JP2015034748A - 熱式質量流量計及び質量流量制御装置 - Google Patents
熱式質量流量計及び質量流量制御装置 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/10—Spot welding; Stitch welding
- B23K11/11—Spot welding
- B23K11/115—Spot welding by means of two electrodes placed opposite one another on both sides of the welded parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/16—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded
- B23K11/163—Welding of coated materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/16—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded
- B23K11/18—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded of non-ferrous metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/16—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded
- B23K11/20—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded of different metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/34—Preliminary treatment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/02—Soldered or welded connections
- H01R4/023—Soldered or welded connections between cables or wires and terminals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/38—Conductors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
- B23K2103/26—Alloys of Nickel and Cobalt and Chromium
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
- Resistance Heating (AREA)
- Measuring Volume Flow (AREA)
- Manufacturing Of Electrical Connectors (AREA)
Abstract
【解決手段】 溶接端子を構成する材料を発熱抵抗線の融点との温度差が100℃を超えない融点を有する金属又は合金とし、溶接端子の表面に1層又は2層以上の被覆層を設ける。被覆層は、Niで構成された下地被覆層とAuで構成された表面被覆層が好ましい。
【選択図】 図1
Description
さらに、本発明は、上記の熱式質量流量計を有することを特徴とする質量流量制御装置の発明である。
また、発熱抵抗線として、線径が15μmでポリイミド樹脂の絶縁被膜を有するFe−Ni合金線(Niが70質量%、残部がFe)を準備した。
準備した溶接端子の素材の融点は1450℃であり、発熱抵抗線の融点は1440℃であるから、両者の温度差ΔTは10℃であった。
スポット溶接後に電極間の加圧力を緩めると、溶接端子は電極間から簡単に取り外すことができた。溶接端子を取り外した後のタングステン電極の先端は清浄で、溶接端子の溶融物等の付着は見られなかった。
上記の実施例と同じ溶接端子の素材を用いて、溶接端子の素材に被覆層を設けないで溶接端子として使用した他は上記の実施例と同じ条件で発熱抵抗線のスポット溶接を行った。
スポット溶接後に電極間の加圧力を緩めると、溶接端子の表面のうち溶接部と反対側の面と下側のタングステン電極の表面に溶着しており、簡単に取り外すことができなかった。ペンチを使って溶接端子を下側のタングステン電極から無理に剥がすと、溶接端子の表面の一部が電極の先端に溶着したままの状態で剥離し、表面が剥離された溶接端子には円形のくぼみが形成された。また、タングステン電極の先端に溶接端子の表面の一部が溶着したままだと次のスポット溶接を行うことができないので、溶着した溶接端子の一部をやすりを使って研削除去しなければならなかった。
厚さが0.3mmのリン青銅製の板材を加工して、図4に示す形状の溶接端子の素材を準備した。得られた素材の表面全体に、先ず厚さが3.0μmの電解ニッケルメッキを行い、次に厚さが0.2μmの電解金メッキを行うことにより、ニッケルと金の二層で構成された被覆層を有するリン青銅製の溶接端子を準備した。
また、発熱抵抗線として、線径が15μmでポリイミド樹脂の絶縁被膜を有するFe−Ni合金線(Niが70質量%、残部がFe)を準備した。
準備した溶接端子の素材の融点は980℃であり、発熱抵抗線の融点は1440℃であるから、両者の温度差ΔTは460℃であった。
2 センサチューブ
3 上流側ヒータエレメント
4 下流側ヒータエレメント
5 溶接端子
6 モールド
7 導線
8 電極
9 ナゲット
10a、10b 突出部
Claims (6)
- 流体が内部を流動するセンサチューブと、
前記センサチューブの外周に設けられた発熱抵抗線でなる上流側ヒータエレメント及び下流側ヒータエレメントと、
前記発熱抵抗線の端部がスポット溶接により電気的に接続された複数の溶接端子と、
を有する熱式質量流量計であって、
前記溶接端子は、前記発熱抵抗線の融点との温度差が100℃を超えない融点を有する金属又は合金でなり、かつ、
前記溶接端子の表面に1層又は2層以上の被覆層が設けられている
ことを特徴とする熱式質量流量計。 - 前記発熱抵抗線が5μm以上、100μm以下の線径を有するFe−Ni合金線でなる
ことを特徴とする請求項1に記載の熱式質量流量計。 - 前記溶接端子がFe−Ni合金でなる
ことを特徴とする請求項2に記載の熱式質量流量計。 - 前記被覆層のうち最も外側に位置する被覆層がCu又はAuでなる
ことを特徴とする請求項1乃至3のいずれかに記載の熱式質量流量計。 - 前記被覆層がNiで構成された下地被覆層とAuで構成された表面被覆層の二層で構成されている
ことを特徴とする請求項4に記載の熱式質量流量計。 - 請求項1乃至5に記載の熱式質量流量計を有する
