JP2014114929A - Full type ball bearing with deep groove - Google Patents

Full type ball bearing with deep groove Download PDF

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JP2014114929A
JP2014114929A JP2012271185A JP2012271185A JP2014114929A JP 2014114929 A JP2014114929 A JP 2014114929A JP 2012271185 A JP2012271185 A JP 2012271185A JP 2012271185 A JP2012271185 A JP 2012271185A JP 2014114929 A JP2014114929 A JP 2014114929A
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ring member
ball
outer ring
inner ring
groove
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Akira Koyama
顕 小山
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JTEKT Corp
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JTEKT Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

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  • Rolling Contact Bearings (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a full type ball bearing having a deep groove in which a scratch is hardly made at a ball and a bearing washer when the ball is assembled, the ball can be easily assembled and at the same time a separation of the bearing can be positively prevented and its assembly into a device can be easily carried out.SOLUTION: An inner ring 30 comprises: an inner ring member 40 having an inner ring raceway surface 48 and a ball setting groove 46 formed at an outer peripheral surface 30b, a step part 42 circumferentially arranged at an inner peripheral edge 30c and having a thin walled ball setting groove 46; and an inner ring annular member 50 engaged with the step part 42. An outer ring 31 comprises: an outer ring member 41 having an outer ring raceway surface 49 and a ball setting groove 47 formed at an inner peripheral surface 31a, a step part 43 circumferentially arranged at an outer peripheral edge 31c and having a thin walled ball setting groove 47; and an outer ring annular member 51 engaged with the step part 43. The inner ring member 40 and the inner ring annular member 50, and the outer ring member 41 and the outer ring annular member 51 are connected by a connecting means 70 in such a way that their relative motion in a diametral direction and a peripheral direction can be carried out and their relative motion in an axial direction cannot be carried out, respectively.

Description

この発明は、半導体製造装置などに使用されるターボ分子ポンプのタッチダウン軸受装置の深溝型総玉軸受に関する。   The present invention relates to a deep groove type all ball bearing of a touchdown bearing device of a turbo molecular pump used in a semiconductor manufacturing apparatus or the like.

ターボ分子ポンプは真空ポンプの一種であり、ポンプを構成するロータを電動モータにより回転させるポンプ本体と、固定軸に固定されたラジアル磁気軸受およびアキシアル磁気軸受によって、ロータを非接触状態に支持する磁気軸受装置と、これを制御するコントローラとを備えている。このようなターボ分子ポンプでは、ロータの回転が停止される場合において、高速回転しているロータが磁気軸受と接触すると、磁気軸受を損傷させてしまうことがある。これを回避するために、固定軸にはロータをタッチダウンさせるためのタッチダウン軸受と呼ばれる保護軸受が設けられている。タッチダウンとは、ロータが宙に浮いた状態から保護軸受に受けられて停止する動作をいう。このタッチダウンにおいて、ロータが徐々に減速され、ロータが低速回転となってからタッチダウン軸受に接触する場合には、タッチダウン軸受にかかる負荷は比較的小さい。しかし、停電、断線等によって磁気軸受による制御および支持が不能となって、ロータが高速回転のまま急激にタッチダウン軸受に接触する場合には、タッチダウン軸受にかかる負荷は非常に大きなものとなる。このようなタッチダウン軸受には、負荷容量を増すために深溝型総玉軸受が用いられることが多い。   A turbo-molecular pump is a type of vacuum pump that uses a pump body that rotates the rotor that constitutes the pump with an electric motor, and a radial magnetic bearing and an axial magnetic bearing that are fixed to a fixed shaft to support the rotor in a non-contact state. A bearing device and a controller for controlling the bearing device are provided. In such a turbo molecular pump, when the rotation of the rotor is stopped, if the rotor rotating at high speed comes into contact with the magnetic bearing, the magnetic bearing may be damaged. In order to avoid this, the fixed shaft is provided with a protective bearing called a touch-down bearing for touching down the rotor. Touchdown refers to an operation in which the rotor is received by the protective bearing and stopped from a state where it floats in the air. In this touchdown, when the rotor is gradually decelerated and the rotor is rotated at a low speed and then comes into contact with the touchdown bearing, the load applied to the touchdown bearing is relatively small. However, if the control and support by the magnetic bearing becomes impossible due to power failure, disconnection, etc., and the rotor suddenly contacts the touchdown bearing while rotating at high speed, the load on the touchdown bearing becomes very large. . Such touchdown bearings often use deep groove type ball bearings to increase the load capacity.

ところで、一般に深溝型総玉軸受は玉の組み込みをおこなうために、内輪および外輪にそれぞれ玉入れ溝が設けられている。この玉入れ溝は、玉が円滑に回転しやすく、玉抜けが起きないように、玉の寸法に対して僅かに小さな寸法に設計され、玉に対して僅かに締め代を持つような寸法に設計されている。この深溝型総玉軸受の玉の組み込み方法として、玉入れ溝および玉入れ溝近辺の内輪と外輪との間に治具（くさび）を押し込んで内外輪間の間隔を広げて、締め代が殆どない状態で玉を軸受内部に入れ込む方法が使用されている。この方法では、内外輪の肉厚が厚い場合や最後の方の玉を入れる場合において内外輪間の間隔が狭くなり、くさびを押し込んで内外輪間の間隔を広げようとしても十分に広げることができず、玉入れ時に強い力を必要として、玉および軌道輪に傷を付けてしまうことがある。また、くさびを強く押し当てることにより、内外輪の軌道面に傷を付けてしまうことがある。   By the way, in general, a deep groove type full ball bearing is provided with a ball insertion groove in each of an inner ring and an outer ring in order to incorporate balls. This ball slot is designed to be slightly smaller than the size of the ball so that the ball can rotate smoothly and does not fall out, and has a size that has a slight allowance for the ball. Designed. As a method of assembling the balls of this deep groove type all-ball bearing, a jig (wedge) is pushed between the inner ring and the outer ring in the vicinity of the ball insertion groove and the ball insertion groove to increase the space between the inner and outer rings, and the tightening margin is almost A method is used in which the ball is inserted into the bearing without any contact. In this method, when the inner and outer rings are thick or when the last ball is inserted, the distance between the inner and outer rings becomes narrow, and it is possible to increase the distance between the inner and outer rings by pushing the wedges. This is not possible, and a strong force is required when placing the ball, which may damage the ball and raceway. In addition, when the wedge is pressed strongly, the raceway surface of the inner and outer rings may be damaged.

