JP2013149340A - Magnetic memory device, head drive control device, and head drive control method - Google Patents

Magnetic memory device, head drive control device, and head drive control method Download PDF

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JP2013149340A
JP2013149340A JP2013040531A JP2013040531A JP2013149340A JP 2013149340 A JP2013149340 A JP 2013149340A JP 2013040531 A JP2013040531 A JP 2013040531A JP 2013040531 A JP2013040531 A JP 2013040531A JP 2013149340 A JP2013149340 A JP 2013149340A
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magnetic field
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oscillation element
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Yoshihiro Shiroishi
芳博 城石
Hiroshi Fukuda
宏 福田
Ikuya Tagawa
育也 田河
Toshihiro Okada
智弘 岡田
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Hitachi Ltd
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PROBLEM TO BE SOLVED: To solve such a problem that, in a magnetic memory device by a conventional micro assist recording method, when a high-frequency magnetic field oscillation element is kept in an operating state in reproducing or seeking information, the information is often lost or rewritten according to external environment.SOLUTION: The magnetic memory device includes: a magnetic recording medium; a microwave assist magnetic recording head having at least recording magnetic poles for generating a recording magnetic field for writing in the magnetic recording medium, and a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field; a magnetic reproduction head for reading information from the magnetic recording medium; signal processing means for processing a signal that the magnetic recording head writes and a signal that the magnetic reproduction head reads; and means for controlling clearance between a high-frequency magnetic field oscillator and the magnetic recording medium. The magnetic high-frequency magnetic field oscillation element is prevented from operating during a time other than a time of recording.

Description

本発明は、磁気記録媒体に対し高周波磁界を印加することにより磁化反転を誘導する機能を有する磁気記録ヘッドを搭載した磁気記憶装置、ヘッド駆動制御装置並びにその制御方法に関するものである。   The present invention relates to a magnetic storage device equipped with a magnetic recording head having a function of inducing magnetization reversal by applying a high-frequency magnetic field to a magnetic recording medium, a head drive control device, and a control method therefor.

インターネット環境の進化、クラウドコンピューティングの浸透などによるデータセンタの増設などにより、生成される情報量が近年急増している。記録密度が最も高く、ビットコストに優れた磁気ディスク装置(ＨＤＤ)などの磁気記憶装置が”ビッグデータ時代”のストレージの主役であることは間違いない。このためには、磁気記憶装置の大容量化、それを支える高密度化が必須である。   The amount of information generated has increased rapidly in recent years due to the evolution of the Internet environment and the expansion of data centers due to the penetration of cloud computing. There is no doubt that magnetic storage devices such as magnetic disk drives (HDD), which have the highest recording density and excellent bit cost, are the main players in storage in the “big data era”. For this purpose, it is essential to increase the capacity of the magnetic storage device and increase the density to support it.

高密度化の基本はスケーリング則であって、磁気ヘッドのトラック幅、ヘッド・媒体間のスペーシング、媒体の結晶粒などを小さくする事が必須である。しかし媒体の結晶粒を小さくすると、磁化状態を保とうとする異方性エネルギーが小さくなり、熱擾乱により、記録された磁化状態が乱されやすくなる。この現象は超常磁性効果と呼ばれる。このため、非特許文献１に記載されているように、１Ｔｂ／ｉｎ２程度の時代になると現状技術の単なる延長では実用限界の壁があるとされる。これは、超常磁性限界、トリレンマ(trilemma)などと呼ばれる。 The basis of high density is a scaling rule, and it is essential to reduce the track width of the magnetic head, the spacing between the head and the medium, the crystal grains of the medium, and the like. However, if the crystal grains of the medium are reduced, the anisotropic energy for maintaining the magnetization state is reduced, and the recorded magnetization state is easily disturbed by thermal disturbance. This phenomenon is called the superparamagnetic effect. For this reason, as described in Non-Patent Document 1, in the era of about 1 Tb / in 2 , it is said that there is a practical limit wall by simply extending the current technology. This is called the superparamagnetic limit, trilemma, etc.

高密度化のためにはこれを越える技術を開発することが最大の課題であり、これに対して特開平7−244801号公報(特許文献１)では、外部に設けた高周波源を磁気ヘッドの動きに追従させることで、磁気共鳴条件を満たす高周波磁界を磁気記録媒体に供給し、磁気記録媒体のスピンが高周波磁界のエネルギーを吸収して保磁力が実効的に低下することを利用して、媒体の温度を事実上上昇させることなく、高保磁力媒体にも低磁界で書き込みが行えるスピン加熱記録方法が提案されていた。   In order to increase the density, it is the greatest challenge to develop a technology that exceeds this. In contrast, in Japanese Patent Application Laid-Open No. 7-244801 (Patent Document 1), a high-frequency source provided outside is used as a magnetic head. By following the movement, a high-frequency magnetic field that satisfies the magnetic resonance condition is supplied to the magnetic recording medium, and the coercive force is effectively reduced by the spin of the magnetic recording medium absorbing the energy of the high-frequency magnetic field, There has been proposed a spin heating recording method capable of writing on a high coercive force medium with a low magnetic field without actually increasing the temperature of the medium.

このようなスピン加熱記録方法では、磁気共鳴条件を満たす周波数範囲にパワーが集中した高周波電磁界を加えられるので、伝導電子のプラズマ振動や格子振動などの、スピン以外の内部自由度をあまり励起することなく、スピンのみを選択的に励起、すなわちスピン加熱することができ、一般の加熱のように媒体全体の温度が上昇することはないとされる。このようにマイクロ波帯の高周波磁界を磁気記録媒体に印加し、磁気共鳴現象を利用して磁気記録をおこなう方法は、マイクロ波アシスト磁気記録方法(ＭＡＭＲ：Microwave Assisted Magnetic Recording)と呼ばれる(非特許文献１)。   In such a spin heating recording method, a high-frequency electromagnetic field concentrated in a frequency range satisfying the magnetic resonance condition can be applied, so that internal degrees of freedom other than spin, such as plasma vibration and lattice vibration of conduction electrons, are excited much. Therefore, only the spin can be selectively excited, that is, spin-heated, and the temperature of the entire medium is not increased unlike general heating. A method of applying a high frequency magnetic field in the microwave band to a magnetic recording medium and performing magnetic recording using a magnetic resonance phenomenon is called a microwave assisted magnetic recording (MAMR) (non-patented). Reference 1).

また、高周波磁界を利用する別の方法として、磁気記録層の一部分又はこの一部分の近傍に高周波磁界を印加して渦電流を発生させることによってこの一部分を加熱し、この一部分の保磁力を一時的に低下させた状態にした上で、この一部分の少なくとも一部に書き込み磁界を印加して、磁気記録媒体に書き込みを行う熱アシスト磁気記録方法が特開2008−34004号公報 (特許文献２)も開示されていた。更に、この熱アシスト磁気記録方法において簡便にエネルギーを照射する方法として、特開2005−285242号公報(特許文献３)には、高周波発振器として少なくとも２つの磁性薄膜を備えたスピントルク型もしくはスピン共鳴型の微小スピン波発生素子が開示されている。   Another method using a high-frequency magnetic field is to apply a high-frequency magnetic field to a part of the magnetic recording layer or in the vicinity of this part to generate an eddy current, thereby heating this part, and temporarily adjusting the coercive force of this part. Japanese Patent Application Laid-Open No. 2008-34004 (Patent Document 2) discloses a thermally assisted magnetic recording method in which a writing magnetic field is applied to at least a part of this part and writing is performed on the magnetic recording medium. It was disclosed. Furthermore, as a method of simply irradiating energy in this thermally assisted magnetic recording method, Japanese Patent Application Laid-Open No. 2005-285242 (Patent Document 3) discloses a spin torque type or spin resonance method including at least two magnetic thin films as a high frequency oscillator. A type of micro spin wave generating element is disclosed.

近年、スピントルクによってスピンを高速回転して高周波磁界を発生する、高周波磁界発生層 ＦＧＬ(Field Generation Layer)を利用した微小構造の実用的なスピントルク型高周波発振素子(ＳＴＯ：Spin Torque Oscillator)が非特許文献２及び米国特許7616412B2（特許文献８）で提案されている。次いで、非特許文献３では、同種の構造の高周波発振素子ＳＴＯを垂直磁気ヘッドの主磁極に隣接して配置し、ＳＴＯからのマイクロ波帯域の高周波磁界で媒体磁化の才差運動を励起し、スウィッチング磁界を下げながら磁気異方性の大きな磁気記録媒体に情報を磁気記録し高密度化を図るマイクロ波アシスト記録方法が開示されている。   In recent years, a practical spin torque type high-frequency oscillation device (STO: Spin Torque Oscillator) using a high-frequency magnetic field generation layer FGL (Field Generation Layer) that generates a high-frequency magnetic field by rotating a spin at high speed by spin torque has been developed. Non-patent document 2 and US Pat. No. 7616412B2 (patent document 8) propose. Next, in Non-Patent Document 3, a high-frequency oscillation element STO having the same type of structure is arranged adjacent to the main magnetic pole of the perpendicular magnetic head, and the precession motion of the medium magnetization is excited by a high-frequency magnetic field in the microwave band from the STO. A microwave assisted recording method has been disclosed in which information is magnetically recorded on a magnetic recording medium having a large magnetic anisotropy while the switching magnetic field is lowered to increase the density.

更に、特許第4255869号(特許文献４)では、高周波磁界発振素子から、磁化反転させたい磁気記録媒体の磁化の才差運動方向と同じ方向に回転する高周波磁界を、記録磁界極性に応じて発生せしめることで、磁化反転をより効率良く誘起する方法も開示された。これらにより、マイクロ波アシスト記録方法の実用化に向けた研究開発が近年急速に加速されるようになり、特開2011−113621号公報（特許文献５）では、本方法の実用化に向け、マイクロ波アシスト記録に必要な高周波発振素子の信頼性を確保すると共にその発振を確実に維持するために、ライトゲートの入力に応じて、記録磁界が印加されている状態で一定有効時間だけ定常レベルより高レベルの高周波発振素子駆動信号を供給するヘッド駆動制御装置も開示されている。   Furthermore, in Japanese Patent No. 4255869 (Patent Document 4), a high frequency magnetic field rotating in the same direction as the direction of the magnetization precession of the magnetic recording medium to be reversed is generated from the high frequency magnetic field oscillation element according to the recording magnetic field polarity. A method of inducing the magnetization reversal more efficiently by causing it to break is also disclosed. As a result, research and development for practical application of the microwave-assisted recording method has been rapidly accelerated in recent years. In Japanese Patent Application Laid-Open No. 2011-113621 (Patent Document 5), there is a In order to ensure the reliability of the high-frequency oscillation element necessary for wave assist recording and to maintain its oscillation reliably, the recording magnetic field is applied according to the input of the write gate from the steady level for a certain effective time. A head drive control device that supplies a high-level high-frequency oscillation element drive signal is also disclosed.

特開平７−２４４８０１号公報JP-A-7-244801 特開２００８−３４００４号公報JP 2008-34004 A 特開２００５−２８５２４２号公報JP 2005-285242 A 特許第４２５５８６９号Japanese Patent No. 4255869 特開２０１１−１１３６２１号公報JP 2011-113621 A 特開２００６−１１４１５９号公報JP 2006-114159 A 特開２００７−２２０２３２号公報JP 2007-220232 A 米国特許７６１６４１２Ｂ２US Pat. No. 7616412B2

Y. Shiroishi,et al,”Future Options for HDD Storage”, IEEE Trans. Magn., Vol.45, no.10, pp3816−3822 (2009)Y. Shiroishi, et al, “Future Options for HDD Storage”, IEEE Trans. Magn., Vol.45, no.10, pp3816-3822 (2009) X.Zhu and J.−G.Zhu, “Bias−field−free microwave oscillator driven by perpendicularly polarized spin current”, IEEE Trans. Magn., vol.42, pp.2670−2672, 2006.X.Zhu and J.−G.Zhu, “Bias−field−free microwave oscillator driven by perpendicularly polarized spin current”, IEEE Trans. Magn., Vol.42, pp.2670−2672, 2006. J−G.Zhu, X.Zhu, and Y.Tang,”Microwave Assisted Magnetic Recording”, IEEE trans. Magn., Vol44, no.1,pp125−131(2008)J-G.Zhu, X.Zhu, and Y.Tang, “Microwave Assisted Magnetic Recording”, IEEE trans. Magn., Vol44, no.1, pp125-131 (2008) S. Okamoto, M. Igarashi, N. Kikuchi, and O. Kitakami: “Microwave assisted switching mechanism and its stable switching limit”, J. Appl. Phys. 107, pp123914−7 (2010)S. Okamoto, M. Igarashi, N. Kikuchi, and O. Kitakami: “Microwave assisted switching mechanism and its stable switching limit”, J. Appl. Phys. 107, pp123914-7 (2010)

しかしながら、特許文献１、４や非特許文献２、３では、スピン注入によるスピントルク効果を用いた新構造の高周波発生素子を実際の磁気記憶装置に適用し、マイクロ波アシスト記録方法として記録再生を行い適切に使いこなすための詳細なフローは十分に検討されてはおらず、問題点も含めて開示もされていなかった。この状況は特許文献２、３などのように、高周波磁界を用いて加熱する熱アシスト方法でも同様であった。そこで本発明者らは、高周波発生素子を搭載した磁気記憶装置を従来装置と同様の種々の環境条件で鋭意検討、試験をしたところ、高記録密度化は達成できるものの、実用化に向けて以下の大きな課題があることが判明した。   However, in Patent Documents 1 and 4 and Non-Patent Documents 2 and 3, a high-frequency generating element having a new structure using a spin torque effect by spin injection is applied to an actual magnetic storage device, and recording / reproduction is performed as a microwave-assisted recording method. The detailed flow for performing and using it properly has not been fully examined and has not been disclosed including problems. This situation was the same in the heat assist method of heating using a high-frequency magnetic field as in Patent Documents 2 and 3. Therefore, the present inventors diligently examined and tested a magnetic storage device equipped with a high-frequency generating element under various environmental conditions similar to those of conventional devices, but although high recording density could be achieved, It turns out that there is a big problem.

最大の課題は、特開2006−114159号公報(特許文献６)記載のような従来技術の延長で磁気ヘッドに十分な漏洩磁界対策を施したにも拘らず、外部環境によっては情報再生時やシーク時に、記録ヘッドを非動作状態にしておいても、情報が消失、もしくは書き換えられてしまうことである。この根本原因について発明者らはＬＬＧ(Landau−Lifshitz−Gilbert)シミュレーション、及び実験の両面から鋭意検討を行い、本現象は、従来の記録方法では十分対策できていた外部機器や磁気記録媒体におけるサーボ情報、記録情報などからの微小な浮遊磁界でも高周波磁界発振素子に大きな影響を与え、情報再生もしくはシーク時のような非記録動作時にも、高周波磁界発振素子が磁気記録媒体に作用してしまうことに起因することが明らかになった。   The biggest problem is that, despite the extension of the prior art described in Japanese Patent Laid-Open No. 2006-114159 (Patent Document 6), the magnetic head has been provided with sufficient leakage magnetic field countermeasures, depending on the external environment, Even when the recording head is in the non-operating state at the time of seek, information is lost or rewritten. The inventors have studied the root cause from the viewpoints of both LLG (Landau-Lifshitz-Gilbert) simulations and experiments, and this phenomenon is caused by servos in external devices and magnetic recording media that have been adequately addressed by conventional recording methods. Even a small stray magnetic field from information, recorded information, etc. has a large effect on the high-frequency magnetic field oscillation element, and the high-frequency magnetic field oscillation element acts on the magnetic recording medium even during non-recording operations such as information reproduction or seeking. It became clear that it was caused by.

