JP2013228128A - Cryogenic refrigeration device - Google Patents

Cryogenic refrigeration device Download PDF

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JP2013228128A
JP2013228128A JP2012099674A JP2012099674A JP2013228128A JP 2013228128 A JP2013228128 A JP 2013228128A JP 2012099674 A JP2012099674 A JP 2012099674A JP 2012099674 A JP2012099674 A JP 2012099674A JP 2013228128 A JP2013228128 A JP 2013228128A
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valve
low
pressure
stem
rotating body
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JP5939433B2 (en
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Yoshisuke Shu
淑亮 周
Yoshimasa Ohashi
義正 大橋
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Aisin Corp
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Aisin Seiki Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a cryogenic refrigeration device advantageous for suppressing wearing of a contact surface which presses the leading end of a stem.SOLUTION: A leading end 41 of a stem 40 of a valve body 4 slid into contact with the contact surface 50 of a valve driving member includes a rotor 44. The rotor 44 is rotated to reduce friction resistance between the leading end 41 and the contact surface 50, thereby suppressing wearing of the contact surface 50.

Description

本発明は高圧バルブおよび低圧バルブを持つ低温冷凍装置に関する。   The present invention relates to a low temperature refrigeration apparatus having a high pressure valve and a low pressure valve.

特許文献１は、極低温冷凍機に使用される高圧バルブ装置が開示されている。この高圧バルブ装置では、カムの回転運動を弁体の直線運動に変換し、カムにより決まる規定のタイミングで弁体を直線運動させることで弁口を開閉する技術を開示している。特許文献１に開示されている高圧バルブ装置においては、旋回可能に設けられたレバーの旋回に伴い、レバーの表面によって弁体の先端部を離接可能に押圧し、弁体を開弁方向に移動させている。レバーは弁体を開弁方向に駆動するための弁駆動部材として機能している。   Patent Document 1 discloses a high-pressure valve device used in a cryogenic refrigerator. In this high-pressure valve device, a technique is disclosed in which the rotational movement of a cam is converted into a linear movement of a valve body, and the valve opening is opened and closed by linearly moving the valve body at a predetermined timing determined by the cam. In the high-pressure valve device disclosed in Patent Document 1, the tip of the valve body is detachably pressed by the surface of the lever in accordance with the turning of the lever provided to be able to turn, and the valve body is moved in the valve opening direction. It is moved. The lever functions as a valve drive member for driving the valve body in the valve opening direction.

特公平０４−０８０３１１号公報Japanese Patent Publication No. 04-080311

ところで、特許文献１に開示されている高圧バルブ装置においては、弁体の先端部がレバーの表面（弁駆動部材の接触面と呼ぶ）に接触することで、弁体が開弁方向に直線移動する。この接触面はカムの回動に従動するため、接触面のなかで弁体の先端部に接触する点もまた移動する。したがって、弁体の先端部と接触面との間には摩擦力が生じる。このため、弁体の先端部や接触面には摩耗が生じる可能性がある。弁体の先端部や接触面が大きく摩耗すると、弁の開閉タイミングに影響が生じるおそれがある。弁が望み通りのタイミングで開閉しなければ、冷凍機の性能も劣化するおそれがある。   By the way, in the high pressure valve device disclosed in Patent Document 1, the valve body linearly moves in the valve opening direction when the tip of the valve body contacts the surface of the lever (referred to as the contact surface of the valve drive member). To do. Since this contact surface follows the rotation of the cam, the point of contact with the tip of the valve element also moves within the contact surface. Therefore, a frictional force is generated between the tip of the valve body and the contact surface. For this reason, there is a possibility that wear will occur on the tip and contact surface of the valve body. If the tip of the valve body or the contact surface is worn significantly, the opening / closing timing of the valve may be affected. If the valve does not open and close at the desired timing, the performance of the refrigerator may also deteriorate.

本発明は上記した実情に鑑みてなされたものであり、弁体の先端部、および、弁駆動部材における接触面の摩耗を抑制するのに有利な低温冷凍装置を提供することを課題とする。   This invention is made | formed in view of the above-mentioned situation, and makes it a subject to provide the low-temperature freezing apparatus advantageous in suppressing abrasion of the front-end | tip part of a valve body, and the contact surface in a valve drive member.

本発明は上記課題を解決すべくなされた発明である。本発明の低温冷凍装置は、高圧ガスを吐出させる高圧側の吐出ポートと低圧ガスを吸い込む低圧側の吸込ポートとを持つ圧縮機と、冷媒ガスを膨張させて寒冷を発生させる冷凍機と、前記圧縮機の高圧側の前記吐出ポートと前記冷凍機とを連絡させ且つ前記圧縮機の吐出ポートから吐出された高圧の冷媒ガスを開弁により前記冷凍機に供給させる高圧バルブと、前記圧縮機の低圧側の前記吸込ポートと前記冷凍機とを連絡させ且つ前記冷凍機の冷媒ガスを開弁により前記圧縮機の前記吸込ポートに帰還させる低圧バルブとを具備する低温冷凍装置であって、
前記高圧バルブおよび前記低圧バルブのうちの少なくとも一方は、
前記弁口を形成する弁座と軸孔を形成する軸受とを持つ基部と、
直線方向に沿って往復直動可能に前記軸受の前記軸孔に保持されているステムと、前記ステムに連設され前記弁口を開閉させる弁部と、を持つ弁体と、
前記弁部が前記弁座に着座する方向に前記弁体を付勢する付勢バネと、
回動軸を中心として回動するカムと、前記カムの回動に従動し前記カムによって決まる規定のタイミングで前記ステムの先端部に摺接しつつ前記先端部を開弁方向に押圧することで前記弁体を開弁方向に移動させる接触面と、を持つ弁駆動部材と、を具備し、
前記ステムの前記先端部は、前記接触面に接触する回転体と、前記回転体を回転可能に保持する保持部と、で構成されているものである。 The present invention has been made to solve the above problems. A low-temperature refrigeration apparatus of the present invention includes a compressor having a high-pressure side discharge port for discharging high-pressure gas and a low-pressure side suction port for sucking low-pressure gas, a refrigerator that expands refrigerant gas to generate cold, and A high-pressure valve that connects the discharge port on the high-pressure side of the compressor and the refrigerator, and supplies the high-pressure refrigerant gas discharged from the discharge port of the compressor to the refrigerator by opening the valve; and A low-temperature refrigeration apparatus comprising a low-pressure valve that connects the suction port on the low-pressure side and the refrigerator, and returns the refrigerant gas of the refrigerator to the suction port of the compressor by opening the valve,
At least one of the high pressure valve and the low pressure valve is
A base having a valve seat that forms the valve port and a bearing that forms a shaft hole;
A valve body having a stem that is held in the shaft hole of the bearing so as to be capable of reciprocating linearly along a linear direction, and a valve portion that is connected to the stem and opens and closes the valve port;
A biasing spring that biases the valve body in a direction in which the valve portion is seated on the valve seat;
A cam that rotates about a rotation axis, and the distal end portion is pressed in the valve opening direction while being in sliding contact with the distal end portion of the stem at a predetermined timing determined by the cam following the rotation of the cam. A valve drive member having a contact surface for moving the valve body in the valve opening direction;
The distal end portion of the stem includes a rotating body that contacts the contact surface and a holding portion that rotatably holds the rotating body.

本発明の低温冷凍装置においては、ステムの先端部のなかで接触面に接触（摺接）する部分を回転体で構成し、先端部の他の一部（保持部）によってこの回転体を回転可能に保持している。接触面とステムの先端部とが摺接すると、ステムの先端部の一部である回転体が回転する。このため接触面に作用する摩擦力が緩和され、接触面が摩耗し難くなる。また、ステムの先端部（つまり回転体）自体に作用する摩擦力もまた緩和され、ステムの先端部もまた摩耗し難くなる。したがって、本発明の低温冷凍装置によると、接触面の摩耗を抑制可能である。   In the low-temperature refrigeration apparatus of the present invention, a portion that contacts (slidably contacts) the contact surface in the tip portion of the stem is constituted by a rotating body, and the rotating body is rotated by the other part (holding portion) of the tip portion. Hold it possible. When the contact surface and the distal end portion of the stem are in sliding contact, the rotating body that is a part of the distal end portion of the stem rotates. For this reason, the frictional force which acts on a contact surface is relieved, and a contact surface becomes difficult to wear. In addition, the frictional force acting on the distal end portion of the stem (that is, the rotating body) itself is also alleviated, and the distal end portion of the stem is not easily worn. Therefore, according to the low-temperature refrigeration apparatus of the present invention, wear on the contact surface can be suppressed.

本発明の低温冷凍装置は、以下の（１）〜（３）の何れかを備えるのが好ましく、複数を備えるのがより好ましい。
（１）前記回転体は球体である。
（２）前記基部は前記回転体の一部を収容する収容部を持ち、前記収容部には、前記回転体とともに潤滑剤が収容されている。
（３）前記収容部は前記基部の内部に開口する。 The low-temperature refrigeration apparatus of the present invention preferably includes any one of the following (1) to (3), and more preferably includes a plurality.
(1) The rotating body is a sphere.
(2) The base has a housing portion that houses a part of the rotating body, and the housing portion contains a lubricant together with the rotating body.
(3) The housing portion opens inside the base portion.

本発明の低温冷凍装置においては、ステムの先端部を回転体で構成することで、接触面の摩耗を抑制することが可能である。   In the low-temperature refrigeration apparatus of the present invention, it is possible to suppress wear on the contact surface by configuring the tip of the stem with a rotating body.

実施形態１に係り、極低温冷凍装置を模式的に示す図である。It is a figure which concerns on Embodiment 1 and shows a cryogenic refrigeration apparatus typically. 実施形態１に係り、極低温冷凍装置に使用される高圧バルブ付近を模式的に示す断面図である。It is sectional drawing which concerns on Embodiment 1 and shows typically the high pressure valve vicinity used for a cryogenic refrigeration apparatus. 実施形態１に係り、高圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 4 is an enlarged view of a main part schematically showing the vicinity of the tip of the stem when the stem of the high-pressure valve moves in the valve opening direction according to the first embodiment. 実施形態１に係り、低圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 4 is an enlarged view of a main part schematically showing the vicinity of the tip of the stem when the stem of the low-pressure valve moves in the valve opening direction according to the first embodiment. 実施形態１に係り、弁体におけるステムの先端部を製造している様子を模式的に表す説明図である。It is explanatory drawing which represents typically a mode that it concerns on Embodiment 1 and the front-end | tip part of the stem in a valve body is manufactured. 実施形態２に係り、極低温冷凍装置を模式的に示す説明図である。It is explanatory drawing which concerns on Embodiment 2 and shows a cryogenic refrigeration apparatus typically. 実施形態２に係り、極低温冷凍装置に使用される高圧バルブ付近を模式的に示す説明図である。It is explanatory drawing which shows typically the high pressure valve vicinity which concerns on Embodiment 2 and is used for a cryogenic refrigeration apparatus. 実施形態２に係り、高圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 10 is an enlarged view of a main part schematically showing the vicinity of the tip of the stem when the stem of the high-pressure valve moves in the valve opening direction according to the second embodiment. 実施形態２に係り、低圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 10 is an enlarged view of a main part schematically showing the vicinity of the tip of the stem when the stem of the low-pressure valve moves in the valve opening direction according to the second embodiment. 実施形態３に係り、極低温冷凍装置に使用される高圧バルブ付近を模式的に示す説明図である。It is explanatory drawing which concerns on Embodiment 3 and shows typically the high pressure valve vicinity used for a cryogenic refrigeration apparatus. 実施形態３に係り、極低温冷凍装置に使用される低圧バルブ付近を模式的に示す説明図である。It is explanatory drawing which concerns on Embodiment 3 and shows typically the low pressure valve vicinity used for a cryogenic refrigeration apparatus. 実施形態４に係り、高圧バルブのステムが開弁方向に移動し、かつ、低圧バルブのステムが閉弁位置に配置されているときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 10 is an enlarged view of a main part schematically showing the vicinity of the tip end portion of the stem when the stem of the high pressure valve moves in the valve opening direction and the stem of the low pressure valve is arranged at the valve closing position according to the fourth embodiment. is there. 実施形態５に係り、高圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 10 is an enlarged view of a main part schematically showing the vicinity of the distal end portion of the stem when the stem of the high pressure valve moves in the valve opening direction according to the fifth embodiment. 実施形態５に係り、低圧バルブのステムが開弁方向に移動するときのステムの先端部付近を模式的に示す要部拡大図である。FIG. 10 is an enlarged view of a main part schematically showing the vicinity of the tip of the stem when the stem of the low-pressure valve moves in the valve opening direction according to the fifth embodiment.

