JP2012040615A - Surface coating cutting tool with hard coating layer exhibiting excellent peel resistance and wear resistance in high-speed cutting of difficult-to-cut material - Google Patents
Surface coating cutting tool with hard coating layer exhibiting excellent peel resistance and wear resistance in high-speed cutting of difficult-to-cut material Download PDFInfo
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この発明は、硬質被覆層がすぐれた耐溶着性とすぐれた硬さを有する表面層によって構成され、したがって特に各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の切削加工を、高熱発生を伴う高速切削条件で行った場合にも、溶着が発生することによる硬質被覆層の剥離を抑制し、長期に亘ってすぐれた耐剥離性と耐摩耗性を発揮する表面被覆切削工具(以下、被覆工具という)に関するものである。 In the present invention, the hard coating layer is constituted by a surface layer having excellent welding resistance and excellent hardness, and therefore cutting hard hard-to-cut materials such as various Ti-based alloys and high Si-containing Al-Si based alloys. Surface coating that exhibits excellent peeling resistance and wear resistance over a long period of time, even when processing is performed under high-speed cutting conditions with high heat generation, suppressing the peeling of the hard coating layer due to the occurrence of welding. The present invention relates to a cutting tool (hereinafter referred to as a coated tool).
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、前記被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに前記被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。 In general, for coated tools, throwaway inserts that are detachably attached to the tip of the cutting tool for turning and planing of various steel and cast iron materials, drilling of the work material, etc. Drills, miniature drills, solid type end mills used for chamfering, grooving, shouldering, etc. of the work material, and the solid type A slow-away end mill tool that performs cutting work in the same manner as an end mill is known.
また、被覆工具として、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された工具基体の表面に、
(a)0.8〜5μmの平均層厚を有し、かつ、組成式:(Al1−X TiX )N(ただし、原子比で、Xは0.25〜0.60を示す)を満足する(Al,Ti)N層からなる下部層、
(b)0.1〜0.5μmの平均層厚を有するZrBN(硼窒化ジルコニウム)層からなる密着接合層、
(c)0.8〜5μmの平均層厚を有するZrB2(硼化ジルコニウム)層からなる上部層、
上記(a)〜(c)からなる硬質被覆層を形成した被覆工具(以下、従来被覆工具という)が知られており、そして、この従来被覆工具は、合金工具鋼や軸受鋼の焼き入れ材などの高硬度鋼の高速切削加工ですぐれた耐摩耗性を発揮することが知られている。
In addition, as a coated tool, on the surface of a tool base composed of tungsten carbide (hereinafter referred to as WC) based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) based cermet,
(A) having an average layer thickness of 0.8 to 5 μm and a composition formula: (Al 1-X Ti X ) N (wherein, X is 0.25 to 0.60 in atomic ratio) A lower layer consisting of a satisfactory (Al, Ti) N layer,
(B) an adhesive bonding layer comprising a ZrBN (zirconium boronitride) layer having an average layer thickness of 0.1 to 0.5 μm;
(C) an upper layer comprising a ZrB 2 (zirconium boride) layer having an average layer thickness of 0.8 to 5 μm;
A coated tool (hereinafter referred to as a conventional coated tool) in which a hard coating layer comprising the above (a) to (c) is formed is known, and this conventional coated tool is a hardened material of alloy tool steel or bearing steel. It is known to exhibit excellent wear resistance in high-speed cutting of high hardness steel such as.
