JP2012058011A - Surface inspection device - Google Patents

Surface inspection device Download PDF

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JP2012058011A
JP2012058011A JP2010199830A JP2010199830A JP2012058011A JP 2012058011 A JP2012058011 A JP 2012058011A JP 2010199830 A JP2010199830 A JP 2010199830A JP 2010199830 A JP2010199830 A JP 2010199830A JP 2012058011 A JP2012058011 A JP 2012058011A
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inspection
head
light
curvature
curved surface
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JP5724132B2 (en
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Kazuhiro Horiuchi
一宏 堀内
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Omron Kirin Techno System Co Ltd
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Kirin Techno System Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface inspection device capable of operating an inspection head according to curvature of the surface of an object for inspection.SOLUTION: The surface inspection device 1 has: a support unit 6 which rotatably supports the object 100 for inspection in the cylindrical shape and having an orbit plane 100a formed along an axis direction at least either one of the inner peripheral surface or the outer peripheral surface of the object 100 for inspection around its center axis; and the inspection head 4 which emits inspection light from an opening 11a provided on the outer peripheral, in which the inspection head 4 irradiates the inspection light toward the orbit plane 100a on the inner peripheral surface or the outer peripheral surface of the object 100 for inspection, and inspects the surface of the object 100 for inspection based on light intensity of reflected light of the inspection light, and has a drive unit 5 which performs rotation drive of the inspection head 4 to the surface of the object 100 for inspection centering around the curvature center O of the orbit plane 100a.

Description

本発明は、被検査物の表面を検査光で走査してその表面からの反射光を受光し、その反射光の光量に基づいて表面状態を検査する表面検査装置に関する。   The present invention relates to a surface inspection apparatus that scans the surface of an inspection object with inspection light, receives reflected light from the surface, and inspects the surface state based on the amount of the reflected light.

円筒状の被検査物の内外周面に対して検査ヘッドから検査光を照射してその表面を検査する装置が知られている（例えば特許文献１参照）。このような装置においては、検査ヘッドと被検査物とが相対的に回転することで全周面の表面が検査されている。   There is known an apparatus for inspecting a surface of a cylindrical inspection object by irradiating inspection light from an inspection head onto the inner and outer peripheral surfaces (for example, see Patent Document 1). In such an apparatus, the surface of the entire circumferential surface is inspected by relatively rotating the inspection head and the inspection object.

特開２０１０−１３９４３２号公報JP 2010-139432 A

被検査物によっては、内外周面の軸線方向に沿って曲面が形成されるものがある。従来の検査装置では円筒形状の被検査物に対し同軸上に検査ヘッドを配置し、被検査物か検査ヘッドのいずれかを相対的に回転させることにより表面の全周を検査しているが、このような被検査物の検査はできない。従って、作業者の目視による検査をせざるを得ず作業者にかかる負荷が大きい。   Some objects to be inspected have a curved surface formed along the axial direction of the inner and outer peripheral surfaces. In a conventional inspection apparatus, an inspection head is coaxially arranged with respect to a cylindrical inspection object, and the entire circumference of the surface is inspected by relatively rotating either the inspection object or the inspection head. Such an inspection object cannot be inspected. Therefore, it is necessary to perform an inspection by visual inspection of the worker, and the load on the worker is large.

そこで、本発明は被検査物の表面の曲率に応じた検査ヘッドの動作が可能な表面検査装置を提供することを目的とする。   Therefore, an object of the present invention is to provide a surface inspection apparatus capable of operating an inspection head in accordance with the curvature of the surface of an object to be inspected.

本発明の表面検査装置は、円筒形状で、その内周面又は外周面の少なくともいずれか一方に軸線方向に沿って形成された曲面（１００ａ）を有する被検査物（１００）をその中心軸線の周りに回転自在に支持する被検査物支持手段（６）と、外周に設けられた開口部（１１ａ）から検査光を射出する検査ヘッド（４）と、を有し、前記検査ヘッドが前記被検査物の内周面又は外周面の曲面に向けて検査光を照射し、その反射光の光量に基づいて前記被検査物の表面を検査する表面検査装置（１）であって、前記被検査物の表面に対し、前記曲面の曲率中心（Ｏ）を中心として前記検査ヘッドを回転駆動させる検査ヘッド駆動手段（５）を備えたことにより上記課題を解決する。   The surface inspection apparatus according to the present invention has a cylindrical shape, and an inspection object (100) having a curved surface (100a) formed along the axial direction on at least one of the inner peripheral surface and the outer peripheral surface thereof. An inspection object supporting means (6) rotatably supported around the periphery, and an inspection head (4) for injecting inspection light from an opening (11a) provided on the outer periphery. A surface inspection apparatus (1) that irradiates inspection light toward an inner peripheral surface or a curved surface of an outer peripheral surface of an inspection object, and inspects the surface of the inspection object based on the amount of reflected light, the inspection object The above problem is solved by providing inspection head driving means (5) for rotating the inspection head around the center of curvature (O) of the curved surface with respect to the surface of the object.

