JP2015048863A - Variable throttle-type hydrostatic bearing - Google Patents

Variable throttle-type hydrostatic bearing Download PDF

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JP2015048863A
JP2015048863A JP2013178869A JP2013178869A JP2015048863A JP 2015048863 A JP2015048863 A JP 2015048863A JP 2013178869 A JP2013178869 A JP 2013178869A JP 2013178869 A JP2013178869 A JP 2013178869A JP 2015048863 A JP2015048863 A JP 2015048863A
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diaphragm
fluid
pad
variable throttle
static pressure
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JP6160371B2 (en
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匡俊 新美
Masatoshi Niimi
匡俊 新美
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JTEKT Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a variable throttle-type hydrostatic bearing including a diaphragm-type variable throttle, not affected by use conditions and having desired damping performance in actual use.SOLUTION: A variable throttle-type hydrostatic bearing includes: a diaphragm 33 in which a surface orthogonal to its thickness direction is opposed to a projecting surface 31b at a prescribed interval; and a flow channel 31c formed on the projecting surface 31b in a state of being communicated with a static pressure pocket 2a. The variable throttle-type hydrostatic bearing adjusts a throttle amount on the basis of an opening of a clearance between the diaphragm 33 and the projecting surface 31b. A damping property of the diaphragm 33 is set to a desired value by pressing a damping pad 34 opposed to the diaphragm 33, by a pressing spring 35, and adjusting a clearance tbetween the diaphragm 33 and the damping pad 34.

Description

本発明は、ダイアフラム式可変絞りを備えた可変絞り形静圧軸受に関するものである。   The present invention relates to a variable throttle hydrostatic bearing provided with a diaphragm type variable throttle.

ダイアフラム式可変絞りを備えた可変絞り形静圧軸受において、ダイアフラムの振動減衰性を大きくして静圧ポケットと可変絞りを含む流体回路の振動を減衰するために、ダイアフラムの可動方向と垂直な面の中央部に可変絞り部を備え、可変絞り部側のダイアフラムの外周部とダイアフラム保持部材の間に狭い隙間を設けて、隙間に差動流体を充満しておくことでダイアフラムの振動を抑制する技術がある。（特許文献１の図７）   In a variable throttle hydrostatic bearing equipped with a diaphragm type variable throttle, the surface perpendicular to the moving direction of the diaphragm is used to increase the vibration damping of the diaphragm and attenuate the vibration of the fluid circuit including the static pressure pocket and the variable throttle. A diaphragm is provided at the center of the diaphragm, and a narrow gap is provided between the outer periphery of the diaphragm on the side of the variable throttle and the diaphragm holding member, and the gap is filled with differential fluid to suppress diaphragm vibration. There is technology. (FIG. 7 of Patent Document 1)

特開平１０−１９６６５５号公報Japanese Patent Laid-Open No. 10-196655

特許文献１に記載の従来技術では、所望の減衰性能を得るためには、ダイアフラムとダイアフラム保持部材の間の隙間の距離が所定の寸法である必要があり、ダイアフラム式可変絞りの構成部材の寸法精度を高精度とする必要がある。また、ダイアフラムは静圧軸受の作動時にはある程度変形しており、この変形度合いは供給圧力、静圧ポケット内圧力、ダイアフラム式可変絞り構成部の寸法などにより異なる。このため、あらかじめ所定の隙間を設定しても、実使用状態では最適な隙間でなく所望の減衰性能を発揮できない恐れがある。   In the prior art described in Patent Document 1, in order to obtain a desired damping performance, the distance of the gap between the diaphragm and the diaphragm holding member needs to be a predetermined size, and the dimensions of the constituent members of the diaphragm type variable diaphragm The accuracy needs to be high. Further, the diaphragm is deformed to some extent when the hydrostatic bearing is operated, and the degree of deformation varies depending on the supply pressure, the hydrostatic pocket pressure, the dimensions of the diaphragm type variable throttle component, and the like. For this reason, even if a predetermined gap is set in advance, there is a possibility that a desired attenuation performance cannot be exhibited instead of an optimum gap in an actual use state.