さらに、上記の従来被覆工具は、アークイオンプレーティング装置と直流スパッタリング装置を併設した物理蒸着装置に上記の工具基体を装入し、まず、ヒータで装置内を加熱した状態で、装置内に反応ガスとして窒素ガスを導入し、アークイオンプレーティング装置のアノード電極と所定組成を有するTi−Al合金がセットされたカソード電極(蒸発源)との間にアーク放電を発生させることにより上記(a)の(Al,Ti)N層からなる下部層を成膜し、次いで、直流スパッタリング装置のカソード電極(蒸発源)として配置したZrB2焼結体のスパッタリングを開始し、装置内の雰囲気を、窒素雰囲気から順次Ar雰囲気と置換していくことによって、まず、上記(b)の密着接合層としてZrBN層を成膜し、次いで、上記ZrBN層上に重ねて上記(c)のZrB2層からなる上部層を成膜することにより製造されることも知られている。 Furthermore, the above-mentioned conventional coated tool is loaded with the above-mentioned tool base in a physical vapor deposition apparatus equipped with an arc ion plating apparatus and a direct current sputtering apparatus, and first reacts in the apparatus while being heated with a heater. Nitrogen gas is introduced as a gas, and arc discharge is generated between the anode electrode of the arc ion plating apparatus and the cathode electrode (evaporation source) on which a Ti—Al alloy having a predetermined composition is set (a). The lower layer composed of the (Al, Ti) N layer was formed, and then sputtering of the ZrB 2 sintered body arranged as the cathode electrode (evaporation source) of the DC sputtering apparatus was started, and the atmosphere in the apparatus was changed to nitrogen. By sequentially replacing the atmosphere with an Ar atmosphere, a ZrBN layer is first formed as the adhesive bonding layer of (b), and then the Z It is also known that it is produced by depositing an upper layer composed of the ZrB 2 layer of (c) above on the rBN layer.
また、硬質被覆層を成膜する手段としては、アークイオンプレーティング、直流スパッタリングばかりでなく、高出力パルススパッタリングを利用した成膜も提案されており、例えば、特許文献2、3に示されるように、パルスの瞬間印加電力を200W/cm2以上、パルスの一波長長さを100μsec以下という条件で高出力パルススパッタリングを行うことにより(Al,M)2O3(但し、Mは、Mg、Zn、Mn、Fe等)あるいはα−Al2O3を、高成膜速度で成膜できることも知られている。 As means for forming a hard coating layer, not only arc ion plating and direct current sputtering but also film formation using high-power pulse sputtering has been proposed. For example, as shown in Patent Documents 2 and 3 (Al, M) 2 O 3 (where M is Mg, by applying high power pulse sputtering under the condition that the instantaneous applied power of the pulse is 200 W / cm 2 or more and the one wavelength length of the pulse is 100 μsec or less. It is also known that Zn, Mn, Fe, etc.) or α-Al 2 O 3 can be deposited at a high deposition rate.
近年の切削加工装置の高性能化および自動化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は高速化し、かつ被削材の種類に限定されない汎用性のある被覆工具が強く望まれる傾向にあるが、上記の従来被覆工具においては、これを合金工具鋼や軸受鋼の焼き入れ材などの高硬度鋼の高速切削加工に用いた場合にはすぐれた耐摩耗性を発揮するものの、これを特に各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の切削加工を高速切削条件で行うのに用いた場合には、切削時に発生するきわめて高い発熱によって溶着が生じやすく、これを原因として硬質被覆層の剥離が起こり、比較的短時間で使用寿命に至るのが現状である。 The performance and automation of cutting machines in recent years have been remarkable. On the other hand, there are strong demands for labor saving and energy saving and further cost reduction for cutting. Accordingly, cutting speed has been increased and types of work materials have been increased. However, in the above-mentioned conventional coated tool, this is used for high-speed cutting of high hardness steel such as alloy tool steel and hardened material of bearing steel. Although it exhibits excellent wear resistance in some cases, it is used to cut hard difficult-to-cut materials such as various Ti alloys and high Si-containing Al-Si alloys under high-speed cutting conditions. In the present situation, welding is likely to occur due to extremely high heat generated during cutting, and the hard coating layer peels off due to this, and the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記の硬質難削材の高速切削加工で硬質層がすぐれた耐溶着性、耐剥離性を発揮する被覆工具を開発すべく、鋭意研究を行った結果、次のような知見を得た。
まず、従来被覆工具(特許文献1)においては、ZrB2層を直流スパッタリングで成膜しており、これを焼き入れ材などの高硬度鋼の高速切削加工に用いた場合には特段の問題も生じないが、これを特に各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の切削加工を高速切削条件で行うのに用いた場合には、表面組織が密であることから被削材との接触面積が大きく、きわめて高い発熱によって溶着が生じ、また、ZrB2層の結晶粒子間の結合も弱かったために、その溶着による硬質被覆層の剥離が起こることを突き止めた。
そこで、本発明者等は、溶着発生が起こりにくく、かつ、結晶粒相互の結合強度の高いZrB2層組織に着目して研究を行ったところ、ZrB2層を成膜するに当たり、特許文献1に示される直流スパッタリングではなく、特定条件の高出力パルススパッタリングを採用することによって、各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の高速切削条件における切削加工においても、表面組織がポーラスであることから、被削材との接触面積が小さいために発熱しにくく、溶着も生じにくい上に、ZrB2層の結晶粒相互の結合強度が強いために硬質被覆層の剥離が生じにくいZrB2層を成膜し得ることを見出したのである。
In view of the above, the present inventors have conducted intensive research in order to develop a coated tool that exhibits excellent welding resistance and peeling resistance in which a hard layer is excellent in high-speed cutting of the above-mentioned hard difficult-to-cut materials. As a result, the following knowledge was obtained.
