JP2013059861A - Liquid ejection head, and image forming apparatus - Google Patents

Liquid ejection head, and image forming apparatus Download PDF

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JP2013059861A
JP2013059861A JP2011197753A JP2011197753A JP2013059861A JP 2013059861 A JP2013059861 A JP 2013059861A JP 2011197753 A JP2011197753 A JP 2011197753A JP 2011197753 A JP2011197753 A JP 2011197753A JP 2013059861 A JP2013059861 A JP 2013059861A
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Takahiro Yoshida
崇裕 吉田
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Ricoh Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To suppress crosstalk with a simple structure and to secure droplet ejection performance.SOLUTION: When an arrangement direction of a plurality of independent liquid chambers 6 is a lateral direction and a direction perpendicular to the arrangement direction of the plurality of independent liquid chambers 6 is a longitudinal direction, in a cross section in the lateral direction, a partition wall surface 31 of a liquid chamber partition wall 30 between the adjacent independent liquid chambers 6 and 6, and a top surface 32 being as a facing surface facing a vibrating plate member 2 of the independent liquid chamber 6, are connected through first inclined surfaces 33 and 33. The first inclined surfaces 33 are formed across the substantially whole region of the independent liquid chambers 6 in the longitudinal direction of the independent liquid chambers 6.

Description

本発明は液体吐出ヘッド及び画像形成装置に関する。   The present invention relates to a liquid discharge head and an image forming apparatus.

プリンタ、ファクシミリ、複写装置、プロッタ、これらの複合機等の画像形成装置として、例えばインク液滴を吐出する液体吐出ヘッド（液滴吐出ヘッド）からなる記録ヘッドを用いた液体吐出記録方式の画像形成装置としてインクジェット記録装置などが知られている。   As an image forming apparatus such as a printer, a facsimile, a copying machine, a plotter, or a complex machine of these, for example, a liquid discharge recording type image forming using a recording head composed of a liquid discharge head (droplet discharge head) that discharges ink droplets. As an apparatus, an ink jet recording apparatus or the like is known.

液体吐出ヘッドとしては、圧電型、静電型、サーマル型など使用するアクチュエータに応じて種々のものが知られている。例えば、圧電型ヘッドは、液滴を吐出する複数のノズルがそれぞれ連通する個別液室（加圧室、圧力室、個別流路、加圧液室、加圧液室などとも称される。）と、個別液室に連通する流体抵抗部と、各個別液室に液体を供給する共通液室からの液体を導入する液体導入部とを形成する流路板と、個別液室、流体抵抗部及び液体導入部の壁面を形成する振動板部材と、振動板部材の個別液室に対する振動領域を変位させる圧電アクチュエータを備えている。   Various liquid discharge heads are known depending on the actuator used, such as a piezoelectric type, an electrostatic type, and a thermal type. For example, the piezoelectric head is an individual liquid chamber (also referred to as a pressurizing chamber, a pressure chamber, an individual flow path, a pressurizing liquid chamber, or a pressurizing liquid chamber) in which a plurality of nozzles that discharge droplets communicate with each other. And a flow path plate that forms a fluid resistance portion that communicates with the individual liquid chambers, a liquid introduction portion that introduces liquid from a common liquid chamber that supplies liquid to each individual liquid chamber, and an individual liquid chamber and a fluid resistance portion And a diaphragm member that forms a wall surface of the liquid introduction portion, and a piezoelectric actuator that displaces a vibration region of the diaphragm member with respect to the individual liquid chamber.

ところで、高画質画像を高速で形成するために、個別液室の配列方向（これを「短手方向」という。）におけるノズル配列密度を高くする必要がある。この結果、個別液室（以下、「個別液室」という。）の短手方向の幅が狭くなるとともに、隣り合う個別液室間の隔壁の幅も狭くする。   Incidentally, in order to form a high-quality image at a high speed, it is necessary to increase the nozzle arrangement density in the arrangement direction of the individual liquid chambers (this is referred to as the “short direction”). As a result, the width of the individual liquid chamber (hereinafter referred to as “individual liquid chamber”) in the short direction is narrowed, and the width of the partition between the adjacent individual liquid chambers is also narrowed.

そのため、個別液室に発生した圧力が隣接する隣り合う個別液室に影響を与えるクロストーク（以下、これを「隣接クロストーク」という。）が生じ易くなる。隣接クロストークを抑制するためには、例えば、個別液室から流路板を貫通してノズルに至る連通管を細くし、連通管の隣り合う隔壁部分の剛性を上げたり、個別液室の液室高さを低くして液室間隔壁の剛性を上げることが行われている。   Therefore, crosstalk (hereinafter, referred to as “adjacent crosstalk”) in which the pressure generated in the individual liquid chambers affects adjacent adjacent liquid chambers is likely to occur. In order to suppress adjacent crosstalk, for example, the communication pipe extending from the individual liquid chamber through the flow path plate to the nozzle is thinned, the rigidity of the adjacent partition wall portion of the communication pipe is increased, or the liquid in the individual liquid chamber is increased. The chamber height is lowered to increase the rigidity of the liquid chamber interval wall.

しかしながら、個別液室からノズルに通じる連通管を細くした場合、個別液室の流体インピーダンスが高くなり、吐出特性が低下し、あるいは、連通管の加工に時間がかかり高コストになる。また、個別液室の高さを低くすることは、個別液室の内部圧力により、流路板全体が変形し吐出特性が低下するクロストーク（以下、これを「全体クロストーク」と称する。）が発生し易くなって、滴吐出特性が低下する。   However, when the communication pipe leading from the individual liquid chamber to the nozzle is made thin, the fluid impedance of the individual liquid chamber is increased, the discharge characteristics are lowered, or processing of the communication pipe takes time and costs are increased. In addition, reducing the height of the individual liquid chamber means crosstalk in which the entire flow path plate is deformed by the internal pressure of the individual liquid chamber and discharge characteristics are lowered (hereinafter referred to as “total crosstalk”). Is likely to occur, and the droplet ejection characteristics deteriorate.

そこで、従来、個別液室の側壁は振動板側から離れる方向に向かって側壁の傾きが漸減するような曲率を持つ構成としたものがある（特許文献１）。   Therefore, conventionally, there has been a configuration in which the side wall of the individual liquid chamber has a curvature such that the inclination of the side wall gradually decreases in a direction away from the diaphragm side (Patent Document 1).

また、流路基板と振動板との間に振動板で構成される空間部を有し、この空間部の幅よりも圧力発生室の空間部側の幅の方が狭い構成としたものがある（特許文献２）。   In addition, there is a configuration in which a space portion constituted by a vibration plate is provided between the flow path substrate and the vibration plate, and the width on the space portion side of the pressure generation chamber is narrower than the width of the space portion. (Patent Document 2).

さらに、供給路の入口部分から前記ノズルに至るまでの流路の壁面のうち、アクチュエータ手段が配置される側の壁面以外の壁面は、常にノズル面に対して傾きを有し連続的に変化する傾斜面である構成としたものがある（特許文献３）。   Further, among the wall surfaces of the flow path from the inlet portion of the supply path to the nozzle, the wall surfaces other than the wall surface on the side where the actuator means is disposed always have an inclination with respect to the nozzle surface and continuously change. There exists what was set as the structure which is an inclined surface (patent document 3).