更に、量産に向けた試作時に、新構造の高周波磁界発生素子を、磁気記憶装置に組み込み、装置を動作させたときの磁気記憶装置の製造歩留りが従来ヘッドに比べて極端に低いという課題があることも判明した。ＬＬＧシミュレーションを駆使した発明者らの検討によれば、これは、スピントルク効果を用いた高周波発生素子の高周波磁界強度と発振周波数には強い素子寸法依存性があり、更に、これら発振特性に強い影響を与える記録ヘッド磁界においても、記録電流にたいするその応答時間がばらつくため、従来ヘッド以上の磁区構造制御技術と加工精度が要求されること、更に高周波磁界による媒体磁化の才差運動の動的励起過程は極めて複雑であり、アシスト効果自身も磁気記録媒体や磁気ヘッドの製造プロセスのバラツキや、物性常数の温度依存性に強く依存すること、に起因することが明らかになった。   Furthermore, when a prototype for mass production is used, a high-frequency magnetic field generating element having a new structure is incorporated in the magnetic storage device, and the manufacturing yield of the magnetic storage device when the device is operated is extremely low compared to the conventional head. It was also found out. According to the study by the inventors using LLG simulation, this is because the high-frequency magnetic field strength and the oscillation frequency of the high-frequency generating element using the spin torque effect have a strong element size dependence, and further, the oscillation characteristics are strong. Even in the influence of the recording head magnetic field, the response time to the recording current varies, so the magnetic domain structure control technology and processing accuracy are required to be higher than those of conventional heads. The process is extremely complicated, and it has been clarified that the assist effect itself is caused by variations in the manufacturing process of the magnetic recording medium and the magnetic head and the temperature dependence of physical constants.

以上のように、マイクロ波アシスト記録方法を情報記憶装置に適用する為には、消去や、誤記録（記録状態が記録時とは異なる状態に変異すること）の問題と、本方法による磁気記憶装置の製造歩留が特に低いという問題を克服することが最大の課題であることが明らかになった。この課題の本質は上述のように、高周波発振素子により媒体磁化の才差運動を励起する過程が、非常に複雑な動的確率現象であることに起因し、従来技術の枠をはるかに超えるプロセス技術が要求されてしまうことにある。従って、マイクロ波アシスト記録方法の実用化には、この本質を踏まえたうえで、装置レベルでの対策が必須であり、本発明が解決しようとする課題である。即ち、本発明の目的は、高い信頼性、製造歩留り、記録密度とを有する大容量・高信頼性の磁気記憶装置を提供することである。   As described above, in order to apply the microwave assisted recording method to the information storage device, the problem of erasure or erroneous recording (the recording state changes to a state different from the recording state) and the magnetic storage by this method It has become clear that overcoming the problem of particularly low device manufacturing yield is the biggest challenge. As described above, the essence of this task is a process that goes far beyond the prior art due to the fact that the process of exciting the precession of medium magnetization by a high-frequency oscillator is a very complex dynamic probability phenomenon. The technology is required. Therefore, in order to put the microwave-assisted recording method into practical use, it is necessary to take measures at the apparatus level in view of this essence, which is a problem to be solved by the present invention. That is, an object of the present invention is to provide a large capacity and high reliability magnetic storage device having high reliability, manufacturing yield, and recording density.

本願は上記課題を解決して、目的を達成する手段を複数含んでいるが、その一例を挙げるならば、磁気記録媒体と、該磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子とを少なくとも備えるマイクロ波アシスト磁気記録ヘッドと、磁気記録媒体から情報を読み取る磁気再生ヘッドと、前記磁気記録ヘッドの記録動作、前記磁気再生ヘッド再生動作を制御・処理する手段、および該高周波磁界発振素子と該磁気記録媒体とのクリアランス(clearance、隙間、スペーシング)を制御する手段とを備える磁気記憶装置である。本発明の磁気記憶装置において、少なくとも情報再生の主要時（実質的に信号を読み取っている時間）に、前記高周波磁界発振素子に動作時と逆極性の電流を通電する、もしくは電流を全く通電しないなどの手段で、記録時以外には前記高周波磁界発振素子を動作させないようにしたことを特徴とする。   The present application solves the above problems and includes a plurality of means for achieving the object. To give an example, a magnetic recording medium, a recording magnetic pole for generating a recording magnetic field for writing to the magnetic recording medium, Controls the microwave-assisted magnetic recording head including at least a high-frequency magnetic field generating element that generates a high-frequency magnetic field, a magnetic reproducing head that reads information from a magnetic recording medium, the recording operation of the magnetic recording head, and the magnetic reproducing head reproducing operation. And a means for controlling a clearance between the high-frequency magnetic field oscillating element and the magnetic recording medium. In the magnetic storage device of the present invention, at least at the main time of information reproduction (substantially the time when the signal is read), the high-frequency magnetic field oscillation element is supplied with a current having a polarity opposite to that during operation or no current is supplied. For example, the high-frequency magnetic field oscillation element is not operated except during recording.

なお、装置の記録動作への切り替え時には、主磁極への記録電流通電前に前記高周波磁界発振素子への通電が完了していることが好ましく、この記録動作時に、記録磁極への記録電流、高周波発振素子への動作電流、ならびにクリアランス制御手段の調整を装置製造時に、更には装置動作時にも実施することがより好ましい。   When switching to the recording operation of the apparatus, it is preferable that the energization of the high-frequency magnetic field oscillating element is completed before energizing the recording current to the main magnetic pole. It is more preferable to adjust the operating current to the oscillating element and the clearance control means at the time of manufacturing the apparatus, and even during the operation of the apparatus.

本発明は、記録時以外は高周波磁界発振素子によるマイクロ波アシスト効果を抑制することで、マイクロ波アシスト磁気記録方法における情報消去、誤記録などの確率を従来の垂直記録方法よりも小さくし、更に、磁気記録ヘッド励磁電流の通電よりも前、すなわち記録磁界が印加される前に、マイクロ波アシスト素子に予め駆動電流を通電しておき、更に、そのタイミングを装置製造時、より好ましくは装置動作時にも調整することで、高い信頼性、製造歩留り、記録密度とを有する大容量・高信頼性の磁気記憶装置を提供することができる。   The present invention suppresses the microwave assist effect by the high-frequency magnetic field oscillation element except during recording, thereby reducing the probability of information erasure and erroneous recording in the microwave assisted magnetic recording method as compared with the conventional perpendicular recording method. Before the magnetic recording head excitation current is applied, that is, before the recording magnetic field is applied, a drive current is supplied to the microwave assist element in advance, and the timing thereof is more preferably set when the apparatus is manufactured. By adjusting at times, it is possible to provide a large capacity and high reliability magnetic storage device having high reliability, manufacturing yield, and recording density.

本発明による磁気ヘッドと磁気記録媒体の概念図の例である。It is an example of the conceptual diagram of the magnetic head and magnetic recording medium by this invention. 高周波磁界発生素子の各層の磁化状態を示す。The magnetization state of each layer of the high frequency magnetic field generating element is shown. 磁気ヘッド励磁電流と高周波磁界との関係の一例を示す。An example of the relationship between a magnetic head excitation current and a high frequency magnetic field is shown. 本発明によるヘッド駆動制御装置および磁気記憶装置の概念図の例である。It is an example of a conceptual diagram of a head drive control device and a magnetic storage device according to the present invention. 本発明による磁気ヘッドと磁気記録媒体の実施例である。1 is an example of a magnetic head and a magnetic recording medium according to the present invention. 本発明によるマイクロ波アシスト記録効果とアシスト効果抑制の例である。It is an example of the microwave assist recording effect by this invention, and assist effect suppression. 本発明によるパラメータ制御のフローチャートの例である。It is an example of the flowchart of parameter control by this invention. 本発明の実施例図５により決定されたパラメータ制御の概念図の例である。FIG. 6 is an example of a conceptual diagram of parameter control determined by FIG. 5 according to an embodiment of the present invention. 本発明によるパラメータ制御の別のフローチャートの例である。It is an example of another flowchart of parameter control by this invention. 本発明の実施例図７により決定されたパラメータ制御の概念図の例である。FIG. 8 is an example of a conceptual diagram of parameter control determined by FIG. 7 according to an embodiment of the present invention. 本発明により決定されたパラメータ制御の別の概念図の例である。It is an example of another conceptual diagram of the parameter control determined by this invention. 本発明による高周波発振素子電流動作タイミングの設定フローチャートの例である。It is an example of the setting flowchart of the high frequency oscillation element electric current operation timing by this invention. 本発明実施例図１０により決定されたタイミングの設定の概念図の例である。FIG. 11 is an example of a conceptual diagram of timing setting determined according to the embodiment of the present invention.

以下、実施例について図面を用いて説明する。   Hereinafter, embodiments will be described with reference to the drawings.

図１Ａに本発明の磁気記憶装置の構成例の一部である磁気記録再生ヘッドの概略図を示す。磁気記録再生ヘッドは、磁気記録媒体１３０上をクリアランス１０１で１００方向に走行するスライダ１５０上に形成された、再生ヘッド部１１０、記録ヘッド部１２０、および特許第4255869号（特許文献４）記載のような、クリアランス制御用の熱膨張素子部ＴＦＣ(Thermal Flying Height Controller)１０２とから主に構成される。ここでＴＦＣ１０２は、ＮｉＦｅ合金などの高比抵抗、高熱膨張材料からなり、アルミナ膜などで絶縁した、５０〜１５０Ω程度の発熱抵抗体薄膜で構成される。ヘッド保護層１５１はＣＶＤ−Ｃ、ＦＣＡＣ(Filtered Cathodic Arc Carbon)などからなり、底面１５２は磁気記録再生ヘッドの浮上面(ＡＢＳ:Air Baring Surface)である。スライダ１５０は、特開2007−220232号公報(特許文献７)記載のように、磁気ヘッド磁極部の浮上量が磁気記録媒体全周に亘って１０ｎｍ程度になるように、Ａｌ２Ｏ３−ＴｉＣセラミックスのＡＢＳ面に負圧が発生するようにエッチング加工を施したもので、大きさはフェムト(femto)型で０．８５ｍｍ×０．７ｍｍ×０．２３ｍｍ程度である。本実施例では、磁気記録再生ヘッドは再生ヘッド部１１０が先頭で記録ヘッド部１２０が後方になる向きに磁気記録媒体１３０が相対的に移動する構成としているが、逆構成であったとしても良く、またヘッド保護層はなくても良い。 FIG. 1A shows a schematic diagram of a magnetic recording / reproducing head which is a part of a configuration example of a magnetic storage device of the present invention. The magnetic recording / reproducing head includes a reproducing head unit 110, a recording head unit 120, and Japanese Patent No. 4255869 (Patent Document 4), which are formed on a slider 150 that travels on a magnetic recording medium 130 with a clearance 101 in 100 directions. Such a thermal expansion element part TFC (Thermal Flying Height Controller) 102 for clearance control is mainly constituted. Here, the TFC 102 is made of a high resistivity, high thermal expansion material such as a NiFe alloy, and is composed of a heating resistor thin film of about 50 to 150Ω insulated by an alumina film or the like. The head protective layer 151 is made of CVD-C, FCAC (Filtered Cathodic Arc Carbon) or the like, and the bottom surface 152 is an air bearing surface (ABS) of the magnetic recording / reproducing head. As described in Japanese Patent Laid-Open No. 2007-220232 (Patent Document 7), the slider 150 is made of Al 2 O 3 —TiC so that the flying height of the magnetic head magnetic pole portion is about 10 nm over the entire circumference of the magnetic recording medium. Etching is performed so that a negative pressure is generated on the ABS surface of the ceramic. The size is a femto type and is about 0.85 mm × 0.7 mm × 0.23 mm. In this embodiment, the magnetic recording / reproducing head has a configuration in which the magnetic recording medium 130 is relatively moved in a direction in which the reproducing head unit 110 is at the head and the recording head unit 120 is at the rear. In addition, the head protective layer may be omitted.

再生ヘッド部１１０は、シールド層１１１、再生センサ素子１１２、上部磁気シールド１１３と下部磁気シールド１１４とからなる構成である。再生センサ素子１１２は媒体からの信号を再生する役割を担うもので、その構成としては、ＴＭＲ(Tunneling Magneto−Resistive)効果、ＣＰＰ(Current Perpendicular to Plane)−ＧＭＲ(Giant Magnetro−Resistance)効果、ないしはＥＭＲ(Extraordinary Magneto−Resistive)効果を有するもの、更にはＳＴＯ(Spin Torque Oscillator)効果を応用したものや、いわゆる差動型であっても良い。その素子幅ＴＷｒは、目標とする記録磁界や、記録密度に応じて設計及び、加工され、その大きさは８０ｎｍ〜５ｎｍ程度である。なお、同図で出力の取り出し端子は省略して記載してある。 The reproducing head unit 110 is configured by a shield layer 111, a reproducing sensor element 112, an upper magnetic shield 113, and a lower magnetic shield 114. The reproduction sensor element 112 plays a role of reproducing a signal from a medium, and includes a TMR (Tunneling Magneto-Resistive) effect, a CPP (Current Perpendicular to Plane) -GMR (Giant Magnetro-Resistance) effect, or Those having an EMR (Extraordinary Magneto-Resistive) effect, those applying an STO (Spin Torque Oscillator) effect, or a so-called differential type may be used. Its element width T Wr, the recording magnetic field and a target, the design and according to the recording density, is processed, its size is approximately 80Nm～5nm. In the figure, the output output terminal is omitted.

記録ヘッド部１２０は高周波磁界１４５を発生するための高周波磁界発振素子部１４０、記録ヘッド磁界１４５を発生するための記録磁極（主磁極）１２２、高周波磁界発振素子１４０の磁化回転方向などを制御するための補助磁極１２４及び、記録磁極を励磁するためのＣｕなどからなるコイル１２３で構成される。なお、磁気ギャップ１２５は、記録磁極１２２と補助磁極１２４との間に設けられ、発振制御磁界１２６は高周波磁界発振素子１４０の磁化方向及び磁化回転方向などを制御する。   The recording head unit 120 controls the high-frequency magnetic field oscillation element unit 140 for generating the high-frequency magnetic field 145, the recording magnetic pole (main magnetic pole) 122 for generating the recording head magnetic field 145, the magnetization rotation direction of the high-frequency magnetic field oscillation element 140, and the like. And a coil 123 made of Cu or the like for exciting the recording magnetic pole. The magnetic gap 125 is provided between the recording magnetic pole 122 and the auxiliary magnetic pole 124, and the oscillation control magnetic field 126 controls the magnetization direction and the magnetization rotation direction of the high-frequency magnetic field oscillation element 140.

ここで記録磁極１２２は、ＦｅＣｏＮｉ、ＣｏＦｅ合金などの高飽和磁束軟磁性膜をメッキ法もしくはスパッタ法などで製膜し、ベベル角(bevel angle)が１０〜２０度の台形状であって、ＡＢＳ面に近づくにつれその断面積が小さくなるように形成される。なお台形状の記録磁極の広い側の記録素子の幅ＴＷＷは、目標とする記録磁界や、記録密度に応じて設計及び、加工され、その大きさは１６０ｎｍ〜１０ｎｍ程度である。また、本発明における記録磁極１２２は、補助磁極１２４も含めてＣｏＮｉＦｅ合金や、ＮｉＦｅ合金などの軟磁性合金薄膜で形成され、非磁性層を用いてその周囲を囲った、いわゆるＷＡＳ構造(Wrap Around Structure)とすることが好ましい。 Here, the recording magnetic pole 122 is formed of a high saturation magnetic flux soft magnetic film such as FeCoNi, CoFe alloy or the like by a plating method or a sputtering method, has a trapezoidal shape with a bevel angle of 10 to 20 degrees, and has an ABS. It is formed so that its cross-sectional area decreases as it approaches the surface. Incidentally base width T WW broad side of the recording element of the recording magnetic pole shape, the recording magnetic field and a target, the design and according to the recording density, is processed, its size is approximately 160Nm～10nm. In addition, the recording magnetic pole 122 in the present invention is formed of a soft magnetic alloy thin film such as a CoNiFe alloy or NiFe alloy including the auxiliary magnetic pole 124, and surrounds the periphery using a nonmagnetic layer (Wrap Around (Wrap Around). Structure) is preferable.

