JP2014038035A - X-ray detecting apparatus, and sample mounting body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray detecting apparatus and a sample mounting body that allow easy fixing of an X-ray transmitting membrane, in an extended state to prevent wrinkling, folding or the like, to a sample mount, and obtain satisfactory analysis accuracy.SOLUTION: A sample mount 1 of an X-ray detecting apparatus is provided with a base plate 11, a press-fixing body 12, and a fitting body 13. The base plate 11 has a rectangular board shape, having in its peripheral part a protruding accommodation part 111 for accommodating the press-fixing body 12 and the fitting body 13 and in its central part a cylinder-shaped protruding part 112. The press-fixing body 12 has an annular shape. The fitting body 13 is shaped like a disk and has a through hole in the central part and a recess 133 on the rear side. In the accommodation part 111 of the base plate 11, an X-ray transmitting membrane 14 is mounted in a state in which the central part is in contact with the protruding part 112 and, after the press-fixing body 12 is so snapped in as to press the periphery of the X-ray transmitting membrane 14, the recess 133 is snapped onto the protruding part 112.

Description

本発明は、Ｘ線を試料へ照射し、試料から発生する蛍光Ｘ線を検出するＸ線検出装置、及び基板を有し、Ｘ線透過膜を介して試料を載置し、該試料にＸ線を照射して発生する蛍光Ｘ線を検出するために用いられる試料載置体に関する。   The present invention includes an X-ray detection apparatus that irradiates a sample with X-rays and detects fluorescent X-rays generated from the sample, and a substrate. The sample is placed via an X-ray transmission film, and X The present invention relates to a sample mounting body used for detecting fluorescent X-rays generated by irradiating rays.

蛍光Ｘ線分析は、Ｘ線を試料へ照射し、試料から発生する蛍光Ｘ線を検出し、蛍光Ｘ線のスペクトルから、試料に含有される元素の定性分析又は定量分析を行う分析手法である。Ｘ線検出装置は一般的に、円状をなすＸ線透過膜を介し試料を載置する試料載置台と、該試料載置台に載置された試料へＸ線を照射するＸ線照射部と、試料から発生するＸ線を検出するＸ線検出器と、Ｘ線照射部が試料へ照射するＸ線を絞るコリメータとを備える（例えば特許文献１等）。Ｘ線透過膜は、腐食性を有する大気環境下で曇り等が生じ、検出感度が低下するのを防止する目的で、装置の試料載置部分の開口をシールするために用いられる。Ｘ線透過膜としては、例えばポリエチレンテレフタレート又はポリプロピレン等のＸ線を透過しやすい合成樹脂からなり、シート状をなす有機薄膜が用いられる。   X-ray fluorescence analysis is an analysis technique in which X-rays are irradiated to a sample, fluorescent X-rays generated from the sample are detected, and elements contained in the sample are qualitatively analyzed or quantitatively analyzed from the spectrum of the fluorescent X-rays. . An X-ray detection apparatus generally includes a sample mounting table on which a sample is mounted via a circular X-ray transmission film, and an X-ray irradiation unit that irradiates the sample mounted on the sample mounting table with X-rays. An X-ray detector that detects X-rays generated from the sample, and a collimator that narrows down the X-rays that the X-ray irradiation unit irradiates the sample (for example, Patent Document 1). The X-ray permeable membrane is used to seal the opening of the sample mounting portion of the apparatus in order to prevent the detection sensitivity from being lowered due to fogging or the like in a corrosive atmosphere. As the X-ray permeable film, for example, a sheet-like organic thin film made of a synthetic resin that easily transmits X-rays such as polyethylene terephthalate or polypropylene is used.

試料載置台は、基板と、基板に対して着脱が可能な装着体とを有する。基板及び装着体は共に貫通孔を有する。貫通孔を塞ぐようにＸ線透過膜が張られ、Ｘ線透過膜が基板と装着体とで挟まれた状態で固定される。即ち、装着体を外した状態で、基板の貫通孔にＸ線透過膜が張られ、装着体を基板に装着することで、Ｘ線透過膜が固定される。試料はＸ線透過膜の上側に載置される。
また、装置とは別体の取付部品にＸ線透過膜を展張した状態でセットし、該取付部品を試料載置台に嵌めて試料載置台に固定した後、該取付部品を取り外すように構成されているＸ線検出装置も存在する。 The sample mounting table includes a substrate and a mounting body that can be attached to and detached from the substrate. Both the substrate and the mounting body have through holes. An X-ray permeable membrane is stretched so as to close the through hole, and the X-ray permeable membrane is fixed in a state of being sandwiched between the substrate and the mounting body. That is, with the mounting body removed, an X-ray transmission film is stretched in the through hole of the substrate, and the X-ray transmission film is fixed by mounting the mounting body on the substrate. The sample is placed on the upper side of the X-ray permeable membrane.
In addition, the X-ray permeable membrane is set in a state where the X-ray permeable membrane is stretched on a mounting part separate from the apparatus, and the mounting part is fitted on the sample mounting base and fixed to the sample mounting base, and then the mounting part is removed. There are also X-ray detection devices.

特開２０１２−０８８１９６号公報JP 2012-088196 A

Ｘ線透過膜がたわみ、しわ、及び折れ等がある状態で試料載置台に固定された場合、散乱等により蛍光Ｘ線分析の精度が低下するという問題がある。また、影が生じるので、Ｘ線透過膜を通して試料を撮影する場合、良好な撮像が得られないという問題がある。
従って、装着体を基板に装着する場合等において、たわみ、しわ、及び折れ等が発生しないように、Ｘ線透過膜の周縁部を手で引っ張りながら装着体を基板に嵌め込んでいた。このため、作業が煩雑になり、また、Ｘ線透過膜の全周に亘って均等に展張させるのは困難であり、固定後にたわみ等が残るおそれがあるという問題があった。
そして、基板を装置本体に取り付けた後に装着体を基板に取り付けるように構成されている場合、上述の取付部品を基板に取り付けるのが困難であるという問題があった。 When the X-ray permeable membrane is fixed to the sample mounting table in a state where the X-ray transmission film is bent, wrinkled, bent, or the like, there is a problem that the accuracy of the fluorescent X-ray analysis is lowered due to scattering or the like. In addition, since a shadow is generated, there is a problem in that good imaging cannot be obtained when a sample is imaged through an X-ray transmission film.
Therefore, when the mounting body is mounted on the substrate, the mounting body is fitted into the substrate while pulling the peripheral portion of the X-ray permeable membrane by hand so that bending, wrinkling, folding, etc. do not occur. For this reason, the work becomes complicated, and it is difficult to spread the film uniformly over the entire circumference of the X-ray permeable membrane.
And when it was comprised so that a mounting body might be attached to a board | substrate after attaching a board | substrate to an apparatus main body, there existed a problem that it was difficult to attach the above-mentioned attachment component to a board | substrate.

本発明は斯かる事情に鑑みてなされたものであり、Ｘ線透過膜をたわみ、しわ、及び折れ等が生じないように展張した状態で容易に固定することができ、良好な分析精度が得られるＸ線検出装置、及び試料載置体を提供することを目的とする。   The present invention has been made in view of such circumstances, and the X-ray permeable membrane can be easily fixed in a stretched state so as not to bend, wrinkle, bend, etc., and good analysis accuracy can be obtained. It is an object of the present invention to provide an X-ray detection apparatus and a sample mounting body.

本発明に係るＸ線検出装置は、基板を有し、Ｘ線透過膜を介して試料を載置する試料載置体と、該試料載置体に載置された試料へＸ線を照射するＸ線照射部と、前記試料から発生するＸ線を検出するＸ線検出器とを備えるＸ線検出装置において、前記試料載置体は、基板に嵌合部を有し、前記基板の前記嵌合部より外側で、前記Ｘ線透過膜を押さえて止める押止体と、前記嵌合部に嵌合される被嵌合部を有し、該被嵌合部と前記嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板に装着される装着体とを備えることを特徴とする。   An X-ray detection apparatus according to the present invention has a substrate and irradiates a sample placing body on which a sample is placed via an X-ray transmission film, and the sample placed on the sample placing body with X-rays. In an X-ray detection apparatus comprising an X-ray irradiation unit and an X-ray detector for detecting X-rays generated from the sample, the sample mounting body has a fitting part on a substrate, and the fitting of the substrate A holding body that holds and holds the X-ray permeable membrane outside the joint portion and a fitted portion that is fitted to the fitting portion, and between the fitted portion and the fitting portion And an attachment body attached to the substrate in a state where the X-ray transmission membrane is sandwiched between the attachment member and the substrate.

ここで、「嵌合」とは、被嵌合部が嵌合部に隙間のない状態（密接した状態）で嵌められる場合と、被嵌合部が嵌合部に隙間のある状態で嵌められる（遊嵌される）場合とをいう。
本発明においては、予め、基板の周縁側部分（外寄り部分）上に、押止体をＸ線透過膜を挟んだ状態で押圧し、これにより張力が生じた状態で、装着体の被嵌合部を基板の嵌合部に嵌めるので、容易に、確実に、Ｘ線透過膜が展張した状態で基板に固定される。従って、Ｘ線透過膜にたわみ、しわ、及び折れ等が生じるのが抑制される。よって、散乱することなく、Ｘ線を試料へ良好に照射することができ、また、試料を撮影する場合には良好に撮影することができ、良好な分析精度が得られる。
そして、押止体は従来のＸ線検出装置のＸ線透過膜のための取付部品と異なり、試料載置体の構成部品であり、装着体と略同一平面上にあるように構成することで、凹凸なく試料を試料載置体に載置することができる。 Here, “fitting” means that the fitted portion is fitted with no gap (close state) in the fitting portion, and the fitted portion is fitted with a gap in the fitting portion. The case where it is loosely fitted.
In the present invention, the mounting body is fitted in a state where a pressing body is pressed in advance in a state where the X-ray permeable membrane is sandwiched between the peripheral side portion (outer side portion) of the substrate, and tension is thereby generated. Since the joint portion is fitted into the fitting portion of the substrate, the X-ray permeable membrane is easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable membrane is suppressed. Therefore, X-rays can be satisfactorily irradiated onto the sample without scattering, and when the sample is photographed, it can be photographed well, and good analysis accuracy can be obtained.
And unlike the attachment parts for the X-ray permeable membrane of the conventional X-ray detection apparatus, the holding body is a component part of the sample mounting body, and is configured so as to be substantially on the same plane as the mounting body. The sample can be mounted on the sample mounting body without any unevenness.

