JP2013131849A - Spherical compound multi-channel piezoelectric vibrator and method of manufacturing the same - Google Patents

Spherical compound multi-channel piezoelectric vibrator and method of manufacturing the same Download PDF

Info

Publication number
JP2013131849A
JP2013131849A JP2011278782A JP2011278782A JP2013131849A JP 2013131849 A JP2013131849 A JP 2013131849A JP 2011278782 A JP2011278782 A JP 2011278782A JP 2011278782 A JP2011278782 A JP 2011278782A JP 2013131849 A JP2013131849 A JP 2013131849A
Authority
JP
Japan
Prior art keywords
spherical
piezoelectric
channel
upper electrode
channel piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011278782A
Other languages
Japanese (ja)
Other versions
JP5771135B2 (en
Inventor
Shigemasa Oya
茂正 大矢
Takashi Izawa
崇 伊沢
Takeshi Watanabe
豪 渡邉
Takashi Sato
孝 佐藤
Toshihiko Miyashita
俊彦 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ueda Japan Radio Co Ltd
Original Assignee
Ueda Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ueda Japan Radio Co Ltd filed Critical Ueda Japan Radio Co Ltd
Priority to JP2011278782A priority Critical patent/JP5771135B2/en
Publication of JP2013131849A publication Critical patent/JP2013131849A/en
Application granted granted Critical
Publication of JP5771135B2 publication Critical patent/JP5771135B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Thermotherapy And Cooling Therapy Devices (AREA)
  • Surgical Instruments (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a spherical multi-channel piezoelectric vibrator which is easily manufactured.SOLUTION: A spherical multi-channel piezoelectric vibrator 1 is a composite body of piezoelectric vibrator units 8, each of which having electrode layers 3 and 4 on upper and lower surfaces, which are arrayed in two dimension, and includes a spherical multi-channel piezoelectric vibration plate 9 formed spherically by protruding from a lower surface side, and an upper side electrode lead foil 12 attached to an upper side surface of an upper side electrode layer 3 of the multi-channel piezoelectric vibration plate 9 (here, at the upper side electrode lead foil 12, an extension part 12a is formed which extends outways from respective sides of the spherical multi-channel piezoelectric vibration plate 9 to cover at least a portion of the side surface of a sound absorbing material layer 10, and an adhesive layer is attached to the surface of the extension part 12a of the upper side electrode lead foil 12). A plurality of spherical multi-channel piezoelectric vibrators 1 are arrayed in two dimension in the direction along the surface of the spherical multi-channel piezoelectric vibration plate 9, and the multi-channel piezoelectric vibrators 1 adjoining each other are electrically connected together through the adhesive layer which is attached to the surface of the extension part 12a of the respective upper side electrode lead foils 12, to form a spherical compound multi-channel piezoelectric vibrator.

Description

本発明は、複数個の球面状多チャンネル圧電振動子を組み合わせて複合化した球面状複合多チャンネル圧電振動子及びその製造方法に関する。   The present invention relates to a spherical composite multichannel piezoelectric vibrator obtained by combining and combining a plurality of spherical multichannel piezoelectric vibrators, and a method for manufacturing the same.

患者の患部に超音波を照射し、患部を超音波振動させることによって加熱して治療する超音波治療が行なわれている。この超音波治療用の超音波発信装置では、超音波を集中的に患部に照射するために、超音波の放射面を下面側に突き出した球面状に形成した球面状圧電振動子が広く利用されている。この球面状圧電振動子から放射される超音波の焦点位置を精度良く調整するために、球面状圧電振動子として複数個の圧電振動子単位を二次元方向にかつ球面状に配列した二次元アレイ型の球面状多チャンネル圧電振動子を用いることが検討されている。   2. Description of the Related Art Ultrasound therapy is performed in which an ultrasonic wave is irradiated to an affected area of a patient and the affected area is ultrasonically vibrated to be heated and treated. In this ultrasonic transmission device for ultrasonic therapy, a spherical piezoelectric vibrator formed in a spherical shape with its ultrasonic radiation surface protruding downward is widely used to irradiate the affected area with concentrated ultrasonic waves. ing. A two-dimensional array in which a plurality of piezoelectric vibrator units are arranged in a two-dimensional direction and spherically as a spherical piezoelectric vibrator in order to accurately adjust the focal position of the ultrasonic wave radiated from the spherical piezoelectric vibrator. The use of a spherical multi-channel piezoelectric vibrator of the type has been studied.

特許文献１には、球面状（球殻状）の圧電振動板を、複数個の圧電振動子単位（ピエゾ素子群）から形成すると、複数個の圧電振動子単位にかかる駆動電圧を位相制御することによって、焦点位置を任意にコントロールできる旨の記載がある。   In Patent Document 1, when a spherical (spherical shell) piezoelectric diaphragm is formed from a plurality of piezoelectric vibrator units (piezo element group), the phase of the drive voltage applied to the plurality of piezoelectric vibrator units is controlled. There is a description that the focal position can be arbitrarily controlled.

特許文献２には、球面状（お椀形）に形成された治療用超音波振動子を複数の振動子片に切断して、その切断した複数の振動子片の各々に超音波送波の遅延信号を印加する遅延回路を接続して、治療用超音波振動子から放射される高エネルギー超音波の焦点位置を可変にすることが記載されている。   In Patent Document 2, a therapeutic ultrasonic transducer formed in a spherical shape (a bowl shape) is cut into a plurality of transducer pieces, and an ultrasonic wave transmission delay is applied to each of the cut transducer pieces. It is described that a focal position of high-energy ultrasonic waves emitted from a therapeutic ultrasonic transducer is made variable by connecting a delay circuit for applying a signal.

特開２００１−７０３３３号公報JP 2001-70333 A 特開２００１−４６３８７号公報JP 2001-46387 A

特許文献１、２に記載されているように、複数個の圧電振動子単位を二次元方向にかつ球面状に配列した球面状多チャンネル圧電振動子は超音波の焦点位置を精度良く調整できるという利点がある。しかしながら、球面状多チャンネル圧電振動子は各圧電振動子単位と外部電源とを電気的に接続する必要があるため、多チャンネル化するのが困難であるという問題がある。すなわち、球面状多チャンネル圧電振動子は一般に、各圧電振動子単位が上下表面に電極層を有していて、上側電極層の上方には患部への超音波の伝搬効率を向上させるために音響整合層が、下側電極の下方には下側電極層から放射される超音波を吸収してノイズを低減させるために吸音材層が付設されている。このため、各圧電振動子単位の上側電極層と下側電極層とをそれぞれ外部電源に接続するのが難しい。なお、特許文献１、２には、圧電振動子単位を外部電源に接続する方法に関する具体的な記載はない。
従って、本発明の目的は、製造が容易な球面状の多チャンネル圧電振動子及び球面状多チャンネル圧電振動子の製造方法を提供することにある。 As described in Patent Documents 1 and 2, a spherical multi-channel piezoelectric vibrator in which a plurality of piezoelectric vibrator units are arranged in a two-dimensional direction and in a spherical shape can adjust the focal position of ultrasonic waves with high accuracy. There are advantages. However, since the spherical multi-channel piezoelectric vibrator needs to electrically connect each piezoelectric vibrator unit and an external power source, there is a problem that it is difficult to make multi-channel. That is, in the spherical multichannel piezoelectric vibrator, each piezoelectric vibrator unit generally has an electrode layer on the upper and lower surfaces, and an acoustic wave is provided above the upper electrode layer to improve the propagation efficiency of ultrasonic waves to the affected area. The matching layer is provided with a sound absorbing material layer below the lower electrode in order to absorb the ultrasonic waves emitted from the lower electrode layer and reduce noise. For this reason, it is difficult to connect the upper electrode layer and the lower electrode layer of each piezoelectric vibrator unit to an external power source. In Patent Documents 1 and 2, there is no specific description regarding a method of connecting a piezoelectric vibrator unit to an external power source.
Accordingly, an object of the present invention is to provide a spherical multi-channel piezoelectric vibrator and a method for producing a spherical multi-channel piezoelectric vibrator that are easy to manufacture.

