JP2012107970A - Spring probe and method of manufacturing the same - Google Patents
Spring probe and method of manufacturing the same Download PDFInfo
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- JP2012107970A JP2012107970A JP2010256565A JP2010256565A JP2012107970A JP 2012107970 A JP2012107970 A JP 2012107970A JP 2010256565 A JP2010256565 A JP 2010256565A JP 2010256565 A JP2010256565 A JP 2010256565A JP 2012107970 A JP2012107970 A JP 2012107970A
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- 239000000523 sample Substances 0.000 title claims abstract description 54
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000000465 moulding Methods 0.000 claims abstract description 29
- 238000005452 bending Methods 0.000 claims abstract description 23
- 230000008602 contraction Effects 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- 238000004804 winding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 16
- 238000007689 inspection Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004080 punching Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- ZMDCATBGKUUZHF-UHFFFAOYSA-N beryllium nickel Chemical compound [Be].[Ni] ZMDCATBGKUUZHF-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
この発明は、半導体部品やプリント配線基板等の電気的特性を検査する際に用いられるスプリングプローブに関する。 The present invention relates to a spring probe used when inspecting electrical characteristics of a semiconductor component, a printed wiring board, and the like.
従来より、ＩＣやＬＳＩ等の半導体部品は、ウエハ上に形成された段階、パッケージ化された段階等の各製造段階において電気的特性が検査されて、良品、不良品の選別が成されている。このような電気的特性を検査する検査装置としては、プローブカードを備えたテスタ、ＩＣソケットが一般的に知られている。 Conventionally, semiconductor parts such as IC and LSI are inspected for electrical characteristics at each manufacturing stage such as a stage where they are formed on a wafer, a stage where they are packaged, etc., and a non-defective product or a defective product is selected. . As an inspection apparatus for inspecting such electrical characteristics, a tester and an IC socket having a probe card are generally known.
プローブカードやＩＣソケットには、導電性を有する複数のコンタクトプローブが設けられており、それらコンタクトプローブを半導体部品の電極と検査用回路の電極との間に介在させて、これら電極間を通電状態とすることで、半導体部品の電気的特性を調査するようになっている。 Probe cards and IC sockets are provided with a plurality of conductive contact probes. These contact probes are interposed between the electrodes of semiconductor components and the electrodes of the inspection circuit, and the electrodes are energized. As a result, the electrical characteristics of semiconductor components are investigated.
この種のコンタクトプローブとしては、例えば、図７に示すようなスプリングプローブが知られている。スプリングプローブは、筒状スリーブ５０と、この筒状スリーブ５０の一端部に出没自在に取り付けられた端子５１と、端子５１を突出方向に付勢するコイル状スプリング５２とを備えている。そして、端子５１を、半導体部品の電極に接触させるとともに、筒状スリーブ５０の他端部を、検査用回路の電極に接続して、端子５１をスプリング５２の付勢によって半導体部品の電極に安定的に押し付けることで、電極間の通電状態を良好に維持するようになっている。 For example, a spring probe as shown in FIG. 7 is known as this type of contact probe. The spring probe includes a cylindrical sleeve 50, a terminal 51 attached to one end of the cylindrical sleeve 50 so as to be able to protrude and retract, and a coiled spring 52 that urges the terminal 51 in the protruding direction. The terminal 51 is brought into contact with the electrode of the semiconductor component, the other end of the cylindrical sleeve 50 is connected to the electrode of the circuit for inspection, and the terminal 51 is stabilized to the electrode of the semiconductor component by the bias of the spring 52. By properly pressing, the current-carrying state between the electrodes is favorably maintained.
しかしながら、図７に示す従来のスプリングプローブは、筒状スリーブ５０、端子５１、スプリング５２といった各構成部品が別体で製造され、これら各構成部品を手作業で組み立てることで製造されていることから、製造効率が悪く、製造コストが高いといった不具合があった。 However, the conventional spring probe shown in FIG. 7 is manufactured by separately manufacturing each component such as the cylindrical sleeve 50, the terminal 51, and the spring 52, and manually assembling these components. There were problems such as poor production efficiency and high production costs.
また、従来のスプリングプローブは、それぞれ別体の各構成部品が互いに接触し合って導通経路を構成しているが、これら接触部分において電気抵抗が大きくなって、プローブ全体としての電気的特性が不安定になり易く、検査精度に悪影響を及ぼすといった不具合もあった。 In the conventional spring probe, separate components contact each other to form a conduction path. However, the electrical resistance increases at these contact portions, and the electrical characteristics of the entire probe are poor. There were also problems such as being easily stable and adversely affecting inspection accuracy.
そこで、上記不具合を解決するものとして、導電性の基板からスリーブ成形部と、端子成形部と、スプリング成形部とを一体的に打ち抜き、それぞれ曲げ加工を施すことによって、筒状スリーブと、端子と、スプリングとを一体成形するスプリングプローブが開示されている（例えば特許文献１参照）。 Therefore, as a solution to the above problems, the sleeve forming portion, the terminal forming portion, and the spring forming portion are integrally punched from the conductive substrate, and each is subjected to a bending process, whereby the cylindrical sleeve, the terminal, A spring probe that integrally molds a spring is disclosed (for example, see Patent Document 1).