本発明の表面検査装置によれば、被検査物の外周面又は内周面に形成された曲面に対して、その曲率中心を中心として検査ヘッドが回転する。被検査物は軸線中心の周りに回転するので検査ヘッドが曲率中心の周りに回転することにより検査ヘッドは曲面に対して焦点距離を一定に保つことができ、曲面の全周面を検査することができる。従って、曲面を有する被検査物に対しても検査ヘッドによる走査が可能となり、装置による自動検査が可能となる。よって、作業者の負荷軽減が図られるとともに、検査結果のばらつきを防止して傷の大きさの定量的な判定ができる。   According to the surface inspection apparatus of the present invention, the inspection head rotates around the center of curvature with respect to the curved surface formed on the outer peripheral surface or inner peripheral surface of the inspection object. Since the object to be inspected rotates around the axis center, the inspection head rotates around the center of curvature, so that the inspection head can keep the focal length constant with respect to the curved surface, and inspects the entire circumference of the curved surface. Can do. Therefore, it is possible to scan the inspection object having a curved surface by the inspection head, and it is possible to perform automatic inspection by the apparatus. Therefore, the burden on the operator can be reduced, and variations in the inspection results can be prevented to quantitatively determine the size of the scratch.

本発明の表面検査装置の一形態において、前記検査ヘッド駆動手段には、前記検査ヘッドを保持固定する固定部材（２１）と、前記固定部材を前記曲面の曲率中心の周りに案内する円弧状の円弧ガイド（２２）と、が設けられていてもよい。この形態によれば、円弧ガイドに沿って検査ヘッドが移動するので、検査ヘッドは曲率中心の周りを回転することができる。   In one form of the surface inspection apparatus of the present invention, the inspection head driving means includes a fixing member (21) for holding and fixing the inspection head, and an arc-shaped guide for guiding the fixing member around the curvature center of the curved surface. An arc guide (22) may be provided. According to this aspect, since the inspection head moves along the arc guide, the inspection head can rotate around the center of curvature.

固定部材と円弧ガイドが設けられた形態において、前記検査ヘッド駆動手段には、前記円弧ガイドに沿った移動が可能なように前記固定部材を支持する支持部材（２３）と、前記円弧ガイドが形成する円弧の接線方向に前記支持部材を駆動させる駆動機構（２４）と、がさらに設けられ、前記支持部材には、前記駆動機構によって駆動される支持板（２３ａ）と、前記支持板に設けられ、前記接線方向に対して垂直方向に案内するレール（２３ｃ）及び前記レールに沿って移動可能なスライダ（２３ｄ）を有するリニアガイド（２３ｂ）と、が設けられ、前記固定部材は、前記スライダに対して回転可能に支持されていてもよい。この形態によれば、駆動機構の駆動により、円弧ガイドの位置に応じてリニアガイドのスライダが移動しつつ円弧に合わせるように固定部材が回転する。従って、曲率中心の周りに検査ヘッドを回転させることができる。   In the form in which the fixing member and the arc guide are provided, the inspection head driving means is formed with a support member (23) for supporting the fixing member so as to be movable along the arc guide, and the arc guide. And a drive mechanism (24) for driving the support member in a tangential direction of the arc to be provided. The support member is provided with a support plate (23a) driven by the drive mechanism and the support plate. A linear guide (23b) having a rail (23c) for guiding in a direction perpendicular to the tangential direction and a slider (23d) movable along the rail, and the fixing member is attached to the slider On the other hand, it may be rotatably supported. According to this aspect, the drive of the drive mechanism rotates the fixing member so that the slider of the linear guide moves along the arc while moving according to the position of the arc guide. Therefore, the inspection head can be rotated around the center of curvature.

固定部材と円弧ガイドが設けられた形態において、前記固定部材は、前記曲面の曲率中心に対して前記検査ヘッドの開口部と前記曲面とが互いに向かい合うように前記検査ヘッドを保持固定してもよい。この形態によれば、曲面に対して一定の焦点距離を保ちながら検査ヘッドが移動できる。検査面となる曲面が被検査物の内周面又は外周面のいずれに形成されていても検査ヘッドの固定位置を調整することで曲面の検査が可能となる。   In the form in which the fixing member and the arc guide are provided, the fixing member may hold and fix the inspection head so that the opening of the inspection head and the curved surface face each other with respect to the center of curvature of the curved surface. . According to this aspect, the inspection head can move while maintaining a constant focal length with respect to the curved surface. Even if a curved surface serving as an inspection surface is formed on either the inner peripheral surface or the outer peripheral surface of the inspection object, the curved surface can be inspected by adjusting the fixing position of the inspection head.

本発明の表面検査装置の一形態において、前記検査ヘッドには、外周に開口部が設けられたヘッド筒（１１）と、前記ヘッド筒の内部に設けられ、前記ヘッド筒の軸線（ＡＸ）方向に進入した検査光の光路を前記開口部に向けて変更し、かつ被検査物の表面における前記検査光の反射光の光路を前記ヘッド筒の前記軸線方向に沿って前記検査光と逆向きに変更する光路変更手段（１２）と、検査光の光路上に設けられるレンズ（１３）と、前記ヘッド筒と同軸上に設けられ、前記レンズを前記光路変更手段と前記軸線方向に対して相対的に変位可能に保持するレンズ保持筒（１４）と、が設けられていてもよい。この形態によれば、レンズ保持筒を軸線方向に移動させるとレンズと光路変更手段との間の距離が変更される。これによりレンズから曲面の検査位置までの距離を変更できるので、被検査物の内径や曲面の曲率に変更があった場合にも焦点距離の調整や光量の適正化が可能である。   In one form of the surface inspection apparatus of the present invention, the inspection head includes a head cylinder (11) having an opening on the outer periphery, and an axis (AX) direction of the head cylinder provided in the head cylinder. The optical path of the inspection light that has entered the head is changed toward the opening, and the optical path of the reflected light of the inspection light on the surface of the inspection object is opposite to the inspection light along the axial direction of the head cylinder. An optical path changing means (12) for changing, a lens (13) provided on the optical path of the inspection light, and provided coaxially with the head cylinder, the lens being relative to the optical path changing means and the axial direction And a lens holding cylinder (14) that is displaceably held. According to this aspect, when the lens holding cylinder is moved in the axial direction, the distance between the lens and the optical path changing means is changed. Thereby, the distance from the lens to the inspection position of the curved surface can be changed, so that the focal length can be adjusted and the amount of light can be optimized even when the inner diameter of the object to be inspected and the curvature of the curved surface are changed.