高周波発振素子部１４０は、ＦｅＣｏ、ＮｉＦｅなどの軟磁性合金、ＣｏＰｔ、ＣｏＣｒなどの硬磁性合金、Ｆｅ０．４Ｃｏ０．６、Ｆｅ０．０１Ｃｏ０．９９、Ｃｏ０．８Ｉｒ０．２などの負の垂直磁気異方性を有する磁性合金、ＣｏＦｅＧｅ、ＣｏＭｎＧｅ、ＣｏＦｅＡｌ、ＣｏＦｅＳｉ、ＣｏＭｎＳｉなどのホイスラー合金、ＴｂＦｅＣｏなどのＲｅ−ＴＭ系アルモファス系合金、あるいはＣｏ／Ｆｅ、Ｃｏ／Ｉｒなどの磁性人工格子などからなる高周波磁界発生層ＦＧＬ１４１と、Ａｕ、Ａｇ、Ｐｔ、Ｔａ、Ｉｒ、Ａｌ、Ｓｉ、Ｇｅ、Ｔｉ、Ｃｕなどの非磁性伝導材料などからなる中間層１４２と、更に、高周波磁界発生層ＦＧＬにスピントルクを与えるためのスピン注入固定層１４３などから構成される。 The high-frequency oscillation element unit 140 includes soft magnetic alloys such as FeCo and NiFe, hard magnetic alloys such as CoPt and CoCr, Fe 0.4 Co 0.6 , Fe 0.01 Co 0.99 , Co 0.8 Ir 0. Magnetic alloys having negative perpendicular magnetic anisotropy such as 2 , Heusler alloys such as CoFeGe, CoMnGe, CoFeAl, CoFeSi, and CoMnSi, Re-TM-based amorphous alloys such as TbFeCo, or Co / Fe and Co / Ir A high-frequency magnetic field generating layer FGL141 made of a magnetic artificial lattice, an intermediate layer 142 made of a nonmagnetic conductive material such as Au, Ag, Pt, Ta, Ir, Al, Si, Ge, Ti, Cu, and the like, and a high-frequency magnetic field A spin injection pinned layer 143 for applying spin torque to the generation layer FGL is formed.

ここで、ＦＧＬ１４１の幅ＷＦＧＬは、目標とする記録磁界や、記録密度に応じて設計及び、加工され、その大きさは１５０ｎｍ〜５ｎｍ程度である。また、非磁性中間層１４２の膜厚は、高いスピン注入効率を得るために、その膜厚を０．２〜４ｎｍの程度とすることが好ましく、スピン注入固定層１４３としては、垂直磁気異方性を持った材料を用いることによりＦＧＬの発振を安定させることが出来るので、Ｃｏ／Ｐｔ、Ｃｏ／Ｎｉ、Ｃｏ／Ｐｄ、ＣｏＣｒＴａ／Ｐｄなどの人工磁性材料を用いることが好ましい。更に、ＦＧＬ１４１の高周波磁化回転を安定化させるため、スピン注入固定層１４３と同様の構成の回転ガイド強磁性層をＦＧＬ１４１に隣接して設けても良い。また、スピン注入層１４３とＦＧＬ１４１の積層順は逆にしても良い。なお、スピンは直流電源１４４からＦＧＬ１４１などに供給されるが、図１Ａではその構造を示す為に電流の供給端子は省略して簡略化して記載してある。 Here, the width W FGL of the FGL 141 is designed and processed according to the target recording magnetic field and recording density, and the size is about 150 nm to 5 nm. The nonmagnetic intermediate layer 142 preferably has a thickness of about 0.2 to 4 nm in order to obtain high spin injection efficiency. The spin injection pinned layer 143 has a perpendicular magnetic anisotropy. Since the FGL oscillation can be stabilized by using a material having a property, it is preferable to use an artificial magnetic material such as Co / Pt, Co / Ni, Co / Pd, or CoCrTa / Pd. Further, in order to stabilize the high-frequency magnetization rotation of the FGL 141, a rotation guide ferromagnetic layer having the same configuration as the spin injection pinned layer 143 may be provided adjacent to the FGL 141. Further, the stacking order of the spin injection layer 143 and the FGL 141 may be reversed. Note that the spin is supplied from the DC power supply 144 to the FGL 141 and the like, but in FIG. 1A, the current supply terminal is omitted for simplification to show the structure.

図１Ｂに、磁気記録媒体１３０に記録を行う時の高周波磁界発生素子１４０の各層の磁化状態を模式的に示す。ここで、矢印１４６、１４７は、それぞれスピン注入固定層１４３、高周波磁界発生層（ＦＧＬ）１４１の磁化、矢印１４８は高周波磁界発生層（ＦＧＬ）の磁化１４７の回転方向、矢印１４９は高周波発生素子に電源１４４から供給される直流電流である。   FIG. 1B schematically shows the magnetization state of each layer of the high-frequency magnetic field generating element 140 when recording on the magnetic recording medium 130. Here, arrows 146 and 147 indicate the magnetization of the spin injection pinned layer 143 and the high-frequency magnetic field generation layer (FGL) 141, arrow 148 indicates the rotation direction of the magnetization 147 of the high-frequency magnetic field generation layer (FGL), and arrow 149 indicates the high-frequency generation element. Is a direct current supplied from the power supply 144.

磁気記録媒体１３０の磁性層１３３、１３４に記録された上向きの磁化１３７を下向きに書き換える場合の概念図を図１Ｂの（ｂ−１）に示す。この場合には、記録磁極１２２から、図１Ａで下向きの記録磁界１２１ａが発生するように記録ヘッドのコイル１２３に記録電流を通電する。このとき、記録磁極１２２からの磁界の一部１２６が補助磁極１２４に向けてギャップ部１２５にも発生する。図１Ａに示すように、スピン注入固定層１４３及び、高周波磁界発生層（ＦＧＬ）１４１の磁化を右向きに配向させるのに十分強い発振制御磁界１２６ａが発生するように、予め記録磁極１２２、補助磁極１２４、磁気ギャップ１２５などの構造や、材料、更には高周波発生素子１４０の構造や、材料などを設計しておく。   FIG. 1B (b-1) shows a conceptual diagram when the upward magnetization 137 recorded in the magnetic layers 133 and 134 of the magnetic recording medium 130 is rewritten downward. In this case, a recording current is supplied from the recording magnetic pole 122 to the coil 123 of the recording head so that the downward recording magnetic field 121a in FIG. 1A is generated. At this time, a portion 126 of the magnetic field from the recording magnetic pole 122 is also generated in the gap portion 125 toward the auxiliary magnetic pole 124. As shown in FIG. 1A, the recording magnetic pole 122 and the auxiliary magnetic pole are preliminarily generated so as to generate an oscillation control magnetic field 126a that is strong enough to orient the magnetizations of the spin injection fixed layer 143 and the high frequency magnetic field generating layer (FGL) 141 in the right direction. 124, the magnetic gap 125, and other structures and materials, as well as the structure and materials of the high-frequency generator 140 are designed.

このように設定しておくことで、図１Ｂの（ｂ−１）に示すように、高周波磁界発生層１４１の磁化１４７ａが反時計回り（矢印１４８ａの方向）に高速回転し、磁気記録媒体１３０の上向きの記録磁化１３７が反時計回りに才差運動するのをアシストする性質の高周波磁界を発生する。最終的に、この高周波磁界１４５のアシスト効果に助けられ、下向きの記録磁界１２１ａによって磁気記録媒体１３０の上向き磁化１３７は下向きに反転し、情報の書き換えが行われることになる。なおここで、上記の発振周波数は発振制御磁界１２６ａとＦＧＬ１４１の異方性磁界の和によって決まる。このため、例えば軟磁性材料や負の垂直磁気異方性材料でＦＧＬ１４１を構成した場合には、その異方性磁界は小さいので、ＦＧＬ１４１の発振周波数は発振制御磁界１２６ａの強さに応じて決まることになる。なお記録ヘッドからの発振制御磁界は、記録ヘッド励磁電流に対して０．１ｎｓ程度の遅れがある。この遅延時間は、磁気ヘッドの製造ばらつき、環境温度などに応じて変化するので、後で述べるように、これらを補償することが望ましい。   With this setting, the magnetization 147a of the high-frequency magnetic field generating layer 141 rotates at high speed counterclockwise (in the direction of the arrow 148a) as shown in FIG. A high-frequency magnetic field having a property of assisting the upward recording magnetization 137 to pretend counterclockwise is generated. Finally, with the assistance effect of the high-frequency magnetic field 145, the upward magnetization 137 of the magnetic recording medium 130 is reversed downward by the downward recording magnetic field 121a, and information is rewritten. Here, the oscillation frequency is determined by the sum of the oscillation control magnetic field 126a and the anisotropic magnetic field of the FGL 141. For this reason, for example, when the FGL 141 is made of a soft magnetic material or a negative perpendicular magnetic anisotropic material, the anisotropic magnetic field is small, so the oscillation frequency of the FGL 141 is determined according to the strength of the oscillation control magnetic field 126a. It will be. The oscillation control magnetic field from the recording head has a delay of about 0.1 ns with respect to the recording head excitation current. Since this delay time changes according to the manufacturing variation of the magnetic head, the environmental temperature, etc., it is desirable to compensate for this as described later.

次に、これとは逆に、磁気記録媒体１３０の磁性層１３３，１３４に記録された下向きの磁化１３８を上向きに書き換える場合について、図１Ｂの（ｂ−２）の概念図を用いて説明する。まずスピン注入固定層１４３及びＦＧＬ１４１に、図１Ｂの（ｂ−１）と逆向き（左向き）で強い発振制御磁界１２６ｂを印加し、スピン注入固定層１４３及びＦＧＬ１４１の磁化１４７ｂの向きを、図１Ｂの（ｂ−１）とは逆向き（左向き）になるように高速でスウィッチさせる。この状態になると、ＦＧＬ１４１の磁化１４７ｂはスピン注入固定層１４３から注入されたスピンのエネルギーを吸収し、磁気記録媒体１３０から見て図１Ｂの（ｂ−１）とは逆回転（矢印１４８ｂの方向）で高速に回転することになる。この逆回転のＦＬＧ１４１の磁化１４７ｂからは、図１Ｂの（ｂ−１）とは反対の性質、すなわち下向きの記録磁化１３８の才差運動をアシストする（上向きへの反転をアシストする）性質を有する高周波磁界が発生する。最終的に、この高周波磁界１４５のアシスト効果により、上向きの記録磁界１２１ｂによって、磁気記録媒体１３０の下向き磁化１３８は上向きに反転し、情報の書き換えが行われることになる。   Next, on the contrary, the case where the downward magnetization 138 recorded in the magnetic layers 133 and 134 of the magnetic recording medium 130 is rewritten upward will be described with reference to the conceptual diagram of (b-2) in FIG. 1B. . First, a strong oscillation control magnetic field 126b is applied to the spin injection pinned layer 143 and the FGL 141 in the opposite direction (left direction) to (b-1) in FIG. (B-1) is switched at a high speed so as to be opposite (leftward). In this state, the magnetization 147b of the FGL 141 absorbs the energy of the spin injected from the spin injection pinned layer 143, and reversely rotates (in the direction of the arrow 148b) from (b-1) in FIG. 1B when viewed from the magnetic recording medium 130. ) To rotate at high speed. From the magnetization 147b of the reversely rotated FLG 141, there is a property opposite to (b-1) in FIG. 1B, that is, the property of assisting the precession motion of the downward recording magnetization 138 (assuming the inversion upward). A high frequency magnetic field is generated. Finally, due to the assist effect of the high-frequency magnetic field 145, the downward recording 138 of the magnetic recording medium 130 is reversed upward by the upward recording magnetic field 121b, and information is rewritten.

図１Ｃに、ＬＬＧシミュレーションにより解析した、本発明の上記構造の磁気ヘッドにおける磁気ヘッド励磁電流と高周波磁界との関係の一例を示す。記録電流の極性を変えたときに、そのタイミングと高周波発振周波数との兼ね合いで、０．１ｎｓの時間範囲でＳＴＯの発振波形が若干乱れることもあるが、安定して高周波磁界が発生していることがわかる。一般に、高周波磁界の発振周波数や、強度は、記録電流、又は磁界のスウィッチング後に時間とともに変化する。このため、非特許文献４で議論されているように、磁気ヘッドの構造、材料、磁気記録媒体の材料、製造プロセス、又は構造などを適切に設計し、調整すれば、媒体磁化の才差運動と高周波磁界との同期、及び才差運動の高周波磁界からのエネルギーの吸収、及び媒体スウィッチング磁界の低減が行なわれた、マイクロ波アシスト記録が可能となる。   FIG. 1C shows an example of the relationship between the magnetic head excitation current and the high-frequency magnetic field in the magnetic head having the above-described structure of the present invention, analyzed by LLG simulation. When the polarity of the recording current is changed, the STO oscillation waveform may be slightly disturbed in the time range of 0.1 ns due to the balance between the timing and the high frequency oscillation frequency, but the high frequency magnetic field is stably generated. I understand that. In general, the oscillation frequency and intensity of a high-frequency magnetic field change with time after recording current or magnetic field switching. For this reason, as discussed in Non-Patent Document 4, if the structure, material, magnetic recording medium material, manufacturing process, or structure of the magnetic head is appropriately designed and adjusted, the precession motion of the medium magnetization And high-frequency magnetic field synchronization, energy absorption from the precession high-frequency magnetic field, and medium switching magnetic field reduction are possible.

ＬＬＧシミュレーションによれば、上記の高周波磁界を効率よく発生せしめるためには、ＦＧＬ１４１は、その膜厚を１〜１００ｎｍ、より好ましくは５〜３０ｎｍとし、かつ磁区構造が出来にくく、安定して磁化が回転できるように、その素子幅、素子高さを略等しくすることが好ましいことが判明した。なお、素子寸法が４０〜２０ｎｍ程度以下になると磁区構造の発生が抑制され、強い磁界を印加すれば、軟磁性材料、硬磁性材料、又は負の垂直磁気異方性材料のいずれの材料でも安定して発振するようになることも確認された。このことから、マイクロ波アシスト記録方法は特に高密度記録に適しているといえる。しかしながら、その高周波磁界強度や発振周波数には、強い素子寸法依存性、磁気ヘッドからの発振制御磁界の方向や強度の依存性があることも明らかになった。これらは製造プロセスのばらつきに依るだけでなく、環境温度にも依存する。したがって、マイクロ波アシスト方法の実用化には、磁気ヘッドの加工精度の飛躍的向上とあわせ、ヘッド加工寸法のバラツキや環境条件に依存しにくい装置レベルでの調整法の開発、導入が必須であり、後者については後に詳細に本実施例の中で説明する。   According to the LLG simulation, in order to efficiently generate the above high-frequency magnetic field, the FGL 141 has a film thickness of 1 to 100 nm, more preferably 5 to 30 nm, and it is difficult to form a magnetic domain structure, and the magnetization is stable. It has been found that it is preferable to make the element width and element height substantially equal so that they can rotate. In addition, when the element size is about 40 to 20 nm or less, the occurrence of the magnetic domain structure is suppressed, and if a strong magnetic field is applied, any of the soft magnetic material, the hard magnetic material, and the negative perpendicular magnetic anisotropic material is stable. It was also confirmed that it oscillates. From this, it can be said that the microwave assisted recording method is particularly suitable for high-density recording. However, it has also been clarified that the high-frequency magnetic field strength and the oscillation frequency have a strong element size dependency and a dependency on the direction and strength of the oscillation control magnetic field from the magnetic head. These depend not only on manufacturing process variations, but also on ambient temperature. Therefore, in order to put the microwave assist method to practical use, it is essential to develop and introduce an adjustment method at the equipment level that is less dependent on variations in head processing dimensions and environmental conditions, as well as dramatically improving the processing accuracy of the magnetic head. The latter will be described in detail later in this embodiment.