ところが、特許文献１に開示されているスプリングプローブは、図８（ａ）に示すように波状帯板とされたスプリング成形部６０の各頂点６１・・を、図８（ｂ）に示すように、板厚方向に向かって奥側、手前側と交互に捻ることでコイル状に成形しているため、頂点での塑性変形が激しく、特に頂点６１において亀裂や破断等が生じる虞があり、耐久性に問題があった。 However, in the spring probe disclosed in Patent Document 1, as shown in FIG. 8B, each apex 61... Of the spring forming portion 60 formed as a corrugated strip as shown in FIG. Since it is formed in a coil shape by alternately twisting the back side and the near side toward the plate thickness direction, plastic deformation at the apex is severe, and there is a possibility that cracks, fractures, etc. may occur at the apex 61, and durability. There was a problem with sex.
そこで、この発明は、上記の不具合を解消して、スプリングの耐久性の向上を図ったスプリングプローブ及びその製造方法の提供を目的とする。 SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a spring probe and a method for manufacturing the same, in which the above-described problems are solved and the durability of the spring is improved.
上記課題を解決するため、本発明のスプリングプローブは、スリーブ成形部２１と、上記スリーブ成形部２１から折曲境界部１１を介して延出したスプリング４と、このスプリング４の先端部分を拡張してなる端子成形部３１とがそれぞれ同一平面上に形成され、各成形部２１、３１がそれぞれ曲げ加工されることで、筒状スリーブ２と、この筒状スリーブ２の一端部に設けられる被検査体接触用の端子３と、上記筒状スリーブ２に内装されて上記端子３を付勢するスプリング４とが一体に成形されるスプリングプローブであって、上記スプリング４は、略Ｕ字状の弾性部４２を備え、この弾性部４２が巻回された状態で、上記筒状スリーブ２に内装されていることを特徴としている。 In order to solve the above problems, the spring probe of the present invention expands the sleeve forming portion 21, the spring 4 extending from the sleeve forming portion 21 through the bent boundary portion 11, and the tip portion of the spring 4. Are formed on the same plane, and the molded portions 21 and 31 are respectively bent, so that the cylindrical sleeve 2 and an object to be inspected provided at one end of the cylindrical sleeve 2 are formed. A spring probe in which a body-contacting terminal 3 and a spring 4 that is housed in the cylindrical sleeve 2 and biases the terminal 3 are integrally formed, and the spring 4 has a substantially U-shaped elasticity. A portion 42 is provided, and the elastic portion 42 is wound around and is housed in the cylindrical sleeve 2.
また、上記スプリング４は、上記折曲境界部１１から上記端子成形部３１に向かって断続的に設けられる連結部４１・・と、上記連結部４１・・の互いに対向する端部同士を連結するようにして設けられる上記弾性部４２・・とを備え、上記折曲境界部１１から上記端子成形部３１にかけて、上記連結部４１と上記弾性部４２とが交互に連続している。 Further, the spring 4 connects the connecting portions 41... Intermittently provided from the bent boundary portion 11 toward the terminal molding portion 31 and the ends of the connecting portions 41. The elastic portions 42 are provided as described above, and the connecting portions 41 and the elastic portions 42 are alternately continued from the bent boundary portion 11 to the terminal molding portion 31.
さらに、上記連結部４１は、上記弾性部４２の収縮方向に対する長さＬ１が、上記弾性部４２の収縮幅Ｌ２以上とされている。 Further, the connecting portion 41 has a length L1 with respect to the contraction direction of the elastic portion 42 equal to or greater than the contraction width L2 of the elastic portion 42.
さらにまた、上記弾性部４２は、一端部が、隣接する連結部４１、４１の互いに対向する端部にそれぞれ連結されるとともに、互いに略平行して設けられる一対の延設部４２ａ、４２ａと、一対の延設部４２ａ、４２ａの他端部同士を連結する湾曲部４２ｂとを備え、上記延設部４２ａは、上記連結部４１に略直交して設けられている。 Furthermore, the elastic part 42 has one end connected to the mutually opposing ends of the adjacent connecting parts 41, 41 and a pair of extending parts 42a, 42a provided substantially parallel to each other, The extended portions 42a and 42a are connected to the other ends of the curved portions 42b. The extended portions 42a are provided substantially orthogonal to the connecting portions 41.
また、上記弾性部４２は、上記連結部４１からの突出長さＬ３が、上記筒状スリーブ２の径Ｒより大とされている。 Further, the elastic portion 42 has a protruding length L3 from the connecting portion 41 larger than the diameter R of the cylindrical sleeve 2.
さらに、上記弾性部４２は、上記連結部４１に向かって螺旋状に巻回されているとともに、螺旋状とされた弾性部４２の軸心同士が略一致するように、上記連結部４１の同一面側に位置された状態で、上記筒状スリーブ２に内装されている。 Further, the elastic portion 42 is spirally wound toward the connecting portion 41, and the same as the connecting portion 41 so that the axial centers of the elastic portions 42 that are spiraled substantially coincide with each other. The cylindrical sleeve 2 is housed in a state of being positioned on the surface side.
さらにまた、上記弾性部４２は、上記連結部４１・・の軸心に対して、一方の弾性部４２が一方側に位置され、一方の弾性部４２に隣接する他方の弾性部４２が他方側に位置されるように互い違いに設けられている。 Furthermore, the elastic portion 42 is such that one elastic portion 42 is positioned on one side with respect to the axis of the connecting portion 41... And the other elastic portion 42 adjacent to the one elastic portion 42 is on the other side. It is provided alternately so that it may be located in.
また、上記スリーブ成形部２１の上記折曲境界部１１側の端部から上記端子成形部３１に向かって上部接触部２３が延設されている。 An upper contact portion 23 extends from the end of the sleeve forming portion 21 on the bent boundary portion 11 side toward the terminal forming portion 31.
