting a part of the plurality of excitation electrodes, and a pair of external base lead electrodes for leading a part of the plurality of excitation electrodes to the outside A tuning-fork type piezoelectric vibrating piece in which an extraction electrode is formed,
The tuning fork-type piezoelectric vibrating piece according to claim 1, wherein the base extraction electrode is thicker than the excitation electrodes formed on the front and back main surfaces of the vibrating arm portion. 前記振動腕部の先端側に、前記複数の励振電極の一部を共通接続する腕先引出電極が形成され、前記腕先引出電極は、前記励振電極よりも厚肉に形成されており、前記基部引出電極は、前記腕先引出電極と少なくとも実質同一の肉厚を有する、請求項１に記載の音叉型圧電振動片。   An arm tip extraction electrode that commonly connects a part of the plurality of excitation electrodes is formed on the distal end side of the vibrating arm portion, and the arm tip extraction electrode is formed thicker than the excitation electrode, 2. The tuning fork type piezoelectric vibrating piece according to claim 1, wherein the base extraction electrode has at least substantially the same thickness as the arm tip extraction electrode. 前記基部の他端面から突出した接合部を備え、
前記接合部は、前記基部の他端面の前記一対の振動腕部の並設位置間の略中央線上を含む位置から突出した基端部と、前記基端部から前記並設方向一方側に延出した延出部とで、平面視Ｌ字状に形成されており、
前記基端部の表面には、前記一対のうちの前記外部用基部引出電極の一方が引き出された外部用接合部第1引出電極が形成され、その外部用接合部第1引出電極の上部に第１金属バンプが設けられ、
前記延出部の表面には、前記一対のうちの前記外部用基部引出電極の他方が引き出された外部用接合部第２引出電極が形成され、その外部用接合部第２引出電極の上部に第２金属バンプが設けられていると共に、
前記第１金属バンプの平面視サイズは、前記第２金属バンプの平面視サイズより大きい、請求項１、または、請求項２に記載の音叉型圧電振動片。 Comprising a joint protruding from the other end surface of the base,
The joint portion includes a base end portion that protrudes from a position including substantially the center line between the juxtaposed positions of the pair of vibrating arm portions on the other end surface of the base portion, and extends from the base end portion to one side in the juxtaposition direction. It is formed in an L shape in plan view with the extended part
On the surface of the base end portion, an external junction first extraction electrode from which one of the pair of external base extraction electrodes of the pair is extracted is formed, and an upper portion of the external junction first extraction electrode is formed. A first metal bump is provided;
On the surface of the extension portion, an external junction second extraction electrode is formed in which the other of the external base extraction electrodes of the pair is extracted, and is formed above the external junction second extraction electrode. A second metal bump is provided,
3. The tuning-fork type piezoelectric vibrating piece according to claim 1, wherein a size of the first metal bump in plan view is larger than a size of the second metal bump in plan view. 前記腕先引出電極は、その表層に鍍金金属を有しており、
前記外部用基部引出電極の上部、または前記外部用接合部引出電極の上部に金属バンプが形成されており、前記金属バンプは、その表層に、前記鍍金金属と同じ鍍金金属が形成されている請求項１〜３のうちのいずれか一項に記載の音叉型圧電振動片。 The arm tip extraction electrode has a plated metal on its surface layer,
Metal bumps are formed on the external base lead electrodes or on the external joint lead electrodes, and the metal bumps are formed on the surface thereof with the same metal plating as the plating metal. The tuning fork type piezoelectric vibrating piece according to any one of Items 1 to 3. 前記基部が、一対の振動腕部の並設位置間の略中央線上に対して平面視両側部分が対称同形状であると共に、前記基部引出電極は、互いに電気的に分離された状態で前記基部の表裏面のほぼ全面に同等の肉厚で形成されている、請求項１〜４のうちのいずれか一項に記載の音叉型圧電振動片。   The base has a symmetrical shape on both sides in plan view with respect to a substantially center line between the parallel positions of a pair of vibrating arms, and the base extraction electrodes are electrically separated from each other. The tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 4, wherein the tuning fork type piezoelectric vibrating piece is formed on substantially the entire front and back surfaces of the same with a similar thickness. 請求項１〜５のうちのいずれかに一項に記載の前記音叉型圧電振動片が、パッケージ内で支持されている、ことを特徴とする圧電振動子。   6. The piezoelectric vibrator according to claim 1, wherein the tuning-fork type piezoelectric vibrating piece according to claim 1 is supported in a package.
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