JP2015004566A - Pressure detection device - Google Patents

Pressure detection device Download PDF

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Publication number
JP2015004566A
JP2015004566A JP2013129503A JP2013129503A JP2015004566A JP 2015004566 A JP2015004566 A JP 2015004566A JP 2013129503 A JP2013129503 A JP 2013129503A JP 2013129503 A JP2013129503 A JP 2013129503A JP 2015004566 A JP2015004566 A JP 2015004566A
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Prior art keywords
strain
pressure
axis direction
rib
diaphragm
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JP6147110B2 (en
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真之 日尾
Masayuki Hio
真之 日尾
風間　敦
Atsushi Kazama
敦 風間
準二 小野塚
Junji Onozuka
準二 小野塚
彰夫 保川
Akio Yasukawa
彰夫 保川
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Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a pressure detection device capable of improving the output sensitivity of a strain detection element by reducing strain in a y-axis direction.SOLUTION: Provided is a pressure measurement device 100 having a strain-inducing body 25 for generating strain in accordance with a pressure applied thereto after being introduced via a diaphragm 14 from a pressure introduction hole 12ha and a strain detection element 16 joined to a face of the strain-inducing body 25 opposite its pressure-receiving face, wherein the pressure measurement device 100 is provided with, on a face on the diaphragm 14 side of the strain-inducing body 25, a rib 25L1 formed along a y-axis direction on the middle side in an x-axis direction and a protrusion 30 at center thereof and ribs 25L2a, 25L2b formed along the y-axis direction on the opposite end sides in the x-axis direction, with a plurality of electronic components 28 disposed symmetrically from the center axis on a face on the strain detection element 16 side of the strain-inducing body 25 via a circuit board 17. Strain in the y-axis direction of the strain-inducing body 25 is reduced by the ribs 25L1, 25L2a, 25L2b, making it possible to maximize the output sensitivity of the strain detection element 16.

Description

本発明は、測定対象の各種機器に装着されて圧力を検出する圧力検出装置に関する。   The present invention relates to a pressure detection device that is mounted on various devices to be measured and detects pressure.

図８に、圧力媒体の圧力を受けて歪を生じる起歪体と、起歪体で生じた歪を検出する歪検出素子を有する従来の圧力検出装置の一例を示す。図８の圧力測定装置２００は、例えば車両に搭載される高圧センサとして構成され、エンジンの燃料圧、ブレーキ油圧、各種ガス圧等の測定に用いられる。   FIG. 8 shows an example of a conventional pressure detection apparatus having a strain generating body that generates strain under the pressure of a pressure medium and a strain detection element that detects strain generated in the strain generating body. 8 is configured as a high-pressure sensor mounted on a vehicle, for example, and is used for measuring engine fuel pressure, brake oil pressure, various gas pressures, and the like.

図８の圧力測定装置２００において、１１は圧力が導入される圧力ポートである。この圧力ポート１１は、軸方向一端に圧力導入口１２ａが形成された中空筒状の圧力導入部１２と、該圧力導入部１２の軸方向他端（上部）に形成された例えば円筒状のフランジ１３と、該フランジ１３の中央部位に立設されたダイアフラム１４とを備えている。   In the pressure measuring apparatus 200 of FIG. 8, 11 is a pressure port into which pressure is introduced. The pressure port 11 includes a hollow cylindrical pressure introducing portion 12 having a pressure introducing port 12a formed at one end in the axial direction, and a cylindrical flange formed at the other axial end (upper portion) of the pressure introducing portion 12, for example. 13 and a diaphragm 14 erected at the central portion of the flange 13.

前記圧力導入部１２の圧力導入孔１２ｈａは、フランジ１３の中央部とダイアフラム１４の上部表面より若干低い高さの部位まで連続して穿設されている。   The pressure introducing hole 12ha of the pressure introducing portion 12 is continuously drilled up to a portion having a height slightly lower than the central portion of the flange 13 and the upper surface of the diaphragm 14.