また、本発明のスプリングプローブの製造方法は、導電性を有する基板１０に打ち抜き加工を施して、スリーブ成形部２１と、上記スリーブ成形部２１から折曲境界部１１を介して延出したスプリング４と、このスプリング４の先端部分を拡張してなる端子成形部３１とをそれぞれ同一平面上に形成する第１工程と、上記端子成形部３１に曲げ加工を施して、上記端子３を成形する第２工程と、上記スプリング４の弾性部４２を巻回する第３工程と、上記折曲境界部１１を折り曲げて、上記スリーブ成形部２１と上記スプリング４とを重ね合わせる第４工程と、上記スリーブ成形部２１に曲げ加工を施して、上記端子３の根元部及び上記スプリング４を包み込むように上記筒状スリーブ２を成形する第５工程とを含むことを特徴としている。 Further, in the method for manufacturing the spring probe of the present invention, the substrate 10 having conductivity is punched, and the sleeve forming portion 21 and the spring 4 extending from the sleeve forming portion 21 through the bent boundary portion 11 are obtained. And a first step of forming the terminal molding portion 31 formed by extending the tip of the spring 4 on the same plane, and a step of bending the terminal molding portion 31 to mold the terminal 3. Two steps, a third step of winding the elastic portion 42 of the spring 4, a fourth step of bending the bending boundary portion 11 and overlapping the sleeve forming portion 21 and the spring 4, and the sleeve And a fifth step of forming the cylindrical sleeve 2 so as to wrap the base portion of the terminal 3 and the spring 4 by bending the forming portion 21.
この発明のスプリングプローブによれば、スプリングの弾性部を巻回している、すなわち、弾性部の全長に亘って小さな塑性変形を均等に生じさせているだけであるため、捻り等の塑性変形の激しい箇所がなく、亀裂や破断等の少ない耐久性に優れたものとなり、これによって製品寿命を延ばすことができる。 According to the spring probe of the present invention, since the elastic portion of the spring is wound, that is, only small plastic deformation is uniformly generated over the entire length of the elastic portion, severe plastic deformation such as torsion is severe. There are no spots, and it has excellent durability with few cracks and breaks, thereby extending the product life.
また、弾性部を巻回して筒状スリーブに内装する構成としているため、弾性部の長さを、筒状スリーブの径より長くすることも可能である。そして、弾性部の長さを長くすれば、スプリング収縮時の弾性部の変形を小さく抑えることができるため、収縮によるダメージを抑えることができ、製品寿命を延ばすことができる。 Moreover, since it is set as the structure which winds an elastic part and is comprised in a cylindrical sleeve, it is also possible to make the length of an elastic part longer than the diameter of a cylindrical sleeve. And if the length of an elastic part is lengthened, since the deformation | transformation of the elastic part at the time of spring contraction can be suppressed small, the damage by shrinkage | contraction can be suppressed and a product life can be extended.
さらに、折曲境界部から端子成形部に向かって断続的に設けられる連結部を複数備え、これら連結部の互いに対向する端部同士を連結するようにして弾性部を設ける、すなわち、隣接する弾性部間に連結部が介設されているため、スプリング収縮時において、隣接する弾性部同士が干渉し難くなり、スプリングをスムーズに収縮させることができる。 Furthermore, it is provided with a plurality of connecting portions that are intermittently provided from the bent boundary portion toward the terminal molding portion, and an elastic portion is provided so as to connect opposite ends of these connecting portions, that is, adjacent elastic portions. Since the connecting portion is interposed between the portions, adjacent elastic portions are less likely to interfere with each other when the spring is contracted, and the spring can be contracted smoothly.
特に、連結部の長さを、弾性部の伸縮方向に対して、弾性部の収縮幅以上とすることで、隣接する弾性部同士が干渉しなくなるため、スプリングをさらにスムーズに収縮させることができる。また、弾性部間の間隔を十分に取ることで、打ち抜き加工時の誤差や曲げ加工時の誤差等、加工時の誤差が生じても、弾性部同士の干渉を防ぐことができるため、加工精度に劣る廉価な機器が使用可能であるとともに、不良品数も減少させることができ、低コスト化を図ることができる。また、加工精度の高い機器を用いれば、より小型のスプリングプローブを歩止まり良く製造することができる。 In particular, by setting the length of the connecting part to be equal to or greater than the contraction width of the elastic part with respect to the expansion / contraction direction of the elastic part, the adjacent elastic parts do not interfere with each other, so that the spring can be contracted more smoothly. . In addition, by ensuring sufficient spacing between the elastic parts, it is possible to prevent interference between the elastic parts even if errors occur during processing, such as errors during punching or errors during bending. Inexpensive equipment can be used, and the number of defective products can be reduced, thereby reducing the cost. In addition, if a device with high processing accuracy is used, a smaller spring probe can be manufactured with good yield.
また、一対の延設部を互いに平行に、且つ連結部に略直交して設けることでも、隣接する弾性部同士の干渉を抑えることができる。 Further, by providing the pair of extending portions in parallel with each other and substantially orthogonal to the connecting portion, it is possible to suppress interference between adjacent elastic portions.
さらに、弾性部を螺旋状に巻回し、螺旋状とされた弾性部の軸心同士が略一致するように、連結部の同一面側に位置させることで、径の小さな筒状スリーブにも無理なくスプリングを内装することができる。 Furthermore, the elastic part is wound in a spiral shape and positioned on the same surface side of the connecting part so that the axial centers of the elastic parts formed into a spiral are substantially coincident with each other, so that even a cylindrical sleeve with a small diameter is impossible. There is no spring inside.
また、弾性部を互い違いに設けることで、端子を均等に付勢することが可能となり、検査精度の向上を図ることができる。 Further, by providing the elastic portions alternately, it is possible to bias the terminals evenly, and the inspection accuracy can be improved.