磁気記録媒体１３０は、ガラスやＮｉＰメッキＡｌなどから構成される非磁性基板１３６上に、ＦｅＣｏＴａＺｒなどからなる軟磁性下地層１３５、ＣｏＣｒＰｔ、Ｌ１２−Ｃｏ３Ｐｔ基合金、Ｌ１２−（ＣｏＣｒ）３Ｐｔ基合金、Ｌ１１−Ｃｏ５０Ｐｔ５０基合金、ＣｏＣｒＢ／Ｐｔ、ＣｏＢ／Ｐｄ磁性人工格子、Ｌ１０型ＦｅＰｔ、などを主な構成要素とする磁性膜からなる第一、及び第二の記録層１３４、１３３、更にＣなどからなる保護層１３２、及び潤滑層１３１などから構成される。矢印１３７、１３８は、それぞれ磁気記録媒体に記録された上向き、下向きの磁化を示す。 The magnetic recording medium 130 includes a soft magnetic underlayer 135 made of FeCoTaZr, CoCrPt, L1 2 -Co 3 Pt base alloy, L1 2- (CoCr) on a nonmagnetic substrate 136 made of glass, NiP plated Al, or the like. 3 Pt-based alloy, L1 1 -Co 50 Pt 50 group alloy, CoCrB / Pt, CoB / Pd magnetic multilayers, L1 0 type FePt, first made of a magnetic film whose main component, etc., and a second The recording layers 134 and 133, a protective layer 132 made of C and the like, a lubricating layer 131, and the like. Arrows 137 and 138 indicate upward and downward magnetization recorded on the magnetic recording medium, respectively.

ここで、記録層の少なくとも一層は垂直磁気異方性を持つ材料であることが好ましく、その磁化の共鳴周波数と高周波発振素子１４０の高周波磁界の発振周波数は大きくは違わないことが好ましい。なお、磁気的な結合を制御するための中間層を両層の間に設けてもよい。また、軟磁性下地層１３５と基板１３６との間に少なくとも一層の非磁性層を設け、また、軟磁性下地層１３５と磁性層１３４との間にＲｕなどの少なくとも一層の非磁性中間層やそれに加えて磁性中間層を設けても良い。更に、軟磁性下地層１３５を、Ｒｕなどを介した２層構造としたり、磁性層１３３，１３４を単層もしくは、３層以上の多層構造としても良い。なお、本実施例では、基板１３６の片面に磁性層１３３，１３４などを設けた例を示したが、これらを非磁性基板１３６の両面に設けても良い。本実施例では磁気記録媒体１３０は各ビットが連続して存在する連続媒体の例を示したが、基板上に１０ｎｍ程度の磁性パターンを設けたパターン媒体でもよい。   Here, at least one layer of the recording layer is preferably a material having perpendicular magnetic anisotropy, and it is preferable that the resonance frequency of the magnetization and the oscillation frequency of the high-frequency magnetic field of the high-frequency oscillation element 140 do not differ greatly. An intermediate layer for controlling magnetic coupling may be provided between both layers. Further, at least one nonmagnetic layer is provided between the soft magnetic underlayer 135 and the substrate 136, and at least one nonmagnetic intermediate layer such as Ru is provided between the soft magnetic underlayer 135 and the magnetic layer 134. In addition, a magnetic intermediate layer may be provided. Furthermore, the soft magnetic underlayer 135 may have a two-layer structure through Ru or the like, and the magnetic layers 133 and 134 may have a single layer or a multilayer structure of three or more layers. In this embodiment, the magnetic layers 133 and 134 are provided on one surface of the substrate 136. However, these may be provided on both surfaces of the nonmagnetic substrate 136. In this embodiment, the magnetic recording medium 130 is an example of a continuous medium in which each bit is continuously present. However, a patterned medium having a magnetic pattern of about 10 nm on a substrate may be used.

図２には、本発明を適用した磁気記憶装置の構成例を示す。すなわち、本実施例は、スピンドルモータ２００、磁気記録媒体２０１、アーム２０２、高周波発振素子（ＳＴＯ）、記録再生素子や、クリアランス制御素子ＴＦＣなどを有する磁気ヘッドスライダ２０３とサスペンション２０４を含む磁気ヘッドＨＧＡ(Head Gimbal Assembly)２０５、アクチュエータ２０６、ＳＴＯを駆動するための駆動信号（駆動電流信号または駆動電圧信号）２０７を生成する高周波発振素子駆動制御装置などを有する本発明のヘッド駆動制御装置（Ｒ／Ｗ−ＩＣ）２０８、Ｒ／Ｗチャネル２０９、マイクロプロセッサ（ＣＰＵ）２１０、ディスクコントローラ（ＨＤＣ）２１１などから構成される。なお、アクチュエータ２０６がロータリー型のアクチュエータであれば、磁気記憶装置の小型軽量化の点で好ましい。   FIG. 2 shows a configuration example of a magnetic storage device to which the present invention is applied. That is, in this embodiment, a magnetic head HGA including a spindle motor 200, a magnetic recording medium 201, an arm 202, a high-frequency oscillation element (STO), a recording / reproducing element, a clearance control element TFC, and the like, and a suspension 204 are provided. (Head Gimbal Assembly) 205, actuator 206, head drive control device (R / R) of the present invention having a high frequency oscillation element drive control device for generating a drive signal (drive current signal or drive voltage signal) 207 for driving STO W-IC) 208, R / W channel 209, microprocessor (CPU) 210, disk controller (HDC) 211, and the like. Note that if the actuator 206 is a rotary type actuator, it is preferable in terms of reducing the size and weight of the magnetic storage device.

ここで、ＣＰＵ２１０は、磁気記憶装置の主制御装置で、記録再生動作や磁気ヘッドの位置決めに必要なサーボ制御をおこなうものである。たとえば、ＣＰＵは、Ｒ／Ｗ−ＩＣに含まれる各種レジスタにその動作に必要なパラメータを設定する。各種レジスタには、後述のように、所定の温度、磁気記録媒体領域毎の記録電流値、クリアランス制御値、ＳＴＯ駆動電流値、記録電流、ＳＴＯ駆動電流のオーバシュート値、あるいはタイミング時間などが独立に設定される。   Here, the CPU 210 is a main controller of the magnetic storage device, and performs servo control necessary for recording / reproducing operation and magnetic head positioning. For example, the CPU sets parameters necessary for its operation in various registers included in the R / W-IC. As described later, various registers have independent predetermined temperatures, recording current values for each magnetic recording medium area, clearance control values, STO driving current values, recording currents, STO driving current overshoot values, or timing times. Set to

ＨＤＣ２１１は、磁気記憶装置と上位のホストシステム（図示せず）とのインターフェースを構成し、磁気記録媒体上に記録データ２１３を書き込む情報記録の開始（記録のタイミング）を指示するためのライトゲートをＲ／Ｗチャネル２０９に出力することなどにより、記録再生情報の転送制御を行う。   The HDC 211 constitutes an interface between the magnetic storage device and a host system (not shown), and has a write gate for instructing the start of information recording (recording timing) for writing the recording data 213 on the magnetic recording medium. For example, by outputting to the R / W channel 209, transfer control of recording / reproduction information is performed.

Ｒ／Ｗチャネル２０９は信号処理回路であり、情報記録時にはディスクコントローラ２１１から転送された記録情報を符号化した信号２１３をＲ／Ｗ−ＩＣに出力、情報再生時には磁気ヘッド２０５から出力された再生信号を復号化した再生情報をディスクコントローラ２１１に出力する。   The R / W channel 209 is a signal processing circuit, which outputs a signal 213 obtained by encoding the recording information transferred from the disk controller 211 to the R / W-IC at the time of information recording, and the reproduction output from the magnetic head 205 at the time of information reproduction. The reproduction information obtained by decoding the signal is output to the disk controller 211.

Ｒ／Ｗ−ＩＣ２０８は、上記ライトゲートの入力に応じて、少なくともＲ／Ｗチャネル２０９から供給される記録データ２１３に対応する記録信号（記録電流）が生成され、通電タイミングを制御された高周波発振素子（ＳＴＯ）駆動信号（駆動電流信号または駆動電圧信号）とともに磁気ヘッドに供給する駆動集積回路で、ＣＰＵから記録電流値、ＳＴＯ駆動電流値、ＴＦＣ投入電力値などが設定されるレジスタ、より好ましくはレジスタからなる設定テーブルを有し、それらに基づいた記録電流、ＳＴＯ駆動電流、オーバシュート、ＴＦＣ投入電力などを生成する。ここで各レジスタ値は、磁気記録媒体の領域、環境温度、気圧などの条件毎に変化させることができる。なお、Ｒ／Ｗチャネル２０９、ＣＰＵ２１０、ＨＤＣ２１１などは、通常１チップのシステム集積回路（ＳｏＣ：System on Chip）２１２に組み込まれている。   The R / W-IC 208 generates a recording signal (recording current) corresponding to at least the recording data 213 supplied from the R / W channel 209 in response to the input of the write gate, and controls energization timing to control high-frequency oscillation. A drive integrated circuit that supplies a magnetic head together with an element (STO) drive signal (drive current signal or drive voltage signal), and more preferably a register in which a recording current value, STO drive current value, TFC input power value, etc. are set from the CPU. Has a setting table composed of registers, and generates recording current, STO drive current, overshoot, TFC input power, and the like based on them. Here, each register value can be changed for each condition such as the area of the magnetic recording medium, the environmental temperature, and the atmospheric pressure. Note that the R / W channel 209, the CPU 210, the HDC 211, and the like are normally incorporated in a one-chip system integrated circuit (SoC: System on Chip) 212.

以下に本発明の磁気記憶装置における記録再生動作の概略を説明する。パソコンなどのホスト、上位システムからの情報の記録や、再生の命令に従い、磁気記憶装置のメイン制御装置であるＣＰＵ２１０による制御で、磁気記録媒体２０１が所定の回転数でスピンドルモータ２００により回転し、更に、再生素子により、予め磁気記憶装置の製造工程で磁気記録媒体に記録されたサーボ情報からの信号を用いて媒体上の位置を検出するとともに、アーム２０２を介してアクチュエータ２０６で磁気ヘッドＨＧＡ２０５を制御することで、磁気記録媒体の所定の記録トラック上に移動（シーク動作）させ、その位置で磁気ヘッドのフォローイング動作を行う。次いでそのトラック上で、情報の記録再生が以下のように行われる。   The outline of the recording / reproducing operation in the magnetic storage device of the present invention will be described below. The magnetic recording medium 201 is rotated by the spindle motor 200 at a predetermined rotational speed under the control of the CPU 210, which is the main controller of the magnetic storage device, in accordance with instructions for recording and reproducing information from a host such as a personal computer and a host system. Further, the position on the medium is detected by a reproducing element using a signal from servo information previously recorded on the magnetic recording medium in the manufacturing process of the magnetic storage device, and the magnetic head HGA 205 is moved by the actuator 206 via the arm 202. By controlling, the magnetic recording medium is moved (seek operation) onto a predetermined recording track, and the magnetic head is followed at that position. Next, information is recorded and reproduced on the track as follows.

情報記録時には、ディスクコントローラ２１１から、磁気記録媒体上に記録データ２１３を書き込むデータ記録の開始（記録のタイミング）を指示するためのライトゲートがＲ／Ｗチャネル２０９に出力される。このライトゲートの入力に応じて、Ｒ／Ｗチャネル２０９から供給される記録データ２１３に対応する記録信号（記録電流）が生成され、通電タイミングを制御された高周波発振素子（ＳＴＯ）駆動信号（駆動電流信号または駆動電圧信号）とともに駆動信号２０７が、磁気ヘッド２０３の記録ヘッド部１２０に供給され、磁気記録媒体上の所定記録トラックにマイクロ波アシスト方法で記録される。   At the time of information recording, a write gate for instructing the start of data recording (recording timing) for writing the recording data 213 on the magnetic recording medium is output from the disk controller 211 to the R / W channel 209. In response to the input of the write gate, a recording signal (recording current) corresponding to the recording data 213 supplied from the R / W channel 209 is generated, and a high-frequency oscillation element (STO) driving signal (driving) whose energization timing is controlled. A drive signal 207 is supplied to the recording head unit 120 of the magnetic head 203 and recorded on a predetermined recording track on the magnetic recording medium by a microwave assist method.

一方、情報再生時には、磁気記録媒体に記録された磁化情報を読み取る磁気ヘッド２０３の再生ヘッド部１１０から出力される再生信号がＲ／Ｗ−ＩＣで増幅され、Ｒ／Ｗチャネル２０９に伝送され、復号化される。再生情報がディスクコントローラ２１１に出力される。   On the other hand, at the time of information reproduction, a reproduction signal output from the reproduction head unit 110 of the magnetic head 203 that reads the magnetization information recorded on the magnetic recording medium is amplified by the R / W-IC and transmitted to the R / W channel 209. Decrypted. Playback information is output to the disk controller 211.

本実施例では、磁気記録媒体が１個、磁気ヘッドスライダが２個の場合を示したが、磁気記録媒体１個に対し磁気ヘッドスライダが１個でも良く、また磁気記録媒体、磁気ヘッドを目的に応じて複数個に適宜増やしても良い。   In this embodiment, one magnetic recording medium and two magnetic head sliders are shown. However, one magnetic head slider may be used for one magnetic recording medium. Depending on the situation, the number may be appropriately increased to a plurality.

最適化方法及び効果を含め、実施例の詳細について以下に説明する。
（最適化方法及び効果）
本発明の特徴である、漏洩磁界、及び記録ヘッド１２０や高周波発振素子１４０の製造プロセスばらつきに起因する性能ばらつきを補償するための、記録ヘッド１２０（コイル１２３）への記録電流ＩＷ、高周波発振素子１４０の動作電流１４４、ならびに熱膨張素子ＴＦＣ１０２によるクリアランス補正の方法とその効果について、以下に説明する。 Details of the embodiment, including optimization methods and effects, are described below.
(Optimization method and effect)
The recording current I W to the recording head 120 (coil 123) and the high-frequency oscillation for compensating the leakage magnetic field and the performance variation due to the manufacturing process variation of the recording head 120 and the high-frequency oscillation element 140, which are the features of the present invention. The operation current 144 of the element 140, the clearance correction method by the thermal expansion element TFC102, and the effect thereof will be described below.

上記構成で、記録ヘッド部１２０における記録磁極１２２のトラック幅ＴＷＷ、高周波磁界発生素子１４０の磁化高速回転体ＦＧＬ１４１の素子幅ＷＦＧＬ、及び再生ヘッド部１１０における再生素子１１２の素子幅ＴＷｒ、及びそれぞれの主要な構成、熱膨張素子ＴＦＣ１０２の位置や個数、更に磁気ディスク１３０の構成を図３の実施例１ａ、１ｂ、１ｃに示すように変えて、磁気ヘッドや磁気記録媒体を試作して、磁気記憶装置に搭載した。 With the above configuration, the track width T WW of the recording magnetic pole 122 in the recording head unit 120, the element width W FGL of the high-speed magnetic rotating body FGL 141 of the high-frequency magnetic field generating element 140, and the element width T Wr of the reproducing element 112 in the reproducing head unit 110. Further, the magnetic head and the magnetic recording medium are manufactured by changing the main configuration, the position and number of the thermal expansion element TFC102, and the configuration of the magnetic disk 130 as shown in the embodiments 1a, 1b, and 1c of FIG. Mounted on magnetic storage device.

