JP2014520273A - 差動熱量測定用センサとその製造方法 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01K17/00—Measuring quantity of heat
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Abstract
Description
−第1表面と第2表面を有し、低熱伝導度の材料から作られた膜と、
−高熱拡散係数を示す材料で作られ、膜の第1表面に接触する膜用支持手段を備え、
温度測定セルは膜の第1表面の上に設置された少くとも2つの活性温度測定要素を備え、2つのセルは前記セルの膜の第2表面が互いに対面する方法で組立てられるように意図され、測定を実施するために用いられるサンプルと基準が2つの膜の間に、第2表面に直接接触して設置可能であり、前記セルの少くとも1つは膜の第1表面に対面する閉鎖手段を備え、ガス用の自由空間が前記閉鎖手段と膜との間に形成されてなるセンサに関する。
Claims (13)
- 温度測定セル(1)と他のセル(2)の2つのセルを備えた差動熱量測定センサであって、各セルは、
−第1表面と第2表面を有し、低熱伝導度の材料から作られた膜(10,20)と、
−高熱拡散係数を示す材料で作られ、膜の第1表面(100,200)に接触する膜用支持手段(11,21)を備え、
温度測定セル(1)は膜(10)の第1表面(100)の上に設置された少くとも2つの活性温度測定要素(12,13)を備え、2つのセル(1,2)は前記セルの膜の第2表面(101,201)が互いに対面する方法で組立てられるように意図され、測定を実施するために用いられるサンプルと基準が2つの膜の間に、第2表面(101,201)に直接接触して設置可能であり、前記セルの少くとも1つは膜(10,20)の第1表面に対面する閉鎖手段(14,24)を備え、ガス用の自由空間(16,26)が前記閉鎖手段と膜との間に形成されてなるセンサ。 - 他のセル(2)は加熱セルであり、少くとも2つの活性加熱要素(22,23)がこの他のセルの膜(20)の第1表面(200)の上に設置され、前記活性加熱要素の各々は前記活性温度測定要素(12,13)の1つと実質的に一列に並べられ、前記2つのセルが一体に組立てられるとき、測定を実行するために用いられるサンプルと基準が2つのセルの各々の2つの活性要素の間に設置可能である請求項1記載のセンサ。
- 少くとも1つのセルの膜(10,20)の第2表面(101,201)は、前記少くとも2つの活性要素(12,13;22,23)と向き合い、かつ、高い熱伝導度を示す材料で作られた層(121,131)を備える請求項1又は2記載のセンサ。
- 前記支持手段(11,21)は、膜(10,20)の周辺に設置される請求項1〜3のいずれか1つに記載のセンサ。
- 各セル(1,2)の活性要素(12,13;22,23)は電気絶縁材料の層(15,25)で覆われる請求項1〜4のいずれか1つに記載のセンサ。
- 請求項1〜5のいずれか1つに記載の測定センサを備え、前記センサと冷却手段が配置されたオーブンを設けた差動熱量計。
- 低熱伝導度の材料から作られた膜(10)を備える温度測定セルと、他のセルの2つのセルを製造することからなり、少くとも2つの活性要素(12,13)が膜(10)の第1表面(100)の上に同時に製造される工程(a1)と、高熱拡散係数を示す支持手段が膜の第1表面(100)の上に固定される工程(a2)とを備え、他のセルは先の工程(a2)を実行することによって得られ、前記2つのセルは、前記2つのセルの各膜の第2表面が互いに対面するように一体的に組立てられることを意図されている、請求項1〜5のいずれか1つに記載の測定センサを製造する方法。
- 工程(a1)の前に、膜がセラミック材料から作られたリング(11')の上に固定され、このリングは膜の第2表面(101)に接触する工程(a0)が実行され、工程(a1)の後に工程(a2)を実行し、次にリング(11')が除去される工程(a3)を実行することからなる請求項7記載の方法。
- 他のセルが前の工程(a1)と(a2)を実行することによって得られる加熱セル(2)であり、少くとも2つの活性加熱要素が工程(a1)、可能であれば工程(a0)と(a3)において製造される請求項7又は8に記載の方法。
- 工程(a1)の後で、電気絶縁樹脂の層(15,25)を堆積し、2つのセル(1,2)の少くとも1つの活性要素を被覆することからなる補足工程を備える請求項7〜9のいずれか1つに記載の方法。
- 工程(a1)の後で、2つのセル(1,2)の少くとも1つの膜(10,20)の第2表面(101,201)の上に、高熱伝導度を示す層(121,131)を堆積し、対応する活性要素(12,13;22,23)と向い合わせる他の補足工程を備える請求項7〜10のいずれか1つに記載の方法。
- 温度測定セル(1)の製造のために、工程(a1)は、金属の層の堆積工程(b1)、リソグラフィ工程(b2)、およびイオンエッチング工程(b3)を備える請求項7〜11のいずれか1つに記載の方法。
- 加熱セルの製造のために、工程(a1)は、金属の層の堆積の工程(b'1)、リソグラフィ工程(b'2)、およびウェットエッチング工程(b'3)を備える請求項7〜11のいずれか1つに記載の方法。
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FR1155432 | 2011-06-21 | ||
FR1155432A FR2977034B1 (fr) | 2011-06-21 | 2011-06-21 | Capteur de mesure calorimetrique differentielle et procede de fabrication |
PCT/IB2012/053057 WO2012176107A1 (fr) | 2011-06-21 | 2012-06-18 | Capteur de mesure calorimétrique différentielle et procédé de fabrication |
