JP2014195048A - 照明光学系、露光装置及びデバイスの製造方法 - Google Patents

照明光学系、露光装置及びデバイスの製造方法 Download PDF

Info

Publication number
JP2014195048A
JP2014195048A JP2014020750A JP2014020750A JP2014195048A JP 2014195048 A JP2014195048 A JP 2014195048A JP 2014020750 A JP2014020750 A JP 2014020750A JP 2014020750 A JP2014020750 A JP 2014020750A JP 2014195048 A JP2014195048 A JP 2014195048A
Authority
JP
Japan
Prior art keywords
illumination
light source
light
optical system
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014020750A
Other languages
English (en)
Japanese (ja)
Inventor
Noboru Osaka
昇 大阪
Hitoshi Yoshioka
均 吉岡
Ryosuke Fukuoka
亮介 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2014020750A priority Critical patent/JP2014195048A/ja
Priority to TW103105099A priority patent/TW201433826A/zh
Priority to KR1020140023155A priority patent/KR20140108149A/ko
Publication of JP2014195048A publication Critical patent/JP2014195048A/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
JP2014020750A 2013-02-28 2014-02-05 照明光学系、露光装置及びデバイスの製造方法 Pending JP2014195048A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014020750A JP2014195048A (ja) 2013-02-28 2014-02-05 照明光学系、露光装置及びデバイスの製造方法
TW103105099A TW201433826A (zh) 2013-02-28 2014-02-17 照明光學系統、曝光裝置、以及裝置之製造方法
KR1020140023155A KR20140108149A (ko) 2013-02-28 2014-02-27 조명 광학계, 노광 장치 및 디바이스의 제조 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013040038 2013-02-28
JP2013040038 2013-02-28
JP2014020750A JP2014195048A (ja) 2013-02-28 2014-02-05 照明光学系、露光装置及びデバイスの製造方法

Publications (1)

Publication Number Publication Date
JP2014195048A true JP2014195048A (ja) 2014-10-09

Family

ID=51840088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014020750A Pending JP2014195048A (ja) 2013-02-28 2014-02-05 照明光学系、露光装置及びデバイスの製造方法

Country Status (2)

Country Link
JP (1) JP2014195048A (zh)
TW (1) TW201433826A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016129426A1 (ja) * 2015-02-12 2017-07-20 富士フイルム株式会社 全固体二次電池、それに用いる固体電解質組成物、これを用いた電池用電極シート、ならびに電池用電極シートおよび全固体二次電池の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6771997B2 (ja) * 2016-08-24 2020-10-21 キヤノン株式会社 露光装置、露光方法、および物品製造方法
JP6970548B2 (ja) * 2016-09-09 2021-11-24 キヤノン株式会社 照明光学系、露光装置、及び物品製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016129426A1 (ja) * 2015-02-12 2017-07-20 富士フイルム株式会社 全固体二次電池、それに用いる固体電解質組成物、これを用いた電池用電極シート、ならびに電池用電極シートおよび全固体二次電池の製造方法

Also Published As

Publication number Publication date
TW201433826A (zh) 2014-09-01

Similar Documents

Publication Publication Date Title
US11467501B2 (en) Image-forming optical system, exposure apparatus, and device producing method
US7471456B2 (en) Optical integrator, illumination optical device, exposure device, and exposure method
US9280054B2 (en) Illumination optical system, exposure apparatus, and method of manufacturing device
TWI579657B (zh) 光學積分器、照明光學系統、曝光裝置以及元件製造方法
KR20110000619A (ko) 공간 광 변조 유닛, 조명 광학계, 노광 장치, 및 디바이스 제조 방법
EP2253997A2 (en) Illumination system for a microlithographic contact and proximity exposure apparatus
US8149386B2 (en) Illumination optical system, exposure apparatus using the same and device manufacturing method
US8780328B2 (en) Illumination optical apparatus, exposure apparatus, and device manufacturing method
TW201535069A (zh) 微影裝置及方法
JP2014195048A (ja) 照明光学系、露光装置及びデバイスの製造方法
KR20180095134A (ko) 반사 결상 광학계, 노광 장치 및 디바이스 제조 방법
KR20100095620A (ko) 조명 광학계, 노광 장치, 및 디바이스 제조 방법
US9632423B2 (en) Illumination device, exposure apparatus, adjusting method, and method for manufacturing object
US10459343B2 (en) Illumination device
JP2005310942A (ja) 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP2005234120A (ja) 照明光学装置、露光装置及び露光方法
KR20140108149A (ko) 조명 광학계, 노광 장치 및 디바이스의 제조 방법
JPWO2004090955A1 (ja) 照明光学装置、投影露光装置及び露光方法
JP2011150227A (ja) 露光装置、およびデバイス製造方法
JP2022128509A (ja) 照明光学系、露光装置、およびデバイス製造方法
TW202026703A (zh) 用於投影曝光設備的光學系統
JP2002110502A (ja) 照明装置及び露光装置
JP2005115128A (ja) 照明光学装置およびそれを用いた投影露光装置
WO2014073548A1 (ja) 空間光変調光学系、照明光学系、露光装置、およびデバイス製造方法
JP2013143450A (ja) 走査露光装置及びデバイスの製造方法