本発明に係るＸ線検出装置は、前記嵌合部は、筒状をなす突出部であり、前記装着体は平板状をなし、前記被嵌合部は、前記突出部に嵌合される凹部であることを特徴とする。   In the X-ray detection apparatus according to the present invention, the fitting portion is a protruding portion having a cylindrical shape, the mounting body has a flat plate shape, and the fitted portion is a concave portion fitted into the protruding portion. It is characterized by being.

本発明においては、嵌合時に、Ｘ線透過膜が外周部に向けて、良好に放射状に引っ張られた状態で固定される。   In the present invention, at the time of fitting, the X-ray permeable membrane is fixed in a state in which it is satisfactorily pulled radially toward the outer peripheral portion.

本発明に係るＸ線検出装置は、前記基板は、周縁の内側に周壁部を有し、前記押止体はリング状をなし、前記装着体に外嵌され、かつ前記周壁部に内嵌されることを特徴とする。   In the X-ray detection apparatus according to the present invention, the substrate has a peripheral wall portion on the inner side of a peripheral edge, the holding body has a ring shape, is externally fitted to the mounting body, and is internally fitted to the peripheral wall portion. It is characterized by that.

ここで、「外嵌」とは外側に嵌めることをいい、「内嵌」とは内側に嵌めることをいう。装着体と押止体との間、及び押止体と周壁部との間に隙間はあってもなくてもよい。
本発明においては、容易に、周方向に均一に、Ｘ線透過膜に張力を付与することができる。
また、基板を装置本体の筐体に取り付けた後であっても、容易に押止体及び装着体を基板の周壁部に嵌め込むことができ、作業性が良好である。 Here, “outer fitting” means fitting outside, and “inner fitting” means fitting inside. There may or may not be a gap between the mounting body and the holding body and between the holding body and the peripheral wall portion.
In the present invention, tension can be easily applied to the X-ray permeable membrane uniformly in the circumferential direction.
Further, even after the substrate is attached to the housing of the apparatus main body, the pressing body and the mounting body can be easily fitted into the peripheral wall portion of the substrate, and the workability is good.

本発明に係るＸ線検出装置は、前記押止体は、前記装着体に隙間を有する状態で嵌められ、該装着体と前記押止体との間に、試料セルに設けてある脚部を差し込み可能に構成されていることを特徴とする。   In the X-ray detection apparatus according to the present invention, the holding body is fitted in the mounting body with a gap, and a leg portion provided in the sample cell is provided between the mounting body and the holding body. It is configured to be insertable.

本発明においては、脚部を有する試料セルを容易に確実に試料載置台に固定することができる。   In the present invention, the sample cell having the legs can be easily and securely fixed to the sample mounting table.

本発明に係るＸ線検出装置は、前記装着体と押止体とは一体化してあることを特徴とする。   The X-ray detection apparatus according to the present invention is characterized in that the mounting body and the pressing body are integrated.

本発明においては、装着体の基板への装着作業が簡単になる。   In the present invention, the mounting operation of the mounting body on the substrate is simplified.

本発明に係るＸ線検出装置は、基板を有し、Ｘ線透過膜を介して試料を載置する試料載置体と、該試料載置体に載置された試料へＸ線を照射するＸ線照射部と、前記試料から発生するＸ線を検出するＸ線検出器とを備えるＸ線検出装置において、前記試料載置体は、基板に第１嵌合部が設けられ、該第１嵌合部の外側に第２嵌合部が設けられており、平板状をなし、前記第１嵌合部に嵌合される第１被嵌合部と、該第１被嵌合部の外側に設けられ、前記第２嵌合部に嵌合される第２被嵌合部とを有し、前記第１嵌合部と前記第１被嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板に装着される装着体を備えることを特徴とする。   An X-ray detection apparatus according to the present invention has a substrate and irradiates a sample placing body on which a sample is placed via an X-ray transmission film, and the sample placed on the sample placing body with X-rays. In an X-ray detection apparatus including an X-ray irradiation unit and an X-ray detector for detecting X-rays generated from the sample, the sample mounting body is provided with a first fitting unit on a substrate, and the first A second fitting portion is provided outside the fitting portion, has a flat plate shape, is fitted to the first fitting portion, and the outside of the first fitted portion. A second fitted portion fitted to the second fitting portion, and the X-ray permeable membrane is interposed between the first fitting portion and the first fitted portion. A mounting body mounted on the substrate in a sandwiched state is provided.

本発明においては、簡単な構成で、Ｘ線透過膜の周縁側部分を押さえ、張力が生じた状態で、装着体の第１被嵌合部を基板の第１嵌合部に嵌めることができ、容易に、確実に、Ｘ線透過膜を展張した状態で基板に固定することができる。従って、Ｘ線透過膜にたわみ、しわ、及び折れ等が生じるのが抑制され、散乱することなく、Ｘ線を試料へ良好に照射することができ、また、試料を撮影する場合には良好に撮影することができる。   In the present invention, the first fitting portion of the mounting body can be fitted to the first fitting portion of the substrate in a state where the peripheral side portion of the X-ray permeable membrane is pressed and tension is generated with a simple configuration. The X-ray permeable membrane can be easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable film is suppressed, and the X-ray can be irradiated to the sample satisfactorily without scattering. You can shoot.

本発明に係る試料載置体は、基板を有し、Ｘ線透過膜を介して試料を載置し、該試料にＸ線を照射して発生する蛍光Ｘ線を検出するために用いられる試料載置体において、基板に嵌合部を有し、前記基板の周縁側部分上で、前記Ｘ線透過膜を押さえて止める押止体と、前記嵌合部に嵌合される被嵌合部を有し、該被嵌合部と前記嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板の、前記押止体の内側に装着される装着体とを備えることを特徴とする。   The sample mounting body according to the present invention has a substrate, and a sample used for detecting a fluorescent X-ray generated by placing the sample via an X-ray transmission film and irradiating the sample with X-rays. In the mounting body, a holding member having a fitting portion on the substrate and pressing and stopping the X-ray permeable film on a peripheral side portion of the substrate, and a fitting portion fitted to the fitting portion And a mounting body mounted on the inside of the holding body of the substrate in a state where the X-ray transmission film is sandwiched between the fitted portion and the fitting portion. Features.

本発明においては、予め、基板の周縁側部分（外寄り部分）上に、押止体をＸ線透過膜を挟んだ状態で押圧し、これにより張力が生じた状態で、装着体の被嵌合部を基板の嵌合部に嵌めるので、容易に、確実に、Ｘ線透過膜が展張した状態で基板に固定される。従って、Ｘ線透過膜にたわみ、しわ、及び折れ等が生じるのが抑制される。   In the present invention, the mounting body is fitted in a state where a pressing body is pressed in advance in a state where the X-ray permeable membrane is sandwiched between the peripheral side portion (outer side portion) of the substrate, and tension is thereby generated. Since the joint portion is fitted into the fitting portion of the substrate, the X-ray permeable membrane is easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable membrane is suppressed.

本発明によれば、押止体によりＸ線透過膜の周縁側部分を押さえ、張力が生じた状態で、装着体の被嵌合部を基板の嵌合部に嵌めるので、容易に、確実に、Ｘ線透過膜が展張した状態で基板に固定され得る。従って、Ｘ線透過膜にたわみ、しわ、及び折れ等が生じるのが抑制され、散乱することなく、Ｘ線を試料へ良好に照射することができ、また、試料を撮影する場合には良好に撮影することができ、良好な分析精度が得られる。
そして、押止体は従来の取付部品と異なり、試料載置体の構成部品であり、装着体と略同一平面上にあるように構成することで、凹凸なく試料を試料載置体に載置することができる。 According to the present invention, the peripheral portion of the X-ray permeable membrane is pressed by the pressing body, and the fitting portion of the mounting body is fitted to the fitting portion of the substrate in a state where tension is generated. The X-ray permeable membrane can be fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable film is suppressed, and the X-ray can be irradiated to the sample satisfactorily without scattering. Images can be taken and good analysis accuracy can be obtained.
Unlike the conventional mounting parts, the holding body is a component part of the sample mounting body, and is configured to be substantially on the same plane as the mounting body, so that the sample can be placed on the sample mounting body without unevenness. can do.

本発明の実施の形態１に係るＸ線検出装置の要部の構成を示す模式的斜視図である。It is a typical perspective view which shows the structure of the principal part of the X-ray detection apparatus which concerns on Embodiment 1 of this invention. 図１のII-II線断面図である。It is the II-II sectional view taken on the line of FIG. 試料載置台を示す分解斜視図である。It is a disassembled perspective view which shows a sample mounting base. 図４Ａは試料載置台の押止体を示す裏面図、図４Ｂは試料載置台の装着体を示す裏面図である。FIG. 4A is a back view showing the holding body of the sample mounting table, and FIG. 4B is a back view showing the mounting body of the sample mounting table. 試料載置台を示す断面図である。It is sectional drawing which shows a sample mounting base. Ｘ線検出装置の外観を示す斜視図である。It is a perspective view which shows the external appearance of a X-ray detection apparatus. 装着体の他の例を示す断面図である。It is sectional drawing which shows the other example of a mounting body. 図８Ａは本発明の実施の形態２に係る試料載置台を示す断面図、図８Ｂは装着体を基板に装着した場合を示す一部拡大図である。FIG. 8A is a cross-sectional view showing a sample mounting table according to Embodiment 2 of the present invention, and FIG. 8B is a partially enlarged view showing a case where a mounting body is mounted on a substrate. 本発明の実施の形態３に係る試料載置台を示す断面図である。It is sectional drawing which shows the sample mounting base which concerns on Embodiment 3 of this invention.