本発明は上記事情に鑑みてなされたものであり、使用条件に影響されないで、実使用時に所望の減衰性能を持つダイアフラム式可変絞りを備えた可変絞り形静圧軸受を提供する。   The present invention has been made in view of the above circumstances, and provides a variable throttle type hydrostatic bearing including a diaphragm type variable throttle that has a desired damping performance during actual use without being affected by the use conditions.

上記の課題を解決するため、請求項１に係る発明の特徴は、軸受面に設けられた静圧ポケットと、前記静圧ポケットに流体を供給する流体供給手段と、前記流体供給手段から前記静圧ポケットに至る流体の流路を形成する流体流路と、前記流体流路の途中に設けられ、流体の流量を絞って前記静圧ポケットに流入させる可変絞りを備え、前記可変絞りは、流体貯留室と、中央部に突起面を備えた流体供給室と、前記流体供給室と前記流体貯留室の間を仕切り、自らの厚さ方向と直交する面が前記突起面と所定の隙間を隔てて正対するダイアフラムと、前記突起面に前記静圧ポケットへ連通する流路を備え、前記ダイアフラムと前記突起面の隙間の開度により絞り量を調整する可変絞り形静圧軸受において、板状で、貫通開口を備え、外周部に突起部を備え、前記突起部が前記ダイアフラムの外周部と接するように前記流体貯留室の内部に配置される減衰パッドと、前記減衰パッドを前記ダイアフラムの方向へ押付ける減衰パッド押付手段を備え、前記減衰パッドの前記突起部を除く部位と前記ダイアフラムの間の隙間を、前記減衰パッド押付手段により調整することで前記ダイアフラムの減衰性を調整することである。   In order to solve the above problems, the feature of the invention according to claim 1 is that a static pressure pocket provided on a bearing surface, a fluid supply means for supplying fluid to the static pressure pocket, and the static supply pocket from the fluid supply means. A fluid passage that forms a fluid passage leading to the pressure pocket, and a variable restrictor that is provided in the middle of the fluid passage and restricts the flow rate of the fluid to flow into the static pressure pocket. A storage chamber, a fluid supply chamber having a projection surface in the center, and a partition between the fluid supply chamber and the fluid storage chamber, and a surface perpendicular to the thickness direction of the storage chamber separates the projection surface from the predetermined gap. In the variable-throttle type hydrostatic bearing that includes a diaphragm that directly faces and a flow path that communicates with the hydrostatic pocket on the projecting surface and adjusts the amount of throttling according to the opening of the gap between the diaphragm and the projecting surface. , Equipped with a through-opening, A damping pad disposed inside the fluid storage chamber so that the protrusion comes into contact with the outer periphery of the diaphragm, and a damping pad pressing means for pressing the damping pad toward the diaphragm, It is to adjust the damping property of the diaphragm by adjusting the gap between the portion of the damping pad excluding the projecting portion and the diaphragm by the damping pad pressing means.

請求項２に係る発明の特徴は、請求項１に係る発明において、前記貫通開口は前記減衰パッドの中央から放射状に所定の半径まで伸びる複数の溝であり、前記減衰パッドの中央部が前記溝で分離されてパッド片が構成され、前記パッド片毎に前記減衰パッド押付手段を備えることである。   The invention according to claim 2 is characterized in that, in the invention according to claim 1, the through-opening is a plurality of grooves extending radially from a center of the attenuation pad to a predetermined radius, and a center portion of the attenuation pad is the groove. The pad piece is configured by separating the pad pad, and the pad pad pressing means is provided for each pad piece.

請求項1に係る発明によれば、可変絞り形静圧軸受の作動中に、減衰パッド押付手段により、減衰パッドの突起部を除く部位とダイアフラムの間の隙間を調整することができる。このため、ダイアフラム式可変絞り形静圧軸受の作動状態に応じて隙間を調整することができ、所望の減衰性能を持つダイアフラム式可変絞りを備えた可変絞り形静圧軸受を実現できる。   According to the first aspect of the present invention, during the operation of the variable throttle hydrostatic bearing, the gap between the portion excluding the protrusion of the damping pad and the diaphragm can be adjusted by the damping pad pressing means. Therefore, the gap can be adjusted according to the operating state of the diaphragm type variable throttle hydrostatic bearing, and a variable throttle hydrostatic bearing having a diaphragm type variable throttle having a desired damping performance can be realized.