タッチダウン軸受の深溝型総玉軸受の場合、玉および軌道面に傷が付いていると、タッチダウンにより玉や軌道面が摩耗しやすくなり、多数回のタッチダウンに耐えることができない。特許文献１には、軌道輪を軸方向に分割することにより、玉入れ溝を設けなくても、玉の組み込みができる深溝型総玉軸受が開示されている。この深溝型総玉軸受によれば、玉の組み込み時に玉および軌道面に傷が付きにくく、玉を容易に組み込むことができる。   In the case of a deep groove type ball bearing of a touchdown bearing, if the ball and the raceway surface are scratched, the ball and the raceway surface are easily worn by the touchdown and cannot withstand many touchdowns. Patent Document 1 discloses a deep groove type all-ball bearing in which balls can be incorporated by dividing the raceway in the axial direction without providing ball insertion grooves. According to this deep groove type ball bearing, the ball and the raceway surface are hardly damaged when the ball is assembled, and the ball can be easily assembled.

実開平５−７５５１７号公報Japanese Utility Model Publication No. 5-75517

しかしながら、上記の深溝型総玉軸受では分割した軌道輪が固定されておらず、運搬時や装置への組み付け時の振動等によって、軸受が分離するという問題があった。これにより、装置への組み付けにおいて手間がかかっていた。   However, the above-mentioned deep groove type ball bearings have a problem that the divided bearing rings are not fixed, and the bearings are separated due to vibration during transportation or assembly to the apparatus. This took time and effort in assembling the apparatus.

本発明は、上記問題点を解決するためになされたものであって、本発明が解決しようとする課題は、玉の組み込み時に玉および軌道面に傷が付きにくく、玉を容易に組み込むことができるとともに、軸受の分離を確実に防止して、装置への組み付けを容易におこなうことが可能な深溝型総玉軸受を提供することにある。   The present invention has been made to solve the above problems, and the problem to be solved by the present invention is that the balls and the raceway surface are not easily damaged when the balls are assembled, and the balls can be easily assembled. Another object of the present invention is to provide a deep groove type all-ball bearing that can reliably be separated from the bearing and can be easily assembled to the apparatus.

請求項１に係わる発明は、内輪および外輪にそれぞれ玉入れ溝が形成された深溝型総玉軸受において、前記内輪は、外周面に内輪軌道面と前記玉入れ溝が形成され、内周縁に段差部が周設されるとともに前記玉入れ溝が薄肉にされた内輪部材と、前記段差部に係合される内輪環体部材とからなり、前記外輪は、内周面に外輪軌道面と前記玉入れ溝が形成され、外周縁に段差部が周設されるとともに前記玉入れ溝が薄肉にされた外輪部材と、前記段差部に係合される外輪環体部材とからなり、前記内輪部材と前記内輪環体部材および前記外輪部材と前記外輪環体部材は、径方向および周方向への相対移動が可能でかつ軸方向への相対移動が不可能なように結合手段によって結合されていることを特徴とする。   The invention according to claim 1 is a deep groove type total ball bearing in which a ball groove is formed in each of an inner ring and an outer ring. The inner ring has an inner ring raceway surface and the ball groove formed on an outer peripheral surface, and a step on an inner peripheral edge. And an inner ring member that is engaged with the stepped portion, and the outer ring has an outer ring raceway surface and the ball on the inner circumferential surface. The inner ring member includes an outer ring member in which a groove is formed, a stepped portion is provided around an outer peripheral edge and the ball groove is thinned, and an outer ring member that is engaged with the stepped portion. The inner ring member, the outer ring member, and the outer ring member are coupled by coupling means so that relative movement in the radial direction and circumferential direction is possible and relative movement in the axial direction is not possible. It is characterized by.