以下、本発明をその実施の形態を示す図面に基づき具体的に説明する。
実施の形態１．
図１は本発明の実施の形態１に係るＸ線検出装置１０の要部の構成を示す模式的斜視図、図２は図１のII-II線断面図である。
Ｘ線検出装置１０は、Ｘ線を試料Ｓ１へ照射して発生する蛍光Ｘ線を検出し、蛍光Ｘ線スペクトルの測定又は試料に含有される元素を分析する蛍光Ｘ線分析を行うための装置である。
Ｘ線検出装置１０は、試料載置台（試料載置体）１、コリメータ２、Ｘ線照射部４、Ｘ線検出器５、撮像素子６１、及び直線駆動モータ７を備えている。試料載置台１は水平板状であり、試料Ｓ１が載置されることによって試料Ｓ１を支持する。試料載置台１の中央部には、貫通孔１３１が設けられている。試料Ｓ１は、Ｘ線透過膜１４上に、貫通孔１３１を塞ぐように載置される。
また、Ｘ線透過膜１４上には、試料セルＳ２（図２中破線で示す）を載置することにしてもよい。試料セルＳ２は円筒状の本体Ｓ２ａを有し、本体Ｓ２ａの下側開口部から所定の高さの位置には板部Ｓ２ｂが設けられている。試料セルＳ２には、液状の試料が本体Ｓ２ａの上側開口部から注入されて貯液される。試料セルＳ２は、本体Ｓ２ａの板部Ｓ２ｂより下側の部分である脚部を、後述する押止体１２と装着体１３との間隙に挿入するように構成されている。 Hereinafter, the present invention will be specifically described with reference to the drawings showing embodiments thereof.
Embodiment 1 FIG.
1 is a schematic perspective view showing a configuration of a main part of an X-ray detection apparatus 10 according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
The X-ray detection apparatus 10 detects fluorescent X-rays generated by irradiating the sample S1 with X-rays, and performs an X-ray fluorescence analysis for measuring a fluorescent X-ray spectrum or analyzing elements contained in the sample. It is.
The X-ray detection apparatus 10 includes a sample mounting table (sample mounting body) 1, a collimator 2, an X-ray irradiation unit 4, an X-ray detector 5, an image sensor 61, and a linear drive motor 7. The sample mounting table 1 has a horizontal plate shape, and supports the sample S1 by mounting the sample S1. A through hole 131 is provided at the center of the sample mounting table 1. The sample S <b> 1 is placed on the X-ray permeable film 14 so as to close the through hole 131.
Further, a sample cell S2 (shown by a broken line in FIG. 2) may be placed on the X-ray permeable membrane 14. The sample cell S2 has a cylindrical main body S2a, and a plate portion S2b is provided at a predetermined height from the lower opening of the main body S2a. In the sample cell S2, a liquid sample is injected from the upper opening of the main body S2a and stored. The sample cell S2 is configured to insert a leg portion, which is a portion below the plate portion S2b of the main body S2a, into a gap between a pressing body 12 and a mounting body 13, which will be described later.

以下、試料Ｓ１を例に挙げて説明する。
試料載置台１の下側に、載置された試料Ｓ１へＸ線を照射する上述のＸ線照射部４、Ｘ線照射部４からのＸ線を絞るコリメータ２、試料Ｓ１から発生する蛍光Ｘ線を検出するＸ線検出器５が配置されている。図２中には、Ｘ線照射部４及びＸ線検出器５を簡略化して断面で示しているが、実際には、Ｘ線照射部４及びＸ線検出器５は複数の部品で構成され内部には空洞も含まれている。 Hereinafter, the sample S1 will be described as an example.
Below the sample mounting table 1, the above-described X-ray irradiation unit 4 that irradiates the mounted sample S1 with X-rays, the collimator 2 that narrows the X-rays from the X-ray irradiation unit 4, and the fluorescence X generated from the sample S1 An X-ray detector 5 for detecting a line is arranged. In FIG. 2, the X-ray irradiation unit 4 and the X-ray detector 5 are simplified and shown in a cross section, but actually, the X-ray irradiation unit 4 and the X-ray detector 5 are configured by a plurality of components. The interior also contains cavities.

試料載置台１は、基板１１、押止体１２、及び装着体１３を備える。基板１１の中央部に装着体１３が嵌められ、装着体１３の外側に押止体１２が嵌められている。基板１１と、押止体１２及び装着体１３との間にＸ線透過膜１４が挟み込まれる。Ｘ線透過膜１４は例えばポリエチレンテレフタレート又はポリプロピレン等のＸ線を透過しやすい合成樹脂からなる、円状のシートである。Ｘ線透過膜１４は多角形状であってもよい。試料載置台１の構成については後述する。   The sample mounting table 1 includes a substrate 11, a pressing body 12, and a mounting body 13. A mounting body 13 is fitted in the center of the substrate 11, and a holding body 12 is fitted outside the mounting body 13. An X-ray transmission film 14 is sandwiched between the substrate 11, the pressing body 12 and the mounting body 13. The X-ray permeable film 14 is a circular sheet made of a synthetic resin that easily transmits X-rays, such as polyethylene terephthalate or polypropylene. The X-ray permeable membrane 14 may have a polygonal shape. The configuration of the sample mounting table 1 will be described later.

Ｘ線照射部４は、試料載置台１上に載置された試料Ｓ１の下面に対して斜め下側からＸ線を照射する位置に配置されている。Ｘ線照射部４は、Ｘ線管を用いて構成されており、Ｘ線の出射端を試料載置台１の貫通孔１３１へ向けて配置されている。Ｘ線検出器５は、試料載置台１上に載置された試料Ｓ１の下面から斜め下方向へ放射された蛍光Ｘ線を検出することができる位置に配置されている。Ｘ線検出器５は、Ｓｉ素子等のＸ線検出素子を用いて構成されており、蛍光Ｘ線の入射端を試料載置台１の貫通孔１３１へ向けて配置されている。即ち、Ｘ線照射部４及びＸ線検出器５は、平板状の試料載置台１に対して同一の面側に配置され、Ｘ線の出射口と蛍光Ｘ線の入射口とを、試料載置台１の共通する所定の部分に向けて配置されている。なお、Ｘ線照射部４の照射軸とＸ線検出器５の入射軸とが試料載置台１の一点で重なる必要はなく、試料載置台１上へのＸ線照射部４からのＸ線の照射範囲と試料載置台１上からのＸ線検出器５へのＸ線の入射範囲とが重なっていればよい。また、Ｘ線照射部４及びＸ線検出器５は、平板状の試料載置台１に直交して貫通孔１３１の中心を通る仮想的な中心軸に対して対称な位置に、試料載置台１に近づけて配置されている。図２中には、仮想的な中心軸を一点鎖線で示している。Ｘ線照射部４から試料Ｓ１へＸ線が照射され、試料Ｓ１で蛍光Ｘ線が発生し、蛍光Ｘ線がＸ線検出器５に検出される。図２中には、Ｘ線照射部４から試料Ｓ１へ照射されるＸ線、及び試料Ｓ１で発生してＸ線検出器５に検出される蛍光Ｘ線を破線で示している。   The X-ray irradiation unit 4 is disposed at a position where X-rays are irradiated obliquely from below on the lower surface of the sample S1 mounted on the sample mounting table 1. The X-ray irradiation unit 4 is configured by using an X-ray tube, and is arranged with the X-ray emission end directed toward the through hole 131 of the sample mounting table 1. The X-ray detector 5 is disposed at a position where it can detect fluorescent X-rays emitted obliquely downward from the lower surface of the sample S1 mounted on the sample mounting table 1. The X-ray detector 5 is configured by using an X-ray detection element such as an Si element, and is arranged with the incident end of the fluorescent X-ray directed toward the through hole 131 of the sample mounting table 1. That is, the X-ray irradiation unit 4 and the X-ray detector 5 are arranged on the same surface side with respect to the flat sample mounting table 1, and the X-ray exit and the fluorescent X-ray entrance are placed on the sample mounting. It arrange | positions toward the predetermined predetermined part of the mounting base 1. FIG. The irradiation axis of the X-ray irradiation unit 4 and the incident axis of the X-ray detector 5 do not need to overlap at one point on the sample mounting table 1, and X-rays from the X-ray irradiation unit 4 on the sample mounting table 1 It is only necessary that the irradiation range and the X-ray incidence range from the sample mounting table 1 to the X-ray detector 5 overlap. In addition, the X-ray irradiation unit 4 and the X-ray detector 5 are arranged at positions symmetrical to a virtual central axis that passes through the center of the through hole 131 perpendicular to the flat plate-like sample mounting table 1. It is placed close to. In FIG. 2, a virtual central axis is indicated by a one-dot chain line. The sample S1 is irradiated with X-rays from the X-ray irradiating unit 4, fluorescent X-rays are generated in the sample S1, and the fluorescent X-rays are detected by the X-ray detector 5. In FIG. 2, X-rays irradiated from the X-ray irradiation unit 4 to the sample S1 and fluorescent X-rays generated from the sample S1 and detected by the X-ray detector 5 are indicated by broken lines.