本発明の低温冷凍装置は、ＧＭ（ギフォードマクマホン）サイクル冷凍機、パルス管冷凍機、ソルベイサイクル冷凍機等の公知の冷凍機に適用できる。本発明の低温冷凍装置における接触面（つまり、弁駆動部材のなかでステムの先端部と摺接する面）は、カムの外周面そのものであっても良いし、或いは、カムとステムとの間に介在する何らかの部材の表面であっても良い。カムとステムとの間に介在する部材は、カムの回動に従動し、カムによって決まる規定のタイミングでステムの先端部に摺接する必要がある。そして、この部材は、当該規定のタイミングでステムの先端部を開弁方向に押圧し、このときの押圧力で弁体を開弁方向に移動させる必要がある。このような部材のなかでステムの先端部に摺接する面が本発明の低温冷凍装置における接触面に相当する。このようにカムとステムとの間に介在する部材としては、カムおよびステムに対して任意の軸を中心として旋回あるいは揺動する部材、例えばレバーが挙げられる。   The low-temperature refrigeration apparatus of the present invention can be applied to known refrigerators such as a GM (Gifford McMahon) cycle refrigerator, a pulse tube refrigerator, and a Solvay cycle refrigerator. The contact surface in the low-temperature refrigeration apparatus of the present invention (that is, the surface in sliding contact with the tip of the stem in the valve drive member) may be the outer peripheral surface of the cam itself, or between the cam and the stem. It may be the surface of some intervening member. A member interposed between the cam and the stem is required to be in sliding contact with the tip of the stem at a predetermined timing determined by the cam, following the rotation of the cam. And this member needs to press the front-end | tip part of a stem in the valve opening direction at the said specific timing, and needs to move a valve body in the valve opening direction with the pressing force at this time. Of these members, the surface that is in sliding contact with the tip of the stem corresponds to the contact surface in the low-temperature refrigeration apparatus of the present invention. As a member interposed between the cam and the stem in this manner, a member that pivots or swings around an arbitrary axis with respect to the cam and the stem, for example, a lever can be cited.

（実施形態１）
図１は実施形態１の概念を示す。低温冷凍装置の代表例である極低温冷凍装置は、圧縮機１、冷凍機２、高圧バルブ３および低圧バルブ７を持つ。圧縮機１は、高圧の冷媒ガスを吐出する高圧側の吐出ポート１１と、低圧の冷媒ガスを吸い込む低圧側の吸込ポート１２と、を持つ。冷凍機２は、高圧の冷媒ガスが膨張し寒冷（冷熱エネルギー）が発生する膨張室となる中空室２０を持つ。高圧バルブ３は、圧縮機１の高圧側の吐出ポート１１と冷凍機２の中空室２０とを連絡し、開弁することにより高圧の冷媒ガスを中空室２０に送込むためのバルブである。低圧バルブ７は、開弁することにより冷媒ガスを圧縮機１の吸込ポート１２に帰還させるためのバルブである。 (Embodiment 1)
FIG. 1 shows the concept of the first embodiment. A cryogenic refrigeration apparatus, which is a typical example of a low temperature refrigeration apparatus, includes a compressor 1, a refrigerator 2, a high pressure valve 3, and a low pressure valve 7. The compressor 1 has a high-pressure side discharge port 11 that discharges high-pressure refrigerant gas and a low-pressure side suction port 12 that sucks low-pressure refrigerant gas. The refrigerator 2 has a hollow chamber 20 serving as an expansion chamber in which high-pressure refrigerant gas expands to generate cold (cold energy). The high-pressure valve 3 is a valve for sending high-pressure refrigerant gas into the hollow chamber 20 by connecting the discharge port 11 on the high-pressure side of the compressor 1 and the hollow chamber 20 of the refrigerator 2 and opening the valve. The low pressure valve 7 is a valve for returning the refrigerant gas to the suction port 12 of the compressor 1 by opening the valve.

冷凍機２はＧＭ（ギフォードマクマホン）サイクル冷凍機であり、シリンダ２１、ディスプレーサ２２、シールリング２３および蓄冷器２４を持つ。シリンダ２１には、高温部２０ａおよび低温部２０ｃを持つ中空室２０が形成されている。ディスプレーサ２２は、シリンダ２１の内部を往復動（図１中矢印Ｘ１，Ｘ２方向）可能である。シールリング２３は、ディスプレーサ２２の外周部に設けられ、シリンダ２１の内周面とディスプレーサ２２の外周面との間をシールする。蓄冷器２４は、ディスプレーサ２２の内部に設けられ、後述する冷媒ガスが流通する。なお、ディスプレーサ２２は、高圧バルブ３および低圧バルブ７のバルブ開閉タイミングと位相差をもって、矢印Ｘ１，Ｘ２方向に往復移動する。つまり、高圧バルブ３および低圧バルブ７のバルブ開閉タイミングと、ディスプレーサ２２の往復動タイミングとは、ずれている。   The refrigerator 2 is a GM (Gifford McMahon) cycle refrigerator, and includes a cylinder 21, a displacer 22, a seal ring 23, and a regenerator 24. A hollow chamber 20 having a high temperature part 20a and a low temperature part 20c is formed in the cylinder 21. The displacer 22 can reciprocate inside the cylinder 21 (in the directions of arrows X1 and X2 in FIG. 1). The seal ring 23 is provided on the outer peripheral portion of the displacer 22 and seals between the inner peripheral surface of the cylinder 21 and the outer peripheral surface of the displacer 22. The regenerator 24 is provided inside the displacer 22, and refrigerant gas to be described later circulates. The displacer 22 reciprocates in the directions of the arrows X1 and X2 with the phase difference between the opening and closing timings of the high pressure valve 3 and the low pressure valve 7. That is, the valve opening / closing timings of the high pressure valve 3 and the low pressure valve 7 and the reciprocation timing of the displacer 22 are deviated.

まず、ディスプレーサ２２が矢印Ｘ１方向に移動して低温部２０ｃ側に移動している状態において、低圧バルブ７が閉弁し高圧バルブ３が開弁する。これにより圧縮機１の吐出ポート１１から供給された高圧の冷媒ガスは、高圧バルブ３、高圧通路８１を介して冷凍機２の中空室２０の高温部２０ａおよび低温部２０ｃに供給され、高温部２０ａおよび低温部２０ｃは高圧となる。この状態で、他の駆動源に駆動されて、ディスプレーサ２２が中空室２０の低温部２０ｃ側の容積を増加させる方向、つまり、矢印Ｘ２方向に移動する。すると、高温部２０ａの冷媒ガスは蓄冷器２４で冷却されながら低温部２０ｃに流れる。更にディスプレーサ２２の矢印Ｘ２方向の移動により、低温部２０ｃが最大容積となる。次に、高圧バルブ３が閉弁し、低圧バルブ７が開弁する。すると、冷媒ガスが膨張し、温度が下がり、蓄冷器２４を冷却し蓄冷させつつ、蓄冷器２４を通過し低圧通路８２に供給される。この状態で、ディスプレーサ２２が中空室２０の低温部２０ｃの容積を減少させる方向に、つまり、矢印Ｘ１方向に移動すると、低温部２０ｃに存在する低温の冷媒ガスは蓄冷器２４を冷却して蓄冷器２４を蓄冷させつつ、低圧通路８２に供給される。低圧バルブ７が開弁しているため、冷媒ガスは低圧バルブ７を介して低圧室３８に供給され、ひいては吸込ポート１２から圧縮機１に吸い込まれ、再び高圧ガスとなる。このような動作が繰り返されることで、冷凍機２の中空室２０に存在する低温部２０ｃにおいて温度が低下して冷凍出力（寒冷）が得られる。   First, in a state where the displacer 22 moves in the direction of the arrow X1 and moves toward the low temperature part 20c, the low pressure valve 7 is closed and the high pressure valve 3 is opened. As a result, the high-pressure refrigerant gas supplied from the discharge port 11 of the compressor 1 is supplied to the high-temperature part 20a and the low-temperature part 20c of the hollow chamber 20 of the refrigerator 2 through the high-pressure valve 3 and the high-pressure passage 81. 20a and the low temperature part 20c become a high voltage | pressure. In this state, driven by another drive source, the displacer 22 moves in the direction of increasing the volume of the hollow chamber 20 on the low temperature part 20c side, that is, in the direction of the arrow X2. Then, the refrigerant gas in the high temperature portion 20a flows to the low temperature portion 20c while being cooled by the regenerator 24. Furthermore, the displacement of the displacer 22 in the direction of the arrow X2 makes the low temperature portion 20c the maximum volume. Next, the high pressure valve 3 is closed and the low pressure valve 7 is opened. Then, the refrigerant gas expands, the temperature decreases, and the regenerator 24 is cooled and stored, while passing through the regenerator 24 and supplied to the low pressure passage 82. In this state, when the displacer 22 moves in the direction of decreasing the volume of the low temperature portion 20c of the hollow chamber 20, that is, in the direction of the arrow X1, the low temperature refrigerant gas existing in the low temperature portion 20c cools the regenerator 24 to store the cold. The container 24 is supplied to the low-pressure passage 82 while storing the cold. Since the low-pressure valve 7 is opened, the refrigerant gas is supplied to the low-pressure chamber 38 via the low-pressure valve 7, and is then sucked into the compressor 1 from the suction port 12 and becomes high-pressure gas again. By repeating such an operation, the temperature is lowered in the low temperature portion 20c existing in the hollow chamber 20 of the refrigerator 2, and a refrigeration output (cold) is obtained.

次いで本実施形態の低温冷凍装置における高圧バルブ３について、図１、２を参照しつつさらに詳しく説明する。   Next, the high-pressure valve 3 in the low-temperature refrigeration apparatus of this embodiment will be described in more detail with reference to FIGS.

