JP2012210572A - Gas liquid mixing stirring device - Google Patents
Gas liquid mixing stirring device Download PDFInfo
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- JP2012210572A JP2012210572A JP2011077295A JP2011077295A JP2012210572A JP 2012210572 A JP2012210572 A JP 2012210572A JP 2011077295 A JP2011077295 A JP 2011077295A JP 2011077295 A JP2011077295 A JP 2011077295A JP 2012210572 A JP2012210572 A JP 2012210572A
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- intake pipe
- water
- gas
- flexible tube
- stirring device
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- 239000007788 liquid Substances 0.000 title claims abstract description 42
- 238000003756 stirring Methods 0.000 title claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 67
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 239000002341 toxic gas Substances 0.000 claims description 12
- 239000007789 gas Substances 0.000 description 25
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 12
- 229910052801 chlorine Inorganic materials 0.000 description 12
- 239000000460 chlorine Substances 0.000 description 12
- 239000000843 powder Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000001784 detoxification Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Abstract
Description
この発明は、半導体製造装置や液晶製造装置等から排出される有毒ガスを除害、回収するための、除害装置に関するものであるが、更に述べると、導水管内に吸気管を挿着し、該吸気管の下端から排出される有毒ガスと前記導水管内の水とを混合させる、気液混合攪拌装置に関するものである。 The present invention relates to a detoxifying device for detoxifying and collecting toxic gas discharged from a semiconductor manufacturing device, a liquid crystal manufacturing device, etc., and more specifically, an intake pipe is inserted into a water conduit, The present invention relates to a gas-liquid mixing and stirring device for mixing toxic gas discharged from the lower end of the intake pipe and water in the water conduit.
半導体製造ラインや液晶製造ラインから排出されるガスには、ＳｉＯ２やＷＯ３等の微細な粉体と同時に有害なガスが含まれているので、そのまま大気中に放出することができない。そのため、従来、除害装置を用いて有毒ガスの除害を行っているが、この除害装置として、次の様なものがある。（例えば、特許文献１、参照）。 Since the gas discharged from the semiconductor manufacturing line or the liquid crystal manufacturing line contains harmful gas at the same time as fine powder such as SiO 2 and WO 3 , it cannot be released into the atmosphere as it is. For this reason, conventionally, a toxic gas is removed by using an abatement apparatus. As the abatement apparatus, there is the following. (For example, refer to Patent Document 1).
吸気管から導入される有毒ガスを水に混入せしめて除害する装置であって，前記吸気管内を乾燥させるための気体を流入させる乾燥用管と、該気体の流入を制御する弁とを有する有毒ガスの除害装置において；前記吸気管内を洗浄させるための液体を流入させる洗浄用管と、該液体の流入を制御する弁とを有し、吸気圧力上昇時には、有毒ガスの流入を制限して前記液体を前記吸気管内に流入せしめて管内洗浄し、その後、管内乾燥手段により前記吸気管内を乾燥させて管内乾燥した後、有毒ガスを再度導入するようにした除害装置。 An apparatus for detoxifying by mixing toxic gas introduced from an intake pipe into water, comprising a drying pipe for introducing a gas for drying the inside of the intake pipe, and a valve for controlling the inflow of the gas In the toxic gas abatement apparatus, the apparatus has a cleaning pipe for introducing a liquid for cleaning the inside of the intake pipe and a valve for controlling the inflow of the liquid, and restricts the inflow of the toxic gas when the intake pressure rises. A detoxifying apparatus in which the liquid is allowed to flow into the intake pipe and cleaned in the pipe, and then the inside of the intake pipe is dried and dried in the pipe by a pipe drying means, and then toxic gas is reintroduced.
従来例では、適宜吸気管の内周面全体を洗浄乾燥させることにより該吸気管の詰まりを防止しているが、乾燥用管や洗浄用管等の設備が必要となるとともに、洗浄及び乾燥作業に時間がかかる。 In the conventional example, the entire inner peripheral surface of the intake pipe is appropriately washed and dried to prevent clogging of the intake pipe. However, equipment such as a drying pipe and a washing pipe is required, and cleaning and drying operations are performed. Takes time.
この発明は、上記事情に鑑み、簡単に、吸気管の詰まりを防止することを目的とする。 In view of the above circumstances, an object of the present invention is to easily prevent clogging of an intake pipe.
本件発明者は、ＷＦ６（六フッ化タングステン）やＳｉＦ４（四フッ化ケイ素）などの有害ガスは、水と反応して粉体となるため、前記水と前記ガスとが混合攪拌される場所に位置する、前記吸気管の下端部近傍には、前記粉体が付着しやすいことに注目するとともに、前記課題を解決するためには、前記吸気管の下端部を振動させればよいのではないか、と考えた。 The present inventor believes that toxic gases such as WF 6 (tungsten hexafluoride) and SiF 4 (silicon tetrafluoride) react with water to form powder, and thus the water and the gas are mixed and stirred. Note that the powder tends to adhere to the vicinity of the lower end portion of the intake pipe located at a location, and in order to solve the problem, the lower end portion of the intake pipe may be vibrated. I thought that.
そこで、どのようにすれば、前記吸気管の下端部を振動させることができるか、について検討した。除害装置は、運転中にポンプ等の駆動により振動し、僅かに吸気管が振動しているので、この吸気管内に前記吸気管より小径の可撓性チューブを挿入し、その上端部を前記吸気管に固定した。 Therefore, how the lower end portion of the intake pipe can be vibrated was examined. The abatement device vibrates by driving a pump or the like during operation, and the intake pipe vibrates slightly. Therefore, a flexible tube having a smaller diameter than the intake pipe is inserted into the intake pipe, and the upper end portion is Fixed to the intake pipe.
そうすると、前記除害装置の振動により前記チューブが振動して該吸気管の内周面に衝突し、繰り返し該吸気管の下端部に衝撃を与えて振動させるので、前記チューブ及び吸気管に粉体が付着し難いことがわかった。この発明は、前記知見に基づいてなされたものである。 Then, the tube vibrates due to the vibration of the abatement device and collides with the inner peripheral surface of the intake pipe, and repeatedly impacts and vibrates the lower end of the intake pipe. Was found to be difficult to adhere. The present invention has been made based on the above findings.
この発明は、導水管内に吸気管を挿着し、該吸気管の下端から排出される有毒ガスと前記導水管内の水とを混合させる気液混合攪拌装置において、前記吸気管内に可撓性チューブを挿着して該可撓性チューブの下端部を前記吸気管の下端部に対向させ、前記吸気管の下端部側と前記可撓性チューブの下端部側とを離間させて内側流水路を形成するとともに、前記吸気管に前記内側流水孔と連通する分水孔を貫設したことを特徴とする。 The present invention relates to a gas-liquid mixing and agitating device in which an intake pipe is inserted into a water conduit, and toxic gas discharged from the lower end of the intake pipe and water in the water conduit are mixed. And the lower end portion of the flexible tube is opposed to the lower end portion of the intake pipe, and the lower end portion side of the intake pipe and the lower end portion side of the flexible tube are separated from each other to form an inner flow channel. In addition to the formation, a water diversion hole communicating with the inner flow hole is provided through the intake pipe.
この発明の前記分水孔は、旋回流を形成する旋回流形成孔であることを特徴とする。この発明の前記分水孔は、吸気管の下端部側に複数形成されていることを特徴とする。この発明の前記吸気管の内周面には、内面突起が設けられていることを特徴とする。 The water diversion hole of the present invention is a swirl flow forming hole for forming a swirl flow. A plurality of the water diversion holes of the present invention are formed on the lower end side of the intake pipe. An inner surface protrusion is provided on the inner peripheral surface of the intake pipe of the present invention.
この発明の前記可撓性チューブの内側には、ロッド棒が同心状に設けられていることを特徴とする。この発明の前記可撓性チューブの外周面には、外面突起が設けられていることを特徴とする。この発明の前記可撓性チューブには、変形容易部が設けられていることを特徴とする。 A rod rod is provided concentrically inside the flexible tube of the present invention. An outer surface protrusion is provided on the outer peripheral surface of the flexible tube of the present invention. The flexible tube according to the present invention is provided with an easily deformable portion.
この発明は、以上のように吸気管に、前記内側流水路と連通する分水孔を貫設したので、導水管と吸気管との間の外側流水路を流れる処理液、例えば、水、は、その一部が前記分水孔から前記内側流水孔内に分流する。そのため、前記可撓性チューブは、前記内側流水路を流れる水の外力を受けて変位し吸気管との衝突を繰り返すので、前記チューブの下端部に付着する粉体は、剥離される。 In the present invention, since the water distribution hole communicating with the inner flow channel is provided in the intake pipe as described above, the treatment liquid that flows through the outer flow channel between the water guide pipe and the intake pipe, for example, water, , A part of which diverts from the diversion holes into the inner flow holes. Therefore, the flexible tube is displaced by the external force of the water flowing through the inner flow channel and repeatedly collides with the intake pipe, so that the powder adhering to the lower end of the tube is peeled off.
又、前記可撓性チューブの有害ガスは、前記内側流水路から放出される水と混合・撹拌され、更に前記外側流水路から螺旋流となって放出される水と混合・撹拌されて微細気泡状化するので、十分に処理液（水）と接触し除害される。そのため、除害特性は、従来例に比べ、良くなるので、除害効率の向上を図ることができる。 Further, the harmful gas in the flexible tube is mixed and stirred with water released from the inner flowing water channel, and further mixed and stirred with water discharged as a spiral flow from the outer flowing water channel. Since it is in the form of a liquid, it is sufficiently removed by contact with the treatment liquid (water). Therefore, the detoxification characteristics are improved as compared with the conventional example, so that the detoxification efficiency can be improved.
本発明の第１実施の形態を図１〜図３に基づいて説明する。有毒ガスの除害装置の液体槽１には、処理液、例えば、水Ｗが貯溜されている。この液体槽１には、該液体槽１内の処理液（水）Ｗを循環させるための循環路５が配置されている。この循環路５には、導水管２と吸気管１３を備えた気液混合攪拌装置４が設けられている。 A first embodiment of the present invention will be described with reference to FIGS. A processing liquid, for example, water W is stored in the liquid tank 1 of the toxic gas abatement apparatus. In the liquid tank 1, a circulation path 5 for circulating the processing liquid (water) W in the liquid tank 1 is disposed. The circulation path 5 is provided with a gas-liquid mixing and stirring device 4 provided with a water guide pipe 2 and an intake pipe 13.
前記導水管２は、Ｌ字状に形成され、その上端は前記循環路５に連結され、その下端２ａには、前記導水管２より小径の混合気液管１４が連結されている。前記液体槽１の上部には、除害されたガス（処理済ガス）を排気するための排気口１ａが突設されている。 The water guide pipe 2 is formed in an L shape, and an upper end thereof is connected to the circulation path 5, and a gas mixture liquid pipe 14 having a smaller diameter than the water guide pipe 2 is connected to the lower end 2 a thereof. An exhaust port 1 a for exhausting the detoxified gas (processed gas) protrudes from the upper part of the liquid tank 1.
前記導水管２内には、吸気管１３が挿着されているが、この吸気管１３は、例えば、直径（内径）３０mmのエンビ管である。該吸気管１３は、前記導水管２の曲がり部を突き抜けて突出しており、その上端部１３ａには、有害ガスＧの供給ラインの接続手段と、可撓性チューブ１８の上端部１８ａを固定する保持手段が設けられている。 An intake pipe 13 is inserted into the water guide pipe 2. The intake pipe 13 is an end pipe having a diameter (inner diameter) of 30 mm, for example. The intake pipe 13 protrudes through the bent portion of the water guide pipe 2, and the upper end portion 13 a fixes the connection means for the supply line of the harmful gas G and the upper end portion 18 a of the flexible tube 18. Holding means is provided.
前記可撓性チューブ１８は、例えば、直径（外径）２０mmのテフロン（登録商標）製パイプであり、前記吸気管１３の垂直方向の長さより僅かに長く形成されている。前記吸気管１３の内周面１３ｂと前記可撓性チューブ１８の外周面１８ｂとの間には、断面円環状の内側流水路６が形成されている。この内側流水路６の流路幅Ａは、例えば、５mmであるが、その値は必要に応じて適宜選択される。 The flexible tube 18 is a Teflon (registered trademark) pipe having a diameter (outer diameter) of 20 mm, for example, and is formed slightly longer than the vertical length of the intake pipe 13. Between the inner peripheral surface 13 b of the intake pipe 13 and the outer peripheral surface 18 b of the flexible tube 18, an inner flowing water channel 6 having an annular cross section is formed. The flow path width A of the inner water flow path 6 is, for example, 5 mm, and the value is appropriately selected as necessary.
前記チューブ１８の下端部１８ｃは、前記吸気管１３の下端部１３ｃと対向しているが、前記チューブ１８の下端は、前記吸気管１３の下端より僅かに突出している。このチューブ１８の下端の突出量は、前記内側流水路６の流路幅Ａと略同等であるが、必要に応じて適宜選択される。 The lower end portion 18 c of the tube 18 faces the lower end portion 13 c of the intake pipe 13, but the lower end of the tube 18 slightly protrudes from the lower end of the intake pipe 13. The protruding amount of the lower end of the tube 18 is substantially the same as the channel width A of the inner flowing water channel 6, but is appropriately selected as necessary.
導水管２の下端２ａ側の内周面１３ｃは、吸気管１３の直径より大きな直径を有する狭路リング１９が嵌着され、該狭路リング１９には、前記吸気管１３の下端部１３ｃを保持する楕円板２０が設けられている。 A narrow path ring 19 having a diameter larger than the diameter of the intake pipe 13 is fitted to the inner peripheral surface 13c on the lower end 2a side of the water guide pipe 2, and the lower end portion 13c of the intake pipe 13 is connected to the narrow path ring 19. An elliptical plate 20 to be held is provided.
前記吸気管１３の下端部１３ｃ側には、分水孔２２が貫設されている。この分水孔２２は、旋回流を形成できるように接線方向を向いているが、その形状、配設位置、開口面積、等は必要に応じて適宜選択される。前記吸気管１３の下端部側内周面１３ｂには、可撓性チューブ１８の外周面１８ｂが衝突する内面突起２３が設けられている。この内面突起２３は、１個、又は、外周方向に間隔をおいて複数個設けてもよい。この内面突起２３の形状、配置、等は必要に応じて適宜選択される。 A water diversion hole 22 is provided on the lower end 13c side of the intake pipe 13. The water diversion hole 22 faces in a tangential direction so as to form a swirling flow, but its shape, arrangement position, opening area, and the like are appropriately selected as necessary. On the lower end side inner peripheral surface 13 b of the intake pipe 13, an inner surface protrusion 23 is provided to collide with the outer peripheral surface 18 b of the flexible tube 18. One inner surface protrusion 23 or a plurality of inner surface protrusions 23 may be provided at intervals in the outer circumferential direction. The shape, arrangement, and the like of the inner surface protrusion 23 are appropriately selected as necessary.
前記可撓性チューブ１８の中心部には、ロッド棒２４が同心状に配設されている。このロッド棒２４の下端２４ｃは、前記吸気管１３の下端部１３ｃ及び可撓性チューブ１８の下端１８ｃより下方に突出しているが、その太さ（直径）、配設位置等は、必要に応じて適宜選択される。前記導水管２の狭路リング１９、吸気管１３、可撓性チューブ１８及びロッド棒２４は、略等間隔をおいて同心状に配設されているが、これらの間隔は、必要に応じて適宜選択することができる。 A rod rod 24 is disposed concentrically at the center of the flexible tube 18. The lower end 24c of the rod rod 24 protrudes downward from the lower end portion 13c of the intake pipe 13 and the lower end 18c of the flexible tube 18. However, the thickness (diameter), the arrangement position, and the like are as required. Are appropriately selected. The narrow ring 19, the intake pipe 13, the flexible tube 18, and the rod rod 24 of the water guide pipe 2 are arranged concentrically at substantially equal intervals. It can be selected appropriately.
次に、本実施形態の作動について説明する。図示しないポンプにより液体層１内の処理液（例えば、水）Ｗが循環路５に送られると、前記水Ｗは前記外側流水路８内に流れ込むと共に、その一部Ｗ１は、分水孔２２を通って内側流水路６に流れ込む。そうすると、導水管２と吸気管１３との間の外側流水路８を流れる水Ｗは、楕円板２０の作用により螺旋流となって流下すると共に、内側流水路６内を流れる水Ｗ１も、旋回流となりながら流下する。 Next, the operation of this embodiment will be described. When the processing liquid (for example, water) W in the liquid layer 1 is sent to the circulation path 5 by a pump (not shown), the water W flows into the outer flowing water path 8, and a part of the water W 1 has a diversion hole. 22 flows into the inner flowing water channel 6. Then, the water W flowing in the outer flow channel 8 between the water guide pipe 2 and the intake pipe 13 flows down as a spiral flow by the action of the elliptical plate 20, and the water W 1 flowing in the inner flow channel 6 is also It flows down while becoming a swirl flow.
そして、前記内側流水路６の水Ｗ１は、可撓性チューブ１８に外力を与えながら流下し、該可撓性チューブ１８を振動させるので、該可撓性チューブ１８は吸気管１３の内面突起２３と衝突する。そうすると、該可撓性チューブ１８の下端部１８ｃに付着した粉体は、外側からの衝撃を受けて剥がれ落ちる。更に、前記可撓チューブ１８はロッド棒２４と衝突するので、外側からの衝撃で剥がれ落ちなかった粉体もこの内側からの更なる衝撃により効果的に剥ぎ落とすことができる。 Then, the water W 1 in the inner flow channel 6 flows down while applying an external force to the flexible tube 18 and vibrates the flexible tube 18, so that the flexible tube 18 is projected on the inner surface of the intake pipe 13. Clash with 23. Then, the powder adhering to the lower end portion 18c of the flexible tube 18 is peeled off by receiving an impact from the outside. Further, since the flexible tube 18 collides with the rod rod 24, the powder that has not been peeled off by the impact from the outside can be effectively peeled off by the further impact from the inside.
又、前記可撓性チューブ１８内を流下する有害ガスＧは、前記内側流水路６から旋回流となって放出される前記水Ｗ１と混合・撹拌されながら混合気液管１４内を旋回するとともに、外側流水路８から螺旋流となって放出される前記水Ｗと混合・撹拌され、混合気液ＷＧとなりながら前記混合気液管１４内を流下し、微細気泡状なる。この混合気液ＷＧは、前記混合気液管１４を介して液体槽１内に戻されて、除害される。 Further, the harmful gas G flowing down in the flexible tube 18 swirls in the gas-liquid tube 14 while being mixed and stirred with the water W 1 discharged as a swirling flow from the inner flowing water channel 6. At the same time, it is mixed and stirred with the water W released as a spiral flow from the outer water flow channel 8 and flows down in the gas-liquid tube 14 while becoming a gas-liquid mixture WG to form fine bubbles. The mixed gas / liquid WG is returned to the liquid tank 1 through the mixed gas / liquid pipe 14 and detoxified.
この時、前記外側流水路８を流れる水Ｗの流速と、内側流水路６を流れる水Ｗ１の流速と、可撓性チューブ１８を流れる有害ガスＧの流速とは、互いに異なっており、例えば、水Ｗ１の流速＜水Ｗの流速＜有害ガスＧの流速、の関係である。そして、最も流速の大きい有害ガスＧは、最初に最も流速の遅い前記水Ｗ１と混合・撹拌され、更に、前記水Ｗ１より流速の大きい水Ｗと混合・撹拌されることになるので、前記有害ガスＧは、良く混合・撹拌されて微細気泡状となり、水と十分に接触することができる。そのため、有害ガスＧは、全体的にみると、従来例より水と接触する面積が大きくなるので、除害効率が良くなる。 At this time, the flow rate of the water W flowing through the outer flow channel 8, the flow rate of the water W 1 flowing through the inner flow channel 6, and the flow rate of the harmful gas G flowing through the flexible tube 18 are different from each other. The flow rate of the water W 1 <the flow rate of the water W <the flow rate of the harmful gas G. The harmful gas G having the highest flow rate is first mixed and stirred with the water W 1 having the slowest flow rate, and further mixed and stirred with the water W having a higher flow rate than the water W 1 . The harmful gas G is well mixed and agitated to form fine bubbles and can sufficiently come into contact with water. Therefore, when viewed as a whole, the harmful gas G has a larger area in contact with water than in the conventional example, so that the detoxification efficiency is improved.
因みに、本件発明者が、本発明の気液混合撹拌装置と従来例の気液混合撹拌装置を使用して、可撓性チューブ１８に供給される有害ガスの入口塩素量（sccm）と、液体層１の排気口１ａから排出される排気ガスの出口塩素濃度（ppm）との関係を実験調査してみたところ、図7に示す結果を得た。但し、実験条件は、下記の通りである。
ａ：有害ガス吸引量（総風量） ６０L／min.
ｂ：外側流水路の水Ｗの流速 ４．２７m/s
ｃ：内側流水路の水Ｗ１の流速 １．８６m/s
ｄ：可撓性チューブの有害ガスの流速 ５．０m/s
Incidentally, the inventor of the present invention uses the gas-liquid mixing and stirring device of the present invention and the gas-liquid mixing and stirring device of the conventional example, and the inlet chlorine amount (sccm) of harmful gas supplied to the flexible tube 18 and the liquid When the relationship between the exhaust gas discharged from the exhaust port 1a of the layer 1 and the outlet chlorine concentration (ppm) of the exhaust gas was experimentally investigated, the result shown in FIG. 7 was obtained. However, the experimental conditions are as follows.
a: Hazardous gas suction volume (total air volume) 60 L / min.
b: Flow velocity of water W in the outer flow channel 4.27 m / s
c: Flow velocity of water W1 in the inner flow channel 1.86 m / s
d: Flow rate of harmful gas in flexible tube 5.0 m / s
この図７は、
（１）入口塩素量が６０sccmの時の出口塩素濃度は、
本件発明Ｘ：０．３ppm、 従来例Ｙ：０．３ppm、
（ｂ）入口塩素量が１００sccmの時の出口塩素濃度は、
本件発明Ｘ：１．０ppm、 従来例Ｙ：１．７ppm、
（ｃ）入口塩素量が１５０sccmの時の出口塩素濃度は、
本件発明Ｘ：１３．０ppm、 従来例Ｙ：１５．５ppm、
であることを示している。
This FIG.
(1) The outlet chlorine concentration when the inlet chlorine amount is 60 sccm,
Invention X: 0.3 ppm, Conventional Example Y: 0.3 ppm
(B) The outlet chlorine concentration when the inlet chlorine amount is 100 sccm,
Invention X: 1.0 ppm, Conventional Example Y: 1.7 ppm,
(C) The outlet chlorine concentration when the inlet chlorine amount is 150 sccm is
Invention X: 13.0 ppm, Conventional Example Y: 15.5 ppm,
It is shown that.
前記実験調査の結果、入口塩素量が６０sccmの時は、本件発明Ｘと従来例Ｙとの出口塩素濃度は、同一であったが、入口塩素量が６０sccmを超えると、その値が大きくなればなるほど、本件発明Ｘと従来例Ｙと間の差が大きくなり、本件発明の除害効率が向上していることが分かった。なお、入口塩素量６０sccm、１００sccm、１５０sccmは、総風量６０L/min.に対する割合に換算すると、約０．１％、０．１７％、０．２５％、となる。 As a result of the above experimental investigation, when the inlet chlorine amount was 60 sccm, the outlet chlorine concentration of Invention X and Conventional Example Y was the same, but when the inlet chlorine amount exceeded 60 sccm, the value would increase. It turns out that the difference between the Invention X and the Conventional Example Y increases, and the abatement efficiency of the Invention is improved. The inlet chlorine amounts of 60 sccm, 100 sccm, and 150 sccm are approximately 0.1%, 0.17%, and 0.25% when converted to the ratio with respect to the total air volume of 60 L / min.
前述のようにして除害されたガス（処理済みガス）は、排気口１ａを介して生産ライン等に送り込まれる。 The gas (treated gas) removed as described above is sent to a production line or the like through the exhaust port 1a.
本発明の第２実施の形態を図４、図５に基づいて説明するが、図１〜図３と同一図面符号はその名称も機能も同一である。この実施形態と前記第１実施形態との相違点は、可撓性チューブ１８の外周面１８ｂに外面突起２６を設けたことである。この外面突起２６は、可撓性チューブ１８の下端部１８ｃに設けられ、かつ、周方向及び軸方向に間隔をおいて、複数個設けられている。この外面突起２６の形状、大きさ、配設位置等は、必要に応じて適宜選択される。 A second embodiment of the present invention will be described with reference to FIGS. 4 and 5. The same reference numerals as those in FIGS. 1 to 3 have the same names and functions. The difference between this embodiment and the first embodiment is that an outer surface protrusion 26 is provided on the outer peripheral surface 18 b of the flexible tube 18. The outer surface protrusions 26 are provided at the lower end portion 18c of the flexible tube 18, and a plurality of outer surface protrusions 26 are provided at intervals in the circumferential direction and the axial direction. The shape, size, arrangement position and the like of the outer surface protrusion 26 are appropriately selected as necessary.
