JP2013233511A - Coating film material application apparatus and method of applying coating film material to long member - Google Patents
Coating film material application apparatus and method of applying coating film material to long member Download PDFInfo
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Abstract
Description
本発明は、長尺部材の表面に塗膜材を塗布する塗膜材塗布装置およびこれを用いた長尺部材への塗膜材の塗布方法に関するものである。 The present invention relates to a coating material coating apparatus for coating a coating material on the surface of a long member and a coating method of a coating material on a long member using the coating material coating apparatus.
近年、例えば太陽電池パネルのような発電機器においては、受光面に機能性薄膜が形成されて用いられる。このような機能性薄膜は、例えば、真空蒸着やＣＶＤ等の各種の大型・真空プロセスの他、小さなプロセス領域や非真空系を用いたロール・ツー・ロールプロセス等によって形成される。 In recent years, for example, in a power generation device such as a solar cell panel, a functional thin film is formed on a light receiving surface. Such a functional thin film is formed by, for example, a roll-to-roll process using a small process area or a non-vacuum system, in addition to various large-sized and vacuum processes such as vacuum deposition and CVD.
一方、特に高速でこのような機能性薄膜を形成する方法として、ダイスによる塗布方法がある。ダイスによる塗布方法では、数百ｍ／分以上での塗膜形成が可能である。 On the other hand, as a method for forming such a functional thin film at a particularly high speed, there is a coating method using a die. The coating method using a die can form a coating film at several hundred m / min or more.
ダイスにより、塗膜厚を精密に制御する塗布方法としては、例えば、長尺基材を連続的に移送しながら、その一方の表面に所定の間隔をおいて対向配置されたキャビティを有する塗布ダイスを用いて、塗布ダイスのキャビティ内へ所定の圧力で材料溶液を供給しながら、材料溶液により生じる塗布ダイスへの反発力が所定の値に保たれるように塗布ダイスへの荷重を制御する薄膜形成方法がある(特許文献１)。 As a coating method for precisely controlling the coating thickness by a die, for example, a coating die having a cavity disposed oppositely with a predetermined interval on one surface thereof while continuously transferring a long substrate. Is used to control the load on the coating die so that the repulsive force to the coating die generated by the material solution is maintained at a predetermined value while supplying the material solution into the cavity of the coating die at a predetermined pressure. There is a forming method (Patent Document 1).
特許文献１に記載の方法は、材料溶液を充填したダイスに基材を通過させ、この際に、ダイスの内部形状に応じて基材と共に溶剤が持ち出されることを利用し、基材表面に塗膜を形成するものである。 In the method described in Patent Document 1, the base material is passed through a die filled with a material solution, and at this time, the solvent is taken out together with the base material according to the internal shape of the die. A film is formed.
一方、前記機能性薄膜を基材上に形成する際、要求される薄膜の形態は用途によって様々である。例えば、透明基材を太陽電池の受光面とし、その外周に機能性薄膜を形成する場合には、機能性薄膜は受光面を避けて形成されることが望ましい。 On the other hand, when the functional thin film is formed on a substrate, the required form of the thin film varies depending on the application. For example, when a transparent base material is used as a light receiving surface of a solar cell and a functional thin film is formed on the outer periphery thereof, the functional thin film is desirably formed avoiding the light receiving surface.
図５（ａ）は、従来の塗布装置１００を示す断面図であり、図５（ｂ）は図５（ａ）のＹ−Ｙ線断面図である。塗布装置１００は、ガイド部１０１、ダイス部１０３等から構成される。ガイド部１０１とダイス部１０３の間に、長尺部材１０５が通される。ダイス部１０３の内部には、キャビティが形成される。キャビティには、塗膜材１０７が図示を省略した圧送装置で送られる（図中矢印Ｘ）。 Fig.5 (a) is sectional drawing which shows the conventional coating device 100, FIG.5 (b) is the YY sectional view taken on the line of Fig.5 (a). The coating apparatus 100 includes a guide unit 101, a dice unit 103, and the like. A long member 105 is passed between the guide part 101 and the die part 103. A cavity is formed inside the die portion 103. The coating material 107 is fed into the cavity by a pressure feeding device (not shown) (arrow X in the figure).
この際、図５（ｂ）に示すように、長尺部材１０５の下面側は、ガイド部１０１と接触する。したがって、ダイス部１０３の内部に圧送された塗膜材１０７は、長尺部材１０５の上面に所定圧さで連続して塗布される。 At this time, as shown in FIG. 5B, the lower surface side of the long member 105 is in contact with the guide portion 101. Therefore, the coating material 107 fed into the inside of the die part 103 is continuously applied to the upper surface of the long member 105 at a predetermined pressure.
しかし、長尺部材１０５とガイド部１０１は、互いに摺動するため、その間にわずかに隙間が形成される。したがって、塗膜材１０７の一部が長尺部材１０５の下面側に浸入するおそれがある（図中矢印Ｚ方向）。このように、塗膜材１０７が長尺部材１０５の下面側に回り込むことで、本来塗膜材１０７が塗布されない部位に対しても、塗膜材１０７が塗布されてしまう。 However, since the long member 105 and the guide part 101 slide with each other, a slight gap is formed between them. Therefore, a part of the coating material 107 may enter the lower surface side of the long member 105 (in the direction of arrow Z in the figure). Thus, the coating material 107 is applied even to a portion where the coating material 107 is not originally applied because the coating material 107 wraps around the lower surface side of the long member 105.
特に、塗膜材１０７が長尺部材１０５の下面に一度回り込むと、塗膜材１０７の圧力は、長尺部材１０５の下面側にも付与される。したがって、塗膜材１０７の圧力によって、ますます長尺部材１０５とガイド部１０１との隙間が押し広げられる。また、塗膜材１０７の一部が長尺部材１０５の下面側に塗布されることで、長尺部材１０５の上面側の膜厚が設計よりも薄くなる。 In particular, when the coating material 107 once goes around the lower surface of the long member 105, the pressure of the coating material 107 is also applied to the lower surface of the long member 105. Therefore, the gap between the long member 105 and the guide portion 101 is further increased by the pressure of the coating material 107. Moreover, when a part of the coating material 107 is applied to the lower surface side of the long member 105, the film thickness on the upper surface side of the long member 105 becomes thinner than the design.