First, in the conventional coated tool (Patent Document 1), the ZrB 2 layer is formed by direct current sputtering, and when this is used for high-speed cutting of hardened steel such as a quenching material, there is a special problem. Although this does not occur, the surface structure is dense when this is used to cut hard difficult-to-cut materials such as various Ti-based alloys and high Si-containing Al-Si based alloys under high-speed cutting conditions. As a result, the contact area with the work material was large, welding was caused by extremely high heat generation, and the bond between the crystal grains of the ZrB two layers was weak, and it was found that the hard coating layer was peeled off due to the welding. .
Accordingly, the present inventors have welding occurs hardly occurs, and, as a result of research by focusing on high ZrB 2 layer tissue binding strength of the crystal grains mutually, when forming the ZrB 2 layers,
具体的に言うならば、図1に、高出力パルススパッタリング装置の概略平面図を示すが、高出力パルススパッタリング装置にZr硼化物(以下、ZrB2で示す)粉末の焼結体(以下、ZrB2焼結体という)ターゲットを配置し、装置内雰囲気を、Ar雰囲気にし、8kW以上の高い平均投入電力で高出力パルススパッタリングを行い、工具基体の表面にZrB2層を蒸着成膜すると、溶着が生じにくいためすぐれた耐溶着性を有するとともに、結晶粒相互の結合強度が強く、膜硬度が高い(例えば、荷重200mgで測定した場合のナノインデンテーション硬さが3600kgf/mm2以上)、ZrB2層が成膜されることを見出したのである。
それにより、この結果の被覆工具は、特に著しい高熱発生を伴う各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の高速切削において、すぐれた耐溶着性、結晶粒相互の結合強度、硬さを有するZrB2層からなる表面層によって、特に、溶着に起因する硬質被覆層の剥離が抑制されることで、すぐれた耐剥離性と耐摩耗性を長期に亘って発揮するようになる、ということを見出したのである。
More specifically, FIG. 1 shows a schematic plan view of a high-power pulse sputtering apparatus. In the high-power pulse sputtering apparatus, Zr boride (hereinafter referred to as ZrB 2 ) powder sintered body (hereinafter referred to as ZrB). ( Sintered 2 ) Target is placed, the atmosphere in the apparatus is Ar atmosphere, high power pulse sputtering is performed with a high average input power of 8 kW or more, and ZrB 2 layer is deposited on the surface of the tool base. ZrB has excellent welding resistance, strong bonding strength between grains, and high film hardness (for example, nanoindentation hardness measured at a load of 200 mg is 3600 kgf / mm 2 or more). It was found that two layers were formed.
As a result, the resulting coated tool has excellent welding resistance and inter-grain intergration in high-speed cutting of hard difficult-to-cut materials such as various Ti-based alloys and high-Si-containing Al-Si-based alloys with particularly high heat generation. The surface layer consisting of ZrB 2 layers with high bond strength and hardness, especially, prevents the peeling of the hard coating layer caused by welding, thereby providing excellent peeling resistance and wear resistance over a long period of time I found out that I would do it.