本発明は、圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の圧電振動板の圧電材料板と下側電極層を、平面方向かつ二次元方向に分割した圧電振動子単位の複合体であって、下面側に突き出した球面状に成形された正方形もしくは長方形の球面状多チャンネル圧電振動板；球面状多チャンネル圧電振動板の下側に付設した球面状吸音材層；一方の端部が各圧電振動子単位の下側電極層に電気的に接続し、そして他方の端部が露出するように、球面状吸音材層に埋設したリード線；球面状多チャンネル圧電振動板の上側電極層の上側表面に付設した上側電極引出箔、但し、該上側電極引出箔は、正方形もしくは長方形の球面状多チャンネル圧電振動板の各辺から外に延びて球面状吸音材層の側面の少なくとも一部を覆う延長部が形成されており、その上側電極引出箔の延長部の表面には接着剤層が付設されている；そして上側電極引出箔の上側表面に付設した球面状音響整合層、を含む球面状多チャンネル圧電振動子が複数個、球面状多チャンネル圧電振動板の表面に沿う方向でかつ二次元方向に整列してなり、かつ隣接する球面状多チャンネル圧電振動子を、各々の上側電極引出箔の延長部の表面に付設されている接着剤層を介して電気的に接続させることにより形成した球面状複合多チャンネル圧電振動子にある。   In the present invention, a piezoelectric material plate and a lower electrode layer of a square or rectangular piezoelectric diaphragm formed by forming an upper electrode layer and a lower electrode layer on each surface of a piezoelectric material plate are arranged in a plane direction and a two-dimensional direction. A composite body of divided piezoelectric vibrator units, a square or rectangular spherical multi-channel piezoelectric diaphragm formed into a spherical shape protruding on the lower surface side; a spherical surface attached to the lower side of the spherical multi-channel piezoelectric diaphragm -Like sound-absorbing material layer; a lead wire embedded in the spherical sound-absorbing material layer so that one end is electrically connected to the lower electrode layer of each piezoelectric vibrator unit and the other end is exposed; Upper electrode lead foil provided on the upper surface of the upper electrode layer of the multi-channel piezoelectric diaphragm, wherein the upper electrode lead foil extends outward from each side of the square or rectangular spherical multi-channel piezoelectric diaphragm. Less side surface of the sound absorbing material layer And an adhesive layer is provided on the surface of the upper electrode lead foil extension; and a spherical acoustic matching layer provided on the upper surface of the upper electrode lead foil. A plurality of spherical multi-channel piezoelectric vibrators including a plurality of spherical multi-channel piezoelectric vibrators aligned in a two-dimensional direction along the surface of the spherical multi-channel piezoelectric diaphragm, and adjacent spherical multi-channel piezoelectric vibrators, A spherical composite multi-channel piezoelectric vibrator formed by electrical connection via an adhesive layer attached to the surface of the extension of the upper electrode lead foil.

本発明の球面状複合多チャンネル圧電振動子の好ましい態様は、次の通りである。
（１）球面状多チャンネル圧電振動子の各々の上側電極引出箔の延長部の表面に付設されている接着剤層の接着剤が導電性接着剤である。
（２）球面状多チャンネル圧電振動子の各々の上側電極引出箔が、その幅が正方形もしくは長方形の球面状多チャンネル圧電振動子の各辺の長さの１／２以下である帯状であって、該帯状の上側電極引出箔が球面状多チャンネル圧電振動板の各辺の中央から外に延びている。 Preferred embodiments of the spherical composite multichannel piezoelectric vibrator of the present invention are as follows.
(1) The adhesive of the adhesive layer provided on the surface of the extended portion of the upper electrode lead foil of each spherical multichannel piezoelectric vibrator is a conductive adhesive.
(2) Each upper electrode lead foil of the spherical multi-channel piezoelectric vibrator has a strip shape whose width is equal to or less than ½ of the length of each side of the spherical or rectangular spherical multi-channel piezoelectric vibrator. The strip-shaped upper electrode lead foil extends outward from the center of each side of the spherical multichannel piezoelectric diaphragm.

本発明はさらに、下記の工程を含む方法によって得られた球面状多チャンネル圧電振動子を複数個、各々の上側電極引出箔の延長部の表面に付設されている接着剤層を介して電気的に接続することからなる上記本発明の球面状複合多チャンネル圧電振動子製造方法にもある。
（１）圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の圧電振動板の圧電材料板と下側電極層を、平面方向かつ二次元方向に分割した圧電振動子単位の複合体として形成された、上側電極層が凹状の球面状である正方形もしくは長方形の球面状多チャンネル圧電振動板を用意する工程。
（２）球面状多チャンネル圧電振動板の上側電極層の上に上側電極引出箔を付設する工程、但し、該上側電極引出箔は、正方形もしくは長方形の球面状多チャンネル圧電振動板の各辺から外に延びた延長部が形成されている。
（３）上側電極引出箔の上側表面に球面状音響整合層を付設する工程。
（４）球面状多チャンネル圧電振動板の各圧電振動子単位複合体の下側電極層にリード線を取り付ける工程。
（５）球面状多チャンネル圧電振動板の下側に球面状吸音材層を、リード線の端部が露出するように付設する工程。
（６）上側電極引出箔を球面状吸音材側に折り曲げる工程。そして、
（７）上側電極引出箔の延長部の表面には接着剤層を形成する工程。
但し、（３）の工程は、（４）〜（７）のうちのいずれかの工程の後に行なってもよい。 The present invention further includes a plurality of spherical multi-channel piezoelectric vibrators obtained by a method including the following steps, electrically connected via an adhesive layer attached to the surface of the extension of each upper electrode lead foil. There is also a method for manufacturing a spherical composite multi-channel piezoelectric vibrator according to the present invention, which comprises connecting to the above.
(1) A piezoelectric material plate and a lower electrode layer of a square or rectangular piezoelectric diaphragm formed by forming an upper electrode layer and a lower electrode layer on each surface of a piezoelectric material plate are divided in a planar direction and a two-dimensional direction. A step of preparing a square or rectangular spherical multi-channel piezoelectric diaphragm formed as a composite body of piezoelectric vibrator units, the upper electrode layer having a concave spherical shape.
(2) A step of attaching an upper electrode lead foil on the upper electrode layer of the spherical multi-channel piezoelectric diaphragm, provided that the upper electrode lead foil is formed from each side of the square or rectangular spherical multi-channel piezoelectric diaphragm. An extension extending outward is formed.
(3) A step of providing a spherical acoustic matching layer on the upper surface of the upper electrode lead-out foil.
(4) A step of attaching a lead wire to the lower electrode layer of each piezoelectric vibrator unit complex of the spherical multi-channel piezoelectric diaphragm.
(5) A step of attaching a spherical sound-absorbing material layer to the lower side of the spherical multi-channel piezoelectric diaphragm so that the end portion of the lead wire is exposed.
(6) A step of bending the upper electrode lead foil toward the spherical sound absorbing material. And
(7) A step of forming an adhesive layer on the surface of the extended portion of the upper electrode lead foil.
However, the step (3) may be performed after any of the steps (4) to (7).

上記本発明の球面状複合多チャンネル圧電振動子製造方法において、球面状多チャンネル圧電振動板は下記の工程を含む方法によって得られたものであることが好ましい。
（１）大型圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の大型圧電振動板を用意する工程。
（２）大型圧電振動板の大型圧電材料板と下側電極層を平面方向かつ二次元方向に分割して、大型圧電振動板を圧電振動子単位の複合体として形成された、大型多チャンネル圧電振動板を得る工程。
（３）大型多チャンネル圧電振動板の上側電極層に球面状体を押し当てて、下方に突き出た球面状に成形された正方形もしくは長方形の大型球面状多チャンネル圧電振動板を得る工程。そして、
（４）大型球面状多チャンネル圧電振動板を、大型球面状多チャンネル圧電振動板の辺に平行な線に沿って切断して、二個以上の球面状多チャンネル圧電振動板を得る工程。 In the spherical composite multichannel piezoelectric vibrator manufacturing method of the present invention, the spherical multichannel piezoelectric diaphragm is preferably obtained by a method including the following steps.
(1) A step of preparing a square or rectangular large piezoelectric diaphragm formed by forming an upper electrode layer and a lower electrode layer on each surface of a large piezoelectric material plate.
(2) Large-sized multi-channel piezoelectric device in which a large piezoelectric material plate and a lower electrode layer of a large piezoelectric diaphragm are divided in a planar direction and in a two-dimensional direction, and the large piezoelectric diaphragm is formed as a composite of piezoelectric vibrator units. A step of obtaining a diaphragm.
(3) A step of pressing a spherical body against the upper electrode layer of the large multi-channel piezoelectric diaphragm to obtain a square or rectangular large spherical multi-channel piezoelectric diaphragm formed into a spherical shape protruding downward. And
(4) A step of cutting the large spherical multi-channel piezoelectric diaphragm along a line parallel to the side of the large spherical multi-channel piezoelectric diaphragm to obtain two or more spherical multi-channel piezoelectric diaphragms.

