JP2013088393A - Weight difference measuring apparatus - Google Patents

Weight difference measuring apparatus Download PDF

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JP2013088393A
JP2013088393A JP2011231775A JP2011231775A JP2013088393A JP 2013088393 A JP2013088393 A JP 2013088393A JP 2011231775 A JP2011231775 A JP 2011231775A JP 2011231775 A JP2011231775 A JP 2011231775A JP 2013088393 A JP2013088393 A JP 2013088393A
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weight
load
automobile
difference
measured
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Yasushi Nakayama
泰 中山
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Daihatsu Motor Co Ltd
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Daihatsu Motor Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To highly accurately measure a weight difference before and after processing of an object even when the object is heavy one such as an automobile.SOLUTION: An object (automobile 10) to be measured is placed on a placing part 3a arranged on one side from a fulcrum 2 of a fluctuatable measurement base 3 and a weight 20 of almost the same weight as that of the automobile 10 is placed on a weight placing part 3b arranged on the other side from the fulcrum 2 of the measurement base 3. Load M1 received by a load measuring device 4 due to the fluctuation of the measurement base 3 is measured, and a weight difference δ1 between the automobile 10 before processing and the weight 20 is measured based on the load M1. Similarly a weight difference δ2 between an automobile 10' after processing and the weight 20 is measured. A weight difference of the automobile before and after processing is found out by calculating a difference of the weight differences δ1, δ2.

Description

本発明は、被計測物の加工前後の重量差を測定する重量差測定装置に関する。   The present invention relates to a weight difference measuring apparatus that measures a weight difference before and after processing of an object to be measured.

自動車のような重量物の重量を測定する装置としては、例えば特許文献1に示されているようなロードセルを用いたものが一般的である。   As a device for measuring the weight of a heavy object such as an automobile, for example, a device using a load cell as disclosed in Patent Document 1 is generally used.

特開2007−93389号公報JP 2007-93389 A

ところで、自動車の製造工程では、加工前後の自動車の重量差を計測することが必要な場合がある。例えば、自動車の塗布効率(自動車に塗料を効率よく塗ることができているか否か)を検証するために、塗料の塗着効率(車体に塗布した塗料の重量/使用した塗料の重量)を測定することがある。この塗着効率を測定する方法として、塗料を塗布する前の車体重量と、塗料を塗布した後の車体重量とをそれぞれ測定し、これらの測定値の差から車体に塗布された塗料の重量を測定する場合がある。しかし、一般に、荷重測定器は、最大測定可能重量が大きいほど測定精度が低くなるため、例えば上記のようなロードセルを用いて車体重量を測定する場合、測定精度はせいぜい1%程度であり、300kgの車体であれば約3kgの誤差が生じてしまう。車体に塗布される塗料の重量は数kgであり、塗着効率を測定するためには1g単位の測定精度が要求されるため、上記のような3kgの誤差が生じる測定装置では車体に塗布された塗料の重さを正確に測定することはできない。   By the way, in the automobile manufacturing process, it may be necessary to measure the weight difference of the automobile before and after processing. For example, in order to verify the application efficiency of automobiles (whether or not paint can be efficiently applied to automobiles), the application efficiency of paints (weight of paint applied to the vehicle body / weight of paint used) was measured. There are things to do. As a method of measuring the coating efficiency, the weight of the vehicle body before applying the paint and the weight of the vehicle body after applying the paint are measured, and the weight of the paint applied to the vehicle body is calculated from the difference between these measured values. May be measured. However, in general, since the load measuring device has a lower measurement accuracy as the maximum measurable weight is larger, for example, when measuring the weight of the vehicle body using the load cell as described above, the measurement accuracy is about 1% at most, and 300 kg. An error of about 3 kg will occur if the vehicle body is. The weight of the paint applied to the vehicle body is several kg, and measurement accuracy in units of 1 g is required to measure the coating efficiency. Therefore, in the measuring apparatus in which an error of 3 kg as described above is applied, it is applied to the vehicle body. It is not possible to accurately measure the weight of paint.