高圧バルブ３は、基部３０と、弁体４と、閉弁用の付勢バネ４７と、旋回部材５と、カム６とを有する。このうち旋回部材５およびカム６は、本発明の低温冷凍装置における弁駆動部材に相当する。したがって旋回部材５の表面（より具体的には後述する加圧領域５０、５０Ｃ）は本発明の低温冷凍装置における接触面に相当する。   The high pressure valve 3 includes a base 30, a valve body 4, a valve closing biasing spring 47, a turning member 5, and a cam 6. Among these, the turning member 5 and the cam 6 correspond to a valve driving member in the low-temperature refrigeration apparatus of the present invention. Therefore, the surface of the turning member 5 (more specifically, pressurization regions 50 and 50C described later) corresponds to the contact surface in the low-temperature refrigeration apparatus of the present invention.

基部３０は、高圧ガス室３１と、弁座３３と、軸受３５と、中間圧室３６とを持つ。高圧ガス室３１は基部３０の内部に区画形成されている。高圧ガス室３１は圧縮機１の吐出ポート１１（高圧側）に連絡しているため、高圧ガス室３１には吐出ポート１１から高圧の冷媒ガスが供給される。中間圧室３６もまた基部３０の内部に区画形成されている。中間圧室３６は高圧通路８１を介して冷凍機２の中空室２０に連絡している。高圧ガス室３１と中間圧室３６とは弁座３３によって隔てられている。弁座３３には開口状の弁口３２が形成されており、高圧ガス室３１と中間圧室３６とは弁口３２を介して連絡している。軸受３５は中間圧室３６を挟んで弁座３３の反対側に配置されている。軸受３５には開口状の軸孔３４が形成されている。   The base 30 has a high-pressure gas chamber 31, a valve seat 33, a bearing 35, and an intermediate pressure chamber 36. The high-pressure gas chamber 31 is defined in the base 30. Since the high pressure gas chamber 31 communicates with the discharge port 11 (high pressure side) of the compressor 1, high pressure refrigerant gas is supplied to the high pressure gas chamber 31 from the discharge port 11. An intermediate pressure chamber 36 is also defined in the base 30. The intermediate pressure chamber 36 communicates with the hollow chamber 20 of the refrigerator 2 through a high pressure passage 81. The high pressure gas chamber 31 and the intermediate pressure chamber 36 are separated by a valve seat 33. An opening-like valve port 32 is formed in the valve seat 33, and the high-pressure gas chamber 31 and the intermediate pressure chamber 36 communicate with each other via the valve port 32. The bearing 35 is disposed on the opposite side of the valve seat 33 with the intermediate pressure chamber 36 interposed therebetween. An opening-shaped shaft hole 34 is formed in the bearing 35.

弁体４は、棒状をなすステム４０と、ステム４０の基端部４３に連接されている弁部４２とを持つ。ステム４０の中心軸線Ｐは一直線状をなす。弁部４２の外径はステム４０の外径よりも大径であり、かつ、弁口３２の孔径よりも大径である。弁部４２は高圧ガス室３１内に配置されている。ステム４０の基端部４３側（弁部４２側）の部分は弁座３３の弁口３２に挿通され、かつ、ステム４０の先端部４１側（弁部４２とは逆側の端部）の部分は軸受３５の軸孔３４に挿通されている。したがって弁体４は、基部３０によって、直線方向（矢印Ａ１，Ａ２方向）に沿って往復直動可能に支持されている。さらに、弁部４７は、弁口３２に対面する円錐面４２ｋを持つ。付勢バネ４７は、弾性により、弁部４２が弁座３３に着座して弁口３２を閉鎖するように、弁体４を閉弁方向（矢印Ａ２方向）に付勢している。したがって、付勢バネ４７の一端部は基部３０の着座面３０ａに着座し、付勢バネ４７の他端部は弁部４２の着座面４２ａに着座している。   The valve body 4 has a stem 40 having a rod shape and a valve portion 42 connected to a proximal end portion 43 of the stem 40. The central axis P of the stem 40 forms a straight line. The outer diameter of the valve portion 42 is larger than the outer diameter of the stem 40 and larger than the hole diameter of the valve port 32. The valve portion 42 is disposed in the high pressure gas chamber 31. A portion of the stem 40 on the base end portion 43 side (valve portion 42 side) is inserted through the valve port 32 of the valve seat 33, and the stem 40 has a tip portion 41 side (an end portion opposite to the valve portion 42). The portion is inserted into the shaft hole 34 of the bearing 35. Therefore, the valve body 4 is supported by the base 30 so as to be capable of reciprocating linearly along the linear direction (arrow A1, A2 direction). Further, the valve portion 47 has a conical surface 42 k that faces the valve port 32. The urging spring 47 urges the valve body 4 in the valve closing direction (arrow A2 direction) so that the valve portion 42 is seated on the valve seat 33 and closes the valve port 32 due to elasticity. Accordingly, one end portion of the biasing spring 47 is seated on the seating surface 30 a of the base portion 30, and the other end portion of the biasing spring 47 is seated on the seating surface 42 a of the valve portion 42.

なお、基部３０の一部（具体的には軸受３５の一部）、弁体４の一部（具体的にはステム４０の先端部４１側の部分）、旋回部材５およびカム６は低圧室３８に配置されている。基部３０の一部である軸受３５は低圧室３８と外部との境界に位置する。   A part of the base 30 (specifically, a part of the bearing 35), a part of the valve body 4 (specifically, a part on the distal end 41 side of the stem 40), the turning member 5 and the cam 6 are in a low pressure chamber. 38. The bearing 35 which is a part of the base 30 is located at the boundary between the low pressure chamber 38 and the outside.

図３は、高圧バルブ３のステム４０が閉弁位置から開弁方向に直線移動するときにおけるステム４０の先端部４１付近を模式的に示す図である。具体的には、図３は、ステム４０の先端部４１付近を、旋回部材５の旋回方向（矢印Ｂ１，Ｂ２方向）に沿いかつステム４０の中心軸線Ｐに沿って切断した様子を模式的に表す断面図である。   FIG. 3 is a diagram schematically showing the vicinity of the distal end portion 41 of the stem 40 when the stem 40 of the high-pressure valve 3 linearly moves in the valve opening direction from the valve closing position. Specifically, FIG. 3 schematically shows a state in which the vicinity of the distal end portion 41 of the stem 40 is cut along the turning direction (arrow B1, B2 direction) of the turning member 5 and along the central axis P of the stem 40. It is sectional drawing to represent.

図３に示すように、ステム４０の先端部４１は回転体４４と保持部４５とによって構成されている。具体的には、ステム４０の先端部４１には、空洞状の収容部４６が穿設されている。この収容部４６には略球状をなす回転体４４が収容保持されている。ステム４０における先端部４１以外の部分に連続し、かつ、収容部４６を区画する部分が保持部４５である。収容部４６はステム４０の先端側に開口している。収容部４６の開口径は、収容部４６の最大孔径よりも小さく、回転体４４の直径よりも小さい。したがって、回転体４４は保持部４５のなかで収容部４６の開口周縁部４６ａを構成する部分に対して回転可能に係合し、保持部４５から脱落し難い。   As shown in FIG. 3, the distal end portion 41 of the stem 40 is constituted by a rotating body 44 and a holding portion 45. Specifically, a hollow accommodating portion 46 is formed in the distal end portion 41 of the stem 40. The accommodating portion 46 accommodates and holds a rotating body 44 having a substantially spherical shape. A portion that is continuous with the portion other than the tip portion 41 in the stem 40 and that partitions the accommodating portion 46 is a holding portion 45. The accommodating portion 46 is open on the distal end side of the stem 40. The opening diameter of the housing portion 46 is smaller than the maximum hole diameter of the housing portion 46 and smaller than the diameter of the rotating body 44. Therefore, the rotating body 44 is rotatably engaged with a portion of the holding portion 45 that constitutes the opening peripheral edge portion 46 a of the housing portion 46, and is difficult to fall off the holding portion 45.

先端部４１を製造する方法の一例としては、図５に示す方法が挙げられる。図５に示すように、先ず柱状のステム４０の先端４１ａにドリル等の切削工具９９によって孔状の収容予定部４６ｘを穿設し、収容予定部４６ｘに回転体４４を挿入する。そして、回転体４４の一部が収容予定部４６ｘの開口４６ｙを経て外部に露出した状態で収容予定部４６ｘの先端４１ａ側をカシメることで、回転体４４の一部を収容する収容部４６を形成できる。そして収容部４６を持つ保持部４５によって、回転体４４を回転可能に保持できる。なお回転体４４の一部は、収容部４６の外部に露出したままである。収容部４６の外部に露出している回転体４４の一部は、後述する接触面（加圧領域５０）に接触（摺接）し、回転体４４が回転するのに伴って収容部４６の内部に入る。つまり回転体４４は、加圧領域５０との摩擦力によって回転する。   An example of a method for manufacturing the tip portion 41 is the method shown in FIG. As shown in FIG. 5, first, a hole-like accommodation planned portion 46x is drilled at the tip 41a of the columnar stem 40 by a cutting tool 99 such as a drill, and the rotating body 44 is inserted into the accommodation planned portion 46x. And the accommodating part 46 which accommodates a part of rotating body 44 by crimping the front-end | tip 41a side of the accommodating part 46x in the state exposed to the exterior through the opening 46y of the accommodating part 46x of the accommodating part 46x. Can be formed. The rotating body 44 can be rotatably held by the holding portion 45 having the accommodating portion 46. A part of the rotating body 44 remains exposed to the outside of the accommodating portion 46. A part of the rotating body 44 exposed to the outside of the accommodating portion 46 comes into contact (sliding contact) with a contact surface (pressurizing region 50) described later, and the rotating portion 44 rotates as the rotating body 44 rotates. Enter inside. That is, the rotating body 44 rotates due to the frictional force with the pressure region 50.

回転体４４と保持部４５とは同材料であっても良いし異材料であっても良い。また、回転体４４および保持部４５の硬度は特に限定しない。例えば、本実施形態においては、ステム４０、４０Ｃにおける回転体４４以外の部分（ステム４０の本体と呼ぶ）、および、旋回部材５、５Ｃは何れも機械構造用炭素鋼の一種であるＳ４５Ｃ（炭素鋼全体の質量１００質量％に対して０．４５質量％の炭素を含む）を焼入れ・焼き戻し処理、高周波焼入れ焼き戻し等の熱処理をしたものを用いている。回転体４４の材料は、このようなステム４０の本体や旋回部材５等と同じ材料を用いても良いし、これらと異なる材料を用いても良い。なお、接触面の摩耗を抑制するためには、回転体４４の材料として、ステム４０の本体や旋回部材５（つまり、保持部４５や接触面５０）よりも硬度の高い材料を選択することが好ましい。具体的には、ＨＲｃ（ロックウェル硬さ）５０〜６０程度の高硬度材や、炭化ケイ素等のセラミックス等が好ましく用いられる。   The rotating body 44 and the holding part 45 may be made of the same material or different materials. Further, the hardness of the rotating body 44 and the holding portion 45 is not particularly limited. For example, in this embodiment, the portions other than the rotating body 44 in the stems 40 and 40C (referred to as the main body of the stem 40) and the swiveling members 5 and 5C are all S45C (carbon) that is a kind of carbon steel for mechanical structures. Steel containing 0.45% by mass of carbon with respect to 100% by mass of the whole steel) is subjected to heat treatment such as quenching / tempering treatment, induction quenching / tempering and the like. As the material of the rotating body 44, the same material as the main body of the stem 40, the turning member 5 or the like may be used, or a material different from these may be used. In order to suppress wear of the contact surface, a material having a hardness higher than that of the main body of the stem 40 and the turning member 5 (that is, the holding portion 45 and the contact surface 50) may be selected as the material of the rotating body 44. preferable. Specifically, a high hardness material having an HRc (Rockwell hardness) of about 50 to 60, ceramics such as silicon carbide, and the like are preferably used.