なお、以上の説明では本発明の理解を容易にするために添付図面の参照符号を括弧書きにて付記したが、それにより本発明が図示の形態に限定されるものではない。   In addition, in the above description, in order to make an understanding of this invention easy, the reference sign of the accompanying drawing was attached in parenthesis, but this invention is not limited to the form of illustration by it.

以上、説明したように、本発明の表面検査装置においては、被検査物の外周面又は内周面に形成された曲面に対して、その曲率中心を中心として検査ヘッドが回転する。被検査物は軸線中心の周りに回転するので検査ヘッドが曲率中心の周りに回転することにより検査ヘッドは曲面に対して焦点距離を一定とすることができ、曲面の全周面を検査することができる。従って、曲面を有する被検査物に対しても検査ヘッドによる走査が可能となり、装置による自動検査が可能となる。よって、作業者の負荷軽減が図られるとともに、検査結果のばらつきを防止して傷の大きさの定量的な判定ができる。   As described above, in the surface inspection apparatus of the present invention, the inspection head rotates around the center of curvature with respect to the curved surface formed on the outer peripheral surface or inner peripheral surface of the inspection object. Since the object to be inspected rotates around the axis center, the inspection head rotates around the center of curvature, so that the inspection head can keep the focal length constant with respect to the curved surface, and inspect the entire circumference of the curved surface. Can do. Therefore, it is possible to scan the inspection object having a curved surface by the inspection head, and it is possible to perform automatic inspection by the apparatus. Therefore, the burden on the operator can be reduced, and variations in the inspection results can be prevented to quantitatively determine the size of the scratch.

本発明の一形態に係る表面検査装置の正面概略図。1 is a schematic front view of a surface inspection apparatus according to an embodiment of the present invention. 駆動ユニットの側面拡大図。The side enlarged view of a drive unit. 玉軸受の外輪の軌道面の検査に関する動作を説明する図。The figure explaining operation | movement regarding the test | inspection of the raceway surface of the outer ring | wheel of a ball bearing. 図３に続く動作を説明する図。The figure explaining the operation | movement following FIG. 玉軸受の内輪の軌道面の検査に関する動作を説明する図。The figure explaining the operation | movement regarding the test | inspection of the raceway surface of the inner ring of a ball bearing. 図４に続く動作を説明する図。The figure explaining the operation | movement following FIG. 検査ヘッドの拡大図。The enlarged view of an inspection head.

図１に本発明の一形態に係る表面検査装置の正面概略図を示す。表面検査装置１は、被検査物１００の内周面又は外周面を検査するための検査機構２と、検査機構２の動作制御や測定結果の処理等を実行するための制御部３とを備えている。検査機構２は、被検査物１００に対して検査光を投光し、その反射光を受光するための検査ヘッド４と、検査ヘッド４を駆動するための検査ヘッド駆動手段としての駆動ユニット５と、被検査物１００を支持するための被検査物支持手段としての支持ユニット６とを有する。被検査物１００は、玉軸受の外輪１００Ａ及び内輪１００Ｂである。外輪１００Ａ及び内輪１００Ｂの表面にはそれぞれ玉と接触する曲面としての軌道面１００ａが設けられている。   FIG. 1 shows a schematic front view of a surface inspection apparatus according to an embodiment of the present invention. The surface inspection apparatus 1 includes an inspection mechanism 2 for inspecting an inner peripheral surface or an outer peripheral surface of the inspection object 100, and a control unit 3 for executing operation control of the inspection mechanism 2, processing of measurement results, and the like. ing. The inspection mechanism 2 projects inspection light onto the inspection object 100 and receives the reflected light, and a drive unit 5 as inspection head driving means for driving the inspection head 4. And a support unit 6 as a test object support means for supporting the test object 100. The inspection object 100 is an outer ring 100A and an inner ring 100B of ball bearings. On the surfaces of the outer ring 100A and the inner ring 100B, raceway surfaces 100a are provided as curved surfaces that come into contact with the balls.

