JP2012208038A - Pressure-sensitive resistance member and pressure-sensitive sensor - Google Patents

Pressure-sensitive resistance member and pressure-sensitive sensor Download PDF

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JP2012208038A
JP2012208038A JP2011074703A JP2011074703A JP2012208038A JP 2012208038 A JP2012208038 A JP 2012208038A JP 2011074703 A JP2011074703 A JP 2011074703A JP 2011074703 A JP2011074703 A JP 2011074703A JP 2012208038 A JP2012208038 A JP 2012208038A
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pressure
resistance member
sensitive resistance
sensitive
convex portion
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Rika Furukuwa
里香 古桑
Takafumi Erami
隆文 撰
Shugo Takahashi
秀剛 高橋
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Fujikura Composites Inc
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Fujikura Rubber Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a pressure-sensitive resistance member capable of acquiring stable pressure-electric resistance conversion with respect to the wide range of pressure changes and a pressure-sensitive sensor using the same.SOLUTION: The pressure-sensitive resistance member 11 made of an elastic member containing conductive particles includes a flat-plate base 12 and a projected part 13 located on one surface 12a of the base 12. The shape of the bottom part 13B of the projected part 13 on the base 12 side is polygonal, the top part 13A of the projected part 13 is formed flat, the area of the top part 13A is smaller than that of the bottom part 13B, and a relationship of 0.05≤T/H≤0.5 is established between the thickness T of the base 12 and the height H of the projected part 13 (distance from the bottom part 13B to the top part 13A in a direction perpendicular to the surface 12a of the base 12).

Description

本発明は、感圧センサ等の圧力−電気抵抗変換装置に使用する感圧抵抗部材と、それを用いた感圧センサに関する。   The present invention relates to a pressure-sensitive resistance member used in a pressure-electric resistance conversion device such as a pressure-sensitive sensor, and a pressure-sensitive sensor using the pressure-sensitive resistance member.

従来、圧力により電気抵抗値を変化させる圧力−電気抵抗変換装置としては、例えば、弾性部材に導電性粒子を互いに接触していない状態で含有させた感圧抵抗部材を電極間に配設し、電極間を加圧することにより、感圧抵抗部材内で導電性粒子が接触して抵抗変化が生じることを利用した感圧センサがある。しかし、導電性粒子を含有させた感圧抵抗部材の両面が平面である場合、微小な外力が加わっても感圧抵抗部材に形状変化が生じないため、抵抗変化が起こり難く、センサ感度が悪いものであった。
このため、導電性粒子を含有させた感圧抵抗部材の表面に凹凸形状を設け、この凹凸形状を構成する凸部が、微小な外力によって変形することを利用した感圧センサがある（特許文献１）。また、電極間に導電性ゴムからなる半球面状の導電性部材を配置し、電極間距離を小さくする方向の外力が加わることにより、半球面状の導電性部材が押しつぶされ、導電性部材と電極との接触面積が増大して表面接触抵抗が小さくなることを利用した感圧センサがある（特許文献２）。 Conventionally, as a pressure-electric resistance conversion device that changes an electric resistance value by pressure, for example, a pressure-sensitive resistance member containing conductive particles in a state where they are not in contact with each other is disposed between electrodes, There is a pressure-sensitive sensor that utilizes a change in resistance caused by contact between conductive particles in a pressure-sensitive resistance member by pressurizing between electrodes. However, when both surfaces of the pressure-sensitive resistance member containing conductive particles are flat, even if a minute external force is applied, the pressure-sensitive resistance member does not change in shape, so resistance change hardly occurs and sensor sensitivity is poor. It was a thing.
For this reason, there is a pressure-sensitive sensor using an uneven shape on the surface of a pressure-sensitive resistance member containing conductive particles and utilizing the fact that the convex portion constituting the uneven shape is deformed by a minute external force (Patent Document). 1). Further, a hemispherical conductive member made of conductive rubber is disposed between the electrodes, and an external force in a direction to reduce the distance between the electrodes is applied, whereby the hemispherical conductive member is crushed, and the conductive member and There is a pressure-sensitive sensor that utilizes the fact that the contact area with an electrode increases and the surface contact resistance decreases (Patent Document 2).

特開平４−３６６２７号公報Japanese Patent Laid-Open No. 4-36627 実開平５−６８０２号公報Japanese Utility Model Publication No. 5-6802

しかしながら、上述のような感圧センサは、微小な外力に対して良好なセンサ感度を具備するものの、印加圧力が大きくなった場合、表面接触抵抗の変化が小さくなり、安定した圧力−電気抵抗変換が得られないという問題があった。
本発明は、上記のような実情に鑑みてなされたものであり、広い範囲の圧力変化に対して安定した圧力−電気抵抗変換が得られる感圧抵抗部材と、それを用いた感圧センサを提供することを目的とする。 However, although the pressure-sensitive sensor as described above has a good sensor sensitivity with respect to a minute external force, when the applied pressure increases, the change in surface contact resistance decreases, and stable pressure-electric resistance conversion. There was a problem that could not be obtained.
The present invention has been made in view of the above circumstances, and includes a pressure-sensitive resistance member capable of obtaining stable pressure-electric resistance conversion with respect to a wide range of pressure changes, and a pressure-sensitive sensor using the pressure-sensitive resistance member. The purpose is to provide.