これに対し、基材を挟み込むように塗布を行い、片面から材料溶液を、もう一方から揮発性の溶剤などを同時に塗布することで片面のみに薄膜を得る方法がある。しかし、この場合、塗布溶液が多くなる分、膜厚調整のための制御値も増える。またダイス内で材料溶液と溶剤が混ざる可能性がある。したがって、塗布膜厚の精密な制御と薄膜非形成部の形成の両立が可能な方法が望まれている。 On the other hand, there is a method of obtaining a thin film only on one side by performing application so as to sandwich the substrate, and simultaneously applying a material solution from one side and a volatile solvent from the other side. However, in this case, the control value for adjusting the film thickness increases as the coating solution increases. In addition, the material solution and the solvent may be mixed in the die. Therefore, a method capable of achieving both precise control of the coating film thickness and formation of the thin film non-formed part is desired.
本発明は、このような問題に鑑みてなされたもので、長尺部材に対して膜厚精度の高い薄膜を連続的かつ高速に形成することができ、長尺部材の表面の一部を薄膜非形成部とすることが可能な薄膜形成装置を提供することを目的とする。 The present invention has been made in view of such a problem, and can form a thin film with high film thickness accuracy on a long member continuously and at high speed, and a part of the surface of the long member is formed into a thin film. It aims at providing the thin film forming apparatus which can be set as a non-formation part.
前述した目的を達するために第１の発明は、長尺部材への塗膜材の塗布装置であって、長尺部材を保持するガイド部と、前記ガイド部と対向して配置され、塗膜材を前記長尺部材へ塗布するダイス部と、前記ダイス部に塗膜材を供給する塗膜材供給部と、を具備し、前記ガイド部には、前記長尺部材の一部と接触し、前記長尺部材を支持する支持部が形成され、前記支持部の端部には、前記長尺部材と接触しない溝部が形成され、前記長尺部材の前記ダイス部側の面に前記塗膜材を塗布可能であるとともに、前記ガイド部側の面であって、前記溝部に対応する部位に対する塗膜材の塗布を防止することが可能であることを特徴とする塗膜材塗布装置である。 In order to achieve the above-described object, the first invention is an apparatus for applying a coating material to a long member, and is disposed opposite to the guide portion that holds the long member, and the coating portion. A die part for applying a material to the long member; and a coating material supply part for supplying a coating material to the die part. The guide part is in contact with a part of the long member. A support portion that supports the long member is formed, and a groove portion that does not contact the long member is formed at an end portion of the support portion, and the coating film is formed on the surface of the long member on the die portion side. A coating material application apparatus characterized by being capable of applying a material and capable of preventing the coating material from being applied to a portion of the guide portion side corresponding to the groove. .
前記ダイス部の内部における前記塗膜材の圧力を検出する圧力検出部と、前記ガイド部の方向に対する前記ダイス部の押圧力を調整可能な圧力調整部と、をさらに具備し、前記圧力検出部により検出された圧力に応じて、前記圧力調整部を制御し、前記ダイス部の内部における前記塗膜材の圧力変動を抑制することが望ましい。 A pressure detection unit for detecting the pressure of the coating material inside the die unit; and a pressure adjustment unit capable of adjusting a pressing force of the die unit with respect to the direction of the guide unit, and the pressure detection unit. It is desirable to control the pressure adjusting unit in accordance with the pressure detected by, thereby suppressing the pressure fluctuation of the coating material inside the die part.
前記溝部の内部を排気する排気部をさらに具備し、前記溝部の内部を負圧にすることが可能であってもよい。 An exhaust part that exhausts the inside of the groove part may be further provided, and the inside of the groove part may be set to a negative pressure.
前記支持部は、前記長尺部材の両端部近傍と略中央部近傍とに接触して支持可能なように、前記ガイド部の両端部および略中央部に形成されることが望ましい。 It is preferable that the support portions are formed at both end portions and substantially central portions of the guide portion so as to be able to contact and support the vicinity of both end portions and the substantially central portion of the long member.
前記溝部の内部に漏れ出した塗膜材を回収する回収機構が設けられてもよい。 A recovery mechanism may be provided for recovering the coating material leaked into the groove.
第１の発明によれば、長尺部材の一部と接触する支持部と、長尺部材と接触しない溝部が形成されるため、接触部に塗膜材が多少浸入しても、溝部によって、塗膜材が長尺部材に付着することがない。したがって、薄膜非形成部を確実に形成することができる。 According to the first invention, since the support portion that contacts a part of the long member and the groove portion that does not contact the long member are formed, even if the coating material enters slightly into the contact portion, The coating material does not adhere to the long member. Therefore, the thin film non-formed portion can be formed reliably.
また、ダイス部の内部の塗膜材圧力を検出し、ダイス部の押圧力を制御することで、ダイス部の内部における塗膜材の圧力変動を抑制すれば、塗膜材の厚みを精密に制御することができる。 Moreover, if the pressure fluctuation of the coating material inside the die part is suppressed by detecting the coating material pressure inside the die part and controlling the pressing force of the die part, the thickness of the coating material can be accurately adjusted. Can be controlled.
また、溝部内を負圧とすることで、支持部に浸入した塗膜材を溝内に吸引することができる。したがって、塗膜材が薄膜非形成部に付着することを防止することができる。 Moreover, the coating-film material which permeated the support part can be attracted | sucked in a groove | channel by making the inside of a groove part into a negative pressure. Therefore, it can prevent that a coating-film material adheres to a thin film non-formation part.
また、支持部によって長尺部材の両端および中央部近傍を支持させることで、長尺部材の変形を抑制することができる。したがって、塗膜材の膜厚を精密に制御することができる。 Moreover, a deformation | transformation of a long member can be suppressed by supporting the both ends and center part vicinity of a long member by a support part. Therefore, the film thickness of the coating material can be precisely controlled.
また、溝部内に塗膜材の回収機構を設けることで、溝部内に浸入した塗膜材を回収することができる。したがって、長尺部材の表面に塗布されなかった塗膜材を再度使用することができる。 Moreover, the coating-film material which permeated in the groove part can be collect | recovered by providing the collection | recovery mechanism of a coating-film material in a groove part. Therefore, the coating material that has not been applied to the surface of the long member can be used again.