例えば、車体に塗布された塗料を測定する方法として、以下のような方法がある。(1)車体の表面全面をアルミ箔で被覆し、(2)この状態で車体に塗料を塗布した後、(3)車体からアルミ箔を剥がし、(4)塗布前のアルミ箔の重量と塗布後のアルミ箔の重量との差から、車体に塗布された塗料の重量を測定する。しかし、車体の表面全面をアルミ箔で被覆する工程や、車体からアルミ箔を剥がす工程は非常に手間がかかるため、作業工数が膨大となる。   For example, there are the following methods for measuring the paint applied to the vehicle body. (1) Cover the entire surface of the car body with aluminum foil, (2) Apply paint to the car body in this state, (3) Remove the aluminum foil from the car body, (4) Weight and application of the aluminum foil before application The weight of the paint applied to the vehicle body is measured from the difference from the weight of the later aluminum foil. However, the process of covering the entire surface of the vehicle body with an aluminum foil and the process of peeling the aluminum foil from the vehicle body are very time-consuming, resulting in a large number of work steps.

上記のような問題は、自動車の塗料の塗布前後の重量差を測定する工程に限らず、重量物の加工前後の重量差を測定する場合に同様に生じる。   The problem as described above is not limited to the process of measuring the weight difference before and after the application of the paint of the automobile, but similarly occurs when the weight difference before and after the processing of the heavy article is measured.

本発明の解決すべき技術的課題は、重量物であっても、加工前後の重量差を高精度に測定することにある。   A technical problem to be solved by the present invention is to measure a weight difference before and after processing with high accuracy even for a heavy object.

前記課題を解決するためになされた本発明は、被計測物の加工前後の重量差を測定するための重量差測定装置において、支点を中心に揺動可能であって、被計測物を載置するための載置部を支点の一方側に有すると共に、錘を載置するための錘載置部を支点の他方側に有する測定台と、測定台の下方又は上方に設けられ、測定台の揺動により測定台から受ける荷重を測定する荷重測定器と、荷重測定部による測定荷重に基づいて、加工前の被計測物と錘との重量差、及び、加工後の被計測物と錘との重量差を求め、これらの重量差の差を計算する計算部とを備えたものである。   The present invention made in order to solve the above-mentioned problems is a weight difference measuring device for measuring a weight difference before and after processing of an object to be measured, which is capable of swinging around a fulcrum and placing the object to be measured. A measuring platform having a mounting portion on one side of the fulcrum and a weight mounting portion for mounting a weight on the other side of the fulcrum, and provided below or above the measuring table. Based on the load measuring device that measures the load received from the measuring table by swinging, and the measured load by the load measuring unit, the weight difference between the measured object and the weight before processing, and the measured object and the weight after processing And a calculation unit for calculating the difference in weight.

上記の重量差測定装置によれば、測定台の支点を挟んだ両側に被計測物及び錘を載置した状態で、測定台から受ける荷重を荷重測定器で測定し、この測定荷重に基づいて被計測物と錘との重量差を求めることができる。この場合、荷重測定器は、被計測物の全重量を測定可能なものである必要はないため、最大測定可能重量が比較的小さく、測定精度が高いものを使用することができ、これにより被計測物と錘との重量差を精密に測定することが可能となる。よって、加工前の被計測物の重量W1と錘の重量Wとの差δ1(=W1−W)、及び、加工後の被計測物の重量W2と錘の重量Wとの差δ2(=W2−W)をそれぞれ測定し、これらの重量差δ1、δ2の差を計算することで、加工前後の被計測物の重量差δ(=δ2−δ1=W2−W1)を精密に測定することができる。   According to the above weight difference measuring apparatus, the load received from the measurement table is measured with the load measuring instrument in a state where the measurement object and the weight are placed on both sides of the fulcrum of the measurement table, and based on this measurement load The weight difference between the object to be measured and the weight can be obtained. In this case, the load measuring device need not be capable of measuring the total weight of the object to be measured, and therefore, a load measuring device having a relatively small maximum measurable weight and high measurement accuracy can be used. It is possible to accurately measure the weight difference between the measurement object and the weight. Therefore, the difference δ1 (= W1−W) between the weight W1 of the workpiece before processing and the weight W of the weight, and the difference δ2 (= W2) between the weight W2 of the workpiece and the weight W after processing. −W) is measured, and by calculating the difference between these weight differences δ1 and δ2, the weight difference δ (= δ2−δ1 = W2−W1) of the measured object before and after processing can be accurately measured. it can.