ダイアフラム１４の上部表面には圧力導入孔１２ｈａを介して導入された圧力によって変形し歪を生じる矩形平面板形状の起歪体１５が配設されている。起歪体１５の受圧面（ダイアフラム１４側の面）とは反対の面のほぼ中央部位には、起歪体１５の変形（歪）に応じた電気信号を出力する複数の歪抵抗ブリッジを備えた歪検出素子１６が接合されている。   On the upper surface of the diaphragm 14, there is disposed a strain generating body 15 having a rectangular flat plate shape that is deformed by the pressure introduced through the pressure introducing hole 12ha and generates strain. A plurality of strain resistance bridges for outputting an electrical signal corresponding to the deformation (strain) of the strain generating body 15 are provided at a substantially central portion of the surface opposite to the pressure receiving surface (surface on the diaphragm 14 side) of the strain generating body 15. The strain detecting element 16 is joined.

歪検出素子１６は、例えば１つのチップ上に複数の歪抵抗ブリッジが設けられた半導体チップとして構成され、ｘ軸方向歪とｙ軸方向歪の差を出力する。   The strain detection element 16 is configured, for example, as a semiconductor chip in which a plurality of strain resistance bridges are provided on one chip, and outputs the difference between the x-axis direction strain and the y-axis direction strain.

起歪体１５の受圧面とは反対の面における、歪検出素子１６以外の部位には基板１７が設けられている。この基板１７には、歪検出素子１６から出力された各検出信号を増幅し処理する回路や各種電子部品およびコンデンサ１８等が搭載されている。   A substrate 17 is provided at a portion other than the strain sensing element 16 on the surface opposite to the pressure receiving surface of the strain generating body 15. A circuit for amplifying and processing each detection signal output from the strain detection element 16, various electronic components, a capacitor 18, and the like are mounted on the substrate 17.

前記フランジ１３の外周部の上面には、ダイアフラム１４、起歪体１５、歪検出素子１６、基板１７およびコンデンサ１８を覆うカバー１９の、開口された軸方向一端の周縁部が固設されている。   On the upper surface of the outer peripheral portion of the flange 13, a peripheral edge portion of one end in the axial direction of the cover 19 covering the diaphragm 14, the strain generating body 15, the strain detecting element 16, the substrate 17 and the capacitor 18 is fixed. .

このカバー１９の軸方向他端を閉塞する閉塞板１９ａの、中央よりの所定径範囲は切り欠かれており、その切欠部には例えば樹脂等により形成され、圧力測定装置２００で検出された検出圧力値を外部に出力するためのコネクタ２０が挿入されている。   A predetermined diameter range from the center of the closing plate 19a that closes the other end of the cover 19 in the axial direction is notched, and the notch is formed of, for example, resin and detected by the pressure measuring device 200. A connector 20 for outputting the pressure value to the outside is inserted.

コネクタ２０の一端はカバー１９内においてカバー１９に固定され、コネクタ２０の他端はカバー１９から外部へ露出している。   One end of the connector 20 is fixed to the cover 19 in the cover 19, and the other end of the connector 20 is exposed from the cover 19 to the outside.

このコネクタ２０の内部には、例えばインサート成型により挿入された棒状のターミナル２１を有している。このターミナル２１は、例えば電源用、接地用、信号出力用の３本で構成され、各ターミナル２１の一端は前記基板１７に接続されており、他端が図示省略の外部コネクタに接続されることによって、自動車のＥＣＵ等へ配線部材を介して電気的に接続される。   The connector 20 has a rod-like terminal 21 inserted by, for example, insert molding. The terminal 21 is composed of, for example, three terminals for power supply, grounding, and signal output. One end of each terminal 21 is connected to the substrate 17 and the other end is connected to an external connector (not shown). Is electrically connected to the ECU or the like of the automobile via a wiring member.

また図９は、従来の圧力検出装置の他の例を示しており、図８と同一部分は同一符号をもって示している。図９では、図８の起歪体１５を用いることなく、矩形溝を設けたダイアフラム２４に直接歪検出素子１６を接合して構成しており、その他の部分は図８と同様に構成されている。   FIG. 9 shows another example of a conventional pressure detecting device, and the same parts as those in FIG. 8 are denoted by the same reference numerals. In FIG. 9, the strain detecting element 16 is directly joined to the diaphragm 24 provided with the rectangular groove without using the strain generating body 15 of FIG. 8, and other parts are configured in the same manner as in FIG. 8. Yes.