図７に検査ヘッド４の拡大図を示す。検査ヘッド４は、外周に開口部１１ａが設けられたヘッド筒１１と、ヘッド筒１１の内部に設けられた光路変更手段としてのミラー１２と、検査光の光路上に設けられるレンズ１３と、レンズ１３を保持するレンズ保持筒１４と、図示しないレーザーダイオード及びフォトディテクタと接続されて検査光が導かれる投受光ファイバ１５と、投受光ファイバ１５をレンズ保持筒１４に固定するフェルール１６とを備える。レンズ保持筒１４は、ヘッド筒１１の内部に同軸に設けられ、レンズ保持筒１４のレンズ１３とヘッド筒１１のミラー１２とが相対的に変位可能となるようにレンズ保持筒１４がヘッド筒１１内を移動できるように構成される。投受光ファイバ１５から検査光が検査ヘッド４の軸線ＡＸ方向に射出されると、レンズ１３により集光されつつミラー１２により検査光の光路が開口部１１ａに向けて変更され、被検査物１００の軌道面１００ａに投光される。軌道面１００ａで反射した反射光は再びミラー１２によりその光路がヘッド筒１１の軸線ＡＸ方向に沿って検査光と逆向きに変更され、レンズ１３により投受光ファイバ１５へ集光される。検査光及び反射光は、検査ヘッド４の先端部に設けられた開口部１１ａを介して検査ヘッド４内外を出入し、ミラー１２は開口部１１ａと対向するように設けられる。   FIG. 7 shows an enlarged view of the inspection head 4. The inspection head 4 includes a head cylinder 11 having an opening 11a on the outer periphery, a mirror 12 as an optical path changing unit provided inside the head cylinder 11, a lens 13 provided on the optical path of the inspection light, and a lens. 13 is provided with a lens holding cylinder 14 for holding 13, a light projecting / receiving fiber 15 connected to a laser diode and a photodetector (not shown) to guide inspection light, and a ferrule 16 for fixing the light receiving / receiving fiber 15 to the lens holding cylinder 14. The lens holding cylinder 14 is provided coaxially inside the head cylinder 11, and the lens holding cylinder 14 is arranged in the head cylinder 11 so that the lens 13 of the lens holding cylinder 14 and the mirror 12 of the head cylinder 11 can be relatively displaced. It is configured to be able to move inside. When the inspection light is emitted from the light projecting / receiving fiber 15 in the direction of the axis AX of the inspection head 4, the optical path of the inspection light is changed toward the opening 11 a by the mirror 12 while being condensed by the lens 13. The light is projected onto the raceway surface 100a. The reflected light reflected by the raceway surface 100 a is changed again by the mirror 12 so that its optical path is opposite to the inspection light along the axis AX direction of the head cylinder 11, and is condensed on the light projecting / receiving fiber 15 by the lens 13. Inspection light and reflected light enter and exit the inspection head 4 through an opening 11a provided at the tip of the inspection head 4, and the mirror 12 is provided to face the opening 11a.

図１及び図２を参照して駆動ユニット５の説明をする。図２は、駆動ユニット５の側面拡大図である。駆動ユニット５は、検査ヘッド４を保持固定する固定部材としてのヘッドキーパー２１と、ヘッドキーパー２１を案内する円弧ガイド２２と、ヘッドキーパー２１を支持して駆動するためのヘッドホルダー２３と、ヘッドホルダー２３を所定方向へ往復運動させる駆動機構としての一軸ステージ２４とを備えている。ヘッドキーパー２１には検査ヘッド４が取り付けられる。ヘッドキーパー２１は、駆動ユニット５に対して検査ヘッド４を保持固定する。ヘッドキーパー２１は、検査ヘッド４を着脱可能に構成される。円弧ガイド２２には、円弧を描くように形成されたガイド溝２２ａが設けられている。円弧ガイド２２は、ガイド溝２２ａに沿ってヘッドキーパー２１を案内する。このためガイド溝２２ａは、被検査物１００の軌道面１００ａが形成する曲率中心を中心としてその周りを検査ヘッド４が回転移動するようにヘッドキーパー２１を案内する。一方、ヘッドキーパー２１には、ガイド溝２２ａに案内されるカムフォロア２１ａ、２１ｂが設けられている。カムフォロア２１ａは、ヘッドキーパー２１に設けられ、カムフォロア２１ｂは、カムフォロア２１ａと相対的に移動可能な構成を有しており、円弧ガイド２２に応じて調整ができる。なお、本形態においては、各カムフォロア２１ａ、２１ｂは、２つずつ設けられている。   The drive unit 5 will be described with reference to FIGS. 1 and 2. FIG. 2 is an enlarged side view of the drive unit 5. The drive unit 5 includes a head keeper 21 as a fixing member for holding and fixing the inspection head 4, an arc guide 22 for guiding the head keeper 21, a head holder 23 for supporting and driving the head keeper 21, and a head holder And a uniaxial stage 24 as a drive mechanism for reciprocating the head 23 in a predetermined direction. The inspection head 4 is attached to the head keeper 21. The head keeper 21 holds and fixes the inspection head 4 to the drive unit 5. The head keeper 21 is configured so that the inspection head 4 can be attached and detached. The arc guide 22 is provided with a guide groove 22a formed so as to draw an arc. The arc guide 22 guides the head keeper 21 along the guide groove 22a. Therefore, the guide groove 22a guides the head keeper 21 so that the inspection head 4 rotates around the center of curvature formed by the track surface 100a of the object 100 to be inspected. On the other hand, the head keeper 21 is provided with cam followers 21a and 21b guided in the guide groove 22a. The cam follower 21 a is provided on the head keeper 21, and the cam follower 21 b is configured to be movable relative to the cam follower 21 a and can be adjusted according to the arc guide 22. In this embodiment, two cam followers 21a and 21b are provided.