上記のように構成した請求項１の発明によれば、内輪および外輪は、内輪部材および外輪部材のそれぞれの段差部に、内輪環体部材および外輪環体部材が結合された構成となっている。玉の組み込みは、玉入れ溝および玉入れ溝近辺の外輪と内輪との間に治具のくさびを押し込んで内外輪間の間隔を広げて、玉を軸受内部に組み込む方法によっておこなわれる。この治具のくさびを押し込むとき、外輪部材および内輪部材のみの状態でおこなうことにより、内輪部材および外輪部材に形成された玉入れ溝が薄肉に形成されているので、治具のくさびを強く押し込むことなく、容易に玉入れ溝を弾性変形させることができる。これにより、内外輪間の間隔を十分に広げることができるので、内外輪の肉厚が厚い場合や最後の方の玉を入れる場合であっても、玉および軌道面に傷を付けることなく、すべての玉を軸受内部に組み込むことができる。そして、玉の組み込み後に、内輪部材および外輪部材のそれぞれの段差部に内輪環体部材および外輪環体部材を係合させ、結合手段により結合させている。これにより、内輪および外輪の剛性を上げているので、内外輪間の間隔が広がって玉抜けが起きるのを防ぐとともに、所定の負荷容量を得ることができる。また、内輪部材と内輪環体部材および外輪部材と外輪環体部材は、結合手段により係合させることで、径方向および周方向への相対移動が可能でかつ軸方向への相対移動が不可能とすることができる。したがって、運搬時や装置への組み付け時の振動等によって、内輪部材と内輪環体部材および外輪部材と外輪環体部材が分離することを確実に防止して、装置への組み付けを容易におこなうことができる。   According to the invention of claim 1 configured as described above, the inner ring and the outer ring are configured such that the inner ring member and the outer ring member are coupled to the respective step portions of the inner ring member and the outer ring member. . The balls are assembled by a method of incorporating balls into the bearings by pushing the wedges between the inner ring and the inner ring between the inner ring and the outer ring and the inner ring in the vicinity of the ball inserting groove. When the wedge of this jig is pushed in, it is performed only with the outer ring member and the inner ring member, so that the ball insertion grooves formed in the inner ring member and the outer ring member are formed thin, so the wedge of the jig is pushed in strongly. The ball slot can be easily elastically deformed without any problem. As a result, the space between the inner and outer rings can be sufficiently widened, so even if the inner and outer rings are thick or the last ball is inserted, the balls and the raceway surface are not damaged. All balls can be incorporated inside the bearing. Then, after the balls are assembled, the inner ring member and the outer ring member are engaged with the respective step portions of the inner ring member and the outer ring member, and are coupled by the coupling means. Thereby, since the rigidity of the inner ring and the outer ring is increased, the interval between the inner and outer rings is widened to prevent the ball from coming out and a predetermined load capacity can be obtained. Further, the inner ring member and the inner ring ring member and the outer ring member and the outer ring ring member can be engaged with each other by the coupling means, so that they can be moved relative to each other in the radial direction and the circumferential direction, and cannot be moved relative to each other in the axial direction. It can be. Therefore, the inner ring member and the inner ring ring member and the outer ring member and the outer ring ring member are surely prevented from being separated due to vibrations during transportation or assembling to the apparatus, and can be easily assembled to the apparatus. Can do.

請求項２に係わる発明は、請求項１に記載の深溝型総玉軸受であって、前記結合手段は、前記内輪部材と前記内輪環体部材および前記外輪部材と前記外輪環体部材のいずれか一方の端面に設けられたＬ字状の突出部と、同他方の端面に設けられてＬ字状の前記突出部が嵌め入れられる径方向外方に開口したＬ字状の係合溝とを有しており、前記突出部は、軸方向に平行に延びる軸部と、前記軸部の先端から周方向に延びる屈曲部とからなり、前記係合溝は、端面から軸方向内方に延びており前記突出部の周方向長さ以上の周方向長さを有する第１溝部と、前記第１溝部に連なって周方向に延びており前記突出部の前記屈曲部の軸方向長さに等しい軸方向長さを有する第２溝部とからなることを特徴とする。   The invention according to claim 2 is the deep groove type ball bearing according to claim 1, wherein the coupling means is any one of the inner ring member, the inner ring ring member, the outer ring member, and the outer ring ring member. An L-shaped projecting portion provided on one end surface and an L-shaped engaging groove provided on the other end surface and opened radially outwardly into which the L-shaped projecting portion is fitted. The projecting portion includes a shaft portion extending in parallel to the axial direction and a bent portion extending in the circumferential direction from the tip of the shaft portion, and the engagement groove extends inward in the axial direction from the end surface. A first groove portion having a circumferential length equal to or greater than a circumferential length of the protruding portion, and extending in the circumferential direction continuously to the first groove portion, and equal to the axial length of the bent portion of the protruding portion. It consists of the 2nd groove part which has an axial direction length, It is characterized by the above-mentioned.

上記のように構成した請求項２の発明によれば、内輪部材と内輪環体部材および外輪部材と外輪環体部材は、それぞれ軸方向に対向して同心に配置され、軸方向に移動させられた後、周方向に回転させられる。これにより、内輪部材と内輪環体部材および外輪部材と外輪環体部材のいずれか一方の端面に設けられたＬ字状の突出部と、同他方の端面に設けられたＬ字状の係合溝とが嵌め合わされて結合される。結合された内輪部材と内輪環体部材および外輪部材と外輪環体部材は、径方向および周方向への相対移動が可能とされた状態で、軸方向への相対移動が不可能とされる。したがって、振動等により、内輪部材と内輪環体部材および外輪部材と外輪環体部材が分離するのを確実に防止することができる。また、この結合手段は、Ｌ字状の突出部とＬ字状の係合溝との嵌め合わせという簡易な構成であるので、容易に結合することができる。   According to the invention of claim 2 configured as described above, the inner ring member and the inner ring ring member and the outer ring member and the outer ring ring member are arranged concentrically facing each other in the axial direction and are moved in the axial direction. After that, it is rotated in the circumferential direction. As a result, the L-shaped protrusion provided on one end face of the inner ring member and the inner ring ring member, and the outer ring member and outer ring ring member, and the L-shaped engagement provided on the other end face. The groove is fitted and joined. The coupled inner ring member and inner ring ring member, and outer ring member and outer ring ring member cannot be moved relative to each other in the axial direction while being allowed to move in the radial direction and the circumferential direction. Therefore, it is possible to reliably prevent the inner ring member and the inner ring ring member and the outer ring member and the outer ring ring member from separating due to vibration or the like. In addition, since the coupling means has a simple configuration in which the L-shaped projecting portion and the L-shaped engagement groove are fitted together, it can be easily coupled.

本発明によれば、玉の組み込み時に玉および軌道輪に傷が付きにくく、玉を容易に組み込むことができるとともに、確実に軸受の分離を防止して、装置への組み付けを容易におこなうことが可能な深溝型総玉軸受を提供することができる。   According to the present invention, the ball and the bearing ring are not easily damaged when the ball is assembled, the ball can be easily assembled, and the bearing can be reliably prevented from being separated and easily assembled to the apparatus. A possible deep groove type ball bearing can be provided.