載置部に載置される被計測物の位置が加工前後でずれると、特に、被計測物の重心と支点との距離が加工前後でずれると、重量差の測定精度が低下するため、載置部に、被計測物を所定位置に位置決めする位置決め部を設けることが好ましい。   If the position of the object to be measured placed on the placement part is shifted before and after processing, especially when the distance between the center of gravity of the object to be measured and the fulcrum is shifted before and after processing, the measurement accuracy of the weight difference will be reduced. It is preferable to provide a positioning part for positioning the object to be measured at a predetermined position in the placing part.

以上のように、本発明の重量差測定装置によれば、自動車等の重量物であっても、加工前後の重量差を高精度に測定することができる。   As described above, according to the weight difference measuring apparatus of the present invention, the weight difference before and after processing can be measured with high accuracy even for a heavy object such as an automobile.

本発明の一実施形態に係る重量差測定装置の側面図である。It is a side view of the weight difference measuring device concerning one embodiment of the present invention. 他の実施形態に係る重量差測定装置の側面図である。It is a side view of the weight difference measuring device concerning other embodiments.

以下、本発明の一実施形態を図面に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

本発明の一実施形態に係る重量差測定装置1は、図1に示すように、支点2を中心に揺動可能な測定台3と、荷重測定器4と、計算部5とを備える。本実施形態では、被計測物が自動車である場合を示す。   As shown in FIG. 1, the weight difference measuring apparatus 1 according to an embodiment of the present invention includes a measuring table 3 that can swing around a fulcrum 2, a load measuring device 4, and a calculating unit 5. In this embodiment, the case where a to-be-measured object is a motor vehicle is shown.

測定台3は、支点2の一方側(図中左側)に、自動車10が載置される載置部3aが設けられ、支点2の他方側(図中右側)に、錘20が載置される錘載置部3bが設けられる。支点2は、測定台3の揺動中心であり、図1の紙面と直交する方向に延びる。尚、以下の説明では、測定台3の支点2に対して一方側(図中左側)を「自動車側」、他方側(図中右側)を「錘側」と言う。   The measurement table 3 is provided with a mounting portion 3a on which the automobile 10 is mounted on one side (left side in the figure) of the fulcrum 2, and a weight 20 is mounted on the other side (right side in the figure) of the fulcrum 2. A weight mounting portion 3b is provided. The fulcrum 2 is the center of oscillation of the measuring table 3 and extends in a direction perpendicular to the paper surface of FIG. In the following description, one side (left side in the figure) with respect to the fulcrum 2 of the measuring table 3 is referred to as “automobile side”, and the other side (right side in the figure) is referred to as “weight side”.

重量差測定装置1には、測定台3の揺動を所定位置で規制するストッパが設けられる。図示例では、測定台3の自動車側端部に下方から当接する第1ストッパ6aと、測定台3の錘側端部に下方から当接する第2ストッパ6bとが設けられる。第1ストッパ6a及び第2ストッパ6bは、何れも水平状態の測定台3から少し下方に離隔した位置に配される。   The weight difference measuring device 1 is provided with a stopper for restricting the swing of the measuring table 3 at a predetermined position. In the example of illustration, the 1st stopper 6a contact | abutted from the downward direction to the motor vehicle side edge part of the measurement stand 3 and the 2nd stopper 6b contact | abutted from the downward direction to the weight side edge part of the measurement stand 3 are provided. Each of the first stopper 6a and the second stopper 6b is disposed at a position slightly spaced downward from the horizontal measurement table 3.