ヘッドホルダー２３には、支持板２３ａと、支持板２３ａに固定され、ヘッドキーパー２１が円弧ガイド２２のガイド溝２２ａに沿った移動を可能にするリニアガイド２３ｂとが設けられている。支持板２３ａは長方形の板状部材である。支持板２３ａの長手方向の一端側は、後述する一軸ステージ２４に固定される。その他端側には、リニアガイド２３ｂが固定される。リニアガイド２３ｂは、レール２３ｃと、レール２３ｃに沿って移動可能なスライダ２３ｄとを有し、支持板２３ａの長手方向、つまり、一軸ステージ２４の移動方向に対して垂直方向、に向けてレール２３ｃが配置され、そのレール２３ｃに沿ってスライダ２３ｄが移動する。スライダ２３ｄにはヘッドキーパー２１が軸２３ｅの周りに回転可能に支持される。一軸ステージ２４は、円弧ガイド２２の描く円弧に対し、接線方向に向けてレール２４ａが配置され、そのレール２４ａに沿って移動するテーブルに支持板２３ａが固定される。一軸ステージ２４の駆動により支持板２３ａが移動すると、ヘッドキーパー２１は、リニアガイド２３ｂの動作により円弧ガイド２２のガイド溝２２ａに沿ってカムフォロア２１ａ、２１ｂを移動させることができる。   The head holder 23 is provided with a support plate 23 a and a linear guide 23 b that is fixed to the support plate 23 a and allows the head keeper 21 to move along the guide groove 22 a of the arc guide 22. The support plate 23a is a rectangular plate member. One end side in the longitudinal direction of the support plate 23a is fixed to a uniaxial stage 24 described later. The linear guide 23b is fixed to the other end side. The linear guide 23b includes a rail 23c and a slider 23d that can move along the rail 23c, and the rail 23c is directed in the longitudinal direction of the support plate 23a, that is, in the direction perpendicular to the moving direction of the uniaxial stage 24. Is arranged, and the slider 23d moves along the rail 23c. A head keeper 21 is supported by the slider 23d so as to be rotatable around a shaft 23e. In the uniaxial stage 24, a rail 24a is arranged in a tangential direction with respect to an arc drawn by the arc guide 22, and a support plate 23a is fixed to a table that moves along the rail 24a. When the support plate 23a is moved by driving the uniaxial stage 24, the head keeper 21 can move the cam followers 21a and 21b along the guide groove 22a of the arc guide 22 by the operation of the linear guide 23b.

支持ユニット６は、被検査物１００を支持する支持台３１と、支持台３１を回転駆動する駆動源３２と、駆動源３２に取り付けられるエンコーダ３３とを備えている。支持台３１は、被検査物１００を載せてその軸線の周りに回転可能に設けられる。支持台３１は、駆動源３２により回転駆動が可能であり、駆動源３２の回転に関する物理量は取り付けられたエンコーダ３３により検出される。   The support unit 6 includes a support base 31 that supports the inspection object 100, a drive source 32 that rotationally drives the support base 31, and an encoder 33 that is attached to the drive source 32. The support base 31 is provided so as to be able to rotate around an axis line on which the inspection object 100 is placed. The support base 31 can be rotationally driven by a drive source 32, and a physical quantity related to the rotation of the drive source 32 is detected by an encoder 33 attached thereto.

制御部３は、表面検査装置１による検査工程の管理、検査ヘッド４の測定結果の処理、駆動ユニット５の各部の動作の制御処理、検査ヘッド４のフォトディテクタの出力信号に対する所定の処理等が行われる。制御部３は、パーソナルコンピュータ等の汎用コンピュータ機器を利用して構成することができ、各種処理を実行するためのコンピュータプログラムや測定されたデータ等を記憶する記憶部と、作業者が指示を入力するためのキーボード、マウス等の入力機器と、測定結果等を提示するためのモニタ等の出力機器とが設けられている。制御部３は、測定結果の処理により軌道面１００ａの二次元画像を生成し、さらに、エッジ処理や二値化処理等を施すことにより検出すべき欠陥等を強調した画像を得ることができる。制御部３は、得られた画像を所定のアルゴリズムで処理することにより、軌道面１００ａに許容限度を超える欠陥等が存在するか否か等を判定し、判定結果を出力する。なお、制御部３の構成については、周知技術を利用して構成することができる。   The control unit 3 performs inspection process management by the surface inspection apparatus 1, processing of measurement results of the inspection head 4, control processing of operations of each unit of the drive unit 5, predetermined processing for the output signal of the photodetector of the inspection head 4, and the like. Is called. The control unit 3 can be configured by using a general-purpose computer device such as a personal computer. The storage unit stores a computer program for executing various processes and measured data, and an operator inputs instructions. An input device such as a keyboard and a mouse for performing the operation and an output device such as a monitor for presenting the measurement result and the like are provided. The control unit 3 can generate a two-dimensional image of the track surface 100a by processing the measurement result, and can obtain an image in which defects to be detected are emphasized by performing edge processing, binarization processing, and the like. The control unit 3 processes the obtained image with a predetermined algorithm to determine whether or not a defect exceeding the allowable limit exists on the track surface 100a and outputs a determination result. In addition, about the structure of the control part 3, it can comprise using a well-known technique.

