JP2013243570A5

JP2013243570A5 -

Info

Publication number: JP2013243570A5
Application number: JP2012116192A
Authority: JP
Filing date: 2012-05-22
Publication date: 2015-04-30
Anticipated expiration: 2032-05-22

Description

本発明の実施の形態３における弾性波装置１０４の電気特性を図１２に示す。図１２において、横軸は周波数、縦軸は減衰量であり、本発明の実施の形態３における弾性波装置１０４の電気特性Ｄを実線で示し、本発明の実施の形態１における弾性波装置１０１の電気特性Ａを一点破線で示し、本発明の実施の形態１で説明した比較例の電気特性Ｅを破線で示す。図１２において、通過帯域Ｓは送信帯域である７０４ＭＨｚ〜７１６ＭＨｚであり、７３４ＭＨｚ〜７４６ＭＨｚの受信帯域Ｔは、通過帯域Ｓの高域側の帯域外にある。
FIG. 12 shows the electrical characteristics of the acoustic wave device 104 according to Embodiment 3 of the present invention. 12, the horizontal axis represents frequency and the vertical axis is attenuation, showing the electrical characteristics D of the acoustic wave device 104 according to the third embodiment of the present invention in solid lines, acoustic wave device according to the first embodiment of the present invention An electrical characteristic A 101 is indicated by a one-dot broken line, and an electrical characteristic E of the comparative example described in the first embodiment of the present invention is indicated by a broken line. In FIG. 12, the pass band S is 704 MHz to 716 MHz, which is a transmission band, and the reception band T of 734 MHz to 746 MHz is outside the high band side band of the pass band S.

図１２に示すように、本発明の実施の形態３における弾性波装置１０４の電気特性Ｄは、本発明の実施の形態１における弾性波装置１０１の電気特性Ａに近い特性を有する領域もあるが、通過帯域Ｓの高域部において挿入損失をより低減することができた。
As shown in FIG. 12, the electrical characteristics D of the acoustic wave device 104 according to the third embodiment of the present invention, there is also a region having characteristics similar to the electrical characteristics A of the acoustic wave device 101 according to the first embodiment of the present invention However, the insertion loss can be further reduced in the high band part of the pass band S.

Claims

２つの信号端子の間に接続され、圧電基板の表面に形成された第１の配線と、
前記第１の配線に直列に接続され、一端子対弾性波素子を含む直列腕共振器と、
第１の基準電位端子に接続され、前記圧電基板の表面に形成された第１の基準電極と、
前記第１の配線上に設けられた接続点と前記第１の基準電極との間に接続された第２の配線と、
前記第２の配線に直列に接続され、一端子対弾性波素子を含む並列腕共振器とを備え、
第２の基準電位端子に接続され、前記圧電基板の表面において前記第１の基準電極から電気的に分離された第２の基準電極を設け、
前記第２の基準電極と前記接続点とを接続する第３の配線を設け、
前記第３の配線に直列に第１の容量素子を接続した弾性波装置。 A first wiring connected between the two signal terminals and formed on the surface of the piezoelectric substrate;
A series arm resonator connected in series to the first wiring and including a one-terminal acoustic wave element;
A first reference electrode connected to a first reference potential terminal and formed on the surface of the piezoelectric substrate;
A second wiring connected between a connection point provided on the first wiring and the first reference electrode;
A parallel arm resonator connected in series to the second wiring and including a one-terminal acoustic wave element;
A second reference electrode connected to a second reference potential terminal and electrically separated from the first reference electrode on the surface of the piezoelectric substrate;
Providing a third wiring connecting the second reference electrode and the connection point;
An elastic wave device in which a first capacitive element is connected in series to the third wiring.

前記第１の基準電極を前記圧電基板の表面の第１の端辺の側に形成し、
前記第２の基準電極を前記圧電基板の表面の第１の端辺と対向する第２の端辺の側に形成した請求項１記載の弾性波装置。 Forming the first reference electrode on the first end side of the surface of the piezoelectric substrate;
The acoustic wave device according to claim 1, wherein the second reference electrode is formed on a second end side facing the first end side of the surface of the piezoelectric substrate.

