JP2014114926A

JP2014114926A - Diaphragm valve

Info

Publication number: JP2014114926A
Application number: JP2012271056A
Authority: JP
Inventors: Katsuaki Iimura; 勝昭飯村; Yoshiyuki Mizushima; 佳之水島
Original assignee: NIPPON DIAVALVE; Nippon Daiya Valve Co Ltd
Current assignee: NIPPON DIAVALVE; Nippon Daiya Valve Co Ltd
Priority date: 2012-12-12
Filing date: 2012-12-12
Publication date: 2014-06-26
Anticipated expiration: 2032-12-12
Also published as: JP6097545B2

Abstract

PROBLEM TO BE SOLVED: To enable a maximum flow rate to be assured as usual, a flow rate at a final stage of work to be reduced and an accurate adjustment of a specified amount to be carried out under a valve closed state.SOLUTION: The present invention comprises: a valve main body 2 having a first path 10 with a first valve seat 11 and first flow paths 12, 13 arranged at upstream side and downstream side while holding the first valve seat between them; a first diaphragm 6 press contacted with the first valve seat of the valve main body to enable the first path to be closed; and a first driving part 30. The present invention further comprises: a second path 21 of which flow rate is lower than that of the first path, having an upstream side opening 23 at the upstream side of the first valve seat and a downstream side opening 24 at the downstream side of the first valve seat, respectively; and a valve device 4 arranged in the second path to open or close the second path.

Description

本発明は、流体の充填等に使用されて好適なダイヤフラム弁に関する。 The present invention relates to a diaphragm valve suitable for use in fluid filling or the like.

従来のダイヤフラム弁は、図６に示すように、空気等の流体圧、ばね力等を受けてシリンダ１０１内を往復するピストン１０２が、このピストン１０２に取り付けられたスピンドル１０３、及びスピンドル１０３に取り付けられたコンプレッサ１０４を介して、ゴム等の弾性材からなるダイヤフラム１０５を作動させる。そして、このダイヤフラム１０５が、バルブ本体１０６内の通路１０７に堰状に突設された立上げ部１０８の弁座１０９に圧接して、この通路１０７を閉じることにより、ダイヤフラム弁は閉弁する。このようなダイヤフラム弁は、その他種々なものが使用されている（例えば、特許文献１参照）。 In the conventional diaphragm valve, as shown in FIG. 6, a piston 102 that reciprocates in the cylinder 101 by receiving fluid pressure such as air, spring force, etc. is attached to the spindle 103 and the spindle 103. A diaphragm 105 made of an elastic material such as rubber is actuated through the compressor 104. The diaphragm 105 is brought into pressure contact with the valve seat 109 of the rising portion 108 projecting like a weir in the passage 107 in the valve main body 106, and the diaphragm valve is closed by closing the passage 107. Various other diaphragm valves are used (see, for example, Patent Document 1).

また、ダイヤフラム弁は、薬剤等の流体を容器に充填する場合の充填弁として使用されることがある。この場合、大口径のダイヤフラム弁を使用してその流量を多くすると、充填時間を減少させることができる一方、規定量の流体が充填されたと判断して閉弁させても、流量が多いため充填量を一定にすることが極めて困難である。この一方、微小なダイヤフラム弁を使用して流量が少なすぎると、充填作業に多大な時間を要し、作業性が極めて悪くなる。 Moreover, a diaphragm valve may be used as a filling valve when filling a container with a fluid such as a medicine. In this case, if the flow rate is increased by using a large-diameter diaphragm valve, the filling time can be reduced. On the other hand, even if it is judged that the specified amount of fluid has been filled and the valve is closed, the flow rate is large. It is very difficult to keep the amount constant. On the other hand, if the flow rate is too small using a minute diaphragm valve, a long time is required for the filling operation, and workability is extremely deteriorated.

このため、薬剤等を容器に充填するための充填弁として使用する際に必要とされるダイヤフラム弁は、充填作業の中間段階では流量が多く、充填作業時間を短くすることができる一方、充填作業の最終段階では流量が少くなり、閉弁による規定量の調整が正確にできるダイヤフラム弁である。しかも生産設備の単純化のため、１つのダイヤフラム弁でその充填作業を完了できることが望まれる。 For this reason, the diaphragm valve required when used as a filling valve for filling a container with a medicine, etc. has a high flow rate in the intermediate stage of the filling operation, and can shorten the filling operation time. In the final stage, the flow rate is reduced, and the diaphragm valve can accurately adjust the specified amount by closing the valve. Moreover, it is desired that the filling operation can be completed with a single diaphragm valve in order to simplify the production facility.

そこで、従来は中間開度を任意に調整することができるダイヤフラム弁を使用して、ダイヤフラム弁１つで、充填作業の中間段階では流量を多く、充填作業の最終段階では流量を少くして、充填作業の正確性と作業効率の向上を図ってきた（例えば、特許文献２参照）。 Therefore, conventionally, using a diaphragm valve that can arbitrarily adjust the intermediate opening, with one diaphragm valve, the flow rate is increased in the intermediate stage of the filling operation, and the flow rate is decreased in the final stage of the filling operation. Improvements have been made to the accuracy and efficiency of the filling operation (see, for example, Patent Document 2).

特開２００４−１４４２２５号公報JP 2004-144225 A 特開平１０−２９９９１５号公報Japanese Patent Laid-Open No. 10-299915

上述のように、従来のダイヤフラム弁は、薬剤等の流体を容器に充填する場合の充填弁として使用される場合には、１つのダイヤフラム弁だけで、充填作業の中間段階では流量が多く、充填作業時間を短くすることができる一方、充填作業の最終段階では流量が少くなり、閉弁による規定量の調整が正確にできるものであることが要求される。このため、中間開度を任意に調整できるダイヤフラム弁を使用し、充填作業の中間段階では流量を多く、充填作業の最終段階では流量を少くして、充填作業の正確性と作業効率の向上を図ってきた。 As described above, when a conventional diaphragm valve is used as a filling valve when a fluid such as a medicine is filled in a container, only one diaphragm valve has a high flow rate in an intermediate stage of the filling operation. While the operation time can be shortened, the flow rate is reduced at the final stage of the filling operation, and it is required that the regulated amount can be accurately adjusted by closing the valve. For this reason, a diaphragm valve that can arbitrarily adjust the intermediate opening is used, and the flow rate is increased in the intermediate stage of the filling operation and decreased in the final stage of the filling operation, thereby improving the accuracy and efficiency of the filling operation. I have been drawing.

しかしながら、上述の従来の中間開度を任意に調整することができるダイヤフラム弁は、最小の中間開度に設定しても、その流量は最大流量の高々１０％までにしか絞ることができない。この一方、作業時間の短縮に必要な最大流量を確保するために大口径のダイヤフラムを使用しなければならず、このため、１つのダイヤフラム弁だけでは、閉弁による規定量の調整を正確に行なうことができないという問題がある。 However, the diaphragm valve capable of arbitrarily adjusting the above-described conventional intermediate opening can restrict the flow rate to at most 10% of the maximum flow rate even when the minimum intermediate opening is set. On the other hand, a large-diameter diaphragm must be used in order to secure the maximum flow rate necessary for shortening the working time. For this reason, only a single diaphragm valve accurately adjusts the prescribed amount by closing the valve. There is a problem that can not be.