コリメータ２は、試料載置台１の直下で、Ｘ線照射部４から試料載置台１までのＸ線の経路上に配置されている。コリメータ２は、金属を材料として板状に形成されており、絞り孔が形成されている。絞り孔がＸ線の経路上に位置した場合、絞り孔を通過してＸ線がＸ線照射部４から試料Ｓ１へ照射される。絞り孔を通過しないＸ線はコリメータ２で遮蔽される。コリメータ２には、光を通過させる窓部（不図示）が連結している。窓部は、アクリル板等の透明部材を用いて構成されている。貫通孔１３１の直下には、ＣＣＤ（Charge Coupled Device ）イメージセンサ又はＣＭＯＳ（Complementary Metal Oxide Semiconductor ）イメージセンサ等の撮像素子６１が備えられている。また、Ｘ線検出装置１０は、発光ダイオード等の発光素子（不図示）を備えている。窓部が貫通孔１３１の直下に位置した状態で、発光素子が発光し、光は窓部を通過して試料Ｓ１で反射し、窓部を通過して撮像素子６１へ入射する。以上のようにして、試料Ｓ１の撮影が行われる。コリメータ２は、直線駆動モータ７により試料載置台１の下面に沿って移動される。   The collimator 2 is disposed on the X-ray path from the X-ray irradiation unit 4 to the sample mounting table 1 immediately below the sample mounting table 1. The collimator 2 is formed in a plate shape using a metal as a material, and an aperture is formed. When the aperture hole is positioned on the X-ray path, the X-ray is irradiated from the X-ray irradiation unit 4 to the sample S1 through the aperture hole. X-rays that do not pass through the aperture are shielded by the collimator 2. The collimator 2 is connected to a window (not shown) that allows light to pass through. The window part is comprised using transparent members, such as an acrylic board. An imaging element 61 such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor is provided immediately below the through hole 131. The X-ray detection apparatus 10 includes a light emitting element (not shown) such as a light emitting diode. The light emitting element emits light in a state where the window portion is located directly below the through hole 131, the light passes through the window portion, is reflected by the sample S 1, passes through the window portion, and enters the image sensor 61. As described above, the sample S1 is photographed. The collimator 2 is moved along the lower surface of the sample mounting table 1 by a linear drive motor 7.

Ｘ線検出装置１０は、Ｘ線照射部４等の動作を制御する制御部（不図示）を備えている。前記窓部が貫通孔１３１の直下にある場合は、制御部は、Ｘ線照射部４にＸ線を照射させない。なお、Ｘ線検出器装置は、撮像素子６１、前記窓部及び発光素子を備えていない形態であってもよい。
また、Ｘ線検出装置１０は、蛍光Ｘ線測定のための信号処理を実行する信号処理部（不図示）を備えている。Ｘ線検出器４は、検出した蛍光Ｘ線のエネルギーに比例した信号を信号処理部へ出力し、信号処理部は、各値の信号をカウントし、Ｘ線検出器５が検出した蛍光Ｘ線のエネルギーとカウント数との関係、即ち蛍光Ｘ線のスペクトルを取得する処理を行う。なお、Ｘ線検出器５は、蛍光Ｘ線を波長別に分離して検出する形態であってもよい。また、信号処理部は、蛍光Ｘ線のスペクトルに基づいて試料に含有される元素の定性分析又は定量分析を行う蛍光Ｘ線分析の処理をも実行する形態であってもよい。 The X-ray detection apparatus 10 includes a control unit (not shown) that controls the operation of the X-ray irradiation unit 4 and the like. When the window portion is directly below the through hole 131, the control unit does not cause the X-ray irradiation unit 4 to emit X-rays. Note that the X-ray detector device may not include the imaging element 61, the window, and the light emitting element.
Further, the X-ray detection apparatus 10 includes a signal processing unit (not shown) that executes signal processing for fluorescent X-ray measurement. The X-ray detector 4 outputs a signal proportional to the detected energy of the fluorescent X-ray to the signal processing unit, and the signal processing unit counts the signal of each value and detects the fluorescent X-ray detected by the X-ray detector 5. The process of acquiring the relationship between the energy and the count number, that is, the spectrum of fluorescent X-rays is performed. The X-ray detector 5 may be configured to detect fluorescent X-rays separately for each wavelength. Further, the signal processing unit may be configured to also execute a fluorescent X-ray analysis process for performing a qualitative analysis or a quantitative analysis of an element contained in a sample based on a fluorescent X-ray spectrum.

以下、試料載置台１について詳述する。
図３は試料載置台１を示す分解斜視図、図４Ａは試料載置台１の押止体１２を示す裏面図、図４Ｂは試料載置台１の装着体１３を示す裏面図、図５は試料載置台１を示す断面図である。
基板１１は矩形板状をなす。基板１１の４つの角部にはネジ挿通孔１１４が設けられている。基板１１のネジ挿通孔１１４が設けられている部分の少し内側には、押止体１２及び装着体１３を収納する筒状の収納部（周壁部）１１１が突設されている。収納部１１１の外縁は角部を丸めた四角形状をなし、内縁は円状をなしている。
また、基板１１は、中央部に丸筒状をなす突出部（嵌合部）１１２を有する。突出部１１２の内壁面に相当する開口部１１３は、収納部１１１の底面を貫通し、即ち基板１１を貫通している。 Hereinafter, the sample mounting table 1 will be described in detail.
3 is an exploded perspective view showing the sample mounting table 1, FIG. 4A is a back view showing the holding body 12 of the sample mounting table 1, FIG. 4B is a back view showing the mounting body 13 of the sample mounting table 1, and FIG. 1 is a cross-sectional view showing a mounting table 1.
The substrate 11 has a rectangular plate shape. Screw insertion holes 114 are provided at four corners of the substrate 11. A cylindrical storage portion (peripheral wall portion) 111 that stores the pressing body 12 and the mounting body 13 protrudes slightly inside the portion of the substrate 11 where the screw insertion hole 114 is provided. The outer edge of the storage part 111 has a rectangular shape with rounded corners, and the inner edge has a circular shape.
Moreover, the board | substrate 11 has the protrusion part (fitting part) 112 which makes a round cylinder shape in the center part. An opening 113 corresponding to the inner wall surface of the protruding portion 112 passes through the bottom surface of the storage portion 111, that is, passes through the substrate 11.

押止体１２は円環状をなす。図４Ａ及び図５に示すように、押止体１２は裏側の内縁にテーパ面１２１を有し、着脱しやすいように構成されている。押止体１２は円環状をなす場合に限定されるものではなく、四角環状をなすものであってもよい。   The pressing body 12 has an annular shape. As shown in FIGS. 4A and 5, the pressing body 12 has a tapered surface 121 on the inner edge on the back side, and is configured to be easily attached and detached. The pressing body 12 is not limited to an annular shape, and may be a rectangular shape.

装着体１３は円板状をなす。図４Ｂ及び図５に示すように、装着体１３の中央部に前記貫通孔１３１が設けられており、１つの径方向の両端部に半円状の切欠き１３２が設けられている。切欠き１３２により装着体１３は容易に着脱される。
装着体１３の裏側には、平面視で直径が貫通孔１３１の直径より大きい円状をなす凹部１３３（被嵌合部）が設けられている。
装着体１３の外径は押止体１２の内径より少し小さい。 The mounting body 13 has a disk shape. As shown in FIGS. 4B and 5, the through-hole 131 is provided in the central portion of the mounting body 13, and semicircular notches 132 are provided in both radial end portions. The mounting body 13 is easily attached and detached by the notch 132.
On the back side of the mounting body 13, a concave portion 133 (fitted portion) having a circular shape whose diameter is larger than the diameter of the through hole 131 in a plan view is provided.
The outer diameter of the mounting body 13 is slightly smaller than the inner diameter of the retaining body 12.

以上のように構成された試料載置台１においては、まず、後述する装置本体の筐体８３に基板１１が、ネジ挿通孔１１４にネジが挿通されてネジ止めされる。
そして、この基板１１の収納部１１１に、中央部が突出部１１２に当接した状態でＸ線透過膜１４が載置され、該Ｘ線透過膜１４の周縁側部分を押さえるように押止体１２が嵌め込まれる。Ｘ線透過膜１４を挟んだ状態で、押止体１２の底面が収納部１１１の内側の基板平面（底面）に当接するように押止体１２を押圧することで、Ｘ線透過膜１４に放射状に張力が付与される。 In the sample mounting table 1 configured as described above, first, the substrate 11 is inserted into a housing 83 of the apparatus main body, which will be described later, and a screw is inserted into the screw insertion hole 114 and screwed.
The X-ray transmission film 14 is placed in the storage portion 111 of the substrate 11 with the central portion in contact with the protruding portion 112, and a pressing body is pressed so as to press the peripheral side portion of the X-ray transmission film 14. 12 is fitted. In a state where the X-ray transmissive film 14 is sandwiched, the pressing body 12 is pressed so that the bottom surface of the pressing body 12 comes into contact with the substrate plane (bottom surface) inside the storage unit 111. Radial tension is applied.