本発明の球面状複合多チャンネル圧電振動子は、予め作成した多チャンネル圧電振動子を組み合わせて複合化することによって構成されているので製造が容易である。本発明の球面状複合多チャンネル圧電振動子は、圧電振動子単位の上側電極層が吸音材層の側面まで引き出されているので外部電源との接続が容易である。
また、本発明の製造方法を利用することによって、球面状複合多チャンネル圧電振動子を工業的に有利に製造することができる。 The spherical composite multi-channel piezoelectric vibrator of the present invention is easy to manufacture because it is constructed by combining a multi-channel piezoelectric vibrator prepared in advance. In the spherical composite multi-channel piezoelectric vibrator of the present invention, the upper electrode layer of each piezoelectric vibrator unit is drawn out to the side surface of the sound absorbing material layer, so that it can be easily connected to an external power source.
Further, by using the manufacturing method of the present invention, the spherical composite multi-channel piezoelectric vibrator can be manufactured industrially advantageously.

本発明に従う球面状複合多チャンネル圧電振動子の一例の斜視図である。1 is a perspective view of an example of a spherical composite multichannel piezoelectric vibrator according to the present invention. FIG. 図１の球面状複合多チャンネル圧電振動子から音響整合層を外した状態を示す平面図である。FIG. 2 is a plan view showing a state where an acoustic matching layer is removed from the spherical composite multichannel piezoelectric vibrator of FIG. 1. （ａ）は図１の球面状複合多チャンネル圧電振動子を構成する球面状多チャンネル圧電振動子の正面図、（ｂ）はその要部拡大図である。(A) is a front view of a spherical multi-channel piezoelectric vibrator constituting the spherical composite multi-channel piezoelectric vibrator of FIG. 1, and (b) is an enlarged view of a main part thereof. （ａ）は本発明の球面状複合多チャンネル圧電振動子の製造に用いることができる大型圧電振動板の一例を示す平面図、（ｂ）はその正面図である。(A) is a top view which shows an example of the large sized piezoelectric diaphragm which can be used for manufacture of the spherical-shaped composite multichannel piezoelectric vibrator of this invention, (b) is the front view. （ａ）は図４の大型圧電振動板の下側電極層と圧電材料板とを溝によって分割して得た大型多チャンネル圧電振動板の底面図、（ｂ）はその正面図である。(A) is a bottom view of a large multi-channel piezoelectric diaphragm obtained by dividing the lower electrode layer and the piezoelectric material plate of the large piezoelectric diaphragm in FIG. 4 by grooves, and (b) is a front view thereof. 図５の大型多チャンネル圧電振動板を下方に突き出た球面状に成形した状態を示す正面図である。It is a front view which shows the state shape | molded by the spherical shape which protruded below the large sized multi-channel piezoelectric diaphragm of FIG. （ａ）は図６の大型球面状多チャンネル圧電振動板の溝に樹脂を充填した状態を示す底面図、（ｂ）はその正面図である。(A) is a bottom view showing a state in which a resin is filled in the groove of the large spherical multi-channel piezoelectric diaphragm of FIG. 6, and (b) is a front view thereof. （ａ）は球面状多チャンネル圧電振動板の上側電極引出箔を付設した状態を示す平面図、（ｂ）はその正面図である。(A) is a top view which shows the state which attached the upper electrode extraction foil of the spherical-shaped multichannel piezoelectric diaphragm, (b) is the front view. 図８の球面状多チャンネル圧電振動板の上側電極層の上に音響整合層を付設した状態を示す正面図である。It is a front view which shows the state which provided the acoustic matching layer on the upper side electrode layer of the spherical-shaped multichannel piezoelectric diaphragm of FIG. 図９の球面状多チャンネル圧電振動板下側電極層の下にリード線と吸音材層とを付設した状態を示す正面図である。FIG. 10 is a front view showing a state in which a lead wire and a sound absorbing material layer are attached below the spherical multi-channel piezoelectric diaphragm lower electrode layer of FIG. 9. 本発明に従う球面状複合多チャンネル圧電振動子の別の一例の正面図である。It is a front view of another example of the spherical composite multi-channel piezoelectric vibrator according to the present invention.

本発明の球面状複合多チャンネル圧電振動子は、複数個の球面状多チャンネル圧電振動子を組み合わせて複合化したものである。球面状多チャンネル圧電振動子は、二次元アレイ型の圧電振動子であり、圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の圧電振動板の圧電材料板と下側電極層を、平面方向かつ二次元方向に分割した圧電振動子単位の複合体であって、下面側に突き出した球面状に成形された正方形もしくは長方形の球面状多チャンネル圧電振動板を含む。球面状多チャンネル圧電振動板の上側電極層（すなわち、圧電振動子単位の上側電極層）は、上側電極層の上に付設された上側電極引出箔の延長部を、隣接する多チャンネル圧電振動子の上側電極引出箔の延長部と接着剤層を介して電気的に接続することによって、球面状複合多チャンネル圧電振動子を構成する全ての多チャンネル圧電振動子の上側電極が一つの共通電極として外部に引き出されている。一方の球面状多チャンネル圧電振動板の下側電極層（すなわち、圧電振動子単位の下側電極層）は吸音材層に埋設したリード線によって、各圧電振動子単位が独立して外部に引き出されている。   The spherical composite multichannel piezoelectric vibrator of the present invention is a composite of a plurality of spherical multichannel piezoelectric vibrators. The spherical multi-channel piezoelectric vibrator is a two-dimensional array type piezoelectric vibrator, and is a piezoelectric piezoelectric plate having a square or rectangular shape formed by forming an upper electrode layer and a lower electrode layer on each surface of a piezoelectric material plate. A composite of piezoelectric vibrator units in which the material plate and lower electrode layer are divided in a planar direction and in a two-dimensional direction, and a square or rectangular spherical multi-channel piezoelectric vibration projecting to the lower surface side. Includes board. The upper electrode layer of the spherical multichannel piezoelectric diaphragm (that is, the upper electrode layer of the piezoelectric vibrator unit) is an extension of the upper electrode lead foil provided on the upper electrode layer, and is adjacent to the multichannel piezoelectric vibrator. The upper electrode of all the multi-channel piezoelectric vibrators constituting the spherical composite multi-channel piezoelectric vibrator as one common electrode by electrically connecting with the extension part of the upper electrode lead-out foil through the adhesive layer Has been pulled out. The lower electrode layer of one spherical multi-channel piezoelectric diaphragm (that is, the lower electrode layer of the piezoelectric vibrator unit) is pulled out to the outside independently by a lead wire embedded in the sound absorbing material layer. It is.

次に、本発明の球面状複合多チャンネル圧電振動子の構成を添付図面の図１〜３を用いて説明する。図１は、本発明の球面状複合多チャンネル圧電振動子の一例の斜視図である。図２は、図１の球面状複合多チャンネル圧電振動子から音響整合層を外した状態を示す平面図である。図３は、図１の球面状複合多チャンネル圧電振動子を構成する球面状多チャンネル圧電振動子の正面図である。   Next, the configuration of the spherical composite multi-channel piezoelectric vibrator of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view of an example of a spherical composite multichannel piezoelectric vibrator of the present invention. FIG. 2 is a plan view showing a state where the acoustic matching layer is removed from the spherical composite multi-channel piezoelectric vibrator of FIG. FIG. 3 is a front view of the spherical multi-channel piezoelectric vibrator constituting the spherical composite multi-channel piezoelectric vibrator of FIG.