表面検査装置１において、被検査物１００の軌道面１００ａの検査に関する動作を図３及び図４を参照して説明する。表面検査装置１の支持台３１には、被検査物１００である玉軸受の外輪１００Ａが設置される。外輪１００Ａは、支持台３１の回転軸線の周りに回転可能となるように外周側にて支持固定される。検査対象となる玉軸受の外輪１００Ａ及び内輪１００Ｂの軌道面１００ａは、玉軸受において非常に重要な部位であり、傷の存在は玉軸受の破損事故の原因となり得る。従来、このような軌道面１００ａの検査は、作業者による目視検査によっている。作業者による検査では、傷の判定にばらつきが生じることがあり、また、微細な傷まで発見することは容易ではない。このため、作業者にかかる負荷が大きく、長時間の検査を強いることはできないため、検査に要するコストが増大し、検査における負担となっている。   The operation relating to the inspection of the track surface 100a of the inspection object 100 in the surface inspection apparatus 1 will be described with reference to FIGS. On the support base 31 of the surface inspection apparatus 1, an outer ring 100 </ b> A of a ball bearing that is the object to be inspected 100 is installed. The outer ring 100 </ b> A is supported and fixed on the outer peripheral side so as to be rotatable around the rotation axis of the support base 31. The raceway surface 100a of the outer ring 100A and the inner ring 100B of the ball bearing to be inspected is a very important part in the ball bearing, and the presence of scratches can cause damage to the ball bearing. Conventionally, the inspection of the raceway surface 100a is based on a visual inspection by an operator. In the inspection by the operator, the determination of the scratch may vary, and it is not easy to find even a fine scratch. For this reason, since the load placed on the worker is large and it is impossible to force a long-time inspection, the cost required for the inspection increases, which is a burden on the inspection.

そこで、本発明の表面検査装置１では、このような曲率を有する軌道面１００ａの検査を可能とすることで作業者の負荷を減らし、コスト削減を可能とする。また、傷の大きさについて定量的な判定が可能となり、軌道面１００ａの様子を二次元画像にて確認することもできる。図３に示すように、外輪１００Ａの軌道面１００ａの検査をする場合、検査ヘッド４は、外輪１００Ａの内周面に挿入され、その軌道面１００ａを検査する。検査ヘッド４は、軌道面１００ａの曲率中心Ｏを中心として検査ヘッド４の開口部１１ａと軌道面１００ａとが向かい合うように設置され、曲率中心Ｏの周りを回転するように円弧ガイド２２に案内される。つまり、一軸ステージ２４のレール２４ａに沿って支持板２３ａが移動すると、支持板２３ａと軸２３ｅを介して回転可能に接続されたヘッドキーパー２１が円弧ガイド２２に沿って移動する（図４）。このとき、ヘッドキーパー２１のカムフォロア２１ａ、２１ｂは円弧ガイド２２のガイド溝２２ａに沿って移動するが、ガイド溝２２ａが円弧を描いているので、リニアガイド２３ｂが支持板２３ａの長手方向に軸２３ｅを介してヘッドキーパー２１を案内することで、ガイド溝２２ａに沿った移動ができるようにしている。   Therefore, in the surface inspection apparatus 1 of the present invention, it is possible to inspect the raceway surface 100a having such a curvature, thereby reducing the load on the operator and reducing the cost. Further, it is possible to quantitatively determine the size of the scratch, and the state of the track surface 100a can be confirmed with a two-dimensional image. As shown in FIG. 3, when inspecting the raceway surface 100a of the outer ring 100A, the inspection head 4 is inserted into the inner peripheral surface of the outer ring 100A and inspects the raceway surface 100a. The inspection head 4 is installed so that the opening 11a of the inspection head 4 and the raceway surface 100a face each other around the center of curvature O of the raceway surface 100a, and is guided by the arc guide 22 so as to rotate around the center of curvature O. The That is, when the support plate 23a moves along the rail 24a of the uniaxial stage 24, the head keeper 21 rotatably connected via the support plate 23a and the shaft 23e moves along the arc guide 22 (FIG. 4). At this time, the cam followers 21a and 21b of the head keeper 21 move along the guide groove 22a of the arc guide 22, but since the guide groove 22a draws an arc, the linear guide 23b has a shaft 23e in the longitudinal direction of the support plate 23a. The head keeper 21 is guided via the guide groove 22a so that the head keeper 21 can move along the guide groove 22a.

制御部３は、駆動源３２に取り付けられたエンコーダ３３の出力信号と一軸ステージ２４の出力信号とを取り込んでそれぞれ支持台３１の回転速度と検査ヘッド４の円弧運動速度を同期させる。外輪１００Ａは支持台３１の軸線中心の周りに回転するので検査ヘッド４が軌道面１００ａの曲率中心Ｏの周りに回転することにより、検査ヘッド４は軌道面１００ａに対して焦点距離を一定とすることができ、軌道面１００ａの全周面に検査光を投光することができる。そして、その反射光を取得して制御部３が二次元画像を生成し、これに基づいて軌道面１００ａの傷の有無を判断する。   The control unit 3 takes in the output signal of the encoder 33 attached to the drive source 32 and the output signal of the uniaxial stage 24 and synchronizes the rotational speed of the support base 31 and the arc movement speed of the inspection head 4 respectively. Since the outer ring 100A rotates around the axis center of the support base 31, when the inspection head 4 rotates around the center of curvature O of the track surface 100a, the test head 4 makes the focal length constant with respect to the track surface 100a. The inspection light can be projected onto the entire circumferential surface of the track surface 100a. And the control part 3 acquires the reflected light, produces | generates a two-dimensional image, and judges the presence or absence of the damage | wound of the track surface 100a based on this.