そして、基板１１の突出部１１２に装着体１３の凹部１３３を嵌合し、装着体１３を基板１１に装着する（図２参照）。
予め押止体１２によりＸ線透過膜１４に張力を持たせた状態にしてあるので、突出部１１２に凹部１３３を嵌合したときに、Ｘ線透過膜１４にたわみ、しわ、折れが生じるのが抑制されている。即ち、従来のように取付部品を用いることなく、押止体１２を収納部１１１に内嵌するのみで、容易にＸ線透過膜１４に、中央部から斜め下方の外縁へ向けて張力を付与することができ、しかも押止体１２はリング状であるので、Ｘ線透過膜１４を周方向に均等に展張することができ、この展張状態が緩むことなく、装着体１３を突出部１１２に嵌めることができる。そして、押止体１２及び装着体１３は基板１１に嵌め込んだときに略同一平面上にあるように構成することで、押止体１２は試料Ｓ１の載置ステージの一部となり、試料Ｓ１を凹凸のない面に載置することができ、試料Ｓ１が傾いたり、動いたりするのを抑制することができる。
試料セルＳ２を用いる場合、装着体１３と押止体１２との間の間隙に、試料セルＳ２の本体Ｓ２ａの脚部を挿入し、板部Ｓ２ｂを装着体１３及びＸ線透過膜１４に当接させることにより、試料セルＳ２を良好に試料載置台１に固定することができる。
Ｘ線透過膜１４を外す場合、装着体１３及び押止体１２のいずれか一方を先に外した後、他方を外し、Ｘ線透過膜１４を収納部１１１から取り出す。 And the recessed part 133 of the mounting body 13 is fitted to the protrusion part 112 of the board | substrate 11, and the mounting body 13 is mounted | worn on the board | substrate 11 (refer FIG. 2).
Since the X-ray permeable membrane 14 is tensioned by the presser 12 in advance, the X-ray permeable membrane 14 is bent, wrinkled, or broken when the concave portion 133 is fitted to the protruding portion 112. Is suppressed. In other words, tension is easily applied to the X-ray permeable membrane 14 from the central portion toward the outer edge obliquely downward by simply fitting the retaining body 12 into the storage portion 111 without using any mounting parts as in the prior art. In addition, since the pressing body 12 has a ring shape, the X-ray permeable membrane 14 can be spread evenly in the circumferential direction, and the mounting body 13 can be attached to the projecting portion 112 without loosening the stretched state. Can be fitted. Then, the holding body 12 and the mounting body 13 are configured to be substantially on the same plane when fitted to the substrate 11, so that the holding body 12 becomes a part of the mounting stage of the sample S1, and the sample S1. Can be placed on a surface without unevenness, and the sample S1 can be prevented from being tilted or moved.
When the sample cell S2 is used, the leg portion of the main body S2a of the sample cell S2 is inserted into the gap between the mounting body 13 and the holding body 12, and the plate portion S2b is brought into contact with the mounting body 13 and the X-ray permeable membrane 14. By making contact, the sample cell S2 can be satisfactorily fixed to the sample mounting table 1.
When removing the X-ray permeable membrane 14, after removing either the mounting body 13 or the holding body 12 first, the other is removed, and the X-ray permeable membrane 14 is taken out from the storage unit 111.

図６は、Ｘ線検出装置１０の外観を示す斜視図である。Ｘ線検出装置１０の要部は、電源部等の図示しない他の部分と共に筐体８３内に納められており、筐体８３の一部は樹脂部材８２で形成されている。筐体８３には、金属製の蓋部８１が被さっている。図６は、蓋部８１を開放した状態を示している。蓋部８１は、平板の一端部を屈曲させた形状をしており、屈曲させた端部が可動端になっている。屈曲させた端部とは逆の端部は、ヒンジによって筐体８３に連結した連結端になっており、蓋部８１は、ヒンジの動作によって筐体８３に対して開閉可能になっている。蓋部８１が閉じた状態では、蓋部８１の可動端はストッパによって筐体８３に固定され、筐体８３の上側が蓋部８１に覆われる。蓋部８１を開放した状態では筐体８３の上側が開放される。筐体８３の上面の中央部には開口部が形成されており、該開口部に上述の試料載置台１が配置されている。装着体１３の上面と、筐体８３の上面とは略同一平面上にある。Ｘ線検出装置１０の要部の試料載置台１以外の部分は、筐体８３の内部に配置されている。   FIG. 6 is a perspective view showing the external appearance of the X-ray detection apparatus 10. A main part of the X-ray detection apparatus 10 is housed in a housing 83 together with other parts (not shown) such as a power supply unit, and a part of the housing 83 is formed of a resin member 82. The casing 83 is covered with a metal lid 81. FIG. 6 shows a state where the lid 81 is opened. The lid 81 has a shape in which one end of a flat plate is bent, and the bent end is a movable end. The end opposite to the bent end is a connecting end connected to the casing 83 by a hinge, and the lid 81 can be opened and closed with respect to the casing 83 by the operation of the hinge. When the lid 81 is closed, the movable end of the lid 81 is fixed to the housing 83 by a stopper, and the upper side of the housing 83 is covered by the lid 81. When the lid 81 is opened, the upper side of the housing 83 is opened. An opening is formed at the center of the upper surface of the housing 83, and the above-described sample mounting table 1 is disposed in the opening. The upper surface of the mounting body 13 and the upper surface of the housing 83 are on substantially the same plane. Parts other than the sample mounting table 1 of the main part of the X-ray detection apparatus 10 are disposed inside the housing 83.

以上のように構成されたＸ線検出装置１０においては、Ｘ線透過膜１４が、たわみ等が生じるのが抑制された状態で、貫通孔１３１を塞ぐように設けられるので、Ｘ線照射部４からＸ線を照射する場合にＸ線が散乱することがなく、良好に試料Ｓ１にＸ線を照射することができる。そして、Ｘ線透過膜１４が、たわみ等が生じるのが抑制されているので、影が生じず、撮像素子６１により良好に試料Ｓ１を撮影することができる。従って、良好な分析精度が得られる。
また、基板１１を筐体８３に取り付けた後であっても、容易に押止体１２及び装着体１３を基板１１の収納部１１１に嵌め込むことができ、作業性が良好である。 In the X-ray detection apparatus 10 configured as described above, the X-ray transmission film 14 is provided so as to close the through-hole 131 in a state in which the occurrence of deflection or the like is suppressed. When X-rays are irradiated from X to X-rays, X-rays are not scattered and the sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.
In addition, even after the substrate 11 is attached to the housing 83, the pressing body 12 and the mounting body 13 can be easily fitted into the storage portion 111 of the substrate 11, and workability is good.

なお、本実施の形態においては、装着体１３が押止体１２に遊嵌される場合につき説明しているがこれに限定されるものではない。上述の試料セルＳ２を試料載置台１に固定することを考慮しない場合等においては、装着体１３と押止体１２との間に隙間が生じないように嵌合することにしてもよい。
また、押止体１２と収納部１１１との間に隙間があるように構成することにしてもよい。 In addition, in this Embodiment, although demonstrated about the case where the mounting body 13 is loosely fitted to the presser body 12, it is not limited to this. In the case where it is not considered to fix the sample cell S2 to the sample mounting table 1, the fitting may be performed so that no gap is generated between the mounting body 13 and the holding body 12.
Moreover, you may decide to comprise so that there may be a clearance gap between the pressing body 12 and the accommodating part 111. FIG.

また、押止体１２と装着体１３とが別体である場合に限定されるものではない。図７に示すように、押止体１２と装着体１３とを一体化して装着体２３を構成することにしてもよい。図７中、図５と同一部分は同一符号を付している。装着体２３は、貫通孔２３１と、基板１１の突出部１１２に外嵌する凹部２３３とを備える。この場合においても、Ｘ線透過膜１４を挟んだ状態で装着体２３の側面が収納部１１１の内壁に押圧され、Ｘ線透過膜１４に張力が生じた状態で、凹部２３３が突出部１１２に嵌合される。この場合、装着体１３の基板１１への装着作業が簡単になる。   Moreover, it is not limited to when the pressing body 12 and the mounting body 13 are separate bodies. As shown in FIG. 7, the holding body 23 may be configured by integrating the holding body 12 and the mounting body 13. In FIG. 7, the same parts as those in FIG. The mounting body 23 includes a through-hole 231 and a recess 233 that fits around the protruding portion 112 of the substrate 11. Even in this case, the side surface of the mounting body 23 is pressed against the inner wall of the storage portion 111 with the X-ray permeable membrane 14 interposed therebetween, and the recess 233 is formed on the protruding portion 112 while the X-ray permeable membrane 14 is tensioned. Mated. In this case, the mounting work of the mounting body 13 on the substrate 11 is simplified.

さらに、上述した本実施の形態においては、基板１１が突出部１１２を有し、装着体１３が凹部１３３を有し、突出部１１２に装着体１３を嵌合する場合につき説明しているがこれに限定されるものではない。基板１１に凹部（嵌合部）が設けられ、装着体１３に凸部（被嵌合部）が設けられており、該凸部を凹部に嵌合して装着体１３を基板１１に装着することにしてもよい、この場合においても、予め押止体１２によりＸ線透過膜１４の周縁側部分を押止するようにする。   Further, in the above-described embodiment, the case where the substrate 11 has the protruding portion 112, the mounting body 13 has the concave portion 133, and the mounting body 13 is fitted to the protruding portion 112 has been described. It is not limited to. The substrate 11 is provided with a concave portion (fitting portion), and the mounting body 13 is provided with a convex portion (fitted portion). The convex portion is fitted into the concave portion and the mounting body 13 is attached to the substrate 11. In this case as well, the peripheral side portion of the X-ray transmission film 14 is previously held by the pressing body 12.