請求項２に係る発明によれば、減衰パッドの中央部が溝で分離されてパッド片を構成しているので、パッド片の変形が容易で、ダイアフラムの方向への変位量も大きくできる。このため、パッド片とダイアフラムの間の隙間の調整代を大きくでき、大きな減衰性能の調整範囲を備えるダイアフラム式可変絞りを備えた可変絞り形静圧軸受を実現できる。   According to the second aspect of the present invention, since the central portion of the attenuation pad is separated by the groove to form the pad piece, the pad piece can be easily deformed and the amount of displacement in the direction of the diaphragm can be increased. For this reason, the adjustment allowance of the clearance gap between a pad piece and a diaphragm can be enlarged, and the variable throttle type hydrostatic bearing provided with the diaphragm type variable throttle provided with the adjustment range of a big damping performance is realizable.

本実施形態のスライドテーブル装置の全体構成を示す概略図である。It is the schematic which shows the whole structure of the slide table apparatus of this embodiment. 図１のＡ−Ａ断面図である。It is AA sectional drawing of FIG. 図２のＢ部の詳細図でダイアフラム式可変絞りの詳細を示す図である。It is a figure which shows the detail of a diaphragm type variable aperture in the detailed drawing of the B section of FIG. 図３のＣ−Ｃ断面図である。It is CC sectional drawing of FIG. 作動時のダイアフラム式可変絞りの詳細を示す図である。It is a figure which shows the detail of the diaphragm type variable aperture_diaphragm | restriction at the time of an action | operation.

以下、本発明の実施の形態を、本発明をテーブル送り装置に使用した事例で説明する。
図１に示すように、テーブル送り装置１はベース１０のスライド部にテーブル２を摺動自在に搭載し、テーブル２の両端の下部に１対の裏板５を取り付けることによりＸ軸方向のみに移動可能にした構造である。 Hereinafter, the embodiment of the present invention will be described using a case where the present invention is used in a table feeder.
As shown in FIG. 1, the table feeder 1 slidably mounts a table 2 on a slide portion of a base 10, and attaches a pair of back plates 5 to the lower portions of both ends of the table 2 so that only in the X-axis direction. It is a structure that can be moved.

図２に示すように、テーブル２のベース１０に対向する面には、２箇所の下向きの静圧ポケット２ａと、横向きに対向する１対の静圧ポケット２ｃを備えている。静圧ポケット２ａ、２ｃには可変絞り３が連通しており、可変絞り３には各々管路４が連通している。管路４にはポンプ１１（流体供給手段）が連結しており流体を供給する。
裏板５にも静圧ポケット５ａを上向きに備えており、静圧ポケット５ａには可変絞り３が連通しており、可変絞り３には各々管路４が連通している。 As shown in FIG. 2, the surface of the table 2 facing the base 10 is provided with two downward static pressure pockets 2a and a pair of static pressure pockets 2c facing laterally. The variable throttle 3 communicates with the static pressure pockets 2a and 2c, and the conduit 4 communicates with the variable throttle 3 respectively. A pump 11 (fluid supply means) is connected to the pipeline 4 to supply fluid.
The back plate 5 is also provided with a static pressure pocket 5a facing upward, and the variable throttle 3 communicates with the static pressure pocket 5a, and the conduit 4 communicates with each variable throttle 3.

図３に可変絞り３の詳細を示す。可変絞り３は、可変絞りベース３１の上面３１ａにキャップ３２が固定され、その内側にはダイアフラム３３が配置され、ダイアフラム３３の外周部に自らの突起部３４ａが接するように減衰パッド３４が搭載された構造をしている。キャップ３２には押しねじ３５（減衰パッド押付手段）がねじ結合しており、押しねじ３５をねじ込むことで減衰パッド３４はダイアフラム３３の方向へ移動する。移動した減衰パッド３４の突起部３４ａは、ダイアフラム３３の外周部をベース３１の上面３１ａに押付ける。   FIG. 3 shows details of the variable aperture 3. The variable diaphragm 3 has a cap 32 fixed to the upper surface 31 a of the variable diaphragm base 31, a diaphragm 33 is disposed on the inside thereof, and an attenuation pad 34 is mounted on the outer periphery of the diaphragm 33 so that its protrusion 34 a is in contact with the diaphragm 33. Have a structure. A push screw 35 (attenuation pad pressing means) is screwed to the cap 32, and the attenuation pad 34 moves in the direction of the diaphragm 33 by screwing the push screw 35. The protrusion 34 a of the moved attenuation pad 34 presses the outer peripheral portion of the diaphragm 33 against the upper surface 31 a of the base 31.

