JP2012159749A - Bessel beam generator - Google Patents

Bessel beam generator Download PDF

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JP2012159749A
JP2012159749A JP2011020249A JP2011020249A JP2012159749A JP 2012159749 A JP2012159749 A JP 2012159749A JP 2011020249 A JP2011020249 A JP 2011020249A JP 2011020249 A JP2011020249 A JP 2011020249A JP 2012159749 A JP2012159749 A JP 2012159749A
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bessel beam
lens
generating element
optical fiber
beam generating
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Takeshi Sasamuro
岳 笹室
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Nichia Chemical Industries Ltd
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Nichia Chemical Industries Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a Bessel beam generator which facilitates an assembly adjustment work, is compact and is easy to handle.SOLUTION: The Bessel beam generator includes: a light source; an optical fiber for transmitting light emitted from the light source; a lens mounted on the emission end of the optical fiber; a Bessel beam generating element for generating a Bessel beam by the light emitted from the lens; and a ferrule in which the lens is inserted into the incident end thereof and the Bessel beam generating element is inserted into the emission end thereof.

Description

本発明は、非回折性ビームの一種であるベッセルビームに関し、特に、ベッセルビーム発生装置に関する。   The present invention relates to a Bessel beam which is a kind of non-diffractive beam, and more particularly to a Bessel beam generator.

近年は、加工用や顕微鏡用に有用な焦点深度の深いビームが求められており、これに適したビームを発生させる装置として、ベッセルビームを発生させるベッセルビーム発生装置が開発されている（特許文献１参照）。   In recent years, there has been a demand for a beam having a deep focal depth that is useful for processing and a microscope, and a Bessel beam generator that generates a Bessel beam has been developed as a device that generates a beam suitable for this (Patent Document) 1).

特開平７−２６１０２７号公報JP-A-7-261027

しかしながら、従来のベッセルビーム発生装置は、レーザ光源から出射されたレーザ光をコリメータレンズ等により平行光として空間伝播させ、これを円錐状のアキシコンプリズムに入射してベッセルビームを発生させるものであった。   However, the conventional Bessel beam generator is configured to propagate a laser beam emitted from a laser light source as parallel light by a collimator lens or the like and to enter a conical axicon prism to generate a Bessel beam. It was.

このため、従来のベッセルビーム発生装置では、平行光を得るためのコリメーション調整やレーザ光に対する各光学部品の光軸の調芯調整の難易度が高く、組立て調整作業が困難であった。   For this reason, in the conventional Bessel beam generator, the degree of difficulty of collimation adjustment for obtaining parallel light and alignment adjustment of the optical axis of each optical component with respect to laser light is high, and assembly adjustment work is difficult.

また、従来のベッセルビーム発生装置は、その形状が大きく、設置の自由度や加工時の取扱いの自由度が低かった。   Further, the conventional Bessel beam generator has a large shape, and has a low degree of freedom in installation and handling at the time of processing.

そこで、本発明は、組立て調整作業が容易で、コンパクトで取扱いが容易なベッセルビーム発生装置を提供することを目的とする。   Therefore, an object of the present invention is to provide a Bessel beam generator that is easy to assemble and adjust, is compact and easy to handle.

本発明によれば、上記課題は、次の手段により解決される。   According to the present invention, the above problem is solved by the following means.

本発明は、光源と、前記光源から出射した光を伝搬する光ファイバと、前記光ファイバの出射端に取り付けられたレンズと、前記レンズから出射した光でベッセルビームを発生させるベッセルビーム発生素子と、前記レンズが入射端に挿入され、前記ベッセルビーム発生素子が出射端に挿入されるフェルールと、を備えたことを特徴とするベッセルビーム発生装置である。   The present invention includes a light source, an optical fiber that propagates light emitted from the light source, a lens attached to an output end of the optical fiber, and a Bessel beam generating element that generates a Bessel beam with the light emitted from the lens. And a ferrule in which the lens is inserted into the entrance end and the Bessel beam generating element is inserted into the exit end.