本発明はこのような問題を解決するためになされたもので、１つのダイヤフラム弁だけで、作業の中間段階では流量が多く、作業時間の短縮に必要な最大流量を従来どおり確保できると共に、作業の最終段階では流量を少くして閉弁による規定量の調整を極めて正確に行なうことができる、ダイヤフラム弁を提供することを課題とする。 The present invention has been made to solve such problems. With only one diaphragm valve, the flow rate is high in the middle stage of work, and the maximum flow rate required for shortening the work time can be secured as before, and It is an object of the present invention to provide a diaphragm valve capable of adjusting the specified amount by closing the valve with extremely low flow rate and extremely accurately.

上述の課題を解決するために、本発明が採用する手段は、第１弁座と第１弁座を挟んで上流側及び下流側に配設された第１流路とからなる第１通路を有する弁本体と、弁本体の第１弁座に圧接して第１通路を閉じることができる第１ダイヤフラムと、第１ダイヤフラムを開閉させる第１駆動部とを備えたダイヤフラム弁において、その流量が前記第１通路の流量よりも少ないと共に第１弁座の上流側に上流側開口部を第１弁座の下流側に下流側開口部をそれぞれ有して第１弁座の上流側の第１流路と第１弁座の下流側の第１流路とを連通させる第２通路と、第２通路に配設されて第２通路を開閉させる弁装置とを備えたことにある。 In order to solve the above-described problem, the means employed by the present invention includes a first passage comprising a first valve seat and first flow paths disposed on the upstream side and the downstream side across the first valve seat. A diaphragm valve comprising: a valve body having a first diaphragm capable of closing a first passage by being pressed against a first valve seat of the valve body; and a first drive unit that opens and closes the first diaphragm. The first passage on the upstream side of the first valve seat has an upstream opening on the upstream side of the first valve seat and a downstream opening on the downstream side of the first valve seat. There is provided a second passage for communicating the passage and the first passage on the downstream side of the first valve seat, and a valve device disposed in the second passage for opening and closing the second passage.

このように、本発明のダイヤフラム弁は、その流量が、第１弁座とこの第１弁座を挟んで上流側及び下流側に配設された第１流路とからなる第１通路の流量よりも少ないと共に、第１弁座の上流側に上流側開口部を、下流側に下流側開口部をそれぞれ有して第１通路の第１弁座の上流側の第１流路と下流側の第１流路とを連通させる第２通路と、この第２通路に配設されて第２通路を開閉させることができる弁装置とを備えているから、第２通路の流量を第１通路の流量とは無関係に設定することができ、例えば極めて微少に設定することもできる。 Thus, the diaphragm valve of the present invention has a flow rate of the first passage composed of the first valve seat and the first flow path disposed on the upstream side and the downstream side across the first valve seat. The first flow path on the upstream side of the first valve seat in the first passage and the downstream side, each having an upstream opening on the upstream side of the first valve seat and a downstream opening on the downstream side. A second passage that communicates with the first flow passage and a valve device that is disposed in the second passage and can open and close the second passage. The flow rate can be set independently of the flow rate, for example, can be set to be extremely small.

上記ダイヤフラム弁において、ダイヤフラム弁は、流体の充填作業に使用されるダイヤフラム弁であって、充填作業の中間段階では第１駆動部により第１ダイヤフラムを開弁させる一方、充填作業の最終段階では第１駆動部により第１ダイヤフラムを閉弁させて第１通路を閉じると共に弁装置を開弁させて第２通路を開くようにすることが望ましい。 In the diaphragm valve described above, the diaphragm valve is a diaphragm valve used for fluid filling operation, and the first driving unit opens the first diaphragm at an intermediate stage of the filling operation, while the diaphragm valve is used at the final stage of the filling operation. It is desirable that the first diaphragm is closed by one drive unit to close the first passage and the valve device is opened to open the second passage.

このように、充填作業の中間段階では第１ダイヤフラムを開弁させるから、充填作業時間の短縮に必要な最大流量を従来どおり確保することができる。この一方、充填作業の最終段階では、第１ダイヤフラムを閉弁させて第１通路を閉じると共に、弁装置により第２通路を開くことにより、流量を少く、例えば極めて微少にすることもできる。このため、弁装置の閉弁によって行なう容器等への流体の充填量の最終調整を、極めて容易に行なうことができる。したがって、流体の充填作業を極めて正確に行うことができる。 As described above, since the first diaphragm is opened in the intermediate stage of the filling operation, the maximum flow rate necessary for shortening the filling operation time can be ensured as usual. On the other hand, in the final stage of the filling operation, the first diaphragm is closed to close the first passage, and the second passage is opened by the valve device, so that the flow rate can be reduced, for example, extremely small. For this reason, the final adjustment of the filling amount of the fluid into the container or the like performed by closing the valve device can be performed very easily. Therefore, the fluid filling operation can be performed very accurately.

上記ダイヤフラム弁において、第２通路は、第２流路と、内円筒状に形成されて第２流路よりも半径方向の断面積が広く形成されて上流側の第２流路に対して段付き状に拡径して連続する拡径部を有すると共に拡径部の上流側の端面に第２弁座が形成され、弁装置は、先端部が円筒状に形成されて拡径部内に配設される第２ダイヤフラムを有する第２ダイヤフラム弁であり、第２ダイヤフラムを作動させる第２駆動部により第２ダイヤフラムの先端部が第２通路に設けられた第２弁座に圧接されて閉弁することが望ましい。 In the diaphragm valve, the second passage is formed in an inner cylindrical shape with a larger cross-sectional area in the radial direction than the second passage, and is stepped with respect to the upstream second passage. The second valve seat is formed on the end face on the upstream side of the enlarged diameter portion, and the valve device is formed in a cylindrical shape and is arranged in the enlarged diameter portion. A second diaphragm valve having a second diaphragm provided, and the second drive portion for operating the second diaphragm is pressed against the second valve seat provided in the second passage by the second drive portion to close the valve; It is desirable to do.

第２通路に配設される弁装置をこのように構成にすることにより、第２通路の開閉弁を極めて正確に、かつ短時間で行なうことができ、弁装置の閉弁による流体の充填量の最終調整をさらに容易に行うことができ、流体の充填作業をより正確に行うことができる。 By configuring the valve device arranged in the second passage in this way, the opening and closing valve of the second passage can be performed very accurately and in a short time, and the fluid filling amount by closing the valve device The final adjustment can be performed more easily, and the fluid filling operation can be performed more accurately.

上記ダイヤフラム弁において、第２ダイヤフラムは、先端に環状に形成された環状凸部を有し、第２ダイヤフラムの環状凸部は、第２ダイヤフラム弁が閉弁するときに第２弁座に圧接して液漏れを防止することが望ましい。 In the diaphragm valve, the second diaphragm has an annular convex portion formed in an annular shape at the tip, and the annular convex portion of the second diaphragm presses against the second valve seat when the second diaphragm valve is closed. It is desirable to prevent liquid leakage.