図１において、球面状複合多チャンネル圧電振動子は、Ｘ方向とＹ方向の二次元方向にそれぞれ二個ずつ整列させた四個の球面状多チャンネル圧電振動子１から形成されている。球面状多チャンネル圧電振動子１は、圧電材料板２の各表面に上側電極層３と下側電極層４とを形成してなる圧電振動板５の圧電材料板２と下側電極層４を、樹脂６が充填された溝７で平面方向かつ二次元方向に分割した圧電振動子単位８の複合体であって、下面側に突き出した球面状に成形された球面状多チャンネル圧電振動板９を含む。球面状多チャンネル圧電振動板９の下側には球面状吸音材層１０が付設されている。球面状吸音材層１０には、リード線１１が、一方の端部が各圧電振動子単位８の下側電極層４に電気的に接続し、そして他方の端部が露出するように埋設されている。一方、球面状多チャンネル圧電振動板９の上側電極層３の上側表面には、上側電極引出箔１２が付設されている。上側電極引出箔１２は、球面状多チャンネル圧電振動板９の各辺から外に延びて吸音材層１０の側面の少なくとも一部を覆う延長部１２ａが形成されており、その延長部１２ａの表面には接着剤層１３が付設されている。隣接する球面状多チャンネル圧電振動子１は、各々の上側電極引出箔１２の延長部１２ａの表面に付設されている接着剤層１３を介して電気的に接続されている。上側電極引出箔１２の上にはさらに球面状音響整合層１４が付設されている。球面状音響整合層１４は、球面状多チャンネル圧電振動板９の溝７に対応した位置に、樹脂１５が充填された溝１６が設けられている。   In FIG. 1, the spherical composite multi-channel piezoelectric vibrator is formed of four spherical multi-channel piezoelectric vibrators 1 that are aligned two by two in the two-dimensional directions of the X direction and the Y direction. The spherical multichannel piezoelectric vibrator 1 includes a piezoelectric material plate 2 and a lower electrode layer 4 of a piezoelectric diaphragm 5 formed by forming an upper electrode layer 3 and a lower electrode layer 4 on each surface of the piezoelectric material plate 2. A spherical multi-channel piezoelectric diaphragm 9 which is a composite of piezoelectric vibrator units 8 divided into a planar direction and a two-dimensional direction by a groove 7 filled with a resin 6 and formed into a spherical shape protruding to the lower surface side. including. A spherical sound-absorbing material layer 10 is attached to the lower side of the spherical multi-channel piezoelectric diaphragm 9. A lead wire 11 is embedded in the spherical sound absorbing material layer 10 so that one end thereof is electrically connected to the lower electrode layer 4 of each piezoelectric vibrator unit 8 and the other end is exposed. ing. On the other hand, an upper electrode lead foil 12 is attached to the upper surface of the upper electrode layer 3 of the spherical multi-channel piezoelectric diaphragm 9. The upper electrode lead-out foil 12 is formed with an extension 12a that extends outward from each side of the spherical multi-channel piezoelectric diaphragm 9 and covers at least a part of the side surface of the sound absorbing material layer 10, and the surface of the extension 12a. Is provided with an adhesive layer 13. Adjacent spherical multi-channel piezoelectric vibrators 1 are electrically connected via an adhesive layer 13 attached to the surface of the extension 12 a of each upper electrode lead foil 12. A spherical acoustic matching layer 14 is further provided on the upper electrode lead-out foil 12. The spherical acoustic matching layer 14 is provided with a groove 16 filled with a resin 15 at a position corresponding to the groove 7 of the spherical multi-channel piezoelectric diaphragm 9.

本発明の球面状複合多チャンネル圧電振動子では、各球面状多チャンネル圧電振動子１は、全体で表面が球面状となるように、球面状多チャンネル圧電振動板９の表面に沿う方向に整列している。但し、球面状複合多チャンネル圧電振動子の表面は、真球面状でなくともよく、Ｘ方向とＹ方向とで曲率半径が異なっていてもよい。   In the spherical composite multi-channel piezoelectric vibrator of the present invention, each spherical multi-channel piezoelectric vibrator 1 is aligned in a direction along the surface of the spherical multi-channel piezoelectric diaphragm 9 so that the entire surface is spherical. doing. However, the surface of the spherical composite multi-channel piezoelectric vibrator does not have to be a true spherical surface, and the radius of curvature may be different between the X direction and the Y direction.

本発明では、球面状多チャンネル圧電振動子１の上側電極層３は、各圧電振動子単位８の共通電極となるため、上側電極引出箔１２を上側電極層３の上に全体的に付設する必要はない。上側電極引出箔１２は、図２に示すように、球面状多チャンネル圧電振動子の各辺の長さの１／２以下である帯状の導電箔から形成されていることが好ましい。帯状にすることによって球面状にしたときに皺ができにくくなるからである。   In the present invention, since the upper electrode layer 3 of the spherical multi-channel piezoelectric vibrator 1 serves as a common electrode for each piezoelectric vibrator unit 8, the upper electrode lead-out foil 12 is provided on the upper electrode layer 3 as a whole. There is no need. As shown in FIG. 2, the upper electrode lead foil 12 is preferably formed of a strip-shaped conductive foil that is ½ or less the length of each side of the spherical multichannel piezoelectric vibrator. It is because it becomes difficult to make wrinkles when it is made spherical by making it into a belt shape.

球面状多チャンネル圧電振動子１の吸音材層１０は、図３（ａ）に示すように、球面状多チャンネル圧電振動板９の各辺からわずかに突出した突出部１０ａが形成されていることが好ましい。吸音材層１０の突出部１０ａの厚み（Ｔ1）、上側電極引出箔１２の延長部１２ａの厚み（Ｔ2）そして接着剤層１３の厚み（Ｔ3）は、その合計の厚み（Ｔ1＋Ｔ2＋Ｔ3）が、球面状多チャンネル圧電振動板９の溝７の幅（Ｔ）の１／２の長さであることが好ましい。こうすることによって、隣接する球面状多チャンネル圧電振動子１の圧電振動子単位８の間隔を、球面状多チャンネル圧電振動板９の溝７の幅と同じにすることができるからである。 As shown in FIG. 3A, the sound absorbing material layer 10 of the spherical multi-channel piezoelectric vibrator 1 is formed with protruding portions 10a that slightly protrude from each side of the spherical multi-channel piezoelectric diaphragm 9. Is preferred. The thickness (T 1 ) of the protruding portion 10 a of the sound absorbing material layer 10, the thickness (T 2 ) of the extended portion 12 a of the upper electrode lead foil 12, and the thickness (T 3 ) of the adhesive layer 13 are the total thickness (T 1). + T 2 + T 3 ) is preferably half the width (T) of the groove 7 of the spherical multichannel piezoelectric diaphragm 9. This is because the distance between the piezoelectric vibrator units 8 of the adjacent spherical multi-channel piezoelectric vibrators 1 can be made equal to the width of the groove 7 of the spherical multi-channel piezoelectric diaphragm 9 by doing so.

圧電振動板５の材料には、圧電セラミック及び圧電単結晶を用いることができる。圧電セラミックの例としては、ジルコン・チタン酸鉛（ＰＺＴ）を挙げることができる。圧電単結晶の例としては、マグネシウムニオブ酸塩とチタン酸鉛との固溶体、亜鉛ニオブ酸とチタン酸鉛との固溶体、スカンジウムニオブ酸鉛とチタン酸鉛との固溶体を挙げることができる。   As a material of the piezoelectric diaphragm 5, a piezoelectric ceramic and a piezoelectric single crystal can be used. An example of a piezoelectric ceramic is zircon lead titanate (PZT). Examples of the piezoelectric single crystal include a solid solution of magnesium niobate and lead titanate, a solid solution of zinc niobate and lead titanate, and a solid solution of scandium lead niobate and lead titanate.

上側電極層３及び下側電極層４の材料の例としては、銀、金、銅などの金属を挙げることができる。球面状多チャンネル圧電振動板９の溝７に充填されている樹脂６及び音響整合層１４の溝１６に充填されている樹脂１５の例としては、エポキシ樹脂などの熱硬化性樹脂を挙げることができる。リード線１１の材料の例としては、銅線、金線及びアルミニウム線などの金属線を挙げることができる。上側電極引出箔１２の材料の例としては、銅箔及び金箔のなどの金属箔を挙げることができる。吸音材層１０の材料としては、フィラーを充填したエポキシ樹脂及びゴムを挙げることができる。音響整合層１４の材料の例としてはエポキシ樹脂を挙げることができる。   Examples of materials of the upper electrode layer 3 and the lower electrode layer 4 include metals such as silver, gold, and copper. Examples of the resin 6 filled in the groove 7 of the spherical multi-channel piezoelectric diaphragm 9 and the resin 15 filled in the groove 16 of the acoustic matching layer 14 include a thermosetting resin such as an epoxy resin. it can. Examples of the material of the lead wire 11 include metal wires such as copper wires, gold wires, and aluminum wires. Examples of the material of the upper electrode lead foil 12 include metal foils such as copper foil and gold foil. Examples of the material of the sound absorbing material layer 10 include epoxy resin and rubber filled with a filler. An example of the material of the acoustic matching layer 14 is an epoxy resin.