また、本発明は、前記フェルールは、前記レンズの挿入を止める第１位置決め部と、前記ベッセルビーム発生素子の挿入を止める第２位置決め部と、を有する、ことを特徴とする上記のベッセルビーム発生装置である。   Further, in the present invention, the ferrule includes a first positioning portion that stops insertion of the lens, and a second positioning portion that stops insertion of the Bessel beam generating element. Device.

また、本発明は、前記第１位置決め部と前記第２位置決め部とは、前記レンズから前記ベッセルビーム発生素子へ平行に光が入射するようにして、前記レンズと前記ベッセルビーム発生素子の挿入を止める、ことを特徴とする上記のベッセルビーム発生装置である。   The first positioning unit and the second positioning unit may insert the lens and the Bessel beam generating element so that light enters the Bessel beam generating element in parallel from the lens. The Bessel beam generator described above, wherein the Bessel beam generator is stopped.

また、本発明は、前記レンズは、前記光ファイバと略同じ直径であり、前記光ファイバを伝搬する光を平行光にして出射する屈折率分布型のレンズである、ことを特徴とする上記のベッセルビーム発生装置である。   In the present invention, the lens is a refractive index distribution type lens having substantially the same diameter as the optical fiber and emitting the light propagating through the optical fiber as parallel light. It is a Bessel beam generator.

また、本発明は、前記ベッセルビーム発生素子は、入射端側のコアまたはコア及びクラッドが円錐形状とされた、入射した光をベッセルビームにして出射する光ファイバである、ことを特徴とする上記のベッセルビーム発生装置である。   Also, the present invention is characterized in that the Bessel beam generating element is an optical fiber that emits incident light as a Bessel beam in which the core or the core and the cladding on the incident end side have a conical shape. This is a Bessel beam generator.

また、本発明は、前記円錐形状は、９０度以上１５０度未満の頂角を有する、ことを特徴とする上記のベッセルビーム発生装置である。   Further, the present invention is the Bessel beam generator described above, wherein the conical shape has an apex angle of 90 degrees or more and less than 150 degrees.

本発明によれば、組立て調整作業が容易で、コンパクトで取扱いが容易なベッセルビーム発生装置を提供することができる。   According to the present invention, it is possible to provide a Bessel beam generator that is easy to assemble and adjust, compact, and easy to handle.

本発明の実施形態に係るベッセルビーム発生装置を説明する図であり、（ａ）はベッセルビーム発生装置の概略断面図であり、（ｂ）はフェルールの概略断面図である。It is a figure explaining the Bessel beam generating device concerning the embodiment of the present invention, (a) is a schematic sectional view of a Bessel beam generating device, and (b) is a schematic sectional view of a ferrule.

以下に、添付した図面を参照しつつ、本発明を実施するための形態について説明する。   EMBODIMENT OF THE INVENTION Below, the form for implementing this invention is demonstrated, referring attached drawing.

図１は、本発明の実施形態に係るベッセルビーム発生装置を説明する図であり、（ａ）はベッセルビーム発生装置の概略断面図であり、（ｂ）はフェルールの概略断面図である。   1A and 1B are diagrams for explaining a Bessel beam generator according to an embodiment of the present invention. FIG. 1A is a schematic cross-sectional view of the Bessel beam generator, and FIG. 1B is a schematic cross-sectional view of a ferrule.

図１に示すように、本発明の実施形態に係るベッセルビーム発生装置１０は、光源１１と、光ファイバ１２と、レンズ１３と、ベッセルビーム発生素子１４と、フェルール１５と、を備える。以下、順に説明する。   As shown in FIG. 1, a Bessel beam generation apparatus 10 according to an embodiment of the present invention includes a light source 11, an optical fiber 12, a lens 13, a Bessel beam generation element 14, and a ferrule 15. Hereinafter, it demonstrates in order.

［光源１１］
光源１１には、例えば、レーザ光源を用いる。 [Light source 11]
As the light source 11, for example, a laser light source is used.