このように、第２ダイヤフラムは環状に形成された環状凸部を先端に有し、この第２ダイヤフラムの環状凸部が、第２ダイヤフラム弁が閉弁するときに第２弁座に圧接することにより、第２通路の弁装置の閉弁がさらに確実に行われ、閉弁後に流体の液漏れを確実に防止することができる。 Thus, the second diaphragm has an annular convex portion formed in an annular shape at the tip, and the annular convex portion of the second diaphragm presses against the second valve seat when the second diaphragm valve is closed. Thus, the valve device of the second passage is more reliably closed, and the fluid leakage after the valve can be reliably prevented.

上記ダイヤフラム弁において、弁本体の第１通路は、第１流路から堰状に立ち上がる立上げ部を有し、第１弁座は、立上げ部の先端部に形成され、第２通路の上流側開口部と第２通路の下流側開口部は、立上げ部の上流側壁部と立上げ部の下流側壁部とにそれぞれ形成されることが望ましい。 In the diaphragm valve, the first passage of the valve main body has a rising portion that rises like a weir from the first flow path, and the first valve seat is formed at a tip portion of the rising portion, and is upstream of the second passage. It is desirable that the side opening and the downstream opening of the second passage are respectively formed on the upstream side wall of the rising part and the downstream side wall of the rising part.

このように、弁本体の第１通路に第１流路から堰状に立ち上がる立上げ部を形成し、この立上げ部の先端部に第１弁座を、また立上げ部の上流側壁部と下流側壁部とに第２通路の上流側開口部と下流側開口部とをそれぞれ形成することにより、第１通路を挟んで第１ダイヤフラムの反対側に第２通路を開閉するための弁装置を配設することができるようになり、ダイヤフラム弁全体を小型化することができる。 In this way, a rising portion that rises like a weir from the first flow path is formed in the first passage of the valve body, the first valve seat is formed at the tip of the rising portion, and the upstream side wall portion of the rising portion A valve device for opening and closing the second passage on the opposite side of the first diaphragm across the first passage by forming the upstream opening and the downstream opening of the second passage in the downstream side wall portion, respectively. Thus, the entire diaphragm valve can be reduced in size.

上記ダイヤフラム弁において、弁本体の第１通路は、第１弁座の上流側の第１流路と第１弁座の下流側の第１流路とが略同軸上にある直管状に形成され、第２通路の上流側開口部の近傍の第２流路と第２通路の下流側開口部の近傍の第２流路は、第１通路に対して略平行に形成されることが望ましい。 In the diaphragm valve, the first passage of the valve body is formed in a straight tube shape in which the first flow path on the upstream side of the first valve seat and the first flow path on the downstream side of the first valve seat are substantially coaxial. The second flow path in the vicinity of the upstream opening of the second passage and the second flow path in the vicinity of the downstream opening of the second passage are preferably formed substantially parallel to the first passage.

このように、弁本体の第１通路を直管状に形成すると共に、第２通路の上流側開口部の近傍の第２流路と下流側開口部の近傍の第２流路を第１通路に対して略平行に形成することにより、第１通路及び第２通路を通る流体の流れを極めてスムーズにすることができ、作業の効率向上を図ることができると共に、第２通路の弁装置が閉弁したときに第２通路を流れる流体を反応よく止めることができる。したがって、流体の充填作業を極めて正確に行うことができる。 As described above, the first passage of the valve body is formed in a straight tube shape, and the second passage near the upstream opening of the second passage and the second passage near the downstream opening are used as the first passage. By forming them substantially parallel to each other, the flow of fluid through the first passage and the second passage can be made extremely smooth, the work efficiency can be improved, and the valve device of the second passage is closed. When the valve is operated, the fluid flowing through the second passage can be stopped with good response. Therefore, the fluid filling operation can be performed very accurately.

上記ダイヤフラム弁において、第１ダイヤフラム弁と弁装置とが閉弁した後に第１弁座の下流側の第１通路内に残る残存流体を吸引して液垂れを防止するためのサクションバック機構を第２通路の下流側開口部よりもさらに下流側の第１通路に備えることが望ましい。 In the above diaphragm valve, a suction back mechanism for sucking the residual fluid remaining in the first passage on the downstream side of the first valve seat after the first diaphragm valve and the valve device are closed to prevent dripping is provided. It is desirable to provide the first passage further downstream than the downstream opening of the two passages.

このように、第２通路の下流側開口部のさらに下流側に、第１ダイヤフラム弁及び弁装置が閉弁した後に、第１弁座の下流側の第１通路内及び第２弁座の下流側の第２通路内に残る残留流体を吸引するためのサクションバック機構を備えることにより、第１ダイヤフラム弁及び弁装置が閉弁した後の液垂れを確実に防止することができる。 Thus, after the first diaphragm valve and the valve device are closed further downstream of the downstream side opening of the second passage, the first passage on the downstream side of the first valve seat and the downstream of the second valve seat. By providing the suction back mechanism for sucking the residual fluid remaining in the second passage on the side, it is possible to reliably prevent liquid dripping after the first diaphragm valve and the valve device are closed.

本発明のダイヤフラム弁は、第１弁座と第１弁座を挟んで上流側及び下流側に配設された第１流路とからなる第１通路を有する弁本体と、弁本体の第１弁座に圧接して第１通路を閉じることができる第１ダイヤフラムと、第１ダイヤフラムを開閉させる第１駆動部とを備えたダイヤフラム弁において、その流量が前記第１通路の流量よりも少ないと共に第１弁座の上流側に上流側開口部を第１弁座の下流側に下流側開口部をそれぞれ有して第１弁座の上流側の第１流路と第１弁座の下流側の第１流路とを連通させる第２通路と、第２通路に配設されて第２通路を開閉させる弁装置とを備える。 The diaphragm valve of the present invention includes a valve body having a first passage composed of a first valve seat and a first flow path disposed on the upstream side and the downstream side across the first valve seat, and a first of the valve body. In a diaphragm valve comprising a first diaphragm capable of closing the first passage by being pressed against the valve seat, and a first drive part for opening and closing the first diaphragm, the flow rate is lower than the flow rate of the first passage. An upstream opening on the upstream side of the first valve seat and a downstream opening on the downstream side of the first valve seat, respectively, the first flow path upstream of the first valve seat and the downstream side of the first valve seat A second passage that communicates with the first flow path, and a valve device that is disposed in the second passage and opens and closes the second passage.

したがって、第２通路の流量を第１通路の流量とは無関係に設定することができ、１つのダイヤフラム弁だけで、作業の中間段階では流量を多く、作業時間の短縮に必要な最大流量を従来どおり確保できると共に、作業の最終段階では流量を少くして閉弁による規定量の調整を極めて正確に行なうことができる、という優れた効果を奏する。 Therefore, the flow rate of the second passage can be set independently of the flow rate of the first passage, and only one diaphragm valve is used, and the flow rate is increased in the middle stage of work, and the maximum flow rate required for shortening the work time is conventionally increased. In the final stage of the work, the flow rate can be reduced and the regulated amount can be adjusted very accurately by closing the valve.