実施の形態２．
本発明の実施の形態２に係るＸ線検出装置は、試料載置台３０の構成が異なること以外は、実施の形態１に係るＸ線検出装置１０と同様の構成を有する。
図８Ａは本発明の実施の形態２に係る試料載置台３０を示す断面図、図８Ｂは装着体３３を基板３１に装着した場合の一部拡大図である。
試料載置台３０は、基板３１と装着体３３とを備える。試料載置台３０は、実施の形態１に係る試料載置台１と異なり、押止体は装着体３３と一体化されている。
基板３１は、矩形板状をなす。基板３１の少し内側には、装着体３３を収納する筒状の収納部３１１が突設されている。収納部３１１の外縁は角部を丸めた四角形状をなし、内縁は円状をなしている。
また、基板３１は、中央部に丸筒状をなす突出部（第１嵌合部）３１２を有する。突出部３１２の内壁面に相当する開口部３１３は、収納部３１１の底面を貫通し、即ち基板３１を貫通している。
基板３１の平面の、収納部３１１の周壁部と突出部３１２との間には、平面視がリング状をなす凸部（第２嵌合部）３１５が突設されている。 Embodiment 2. FIG.
The X-ray detection apparatus according to the second embodiment of the present invention has the same configuration as the X-ray detection apparatus 10 according to the first embodiment except that the configuration of the sample mounting table 30 is different.
FIG. 8A is a cross-sectional view showing the sample mounting table 30 according to Embodiment 2 of the present invention, and FIG. 8B is a partially enlarged view when the mounting body 33 is mounted on the substrate 31.
The sample mounting table 30 includes a substrate 31 and a mounting body 33. Unlike the sample mounting table 1 according to the first embodiment, the sample mounting table 30 is integrated with a mounting body 33.
The substrate 31 has a rectangular plate shape. A cylindrical storage portion 311 that stores the mounting body 33 protrudes slightly inside the substrate 31. The outer edge of the storage portion 311 has a quadrangular shape with rounded corners, and the inner edge has a circular shape.
Further, the substrate 31 has a protruding portion (first fitting portion) 312 having a round cylindrical shape at the center. An opening 313 corresponding to the inner wall surface of the protruding portion 312 passes through the bottom surface of the storage portion 311, that is, passes through the substrate 31.
A convex portion (second fitting portion) 315 having a ring shape in plan view is provided between the peripheral wall portion of the storage portion 311 and the protruding portion 312 in the plane of the substrate 31.

装着体３３は円板状をなす。装着体３３の中央部に貫通孔３３１が設けられており、装着体３３の裏側には、平面視で、直径が貫通孔３３１の直径より大きい円状をなす凹部（第１被嵌合部）３３３が設けられている。
装着体３３の裏面の周縁部には、凸部３１５に嵌合される凹部（第２被嵌合部）３３５が設けられている。 The mounting body 33 has a disk shape. A through hole 331 is provided in the center of the mounting body 33, and a concave portion (first fitting portion) having a circular shape with a diameter larger than the diameter of the through hole 331 in plan view is provided on the back side of the mounting body 33. 333 is provided.
A concave portion (second fitted portion) 335 to be fitted to the convex portion 315 is provided on the peripheral edge portion of the back surface of the mounting body 33.

本実施の形態においては、Ｘ線透過膜１４を、中央部が突出部３１２に当接された状態で収納部３１１に載置し、Ｘ線透過膜１４の周縁側部分を挟んだ状態で凹部３３５を凸部３１５に押圧するように嵌合し、Ｘ線透過膜１４に張力が生じた後、凹部３３３を突出部３１２に嵌合して、装着体３３を基板３１に装着する。本実施の形態においては、凹部３３５によりＸ線透過膜１４が基板３１側に押止され、凹部３３５は、実施の形態１に係る押止体として機能する。   In the present embodiment, the X-ray permeable membrane 14 is placed on the storage portion 311 with the central portion in contact with the protruding portion 312, and the concave portion is sandwiched between the peripheral side portions of the X-ray transmissive membrane 14. 335 is pressed against the convex portion 315 and tension is generated in the X-ray transmission film 14, and then the concave portion 333 is fitted into the protruding portion 312 to mount the mounting body 33 on the substrate 31. In the present embodiment, the X-ray permeable film 14 is pressed against the substrate 31 by the recess 335, and the recess 335 functions as a pressing body according to the first embodiment.

凹部３３３、凹部３３５それぞれの、装着体３３の底面からの高さをａ、ｂとし、凸部３１５、突出部３１２、収納部３１１それぞれの、収納部３１１の底面からの高さをｃ、ｄ、ｅとする。
Ｘ線透過膜１４を挟んだ状態で凹部３３５を凸部３１５に押圧するように嵌合した後、凹部３３３を突出部３１２に嵌合して、装着体３３を基板３１に装着するためには、ａ、ｂ、ｃ、ｄは以下の式（１）、式（２）を満たす必要がある。
ａ≦ｄ ・・・（１）
ａ＋ｃ＜ｂ＋ｄ ・・・（２）
図８Ｂに示すように、凹部３３３と突出部３１２との間にＸ線透過膜１４が展張した状態で挟まれるためには、上記式（１）を満たす必要がある。ａ＞ｄである場合、凹部３３３と突出部３１２との間に隙間が生じ、Ｘ線透過膜１４を展張した状態で挟むことができず、凹みが生じる。この場合、Ｘ線の照射時に散乱したり、試料Ｓ１を撮像する場合、影が生じて良好な撮像が得られないことになり、分析精度が低下する。 The height of each of the concave portion 333 and the concave portion 335 from the bottom surface of the mounting body 33 is a and b, and the height of each of the convex portion 315, the protruding portion 312 and the storage portion 311 from the bottom surface of the storage portion 311 is c and d. , E.
In order to attach the mounting body 33 to the substrate 31 by fitting the concave portion 335 to the convex portion 315 and fitting the concave portion 333 to the projecting portion 312 with the X-ray permeable membrane 14 sandwiched therebetween. , A, b, c, and d need to satisfy the following expressions (1) and (2).
a ≦ d (1)
a + c <b + d (2)
As shown in FIG. 8B, in order for the X-ray permeable film 14 to be sandwiched between the recess 333 and the protrusion 312, the above formula (1) needs to be satisfied. When a> d, a gap is formed between the recess 333 and the protrusion 312, and the X-ray permeable membrane 14 cannot be sandwiched in a stretched state, resulting in a recess. In this case, when the sample is scattered during X-ray irradiation or when the sample S1 is imaged, a shadow is generated, and good imaging cannot be obtained, and the analysis accuracy is lowered.

そして、図８Ｂに示すように、収納部３１１の底面を基準面とした場合、（ｄ−ａ）にｂを加えた高さをｃより高くすることにより、凹部３３５と凸部３１５との間に隙間が生じ、先に凹部３３５と凸部３１５との間にＸ線透過膜１４を挟んだ後、凹部３３３を突出部３１２に嵌めることが可能になる。即ち、凹部３３５と凸部３１５との間に隙間がない場合、先に凹部３３３が突出部３１２に嵌合し、Ｘ線透過膜１４を展張することができなくなる。
上述の関係式（ｄ−ａ＋ｂ＞ｃ）より上記式（２）が導かれる。
また、装着体３３を基板３１に嵌めたときに上面が面一になるように下記の式（３）を満たす必要がある。
ｄ＜ｅ ・・・（３） As shown in FIG. 8B, when the bottom surface of the storage portion 311 is used as a reference surface, the height obtained by adding b to (da) is set higher than c, so that the distance between the concave portion 335 and the convex portion 315 is increased. After the X-ray transmissive film 14 is sandwiched between the concave portion 335 and the convex portion 315, the concave portion 333 can be fitted into the protruding portion 312. That is, when there is no gap between the concave portion 335 and the convex portion 315, the concave portion 333 is first fitted into the protruding portion 312, and the X-ray permeable film 14 cannot be stretched.
From the above relational expression (d−a + b> c), the above expression (2) is derived.
Further, it is necessary to satisfy the following formula (3) so that the top surface is flush with the mounting body 33 when fitted to the substrate 31.
d <e (3)

本実施の形態においては、従来の取付部品を用いることなく、凹部３３５を凸部３１５に押圧するように嵌合するのみで、容易にＸ線透過膜１４に、中央部から斜め下方の外縁へ向けて張力を付与することができ、しかも凸部３１５はリング状をなすので、Ｘ線透過膜１４を周方向に均等に展張することができ、この展張状態が緩むことなく、凹部３３３を突出部３１２に嵌めることができる。従って、Ｘ線透過膜１４はたわみ、しわ、折れが生じるのが抑制された状態で基板３１に固定され、Ｘ線照射部４からＸ線を照射する場合にＸ線が散乱することがなく、良好に試料Ｓ１にＸ線を照射することができる。そして、Ｘ線透過膜１４が、たわみ等が生じるのが抑制されているので、影が生じず、撮像素子６１により良好に試料Ｓ１を撮影することができる。従って、良好な分析精度が得られる。   In the present embodiment, it is easy to fit the X-ray permeable membrane 14 from the central portion to the outer edge obliquely below by simply fitting the concave portion 335 against the convex portion 315 without using a conventional mounting part. Since the convex portion 315 has a ring shape, the X-ray permeable film 14 can be evenly stretched in the circumferential direction, and the concave portion 333 projects without being loosened. It can be fitted to the part 312. Therefore, the X-ray transmissive film 14 is fixed to the substrate 31 in a state where bending, wrinkling, and bending are suppressed, and X-rays are not scattered when X-ray irradiation is performed from the X-ray irradiation unit 4. The sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.

実施の形態３．
本発明の実施の形態３に係るＸ線検出装置は、試料載置台３０の構成が異なること以外は、実施の形態２に係るＸ線検出装置と同様の構成を有する。図中、図８と同一部分は同一符号を付して詳細な説明を省略する。
図９は、本発明の実施の形態３に係る試料載置台３０を示す断面図である。
本実施の形態においては、基板３１の平面の、収納部３１１の周壁部と突出部（第１嵌合部）３１２との間には、平面視が円状をなす溝部（第２嵌合部）３１４が設けられている。
そして、装着体３３の裏面の周縁側部分には、溝部３１４に嵌合される挿入部（第２被嵌合部）３３４が突設されている。 Embodiment 3 FIG.
The X-ray detection apparatus according to Embodiment 3 of the present invention has the same configuration as that of the X-ray detection apparatus according to Embodiment 2 except that the configuration of the sample mounting table 30 is different. In the figure, the same parts as those in FIG.
FIG. 9 is a cross-sectional view showing a sample mounting table 30 according to Embodiment 3 of the present invention.
In the present embodiment, a groove (second fitting portion) having a circular plan view between the peripheral wall portion of the storage portion 311 and the protruding portion (first fitting portion) 312 in the plane of the substrate 31. ) 314 is provided.
An insertion portion (second fitted portion) 334 that fits into the groove portion 314 protrudes from the peripheral side portion of the back surface of the mounting body 33.