この発明は、上記知見に基づいてなされたものであって、
「 炭化タングステン基超硬合金または炭窒化チタン基サーメットからなる工具基体の最表面に、少なくとも、0.5〜5μmの平均層厚を有するZr硼化物層を被覆してなる切削工具であって、
上記Zr硼化物層は、複数の平均粒径を有する結晶粒組織の複合組織として構成され、該複合組織は、5〜30nmの平均粒径を有する一次結晶粒の集合体からなる平均粒径50〜100nmの二次結晶粒と、該二次結晶粒の集合体からなる平均粒径200〜1000nmの三次結晶粒とから構成されていることを特徴とする表面被覆切削工具。」
に特徴を有するものである。
This invention has been made based on the above findings,
A cutting tool formed by coating a Zr boride layer having an average layer thickness of at least 0.5 to 5 μm on the outermost surface of a tool base made of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
The Zr boride layer is configured as a composite structure of a crystal grain structure having a plurality of average grain sizes, and the composite structure has an average grain size of 50 consisting of an aggregate of primary crystal grains having an average grain size of 5 to 30 nm. A surface-coated cutting tool comprising secondary crystal grains of ˜100 nm and tertiary crystal grains having an average grain size of 200 to 1000 nm composed of aggregates of the secondary crystal grains. "
It has the characteristics.
つぎに、この発明の被覆工具について、詳細に説明する。 Next, the coated tool of the present invention will be described in detail.
硬質被覆層の平均層厚
炭化タングステン基超硬合金または炭窒化チタン基サーメットからなる工具基体の最表面に形成するZr硼化物層は、その平均層厚が0.5μm未満では、自身のもつすぐれた耐摩耗性を長期に亘って発揮するには不十分であり、一方その平均層厚が5μmを越えると、Ti系合金、高Si含有Al−Si系合金などの硬質難削材の高速切削では溶着に起因する剥離は抑制できるが、高出力パルススパッタリングが有する皮膜への高い打ち込み効果に起因する大きな圧縮残留応力により、切刃部にチッピングが発生し易くなることから、その平均層厚を0.5〜5μmと定めた。
Average layer thickness of the hard coating layer The Zr boride layer formed on the outermost surface of the tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet has its own tangling when the average layer thickness is less than 0.5 μm. However, when the average layer thickness exceeds 5 μm, high-speed cutting of hard difficult-to-cut materials such as Ti-based alloys and high Si-containing Al-Si-based alloys is not sufficient. In this case, peeling due to welding can be suppressed, but chipping is likely to occur at the cutting edge due to the large compressive residual stress resulting from the high driving effect on the coating of high-power pulse sputtering. It was set to 0.5 to 5 μm.
複合組織の効果及び結晶粒の平均粒径
該複合組織の効果は結晶粒の集合体をなすことにより、該一次結晶粒同士はもとより該二次結晶粒同士の結合力を利用することが出来る点である。該複合組織を構成する一次結晶粒の平均粒径は、5nm未満の結晶粒を有する被膜を成膜することは難しく、一方その平均粒径が30nmを超えると転位運動を阻害する粒界が減ってしまうために、高い硬さを維持することが出来ない。また、該一次結晶粒の集合体からなる二次結晶粒の平均粒径が50nm未満であると複合組織の長所である結晶粒同士の強い結合力を得るための二次結晶粒を構成する一次結晶粒の数が十分ではなく、100nmを超えると三次結晶粒を構成する二次結晶粒の数が十分ではない。さらに、該二次結晶粒の集合体からなる三次結晶粒の平均粒径は200nm未満では切削時に被削材と接触する面積が大きくなるために、溶着が起きやすく、該複合組織ごと剥離してしまい、一方1000nmを超えると切削時の負荷に耐えることが出来なくなってしまう。
The effect of the composite structure and the average particle size of the crystal grains The effect of the composite structure is that the bonding force between the secondary crystal grains as well as the primary crystal grains can be utilized by forming an aggregate of crystal grains. It is. The average grain size of the primary crystal grains constituting the composite structure is difficult to form a film having crystal grains of less than 5 nm. On the other hand, when the average grain size exceeds 30 nm, the number of grain boundaries that inhibit dislocation motion decreases. Therefore, high hardness cannot be maintained. Further, when the average grain size of the secondary crystal grains composed of the aggregate of the primary crystal grains is less than 50 nm, the primary crystal grains constituting the secondary crystal grains for obtaining a strong bonding force between the crystal grains, which is an advantage of the composite structure The number of crystal grains is not sufficient, and if it exceeds 100 nm, the number of secondary crystal grains constituting the tertiary crystal grains is not sufficient. Furthermore, if the average grain size of the tertiary crystal grains composed of the aggregate of secondary crystal grains is less than 200 nm, the area in contact with the work material at the time of cutting becomes large, so that welding easily occurs, and the entire composite structure peels off. On the other hand, if it exceeds 1000 nm, it becomes impossible to withstand the load during cutting.