接着剤層１３の接着剤は導電性接着剤であることが好ましい。但し、通常は非導電性接着剤として利用されるエポキシ系接着剤であっても接着剤の厚さを薄くすることによって、導電性接着剤として作用することがあり、本発明でも接着剤層１３の接着剤としてエポキシ系接着剤を用いることができる。   The adhesive of the adhesive layer 13 is preferably a conductive adhesive. However, even an epoxy adhesive that is normally used as a non-conductive adhesive may act as a conductive adhesive by reducing the thickness of the adhesive. In the present invention, the adhesive layer 13 may also be used. An epoxy adhesive can be used as the adhesive.

次に、図３に示す球面状多チャンネル圧電振動子の製造方法の一例を、添付図面の図４〜１０を参照しながら説明する。   Next, an example of a method for manufacturing the spherical multi-channel piezoelectric vibrator shown in FIG. 3 will be described with reference to FIGS.

図４は、球面状多チャンネル圧電振動子の製造に用いる大型圧電振動板の一例を示す図であり、（ａ）は平面図、（ｂ）は正面図である。球面状多チャンネル圧電振動子の製造に際しては、先ず、図４に示すように、圧電材料板２の各表面に上側電極層３と下側電極層４とを形成してなる大型圧電振動板５ａを用意する。大型圧電振動板５ａは、例えば、圧電材料板２の各表面に上側電極層３と下側電極層４とを成形して、上側電極層３と下側電極層４と間に電界を印加して、圧電材料板２を分極することによって製造することができる。大型圧電振動板５ａは、正方形もしくは長方形の四角形とする。   FIG. 4 is a view showing an example of a large piezoelectric diaphragm used for manufacturing a spherical multi-channel piezoelectric vibrator, where (a) is a plan view and (b) is a front view. When manufacturing the spherical multi-channel piezoelectric vibrator, first, as shown in FIG. 4, a large piezoelectric diaphragm 5a formed by forming an upper electrode layer 3 and a lower electrode layer 4 on each surface of the piezoelectric material plate 2. Prepare. The large piezoelectric vibration plate 5 a is formed, for example, by forming the upper electrode layer 3 and the lower electrode layer 4 on each surface of the piezoelectric material plate 2 and applying an electric field between the upper electrode layer 3 and the lower electrode layer 4. Thus, the piezoelectric material plate 2 can be manufactured by polarization. The large piezoelectric diaphragm 5a is square or rectangular.

次に、図５に示すように、大型圧電振動板５ａの下側電極層４と圧電材料板２とに平面方向かつ二次元方向に延びる溝７を形成して、圧電振動板５の下側電極層４と圧電材料板２とを分割する。図５の（ａ）は大型圧電振動板５ａの下側電極層４と圧電材料板２とを溝７によって分割した状態を示す底面図、（ｂ）はその正面図である。この溝７によって分割されることによって、大型圧電振動板５ａは複数個の圧電振動子単位８の複合体である大型多チャンネル圧電振動板９ａに成形される。溝７の深さは、圧電振動板５全体の厚さの８０％以上とすることが好ましく、８０〜９５％の範囲とすることが特に好ましい。   Next, as shown in FIG. 5, a groove 7 extending in the planar direction and two-dimensional direction is formed in the lower electrode layer 4 and the piezoelectric material plate 2 of the large piezoelectric diaphragm 5a so that the lower side of the piezoelectric diaphragm 5 The electrode layer 4 and the piezoelectric material plate 2 are divided. FIG. 5A is a bottom view showing a state in which the lower electrode layer 4 and the piezoelectric material plate 2 of the large piezoelectric diaphragm 5a are divided by the grooves 7, and FIG. 5B is a front view thereof. By being divided by the grooves 7, the large piezoelectric diaphragm 5 a is formed into a large multi-channel piezoelectric diaphragm 9 a that is a composite of a plurality of piezoelectric vibrator units 8. The depth of the groove 7 is preferably 80% or more of the total thickness of the piezoelectric diaphragm 5, and particularly preferably in the range of 80 to 95%.

次に、図６に示すように、大型多チャンネル圧電振動板９ａの上側電極層３に球面状体（図示せず）を押し当てて、下方に突き出た球面状に成形された大型球面状多チャンネル圧電振動板９ｂとする。図６は、下方に突き出た球面状に成形した大型球面状多チャンネル圧電振動板９ｂの正面図である。   Next, as shown in FIG. 6, a spherical body (not shown) is pressed against the upper electrode layer 3 of the large-sized multi-channel piezoelectric diaphragm 9a, and the large spherical-shaped multiple molded into a spherical shape protruding downward. The channel piezoelectric diaphragm 9b is used. FIG. 6 is a front view of a large spherical multi-channel piezoelectric diaphragm 9b formed into a spherical shape protruding downward.

次に、図７に示すように、大型球面状多チャンネル圧電振動板９ｂの溝７に樹脂を充填する。図７の（ａ）は、溝に樹脂を充填した大型球面状多チャンネル圧電振動板９ｂの底面図、（ｂ）はその正面図である。樹脂を充填した後、大型球面状多チャンネル圧電振動板９ｂの溝７に沿った切断線で切断して、複数個の球面状多チャンネル圧電振動板とする。   Next, as shown in FIG. 7, the groove 7 of the large spherical multi-channel piezoelectric diaphragm 9b is filled with resin. 7A is a bottom view of a large spherical multi-channel piezoelectric diaphragm 9b in which a groove is filled with resin, and FIG. 7B is a front view thereof. After filling the resin, the large spherical multi-channel piezoelectric diaphragm 9b is cut along a cutting line along the groove 7 to form a plurality of spherical multi-channel piezoelectric diaphragms.

なお、球面状多チャンネル圧電振動板の製造に際しては、溝を形成した圧電振動板を球面状に成形する前に切断して、小型の圧電振動板とした後に球面状に形成してもよい。また、球面状多チャンネル圧電振動板は、球面状に形成した圧電材料板の上下表面に電極層を形成して、球面状の圧電振動板を製造し、次いで球面状の圧電振動板に溝を設けて多チャンネル化する方法によって製造してもよい。   In manufacturing the spherical multi-channel piezoelectric diaphragm, the grooved piezoelectric diaphragm may be cut before being formed into a spherical shape to form a small piezoelectric diaphragm and then formed into a spherical shape. In addition, the spherical multi-channel piezoelectric diaphragm is manufactured by forming electrode layers on the upper and lower surfaces of the spherical piezoelectric material plate to produce a spherical piezoelectric diaphragm, and then forming grooves in the spherical piezoelectric diaphragm. It may be manufactured by a method of providing multiple channels.

次に、図８に示すように、球面状多チャンネル圧電振動板９の上側電極層３の上に上側電極引出箔１２を付設する。図８の（ａ）は上側電極引出箔１２を付設した球面状多チャンネル圧電振動板９の平面図、（ｂ）はその正面図である。上側電極引出箔１２は、圧電振動板５の各辺から外に延びる延長部１２ａが形成されている。上側電極引出箔１２と圧電振動板５の上側電極層３とは、導電性接着剤などの接着剤で接着してもよいし、溶接してもよい。   Next, as shown in FIG. 8, an upper electrode extraction foil 12 is provided on the upper electrode layer 3 of the spherical multichannel piezoelectric diaphragm 9. 8A is a plan view of the spherical multi-channel piezoelectric diaphragm 9 provided with the upper electrode lead foil 12, and FIG. 8B is a front view thereof. The upper electrode lead-out foil 12 is formed with extensions 12 a extending outward from the sides of the piezoelectric diaphragm 5. The upper electrode extraction foil 12 and the upper electrode layer 3 of the piezoelectric diaphragm 5 may be bonded with an adhesive such as a conductive adhesive, or may be welded.