すなわち、圧力導入部１２の圧力導入孔の、ダイアフラム２４側の歪検出素子１６に対向する先端部１２ｈｂｔを、ダイアフラム２４の矩形溝形状と同一に形成し、その先端部１２ｈｂｔと対向するダイアフラム２４の上表面に歪検出素子１６を直接配設している。   That is, the front end portion 12hbt of the pressure introduction hole of the pressure introduction portion 12 facing the strain detection element 16 on the diaphragm 24 side is formed in the same shape as the rectangular groove shape of the diaphragm 24, and the diaphragm 24 facing the front end portion 12hbt of the diaphragm 24 is formed. The strain detection element 16 is directly disposed on the upper surface.

この図９の構成では、ダイアフラム２４の矩形溝によって、ダイアフラム２４にｘ方向−ｙ方向の歪差が生じる。また、ダイアフラム２４に矩形溝を設けているため、成形加工に手間がかかる。   In the configuration of FIG. 9, the rectangular groove of the diaphragm 24 causes a distortion difference in the x direction and the y direction in the diaphragm 24. Further, since the diaphragm 24 is provided with a rectangular groove, it takes time and effort for the molding process.

また従来の圧力検出装置としては、例えば特許文献１、２に記載のものが提案されている。   Moreover, as a conventional pressure detection apparatus, the thing of patent document 1, 2 is proposed, for example.

特許文献１には、「本体に設けられたダイアフラムと、絶縁基板の一面にストレインゲージを設けて構成され、前記ダイアフラムにあって圧力を受ける側とは反対の反受圧面側にこのダイアフラムと共に変形するように取り付けられたゲージ基板とを具備して成る圧力センサ。」が記載されている。   Patent Document 1 states that “a diaphragm provided on a main body and a strain gauge is provided on one surface of an insulating substrate, and the diaphragm is deformed together with the diaphragm on the opposite pressure receiving surface side opposite to the pressure receiving side. A pressure sensor comprising a gauge substrate mounted in such a manner.

また特許文献２には、「薄板状のセンサプレートと、このセンサプレートに取り付けられた複数の歪みゲージとを具備する荷重センサにおいて、前記センサプレートは、その一軸方向の両端が、このセンサプレートを任意の対象物に固定させる固定部となされる一方で、その中心点が変位乃至荷重をこのセンサプレートに伝達せしめる伝達部となされ、前記歪みゲージを前記中心点に対して点対称となる位置に配置すると共に、点対称となる位置に配された歪みゲージ同士を電気的に並列又は直列に接続してゲージペアを構成し、さらに各ゲージペア同士を電気的に直列に接続して、これら歪みゲージでブリッジ回路を構成したことを特徴とする荷重センサ。」が記載されている。   Patent Document 2 states that, in a load sensor including a thin plate-shaped sensor plate and a plurality of strain gauges attached to the sensor plate, both ends in one axial direction of the sensor plate are attached to the sensor plate. While the fixed portion is fixed to an arbitrary object, the central point is a transmitting portion that transmits displacement or load to the sensor plate, and the strain gauge is in a point-symmetrical position with respect to the central point. In addition, the strain gauges arranged at point-symmetric positions are electrically connected in parallel or in series to form a gauge pair, and each gauge pair is electrically connected in series. A load sensor characterized in that a bridge circuit is configured "is described.

特開平８−６２０７５号公報JP-A-8-62075 再公表特許ＷＯ２００６／００６６７７号公報Republished patent WO2006 / 006677

特許文献１、２を含む従来の圧力検出装置は、ｙ軸方向の歪の影響により、ｘ軸方向歪とｙ軸方向歪の差で決まる歪検出素子の出力感度は悪いものであった。   Conventional pressure detection devices including Patent Documents 1 and 2 have poor output sensitivity of the strain detection element determined by the difference between the x-axis direction strain and the y-axis direction strain due to the influence of the strain in the y-axis direction.

本発明は上記課題を解決するものであり、その目的は、ｙ軸方向の歪を低減して歪検出素子の出力感度を向上させることができる圧力検出装置を提供することにある。   The present invention solves the above-described problems, and an object of the present invention is to provide a pressure detection device capable of reducing the strain in the y-axis direction and improving the output sensitivity of the strain detection element.