本発明に係るダイヤフラム弁を示す外観図である。It is an external view which shows the diaphragm valve which concerns on this invention. 本発明に係るダイヤフラム弁を示す断面図である。It is sectional drawing which shows the diaphragm valve which concerns on this invention. 図２の弁本体の一部を示す詳細断面図である。FIG. 3 is a detailed cross-sectional view showing a part of the valve body of FIG. 2. 図３の第２ダイヤフラムの先端部を示す断面図である。It is sectional drawing which shows the front-end | tip part of the 2nd diaphragm of FIG. 図１のダイヤフラム弁の作動を示す表である。It is a table | surface which shows the action | operation of the diaphragm valve of FIG. 従来のダイヤフラム弁を示す断面図である。It is sectional drawing which shows the conventional diaphragm valve.

本発明に係るダ６ヤフラム弁を実施するための最良の形態を、図１ないし図５を参照して詳細に説明する。 The best mode for carrying out the diaphragm valve according to the present invention will be described in detail with reference to FIGS.

図１に示すように、本ダイヤフラム弁１は、容器等への流体の充填作業に使用されるダイヤフラム弁であって、弁本体２と、第１ダイヤフラム弁３、第２ダイヤフラム弁（弁装置）４と、サクションバック弁（サクションバック機構）５とから構成される。 As shown in FIG. 1, the diaphragm valve 1 is a diaphragm valve used for filling a container or the like with a fluid, and includes a valve body 2, a first diaphragm valve 3, and a second diaphragm valve (valve device). 4 and a suction back valve (suction back mechanism) 5.

図２に示すように、弁本体２には、第１弁座１１と、この第１弁座１１を挟んで上流側及び下流側にそれぞれ配設された第１流路１２，１３とからなる第１通路１０が形成される。この第１通路１０は、第１弁座１１の上流側と下流側とが略同軸上にある直管状に形成され、中間部に第１流路１２，１３から堰状に立ち上がる立上げ部１４を有し、第１弁座１１は、この立上げ部１４の先端部（図示上端部）に形成される。 As shown in FIG. 2, the valve body 2 includes a first valve seat 11 and first flow paths 12 and 13 disposed on the upstream side and the downstream side of the first valve seat 11, respectively. A first passage 10 is formed. The first passage 10 is formed in a straight tube shape in which the upstream side and the downstream side of the first valve seat 11 are substantially coaxial, and a rising portion 14 that rises in a dam shape from the first flow paths 12 and 13 at an intermediate portion. The first valve seat 11 is formed at the distal end portion (the upper end portion in the figure) of the rising portion 14.

弁本体２には、上述の第１弁座１１の上流側の第１流路１２に開口する上流側開口部２３と、第１弁座１１の下流側の第１流路１３に開口する下流側開口部２４をそれぞれ有して、第１弁座１１の上流側の第１流路１２と下流側の第１流路１３とを連通させる第２通路２０が形成される。すなわち、第２通路２０は、第１弁座１１を挟んで立上げ部１４を上流側から下流側へ貫通している。 The valve body 2 includes an upstream opening 23 that opens to the first flow path 12 on the upstream side of the first valve seat 11 and a downstream that opens to the first flow path 13 on the downstream side of the first valve seat 11. A second passage 20 is formed which has a side opening 24 and communicates the first flow path 12 on the upstream side of the first valve seat 11 and the first flow path 13 on the downstream side. That is, the second passage 20 penetrates the rising portion 14 from the upstream side to the downstream side with the first valve seat 11 interposed therebetween.

上流側開口部２３と下流側開口部２４は、第１通路１０の立上げ部１４の上流側壁部１４ａと下流側壁部１４ｂとにそれぞれ形成され、上流側開口部２３の近傍の第２流路２１と下流側開口部２４の近傍の第２流路２２は、第１通路１０に対して、すなわち第１流路１２，１３に対して略平行に形成される。 The upstream opening 23 and the downstream opening 24 are respectively formed on the upstream side wall 14 a and the downstream side wall 14 b of the rising portion 14 of the first passage 10, and the second flow path in the vicinity of the upstream side opening 23. 21 and the second flow path 22 in the vicinity of the downstream opening 24 are formed substantially parallel to the first passage 10, that is, to the first flow paths 12 and 13.

第２通路２０の流量は、第２流路２１，２２の口径を調整することにより、従来の１個のダイヤフラム弁では不可能であった第１通路１０の流量の１０％未満に設定される。後述するように、本ダイヤフラム弁１では、特にこの第２通路２０の流量を第１通路１０の流量よりも極めて少なく、例えば第１通路１０の流量の、より詳細には第１通路１０の第１弁座１１と第１ダイヤフラム６との間を通過する流体の流量の、１％前後あるいはそれ以下に設定される。 The flow rate of the second passage 20 is set to less than 10% of the flow rate of the first passage 10 which is impossible with one conventional diaphragm valve by adjusting the diameters of the second flow passages 21 and 22. . As will be described later, in the present diaphragm valve 1, the flow rate of the second passage 20 is extremely smaller than the flow rate of the first passage 10, for example, the flow rate of the first passage 10, more specifically, the first passage 10. It is set to about 1% or less of the flow rate of the fluid passing between the one valve seat 11 and the first diaphragm 6.

第２通路２０は、第２流路２１，２２と、第２流路２１，２２の中間部に内円筒状に形成され、第２流路２１，２２よりも半径方向の断面積が広く形成されて、上流側の第２流路２１に対して段付き状に拡径して連続する拡径部２５とを有する。拡径部２５の上流側の端面２６に、第２ダイヤフラム弁４の弁座となる平面状の第２弁座２７が形成される。また、図４に示すように、第２通路２０の拡径部２５は、内円筒状の内周部２８に、かつ上記第２弁座２７の近傍に、下流側の第２流路２２への出口となる弁出口開口部２９ａを有する。 The second passage 20 is formed in an inner cylindrical shape in the middle of the second flow paths 21 and 22 and the second flow paths 21 and 22, and has a larger cross-sectional area in the radial direction than the second flow paths 21 and 22. Then, it has a diameter-enlarged portion 25 that is continuous and expands in a stepped manner with respect to the second flow path 21 on the upstream side. A planar second valve seat 27 serving as a valve seat of the second diaphragm valve 4 is formed on the upstream end face 26 of the enlarged diameter portion 25. Further, as shown in FIG. 4, the diameter-enlarged portion 25 of the second passage 20 is connected to the inner cylindrical inner peripheral portion 28 and in the vicinity of the second valve seat 27 to the downstream second flow path 22. Has a valve outlet opening 29a.