この発明の被覆工具の製造方法を次に説明する。
図1に、この発明の被覆工具、例えば、工具基体表面に(Ti,Al)N層を所定厚さで成膜し、次いで、最表面にZrB2層を蒸着成膜した被覆工具、を製造するための装置の一例として、高出力パルススパッタリング装置を示す。
即ち、図1に示す高出力パルススパッタリング装置において、該高出力パルススパッタリング装置の中央部に工具基体装着用回転テーブルを設け、前記回転テーブルを挟んで対向する2か所に、例えば、所定の組成を有するTi−Al合金ターゲットを配置し、また、Ti−Al合金ターゲットとは90度ずれた位置で、回転テーブルを挟んで対向する2か所にZrB2粉末の焼結体(ZrB2焼結体)ターゲットを配置し、前記回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部に沿って複数の工具基体をリング状に装着し、この状態で装置内雰囲気を窒素雰囲気として前記回転テーブルを回転させると共に、蒸着形成される耐摩耗硬質層の層厚均一化を図る目的で工具基体自体も自転させながら、まず、前記Ti−Al合金ターゲットに対する6kW以上の高い平均投入電力の高出力パルススパッタリングを行い、前記工具基体の表面に(Ti,Al)N層を0.8〜5μmの平均層厚で耐摩耗硬質層として蒸着成膜し、ついで、装置内の雰囲気を実質的にAr雰囲気に変えると共に、ZrB2焼結体ターゲットに対し、8kW以上の高い平均投入電力で高出力パルススパッタリングを行い、前記(Ti,Al)N層の上に最表面層として0.5〜5μmの平均層厚でZrB2層を蒸着成膜することによって製造することができる。
特に、上記特定の条件下の高出力パルススパッタリングによって成膜されたZrB2層は、従来被覆工具のように密着接合層(ZrBN層)を介さずとも(Ti,Al)N層に対してすぐれた密着強度を有し、さらに、膜硬度が高まる。
Next, a method for manufacturing the coated tool of the present invention will be described.
FIG. 1 shows a coated tool of the present invention, for example, a coated tool in which a (Ti, Al) N layer is formed on a tool base surface with a predetermined thickness and then a ZrB 2 layer is deposited on the outermost surface. As an example of an apparatus for performing the above, a high-power pulse sputtering apparatus is shown.
That is, in the high-power pulse sputtering apparatus shown in FIG. 1, a tool base mounting rotary table is provided at the center of the high-power pulse sputtering apparatus, and, for example, a predetermined composition is provided at two locations across the rotary table. And a ZrB 2 powder sintered body (ZrB 2 sintered) at two positions facing each other across the rotary table at a position shifted by 90 degrees from the Ti-Al alloy target. Body) A target is arranged, and a plurality of tool bases are mounted in a ring shape along the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the rotary table. While rotating the rotary table and rotating the tool base itself for the purpose of uniforming the thickness of the wear-resistant hard layer formed by vapor deposition, first, the Ti-A High power pulse sputtering with a high average input power of 6 kW or more is performed on the alloy target, and a (Ti, Al) N layer is deposited on the surface of the tool base as an abrasion resistant hard layer with an average layer thickness of 0.8 to 5 μm. Then, the atmosphere in the apparatus is substantially changed to an Ar atmosphere, and the ZrB 2 sintered body target is subjected to high output pulse sputtering with a high average input power of 8 kW or more, and the (Ti, Al) N layer. It can be manufactured by depositing a ZrB 2 layer as an outermost surface layer with an average layer thickness of 0.5 to 5 μm.
In particular, the ZrB 2 layer formed by high-power pulse sputtering under the above specific conditions is superior to the (Ti, Al) N layer without using an adhesive bonding layer (ZrBN layer) like a conventional coated tool. Further, the film hardness is increased.