マイクロ波磁気記録方法を採用した本磁気記憶装置において、比較例として、従来技術と同様にＦＧＬ層における不安定磁気構造の発生抑制、すなわち素子の安定動作のために、高周波発振素子を常時動作させた状態で記録再生をおこなったところ、高い記録密度は実現できるものの、外部環境によっては、情報再生、もしくはシーク時に、情報消去、もしくは誤記録がなされてしまうことがあった。   In this magnetic storage device employing the microwave magnetic recording method, as a comparative example, the high-frequency oscillation element is always operated to suppress the generation of an unstable magnetic structure in the FGL layer, that is, stable operation of the element, as in the prior art. When recording / reproduction was performed in the above state, although a high recording density could be realized, depending on the external environment, information was erased or erroneously recorded during information reproduction or seeking.

従来から、スピンドルモータ、パソコンなど外部機器からの浮遊磁界が磁気記録媒体の軟磁性下地層に吸収されて記録磁極に集められ、更にこの磁界と、磁気記録媒体に記録された複雑な記録パターンからの漏れ磁界が重なって、記録磁極に磁界が集中することは知られていた。そこで、本発明でも、特開2006−114159号公報(特許文献６)記載のような従来技術によって、十分に浮遊磁界対策を施した構造を採用し、シミュレーションでも十分な外部磁界耐性があることを確認していたにもかかわらず上記の問題が発生したので、上記の問題はマイクロ波アシスト記録方法に固有の問題と考えられた。   Conventionally, a stray magnetic field from an external device such as a spindle motor or a personal computer is absorbed by the soft magnetic underlayer of the magnetic recording medium and collected on the recording magnetic pole, and further from this magnetic field and a complicated recording pattern recorded on the magnetic recording medium. It has been known that the leakage magnetic fields overlap and the magnetic field concentrates on the recording magnetic pole. Therefore, the present invention also adopts a structure in which a countermeasure against stray magnetic fields is sufficiently applied by a conventional technique as described in JP-A-2006-114159 (Patent Document 6), and has sufficient external magnetic field resistance even in simulation. Since the above problem occurred despite the fact that it was confirmed, the above problem was considered to be a problem inherent to the microwave assisted recording method.

そこで、本現象の根本原因についてＬＬＧシミュレーション、及び実験の両面から鋭意検討を行った。その結果、従来技術で対策済みの記録磁極からの微弱な磁界に加え、別機構によって誘起される磁界が、高周波発振素子のアシスト効果と重なり、情報再生時、もしくはシーク時にも情報消去や、誤記録が引き起こされていることが明らかになった。ここで、別機構によって誘起される磁界とは、磁気記録媒体の漏れ磁界のうち、記録ヘッドのギャップ部を介して吸収され、かつ、強められるタイプの記録パターンからの磁界によるものであり、この磁界は、図１に示した発振制御磁界１２６と同じ成分を有するため、ＦＧＬ１４１やアシスト効果に影響を与えてしまうことが判明した。すなわち、非記録動作時には本来存在してはならないこの磁界のために、ギャップ部１２５に挿入されている高周波発信素子１４０が誤動作し、アシスト効果を誘起してしまうのである。このメカニズムは、従来記録方法では全く問題とならなかったタイプのもので、磁気ギャップ部１２５に高周波発振素子１４０を設ける本マイクロ波アシスト記録方法に固有の問題であり、記録磁極１２２や、補助磁極１２４を軟磁性体で形成し、媒体１３０からの漏れ磁界も吸い込むポテンシャルの高い記録ヘッドにおいては、部品レベル単独では避けることの出来ない本質的な課題であることが判明した。   Therefore, the root cause of this phenomenon was studied earnestly from both the LLG simulation and the experiment. As a result, the magnetic field induced by another mechanism in addition to the weak magnetic field from the recording magnetic pole that has been addressed by the conventional technology overlaps with the assist effect of the high-frequency oscillation element, and information erasure or error occurs during information reproduction or seek. It became clear that the record was being triggered. Here, the magnetic field induced by another mechanism is due to the magnetic field from the recording pattern of the type that is absorbed and strengthened through the gap portion of the recording head among the leakage magnetic field of the magnetic recording medium. Since the magnetic field has the same component as the oscillation control magnetic field 126 shown in FIG. 1, it has been found that the magnetic field affects the FGL 141 and the assist effect. That is, because of this magnetic field that should not be present during the non-recording operation, the high-frequency transmission element 140 inserted in the gap portion 125 malfunctions and induces an assist effect. This mechanism is of a type that did not cause any problems in the conventional recording method, and is a problem inherent to the present microwave assisted recording method in which the high-frequency oscillation element 140 is provided in the magnetic gap portion 125. The recording magnetic pole 122 and the auxiliary magnetic pole It has been found that the recording head 124 having a high potential that is formed of a soft magnetic material and absorbs the leakage magnetic field from the medium 130 is an essential problem that cannot be avoided by the component level alone.

そこでまず、記録動作時以外の装置動作時にアシスト効果を抑制する技術について、装置レベルで鋭意検討を重ねた。本実施例の磁気ヘッド、磁気記録媒体で図２に示した装置を組み立てた後に、まず所定の磁気記録媒体の領域Ｒで、高周波発振素子を所定の電流値で動作させ、更に主磁極のコイルに記録電流を通電し、主磁極を励磁してサーボ信号を磁気記録媒体に記録した。   Therefore, first, we conducted extensive studies at the device level regarding the technology for suppressing the assist effect during device operation other than during recording operation. After assembling the apparatus shown in FIG. 2 with the magnetic head and magnetic recording medium of the present embodiment, first, the high-frequency oscillation element is operated at a predetermined current value in the region R of the predetermined magnetic recording medium, and further the coil of the main pole Was supplied with a recording current, the main magnetic pole was excited, and a servo signal was recorded on the magnetic recording medium.

ついで、このサーボ信号を元に正負の電流値ＩＳＴＯを高周波発振素子に通電しつつ、主磁極１２２のコイル１２３に通電して所定の検査信号などを記録し、検査信号を再生した時のそれぞれのＩＳＴＯでのＳ／Ｎを評価した結果を図４に示す。図４に示すＳ／Ｎは相対値を示す。その結果、図４に示すように、主磁極への記録電流（外部記録磁界を想定）によっては、マイクロ波アシスト磁気ヘッドによるアシスト効果は、信号の再生時に、その駆動電流を零（高周波発振素子非動作）にしても残るので、記録磁界１２１とＦＧＬ１４１との相互作用の為に記録動作時以外の装置動作時にも影響が残ることが判明した。しかしながら、その大きさは十分小さく、実用上十分無視できる程度であるが、より好ましくは、逆極性の電流−Ｉｄを信号再生時の直前に（又は信号記録終了時の直後に）高周波発振素子に通電してその影響をキャンセルすることでアシスト効果を完全に抑制できることが明らかになった。実際に高周波発振素子１４０への通電を停止、もしくは各領域Ｒで逆極性の電流−Ｉｄを通電し、情報消去や、誤記録を起こした比較例と同じ条件で磁気記憶装置を所定の台数評価したところ、いずれの場合でも、情報消去、もしくは誤記録などの問題は全く観測されない事を確認できた。 Next, when the positive and negative current values ISTO are supplied to the high frequency oscillation element based on the servo signal, the coil 123 of the main magnetic pole 122 is supplied to record a predetermined inspection signal and the inspection signal is reproduced. FIG. 4 shows the result of evaluation of S / N in ISTO . S / N shown in FIG. 4 indicates a relative value. As a result, as shown in FIG. 4, depending on the recording current to the main magnetic pole (assuming an external recording magnetic field), the assist effect by the microwave assisted magnetic head is zero when the signal is reproduced (high frequency oscillation element). It has been found that the effect remains even during the operation of the apparatus other than during the recording operation due to the interaction between the recording magnetic field 121 and the FGL 141. However, their size is small enough, it is enough to practically sufficiently neglected, more preferably, (immediately after the or signal recording is completed) immediately before the time of signal reproduction of the opposite polarity current -I d high frequency oscillator It became clear that the assist effect could be completely suppressed by energizing and canceling the effect. Actually stops energizing the high frequency oscillator 140, or to energize the reverse polarity of the current -I d in each region R, the information erased or erroneous recording predetermined number of magnetic storage device in the same condition as in the comparative example that caused the As a result of the evaluation, it was confirmed that in any case, no problems such as information erasure or erroneous recording were observed.

そこで次に、高周波発生素子を、上記の非動作状態から動作状態に再現性良く安定に移行せしめると共に、ヘッドや、媒体の最高性能を引き出し、製造バラツキや環境条件変化の影響を緩和するための方法について、本発明のヘッド駆動制御装置を用いて鋭意検討を行った。高周波発振素子を安定に発振せしめ、高周波発振素子の高周波磁界と磁気記録媒体の媒体才差運動とのそれぞれの周波数や位相の整合性をとることは、効率よいアシスト効果をえるために重要である。   Therefore, next, the high-frequency generating element is stably transferred from the above non-operating state to the operating state with good reproducibility, and the maximum performance of the head and the medium is extracted to reduce the influence of manufacturing variations and environmental condition changes. The method has been intensively studied using the head drive control device of the present invention. In order to obtain an efficient assist effect, it is important to oscillate the high-frequency oscillation element stably and to match the frequency and phase of the high-frequency magnetic field of the high-frequency oscillation element and the media precession of the magnetic recording medium. .

しかし、それらの周波数や位相も、ＦＧＬ層の磁区構造の安定性と同様に、製造プロセスのバラツキや、物性常数の温度依存性や、磁気ヘッドからの発振制御磁界の相対方位、強度によって変化する。本発明者らが鋭意検討した結果、ＥＣＣ(Exchange−coupled composite)媒体に対し、マイクロ波アシスト記録ヘッドでその記録磁極に通電する少なくとも０．１ｎｓ以上、より好ましくは１ｎｓ以上よりも前に、前記の非動作もしくは逆極性通電状態の高周波磁界発振素子１４０に、素子動作に必要な通電を開始し、記録電流通電開始に対するタイミングを磁気記録媒体や外部環境に応じて適宜調整することで、ＦＧＬ層内の磁化回転を定常化し、かつ、安定化でき、更に磁気記録媒体に対して最適なアシスト効果を得ることができ、その結果としてエラーレートを常に安定に保つことができることを見出した。なお、記録磁界は、通常、記録電流に対して０．２〜０．５ｎｓ程度の遅延があるので、これに適切に対処するために、ＳＴＯ駆動電流のオフのタイミング調整も同様に重要である。   However, their frequency and phase also vary according to variations in the manufacturing process, temperature dependence of physical constants, relative orientation and intensity of the oscillation control magnetic field from the magnetic head, as well as the stability of the magnetic domain structure of the FGL layer. . As a result of intensive studies by the present inventors, an ECC (Exchange-coupled composite) medium is at least 0.1 ns or more, more preferably 1 ns or more before the recording magnetic pole is energized by a microwave assisted recording head. The high-frequency magnetic field oscillation element 140 in a non-operating state or reverse-polarity energization state is energized necessary for element operation, and the timing for starting the recording current energization is appropriately adjusted according to the magnetic recording medium and the external environment, thereby It has been found that the magnetization rotation can be stabilized and stabilized, and an optimum assist effect can be obtained for the magnetic recording medium, and as a result, the error rate can always be kept stable. Since the recording magnetic field usually has a delay of about 0.2 to 0.5 ns with respect to the recording current, in order to appropriately cope with this, adjusting the timing of turning off the STO driving current is equally important. .

ＬＬＧシミュレーションなどで詳細に検討した結果、本効果は、以下の条件によって得られることが明らかとなった。   As a result of detailed examination by LLG simulation and the like, it was found that this effect can be obtained under the following conditions.

（１）電流が数十ｎｍのサイズの素子内で定常的に安定して流れ、しかも磁界が印加されて高周波磁界発振素子の発振が安定化するには、０．１〜１ｎｓ程度必要で、位相整合のタイミングを考えると、その５％程度相当の時間の余裕をみてタイミングを制御することが効果的である。   (1) It takes about 0.1 to 1 ns for a current to flow stably and stably in an element having a size of several tens of nm and to stabilize oscillation of a high-frequency magnetic field oscillation element by applying a magnetic field. Considering the timing of phase matching, it is effective to control the timing with an allowance of about 5% of the time.

（２）高周波磁界発振素子１４０や磁気記録媒体１３０のダンピング定数αなどを適切に設定した系では、それらの磁化回転周波数が時間とともに変化し、位相整合をより取り易くなり、適切なチューニングでより効率よいアシスト効果を実現できる。   (2) In a system in which the damping constant α of the high-frequency magnetic field oscillation element 140 and the magnetic recording medium 130 is appropriately set, their magnetization rotation frequency changes with time, and phase matching is easier to achieve. An efficient assist effect can be realized.

（３）更に、補助磁極１２４を設け、面内磁界成分を持たせた記録磁界を磁気記録媒体に印加しつつ高周波磁界を印加すると、特にＥＣＣ型の媒体では、結晶粒内磁化間のダイポール相互作用が、それぞれの媒体結晶粒における磁化の才差運動の位相が合うように効果的に作用する。   (3) Further, when an auxiliary magnetic pole 124 is provided and a high-frequency magnetic field is applied while applying a recording magnetic field having an in-plane magnetic field component to the magnetic recording medium, the dipole mutual relationship between the in-crystal magnetizations is obtained particularly in an ECC type medium. The action acts effectively so that the phase of the magnetization precession in each medium crystal grain is in phase.

すなわち、記録電流に対するＳＴＯ駆動電流のオン、オフの適切なタイミング調整などを、本発明のヘッド駆動制御装置や方法を用いて、磁気記憶装置レベルで行うことにより、高周波発生素子１４０を非動作状態から動作状態に再現性良く安定に移行せしめ、更に、高周波磁界と、媒体記録ビットを決める磁化反転領域内にある結晶粒磁化群の才差運動との同期をとれる確率を高めることができ、所望の高いアシスト効果を得ることが出来ると考えられることが確認された。
（装置調整の手順）
以上の知見をもとに発明された、本発明のヘッド駆動制御装置による磁気記憶装置調整のフローチャートを図５に示す。 That is, the high-frequency generating element 140 is set in a non-operating state by performing appropriate timing adjustment of on / off of the STO drive current with respect to the recording current at the magnetic storage device level using the head drive control device and method of the present invention. It is possible to achieve a stable transition with good reproducibility from the operation state to a high frequency magnetic field and to increase the probability that the precession of the grain magnetization group in the magnetization reversal region that determines the medium recording bit can be synchronized. It was confirmed that a high assist effect can be obtained.
(Device adjustment procedure)
FIG. 5 shows a flowchart of magnetic storage device adjustment by the head drive control device of the present invention invented based on the above knowledge.

本実施例のヘッド駆動制御装置では、高周波発振素子１４０への通電タイミング、その通電の電流波形と電流値、クリアランス制御電力、及び記録磁極への記録電流とが同時に設定される（５０１）。本ヘッド駆動制御装置、及び、前記の磁気ヘッドを４個、磁気記録媒体を２枚用いて図２の磁気記憶装置を組み立てた後に、まず所定の磁気記録媒体の領域で、まず高周波発振素子が磁気記録媒体から所定のクリアランスを確保するように熱膨張素子ＴＦＣ１０２の投入電力を調整する（ＰＴＦＣ（１））。これは例えば、熱膨張素子ＴＦＣ１０２に電力を順次投入し、磁気記録媒体１３０との接触を検知したら、その時の投入電力から、所定のクリアランスに相当する電力を低減することで行う。なお、事前に、クリアランス、熱膨張量、ＴＦＣへの投入電力量との関係は明らかにしておくものとする。なお、ＳＴＯ駆動電流の、記録電流に対するオン、オフのタイミングｔＲＷ（１）、ｔＲＷＢ（１）、電流波形（オーバシュート）ＯＳ（１）なども事前に予備評価し、適正値を決定しておく。 In the head drive control apparatus of this embodiment, the energization timing to the high-frequency oscillation element 140, the current waveform and current value of the energization, the clearance control power, and the recording current to the recording magnetic pole are set simultaneously (501). After assembling the magnetic storage device of FIG. 2 using this head drive control device and four magnetic heads and two magnetic recording media, first, a high-frequency oscillation element is provided in a predetermined magnetic recording medium region. The input power of the thermal expansion element TFC102 is adjusted so as to ensure a predetermined clearance from the magnetic recording medium (P TFC (1)). For example, when power is sequentially applied to the thermal expansion element TFC102 and contact with the magnetic recording medium 130 is detected, power corresponding to a predetermined clearance is reduced from the power input at that time. Note that the relationship between the clearance, the amount of thermal expansion, and the amount of power input to the TFC is clarified in advance. It should be noted that the ON / OFF timing t RW (1), t RWB (1) of the STO drive current with respect to the recording current, the current waveform (overshoot) OS (1), etc. are preliminarily evaluated in advance to determine an appropriate value. Keep it.

次いで、図６に示すように、高周波発振素子１４０を所定の電流値ＩＳＴＯ（１）、所定のタイミングｔＲＷ（１）、ｔＲＷＢ（１）、電流波形（オーバシュート）ＯＳ（１）で動作させ、更に、記録磁極１２２に記録電流ＩＷ（１）を通電して、励磁してサーボ信号を磁気記録媒体１３０の前記の所定領域に記録する（５０２）。なお、オーバシュート（ＯＳ）は、スピンの才差運動の初期加速のための電流波形である。 Next, as shown in FIG. 6, the high-frequency oscillating element 140 is set at a predetermined current value I STO (1), predetermined timings t RW (1), t RWB (1), and a current waveform (overshoot) OS (1). Further, the recording magnetic pole 122 is energized with a recording current I W (1) and excited to record a servo signal in the predetermined area of the magnetic recording medium 130 (502). The overshoot (OS) is a current waveform for initial acceleration of the spin precession.

ついで、このサーボ信号を元に上記所定の領域に、図５の表５ａに記載のＩＷ（ｍ）、ＩＳＴＯ（ｎ）の各組み合わせで、所定の検査信号の記録再生を行う（５０３）。これらの値はパラメータ制御用テーブルとしてレジスタに格納しておく。なおここでは、電流値ＩＳＴＯを一定として、ＩＷを変えて主磁極１２２のコイル１２３に通電するプロセスを行い、更に、電流値ＩＳＴＯを変えながらこのプロセスを繰り返した。それぞれの組み合わせでのビットエラーレート、オーバライト、再生出力、及び隣接トラック記録干渉特性(ＡＴＩ:Adjacent Track Interference)などの記録再生特性を測定し、もっとも高い特性が得られる最適のＩＷ（ｍ）、ＩＳＴＯ（ｎ）の組み合わせを決定する。 Next, based on this servo signal, recording / reproduction of a predetermined inspection signal is performed in the predetermined area with each combination of I W (m) and I STO (n) described in Table 5a of FIG. 5 (503). . These values are stored in a register as a parameter control table. Note here as a constant current value I STO, performs a process of energizing the coil 123 of the main magnetic pole 122 by changing the I W, further, the process was repeated while changing the current value I STO. Measure the recording / reproduction characteristics such as bit error rate, overwrite, reproduction output, and adjacent track recording interference characteristics (ATI: Adjacent Track Interference) for each combination, and obtain the best I W (m) , I STO (n) is determined.

ついで、この状態で、熱膨張素子ＴＦＣへの投入電力ＰＴＦＣ、クリアランスを再度計測し（５０４）、所定の値よりもクリアランスが小さくなっていれば（投入電力ＰＴＦＣ（ｉ）が所定値以下で無ければ）（５０５）、記録電流ＩＷを一水準下げて記録再生特性を計測しながら、高周波発振素子１４０への通電量を最適化し（５０６）、再度クリアランスが所定の値になっているか評価する。このプロセスをクリアランスが所定の値以下になるまで繰り返し、ＩＷ、ＩＳＴＯ、ＰＴＦＣの最終的な最適値を決定する（５０７）。なお、ここで、記録パターンに応じ、記録電流ＩＷタイミングの事前補償（いわゆるライトプリコンペ(write pre−compensation)）も自動的に行った。 Then, in this state, the input power P TFC to thermal expansion element TFC, measures the clearance again (504), if smaller clearance than the predetermined value (input power P TFC (i) is less than a predetermined value without at) (505), while measuring the recording and reproducing characteristics recording current I W is lowered one level, to optimize the amount of current supplied to the high frequency oscillator 140 (506), again either clearance is at a prescribed value evaluate. This process is repeated until the clearance becomes a predetermined value or less, and final optimum values of I W , I STO , and P TFC are determined (507). Here, according to the recording pattern, pre-compensation (so-called write pre-compensation) of the recording current IW timing was also automatically performed.

オーバシュート（ＯＳ）が高いとタイミングｔＲＷやそのばらつきが少なくてもすむ傾向があるが、高すぎると素子動作が安定しないので、調整することが好ましい。そこで、最後に、高周波発振素子１４０内の電流分布や発振状態の安定化を図る為に、高周波発振素子への電流波形ＯＳと、通電タイミングｔＲＷを、図５の表５ｂ記載の組み合わせのように変えて、ビットエラーレート、オーバライト、再生出力、及び隣接トラック記録干渉特性（ＡＴＩ）などの記録再生特性を同様に測定し（５０８）、最も高い特性が得られる最適のＯＳ（ｈ）、ｔＲＷ（ｋ）の組み合わせを決定する（５０９）。なお、図５では省略したが、図６に示すように、ｔＲＷ（ｋ）の設定と同様にＳＴＯ駆動電流を切断するタイミングｔＲＷＢ（ｋ）の調整も実施した。以上の最適値は、パラメータ制御用テーブルとしてヘッド駆動制御装置のレジスタに格納され、磁気記憶装置動作の制御に用いられる。 If the overshoot (OS) is high, the timing tRW and its variation tend to be small. However, if the overshoot (OS) is too high, the device operation is not stable. Therefore, finally, in order to stabilize the current distribution and oscillation state in the high-frequency oscillation element 140, the current waveform OS to the high-frequency oscillation element and the energization timing tRW are combined as shown in Table 5b of FIG. In the same manner, the recording / reproduction characteristics such as bit error rate, overwrite, reproduction output, and adjacent track recording interference characteristic (ATI) are measured (508), and the optimum OS (h) for obtaining the highest characteristic is obtained. The combination of t RW (k) is determined (509). Although omitted in FIG. 5, as shown in FIG. 6, the timing t RWB (k) for cutting off the STO drive current was also adjusted in the same manner as the setting of t RW (k). The optimum values described above are stored in a register of the head drive control device as a parameter control table and used for controlling the operation of the magnetic storage device.

図６には、本実施例のフローチャートに従って最適化された記録電流、及び高周波素子駆動電流の動作概念図を示した。図６は、記録電流ＩＷと電流値ＩＳＴＯのそれぞれの通電の開始のタイミングを比較したものである。記録電流ＩＷの通電開始前よりも通電タイミングｔＲＷだけ前倒しで高周波発振素子１４０への電流値ＩＳＴＯの通電を開始する。また、通電タイミングｔＲＷは、高周波発振素子１４０に電流値ＩＳＴＯを通電してから素子内の電流分布や発振状態の安定化や記録などの安定化を図る為に必要な時間である。
なお、ハードディスク装置（ＨＤＤ）のような磁気記憶装置では、記録と再生の切り替え時間は５０ｎｓ程度であり、本実施例ではこの時間内に切り替えが完了し、更に高周波発振素子駆動回路の起動完了時期が記録ヘッド駆動回路の再生から記録への切り替え時期よりも少なくとも０．１ｎｓ以上前になるようにして、それぞれの起動タイミングを調整した。なおそれぞれの回路系の立ち上り時間は１０ｎｓ程度であった。 FIG. 6 shows an operation concept diagram of the recording current and the high-frequency element driving current optimized according to the flowchart of this embodiment. Figure 6 is a comparison of the timing of the start of each current of the recording current I W and the current value I STO. Than before the supply start of the recording current I W starts energization current value I STO to high frequency oscillator 140 advanced by the energizing timing t RW. The energization timing t RW is a time necessary for stabilizing the current distribution and oscillation state in the element and stabilizing the recording after energizing the high-frequency oscillation element 140 with the current value ISTO .
In a magnetic storage device such as a hard disk drive (HDD), the switching time between recording and reproduction is about 50 ns. In this embodiment, the switching is completed within this time, and the start-up completion timing of the high-frequency oscillation element driving circuit Was adjusted at least 0.1 ns before the switching timing from reproduction to recording of the recording head driving circuit, and the respective activation timings were adjusted. The rise time of each circuit system was about 10 ns.

本実施例においては、図３の実施例１ａ、１ｂ、１ｃの組み合わせでは、いずれも従来技術並みの製造歩留りで、それぞれの記録密度が１．２Ｔｂ／ｉｎ２、１．６Ｔｂ／ｉｎ２、２．０Ｔｂ／ｉｎ２となり、従来技術の２〜３倍の記録密度が達成できることが確認された。さらに、外部磁界に対する耐力も従来装置と同等以上であることも確認できた。また、通電タイミングｔＲＷが０であっても同様な効果が得られた。 In the present embodiment, the combinations of Examples 1a, 1b, and 1c in FIG. 3 all have the same manufacturing yield as the conventional technology, and the recording densities are 1.2 Tb / in 2 , 1.6 Tb / in 2 , 2 .0Tb / in 2, and the two or three times the recording density of the prior art it was confirmed achievable. Furthermore, it was confirmed that the proof strength against the external magnetic field was equal to or higher than that of the conventional device. The same effect was obtained even when the energization timing t RW was zero.

図７に、記録密度がより高く、外部磁界耐力が一層懸念される場合に特に有効な実施例を示す。   FIG. 7 shows an embodiment that is particularly effective when the recording density is higher and the external magnetic field strength is more concerned.

まず、実施例１で述べたヘッド駆動制御装置、磁気ヘッドを６個、磁気記録媒体を３枚用いて図２に示す磁気記憶装置を組み立てた後に、所定の磁気記録媒体の領域で、まず実施例１と同様に、高周波発振素子が磁気記録媒体から所定のクリアランスを確保するように熱膨張素子ＴＦＣの投入電力を調整する（ＰＴＦＣ（１））（７０１）。次いで、高周波発振素子を所定の電流値ＩＳＴＯ（１）、電流波形ＯＳ（１）で動作させ、更に記録磁極に記録電流ＩＷ（１）を通電し、励磁してサーボ信号を磁気記録媒体１３０に記録した（７０２）。なおここで、素子内の電流分布や発振状態の安定化、安定記録を図る為に、事前の実験で求めた平均的な値のｔＲＷ（１）だけＩＷ（１）の通電開始よりも早くＩＳＴＯ（１）の安定電流分を通電し、また、記録磁界は記録電流から０．２ｎｓ〜０．５ｎｓ程度遅延することを考慮して、ｔＲＷＢ（１）だけ遅れて通電終了した。このｔＲＷは温度によって変わり、また、ｔＲＷＢは、記録周波数や温度によって変わるので、それぞれ最適化が必要です。 First, after assembling the magnetic storage device shown in FIG. 2 using the head drive control device described in the first embodiment, using six magnetic heads and three magnetic recording media, the magnetic recording device is first implemented in a predetermined magnetic recording medium region. Similarly to Example 1, the input power of the thermal expansion element TFC is adjusted so that the high-frequency oscillation element secures a predetermined clearance from the magnetic recording medium (P TFC (1)) (701). Next, the high-frequency oscillation element is operated with a predetermined current value I STO (1) and a current waveform OS (1), and a recording current I W (1) is further supplied to the recording magnetic pole to excite the servo signal as a magnetic recording medium. 130 (702). Here, in order to stabilize the current distribution and oscillation state in the element and to record stably, the average value t RW (1) obtained in the previous experiment is more than the start of energization of I W (1). Considering the fact that the stable current of I STO (1) was supplied earlier and the recording magnetic field was delayed from the recording current by about 0.2 ns to 0.5 ns, the energization was terminated with a delay of t RWB (1). T RW varies depending on temperature, and t RWB varies depending on the recording frequency and temperature.

ついで、このサーボ信号を元に、図４に示したように、正負の電流値ＩＳＴＯを高周波発振素子１４０に通電しつつ、主磁極１２２に通電して所定の検査信号を記録し、それぞれのＩＳＴＯでのＳ／Ｎを評価し、高周波発振素子１４０のアシスト効果抑制電流−Ｉｄを決定した（７０３）。これらの値は、パラメータ制御用テーブルとしてヘッド駆動制御装置のレジスタに格納される。 Next, based on this servo signal, as shown in FIG. 4, while energizing the high-frequency oscillation element 140 with a positive and negative current value ISTO , the main magnetic pole 122 is energized to record a predetermined inspection signal. It evaluates the S / N in the I STO, to determine the assist effect suppression current -I d of the high-frequency oscillator 140 (703). These values are stored in a register of the head drive control device as a parameter control table.

次いで、高周波発振素子１４０を所定の電流値ＩＳＴＯ（１）、オーバシュートＯＳ（１）で動作させ、更記録磁極に記録電流ＩＷ（１）を通電し、励磁してサーボ信号を磁気記録媒体１３０の前記の所定領域に記録し、ついで、このサーボ信号を元に上記所定の領域に、図７の表７ａに記載したＩＷ（ｍ）、ＩＳＴＯ（ｎ）の各組み合わせで、所定の検査信号の記録再生を行う（７０４）。ここでは、ＩＷを一定として、ＩＳＴＯを変えて記録を行うプロセスを行い、更に、記録電流ＩＷを変えながらこのプロセスを繰り返した。それぞれの組み合わせでのビットエラーレート、オーバライト、再生出力、及び隣接トラック記録干渉特性（ＡＴＩ）などの記録再生特性を測定し、最も高い特性が得られる最適のＩＷ（ｍ）、ＩＳＴＯ（ｎ）の組み合わせを決定する（７０５）。なお、ＩＷとＩＳＴＯの可変の順序を上記とは逆にしても同様に最適の組み合せを決定できる。 Next, the high-frequency oscillation element 140 is operated at a predetermined current value I STO (1) and overshoot OS (1), the recording current I W (1) is supplied to the further recording magnetic pole, and the servo signal is magnetically recorded. Recording is performed in the predetermined area of the medium 130, and then, based on this servo signal, the predetermined area is determined according to each combination of I W (m) and I STO (n) described in Table 7a of FIG. The inspection signal is recorded and reproduced (704). Here, a process of recording was performed by changing I STO while keeping I W constant, and this process was repeated while changing the recording current I W. The recording / reproduction characteristics such as bit error rate, overwrite, reproduction output, and adjacent track recording interference characteristic (ATI) are measured for each combination, and the optimum I W (m), I STO ( The combination of n) is determined (705). Incidentally, the variable ordering of I W and I STO can determine the combination of optimally also be contrary to the above.

ついで、この状態で、熱膨張素子への投入電力ＰＴＦＣ、クリアランスを再度計測し、所定の値とのクリアランスの差（投入電力ＰＴＦＣの差の絶対値）が大きくなっていれば（７０６）、記録電流ＩＷを一水準下げて記録再生特性を計測しながら、高周波発振素子への通電量を最適化し（７０７）、再度クリアランスが所定の値になっているか評価する。このプロセスをクリアランスが所定の値以下になるまで繰り返し、ＩＷ、ＩＳＴＯ、ＰＴＦＣの最終的な最適値を決定する（７０８）。これらの最適値は、パラメータ制御用テーブルとしてヘッド駆動制御装置のレジスタに格納され、ヘッド駆動装置の制御に用いられる。なおここで、特殊記録パターンに対する記録電流ＩＷのタイミングの事前補償（いわゆるライトプリコンペ）も自動的に行った。 Next, in this state, the input power P TFC and the clearance to the thermal expansion element are measured again, and if the difference in clearance from the predetermined value (the absolute value of the difference in input power P TFC ) is large (706) Then, while reducing the recording current IW by one level and measuring the recording / reproducing characteristics, the energization amount to the high-frequency oscillation element is optimized (707), and it is evaluated again whether the clearance is a predetermined value. This process is repeated until the clearance is less than or equal to a predetermined value to determine the final optimal values for I W , I STO , and P TFC (708). These optimum values are stored in a register of the head drive control device as a parameter control table and used for control of the head drive device. Note here, pre-compensation of the timing of the recording current I W for special recording pattern (so-called light precompensation) was also carried out automatically.

図８には本実施例のフローチャートに従って最適化された記録電流、高周波素子駆動電流の動作概念図を示す。本実施例において、実施例１と同等の装置製造歩留り、記録密度が達成できていることが確認され、さらに、外部磁界に対する耐力は実施例１の１．５倍以上に改善されていることが確認された。また、実施例１と同様に、通電タイミングｔＲＷ、切断タイミングｔＲＷＢ、アシスト効果抑止電流ＩｄやオーバシュートＯＳについて最適化を行なったところ、実施例１の２倍程度と高い外部環境変化に対する信頼性（再生時のエラーが無い）が得られ、特に好ましかった。 FIG. 8 shows a conceptual diagram of the operation of the recording current and the high-frequency element driving current optimized according to the flowchart of this embodiment. In this example, it was confirmed that the device manufacturing yield and recording density equivalent to those of Example 1 were achieved, and that the proof strength against an external magnetic field was improved to 1.5 times or more that of Example 1. confirmed. Similarly to the first embodiment, when the energization timing t RW , the cutting timing t RWB , the assist effect suppression current I d, and the overshoot OS are optimized, it is about twice as high as that of the first embodiment and the external environment change is high. Reliability (no error during playback) was obtained, which was particularly preferred.

実施例３として、最もコストパフォーマンスの高い系の例を示す。   As Example 3, an example of a system having the highest cost performance is shown.

まず、実施例１で述べたヘッド駆動制御装置、磁気ヘッドを１個、磁気記録媒体を１枚用いて図２に示す磁気記憶装置を組み立てた後に、所定の磁気記録媒体１３０の領域で、実施例１と同様に、高周波発振素子１４０が磁気記録媒体１３０から所定のクリアランスを確保するように熱膨張素子の投入電力を調整する（ＰＴＦＣ（１））（５０１）。次いで、高周波発振素子１４０を所定の電流値ＩＳＴＯ（１）で動作させ、更に、記録磁極１２２のコイル１２３に記録電流ＩＷ（１）を通電し、励磁してサーボ信号を磁気記録媒体に記録する（５０２）。本実施例では高周波発振素子駆動回路にはオーバシュート機能と逆極性電流通電機能を省略してある。またここで、ＩＳＴＯ（１）の通電の際は、他の実施例と同様に、ＩＷ（１）の通電のタイミングよりもｔＲＷ（１）だけ早く安定電流分を通電開始し、ｔＲＷＢ（１）だけ遅れて通電を終了した。 First, after assembling the magnetic storage device shown in FIG. 2 using one head drive control device described in the first embodiment, one magnetic head, and one magnetic recording medium, it is performed in a predetermined area of the magnetic recording medium 130. Similar to Example 1, the input power of the thermal expansion element is adjusted so that the high-frequency oscillation element 140 secures a predetermined clearance from the magnetic recording medium 130 (P TFC (1)) (501). Next, the high-frequency oscillation element 140 is operated at a predetermined current value I STO (1), and the recording current I W (1) is further passed through the coil 123 of the recording magnetic pole 122 to excite the servo signal to the magnetic recording medium. Record (502). In this embodiment, the overshoot function and the reverse polarity current energizing function are omitted from the high-frequency oscillation element driving circuit. Here, when energizing ISTO (1), as in the other examples, energization of a stable current is started earlier by t RW (1) than the energizing timing of I W (1), and t Energization was terminated with a delay of RWB (1).

次いで、図７のフローと同様に、高周波発振素子１４０を所定の電流値ＩＳＴＯ（１）で動作させ、更に、記録磁極１２２のコイル１２３に記録電流ＩＷ（１）を通電し、励磁してサーボ信号を磁気記録媒体１３０の前記の所定領域に記録し、ついで、このサーボ信号を元に上記所定の領域に、図７のＩＷ（ｍ）−ＩＳＴＯ（ｎ）の表に記載の各組み合わせで所定の検査信号の記録再生を行う（７０４）。ここでは、ＩＷを一定として、ＩＳＴＯを変えて記録を行うプロセスを行い、更に、記録電流ＩＷを変えながらこのプロセスを繰り返した。それぞれの組み合わせでのビットエラーレート、オーバライト、再生出力、及び隣接トラック記録干渉特性（ＡＴＩ）などの記録再生特性を測定し、最も高い特性が得られる最適のＩＷ（ｍ）、ＩＳＴＯ（ｎ）の組み合わせを決定する（７０５）。なお、ＩＷとＩＳＴＯの可変の順序を上記とは逆にしても同様に最適の組み合せを決定できる。 Next, similarly to the flow of FIG. 7, the high-frequency oscillation element 140 is operated at a predetermined current value I STO (1), and the recording current I W (1) is supplied to the coil 123 of the recording magnetic pole 122 and excited. Then, the servo signal is recorded in the predetermined area of the magnetic recording medium 130, and then the predetermined area based on the servo signal is recorded in the table of I W (m) -I STO (n) in FIG. Recording and reproduction of a predetermined inspection signal is performed for each combination (704). Here, a process of recording was performed by changing I STO while keeping I W constant, and this process was repeated while changing the recording current I W. The recording / reproduction characteristics such as bit error rate, overwrite, reproduction output, and adjacent track recording interference characteristic (ATI) are measured for each combination, and the optimum I W (m), I STO ( The combination of n) is determined (705). Incidentally, the variable ordering of I W and I STO can determine the combination of optimally also be contrary to the above.

ついで、この状態で、熱膨張素子への投入電力ＰＴＦＣ、クリアランスを再度計測し、所定の値とのクリアランスの差（投入電力ＰＴＦＣの差の絶対値）が大きくなっていれば（７０６）、記録電流ＩＷを一水準下げて記録再生特性を計測しながら、高周波発振素子１４０への通電量を最適化し（７０７）、再度クリアランスが所定の値になっているか評価する。このプロセスをクリアランスが所定の値以下になるまで繰り返し、ＩＷ、ＩＳＴＯ、ＰＴＦＣの最終的な最適値を決定する（７０８）。これらの最適値は、パラメータ制御用テーブルとしてヘッド駆動制御装置のレジスタに格納され、ヘッド駆動装置の制御に用いられる。なおここで、記録パターンに応じ、特殊記録パターンに対する記録電流ＩＷのタイミングの事前補償（いわゆるライトプリコンペ）も自動的に行った。 Next, in this state, the input power P TFC and the clearance to the thermal expansion element are measured again, and if the difference in clearance from the predetermined value (the absolute value of the difference in input power P TFC ) is large (706) Then, while reducing the recording current IW by one level and measuring the recording / reproducing characteristics, the energization amount to the high-frequency oscillation element 140 is optimized (707), and it is evaluated again whether the clearance is a predetermined value. This process is repeated until the clearance is less than or equal to a predetermined value to determine the final optimal values for I W , I STO , and P TFC (708). These optimum values are stored in a register of the head drive control device as a parameter control table and used for control of the head drive device. Here, in accordance with the recording pattern, pre-compensation (so-called write pre-compression) of the timing of the recording current I W with respect to the special recording pattern was automatically performed.

図９には本実施例のフローチャートに従って最適化された記録電流、及び高周波素子駆動電流の動作概念図を示す。本実施例において、実施例１に比べて製造歩留りや、記録密度で数％劣るが、従来技術に比べ外部磁界耐力特性は同等で、記録密度特性は圧倒的に優れた磁気記憶装置が実現できていることが確認された。また実施例１と同様に、通電タイミングｔＲＷ、切断タイミングｔＲＷＢの最適化を行なったところ、実施例１と同等の製造歩留りまで歩留りが改善され、好ましかった。 FIG. 9 shows an operation concept diagram of the recording current and the high-frequency element driving current optimized according to the flowchart of the present embodiment. In this embodiment, the manufacturing yield and recording density are inferior by several percent compared to the first embodiment, but the magnetic field resistance characteristics are equivalent to those of the prior art and the recording density characteristics are overwhelmingly superior. It was confirmed that Further, when the energization timing t RW and the cutting timing t RWB were optimized as in the first embodiment, the yield was improved to the same manufacturing yield as in the first embodiment, which was preferable.

本実施例では、室温での動作だけでなく装置保証温度範囲全域で優れた特性を有する装置を提供できる磁気記憶装置の例について説明する。   In this embodiment, an example of a magnetic storage device capable of providing a device having excellent characteristics not only at room temperature but also in the entire device guaranteed temperature range will be described.

図１０に装置動作環境が変化した場合における、記録電流通電開始時を基準とした時の高周波発振素子１４９における電流動作タイミングの本発明の設定フロー図を、動作オン時のタイミングｔＲＷを例として示す。本実施例の磁気記憶装置は、実施例１、２及び３と同様にして組立てられるが、追加機能として、外部環境検知機能と、外部環境を検知した情報をもとに、図５もしくは７に記載のプロセスで各パラメータを再調整する補正機能とを有するものである。外部環境検知機能と検知した情報をもとに、記録電流と高周波発振素子との動作タイミングｔＲＷを再調整する補正機能について、以下に説明する。以下では、外部環境の検知の対象は温度である。 FIG. 10 is a flow chart for setting the current operation timing of the high-frequency oscillation element 149 when the recording current energization start is a reference when the apparatus operating environment is changed. The timing t RW when the operation is on is taken as an example. Show. The magnetic storage device according to the present embodiment is assembled in the same manner as in the first, second, and third embodiments. However, as an additional function, an external environment detection function and information on detection of the external environment are used as shown in FIG. And a correction function for re-adjusting each parameter in the described process. A correction function for re-adjusting the operation timing t RW between the recording current and the high-frequency oscillation element based on the external environment detection function and the detected information will be described below. In the following, the target of detection of the external environment is temperature.

まず、全温度領域をＴ１，Ｔ２，・・，ＴＰの境界温度によってＱ＋１（Ｑ：０、１、２、・・・）の領域に分割する。Ｑ＝０の場合には分割しない。各温度領域Ｔ≦Ｔ１、・・、Ｔｑ−１＜Ｔ≦Ｔｑ、・・、ＴＱ＜Ｔを、それぞれの温度条件Ａ［１］、・・、Ａ［ｑ］、・・、Ａ［Ｑ＋１］と定義する。 First, the entire temperature range T 1, T 2, ··, Q by the boundary temperature T P + 1 (Q: 0,1,2 , ···) is divided into regions of. When Q = 0, no division is performed. Each temperature region T ≦ T 1 ,..., T q-1 <T ≦ T q ,..., T Q <T, and each temperature condition A [1],. A [Q + 1] is defined.

まず、高周波発振素子１４０を動作をオン、オフするタイミングは、磁気記憶装置の製造工程で図５などに示したフローにより決定し、その値ｔＲＷ（ＩＮ）およびｔＲＷＢ（ＩＮ）に設定する。更に、その製造や、検査工程で、上記温度領域で適切な代表点を決め、それら代表温度で予め最適なパラメータを図５などに示したフローにより事前に求め、ヘッド駆動制御装置のレジスタに格納し（１００１）、磁気記憶装置の制御に用いる。 First, the timing at which the operation of the high-frequency oscillation element 140 is turned on / off is determined by the flow shown in FIG. 5 in the manufacturing process of the magnetic memory device, and is set to the values t RW (IN) and t RWB (IN). . Further, in the manufacturing and inspection processes, appropriate representative points are determined in the above temperature range, and optimum parameters are obtained in advance by the flow shown in FIG. 5 and stored in the registers of the head drive control device. (1001), which is used to control the magnetic storage device.

次いで、フィールドでの実動作環境において、環境温度が変化し、磁気記憶装置の磁気記録ヘッド、及び磁気記録媒体を囲む環境温度Ｔが温度条件Ａ［ｑ］になれば（１００３〜１００６）、高周波発振素子１４０を動作させるタイミングを、それぞれの温度条件に対応した通電タイミングｔＲＷ（ｑ）に変更し（１００７〜１０１０）、記録再生を行う。高周波発振素子の動作オフのタイミングｔＲＷＢ（ｑ）についても同様である。図１１（ａ）、（ｂ）には、それぞれ図１０に示した実施例のＱ＝３、１の例を高周波発振素子の動作オンのタイミングｔＲＷ（ｑ）について示す。高周波発振素子の動作オフのタイミングｔＲＷＢ（ｑ）についても同様である。図８に示したように、再生動作時には抑制電流を設定すると信頼性が更に向上するので、特に好ましい。 Next, in the actual operating environment in the field, if the environmental temperature changes and the environmental temperature T surrounding the magnetic recording head and the magnetic recording medium of the magnetic storage device becomes the temperature condition A [q] (1003 to 1006), the high frequency The timing for operating the oscillation element 140 is changed to energization timing t RW (q) corresponding to each temperature condition (1007 to 1010), and recording / reproduction is performed. The same applies to the timing t RWB (q) when the operation of the high-frequency oscillation element is turned off. FIGS. 11A and 11B show examples of Q = 3 and 1 in the embodiment shown in FIG. 10 with respect to the timing t RW (q) of the operation on the high-frequency oscillator. The same applies to the timing t RWB (q) when the operation of the high-frequency oscillation element is turned off. As shown in FIG. 8, it is particularly preferable to set a suppression current during the reproduction operation because the reliability is further improved.

上記の実施例１、２及び３では温度環境変化を例に本発明の構成を説明したが、クリアランスが影響を受ける気圧変化に応じて最適パラメータを決定し、環境温度に応じてそれらのパラメータで磁気記録を行うように調整することで、動作保証環境で更に優れた特性を有する磁気記憶装置を提供できることは言うまでもない。   In the first, second, and third embodiments, the configuration of the present invention has been described by taking the temperature environment change as an example. It goes without saying that by adjusting to perform magnetic recording, it is possible to provide a magnetic storage device having even better characteristics in an operation guarantee environment.