図２に示すように、第１ダイヤフラム弁３は、弁本体２の第１弁座１１に圧接して第１通路１０を閉じることができる第１ダイヤフラム６と、この第１ダイヤフラム６を開閉させる第１駆動部３０とを備える。この第１ダイヤフラム弁３は、中間開度に任意に調整することができるダイヤフラム弁であってもよい。 As shown in FIG. 2, the first diaphragm valve 3 is configured to open and close the first diaphragm 6 that can close the first passage 10 by pressing against the first valve seat 11 of the valve body 2. A first drive unit 30. The first diaphragm valve 3 may be a diaphragm valve that can be arbitrarily adjusted to an intermediate opening.

第１駆動部３０は、コイルバネ３５により図示下方に付勢されたピストン３６が、空気シリンダ３７内を気密に往復摺動する。作動空気がピストン３６の図示下側の空気室３８内に注入されると、ピストン３６はコイルバネ３５のばね力に抗して上昇する。ピストン３６にはスピンドル３９が取り付けられ、スピンドル３９はピストン３６によって上下に往復する。 In the first drive unit 30, the piston 36 urged downward in the figure by the coil spring 35 reciprocally slides in the air cylinder 37 in an airtight manner. When the working air is injected into the air chamber 38 on the lower side of the piston 36, the piston 36 rises against the spring force of the coil spring 35. A spindle 39 is attached to the piston 36, and the spindle 39 reciprocates up and down by the piston 36.

図２に示すように、スピンドル３９の先端部にピン４１を介してコンプレッサ４２が取り付けられる。スピンドル３９が、コイルバネ３５の付勢力又は作動空気によって往復することにより、コンプレッサ４２を介して第１ダイヤフラム６を作動させる。第１ダイヤフラム６が第１弁座１１に圧接することにより、第１ダイヤフラム弁３は閉弁する。なお、この第１駆動部３０は必ずしもこのような構成のものに限定されるものではない。 As shown in FIG. 2, a compressor 42 is attached to the tip of the spindle 39 via a pin 41. The spindle 39 is reciprocated by the urging force of the coil spring 35 or the operating air, thereby operating the first diaphragm 6 via the compressor 42. When the first diaphragm 6 is in pressure contact with the first valve seat 11, the first diaphragm valve 3 is closed. The first drive unit 30 is not necessarily limited to such a configuration.

図３に示すように、第２ダイヤフラム弁４は、弁本体２の第２通路２０に形成された第２弁座２７に圧接して第２通路２０を閉じるための第２ダイヤフラム７と、この第２ダイヤフラム７を開閉させる第２駆動部５０とを有する。 As shown in FIG. 3, the second diaphragm valve 4 includes a second diaphragm 7 that presses against a second valve seat 27 formed in the second passage 20 of the valve body 2 and closes the second passage 20. And a second drive unit 50 for opening and closing the second diaphragm 7.

図４に示すように、第２ダイヤフラム７は、先端部が円筒状に形成されて第２通路２０の拡径部２５内に配設される。図３の第２駆動部５０により、第２ダイヤフラム７の先端部が第２通路２０に設けられた第２弁座２７に圧接されて閉弁する。この第２ダイヤフラム７は、先端に環状に形成された環状凸部８を有し、この第２ダイヤフラムの環状凸部８は、第２ダイヤフラム７が閉弁したときに第２弁座２７に圧接して、閉弁後の流体の液漏れを防止する。 As shown in FIG. 4, the second diaphragm 7 has a tip formed in a cylindrical shape and is disposed in the enlarged diameter portion 25 of the second passage 20. 3, the distal end portion of the second diaphragm 7 is brought into pressure contact with the second valve seat 27 provided in the second passage 20 to close the valve. The second diaphragm 7 has an annular convex portion 8 formed annularly at the tip, and the annular convex portion 8 of the second diaphragm is pressed against the second valve seat 27 when the second diaphragm 7 is closed. Thus, fluid leakage after the valve is closed is prevented.

第２ダイヤフラム弁４の第２駆動部５０は、基本的には上述の第１ダイヤフラム弁３の第１駆動部３０と同様の構成であり、その説明は省略する。 The second drive unit 50 of the second diaphragm valve 4 has basically the same configuration as the first drive unit 30 of the first diaphragm valve 3 described above, and a description thereof is omitted.

第１ダイヤフラム弁３及び第２ダイヤフラム弁４が閉弁した後に、第１弁座１１の下流側の第１通路１０内、及び第２弁座２７の下流側の第２通路２０内に残る残留流体を吸引するためのサクションバック弁５が、第１通路１０に配設される。 After the first diaphragm valve 3 and the second diaphragm valve 4 are closed, the residue remaining in the first passage 10 on the downstream side of the first valve seat 11 and in the second passage 20 on the downstream side of the second valve seat 27. A suction back valve 5 for sucking fluid is disposed in the first passage 10.

図１に示すように、サクションバック弁５は、第２通路２０の下流側開口部２４よりもさらに下流側の第１通路１０に配設される。サクションバック弁５が開弁することにより、図２に示すサクションバック弁５のサクションダイヤフラム５ａが一定長さだけ弁５側へ引っ込む。これにより、第１弁座１１の下流側の第１流路１３と、第２弁座２７の下流側の第２流路２２に負圧を形成し、それらに残る残留流体を吸引して、第１ダイヤフラム弁及び第２ダイヤフラム弁４が閉弁した後の液垂れを確実に防止する。なお、サクションバック機構は、必ずしもサクションバック弁５に限定されるものではない。 As shown in FIG. 1, the suction back valve 5 is disposed in the first passage 10 further downstream than the downstream opening 24 of the second passage 20. When the suction back valve 5 is opened, the suction diaphragm 5a of the suction back valve 5 shown in FIG. 2 is retracted to the valve 5 side by a certain length. Thereby, a negative pressure is formed in the first flow path 13 on the downstream side of the first valve seat 11 and the second flow path 22 on the downstream side of the second valve seat 27, and the residual fluid remaining in them is sucked, Liquid dripping after the first diaphragm valve and the second diaphragm valve 4 are closed is reliably prevented. The suction back mechanism is not necessarily limited to the suction back valve 5.

次に、本ダイヤフラム弁１の作動について説明する。図５に示すように、初期状態において、上述の第１ダイヤフラム弁３及び第２ダイヤフラム弁４は閉弁しており、ダイヤフラム弁１及び第２ダイヤフラム７を通過する流体の流量は零である。また、サクションバック弁５は開弁しており、第１弁座１１の下流側の第１流路１３と、第２弁座２７の下流側の第２流路２２に残る残留流体が、ダイヤフラム弁１内に吸引されている。 Next, the operation of the diaphragm valve 1 will be described. As shown in FIG. 5, in the initial state, the first diaphragm valve 3 and the second diaphragm valve 4 described above are closed, and the flow rate of the fluid passing through the diaphragm valve 1 and the second diaphragm 7 is zero. Further, the suction back valve 5 is opened, and the residual fluid remaining in the first flow path 13 on the downstream side of the first valve seat 11 and the second flow path 22 on the downstream side of the second valve seat 27 is caused by the diaphragm. Sucked into the valve 1.