図４に示すように、減衰パッド３４は、中央部に穴３４ｂ（貫通開口）を備え、穴３４ｂを基点として放射状に外周方向に伸びる複数の溝３４ｃ（貫通開口）により複数のパッド片３４ｄに分離された構造である。押しねじ３５はパッド片３４ｄ毎に１個配置されており、減衰パッド３４とダイアフラム３３が接触した後に、さらに押しねじ３５をねじ込むことで、パッド片３４ｄをダイアフラム３３の方向へ撓ませることができる。   As shown in FIG. 4, the attenuation pad 34 has a hole 34b (through opening) in the center, and a plurality of pad pieces 34d are formed by a plurality of grooves 34c (through openings) extending radially outward from the hole 34b. It is an isolated structure. One push screw 35 is arranged for each pad piece 34d, and after the damping pad 34 and the diaphragm 33 are in contact with each other, the push piece 35 can be further screwed to deflect the pad piece 34d in the direction of the diaphragm 33. .

以上の構造により、可変絞りベース３１とダイアフラム３３に囲まれた流体供給室３１ｅと、キャップ３２とダイアフラム３３に囲まれた流体貯留室３２ａが構成される。可変絞りベース３１は、流体供給室３１ｅの中央部に突起面３１ｂと吐出口３１ｃとを備えている。流体貯留室３２ａには流路３２ｃを経由して管路４が連通し、流体供給室３１ｅには流路３１ｄと流路３２ｃを経由して管路４が連通し、吐出口３１ｃはテーブル２の流入路２ｂを経由して静圧ポケット２ａと連通している。   With the above structure, the fluid supply chamber 31e surrounded by the variable throttle base 31 and the diaphragm 33, and the fluid storage chamber 32a surrounded by the cap 32 and the diaphragm 33 are configured. The variable throttle base 31 includes a projection surface 31b and a discharge port 31c at the center of the fluid supply chamber 31e. The conduit 4 communicates with the fluid storage chamber 32a via the flow path 32c, the conduit 4 communicates with the fluid supply chamber 31e via the flow path 31d and the flow path 32c, and the discharge port 31c is connected to the table 2. The inflow passage 2b communicates with the static pressure pocket 2a.

可変絞り形静圧軸受の作動について、図５に基づき説明する。
管路４に流体が供給されると流路３２ｃを経由して流体貯留室３２ａに流体が流入し、ダイアフラム３３と減衰パッド３４の間の隙間ｔ３にも充満する。一方、流路３２ｃと流路３１ｄを経由して流体供給室３１ｅに流体が充満し、さらに、流体供給室３１ｅ内の流体はダイアフラム３３と突起面３１ｂの間の隙間と吐出口３１ｃを経由して静圧ポケット２ａに流量Ｑ０で流入する。静圧ポケット２ａ内からは、静圧ポケット２ａとベース１０の間隔ｔ１から流出する流量Ｑ０の流体が流出する。 The operation of the variable throttle hydrostatic bearing will be described with reference to FIG.
When the fluid is supplied to the pipe line 4, the fluid flows into the fluid storage chamber 32 a via the flow path 32 c and fills the gap t 3 between the diaphragm 33 and the attenuation pad 34. On the other hand, the fluid supply chamber 31e is filled with fluid via the flow path 32c and the flow path 31d, and further, the fluid in the fluid supply chamber 31e passes through the gap between the diaphragm 33 and the projection surface 31b and the discharge port 31c. flowing at a flow rate Q 0 to the hydrostatic pocket 2a Te. From the hydrostatic pocket 2a, the fluid flow rate Q 0 that flows out of the interval t 1 of the hydrostatic pocket 2a and the base 10 flows out.