荷重測定器4は、測定台3の下方で、支点2より自動車側に設けられ、測定台3の下面と当接している。荷重測定器4は、測定台3が水平状態から揺動したときに測定台3から受ける荷重を測定可能とされる。すなわち、測定台3が水平状態のときは荷重測定器4の測定荷重が0となり、測定台3の自動車側が下方に揺動することにより荷重測定器4に荷重が加わり、この荷重が測定される。荷重測定器4としては、最大測定可能重量が比較的小さく、測定精度の高いものを使用可能であり、例えば高精度電子はかりが使用可能である。   The load measuring device 4 is provided below the measuring table 3 on the vehicle side from the fulcrum 2 and is in contact with the lower surface of the measuring table 3. The load measuring device 4 can measure a load received from the measurement table 3 when the measurement table 3 swings from a horizontal state. That is, when the measuring table 3 is in a horizontal state, the measurement load of the load measuring device 4 becomes 0, and the load is applied to the load measuring device 4 by swinging the automobile side of the measuring table 3 downward, and this load is measured. . As the load measuring device 4, a weight having a relatively small maximum measurable weight and a high measurement accuracy can be used. For example, a high-precision electronic balance can be used.

以下、上記構成の重量差測定装置1を用いた自動車の加工前後の重量差測定方法を説明する。本実施形態では、塗装工程前後の自動車の重量差を測定することで、自動車に対する塗料の塗着効率を測定する場合を示す。   Hereinafter, a weight difference measuring method before and after processing of an automobile using the weight difference measuring apparatus 1 having the above configuration will be described. In this embodiment, the case where the coating efficiency of the paint with respect to the automobile is measured by measuring the weight difference of the automobile before and after the painting process is shown.

まず、測定台3の錘載置部3bに錘20を載置する。このとき、測定台3は錘側が下方に揺動し、測定台3の錘側端部が第2ストッパ6bで下方から支持される。錘20は、自動車10とほぼ同重量であり、且つ、自動車10の重量を超えない重量とされる。具体的には、自動車10の重量W1と錘20の重量Wとの差が、荷重測定器4の最大測定可能重量の範囲内で、なるべく小さくなるように設定される。尚、測定対象の車種が異なった場合には錘20の重量を変更する必要が生じるため、錘20は重量を調整可能であることが好ましく、例えば複数の調整用錘を組み合せて重量を調整可能な構成とすることができる。   First, the weight 20 is placed on the weight placing portion 3 b of the measurement table 3. At this time, the weight side of the measuring table 3 swings downward, and the weight side end of the measuring table 3 is supported from below by the second stopper 6b. The weight 20 has substantially the same weight as the automobile 10 and does not exceed the weight of the automobile 10. Specifically, the difference between the weight W1 of the automobile 10 and the weight W of the weight 20 is set to be as small as possible within the range of the maximum measurable weight of the load measuring device 4. In addition, since it becomes necessary to change the weight of the weight 20 when the vehicle model to be measured is different, it is preferable that the weight 20 can be adjusted. For example, the weight can be adjusted by combining a plurality of adjustment weights. It can be set as a simple structure.