また、基板に打ち抜き加工や曲げ加工等を施して、各構成部品を一体成形したスプリングプローブを製造しているので、従来のような手作業による各構成部品の組立作業を不要として、製造効率を高めて、製造コストの低減を図ることができる。さらに、各構成部品が一体に繋がって導通経路を形成することになるため、電気抵抗を小さく抑えて、電気的特性を安定させることができ、これによって検査精度の向上を図ることができる。 In addition, since the spring probe is manufactured by integrally molding each component by punching or bending the substrate, it eliminates the need for manual assembly of each component and improves production efficiency. Thus, the manufacturing cost can be reduced. Furthermore, since each component part is integrally connected to form a conduction path, the electrical resistance can be suppressed to be small, and the electrical characteristics can be stabilized, thereby improving the inspection accuracy.
以下、この発明のスプリングプローブについて図に基づいて詳細に説明する。この発明の実施形態に係るスプリングプローブ１は、図１に示すように、筒状スリーブ２と、この筒状スリーブ２の一端部に出没自在に設けられた被検査体接触用の端子３と、筒状スリーブ２に内装されて、端子３を突出方向に付勢するスプリング４とを一体成形してなる。 Hereinafter, the spring probe of this invention is demonstrated in detail based on figures. As shown in FIG. 1, a spring probe 1 according to an embodiment of the present invention includes a cylindrical sleeve 2, a terminal 3 for contact with an object to be inspected provided at one end of the cylindrical sleeve 2, and A spring 4 is integrally formed with the cylindrical sleeve 2 and urges the terminal 3 in the protruding direction.
このスプリングプローブ１は、例えばプローブガードを備えたテスタ、ＩＣソケット等の検査装置に装着されて、その端子３を、半導体部品等の被検査体の電極に接触させるとともに、筒状スリーブ２の他端部（後述する上部接触部２３）を、検査用回路の電極に接続して、端子３をスプリング４の付勢によって半導体部品の電極に安定的に押し付けることで、電極間の通電状態を良好に維持するようになっている。なお、スプリングプローブ１は、その全長が例えば１〜５０ｍｍ、筒状スリーブの直径が例えば０．２〜５ｍｍといった極小サイズとされている。 The spring probe 1 is mounted on an inspection device such as a tester equipped with a probe guard or an IC socket, for example, and the terminal 3 is brought into contact with an electrode of an object to be inspected such as a semiconductor component. The end (upper contact portion 23 described later) is connected to the electrode of the circuit for inspection, and the terminal 3 is stably pressed against the electrode of the semiconductor component by the bias of the spring 4, so that the energization state between the electrodes is good It is supposed to keep on. Note that the spring probe 1 has a minimum size, for example, a total length of 1 to 50 mm, and a cylindrical sleeve diameter of, for example, 0.2 to 5 mm.
以下、このスプリングプローブ１の製造方法について説明する。この製造方法においては、順送型による自動組立方式を採用しており、例えばベリリウム銅製又はベリリウムニッケル製の高硬度で導電性に優れた薄肉帯状の基板１０を、その長手方向に搬送しながら、基板１０に対して各工程を順次実行することで、大量のスプリングプローブ１・・を連続して製造可能となっている。 Hereinafter, a method for manufacturing the spring probe 1 will be described. In this manufacturing method, an automatic assembly method using a progressive die is adopted. For example, a thin belt-like substrate 10 made of beryllium copper or beryllium nickel and having high hardness and excellent conductivity is conveyed in the longitudinal direction, By sequentially executing each process on the substrate 10, a large number of spring probes 1 can be manufactured continuously.
図２及び図３は、各工程を順次実施した時の基板１０の状態を示している。なお、図２及び図３において、ハッチ部（色付き部）は、打ち抜かれた部分である。まず、第１工程において、基板１０に打ち抜き加工を施して、略長方形状のスリーブ成形部２１と、このスリーブ成形部２１の短手方向の一端部中央から折曲境界部１１を介して延出したスプリング４と、スプリング４の先端部分を拡張してなる端子成形部３１とをそれぞれ同一平面上に形成する。なお、基板１０のスプリング４や各成形部２１、３１以外の部分と、スプリング４や各成形部２１、３１とは、端子成形部３１の先端部から延出された接続部１２と、スリーブ成形部２１の短手方向の他端部から延出された接続部１３とによって接続された状態とされる。また、これら接続部１２、１３で安定性を保てないような場合は、別途接続部を増やしても良い。 2 and 3 show the state of the substrate 10 when the respective steps are sequentially performed. 2 and 3, hatched portions (colored portions) are punched portions. First, in the first step, a punching process is performed on the substrate 10, and a substantially rectangular sleeve forming portion 21 and the sleeve forming portion 21 extend from the center of one end portion in the short direction through the bent boundary portion 11. The formed spring 4 and the terminal molding portion 31 formed by expanding the tip portion of the spring 4 are formed on the same plane. In addition, parts other than the spring 4 and each molding part 21 and 31 of the board | substrate 10, and the spring 4 and each molding part 21 and 31 are the connection part 12 extended from the front-end | tip part of the terminal molding part 31, and sleeve molding. The connection portion 13 is extended from the other end of the portion 21 in the short direction. In addition, when the connection portions 12 and 13 cannot maintain stability, the number of connection portions may be increased separately.