［光ファイバ１２］
光ファイバ１２は、光源１１から出射した光を伝搬する。光ファイバ１２は、コア１２ａとクラッド１２ｂとを有している。 [Optical fiber 12]
The optical fiber 12 propagates light emitted from the light source 11. The optical fiber 12 has a core 12a and a clad 12b.

［レンズ１３］
レンズ１３は、例えば光ファイバ１２のクラッド１２ｂと略同じ直径のものとし、光ファイバ１２の出射端に融着などの方法により取り付ける。 [Lens 13]
For example, the lens 13 has substantially the same diameter as the clad 12b of the optical fiber 12, and is attached to the output end of the optical fiber 12 by a method such as fusion.

レンズ１３には、例えば、光ファイバ１２を伝搬する光を平行光にして出射するコリメータレンズを用いる。コリメータレンズとしては、グリンレンズなどの屈折率分布型のレンズを用いることができる。   As the lens 13, for example, a collimator lens that emits light propagating through the optical fiber 12 as parallel light is used. As the collimator lens, a gradient index lens such as a grin lens can be used.

［ベッセルビーム発生素子１４］
ベッセルビーム発生素子１４は、レンズ１３から出射した光でベッセルビームを発生させる。すなわち、ベッセルビーム発生素子１４は、レンズ１３から出射した光が入射した場合に、ベッセルビームを出射する。 [Bessel beam generating element 14]
The Bessel beam generating element 14 generates a Bessel beam with the light emitted from the lens 13. That is, the Bessel beam generating element 14 emits a Bessel beam when light emitted from the lens 13 is incident.

ベッセルビーム発生素子１４としては、例えば、入射端側のコア１４ａ（またはコア１４ａ及びクラッド１４ｂ）が円錐形状とされた、入射した光をベッセルビームにして出射する光ファイバ１４を用いる。なお、この円錐形状が９０度以上１５０度未満の頂角を有する光ファイバ１４は、入射した光を効率よくベッセルビームにして出射するため、本発明の実施形態に係るベッセルビーム発生素子１４として特に好ましく用いることができる。   As the Bessel beam generating element 14, for example, an optical fiber 14 in which the incident end side core 14 a (or the core 14 a and the clad 14 b) has a conical shape and emits incident light as a Bessel beam is used. Note that the optical fiber 14 having an apex angle with a conical shape of 90 degrees or more and less than 150 degrees emits incident light efficiently as a Bessel beam, and thus is particularly suitable as the Bessel beam generation element 14 according to the embodiment of the present invention. It can be preferably used.

［フェルール１５］
フェルール１５は、レンズ１３が入射端に挿入され、ベッセルビーム発生素子１４が出射端に挿入される。 [Ferrule 15]
In the ferrule 15, the lens 13 is inserted into the incident end, and the Bessel beam generating element 14 is inserted into the outgoing end.

フェルール１５は、レンズ１３の挿入を止める第１位置決め部１５ａ、１５ｂと、ベッセルビーム発生素子１４の挿入を止める第２位置決め部１５ｃ、１５ｄと、を有している。   The ferrule 15 includes first positioning portions 15a and 15b for stopping the insertion of the lens 13, and second positioning portions 15c and 15d for stopping the insertion of the Bessel beam generating element 14.

第１位置決め部１５ａ、１５ｂと第２位置決め部１５ｃ、１５ｄとは、レンズ１３からベッセルビーム発生素子１４へ平行に光が入射するようにして、レンズ１３とベッセルビーム発生素子１４の挿入を止める。   The first positioning portions 15a and 15b and the second positioning portions 15c and 15d stop the insertion of the lens 13 and the Bessel beam generating element 14 so that light enters the Bessel beam generating element 14 from the lens 13 in parallel.

より好ましい例では、第１位置決め部１５ａ、１５ｂと第２位置決め部１５ｃ、１５ｄとは、レンズ１３からベッセルビーム発生素子１４へ入射する光の平行度が最大となるようにして、レンズ１３とベッセルビーム発生素子１４の挿入を止める。   In a more preferred example, the first positioning portions 15a and 15b and the second positioning portions 15c and 15d are arranged so that the parallelism of light incident on the Bessel beam generating element 14 from the lens 13 is maximized. The insertion of the beam generating element 14 is stopped.