このような目的を達成するために、本発明の感圧抵抗部材は、導電性粒子を含有する弾性部材からなる感圧抵抗部材において、平板状の基部と、該基部の一方の面に位置する凸部と、を備え、該凸部は前記基部側の底部の形状が多角形であり、前記凸部の頂部は平坦面であるとともに、該頂部の面積は前記底部の面積よりも小さく、前記基部の厚みＴと、前記凸部の高さ（基部の面に垂直な方向における底部から頂部までの距離）Ｈとの間に、０．０５≦Ｔ／Ｈ≦０．５の関係が成立するような構成とした。   In order to achieve such an object, the pressure-sensitive resistance member of the present invention is a pressure-sensitive resistance member made of an elastic member containing conductive particles, and is located on a flat base and one surface of the base. A convex part, and the convex part has a polygonal bottom shape on the base side, the top part of the convex part is a flat surface, and the area of the top part is smaller than the area of the bottom part, A relationship of 0.05 ≦ T / H ≦ 0.5 is established between the thickness T of the base and the height (the distance from the bottom to the top in the direction perpendicular to the surface of the base) H. The configuration is as follows.

本発明の他の態様として、前記凸部の底部の長さをＢとしたときに、前記凸部の高さＨとの間に、１≦Ｂ／Ｈ≦５の関係が成立し、かつ、前記凸部の頂部の長さをＵとしたときに、前記凸部の底部の長さＢとの間に、２≦Ｂ／Ｕ≦２５の関係が成立するような構成とした。
本発明の他の態様として、前記弾性部材のＤｕｒｏ−Ａ硬度が１５度〜６０度の範囲であるような構成とした。
本発明の他の態様として、前記弾性部材は、シリコーンゴムを含有するような構成とした。
本発明の感圧センサは、上述のいずれかの感圧抵抗部材と、該感圧抵抗部材を両側から挟むように配置された一対の電極と、該一対の電極を両側から挟むように配置された電気絶縁性フィルムと、を備えるような構成とした。 As another aspect of the present invention, when the length of the bottom of the convex portion is B, a relationship of 1 ≦ B / H ≦ 5 is established with the height H of the convex portion, and When the length of the top part of the convex part is U, the relation of 2 ≦ B / U ≦ 25 is established with the length B of the bottom part of the convex part.
As another aspect of the present invention, the elastic member has a Duro-A hardness in a range of 15 degrees to 60 degrees.
As another aspect of the present invention, the elastic member is configured to contain silicone rubber.
The pressure-sensitive sensor of the present invention is arranged such that any one of the pressure-sensitive resistance members described above, a pair of electrodes arranged so as to sandwich the pressure-sensitive resistance member from both sides, and a pair of electrodes sandwiched from both sides. And an electrically insulating film.

本発明の感圧抵抗部材は、平板状の基部の一方の面に位置する凸部の底部形状が多角形であり、凸部の頂部が平坦面であり、かつ、頂部の面積は底部の面積よりも小さく、さらに、基部の厚みＴと凸部の高さＨとの間に所定の関係が成立するので、広い範囲の圧力変化に対して安定した圧力−電気抵抗変換を発現することができる。
また、本発明の感圧センサは、微小な印加圧力から大きな印加圧力まで安定して検出することができる。 In the pressure-sensitive resistance member of the present invention, the bottom shape of the convex portion located on one surface of the flat base portion is polygonal, the top portion of the convex portion is a flat surface, and the area of the top portion is the area of the bottom portion. In addition, since a predetermined relationship is established between the thickness T of the base and the height H of the convex portion, stable pressure-electric resistance conversion can be expressed with respect to a wide range of pressure changes. .
In addition, the pressure sensor of the present invention can stably detect from a very small applied pressure to a large applied pressure.

本発明の感圧抵抗部材の一実施形態を示す平面図である。It is a top view which shows one Embodiment of the pressure sensitive resistance member of this invention. 図１に示される感圧抵抗部材のＩ−Ｉ線における縦断面図である。It is a longitudinal cross-sectional view in the II line of the pressure sensitive resistance member shown by FIG. 本発明の感圧抵抗部材を構成する凸部の底部の長さを説明するための図である。It is a figure for demonstrating the length of the bottom part of the convex part which comprises the pressure-sensitive resistance member of this invention. 本発明の感圧抵抗部材の他の実施形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows other embodiment of the pressure sensitive resistance member of this invention. 本発明の感圧センサの一実施形態を示す縦断面図である。It is a longitudinal cross-sectional view which shows one Embodiment of the pressure sensor of this invention.