第２の発明は、第１の発明にかかる塗膜材塗布装置を用いた長尺部材への塗膜材の塗布方法であって、前記ダイス部へ塗膜材を供給しながら、前記ガイド部と前記ダイス部との間に長尺部材を移動させて、前記長尺部材の前記ダイス部側の面に前記塗膜材を連続的に塗布するとともに、前記長尺部材の前記ガイド部側の面であって、前記溝部に対応する部位に対する塗膜材の塗布を防止することを特徴とする長尺部材への塗膜材の塗布方法である。 2nd invention is the coating method of the coating material to the elongate member using the coating-material application | coating apparatus concerning 1st invention, Comprising: While supplying a coating-film material to the said die part, the said guide part And moving the elongate member between the die member and continuously applying the coating material on the die member side surface of the elongate member, and the guide member side of the elongate member It is a surface, Comprising: It is a coating method of the coating material to a elongate member characterized by preventing application | coating of the coating material with respect to the site | part corresponding to the said groove part.
第２の発明によれば、塗布膜厚を精密に制御することが可能であり、また、薄膜非塗布部を確実に形成することができる。 According to the second invention, it is possible to precisely control the coating film thickness, and it is possible to reliably form the thin film non-coated portion.
本発明によれば、長尺部材に対して膜厚精度の高い薄膜を連続的かつ高速に形成することができ、かつ長尺部材の表面の一部を薄膜非形成部とすることが可能な薄膜形成装置を提供することができる。 According to the present invention, a thin film with high film thickness accuracy can be continuously and rapidly formed on a long member, and a part of the surface of the long member can be a non-thin film forming portion. A thin film forming apparatus can be provided.
以下、図面を参照しながら、本発明の実施形態について説明する。図１は、塗布装置１を示す側方断面図であり、図２は図１のＣ−Ｃ線断面図である。塗布装置１は、主に、ガイド部３、ダイス部５、荷重検出部１１、駆動部１３等から構成される。なお、以下の説明において、基材である長尺部材１５の上面に対して塗膜材１７を塗布し、下面側へ薄膜非形成部を形成する方法について説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a side sectional view showing a coating apparatus 1, and FIG. 2 is a sectional view taken along the line CC in FIG. The coating apparatus 1 mainly includes a guide unit 3, a die unit 5, a load detection unit 11, a drive unit 13, and the like. In addition, in the following description, the method of apply | coating the coating material 17 with respect to the upper surface of the elongate member 15 which is a base material, and forming a thin film non-formation part in a lower surface side is demonstrated.
ガイド部３は、長尺部材１５を下方から保持する部材である。すなわち、長尺部材１５は、ガイド部３と接触する。ダイス部５は、ガイド部３の上方に配置される。ダイス部５は、内部にキャビティを有する。キャビティは、ダイス部５の例えば後方において外部と連通する。したがって、外部の図示を省略した加圧容器もしくはディスペンサー等の塗膜材供給部から、ダイス部５内部のキャビティに対して塗膜材１７を連続して送り込むことができる（図中矢印Ａ方向）。このとき、塗膜材１７の圧力もしくは流量が制御される。 The guide part 3 is a member that holds the long member 15 from below. That is, the long member 15 contacts the guide part 3. The die part 5 is disposed above the guide part 3. The die part 5 has a cavity inside. The cavity communicates with the outside, for example, behind the die portion 5. Therefore, the coating material 17 can be continuously fed into the cavity inside the die unit 5 from the coating material supply unit such as a pressurized container or a dispenser (not shown) outside (in the direction of arrow A in the figure). . At this time, the pressure or flow rate of the coating material 17 is controlled.
ダイス部５の入口形状は長尺部材１５の断面形状と相似形とし、出口形状は塗布後の長尺部材１５の断面形状の相似形となる。なお、ダイス部５の入口形状は長尺部材１５の幅方向に一様な形状が望ましいが、円形であっても良い。また、ダイス部５の内部でのキャビティの断面形状は、出口側（図中右側）に向かって径を大きくしてもよく、不変であっても良いが、図１に示すように、出口側に向かって段階的もしくは連続的に小さくなるようにすることが望ましい。 The inlet shape of the die portion 5 is similar to the cross-sectional shape of the long member 15, and the outlet shape is similar to the cross-sectional shape of the long member 15 after application. The inlet shape of the die portion 5 is preferably uniform in the width direction of the long member 15, but may be circular. Moreover, the cross-sectional shape of the cavity inside the die part 5 may be increased in diameter toward the outlet side (right side in the figure) or may be unchanged, but as shown in FIG. It is desirable to make it smaller stepwise or continuously toward.
ここで、長尺部材１５は、長手方向に連続した部材であり、例えば、径が数μｍ〜数ｍｍであり、断面が丸、矩形等の繊維状基材（線状体）であってもよく、幅が数ｍｍ以上で厚さが数μｍ〜数ｍｍの平板状基材であってもよい。また、長尺部材１５の材質は例えば、ガラス、樹脂、金属であるが、必ずしもこれらに限定されるものではない。なお、以下の説明では、略矩形断面の平板状の長尺部材１５の例を示す。 Here, the long member 15 is a member that is continuous in the longitudinal direction. For example, the long member 15 is a fibrous base material (linear body) having a diameter of several μm to several mm and having a round or rectangular cross section. It may be a flat substrate having a width of several mm or more and a thickness of several μm to several mm. Moreover, although the material of the elongate member 15 is glass, resin, and a metal, for example, it is not necessarily limited to these. In the following description, an example of the long plate member 15 having a substantially rectangular cross section is shown.
図２に示すように、ガイド部３とダイス部５との間を長尺部材１５が通過する。この際、長尺部材１５の上面側が、ダイス部５のキャビティに露出する。すなわち、長尺部材１５とダイス部５の内面との間には隙間が形成される。したがって、長尺部材１５の上面側は、キャビティ内の塗膜材１７と接触する。 As shown in FIG. 2, the long member 15 passes between the guide portion 3 and the die portion 5. At this time, the upper surface side of the long member 15 is exposed in the cavity of the die portion 5. That is, a gap is formed between the long member 15 and the inner surface of the die portion 5. Therefore, the upper surface side of the long member 15 is in contact with the coating material 17 in the cavity.
同様に、長尺部材１５の両側面とダイス部５およびガイド部３の内側面との間にも隙間が形成される。なお、長尺部材１５の側面には、必ずしも塗膜材１７を塗布する必要がない場合もあるが、長尺部材１５と、ダイス部５およびガイド部３の内側面との間に隙間が形成されないと、長尺部材１５を、塗布装置１内をスムーズに通過させることができない。したがって、長尺部材１５を塗布装置１内で高速で通過させることが可能な程度に、隙間を形成する必要がある。 Similarly, a gap is also formed between both side surfaces of the long member 15 and the inner surfaces of the die portion 5 and the guide portion 3. In addition, it may not always be necessary to apply the coating material 17 on the side surface of the long member 15, but a gap is formed between the long member 15 and the inner surface of the die portion 5 and the guide portion 3. Otherwise, the long member 15 cannot pass through the coating apparatus 1 smoothly. Therefore, it is necessary to form a gap to such an extent that the long member 15 can pass through the coating apparatus 1 at high speed.
なお、ダイス部５およびガイド部３と長尺部材１５とのクリアランスは数１０μｍ以上で、接触することなく走行可能なレベルとする。上限値に制約はないが、クリアランスが大き過ぎると液だれを引き起こすので１００μｍ程度を上限とするのが望ましい。 The clearance between the die portion 5 and the guide portion 3 and the long member 15 is several tens of μm or more, and is set to a level at which the vehicle can run without contact. Although there is no restriction on the upper limit value, it is desirable to set the upper limit to about 100 μm because a dripping will occur if the clearance is too large.
長尺部材１５の下面の少なくとも一部は、ガイド部３と接触する。ここで、ガイド部３上を進行する長尺部材１５には、キャビティ内の塗膜材１７の圧力が付与されるとともに、長尺部材１５の供給および巻き取り装置により所定の張力が与えられる。したがって、長尺部材１５はガイド部３の方向へ押さえつけられる。 At least a part of the lower surface of the long member 15 is in contact with the guide portion 3. Here, the long member 15 traveling on the guide portion 3 is applied with the pressure of the coating material 17 in the cavity and given a predetermined tension by the supply and winding device of the long member 15. Accordingly, the long member 15 is pressed in the direction of the guide portion 3.
ガイド部３には、長尺部材１５の幅に応じて、両側部に段差形状である支持部９ｂが形成されるとともに、幅方向の略中央部に支持部９ａが形成される。支持部９ａ、９ｂの上面が、長尺部材１５の下面との接触部となる。なお、支持部９ｂ同士の間隔は、長尺部材１５の幅よりも狭い。また、それぞれの支持部９ｂの幅は、前述した、長尺部材１５の両側部と、ダイス部５およびガイド部３の内側面との間の隙間の和よりも大きい。 According to the width of the long member 15, the guide portion 3 is formed with a support portion 9 b having a step shape on both sides, and a support portion 9 a is formed at a substantially central portion in the width direction. The upper surfaces of the support portions 9 a and 9 b are contact portions with the lower surface of the long member 15. The interval between the support portions 9 b is narrower than the width of the long member 15. Further, the width of each support portion 9 b is larger than the sum of the gaps between the both side portions of the long member 15 and the inner surfaces of the die portion 5 and the guide portion 3 described above.
支持部９ａ、９ｂ同士の間は、溝部７となる。すなわち、支持部９ａ、９ｂの端部には、長尺部材１５の下面と接触しない溝部７が形成される。なお、支持部９ａは、必ずしも必要ではないが、長尺部材１５を両側部のみで支持することによる、長尺部材１５の変形を抑制するためには、長尺部材１５の両側部および略中央の少なくも３箇所で支持することが望ましい。支持部９ａを形成しない場合には、支持部９ｂ同士の間が溝部７となる。 A groove portion 7 is formed between the support portions 9a and 9b. That is, the groove part 7 which does not contact the lower surface of the elongate member 15 is formed in the edge part of the support parts 9a and 9b. In addition, although the support part 9a is not necessarily required, in order to suppress the deformation | transformation of the elongate member 15 by supporting the elongate member 15 only by both sides, the both sides and substantially center of the elongate member 15 are supported. It is desirable to support at least three places. When the support portion 9a is not formed, the groove portion 7 is between the support portions 9b.
また、図１に示すように、ダイス部５の上部には、荷重検出部１１および駆動部１３が設けられる。荷重検出部１１は、例えばロードセル等であり、ダイス部５から受ける荷重を検知することができる。前述の通り、ダイス部５の内部のキャビティには、所定の圧力で塗膜材１７が連続して充填される。 As shown in FIG. 1, a load detection unit 11 and a drive unit 13 are provided on the upper portion of the die unit 5. The load detection unit 11 is, for example, a load cell or the like, and can detect a load received from the dice unit 5. As described above, the coating material 17 is continuously filled in the cavity inside the die portion 5 at a predetermined pressure.
一方、ダイス部５を通過する長尺部材１５は、その厚みが必ずしも一定ではない。このため、長尺部材１５の厚み変動に応じて、キャビティ内の塗膜材１７の圧力（特に長尺部材１５の出口側における圧力）が変動する。例えば、長尺部材１５の一部にわずかに厚い部分があると、長尺部材１５とダイス部５のクリアランスが小さくなる。このため、当該部位における圧力が増加する。逆に、長尺部材１５の一部にわずかに薄い部分があると、長尺部材１５とダイス部５のクリアランスが大きくなる。このため、当該部位における圧力が低下する。 On the other hand, the thickness of the long member 15 passing through the die portion 5 is not necessarily constant. For this reason, according to the thickness fluctuation | variation of the elongate member 15, the pressure (especially the pressure in the exit side of the elongate member 15) of the coating film material 17 in a cavity fluctuates. For example, if there is a slightly thick portion in a part of the long member 15, the clearance between the long member 15 and the die portion 5 becomes small. For this reason, the pressure in the said part increases. On the contrary, if there is a slightly thin portion in a part of the long member 15, the clearance between the long member 15 and the die portion 5 becomes large. For this reason, the pressure in the said site | part falls.
なお、このような圧力の変動は、長尺部材１５とのクリアランスが最も小さいダイス部５の出口近傍で顕著になる。したがって、塗膜材１７の圧力を監視することで、長尺部材１５とダイス部５との（特に出口近傍での）クリアランスの変動を検出することができる。すなわち、荷重検出部１１は、ダイス部５内部の塗膜材１７の圧力を検出可能な圧力検出部である。 Note that such pressure fluctuation becomes prominent in the vicinity of the outlet of the die portion 5 having the smallest clearance with the long member 15. Therefore, by monitoring the pressure of the coating material 17, it is possible to detect a variation in the clearance between the long member 15 and the die portion 5 (particularly in the vicinity of the outlet). That is, the load detection unit 11 is a pressure detection unit that can detect the pressure of the coating material 17 inside the die unit 5.
ダイス部５のキャビティ内の塗膜材１７の圧力が変動すると、ダイス部５の上方への反力が変動する。したがって、荷重検出部１１によって、ダイス部５から受ける荷重を検出することで、キャビティ内部の圧力変動を検出することができる。すなわち、長尺部材１５の厚み変動を検出することができる。 When the pressure of the coating material 17 in the cavity of the die part 5 fluctuates, the reaction force upward of the die part 5 fluctuates. Therefore, by detecting the load received from the die part 5 by the load detection part 11, the pressure fluctuation inside the cavity can be detected. That is, the thickness variation of the long member 15 can be detected.
駆動部１３は、移動ステージ等の荷重付与装置およびガイド手段としての固定ステージ等から構成され、荷重検出部１１と接続される。荷重検出部１１で圧力変動が検出されると、駆動部１３を、この圧力変動に応じて上下に移動させる（図中矢印Ｂ方向）。 The drive unit 13 includes a load applying device such as a moving stage and a fixed stage as a guide unit, and is connected to the load detection unit 11. When the pressure variation is detected by the load detection unit 11, the drive unit 13 is moved up and down in accordance with the pressure variation (in the direction of arrow B in the figure).
駆動部１３は、一定の力でダイス部５をガイド部３側に押し付ける。ダイス部５内の圧力変動が生じると、駆動部１３は、ガイド部３の方向（図中下方）に対するダイス部５の押圧力を調整する。すなわち、駆動部１３はダイス部５の内部の圧力調整部として機能する。このように、駆動部１３を動作させることで、ダイス部５の内部を一定の圧力で保持するように調整することができる。なお、駆動部１３は、ダイス部５の重心近傍に設置される。ダイス部５をガイド部３に対して平行に上下動させるためである。 The drive unit 13 presses the die unit 5 against the guide unit 3 side with a constant force. When the pressure fluctuation in the die part 5 occurs, the drive part 13 adjusts the pressing force of the die part 5 with respect to the direction of the guide part 3 (downward in the figure). That is, the drive unit 13 functions as a pressure adjustment unit inside the die unit 5. As described above, by operating the driving unit 13, the inside of the die unit 5 can be adjusted to be held at a constant pressure. The drive unit 13 is installed near the center of gravity of the die unit 5. This is because the die portion 5 is moved up and down in parallel with the guide portion 3.
このようにすることで、長尺部材１５とダイス部５の隙間（特に出口部）が所定のクリアランスとなるように調整される。したがって、ダイス部５に付与する荷重やダイス部５内に供給する塗膜材１７の圧力を制御することで、所望の膜厚の薄膜を形成することができる。なお、長尺部材１５の厚み変動が小さい場合や、塗膜材１７の厚み変化の許容幅が大きい場合には、駆動部１３等による制御は、必ずしも必要ではない。 By doing in this way, it adjusts so that the clearance gap (especially exit part) between the elongate member 15 and the die part 5 may become predetermined clearance. Therefore, a thin film having a desired film thickness can be formed by controlling the load applied to the die portion 5 and the pressure of the coating material 17 supplied into the die portion 5. When the variation in the thickness of the long member 15 is small or when the allowable width of the change in the thickness of the coating material 17 is large, the control by the driving unit 13 or the like is not necessarily required.
次に、長尺部材１５の表面に塗膜材１７に塗膜を形成する方法について説明する。長尺部材１５は、ホビン等から供給装置（図示省略）により、長尺部材１５前処理装置（図示省略）へ送られる。供給装置から連続して巻き出される長尺部材１５は、前処理装置によっての表面の洗浄・表面改質が行われる。例えば、走行する長尺部材１５に対して所定の成分のガス（プラズマが望ましい）や液体を照射もしくは浸漬して長尺部材１５の表面の洗浄や表面改質が行われる。 Next, a method for forming a coating film on the surface of the long member 15 on the coating material 17 will be described. The long member 15 is sent from a hobbin or the like to a long member 15 pretreatment device (not shown) by a supply device (not shown). The long member 15 continuously unwound from the supply device is subjected to surface cleaning and surface modification by the pretreatment device. For example, cleaning or surface modification of the surface of the long member 15 is performed by irradiating or immersing a gas (preferably plasma) or liquid of a predetermined component on the traveling long member 15.
前処理装置の後工程には塗布装置１が配置される。なお、前処理装置から塗布装置１にかけては不活性ガスを満たす等により長尺部材１５が外気にさらされない構造にするのが望ましい。塗布装置１に導入された長尺部材１５は、前述の通り、ダイス部５の内部において、塗膜材１７と接触する。ダイス部５内部を長尺部材１５が通過する際、長尺部材１５の表面に塗膜材１７が付着する。長尺部材１５がダイス部５から導出する際に、長尺部材１５の上面と、ダイス部５の内面とのクリアランスに応じた厚みの塗膜材１７が持ち出される。 A coating apparatus 1 is disposed in a post process of the pretreatment apparatus. Note that it is desirable that the long member 15 is not exposed to the outside air by filling the inert gas or the like from the pretreatment device to the coating device 1. The long member 15 introduced into the coating apparatus 1 is in contact with the coating material 17 inside the die portion 5 as described above. When the long member 15 passes through the inside of the die portion 5, the coating film material 17 adheres to the surface of the long member 15. When the long member 15 is led out from the die portion 5, the coating material 17 having a thickness corresponding to the clearance between the upper surface of the long member 15 and the inner surface of the die portion 5 is taken out.
ここで、図２に示すように、長尺部材１５の両側部には、クリアランスが形成される。したがって、このクリアランスには、塗膜材１７が回り込む。さらに、長尺部材１５の側方に回り込んだ塗膜材１７は、長尺部材１５の下方において、支持部９ｂと長尺部材１５の下面の隙間に浸入する。なお、長尺部材１５の下面は支持部９ｂと接触するが、長尺部材１５は支持部９ｂに対して摺動するため、わずかに隙間が生じる場合がある。したがって、塗膜材１７が長尺部材１５の下面側に入り込む恐れがある。 Here, as shown in FIG. 2, clearance is formed on both sides of the long member 15. Therefore, the coating material 17 wraps around this clearance. Further, the coating material 17 that has wrapped around the side of the long member 15 enters the gap between the support portion 9 b and the lower surface of the long member 15 below the long member 15. In addition, although the lower surface of the elongate member 15 contacts the support part 9b, since the elongate member 15 slides with respect to the support part 9b, a clearance gap may arise slightly. Therefore, the coating material 17 may enter the lower surface side of the long member 15.
しかし、本発明では、支持部９ｂの側方（内側）に溝部７が形成されるため、長尺部材１５の下面側に塗膜材１７が回り込んでも、塗膜材１７は溝部７に流出する（図中矢印Ｄ方向）。したがって、少なくとも支持部９ｂ以外の部位において、長尺部材１５の下面に塗膜材１７が塗布されることがない。 However, in the present invention, since the groove portion 7 is formed on the side (inside) of the support portion 9 b, the coating material 17 flows out into the groove portion 7 even if the coating material 17 wraps around the lower surface side of the long member 15. (In the direction of arrow D in the figure). Therefore, the coating film material 17 is not applied to the lower surface of the long member 15 at least in a portion other than the support portion 9b.
なお、溝部７に排気部を接続することで、溝部７内を負圧にすることができる。溝部７内を負圧にしておくことで、長尺部材１５をより確実に支持部９ｂに押し付けることが可能である。また、長尺部材１５と支持部９ｂとの隙間に入り込んだ塗膜材１７を溝部７内に効率良く排出することができる。 In addition, the inside of the groove part 7 can be made into a negative pressure by connecting the exhaust part to the groove part 7. By setting the inside of the groove 7 to a negative pressure, the long member 15 can be more reliably pressed against the support portion 9b. In addition, the coating material 17 that has entered the gap between the long member 15 and the support portion 9 b can be efficiently discharged into the groove portion 7.
このようにして、長尺部材１５に塗膜材１７が塗布された後、図示を省略した乾燥・熱処理装置によって、塗膜材１７を乾燥し、所望の厚みの薄膜が形成される。また、薄膜が形成された長尺部材１５が図示を省略した巻き取り装置によって巻き取られる。このようにして、薄膜非形成部を有する長尺部材を形成することができる。 In this way, after the coating material 17 is applied to the long member 15, the coating material 17 is dried by a drying / heat treatment apparatus (not shown) to form a thin film having a desired thickness. Further, the long member 15 on which the thin film is formed is wound up by a winding device (not shown). In this way, a long member having a thin film non-forming portion can be formed.
以上説明したように、本実施の形態によれば、塗膜材１７が長尺部材１５の裏面側に回り込んだとしても、溝部７から塗膜材１７を排出することができるため、長尺部材１５の裏面に薄膜非形成部を形成することができる。この際、薄膜非形成部に対して、揮発性の溶剤などを塗布する必要がない。したがって、製造が容易である。 As described above, according to the present embodiment, even if the coating material 17 wraps around the back side of the long member 15, the coating material 17 can be discharged from the groove portion 7. A thin film non-formation portion can be formed on the back surface of the member 15. At this time, it is not necessary to apply a volatile solvent or the like to the thin film non-formed portion. Therefore, manufacture is easy.
また、長尺部材１５の下面側に回り込んだ塗膜材１７は、溝部７に排出することが可能である。このため、当該部位の塗膜材１７の圧力によって長尺部材１５が浮き上がり、ますます塗膜材１７が長尺部材１５の下面側に入り込むことがない。また、長尺部材１５がガイド部３側に押しつけられるため、長尺部材１５とダイス部５とのクリアランスが変動しにくい。特に、従来のように長尺部材１５の下面全体がガイド部３と接触しないため、支持部９ｂと長尺部材１５との面圧が高くなり、塗膜材１７の隙間への浸入が抑制される。 In addition, the coating material 17 that wraps around the lower surface side of the long member 15 can be discharged into the groove portion 7. For this reason, the long member 15 is lifted by the pressure of the coating material 17 at the part, and the coating material 17 does not further enter the lower surface side of the long member 15. Further, since the long member 15 is pressed against the guide portion 3 side, the clearance between the long member 15 and the die portion 5 is unlikely to fluctuate. In particular, since the entire lower surface of the long member 15 does not come into contact with the guide portion 3 as in the prior art, the surface pressure between the support portion 9b and the long member 15 increases, and the penetration of the coating material 17 into the gap is suppressed. The
さらに、塗膜材１７は、ほとんどが長尺部材１５の上面に塗布される。このため、長尺部材１５の上面への塗膜材１７の塗布量が略一定に保たれる。したがって、長尺部材１５の上面側の塗膜材１７の厚みの精度が高い。 Further, most of the coating material 17 is applied to the upper surface of the long member 15. For this reason, the coating amount of the coating material 17 on the upper surface of the long member 15 is kept substantially constant. Therefore, the accuracy of the thickness of the coating material 17 on the upper surface side of the long member 15 is high.
また、排気部を配置し、溝部７内を排気し、溝部７内部を負圧とすることで、より確実に塗膜材１７を溝部７に排出することができる。 Moreover, the coating material 17 can be more reliably discharged | emitted to the groove part 7 by arrange | positioning an exhaust part, exhausting the inside of the groove part 7, and making the inside of the groove part 7 into a negative pressure.
また、長尺部材１５の両側端部のみではなく、幅方向の略中央部に支持部９ａを形成することで、塗膜材１７の圧力による長尺部材１５の変形を防止することができる。 In addition, the support member 9 a is formed not only on both side ends of the long member 15 but in the substantially central portion in the width direction, so that the deformation of the long member 15 due to the pressure of the coating material 17 can be prevented.
次に、第２の実施の形態について説明する。図３は、塗布装置２０を示す側方断面図であり図４のＨ−Ｈ線断面図である。また、図４は、図３のＧ−Ｇ線断面図である。なお、以下の説明において、塗布装置１と同様の構成については、図１、図２と同様の符号を付し、重複する説明を省略する。塗布装置２０は、塗布装置１と同様の構成を具備するが、ガイド部２１がローラ状に形成される点で異なる。 Next, a second embodiment will be described. 3 is a side sectional view showing the coating apparatus 20, and is a sectional view taken along the line HH in FIG. 4 is a cross-sectional view taken along line GG in FIG. In the following description, the same components as those of the coating apparatus 1 are denoted by the same reference numerals as those in FIGS. 1 and 2, and redundant descriptions are omitted. The coating device 20 has the same configuration as that of the coating device 1, but differs in that the guide portion 21 is formed in a roller shape.
ダイス部５の下面側は、ガイド部２１に対向するように配置される。なお、ダイス部５の下面側の形状を、ガイド部２１の外周形状に沿って円弧状に形成してもよい。 The lower surface side of the die part 5 is disposed so as to face the guide part 21. The shape on the lower surface side of the die portion 5 may be formed in an arc shape along the outer peripheral shape of the guide portion 21.
図３に示すように、長尺部材１５は、ガイド部２１とダイス部５の間に導入される。なお、長尺部材１５は、ガイド部２１の中心に対するダイス部５の設置方向に略垂直な方向からガイド部２１とダイス部５の間に導入される。ガイド部２１は、長尺部材１５の入り口側から出口側に向かう方向に回転する（図中矢印Ｅ方向）。すなわち、長尺部材１５は、ガイド部２１の外周面の移動とともにダイス部５の内部を移動する。 As shown in FIG. 3, the long member 15 is introduced between the guide portion 21 and the die portion 5. The long member 15 is introduced between the guide portion 21 and the die portion 5 from a direction substantially perpendicular to the installation direction of the die portion 5 with respect to the center of the guide portion 21. The guide portion 21 rotates in a direction from the entrance side to the exit side of the long member 15 (in the direction of arrow E in the figure). That is, the long member 15 moves inside the die portion 5 along with the movement of the outer peripheral surface of the guide portion 21.
また、図４に示すように、ガイド部２１の両側部には、支持部９ｂが形成される。また、ガイド部２１の幅方向の略中央には、支持部９ａが形成される。支持部９ｂと支持部９ａとの間が溝部７となる。 As shown in FIG. 4, support portions 9 b are formed on both sides of the guide portion 21. In addition, a support portion 9 a is formed at the approximate center in the width direction of the guide portion 21. The groove portion 7 is between the support portion 9b and the support portion 9a.
長尺部材１５の上面への塗膜材１７の塗布方法は、塗布装置１と同様である。また、荷重検出部１１および駆動部１３の制御方法は、塗布装置１と同様である。すなわち、ダイス部５に導入された長尺部材１５の上面には、所定量の塗膜材１７が塗布されて、ダイス部５から導出される。ダイス部５から導出した長尺部材１５は、必要に応じてガイド部２１とともに、進行方向を変えながら、次工程に送られる。 The coating method of the coating material 17 on the upper surface of the long member 15 is the same as that of the coating apparatus 1. Moreover, the control method of the load detection part 11 and the drive part 13 is the same as that of the coating device 1. That is, a predetermined amount of the coating material 17 is applied to the upper surface of the long member 15 introduced into the die portion 5 and is led out from the die portion 5. The long member 15 led out from the die part 5 is sent to the next process while changing the traveling direction together with the guide part 21 as necessary.
ここで、溝部７内に排出された塗膜材１７は、重力およびガイド部２１の回転とともに、下方に移動する。ガイド部２１の溝部７の内部には、スクレパーなどの塗膜材回収機構２３が配置される。塗膜材回収機構２３は、溝部７の底部や内側面に付着している塗膜材１７を除去し、回収することができる（図中矢印Ｆ方向）。 Here, the coating film material 17 discharged into the groove portion 7 moves downward with gravity and rotation of the guide portion 21. A coating material recovery mechanism 23 such as a scraper is disposed inside the groove portion 7 of the guide portion 21. The coating material recovery mechanism 23 can remove and recover the coating material 17 adhering to the bottom and inner surface of the groove 7 (in the direction of arrow F in the figure).
以上、第２の実施の形態にかかる塗布装置２０によれば、塗布装置１と同様の効果を奏する。また、長尺部材１５はガイド部２１の外周面（支持部９ｂ）に密着した状態で、ガイド部２１とともに移動するため、長尺部材１５とガイド部２１とが摺動することがない。したがって、長尺部材１５とガイド部２１との間に隙間が形成されにくい。 As mentioned above, according to the coating device 20 concerning 2nd Embodiment, there exists an effect similar to the coating device 1. FIG. Further, since the long member 15 moves together with the guide portion 21 in a state of being in close contact with the outer peripheral surface (support portion 9b) of the guide portion 21, the long member 15 and the guide portion 21 do not slide. Therefore, it is difficult to form a gap between the long member 15 and the guide portion 21.
また、長尺部材１５と支持部９ｂとの隙間に塗膜材１７が浸入した場合でも、即座に塗膜材１７を溝部７に排出することができる。したがって、長尺部材１５の下面側に塗膜材１７が塗布されない薄膜非形成部を確実に形成することができる。 Further, even when the coating material 17 enters the gap between the long member 15 and the support portion 9b, the coating material 17 can be immediately discharged to the groove portion 7. Accordingly, the thin film non-formed portion where the coating material 17 is not applied can be reliably formed on the lower surface side of the long member 15.