なお、第１位置決め部１５ａ、１５ｂや第２位置決め部１５ｃ、１５ｄは、レンズ１３やベッセルビーム発生素子１４の形状に合わせた形状にすることが好ましい。   The first positioning portions 15a and 15b and the second positioning portions 15c and 15d are preferably shaped according to the shape of the lens 13 and the Bessel beam generating element 14.

例えば、レンズ１３を光ファイバ１２の出射端に挿入する場合は、第１位置決め部１５ａ、１５ｂの形状を図１に示すような下がり壁とし、この下がり壁に光ファイバ１２の出射端を押し当ててレンズ１３の挿入を止め、フェルール内におけるレンズ１３の位置決めを行うことが好ましい。   For example, when the lens 13 is inserted into the exit end of the optical fiber 12, the first positioning portions 15a and 15b are shaped as a falling wall as shown in FIG. 1, and the exit end of the optical fiber 12 is pressed against the falling wall. It is preferable to stop the insertion of the lens 13 and position the lens 13 in the ferrule.

また、例えば、ベッセルビーム発生素子１４の入射端側の形状を円錐形状にする場合は、第２位置決め部１５ｃ、１５ｄの形状を図１に示すような円錐形状の壁とし、この円錐形状の壁にベッセルビーム発生素子１４を押し当ててベッセルビーム発生素子１４の挿入を止め、フェルール内におけるベッセルビーム発生素子１４の位置決めを行うことが好ましい。   For example, when the shape of the incident end side of the Bessel beam generating element 14 is conical, the shape of the second positioning portions 15c and 15d is a conical wall as shown in FIG. It is preferable to position the vessel beam generating element 14 in the ferrule by pressing the vessel beam generating element 14 to stop insertion of the vessel beam generating element 14.

フェルール１５は、レンズ１３とベッセルビーム発生素子１４とを挿入した場合に、これらと嵌合する形状であることが好ましい。このようにすれば、レンズ１３とベッセルビーム発生素子１４とをフェルール内において容易に位置決めすることができる。   The ferrule 15 preferably has a shape that fits when the lens 13 and the Bessel beam generating element 14 are inserted. In this way, the lens 13 and the Bessel beam generating element 14 can be easily positioned within the ferrule.

なお、レンズ１３とベッセルビーム発生素子１４とは、フェルール１５に挿入された後、接着剤などでフェルール１５に固定することができる。   The lens 13 and the Bessel beam generating element 14 can be fixed to the ferrule 15 with an adhesive or the like after being inserted into the ferrule 15.

以上説明した本発明の実施形態に係るベッセルビーム発生装置１０によれば、レンズ１３とベッセルビーム発生素子１４とをフェルール１５に挿入することにより、レンズ１３とベッセルビーム発生素子１４とを予め定めた位置関係でフェルール内に配置できるため、コリメーション調整や光軸の調芯調整が容易になる。   According to the vessel beam generating apparatus 10 according to the embodiment of the present invention described above, the lens 13 and the vessel beam generating element 14 are determined in advance by inserting the lens 13 and the vessel beam generating element 14 into the ferrule 15. Since it can be arranged in a ferrule in a positional relationship, collimation adjustment and optical axis alignment adjustment are facilitated.

また、本発明の実施形態に係るベッセルビーム発生装置１０は、フェルール１５を用いて構成されているため、その形状が小さく、設置の自由度や加工時の取扱いの自由度が高い。   Further, since the Bessel beam generator 10 according to the embodiment of the present invention is configured using the ferrule 15, the shape thereof is small, and the degree of freedom of installation and the degree of freedom of handling during processing are high.

したがって、本発明の実施形態に係るベッセルビーム発生装置１０によれば、組立て調整作業が容易で、コンパクトで取扱いが容易なベッセルビーム発生装置を提供することができる。   Therefore, according to the Bessel beam generator 10 according to the embodiment of the present invention, it is possible to provide a Bessel beam generator that is easy to assemble and adjust, compact, and easy to handle.