上記課題を解決するために、例えば特許請求の範囲に記載の構成を採用する。本願は上記課題を解決する手段を複数含んでいるが、その一例を挙げるならば、「測定対象機器に装着された圧力検出装置であって、圧力媒体の圧力がダイアフラムを介して印加され、その圧力に応じて歪を発生する起歪体と、その起歪体の受圧面と反対の面に接合された歪検出素子とを有する圧力検出装置において、
前記起歪体はｘ軸、ｙ軸による平面を有した矩形状に形成され、起歪体の受圧面にはｙ軸に沿ったリブが形成されている」ことを特徴とする。 In order to solve the above problems, for example, the configuration described in the claims is adopted. The present application includes a plurality of means for solving the above-described problems. For example, “This is a pressure detecting device mounted on a measurement target device, and the pressure of a pressure medium is applied via a diaphragm. In a pressure detection device having a strain generating body that generates strain according to pressure, and a strain detection element bonded to a surface opposite to the pressure receiving surface of the strain generating body,
The strain body is formed in a rectangular shape having a plane with x and y axes, and a rib along the y axis is formed on the pressure receiving surface of the strain body.

本発明によれば、リブによって起歪体のｙ軸方向の歪が低減され、歪検出素子の出力感度を最大化することができる。上記した以外の構成及び効果は以下の実施形態の説明により明らかにされる。   According to the present invention, the ribs reduce the strain in the y-axis direction of the strain generating body, and the output sensitivity of the strain detection element can be maximized. Configurations and effects other than those described above will become apparent from the following description of embodiments.

本発明の一実施形態例による圧力測定装置全体の断面構成図。The cross-sectional block diagram of the whole pressure measuring device by the example of 1 embodiment of this invention. 図１の要部である起歪体の斜視図。The perspective view of the strain body which is the principal part of FIG. 図１の要部である起歪体とダイアフラムの接合状態を表し、（ａ）は要部斜視図、（ｂ）は面接合の実施例における断面図、（ｃ）は点接合の実施例における断面図。FIG. 1 shows a joining state of a strain generating body and a diaphragm, which are main parts of FIG. 1, (a) is a perspective view of main parts, (b) is a cross-sectional view in an embodiment of surface bonding, and (c) is in an embodiment of point bonding. Sectional drawing. 本発明の実施形態例における、受圧力により起歪体が変形したようすを示す説明図。Explanatory drawing which shows the deformation body by the pressure receiving force in the example of embodiment of this invention. 圧力検出装置におけるリブ高さによる初期状態を表し、（ａ）は本発明の実施形態例における中央側のリブ高さ＞両端側のリブ高さの場合の要部断面図、（ｂ）は中央側のリブ高さ＜両端側のリブ高さの場合の要部断面図。The initial state by the rib height in the pressure detection device is represented, (a) is a cross-sectional view of the main part when the rib height on the central side in the embodiment example of the present invention> the rib height on both ends, and (b) is the center. The principal part sectional drawing in the case of rib height of the side <rib height of both ends. 図１の要部である歪検出素子、起歪体およびダイアフラムのようすを表し、（ａ）は要部斜視図、（ｂ）は加圧時の断面図。1A and 1B show a strain detection element, a strain generating body, and a diaphragm, which are the main parts of FIG. 1, in which FIG. 1A is a perspective view of the main parts, and FIG. 本発明の他の実施形態例における歪検出素子、起歪体およびダイアフラムのようすを表し、（ａ）は要部斜視図、（ｂ）は加圧時の断面図。The distortion detection element in another example of the embodiment of the present invention, a strain generating body, and the appearance of a diaphragm are expressed, (a) is a principal part perspective view, and (b) is a sectional view at the time of pressurization. 従来の圧力測定装置の一例を示す全体構成図。The whole block diagram which shows an example of the conventional pressure measuring apparatus. 従来の圧力測定装置の他の例を示し、（ａ）は要部平面図、（ｂ）は（ａ）のＤ−Ｄ断面図。The other example of the conventional pressure measuring device is shown, (a) is a principal part top view, (b) is DD sectional drawing of (a).

以下、図面を参照しながら本発明の実施形態について説明するが、本発明は下記の実施形態例に限定されるものではない。図１は、本発明を図８の圧力測定装置に適用した実施形態における圧力測定装置１００全体の構成を示し、図８と同一部分は同一符号をもって示している。   Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments. FIG. 1 shows the overall configuration of a pressure measuring device 100 in an embodiment in which the present invention is applied to the pressure measuring device of FIG. 8, and the same parts as those in FIG.