以上のことが、テーブル２の水平方向に設置された静圧ポケット２ｅと裏板５の静圧ポケット５ａ部においても同様に起きる。この結果として、ベース１０とテーブル２は静圧ポケット２ａ部で間隔ｔ１を備えた状態で保持される。 The above also occurs in the static pressure pocket 2e installed in the horizontal direction of the table 2 and the static pressure pocket 5a portion of the back plate 5. As a result, the base 10 and the table 2 is maintained in a state having an interval t 1 in hydrostatic pocket 2a portion.

この時、管路４に供給される流体の圧力をＰ０とすると、流体貯留室３２ａと流体供給室３１ｅ内の圧力はＰ０となる。静圧ポケット２ａ内の圧力は、ダイアフラム３３と突起面３１ｂの間の隙間により絞られるため低下しＰ１となる。このため、ダイアフラム３３は突起面３１ｂの方向に押される力を受け変位する。ダイアフラム３３と突起面３１ｂの間の隙間は、ダイアフラム３３の両面に作用する圧力Ｐ０と吐出口３１ｃに作用する静圧ポケット２ａの圧力Ｐ１により発生する力と、ダイアフラム３３の弾性回復力とが釣り合う隙間ｔ２となる。 At this time, if the pressure of the fluid supplied to the conduit 4 is P 0 , the pressure in the fluid storage chamber 32a and the fluid supply chamber 31e is P 0 . The pressure in the hydrostatic pocket 2a is a P 1 decreases because the throttled by the clearance between the diaphragm 33 projection surface 31b. For this reason, the diaphragm 33 is displaced by receiving a force pushed in the direction of the protruding surface 31b. The gap between the diaphragm 33 and the projecting surface 31b is a pressure P 0 acting on both surfaces of the diaphragm 33, a force generated by the pressure P 1 of the static pressure pocket 2a acting on the discharge port 31c, and an elastic recovery force of the diaphragm 33. the gap t 2 that are balanced.

この状態でテーブル２に下向きの負荷が加わると、テーブル２が下方に移動するため静圧ポケット２ａの間隔ｔ１が狭くなり、間隔ｔ１からの流体の流出量が減少し、静圧ポケット２ａ内の圧力が上昇するため、静圧ポケット２ａに連通する吐出口３１ｃの圧力も上昇する。そうすると、ダイアフラム３３の吐出口３１ｃに対向する面の受ける上向きの力が大きくなり、ダイアフラム３３は上方に移動し、ダイアフラム３３と突起面３１ｂの間の隙間ｔ２が大きくなる。結果として、隙間ｔ２と吐出口３１ｃを経由して静圧ポケット２ａに流入する流量が増加する。これにより、静圧ポケット２ａとベース１０の間隔ｔ１から流出する流量を増加させる必要があるため、静圧ポケット２ａとベース１０の間隔ｔ１の減少を防止する作用が働く。つまり、負荷に対する間隔ｔ１の変動を少なくする（剛性を大きくする）作用が働く。 When downward load is applied to the table 2 in this state, the table 2 is the interval t 1 of the hydrostatic pocket 2a is narrowed to move downward, it reduces the outflow of fluid from the interval t 1, the static pressure pocket 2a Since the internal pressure rises, the pressure at the discharge port 31c communicating with the static pressure pocket 2a also rises. Then, the upward force experienced by the surface facing the discharge port 31c of the diaphragm 33 is increased, the diaphragm 33 is moved upward, the gap t 2 becomes large between the diaphragm 33 projection surface 31b. As a result, the flow rate flowing into the static pressure pocket 2a through the discharge port 31c and the gap t 2 is increased. Thereby, since it is necessary to increase the flow rate flowing out from the interval t 1 between the static pressure pocket 2 a and the base 10, the effect of preventing the decrease in the interval t 1 between the static pressure pocket 2 a and the base 10 works. That is, the effect of reducing the fluctuation of the interval t 1 with respect to the load (increasing the rigidity) works.

上述のように、可変絞り形静圧軸受の作動中には、ダイアフラム３３の中立位置は中央部が突起面３１ｂの方向に所定量だけ変位している位置となる。この変位量は、供給圧力、ポケット内圧力、突起面３１ｂと流体貯留室３２ａと流体供給室３１ｅの受圧面積などにより変動する。   As described above, during the operation of the variable throttle hydrostatic bearing, the neutral position of the diaphragm 33 is a position where the central portion is displaced by a predetermined amount in the direction of the projection surface 31b. The amount of displacement varies depending on the supply pressure, the pressure in the pocket, the pressure receiving area of the projection surface 31b, the fluid storage chamber 32a, and the fluid supply chamber 31e.