本発明の実施形態に係る深溝型総玉軸受を有するターボ分子ポンプの軸方向断面図である。It is an axial sectional view of a turbo molecular pump having a deep groove type ball bearing according to an embodiment of the present invention. 本発明の実施形態に係る深溝型総玉軸受の軸方向断面図である。It is an axial sectional view of a deep groove type ball bearing according to an embodiment of the present invention. 本発明の実施形態に係る深溝型総玉軸受の外輪が分離した状態を示す断面図である。It is sectional drawing which shows the state which the outer ring | wheel of the deep groove type all-ball bearing which concerns on embodiment of this invention isolate | separated. 本発明の実施形態に係る深溝型総玉軸受の結合部分を示す説明図である。It is explanatory drawing which shows the coupling | bond part of the deep groove type all-ball bearing which concerns on embodiment of this invention. 本発明の実施形態に係る深溝型総玉軸受の結合部分を示す説明図である。It is explanatory drawing which shows the coupling | bond part of the deep groove type all-ball bearing which concerns on embodiment of this invention.

以下、本発明の実施形態に係る深溝型総玉軸受を図面に従って説明する。
図１は、本発明の実施形態に係る深溝型総玉軸受１０を有するターボ分子ポンプの軸方向断面図である。このターボ分子ポンプは、ターボ分子ポンプ本体１と、図示しないコントローラとを備え、図示しない真空機器に連通している。 Hereinafter, a deep groove type ball bearing according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an axial sectional view of a turbo molecular pump having a deep groove type ball bearing 10 according to an embodiment of the present invention. This turbo molecular pump includes a turbo molecular pump main body 1 and a controller (not shown), and communicates with a vacuum device (not shown).

図１に示すように、ターボ分子ポンプ本体１は、ハウジング２と、回転軸３と、回転軸３を駆動するモータ４と、回転軸３をアキシアル方向に磁気的に非接触支持するアキシアル磁気軸受６と、回転軸３をラジアル方向に磁気的に非接触支持する第１および第２ラジアル磁気軸受７,８とを有している。   As shown in FIG. 1, a turbo molecular pump main body 1 includes a housing 2, a rotating shaft 3, a motor 4 that drives the rotating shaft 3, and an axial magnetic bearing that supports the rotating shaft 3 in a non-contact manner in the axial direction. 6 and first and second radial magnetic bearings 7 and 8 for supporting the rotating shaft 3 in a radial non-contact manner in a radial direction.

また、ターボ分子ポンプ本体１は、第１および第２ラジアル磁気軸受７,８が制御不能になったときに回転軸３をラジアル方向に機械的に支持するとともに、タッチダウン軸受としての役割を果たす深溝型総玉軸受１０と、第１および第２ラジアル磁気軸受７,８が制御不能になったときに回転軸３をラジアル方向に機械的に支持するとともに、タッチダウン軸受としての役割を果たすアンギュラ玉軸受１１,１２とを有している。   The turbo molecular pump main body 1 mechanically supports the rotary shaft 3 in the radial direction when the first and second radial magnetic bearings 7 and 8 become uncontrollable, and serves as a touch-down bearing. When the deep groove type ball bearing 10 and the first and second radial magnetic bearings 7 and 8 become uncontrollable, the rotary shaft 3 is mechanically supported in the radial direction, and serves as a touchdown bearing. Ball bearings 11 and 12 are provided.

また、ターボ分子ポンプ本体１は、回転軸３のラジアル位置を検出するラジアル位置検出センサ１４,１５と、回転軸３のアキシアル位置を検出するアキシアル位置検出センサ１６とを有している。ラジアル位置検出センサ１４,１５は、回転軸３の軸方向に互いに間隔をおいて配置されている。   The turbo molecular pump main body 1 also includes radial position detection sensors 14 and 15 that detect the radial position of the rotary shaft 3 and an axial position detection sensor 16 that detects the axial position of the rotary shaft 3. The radial position detection sensors 14 and 15 are arranged at intervals in the axial direction of the rotary shaft 3.

モータ４は、ロータ２０と、ステータ２１とを有している。ロータ２０は、リング状の２極永久磁石で構成されており、回転軸３の外周面に固定されている。ステータ２１は、電機子コイル（図示せず）を有し、電機子コイルに適切に電流を流すことにより、ロータ２０をステータ２１に対して高速回転させ、ロータ２０が固定された回転軸３を高速回転させるようになっている。   The motor 4 has a rotor 20 and a stator 21. The rotor 20 is composed of a ring-shaped two-pole permanent magnet and is fixed to the outer peripheral surface of the rotating shaft 3. The stator 21 has an armature coil (not shown), and by appropriately supplying a current to the armature coil, the rotor 20 is rotated at a high speed with respect to the stator 21, and the rotating shaft 3 to which the rotor 20 is fixed is rotated. It is designed to rotate at high speed.

また、モータ４は、発電機としての役割も兼ねており、電源異常や停電等により電源側からの電力の供給が停止されて電源電圧が低下すると、モータ４は発電機として電圧を出力するようになっている。具体的には、モータ４は電源電圧が低下すると、位置検出センサ１４,１５,１６、磁気軸受駆動回路（図示せず）およびモータドライバ（図示せず）に、回生電力を供給するようになっている。モータ４から供給される回生電力が磁気軸受６,７,８を駆動できる間、磁気軸受６,７,８は、この回生電力によって磁気浮上制御されるようになっている。   Further, the motor 4 also serves as a generator. When the supply of power from the power supply side is stopped due to a power failure or a power failure, the motor 4 outputs a voltage as a generator. It has become. Specifically, when the power supply voltage decreases, the motor 4 supplies regenerative power to the position detection sensors 14, 15, 16, the magnetic bearing drive circuit (not shown) and the motor driver (not shown). ing. While the regenerative power supplied from the motor 4 can drive the magnetic bearings 6, 7, 8, the magnetic bearings 6, 7, 8 are controlled to be magnetically levitated by this regenerative power.