本実施の形態においては、Ｘ線透過膜１４を、中央部が突出部３１２に当接された状態で収納部３１１に載置し、Ｘ線透過膜１４の周縁側部分を挟んだ状態で、挿入部３３４を溝部３１４に押圧するように嵌合し、Ｘ線透過膜１４に張力が生じた後、凹部（第１被嵌合部）３３３を突出部３１２に嵌合して、装着体３３を基板３１に装着する。   In the present embodiment, the X-ray permeable membrane 14 is placed on the storage portion 311 with the central portion being in contact with the protruding portion 312 and the peripheral side portion of the X-ray permeable membrane 14 is sandwiched between them. After the insertion portion 334 is fitted to the groove portion 314 to be pressed and tension is generated in the X-ray permeable membrane 14, the concave portion (first fitted portion) 333 is fitted to the protruding portion 312, and the mounting body 33. Is mounted on the substrate 31.

凹部３３３、挿入部３３４それぞれの、装着体３３の底面からの高さ、突出長をａ、ｂとし、溝部３１４の収納部３１１の底面からの深さをｃとし、突出部３１２、収納部３１１それぞれの、収納部３１１の底面からの高さをｄ、ｅとする。
Ｘ線透過膜１４を挟んだ状態で挿入部３３４を溝部３１４に押圧するように嵌合した後、凹部３３３を突出部３１２に嵌合して、装着体３３を基板３１に装着するためには、ａ、ｂ、ｃ、ｄは以下の式（１）、式（４）を満たす必要がある。
ａ≦ｄ ・・・（１）
ａ＋ｂ＜ｃ＋ｄ ・・・（４）
装着体３３の底面を基準面とした場合、（ｄ−ａ）にｃを加えた、前記基準面からの突出長をｂより長くすることにより、挿入部３３４と溝部３１４との間に隙間が生じ、先に挿入部３３４と溝部３１４との間にＸ線透過膜１４を挟んだ後、凹部３３３を突出部３１２に嵌めることが可能になる。即ち、挿入部３３４と溝部３１４との間に隙間がない場合、先に凹部３３３が突出部３１２に嵌合し、Ｘ線透過膜１４を展張することができなくなる。
上述の関係式（ｄ−ａ＋ｃ＞ｂ）より上記式（４）が導かれる。
また、装着体３３を基板３１に嵌めたときに上面が面一になるように上記式（３）を満たす必要がある。 The height and the protruding length of the concave portion 333 and the insertion portion 334 from the bottom surface of the mounting body 33 are a and b, the depth of the groove portion 314 from the bottom surface of the storage portion 311 is c, and the protrusion portion 312 and the storage portion 311. The heights from the bottom surface of the storage unit 311 are d and e, respectively.
In order to attach the mounting body 33 to the substrate 31 by fitting the insertion portion 334 against the groove portion 314 with the X-ray permeable membrane 14 interposed therebetween, and then fitting the concave portion 333 to the protruding portion 312. , A, b, c, and d need to satisfy the following expressions (1) and (4).
a ≦ d (1)
a + b <c + d (4)
In the case where the bottom surface of the mounting body 33 is used as a reference surface, by adding c to (da), the protrusion length from the reference surface is made longer than b, so that a gap is formed between the insertion portion 334 and the groove portion 314. As a result, after the X-ray transmission film 14 is sandwiched between the insertion portion 334 and the groove portion 314, the concave portion 333 can be fitted into the protruding portion 312. That is, when there is no gap between the insertion portion 334 and the groove portion 314, the concave portion 333 is first fitted into the protruding portion 312, and the X-ray permeable membrane 14 cannot be expanded.
From the above relational expression (d−a + c> b), the above expression (4) is derived.
Further, it is necessary to satisfy the above formula (3) so that the upper surface is flush with the mounting body 33 when fitted to the substrate 31.

本実施の形態においては、従来の取付部品を用いることなく、Ｘ線透過膜１４の周縁側部分を挟んだ状態で、挿入部３３４を溝部３１４に押圧するように嵌合するのみで、容易にＸ線透過膜１４に、中央部から斜め下方の外縁へ向けて張力を付与することができ、しかも挿入部３３４はリング状をなすので、Ｘ線透過膜１４を周方向に均等に展張することができ、この展張状態が緩むことなく、凹部３３３を突出部３１２に嵌めることができる。従って、Ｘ線透過膜１４はたわみ、しわ、折れが生じるのが抑制された状態で基板３１に固定され、Ｘ線照射部４からＸ線を照射する場合にＸ線が散乱することがなく、良好に試料Ｓ１にＸ線を照射することができる。そして、Ｘ線透過膜１４が、たわみ等が生じるのが抑制されているので、影が生じず、撮像素子６１により良好に試料Ｓ１を撮影することができる。従って、良好な分析精度が得られる。   In the present embodiment, it is possible to easily fit the pressing portion 334 against the groove portion 314 while sandwiching the peripheral portion of the X-ray permeable membrane 14 without using a conventional mounting part. Tension can be applied to the X-ray permeable membrane 14 from the central portion toward the outer edge obliquely downward, and the insertion portion 334 has a ring shape, so that the X-ray permeable membrane 14 is evenly spread in the circumferential direction. The recessed portion 333 can be fitted into the protruding portion 312 without loosening the extended state. Therefore, the X-ray transmissive film 14 is fixed to the substrate 31 in a state where bending, wrinkling, and bending are suppressed, and X-rays are not scattered when X-ray irradiation is performed from the X-ray irradiation unit 4. The sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.

なお、実施の形態２の凹部３３５は上側に凹んでいるのに対し、本実施の形態の挿入部３３４は下側に突出しており、実施の形態２のように上側に凹んでいる方向をプラスの方向とした場合、本実施の形態では挿入部３３４はプラスの方向に（−ｂ）だけ凹んでいることになる。
また、実施の形態２の凸部３１５が上側に突出しているのに対し、溝部３１４は下側に凹んでおり、実施の形態２のように上側に突出している方向をプラスの方向とした場合、本実施の形態では、溝部３１４はプラスの方向に（−ｃ）だけ突出していることになる。即ち、上記式（２）において、凹凸の向きを考慮して、［ａ＋（−ｃ）＜（−ｂ）＋ｄ］とすることで、上記式（４）が導かれる。 The concave portion 335 of the second embodiment is recessed upward, whereas the insertion portion 334 of the present embodiment protrudes downward, and the direction of concave upward is added as in the second embodiment. In this embodiment, the insertion portion 334 is recessed by (−b) in the plus direction.
Further, while the convex portion 315 of the second embodiment protrudes upward, the groove portion 314 is recessed downward, and the direction protruding upward as in the second embodiment is a plus direction. In this embodiment, the groove 314 protrudes in the positive direction by (−c). That is, in the above formula (2), the above formula (4) is derived by setting [a + (− c) <(− b) + d] in consideration of the direction of unevenness.

同様に、実施の形態２の図８の試料載置台３０の構成において、基板３１の中央部に凹部を、装着体３３の中央部に該凹部に嵌合する突出部を設ける場合、前記凹部は前記プラスの方向に（−ｄ）だけ突出し、前記突出部は前記プラスの方向に（−ａ）だけ凹んでいるので、上記式（１）において、凹凸の向きを考慮して、［（−ａ）≦（−ｄ）］とすることで、（ａ≧ｄ）の式が導かれるとともに、上記式（２）において、凹凸の向きを考慮して、［（−ａ）＋ｃ＜ｂ＋（−ｄ）］とすることで、（ｃ＋ｄ＜ａ＋ｂ）の式が導かれる。これらの式を満たす場合、凹部３３５と凸部３１５との間に隙間が生じ、先に凹部３３５と凸部３１５との間にＸ線透過膜１４を挟んだ後、装着体３３の突出部を基板３１の凹部に嵌めることが可能になる。   Similarly, in the configuration of the sample mounting table 30 of FIG. 8 according to the second embodiment, when a recess is provided at the center of the substrate 31 and a protrusion that fits into the recess is provided at the center of the mounting body 33, the recess is Since the protrusion protrudes by (−d) in the plus direction and the protrusion is recessed by (−a) in the plus direction, in the above equation (1), the direction of the unevenness is taken into account [(−a ) ≦ (−d)], the equation (a ≧ d) is derived, and in the above equation (2), the direction of the unevenness is taken into account, and [(−a) + c <b + (− d) )], The equation (c + d <a + b) is derived. When these formulas are satisfied, a gap is formed between the concave portion 335 and the convex portion 315, and after the X-ray transmissive film 14 is first sandwiched between the concave portion 335 and the convex portion 315, the protruding portion of the mounting body 33 is It is possible to fit into the recess of the substrate 31.