ダイアフラム１４の上部表面には、リブ２５Ｌ１，２５Ｌ２ａ，２５Ｌ２ｂおよび突起部３０が形成された起歪体２５が設けられている。起歪体２５のダイアフラム１４とは反対側の面の中央には歪検出素子１６が接合され、歪検出素子１６の周辺には基板１７を介して複数の電子部品２８が中心軸から対称に配設されている。   On the upper surface of the diaphragm 14, a strain generating body 25 in which ribs 25L1, 25L2a, 25L2b and projections 30 are formed is provided. A strain detecting element 16 is joined to the center of the surface of the strain generating body 25 opposite to the diaphragm 14, and a plurality of electronic components 28 are arranged symmetrically from the central axis via the substrate 17 around the strain detecting element 16. It is installed.

起歪体２５は、圧力導入孔１２ｈａを介して導入された圧力によって変形して歪を生じ、歪検出素子１６は起歪体２５の変形（歪）に応じた電気信号を出力する複数の歪抵抗ブリッジを備えている。   The strain generating body 25 is deformed by the pressure introduced through the pressure introducing hole 12ha to generate strain, and the strain detecting element 16 outputs a plurality of strains that output an electrical signal corresponding to the deformation (strain) of the strain generating body 25. Has a resistance bridge.

起歪体２５は、図１に対して天地を逆にして示した図２のように、ｘ軸、ｙ軸による平面を有した矩形状に形成され、ダイアフラム１４側の面のｘ軸方向中央にリブ２５Ｌ１がｙ軸に沿って形成され、ｘ軸方向両端にリブ２５Ｌ２ａ，２５Ｌ２ｂがｙ軸に沿って形成されている。そして中央側のリブ２５Ｌ１のｙ軸方向中央には突起部３０が設けられている。   The strain body 25 is formed in a rectangular shape having a plane by the x-axis and the y-axis as shown in FIG. 2 with the top and bottom reversed with respect to FIG. 1, and the center in the x-axis direction of the surface on the diaphragm 14 side. Ribs 25L1 are formed along the y-axis, and ribs 25L2a and 25L2b are formed along the y-axis at both ends in the x-axis direction. And the protrusion part 30 is provided in the y-axis direction center of the rib 25L1 of the center side.

したがって、起歪体２５は、中央側のリブ２５Ｌ１から突設された突起部３０の端部（端点）と、両端側のリブ２５Ｌ２ａ，２５Ｌ２ｂのダイアフラム１４に対向する側の端面とがダイアフラム１４に接触し、中央側のリブ２５Ｌ１（の突起部３０）のみが例えば金属溶接される。またこれに限らず、両端側のリブ２５Ｌ２ａ，２５Ｌ２ｂの端面もダイアフラム１４に溶接してもよい。   Therefore, in the strain body 25, the end portion (end point) of the projecting portion 30 protruding from the central rib 25L1 and the end surfaces of the ribs 25L2a and 25L2b on both sides facing the diaphragm 14 are formed on the diaphragm 14. Only the central rib 25L1 (projecting portion 30) is in contact with, for example, metal. In addition, the end faces of the ribs 25L2a and 25L2b on both ends may be welded to the diaphragm 14 as well.

起歪体２５のｙ軸方向に沿って設けられたリブ２５Ｌ１，２５Ｌ２ａ，２５Ｌ２ｂは、加圧により変形が生じる際、起歪体２５のｙ軸方向の歪を低減させるので、ｘ軸方向歪とｙ軸方向歪の差で決まる歪検出素子１６の出力感度を最大化することができる。   The ribs 25L1, 25L2a, 25L2b provided along the y-axis direction of the strain generating body 25 reduce the strain in the y-axis direction of the strain generating body 25 when deformation occurs due to pressurization. The output sensitivity of the strain detection element 16 determined by the difference in the y-axis direction strain can be maximized.

前記リブ２５Ｌ１，２５Ｌ２ａ，２５Ｌ２ｂの長さを変えることにより、歪検出素子１６の出力感度を調整することができる。また、リブ２５Ｌ１および２５Ｌ２ａ間の空隙と、リブ２５Ｌ１および２５Ｌ２ｂ間の空隙によって、歪易く作用する。   By changing the length of the ribs 25L1, 25L2a, 25L2b, the output sensitivity of the strain detecting element 16 can be adjusted. Further, the gap between the ribs 25L1 and 25L2a and the gap between the ribs 25L1 and 25L2b act easily.