図５及び図６を参照して玉軸受の内輪１００Ｂの軌道面１００ａの検査に関する動作の説明を外輪１００Ａの検査と異なる点を中心に説明する。表面検査装置１の支持台３１に、玉軸受の内輪１００Ｂが設置される。内輪１００Ｂの軌道面１００ａは外周側となるので内周側で内輪１００Ｂを固定している。検査ヘッド４と軌道面１００ａとは、曲率中心Ｏに対して向かい合うように設置される。つまり、図３及び図５を比較して明らかなように外輪１００Ａの検査と異なり、曲率中心Ｏに対して配置される位置が逆向きとなっている。検査ヘッド４の配置は、ヘッドキーパー２１の変更にて対応可能である。ヘッドキーパー２１に対して検査ヘッド４の位置を調整可能に構成してもよいし、ヘッドキーパー２１自体をヘッドホルダー２３に対して着脱可能として外輪１００Ａ又は内輪１００Ｂに対応したヘッドキーパー２１を検査対象に応じて付け替えるように構成してもよい。このような構成とすることで、外輪１００Ａと同様にして内輪１００Ｂについても軌道面１００ａの全周を検査することができる（図６）。   With reference to FIG.5 and FIG.6, description regarding the operation | movement regarding the test | inspection of the raceway surface 100a of the inner ring | wheel 100B of a ball bearing is demonstrated focusing on a different point from the test | inspection of the outer ring | wheel 100A. An inner ring 100 </ b> B of a ball bearing is installed on the support base 31 of the surface inspection apparatus 1. Since the raceway surface 100a of the inner ring 100B is on the outer peripheral side, the inner ring 100B is fixed on the inner peripheral side. The inspection head 4 and the raceway surface 100a are installed so as to face the curvature center O. That is, as apparent from comparison between FIG. 3 and FIG. 5, unlike the inspection of the outer ring 100 </ b> A, the position arranged with respect to the center of curvature O is reversed. The inspection head 4 can be arranged by changing the head keeper 21. The position of the inspection head 4 may be adjustable with respect to the head keeper 21, or the head keeper 21 corresponding to the outer ring 100 </ b> A or the inner ring 100 </ b> B may be inspected by making the head keeper 21 detachable from the head holder 23. You may comprise so that it may replace according to. With this configuration, the entire circumference of the raceway surface 100a can be inspected for the inner ring 100B in the same manner as the outer ring 100A (FIG. 6).

本発明の表面検査装置１は、内径や軌道面１００ａの曲率が異なる様々な種類の玉軸受に対して適用が可能である。図７を参照して、曲率の異なる軌道面１００ａに対する検査を説明する。図７において、向かって左側の軸受１００Ｃと比較して右側の軸受１００Ｄは小さく、従って曲率も大きい。なお、左右の検査ヘッド４の構成は同様である。検査ヘッド４に用いられるレンズ１３によって焦点距離は定められているので、軸受１００Ｄのように曲率が大きい場合には、ミラー１２とレンズ１３とを遠ざけるようにレンズ保持筒１４を軸線ＡＸ方向に距離ｄだけ移動させて焦点を調整することができる。また、曲率が異なることにより検査光の反射光の光量が異なるため、これを調整するためにもレンズ保持筒１４を移動させることによるレンズ１３の位置の調整が有効である。レンズ１３は、レンズ保持筒１４の先端部に固定されているので、レンズ保持筒１４を移動させるだけで焦点距離の調整が可能であり、簡易な構成で実現が可能である。   The surface inspection apparatus 1 of the present invention can be applied to various types of ball bearings having different inner diameters and curvatures of the raceway surface 100a. With reference to FIG. 7, the inspection with respect to the track surface 100a having a different curvature will be described. In FIG. 7, the right-side bearing 100D is smaller than the left-side bearing 100C and therefore has a large curvature. The left and right inspection heads 4 have the same configuration. Since the focal length is determined by the lens 13 used in the inspection head 4, when the curvature is large like the bearing 100 </ b> D, the lens holding cylinder 14 is moved away from the mirror 12 and the lens 13 in the direction of the axis AX. The focal point can be adjusted by moving it by d. In addition, since the amount of reflected light of the inspection light varies depending on the curvature, adjustment of the position of the lens 13 by moving the lens holding cylinder 14 is effective for adjusting this. Since the lens 13 is fixed to the distal end portion of the lens holding cylinder 14, the focal length can be adjusted only by moving the lens holding cylinder 14, and can be realized with a simple configuration.

本発明は、上述した形態に限定されることなく、種々の形態にて実施することができる。例えば、本形態では、被検査物１００として玉軸受の外輪１００Ａ及び内輪１００Ｂで説明したがこれに限られない。軌道面１００ａのように曲率を有する円筒状の各種部材に対して本発明の表面検査装置１を適用することができる。また、ヘッドホルダー２３を駆動するための駆動機構として一軸ステージ２４で説明したがこれに限られない。ヘッドキーパー２１を円弧ガイド２２に沿って移動できるようにヘッドホルダー２３及び一軸ステージ２４が構成されていればよく、一軸ステージ２４に限られず二軸ステージ等の周知の各種駆動機構を適用させることができ、これに合わせてヘッドホルダー２３の構成を変更してよい。   The present invention is not limited to the above-described form and can be implemented in various forms. For example, in the present embodiment, the outer ring 100 </ b> A and the inner ring 100 </ b> B of the ball bearing are described as the inspection object 100, but the present invention is not limited thereto. The surface inspection apparatus 1 of the present invention can be applied to various cylindrical members having a curvature like the raceway surface 100a. Further, although the uniaxial stage 24 has been described as a driving mechanism for driving the head holder 23, the present invention is not limited to this. The head holder 23 and the uniaxial stage 24 only need to be configured so that the head keeper 21 can be moved along the arc guide 22, and not limited to the uniaxial stage 24, various known drive mechanisms such as a biaxial stage can be applied. The configuration of the head holder 23 may be changed according to this.