特開２００８−１５５４７２号公報JP 2008-155472 A 特開２００２−１０３６１８号公報JP 2002-103618 A 特開２０１１−０５６６９２号公報JP 2011-056792 A

しかしながら、特許文献１、３に開示されているように、液室間隔壁から個別液室の振動板に対向する対向面に至る面を曲率を持たせた面を高精度に形成することは困難であるという課題がある。   However, as disclosed in Patent Documents 1 and 3, it is difficult to form a surface with a curvature with high accuracy from the liquid chamber interval wall to the facing surface facing the diaphragm of the individual liquid chamber. There is a problem of being.

また、特許文献２に開示されているように、振動板で構成される空間部により圧電素子の変位領域を確保しても、液体の流れる流路基板の流路の幅が狭く、流体抵抗値が高くなってしまうため、吐出性能が低下するという課題がある。   Further, as disclosed in Patent Document 2, even if the displacement region of the piezoelectric element is secured by the space portion configured by the diaphragm, the flow path width of the flow path substrate through which the liquid flows is narrow, and the fluid resistance value However, there is a problem that the discharge performance is lowered.

本発明は上記の課題に鑑みてなされたものであり、簡単な構成で液室内の液の流量を十分に確保しつつクロストークを抑制し、滴吐出性能を確保することを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to suppress the crosstalk while ensuring a sufficient flow rate of the liquid in the liquid chamber with a simple configuration and to secure the droplet discharge performance.

上記の課題を解決するため、本発明に係る液体吐出ヘッドは、
液滴を吐出する複数のノズルがそれぞれ連通する溝状の複数の個別液室を形成する流路部材と、
前記個別液室の一部の壁面を形成する壁面形成部材と、を有し、
前記複数の個別液室の配列方向を短手方向、前記複数の個別液室の配列方向と直交する方向を長手方向とするとき、
短手方向の断面において、隣り合う前記個別液室間の隔壁面と前記個別液室の前記壁面形成部材に対向する対向面とは第１の傾斜面で繋がれて、
前記第１の傾斜面は長手方向に沿って形成されている
構成とした。 In order to solve the above-described problem, a liquid discharge head according to the present invention includes:
A flow path member that forms a plurality of groove-like individual liquid chambers in which a plurality of nozzles that discharge droplets communicate with each other;
A wall surface forming member that forms a part of the wall surface of the individual liquid chamber, and
When the arrangement direction of the plurality of individual liquid chambers is a short direction, and the direction perpendicular to the arrangement direction of the plurality of individual liquid chambers is a longitudinal direction,
In the cross-section in the short direction, the partition surface between the adjacent individual liquid chambers and the facing surface facing the wall surface forming member of the individual liquid chambers are connected by a first inclined surface,
The first inclined surface is formed along the longitudinal direction.

ここで、前記第１の傾斜面の長手方向の少なくとも前記ノズル側端部では、前記壁面形成部材側から見て、前記隔壁面及び前記対向面と第２の傾斜面で繋がれ、
前記個別液室は、長手方向の前記ノズル側端部で短手方向の幅が漸次広がる
構成とできる。 Here, at least at the nozzle side end in the longitudinal direction of the first inclined surface, the partition wall surface and the opposing surface are connected to the second inclined surface when viewed from the wall surface forming member side,
The individual liquid chamber may be configured such that the width in the short direction gradually increases at the nozzle side end in the longitudinal direction.

また、前記第１の傾斜面は、前記個別液室の両側の隔壁面と前記対向面との間にそれぞれ設けられている構成とできる。   The first inclined surface may be provided between the partition surface on both sides of the individual liquid chamber and the facing surface.

また、前記個別液室の液体流入側には、前記個別液室の短手方向の幅よりも狭い幅を有する流体抵抗部が設けられ、
前記流体抵抗の短手方向の幅と前記対向面の短手方向の幅が同じである
構成とできる。 Further, on the liquid inflow side of the individual liquid chamber, a fluid resistance portion having a width narrower than the width in the short direction of the individual liquid chamber is provided,
The width of the fluid resistance in the short direction and the width of the facing surface in the short direction may be the same.

また、前記第１の傾斜面は、前記個別液室の両側の隔壁面のいずれか一方と前記対向面との間に設けられている構成とできる。   Further, the first inclined surface may be provided between any one of the partition walls on both sides of the individual liquid chamber and the facing surface.

また、前記個別液室の液体流入側には、前記個別液室の短手方向の幅よりも狭い幅を有する流体抵抗部が設けられ、
前記流体抵抗の短手方向の幅と前記対向面の短手方向の幅が同じであり、
前記対向面側から見て、前記個別液室の前記壁面形成部材に対向する面は前記対向面と同じ方向に偏っている
構成とできる。 Further, on the liquid inflow side of the individual liquid chamber, a fluid resistance portion having a width narrower than the width in the short direction of the individual liquid chamber is provided,
The width in the short direction of the fluid resistance and the width in the short direction of the facing surface are the same,
When viewed from the facing surface side, the surface of the individual liquid chamber facing the wall surface forming member may be biased in the same direction as the facing surface.

また、前記流路部材はシリコンからなる構成とできる。   The flow path member may be made of silicon.

本発明に係る画像形成装置は、本発明に係る液体吐出ヘッドを備えているものである。   The image forming apparatus according to the present invention includes the liquid discharge head according to the present invention.

本発明に係る液体吐出ヘッドによれば、複数の個別液室の配列方向を短手方向、複数の個別液室の配列方向と直交する方向を長手方向とするとき、短手方向の断面において、隣り合う個別液室間の隔壁面と個別液室の壁面形成部材に対向する対向面とは第１の傾斜面で繋がれて、第１の傾斜面は長手方向に沿って形成されている構成としたので、液室断面積を大きく変動させることなく液室間隔壁の剛性を高めることができ、液室内の液の流量を十分に確保しつつ簡単な構成でクロストークを抑制し、滴吐出性能を確保することができる。   According to the liquid ejection head according to the present invention, when the arrangement direction of the plurality of individual liquid chambers is the short direction and the direction perpendicular to the arrangement direction of the plurality of individual liquid chambers is the longitudinal direction, The partition surface between adjacent individual liquid chambers and the facing surface facing the wall forming member of the individual liquid chamber are connected by a first inclined surface, and the first inclined surface is formed along the longitudinal direction. Therefore, it is possible to increase the rigidity of the liquid chamber interval wall without greatly changing the cross-sectional area of the liquid chamber, and to suppress the crosstalk with a simple configuration while ensuring a sufficient flow rate of the liquid in the liquid chamber, and droplet discharge. Performance can be ensured.

本発明に係る画像形成装置によれば、本発明に係る液体吐出ヘッドを備えているので、高画質画像を形成できる。   Since the image forming apparatus according to the present invention includes the liquid ejection head according to the present invention, a high-quality image can be formed.