さらに、上記の高出力パルススパッタリングにおいては、そのスパッタリング条件として、好ましくは、パルス印加時の発生プラズマ密度が1018m−3以上となるようにし、また、パルスの一波長の長さは200μsec以上でかつ一周期毎のパルスの非印加時間は10μsec以上となるスパッタリング条件でスパッタリングすることが好ましい。 Furthermore, in the above high power pulse sputtering, the sputtering conditions are preferably such that the generated plasma density at the time of applying the pulse is 10 18 m −3 or more, and the length of one wavelength of the pulse is 200 μsec or more. In addition, it is preferable to perform sputtering under sputtering conditions in which the pulse non-application time for each cycle is 10 μsec or more.
上記のエネルギーレベルを高めた矩形パルスによる高出力パルススパッタリングでは、ターゲットに対する熱負荷を減ずることができるためターゲットの無用な温度上昇を抑制することができる。
また、上記高出力パルススパッタリングによって成膜された(Ti,Al)N層、ZrB2層は、何れも密着強度が大であり、高硬度を有している。
In the high-power pulse sputtering using the rectangular pulse with the increased energy level, it is possible to reduce the thermal load on the target, and thus it is possible to suppress an unnecessary temperature increase of the target.
In addition, the (Ti, Al) N layer and the ZrB 2 layer formed by the high-power pulse sputtering have high adhesion strength and high hardness.
この発明の被覆工具は、硬質被覆層として、被削材との接触面積が小さくなるポーラスな表面組織を有するとともに結晶粒相互の結合強度が強い結晶粒組織の複合組織であり、高い硬さを有するZrB2層からなる表面層を備えることから、硬質難削材の高熱発生を伴う高速切削条件加工を行った場合に、溶着に起因する硬質被覆層の剥離を抑制できることから、長期の使用にわたって、すぐれた耐摩耗性を発揮するものである。 The coated tool of the present invention is a composite structure of a crystal grain structure having a porous surface structure with a small contact area with the work material and a strong bond strength between crystal grains as a hard coating layer, and has a high hardness. Since it has a surface layer consisting of two ZrB layers, it is possible to suppress peeling of the hard coating layer caused by welding when performing high-speed cutting condition processing accompanied by high heat generation of hard hard-to-cut materials. It exhibits excellent wear resistance.
つぎに、この発明による被覆工具およびその製造方法を、実施例により具体的に説明する。 Next, the coated tool and the manufacturing method thereof according to the present invention will be specifically described with reference to examples.
原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr3C2粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、ボールミルで72時間湿式混合し、乾燥した後、100MPa の圧力で圧粉体にプレス成形し、この圧粉体を6Paの真空中、温度:1400℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.03のホーニング加工を施してISO規格・CNMG120408のインサート形状をもったWC基超硬合金製の工具基体A−1〜A−10を形成した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended in the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. Medium, sintered at 1400 ° C for 1 hour, after sintering, WC-based carbide with honing of R: 0.03 on the cutting edge and ISO standard / CNMG120408 insert shape Alloy tool bases A-1 to A-10 were formed.
また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(重量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を2kPaの窒素雰囲気中、温度:1500℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.03のホーニング加工を施してISO規格・CNMG120408のインサート形状をもったTiCN基サーメット製の工具基体B−1〜B−6を形成した。 In addition, as raw material powders, all of TiCN (weight ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to obtain ISO standard / CNMG120408. The tool bases B-1 to B-6 made of TiCN base cermet having the insert shape were formed.