ここで、静圧ポケットと可変絞りを含む流体回路に振動が発生した場合には、ダイアフラムがその厚さ方向に振動し、流体回路の減衰性が小さい場合その振動が増大し、可変絞り形静圧軸受に悪影響を与える。これを防止するために、ダイアフラム部にスクイズフィルムダンパを備えてダイアフラムの減衰性を大きくすることが行われている。スクイズフィルムダンパの減衰性はスクイズ膜の厚さにより異なり、スクイズ膜が薄い程大きくなる。   Here, when vibration occurs in the fluid circuit including the static pressure pocket and the variable throttle, the diaphragm vibrates in the thickness direction, and when the fluid circuit has low attenuation, the vibration increases, and the variable throttle static Adversely affects pressure bearings. In order to prevent this, the diaphragm part is provided with a squeeze film damper to increase the attenuation of the diaphragm. The damping property of the squeeze film damper varies depending on the thickness of the squeeze film, and becomes larger as the squeeze film is thinner.

図５に示すように、本実施例では、ダイアフラム３３と減衰パッド３４の間の隙間ｔ３をスクイズ膜としているので、押しねじ３５をねじ込むことにより減衰パッド３４の各パッド片３４ｄをダイアフラム３３の方向へ適宜変位させて、スクイズ膜である隙間ｔ３を変動させることができる。可変絞り形静圧軸受の作動中には、ダイアフラム３３の中央部が突起面３１ｂの方向に変位し、この変位の量は使用条件により異なる。可変絞り形静圧軸受の作動中に、押しねじ３５のねじ込み位置を調整することで、パッド片３４ｄとダイアフラム３３の隙間を所望の隙間ｔ３に設定できる。この結果、使用条件に応じて押しねじ３５のねじ込み位置を調整することで、所望の減衰性を備えた可変絞り形静圧軸受を実現できる。 As shown in FIG. 5, in this embodiment, the gap t 3 between the diaphragm 33 and the attenuation pad 34 is a squeeze film, so that each pad piece 34 d of the attenuation pad 34 is attached to the diaphragm 33 by screwing the push screw 35. by appropriately displaced in the direction, it is possible to vary the gap t 3 is a squeeze film. During operation of the variable throttle hydrostatic bearing, the central portion of the diaphragm 33 is displaced in the direction of the projecting surface 31b, and the amount of this displacement varies depending on the use conditions. During operation of the variable throttle Hydrostatic bearings, by adjusting the screwing position of the push screw 35, the gap between the pad pieces 34d and the diaphragm 33 can be set to a desired gap t 3. As a result, by adjusting the screwing position of the push screw 35 according to the use conditions, a variable throttle hydrostatic bearing having a desired damping property can be realized.

２：テーブル ２ａ：静圧ポケット ３：可変絞り ４：管路 １０：ベース ３１：可変絞りベース ３１ａ：上面 ３１ｂ：突起面 ３１ｅ：流体供給室 ３２：キャップ ３２ａ：流体貯留室 ３３：ダイアフラム ３４：減衰パッド ３４ａ：突起部 ３４ｂ：穴 ３４ｃ：溝 ３４ｄ：パッド片 ３５：押しねじ 2: Table 2a: Static pressure pocket 3: Variable throttle 4: Pipe line 10: Base 31: Variable throttle base 31a: Upper surface 31b: Projection surface 31e: Fluid supply chamber 32: Cap 32a: Fluid storage chamber 33: Diaphragm 34: Damping Pad 34a: Protrusion 34b: Hole 34c: Groove 34d: Pad piece 35: Press screw

Claims (2)