次に、測定台3の載置部3aに塗装前の自動車10を載置する。本実施形態では、自動車10及び錘20が支点2から等距離の位置に載置される(L10=L20)。このとき、自動車10の重量W1は錘20の重量Wよりも若干重いため、測定台3の自動車側が下方に揺動し、これにより荷重測定器4が測定台3から下向きの荷重M1を受け、この荷重M1が荷重測定器4により測定される。このとき、図1に示すように、自動車10の重量W1、錘20の重量W、及び、荷重測定器4による支持力R1(測定台3から受ける荷重M1を支持する力)によるモーメントが釣り合った状態となる。このときの荷重測定器4による測定荷重M1が計算部5に伝達され、この測定荷重M1と、自動車10の重心と支点2との距離L10と、錘20の重心と支点2との距離L20と、荷重測定器4の測定点と支点2との距離LRとに基づいて、自動車10の重量W1と錘20の重量Wとの差δ1(=W1−W)が計算される。尚、自動車10及び錘20と支点2からの距離は、必ずしも等距離である必要はない。 Next, the automobile 10 before painting is placed on the placement portion 3 a of the measurement table 3. In the present embodiment, the automobile 10 and the weight 20 are placed at a position equidistant from the fulcrum 2 (L 10 = L 20 ). At this time, since the weight W1 of the automobile 10 is slightly heavier than the weight W of the weight 20, the automobile side of the measuring table 3 swings downward, whereby the load measuring device 4 receives the downward load M1 from the measuring table 3, The load M1 is measured by the load measuring device 4. At this time, as shown in FIG. 1, the moment due to the weight W1 of the automobile 10, the weight W of the weight 20, and the support force R1 (the force that supports the load M1 received from the measurement table 3) by the load measuring device 4 is balanced. It becomes a state. Measuring load M1 by the load measuring device 4 at this time is transmitted to the calculation unit 5, the distance between the measuring load M1, the distance L 10 between the center of gravity and the fulcrum 2 of the automobile 10, the center of gravity and the fulcrum 2 of the weight 20 L Based on 20 and the distance L R between the measurement point of the load measuring device 4 and the fulcrum 2, the difference δ 1 (= W 1 −W) between the weight W 1 of the automobile 10 and the weight W of the weight 20 is calculated. The distances from the automobile 10 and the weight 20 and the fulcrum 2 are not necessarily equal.

尚、自動車10の重量W1と錘20の重量Wとの差δ1が過大であると、測定台3の自動車側端部が下方に大きく揺動し、荷重測定器4に過剰な負荷が加わって荷重測定器4が損傷する恐れがある。このような場合、第1ストッパ6aが測定台3の自動車側端部を下方から支持することで、荷重測定器4に過剰な負荷が加わることを防止する。   If the difference δ1 between the weight W1 of the automobile 10 and the weight W of the weight 20 is excessive, the automobile side end of the measuring table 3 swings downward greatly, and an excessive load is applied to the load measuring device 4. The load measuring device 4 may be damaged. In such a case, the first stopper 6a supports the vehicle side end of the measuring table 3 from below, thereby preventing an excessive load from being applied to the load measuring device 4.

そして、塗装前の自動車10を載置部3aから搬出し、自動車10に塗装を施した後、塗装後の自動車10’を再び載置部3aに載置する。そして、自動車10’の重量W2、錘20の重量W、及び、荷重測定器4による支持力R2によるモーメントが釣り合った状態となり、このときの荷重測定器4に加わる荷重M2が測定される。この測定荷重M2が計算部5に伝達され、この測定荷重M2と、上述の距離L10、距離L20、及び距離LRとに基づいて、自動車10’の重量W2と錘20の重量Wとの差δ2(=W2−W)が計算される。 Then, the unpainted automobile 10 is taken out from the placement section 3a, and after painting the automobile 10, the painted automobile 10 'is again placed on the placement section 3a. Then, the weight W2 of the automobile 10 ′, the weight W of the weight 20, and the moment due to the support force R2 by the load measuring device 4 are balanced, and the load M2 applied to the load measuring device 4 at this time is measured. The measuring load M2 is transmitted to the calculation unit 5, this measuring load M2, the distance L 10 described above, the distance L 20, and based on the distance L R, and the weight W of the weight W2 and the weight 20 of the vehicle 10 ' The difference δ2 (= W2−W) is calculated.