本発明に係る液体吐出ヘッドの一例を示す液室長手方向に沿う要部断面説明図である。FIG. 4 is a cross-sectional explanatory view of a main part along a liquid chamber longitudinal direction showing an example of a liquid discharge head according to the present invention. 図１のＺ−Ｚ線に沿う液室短手方向の要部断面説明図である。It is principal part cross-sectional explanatory drawing of the liquid chamber short direction in alignment with the ZZ line | wire of FIG. 本発明の第１実施形態の説明に供する図２と同様な要部断面説明図である。It is principal part sectional explanatory drawing similar to FIG. 2 with which it uses for description of 1st Embodiment of this invention. 同じく流路板を振動板部材側から見た平面説明図である。It is the plane explanatory view which similarly looked at the flow-path board from the diaphragm member side. 図４のＸ１−Ｘ１線に沿う断面説明図である。FIG. 5 is a cross-sectional explanatory view taken along line X1-X1 in FIG. 4. 本発明の第２実施形態における流路板を振動板部材側から見た平面説明図である。It is the plane explanatory view which looked at the channel board in a 2nd embodiment of the present invention from the diaphragm member side. 本発明の第３実施形態における流路板を振動板部材側から見た平面説明図である。It is the plane explanatory view which looked at the channel board in a 3rd embodiment of the present invention from the diaphragm member side. 図７のＸ２−Ｘ２線に沿う断面説明図である。FIG. 8 is an explanatory cross-sectional view taken along line X2-X2 of FIG. 本発明の第４実施形態における流路板を振動板部材側から見た平面説明図である。It is plane explanatory drawing which looked at the flow-path board in 4th Embodiment of this invention from the diaphragm member side. 本発明に係る液体吐出ヘッドを備える本発明に係る画像形成装置の一例を示す機構部の側面説明図である。It is side surface explanatory drawing of the mechanism part which shows an example of the image forming apparatus which concerns on this invention provided with the liquid discharge head which concerns on this invention. 同機構部の要部平面説明図である。It is principal part plane explanatory drawing of the mechanism part.

以下、本発明の実施形態について添付図面を参照して説明する。本発明に係る液体吐出ヘッドの一例について図１及び図２を参照して説明する。なお、図１は同ヘッドの液室長手方向に沿う要部断面説明図、図２は図１のＺ−Ｚ線に沿う液室短手方向の要部断面説明図である。   Embodiments of the present invention will be described below with reference to the accompanying drawings. An example of the liquid discharge head according to the present invention will be described with reference to FIGS. 1 is a cross-sectional view of the main part along the longitudinal direction of the liquid chamber of the head, and FIG. 2 is a cross-sectional view of the main part in the short side direction of the liquid chamber along the line ZZ in FIG.

この液体吐出ヘッドは、流路部材としての流路板（流路基板、液室基板）１と、この流路板１の下面に接合した壁面形成部材である振動板部材２と、流路板１の上面に接合したノズル板３とを有し、これらによって液滴（液体の滴）を吐出する複数のノズル４がノズル連通路（連通管）５を介してそれぞれ連通する個別液室としての複数の個別液室６が形成され、フレーム部材１７に形成した共通液室１０から振動板部材２に形成した流入口９を介して各個別液室６に液体導入部８及び流体抵抗部７を介してインクを供給する。ここでノズル板３と流路板１は一体で形成される構成であってもよい。   The liquid discharge head includes a flow path plate (flow path substrate, liquid chamber substrate) 1 as a flow path member, a vibration plate member 2 that is a wall surface forming member bonded to the lower surface of the flow path plate 1, and a flow path plate. And a nozzle plate 3 joined to the upper surface of 1, each of which serves as an individual liquid chamber in which a plurality of nozzles 4 for discharging droplets (liquid droplets) communicate with each other via a nozzle communication path (communication pipe) 5. A plurality of individual liquid chambers 6 are formed, and the liquid introduction section 8 and the fluid resistance section 7 are connected to each individual liquid chamber 6 from the common liquid chamber 10 formed in the frame member 17 through the inlet 9 formed in the diaphragm member 2. Ink is supplied through. Here, the nozzle plate 3 and the flow path plate 1 may be formed integrally.

流路板１は、シリコン基板を異方性エッチングして、ノズル連通路５、個別液室６、流体抵抗部７、液体導入部８などの開口部や溝部をそれぞれ形成している。ノズル連通路５及び個別液室６などを形成するエッチングで残された部分が流路間隔壁（液室間隔壁）３０となる。   The flow path plate 1 anisotropically etches the silicon substrate to form openings and grooves such as the nozzle communication path 5, the individual liquid chamber 6, the fluid resistance section 7, and the liquid introduction section 8. A portion left by etching that forms the nozzle communication path 5 and the individual liquid chamber 6 becomes a flow path interval wall (liquid chamber interval wall) 30.

振動板部材２は、個別液室６、流体抵抗部７及び液体導入部８の壁面を形成する壁面部材であり、変形可能な第１層２Ａと、第１層２Ａ上に積層した第２層２Ｂとからなり、各液室６の壁面を形成する変形可能な第１層２Ａで形成された薄肉部である振動領域（ダイアフラム部）２ａを有し、振動領域２ａに第２層２Ｂで形成した島状凸部２ｂに、振動領域２ａを変形させ、液滴を吐出させるエネルギーを発生する駆動素子（アクチュエータ手段、圧力発生手段）としての柱状の電気機械変換素子である積層型圧電部材１２の圧電柱１２Ａが接合されている。   The diaphragm member 2 is a wall surface member that forms the wall surfaces of the individual liquid chamber 6, the fluid resistance portion 7, and the liquid introduction portion 8, and is capable of deforming the first layer 2A and the second layer laminated on the first layer 2A. 2B, and has a vibration region (diaphragm portion) 2a that is a thin-walled portion formed by a deformable first layer 2A that forms the wall surface of each liquid chamber 6, and is formed by the second layer 2B in the vibration region 2a. The laminated piezoelectric member 12 that is a columnar electromechanical conversion element as a drive element (actuator means, pressure generation means) that generates energy for deforming the vibration region 2a and ejecting droplets to the island-shaped convex portions 2b The piezoelectric column 12A is joined.

圧電部材１２はハーフカットダイシングにより櫛歯状に圧電柱１２Ａ、１２Ｂを形成したものであり、圧電柱１２Ａは駆動波形を印加する駆動柱となり、圧電柱１２Ｂは駆動波形を印加しないで液室間隔壁３０を支持する支柱である非駆動柱となる。すなわち、圧電部材１２の圧電柱１２Ａ、１２Ｂは個別液室６の配列密度の２倍の密度で配列された所謂バイピッチ構造としている。この圧電部材１２の下端面はベース部材１３に接合している。   The piezoelectric member 12 has piezoelectric columns 12A and 12B formed in a comb-teeth shape by half-cut dicing. The piezoelectric column 12A serves as a driving column to which a driving waveform is applied, and the piezoelectric column 12B does not apply a driving waveform between the liquid chambers. It becomes a non-driving column that is a column supporting the partition wall 30. That is, the piezoelectric columns 12 </ b> A and 12 </ b> B of the piezoelectric member 12 have a so-called bi-pitch structure in which the individual liquid chambers 6 are arranged at a density twice as high as that of the individual liquid chambers 6. The lower end surface of the piezoelectric member 12 is joined to the base member 13.

そして、駆動柱１２Ａは、振動板部材２の振動領域２ａに設けられた島状凸部（厚肉部）２ｂに接着剤で接合されている。非駆動柱１２Ｂは、振動板部材２の液室間隔壁３０に対応して設けられた厚肉部２ｃに接着剤で接合されている。   The drive column 12A is joined to an island-shaped convex portion (thick portion) 2b provided in the vibration region 2a of the diaphragm member 2 with an adhesive. The non-driving column 12B is joined to the thick portion 2c provided corresponding to the liquid chamber interval wall 30 of the diaphragm member 2 with an adhesive.