１ 表面検査装置
３ 制御部
４ 検査ヘッド
５ 駆動ユニット（検査ヘッド駆動手段）
６ 支持ユニット（被検査物支持手段）
１３ レンズ
１４ レンズ支持筒
２１ ヘッドキーパー（固定部材）
２２ 円弧ガイド
２３ ヘッドホルダー（支持部材）
２４ 一軸ステージ（駆動機構）
３１ 支持台
１００ 被検査物
１００Ａ 外輪
１００Ｂ 内輪
１００ａ 軌道面（曲面） DESCRIPTION OF SYMBOLS 1 Surface inspection apparatus 3 Control part 4 Inspection head 5 Drive unit (inspection head drive means)
6 Support unit (inspection object support means)
13 Lens 14 Lens support tube 21 Head keeper (fixing member)
22 Arc guide 23 Head holder (supporting member)
24 Single axis stage (drive mechanism)
31 Support base 100 Inspected object 100A Outer ring 100B Inner ring 100a Track surface (curved surface)

Claims (5)

円筒形状で、その内周面又は外周面の少なくともいずれか一方に軸線方向に沿って形成された曲面を有する被検査物をその中心軸線の周りに回転自在に支持する被検査物支持手段と、外周に設けられた開口部から検査光を射出する検査ヘッドと、を有し、前記検査ヘッドが前記被検査物の内周面又は外周面の曲面に向けて検査光を照射し、その反射光の光量に基づいて前記被検査物の表面を検査する表面検査装置であって、
前記被検査物の表面に対し、前記曲面の曲率中心を中心として前記検査ヘッドを回転駆動させる検査ヘッド駆動手段を備えた表面検査装置。 A test object support means for supporting a test object having a cylindrical shape and having a curved surface formed along the axial direction on at least one of the inner peripheral surface and the outer peripheral surface thereof, and rotatable around the central axis; An inspection head that emits inspection light from an opening provided on the outer periphery, and the inspection head irradiates the inspection light toward the inner peripheral surface or the curved surface of the outer peripheral surface of the inspection object, and the reflected light A surface inspection apparatus for inspecting the surface of the object to be inspected based on the amount of light,
A surface inspection apparatus comprising inspection head driving means for rotationally driving the inspection head around the center of curvature of the curved surface with respect to the surface of the inspection object. 前記検査ヘッド駆動手段には、前記検査ヘッドを保持固定する固定部材と、前記固定部材を前記曲面の曲率中心の周りに案内する円弧状の円弧ガイドと、が設けられている請求項１に記載の表面検査装置。   2. The inspection head driving means is provided with a fixing member that holds and fixes the inspection head, and an arcuate arc guide that guides the fixing member around the center of curvature of the curved surface. Surface inspection equipment. 前記検査ヘッド駆動手段には、前記円弧ガイドに沿った移動が可能なように前記固定部材を支持する支持部材と、前記円弧ガイドが形成する円弧の接線方向に前記支持部材を駆動させる駆動機構と、がさらに設けられ、
前記支持部材には、前記駆動機構によって駆動される支持板と、前記支持板に設けられ、前記接線方向に対して垂直方向に案内するレール及び前記レールに沿って移動可能なスライダを有するリニアガイドと、が設けられ、
前記固定部材は、前記スライダに対して回転可能に支持されている請求項２に記載の表面検査装置。 The inspection head drive means includes a support member that supports the fixing member so as to be movable along the arc guide, and a drive mechanism that drives the support member in a tangential direction of an arc formed by the arc guide. , Is further provided,
The support member includes a support plate driven by the drive mechanism, a linear guide provided on the support plate and guided in a direction perpendicular to the tangential direction, and a slider movable along the rail. And provided,
The surface inspection apparatus according to claim 2, wherein the fixing member is rotatably supported with respect to the slider. 前記固定部材は、前記曲面の曲率中心に対して前記検査ヘッドの開口部と前記曲面とが互いに向かい合うように前記検査ヘッドを保持固定する請求項２又は３に記載の表面検査装置。   The surface inspection apparatus according to claim 2, wherein the fixing member holds and fixes the inspection head such that an opening of the inspection head and the curved surface face each other with respect to the curvature center of the curved surface. 前記検査ヘッドには、外周に開口部が設けられたヘッド筒と、前記ヘッド筒の内部に設けられ、前記ヘッド筒の軸線方向に進入した検査光の光路を前記開口部に向けて変更し、かつ被検査物の表面における前記検査光の反射光の光路を前記ヘッド筒の前記軸線方向に沿って前記検査光と逆向きに変更する光路変更手段と、検査光の光路上に設けられるレンズと、前記ヘッド筒と同軸上に設けられ、前記レンズを前記光路変更手段と前記軸線方向に対して相対的に変位可能に保持するレンズ保持筒と、が設けられている請求項１〜４のいずれか一項に記載の表面検査装置。   In the inspection head, a head cylinder having an opening on the outer periphery, and an optical path of inspection light that is provided inside the head cylinder and enters the axial direction of the head cylinder are changed toward the opening, And an optical path changing means for changing the optical path of the reflected light of the inspection light on the surface of the inspection object in the direction opposite to the inspection light along the axial direction of the head cylinder, and a lens provided on the optical path of the inspection light And a lens holding cylinder that is provided coaxially with the head cylinder and holds the lens so as to be relatively displaceable with respect to the optical path changing means and the axial direction. The surface inspection apparatus according to claim 1.
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