軸受面に設けられた静圧ポケットと、
前記静圧ポケットに流体を供給する流体供給手段と、
前記流体供給手段から前記静圧ポケットに至る流体の流路を形成する流体流路と、
前記流体流路の途中に設けられ、流体の流量を絞って前記静圧ポケットに流入させる可変絞りを備え、
前記可変絞りは、
流体貯留室と、
中央部に突起面を備えた流体供給室と、
前記流体供給室と前記流体貯留室の間を仕切り、自らの厚さ方向と直交する面が前記突起面と所定の隙間を隔てて正対するダイアフラムと、
前記突起面に前記静圧ポケットへ連通する流路を備え、前記ダイアフラムと前記突起面の隙間の開度により絞り量を調整する可変絞り形静圧軸受において、
板状で、貫通開口を備え、外周部に突起部を備え、前記突起部が前記ダイアフラムの外周部と接するように前記流体貯留室の内部に配置される減衰パッドと、
前記減衰パッドを前記ダイアフラムの方向へ押付ける減衰パッド押付手段を備え、
前記減衰パッドの前記突起部を除く部位と前記ダイアフラムの間の隙間を、前記減衰パッド押付手段により調整することで前記ダイアフラムの減衰性を調整する可変絞り形静圧軸受。 A hydrostatic pocket provided on the bearing surface;
Fluid supply means for supplying fluid to the static pressure pocket;
A fluid flow path forming a fluid flow path from the fluid supply means to the static pressure pocket;
Provided in the middle of the fluid flow path, comprising a variable throttle that throttles the flow rate of the fluid and flows into the static pressure pocket,
The variable aperture is
A fluid reservoir,
A fluid supply chamber having a projecting surface at the center;
A diaphragm that partitions between the fluid supply chamber and the fluid storage chamber, and a surface perpendicular to the thickness direction of the fluid supply chamber faces the projection surface with a predetermined gap therebetween,
In the variable throttle-type hydrostatic bearing that includes a flow path that communicates with the static pressure pocket on the projection surface, and that adjusts the throttle amount by the opening of the gap between the diaphragm and the projection surface.
A plate-like, provided with a through-opening, provided with a protrusion on the outer periphery, and an attenuation pad disposed inside the fluid storage chamber so that the protrusion contacts the outer periphery of the diaphragm;
Attenuation pad pressing means for pressing the attenuation pad in the direction of the diaphragm,
A variable-throttle hydrostatic bearing that adjusts the damping performance of the diaphragm by adjusting a gap between the portion of the damping pad excluding the protrusion and the diaphragm by the damping pad pressing means. 前記貫通開口は前記減衰パッドの中央から放射状に所定の半径まで伸びる複数の溝であり、
前記減衰パッドの中央部が前記溝で分離されてパッド片が構成され、前記パッド片毎に前記減衰パッド押付手段を備える請求項１に記載の可変絞り形静圧軸受。 The through opening is a plurality of grooves extending radially from the center of the attenuation pad to a predetermined radius,
2. The variable throttle hydrostatic bearing according to claim 1, wherein a center portion of the damping pad is separated by the groove to form a pad piece, and the damping pad pressing means is provided for each pad piece.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105202028A (en) * 2015-10-16 2015-12-30 西安工业大学 Pressure-feed air bearing provided with elastic damping air chambers
JP2017010304A (en) * 2015-06-23 2017-01-12 株式会社ジェイテクト Flow rate control device
CN114483787A (en) * 2021-12-30 2022-05-13 浙江杭机股份有限公司 Novel hydrostatic bearing

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4899541A (en) * 1972-02-28 1973-12-17
JPH01238715A (en) * 1988-03-18 1989-09-22 Seika Yoshimoto Variable aperture due to movable body type static pressure bearing
JP2013087875A (en) * 2011-10-19 2013-05-13 Jtekt Corp Variable throttle type hydrostatic bearing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4899541A (en) * 1972-02-28 1973-12-17
JPH01238715A (en) * 1988-03-18 1989-09-22 Seika Yoshimoto Variable aperture due to movable body type static pressure bearing
JP2013087875A (en) * 2011-10-19 2013-05-13 Jtekt Corp Variable throttle type hydrostatic bearing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017010304A (en) * 2015-06-23 2017-01-12 株式会社ジェイテクト Flow rate control device
CN105202028A (en) * 2015-10-16 2015-12-30 西安工业大学 Pressure-feed air bearing provided with elastic damping air chambers
CN114483787A (en) * 2021-12-30 2022-05-13 浙江杭机股份有限公司 Novel hydrostatic bearing

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