この圧電部材１２は、例えば厚さ１０〜５０μｍ／１層のチタン酸ジルコン酸鉛（ＰX１Ｔ）の圧電層２１と、厚さ数μｍ／１層の銀・パラジューム（ＡｇＰｄ）からなる内部電極層２２Ａ、２２Ｂとを交互に積層し、内部電極２２を交互に端面の端面電極（外部電極）である個別電極２３及び共通電極２４にそれぞれ電気的に接続したものである。そして、個別電極２３にはＦＰＣ１５の個別電極ラインが半田接合され、また、共通電極２４は圧電部材１２の端部に電極層を設けて個別電極２３側端面に回し込んでＦＰＣ１５のＧＮ電極（共通電極ライン）に接続している。ＦＰＣ１５には図示しないドライバＩＣが実装されており、これにより駆動柱１２Ａへの駆動電圧印加を制御している。   The piezoelectric member 12 includes, for example, a lead zirconate titanate (PX1T) piezoelectric layer 21 having a thickness of 10 to 50 μm / layer, and an internal electrode layer 22A made of silver and palladium (AgPd) having a thickness of several μm / layer. , 22B are alternately stacked, and the internal electrodes 22 are alternately electrically connected to the individual electrodes 23 and the common electrode 24 which are end face electrodes (external electrodes) on the end faces. An individual electrode line of the FPC 15 is soldered to the individual electrode 23, and the common electrode 24 is provided with an electrode layer at the end of the piezoelectric member 12 and is turned to the end surface on the individual electrode 23 side so that the GN electrode (common of the FPC 15 is common). Electrode line). A driver IC (not shown) is mounted on the FPC 15 to control application of a driving voltage to the driving column 12A.

ノズル板３は、ニッケル（Ｎｉ）の金属プレートから形成したもので、エレクトロフォーミング法（電鋳）で製造している。このノズル板３には各個別液室６に対応して直径１０〜３５μｍのノズル４を形成し、流路板１に接着剤接合している。そして、このノズル板３の液滴吐出側面（吐出方向の表面：吐出面、又は液室６側と反対の面）には撥水層を設けている。   The nozzle plate 3 is formed from a nickel (Ni) metal plate, and is manufactured by an electroforming method (electroforming). In this nozzle plate 3, nozzles 4 having a diameter of 10 to 35 μm are formed corresponding to the individual liquid chambers 6 and bonded to the flow path plate 1 with an adhesive. A water repellent layer is provided on the droplet discharge side surface (surface in the discharge direction: discharge surface or surface opposite to the liquid chamber 6 side) of the nozzle plate 3.

また、ＦＰＣ１５を実装した（接続した）圧電柱１２Ａ及びベース部材１３などで構成される圧電型アクチュエータの外周側には、エポキシ系樹脂或いはポリフェニレンサルファイトで射出成形により形成したフレーム部材１７を接合している。そして、このフレーム部材１７には共通液室１０を形成し、更に共通液室１０に外部からインクを供給するために連結管を介して供給口を形成し、この供給口は更に図示しないサブタンクやインクカートリッジなどのインク供給源に接続される。   Further, a frame member 17 formed by injection molding with epoxy resin or polyphenylene sulfite is joined to the outer peripheral side of the piezoelectric actuator composed of the piezoelectric column 12A mounted with (connected to) the FPC 15 and the base member 13. ing. A common liquid chamber 10 is formed in the frame member 17, and a supply port is formed through a connecting pipe to supply ink to the common liquid chamber 10 from the outside. It is connected to an ink supply source such as an ink cartridge.

このヘッドでは、圧電柱１２Ａ、１２Ｂは３００ｄｐｉの間隔でダイシングされており．それが対向して２列配置され、個別液室６及びノズル４は、１列１５０ｄｐｉの間隔で２列がそれぞれ千鳥配置に整列しており，３００ｄｐｉの解像度を１スキャンで得ることができる構成としている。   In this head, the piezoelectric pillars 12A and 12B are diced at an interval of 300 dpi. It is arranged in two rows facing each other, and the individual liquid chambers 6 and the nozzles 4 are arranged in a staggered arrangement with two rows at intervals of 150 dpi, so that a resolution of 300 dpi can be obtained in one scan. Yes.

このように構成した液体吐出ヘッドにおいては、例えば駆動柱１２Ａに印加する電圧を基準電位から下げることによって圧電柱１２Ａが収縮し、振動板部材２の液室壁面を形成する振動領域２ａが下降して個別液室６の容積が膨張することで、個別液室６内にインクが流入し、その後圧電柱１２Ａに印加する電圧を上げて圧電柱１２Ａを積層方向に伸長させ、振動板部材２の振動領域２ａをノズル４方向に変形させて液室６の容積を収縮させることにより、液室６内のインクが加圧され、ノズル４からインク滴が吐出（噴射）される。   In the liquid discharge head configured as described above, for example, the piezoelectric column 12A contracts by lowering the voltage applied to the drive column 12A from the reference potential, and the vibration region 2a forming the liquid chamber wall surface of the vibration plate member 2 descends. As the volume of the individual liquid chamber 6 expands, the ink flows into the individual liquid chamber 6, and then the voltage applied to the piezoelectric columns 12A is increased to extend the piezoelectric columns 12A in the stacking direction. By deforming the vibration region 2 a in the direction of the nozzle 4 and contracting the volume of the liquid chamber 6, the ink in the liquid chamber 6 is pressurized and ink droplets are ejected (jetted) from the nozzle 4.

そして、圧電柱１２Ａに印加する電圧を基準電位に戻すことによって振動板部材２の振動領域２ａが初期位置に復元し、液室６が膨張して負圧が発生するので、このとき、共通液室１０から液室６内にインクが充填される。そこで、ノズル４のメニスカス面の振動が減衰して安定した後、次の液滴吐出のための動作に移行する。   Then, by returning the voltage applied to the piezoelectric column 12A to the reference potential, the vibration region 2a of the diaphragm member 2 is restored to the initial position, and the liquid chamber 6 expands to generate a negative pressure. Ink is filled into the liquid chamber 6 from the chamber 10. Therefore, after the vibration of the meniscus surface of the nozzle 4 is attenuated and stabilized, the operation proceeds to the next droplet discharge.

なお、このヘッドの駆動方法については上記の例（引き−押し打ち）に限るものではなく、駆動波形の与えた方によって引き打ちや押し打ちなどを行なうこともできる。   Note that the driving method of the head is not limited to the above example (pulling-pushing), and it is also possible to perform striking or pushing depending on the direction to which the driving waveform is given.

次に、本発明の第１実施形態について図３ないし図５を参照して説明する。なお、図３は同実施形態の説明に供する図２と同様な要部断面説明図、図４は同じく流路板を振動板部材側から見た平面説明図、図５は図４のX１−X１線に沿う断面説明図である。また、図４中のハッチングは見やすくするために付したもので、断面を示すものではない。   Next, a first embodiment of the present invention will be described with reference to FIGS. 3 is a cross-sectional explanatory view of the main part similar to FIG. 2 for explaining the embodiment, FIG. 4 is an explanatory plan view of the flow path plate seen from the diaphragm member side, and FIG. It is sectional explanatory drawing which follows a X1 line. Moreover, the hatching in FIG. 4 is given for easy viewing, and does not show a cross section.