(a)ついで、上記の工具基体A−1〜A−10およびB−1〜B−6のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図1に示される高出力パルススパッタリング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部に沿って装着し、一方、高出力パルススパッタリング装置内には、回転テーブルを挟んで対向する4か所にTi−Al合金ターゲットとZrB2焼結体ターゲットを配置し、
(b)まず、装置内を排気して0.1Pa以下の真空に保持しながら、ヒーターで装置内を400℃に加熱した後、前記回転テーブル上で自転しながら回転する工具基体に−200Vの直流バイアス電圧を印加することによって、前記工具基体を1時間Arボンバード処理し、
(c)装置内に反応ガスとして窒素ガスを導入して0.6Paの反応雰囲気とすると共に、前記Ti−Al合金ターゲットに表3条件記号aに示される所定のパルススパッタ条件で高出力パルススパッタを行い、もって前記工具基体の表面に、表4に示される目標組成および目標層厚の(Ti,Al)N層を硬質被覆層の耐摩耗硬質層として成膜し
(d)引き続き、ZrB2焼結体ターゲットに表3に示される所定のパルススパッタ条件で高出力パルススパッタを行い、装置内に導入するガスを窒素ガスからArガスに切り替えると共に、装置内雰囲気を0.5Paとし、この条件で層厚に対応した時間でスパッタリングを行い、同じく表4に示される目標層厚のZrB2層を硬質被覆層の表面層として成膜することにより、本発明被覆工具としての本発明表面被覆インサート(以下、本発明被覆インサートという)1〜16をそれぞれ製造した。
(A) Next, each of the tool bases A-1 to A-10 and B-1 to B-6 was ultrasonically cleaned in acetone and dried, and then the high power pulse sputtering shown in FIG. Attached along the outer periphery at a predetermined distance in the radial direction from the central axis on the rotary table in the apparatus, while in the high-power pulse sputtering apparatus, Ti is placed at four locations across the rotary table. -An Al alloy target and a ZrB 2 sintered body target are arranged,
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the inside of the apparatus is heated to 400 ° C. with a heater, and then the tool base that rotates while rotating on the rotary table is −200V. The tool substrate is treated with Ar bombardment for 1 hour by applying a DC bias voltage,
(C) Nitrogen gas is introduced as a reaction gas into the apparatus to make a reaction atmosphere of 0.6 Pa, and high power pulse sputtering is performed on the Ti—Al alloy target under predetermined pulse sputtering conditions shown in Table 3 Condition symbol a. Thus, a (Ti, Al) N layer having the target composition and target layer thickness shown in Table 4 was formed on the surface of the tool base as an abrasion-resistant hard layer of the hard coating layer. (D) Subsequently, ZrB 2 High power pulse sputtering is performed on the sintered body target under the predetermined pulse sputtering conditions shown in Table 3, the gas introduced into the apparatus is switched from nitrogen gas to Ar gas, and the atmosphere in the apparatus is set to 0.5 Pa. in performed sputtering in time corresponding to the layer thickness, also by the ZrB 2 layers of the target layer thicknesses shown in Table 4 film as the surface layer of the hard coating layer, the present invention coated tool To the present invention surface-coated inserts (hereinafter, the present invention of coated inserts) 1-16 were prepared, respectively.
また、比較の目的で、これら工具基体A−1〜A−10およびB−1〜B−6を、アセトン中で超音波洗浄し、乾燥した状態で、それぞれアークイオンプレーティング装置と直流スパッタリング装置を併設した物理蒸着装置に装入し、装置内には、種々の成分組成をもったTi−Al合金ターゲット、ZrB2焼結体ターゲットを装着し、
まず、装置内を排気して0.1Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、前記Ti−Al合金ターゲットとアノード電極との間にアーク放電を発生させ、前記工具基体の表面に下部層として
目標組成および目標層厚の(Ti,Al)N層を硬質被覆層の耐摩耗硬質層として成膜し、ついで、前記Al−Ti合金のカソード電極(蒸発源)とアノード電極との間のアーク放電を停止し、前記直流スパッタリング装置のカソード電極(蒸発源)として配置したZrB2焼結体の直流スパッタリングを開始し、前記蒸着装置内の雰囲気を窒素雰囲気に代わって、Arと窒素の混合ガス雰囲気とするが、経時的にArの導入割合を漸次増加させ、一方窒素の導入割合は漸次減少させた雰囲気とする条件で、密着接合層としてZrBN層を表6に示す平均層厚で蒸着し、引続いて前記蒸着装置内の雰囲気を最終的にAr雰囲気として、前記直流スパッタリング装置のカソード電極(蒸発源)として配置したZrB2焼結体の直流スパッタリングを続行し、もって前記ZrBN層に重ねて上部層として表5に示される所定の直流スパッタ条件で、表6に示す平均層厚のZrB2層を蒸着することにより従来被覆工具としての従来表面被覆インサート(以下、従来被覆インサートという)1〜16をそれぞれ製造した。
For comparison purposes, these tool bases A-1 to A-10 and B-1 to B-6 are ultrasonically cleaned in acetone and dried, respectively, and an arc ion plating apparatus and a direct current sputtering apparatus, respectively. In the apparatus, a Ti—Al alloy target having various component compositions and a ZrB 2 sintered body target are mounted,