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EP (1) | EP2724132B1 (ja) |
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Citations (4)
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JPH05223762A (ja) * | 1991-11-01 | 1993-08-31 | Mitsui Toatsu Chem Inc | 温度波による熱分析方法および装置 |
US6193413B1 (en) * | 1999-06-17 | 2001-02-27 | David S. Lieberman | System and method for an improved calorimeter for determining thermodynamic properties of chemical and biological reactions |
JP2005331514A (ja) * | 2004-05-17 | 2005-12-02 | General Electric Co <Ge> | ナノ熱量計デバイス及び関連する製造及び使用方法 |
US20070286769A1 (en) * | 2006-06-07 | 2007-12-13 | Vlassak Joost J | Parallel nano-differential scanning calorimetry |
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US6079873A (en) | 1997-10-20 | 2000-06-27 | The United States Of America As Represented By The Secretary Of Commerce | Micron-scale differential scanning calorimeter on a chip |
US7141210B2 (en) | 2002-04-01 | 2006-11-28 | Palo Alto Research Center Incorporated | Apparatus and method for a nanocalorimeter for detecting chemical reactions |
US20050242341A1 (en) * | 2003-10-09 | 2005-11-03 | Knudson Christopher T | Apparatus and method for supporting a flexible substrate during processing |
US7626144B2 (en) * | 2005-09-29 | 2009-12-01 | Mikhail Merzliakov | Method and apparatus for rapid temperature changes |
US9176012B2 (en) * | 2012-04-16 | 2015-11-03 | David Samuel Lieberman | Methods and systems for improved membrane based calorimeters |
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JPH05223762A (ja) * | 1991-11-01 | 1993-08-31 | Mitsui Toatsu Chem Inc | 温度波による熱分析方法および装置 |
US6193413B1 (en) * | 1999-06-17 | 2001-02-27 | David S. Lieberman | System and method for an improved calorimeter for determining thermodynamic properties of chemical and biological reactions |
JP2005331514A (ja) * | 2004-05-17 | 2005-12-02 | General Electric Co <Ge> | ナノ熱量計デバイス及び関連する製造及び使用方法 |
US20070286769A1 (en) * | 2006-06-07 | 2007-12-13 | Vlassak Joost J | Parallel nano-differential scanning calorimetry |
Non-Patent Citations (1)
Title |
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JPN7016000739; J.-L. Garden et al.: 'Thermodynamics of small systems by nanocalorimetry: From physical to biological nano-objects' THERMOCHIMICA ACTA vol.492, 2009, p.16-28 * |
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ES2731632T3 (es) | 2019-11-18 |
US20140140365A1 (en) | 2014-05-22 |
FR2977034A1 (fr) | 2012-12-28 |
JP6059720B2 (ja) | 2017-01-11 |
EP2724132B1 (fr) | 2019-03-20 |
US9612168B2 (en) | 2017-04-04 |
EP2724132A1 (fr) | 2014-04-30 |
WO2012176107A1 (fr) | 2012-12-27 |
FR2977034B1 (fr) | 2016-06-03 |
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