また、中央側のリブ２５Ｌ１の中央部に設けた突起部３０とダイアフラム１４との接合が点接合となるため、起歪体２５が歪易くなり、大きな変位量を得ることができ、歪検出素子１６の出力感度を高めている。   Further, since the joint between the protrusion 30 provided at the center of the central rib 25L1 and the diaphragm 14 is a point joint, the strain generating body 25 is easily distorted, and a large amount of displacement can be obtained. 16 output sensitivity is increased.

尚、中央側のリブ２５Ｌ１に突起部３０を設けない構成としてもよい。この場合は中央側のリブ２５Ｌ１の端面がダイアフラム１４に例えば金属溶接される。   In addition, it is good also as a structure which does not provide the projection part 30 in the rib 25L1 of the center side. In this case, the end face of the central rib 25L1 is metal-welded to the diaphragm 14, for example.

図３は、ダイアフラム１４と起歪体２５の接合のようすを表しており、リブ２５Ｌ１に突起部３０を設けない場合は図３（ｂ）のようにリブ２５Ｌ１の端面とダイアフラム１４が面接合し、突起部３０を設けた場合は図３（ｃ）のように突起部３０とダイアフラム１４が点接合する。図３では起歪体２５上の基板１７、電子部品２８等は図示省略している。図３（ｂ）の面接合の場合、図３（ｃ）の点接合の場合よりも若干加圧時の起歪体２５の変位量は少ないが、ｙ軸方向の歪低減作用はある。   FIG. 3 shows how the diaphragm 14 and the strain generating body 25 are joined. When the protrusion 30 is not provided on the rib 25L1, the end face of the rib 25L1 and the diaphragm 14 are surface joined as shown in FIG. When the protrusion 30 is provided, the protrusion 30 and the diaphragm 14 are point-joined as shown in FIG. In FIG. 3, the substrate 17, the electronic component 28 and the like on the strain generating body 25 are not shown. In the case of the surface bonding shown in FIG. 3B, the amount of displacement of the strain generating body 25 during pressurization is slightly smaller than in the case of the point bonding shown in FIG. 3C, but there is a strain reducing effect in the y-axis direction.

前記起歪体２５上において、前記複数の電子部品２８を中心軸から対称に配設していることによって、加圧時の起歪体２５の応力分布は図４に示すように均一に保たれる。図４は加圧時の起歪体２５の変形のようすを表しており、中央側のリブ２５Ｌ１先端の突起部３０、および起歪体２５と電子部品２８の間の基板１７は図示省略している。   By arranging the plurality of electronic components 28 symmetrically from the central axis on the strain body 25, the stress distribution of the strain body 25 during pressurization is kept uniform as shown in FIG. It is. FIG. 4 shows the deformation of the strain generating body 25 during pressurization. The protrusion 30 at the tip of the central rib 25L1 and the substrate 17 between the strain generating body 25 and the electronic component 28 are not shown. Yes.

このように電子部品２８を中心軸から対称に配設することにより電子部品２８と起歪体２５を一体化することができ、生産性が向上する。   Thus, by arranging the electronic component 28 symmetrically from the central axis, the electronic component 28 and the strain body 25 can be integrated, and productivity is improved.

前記中央側のリブ２５Ｌ１と両端側のリブ２５Ｌ２ａ（ｂ）の高さ関係は、図５（ａ）に示すようにリブ２５Ｌ１高さ＞リブ２５Ｌ２ａ（ｂ）高さに設定しておく。図５はリブ高さによる初期状態を表しており、ダイアフラム１４、起歪体２５および歪検出素子１６のみを図示している。   The height relationship between the rib 25L1 on the center side and the ribs 25L2a (b) on both ends is set such that the height of the rib 25L1> the height of the rib 25L2a (b) as shown in FIG. FIG. 5 shows an initial state depending on the rib height, and only the diaphragm 14, the strain generating body 25, and the strain detecting element 16 are illustrated.

図５（ａ）のように設定しておくことにより、加圧前の初期に予め歪検出素子１６に引張を生じさせることができ（プリ荷重をかけることができ）、加圧によっても歪検出素子１６の出力を安定させることができる。   By setting as shown in FIG. 5A, tension can be generated in the strain detection element 16 in advance in the initial stage before pressurization (a preload can be applied), and strain can also be detected by pressurization. The output of the element 16 can be stabilized.