アキシアル磁気軸受６は、回転軸３のアキシアル方向の両端面を、アキシアル方向の両側から挟むように配置された１対の電磁石（数は２個）を有する。また、第１および第２ラジアル磁気軸受７,８のそれぞれは、回転軸３をラジアル方向の両側から挟むように配置された互いに直交する２対の電磁石（各ラジアル磁気軸受において、電磁石の数は４個）を有している。   The axial magnetic bearing 6 has a pair of electromagnets (two in number) arranged so as to sandwich both axial end faces of the rotating shaft 3 from both sides in the axial direction. Each of the first and second radial magnetic bearings 7 and 8 includes two pairs of electromagnets orthogonal to each other arranged so as to sandwich the rotating shaft 3 from both sides in the radial direction (in each radial magnetic bearing, the number of electromagnets is 4).

磁気軸受６,７,８の電磁石の磁力を適切に制御することにより、毎分数万回転で回転する回転軸３を精密に制御して、回転軸３のぐらつきを抑制して、回転軸３を、所定位置に精密に位置させるようになっている。   By appropriately controlling the magnetic force of the electromagnets of the magnetic bearings 6, 7, and 8, the rotating shaft 3 that rotates at several tens of thousands of revolutions per minute is precisely controlled, and the wobbling of the rotating shaft 3 is suppressed. Is precisely positioned at a predetermined position.

電源異常時や停電時等に、モータ４の回転速度が下がり、モータ４からの回生電力が磁気軸受７,８の駆動に必要な電力よりも低下すると、磁気軸受７,８の磁気浮上制御が停止するようになっている。   When the rotational speed of the motor 4 decreases due to a power failure or a power failure, and the regenerative power from the motor 4 decreases below the power required to drive the magnetic bearings 7 and 8, the magnetic levitation control of the magnetic bearings 7 and 8 is performed. It comes to stop.

磁気軸受７,８の磁気浮上制御が停止すると、タッチダウン軸受としての深溝型総玉軸受１０およびアンギュラ玉軸受１１,１２が、磁気軸受７,８の替わりに回転軸３をラジアル方向に機械的に支持するようになっている。   When the magnetic levitation control of the magnetic bearings 7 and 8 is stopped, the deep groove type ball bearings 10 and the angular ball bearings 11 and 12 as touchdown bearings mechanically rotate the rotary shaft 3 in the radial direction instead of the magnetic bearings 7 and 8. It comes to support.

深溝型総玉軸受１０およびアンギュラ玉軸受１１,１２は、磁気軸受７,８が制御不能になったときに、回転軸３を支持することによって、磁気軸受７,８と回転軸３との接触や、ロータ２０とステータ２１との接触等を確実に防止するようになっている。   The deep groove type ball bearings 10 and the angular ball bearings 11 and 12 support the rotating shaft 3 when the magnetic bearings 7 and 8 become uncontrollable, thereby contacting the magnetic bearings 7 and 8 with the rotating shaft 3. In addition, contact between the rotor 20 and the stator 21 is reliably prevented.

図２は、本発明の実施形態に係る深溝型総玉軸受１０の軸方向断面図である。
図２に示すように、深溝型総玉軸受１０は、いわゆる総玉軸受であって、外輪３１と、内輪３０と、玉６０とを有し、保持器を有さない構造となっている。 FIG. 2 is an axial sectional view of the deep groove type ball bearing 10 according to the embodiment of the present invention.
As shown in FIG. 2, the deep groove type full ball bearing 10 is a so-called full ball bearing, and has an outer ring 31, an inner ring 30, and a ball 60, and does not have a cage.

外輪３１は、外輪部材４１と外輪環体部材５１とからなっている。外輪部材４１は、内周面３１ａに深溝型の外輪軌道面４９と玉入れ溝４７が形成されている。外周縁３１ｃには、段差部４３が周設されるとともに、玉入れ溝４７が薄肉にされて形成されている。外輪環体部材５１は、環状に形成され、外輪部材４１の段差部４３に係合している。外輪環体部材５１は、外輪部材４１とともに外輪３１の外周面３１ｂを形成している。   The outer ring 31 includes an outer ring member 41 and an outer ring ring member 51. The outer ring member 41 has a deep groove type outer ring raceway surface 49 and a ball slot 47 formed on the inner peripheral surface 31a. A stepped portion 43 is provided around the outer peripheral edge 31c, and a ball slot 47 is formed thin. The outer ring member 51 is formed in an annular shape and is engaged with the step portion 43 of the outer ring member 41. The outer ring member 51 and the outer ring member 41 form an outer peripheral surface 31 b of the outer ring 31.

内輪３０は、内輪部材４０と外輪環体部材５１とからなっている。内輪部材４０は、外周面３０ｂに深溝型の内輪軌道面４８と玉入れ溝４６が形成されている。内周縁３０ｃには、段差部４２が周設されるとともに、玉入れ溝４６が薄肉にされて形成されている。内輪環体部材５０は、環状に形成され、内輪部材４０の段差部４２に係合している。内輪環体部材５０は、内輪部材４０とともに内輪３０の内周面３０ａを形成している。   The inner ring 30 includes an inner ring member 40 and an outer ring ring member 51. The inner ring member 40 has a deep groove type inner ring raceway surface 48 and a ball slot 46 formed on the outer peripheral surface 30b. A stepped portion 42 is provided around the inner peripheral edge 30c, and a ball slot 46 is formed to be thin. The inner ring member 50 is formed in an annular shape and is engaged with the step portion 42 of the inner ring member 40. The inner ring member 50 and the inner ring member 40 form an inner peripheral surface 30 a of the inner ring 30.