同様に、実施の形態２の図８の試料載置台３０の構成において、基板３１の中央部に凹部を、装着体３３の中央部に該凹部に嵌合する突出部を、基板３１の周縁部に溝部を、装着体３３の周縁部に該溝部に嵌合する挿入部を設ける場合、前記凹部は前記プラスの方向に（−ｄ）だけ突出し、前記突出部は前記プラスの方向に（−ａ）だけ凹み、前記溝部は前記プラスの方向に（−ｃ）だけ突出し、前記挿入部は前記プラスの方向に（−ｂ）だけ凹むことになるので、上記式（１）において、凹凸の向きを考慮して、［（−ａ）≦（−ｄ）］とすることで、（ａ≧ｄ）の式が導かれるとともに、上記式（２）において、凹凸の向きを考慮して、［（−ａ）＋（−ｃ）＜（−ｂ）＋（−ｄ）］とすることで、（ｂ＋ｄ＜ａ＋ｃ）の式が導かれる。これらの式を満たす場合、挿入部と溝部との間に隙間が生じ、先に挿入部と溝部との間にＸ線透過膜１４を挟んだ後、装着体の突出部を基板の凹部に嵌めることが可能になる。   Similarly, in the configuration of the sample mounting table 30 in FIG. 8 according to the second embodiment, a recess is formed at the center of the substrate 31, and a protrusion that fits into the recess is formed at the center of the mounting body 33. In the case where an insertion portion that fits into the groove portion is provided on the peripheral portion of the mounting body 33, the concave portion protrudes in the positive direction (−d), and the protruding portion extends in the positive direction (−a ), The groove protrudes by (−c) in the positive direction, and the insertion portion is recessed by (−b) in the positive direction. In consideration of this, by setting [(−a) ≦ (−d)], the equation (a ≧ d) is derived, and in the above equation (2), the direction of the unevenness is considered and [(− By setting a) + (− c) <(− b) + (− d)], an expression of (b + d <a + c) is derived. When these formulas are satisfied, a gap is generated between the insertion portion and the groove portion, and after the X-ray transmission film 14 is first sandwiched between the insertion portion and the groove portion, the protruding portion of the mounting body is fitted into the concave portion of the substrate. It becomes possible.

以上のように、第１嵌合部、第２嵌合部、第１被嵌合部、第２被嵌合部の凹凸の向きにつき、前記プラスの方向を基準としてプラス、マイナスを定義することで、上記式（１）及び式（２）が一般化される。即ち、第１嵌合部、第２嵌合部、第１被嵌合部、第２被嵌合部の凹凸の向きがいずれの場合であっても上記式（１）及び（２）を用いて、前記凹凸の大小関係を設定することができる。これにより、第２嵌合部と第２被嵌合部との嵌合時に嵌合方向に隙間が生じることになり、先に第２嵌合部と第２被嵌合部との間にＸ線透過膜１４を挟んだ後、第１被嵌合部を第１嵌合部に嵌めることが可能になり、Ｘ線透過膜１４を良好に展張することが可能になる。   As described above, plus and minus are defined on the basis of the plus direction with respect to the concave and convex directions of the first fitting portion, the second fitting portion, the first fitted portion, and the second fitted portion. Thus, the above formulas (1) and (2) are generalized. That is, the above formulas (1) and (2) are used regardless of the direction of unevenness of the first fitting portion, the second fitting portion, the first fitted portion, and the second fitted portion. Thus, the size relationship of the unevenness can be set. As a result, a gap is generated in the fitting direction when the second fitting portion and the second fitted portion are fitted, and the X is first formed between the second fitting portion and the second fitted portion. After the radiation permeable membrane 14 is sandwiched, the first fitted portion can be fitted into the first fitting portion, and the X-ray permeable membrane 14 can be satisfactorily stretched.

以上のように、本発明は、基板の外寄り部分にＸ線透過膜１４の外寄り部分を押圧した状態で、基板の内寄り部分に装着体を嵌めるので、内寄り部分が良好に展張した状態でＸ線透過膜を基板に固定することができる。
なお、今回開示した実施の形態は、全ての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、特許請求の範囲内での全ての変更及び特許請求の範囲と均等の範囲が含まれることが意図される。 As described above, according to the present invention, since the mounting body is fitted to the inner portion of the substrate while the outer portion of the X-ray transmission film 14 is pressed to the outer portion of the substrate, the inner portion is satisfactorily stretched. In this state, the X-ray transmission film can be fixed to the substrate.
The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is intended to include all modifications within the scope of the claims and the scope equivalent to the scope of the claims.

１ 試料載置台（試料載置体）
１１、３１ 基板
１１１、３１１ 収納部
１１２、３１２ 突出部
１１３、３１３ 開口部
３１４ 溝部
３１５ 凸部
１２ 押止体
１２１ テーパ面
１３、２３、３３ 装着体
１３１、２３１、３３１ 貫通孔
１３２ 切欠き
１３３、２３３、３３３ 凹部
３３４ 挿入部
３３５ 凹部
１４ Ｘ線透過膜
２ コリメータ
４ Ｘ線照射部
５ Ｘ線検出器
６１ 撮像素子
７ 直線駆動モータ
８１ 蓋部
８３ 筐体 1 Sample mounting table (sample mounting body)
11, 31 Substrate 111, 311 Storage portion 112, 312 Protruding portion 113, 313 Opening portion 314 Groove portion 315 Protruding portion 12 Pressing body 121 Tapered surface 13, 23, 33 Mounting body 131, 231, 331 Through hole 132 Notch 133, 233, 333 Concave part 334 Insertion part 335 Concave part 14 X-ray transmissive film 2 Collimator 4 X-ray irradiation part 5 X-ray detector 61 Imaging element 7 Linear drive motor 81 Cover part 83 Case

Claims (7)

基板を有し、Ｘ線透過膜を介して試料を載置する試料載置体と、該試料載置体に載置された試料へＸ線を照射するＸ線照射部と、前記試料から発生するＸ線を検出するＸ線検出器とを備えるＸ線検出装置において、
前記試料載置体は、
基板に嵌合部を有し、
前記基板の前記嵌合部より外側で、前記Ｘ線透過膜を押さえて止める押止体と、
前記嵌合部に嵌合される被嵌合部を有し、該被嵌合部と前記嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板に装着される装着体と
を備えることを特徴とするＸ線検出装置。 A sample mounting body having a substrate and mounting a sample via an X-ray permeable film, an X-ray irradiation unit for irradiating the sample mounted on the sample mounting body with X-rays, and generated from the sample In an X-ray detection apparatus comprising an X-ray detector for detecting X-rays to be
The sample mounting body is:
It has a fitting part on the board,
A pressing body that holds and presses down the X-ray permeable membrane outside the fitting portion of the substrate;
A mounting body that has a fitted portion to be fitted to the fitting portion, and is attached to the substrate in a state in which the X-ray transmission film is sandwiched between the fitted portion and the fitting portion. An X-ray detection apparatus comprising: 前記嵌合部は、筒状をなす突出部であり、
前記装着体は平板状をなし、前記被嵌合部は、前記突出部に嵌合される凹部であることを特徴とする請求項１に記載のＸ線検出装置。 The fitting part is a cylindrical projecting part,
The X-ray detection apparatus according to claim 1, wherein the mounting body has a flat plate shape, and the fitted portion is a concave portion fitted into the protruding portion. 前記基板は、周縁の内側に周壁部を有し、
前記押止体はリング状をなし、前記装着体に外嵌され、かつ前記周壁部に内嵌されることを特徴とする請求項２に記載のＸ線検出装置。 The substrate has a peripheral wall portion inside the periphery,
The X-ray detection apparatus according to claim 2, wherein the holding body has a ring shape, is externally fitted to the mounting body, and is fitted to the peripheral wall portion. 前記押止体は、前記装着体に隙間を有する状態で嵌められ、該装着体と前記押止体との間に、試料セルに設けてある脚部を差し込み可能に構成されていることを特徴とする請求項３に記載のＸ線検出装置。   The holding body is fitted to the mounting body in a state having a gap, and a leg portion provided in a sample cell can be inserted between the mounting body and the holding body. The X-ray detection apparatus according to claim 3. 前記装着体と押止体とは一体化してあることを特徴とする請求項３に記載のＸ線検出装置。   The X-ray detection apparatus according to claim 3, wherein the mounting body and the pressing body are integrated. 基板を有し、Ｘ線透過膜を介して試料を載置する試料載置体と、該試料載置体に載置された試料へＸ線を照射するＸ線照射部と、前記試料から発生するＸ線を検出するＸ線検出器とを備えるＸ線検出装置において、
前記試料載置体は、
基板に第１嵌合部が設けられ、該第１嵌合部の外側に第２嵌合部が設けられており、
平板状をなし、前記第１嵌合部に嵌合される第１被嵌合部と、該第１被嵌合部の外側に設けられ、前記第２嵌合部に嵌合される第２被嵌合部とを有し、前記第１嵌合部と前記第１被嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板に装着される装着体を備えることを特徴とするＸ線検出装置。 A sample mounting body having a substrate and mounting a sample via an X-ray permeable film, an X-ray irradiation unit for irradiating the sample mounted on the sample mounting body with X-rays, and generated from the sample In an X-ray detection apparatus comprising an X-ray detector for detecting X-rays to be
The sample mounting body is:
A first fitting portion is provided on the substrate, and a second fitting portion is provided outside the first fitting portion;
A flat plate-like first fitting portion that is fitted to the first fitting portion, and a second fitting portion that is provided outside the first fitting portion and is fitted to the second fitting portion. A fitted body that is fitted to the substrate in a state in which the X-ray permeable film is sandwiched between the first fitted part and the first fitted part. A featured X-ray detection apparatus. 基板を有し、Ｘ線透過膜を介して試料を載置し、該試料にＸ線を照射して発生する蛍光Ｘ線を検出するために用いられる試料載置体において、
基板に嵌合部を有し、
前記基板の周縁側部分上で、前記Ｘ線透過膜を押さえて止める押止体と、
前記嵌合部に嵌合される被嵌合部を有し、該被嵌合部と前記嵌合部との間に前記Ｘ線透過膜を挟み込んだ状態で、前記基板の、前記押止体の内側に装着される装着体と
を備えることを特徴とする試料載置体。 In a sample mounting body used for detecting fluorescent X-rays generated by irradiating an X-ray on the sample, having a substrate, placing the sample through an X-ray permeable film,
It has a fitting part on the board,
On the peripheral side portion of the substrate, a pressing body that holds and stops the X-ray permeable film,
The holding body of the substrate has a fitted portion to be fitted to the fitting portion, and the X-ray permeable film is sandwiched between the fitted portion and the fitting portion. A sample mounting body, comprising: a mounting body mounted on the inside of the mounting body.

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