その後、計算部5で、塗装前の自動車10と錘20との重量差δ1と、塗装後の自動車10’と錘20との重量差δ2との差δ(=δ2−δ1=W2−W1)が計算され、この値が自動車10に塗布された塗料の重量となる。このとき、錘20の重量Wがキャンセルされるため、錘20の重量Wの精度に関わらず、塗布の重量を測定することができる。また、上記のように、測定精度の高い荷重測定器4で荷重M1、M2が測定されるため、これに基づいて計算される重量差δ1、δ2の精度も高い。従って、この重量差δ1、δ2から塗料の重量を求めることで、塗料の重量を高精度に測定することが可能となる。   After that, the calculation unit 5 calculates the difference δ (= δ2−δ1 = W2−W1) between the weight difference δ1 between the automobile 10 and the weight 20 before painting and the weight difference δ2 between the automobile 10 ′ and the weight 20 after painting. Is calculated, and this value is the weight of the paint applied to the automobile 10. At this time, since the weight W of the weight 20 is canceled, the weight of the application can be measured regardless of the accuracy of the weight W of the weight 20. Further, as described above, since the loads M1 and M2 are measured by the load measuring instrument 4 with high measurement accuracy, the accuracy of the weight differences δ1 and δ2 calculated based on the loads M1 and M2 is also high. Accordingly, the weight of the paint can be measured with high accuracy by obtaining the weight of the paint from the weight difference δ1, δ2.

本発明は上記の実施形態に限られない。例えば、加工前後の被計測物の重量によるモーメントを正確に対比するには、加工前後の被計測物を載置部3a上の同じ場所に載置する必要があるため、載置部3aに位置決め部を設けることが好ましい。特に、被計測物と支点との距離はモーメントの大きさに直結するため、加工前後の被計測物と支点2との距離を等しくすることが重要となる。従って、例えば、支点2の延在方向と直交する水平方向(図1の左右方向)で被計測物と当接する位置決め部を設けることができる(図示省略)。   The present invention is not limited to the above embodiment. For example, in order to accurately compare the moment due to the weight of the measured object before and after machining, the measured object before and after machining needs to be placed at the same location on the placing part 3a, so that it is positioned on the placing part 3a. It is preferable to provide a part. In particular, since the distance between the measured object and the fulcrum is directly related to the magnitude of the moment, it is important to make the distance between the measured object and the fulcrum 2 before and after machining equal. Therefore, for example, a positioning portion that abuts on the object to be measured in the horizontal direction (left-right direction in FIG. 1) orthogonal to the extending direction of the fulcrum 2 can be provided (not shown).

また、上記の実施形態では、荷重測定器4を自動車の重心より支点2側に設けた場合(LR<L10)を示しているが、これに限られない。例えば、図2に示すように、荷重測定器4を自動車の重心の真下に配置してもよい(LR=L10)。また、同図に点線で示すように、荷重測定器4を自動車の重心より外側(支点2から離れる側)に配置してもよい(LR>L10)。あるいは、同図に一点鎖線で示すように、荷重測定部4を支点2よりも錘側に設けてもよい。この場合、荷重測定器4が測定台3の上方に設けられ、測定台3の上面に当接する。そして、測定台3の錘側が上方に揺動したとき、荷重測定器4に加わる荷重が測定される。これらの荷重測定器4の位置のうち、図2に実線で示すように自動車の重心の真下に配置することが最も好ましい。荷重測定器4を自動車より支点2側に設けると、最大測定可能重量の大きい荷重測定器4が必要となって測定精度の低下が懸念され、荷重測定器4を自動車より外側に設けると、測定台3を外側に延ばして設備スペースを拡大する必要が生じる恐れがあるためである。尚、図2では、計算部5やストッパ6a、6bの図示は省略している。 Further, in the above embodiment shows a case in which the load measuring instrument 4 to the fulcrum 2 side of the center of gravity of the motor vehicle (L R <L 10), not limited to this. For example, as shown in FIG. 2, the load measuring device 4 may be arranged directly under the center of gravity of the automobile (L R = L 10 ). Further, as indicated by a dotted line in the figure, the load measuring device 4 may be arranged outside the center of gravity of the automobile (the side away from the fulcrum 2) (L R > L 10 ). Or you may provide the load measurement part 4 in the weight side rather than the fulcrum 2, as shown with the dashed-dotted line in the same figure. In this case, the load measuring device 4 is provided above the measuring table 3 and abuts on the upper surface of the measuring table 3. Then, when the weight side of the measuring table 3 swings upward, the load applied to the load measuring device 4 is measured. Of the positions of these load measuring devices 4, it is most preferable to arrange them directly below the center of gravity of the automobile as shown by the solid line in FIG. If the load measuring device 4 is provided on the fulcrum 2 side from the automobile, the load measuring device 4 having a large maximum measurable weight is required, and there is a concern that the measurement accuracy may be reduced. This is because it may be necessary to extend the equipment space by extending the table 3 to the outside. In FIG. 2, the calculation unit 5 and the stoppers 6a and 6b are not shown.

