JP2014056264A - 波長可変フィルタ及び波長可変レーザモジュール - Google Patents
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- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
- G02F1/3133—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06255—Controlling the frequency of the radiation
- H01S5/06256—Controlling the frequency of the radiation with DBR-structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
- H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
- H01S5/1035—Forward coupled structures [DFC]
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
【解決手段】半導体基板上に、第1のコア層をもつ第1の光導波路と第2のコア層をもつ第2の光導波路とが面内で平行に設けられ、それらの光導波路のうちで1つ以上の光導波路に回折格子が形成され、第1のコア層にはp型導電型の半導体とn型導電型の半導体が近接し電流注入または電圧印加可能な構造をもち、第2のコア層には一方の導電型の半導体のみが接しており、前記第2のコア層の上部には、前記第1のコア層への前記電流注入または前記電圧印加から電気的に分離させる半絶縁性半導体層が形成される。
【選択図】図4
Description
本発明の第1の実施例を、図4、図5、図6を用いて説明する。本実施例はInP基板上の1.55μm帯の横方向結合型同方向性光結合器型波長可変フィルタである。本実施例の横方向結合型同方向性光結合器型波長可変フィルタの部分断面図を図4に、本実施例の横方向結合型同方向性光結合器型波長可変フィルタの上面構成図を図5に示す。以下、レイアウトを詳述する。
本発明の第2の実施例を、図7、図8を用いて説明する。本実施例はInP基板上の1.55μm帯の横方向結合型同方向性光結合器型波長可変フィルタを用いた波長可変レーザである。
Claims (10)
- 半導体基板上に、第1のコア層をもつ第1の光導波路と第2のコア層をもつ第2の光導波路とが面内で平行に設けられ、
それらの光導波路のうちで1つ以上の光導波路に回折格子が形成され、第1のコア層にはp型導電型の半導体とn型導電型の半導体が近接し電流注入または電圧印加可能な構造をもち、
第2のコア層には一方の導電型の半導体のみが接しており、
前記第2のコア層の上部には、前記第1のコア層への前記電流注入または前記電圧印加から電気的に分離させる半絶縁性半導体層が形成されることを特徴とする波長可変フィルタ。 - 第1のコア層と第2のコア層が一部共通の結晶構造を持つことを特徴とする請求項1記載の波長可変フィルタ。
- 前記第1の光導波路と第2の光導波路との間の間隔は、前記第2導波路の中央部よりも端部の方が広いことを特徴とする請求項1記載の波長可変フィルタ。
- 請求項1に記載の波長可変フィルタと、前記半導体基板上に形成され、前記第1のコア層と光結合するゲイン層を有するゲイン領域と、第2の回折格子を有し、かつ、前記ゲイン層と光結合する分布ブラッグ反射鏡(DBR)光導波路と、を備えることを特徴とする波長可変レーザモジュール。
- 第1導電型の半導体層で構成された半導体基板上に、前記半導体基板の第1辺から対向する第2辺に向って並行して伸びる第1光導波路と第2光導波路とを備え、
前記第1光導波路は、第1回折格子を備え、
前記第1光導波路は、第1導電型の半導体層の上に配置された第1コア層と、前記第1導電型半導体層の下に配置された第1電極と、前記第1コア層の上に配置された第2導電型の半導体層と、前記第2導電型半導体層の上に配置された第2電極とを備え、
前記第2光導波路は、第1導電型の半導体層の上に配置された第2コア層と、前記第2コア層と前記第2電極との間に配置された絶縁膜と、
前記第2コア層と前記絶縁膜との間に配置された半絶縁性半導体層と、を備え、
前記版絶縁性半導体層により、前記第2コア層と前記第2電極および前記第2導電型の半導体層との間が電気的に分離をしていることを特徴とする波長可変フィルタ。 - 請求項5において、
前記第1コア層と前記第2コア層とは、組成波長の異なる材料で構成されていることを特徴とする波長可変フィルタ。 - 請求項6において、
前記第1コア層より下に配置された第1導電型の半導体層は、前記第2コア層と前記第2コア層の下に配置された第1導電型の半導体層との積層体と、同じ組成、同じ膜厚で構成された層を含むことを特徴とする波長可変フィルタ。 - 請求項6において、
前記第1回折格子は、前記第1コア層の幅が周期的に変化する構造を含むことを特徴とする波長可変フィルタ。 - 請求項5において、
前記第1コア層と前記第2コア層との間隔は、前記第2コア層の中央部よりも端部の方が広いことを特徴とする請求項1記載の波長可変フィルタ。 - 請求項5に記載された波長可変フィルタと、ゲイン領域とを備え、
前記ゲイン領域は、前記第1導電型半導体層の上に配置されたゲイン層を備え、
前記ゲイン層は、前記波長可変フィルタの前記第1コア層と異なる組成波長の材料で構成されていることを特徴とする波長可変レーザモジュール。
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Cited By (1)
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WO2017222094A1 (ko) * | 2016-06-23 | 2017-12-28 | 주식회사 포벨 | 반도체 레이저 장치 |
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JP5524821B2 (ja) * | 2010-12-27 | 2014-06-18 | 日本オクラロ株式会社 | 半導体レーザモジュール |
JP5888883B2 (ja) * | 2011-06-15 | 2016-03-22 | 日本オクラロ株式会社 | スポットサイズ変換器、半導体光素子、及びそれらの製造方法 |
US8995483B2 (en) * | 2011-12-16 | 2015-03-31 | Eos Photonics, Inc. | Methods and apparatus for temperature tuning of semiconductor lasers |
WO2014018776A1 (en) * | 2012-07-26 | 2014-01-30 | Massachusetts Institute Of Technology | Photonic integrated circuits based on quantum cascade structures |
EP2696227B1 (en) * | 2012-08-08 | 2019-09-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Directional coupler and optical waveguide |
US9726818B1 (en) | 2013-05-30 | 2017-08-08 | Hrl Laboratories, Llc | Multi-wavelength band optical phase and amplitude controller |
US9438005B1 (en) * | 2014-06-02 | 2016-09-06 | Google Inc. | Calibration of a tunable DBR laser |
CN104993194A (zh) * | 2015-06-24 | 2015-10-21 | 上海理工大学 | 一种太赫兹波带阻滤波装置 |
WO2017120269A1 (en) * | 2016-01-04 | 2017-07-13 | Infinera Corporation | Tunable waveguide devices |
US10197818B2 (en) * | 2016-10-24 | 2019-02-05 | Electronics & Telecommunications Research Institute | Thermo-optic optical switch |
JP2018129338A (ja) * | 2017-02-06 | 2018-08-16 | 富士通株式会社 | 波長可変レーザ装置 |
JP7292429B2 (ja) * | 2020-01-10 | 2023-06-16 | 三菱電機株式会社 | 半導体装置の製造方法 |
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US8179931B2 (en) | 2012-05-15 |
US8451872B2 (en) | 2013-05-28 |
US20120224594A1 (en) | 2012-09-06 |
US20100142568A1 (en) | 2010-06-10 |
JP2010153826A (ja) | 2010-07-08 |
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