次に、図９に示すように、球面状多チャンネル圧電振動板９の上側電極層３の上に音響整合層１４を付設する。図９は、上側電極層３の上に音響整合層を付設した球面状多チャンネル圧電振動板９の正面図である。音響整合層１４を付設する方法としては、例えば、球面状多チャンネル圧電振動板９の上側電極層３の上に、上側表面に溝が、球面状多チャンネル圧電振動板９の溝に対応する位置に形成されている音響整合材料板を載せて圧着して、次いで溝に樹脂を充填する方法を用いることができる。   Next, as shown in FIG. 9, an acoustic matching layer 14 is provided on the upper electrode layer 3 of the spherical multichannel piezoelectric diaphragm 9. FIG. 9 is a front view of a spherical multi-channel piezoelectric diaphragm 9 in which an acoustic matching layer is provided on the upper electrode layer 3. As a method of providing the acoustic matching layer 14, for example, a groove on the upper surface of the spherical multichannel piezoelectric diaphragm 9 has a groove corresponding to the groove of the spherical multichannel piezoelectric diaphragm 9. A method of placing the acoustic matching material plate formed on the substrate and press-bonding the plate and then filling the groove with resin can be used.

次に、図１０に示すように、球面状多チャンネル圧電振動板９の下側電極層４の下にリード線１１と下側電極層４の下に吸音材層１０とを付設する。図１０は、下側電極層４の下にリード線１１と吸音材層１０とを付設した球面状多チャンネル圧電振動板９の正面図である。下側電極層４にリード線１１を付設する方法としては、半田付けやワイヤーボンディングなどの方法を用いることができる。吸音材層１０を付設する方法としては、未硬化の吸音性樹脂材料を下側電極層４の下に流し込んだ後、硬化させる方法を用いることができる。また、吸音材層１０とリード線１１とを同時に付設する方法としては、圧電振動子単位の間隔でリード線を埋設した球面状吸音材料板を用意して、これを下側電極層４に貼り付ける方法を用いることができる。   Next, as shown in FIG. 10, a lead wire 11 and a sound absorbing material layer 10 are provided below the lower electrode layer 4 of the spherical multi-channel piezoelectric diaphragm 9 and the lower electrode layer 4. FIG. 10 is a front view of a spherical multi-channel piezoelectric diaphragm 9 in which a lead wire 11 and a sound absorbing material layer 10 are provided below the lower electrode layer 4. As a method of attaching the lead wire 11 to the lower electrode layer 4, a method such as soldering or wire bonding can be used. As a method of attaching the sound absorbing material layer 10, a method in which an uncured sound absorbing resin material is poured under the lower electrode layer 4 and then cured can be used. As a method of attaching the sound absorbing material layer 10 and the lead wire 11 at the same time, a spherical sound absorbing material plate in which lead wires are embedded at intervals of the piezoelectric vibrator unit is prepared, and this is attached to the lower electrode layer 4. The method of attaching can be used.

そして、球面状多チャンネル圧電振動板９の各辺から外に延びている、上側電極引出箔１２の延長部１２ａが吸音材層１０の側面の少なくとも一部を覆うように、延長部１２ａを吸音材層１０側に折り曲げた後、その延長部１２ａの表面に接着剤層１３を付設する。   Then, the extension 12 a is sound-absorbed so that the extension 12 a of the upper electrode lead foil 12 extending outward from each side of the spherical multi-channel piezoelectric diaphragm 9 covers at least a part of the side surface of the sound-absorbing material layer 10. After bending to the material layer 10 side, the adhesive layer 13 is attached to the surface of the extension part 12a.

なお、上側電極引出箔の上側表面に球面状音響整合層を付設する工程は、球面状多チャンネル圧電振動板の下側電極層にリード線を取り付ける工程、球面状多チャンネル圧電振動板の下側に球面状吸音材層を付設する工程、上側電極引出箔を球面状吸音材側に折り曲げる工程のいずれかの工程の後に行なってもよい。   The step of attaching the spherical acoustic matching layer to the upper surface of the upper electrode lead-out foil includes the step of attaching a lead wire to the lower electrode layer of the spherical multichannel piezoelectric diaphragm, and the lower side of the spherical multichannel piezoelectric diaphragm. It may be carried out after any of the step of attaching the spherical sound absorbing material layer to the upper side and the step of bending the upper electrode lead foil to the spherical sound absorbing material side.

本発明において、球面状複合多チャンネル圧電振動子を構成する球面状多チャンネル圧電振動子の個数には特には制限はない。Ｘ方向、Ｙ方向に三個以上の球面状多チャンネル圧電振動子を配列してもよい。また、球面状多チャンネル圧電振動板の厚さが異なる多チャンネル圧電振動子、すなわち、送受信可能な超音波の周波数が異なる多チャンネル圧電振動子を組み合わせてもよい。   In the present invention, the number of spherical multi-channel piezoelectric vibrators constituting the spherical composite multi-channel piezoelectric vibrator is not particularly limited. Three or more spherical multi-channel piezoelectric vibrators may be arranged in the X direction and the Y direction. Further, multi-channel piezoelectric vibrators having different thicknesses of spherical multi-channel piezoelectric diaphragms, that is, multi-channel piezoelectric vibrators having different frequencies of ultrasonic waves that can be transmitted and received may be combined.

図１１は、球面状多チャンネル圧電振動板９の厚さが異なる多チャンネル圧電振動子を組み合わせて複合化した複合多チャンネル圧電振動子の一例の正面図である。図１１において、三個の球面状多チャンネル圧電振動子のうちの中央に配置されている球面状多チャンネル圧電振動子１ａは両端に配置されている球面状多チャンネル圧電振動子１ｂと比較して、球面状多チャンネル圧電振動板９の厚さを薄くしてある。すなわち、中央の球面状多チャンネル圧電振動子１ａは両端の球面状多チャンネル圧電振動子１ｂと比較して、送受信可能な超音波の周波数が高い。この球面状複合多チャンネル圧電振動子は、中央の球面状多チャンネル圧電振動子１ａにて高周波の超音波を送受信して患者の内部観察を行ない、両端の球面状多チャンネル圧電振動子１ｂにて低周波で高エネルギーの超音波を患者の患部に送信して、患部の治療を行なう超音波治療用圧電振動子として利用することができる。送受信可能な超音波の周波数が異なる球面状多チャンネル圧電振動子を組み合わせる場合は、配列方向の中心に対して、送受信可能な超音波の周波数が対称となるように球面状多チャンネル圧電振動子を配列することが好ましい。例えば、四個の球面状多チャンネル圧電振動子を配列する場合には、中央の二個の球面状多チャンネル圧電振動子を高周波用とし、両端の二個の多チャンネル圧電振動子を低周波用とする。また。五個の多チャンネル圧電振動子を配列する場合には、中央の三個の球面状多チャンネル圧電振動子を高周波用とし、両端の二個の球面状多チャンネル圧電振動子を低周波用としてもよいし、中央の一個の球面状多チャンネル圧電振動子を高周波用とし、両端の四個の球面状多チャンネル圧電振動子を低周波用としてもよい。   FIG. 11 is a front view of an example of a composite multichannel piezoelectric vibrator obtained by combining and combining multichannel piezoelectric vibrators having different thicknesses of the spherical multichannel piezoelectric diaphragm 9. In FIG. 11, the spherical multi-channel piezoelectric vibrator 1a disposed at the center of the three spherical multi-channel piezoelectric vibrators is compared with the spherical multi-channel piezoelectric vibrator 1b disposed at both ends. The thickness of the spherical multi-channel piezoelectric diaphragm 9 is reduced. That is, the central spherical multi-channel piezoelectric vibrator 1a has a higher frequency of ultrasonic waves that can be transmitted and received compared to the spherical multi-channel piezoelectric vibrator 1b at both ends. This spherical composite multi-channel piezoelectric vibrator transmits and receives high-frequency ultrasonic waves at the central spherical multi-channel piezoelectric vibrator 1a to observe the inside of the patient, and at both ends of the spherical multi-channel piezoelectric vibrator 1b. It can be used as a piezoelectric vibrator for ultrasonic therapy that transmits low-frequency and high-energy ultrasonic waves to an affected area of a patient to treat the affected area. When combining spherical multi-channel piezoelectric vibrators with different frequencies of ultrasonic waves that can be transmitted and received, the spherical multi-channel piezoelectric vibrators are arranged so that the frequencies of ultrasonic waves that can be transmitted and received are symmetric with respect to the center in the arrangement direction. It is preferable to arrange. For example, when four spherical multi-channel piezoelectric vibrators are arranged, the central two spherical multi-channel piezoelectric vibrators are used for high frequency, and the two multi-channel piezoelectric vibrators at both ends are used for low frequency. And Also. When arranging five multichannel piezoelectric vibrators, the three spherical multichannel piezoelectric vibrators at the center can be used for high frequency, and the two spherical multichannel piezoelectric vibrators at both ends can be used for low frequency. Alternatively, one spherical multi-channel piezoelectric vibrator in the center may be used for high frequency, and four spherical multi-channel piezoelectric vibrators at both ends may be used for low frequency.