図１、２に示すように、高圧バルブ３の高圧ガス室３１には、圧縮機１の吐出ポート１１を通じて高圧の冷媒ガスが供給されている。高圧バルブ３の弁口３２が開弁すると、高圧ガス室３１に存在する高圧の冷媒ガスは、弁口３２を経て中間圧室３６に至り、さらに、高圧通路８１を介して冷凍機２の中空室２０に供給される。このように高圧バルブ３が開弁することで、圧縮機１の高圧側の吐出ポート１１と冷凍機２の中空室２０とが通じ、高圧ガス（例えば１．５〜２．５ＭＰａ程度，これに限定されるものではない）を冷凍機２の中空室２０に供給する。なお、高圧バルブ３の中間圧室３６は、高圧通路８１および低圧通路８２を介して低圧バルブの中間圧室３６Ｃに連絡している。   As shown in FIGS. 1 and 2, high-pressure refrigerant gas is supplied to the high-pressure gas chamber 31 of the high-pressure valve 3 through the discharge port 11 of the compressor 1. When the valve port 32 of the high-pressure valve 3 is opened, the high-pressure refrigerant gas existing in the high-pressure gas chamber 31 reaches the intermediate pressure chamber 36 through the valve port 32, and further passes through the high-pressure passage 81 to hollow the refrigerator 2. Supplied to the chamber 20. By opening the high-pressure valve 3 in this way, the discharge port 11 on the high-pressure side of the compressor 1 and the hollow chamber 20 of the refrigerator 2 communicate with each other, and high-pressure gas (for example, about 1.5 to 2.5 MPa, (Not limited) is supplied to the hollow chamber 20 of the refrigerator 2. The intermediate pressure chamber 36 of the high pressure valve 3 communicates with the intermediate pressure chamber 36C of the low pressure valve via a high pressure passage 81 and a low pressure passage 82.

図２に示すように、旋回部材５は旋回中心５５を持ち、旋回中心５５を中心として一方向（矢印Ｂ１方向，開弁方向）および逆方向（矢印Ｂ２方向）に旋回（揺動）可能である。旋回部材５は、ステム４０に対向する対向面５８と、カム６の偏芯カム部６０に対向するカム従動面５９とを持つ。旋回部材５の対向面５８は、ステム４０の先端部４１に接触して先端部４１を押圧する加圧領域５０を持つ。図１に示すように、カム６は、回転中心６０を中心として回転する回転部６１と、回転部６１に設けられた偏芯カム部６２とを持つ。カム６の回転中心６０は偏心カム部６２に対して偏心しているため、偏心カム部６２の周面６２ａと旋回部材５のカム従動面５９との最短距離は、カム６の回転に伴って変化する。したがってカム６は、規定の開放タイミングで旋回部材５のカム従動面５９に近づき、これを押圧する。つまりカム６は旋回部材５をこれの旋回中心５５を中心として一方向（矢印Ｂ１方向）に旋回させる。この結果、旋回部材５は、加圧領域５０によってステム４０の先端部４１をこれの中心軸線Ｐに沿って直線方向（開弁方向、矢印Ａ１方向）に加圧する。このため弁体４は開弁方向（矢印Ａ１方向）に直線移動し、弁部４２が弁座３３から離脱して弁口３２が開弁する。つまりこのとき高圧バルブ３が開弁する。このとき加圧領域５０は、旋回中心５５を中心とする円弧上を位置変化する。このため加圧領域５０はステム４０の先端部４１を構成する回転体４４に対して相対的に位置変化する。したがって加圧領域５０と回転体４４とは摺接し、両者の間には摩擦力が生じる。しかし回転体４４はステム４０の先端部４１を構成する他の部分（つまり保持部４５）に対して回転可能であるため、摩擦力が作用した回転体４４は回転し、ステム４０の先端部４１と加圧領域５０との摩擦抵抗は増大し難い。つまり、実施形態１の低温冷凍装置によると、ステム４０の先端部４１と加圧領域５０（以下、必要に応じて接触面５０と呼ぶ）との摩擦抵抗の増大を抑制することで、ステム４０の先端部４１および加圧領域５０の摩耗を抑制できる。   As shown in FIG. 2, the turning member 5 has a turning center 55, and can turn (swing) in one direction (arrow B1 direction, valve opening direction) and in the opposite direction (arrow B2 direction) around the turning center 55. is there. The turning member 5 has a facing surface 58 that faces the stem 40 and a cam driven surface 59 that faces the eccentric cam portion 60 of the cam 6. The facing surface 58 of the turning member 5 has a pressurizing region 50 that contacts the tip portion 41 of the stem 40 and presses the tip portion 41. As shown in FIG. 1, the cam 6 has a rotating part 61 that rotates about a rotation center 60 and an eccentric cam part 62 provided on the rotating part 61. Since the rotation center 60 of the cam 6 is eccentric with respect to the eccentric cam portion 62, the shortest distance between the circumferential surface 62 a of the eccentric cam portion 62 and the cam driven surface 59 of the turning member 5 changes as the cam 6 rotates. To do. Therefore, the cam 6 approaches the cam driven surface 59 of the turning member 5 at a specified opening timing and presses it. That is, the cam 6 turns the turning member 5 in one direction (arrow B1 direction) around the turning center 55 thereof. As a result, the turning member 5 pressurizes the tip end portion 41 of the stem 40 along the central axis P in the linear direction (the valve opening direction, the direction of the arrow A1) by the pressurizing region 50. For this reason, the valve body 4 linearly moves in the valve opening direction (arrow A1 direction), the valve portion 42 is detached from the valve seat 33, and the valve port 32 is opened. That is, at this time, the high-pressure valve 3 is opened. At this time, the pressure region 50 changes its position on an arc centered on the turning center 55. For this reason, the position of the pressurizing region 50 changes relative to the rotating body 44 constituting the distal end portion 41 of the stem 40. Therefore, the pressurizing region 50 and the rotating body 44 are in sliding contact with each other, and a frictional force is generated between them. However, since the rotating body 44 can rotate with respect to other parts (that is, the holding portion 45) constituting the distal end portion 41 of the stem 40, the rotating body 44 to which the frictional force is applied rotates and the distal end portion 41 of the stem 40 is rotated. And the pressure resistance 50 are unlikely to increase in frictional resistance. That is, according to the low-temperature refrigeration apparatus of the first embodiment, the stem 40 is suppressed by suppressing an increase in frictional resistance between the distal end portion 41 of the stem 40 and the pressure region 50 (hereinafter referred to as the contact surface 50 as necessary). The wear of the tip 41 and the pressure region 50 can be suppressed.

なお、高圧バルブ３の開弁後には、カム６の偏芯カム部６２が旋回部材５のカム従動面５９から退避するため、カム６による旋回部材５への押圧力が解除される。したがって、付勢バネ４７の閉弁方向（矢印Ａ２方向）の付勢力により、弁体４は閉弁方向（矢印Ａ２方向）に付勢され、弁部４２が弁座３３に着座して弁口３２を閉鎖する。つまり高圧バルブ３が閉弁する。   Since the eccentric cam portion 62 of the cam 6 is retracted from the cam driven surface 59 of the turning member 5 after the high pressure valve 3 is opened, the pressing force applied to the turning member 5 by the cam 6 is released. Therefore, the urging force of the urging spring 47 in the valve closing direction (arrow A2 direction) urges the valve body 4 in the valve closing direction (arrow A2 direction), and the valve portion 42 is seated on the valve seat 33 and the valve opening. 32 is closed. That is, the high pressure valve 3 is closed.

本実施形態においては、ステム４０の先端部４１（すなわち回転体４４）と接触面５０とは離接可能であり、高圧バルブ３の開弁時（つまり回転体４４と加圧領域５０とが接触しているとき）に両者は摺接する。また、高圧バルブ３の閉弁時には両者は離間する。接触面５０の摩耗抑制を考慮すると、高圧バルブ３の閉弁時には回転体４４と接触面５０とが離間するのが好ましい。しかし本発明の低温冷凍装置における回転体４４および接触面５０の態様はこれに限定されない。例えば、回転体４４と接触面５０とは常に摺接していても良い。そして接触面５０は、所定のタイミングで回転体４４を開弁方向に強く押圧して弁体４を開弁方向に移動させ、それ以外の時には回転体４４を僅かに（弁部４２が弁座３３に着座し続ける程度に）開弁方向に押圧していても良い。   In the present embodiment, the distal end portion 41 (that is, the rotating body 44) of the stem 40 and the contact surface 50 can be separated from each other, and the high pressure valve 3 is opened (that is, the rotating body 44 and the pressurizing region 50 are in contact). The two are in sliding contact with each other. Further, when the high pressure valve 3 is closed, they are separated from each other. In consideration of wear suppression of the contact surface 50, it is preferable that the rotating body 44 and the contact surface 50 are separated when the high-pressure valve 3 is closed. However, the aspect of the rotating body 44 and the contact surface 50 in the low-temperature refrigeration apparatus of the present invention is not limited to this. For example, the rotating body 44 and the contact surface 50 may always be in sliding contact. The contact surface 50 strongly presses the rotating body 44 in the valve opening direction at a predetermined timing to move the valve body 4 in the valve opening direction. In other cases, the rotating body 44 is slightly changed (the valve portion 42 is the valve seat). It may be pressed in the valve opening direction (to the extent that it continues to be seated on 33).

次に、低圧バルブ７について説明する。低圧バルブ７は高圧バルブ３と基本的には同様の構造を持つ。図１に示すように、低圧バルブ７は、基部３０Ｃと、軸受３５Ｃと、弁体４Ｃと、閉弁用の付勢バネ４７Ｃと、旋回部材５Ｃとを有する。基部３０Ｃは、冷凍機２の中空室２０から冷媒ガスが供給される中間圧室３６Ｃと、弁口３２Ｃを形成する弁座３３Ｃと、軸孔３４Ｃを持つ軸受３５Ｃとを有する。低圧バルブ７の中間圧室３６Ｃは、低圧通路８２を介して冷凍機２の中空室２０に連絡するとともに、弁口３２Ｃを介して低圧室３８に連絡する。低圧バルブ７の基部３０Ｃは中間圧室３６Ｃを持ち、中間圧室３６Ｃの内部には弁体４Ｃの弁部４２Ｃが配置されている。中間圧室３６は弁座３３Ｃにより区画されている。弁座３３Ｃの弁口３２Ｃにはステム４０の基端部４３Ｃ側の部分が挿通されている。弁体４Ｃは弁体４と略同形状であり、弁体４と同様に、付勢バネ４７Ｃによって閉弁方向（図１中矢印Ａ４方向）に付勢されている。また、ステム４０Ｃの先端部４１Ｃ側の部分は、基部３０Ｃとは別体であり基部３０Ｃと離間配置されている軸受３５Ｃの軸孔３４Ｃに挿通されている。軸受３５Ｃは基部３０Ｃと旋回部材５Ｃとの間に配置されている。なお、基部３０Ｃの一部（具体的には弁座３３Ｃの一部）、弁体４Ｃの一部（具体的にはステム４０Ｃの先端部４１Ｃ側の部分）、軸受３５Ｃ、旋回部材５Ｃは低圧室３８に配置されている。弁座３３Ｃは低圧室３８と外部との境界に位置する。   Next, the low pressure valve 7 will be described. The low-pressure valve 7 has basically the same structure as the high-pressure valve 3. As shown in FIG. 1, the low pressure valve 7 has a base 30C, a bearing 35C, a valve body 4C, a biasing spring 47C for valve closing, and a turning member 5C. The base 30C includes an intermediate pressure chamber 36C to which refrigerant gas is supplied from the hollow chamber 20 of the refrigerator 2, a valve seat 33C that forms a valve port 32C, and a bearing 35C having a shaft hole 34C. The intermediate pressure chamber 36C of the low pressure valve 7 communicates with the hollow chamber 20 of the refrigerator 2 through the low pressure passage 82 and also communicates with the low pressure chamber 38 through the valve port 32C. The base 30C of the low pressure valve 7 has an intermediate pressure chamber 36C, and the valve portion 42C of the valve body 4C is disposed inside the intermediate pressure chamber 36C. The intermediate pressure chamber 36 is partitioned by a valve seat 33C. A portion of the stem 40 on the base end portion 43C side is inserted through the valve port 32C of the valve seat 33C. The valve body 4C has substantially the same shape as the valve body 4, and is urged in the valve closing direction (in the direction of arrow A4 in FIG. 1) by the urging spring 47C in the same manner as the valve body 4. Further, a portion of the stem 40C on the side of the distal end portion 41C is inserted into a shaft hole 34C of a bearing 35C that is separate from the base portion 30C and is spaced from the base portion 30C. The bearing 35C is disposed between the base 30C and the turning member 5C. Note that a part of the base 30C (specifically, part of the valve seat 33C), a part of the valve body 4C (specifically, a part on the tip end 41C side of the stem 40C), the bearing 35C, and the turning member 5C are low pressure. It is arranged in the chamber 38. The valve seat 33C is located at the boundary between the low pressure chamber 38 and the outside.

低圧バルブ７が開弁すると、低圧バルブ７の中間圧室３６Ｃの冷媒ガスは、弁口３２Ｃを介して低圧室３８に至り、更に圧縮機１の吸込ポート１２に吸い込まれる。このように低圧バルブ７の開弁により、冷凍機２の中空室２０は、低圧通路８２、低圧バルブ７の弁口３２Ｃ、および低圧室３８を介して、圧縮機１の低圧側の吸込ポート１２に通じる。吸込ポート１２に吸い込まれた冷媒ガスは、圧縮機１により圧縮され、再び高圧の冷媒ガスとして高圧バルブ３の高圧ガス室３１に供給される。   When the low pressure valve 7 is opened, the refrigerant gas in the intermediate pressure chamber 36 </ b> C of the low pressure valve 7 reaches the low pressure chamber 38 through the valve port 32 </ b> C, and is further sucked into the suction port 12 of the compressor 1. Thus, by opening the low pressure valve 7, the hollow chamber 20 of the refrigerator 2 passes through the low pressure passage 82, the valve port 32 </ b> C of the low pressure valve 7, and the low pressure chamber 38, and the suction port 12 on the low pressure side of the compressor 1. Leads to The refrigerant gas sucked into the suction port 12 is compressed by the compressor 1 and supplied again to the high pressure gas chamber 31 of the high pressure valve 3 as a high pressure refrigerant gas.

上記した低圧バルブ７において、弁体４Ｃは、軸受３５Ｃの軸孔３４Ｃに挿通され、直線方向（矢印Ａ３，Ａ４方向）に沿って往復直動可能に支持されている。弁体４Ｃは、上述したように、弁体４と略同形状であり、弁体４と同様のステム４０Ｃ、および、ステム４０Ｃの基端部４３Ｃに連設されている弁部４２Ｃを有する。付勢バネ４７Ｃは、弁体４Ｃを閉弁方向（矢印Ａ４方向）、すなわち、弁部４２Ｃが弁座３３Ｃに着座して弁口３２Ｃを閉鎖する方向に付勢する。旋回部材５Ｃの対向面５８Ｃは、ステム４０Ｃの先端部４１Ｃに接触して先端部４１Ｃを加圧する加圧領域５０Ｃを有する。加圧領域５０Ｃは、加圧領域５０と同様に、本発明の低温冷凍装置における接触面に相当する。以下、必要に応じて加圧領域５０Ｃを接触面５０Ｃと呼ぶ。   In the low-pressure valve 7 described above, the valve body 4C is inserted into the shaft hole 34C of the bearing 35C and supported so as to be capable of reciprocating linearly along the linear direction (arrow A3, A4 direction). As described above, the valve body 4C has substantially the same shape as the valve body 4, and includes the stem 40C similar to the valve body 4 and the valve portion 42C connected to the base end portion 43C of the stem 40C. The urging spring 47C urges the valve body 4C in the valve closing direction (arrow A4 direction), that is, the direction in which the valve portion 42C is seated on the valve seat 33C and the valve port 32C is closed. The facing surface 58C of the turning member 5C has a pressurizing region 50C that contacts the tip portion 41C of the stem 40C and pressurizes the tip portion 41C. The pressurizing region 50C corresponds to the contact surface in the low-temperature refrigeration apparatus of the present invention, like the pressurizing region 50. Hereinafter, the pressure region 50C is referred to as a contact surface 50C as necessary.

旋回部材５Ｃは旋回中心５５Ｃを持ち、旋回中心５５Ｃを中心として一方向（矢印Ｂ３方向，開弁方向）および逆方向（矢印Ｂ４方向）に旋回可能である。旋回部材５Ｃが一方向（矢印Ｂ３方向）へ旋回すると、旋回部材５Ｃの加圧領域５０Ｃは、弁体４Ｃのステム４０Ｃの先端部４１Ｃと接触した状態で、先端部４１Ｃを開弁方向（矢印Ａ３方向）に加圧する。これにより弁部４２Ｃはステム４０Ｃの中心軸線ＰＣに沿って直線移動し、弁座３３Ｃから離脱する。したがって弁口３２Ｃが開弁する。図４に示すように、ステム４０Ｃの先端部４１Ｃは回転体４４Ｃと、収容部４６Ｃを持つ保持部４５Ｃとで構成されている。回転体４４Ｃは、加圧領域５０Ｃとの摩擦力によって回転する。このためステム４０Ｃの先端部４１Ｃと加圧領域５０Ｃとの摩擦抵抗を小さくでき、ステム４０Ｃの先端部４１Ｃおよび加圧領域５０Ｃの摩耗を抑制できる。なお、低圧バルブ７の開弁後には、カム６の回転に伴い、カム６の偏芯カム部６２による旋回部材５Ｃのカム従動面５９Ｃへの押圧力が解除される。したがって、付勢バネ４７Ｃの付勢力により弁体４Ｃは閉弁方向（矢印Ａ４方向）に付勢され、弁部４２Ｃが弁座３３Ｃに着座して、弁口３２Ｃを閉鎖させる。つまり低圧バルブ７が閉弁する。   The turning member 5C has a turning center 55C, and can turn in one direction (arrow B3 direction, valve opening direction) and the opposite direction (arrow B4 direction) around the turning center 55C. When the turning member 5C turns in one direction (arrow B3 direction), the pressurizing region 50C of the turning member 5C contacts the tip portion 41C of the stem 40C of the valve body 4C while opening the tip portion 41C in the valve opening direction (arrow). (A3 direction). As a result, the valve portion 42C moves linearly along the central axis PC of the stem 40C and leaves the valve seat 33C. Accordingly, the valve port 32C is opened. As shown in FIG. 4, the distal end portion 41C of the stem 40C is composed of a rotating body 44C and a holding portion 45C having an accommodating portion 46C. The rotating body 44C rotates by a frictional force with the pressurizing region 50C. For this reason, the frictional resistance between the tip portion 41C of the stem 40C and the pressure region 50C can be reduced, and wear of the tip portion 41C of the stem 40C and the pressure region 50C can be suppressed. In addition, after the low pressure valve 7 is opened, as the cam 6 rotates, the pressing force applied to the cam driven surface 59C of the turning member 5C by the eccentric cam portion 62 of the cam 6 is released. Therefore, the valve body 4C is urged in the valve closing direction (arrow A4 direction) by the urging force of the urging spring 47C, and the valve portion 42C is seated on the valve seat 33C to close the valve port 32C. That is, the low pressure valve 7 is closed.

実施形態１においては、二つの弁体４、４Ｃにおいて、ステム４０、４０Ｃの先端部４１、４１Ｃを回転体４４、４４Ｃと保持部４５、４５Ｃとで構成したが、一方のステム４０の先端部４１のみを回転体４４と保持部４５とで構成しても良い。または、他方のステム４０Ｃの先端部４１Ｃのみを回転体４４Ｃと保持部４５Ｃとで構成しても良い。この場合においても、接触面５０と接触面５０Ｃとの何れかにおいて摩耗抑制効果が発揮される。   In the first embodiment, in the two valve bodies 4 and 4C, the tip portions 41 and 41C of the stems 40 and 40C are configured by the rotating bodies 44 and 44C and the holding portions 45 and 45C. Only 41 may be constituted by the rotating body 44 and the holding portion 45. Alternatively, only the tip portion 41C of the other stem 40C may be constituted by the rotating body 44C and the holding portion 45C. Even in this case, the wear suppression effect is exhibited in either the contact surface 50 or the contact surface 50C.

（実施形態２）
図６は実施形態２の概念を示す。図７は実施形態２の低温冷凍装置における高圧バルブ付近を模式的に示す断面図である。図８は高圧バルブ３のステム４０が閉弁位置から開弁方向に直線移動するときにおけるステム４０の先端部４１付近を模式的に示す図である。図９は低圧バルブ７のステム４０Ｃが閉弁位置から開弁方向に直線移動するときにおけるステム４０Ｃの先端部４１Ｃ付近を模式的に示す図である。 (Embodiment 2)
FIG. 6 shows the concept of the second embodiment. FIG. 7 is a cross-sectional view schematically showing the vicinity of the high-pressure valve in the low-temperature refrigeration apparatus of the second embodiment. FIG. 8 is a diagram schematically showing the vicinity of the tip 41 of the stem 40 when the stem 40 of the high-pressure valve 3 linearly moves in the valve opening direction from the valve closing position. FIG. 9 is a diagram schematically showing the vicinity of the tip portion 41C of the stem 40C when the stem 40C of the low pressure valve 7 linearly moves in the valve opening direction from the valve closing position.

実施形態２におけるステム４０、４０Ｃは実施形態１におけるステム４０、４０Ｃと異なっている。具体的には、図７および図８に示すように、ステム４０の先端部４１は実施形態１と同様に回転体４４および保持部４５によって構成されているが、保持部４５の内部に形成されている収容部４６はステム４０の長手方向に沿って延びる長溝状をなす。なおかつ、収容部４６の内部には回転体４４とともに潤滑剤４８が収容されている。図９に示すように、ステム４０Ｃに関しても同様である。潤滑剤４８の種類は特に限定しないが、フッ素系グリース、カルシウム石鹸基グリース、カルシウム複合石鹸基グリース、リチウム石鹸基グリース、シリコングリース等が好ましく用いられ、特に蒸気圧が低い材料を用いるのが好ましい。収容部４６に、回転体４４とともに潤滑剤４８を収容したことで、回転体４４と保持部４５との摩擦抵抗が低減され、回転体４４が回転し易くなる。このため接触面５０とステム４０の先端部４１との摩擦抵抗がより信頼性高く軽減される。また、回転体４４には収容部４６中の潤滑剤４８が付着するため、接触面５０と回転体４４との間には潤滑剤４８が少しずつ供給される。つまり、接触面５０と回転体４４との間には比較的長期間にわたって潤滑剤４８が供給され続け、潤滑剤４８によるステム４０の先端部４１および接触面５０の摩耗低減効果が比較的長期間維持される。これは、ステム４０Ｃの先端部４１Ｃに関しても同様であり、接触面５０Ｃと回転体４４Ｃとの間には比較的長期間にわたって潤滑剤４８が供給され続け、潤滑剤４８Ｃによるステム４０Ｃの先端部４１Ｃおよび接触面５０Ｃの摩耗低減効果が比較的長期間維持される。なお、本実施形態の収容部４６は、実施形態１の収容部４６と同様に切削工具９９によって穿設することもできる。あるいは、ステム４０の材料として金属管を用い、金属管内部に予め形成されている空洞を収容部４６として利用することもできる。収容部４６の形成方法はこの限りではない。実施形態２においては、収容部４６、４６Ｃは所定長さ直進し、奥側（弁部４２、４２Ｃ側）において屈曲している。このためステム４０、４０Ｃの側面には小さな開口が形成されている。この開口は中空圧室３６に開口する通気口４９である。   The stems 40 and 40C in the second embodiment are different from the stems 40 and 40C in the first embodiment. Specifically, as shown in FIGS. 7 and 8, the distal end portion 41 of the stem 40 is configured by the rotating body 44 and the holding portion 45 as in the first embodiment, but is formed inside the holding portion 45. The accommodating portion 46 has a long groove shape extending along the longitudinal direction of the stem 40. In addition, a lubricant 48 is housed together with the rotating body 44 in the housing portion 46. The same applies to the stem 40C as shown in FIG. The type of the lubricant 48 is not particularly limited, but fluorine-based grease, calcium soap base grease, calcium composite soap base grease, lithium soap base grease, silicon grease and the like are preferably used, and it is particularly preferable to use a material having a low vapor pressure. . By accommodating the lubricant 48 together with the rotating body 44 in the housing portion 46, the frictional resistance between the rotating body 44 and the holding portion 45 is reduced, and the rotating body 44 is easily rotated. For this reason, the frictional resistance between the contact surface 50 and the tip portion 41 of the stem 40 is reduced more reliably. Further, since the lubricant 48 in the accommodating portion 46 adheres to the rotating body 44, the lubricant 48 is supplied little by little between the contact surface 50 and the rotating body 44. That is, the lubricant 48 continues to be supplied between the contact surface 50 and the rotating body 44 for a relatively long time, and the effect of reducing the wear of the tip portion 41 of the stem 40 and the contact surface 50 by the lubricant 48 is relatively long. Maintained. The same applies to the tip portion 41C of the stem 40C, and the lubricant 48 is continuously supplied between the contact surface 50C and the rotating body 44C for a relatively long period of time, and the tip portion 41C of the stem 40C by the lubricant 48C. Further, the effect of reducing the wear on the contact surface 50C is maintained for a relatively long time. In addition, the accommodating part 46 of this embodiment can also be drilled with the cutting tool 99 similarly to the accommodating part 46 of Embodiment 1. FIG. Alternatively, a metal tube can be used as the material of the stem 40 and a cavity formed in advance inside the metal tube can be used as the accommodating portion 46. The formation method of the accommodating part 46 is not this limitation. In the second embodiment, the accommodating portions 46 and 46C go straight for a predetermined length and bend on the back side (the valve portions 42 and 42C side). For this reason, small openings are formed on the side surfaces of the stems 40 and 40C. This opening is a vent 49 that opens into the hollow pressure chamber 36.

ところで、図６に示すように、実施形態２における冷凍機２Ｅは、高圧バルブ３および低圧バルブ７を介して圧縮機１に連絡するパルス管冷凍機である。この冷凍機２Ｅには、蓄冷材を持つ蓄冷器２４と、中空室９０を持つパルス管９１とが並設されている。圧縮機１、高圧バルブ３及び低圧バルブ７は、パルス管冷凍機２Ｅに供給する冷媒ガスの圧力波形を発生させる圧力波形発生装置として機能する。蓄冷器２４は、高圧通路８１を介して高圧バルブ３に連絡し、かつ、低圧通路８２を介して低圧バルブ７に連絡する。パルス管９１は高温端９１ａと低温端９１ｃとを持つ。高温端９１ａ側には位相制御機構９５が配置されている。位相制御機構９５は、蓄冷器２４の高温端２４ａ、パルス管９１の高温端９１ａと高圧通路８１および低圧通路８２との間に配置されており、パルス管９１の中空室９０に供給される冷媒ガスの流れと圧力間の位相差を調整する。位相制御機構９５は開閉バルブ、バッファタンク又はイナータンスチューブ機構で形成できる。   By the way, as shown in FIG. 6, the refrigerator 2E in Embodiment 2 is a pulse tube refrigerator which communicates with the compressor 1 through the high pressure valve 3 and the low pressure valve 7. In this refrigerator 2E, a regenerator 24 having a regenerator material and a pulse tube 91 having a hollow chamber 90 are juxtaposed. The compressor 1, the high pressure valve 3, and the low pressure valve 7 function as a pressure waveform generator that generates a pressure waveform of the refrigerant gas supplied to the pulse tube refrigerator 2E. The regenerator 24 communicates with the high pressure valve 3 via the high pressure passage 81 and communicates with the low pressure valve 7 via the low pressure passage 82. The pulse tube 91 has a high temperature end 91a and a low temperature end 91c. A phase control mechanism 95 is disposed on the high temperature end 91a side. The phase control mechanism 95 is disposed between the high temperature end 24 a of the regenerator 24, the high temperature end 91 a of the pulse tube 91, the high pressure passage 81 and the low pressure passage 82, and is supplied to the hollow chamber 90 of the pulse tube 91. Adjust the phase difference between gas flow and pressure. The phase control mechanism 95 can be formed by an open / close valve, a buffer tank, or an inertance tube mechanism.

まず、低圧バルブ７が閉弁し高圧バルブ３が開弁する。これにより圧縮機１の吐出ポート１１から供給された高圧の冷媒ガスは、高圧バルブ３、高圧通路８１を介して、蓄冷器２４の高温端２４ａ及び位相制御機構９５に至り、蓄冷器２４を経て蓄冷器２４の低温端２４ｃ、パルス管９１の高温端９１ａから中空室９０に供給される。その後、高圧バルブ３が閉弁し、低圧バルブ７が開弁する。この状態で、パルス管９１の中空室９０の低温端９１ｃ側の冷媒ガスは蓄冷器２４に接触して冷熱を蓄冷器２４に蓄冷させるとともに、低圧通路８２を経て低圧バルブ７に供給される。低圧バルブ７が開弁すると、冷媒ガスは、低圧バルブ７を介して低圧室３８に供給され、ひいては吸込ポート１２から圧縮機１に吸い込まれ、再び高圧ガスとなる。このような動作が繰り返されて冷凍機２Ｅのパルス管９１の低温端９１ｃにおいて寒冷が発生する。   First, the low pressure valve 7 is closed and the high pressure valve 3 is opened. As a result, the high-pressure refrigerant gas supplied from the discharge port 11 of the compressor 1 reaches the high-temperature end 24 a of the regenerator 24 and the phase control mechanism 95 via the high-pressure valve 3 and the high-pressure passage 81, and passes through the regenerator 24. The hollow chamber 90 is supplied from the low temperature end 24 c of the regenerator 24 and the high temperature end 91 a of the pulse tube 91. Thereafter, the high pressure valve 3 is closed and the low pressure valve 7 is opened. In this state, the refrigerant gas on the low temperature end 91 c side of the hollow chamber 90 of the pulse tube 91 contacts the regenerator 24 to store the cold heat in the regenerator 24 and is supplied to the low pressure valve 7 through the low pressure passage 82. When the low-pressure valve 7 is opened, the refrigerant gas is supplied to the low-pressure chamber 38 via the low-pressure valve 7 and is then sucked into the compressor 1 from the suction port 12 and becomes high-pressure gas again. Such an operation is repeated to generate cold at the low temperature end 91c of the pulse tube 91 of the refrigerator 2E.

（実施形態３）
図１０は実施形態３の低温冷凍装置における高圧バルブ付近を模式的に示す断面図である。図１１は実施形態３の低温冷凍装置における低圧バルブ付近を模式的に示す断面図である。 (Embodiment 3)
FIG. 10 is a cross-sectional view schematically showing the vicinity of the high-pressure valve in the low-temperature refrigeration apparatus of Embodiment 3. FIG. 11 is a cross-sectional view schematically showing the vicinity of a low-pressure valve in the low-temperature refrigeration apparatus of Embodiment 3.

図１０、１１に示すように、弁体４、４Ｃには、実施形態２と同様に長溝状の収容部４６、４６Ｃが設けられている。収容部４６、４６Ｃには回転体４４、４４Ｃとともに潤滑剤４８、４８Ｃが収容されている。実施形態３においては、収容部４６、４６Ｃはステム４０の基端部４３に向けて延び、通気口４９、４９Ｃを介して基部３０、３０Ｃの内部に開口している。より具体的には、弁体４における弁部４２よりもさらに端側の部分には、収容部４６に連絡し高圧ガス室３１に開口する通気口４９が設けられている。弁体４Ｃにもまた、収容部４６Ｃに連絡し中間圧室３６に開口する通気口４９Ｃが設けられている。   As shown in FIGS. 10 and 11, the valve bodies 4, 4 </ b> C are provided with long groove-like accommodation portions 46, 46 </ b> C as in the second embodiment. Lubricants 48 and 48C are accommodated in the accommodating portions 46 and 46C together with the rotating bodies 44 and 44C. In the third embodiment, the accommodating portions 46 and 46C extend toward the base end portion 43 of the stem 40, and open to the inside of the base portions 30 and 30C through the vent holes 49 and 49C. More specifically, a vent 49 that communicates with the accommodating portion 46 and opens into the high-pressure gas chamber 31 is provided in a portion further on the end side than the valve portion 42 in the valve body 4. The valve body 4 </ b> C is also provided with a vent 49 </ b> C that communicates with the accommodating portion 46 </ b> C and opens into the intermediate pressure chamber 36.