以下、本発明の実施の形態について図面を参照して説明する。
［感圧抵抗部材］
図１は本発明の感圧抵抗部材の一例を示す平面図であり、図２は図１に示される感圧抵抗部材のＩ−Ｉ線における縦断面図である。図１および図２において、本発明の感圧抵抗部材１１は、導電性粒子を含有する弾性部材からなり、平板状の基部１２と、この基部１２の一方の面１２ａ（図２に鎖線で示される面）に位置する凸部１３と、を備えている。凸部１３は、基部１２側の底部１３Ｂ（図２に鎖線で示される部位）の形状が多角形であり、また、凸部１３の頂部１３Ａは平坦面であるとともに、この頂部１３Ａの面積は、凸部１３の底部１３Ｂの面積よりも小さいものである。また、基部１２の厚みＴと、凸部１３の高さ（基部１２の面１２ａに垂直な方向における底部１３Ｂから頂部１３Ａまでの距離）Ｈとの間には、０．０５≦Ｔ／Ｈ≦０．５の関係が成立する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Pressure-sensitive resistance member]
FIG. 1 is a plan view showing an example of the pressure-sensitive resistance member of the present invention, and FIG. 2 is a longitudinal sectional view taken along line II of the pressure-sensitive resistance member shown in FIG. 1 and 2, a pressure-sensitive resistance member 11 of the present invention is made of an elastic member containing conductive particles, and has a flat base 12 and one surface 12a of the base 12 (shown by a chain line in FIG. 2). And a convex portion 13 located on the surface. The convex part 13 has a polygonal shape at the bottom part 13B on the base part 12 side (part indicated by a chain line in FIG. 2), and the top part 13A of the convex part 13 is a flat surface, and the area of the top part 13A is The area of the bottom portion 13B of the convex portion 13 is smaller. Further, between the thickness T of the base portion 12 and the height of the convex portion 13 (distance from the bottom portion 13B to the top portion 13A in the direction perpendicular to the surface 12a of the base portion 12) H, 0.05 ≦ T / H ≦ A relationship of 0.5 is established.

本発明の感圧抵抗部材１１を構成する弾性部材は、ゴム材料に導電性粒子を含有させたものである。ゴム材料としては、例えば、シリコーンゴム、フッ素ゴム、ブチルゴム等を挙げることができる。また、導電性粒子としては、例えば、カーボンブラック、カーボンナノチューブ等の導電性カーボン等を挙げることができる。このような弾性部材における導電性粒子の含有量は、例えば、０．５〜１０重量％、好ましくは１〜５重量％の範囲で設定することができる。導電性粒子の含有量が上記の範囲から外れると、広い範囲の圧力変化に対して安定した圧力−電気抵抗変換が得られず好ましくない。   The elastic member constituting the pressure-sensitive resistance member 11 of the present invention is a rubber material containing conductive particles. Examples of the rubber material include silicone rubber, fluorine rubber, and butyl rubber. Examples of the conductive particles include conductive carbon such as carbon black and carbon nanotube. The content of the conductive particles in such an elastic member can be set, for example, in the range of 0.5 to 10% by weight, preferably 1 to 5% by weight. When the content of the conductive particles is out of the above range, it is not preferable because stable pressure-electric resistance conversion cannot be obtained with respect to a wide range of pressure changes.

また、上記の弾性部材のＤｕｒｏ−Ａ硬度は、１５度〜６０度の範囲、好ましくは１５〜３０の範囲の範囲とすることができる。弾性部材のＤｕｒｏ−Ａ硬度が１５度未満であると、弾性部材の導電性が低くなり、通電しない、あるいは、荷重変化に対する追従性が悪くなり、感圧抵抗部材に供しえないものとなる。また、弾性部材のＤｕｒｏ−Ａ硬度が６０度を超えると、広い範囲の圧力変化に対して安定した圧力−電気抵抗変換が得られず好ましくない。   The Duro-A hardness of the elastic member can be in the range of 15 to 60 degrees, preferably in the range of 15 to 30. If the Duro-A hardness of the elastic member is less than 15 degrees, the elasticity of the elastic member is low, and the elastic member is not energized, or the followability with respect to a load change is deteriorated, so that it cannot be used as a pressure-sensitive resistance member. Further, if the Duro-A hardness of the elastic member exceeds 60 degrees, it is not preferable because stable pressure-electric resistance conversion cannot be obtained with respect to a wide range of pressure changes.

上述のように、基部１２の厚みＴと、凸部１３の高さＨとの間には、０．０５≦Ｔ／Ｈ≦０．５の関係が成立する。このＴ／Ｈの値が０．０５未満であると、感圧抵抗部材１１の構造的安定性が損なわれることがあり、一方、Ｔ／Ｈの値が０．５を超えると、印加される圧力が大きくなったときに安定した圧力−電気抵抗変換が得られず好ましくない。また、基部１２の厚みＴ、凸部１３の高さＨは、感圧抵抗部材１１に要求される圧力−電気抵抗変換の範囲によって、上記の弾性部材のＤｕｒｏ−Ａ硬度を考慮して設定することができる。
感圧抵抗部材１１を構成する基部１２の面１２ｂは、例えば、平均表面粗さＲａが１．６μｍ以下であるような面とすることができる。尚、本発明における平均表面粗さＲａの測定は、 東京精密（株）製 ＳＵＲＦＣＯＭ ２８００Ｅによって行うものとする。 As described above, a relationship of 0.05 ≦ T / H ≦ 0.5 is established between the thickness T of the base portion 12 and the height H of the convex portion 13. When the T / H value is less than 0.05, the structural stability of the pressure-sensitive resistance member 11 may be impaired. On the other hand, when the T / H value exceeds 0.5, it is applied. When the pressure increases, a stable pressure-electric resistance conversion cannot be obtained, which is not preferable. Further, the thickness T of the base portion 12 and the height H of the convex portion 13 are set in consideration of the Duro-A hardness of the elastic member according to the range of pressure-electric resistance conversion required for the pressure-sensitive resistance member 11. be able to.
The surface 12b of the base 12 constituting the pressure-sensitive resistance member 11 can be a surface having an average surface roughness Ra of 1.6 μm or less, for example. In addition, the measurement of average surface roughness Ra in this invention shall be performed by Tokyo Seimitsu Co., Ltd. SURFCOM 2800E.