これに対して、図５（ｂ）に示すようにリブ２５Ｌ１高さ＜リブ２５Ｌ２ａ（ｂ）高さに設定した場合は、加圧することで、歪検出素子１６には圧縮→引張になる変極点が生じるため、その変極点において出力が不安定となってしまう。   On the other hand, as shown in FIG. 5B, when the height of the rib 25L1 <the height of the rib 25L2a (b) is set, an inflection point in which the strain detecting element 16 is compressed → tensified by applying pressure. Therefore, the output becomes unstable at the inflection point.

また前記リブは、中央側のリブ２５Ｌ１のみ設け、両端側のリブ２５Ｌ２ａ，２５Ｌ２ｂを設けない構成としてもよい。この場合でも起歪体２５に大きな変位量が得られ歪検出素子１６の出力感度は高い。   In addition, the rib may be configured such that only the center side rib 25L1 is provided and the both end side ribs 25L2a and 25L2b are not provided. Even in this case, a large amount of displacement is obtained in the strain generating body 25, and the output sensitivity of the strain detecting element 16 is high.

図６は起歪体２５のｘ軸方向両端にリブ２５Ｌ２ａ，２５Ｌ２ｂを各々設け、中央側に１個のリブ２５Ｌ１を設けた場合の加圧時の起歪体２５の変形のようすを表し、突起部３０、基板１７および電子部品２８等は図示省略している。   FIG. 6 shows the deformation of the strain body 25 during pressurization when ribs 25L2a and 25L2b are provided at both ends in the x-axis direction of the strain body 25 and one rib 25L1 is provided at the center. The portion 30, the substrate 17, the electronic component 28, etc. are not shown.

図６（ｂ）のようにｘ軸方向中央側のリブ２５Ｌ１が１個である場合、加圧時に３点曲げ状態となり起歪体２５に大きな変位量が得られる。また起歪体２５のｙ軸方向に沿って設けるリブの個数は４個以上設けてもよい。例えば、加圧時の起歪体２５の変形のようすを表す図７のように、ｘ軸方向中央側に設けるリブを、所定間隔隔てた２個のリブ２５Ｌ１ａ，２５Ｌ１ｂとしてもよい。図７では突起部３０、基板１７および電子部品２８等は図示省略している。   When the number of ribs 25L1 on the center side in the x-axis direction is one as shown in FIG. 6B, a three-point bending state occurs during pressurization, and a large amount of displacement is obtained in the strain body 25. Further, the number of ribs provided along the y-axis direction of the strain body 25 may be four or more. For example, as shown in FIG. 7 showing the deformation of the strain body 25 at the time of pressurization, the ribs provided on the center side in the x-axis direction may be two ribs 25L1a and 25L1b separated by a predetermined distance. In FIG. 7, the protrusion 30, the substrate 17, the electronic component 28, and the like are not shown.

図７（ｂ）の場合、加圧時に４点曲げ状態となり応力集中が低減される。また、起歪体２５上に配設する歪検出素子１６の位置ずれに対してロバスト性がある。さらに４個よりも多くリブを設ける場合は、ｘ軸方向中央側のリブ（図７（ｂ）では２５Ｌ１ａ，２５Ｌ１ｂ）を分割するような構造になるため、リブの総個数は偶数個（偶数曲げ）とする。このように起歪体２５に設けるリブの個数を４個以上の偶数個とすることにより、応力集中がさらに低減される。   In the case of FIG.7 (b), it will be in a 4-point bending state at the time of pressurization, and stress concentration will be reduced. Further, there is robustness against displacement of the strain detection element 16 disposed on the strain generating body 25. When more ribs are provided, the ribs on the center side in the x-axis direction (25L1a and 25L1b in FIG. 7B) are divided so that the total number of ribs is an even number (even bending) ). In this way, the stress concentration is further reduced by making the number of ribs provided on the strain body 25 an even number of 4 or more.

１１…圧力ポート
１２…圧力導入部
１２ａ…圧力導入口
１２ｈａ…圧力導入孔
１２ｈｂｔ…先端部
１３…フランジ
１４…ダイアフラム
１５、２５…起歪体
１６…歪検出素子
１７…基板
１８…コンデンサ
１９…カバー
１９ａ…閉塞板
２０…コネクタ
２１…ターミナル
２５Ｌ１，２５Ｌ１ａ，２５Ｌ１ｂ，２５Ｌ２ａ，２５Ｌ２ｂ…リブ
２８…電子部品
３０…突起部
１００，２００…圧力測定装置 DESCRIPTION OF SYMBOLS 11 ... Pressure port 12 ... Pressure introduction part 12a ... Pressure introduction port 12ha ... Pressure introduction hole 12hbt ... Tip part 13 ... Flange 14 ... Diaphragm 15, 25 ... Strain body 16 ... Strain detection element 17 ... Substrate 18 ... Capacitor 19 ... Cover DESCRIPTION OF SYMBOLS 19a ... Blocking board 20 ... Connector 21 ... Terminal 25L1, 25L1a, 25L1b, 25L2a, 25L2b ... Rib 28 ... Electronic component 30 ... Projection part 100, 200 ... Pressure measuring device