１、１ａ、１ｂ 球面状多チャンネル圧電振動子
２ 圧電材料板
３ 上側電極層
４ 下側電極層
５ 圧電振動板
５ａ 大型圧電振動板
６ 樹脂
７ 溝
８ 圧電振動子単位
９ 球面状多チャンネル圧電振動板
９ａ 大型多チャンネル圧電振動板
９ｂ 大型球面状多チャンネル圧電振動板
１０ 球面状吸音材層
１０ａ 吸音材層の突出部
１１ リード線
１２ 上側電極引出箔
１２ａ 上側電極引出箔の延長部
１３ 接着剤層
１４ 球面状音響整合層
１５ 樹脂
１６ 溝
１７ 切断線 DESCRIPTION OF SYMBOLS 1, 1a, 1b Spherical multichannel piezoelectric vibrator 2 Piezoelectric material board 3 Upper electrode layer 4 Lower electrode layer 5 Piezoelectric diaphragm 5a Large piezoelectric diaphragm 6 Resin 7 Groove 8 Piezoelectric vibrator unit 9 Spherical multichannel piezoelectric vibration Plate 9a Large multi-channel piezoelectric diaphragm 9b Large spherical multi-channel piezoelectric diaphragm 10 Spherical sound absorbing material layer 10a Projecting portion of sound absorbing material layer 11 Lead wire 12 Upper electrode lead foil 12a Extension portion of upper electrode lead foil 13 Adhesive layer 14 Spherical acoustic matching layer 15 Resin 16 Groove 17 Cutting line

Claims (5)

圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の圧電振動板の圧電材料板と下側電極層を、平面方向かつ二次元方向に分割した圧電振動子単位の複合体であって、下面側に突き出した球面状に成形された正方形もしくは長方形の球面状多チャンネル圧電振動板；球面状多チャンネル圧電振動板の下側に付設した球面状吸音材層；一方の端部が各圧電振動子単位の下側電極層に電気的に接続し、そして他方の端部が露出するように、球面状吸音材層に埋設したリード線；球面状多チャンネル圧電振動板の上側電極層の上側表面に付設した上側電極引出箔、但し、該上側電極引出箔は、正方形もしくは長方形の球面状多チャンネル圧電振動板の各辺から外に延びて球面状吸音材層の側面の少なくとも一部を覆う延長部が形成されており、その上側電極引出箔の延長部の表面には接着剤層が付設されている；そして上側電極引出箔の上側表面に付設した球面状音響整合層、を含む球面状多チャンネル圧電振動子が複数個、球面状多チャンネル圧電振動板の表面に沿う方向でかつ二次元方向に整列してなり、かつ隣接する球面状多チャンネル圧電振動子を、各々の上側電極引出箔の延長部の表面に付設されている接着剤層を介して電気的に接続させることにより形成した球面状複合多チャンネル圧電振動子。   Piezoelectric vibrations obtained by dividing the piezoelectric material plate and the lower electrode layer of a square or rectangular piezoelectric vibration plate formed by forming an upper electrode layer and a lower electrode layer on each surface of the piezoelectric material plate in a planar direction and a two-dimensional direction. A square-shaped multi-channel piezoelectric diaphragm having a spherical shape and projecting toward the lower surface, and a spherical sound-absorbing material layer attached to the lower side of the spherical multi-channel piezoelectric diaphragm. A lead wire embedded in the spherical sound-absorbing material layer so that one end is electrically connected to the lower electrode layer of each piezoelectric vibrator unit and the other end is exposed; spherical multi-channel piezoelectric Upper electrode lead foil attached to the upper surface of the upper electrode layer of the diaphragm, wherein the upper electrode lead foil extends outward from each side of the square or rectangular spherical multi-channel piezoelectric diaphragm, and is a spherical sound absorbing material layer At least part of the side of A spherical surface including an adhesive layer on the surface of the extension of the upper electrode lead foil; and a spherical acoustic matching layer attached to the upper surface of the upper electrode lead foil A plurality of cylindrical multi-channel piezoelectric vibrators are aligned in a two-dimensional direction along the surface of the spherical multi-channel piezoelectric diaphragm, and adjacent spherical multi-channel piezoelectric vibrators are connected to each upper electrode lead-out. A spherical composite multi-channel piezoelectric vibrator formed by being electrically connected via an adhesive layer attached to the surface of an extension portion of a foil. 球面状多チャンネル圧電振動子の各々の上側電極引出箔の延長部の表面に付設されている接着剤層の接着剤が導電性接着剤である請求項１に記載の球面状複合多チャンネル圧電振動子。   2. The spherical composite multi-channel piezoelectric vibration according to claim 1, wherein the adhesive of the adhesive layer provided on the surface of the extended portion of the upper electrode lead foil of each spherical multi-channel piezoelectric vibrator is a conductive adhesive. Child. 球面状多チャンネル圧電振動子の各々の上側電極引出箔が、その幅が正方形もしくは長方形の球面状多チャンネル圧電振動子の各辺の長さの１／２以下である帯状であって、該帯状の上側電極引出箔が球面状多チャンネル圧電振動板の各辺の中央から外に延びている請求項１に記載の球面状複合多チャンネル圧電振動子。   Each upper electrode lead foil of the spherical multi-channel piezoelectric vibrator has a band shape whose width is equal to or less than ½ of the length of each side of the spherical multi-channel piezoelectric vibrator having a square shape or a rectangular shape. The spherical composite multichannel piezoelectric vibrator according to claim 1, wherein the upper electrode lead-out foil extends outward from the center of each side of the spherical multichannel piezoelectric diaphragm. 下記の工程を含む方法によって得られた球面状多チャンネル圧電振動子を複数個、各々の上側電極引出箔の延長部の表面に付設されている接着剤層を介して電気的に接続することからなる請求項１に記載の球面状複合多チャンネル圧電振動子製造方法：
（１）圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の圧電振動板の圧電材料板と下側電極層を、平面方向かつ二次元方向に分割した圧電振動子単位の複合体として形成された、上側電極層が凹状の球面状である正方形もしくは長方形の球面状多チャンネル圧電振動板を用意する工程；
（２）球面状多チャンネル圧電振動板の上側電極層の上に上側電極引出箔を付設する工程、但し、該上側電極引出箔は、正方形もしくは長方形の球面状多チャンネル圧電振動板の各辺から外に延びた延長部が形成されている；
（３）上側電極引出箔の上側表面に球面状音響整合層を付設する工程；
（４）球面状多チャンネル圧電振動板の各圧電振動子単位複合体の下側電極層にリード線を取り付ける工程；
（５）球面状多チャンネル圧電振動板の下側に球面状吸音材層を、リード線の端部が露出するように付設する工程；
（６）上側電極引出箔を球面状吸音材側に折り曲げる工程；そして、
（７）上側電極引出箔の延長部の表面には接着剤層を形成する工程；
但し、（３）の工程は、（４）〜（７）のうちのいずれかの工程の後に行なってもよい。 A plurality of spherical multi-channel piezoelectric vibrators obtained by a method including the following steps are electrically connected through an adhesive layer attached to the surface of the extension of each upper electrode lead foil. The spherical composite multi-channel piezoelectric vibrator manufacturing method according to claim 1,
(1) A piezoelectric material plate and a lower electrode layer of a square or rectangular piezoelectric diaphragm formed by forming an upper electrode layer and a lower electrode layer on each surface of a piezoelectric material plate are divided in a planar direction and a two-dimensional direction. A step of preparing a square or rectangular spherical multi-channel piezoelectric diaphragm formed as a composite of piezoelectric vibrator units, the upper electrode layer having a concave spherical shape;
(2) A step of attaching an upper electrode lead foil on the upper electrode layer of the spherical multi-channel piezoelectric diaphragm, provided that the upper electrode lead foil is formed from each side of the square or rectangular spherical multi-channel piezoelectric diaphragm. An outwardly extending extension is formed;
(3) attaching a spherical acoustic matching layer to the upper surface of the upper electrode lead foil;
(4) A step of attaching a lead wire to the lower electrode layer of each piezoelectric vibrator unit complex of the spherical multi-channel piezoelectric diaphragm;
(5) A step of attaching a spherical sound absorbing material layer to the lower side of the spherical multi-channel piezoelectric diaphragm so that the end of the lead wire is exposed;
(6) a step of bending the upper electrode extraction foil toward the spherical sound absorbing material; and
(7) forming an adhesive layer on the surface of the extension of the upper electrode lead foil;
However, the step (3) may be performed after any of the steps (4) to (7). 球面状多チャンネル圧電振動板が下記の工程を含む方法によって得られたものである請求項４に記載の球面状複合多チャンネル圧電振動子製造方法：
（１）大型圧電材料板の各表面に上側電極層と下側電極層とを形成してなる正方形もしくは長方形の大型圧電振動板を用意する工程；
（２）大型圧電振動板の大型圧電材料板と下側電極層を平面方向かつ二次元方向に分割して、大型圧電振動板を圧電振動子単位の複合体として形成された、大型多チャンネル圧電振動板を得る工程；
（３）大型多チャンネル圧電振動板の上側電極層に球面状体を押し当てて、下方に突き出た球面状に成形された正方形もしくは長方形の大型球面状多チャンネル圧電振動板を得る工程；そして、
（４）大型球面状多チャンネル圧電振動板を、大型球面状多チャンネル圧電振動板の辺に平行な線に沿って切断して、二個以上の球面状多チャンネル圧電振動板を得る工程。 The method for producing a spherical composite multi-channel piezoelectric vibrator according to claim 4, wherein the spherical multi-channel piezoelectric diaphragm is obtained by a method including the following steps:
(1) A step of preparing a square or rectangular large piezoelectric diaphragm formed by forming an upper electrode layer and a lower electrode layer on each surface of a large piezoelectric material plate;
(2) Large-sized multi-channel piezoelectric device in which a large piezoelectric material plate and a lower electrode layer of a large piezoelectric diaphragm are divided in a planar direction and in a two-dimensional direction, and the large piezoelectric diaphragm is formed as a composite of piezoelectric vibrator units. Obtaining a diaphragm;
(3) pressing a spherical body against the upper electrode layer of the large multi-channel piezoelectric diaphragm to obtain a spherical or rectangular large spherical multi-channel piezoelectric diaphragm formed into a spherical shape protruding downward;
(4) A step of cutting the large spherical multi-channel piezoelectric diaphragm along a line parallel to the side of the large spherical multi-channel piezoelectric diaphragm to obtain two or more spherical multi-channel piezoelectric diaphragms.
JP2011278782A 2011-12-20 2011-12-20 Spherical composite multichannel piezoelectric vibrator and manufacturing method thereof Expired - Fee Related JP5771135B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011278782A JP5771135B2 (en) 2011-12-20 2011-12-20 Spherical composite multichannel piezoelectric vibrator and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011278782A JP5771135B2 (en) 2011-12-20 2011-12-20 Spherical composite multichannel piezoelectric vibrator and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JP2013131849A true JP2013131849A (en) 2013-07-04
JP5771135B2 JP5771135B2 (en) 2015-08-26