感圧抵抗部材１１を構成する凸部１３の底部１３Ｂの形状は、多角形であり、図示例では凸部１３が截頭四角錐であり、底部１３Ｂは正方形であるが、三角形、あるいは、五角形以上の多角形であってもよい。また、このような多角形は、正多角形に限定されるものではない。また、凸部１３の頂部１３Ａは平坦面であり、この場合の平坦面とは、電極との接触抵抗を小さくするために、平均表面粗さＲａが１．６μｍ以下であるような面を意味する。さらに、凸部１３の頂部１３Ａの面積は、凸部１３の底部１３Ｂの面積よりも小さいものである。これにより、微小な印加圧力に対して凸部１３の頂部１３Ａ近傍が変形し、印加される圧力が大きくなるに従って、変形が凸部１３の底部１３Ｂ寄りに広がり、印加圧力に応じた電気抵抗変化を得ることができる。   The shape of the bottom portion 13B of the convex portion 13 constituting the pressure-sensitive resistance member 11 is a polygon, and in the illustrated example, the convex portion 13 is a truncated quadrangular pyramid and the bottom portion 13B is a square, but a triangle or a pentagon. The above polygon may be sufficient. Moreover, such a polygon is not limited to a regular polygon. Further, the top portion 13A of the convex portion 13 is a flat surface. In this case, the flat surface means a surface having an average surface roughness Ra of 1.6 μm or less in order to reduce the contact resistance with the electrode. To do. Further, the area of the top portion 13A of the convex portion 13 is smaller than the area of the bottom portion 13B of the convex portion 13. Accordingly, the vicinity of the top portion 13A of the convex portion 13 is deformed with respect to a minute applied pressure, and as the applied pressure increases, the deformation spreads toward the bottom portion 13B of the convex portion 13, and the electric resistance change according to the applied pressure Can be obtained.

また、本発明では、感圧抵抗部材１１を構成する凸部１３の底部１３Ｂの長さをＢとしたときに、凸部１３の高さＨとの間に、１≦Ｂ／Ｈ≦５の関係が成立することが望ましい。Ｂ／Ｈの値が１未満であると、凸部１３に圧力が印加された際に、座屈変形を生じるおそれがあり、また、Ｂ／Ｈの値が５を超えると、広い範囲の圧力変化に対して安定した圧力−電気抵抗変換が得られず好ましくない。ここで、底部１３Ｂの長さＢは、凸部１３の底部１３Ｂの多角形の一辺に平行に測定した長さの内、最大となる長さである。例えば、図１に示されるように、凸部１３の底部１３Ｂが正方形の場合には、図３（Ａ）に矢印で示される長さであり、正方形の一辺の長さと同じである。また、凸部１３の底部１３Ｂが正三角形の場合には、図３（Ｂ）に矢印で示される長さであり、正三角形の一辺の長さと同じである。また、凸部１３の底部１３Ｂが正五角形、正六角形の場合には、それぞれ図３（Ｃ）、図３（Ｄ）に矢印で示される長さとなる。さらに、凸部１３の底部１３Ｂの多角形状が正多角形ではない場合も同様であり、各辺に平行に測定した長さの内、最大となる長さである。   In the present invention, when the length of the bottom portion 13B of the convex portion 13 constituting the pressure-sensitive resistance member 11 is B, the height H of the convex portion 13 is 1 ≦ B / H ≦ 5. It is desirable that the relationship is established. If the B / H value is less than 1, there is a risk of buckling deformation when a pressure is applied to the convex portion 13, and if the B / H value exceeds 5, a wide range of pressures may be generated. A stable pressure-electric resistance conversion with respect to the change cannot be obtained, which is not preferable. Here, the length B of the bottom portion 13B is the maximum length among the lengths measured in parallel to one side of the polygon of the bottom portion 13B of the convex portion 13. For example, as shown in FIG. 1, when the bottom portion 13B of the convex portion 13 is a square, the length is indicated by an arrow in FIG. 3A, which is the same as the length of one side of the square. When the bottom 13B of the convex portion 13 is an equilateral triangle, the length is indicated by an arrow in FIG. 3B and is the same as the length of one side of the equilateral triangle. When the bottom 13B of the convex portion 13 is a regular pentagon or a regular hexagon, the lengths are indicated by arrows in FIGS. 3C and 3D, respectively. The same applies to the case where the polygonal shape of the bottom 13B of the convex portion 13 is not a regular polygon, and is the maximum length among the lengths measured in parallel to each side.