この外面突起２６を配設することにより、可撓性チューブ１８の衝撃力を大きくすることができるので、前記チューブ１８の下端部１８ｃに付着した粉体をより効果的良く剥がすことができる。 By disposing the outer surface protrusion 26, the impact force of the flexible tube 18 can be increased, so that the powder adhering to the lower end portion 18c of the tube 18 can be peeled off more effectively.
本発明の第３実施の形態を図６に基づいて説明するが、図１〜図３と同一図面符号はその名称も機能も同一である。この実施形態と前記第１実施形態との相違点は、可撓性チューブ１８に変形容易部３０を形成したことである。この変形容易部３０は、他の部分より変形し易い部分であるが、例えば、この変形容易部３０として可撓性チューブ１８の一部を薄肉にした円筒状薄肉部が採用される。この変形容易部３０の形状、大きさ、配設位置等は、必要に応じて適宜選択される。 A third embodiment of the present invention will be described with reference to FIG. 6. The same reference numerals as those in FIGS. 1 to 3 have the same names and functions. The difference between this embodiment and the first embodiment is that the easily deformable portion 30 is formed in the flexible tube 18. The easily deformable portion 30 is a portion that is more easily deformed than other portions. For example, a cylindrical thin portion in which a part of the flexible tube 18 is thinned is used as the easily deformable portion 30. The shape, size, arrangement position, and the like of the easily deformable portion 30 are appropriately selected as necessary.
この実施形態では、変形容易部３０が他の部分に比べ変形しやすいので、可撓性チューブ１８の振動を激しくすることができる。そのため、可撓性チューブ１８の衝撃力を大きくすることができるので、前記チューブ１８の下端部１８ｃに付着した粉体をより効果的良く剥がすことができる。 In this embodiment, since the easily deformable portion 30 is more easily deformed than other portions, the vibration of the flexible tube 18 can be intense. Therefore, since the impact force of the flexible tube 18 can be increased, the powder adhering to the lower end portion 18c of the tube 18 can be peeled off more effectively.
２ 導水管
４ 気液混合攪拌装置
６ 内側流水路
８ 外側流水路
１３ 吸気管
１８ 可撓性チューブ
２２ 分水孔
２３ 内面突起
２４ ロッド棒
２６ 外面突起
３０ 変形容易部
Ｗ 処理液（水）
Ｗ１ 処理液（水）
Ｇ 有害ガス
2 Water conduit
4 Gas-liquid mixing stirrer
6 Inner channel
8 Outer channel
13 Intake pipe
18 Flexible tube
22 Diversion hole
23 Internal protrusion
24 Rod rod
26 External protrusion
30 Easy deformation part
W Treatment liquid (water)
W1 Treatment liquid (water)
G Noxious gas
Claims (7)
前記吸気管内に可撓性チューブを挿着して該可撓性チューブの下端部を前記吸気管の下端部に対向させ、前記吸気管の下端部側と前記可撓性チューブの下端部側とを離間させて内側流水路を形成するとともに、
前記吸気管に、前記内側流水路と連通する分水孔を貫設したことを特徴とする気液混合攪拌装置。 In the gas-liquid mixing and stirring device for inserting the intake pipe into the water conduit, and mixing the toxic gas discharged from the lower end of the intake pipe and the water in the water conduit,
A flexible tube is inserted into the intake pipe, and the lower end of the flexible tube is opposed to the lower end of the intake pipe. The lower end of the intake pipe and the lower end of the flexible tube To form an inner flow channel by separating
A gas-liquid mixing and stirring device, wherein a water diversion hole communicating with the inner flow channel is provided in the intake pipe.
The gas-liquid mixing and stirring device according to claim 1, wherein the flexible tube is provided with an easily deformable portion.
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