前記第１の基準電位端子と前記第２の基準電位端子とを、同一の電位を有する基準電位端子として形成する請求項１又は２に記載の弾性波装置。 Wherein the first reference potential terminal and said second reference potential terminal, the acoustic wave device according to claim 1 or 2, formed as a reference potential terminal having the same potential.

前記同一の電位はグランド電位である請求項３記載の弾性波装置。4. The acoustic wave device according to claim 3, wherein the same potential is a ground potential.

前記並列腕共振器に並列に第２の容量素子を接続した請求項１乃至４のいずれか一項記載の弾性波装置。 The acoustic wave device according to any one of claims 1 to 4 and connecting the second capacitive element in parallel with the parallel arm resonator.

前記直列腕共振器を複数備え、前記直列腕共振器のうち、他の直列腕共振器を介さずに前記信号端子の一方に接続された直列腕共振器に、第３の容量素子が並列接続されていることを特徴とする請求項１乃至５のいずれか一項記載の弾性波装置。 The series arm example multiple Bei the resonator, of the pre Kijika column resonators, the connected series arm resonators to one of the signal terminals without passing through the other serial arm resonator, a third capacitance acoustic wave device of any one of claims 1 to 5, characterized in that elements are connected in parallel.

前記弾性波装置の占有面積は前記圧電基板の占有面積とほぼ等しい請求項１記載の弾性波装置。 The elastic wave device according to claim 1, wherein an occupied area of the elastic wave device is substantially equal to an occupied area of the piezoelectric substrate.

前記容量素子は２枚の平行平板で誘電体を挟むように構成される請求項１記載の弾性波装置。The acoustic wave device according to claim 1, wherein the capacitive element is configured to sandwich a dielectric between two parallel flat plates.

前記容量素子は櫛型電極を含む請求項１記載の弾性波装置。The acoustic wave device according to claim 1, wherein the capacitive element includes a comb-shaped electrode.

前記直列腕共振器と前記並列腕共振器とはラダー型フィルタを形成する請求項１記載の弾性波装置。The acoustic wave device according to claim 1, wherein the series arm resonator and the parallel arm resonator form a ladder type filter.

前記圧電基板の表面に、励振空間を介して前記直列腕共振器及び前記並列腕共振器を封止する封止体をさらに含む請求項１記載の弾性波装置。The acoustic wave device according to claim 1, further comprising a sealing body that seals the series arm resonator and the parallel arm resonator through an excitation space on a surface of the piezoelectric substrate.

前記第１及び前記第２の基準電極はそれぞれ、前記封止体を貫通する導体を含むインダクタを経由して前記第１及び第２の基準電位端子に接続される請求項１１記載の弾性波装置。The acoustic wave device according to claim 11, wherein the first and second reference electrodes are respectively connected to the first and second reference potential terminals via an inductor including a conductor penetrating the sealing body. .

前記第２の基準電極が複数の基準電極部分に分割される請求項１記載の弾性波装置。The acoustic wave device according to claim 1, wherein the second reference electrode is divided into a plurality of reference electrode portions.

前記並列腕共振器を複数備え、前記並列腕共振器の１つが前記基準電極部分の１つに接続される請求項１３記載の弾性波装置。The acoustic wave device according to claim 13, comprising a plurality of the parallel arm resonators, wherein one of the parallel arm resonators is connected to one of the reference electrode portions.

前記１つ以外の前記並列腕共振器が前記１つ以外の前記基準電極部分に接続される請求項１４記載の弾性波装置。The elastic wave device according to claim 14, wherein the parallel arm resonators other than the one are connected to the reference electrode portions other than the one.

弾性表面波、弾性境界波、及びバルク波のいずれか１つが用いられる請求項１乃至１５のいずれか一項記載の弾性波装置。The elastic wave device according to claim 1, wherein any one of a surface acoustic wave, a boundary acoustic wave, and a bulk wave is used.