上述したように、弁体４の収容部４６は通気口４９を介して高圧ガス室３１に連絡し、弁体４Ｃの収容部４６Ｃは通気口４９Ｃを介して中間圧室３６に連絡している。高圧バルブ３の開弁時において、高圧ガス室３１内のガス圧は低圧室３８内のガス圧よりも高い。このため、収容部４６内の潤滑剤４８は、冷媒ガスによって、低圧室３８方向（つまりステム４０の先端部４１よりも外側）に押圧される。換言すると、潤滑剤４８は冷媒ガスによって押し出され易い。このため、実施形態３の低温冷凍装置においては、収容部４６に潤滑剤４８が詰まり難く、ステム４０の先端部４１と接触面５０との間に潤滑剤４８が安定して供給され易い。したがって実施形態３の低温冷凍装置によると、回転体４４が安定して回転し易く、ステム４０の先端部４１および接触面５０の摩耗を抑制できる。また、比較的流動性の低い潤滑剤４８を用いることも可能である。   As described above, the accommodating portion 46 of the valve body 4 communicates with the high-pressure gas chamber 31 via the vent 49, and the accommodating portion 46C of the valve body 4C communicates with the intermediate pressure chamber 36 via the vent 49C. . When the high pressure valve 3 is opened, the gas pressure in the high pressure gas chamber 31 is higher than the gas pressure in the low pressure chamber 38. For this reason, the lubricant 48 in the accommodating portion 46 is pressed toward the low-pressure chamber 38 (that is, outside the tip portion 41 of the stem 40) by the refrigerant gas. In other words, the lubricant 48 is easily pushed out by the refrigerant gas. For this reason, in the low temperature refrigeration apparatus of the third embodiment, the lubricant 48 is unlikely to be clogged in the housing portion 46, and the lubricant 48 is easily supplied stably between the distal end portion 41 of the stem 40 and the contact surface 50. Therefore, according to the low temperature refrigeration apparatus of the third embodiment, the rotating body 44 can easily rotate stably, and wear of the tip portion 41 of the stem 40 and the contact surface 50 can be suppressed. It is also possible to use a lubricant 48 having a relatively low fluidity.

同様に、低圧バルブ７の開弁時において、中間圧室３６内のガス圧は低圧室３８内のガス圧よりも高い。このため収容部４６Ｃ内の潤滑剤４８Ｃは、冷媒ガスによって、低圧室３８方向に押圧される。したがってステム４０Ｃの先端部４１Ｃと接触面５０Ｃとの間に潤滑剤４８が安定して供給され易く、回転体４４Ｃが安定して回転し易い。ひいては、ステム４０Ｃの先端部４１Ｃおよび接触面５０Ｃの摩耗を抑制できる。   Similarly, when the low pressure valve 7 is opened, the gas pressure in the intermediate pressure chamber 36 is higher than the gas pressure in the low pressure chamber 38. For this reason, the lubricant 48C in the accommodating portion 46C is pressed toward the low pressure chamber 38 by the refrigerant gas. Therefore, the lubricant 48 is easily supplied stably between the tip portion 41C of the stem 40C and the contact surface 50C, and the rotating body 44C is easily rotated stably. As a result, wear of the tip portion 41C and the contact surface 50C of the stem 40C can be suppressed.

なお、高圧バルブ３の開弁時において、中間圧室３６内の圧力および弁口３２内の圧力もまた、低圧室３８内の圧力よりも高い。このため、通気口４９が中間圧室３６または弁口３２に開口する場合にも、同様に、潤滑剤４８の押出し効果が発揮される。つまり、通気口４９は基部３０の内部に開口すれば良く、その位置は特に限定しない。また、低圧バルブ３の開弁時において、弁口３２Ｃ内の圧力は低圧室３８内の圧力よりも高い。このため、通気口４９Ｃが弁口３２Ｃに開口する場合にも、同様に、潤滑剤４８の押出し効果が発揮される。つまり、通気口４９Ｃもまた基部３０Ｃの内部に開口すれば良く、その位置は特に限定しない。   When the high pressure valve 3 is opened, the pressure in the intermediate pressure chamber 36 and the pressure in the valve port 32 are also higher than the pressure in the low pressure chamber 38. For this reason, even when the vent 49 opens to the intermediate pressure chamber 36 or the valve port 32, the push-out effect of the lubricant 48 is similarly exhibited. That is, the vent 49 may be opened inside the base 30 and the position thereof is not particularly limited. Further, when the low pressure valve 3 is opened, the pressure in the valve port 32C is higher than the pressure in the low pressure chamber 38. For this reason, even when the vent 49C opens to the valve port 32C, the push-out effect of the lubricant 48 is similarly exhibited. That is, the vent 49C may also be opened inside the base 30C, and the position thereof is not particularly limited.

（実施形態４）
図１２は高圧バルブ３のステム４０が閉弁位置から開弁方向に直線移動し、かつ、低圧バルブ７のステム４０Ｃが閉弁位置に配置されているときにおけるステム４０の先端部４１付近、および、ステム４０Ｃの先端部４１Ｃ付近を模式的に示す図である。実施形態４の低温冷凍装置は、旋回部材５、５Ｃを持たないこと、高圧バルブ３、低圧バルブ７およびカム６の位置関係、弁体４、４Ｃの形状およびカム６の形状以外は実施形態１と同じものである。 (Embodiment 4)
FIG. 12 shows the vicinity of the tip 41 of the stem 40 when the stem 40 of the high pressure valve 3 moves linearly from the valve closing position in the valve opening direction and the stem 40C of the low pressure valve 7 is arranged at the valve closing position. FIG. 4 is a diagram schematically showing the vicinity of a tip portion 41C of a stem 40C. The low temperature refrigeration apparatus of the fourth embodiment is the same as that of the first embodiment except that the rotating members 5 and 5C are not provided, the positional relationship between the high pressure valve 3, the low pressure valve 7 and the cam 6, the shape of the valve bodies 4 and 4C, and the shape of the cam 6. Is the same.

カム６は２つの偏心カム部６２ａ、６２ｂを持つ。カム６の回転中心６０は、偏心カム部６２ａおよび６２ｂの両方に対して偏心している。また、２つの偏心カム部６２ａ、６２ｂは互いに偏心している。   The cam 6 has two eccentric cam portions 62a and 62b. The rotation center 60 of the cam 6 is eccentric with respect to both the eccentric cam portions 62a and 62b. The two eccentric cam portions 62a and 62b are eccentric from each other.

弁体４は、カム６の回転軸６０に直交する方向に往復移動可能である。また、弁体４のステム４０の先端部４１は、偏心カム６２ａの周面５０に対して離接可能であるように配置されている。弁体４Ｃのステム４０Ｃの先端部４１Ｃは、偏心カム６２ｂの周面５０Ｃに対して離接可能であるように配置されている。２つの基部３０、３０Ｃは互いに隣接している。基部３０には弁体４が往復直動可能に支持されている。基部３０Ｃおよび軸受３５Ｃには、弁体４Ｃが往復直動可能に支持されている。偏心カム６２ａと偏心カム６２ｂとは互いに偏心しているため、偏心カム６２ａの周面５０が弁体４におけるステム４０の先端部４１に接触（摺接）している間は偏心カム６２ｂの周面５０Ｃは弁体４Ｃにおけるステム４０Ｃの先端部４１Ｃと離間する。また、偏心カム６２ｂの周面５０Ｃが弁体４Ｃにおけるステム４０Ｃの先端部４１Ｃに接触（摺接）している間は偏心カム６２ａの周面５０は弁体４におけるステム４０の先端部４１と離間する。つまり、カム６は偏心カム６２ａの周面５０と、偏心カム６２ｂの周面５０Ｃとによって、弁体４と弁体４Ｃとを交互に押圧する。このため高圧バルブ３と低圧バルブ７とは、実施形態１の低温冷凍装置と同様に、交互に開閉する。なお、実施形態３の低温冷凍装置における偏心カム６２ａの周面５０および偏心カム６２ｂの周面５０Ｃは、本発明の低温冷凍装置における接触面に相当する。   The valve body 4 can reciprocate in a direction orthogonal to the rotation shaft 60 of the cam 6. Moreover, the front-end | tip part 41 of the stem 40 of the valve body 4 is arrange | positioned so that it can detach | separate with respect to the surrounding surface 50 of the eccentric cam 62a. The distal end portion 41C of the stem 40C of the valve body 4C is disposed so as to be detachable from the peripheral surface 50C of the eccentric cam 62b. The two base portions 30 and 30C are adjacent to each other. The valve body 4 is supported by the base 30 so that reciprocation is possible. The valve body 4C is supported by the base 30C and the bearing 35C so as to be capable of reciprocating linearly. Since the eccentric cam 62a and the eccentric cam 62b are eccentric from each other, the peripheral surface of the eccentric cam 62b is in contact with the peripheral surface 50 of the eccentric cam 62a while being in contact (sliding contact) with the tip 41 of the stem 40 of the valve body 4. 50C is separated from the tip portion 41C of the stem 40C in the valve body 4C. Further, while the peripheral surface 50C of the eccentric cam 62b is in contact (sliding contact) with the tip portion 41C of the stem 40C in the valve body 4C, the peripheral surface 50 of the eccentric cam 62a is in contact with the tip portion 41 of the stem 40 in the valve body 4. Separate. That is, the cam 6 presses the valve body 4 and the valve body 4C alternately by the peripheral surface 50 of the eccentric cam 62a and the peripheral surface 50C of the eccentric cam 62b. For this reason, the high-pressure valve 3 and the low-pressure valve 7 open and close alternately as in the low-temperature refrigeration apparatus of the first embodiment. Note that the peripheral surface 50 of the eccentric cam 62a and the peripheral surface 50C of the eccentric cam 62b in the low-temperature refrigeration apparatus of Embodiment 3 correspond to contact surfaces in the low-temperature refrigeration apparatus of the present invention.

実施形態４の低温冷凍装置においては、偏心カム６２ａ、６２ｂによって接触面５０、５０Ｃを交互に押圧して高圧バルブ３と低圧バルブ７とを交互に開閉する。このような場合にも、弁体４、４Ｃのステム４０、４０Ｃの先端部４１、４１Ｃを回転体４４、４４Ｃで構成することで、実施形態１の低温冷凍装置と同様に、先端部４１、４１Ｃと接触面５０、５０Ｃとの摩擦抵抗を低減でき、ステム４０、４０Ｃの先端部４１、４１Ｃおよび接触面５０、５０Ｃの摩耗を抑制できる。   In the low temperature refrigeration apparatus of the fourth embodiment, the contact surfaces 50 and 50C are alternately pressed by the eccentric cams 62a and 62b to open and close the high pressure valve 3 and the low pressure valve 7 alternately. Even in such a case, by configuring the tip portions 41 and 41C of the stems 40 and 40C of the valve bodies 4 and 4C with the rotating bodies 44 and 44C, the tip portion 41 and The frictional resistance between 41C and the contact surfaces 50, 50C can be reduced, and wear of the tip portions 41, 41C of the stems 40, 40C and the contact surfaces 50, 50C can be suppressed.