また、上記の実施形態では、自動車の塗装前後の重量差を測定する場合を示したが、これに限られない。例えば、重量物の機械加工前後の重量差を測定することで、機械加工により除去された材料の重量を測定し、歩留まりを評価することができる。   Moreover, although the case where the weight difference before and behind the painting of the automobile was measured was shown in the above embodiment, the present invention is not limited thereto. For example, by measuring the weight difference between before and after machining a heavy object, the weight of the material removed by machining can be measured, and the yield can be evaluated.

1 重量差測定装置
2 支点
3 測定台
3a 載置部
3b 錘載置部
4 荷重測定器
5 計算部
10 (塗装前の)自動車
10’ (塗装後の)自動車
20 錘
DESCRIPTION OF SYMBOLS 1 Weight difference measuring apparatus 2 Support point 3 Measuring stand 3a Mounting part 3b Weight mounting part 4 Load measuring device 5 Calculation part 10 Car 10 '(before painting) Car 20 weight (after painting)

Claims (2)

被計測物の加工前後の重量差を測定するための重量差測定装置において、
支点を中心に揺動可能であって、被計測物を載置するための載置部を前記支点の一方側に有すると共に、錘を載置するための錘載置部を前記支点の他方側に有する測定台と、前記測定台の下方又は上方に設けられ、前記測定台の揺動により前記測定台から受ける荷重を測定する荷重測定器と、前記荷重測定部による測定荷重に基づいて、加工前の前記被計測物と前記錘との重量差、及び、加工後の前記被計測物と前記錘との重量差を求め、これらの重量差の差を計算する計算部とを備えた重量差測定装置。
In the weight difference measuring device for measuring the weight difference before and after processing the workpiece,
A fulcrum is swingable about the fulcrum, and the fulcrum has a placement part on one side of the fulcrum, and a weight placement part for placing a weight on the other side of the fulcrum. Based on the measurement load provided by the load measuring unit, the load measuring device that is provided below or above the measuring table, and that measures the load received from the measuring table by the swinging of the measuring table. Weight difference provided with a calculation unit for obtaining a weight difference between the previous measurement object and the weight and a weight difference between the measurement object after measurement and the weight, and calculating a difference between the weight differences. measuring device.
前記載置部に、前記被計測物を位置決めする位置決め部を設けた請求項1記載の重量差測定装置。   The weight difference measuring apparatus according to claim 1, wherein a positioning unit that positions the object to be measured is provided in the mounting unit.
JP2011231775A 2011-10-21 2011-10-21 Weight difference measuring apparatus Pending JP2013088393A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015033108A1 (en) * 2013-09-04 2015-03-12 Metryx Limited Method and device for determining information relating to the mass of a semiconductor wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015033108A1 (en) * 2013-09-04 2015-03-12 Metryx Limited Method and device for determining information relating to the mass of a semiconductor wafer
US20160195424A1 (en) * 2013-09-04 2016-07-07 Metryx Limited Method and device for determining information relating to the mass of a semiconductor wafer
JP2016537641A (en) * 2013-09-04 2016-12-01 メトリックス・リミテッドMetryx Limited Method and apparatus for determining information relating to the mass of a semiconductor wafer
US9903750B2 (en) 2013-09-04 2018-02-27 Metryx Ltd. Method and device for determining information relating to the mass of a semiconductor wafer
TWI688021B (en) * 2013-09-04 2020-03-11 美特拉斯有限公司 Method and device for determining information relating to the mass of a semiconductor wafer

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