充填作業が開始されると、ステップ１として第２ダイヤフラム弁４だけが開弁し、上記弁本体２の第２通路２０を通して、微少な流量の流体を容器へ充填し始める。次に、中間段階のステップ２として、上述の第２ダイヤフラム弁４は開弁のまま、さらに第１ダイヤフラム弁３を開弁させる。これにより、容器への流体の充填流量は、第２ダイヤフラム弁４だけの場合の、例えば１００倍以上に増加する。これにより、容器への流体の充填は急速に行われる。 When the filling operation is started, only the second diaphragm valve 4 is opened as step 1 and the container starts to be filled with a small amount of fluid through the second passage 20 of the valve body 2. Next, as Step 2 in the intermediate stage, the first diaphragm valve 3 is further opened while the second diaphragm valve 4 described above remains open. Thereby, the filling flow rate of the fluid into the container is increased by, for example, 100 times or more of the case of only the second diaphragm valve 4. As a result, the container is rapidly filled with fluid.

次に、最終段階のステップ３として、第２ダイヤフラム弁４は開弁のまま、第１ダイヤフラム弁３だけを閉弁させる。これにより、容器への流体の充填流量は、第２ダイヤフラム弁４も同時に開弁していたときの例えば１００分の１、あるいはそれ以下に減少し、微少になる。このように、第２ダイヤフラム弁４により、容器への流体の充填量の最終調整が行われる。上述のステップ１からステップ３までの間は、サクションバック弁５は閉弁しており、吸引状態は形成されない。 Next, as Step 3 in the final stage, only the first diaphragm valve 3 is closed while the second diaphragm valve 4 remains open. Thereby, the filling flow rate of the fluid into the container is reduced to, for example, 1/100 or less when the second diaphragm valve 4 is opened at the same time, and becomes small. Thus, the final adjustment of the filling amount of the fluid into the container is performed by the second diaphragm valve 4. Between step 1 and step 3 described above, the suction back valve 5 is closed and no suction state is formed.

容器への流体の充填作業の終了時には、上述の初期状態と同様に、第１ダイヤフラム弁３及び第２ダイヤフラム弁４は閉弁し、このダイヤフラム弁１を通過する流体の流量は零となる。これと共に、サクションバック弁５が開弁し、第１弁座１１の下流側の第１流路１３と、第２弁座２７の下流側の第２流路２２に負圧を形成し、それらに残る残留流体を吸引して、第１ダイヤフラム弁３及び第２ダイヤフラム弁４が閉弁した後のダイヤフラム弁１からの液垂れを確実に防止する。 At the end of the operation of filling the fluid into the container, the first diaphragm valve 3 and the second diaphragm valve 4 are closed as in the above-described initial state, and the flow rate of the fluid passing through the diaphragm valve 1 becomes zero. At the same time, the suction back valve 5 is opened, and negative pressure is formed in the first flow path 13 on the downstream side of the first valve seat 11 and the second flow path 22 on the downstream side of the second valve seat 27. Residual fluid remaining in the first and second diaphragm valves 3 and 4 is reliably prevented from dripping after the first diaphragm valve 3 and the second diaphragm valve 4 are closed.

以上のように、本ダイヤフラム弁１は、大口径の第１ダイヤフラム弁３と、その流量が第１弁座１１と第１ダイヤフラム３との間を通過する流体の通過流量、つまり、第１通路１０の流体の流量よりも極めて少ないと共に、第１弁座１１の上流側に上流側開口部２３を下流側に下流側開口部２４をそれぞれ有して、第１弁座１１の上流側の第１流路１２と下流側の第１流路１３とを連通させる第２通路２０と、この第２通路２０を開閉する第２ダイヤフラム弁４とを備えているから、第２通路の流量を第１通路の流量とは無関係に設定することができ、例えば、上述のように極めて微少に設定することもできる。 As described above, the diaphragm valve 1 includes the large-diameter first diaphragm valve 3 and the flow rate of fluid passing between the first valve seat 11 and the first diaphragm 3, that is, the first passage. The flow rate of the fluid 10 is extremely small, and has an upstream opening 23 on the upstream side of the first valve seat 11 and a downstream opening 24 on the downstream side. Since the second passage 20 that communicates the first passage 12 and the downstream first passage 13 and the second diaphragm valve 4 that opens and closes the second passage 20 are provided, the flow rate of the second passage It can be set regardless of the flow rate of one passage, and for example, can be set to be extremely small as described above.

したがって、本ダイヤフラム弁１は、１つのダイヤフラム弁１だけで、作業の中間段階では流量が多く、作業時間の短縮に必要な最大流量を従来どおり確保できると共に、作業の最終段階では流量を少くして、閉弁による規定量の調整を極めて正確に行なうことができるものである。 Therefore, this diaphragm valve 1 has only one diaphragm valve 1 and has a high flow rate in the intermediate stage of the work, and can ensure the maximum flow rate necessary for shortening the work time as before, while reducing the flow rate in the final stage of the work. Thus, the regulated amount can be adjusted with accuracy by closing the valve.

より具体的には、充填作業の中間段階では大口径の第１ダイヤフラム３を開弁させ、充填作業の最終段階では第１ダイヤフラムを閉弁させると共に、第２ダイヤフラム弁４によって第２通路２０を開くように作動させることにより、充填作業時間の短縮に必要な最大流量を従来どおり確保できると共に、充填作業の最終段階では極めて微少にすることもでき、第２ダイヤフラム４の閉弁によって行なう容器等への流体の充填量の調整を極めて容易に行なうことができる。したがって、流体の充填作業を極めて正確に行うことができる。 More specifically, the large-diameter first diaphragm 3 is opened in the intermediate stage of the filling operation, and the first diaphragm is closed in the final stage of the filling operation, and the second diaphragm valve 4 allows the second passage 20 to be opened. By operating to open, the maximum flow rate required for shortening the filling work time can be ensured as before, and it can be made extremely small at the final stage of the filling work, and the container or the like performed by closing the second diaphragm 4 It is possible to adjust the filling amount of fluid into the tank very easily. Therefore, the fluid filling operation can be performed very accurately.

さらに、第２通路２０は、内円筒状に形成されてその上流側の第２流路２１よりも半径方向の断面積が広く形成されて、この上流側の第２流路２１に対して段付き状に拡径して連続する拡径部２５を有すると共に、この拡径部２５の上流側の端面２６に第２弁座２７が形成される。また、第２ダイヤフラム弁４は、先端部が円筒状に形成されて拡径部２５内に配設される第２ダイヤフラム７を有し、第２ダイヤフラム７の先端部がこの第２弁座２７に圧接されて閉弁する。 Further, the second passage 20 is formed in an inner cylindrical shape and has a larger cross-sectional area in the radial direction than the second flow channel 21 on the upstream side thereof, and is stepped with respect to the second flow channel 21 on the upstream side. While having the diameter-expanding part 25 which expands in a sticking shape and continues, a second valve seat 27 is formed on the upstream end face 26 of the diameter-expanding part 25. The second diaphragm valve 4 has a second diaphragm 7 having a tip formed in a cylindrical shape and disposed in the enlarged diameter portion 25. The tip of the second diaphragm 7 is the second valve seat 27. The valve is closed by pressure contact.

したがって、第２通路の開閉弁を極めて正確に、かつ短時間で行なうことができ、第２ダイヤフラム弁４の閉弁による流量の規定量の調整をさらに容易に行うことができ、流体の充填作業を一段と正確に行うことができる。 Therefore, the opening / closing valve of the second passage can be performed very accurately and in a short time, the regulated amount of the flow rate can be adjusted more easily by closing the second diaphragm valve 4, and the fluid filling operation can be performed. Can be performed more accurately.

また、第２ダイヤフラム７は、先端に環状に形成された環状凸部８を有し、第２ダイヤフラム７が閉弁するときに、第２ダイヤフラム７の環状凸部８が平面状の第２弁座２７に圧接することにより、第２通路２０の閉弁がさらに確実に行われ、閉弁後の液漏れを確実に防止することができる。 The second diaphragm 7 has an annular convex portion 8 formed annularly at the tip, and when the second diaphragm 7 is closed, the annular convex portion 8 of the second diaphragm 7 is a planar second valve. By press-contacting to the seat 27, the second passage 20 is more reliably closed, and liquid leakage after the valve closing can be reliably prevented.

さらに、弁本体２の第１通路１０は、第１流路１０から堰状に立ち上がる立上げ部１４を有し、第１弁座１１は、この立上げ部１４の先端部に形成され、また、第２通路２０の上流側開口部２３と下流側開口部２４は、立上げ部１４の上流側壁部１４ａと下流側壁部１４ｂとにそれぞれ形成されるから、図１に示すように、第１通路１０を挟んで第１ダイヤフラム６の反対側に第２通路２０を開閉するための第２ダイヤフラム７を配設することができ、ダイヤフラム弁１全体を小型化することができる。 Further, the first passage 10 of the valve body 2 has a rising portion 14 that rises like a weir from the first flow path 10, and the first valve seat 11 is formed at the tip of the rising portion 14, The upstream side opening 23 and the downstream side opening 24 of the second passage 20 are formed in the upstream side wall part 14a and the downstream side wall part 14b of the rising part 14, respectively. Therefore, as shown in FIG. A second diaphragm 7 for opening and closing the second passage 20 can be disposed on the opposite side of the first diaphragm 6 with the passage 10 interposed therebetween, and the entire diaphragm valve 1 can be reduced in size.

また、弁本体２の第１通路１０を直管状に形成すると共に、第２通路２０の上流側開口部２３の近傍の第２流路２１と下流側開口部２４の近傍の第２流路２２を第１通路１０に対して略平行に形成することにより、第１通路１０及び第２通路２０を通る流体の流れを極めてスムーズにすることができ、作業の効率向上を図ることができると共に、第２ダイヤフラム弁４が閉弁したときに、第２通路２０を流れる流体を反応よく止めることができる。したがって、流体の充填作業を極めて正確に行うことができる。 Further, the first passage 10 of the valve body 2 is formed in a straight tube shape, and the second passage 21 near the upstream opening 23 of the second passage 20 and the second passage 22 near the downstream opening 24. Is formed substantially parallel to the first passage 10, the flow of fluid through the first passage 10 and the second passage 20 can be made extremely smooth, and work efficiency can be improved. When the second diaphragm valve 4 is closed, the fluid flowing through the second passage 20 can be stopped with good reaction. Therefore, the fluid filling operation can be performed very accurately.

さらに、第２通路２０の下流側開口部２４のさらに下流側に、第１ダイヤフラム弁３及び第２ダイヤフラム弁４が閉弁した後に、第１弁座１１の下流側の第１通路１０内及び第２弁座２７の下流側の第２通路２０内に残る残留流体を吸引するためのサクションバック弁５を備えたことにより、第１ダイヤフラム弁３及び第２ダイヤフラム弁４が閉弁した後の液垂れを確実に防止することができる。 Furthermore, after the first diaphragm valve 3 and the second diaphragm valve 4 are closed further downstream of the downstream opening 24 of the second passage 20, the first passage 10 in the downstream of the first valve seat 11 and Since the suction back valve 5 for sucking the residual fluid remaining in the second passage 20 on the downstream side of the second valve seat 27 is provided, the first diaphragm valve 3 and the second diaphragm valve 4 are closed. Liquid dripping can be reliably prevented.

なお、上述のダイヤフラム弁は一例にすぎず、本発明の趣旨に基づいて種々の変形が可能であり、それらを本発明の範囲から排除するものではない。例えば、本発明の弁装置は、必ずしもダイヤフラム弁に限定されるものではない。 The above-described diaphragm valve is merely an example, and various modifications can be made based on the spirit of the present invention, and they are not excluded from the scope of the present invention. For example, the valve device of the present invention is not necessarily limited to a diaphragm valve.

１ダイヤフラム弁
２弁本体
３第１ダイヤフラム弁
４第２ダイヤフラム弁（弁装置）
５サクションバック弁（サクションバック機構）
５ａサクションダイヤフラム
６第１ダイヤフラム
７第２ダイヤフラム
８環状凸部
１０第１通路
１１第１弁座
１２，１３第１流路
１４立上げ部
１４ａ上流側壁部
１４ｂ下流側壁部
２０第２通路
２１，２２第２流路
２３上流側開口部
２４下流側開口部
２５拡径部
２６端面
２７第２弁座
２９弁入口開口部
２９ａ弁出口開口部
３０第１駆動部
３５コイルバネ
３６ピストン
３７空気シリンダ
３８空気室
３９スピンドル
４１ピン
４２コンプレッサ
５０第２駆動部
１０１シリンダ
１０２ピストン
１０３スピンドル
１０４コンプレッサ
１０５ダイヤフラム
１０６バルブ本体
１０７通路
１０８立上げ部
１０９弁座 DESCRIPTION OF SYMBOLS 1 Diaphragm valve 2 Valve body 3 1st diaphragm valve 4 2nd diaphragm valve (valve device)
5 Suction back valve (suction back mechanism)
5a Suction diaphragm 6 First diaphragm 7 Second diaphragm 8 Annular convex portion 10 First passage 11 First valve seat 12, 13 First flow path 14 Rising portion 14a Upstream side wall portion 14b Downstream side wall portion 20 Second passages 21, 22 Second flow path 23 Upstream side opening 24 Downstream side opening 25 Expanded diameter part 26 End surface 27 Second valve seat 29 Valve inlet opening 29a Valve outlet opening 30 First drive part 35 Coil spring 36 Piston 37 Air cylinder 38 Air chamber 39 Spindle 41 Pin 42 Compressor 50 Second drive part 101 Cylinder 102 Piston 103 Spindle 104 Compressor 105 Diaphragm 106 Valve body 107 Passage 108 Rising part 109 Valve seat