このとき、具体的には、スリーブ成形部２１を構成する部位として、図４に示すように、略長方形状の基部２２と、この基部２２の短手方向の一端部から折曲境界部１１の両側に位置するように、且つ端子成形部３１に向かって延出した一対の上部接触部２３、２３と、基部２２の短手方向の他端部側を押圧してなる一対の端子接触用突起２４、２４及び一対のストローク調整用突起２５、２５とが形成される。 At this time, specifically, as shown in FIG. 4, as a portion constituting the sleeve forming portion 21, a substantially rectangular base portion 22 and one end portion of the base portion 22 in the short direction are formed from the bending boundary portion 11. A pair of terminal contact protrusions formed by pressing the pair of upper contact portions 23, 23 extending toward the terminal molding portion 31 and the other end side in the short direction of the base portion 22 so as to be located on both sides. 24, 24 and a pair of stroke adjustment projections 25, 25 are formed.
また、端子成形部３１は、図４に示すように、略長方形状に形成されるとともに、スプリング４とは反対側の端部（先端部）から接触片３２、３２が延出される。また、スリーブ成形部２１に形成されたストローク調整用突起２５、２５に対応する箇所に凹溝３３、３３が形成される。具体的に、凹溝３３は、スプリング４の収縮方向と平行するように設けられ、その長さは、スプリング収縮長さと略同長、又はそれより短く形成される。 Further, as shown in FIG. 4, the terminal molding portion 31 is formed in a substantially rectangular shape, and the contact pieces 32, 32 are extended from the end portion (tip portion) opposite to the spring 4. Further, concave grooves 33 and 33 are formed at locations corresponding to the stroke adjusting protrusions 25 and 25 formed on the sleeve forming portion 21. Specifically, the concave groove 33 is provided so as to be parallel to the contraction direction of the spring 4, and the length thereof is substantially the same as or shorter than the spring contraction length.
また、スプリング４の構成部位として、折曲境界部１１から端子成形部３１に向かって断続的に設けられる複数の連結部４１・・と、これら連結部４１・・の互いに対向する端部同士を連結する略Ｕ字状の弾性部４２・・とが形成される。また、この弾性部４２は、図５（ａ）に示すように、一端部が、互いに対向する連結部４１、４１の端部にそれぞれ連結されるとともに、互いに略平行して設けられる一対の延設部４２ａ、４２ａと、この一対の延設部４２ａ、４２ａの他端部同士を連結する湾曲部４２ｂとから構成され、延設部４２ａは、連結部４１に略直交して設けられる。また、弾性部４２・・は、連結部４１・・の軸心に対して、一方の弾性部４２が一方側に位置され、一方の弾性部４２に隣接する他方の弾性部４２が他方側に位置されるように互い違いに設けられている。 Further, as the constituent parts of the spring 4, a plurality of connecting portions 41... Intermittently provided from the bent boundary portion 11 toward the terminal molding portion 31, and mutually opposing ends of the connecting portions 41. A substantially U-shaped elastic portion 42... To be connected is formed. In addition, as shown in FIG. 5A, the elastic portion 42 has one end connected to the ends of the connecting portions 41 and 41 facing each other and a pair of extending portions provided substantially parallel to each other. It is comprised from the installation parts 42a and 42a and the curved part 42b which connects the other ends of this pair of extension parts 42a and 42a, and the extension part 42a is provided in the connection part 41 substantially orthogonally. Further, the elastic portions 42... Have one elastic portion 42 positioned on one side with respect to the axis of the connecting portion 41... And the other elastic portion 42 adjacent to the one elastic portion 42 on the other side. They are staggered to be positioned.
すなわち、スプリング４は、折曲境界部１１から延設された連結部４１の上端部に、一方側の弾性部（左側弾性部）４２の下方側の延設部４２ａの端部（弾性部の開口側端部の下方側）が連結され、この左側弾性部４２の上方側の延設部４２ａの端部（弾性部の開口側端部の上方側）に、別の連結部４１の下端部が連結され、この連結部４１の上端側に他方側の弾性部（右側弾性部）４２の下方側の延設部４２ａの端部が連結され、この右側弾性部４２の上方側の延設部４２ａの端部に、さらに別の連結部４１が連結され、この連結部４１に別の左側弾性部４２の下方側の延設部４２ａの端部が連結された形態、すなわち、連結部４１と弾性部４２とが交互に連続形成された形態とされており、この形態を折曲境界部１１から端子成形部３１にかけて繰り返し連続することでスプリング４が構成されている。 That is, the spring 4 is connected to the upper end portion of the connecting portion 41 extending from the bending boundary portion 11 at the end portion (the elastic portion of the elastic portion) of the extending portion 42a on the lower side of the elastic portion (left elastic portion) 42 on one side. The lower end portion of another connecting portion 41 is connected to the end portion of the extending portion 42a above the left elastic portion 42 (the upper side of the opening end portion of the elastic portion). Are connected to the upper end side of the connecting portion 41 and an end portion of the extending portion 42a on the lower side of the other elastic portion (right elastic portion) 42. The extending portion on the upper side of the right elastic portion 42 is connected. A further connecting portion 41 is connected to the end portion of 42a, and the end portion of the extending portion 42a on the lower side of another left elastic portion 42 is connected to the connecting portion 41, that is, the connecting portion 41 and The elastic portions 42 are alternately and continuously formed, and this form is bent from the bent boundary portion 11 to the terminal molding portion 31. Spring 4 by repeating successive over is formed.
また、連結部４１の長さＬ１は、スプリング４の収縮方向に対して、延設部４２ａ、４２ａ間の間隔Ｌ２以上、すなわち、ひとつの弾性部４２の収縮幅以上とされる。また、湾曲部４２ｂ、４２ｂ間の幅Ｗ１は、スリーブ成形部の幅Ｗ２より大とされる。また、弾性部４２の連結部４１からの突出長さＬ３は、筒状スリーブ２の径Ｒよりも大とされる。 Further, the length L1 of the connecting portion 41 is not less than the interval L2 between the extending portions 42a and 42a with respect to the contraction direction of the spring 4, that is, not less than the contraction width of one elastic portion 42. Further, the width W1 between the curved portions 42b and 42b is larger than the width W2 of the sleeve forming portion. Further, the protruding length L3 of the elastic portion 42 from the connecting portion 41 is larger than the diameter R of the cylindrical sleeve 2.
続いて、第２工程において、端子成形部３１に曲げ加工を施して、端子成形部３１を筒状に丸めることで端子３を成形する。なお、この際、凹溝３３、３３は端子３の外周側に位置することとなる。 Subsequently, in the second step, the terminal molding portion 31 is bent, and the terminal molding portion 31 is rounded into a cylindrical shape to mold the terminal 3. At this time, the grooves 33 and 33 are located on the outer peripheral side of the terminal 3.
続いて、第３工程において、スプリング４の弾性部４２・・に曲げ加工を施す。具体的には、図５（ｂ）及び図６（ｂ）に示すように、弾性部４２の先端部（湾曲部４２ｂ）が中心に位置するようにして、湾曲部４２から連結部４１に向かって螺旋状に巻回する。また、この際、互い違いに延出された弾性部４２・・が同一面側（例えば表面側）に位置するように、また、螺旋状の弾性部４２・・の軸心同士が略一致するように、さらに、螺旋状の弾性部４２の軸心と連結部４１の軸心とが略平行となるようにして、弾性部４２の根元部分まで曲げ加工を行う。 Subsequently, in the third step, the elastic portions 42 of the spring 4 are bent. Specifically, as shown in FIGS. 5 (b) and 6 (b), the distal end portion (curved portion 42 b) of the elastic portion 42 is positioned at the center and is directed from the curved portion 42 to the connecting portion 41. And spirally wound. At this time, the elastic portions 42... That are alternately extended are positioned on the same surface side (for example, the front surface side), and the axial centers of the spiral elastic portions 42. Further, bending is performed to the base portion of the elastic portion 42 so that the axis of the spiral elastic portion 42 and the axis of the connecting portion 41 are substantially parallel.
続いて、第４工程において、基板１０と端子３の先端部とを接続している接続部１２を切断し、スリーブ成形部３１とスプリング４との間の折曲境界部１１を折り曲げて、スプリング４の中心軸をスリーブ成型部２１の長手方向の中心線に沿わせるようにしてスリーブ成形部２１とスプリング４とを重ね合わせる。 Subsequently, in the fourth step, the connecting portion 12 connecting the substrate 10 and the tip of the terminal 3 is cut, the bending boundary portion 11 between the sleeve forming portion 31 and the spring 4 is bent, and the spring The sleeve forming portion 21 and the spring 4 are overlapped so that the center axis of 4 is along the longitudinal center line of the sleeve forming portion 21.
続いて、第５工程において、スリーブ成形部２１に曲げ加工を施して、スリーブ成形部２１を筒状に丸めることで、端子３のそれぞれの根元部及びスプリング４を包み込むように筒状スリーブ２を成形する。 Subsequently, in the fifth step, the sleeve forming portion 21 is bent, and the sleeve forming portion 21 is rounded into a cylindrical shape so that the cylindrical sleeve 2 is wrapped so as to wrap each root portion of the terminal 3 and the spring 4. Mold.
そして、第６工程において、焼入れ及び焼き戻しを行って、スプリング４を含めた製品全体に硬さと粘り強さを与えた後、端子３をスプリング４の付勢力に抗して筒状スリーブ２に押し込み、筒状スリーブ２の内周面側に位置されたストローク調整用突起２５、２５を端子３の凹溝３３、３３に嵌合させる。なお、この際、筒状スリーブ２の内周面側に位置する端子接触用突起２４、２４は、端子３の外周面に当接状態とされる。最後に、基板１０と筒状スリーブ２とを接続する接続部１３を切断して、製品すなわち図1に示すスプリングプローブ１を切り離す。以上の各工程を、搬送される基板１０に対して順次実行することで、各構成部品２、３、４が一体成形されたスプリングプローブ１が連続的に製造される。 Then, in the sixth step, after hardening and tempering to give the whole product including the spring 4 hardness and tenacity, the terminal 3 is pushed into the cylindrical sleeve 2 against the urging force of the spring 4. Then, the stroke adjusting protrusions 25, 25 positioned on the inner peripheral surface side of the cylindrical sleeve 2 are fitted into the concave grooves 33, 33 of the terminal 3. At this time, the terminal contact protrusions 24 and 24 located on the inner peripheral surface side of the cylindrical sleeve 2 are brought into contact with the outer peripheral surface of the terminal 3. Finally, the connecting portion 13 that connects the substrate 10 and the cylindrical sleeve 2 is cut, and the product, that is, the spring probe 1 shown in FIG. By sequentially executing the above steps on the substrate 10 to be conveyed, the spring probe 1 in which the component parts 2, 3, and 4 are integrally formed is continuously manufactured.
このように、基板１０の打ち抜き加工や曲げ加工等を施して、各構成部品２、３、４を一体成形したスプリングプローブ１を製造しているので、従来のような手作業による各構成部品２、３、４の組立作業を不要として、製造効率を高めて、製造コストの低減を図ることができる。しかも、各構成部品２、３、４が一体に繋がって導通経路を構成することになるから、電気抵抗を小さく抑えて、電気的特性を安定させることができ、これによって検査精度の向上を図ることができる。 Thus, since the spring probe 1 in which the component parts 2, 3, 4 are integrally formed is manufactured by punching or bending the substrate 10, each component part 2 by manual operation as in the related art is manufactured. The assembly work of 3, 4 and 4 is not required, the production efficiency can be increased, and the production cost can be reduced. Moreover, since the component parts 2, 3, and 4 are integrally connected to form a conduction path, the electrical resistance can be suppressed to be small, and the electrical characteristics can be stabilized, thereby improving the inspection accuracy. be able to.
また、スプリング４の弾性部４２を巻回している、すなわち、弾性部４２の全長に亘って小さな塑性変形を均等に生じさせているだけであるため、捻り等の塑性変形の激しい箇所がなく、亀裂や破断等の少ない耐久性に優れたものとなり、これによって製品寿命を延ばすことができる。 Further, since the elastic portion 42 of the spring 4 is wound, that is, only a small plastic deformation is uniformly generated over the entire length of the elastic portion 42, there is no portion where the plastic deformation such as torsion is severe, It has excellent durability with few cracks and breaks, thereby extending the product life.
さらに、弾性部４２の長さＬ３を、筒状スリーブ２の径Ｒより長くしているため、弾性部４２の収縮幅Ｌ２に対して突出長さＬ３を大きくすることができ、スプリング収縮時の弾性部４２の変形（湾曲部４２ｂの変形角）を小さく抑えることができ、収縮時のダメージを抑えることができ、製品寿命を延ばすことができる。また、弾性部を螺旋状に巻回し、螺旋状とされた弾性部の軸心同士が略一致するように、連結部の同一面側に位置させているため、弾性部４２の長さを長くしながらも、径の小さな筒状スリーブにも無理なくスプリングを内装することができる。 Further, since the length L3 of the elastic portion 42 is longer than the diameter R of the cylindrical sleeve 2, the protruding length L3 can be increased with respect to the contraction width L2 of the elastic portion 42, and the spring is contracted. Deformation of the elastic part 42 (deformation angle of the curved part 42b) can be suppressed small, damage during contraction can be suppressed, and the product life can be extended. In addition, since the elastic portion is wound in a spiral shape and is positioned on the same surface side of the connecting portion so that the axial centers of the elastic portions that are spiraled are substantially coincident with each other, the length of the elastic portion 42 is increased. However, a spring can be comfortably installed in a cylindrical sleeve having a small diameter.
さらにまた、隣接する弾性部４２、４２間に連結部４１を介設するとともに、連結部４１の長さＬ１を、弾性部４２の伸縮方向に対して、弾性部４２の収縮幅（延設部４２ａ、４２ａ間の間隔Ｌ２）以上としているため、スプリング収縮時において、隣接する弾性部４２、４２同士が干渉しなくなり、スプリング４をスムーズに収縮させることができる。また、弾性部４２、４２間の間隔を十分に取ることで、打ち抜き加工時の誤差や曲げ加工時の誤差等、加工時の誤差が生じても、弾性部４２、４２同士の干渉を防ぐことができるため、加工精度に劣る廉価な機器が使用可能であるとともに、不良品数も減少させることができ、低コスト化を図ることができる。また、加工精度の高い機器を用いれば、より小型のスプリングプローブを歩止まり良く製造することができる。 Furthermore, the connecting portion 41 is interposed between the adjacent elastic portions 42, 42, and the length L 1 of the connecting portion 41 is set to the contraction width (extension portion) of the elastic portion 42 with respect to the elastic direction of the elastic portion 42. Since the distance L2) between 42a and 42a is greater than or equal to, the adjacent elastic portions 42 and 42 do not interfere with each other when the spring is contracted, and the spring 4 can be contracted smoothly. In addition, by providing a sufficient space between the elastic portions 42 and 42, even when errors in processing such as errors in punching and errors in bending occur, interference between the elastic portions 42 and 42 is prevented. Therefore, it is possible to use an inexpensive device with inferior processing accuracy, to reduce the number of defective products, and to reduce the cost. In addition, if a device with high processing accuracy is used, a smaller spring probe can be manufactured with good yield.
また、弾性部４２を互い違いに設けているため、端子３を均等に付勢することが可能となり、検査精度の向上を図ることができる。 In addition, since the elastic portions 42 are provided alternately, the terminals 3 can be evenly biased, and the inspection accuracy can be improved.
以上にこの発明の具体的な実施形態について説明したが、この発明は上記実施形態に限られるものではなく、この発明の範囲内で種々変更して実施することが可能である。例えば、上記実施例においては、複数の弾性部４２・・が設けられていたが１個でも良い。また、湾曲部４２ｂ、４２ｂ間の幅Ｗ１が、スリーブ成形部２１の幅Ｗ２より小とされていても良い。また、例えば、隣接する弾性部４２、４２が、連結部４１の互いに異なる面側にそれぞれ巻回される等して、スプリング収縮時において、弾性部４２、４２同士が互いに接触しない場合、すなわち、スプリング収縮方向において、巻回された弾性部４２、４２同士が重なり合っていない場合には、連結部４１を設けることなく、弾性部４２・・を波状に連続させることでスプリング４を構成しても良い。また、弾性部４２・・を互い違いとなるように設けず、同一方向に設けるようにしても良い。 Although specific embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the present invention. For example, in the above embodiment, the plurality of elastic portions 42 are provided, but one may be used. Further, the width W1 between the curved portions 42b and 42b may be smaller than the width W2 of the sleeve forming portion 21. Further, for example, when the elastic portions 42 and 42 are not in contact with each other at the time of spring contraction, for example, the adjacent elastic portions 42 and 42 are respectively wound around different surfaces of the connecting portion 41, that is, In the spring contraction direction, when the wound elastic portions 42 and 42 do not overlap with each other, the spring 4 can be configured by making the elastic portions 42.. good. Further, the elastic portions 42 may be provided in the same direction without being provided alternately.
１・・スプリングプローブ、２・・筒状スリーブ、３・・端子、４・・スプリング、１０・・基板、１１・・折曲境界部、２１・・スリーブ成形部、２３・・上部接触部、３１・・端子成形部、４１・・連結部、４２・・弾性部、４２ａ・・延設部、４２ｂ・・湾曲部、Ｌ１・・連結部の弾性部の収縮方向における長さ、Ｌ２・・弾性部の収縮幅、Ｌ３・・弾性部の連結部からの突出長さ、Ｒ・・筒状スリーブ径 1 .... Spring probe, 2 .... Cylinder sleeve, 3 .... Terminal, 4 .... Spring, 10 .... Substrate, 11 .... Bending boundary, 21 ... Sleeve molding part, 23 ... Upper contact part, 31 .. Terminal forming part, 41 .. Connection part, 42 .. Elastic part, 42 a .. Extension part, 42 b .. Bending part, L 1 .. Length of elastic part of connection part in contraction direction, L 2. Shrinkage width of the elastic part, L3 .. Projection length of the elastic part from the connecting part, R..Cylinder sleeve diameter
Claims (9)
Priority Applications (1)
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013062060A (en) * | 2011-09-12 | 2013-04-04 | Tyco Electronics Japan Kk | Electric connector |
| JP2013167616A (en) * | 2012-02-14 | 2013-08-29 | Human Light Co Ltd | Spring-type probe pin having upper and lower contact structure, and method of manufacturing the same |
| JP2014169887A (en) * | 2013-03-01 | 2014-09-18 | Yamaichi Electronics Co Ltd | Inspection probe and ic socket including the same |
| JP2015038455A (en) * | 2013-08-19 | 2015-02-26 | 富士通コンポーネント株式会社 | Probe and manufacturing method of probe |
| JP2015152577A (en) * | 2014-02-19 | 2015-08-24 | 富士通コンポーネント株式会社 | Connecting connector and manufacturing method of connecting connector |
| CN105074475A (en) * | 2013-07-19 | 2015-11-18 | 黄东源 | Spring contact |
| CN113030533A (en) * | 2016-06-17 | 2021-06-25 | 欧姆龙株式会社 | Probe and inspection unit |
| US11486897B2 (en) * | 2017-05-30 | 2022-11-01 | Dong Weon Hwang | Contact and test socket device for testing semiconductor device |
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| JP2005129428A (en) * | 2003-10-27 | 2005-05-19 | Sumitomo Electric Ind Ltd | Manufacturing method for telescopic contact, contact manufactured by the method and inspection device or electronic instrument provided with the contact |
| JP2006266869A (en) * | 2005-03-24 | 2006-10-05 | Enplas Corp | Contact pin and socket for electrical component |
| JP2008275488A (en) * | 2007-04-28 | 2008-11-13 | Sankei Engineering:Kk | Conductive contact pin, pin retainer, electric component inspection apparatus, and method of manufacturing electric component |
| JP2010532908A (en) * | 2008-01-02 | 2010-10-14 | 中村 敏幸 | Integrated probe pin and manufacturing method thereof |
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| US5667410A (en) * | 1995-11-21 | 1997-09-16 | Everett Charles Technologies, Inc. | One-piece compliant probe |
| JP2005129428A (en) * | 2003-10-27 | 2005-05-19 | Sumitomo Electric Ind Ltd | Manufacturing method for telescopic contact, contact manufactured by the method and inspection device or electronic instrument provided with the contact |
| JP2006266869A (en) * | 2005-03-24 | 2006-10-05 | Enplas Corp | Contact pin and socket for electrical component |
| JP2008275488A (en) * | 2007-04-28 | 2008-11-13 | Sankei Engineering:Kk | Conductive contact pin, pin retainer, electric component inspection apparatus, and method of manufacturing electric component |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013062060A (en) * | 2011-09-12 | 2013-04-04 | Tyco Electronics Japan Kk | Electric connector |
| JP2013167616A (en) * | 2012-02-14 | 2013-08-29 | Human Light Co Ltd | Spring-type probe pin having upper and lower contact structure, and method of manufacturing the same |
| JP2014169887A (en) * | 2013-03-01 | 2014-09-18 | Yamaichi Electronics Co Ltd | Inspection probe and ic socket including the same |
| US9588140B2 (en) | 2013-03-01 | 2017-03-07 | Yamaichi Electronics Co., Ltd. | Inspection probe and an IC socket with the same |
| CN105074475A (en) * | 2013-07-19 | 2015-11-18 | 黄东源 | Spring contact |
| JP2015038455A (en) * | 2013-08-19 | 2015-02-26 | 富士通コンポーネント株式会社 | Probe and manufacturing method of probe |
| JP2015152577A (en) * | 2014-02-19 | 2015-08-24 | 富士通コンポーネント株式会社 | Connecting connector and manufacturing method of connecting connector |
| CN113030533A (en) * | 2016-06-17 | 2021-06-25 | 欧姆龙株式会社 | Probe and inspection unit |
| US11486897B2 (en) * | 2017-05-30 | 2022-11-01 | Dong Weon Hwang | Contact and test socket device for testing semiconductor device |
| US11486896B2 (en) | 2017-05-30 | 2022-11-01 | Dong Weon Hwang | Contact and test socket device for testing semiconductor device |
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