また、溝部７に排出された塗膜材１７は、塗膜材回収機構２３によって溝部７内から除去して回収することができる。したがって、溝部７内に排出された塗膜材１７が、再度長尺部材１５に付着することを防止することができる。また、回収された塗膜材１７を再利用することもできる。 The coating material 17 discharged to the groove 7 can be removed and recovered from the groove 7 by the coating material recovery mechanism 23. Therefore, the coating material 17 discharged into the groove portion 7 can be prevented from adhering to the long member 15 again. Further, the recovered coating material 17 can be reused.
なお、塗膜材回収機構２３の配置される部位から、ガイド部２１が長尺部材１５と再度接触する部位との間に、さらに、溝部７および支持部９ａ、９ｂ等を洗浄する洗浄部材を配置してもよい。例えば、揮発性の溶剤等によって、溝部７および支持部９ａ、９ｂ等に残存する塗膜材１７を洗浄してもよい。 A cleaning member for cleaning the groove portion 7 and the support portions 9a and 9b is further provided between the portion where the coating material recovery mechanism 23 is disposed and the portion where the guide portion 21 comes into contact with the long member 15 again. You may arrange. For example, you may wash | clean the coating material 17 which remain | survives in the groove part 7, support part 9a, 9b, etc. with a volatile solvent.
以上、添付図を参照しながら、本発明の実施の形態を説明したが、本発明の技術的範囲は、前述した実施の形態に左右されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において各種の変更例または修正例に想到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。 As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.
１、２０………塗布装置
３、２１………ガイド部
５………ダイス部
７………溝部
９ａ、９ｂ………支持部
１１………荷重検出部
１３………駆動部
１５………長尺部材
１７………塗膜材
２３………塗膜材回収機構
１００………塗布装置
１０１………ガイド部
１０３………ダイス部
１０５………長尺部材
１０７………塗膜材
DESCRIPTION OF SYMBOLS 1,20 ......... Applicator 3, 21 ......... Guide part 5 ......... Dice part 7 ......... Groove part 9a, 9b ......... Support part 11 ......... Load detection part 13 ......... Drive part 15 ... ...... Long member 17 ............ Coating material 23 ............ Coating material recovery mechanism 100 ............ Coating device 101 ............ Guide part 103 ............ Die part 105 ............ Long member 107 ............ Coating material
Claims (6)
長尺部材を保持するガイド部と、
前記ガイド部と対向して配置され、塗膜材を前記長尺部材へ塗布するダイス部と、
前記ダイス部に塗膜材を供給する塗膜材供給部と、を具備し、
前記ガイド部には、前記長尺部材の一部と接触し、前記長尺部材を支持する支持部が形成され、
前記支持部の端部には、前記長尺部材と接触しない溝部が形成され、
前記長尺部材の前記ダイス部側の面に前記塗膜材を塗布可能であるとともに、前記ガイド部側の面であって、前記溝部に対応する部位に対する塗膜材の塗布を防止することが可能であることを特徴とする塗膜材塗布装置。 An apparatus for applying a coating material to a long member,
A guide portion for holding a long member;
A die part that is arranged opposite to the guide part and applies a coating material to the long member;
A coating material supply part for supplying a coating material to the die part,
The guide portion is formed with a support portion that contacts a part of the long member and supports the long member,
A groove portion that does not come into contact with the long member is formed at an end portion of the support portion,
The coating material can be applied to the surface of the long member on the die portion side, and the coating material can be prevented from being applied to the portion corresponding to the groove portion on the guide portion side surface. A coating material coating apparatus characterized by being capable of being applied.
前記ダイス部へ塗膜材を供給しながら、前記ガイド部と前記ダイス部との間に長尺部材を移動させて、前記長尺部材の前記ダイス部側の面に前記塗膜材を連続的に塗布するとともに、前記長尺部材の前記ガイド部側の面であって、前記溝部に対応する部位に対する塗膜材の塗布を防止することを特徴とする長尺部材への塗膜材の塗布方法。 A method for applying a coating material to a long member using the coating material application apparatus according to any one of claims 1 to 5,
While supplying the coating material to the die part, the long member is moved between the guide part and the die part, and the coating material is continuously applied to the surface of the long member on the die part side. The coating material is applied to the long member, which is a surface on the guide portion side of the long member and which prevents the coating material from being applied to a portion corresponding to the groove portion. Method.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017086229A1 (en) * | 2015-11-19 | 2017-05-26 | 住友電気工業株式会社 | Coating device and coated sheet production method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5676269A (en) * | 1979-11-27 | 1981-06-23 | Konishiroku Photo Ind Co Ltd | Coating device |
| JPS61155076U (en) * | 1985-03-14 | 1986-09-26 | ||
| JPH05305258A (en) * | 1991-12-24 | 1993-11-19 | Gengen Kagaku Kogyo Kk | Vacuum coating apparatus |
| JPH08108121A (en) * | 1994-10-11 | 1996-04-30 | Ig Tech Res Inc | Coating apparatus |
| JP2001079476A (en) * | 1999-09-17 | 2001-03-27 | Nec Mobile Energy Kk | Coating device |
| JP2010274241A (en) * | 2009-06-01 | 2010-12-09 | Furukawa Electric Co Ltd:The | Thin film forming method and thin film forming system |
-
2012
- 2012-05-09 JP JP2012107662A patent/JP2013233511A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5676269A (en) * | 1979-11-27 | 1981-06-23 | Konishiroku Photo Ind Co Ltd | Coating device |
| JPS61155076U (en) * | 1985-03-14 | 1986-09-26 | ||
| JPH05305258A (en) * | 1991-12-24 | 1993-11-19 | Gengen Kagaku Kogyo Kk | Vacuum coating apparatus |
| JPH08108121A (en) * | 1994-10-11 | 1996-04-30 | Ig Tech Res Inc | Coating apparatus |
| JP2001079476A (en) * | 1999-09-17 | 2001-03-27 | Nec Mobile Energy Kk | Coating device |
| JP2010274241A (en) * | 2009-06-01 | 2010-12-09 | Furukawa Electric Co Ltd:The | Thin film forming method and thin film forming system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017086229A1 (en) * | 2015-11-19 | 2017-05-26 | 住友電気工業株式会社 | Coating device and coated sheet production method |
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