Claims

第１弁座（１１）と前記第１弁座を挟んで上流側及び下流側に配設された第１流路（１２，１３）とからなる第１通路（１０）を有する弁本体（２）と、前記弁本体の前記第１弁座に圧接して前記第１通路を閉じることができる第１ダイヤフラム（６）と、前記第１ダイヤフラムを開閉させる第１駆動部（３０）とを備えたダイヤフラム弁（１）において、流量が前記第１通路の流量よりも少ないと共に前記第１弁座の上流側に上流側開口部（２３）を前記第１弁座の下流側に下流側開口部（２４）をそれぞれ有して前記第１弁座の上流側の前記第１流路と前記第１弁座の下流側の前記第１流路とを連通させる第２通路（２０）と、前記第２通路に配設されて前記第２通路を開閉させる弁装置（４）とを備えたことを特徴とするダイヤフラム弁。 A valve body (2) having a first passage (10) comprising a first valve seat (11) and first flow paths (12, 13) disposed on the upstream side and the downstream side across the first valve seat. ), A first diaphragm (6) capable of closing the first passage by being pressed against the first valve seat of the valve body, and a first drive part (30) for opening and closing the first diaphragm. In the diaphragm valve (1), the flow rate is lower than the flow rate of the first passage, the upstream opening (23) is located upstream of the first valve seat, and the downstream opening is located downstream of the first valve seat. (24) each having a second passage (20) for communicating the first flow path upstream of the first valve seat and the first flow path downstream of the first valve seat; A diaphragm comprising a valve device (4) disposed in the second passage for opening and closing the second passage. .

流体の充填作業に使用されるダイヤフラム弁（１）であって、前記充填作業の中間段階では前記第１駆動部（３０）により前記第１ダイヤフラム（６）を開弁させる一方、前記充填作業の最終段階では前記第１駆動部により前記第１ダイヤフラムを閉弁させて前記第１通路（１２，１３）を閉じると共に前記弁装置（４）を開弁させて前記第２通路（２０）を開くようにしたことを特徴とする請求項１に記載のダイヤフラム弁。 A diaphragm valve (1) used for a fluid filling operation, wherein in the intermediate stage of the filling operation, the first driving unit (30) opens the first diaphragm (6) while the filling operation is performed. In the final stage, the first driving unit closes the first diaphragm to close the first passages (12, 13) and opens the valve device (4) to open the second passage (20). The diaphragm valve according to claim 1, wherein the diaphragm valve is configured as described above.

前記第２通路（２０）は、第２流路（２１，２２）と、内円筒状に形成されて前記第２流路よりも半径方向の断面積が広く形成されて上流側の前記第２流路に対して段付き状に拡径して連続する拡径部（２５）を有すると共に前記拡径部の上流側の端面（２６）に第２弁座（２７）が形成され、前記弁装置は、先端部が円筒状に形成されて前記拡径部内に配設される第２ダイヤフラム（７）を有する第２ダイヤフラム弁（４）であり、前記第２ダイヤフラムを作動させる第２駆動部（５０）により前記第２ダイヤフラムの前記先端部が前記第２通路に設けられた前記第２弁座に圧接されて閉弁することを特徴とする請求項１又は２に記載のダイヤフラム弁。 The second passage (20) is formed in an inner cylindrical shape with the second flow path (21, 22) and has a larger cross-sectional area in the radial direction than the second flow path, and the second passage on the upstream side. A second valve seat (27) is formed on the upstream end face (26) of the diameter-enlarged portion, and has a diameter-expanded portion (25) continuous in a stepped shape with respect to the flow path. The device is a second diaphragm valve (4) having a second diaphragm (7) having a tip formed in a cylindrical shape and disposed in the enlarged diameter portion, and a second driving unit that operates the second diaphragm. 3. The diaphragm valve according to claim 1, wherein the distal end portion of the second diaphragm is pressed against the second valve seat provided in the second passage and is closed by (50).

前記第２ダイヤフラム（７）は、先端に環状に形成された環状凸部（８）を有し、前記第２ダイヤフラムの前記環状凸部は、前記第２ダイヤフラム弁（４）が閉弁するときに前記第２弁座に圧接して液漏れを防止することを特徴とする請求項３に記載のダイヤフラム弁。 The second diaphragm (7) has an annular projection (8) formed in an annular shape at the tip, and the annular projection of the second diaphragm is closed when the second diaphragm valve (4) is closed. The diaphragm valve according to claim 3, wherein the diaphragm valve is pressed against the second valve seat to prevent liquid leakage.

前記弁本体（２）の前記第１通路（１０）は、前記第１流路（１２，１３）から堰状に立ち上がる立上げ部（１４）を有し、前記第１弁座（１１）は、前記立上げ部の先端部に形成され、前記第２通路（２０）の前記上流側開口部（２３）と前記第２通路の前記下流側開口部（２４）は、前記立上げ部の上流側壁部（１４ａ）と前記立上げ部の下流側壁部（１４ｂ）とにそれぞれ形成されることを特徴とする請求項１ないし４のいずれかに記載のダイヤフラム弁。 The first passage (10) of the valve body (2) has a rising portion (14) that rises like a weir from the first flow path (12, 13), and the first valve seat (11) The upstream opening (23) of the second passage (20) and the downstream opening (24) of the second passage are formed upstream of the rising portion. The diaphragm valve according to any one of claims 1 to 4, wherein the diaphragm valve is formed on each of the side wall (14a) and the downstream side wall (14b) of the rising portion.

前記弁本体（２）の前記第１通路（１０）は、前記第１弁座（１１）の上流側の前記第１流路（１２）と前記第１弁座の下流側の前記第１流路（１３）とが略同軸上にある直管状に形成され、前記第２通路（２０）の前記上流側開口部の近傍の前記第２流路（２１）と前記第２通路の前記下流側開口部の近傍の前記第２流路（２２）は、前記第１通路（１０）に対して略平行に形成されることを特徴とする請求項１ないし５のいずれかに記載のダイヤフラム弁。 The first passage (10) of the valve body (2) includes the first flow path (12) on the upstream side of the first valve seat (11) and the first flow on the downstream side of the first valve seat. The passage (13) is formed in a straight tube shape that is substantially coaxial with the second passage (21) in the vicinity of the upstream opening of the second passage (20) and the downstream side of the second passage. The diaphragm valve according to any one of claims 1 to 5, wherein the second flow path (22) in the vicinity of the opening is formed substantially parallel to the first passage (10).

前記第１ダイヤフラム弁（３）と前記弁装置（４）とが閉弁した後に前記第１弁座（１１）の下流側の前記第１通路（１０）内に残る残存流体を吸引して液垂れを防止するためのサクションバック機構（５）を前記第２通路の前記下流側開口部（２４）よりもさらに下流側の前記第１通路（１０）に備えたことを特徴とする請求項１ないし６のいずれかに記載のダイヤフラム弁。 After the first diaphragm valve (3) and the valve device (4) are closed, the remaining fluid remaining in the first passage (10) on the downstream side of the first valve seat (11) is sucked to be liquid. The suction back mechanism (5) for preventing sagging is provided in the first passage (10) further downstream than the downstream opening (24) of the second passage. The diaphragm valve in any one of thru | or 6.