ことを特徴とする質量流量制御装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013165786A JP6217226B2 (ja) | 2013-08-09 | 2013-08-09 | 熱式質量流量計、質量流量制御装置、及び熱式質量流量計の製造方法 |
KR1020167005783A KR102176442B1 (ko) | 2013-08-09 | 2014-07-25 | 열식 질량 유량계, 질량 유량 제어 장치 및 열식 질량 유량계의 제조 방법 |
US14/908,415 US10041823B2 (en) | 2013-08-09 | 2014-07-25 | Thermal mass flow meter and mass flow controller |
PCT/JP2014/069641 WO2015019863A1 (ja) | 2013-08-09 | 2014-07-25 | 熱式質量流量計及び質量流量制御装置 |
CN201480044742.2A CN105452818B (zh) | 2013-08-09 | 2014-07-25 | 热式质量流量计和质量流量控制装置 |
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JP2013165786A JP6217226B2 (ja) | 2013-08-09 | 2013-08-09 | 熱式質量流量計、質量流量制御装置、及び熱式質量流量計の製造方法 |
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JP2015034748A true JP2015034748A (ja) | 2015-02-19 |
JP2015034748A5 JP2015034748A5 (ja) | 2016-09-01 |
JP6217226B2 JP6217226B2 (ja) | 2017-10-25 |
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US (1) | US10041823B2 (ja) |
JP (1) | JP6217226B2 (ja) |
KR (1) | KR102176442B1 (ja) |
CN (1) | CN105452818B (ja) |
WO (1) | WO2015019863A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3173749A1 (en) * | 2015-11-30 | 2017-05-31 | Azbil Corporation | Measuring apparatus and method of manufacturing the measuring apparatus |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106768113B (zh) * | 2016-12-09 | 2019-10-25 | 北京七星华创流量计有限公司 | 一种流体输送测量装置 |
WO2019176063A1 (ja) | 2018-03-15 | 2019-09-19 | 日本電気株式会社 | 異常検知装置、異常検知方法および記録媒体 |
US10845263B2 (en) | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
FR3096452B1 (fr) * | 2019-05-22 | 2022-02-11 | Buerkert Werke Gmbh & Co Kg | Ensemble de capteur de débit massique et procédé de fabrication d’un ensemble de capteur de débit massique |
CN110274649B (zh) * | 2019-06-13 | 2020-09-01 | 武汉大学 | 一种基于mems技术的热温差型流量传感器及其制备方法 |
DE102021106253A1 (de) * | 2021-03-15 | 2022-09-15 | Alfmeier Präzision SE | Ventil, Ventilanordnung und System für eine Sitzkomfortfunktion |
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-
2014
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- 2014-07-25 US US14/908,415 patent/US10041823B2/en active Active
- 2014-07-25 WO PCT/JP2014/069641 patent/WO2015019863A1/ja active Application Filing
- 2014-07-25 CN CN201480044742.2A patent/CN105452818B/zh active Active
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EP3173749A1 (en) * | 2015-11-30 | 2017-05-31 | Azbil Corporation | Measuring apparatus and method of manufacturing the measuring apparatus |
US10113892B2 (en) | 2015-11-30 | 2018-10-30 | Azbil Corporation | Measuring apparatus and method of manufacturing the measuring apparatus |
Also Published As
Publication number | Publication date |
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KR102176442B1 (ko) | 2020-11-09 |
WO2015019863A1 (ja) | 2015-02-12 |
KR20160041980A (ko) | 2016-04-18 |
CN105452818A (zh) | 2016-03-30 |
CN105452818B (zh) | 2019-12-24 |
US10041823B2 (en) | 2018-08-07 |
US20160178420A1 (en) | 2016-06-23 |
JP6217226B2 (ja) | 2017-10-25 |
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