また、凸部１３の頂部１３Ａの長さをＵとしたときに、凸部１３の底部１３Ｂの長さＢとの間に、２≦Ｂ／Ｕ≦２５の関係が成立することが望ましい。Ｂ／Ｕの値が２未満であると、印加される圧力が大きくなったときに安定した圧力−電気抵抗変換が得られないおそれがあり、また、Ｂ／Ｕの値が２５を超えると、印加される圧力に対して安定した変形が得られず好ましくない。尚、凸部１３の頂部１３Ａの長さＵは、上述の底部１３Ｂの長さＢと同様に、頂部１３Ａの多角形の一辺に平行に測定した長さの内、最大となる長さである。   Further, when the length of the top portion 13A of the convex portion 13 is U, it is desirable that a relationship of 2 ≦ B / U ≦ 25 is established between the length B of the bottom portion 13B of the convex portion 13. If the value of B / U is less than 2, stable pressure-electric resistance conversion may not be obtained when the applied pressure increases, and if the value of B / U exceeds 25, It is not preferable because a stable deformation cannot be obtained with respect to the applied pressure. The length U of the top portion 13A of the convex portion 13 is the maximum length among the lengths measured in parallel to one side of the polygon of the top portion 13A, like the length B of the bottom portion 13B described above. .

上述の感圧抵抗部材の実施形態は例示であり、本発明はこれらの実施形態に限定されるものではない。例えば、上述の感圧抵抗部材の実施形態では、複数の凸部１３が、その底部１３Ｂを接するように基部１２の面１２ａ上に配設されているが、図４に示すように、凸部１３間に間隙が存在し、基部１２の面１２ａが露出するものであってもよい。   The embodiments of the pressure-sensitive resistance member described above are examples, and the present invention is not limited to these embodiments. For example, in the above-described embodiment of the pressure-sensitive resistance member, the plurality of convex portions 13 are arranged on the surface 12a of the base portion 12 so as to contact the bottom portion 13B, but as shown in FIG. There may be a gap between 13 and the surface 12a of the base 12 exposed.

［感圧センサ］
図５は、本発明の感圧センサの一実施形態を示す断面図である。図５において、感圧センサ２１は、上述の本発明の感圧抵抗部材１１を使用した例であり、感圧抵抗部材１１を両側から挟むように配置された一対の電極２２，２３と、この一対の電極を両側から挟むように配置された電気絶縁性フィルム２５，２６と、を備えている。
電極２２，２３は、従来公知の電極材料を使用することができ、例えば、銅、銀、金、ステンレス鋼等、あるいは、これらの合金等を挙げることができる。 [Pressure-sensitive sensor]
FIG. 5 is a cross-sectional view showing an embodiment of the pressure-sensitive sensor of the present invention. In FIG. 5, a pressure-sensitive sensor 21 is an example using the above-described pressure-sensitive resistance member 11 of the present invention, and a pair of electrodes 22 and 23 arranged so as to sandwich the pressure-sensitive resistance member 11 from both sides, And electrically insulating films 25 and 26 arranged to sandwich the pair of electrodes from both sides.
Conventionally known electrode materials can be used for the electrodes 22 and 23, and examples thereof include copper, silver, gold, stainless steel, and alloys thereof.

電極２２，２３は、外部から印加される圧力を感圧抵抗部材１１に伝えられるような厚みがあればよく、電極の材質、面積等を考慮して適宜設定することができ、例えば、０．１〜５ｍｍ程度の範囲で設定することができる。
また、電極２２，２３の形状、大きさ等は任意に設定することができ、例えば、電極２２，２３共に平板形状であってもよく、あるいは、一方がストライプ形状であってもよい。また、電極２２，２３共にストライプ形状であり、かつ、ストライプの軸方向が相互に直交するようなもの等であってよい。 The electrodes 22 and 23 only need to be thick enough to transmit pressure applied from the outside to the pressure-sensitive resistance member 11, and can be appropriately set in consideration of the material, area, etc. of the electrode. It can set in the range of about 1-5 mm.
In addition, the shape, size, and the like of the electrodes 22 and 23 can be arbitrarily set. For example, both the electrodes 22 and 23 may have a flat plate shape, or one of them may have a stripe shape. Further, both the electrodes 22 and 23 may have a stripe shape, and the stripe axial directions may be orthogonal to each other.

感圧センサ２１を構成する電気絶縁性フィルム２５，２６は、電極２２，２３の保護フィルムの機能をもつものであり、ポリイミド、ポリエーテルイミド、ポリアミド、ポリエチレンテレフタレート、ポリエステル、ポリエチレン等の樹脂フィルムを使用することができる。このような電気絶縁性フィルム２５，２６の厚みは、外部から印加される圧力を感圧抵抗部材１１に伝えられるような厚みがあればよく、例えば、５０〜２００μｍ程度の範囲で設定することができる。
上述の実施形態は例示であり、本発明はこれらの実施形態に限定されるものではない。 The electrically insulating films 25 and 26 constituting the pressure sensor 21 have a function of a protective film for the electrodes 22 and 23, and are made of resin films such as polyimide, polyetherimide, polyamide, polyethylene terephthalate, polyester, and polyethylene. Can be used. The thickness of the electrical insulating films 25 and 26 may be set so that the pressure applied from the outside can be transmitted to the pressure-sensitive resistance member 11, and may be set, for example, in the range of about 50 to 200 μm. it can.
The above-described embodiments are examples, and the present invention is not limited to these embodiments.

次に、具体的な実施例を示して本発明を更に詳細に説明する。
［実施例１］
導電性粒子として導電性カーボンを含有する導電性シリコーンゴムポリマー（モメンティブ・パフォーマンス・マテリアルズ・ジャパン社製 ＸＥ−２３−Ａ６００１）１００重量部と、架橋剤（モメンティブ・パフォーマンス・マテリアルズ・ジャパン社製 ＴＣ−８）１．８重量部をオープンロールで混練し、ゴムコンパウンドを得た。得られたゴムコンパウンドを所定の金型に充填し、１７０℃で１０分間プレス架橋することにより、導電性粒子を含有する弾性部材からなり、図１および図２に示されるような、截頭四角錐である凸部を複数備えた感圧抵抗部材を得た。 Next, the present invention will be described in more detail by showing specific examples.
[Example 1]
Conductive silicone rubber polymer containing conductive carbon as conductive particles (XE-23-A6001 manufactured by Momentive Performance Materials Japan) 100 parts by weight and a crosslinking agent (Momentive Performance Materials Japan manufactured) TC-8) 1.8 parts by weight were kneaded with an open roll to obtain a rubber compound. The obtained rubber compound is filled in a predetermined mold and press-crosslinked at 170 ° C. for 10 minutes to form an elastic member containing conductive particles. As shown in FIG. 1 and FIG. A pressure-sensitive resistance member having a plurality of convex portions that are pyramids was obtained.

この感圧抵抗部材は、基部の厚みＴが０．５ｍｍ、凸部の高さＨが１ｍｍ、比Ｔ／Ｈが０．５であり、凸部の底部の長さＢと凸部の高さＨとの比Ｂ／Ｈが１であり、凸部の底部の長さＢと凸部の頂部の長さＵとの比Ｂ／Ｕが１０であった。また、この感圧抵抗部材を構成する弾性部材のＤｕｒｏ−Ａ硬度は、 高分子計器（株）製 アスカーゴム硬度計型式Ａで測定した結果、１５度であった。   This pressure-sensitive resistance member has a base portion thickness T of 0.5 mm, a convex portion height H of 1 mm, and a ratio T / H of 0.5, and the convex portion bottom length B and convex portion height. The ratio B / H with H was 1, and the ratio B / U between the length B of the bottom of the convex portion and the length U of the top of the convex portion was 10. Further, the Duro-A hardness of the elastic member constituting the pressure-sensitive resistance member was 15 degrees as a result of measurement with an Asker rubber hardness meter model A manufactured by Kobunshi Keiki Co., Ltd.

［実施例２］
導電性粒子として導電性カーボンを含有する導電性シリコーンゴムポリマー（モメンティブ・パフォーマンス・マテリアルズ・ジャパン社製 ＸＥ−２３−Ａ２６３７）１００重量部と、架橋剤（モメンティブ・パフォーマンス・マテリアルズ・ジャパン社製 ＴＣ−８）２．５重量部をオープンロールで混練し、ゴムコンパウンドを得た。得られたゴムコンパウンドを用いて、実施例１と同様にして、感圧抵抗部材を得た。
この感圧抵抗部材における比Ｔ／Ｈ、比Ｂ／Ｈ、比Ｂ／Ｕは、実施例１の感圧抵抗部材における比Ｔ／Ｈ、比Ｂ／Ｈ、比Ｂ／Ｕと同じであり、Ｄｕｒｏ−Ａ硬度は５０度であった。 [Example 2]
100 parts by weight of conductive silicone rubber polymer containing conductive carbon as conductive particles (XE-23-A2637 manufactured by Momentive Performance Materials Japan) and a crosslinking agent (produced by Momentive Performance Materials Japan) TC-8) 2.5 parts by weight were kneaded with an open roll to obtain a rubber compound. Using the obtained rubber compound, a pressure-sensitive resistance member was obtained in the same manner as in Example 1.
The ratio T / H, ratio B / H, and ratio B / U in this pressure-sensitive resistance member are the same as the ratio T / H, ratio B / H, and ratio B / U in the pressure-sensitive resistance member of Example 1, The Duro-A hardness was 50 degrees.

［比較例１］
実施例１と同様にしてゴムコンパウンドを得た。得られたゴムコンパウンドを平板金型間で１７０℃で１０分間プレス架橋することにより、厚みが０．５ｍｍで両面が平坦な感圧抵抗部材を得た。この感圧抵抗部材のＤｕｒｏ−Ａ硬度は１５度であった。 [Comparative Example 1]
A rubber compound was obtained in the same manner as in Example 1. The obtained rubber compound was press-crosslinked between the flat plate molds at 170 ° C. for 10 minutes to obtain a pressure-sensitive resistance member having a thickness of 0.5 mm and flat on both sides. The pressure-sensitive resistance member had a Duro-A hardness of 15 degrees.

［比較例２］
実施例１と同様にしてゴムコンパウンドを得た。得られたゴムコンパウンドの両面を、細かい布地のフッ素樹脂含浸クロス（中興化成工業（株）製 ＦＧＦ−４００−１０）で押圧し、１７０℃で１０分間プレス架橋することにより、両面に凸形状を有する感圧抵抗部材を得た。
この感圧抵抗部材は、基部の厚みＴが０．２ｍｍ、凸部の高さＨが０．０５ｍｍであり、比Ｔ／Ｈは４、比Ｂ／Ｈは３０、比Ｂ／Ｕは２であり、Ｄｕｒｏ−Ａ硬度は１５度であった。 [Comparative Example 2]
A rubber compound was obtained in the same manner as in Example 1. Both sides of the obtained rubber compound are pressed with a fine cloth fluororesin impregnated cloth (manufactured by Chuko Kasei Kogyo Co., Ltd., FGF-400-10) and press-crosslinked at 170 ° C. for 10 minutes, thereby forming convex shapes on both sides. A pressure sensitive resistance member was obtained.
This pressure sensitive resistance member has a base thickness T of 0.2 mm and a convex height H of 0.05 mm, a ratio T / H of 4, a ratio B / H of 30, and a ratio B / U of 2. Yes, the Duro-A hardness was 15 degrees.

［比較例３］
実施例１と同様にしてゴムコンパウンドを得た。得られたゴムコンパウンドの両面を、粗い布地のフッ素樹脂含浸クロス（中興化成工業（株）製 ＦＧＦ−５００−３５）で押圧し、１７０℃で１０分間プレス架橋することにより、両面に凸形状を有する感圧抵抗部材を得た。
この感圧抵抗部材は、基部の厚みＴが０．１ｍｍ、凸部の高さＨが０．１５ｍｍであり、比Ｔ／Ｈは０．７、比Ｂ／Ｈは１３、比Ｂ／Ｕは２であり、Ｄｕｒｏ−Ａ硬度は１５度であった。 [Comparative Example 3]
A rubber compound was obtained in the same manner as in Example 1. Both sides of the resulting rubber compound are pressed with a coarse cloth fluororesin-impregnated cloth (FGF-500-35 manufactured by Chuko Kasei Kogyo Co., Ltd.) and press-crosslinked at 170 ° C. for 10 minutes, thereby forming convex shapes on both sides. A pressure sensitive resistance member was obtained.
This pressure-sensitive resistance member has a base portion thickness T of 0.1 mm and a convex portion height H of 0.15 mm, a ratio T / H of 0.7, a ratio B / H of 13, and a ratio B / U of 2 and the Duro-A hardness was 15 degrees.

［感圧センサの作製］
上述のように作製した感圧抵抗部材（実施例１、２および比較例１〜３）を用いて、感圧センサを作製した。すなわち、感圧抵抗部材を縦１０ｍｍ、横２０ｍｍの方形状とし、この感圧抵抗部材の両面に縦８０ｍｍ、横８０ｍｍの電極板（金めっき処理を施した厚み３ｍｍの銅板）を配して挟持し、さらに、電極板を挟むように電気絶縁性フィルム（三井化学東セロ（株）製 セパレーター ＳＰ−ＰＥＴ）を配設した。 [Production of pressure-sensitive sensor]
A pressure-sensitive sensor was manufactured using the pressure-sensitive resistance member (Examples 1 and 2 and Comparative Examples 1 to 3) manufactured as described above. That is, the pressure-sensitive resistance member has a rectangular shape with a length of 10 mm and a width of 20 mm, and an electrode plate (a copper plate with a thickness of 3 mm that has been subjected to gold plating) is placed on both sides of the pressure-sensitive resistance member. Further, an electrically insulating film (Separator SP-PET manufactured by Mitsui Chemicals, Inc.) was disposed so as to sandwich the electrode plate.

このように作製した感圧センサ（実施例１、２および比較例１〜３）に対して、荷重時における抵抗値変化率を測定した。すなわち、感圧センサをタッキング試験機（ヤナコ（株）製 ＴＡＣ−II）にて印加荷重５〜４００ｇｆの範囲で押圧し、抵抗値変化をデジタルマルチメーター（三和電気計器（株）製 ＰＣ５００ａ）を用いて測定した。使用した押圧部材は、押圧面の面積（荷重印加面積）が０．５ｃｍ2である円柱形状であり、この押圧部材のストローク率に対する抵抗値変化率を下記の表１に示した。尚、押圧部材のストローク率は、印加荷重が４００ｇｆのときのストローク量を１００％としたものである。 The resistance value change rate at the time of load was measured with respect to the pressure sensor (Examples 1 and 2 and Comparative Examples 1 to 3) produced in this way. That is, the pressure sensor is pressed with a tacking tester (TAC-II, manufactured by Yanaco Co., Ltd.) in the range of an applied load of 5 to 400 gf, and the resistance value change is digital multimeter (PC500a, manufactured by Sanwa Denki Keiki Co., Ltd.). It measured using. The used pressing member has a cylindrical shape with an area of the pressing surface (load application area) of 0.5 cm 2 , and the resistance value change rate with respect to the stroke rate of the pressing member is shown in Table 1 below. In addition, the stroke rate of the pressing member is obtained by setting the stroke amount when the applied load is 400 gf to 100%.

Figure 2012208038
Figure 2012208038

表１に示されるように、実施例１、２の感圧センサは、ストローク率１００％までの範囲で安定な抵抗値変化が得られた。
これに対して、比較例１〜３の感圧センサでは、ストローク率が小さい段階で抵抗値変化率が高い状態となり、印加荷重（ストローク率）が大きい範囲での安定した抵抗値変化が得られないものであった。 As shown in Table 1, in the pressure sensitive sensors of Examples 1 and 2, a stable change in resistance value was obtained in a range up to 100% stroke rate.
On the other hand, in the pressure sensitive sensors of Comparative Examples 1 to 3, the resistance value change rate is high when the stroke rate is small, and a stable resistance value change in a range where the applied load (stroke rate) is large is obtained. It was not.