ここで、複数の個別液室６の配列方向を短手方向、複数の個別液室６の配列方向と直交する方向を長手方向とするとき、図５に示すように、短手方向の断面において、隣り合う個別液室６、６間の液室間隔壁３０の壁面である隔壁面３１と、個別液室６の壁面形成部材である振動板部材２に対向する対向面である天面３２とは、第１の傾斜面３３、３３で繋がれて、図４に示すように、第１の傾斜面３３は個別液室６の長手方向に沿って個別液室６のほぼ全域にわたって形成されている。   Here, when the arrangement direction of the plurality of individual liquid chambers 6 is the short direction and the direction orthogonal to the arrangement direction of the plurality of individual liquid chambers 6 is the longitudinal direction, as shown in FIG. A partition wall surface 31 which is a wall surface of the liquid chamber interval wall 30 between the adjacent individual liquid chambers 6 and 6, and a top surface 32 which is a facing surface facing the diaphragm member 2 which is a wall surface forming member of the individual liquid chamber 6. Are connected by first inclined surfaces 33, 33, and as shown in FIG. 4, the first inclined surface 33 is formed over almost the entire area of the individual liquid chamber 6 along the longitudinal direction of the individual liquid chamber 6. Yes.

また、第１の傾斜面３３は、長手方向の少なくともノズル側端部では、図３及び図４に示すように、壁面形成部材である振動板部材２側から見て、隔壁面３１及び対向面である天面３２と第２の傾斜面３４で繋がれている。これにより、個別液室６は、長手方向のノズル側端部で短手方向の幅が漸次広がることになる。   Further, as shown in FIGS. 3 and 4, the first inclined surface 33 is at least at the nozzle side end in the longitudinal direction, as viewed from the diaphragm member 2 side that is a wall surface forming member, and the partition surface 31 and the opposing surface. The top surface 32 and the second inclined surface 34 are connected. Thereby, the width of the short side direction of the individual liquid chamber 6 gradually increases at the nozzle side end in the longitudinal direction.

このように、液室間隔壁３０の壁面３１と天面３２とは、第１の傾斜面３３で繋がれて、第１の傾斜面３３は個別液室６の長手方向に沿って個別液室６の全域にわたって形成されている構成とすることで、液室間隔壁３０の剛性を高めることができ、簡単な構成でクロストークを抑制し、滴吐出性能を確保することができる。   As described above, the wall surface 31 and the top surface 32 of the liquid chamber interval wall 30 are connected by the first inclined surface 33, and the first inclined surface 33 extends along the longitudinal direction of the individual liquid chamber 6. With the configuration formed over the entire area of 6, the rigidity of the liquid chamber interval wall 30 can be increased, crosstalk can be suppressed with a simple configuration, and droplet ejection performance can be ensured.

また、第１の傾斜面３３の長手方向端部では第２の傾斜面３４が設けられていることで、流体抵抗部７との間や連通管５との間でインクの流れを阻害したり、気泡が滞留することを防止できる。   Further, since the second inclined surface 34 is provided at the longitudinal end portion of the first inclined surface 33, the flow of ink is inhibited between the fluid resistance portion 7 and the communication pipe 5. , It is possible to prevent bubbles from staying.

なお、シリコンからなる流路板１に通常のウエットエッチングを行っても上述した第１の傾斜面３３を有する個別液室６となる溝形状を形成することはできない。そこで、ウェットエッチングで使用するマスクパターンを、串歯状に形成することで、シリコンの異方性エッチングによって第１の傾斜面３３を有する溝形状を形成することができる。つまり、ウエットエッチングのマスク設計のみで第１の傾斜面３３を形成することができ、コストの上昇を招くことなく、液室間隔壁の剛性を向上させることができる。   In addition, the groove shape used as the individual liquid chamber 6 which has the 1st inclined surface 33 mentioned above cannot be formed even if normal wet etching is performed to the flow path plate 1 made of silicon. Therefore, by forming a mask pattern used in wet etching in a skewer shape, a groove shape having the first inclined surface 33 can be formed by anisotropic etching of silicon. That is, the first inclined surface 33 can be formed only by the wet etching mask design, and the rigidity of the liquid chamber interval wall can be improved without increasing the cost.

次に、本発明の第２実施形態について図６を参照して説明する。なお、図６は同実施形態における流路板を振動板部材側から見た平面説明図である。
本実施形態では、個別液室６の天面３２の短手方向の幅と、流体抵抗部７の短手方向の幅はいずれも幅Ａになるように形成されている。 Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 6 is an explanatory plan view of the flow channel plate in the same embodiment as viewed from the diaphragm member side.
In the present embodiment, the width in the short direction of the top surface 32 of the individual liquid chamber 6 and the width in the short direction of the fluid resistance portion 7 are both formed to be the width A.

これにより、流体抵抗部７から個別液室６へのインクの流れが阻害されず、液室間隔壁の剛性の向上と共に、気泡排出性の向上も図ることができる。   Thereby, the flow of ink from the fluid resistance portion 7 to the individual liquid chamber 6 is not hindered, and it is possible to improve the bubble discharge property as well as the rigidity of the liquid chamber interval wall.

次に、本発明の第３実施形態について図７及び図８を参照して説明する。なお、図７は同実施形態における流路板を振動板部材側から見た平面説明図、図８は図７のＸ２−Ｘ２線に沿う断面説明図である。
本実施形態では、短手方向断面において、１つの個別液室６の一方の液室間隔壁３０の壁面３１ａ及び他方の液室間隔壁３０の壁面３１ｂのうち、一方の液室間隔壁３０の壁面３１ａと天面３２との間のみ傾斜面３３にて繋いでいる。 Next, a third embodiment of the present invention will be described with reference to FIGS. 7 is an explanatory plan view of the channel plate in the same embodiment as viewed from the diaphragm member side, and FIG. 8 is an explanatory sectional view taken along line X2-X2 of FIG.
In the present embodiment, one of the liquid chamber interval walls 30 of the wall surface 31a of the one liquid chamber interval wall 30 and the wall surface 31b of the other liquid chamber interval wall 30 of one individual liquid chamber 6 in the short direction cross section. Only the wall surface 31 a and the top surface 32 are connected by the inclined surface 33.

このように、１つの個別液室の壁面を形成する２つの液室間隔壁の一方の隔壁の壁面との天面との間にのみ傾斜面を形成することで、両側の壁面と天面との間に傾斜面を形成する前記第１実施形態よりも液室間隔壁の剛性を高めることができる。   In this way, by forming an inclined surface only between the top surface of one partition wall of the two liquid chamber spacing walls forming the wall surface of one individual liquid chamber, The rigidity of the liquid chamber interval wall can be increased as compared with the first embodiment in which the inclined surface is formed between them.

次に、本発明の第４実施形態について図９を参照して説明する。なお、図９は同実施形態における流路板を振動板部材側から見た平面説明図である。
本実施形態では、前記第２、第３実施形態を組み合わせて、傾斜面３３を一方の隔壁３０の壁面３１ａ側のみに形成することで、天面３２を他方の隔壁３０側に寄せ、流体抵抗部７も天面３２と同じ短手方向位置に寄せて形成し、天面３２の短手方向の幅と流体抵抗部７の短手方向の幅はいずれも幅Ａになるように形成している。 Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 9 is an explanatory plan view of the flow path plate in the same embodiment as viewed from the diaphragm member side.
In the present embodiment, the second and third embodiments are combined, and the inclined surface 33 is formed only on the wall surface 31a side of one partition wall 30, so that the top surface 32 is brought closer to the other partition wall 30 side and the fluid resistance is increased. The portion 7 is also formed close to the same position in the short direction as the top surface 32, and the width in the short direction of the top surface 32 and the width in the short direction of the fluid resistance portion 7 are both formed to be the width A. Yes.

このように構成することで、隔壁の剛性を高めるとともに、流体抵抗部から個別液室へのインクの流れを阻害せず、気泡排出性も高めることができる。   With this configuration, it is possible to increase the rigidity of the partition wall, and to inhibit the flow of ink from the fluid resistance portion to the individual liquid chamber, and to improve the bubble discharge performance.

なお、上記各実施形態の液体吐出ヘッドにインクを供給するタンクを一体にしインクタンク一体型ヘッドを構成することもできる。   The ink tank integrated head can also be configured by integrating the tank for supplying ink to the liquid ejection heads of the above embodiments.

次に、本発明に係る液体吐出ヘッドを備える本発明に係る画像形成装置の一例について図１０及び図１１を参照して説明する。なお、図１０は同装置の機構部の側面説明図、図１１は同機構部の要部平面説明図である。
この画像形成装置はシリアル型画像形成装置であり、左右の側板２２１Ａ、２２１Ｂに横架したガイド部材である主従のガイドロッド２３１、２３２でキャリッジ２３３を主走査方向に摺動自在に保持し、図示しない主走査モータによってタイミングベルトを介して矢示方向（キャリッジ主走査方向）に移動走査する。 Next, an example of the image forming apparatus according to the present invention including the liquid discharge head according to the present invention will be described with reference to FIGS. 10 is an explanatory side view of the mechanism of the apparatus, and FIG. 11 is an explanatory plan view of the main part of the mechanism.
This image forming apparatus is a serial type image forming apparatus, and a carriage 233 is slidably held in the main scanning direction by main and slave guide rods 231 and 232 which are guide members horizontally mounted on the left and right side plates 221A and 221B. The main scanning motor that does not perform moving scanning in the direction indicated by the arrow (carriage main scanning direction) via the timing belt.

このキャリッジ２３３には、イエロー（Ｙ）、シアン（Ｃ）、マゼンタ（Ｍ）、ブラック（Ｋ）の各色のインク滴を吐出するための本発明に係る液体吐出ヘッドと同ヘッドに供給するインクを収容するタンクを一体化した記録ヘッド２３４を複数のノズルからなるノズル列を主走査方向と直交する副走査方向に配列し、インク滴吐出方向を下方に向けて装着している。   The carriage 233 is supplied with ink supplied to the same head as the liquid discharge head according to the present invention for discharging ink droplets of each color of yellow (Y), cyan (C), magenta (M), and black (K). A recording head 234 with an integrated tank is arranged in a sub-scanning direction orthogonal to the main scanning direction with a nozzle row composed of a plurality of nozzles, and is mounted with the ink droplet ejection direction facing downward.

記録ヘッド２３４は、それぞれ２つのノズル列を有し、一方の記録ヘッド２３４ａの一方のノズル列はブラック（Ｋ）の液滴を、他方のノズル列はシアン（Ｃ）の液滴を、他方の記録ヘッド２３４ｂの一方のノズル列はマゼンタ（Ｍ）の液滴を、他方のノズル列はイエロー（Ｙ）の液滴を、それぞれ吐出する。なお、ここでは２ヘッド構成で４色の液滴を吐出する構成としているが、１ヘッド当たり４ノズル列配置とし、１個のヘッドで４色の各色を吐出させることもできる。   Each of the recording heads 234 has two nozzle rows, and one nozzle row of one recording head 234a has a black (K) droplet, the other nozzle row has a cyan (C) droplet, and the other nozzle row has the other nozzle row. One nozzle row of the recording head 234b discharges magenta (M) droplets, and the other nozzle row discharges yellow (Y) droplets. Here, a configuration in which droplets of four colors are ejected in a two-head configuration is used, but it is also possible to arrange four nozzle rows per head and eject each of the four colors with one head.

また、記録ヘッド２３４のタンク２３５には各色の供給チューブ２３６を介して、供給ユニット２２４によって各色のインクカートリッジ２１０から各色のインクが補充供給される。   Further, the ink of each color is replenished and supplied from the ink cartridge 210 of each color to the tank 235 of the recording head 234 via the supply tube 236 of each color.

一方、給紙トレイ２０２の用紙積載部（圧板）２４１上に積載した用紙２４２を給紙するための給紙部として、用紙積載部２４１から用紙２４２を１枚ずつ分離給送する半月コロ（給紙コロ）２４３及び給紙コロ２４３に対向し、摩擦係数の大きな材質からなる分離パッド２４４を備え、この分離パッド２４４は給紙コロ２４３側に付勢されている。   On the other hand, as a paper feeding unit for feeding the paper 242 stacked on the paper stacking unit (pressure plate) 241 of the paper feed tray 202, a half-moon roller (feeding) that separates and feeds the paper 242 one by one from the paper stacking unit 241. A separation pad 244 made of a material having a large coefficient of friction is provided opposite to the sheet roller 243 and the sheet feeding roller 243, and the separation pad 244 is urged toward the sheet feeding roller 243 side.

そして、この給紙部から給紙された用紙２４２を記録ヘッド２３４の下方側に送り込むために、用紙２４２を案内するガイド部材２４５と、カウンタローラ２４６と、搬送ガイド部材２４７と、先端加圧コロ２４９を有する押さえ部材２４８とを備えるとともに、給送された用紙２４２を静電吸着して記録ヘッド２３４に対向する位置で搬送するための搬送手段である搬送ベルト２５１を備えている。   In order to feed the sheet 242 fed from the sheet feeding unit to the lower side of the recording head 234, a guide member 245 for guiding the sheet 242, a counter roller 246, a conveyance guide member 247, and a tip pressure roller. And a conveying belt 251 which is a conveying means for electrostatically attracting the fed paper 242 and conveying it at a position facing the recording head 234.

この搬送ベルト２５１は、無端状ベルトであり、搬送ローラ２５２とテンションローラ２５３との間に掛け渡されて、ベルト搬送方向（副走査方向）に周回するように構成している。また、この搬送ベルト２５１の表面を帯電させるための帯電手段である帯電ローラ２５６を備えている。この帯電ローラ２５６は、搬送ベルト２５１の表層に接触し、搬送ベルト２５１の回動に従動して回転するように配置されている。この搬送ベルト２５１は、図示しない副走査モータによってタイミングを介して搬送ローラ２５２が回転駆動されることによってベルト搬送方向に周回移動する。   The conveyor belt 251 is an endless belt, and is configured to wrap around the conveyor roller 252 and the tension roller 253 so as to circulate in the belt conveyance direction (sub-scanning direction). In addition, a charging roller 256 that is a charging unit for charging the surface of the transport belt 251 is provided. The charging roller 256 is disposed so as to come into contact with the surface layer of the conveyor belt 251 and to rotate following the rotation of the conveyor belt 251. The transport belt 251 rotates in the belt transport direction when the transport roller 252 is rotationally driven through timing by a sub-scanning motor (not shown).

さらに、記録ヘッド２３４で記録された用紙２４２を排紙するための排紙部として、搬送ベルト２５１から用紙２４２を分離するための分離爪２６１と、排紙ローラ２６２及び排紙コロ２６３とを備え、排紙ローラ２６２の下方に排紙トレイ２０３を備えている。   Further, as a paper discharge unit for discharging the paper 242 recorded by the recording head 234, a separation claw 261 for separating the paper 242 from the transport belt 251, a paper discharge roller 262, and a paper discharge roller 263 are provided. A paper discharge tray 203 is provided below the paper discharge roller 262.

また、装置本体の背面部には両面ユニット２７１が着脱自在に装着されている。この両面ユニット２７１は搬送ベルト２５１の逆方向回転で戻される用紙２４２を取り込んで反転させて再度カウンタローラ２４６と搬送ベルト２５１との間に給紙する。また、この両面ユニット２７１の上面は手差しトレイ２７２としている。   A double-sided unit 271 is detachably attached to the back surface of the apparatus main body. The duplex unit 271 takes in the paper 242 returned by the reverse rotation of the transport belt 251, reverses it, and feeds it again between the counter roller 246 and the transport belt 251. The upper surface of the duplex unit 271 is a manual feed tray 272.

さらに、キャリッジ２３３の走査方向一方側の非印字領域には、記録ヘッド２３４のノズルの状態を維持し、回復するための回復手段を含む本発明に係るヘッドの維持回復装置である維持回復機構２８１を配置している。この維持回復機構２８１には、記録ヘッド２３４の各ノズル面をキャピングするための各キャップ部材（以下「キャップ」という。）２８２ａ、２８２ｂ（区別しないときは「キャップ２８２」という。）と、ノズル面をワイピングするためのブレード部材であるワイパーブレード２８３と、増粘した記録液を排出するために記録に寄与しない液滴を吐出させる空吐出を行うときの液滴を受ける空吐出受け２８４などを備えている。   Further, a maintenance / recovery mechanism 281 that is a head maintenance / recovery device according to the present invention includes a recovery means for maintaining and recovering the nozzle state of the recording head 234 in the non-printing area on one side of the carriage 233 in the scanning direction. Is arranged. The maintenance / recovery mechanism 281 includes cap members (hereinafter referred to as “caps”) 282a and 282b (hereinafter referred to as “caps 282” when not distinguished) for capping each nozzle surface of the recording head 234, and nozzle surfaces. A wiper blade 283 that is a blade member for wiping the ink, and an empty discharge receiver 284 that receives liquid droplets for discharging the liquid droplets that do not contribute to recording in order to discharge the thickened recording liquid. ing.

また、キャリッジ２３３の走査方向他方側の非印字領域には、記録中などに増粘した記録液を排出するために記録に寄与しない液滴を吐出させる空吐出を行うときの液滴を受ける空吐出受け２８８を配置し、この空吐出受け２８８には記録ヘッド２３４のノズル列方向に沿った開口部２８９などを備えている。   Further, in the non-printing area on the other side in the scanning direction of the carriage 233, there is an empty space for receiving a liquid droplet when performing an empty discharge for discharging a liquid droplet that does not contribute to the recording in order to discharge the recording liquid thickened during the recording. A discharge receiver 288 is disposed, and the idle discharge receiver 288 is provided with an opening 289 along the nozzle row direction of the recording head 234 and the like.

このように構成したこの画像形成装置においては、給紙トレイ２０２から用紙２４２が１枚ずつ分離給紙され、略鉛直上方に給紙された用紙２４２はガイド２４５で案内され、搬送ベルト２５１とカウンタローラ２４６との間に挟まれて搬送され、更に先端を搬送ガイド２３７で案内されて先端加圧コロ２４９で搬送ベルト２５１に押し付けられ、略９０°搬送方向を転換される。   In this image forming apparatus configured as described above, the sheets 242 are separated and fed one by one from the sheet feeding tray 202, and the sheet 242 fed substantially vertically upward is guided by the guide 245, and is conveyed to the conveyor belt 251 and the counter. It is sandwiched between the rollers 246 and conveyed, and further, the leading end is guided by the conveying guide 237 and pressed against the conveying belt 251 by the leading end pressing roller 249, and the conveying direction is changed by approximately 90 °.

このとき、帯電ローラ２５６に対してプラス出力とマイナス出力とが交互に繰り返すように、つまり交番する電圧が印加され、搬送ベルト２５１が交番する帯電電圧パターン、すなわち、周回方向である副走査方向に、プラスとマイナスが所定の幅で帯状に交互に帯電されたものとなる。このプラス、マイナス交互に帯電した搬送ベルト２５１上に用紙２４２が給送されると、用紙２４２が搬送ベルト２５１に吸着され、搬送ベルト２５１の周回移動によって用紙２４２が副走査方向に搬送される。   At this time, a positive output and a negative output are alternately applied to the charging roller 256, that is, an alternating voltage is applied, and a charging voltage pattern in which the conveying belt 251 alternates, that is, in the sub-scanning direction that is the circumferential direction. , Plus and minus are alternately charged in a band shape with a predetermined width. When the sheet 242 is fed onto the conveyance belt 251 charged alternately with plus and minus, the sheet 242 is attracted to the conveyance belt 251, and the sheet 242 is conveyed in the sub scanning direction by the circumferential movement of the conveyance belt 251.

そこで、キャリッジ２３３を移動させながら画像信号に応じて記録ヘッド２３４を駆動することにより、停止している用紙２４２にインク滴を吐出して１行分を記録し、用紙２４２を所定量搬送後、次の行の記録を行う。記録終了信号又は用紙２４２の後端が記録領域に到達した信号を受けることにより、記録動作を終了して、用紙２４２を排紙トレイ２０３に排紙する。   Therefore, by driving the recording head 234 according to the image signal while moving the carriage 233, ink droplets are ejected onto the stopped paper 242 to record one line, and after the paper 242 is conveyed by a predetermined amount, Record the next line. Upon receiving a recording end signal or a signal that the trailing edge of the paper 242 has reached the recording area, the recording operation is finished and the paper 242 is discharged onto the paper discharge tray 203.

このように、この画像形成装置では、本発明に係る液体吐出ヘッドを記録ヘッドとして備えるので、高画質画像を安定して形成することができる。   As described above, since the image forming apparatus includes the liquid discharge head according to the present invention as a recording head, a high-quality image can be stably formed.

なお、本願において、「用紙」とは材質を紙に限定するものではなく、ＯＨＰ、布、ガラス、基板などを含み、インク滴、その他の液体などが付着可能なものの意味であり、被記録媒体、記録媒体、記録紙、記録用紙などと称されるものを含む。また、画像形成、記録、印字、印写、印刷はいずれも同義語とする。   In the present application, the “paper” is not limited to paper, but includes OHP, cloth, glass, a substrate, etc., and means a material to which ink droplets or other liquids can be attached. , Recording media, recording paper, recording paper, and the like. In addition, image formation, recording, printing, printing, and printing are all synonymous.

また、「画像形成装置」は、紙、糸、繊維、布帛、皮革、金属、プラスチック、ガラス、木材、セラミックス等の媒体に液体を吐出して画像形成を行う装置を意味し、また、「画像形成」とは、文字や図形等の意味を持つ画像を媒体に対して付与することだけでなく、パターン等の意味を持たない画像を媒体に付与すること（単に液滴を媒体に着弾させること）をも意味する。   The “image forming apparatus” means an apparatus that forms an image by discharging liquid onto a medium such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, etc. “Formation” means not only giving an image having a meaning such as a character or a figure to a medium but also giving an image having no meaning such as a pattern to the medium (simply causing a droplet to land on the medium). ) Also means.

また、「インク」とは、特に限定しない限り、インクと称されるものに限らず、記録液、定着処理液、液体などと称されるものなど、画像形成を行うことができるすべての液体の総称として用い、例えば、ＤＮＡ試料、レジスト、パターン材料、樹脂なども含まれる。   The “ink” is not limited to an ink unless otherwise specified, but includes any liquid that can form an image, such as a recording liquid, a fixing processing liquid, or a liquid. Used generically, for example, includes DNA samples, resists, pattern materials, resins, and the like.

また、「画像」とは平面的なものに限らず、立体的に形成されたものに付与された画像、また立体自体を三次元的に造形して形成された像も含まれる。   In addition, the “image” is not limited to a planar image, and includes an image given to a three-dimensionally formed image and an image formed by three-dimensionally modeling a solid itself.

また、画像形成装置には、特に限定しない限り、シリアル型画像形成装置及びライン型画像形成装置のいずれも含まれる。   Further, the image forming apparatus includes both a serial type image forming apparatus and a line type image forming apparatus, unless otherwise limited.

１ 流路板
２ 振動板部材
３ ノズル板
４ ノズル
５ ノズル連通路
６ 加圧液室（個別液室）
７ 流体抵抗部
８ 液体導入部
１０ 共通液室
１２ 圧電部材
３０ 液室間隔壁
３１、３１ａ、３１ｂ 隔壁面
３２ 天面（対向面）
３３ 第１の傾斜面
３４ 第２の傾斜面
２３３ キャリッジ
２３４ａ、２３４ｂ 記録ヘッド DESCRIPTION OF SYMBOLS 1 Flow path plate 2 Vibrating plate member 3 Nozzle plate 4 Nozzle 5 Nozzle communication path 6 Pressurized liquid chamber (individual liquid chamber)
7 Fluid resistance portion 8 Liquid introduction portion 10 Common liquid chamber 12 Piezoelectric member 30 Liquid chamber spacing wall 31, 31a, 31b Partition wall surface 32 Top surface (opposing surface)
33 First inclined surface 34 Second inclined surface 233 Carriage 234a, 234b Recording head

Claims (8)

液滴を吐出する複数のノズルがそれぞれ連通する溝状の複数の個別液室を形成する流路部材と、
前記個別液室の一部の壁面を形成する壁面形成部材と、を有し、
前記複数の個別液室の配列方向を短手方向、前記複数の個別液室の配列方向と直交する方向を長手方向とするとき、
短手方向の断面において、隣り合う前記個別液室間の隔壁面と前記個別液室の前記壁面形成部材に対向する対向面とは第１の傾斜面で繋がれ、
前記第１の傾斜面は長手方向に沿って形成されている
ことを特徴とする液体吐出ヘッド。 A flow path member that forms a plurality of groove-like individual liquid chambers in which a plurality of nozzles that discharge droplets communicate with each other;
A wall surface forming member that forms a part of the wall surface of the individual liquid chamber, and
When the arrangement direction of the plurality of individual liquid chambers is a short direction, and the direction perpendicular to the arrangement direction of the plurality of individual liquid chambers is a longitudinal direction,
In the cross-section in the short direction, the partition surface between the adjacent individual liquid chambers and the facing surface facing the wall surface forming member of the individual liquid chambers are connected by a first inclined surface,
The liquid discharge head, wherein the first inclined surface is formed along a longitudinal direction. 前記第１の傾斜面の長手方向の少なくとも前記ノズル側端部では、前記壁面形成部材側から見て、前記隔壁面及び前記対向面と第２の傾斜面で繋がれ、
前記個別液室は、長手方向の前記ノズル側端部で短手方向の幅が漸次広がる
ことを特徴とする請求項１に記載の液体吐出ヘッド。 At least at the nozzle side end in the longitudinal direction of the first inclined surface, as viewed from the wall surface forming member side, the partition wall surface and the opposing surface are connected by a second inclined surface,
2. The liquid ejection head according to claim 1, wherein the individual liquid chamber has a width in a lateral direction gradually widening at an end portion on the nozzle side in a longitudinal direction. 前記第１の傾斜面は、前記個別液室の両側の隔壁面と前記対向面との間にそれぞれ設けられていることを特徴とする請求項１又は２に記載の液体吐出ヘッド。   3. The liquid ejection head according to claim 1, wherein the first inclined surface is provided between a partition wall surface on both sides of the individual liquid chamber and the facing surface. 4. 前記個別液室の液体流入側には、前記個別液室の短手方向の幅よりも狭い幅を有する流体抵抗部が設けられ、
前記流体抵抗の短手方向の幅と前記対向面の短手方向の幅が同じである
ことを特徴とする請求項１ないし３のいずれかに記載の液体吐出ヘッド。 On the liquid inflow side of the individual liquid chamber, a fluid resistance portion having a width narrower than the width in the short direction of the individual liquid chamber is provided,
4. The liquid discharge head according to claim 1, wherein a width of the fluid resistance in a short direction and a width of the facing surface in the short direction are the same. 5. 前記第１の傾斜面は、前記個別液室の両側の隔壁面のいずれか一方と前記対向面との間に設けられていることを特徴とすると請求項１又は２に記載の液体吐出ヘッド。   3. The liquid ejection head according to claim 1, wherein the first inclined surface is provided between any one of partition walls on both sides of the individual liquid chamber and the facing surface. 4. 前記個別液室の液体流入側には、前記個別液室の短手方向の幅よりも狭い幅を有する流体抵抗部が設けられ、
前記流体抵抗の短手方向の幅と前記対向面の短手方向の幅が同じであり、
前記対向面側から見て、前記個別液室の前記壁面形成部材に対向する面は前記対向面と同じ方向に偏っている
ことを特徴とする請求項１、２又は５に記載の液体吐出ヘッド。 On the liquid inflow side of the individual liquid chamber, a fluid resistance portion having a width narrower than the width in the short direction of the individual liquid chamber is provided,
The width in the short direction of the fluid resistance and the width in the short direction of the facing surface are the same,
6. The liquid ejection head according to claim 1, wherein a surface of the individual liquid chamber facing the wall surface forming member is biased in the same direction as the facing surface when viewed from the facing surface side. . 前記流路部材はシリコンからなることを特徴とする請求項１ないし６のいずれかに記載の液体吐出ヘッド。   The liquid discharge head according to claim 1, wherein the flow path member is made of silicon. 請求項１ないし８のいずれかに記載の液体吐出ヘッドを備えていることを特徴とする画像形成装置。   An image forming apparatus comprising the liquid discharge head according to claim 1.
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JP2015013413A (en) * 2013-07-04 2015-01-22 株式会社リコー Liquid droplet discharge head and image formation device

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