また、上記の実施例では、高周波発振素子１４０が、記録磁極１２２と補助磁極１２４の間のギャップ部にある場合について説明したが、記録磁極１２２の近傍に高周波発振素子１４０があればギャップ部である必要はなく、また磁気ディスク装置（ＨＤＤ）を例に本発明の構成を説明したが、磁気テープ装置など他の磁気記憶装置にも適用できる。   In the above embodiment, the case where the high-frequency oscillation element 140 is in the gap portion between the recording magnetic pole 122 and the auxiliary magnetic pole 124 has been described. However, if the high-frequency oscillation element 140 is in the vicinity of the recording magnetic pole 122, the gap portion is used. The configuration of the present invention has been described by taking a magnetic disk device (HDD) as an example, but it can also be applied to other magnetic storage devices such as a magnetic tape device.

１００：磁気ヘッドの走行方向
１０１：磁気ヘッドと磁気記録媒体のクリアランス
１０２：熱膨張素子部（ＴＦＣ）
１０２ａ，ｂ：熱膨張素子部（ＴＦＣ）
１０２ｃ，ｄ：熱膨張素子部（ＴＦＣ）
１１０：再生ヘッド部
１１１：シールド層
１１２：センサ素子
１１３：磁気シールド
１１４：下部磁気シールド
１２０：記録ヘッド部
１２１：記録磁界
１２２：記録磁極（主磁極）
１２３：コイル
１２４：補助磁極
１２５：記録ギャップ部
１２６：発振制御磁界
１３０：磁気記録媒体
１３１：潤滑層
１３２：保護層
１３３：第２の磁性層
１３４：第１の磁性層
１３５：軟磁性下地層
１３６：非磁性基板
１３７：磁気記録媒体に記録された上向き磁化
１３８：磁気記録媒体に記録された下向き磁化
１４０：高周波発振素子部（ＳＴＯ）
１４１：高周波磁界発生層（ＦＧＬ）
１４２：中間層
１４３：スピン注入固定層
１４４：ＳＴＯ駆動用直流電源
１４５：高周波磁界
１４６：スピン注入固定層の磁化
１４７：高周波磁界発生層（ＦＧＬ）の磁化
１４８：高周波磁界発生層（ＦＧＬ）の磁化の回転方向
１４９：ＳＴＯ駆動電流
１５０：スライダ
１５１：ヘッド保護膜
１５２：磁気記録再生ヘッド浮上面（ＡＢＳ）
２００：スピンドルモータ
２０１：磁気記録媒体
２０２：アーム
２０３：磁気記録再生素子搭載スライダ
２０４：サスペンション
２０５：ＨＧＡ
２０６：アクチュエータ
２０７：ＳＴＯを駆動するための駆動信号
２０８：ヘッドアンプ集積回路(Ｒ／Ｗ−ＩＣ）
２０９：信号処理回路（Ｒ／Ｗチャネル）
２１０：マイクロプロセッサ（ＣＰＵ）
２１１：ディスクコントローラ（ＨＤＣ）
２１２：システム集積回路 100: Running direction of magnetic head 101: Clearance between magnetic head and magnetic recording medium 102: Thermal expansion element (TFC)
102a, b: Thermal expansion element part (TFC)
102c, d: Thermal expansion element part (TFC)
110: reproducing head portion 111: shield layer 112: sensor element 113: magnetic shield 114: lower magnetic shield 120: recording head portion 121: recording magnetic field 122: recording magnetic pole (main magnetic pole)
123: coil 124: auxiliary magnetic pole 125: recording gap 126: oscillation control magnetic field 130: magnetic recording medium 131: lubricating layer 132: protective layer 133: second magnetic layer 134: first magnetic layer 135: soft magnetic underlayer 136: Nonmagnetic substrate 137: Upward magnetization recorded on the magnetic recording medium 138: Downward magnetization recorded on the magnetic recording medium 140: High-frequency oscillation element (STO)
141: High-frequency magnetic field generation layer (FGL)
142: Intermediate layer 143: Spin injection pinned layer 144: STO driving DC power supply 145: High frequency magnetic field 146: Spin injection pinned layer magnetization 147: High frequency magnetic field generation layer (FGL) magnetization 148: High frequency magnetic field generation layer (FGL) Magnetization rotation direction 149: STO drive current 150: slider 151: head protective film 152: magnetic recording / reproducing head air bearing surface (ABS)
200: spindle motor 201: magnetic recording medium 202: arm 203: magnetic recording / reproducing element mounted slider 204: suspension 205: HGA
206: Actuator 207: Drive signal for driving STO 208: Head amplifier integrated circuit (R / W-IC)
209: Signal processing circuit (R / W channel)
210: Microprocessor (CPU)
211: Disk controller (HDC)
212: System integrated circuit

Claims (20)

磁気記録媒体と、
前記磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドと、
前記磁気記録媒体から情報を読み取る磁気再生ヘッドと、
前記磁気記録ヘッドの記録動作、前記磁気再生ヘッドの再生動作を制御・処理する手段とを備え、
前記磁気記録媒体への記録動作時には、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に通電し、シーク時には、前記高周波磁界発振素子への通電を停止することを特徴とする磁気記憶装置。 A magnetic recording medium;
A microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to the magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and a means for energizing the high-frequency magnetic field oscillation element;
A magnetic reproducing head for reading information from the magnetic recording medium;
Means for controlling and processing the recording operation of the magnetic recording head and the reproducing operation of the magnetic reproducing head,
The magnetic recording medium is characterized in that the high-frequency magnetic field oscillation element is energized by means for energizing the high-frequency magnetic field oscillation element during recording on the magnetic recording medium, and the energization to the high-frequency magnetic field oscillation element is stopped during seeking. apparatus. 磁気記録媒体と、
前記磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドと、
前記磁気記録媒体から情報を読み取る磁気再生ヘッドと、
前記磁気記録ヘッドの記録動作、前記磁気再生ヘッドの再生動作を制御・処理する手段とを備え、
前記記録磁極への通電を開始する前の非記録時に、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に通電し、その後、前記記録磁極への通電を行って、記録動作を行うことを特徴とする磁気記憶装置。 A magnetic recording medium;
A microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to the magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and a means for energizing the high-frequency magnetic field oscillation element;
A magnetic reproducing head for reading information from the magnetic recording medium;
Means for controlling and processing the recording operation of the magnetic recording head and the reproducing operation of the magnetic reproducing head,
At the time of non-recording before starting the energization to the recording magnetic pole, the high-frequency magnetic field oscillation element is energized by means for energizing the high-frequency magnetic field oscillation element, and then the recording magnetic pole is energized to perform the recording operation. A magnetic storage device. 磁気記録媒体と、
前記磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドと、
前記磁気記録媒体から情報を読み取る磁気再生ヘッドと、
前記磁気記録ヘッドの記録動作、前記磁気再生ヘッドの再生動作を制御・処理する手段とを備え、
記録動作時には、前記記録磁極への通電に所定の期間先んじて、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に単一の値の電流値を通電することを特徴とする磁気記憶装置。 A magnetic recording medium;
A microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to the magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and a means for energizing the high-frequency magnetic field oscillation element;
A magnetic reproducing head for reading information from the magnetic recording medium;
Means for controlling and processing the recording operation of the magnetic recording head and the reproducing operation of the magnetic reproducing head,
In a recording operation, a single current value is passed through the high-frequency magnetic field oscillating element by means for energizing the high-frequency magnetic field oscillating element prior to energizing the recording magnetic pole for a predetermined period of time. apparatus. 磁気記録媒体と、
前記磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドと、
前記磁気記録媒体から情報を読み取る磁気再生ヘッドと、
前記磁気記録ヘッドの記録動作、前記磁気再生ヘッドの再生動作を制御・処理する手段とを備え、
前記記録磁極への通電を開始する前の非記録時に、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に単一の値の電流値を通電し、その後、前記記録磁極への通電を行って、記録動作を行い、シーク時には、前記高周波磁界発振素子への通電を停止することを特徴とする磁気記憶装置。 A magnetic recording medium;
A microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to the magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and a means for energizing the high-frequency magnetic field oscillation element;
A magnetic reproducing head for reading information from the magnetic recording medium;
Means for controlling and processing the recording operation of the magnetic recording head and the reproducing operation of the magnetic reproducing head,
At the time of non-recording before starting the energization to the recording magnetic pole, a single current value is energized to the high-frequency magnetic field oscillation element by means for energizing the high-frequency magnetic field oscillation element, and then the energization to the recording magnetic pole And performing a recording operation, and stopping the energization to the high-frequency magnetic field oscillation element at the time of seek. 前記マイクロ波アシスト磁気記録ヘッドは、記録磁極と補助磁極を有し、かつこれらの間のギャップ部に前記高周波磁界発振素子を有することを特徴とする請求項１乃至４何れか１つに記載の磁気記憶装置。   5. The microwave-assisted magnetic recording head according to claim 1, wherein the microwave-assisted magnetic recording head has a recording magnetic pole and an auxiliary magnetic pole, and has the high-frequency magnetic field oscillation element in a gap portion therebetween. Magnetic storage device. 前記磁気記憶装置の記録再生特性が最適化されるように調整された前記高周波磁界発振素子への通電と前記記録磁極への通電のタイミングが、前記磁気記憶装置の動作の制御に用いられるレジスタに格納されていることを特徴とする請求項１乃至５何れか１つに記載の磁気記憶装置。   The timing of energization to the high-frequency magnetic field oscillation element and the energization to the recording magnetic pole adjusted so as to optimize the recording / reproducing characteristics of the magnetic storage device is the register used for controlling the operation of the magnetic storage device. The magnetic storage device according to claim 1, wherein the magnetic storage device is stored. 前記磁気記憶装置は、更に、前記高周波磁界発振素子と前記磁気記録媒体とのクリアランスを制御する手段を備え、前記磁気記憶装置の記録再生特性が最適化されるように調整されたクリアランスの値をレジスタに格納されていることを特徴とする請求項１乃至６何れか１つに記載の磁気記憶装置。   The magnetic storage device further includes means for controlling a clearance between the high-frequency magnetic field oscillating element and the magnetic recording medium, and the clearance value adjusted to optimize the recording / reproducing characteristics of the magnetic storage device. The magnetic storage device according to claim 1, wherein the magnetic storage device is stored in a register. 前記磁気記憶装置の環境が変化した場合に、前記高周波発振素子への通電のタイミングを再調整すること特徴とする請求項６または７に記載の磁気記憶装置。   8. The magnetic storage device according to claim 6, wherein when the environment of the magnetic storage device changes, the timing of energization to the high-frequency oscillation element is readjusted. 前記記録再生特性が再生出力もしくはエラーレートであることを特徴とする請求項７または８に記載の磁気記憶装置。   9. The magnetic storage device according to claim 7, wherein the recording / reproducing characteristic is a reproduction output or an error rate. 前記環境の変化は、温度変化であることを特徴とする請求項８に記載の磁気記憶装置。   The magnetic storage device according to claim 8, wherein the environmental change is a temperature change. 前記環境の変化は、気圧変化であることを特徴とする請求項８に記載の磁気記憶装置。   The magnetic storage device according to claim 8, wherein the change in the environment is a change in atmospheric pressure. 前記磁気記録媒体は、パターン媒体であることを特徴とする請求項１乃至１１何れか１つに記載の磁気記憶装置。   The magnetic storage device according to claim 1, wherein the magnetic recording medium is a pattern medium. 磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドを駆動するヘッド駆動制御装置であって、
記録信号を供給する記録信号供給手段と、
高周波磁界発振素子に駆動信号を供給する駆動制御手段とを備え、
前記駆動制御手段は、磁気記録媒体への記録動作時には、前記高周波磁界発振素子に通電し、シーク時には、前記高周波磁界発振素子への通電を停止するように制御することを特徴とするヘッド駆動制御装置。 Head drive for driving a microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to a magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and means for energizing the high-frequency magnetic field oscillation element A control device,
Recording signal supply means for supplying a recording signal;
Drive control means for supplying a drive signal to the high-frequency magnetic field oscillation element,
The drive control means controls to energize the high-frequency magnetic field oscillation element during a recording operation on a magnetic recording medium, and to stop energization to the high-frequency magnetic field oscillation element during a seek. apparatus. 磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドを駆動するヘッド駆動制御装置であって、
記録信号を供給する記録信号供給手段と、
前記高周波磁界発振素子に駆動信号を供給する駆動制御手段と、
前記記録磁極への通電を開始する前の非記録時に、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に通電し、その後、前記記録磁極への通電を行って、記録動作を行うように制御する手段とを有することを特徴とするヘッド駆動制御装置。 Head drive for driving a microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to a magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and means for energizing the high-frequency magnetic field oscillation element A control device,
Recording signal supply means for supplying a recording signal;
Drive control means for supplying a drive signal to the high-frequency magnetic field oscillation element;
At the time of non-recording before starting the energization to the recording magnetic pole, the high-frequency magnetic field oscillation element is energized by means for energizing the high-frequency magnetic field oscillation element, and then the recording magnetic pole is energized to perform the recording operation. A head drive control device characterized by comprising: 前記駆動制御手段は、オーバシュート量を調整する手段を含むことを特徴とする請求項１３または１４に記載のヘッド駆動制御装置。   15. The head drive control device according to claim 13, wherein the drive control means includes means for adjusting an overshoot amount. 前記駆動制御手段は、正、負の極性を切り換える駆動手段を含むことを特徴とする請求項１３または１４に記載のヘッド駆動制御装置。   15. The head drive control device according to claim 13, wherein the drive control means includes drive means for switching between positive and negative polarities. 前記高周波磁界発振素子と前記磁気記録媒体とのクリアランスを制御する手段を、更に有することを特徴とする請求項１３または１４に記載のヘッド駆動制御装置。   15. The head drive control device according to claim 13, further comprising means for controlling a clearance between the high-frequency magnetic field oscillation element and the magnetic recording medium. 更に、前記駆動信号の値、前記オーバシュート量の値、前記記録信号供給信号の値、これらの動作タイミングの値を保持するレジスタを有することを特徴とする請求項１５に記載のヘッド駆動制御装置。   16. The head drive control device according to claim 15, further comprising a register that holds the value of the drive signal, the value of the overshoot amount, the value of the recording signal supply signal, and the value of the operation timing thereof. . 磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドを駆動するヘッド駆動制御方法であって、
前記磁気記録媒体への記録動作時には、前記高周波磁界発振素子に通電し、シーク時には、前記高周波磁界発振素子への通電を停止するように制御することを特徴とするヘッド駆動制御方法。 Head drive for driving a microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to a magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and means for energizing the high-frequency magnetic field oscillation element A control method,
A head drive control method, wherein control is performed so that the high-frequency magnetic field oscillation element is energized during a recording operation on the magnetic recording medium, and the high-frequency magnetic field oscillation element is stopped during a seek operation. 磁気記録媒体に書き込むための記録磁界を発生する記録磁極と、高周波磁界を発生する高周波磁界発振素子と、前記高周波磁界発振素子に通電する手段とを有するマイクロ波アシスト磁気記録ヘッドを駆動するヘッド駆動制御方法であって、
前記記録磁極への通電を開始する前の非記録時に、前記高周波磁界発振素子に通電する手段により前記高周波磁界発振素子に通電し、その後、前記記録磁極への通電を行って、記録動作を行うことを特徴とするヘッド駆動制御方法。 Head drive for driving a microwave-assisted magnetic recording head having a recording magnetic pole for generating a recording magnetic field for writing to a magnetic recording medium, a high-frequency magnetic field oscillation element for generating a high-frequency magnetic field, and means for energizing the high-frequency magnetic field oscillation element A control method,
At the time of non-recording before starting the energization to the recording magnetic pole, the high-frequency magnetic field oscillation element is energized by means for energizing the high-frequency magnetic field oscillation element, and then the recording magnetic pole is energized to perform the recording operation. A head drive control method characterized by the above.
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