本発明は、感圧センサ等の圧力−電気抵抗変換を利用する技術分野において有用である。   The present invention is useful in the technical field using pressure-electric resistance conversion such as a pressure-sensitive sensor.

１１…感圧抵抗部材
１２…基部
１３…凸部
１３Ａ…頂部
１３Ｂ…底部
２１…感圧センサ
２２，２３…電極
２５，２６…電気絶縁性フィルム DESCRIPTION OF SYMBOLS 11 ... Pressure-sensitive resistance member 12 ... Base part 13 ... Convex part 13A ... Top part 13B ... Bottom part 21 ... Pressure-sensitive sensor 22, 23 ... Electrode 25, 26 ... Electrical insulation film

Claims (5)

導電性粒子を含有する弾性部材からなる感圧抵抗部材において、
平板状の基部と、該基部の一方の面に位置する凸部と、を備え、該凸部は前記基部側の底部の形状が多角形であり、前記凸部の頂部は平坦面であるとともに、該頂部の面積は前記底部の面積よりも小さく、前記基部の厚みＴと、前記凸部の高さ（基部の面に垂直な方向における底部から頂部までの距離）Ｈとの間に、０．０５≦Ｔ／Ｈ≦０．５の関係が成立することを特徴とする感圧抵抗部材。 In the pressure-sensitive resistance member comprising an elastic member containing conductive particles,
A flat base portion and a convex portion located on one surface of the base portion, and the convex portion has a polygonal shape at the bottom on the base side, and the top portion of the convex portion is a flat surface. The area of the top is smaller than the area of the bottom, and is 0 between the thickness T of the base and the height (distance from the bottom to the top in the direction perpendicular to the surface of the base) H. 0.05 ≦ T / H ≦ 0.5 is established, and the pressure sensitive resistance member. 前記凸部の底部の長さをＢとしたときに、前記凸部の高さＨとの間に、１≦Ｂ／Ｈ≦５の関係が成立し、かつ、前記凸部の頂部の長さをＵとしたときに、前記凸部の底部の長さＢとの間に、２≦Ｂ／Ｕ≦２５の関係が成立することを特徴とする請求項１に記載の感圧抵抗部材。   When the length of the bottom of the convex portion is B, a relationship of 1 ≦ B / H ≦ 5 is established with the height H of the convex portion, and the length of the top of the convex portion The pressure-sensitive resistance member according to claim 1, wherein a relationship of 2 ≦ B / U ≦ 25 is established between the height B and the length B of the bottom of the convex portion. 前記弾性部材のＤｕｒｏ−Ａ硬度が１５度〜６０度の範囲であることを特徴とする請求項１または請求項２に記載の感圧抵抗部材。   The pressure-sensitive resistance member according to claim 1 or 2, wherein the elastic member has a Duro-A hardness in a range of 15 degrees to 60 degrees. 前記弾性部材は、シリコーンゴムを含有することを特徴とする請求項１乃至請求項３のいずれかに記載の感圧抵抗部材。   The pressure-sensitive resistance member according to claim 1, wherein the elastic member contains silicone rubber. 請求項１乃至請求項４のいずれかに記載の感圧抵抗部材と、該感圧抵抗部材を両側から挟むように配置された一対の電極と、該一対の電極を両側から挟むように配置された電気絶縁性フィルムと、を備えることを特徴とした感圧センサ。   5. The pressure-sensitive resistance member according to claim 1, a pair of electrodes disposed so as to sandwich the pressure-sensitive resistance member from both sides, and a pair of electrodes disposed from both sides. A pressure-sensitive sensor comprising an electrically insulating film.
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US9806538B2 (en) 2012-12-27 2017-10-31 Murata Manufacturing Co., Ltd. Measurement circuit and measurement apparatus for wireless power transmission system
WO2018120384A1 (en) * 2016-12-28 2018-07-05 中国科学院深圳先进技术研究院 Pressure sensor and preparation method therefor
JP2020071072A (en) * 2018-10-29 2020-05-07 セイコーエプソン株式会社 Pressure sensitive sensor and hand

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JPS61271706A (en) * 1985-05-27 1986-12-02 藤倉ゴム工業株式会社 Pressure sensing conductive rubber
JPH03196416A (en) * 1989-09-29 1991-08-27 Soken Internatl:Kk Anisotropic conductive sheet
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9806538B2 (en) 2012-12-27 2017-10-31 Murata Manufacturing Co., Ltd. Measurement circuit and measurement apparatus for wireless power transmission system
WO2018120384A1 (en) * 2016-12-28 2018-07-05 中国科学院深圳先进技术研究院 Pressure sensor and preparation method therefor
JP2020071072A (en) * 2018-10-29 2020-05-07 セイコーエプソン株式会社 Pressure sensitive sensor and hand
JP7183700B2 (en) 2018-10-29 2022-12-06 セイコーエプソン株式会社 pressure sensor and hand

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