以上、本発明の実施形態について説明したが、これらの説明は、本発明の一例に関するものであり、本発明は、これらの説明によって何ら限定されるものではない。   As mentioned above, although embodiment of this invention was described, these description is related with an example of this invention, and this invention is not limited at all by these description.

１０ ベッセルビーム発生装置
１１ 光源
１２ 光ファイバ
１２ａ コア
１２ｂ クラッド
１３ レンズ
１４ 光ファイバ（ベッセルビーム発生素子）
１４ａ コア
１４ｂ クラッド
１５ フェルール
１５ａ 第１位置決め部（下がり壁）
１５ｂ 第１位置決め部（下がり壁）
１５ｃ 第２位置決め部（円錐形状の壁）
１５ｄ 第２位置決め部（円錐形状の壁）
DESCRIPTION OF SYMBOLS 10 Bessel beam generator 11 Light source 12 Optical fiber 12a Core 12b Clad 13 Lens 14 Optical fiber (Bessel beam generating element)
14a Core 14b Clad 15 Ferrule 15a First positioning portion (falling wall)
15b 1st positioning part (falling wall)
15c 2nd positioning part (conical wall)
15d 2nd positioning part (conical wall)

Claims (6)

光源と、
前記光源から出射した光を伝搬する光ファイバと、
前記光ファイバの出射端に取り付けられたレンズと、
前記レンズから出射した光でベッセルビームを発生させるベッセルビーム発生素子と、
前記レンズが入射端に挿入され、前記ベッセルビーム発生素子が出射端に挿入されるフェルールと、
を備えたことを特徴とするベッセルビーム発生装置。 A light source;
An optical fiber for propagating light emitted from the light source;
A lens attached to the output end of the optical fiber;
A Bessel beam generating element that generates a Bessel beam with light emitted from the lens;
A ferrule in which the lens is inserted at the entrance end and the Bessel beam generating element is inserted at the exit end;
A Bessel beam generator characterized by comprising: 前記フェルールは、
前記レンズの挿入を止める第１位置決め部と、
前記ベッセルビーム発生素子の挿入を止める第２位置決め部と、
を有する、
ことを特徴とする請求項１に記載のベッセルビーム発生装置。 The ferrule is
A first positioning part for stopping insertion of the lens;
A second positioning portion for stopping insertion of the Bessel beam generating element;
Having
The Bessel beam generator according to claim 1. 前記第１位置決め部と前記第２位置決め部とは、前記レンズから前記ベッセルビーム発生素子へ平行に光が入射するようにして、前記レンズと前記ベッセルビーム発生素子の挿入を止める、ことを特徴とする請求項２に記載のベッセルビーム発生装置。   The first positioning unit and the second positioning unit stop light from being incident on the Bessel beam generating element in parallel to stop insertion of the lens and the Bessel beam generating element. The Bessel beam generator according to claim 2. 前記レンズは、前記光ファイバと略同じ直径であり、前記光ファイバを伝搬する光を平行光にして出射する屈折率分布型のレンズである、ことを特徴とする請求項１〜請求項３のいずれか１項に記載のベッセルビーム発生装置。   4. The lens according to claim 1, wherein the lens is a refractive index distribution type lens that has substantially the same diameter as the optical fiber and emits light propagating through the optical fiber as parallel light. The Bessel beam generator according to any one of the above. 前記ベッセルビーム発生素子は、入射端側のコアまたはコア及びクラッドが円錐形状とされた、入射した光をベッセルビームにして出射する光ファイバである、ことを特徴とする請求項１〜請求項４のいずれか１項に記載のベッセルビーム発生装置。   5. The Bessel beam generating element is an optical fiber that emits incident light as a Bessel beam, in which a core on the incident end side or a core and a clad are formed in a conical shape. The Bessel beam generator according to any one of the above. 前記円錐形状は、９０度以上１５０度未満の頂角を有する、ことを特徴とする請求項５に記載のベッセルビーム発生装置。
6. The Bessel beam generator according to claim 5, wherein the conical shape has an apex angle of 90 degrees or more and less than 150 degrees.
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