内輪部材４０と外輪環体部材５１および外輪部材４１と外輪環体部材５１は、それぞれＳＵＪ２をはじめとする軸受鋼、ＳＵＳ４４０Ｃをはじめとするスステンレス鋼またはＳＫＨ４をはじめとする工具鋼等の鋼材で形成されている。   The inner ring member 40 and the outer ring ring member 51 and the outer ring member 41 and the outer ring ring member 51 are made of steel such as bearing steel including SUJ2, stainless steel including SUS440C, or tool steel including SKH4. Is formed.

玉６０は、窒化珪素などのセラミックス材あるいはＳＵＳ４４０Ｃで形成され、玉表面には、銀などのコーティング膜が好適に被覆されている。玉６０は、外輪３１の外輪軌道面４９と内輪３０の内輪軌道面４８との間に複数配置されている。全ての玉６０を周方向に隙間なく当接させた状態で、外輪３１の軌道面４９と内輪３０の内輪軌道面４８との間には、玉６０一個分程度もしくは、それ以上の周方向のスペースが存在している。   The ball 60 is made of a ceramic material such as silicon nitride or SUS440C, and the surface of the ball is suitably coated with a coating film such as silver. A plurality of balls 60 are arranged between the outer ring raceway surface 49 of the outer ring 31 and the inner ring raceway surface 48 of the inner ring 30. With all the balls 60 in contact with each other in the circumferential direction without any gap, between the raceway surface 49 of the outer ring 31 and the inner ring raceway surface 48 of the inner ring 30, the circumferential direction is about one ball 60 or more. Space exists.

玉入れ溝４６，４７は、周方向の一部分の内輪３０と外輪３１との径方向の間隔が、他の部分における内輪３０と外輪３１との径方向の間隔よりも大きく形成されて設けられている。玉入れ溝４６，４７は、玉６０が円滑に回転しやすく、玉抜けが起きないように、玉６０の寸法に対して僅かに小さな寸法に設計され、玉６０に対して僅かに締め代を持つような寸法に設計されている。   The ball slots 46 and 47 are provided such that a radial interval between a part of the inner ring 30 and the outer ring 31 in the circumferential direction is larger than a radial interval between the inner ring 30 and the outer ring 31 in other parts. Yes. The ball slots 46 and 47 are designed to be slightly smaller than the size of the ball 60 so that the ball 60 can be smoothly rotated and the ball does not fall out. Designed to hold dimensions.

内輪部材４０と内輪環体部材５０および外輪部材４１と外輪環体部材５１は、それぞれ結合手段７０により結合されている。以下に、外輪部材４１と外輪環体部材５１との結合について説明する。なお、内輪部材４０と内輪環体部材５０との結合は、外輪部材４１と外輪環体部材５１との結合と同様であるので、説明を省略する。   The inner ring member 40 and the inner ring ring member 50, and the outer ring member 41 and the outer ring ring member 51 are coupled by the coupling means 70, respectively. Below, the coupling | bonding of the outer ring member 41 and the outer ring ring member 51 is demonstrated. The coupling between the inner ring member 40 and the inner ring ring member 50 is the same as the coupling between the outer ring member 41 and the outer ring ring member 51, and thus the description thereof is omitted.

結合手段７０は、図３および図４に示すように、外輪部材４１の端面に設けられたＬ字状の突出部４４と、外輪環体部材５１の端面に設けられてＬ字状の突出部４４に係合するＬ字状の係合溝５２とからなる。   As shown in FIGS. 3 and 4, the coupling means 70 includes an L-shaped projecting portion 44 provided on the end surface of the outer ring member 41 and an L-shaped projecting portion provided on the end surface of the outer ring ring member 51. And an L-shaped engagement groove 52 that engages with the engagement member 44.

Ｌ字状の突出部４４は、軸方向に平行に延びる軸部４４ａと、軸部４４ａの先端から周方向に延びる屈曲部４４ｂとからなる。   The L-shaped projecting portion 44 includes a shaft portion 44a extending in parallel to the axial direction and a bent portion 44b extending in the circumferential direction from the tip of the shaft portion 44a.

係合溝５２は、径方向外方に開口しており、端面から軸方向内方に延びており突出部４４を案内する第１溝部５２ａと、第１溝部５２ａに連なって周方向に延びており突出部４４の屈曲部４４ｂを収容する第２溝部５２ｂとからなる。第１溝部５２ａの周方向の長さは、突出部４４全体の周方向の長さに等しく（または、大きく）されている。第２溝部５２ｂは、第１溝部５２ａの奥側にある部分（軸方向内方に位置する部分）が周方向に拡大されることで形成されており、その軸方向長さは、突出部４４の屈曲部４４ｂの軸方向長さに等しくなされている。   The engaging groove 52 is opened radially outward, extends inward in the axial direction from the end surface, and extends in the circumferential direction continuously to the first groove 52a and guides the protruding portion 44. It consists of the 2nd groove part 52b which accommodates the bending part 44b of the cage | basket protrusion part 44. As shown in FIG. The circumferential length of the first groove portion 52a is equal to (or larger than) the circumferential length of the entire protrusion 44. The second groove portion 52b is formed by enlarging a portion on the back side of the first groove portion 52a (a portion located inward in the axial direction) in the circumferential direction, and the axial length thereof is the protruding portion 44. Is equal to the axial length of the bent portion 44b.