（実施形態５）
図１３は高圧バルブ３のステム４０が閉弁位置から開弁方向に直線移動するときにおけるステム４０の先端部４１付近を模式的に示す図である。図１４は低圧バルブ７のステム４０Ｃが閉弁位置から開弁方向に直線移動するときにおけるステム４０Ｃの先端部４１Ｃ付近を模式的に示す図である。実施形態５の低温冷凍装置は、ステム４０の先端部４１およびステム４０Ｃの先端部４１Ｃの形状以外は、実施形態１と同じものである。 (Embodiment 5)
FIG. 13 is a view schematically showing the vicinity of the distal end portion 41 of the stem 40 when the stem 40 of the high-pressure valve 3 linearly moves in the valve opening direction from the valve closing position. FIG. 14 is a diagram schematically showing the vicinity of the tip portion 41C of the stem 40C when the stem 40C of the low pressure valve 7 linearly moves in the valve opening direction from the valve closing position. The low-temperature refrigeration apparatus of the fifth embodiment is the same as that of the first embodiment except for the shapes of the distal end portion 41 of the stem 40 and the distal end portion 41C of the stem 40C.

図１３に示すように、弁体４におけるステム４０の先端部４１は、ローラー状の回転体４４と、回転体４４を保持する保持部４５とで構成されている。回転体４４は一対の回転軸４４ａを持つ。回転軸４４ａは凸状をなし、保持部４５に貫通形成されている一対の軸支孔４５ａに挿入されている。回転体４４の一部は収容部４６に収容され、他の一部は収容部４６の外部に露出している。なお、実施形態４の低温冷凍装置においては、収容部４６は潤滑剤４８を収容していない。図１４に示すように、弁体４Ｃにおけるステム４０Ｃの先端部４１Ｃもまた、ローラー状の回転体４４Ｃと、回転体４４Ｃを保持する保持部４５Ｃとで構成されている。回転体４４Ｃは回転体４４と略同形状であり、保持部４５Ｃもまた保持部４５と略同形状である。収容部４６Ｃは収容部４６と同様に潤滑剤４８を収容していない。   As shown in FIG. 13, the distal end portion 41 of the stem 40 in the valve body 4 includes a roller-like rotating body 44 and a holding portion 45 that holds the rotating body 44. The rotating body 44 has a pair of rotating shafts 44a. The rotating shaft 44 a has a convex shape and is inserted into a pair of shaft support holes 45 a that are formed through the holding portion 45. A part of the rotating body 44 is accommodated in the accommodating part 46, and the other part is exposed to the outside of the accommodating part 46. In the low-temperature refrigeration apparatus of the fourth embodiment, the storage unit 46 does not store the lubricant 48. As shown in FIG. 14, the tip portion 41C of the stem 40C in the valve body 4C is also configured by a roller-like rotating body 44C and a holding portion 45C that holds the rotating body 44C. The rotating body 44C has substantially the same shape as the rotating body 44, and the holding portion 45C also has substantially the same shape as the holding portion 45. The housing portion 46 </ b> C does not contain the lubricant 48 like the housing portion 46.

実施形態５の低温冷凍装置における回転体４４、４４Ｃは、球状でなくローラー状であるが、回転軸４４ａ、４４ｂを中心として回転可能である。図１に示す低温冷凍装置と同様に、実施形態４の回転体４４、４４Ｃは一定の往復方向（図１３中Ｂ１方向およびＢ２方向、または、図１４中Ｂ３方向およびＢ４方向）の力を受けるだけである。このため回転体４４、４４Ｃは、回転軸４４ａ、４４ｂを中心として回転可能であれば、弁駆動部材（実施形態４においては旋回部材５、５Ｃ）の接触面５０、５０Ｃと摺接する際に回転可能である。このため実施形態４においてもステム４０、４０Ｃの先端部４１、４１Ｃおよび接触面５０、５０Ｃの摩耗を抑制できる。   The rotating bodies 44 and 44C in the low-temperature refrigeration apparatus of Embodiment 5 are not spherical but roller-shaped, but can rotate around the rotation shafts 44a and 44b. As in the low-temperature refrigeration apparatus shown in FIG. 1, the rotating bodies 44 and 44C of the fourth embodiment receive a force in a certain reciprocating direction (the B1 direction and B2 direction in FIG. 13 or the B3 direction and B4 direction in FIG. 14). Only. For this reason, if the rotating bodies 44 and 44C can rotate around the rotating shafts 44a and 44b, the rotating bodies 44 and 44C rotate when they are in sliding contact with the contact surfaces 50 and 50C of the valve drive member (the turning members 5 and 5C in the fourth embodiment). Is possible. For this reason, also in Embodiment 4, abrasion of the front-end | tip parts 41 and 41C of the stems 40 and 40C and the contact surfaces 50 and 50C can be suppressed.

（その他）カムは上記構造に限定されず、要するに、規定のタイミングで２つの弁体を交互に押圧し（または一方の弁体を間欠的に押圧し）て開弁させ得るものであれば良い。本発明の低温冷凍装置は極低温冷凍装置に限定されず、低温冷凍装置であれば良い。本発明は上記し且つ図面に示した実施形態のみに限定されるものではなく、要旨を逸脱しない範囲内で適宜変更して実施できる。   (Others) The cam is not limited to the above-described structure. In short, any cam may be used as long as it can open two valve bodies alternately (or intermittently press one valve body) at a specified timing. . The low-temperature refrigeration apparatus of the present invention is not limited to a cryogenic refrigeration apparatus, and may be any low-temperature refrigeration apparatus. The present invention is not limited to the embodiments described above and shown in the drawings, and can be implemented with appropriate modifications within the scope not departing from the gist.

１は圧縮機、１１は吐出ポート、１２は吸込ポート、２は冷凍機、２０は中空室、２２はディスプレーサ、３は高圧バルブ、３０は基部、３１は高圧ガス室、３２は弁口、３３は弁座、３４は軸孔、３５は軸受、３６は中間圧室、４は弁体、４０はステム、４１は先端部、４２は弁部、４４は回転体、４５は保持部、４６は収容部、４７は付勢バネ、４８は潤滑剤、４９は通気口、５は旋回部材、５０は接触面（加圧領域）、５１は第１領域、５２は第２領域、５３は第３領域、５５は旋回中心、６はカム、６０は回転中心、６１は回転部、６２は偏芯カム部、７は低圧バルブ、９０は中空室、９１はパルス管、Ｐは中心軸線を示す。   1 is a compressor, 11 is a discharge port, 12 is a suction port, 2 is a refrigerator, 20 is a hollow chamber, 22 is a displacer, 3 is a high pressure valve, 30 is a base, 31 is a high pressure gas chamber, 32 is a valve port, 33 Is a valve seat, 34 is a shaft hole, 35 is a bearing, 36 is an intermediate pressure chamber, 4 is a valve body, 40 is a stem, 41 is a tip portion, 42 is a valve portion, 44 is a rotating body, 45 is a holding portion, 46 is Housing part, 47 biasing spring, 48 lubricant, 49 vent, 5 swivel member, 50 contact surface (pressurizing area), 51 first area, 52 second area, 53 third The region, 55 is a turning center, 6 is a cam, 60 is a rotation center, 61 is a rotating portion, 62 is an eccentric cam portion, 7 is a low pressure valve, 90 is a hollow chamber, 91 is a pulse tube, and P is a central axis.

Claims (4)

高圧ガスを吐出させる高圧側の吐出ポートと低圧ガスを吸い込む低圧側の吸込ポートとを持つ圧縮機と、冷媒ガスを膨張させて寒冷を発生させる冷凍機と、前記圧縮機の高圧側の前記吐出ポートと前記冷凍機とを連通させ且つ前記圧縮機の吐出ポートから吐出された高圧の冷媒ガスを開弁により前記冷凍機に供給させる高圧バルブと、前記圧縮機の低圧側の前記吸込ポートと前記冷凍機とを連通させ且つ前記冷凍機の冷媒ガスを開弁により前記圧縮機の前記吸込ポートに帰還させる低圧バルブとを具備する低温冷凍装置であって、
前記高圧バルブおよび前記低圧バルブのうちの少なくとも一方は、
前記弁口を形成する弁座と軸孔を形成する軸受とを持つ基部と、
直線方向に沿って往復直動可能に前記軸受の前記軸孔に保持されているステムと、前記ステムに連設され前記弁口を開閉させる弁部と、を持つ弁体と、
前記弁部が前記弁座に着座する方向に前記弁体を付勢する付勢バネと、
回動軸を中心として回動するカムと、前記カムの回動に従動し前記カムによって決まる規定のタイミングで前記ステムの先端部に摺接しつつ前記先端部を開弁方向に押圧することで前記弁体を開弁方向に移動させる接触面と、を持つ弁駆動部材と、を具備し、
前記ステムの前記先端部は、前記接触面に接触する回転体と、前記回転体を回転可能に保持する保持部と、で構成されている低温冷凍装置。 A compressor having a high-pressure side discharge port for discharging high-pressure gas and a low-pressure side suction port for sucking low-pressure gas; a refrigerator that expands refrigerant gas to generate cold; and the discharge on the high-pressure side of the compressor A high-pressure valve that communicates the port with the refrigerator and supplies the high-pressure refrigerant gas discharged from the discharge port of the compressor to the refrigerator by opening the valve; the suction port on the low-pressure side of the compressor; A low-temperature refrigeration apparatus comprising a low-pressure valve for communicating with a refrigerator and returning the refrigerant gas of the refrigerator to the suction port of the compressor by opening the valve;
At least one of the high pressure valve and the low pressure valve is
A base having a valve seat that forms the valve port and a bearing that forms a shaft hole;
A valve body having a stem that is held in the shaft hole of the bearing so as to be capable of reciprocating linearly along a linear direction, and a valve portion that is connected to the stem and opens and closes the valve port;
A biasing spring that biases the valve body in a direction in which the valve portion is seated on the valve seat;
A cam that rotates about a rotation axis, and the distal end portion is pressed in the valve opening direction while being in sliding contact with the distal end portion of the stem at a predetermined timing determined by the cam following the rotation of the cam. A valve drive member having a contact surface for moving the valve body in the valve opening direction;
The tip portion of the stem is a low-temperature refrigeration apparatus including a rotating body that contacts the contact surface and a holding portion that rotatably holds the rotating body. 前記回転体は球体である請求項１記載の低温冷凍装置。   The low-temperature refrigeration apparatus according to claim 1, wherein the rotating body is a sphere. 前記基部は前記回転体の一部を収容する収容部を持ち、
前記収容部には、前記回転体とともに潤滑剤が収容されている請求項１または請求項２に記載の低温冷凍装置。 The base has an accommodating portion for accommodating a part of the rotating body,
The low-temperature refrigeration apparatus according to claim 1 or 2, wherein a lubricant is accommodated together with the rotating body in the accommodating portion. 前記収容部は前記基部の内部に開口する請求項１〜請求項３の何れか一項に記載の低温冷凍装置。   The low-temperature refrigeration apparatus according to any one of claims 1 to 3, wherein the housing portion opens into the base portion.
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KR101668987B1 (en) * 2015-12-14 2016-10-25 현민지브이티 주식회사 Cryocooler having valve opening and closing device and cryopump having the same
JP2017161146A (en) * 2016-03-09 2017-09-14 アイシン精機株式会社 Gm freezer

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KR101668987B1 (en) * 2015-12-14 2016-10-25 현민지브이티 주식회사 Cryocooler having valve opening and closing device and cryopump having the same
JP2017161146A (en) * 2016-03-09 2017-09-14 アイシン精機株式会社 Gm freezer

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