Claims (7)

測定対象機器に装着された圧力検出装置であって、圧力媒体の圧力がダイアフラムを介して印加され、その圧力に応じて歪を発生する起歪体と、その起歪体の受圧面と反対の面に接合された歪検出素子とを有する圧力検出装置において、
前記起歪体はｘ軸、ｙ軸による平面を有した矩形状に形成され、起歪体の受圧面にはｙ軸に沿ったリブが形成されていることを特徴とする圧力検出装置。 A pressure detection device mounted on a measurement target device, in which a pressure of a pressure medium is applied via a diaphragm and generates a strain according to the pressure, and is opposite to a pressure receiving surface of the strain generating body. In a pressure detection device having a strain detection element bonded to a surface,
The pressure sensing device is characterized in that the strain body is formed in a rectangular shape having a plane with x and y axes, and a rib along the y axis is formed on the pressure receiving surface of the strain body. 前記リブは起歪体のｘ軸方向中央に設けられていることを特徴とする請求項１に記載の圧力検出装置。   The pressure detection device according to claim 1, wherein the rib is provided at a center of the strain generating body in the x-axis direction. 前記リブは起歪体のｘ軸方向両端にも設けられていることを特徴とする請求項２に記載の圧力検出装置。   The pressure detection device according to claim 2, wherein the rib is provided at both ends of the strain body in the x-axis direction. 前記ｘ軸方向中央のリブの高さはｘ軸方向両端のリブの高さよりも高く形成されていることを特徴とする請求項３に記載の圧力検出装置。   The pressure detection device according to claim 3, wherein the height of the rib in the center in the x-axis direction is higher than the height of the ribs at both ends in the x-axis direction. 前記ｘ軸方向中央のリブのｙ軸方向中央には、突起部が設けられていることを特徴とする請求項２ないし４のいずれか１項に記載の圧力検出装置。   5. The pressure detection device according to claim 2, wherein a protrusion is provided at a center in the y-axis direction of the rib in the center in the x-axis direction. 前記リブは４個以上の偶数個設けられていることを特徴とする請求項１ないし５のいずれか１項に記載の圧力検出装置。   The pressure detecting device according to any one of claims 1 to 5, wherein an even number of four or more ribs are provided. 前記起歪体の歪検出素子接合面における歪検出素子の周辺には、複数の電子部品が中心軸から対称に配設されていることを特徴とする請求項１ないし６のいずれか１項に記載の圧力検出装置。   7. The electronic device according to claim 1, wherein a plurality of electronic components are arranged symmetrically from the central axis around the strain detection element on the strain detection element joint surface of the strain generating body. The pressure detection apparatus as described.
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Publication number Priority date Publication date Assignee Title
JPS57147024A (en) * 1981-03-07 1982-09-10 Kyowa Dengiyou:Kk Assembly of diaphragm and strain inducer for signal converter
US6044711A (en) * 1997-01-10 2000-04-04 Psi-Tronix, Inc. Force sensing apparatus
JP2004053344A (en) * 2002-07-18 2004-02-19 Tem-Tech Kenkyusho:Kk Metal diaphragm pressure sensor of load conversion type
WO2006006677A1 (en) * 2004-07-14 2006-01-19 Nagano Keiki Co., Ltd. Load sensor and method of producing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147024A (en) * 1981-03-07 1982-09-10 Kyowa Dengiyou:Kk Assembly of diaphragm and strain inducer for signal converter
US6044711A (en) * 1997-01-10 2000-04-04 Psi-Tronix, Inc. Force sensing apparatus
JP2004053344A (en) * 2002-07-18 2004-02-19 Tem-Tech Kenkyusho:Kk Metal diaphragm pressure sensor of load conversion type
WO2006006677A1 (en) * 2004-07-14 2006-01-19 Nagano Keiki Co., Ltd. Load sensor and method of producing the same

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