図４および図５に示すように、外輪部材４１と外輪環体部材５１は、それぞれ軸方向に対向して同心に配置され、軸方向に移動させられた後、周方向に回転させられる。これにより、図５に示すように、外輪部材４１の端面に設けられたＬ字状の突出部４４と、外輪環体部材５１の端面に設けられたＬ字状の係合溝５２とが嵌め合わされて結合される。   As shown in FIGS. 4 and 5, the outer ring member 41 and the outer ring annular member 51 are arranged concentrically facing each other in the axial direction, moved in the axial direction, and then rotated in the circumferential direction. As a result, as shown in FIG. 5, the L-shaped protrusion 44 provided on the end surface of the outer ring member 41 and the L-shaped engagement groove 52 provided on the end surface of the outer ring ring member 51 are fitted. Combined and combined.

この深溝型総玉軸受１０によれば、内輪３０および外輪３１は、内輪部材４０および外輪部材４１のそれぞれの段差部４２，４３に、内輪環体部材５０および外輪環体部材５１が結合された構成となっている。玉の組み込みは、玉入れ溝４６，４７および玉入れ溝４６，４７近辺の外輪３１と内輪３０との間に治具のくさびを押し込んで、内外輪間の間隔を広げて、玉６０を軸受内部に組み込む方法によっておこなわれる。この治具のくさびを押し込むとき、外輪部材４１および内輪部材４０のみの状態でおこなうことにより、内輪部材４０および外輪部材４１に形成された玉入れ溝４６，４７が薄肉に形成されているので、治具のくさびを強く押し込むことなく、容易に玉入れ溝４６，４７を弾性変形させることができる。これにより、内外輪間の間隔を十分に広げることができるので、内外輪の肉厚が厚い場合や最後の方の玉を入れる場合であっても、玉６０および軌道面４８，４９に傷を付けることなく、すべての玉６０を軸受内部に組み込むことができる。   According to the deep groove type ball bearing 10, the inner ring 30 and the outer ring 31 have the inner ring ring member 50 and the outer ring ring member 51 coupled to the step portions 42 and 43 of the inner ring member 40 and the outer ring member 41, respectively. It has a configuration. The balls are assembled by pushing a wedge of a jig between the inner ring 30 and the inner ring 30 in the vicinity of the ball insertion grooves 46 and 47 and the ball insertion grooves 46 and 47 to increase the distance between the inner and outer rings. It is done by the method of incorporating inside. When the wedge of this jig is pushed in, it is performed only in the outer ring member 41 and the inner ring member 40, so that the ball insertion grooves 46 and 47 formed in the inner ring member 40 and the outer ring member 41 are formed thin. The ball slot 46 and 47 can be easily elastically deformed without strongly pushing the wedge of the jig. As a result, the space between the inner and outer rings can be sufficiently widened, so that the balls 60 and the raceways 48 and 49 are damaged even when the inner and outer rings are thick or when the last ball is inserted. All the balls 60 can be incorporated inside the bearing without being attached.

そして、玉の組み込み後に、内輪部材４０および外輪部材４１のそれぞれの段差部４２，４３に内輪環体部材５０および外輪環体部材５１を係合させ、結合手段７０により結合させている。これにより、内輪３０および外輪３１の剛性を上げているので、内外輪間の間隔が広がって玉抜けが起きるのを防ぐとともに、所定の負荷容量を得ることができる。また、内輪部材４０と内輪環体部材５０および外輪部材４１と外輪環体部材５１は、結合手段７０により係合させることで、径方向および周方向への相対移動が可能でかつ軸方向への相対移動が不可能とすることができる。したがって、運搬時や装置への組み付け時の振動等によって、内輪部材４０と内輪環体部材５０および外輪部材４１と外輪環体部材５１が分離するのを確実に防止して、装置への組み付けを容易におこなうことができる。   After the balls are assembled, the inner ring member 50 and the outer ring member 51 are engaged with the step portions 42 and 43 of the inner ring member 40 and the outer ring member 41, respectively, and coupled by the coupling means 70. Thereby, since the rigidity of the inner ring 30 and the outer ring 31 is increased, the interval between the inner and outer rings is widened to prevent the ball from falling out and a predetermined load capacity can be obtained. Further, the inner ring member 40 and the inner ring ring member 50 and the outer ring member 41 and the outer ring ring member 51 are engaged with each other by the coupling means 70, so that they can be moved relative to each other in the radial direction and the circumferential direction. Relative movement can be impossible. Therefore, the inner ring member 40 and the inner ring ring member 50 and the outer ring member 41 and the outer ring ring member 51 are reliably prevented from being separated due to vibrations during transportation or assembling to the apparatus. It can be done easily.

本発明は、上記実施形態に限定されるものではなく、特許請求の範囲に記載された発明の範囲内で適宜変更することが可能である。例えば、上記実施形態の深溝型総玉軸受は、ターボ分子ポンプのタッチダウン軸受として使用されているが、本発明の深溝型総玉軸受を、ターボ分子ポンプのタッチダウン軸受以外の用途に使用してもよい。   The present invention is not limited to the above-described embodiment, and can be appropriately changed within the scope of the invention described in the claims. For example, the deep groove type full ball bearing of the above embodiment is used as a touchdown bearing for a turbo molecular pump, but the deep groove type full ball bearing of the present invention is used for applications other than a touchdown bearing for a turbo molecular pump. May be.

１：ターボ分子ポンプ本体、 ２：ハウジング、 ３：回転軸、 ４：モータ、
６：アキシアル磁気軸受、 ７：第１ラジアル磁気軸受、 ８：第２ラジアル磁気軸受、
１０：深溝型総玉軸受、 １１，１２：アンギュラ玉軸受、
１４，１５：ラジアル位置検出センサ、 １６：アキシアル位置検出センサ、
２０：ロータ、 ２１：ステータ、 ３０：内輪、 ３０ａ：内周面、
３０ｂ：外周面、３０ｃ：内周縁、 ３１：外輪、 ３１ａ：内周面、
３１ｂ：外周面、３１ｃ：外周縁、 ４０：内輪部材、 ４１：外輪部材、
４２，４３：段差部、 ４４：突出部、 ４４ａ：軸部、 ４４ｂ：屈曲部、
４６，４７：玉入れ溝、 ４８：内輪軌道面、 ４９：外輪軌道面、
５０：内輪環体部材、 ５１：外輪環体部材、 ５２：係合溝、 ５２ａ：第１溝部、
５２ｂ：第２溝部、 ６０：玉（転動体）、 ７０：結合手段 1: turbo molecular pump main body: 2: housing; 3: rotating shaft; 4: motor;
6: axial magnetic bearing, 7: first radial magnetic bearing, 8: second radial magnetic bearing,
10: Deep groove type ball bearings, 11, 12: Angular contact ball bearings,
14, 15: Radial position detection sensor, 16: Axial position detection sensor,
20: Rotor, 21: Stator, 30: Inner ring, 30a: Inner circumferential surface,
30b: outer peripheral surface, 30c: inner peripheral edge, 31: outer ring, 31a: inner peripheral surface,
31b: outer peripheral surface, 31c: outer peripheral edge, 40: inner ring member, 41: outer ring member,
42, 43: stepped portion, 44: projecting portion, 44a: shaft portion, 44b: bent portion,
46, 47: Ball groove, 48: Inner ring raceway surface, 49: Outer ring raceway surface,
50: inner ring ring member 51: outer ring ring member 52: engagement groove 52a: first groove part
52b: second groove portion, 60: ball (rolling element), 70: coupling means

Claims (2)

内輪および外輪にそれぞれ玉入れ溝が形成された深溝型総玉軸受において、
前記内輪は、外周面に内輪軌道面と前記玉入れ溝が形成され、内周縁に段差部が周設されるとともに前記玉入れ溝が薄肉にされた内輪部材と、前記段差部に係合される内輪環体部材とからなり、
前記外輪は、内周面に外輪軌道面と前記玉入れ溝が形成され、外周縁に段差部が周設されるとともに前記玉入れ溝が薄肉にされた外輪部材と、前記段差部に係合される外輪環体部材とからなり、
前記内輪部材と前記内輪環体部材および前記外輪部材と前記外輪環体部材は、径方向および周方向への相対移動が可能でかつ軸方向への相対移動が不可能なように結合手段によって結合されていることを特徴とする深溝型総玉軸受。 In deep groove type full ball bearings where ball grooves are formed in the inner ring and outer ring,
The inner ring has an inner ring raceway surface and the ball-throwing groove formed on the outer peripheral surface, a stepped portion is provided around the inner peripheral edge, and the ball-throwing groove is thinned, and is engaged with the stepped portion. An inner ring ring member,
The outer ring is formed with an outer ring raceway surface and the ball groove in the inner peripheral surface, a step portion is provided in the outer peripheral edge and the ball groove is thinned, and engages with the step portion. An outer ring ring member to be made,
The inner ring member and the inner ring ring member, and the outer ring member and the outer ring ring member are coupled by coupling means so that relative movement in the radial direction and circumferential direction is possible and relative movement in the axial direction is not possible. Deep groove type ball bearings characterized in that 請求項１に記載の深溝型総玉軸受であって、
前記結合手段は、前記内輪部材と前記内輪環体部材および前記外輪部材と前記外輪環体部材のいずれか一方の端面に設けられたＬ字状の突出部と、同他方の端面に設けられてＬ字状の前記突出部が嵌め入れられる径方向外方に開口したＬ字状の係合溝とを有しており、
前記突出部は、軸方向に平行に延びる軸部と、前記軸部の先端から周方向に延びる屈曲部とからなり、
前記係合溝は、端面から軸方向内方に延びており前記突出部の周方向長さ以上の周方向長さを有する第１溝部と、前記第１溝部に連なって周方向に延びており前記突出部の前記屈曲部の軸方向長さに等しい軸方向長さを有する第２溝部とからなることを特徴とする深溝型総玉軸受。 The deep groove type ball bearing according to claim 1,
The coupling means is provided on an L-shaped projecting portion provided on one end surface of the inner ring member, the inner ring ring member, and the outer ring member and the outer ring ring member, and on the other end surface. An L-shaped engagement groove opened radially outwardly into which the L-shaped protrusion is fitted;
The projecting portion comprises a shaft portion extending in parallel to the axial direction and a bent portion extending in the circumferential direction from the tip of the shaft portion,
The engagement groove extends inward in the axial direction from the end surface, and has a first groove portion having a circumferential length equal to or greater than a circumferential length of the projecting portion, and extends in the circumferential direction continuously to the first groove portion. A deep groove type ball bearing comprising a second groove portion having an axial length equal to an axial length of the bent portion of the protruding portion.
JP2012271185A 2012-12-12 2012-12-12 Full type ball bearing with deep groove Pending JP2014114929A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107165942A (en) * 2017-05-26 2017-09-15 环驰轴承集团有限公司 A kind of high-precision bearing and its manufacturing process
CN114450489A (en) * 2019-09-30 2022-05-06 大金工业株式会社 Fan assembly and air conditioner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107165942A (en) * 2017-05-26 2017-09-15 环驰轴承集团有限公司 A kind of high-precision bearing and its manufacturing process
CN114450489A (en) * 2019-09-30 2022-05-06 大金工业株式会社 Fan assembly and air conditioner
CN114450489B (en) * 2019-09-30 2023-06-06 大金工业株式会社 Fan assembly and air conditioner

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