Family

ID=48909108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011278782A Expired - Fee Related JP5771135B2 (en) 2011-12-20 2011-12-20 Spherical composite multichannel piezoelectric vibrator and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JP5771135B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300586A (en) * 2015-10-15 2016-02-03 袁晓龙 Monitoring system and method of wind and rain load of structure surface

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017047180A (en) * 2015-09-04 2017-03-09 キヤノン株式会社 Transducer array, and acoustic wave measurement apparatus including transducer array

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6268400A (en) * 1985-09-20 1987-03-28 Toshiba Corp Manufacture of ultrasonic probe
JPH08289398A (en) * 1995-04-18 1996-11-01 Nippon Dempa Kogyo Co Ltd Matrix ultrasonic probe
US5792058A (en) * 1993-09-07 1998-08-11 Acuson Corporation Broadband phased array transducer with wide bandwidth, high sensitivity and reduced cross-talk and method for manufacture thereof
JP2001046387A (en) * 1999-08-04 2001-02-20 Technol Res Assoc Of Medical & Welfare Apparatus Ultrasonic therapeutic applicator
JP2001070333A (en) * 1999-09-01 2001-03-21 Toshiba Corp Ultrasonic irradiation apparatus
JP2002186617A (en) * 2000-12-20 2002-07-02 Aloka Co Ltd Manufacturing method of vibration component array and two-dimensional ultrasonic probe
JP2008079034A (en) * 2006-09-21 2008-04-03 Aloka Co Ltd Ultrasound probe and its manufacturing method
WO2010061912A1 (en) * 2008-11-28 2010-06-03 オリンパスメディカルシステムズ株式会社 Ultrasonic transducer, electronic device, and ultrasonic endoscope

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6268400A (en) * 1985-09-20 1987-03-28 Toshiba Corp Manufacture of ultrasonic probe
US5792058A (en) * 1993-09-07 1998-08-11 Acuson Corporation Broadband phased array transducer with wide bandwidth, high sensitivity and reduced cross-talk and method for manufacture thereof
JPH08289398A (en) * 1995-04-18 1996-11-01 Nippon Dempa Kogyo Co Ltd Matrix ultrasonic probe
JP2001046387A (en) * 1999-08-04 2001-02-20 Technol Res Assoc Of Medical & Welfare Apparatus Ultrasonic therapeutic applicator
JP2001070333A (en) * 1999-09-01 2001-03-21 Toshiba Corp Ultrasonic irradiation apparatus
JP2002186617A (en) * 2000-12-20 2002-07-02 Aloka Co Ltd Manufacturing method of vibration component array and two-dimensional ultrasonic probe
JP2008079034A (en) * 2006-09-21 2008-04-03 Aloka Co Ltd Ultrasound probe and its manufacturing method
WO2010061912A1 (en) * 2008-11-28 2010-06-03 オリンパスメディカルシステムズ株式会社 Ultrasonic transducer, electronic device, and ultrasonic endoscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105300586A (en) * 2015-10-15 2016-02-03 袁晓龙 Monitoring system and method of wind and rain load of structure surface

Also Published As

Publication number Publication date
JP5771135B2 (en) 2015-08-26

Similar Documents

Publication Publication Date Title
US20200061671A1 (en) Ultrasound transducer and method for making the same
US11389832B2 (en) Low-profile, low-frequency, and low-impedance broad-band ultrasound transducer and methods thereof
JP2004514340A (en) Multidimensional ultrasonic transducer array
JPH0458760B2 (en)
JP3288815B2 (en) 2D array ultrasonic probe
JP2009082612A (en) Ultrasonic probe and piezoelectric transducer
JP5771135B2 (en) Spherical composite multichannel piezoelectric vibrator and manufacturing method thereof
JP6024655B2 (en) Oscillator and electronic device
KR101491801B1 (en) Ultrasonic transducer and method of manufacturing the same
US20240082877A1 (en) Ultrasonic transducer and method for manufacturing the same
JP2012039495A (en) Ultrasonic probe and manufacturing method thereof
JP5864246B2 (en) Composite multichannel piezoelectric vibrator
KR20150073056A (en) Ultrasonic diagnostic instrument and manufacturing method thereof
JP4304112B2 (en) Manufacturing method of ultrasonic probe
JP2009072349A (en) Ultrasonic transducer, its manufacturing method and ultrasonic probe
JP4338565B2 (en) Ultrasonic probe and method for manufacturing ultrasonic probe
JP4071084B2 (en) Manufacturing method of two-dimensional array ultrasonic probe
JP6107940B2 (en) Ultrasonic generator
JP3880218B2 (en) Ultrasonic probe
JP5457843B2 (en) Ultrasonic probe
JP2017056030A (en) Ultrasonic probe
JP7316924B2 (en) Ultrasonic emitting instruments and ultrasonic devices
CN214766703U (en) Array ultrasonic transducer
JP6876645B2 (en) Ultrasonic probe and its manufacturing method
TW202409599A (en) Two-dimensional ultrasonic transducer and manufacturing method thereof

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141205

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150424

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150602

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150626

R150 Certificate of patent or registration of utility model

Ref document number: 5771135

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees