JP2012213746A - Cleaning apparatus and cleaning method - Google Patents
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- 238000004140 cleaning Methods 0.000 title claims abstract description 359
- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims description 19
- 239000006063 cullet Substances 0.000 abstract description 33
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 96
- 238000005406 washing Methods 0.000 description 15
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 238000002474 experimental method Methods 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
Description
本発明は、液晶パネル等の板状部材に固着した異物を除去するための洗浄装置および洗浄方法に関する。 The present invention relates to a cleaning apparatus and a cleaning method for removing foreign matters fixed to a plate-like member such as a liquid crystal panel.
図１０に示すように、従来から、液晶パネルに固着した異物を除去するための洗浄装置として、複数のゴム製のリング２４ａを有する搬送ローラ２４および補助ローラ２５が併設された搬送経路間に設けられ、搬送経路に沿って搬送されてきた液晶パネル２２の表裏面を洗浄シート３０を用いて洗浄する洗浄装置２１が知られている（例えば、特許文献１参照）。 As shown in FIG. 10, conventionally, as a cleaning device for removing foreign matters fixed to a liquid crystal panel, a conveying roller 24 having a plurality of rubber rings 24a and an auxiliary roller 25 are provided between conveying paths. A cleaning device 21 that cleans the front and back surfaces of the liquid crystal panel 22 that has been transported along the transport path using a cleaning sheet 30 is known (see, for example, Patent Document 1).
この洗浄装置２１は、液晶パネル２２の表裏面を洗浄するために、液晶パネル２２の表裏面を挟むように搬送経路の両側（上下）に配置された一組の洗浄手段２３ａ、２３ｂを備えている（図１０（Ｂ）参照）。この洗浄手段２３ａ（２３ｂ）は、洗浄シート３０と、洗浄シート３０の送出・巻取を行う送出ローラ２６および巻取ローラ２７と、洗浄シート３０を液晶パネル２２に押し付けて洗浄面３０ａ（３０ｂ）を形成する押付部２８とを有している。洗浄シート３０には、研磨材が塗布された不織布が使用されている。 In order to clean the front and back surfaces of the liquid crystal panel 22, the cleaning device 21 includes a pair of cleaning means 23a and 23b arranged on both sides (up and down) of the transport path so as to sandwich the front and back surfaces of the liquid crystal panel 22. (See FIG. 10B). The cleaning means 23a (23b) includes a cleaning sheet 30, a feeding roller 26 and a winding roller 27 for feeding and winding the cleaning sheet 30, and a cleaning surface 30a (30b) by pressing the cleaning sheet 30 against the liquid crystal panel 22. And a pressing portion 28 for forming the. For the cleaning sheet 30, a non-woven fabric coated with an abrasive is used.
また、この洗浄装置２１は、一組の洗浄手段２３ａ、２３ｂを同方向に回転させながら（なお、回転方向は、洗浄装置の上方から見た場合の回転方向とする。以下、同じ。）、相対向させた状態で搬送方向と直交する方向に往復移動させることにより、液晶パネル２２の表裏面を洗浄している（図１０（Ａ）参照）。 The cleaning device 21 rotates the pair of cleaning means 23a and 23b in the same direction (note that the rotation direction is the rotation direction when viewed from above the cleaning device; the same applies hereinafter). The front and back surfaces of the liquid crystal panel 22 are cleaned by reciprocating in a direction orthogonal to the transport direction in a state of facing each other (see FIG. 10A).
この洗浄装置２１によれば、液晶パネル２２の表裏面を同時に洗浄することができるので、タクトタイム（一枚の液晶パネル２２を洗浄するための時間）をある程度までは短縮することができる。 According to the cleaning device 21, the front and back surfaces of the liquid crystal panel 22 can be cleaned at the same time, so that the tact time (time for cleaning one liquid crystal panel 22) can be shortened to some extent.
しかしながら、従来の洗浄装置２１では、一組の洗浄手段２３ａ、２３ｂが同方向に回転しているので、この回転方向の力が合成されて液晶パネル２２に加わり、洗浄中に液晶パネル２２が位置ズレを起こしてしまうおそれがある。このため、従来の洗浄装置２１を用いて液晶パネル２２を洗浄する場合、液晶パネル２２の側面を挟み込んで位置ズレを防止するための位置ズレ防止手段３１が必要となり、この位置ズレ防止手段３１が設備コストの増大を招いていた。 However, in the conventional cleaning device 21, since the pair of cleaning means 23a and 23b rotate in the same direction, the forces in the rotational direction are combined and applied to the liquid crystal panel 22, and the liquid crystal panel 22 is positioned during cleaning. There is a risk of misalignment. For this reason, when the liquid crystal panel 22 is cleaned using the conventional cleaning device 21, the position shift prevention means 31 is required to sandwich the side surface of the liquid crystal panel 22 and prevent the position shift. The equipment cost increased.
さらに、従来の洗浄装置２１では、一組の洗浄手段２３ａ、２３ｂが相対向した状態で搬送方向と直交する方向に往復移動するので、液晶パネル２２の表裏面全体を隈なく洗浄するため、洗浄手段２３ａ、２３ｂを移動させる度に、液晶パネル２２を所定ピッチで間欠的に搬送する必要がある。このため、従来の洗浄装置２１では、タクトタイムのさらなる短縮が困難であった。 Further, in the conventional cleaning device 21, the pair of cleaning means 23a and 23b reciprocate in the direction perpendicular to the transport direction in a state of facing each other, so that the entire front and back surfaces of the liquid crystal panel 22 are thoroughly cleaned. It is necessary to transport the liquid crystal panel 22 intermittently at a predetermined pitch each time the means 23a and 23b are moved. For this reason, in the conventional cleaning device 21, it is difficult to further reduce the tact time.
また、従来の洗浄装置２１は、洗浄シート３０として研磨材がコーティングされた不織布が使用されており、洗浄面３０ａ、３０ｂが実質的に平坦であるため、液晶パネル２２の表裏面に固着したカレット等の異物を十分に除去することができず、また、除去できたとしても除去された異物が洗浄シート３０と液晶パネル２２との間に挟まり、洗浄中に液晶パネル２２を傷つけてしまうおそれがあった。 Further, the conventional cleaning device 21 uses a nonwoven fabric coated with an abrasive as the cleaning sheet 30 and the cleaning surfaces 30a and 30b are substantially flat, so that the cullet fixed to the front and back surfaces of the liquid crystal panel 22 is used. Such foreign matter cannot be removed sufficiently, and even if removed, the removed foreign matter may be sandwiched between the cleaning sheet 30 and the liquid crystal panel 22 and may damage the liquid crystal panel 22 during cleaning. there were.
さらに、従来の洗浄装置２１は、洗浄シート３０の送出および巻取を行うための送出ローラ２６および巻取ローラ２７を有しているので、装置が大型化、複雑化してしまうという問題や、洗浄シート３０の交換に時間がかかってしまうという問題が生じていた。 Further, since the conventional cleaning device 21 has the feeding roller 26 and the winding roller 27 for feeding and winding the cleaning sheet 30, there is a problem that the device becomes large and complicated, and cleaning is performed. There has been a problem that it takes time to replace the sheet 30.
本発明は上記事情に鑑みてなされたものであって、その課題とするところは、洗浄中に液晶パネルの位置ズレを発生させることなく、液晶パネルの表裏面に固着したカレット等の異物を確実に除去することができる洗浄装置および洗浄方法を提供することにある。 The present invention has been made in view of the above circumstances, and the problem is that a foreign matter such as a cullet fixed on the front and back surfaces of the liquid crystal panel can be surely generated without causing a displacement of the liquid crystal panel during cleaning. It is an object of the present invention to provide a cleaning apparatus and a cleaning method that can be removed.
上記課題を解決するために、本発明に係る洗浄装置は、洗浄対象である搬送中の板状部材の表裏面を挟むように搬送経路の両側にそれぞれ千鳥状に配置された複数の洗浄手段を備え、板状部材に洗浄液を供給しつつ洗浄手段を回転させて搬送中の板状部材を洗浄する洗浄装置であって、
複数の洗浄手段は、搬送経路の一方側に配置された１つの洗浄手段と、該洗浄手段と同軸上で相対向するよう搬送経路の他方側に配置された１つの洗浄手段とからなる組を複数含み、かつ複数の凸部が所定の間隔をおいて連続して配置された洗浄面を有し、同一組を構成する洗浄手段は、洗浄面の回転方向が逆であることを特徴とする。
In order to solve the above-described problems, the cleaning apparatus according to the present invention includes a plurality of cleaning means arranged in a staggered manner on both sides of the transport path so as to sandwich the front and back surfaces of the plate-shaped member being transported, which is a cleaning target. A cleaning device for cleaning the plate member being conveyed by rotating the cleaning means while supplying the cleaning liquid to the plate member,
The plurality of cleaning means includes a set of one cleaning means arranged on one side of the conveyance path and one cleaning means arranged on the other side of the conveyance path so as to be coaxially opposed to the cleaning means. The cleaning means includes a plurality of convex portions and a plurality of convex portions arranged continuously at a predetermined interval, and the cleaning means constituting the same set have the rotation directions of the cleaning surfaces being reversed. .
この構成によれば、同軸上で相対向する洗浄手段が洗浄面を逆方向に回転させているので、搬送経路の一方側に配置された洗浄手段から板状部材（例えば、液晶パネル）の一方側の面（表面）に加わる回転方向の力と、他方側に配置された洗浄手段から板状部材の他方側の面（裏面）に加わる回転方向の力とが相殺される。このため、搬送経路に位置ズレ防止手段を設けることなく、板状部材の位置ズレを防ぐことができる。さらに、この構成によれば、複数の洗浄手段が千鳥状に配置されており、板状部材を停止させることなく一定の搬送速度で搬送させながら洗浄することができるので、タクトタイムをさらに短縮することができる。 According to this configuration, since the cleaning means that are coaxially opposed to each other rotate the cleaning surface in the reverse direction, one of the plate-like members (for example, a liquid crystal panel) is removed from the cleaning means arranged on one side of the transport path. The force in the rotational direction applied to the side surface (front surface) and the force in the rotational direction applied to the other surface (back surface) of the plate member from the cleaning means arranged on the other side are offset. For this reason, it is possible to prevent the positional deviation of the plate-like member without providing a positional deviation prevention means in the transport path. Furthermore, according to this configuration, the plurality of cleaning means are arranged in a staggered manner, and the plate-like member can be cleaned while being transported at a constant transport speed without being stopped, so the tact time is further shortened. be able to.
また、この構成によれば、所定の間隔をおいて連続して配置された複数の凸部により、カレットを確実に除去することができる。さらに、この構成によれば、除去されたカレットが凸部間の隙間に収まるので、洗浄面と板状部材との間に除去されたカレットが挟まり板状部材が傷ついてしまうのを防ぐことができる。 Further, according to this configuration, the cullet can be reliably removed by the plurality of convex portions arranged continuously at a predetermined interval. Further, according to this configuration, since the removed cullet fits in the gap between the convex portions, it is possible to prevent the removed cullet from being sandwiched between the cleaning surface and the plate-like member and damaging the plate-like member. it can.
また、上記洗浄手段は、搬送中の板状部材の表裏面に垂直な軸周りに回転する回転ヘッドと、中心に第１貫通孔が設けられ、回転ヘッドに着脱可能に取り付けられた円形ディスクと、中心に第１貫通孔と連通する第２貫通孔が設けられた洗浄面を有し、円形ディスクに取り付けられた洗浄パッドと、第１貫通孔および第２貫通孔を介して板状部材に洗浄液を供給する洗浄液供給機構と、洗浄パッドを板状部材の表面または裏面に対して昇降させる昇降機構とからなる構成とすることができる。さらに、本発明に係る洗浄装置は、洗浄手段毎に昇降機構を個別制御する制御手段をさらに備えた構成とすることができる。 The cleaning means includes a rotary head that rotates about an axis perpendicular to the front and back surfaces of the plate-like member being conveyed, a circular disk that is provided with a first through hole in the center and is detachably attached to the rotary head. A cleaning surface having a second through-hole communicating with the first through-hole at the center, a cleaning pad attached to a circular disc, and a plate-like member via the first through-hole and the second through-hole The cleaning liquid supply mechanism for supplying the cleaning liquid and the lifting mechanism for moving the cleaning pad up and down with respect to the front surface or the back surface of the plate member can be used. Furthermore, the cleaning apparatus according to the present invention may further include a control unit that individually controls the lifting mechanism for each cleaning unit.
この構成によれば、円形ディスクが着脱可能に取り付けられているので、円形ディスクを取り外して容易に洗浄パッドを交換することができる。 According to this configuration, since the circular disk is detachably attached, the cleaning pad can be easily replaced by removing the circular disk.
さらに、この構成によれば、洗浄手段毎に昇降機構を個別制御する制御手段を備えているので、大きさや厚さの異なる板状部材であっても１台の洗浄装置で洗浄することができる。 Furthermore, according to this structure, since the control means for individually controlling the lifting mechanism is provided for each cleaning means, even plate-like members having different sizes and thicknesses can be cleaned with one cleaning device. .
また、本発明に係る洗浄装置は、上記凸部の高さを１００μｍ以上、１０００μｍ以下にすることが好ましい。 In the cleaning apparatus according to the present invention, it is preferable that the height of the convex portion is 100 μm or more and 1000 μm or less.
この構成によれば、凸部の高さを１００μｍ以上、１０００μｍ以下にすることで、凸部自身の強度を保ったまま、凸部の高さが一般的に想定されるカレットの最大の高さよりも高くなるので、洗浄中にあらゆる高さのカレットに衝撃を与えることができ、カレットをより確実に除去することができる。 According to this configuration, by setting the height of the convex portion to 100 μm or more and 1000 μm or less, the height of the convex portion is generally higher than the maximum height of the cullet that is generally assumed while maintaining the strength of the convex portion itself. Therefore, the cullet of any height can be impacted during cleaning, and the cullet can be more reliably removed.
また上記課題を解決するために、本発明に係る洗浄方法は、洗浄対象である板状部材を搬送経路に沿って搬送する搬送工程と、搬送工程中に、板状部材に洗浄液を供給しつつ、板状部材の表裏面を挟むように搬送経路の両側にそれぞれ千鳥状に配置された複数の洗浄手段を回転させて板状部材を洗浄する洗浄工程とを含む洗浄方法であって、
洗浄工程において、複数の凸部が所定の間隔をおいて連続して配列された洗浄面を有する複数の洗浄手段のうち、搬送経路の一方側に配置された１つの洗浄手段と、該洗浄手段と同軸上で相対向するよう搬送経路の他方側に配置された１つの洗浄手段とからなる組を構成する洗浄手段の洗浄面を逆方向に回転させることを特徴とする。
In order to solve the above problems, a cleaning method according to the present invention includes a transporting process for transporting a plate-shaped member to be cleaned along a transport path, and supplying a cleaning liquid to the plate-shaped member during the transporting process. A cleaning method including cleaning a plate member by rotating a plurality of cleaning means arranged in a staggered manner on both sides of the conveyance path so as to sandwich the front and back surfaces of the plate member,
Among the plurality of cleaning means having a cleaning surface in which a plurality of convex portions are continuously arranged at a predetermined interval in the cleaning step, one cleaning means disposed on one side of the transport path, and the cleaning means The cleaning surface of the cleaning means that constitutes a set consisting of one cleaning means arranged on the other side of the transport path so as to be opposed to each other on the same axis as that of the cleaning path is rotated in the reverse direction.
この構成によれば、搬送経路の一方側に配置された洗浄手段から板状部材の表面に加わる回転方向の力と、他方側に配置された洗浄手段から板状部材の裏面に加わる回転方向の力とが相殺されるため、搬送経路に位置ズレ防止手段を設けることなく、板状部材の位置ズレを防ぐことができる。さらに、この構成によれば、板状部材を停止させることなく一定の搬送速度で搬送させながら洗浄することができるので、洗浄工程におけるタクトタイムをさらに短縮することができる。 According to this configuration, the rotational force applied to the surface of the plate-like member from the cleaning means arranged on one side of the conveyance path, and the rotational direction applied to the back surface of the plate-like member from the cleaning means arranged on the other side. Since the force cancels out, the positional deviation of the plate-like member can be prevented without providing the positional deviation prevention means in the transport path. Furthermore, according to this configuration, the plate-like member can be cleaned while being transported at a constant transport speed without being stopped, so that the tact time in the cleaning process can be further shortened.
また、この構成によれば、所定の間隔をおいて連続して配置された複数の凸部により、カレットを確実に除去することができる。さらに、この構成によれば、除去されたカレットが凸部間の隙間に収まるので、洗浄面と板状部材との間にカレットが挟まり板状部材が傷ついてしまうのを防ぐことができる。 Further, according to this configuration, the cullet can be reliably removed by the plurality of convex portions arranged continuously at a predetermined interval. Furthermore, according to this configuration, since the removed cullet fits in the gap between the convex portions, it is possible to prevent the cullet from being sandwiched between the cleaning surface and the plate-like member and damaging the plate-like member.
また、本発明に係る洗浄方法は、搬送工程中に板状部材が所定の位置まで搬送されると、洗浄手段が板状部材に対して昇降し、所定の圧力で板状部材を加圧するようにしてもよい。 Further, in the cleaning method according to the present invention, when the plate member is transported to a predetermined position during the transport process, the cleaning means moves up and down relative to the plate member and presses the plate member with a predetermined pressure. It may be.
さらに、本発明に係る洗浄方法は、洗浄手段の昇降を洗浄手段毎に個別に制御するようにしてもよい。この構成によれば、大きさや厚さの異なる板状部材であっても１台の洗浄装置で洗浄することができる。 Furthermore, the cleaning method according to the present invention may individually control the lifting and lowering of the cleaning means for each cleaning means. According to this configuration, even plate-like members having different sizes and thicknesses can be cleaned with one cleaning device.
本発明によれば、洗浄中に板状部材の位置ズレを発生させることなく、板状部材の表裏面に固着したカレット等の異物を確実に除去することができる洗浄装置および洗浄方法を提供することができる。 According to the present invention, there is provided a cleaning device and a cleaning method capable of reliably removing foreign matters such as cullet fixed to the front and back surfaces of a plate-like member without causing a positional deviation of the plate-like member during cleaning. be able to.
以下、添付図面を参照して、本発明の好ましい実施形態について説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
［洗浄装置］
図１に、本実施形態に係る洗浄装置１を示す。同図に示すように、本実施形態に係る洗浄装置１は、複数のゴム製のリング４ａを有する搬送ローラ４および補助ローラ５が併設された搬送経路間に設けられ、搬送経路に沿って搬送されてきた液晶パネル２（本発明の「板状部材」に相当）の表裏面を洗浄するものである。なお、搬送されてくる液晶パネル２は、表裏面に偏光フィルムが貼り付けられる前の状態のものであり、２枚のガラス基板の間に液晶が封止されている。
[Cleaning equipment]
FIG. 1 shows a cleaning apparatus 1 according to this embodiment. As shown in the figure, the cleaning device 1 according to the present embodiment is provided between a conveyance path in which a conveyance roller 4 having a plurality of rubber rings 4a and an auxiliary roller 5 are provided, and is conveyed along the conveyance path. It cleans the front and back surfaces of the liquid crystal panel 2 (corresponding to the “plate-like member” of the present invention). In addition, the conveyed liquid crystal panel 2 is a state before a polarizing film is affixed on front and back, and the liquid crystal is sealed between the two glass substrates.
洗浄装置１は、搬送されてくる液晶パネル２の表裏面を挟むように搬送経路の両側（上下）に配置された複数の洗浄手段３ａ、３ｂを備えている。複数の洗浄手段３ａ、３ｂは、各側で千鳥状に配置されており、前列Ｆに配置された洗浄手段３ａ、３ｂで洗浄しきれなかった部分を、後列Ｂに配置された洗浄手段３ａ、３ｂで洗浄するよう意図されている（図１（Ａ）参照）。 The cleaning apparatus 1 includes a plurality of cleaning means 3a and 3b arranged on both sides (up and down) of the transport path so as to sandwich the front and back surfaces of the liquid crystal panel 2 being transported. The plurality of cleaning means 3a, 3b are arranged in a staggered manner on each side, and the cleaning means 3a, 3b, It is intended to be washed in 3b (see FIG. 1 (A)).
また、複数の洗浄手段３ａ、３ｂは、搬送経路の一方側（搬送されてくる液晶パネル２の表面側）に配置された１つの洗浄手段３ａと、該洗浄手段３ａと同軸上で相対向するよう搬送経路の他方側（搬送されてくる液晶パネル２の裏面側）に配置された１つの洗浄手段３ｂとからなる組を複数（本実施形態では５組）含んでいる。 The plurality of cleaning units 3a and 3b are coaxially opposed to one cleaning unit 3a disposed on one side of the transport path (the surface side of the transported liquid crystal panel 2). A plurality of sets (5 sets in the present embodiment) including one cleaning means 3b arranged on the other side of the transport path (the back side of the transported liquid crystal panel 2) are included.
図２は、本実施形態における洗浄手段３ａ、３ｂの回転方向（なお、回転方向については、洗浄装置の上方から見た場合の回転方向とする。以下、同じ。）を説明するための図である。同図に示す洗浄手段３ａ−１、３ａ−２、３ａ−３は、搬送経路の一方側の前列Ｆに配置されたものであり、洗浄手段３ｂ−１、３ｂ−２、３ｂ−３は、搬送経路の他方側の前列Ｆに配置されたものである。洗浄手段３ａ−１と洗浄手段３ｂ−１、洗浄手段３ａ−２と洗浄手段３ｂ−２、および洗浄手段３ａ−３と洗浄手段３ｂ−３は、それぞれ同一組を構成している。そして、これらの同一組を構成する洗浄手段（例えば、３ａ−３と３ｂ−３）は、洗浄面１０ａ、１０ｂの回転方向が逆になるように回転する。具体的には、搬送経路の一方側に配置された洗浄手段３ａの洗浄面１０ａはすべて時計回りに回転し、搬送経路の他方側に配置された洗浄手段３ｂの洗浄面１０ｂはすべて反時計回りに回転する。 FIG. 2 is a diagram for explaining the rotation direction of the cleaning units 3a and 3b in the present embodiment (note that the rotation direction is the rotation direction when viewed from above the cleaning apparatus; the same applies hereinafter). is there. The cleaning means 3a-1, 3a-2, 3a-3 shown in the figure are arranged in the front row F on one side of the transport path, and the cleaning means 3b-1, 3b-2, 3b-3 are It is arranged in the front row F on the other side of the transport path. The cleaning means 3a-1 and the cleaning means 3b-1, the cleaning means 3a-2 and the cleaning means 3b-2, and the cleaning means 3a-3 and the cleaning means 3b-3 constitute the same set. And the washing | cleaning means (for example, 3a-3 and 3b-3) which comprise these same sets rotates so that the rotation direction of washing | cleaning surface 10a, 10b may become reverse. Specifically, all the cleaning surfaces 10a of the cleaning means 3a arranged on one side of the transport path rotate clockwise, and all of the cleaning surfaces 10b of the cleaning means 3b arranged on the other side of the transport path rotate counterclockwise. Rotate to.
各洗浄手段３ａ、３ｂは、搬送されてくる液晶パネル２の表裏面に垂直な軸周りに所定の速度で回転する回転ヘッド６と、回転ヘッド６に着脱可能に取り付けられた円形ディスク７と、円形ディスク７に取り付けられた洗浄パッド１０と、洗浄パッド１０の洗浄面１０ａ、１０ｂを液晶パネル２の表面または裏面に対して昇降させる昇降機構８ａ、８ｂと、回転ヘッド６内に設けられ液晶パネル２に水等の洗浄液を供給する洗浄液供給機構９とから構成されている。 Each of the cleaning means 3a and 3b includes a rotary head 6 that rotates at a predetermined speed around an axis perpendicular to the front and back surfaces of the liquid crystal panel 2 being conveyed, and a circular disk 7 that is detachably attached to the rotary head 6; A cleaning pad 10 attached to the circular disk 7, lifting mechanisms 8 a and 8 b that lift and lower the cleaning surfaces 10 a and 10 b of the cleaning pad 10 with respect to the front or back surface of the liquid crystal panel 2, and a liquid crystal panel provided in the rotary head 6. 2 includes a cleaning liquid supply mechanism 9 for supplying a cleaning liquid such as water.
図３に示すように、円形ディスク７の中心には第１貫通孔１２が設けられており、洗浄パッド１０の中心には第１貫通孔１２と連通する第２貫通孔１３が設けられている。洗浄液供給機構９は、第１貫通孔１２および第２貫通孔１３を介して液晶パネル２に洗浄液を供給する。 As shown in FIG. 3, the first through hole 12 is provided at the center of the circular disk 7, and the second through hole 13 communicating with the first through hole 12 is provided at the center of the cleaning pad 10. . The cleaning liquid supply mechanism 9 supplies the cleaning liquid to the liquid crystal panel 2 through the first through hole 12 and the second through hole 13.
回転ヘッド６の先端には、円形ディスク７を取り付けるための磁石１１が設けられている。円形ディスク７は、少なくとも一方側（回転ヘッド６側）の面が磁石１１と引き合う磁性体で形成されており、回転ヘッド６に対して着脱可能になっている。円形ディスク７の他方側の面には、耐水性の接着剤を介して洗浄パッド１０が取り付けられている。洗浄パッド１０を交換する場合、円形ディスク７ごと取り外すことで、洗浄パッド１０の交換を簡易かつ正確に行うことができる。 A magnet 11 for attaching the circular disk 7 is provided at the tip of the rotary head 6. The circular disk 7 is formed of a magnetic material that attracts at least one surface (rotating head 6 side) to the magnet 11, and is detachable from the rotating head 6. A cleaning pad 10 is attached to the other surface of the circular disk 7 via a water-resistant adhesive. When the cleaning pad 10 is replaced, the cleaning pad 10 can be replaced easily and accurately by removing the circular disk 7 together.
昇降機構８ａ、８ｂは、制御手段（不図示）の制御下で、回転ヘッド６、円形ディスク７および洗浄パッド１０を昇降させる。具体的には、洗浄手段３ａに設けられた昇降機構８ａは、圧力センサ等の圧力検出部を有しており、この圧力検出部で検出された圧力が制御手段により指示された所定の圧力に維持されるよう、シリンダーにより洗浄パッド１０（洗浄面１０ａ）等を下降させて液晶パネル２の表面を加圧する。一方、洗浄手段３ｂに設けられた昇降機構８ｂは、洗浄面１０ｂの高さ（昇降距離）が制御手段により指示された値（通常、搬送面よりわずかに高い位置）になるまで、サーボモーターとボールネジにより洗浄パッド１０（洗浄面１０ｂ）等を上昇させる。 The elevating mechanisms 8a and 8b elevate and lower the rotary head 6, the circular disk 7 and the cleaning pad 10 under the control of a control means (not shown). Specifically, the elevating mechanism 8a provided in the cleaning means 3a has a pressure detection unit such as a pressure sensor, and the pressure detected by the pressure detection unit becomes a predetermined pressure instructed by the control unit. In order to maintain the pressure, the surface of the liquid crystal panel 2 is pressurized by lowering the cleaning pad 10 (cleaning surface 10a) or the like with a cylinder. On the other hand, the elevating mechanism 8b provided in the cleaning means 3b is connected to the servo motor until the height (elevating distance) of the cleaning surface 10b reaches a value (usually a slightly higher position than the conveying surface) indicated by the control means. The cleaning pad 10 (cleaning surface 10b) and the like are raised by the ball screw.
制御手段は各昇降機構８ａ、８ｂを個別に制御することができるため、本実施形態に係る洗浄装置１では、液晶パネル２の大きさや厚さに応じて洗浄手段３ａ、３ｂを個別に昇降させることができる。例えば、図１では、洗浄装置１の洗浄手段３ｃを使用しなくても液晶パネル２の全面を洗浄することができるので、制御手段は、洗浄に使用する洗浄手段３ａ、３ｂだけを昇降させる。 Since the control means can individually control the elevating mechanisms 8a and 8b, in the cleaning apparatus 1 according to the present embodiment, the cleaning means 3a and 3b are raised and lowered individually according to the size and thickness of the liquid crystal panel 2. be able to. For example, in FIG. 1, since the entire surface of the liquid crystal panel 2 can be cleaned without using the cleaning unit 3c of the cleaning device 1, the control unit moves only the cleaning units 3a and 3b used for cleaning.
また、制御手段には、洗浄パッド１０の摩耗量に応じて洗浄手段３ｂ（洗浄面１０ｂ）の高さを微調整するために、予測される摩耗量を液晶パネル２の洗浄枚数に換算したデータがあらかじめ格納されている。制御手段は、このデータと実際の洗浄枚数とを比較することにより洗浄面１０ｂの高さを決定し、この高さを指示するための制御信号を昇降機構８ｂに送信する。昇降機構８ｂは、受信した制御信号に基づいて、サーボモーターとボールネジにより洗浄面１０ｂを精密に昇降させる。これにより、摩耗により減った分だけ洗浄面１０ｂを上昇させることができるので、洗浄面１０ｂを搬送面よりわずかに高い位置に維持することができる。なお、摩耗量は、洗浄パッド１０の回転数や圧力等から予測することができる。 Further, the control means includes data obtained by converting the predicted wear amount into the number of cleanings of the liquid crystal panel 2 in order to finely adjust the height of the cleaning means 3b (cleaning surface 10b) in accordance with the wear amount of the cleaning pad 10. Is stored in advance. The control means determines the height of the cleaning surface 10b by comparing this data with the actual number of cleaning sheets, and transmits a control signal for indicating the height to the lifting mechanism 8b. The lifting mechanism 8b precisely lifts and lowers the cleaning surface 10b by a servo motor and a ball screw based on the received control signal. As a result, the cleaning surface 10b can be raised by the amount reduced by the wear, so that the cleaning surface 10b can be maintained at a slightly higher position than the transport surface. The amount of wear can be predicted from the number of rotations and pressure of the cleaning pad 10.
図４は、洗浄パッド１０の洗浄面１０ａ（１０ｂ）を示す平面図および部分拡大平面図である。図４（Ａ）に示すように、洗浄パッド１０には、凸部１４が所定の間隔をおいて第１方向ｘおよび該第１方向ｘと直交する第２方向ｙの両方向に連続して配置されている。そして、図４（Ｂ）に示すように、洗浄パッド１０の洗浄面１０ａ（１０ｂ）は、截頭錐体状に形成された凸部１４の截頭面１０−１と、該凸部１４の側面１０−２と、該凸部１４間の平面１０−３とによって構成されている。なお、洗浄パッド１０は、研磨材（不図示）を混合した樹脂を成型したものである。 FIG. 4 is a plan view and a partially enlarged plan view showing the cleaning surface 10a (10b) of the cleaning pad 10. FIG. As shown in FIG. 4A, on the cleaning pad 10, the convex portions 14 are continuously arranged in both the first direction x and the second direction y orthogonal to the first direction x with a predetermined interval. Has been. As shown in FIG. 4B, the cleaning surface 10a (10b) of the cleaning pad 10 includes the truncated surface 10-1 of the convex portion 14 formed in the shape of the truncated cone and the convex portion 14 of the convex portion 14. It is comprised by the side surface 10-2 and the plane 10-3 between this convex part 14. As shown in FIG. The cleaning pad 10 is formed by molding a resin mixed with an abrasive (not shown).
図５は、洗浄中における洗浄パッド１０の洗浄面１０ａ、１０ｂと液晶パネル２の表裏面との関係を示す図である。同図に示すように、洗浄パッド１０の洗浄面１０ａ、１０ｂのうち凸部１４の截頭面１０−１と液晶パネル２の表裏面とが接触した状態で、液晶パネル２に洗浄液を供給しつつ洗浄パッド１０を回転させることで、液晶パネル２に固着しているカレットＣや塵埃等の異物が除去される。具体的には、凸部１４の截頭面１０−１に現れている研磨材により液晶パネル２の表裏面が研磨されることで、液晶パネル２に付着している塵埃や有機物等が除去される一方、洗浄パッド１０の回転に伴って凸部１４の側面１０−２があらゆる方向からカレットＣの側面にぶつかることで、液晶パネル２に固着しているカレットＣがはじき飛ばされて除去される。 FIG. 5 is a diagram showing the relationship between the cleaning surfaces 10a and 10b of the cleaning pad 10 and the front and back surfaces of the liquid crystal panel 2 during cleaning. As shown in the figure, the cleaning liquid is supplied to the liquid crystal panel 2 in a state in which the wrinkle surface 10-1 of the convex portion 14 and the front and back surfaces of the liquid crystal panel 2 are in contact with each other among the cleaning surfaces 10a and 10b of the cleaning pad 10. While rotating the cleaning pad 10, foreign matters such as cullet C and dust adhering to the liquid crystal panel 2 are removed. Specifically, the front and back surfaces of the liquid crystal panel 2 are polished by the abrasive that appears on the truncated surface 10-1 of the convex portion 14, thereby removing dust, organic matter, and the like attached to the liquid crystal panel 2. On the other hand, as the cleaning pad 10 rotates, the side surface 10-2 of the projection 14 collides with the side surface of the cullet C from all directions, so that the cullet C fixed to the liquid crystal panel 2 is repelled and removed.
除去されたカレットＣや塵埃等の異物は、凸部１４間の隙間に収まり（図５参照）、その後洗浄液とともに凸部１４間の隙間を通って洗浄パッド１０の外に流れ出ていくので、凸部１４の截頭面１０−１と液晶パネル２との間にカレットＣが挟まり液晶パネル２が傷つくことはない。 The removed foreign matter such as cullet C and dust fits in the gap between the convex portions 14 (see FIG. 5), and then flows out of the cleaning pad 10 through the gap between the convex portions 14 together with the cleaning liquid. The cullet C is sandwiched between the truncated surface 10-1 of the portion 14 and the liquid crystal panel 2, and the liquid crystal panel 2 is not damaged.
［洗浄方法］
次に、図６を参照して、本実施形態に係る洗浄装置１を用いた洗浄方法について説明する。本実施形態における洗浄方法は、液晶パネル２を搬送する搬送工程（図６（Ａ）〜（Ｄ））と、該搬送工程中に、液晶パネル２に洗浄液を供給しつつ洗浄手段３ａ、３ｂを逆方向に回転させて液晶パネル２の表裏面を洗浄する洗浄工程（図６（Ｃ））とを含んでいる。
[Cleaning method]
Next, a cleaning method using the cleaning apparatus 1 according to the present embodiment will be described with reference to FIG. The cleaning method in the present embodiment includes a transport process (FIGS. 6A to 6D) for transporting the liquid crystal panel 2, and the cleaning means 3a and 3b while supplying the cleaning liquid to the liquid crystal panel 2 during the transport process. A cleaning step (FIG. 6C) for cleaning the front and back surfaces of the liquid crystal panel 2 by rotating in the reverse direction.
図６（Ａ）に示すように、液晶パネル２は、併設された搬送ローラ４上に水平に寝かされ、搬送ローラ４および補助ローラ５の回転速度に応じた搬送速度で洗浄装置１に向かって搬送される。このとき、洗浄装置１の洗浄手段３ａ、３ｂは、回転することなく搬送経路から離れた位置で待機している。 As shown in FIG. 6A, the liquid crystal panel 2 is laid horizontally on the transport roller 4 provided side by side, and is directed toward the cleaning device 1 at a transport speed according to the rotational speed of the transport roller 4 and the auxiliary roller 5. Are transported. At this time, the cleaning units 3a and 3b of the cleaning apparatus 1 are on standby at a position away from the transport path without rotating.
図６（Ｂ）に示すように、液晶パネル２が洗浄装置１の近くまで搬送され、洗浄装置１に設けられたセンサ１５により液晶パネル２の存在が確認されると、洗浄手段３ａが時計回りに回転しながら液晶パネル２の表面に向かって下降し、洗浄手段３ｂが反時計回りに回転しながら液晶パネル２の裏面に向かって上昇する。洗浄手段３ｂは、洗浄面１０ｂの高さが制御手段により指示された高さ（搬送面よりわずかに高い位置）になるまで上昇する。 As shown in FIG. 6B, when the liquid crystal panel 2 is transported to the vicinity of the cleaning device 1 and the presence of the liquid crystal panel 2 is confirmed by the sensor 15 provided in the cleaning device 1, the cleaning means 3a rotates clockwise. The cleaning means 3b rises toward the back surface of the liquid crystal panel 2 while rotating counterclockwise. The cleaning unit 3b moves up until the height of the cleaning surface 10b reaches the height indicated by the control unit (a position slightly higher than the transport surface).
図６（Ｃ）に示すように、洗浄工程において、洗浄手段３ａ、３ｂは、洗浄面１０ａ、１０ｂのうち凸部１４の截頭面１０−１が液晶パネル２の表裏面に接触した状態で回転する。洗浄手段３ａは、凸部１４の截頭面１０−１が液晶パネル２の表面に接触すると、液晶パネル２にかかる圧力が制御手段により指示された所定の圧力になるまでさらに下降し、その後、圧力一定になるように高さが微調整される。なお、凸部１４の截頭面１０−１が液晶パネル２の表面に接触してから所定の圧力になるまでの時間は非常に短く、洗浄手段３ａは、凸部１４の截頭面１０−１が液晶パネル２の表面に接触するのとほぼ同時に所定の圧力で加圧することができる。 As shown in FIG. 6C, in the cleaning process, the cleaning means 3 a and 3 b are in a state in which the truncated surface 10-1 of the convex portion 14 of the cleaning surfaces 10 a and 10 b is in contact with the front and back surfaces of the liquid crystal panel 2. Rotate. When the truncated surface 10-1 of the convex portion 14 comes into contact with the surface of the liquid crystal panel 2, the cleaning unit 3a further decreases until the pressure applied to the liquid crystal panel 2 reaches a predetermined pressure instructed by the control unit. The height is finely adjusted so that the pressure is constant. It should be noted that the time from when the truncated surface 10-1 of the convex portion 14 comes into contact with the surface of the liquid crystal panel 2 until the pressure reaches a predetermined pressure is very short, and the cleaning means 3a uses the truncated surface 10- The pressure can be applied at a predetermined pressure almost simultaneously with the contact of the liquid crystal panel 2 with the surface 1.
この洗浄工程では、液晶パネル２が洗浄装置１内に搬入された後の搬送速度が、液晶パネル２が洗浄装置１内に搬入される前の搬送速度よりも遅くならないように、搬送ローラ４および補助ローラ５は、洗浄中も回転速度を変化させることなく、一定の回転速度で回転している。 In this cleaning process, the transport roller 4 and the transport roller 4 are arranged so that the transport speed after the liquid crystal panel 2 is carried into the cleaning apparatus 1 does not become slower than the transport speed before the liquid crystal panel 2 is carried into the cleaning apparatus 1. The auxiliary roller 5 rotates at a constant rotation speed without changing the rotation speed even during cleaning.
また、この洗浄工程では、液晶パネル２が洗浄中に位置ズレを起こさないように、洗浄面１０ａの回転方向と洗浄面１０ｂの回転方向とを逆にして、洗浄面１０ａから液晶パネル２の表面に加わる回転方向の力と、洗浄面１０ｂから液晶パネル２の裏面に加わる回転方向の力とを相殺させている。このため、搬送経路には、従来の洗浄装置２１を用いた場合に必要となる位置ズレ防止手段３１が設けられていない。 Further, in this cleaning process, the rotation direction of the cleaning surface 10a and the rotation direction of the cleaning surface 10b are reversed so that the liquid crystal panel 2 does not shift during cleaning, so that the surface of the liquid crystal panel 2 is cleaned from the cleaning surface 10a. And the rotational force applied to the back surface of the liquid crystal panel 2 from the cleaning surface 10b are offset. For this reason, the positional deviation prevention means 31 required when using the conventional cleaning device 21 is not provided in the transport path.
図６（Ｄ）に示すように、洗浄工程が終了すると、洗浄装置１の洗浄手段３ａ、３ｂは昇降し、待機状態に戻る。液晶パネル２は、次の工程に向けて搬送される。 As shown in FIG. 6D, when the cleaning process is completed, the cleaning units 3a and 3b of the cleaning apparatus 1 are moved up and down to return to the standby state. The liquid crystal panel 2 is conveyed toward the next process.
［比較実験１］
続いて、本実施形態における洗浄パッド１０を用いて洗浄した場合の液晶パネル２の表面状態と、図１０に示す従来の洗浄シート３０を用いて洗浄した場合の液晶パネル２２の表面状態とを比較した比較実験１について説明する。本実験では、洗浄装置１（２１）を使用するかわりに、液晶パネル２（２２）の表面側（カラーフィルタ側）に０．０７５ＭＰａの面圧で洗浄パッド１０および洗浄シート３０を接触させ、洗浄パッド１０および洗浄シート３０を液晶パネル２（２２）の長手方向に１０往復させることにより洗浄を行なった。
[Comparative Experiment 1]
Subsequently, the surface state of the liquid crystal panel 2 when cleaned using the cleaning pad 10 in this embodiment is compared with the surface state of the liquid crystal panel 22 when cleaned using the conventional cleaning sheet 30 shown in FIG. The comparative experiment 1 will be described. In this experiment, instead of using the cleaning device 1 (21), the cleaning pad 10 and the cleaning sheet 30 are brought into contact with the surface side (color filter side) of the liquid crystal panel 2 (22) with a surface pressure of 0.075 MPa to perform cleaning. Cleaning was performed by reciprocating the pad 10 and the cleaning sheet 30 10 times in the longitudinal direction of the liquid crystal panel 2 (22).
図７は、液晶パネル２の表面状態を示す図であって、（Ａ）、（Ｃ）は洗浄前の液晶パネル２２、２、（Ｂ）は従来の洗浄シート３０で洗浄した後の（Ａ）の液晶パネル２２、（Ｄ）は本発明における洗浄パッド１０で洗浄した後の（Ｃ）の液晶パネル２である。 7A and 7B are diagrams showing the surface state of the liquid crystal panel 2. FIGS. 7A and 7C show the liquid crystal panels 22 and 2 before cleaning, and FIG. The liquid crystal panel 22 and (D) are the liquid crystal panel 2 of (C) after being cleaned with the cleaning pad 10 in the present invention.
同図に示すように、従来の洗浄シート３０を用いて洗浄した場合は液晶パネル２２の表面に多数の傷が付いているのに対して、本実施形態における洗浄パッド１０を用いて洗浄した場合は、液晶パネル２の表面にほとんど傷が付いていない。これは、本実施形態における洗浄パッド１０を用いた場合、洗浄により除去されたカレットが、洗浄パッド１０に形成された凸部１４の截頭面１０−１と液晶パネル２の表面との間に挟まることなく、凸部１４間の隙間に収まるためである（図５参照）。 As shown in the figure, when the cleaning is performed using the conventional cleaning sheet 30, the surface of the liquid crystal panel 22 has many scratches, whereas the cleaning is performed using the cleaning pad 10 according to the present embodiment. Has almost no scratch on the surface of the liquid crystal panel 2. This is because, when the cleaning pad 10 according to the present embodiment is used, the cullet removed by the cleaning is between the truncated surface 10-1 of the convex portion 14 formed on the cleaning pad 10 and the surface of the liquid crystal panel 2. This is because it fits in the gap between the convex portions 14 without being caught (see FIG. 5).
［比較実験２］
続いて、本実施形態に係る洗浄装置１と従来の洗浄装置２１とのカレット除去率を比較した比較実験２について説明する。本実験では、表面側に人為的にカレットを２０個固着させた液晶パネル２（２２）を６枚用意し、このうち３枚の液晶パネル２を本実施形態に係る洗浄装置１で洗浄し、残りの３枚の液晶パネル２２を従来の洗浄装置２１で洗浄した。表１にその結果を示す。
[Comparative Experiment 2]
Next, Comparative Experiment 2 in which the cullet removal rates of the cleaning device 1 according to the present embodiment and the conventional cleaning device 21 are compared will be described. In this experiment, six liquid crystal panels 2 (22) having 20 culletes artificially fixed on the surface side were prepared, and three of these liquid crystal panels 2 were cleaned with the cleaning device 1 according to the present embodiment. The remaining three liquid crystal panels 22 were cleaned with a conventional cleaning device 21. Table 1 shows the results.
表１に示すように、従来の洗浄装置２１を用いて洗浄した場合、カレット除去率が７５％から９０％にとどまっているのに対して、本実施形態に係る洗浄装置１を用いた場合は、３枚ともカレット除去率が１００％になった。これは、本実施形態に係る洗浄装置１を用いた場合、洗浄パッド１０に形成された複数の凸部１４の側面１０−２があらゆる方向からカレットの側面にぶつかり、カレットを除去するのに十分な衝撃力がカレットにかかるためである。 As shown in Table 1, when cleaning is performed using the conventional cleaning device 21, the cullet removal rate remains from 75% to 90%, whereas when the cleaning device 1 according to the present embodiment is used. All three sheets had a cullet removal rate of 100%. This is because, when the cleaning apparatus 1 according to the present embodiment is used, the side surface 10-2 of the plurality of convex portions 14 formed on the cleaning pad 10 hits the side surface of the cullet from any direction and is sufficient for removing the cullet. This is because a large impact force is applied to the cullet.
［変形例１〜４］
図８（Ａ）〜（Ｄ）に、本発明に係る洗浄装置の第１変形例〜第４変形例を示す。
[Modifications 1 to 4]
8A to 8D show first to fourth modifications of the cleaning apparatus according to the present invention.
図８（Ａ）に示す第１変形例に係る洗浄装置１Ａは、上記実施形態に係る洗浄装置１のすべての洗浄手段（洗浄手段３ａ、３ｂと洗浄手段３ｃ）を使用したものであり、上記実施形態における液晶パネル２よりも大型の液晶パネルを洗浄するのに適している。 A cleaning apparatus 1A according to the first modification shown in FIG. 8A uses all the cleaning means (cleaning means 3a, 3b and cleaning means 3c) of the cleaning apparatus 1 according to the above embodiment. It is suitable for cleaning a liquid crystal panel larger than the liquid crystal panel 2 in the embodiment.
図８（Ｂ）に示す第２変形例に係る洗浄装置１Ｂは、上記実施形態に係る洗浄装置１の５組の洗浄手段３ａ、３ｂのうち一部（３組）の洗浄手段３ａ、３ｂだけを使用したものであり、上記実施形態における液晶パネル２よりも小型の液晶パネルを洗浄するのに適している。なお、小型の液晶パネルだけを洗浄するのであれば、洗浄手段３ｃのない洗浄装置、すなわち３組の洗浄手段３ａ、３ｂだけを備えた小型の洗浄装置を用いてもよい。 The cleaning apparatus 1B according to the second modification shown in FIG. 8B is only a part (three sets) of the cleaning means 3a and 3b among the five sets of cleaning means 3a and 3b of the cleaning apparatus 1 according to the above embodiment. And is suitable for cleaning a liquid crystal panel smaller than the liquid crystal panel 2 in the above embodiment. If only a small liquid crystal panel is to be cleaned, a cleaning apparatus without the cleaning means 3c, that is, a small cleaning apparatus having only three sets of cleaning means 3a and 3b may be used.
図８（Ｃ）に示す第３変形例に係る洗浄装置１Ｃは、上記実施形態に係る洗浄装置１の洗浄手段３ａ、３ｂの数を増やし、洗浄手段３ａ、３ｂを３列に千鳥配置させたものである。第３変形例に係る洗浄装置１Ｃによれば、液晶パネル２に固着したカレット等の異物をより確実に除去することができる。 In the cleaning device 1C according to the third modification shown in FIG. 8C, the number of the cleaning units 3a and 3b of the cleaning device 1 according to the above embodiment is increased, and the cleaning units 3a and 3b are arranged in a staggered manner in three rows. Is. According to the cleaning apparatus 1 </ b> C according to the third modified example, foreign matters such as cullet fixed to the liquid crystal panel 2 can be more reliably removed.
図８（Ｄ）に示す第４変形例に係る洗浄装置１Ｄは、上記実施形態に係る洗浄装置１の洗浄手段３ａ、３ｂのうち、各列で隣り合う洗浄手段３ａ（３ｂ）の回転方向を逆にしたものである。なお、この場合も同一組を構成する洗浄手段３ａ、３ｂは、上記実施形態に係る洗浄装置１と同様に、洗浄面１０ａ、１０ｂの回転方向が逆になるように回転する。 The cleaning apparatus 1D according to the fourth modification shown in FIG. 8D changes the rotation direction of the cleaning means 3a (3b) adjacent in each row among the cleaning means 3a and 3b of the cleaning apparatus 1 according to the embodiment. It is the reverse. In this case as well, the cleaning units 3a and 3b constituting the same set rotate so that the rotation directions of the cleaning surfaces 10a and 10b are reversed, similarly to the cleaning device 1 according to the above embodiment.
以上、本発明に係る洗浄装置の好ましい実施形態および第１変形例〜第４変形例について説明したが、本発明は上記の構成に限定されるものではない。 As mentioned above, although preferred embodiment of the washing | cleaning apparatus which concerns on this invention, and the 1st modification-the 4th modification were demonstrated, this invention is not limited to said structure.
例えば、上記洗浄パッド１０に替えて、図９に示す洗浄パット１０’を用いてもよい。この洗浄パット１０’は、第２貫通孔１３を中心として放射状に第３貫通孔１３’が設けられていること以外の点において、洗浄パッド１０と共通している。第３貫通孔１３’は液晶パネル２に洗浄液を供給するために設けられたものであり、この洗浄パット１０’を用いることで、より多くの洗浄液を液晶パネル２に供給することができる。 For example, instead of the cleaning pad 10, a cleaning pad 10 'shown in FIG. 9 may be used. The cleaning pad 10 ′ is common to the cleaning pad 10 except that the third through holes 13 ′ are provided radially around the second through hole 13. The third through hole 13 ′ is provided for supplying the cleaning liquid to the liquid crystal panel 2, and more cleaning liquid can be supplied to the liquid crystal panel 2 by using the cleaning pad 10 ′.
また、洗浄パッド１０、１０’の洗浄面１０ａ、１０ｂに形成されている凸部１４の高さは、１００μｍ以上、１０００μｍ以下の範囲で任意に設定することができる。なお、凸部１４の高さが１００μｍよりも低いと、液晶パネル２に固着するカレットの一般的に想定される最大の高さよりも低くなるので、高さが高いカレットにしか衝撃を与えることができなくなり、高さが低いカレットを除去することができなくなる。一方、凸部１４の高さが１０００μｍよりも高いと、凸部１４自身の強度が下がり変形しやすくなるので、カレットに与える衝撃力が弱まり、この場合もカレットを十分に除去することができなくなる。 Further, the height of the convex portions 14 formed on the cleaning surfaces 10a and 10b of the cleaning pads 10 and 10 'can be arbitrarily set in the range of 100 μm or more and 1000 μm or less. If the height of the convex portion 14 is lower than 100 μm, the height is lower than the generally assumed maximum height of the cullet fixed to the liquid crystal panel 2, so that only the cullet having a high height is impacted. It becomes impossible to remove a cullet having a low height. On the other hand, if the height of the convex portion 14 is higher than 1000 μm, the strength of the convex portion 14 itself is lowered and the deformed portion tends to be deformed, so that the impact force applied to the cullet is weakened. In this case, the cullet cannot be sufficiently removed. .
さらに、凸部１４は、立体形状であれば任意の形状に変更可能であり、例えば、円柱状や角柱状に変更することができる。 Furthermore, if the convex part 14 is a solid | 3D shape, it can be changed into arbitrary shapes, for example, can be changed into a column shape or a prism shape.
また、上記実施形態では、円形ディスク７を回転ヘッド６から着脱可能にするために、回転ヘッド６の先端に磁石１１を設けているが、円形ディスク７の回転ヘッド６側に磁石１１を設けてもよく、回転ヘッド６と円形ディスク７の両方に磁石１１を設けてもよい。さらに、円形ディスク７を回転ヘッド６から着脱可能にすることができるのであれば、磁石１１以外の取付手段を用いてもよい。 In the above embodiment, in order to make the circular disk 7 detachable from the rotary head 6, the magnet 11 is provided at the tip of the rotary head 6. However, the magnet 11 is provided on the rotary head 6 side of the circular disk 7. Alternatively, the magnet 11 may be provided on both the rotary head 6 and the circular disk 7. Further, if the circular disk 7 can be attached to and detached from the rotary head 6, attachment means other than the magnet 11 may be used.
また、上記実施形態では、図５に示すように、洗浄パッド１０の洗浄面１０ａ、１０ｂのうち凸部１４の截頭面１０−１と液晶パネル２の表裏面とが接触した状態で、液晶パネル２の洗浄を行なっているが、比較的大きなカレットの除去を目的とする場合は、凸部１４の截頭面１０−１が液晶パネル２の表裏面からわずかに浮いた状態で液晶パネル２の洗浄を行なってもよい。これにより洗浄パッド１０の寿命が長くなり、しかも洗浄パッド１０に混合されている研磨材が不要になるので、コストの面で有利になる。なお、この場合、制御手段は、洗浄面１０ａの高さ（昇降距離）が指示した値になるように、洗浄手段３ａの昇降機構８ａを高さ制御する。 Moreover, in the said embodiment, as shown in FIG. 5, in the state which the wrinkle surface 10-1 of the convex part 14 and the front and back surfaces of the liquid crystal panel 2 contacted among the cleaning surfaces 10a and 10b of the cleaning pad 10, it is liquid crystal. Although the panel 2 is being cleaned, when the purpose is to remove a relatively large cullet, the liquid crystal panel 2 with the truncated surface 10-1 of the convex portion 14 slightly lifted from the front and back surfaces of the liquid crystal panel 2 is used. Cleaning may be performed. This prolongs the life of the cleaning pad 10 and eliminates the need for an abrasive mixed in the cleaning pad 10, which is advantageous in terms of cost. In this case, the control means controls the height of the lifting mechanism 8a of the cleaning means 3a so that the height (lifting distance) of the cleaning surface 10a becomes a designated value.
また、上記実施形態では、洗浄対象として液晶パネル２を例に挙げて説明したが、少なくとも表裏面にガラス面を有する板状部材であれば、本発明に係る洗浄装置１、１Ａ〜１Ｄを適用して、ガラス面に固着しているカレット等の異物を確実に除去することができる。 Moreover, in the said embodiment, although the liquid crystal panel 2 was mentioned as an example as a washing | cleaning object, if it is a plate-shaped member which has a glass surface at least on the front and back, the washing | cleaning apparatus 1, 1A-1D which concerns on this invention is applied. Thus, foreign matters such as cullet that are fixed to the glass surface can be reliably removed.
１、１Ａ、１Ｂ、１Ｃ、１Ｄ 洗浄装置
２ 液晶パネル
３ａ、３ｂ、３ｃ 洗浄手段
４ 搬送ローラ
５ 補助ローラ
６ 回転ヘッド
７ 円形ディスク
８ａ、８ｂ 昇降機構
９ 洗浄液供給機構
１０、１０’ 洗浄パッド
１０ａ、１０ｂ 洗浄面
１１ 磁石
１２ 第１貫通孔
１３ 第２貫通孔
１３’ 第３貫通孔
１４ 凸部
１５ センサ
1, 1A, 1B, 1C, 1D Cleaning device 2 Liquid crystal panels 3a, 3b, 3c Cleaning means 4 Conveying roller 5 Auxiliary roller 6 Rotating head 7 Circular disk 8a, 8b Lifting mechanism 9 Cleaning liquid supply mechanism 10, 10 'Cleaning pad 10a, 10b Cleaning surface 11 Magnet 12 First through hole 13 Second through hole 13 ′ Third through hole 14 Convex portion 15 Sensor
Claims (6)
前記複数の洗浄手段は、前記搬送経路の一方側に配置された１つの洗浄手段と、該洗浄手段と同軸上で相対向するよう前記搬送経路の他方側に配置された１つの洗浄手段とからなる組を複数含み、かつ複数の凸部が所定の間隔をおいて連続して配置された洗浄面を有し、
同一組を構成する前記洗浄手段は、前記洗浄面の回転方向が逆であることを特徴とする洗浄装置。 A plurality of cleaning means arranged in a staggered manner on both sides of the transport path so as to sandwich the front and back surfaces of the plate-shaped member being transported that is the object to be cleaned, and the cleaning means is supplied while supplying cleaning liquid to the plate-shaped member A cleaning device for rotating and cleaning the plate-like member being conveyed,
The plurality of cleaning means includes: one cleaning means disposed on one side of the transport path; and one cleaning means disposed on the other side of the transport path so as to be coaxially opposed to the cleaning means. A plurality of sets, and having a cleaning surface in which a plurality of convex portions are continuously arranged at a predetermined interval,
The cleaning device of the same set, wherein the cleaning surface has a reverse rotation direction.
搬送中の前記板状部材の表裏面に垂直な軸周りに回転する回転ヘッドと、
中心に第１貫通孔が設けられ、前記回転ヘッドに着脱可能に取り付けられた円形ディスクと、
中心に前記第１貫通孔と連通する第２貫通孔が設けられた前記洗浄面を有し、前記円形ディスクに取り付けられた洗浄パッドと、
前記第１貫通孔および前記第２貫通孔を介して前記板状部材に前記洗浄液を供給する洗浄液供給機構と、
前記洗浄パッドを前記板状部材の表面または裏面に対して昇降させる昇降機構とからなり、
前記洗浄手段毎に前記昇降機構を個別制御する制御手段をさらに備えたことを特徴とする請求項１に記載の洗浄装置。 The cleaning means includes
A rotating head that rotates around an axis perpendicular to the front and back surfaces of the plate-like member being conveyed;
A circular disc provided with a first through hole in the center and detachably attached to the rotary head;
A cleaning pad having the cleaning surface provided with a second through hole communicating with the first through hole in the center, and attached to the circular disc;
A cleaning liquid supply mechanism for supplying the cleaning liquid to the plate-like member via the first through hole and the second through hole;
It consists of a lifting mechanism that lifts and lowers the cleaning pad with respect to the front surface or the back surface of the plate-shaped member
The cleaning apparatus according to claim 1, further comprising a control unit that individually controls the lifting mechanism for each cleaning unit.
前記洗浄工程において、複数の凸部が所定の間隔をおいて連続して配列された洗浄面を有する前記複数の洗浄手段のうち、前記搬送経路の一方側に配置された１つの洗浄手段と、該洗浄手段と同軸上で相対向するよう前記搬送経路の他方側に配置された１つの洗浄手段とからなる洗浄手段の前記洗浄面を逆方向に回転させることを特徴とする洗浄方法。 A transport step for transporting a plate-like member to be cleaned along a transport route, and the transport route so as to sandwich the front and back surfaces of the plate-like member while supplying a cleaning liquid to the plate-like member during the transport step. A cleaning step of cleaning the plate-like member by rotating a plurality of cleaning means arranged in a staggered manner on both sides of the plate,
In the cleaning step, among the plurality of cleaning means having a cleaning surface in which a plurality of convex portions are continuously arranged at a predetermined interval, one cleaning means arranged on one side of the transport path; A cleaning method, comprising: rotating the cleaning surface of a cleaning unit comprising a single cleaning unit disposed on the other side of the transport path so as to face the cleaning unit on the same axis in the opposite direction.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101434890B1 (en) | 2012-10-16 | 2014-09-02 | 주식회사 에이유테크 | Cleaning Device for Display Panel with Grinding Pad exchanged easily |
| CN105772450A (en) * | 2014-12-24 | 2016-07-20 | Au技术株式会社 | Display panel washing device |
| WO2019069646A1 (en) * | 2017-10-02 | 2019-04-11 | 日本電気硝子株式会社 | Glass-plate cleaning device and method for producing glass plate |
| WO2020012863A1 (en) * | 2018-07-10 | 2020-01-16 | 日本電気硝子株式会社 | Glass plate production method and glass plate cleaning device |
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| JP2021521057A (en) * | 2018-04-18 | 2021-08-26 | ビン、マイケル ガン、チョン | Underwater hull cleaning machines, hull cleaning systems, and methods for cleaning the hull of a ship |
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| KR102666022B1 (en) | 2018-07-10 | 2024-05-17 | 니폰 덴키 가라스 가부시키가이샤 | Glass plate manufacturing method and glass plate cleaning device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106773161B (en) * | 2016-12-19 | 2019-07-02 | 武汉华星光电技术有限公司 | Substrate cleaning apparatus |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62126054U (en) * | 1986-01-31 | 1987-08-10 | ||
| JPH0588682U (en) * | 1992-05-18 | 1993-12-03 | セントラル硝子株式会社 | Glass plate cleaning equipment |
| JPH11332651A (en) * | 1998-05-22 | 1999-12-07 | Kanebo Ltd | Rotary brush for wash |
| JP2000343390A (en) * | 1999-06-04 | 2000-12-12 | Nippon Sheet Glass Co Ltd | Processing method for glass substrate |
| JP2003112951A (en) * | 2001-10-05 | 2003-04-18 | Dainippon Printing Co Ltd | Apparatus for cleaning glass sheet |
-
2011
- 2011-04-01 JP JP2011081951A patent/JP2012213746A/en active Pending
-
2012
- 2012-03-29 TW TW101111027A patent/TW201240744A/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62126054U (en) * | 1986-01-31 | 1987-08-10 | ||
| JPH0588682U (en) * | 1992-05-18 | 1993-12-03 | セントラル硝子株式会社 | Glass plate cleaning equipment |
| JPH11332651A (en) * | 1998-05-22 | 1999-12-07 | Kanebo Ltd | Rotary brush for wash |
| JP2000343390A (en) * | 1999-06-04 | 2000-12-12 | Nippon Sheet Glass Co Ltd | Processing method for glass substrate |
| JP2003112951A (en) * | 2001-10-05 | 2003-04-18 | Dainippon Printing Co Ltd | Apparatus for cleaning glass sheet |
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101434890B1 (en) | 2012-10-16 | 2014-09-02 | 주식회사 에이유테크 | Cleaning Device for Display Panel with Grinding Pad exchanged easily |
| CN105772450A (en) * | 2014-12-24 | 2016-07-20 | Au技术株式会社 | Display panel washing device |
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