First, while the inside of the apparatus is evacuated and maintained at a vacuum of 0.1 Pa or less, the inside of the apparatus is heated to 500 ° C. with a heater, and then an arc discharge is generated between the Ti—Al alloy target and the anode electrode, A (Ti, Al) N layer having a target composition and a target layer thickness is formed as a wear-resistant hard layer on the surface of the tool substrate as a lower layer, and then the cathode electrode (evaporation source) of the Al—Ti alloy is formed. ) And the anode electrode are stopped, DC sputtering of the ZrB 2 sintered body arranged as the cathode electrode (evaporation source) of the DC sputtering apparatus is started, and the atmosphere in the vapor deposition apparatus is changed to a nitrogen atmosphere. Instead, a mixed gas atmosphere of Ar and nitrogen is used, and adhesion bonding is performed under the condition that the Ar introduction ratio is gradually increased over time while the nitrogen introduction ratio is gradually reduced. The ZrBN layer as the layer is deposited with an average layer thickness shown in Table 6, the atmosphere in the deposition apparatus subsequently finally as an Ar atmosphere, ZrB 2 sintered arranged as a cathode electrode of the DC sputtering device (evaporation source) A conventional coated tool is obtained by continuing DC sputtering of the bonded body, and depositing a ZrB 2 layer having an average layer thickness shown in Table 6 under the predetermined DC sputtering conditions shown in Table 5 as an upper layer on the ZrBN layer. Conventional surface-coated inserts (hereinafter referred to as conventional coated inserts) 1 to 16 were produced.
なお、参考のため、図1に示される本発明被覆インサート1〜16を製造した装置と同じ装置(即ち、装置内には、Ti−Al合金ターゲットとZrB2焼結体ターゲットが装着されている)で、本発明被覆インサート1〜16と異なる組成、膜厚、スパッタ条件で成膜することにより、表6に示される参考被覆工具としての参考表面被覆インサート(以下、参考被覆インサートという)1〜4をそれぞれ製造した。
For reference, the same apparatus as the apparatus for manufacturing the
上記の本発明被覆インサート1〜16、従来被覆インサート1〜16および参考被覆インサート1〜4のZrB2層について、その結晶粒組織を走査型電子顕微鏡(Carl zeiss社製、ultra55)により10万倍の視野で観察し、一次結晶粒、二次結晶粒および三次結晶粒の平均粒径を結晶粒の粒子断面の面積を円の面積として置き換えた場合の直径を10点測定し、その平均値とした。
表4、表6に、その測定値を示す。
また、図2に、本発明被覆インサート9のZrB2層の水平断面の走査型電子顕微鏡写真(倍率:10万倍)を、図3に、従来被覆インサート9のZrB2層の水平断面の走査型電子顕微鏡写真(倍率:10万倍)を、図4に、本発明被覆インサートの複合組織からなるZr硼化物層の水平断面模式図を示す。
The ZrB two layers of the present invention coated inserts 1-16, the conventional coated inserts 1-16, and the reference coated inserts 1-4 are 100,000 times as large as the crystal grain structure by a scanning electron microscope (Carl Zeiss, ultra55). The average diameter of the primary crystal grains, secondary crystal grains, and tertiary crystal grains is measured at 10 points when the area of the cross section of the crystal grains is replaced with the area of a circle, did.
Tables 4 and 6 show the measured values.
FIG. 2 is a scanning electron micrograph (magnification: 100,000 times) of the ZrB two- layer horizontal section of the coated insert 9 of the present invention, and FIG. 3 is a horizontal section scan of the ZrB two- layer of the conventional coated insert 9. A scanning electron micrograph (magnification: 100,000 times) is shown in FIG. 4, and a horizontal cross-sectional schematic view of a Zr boride layer composed of a composite structure of the coated insert of the present invention is shown.
上記の本発明被覆インサート1〜16、従来被覆インサート1〜16および参考被覆インサート1〜4のZrB2層について、その表面硬さを超微小押し込み硬さ試験機(エリオニクス社製、ENT-1100a)により測定した。
表4、表6に、その測定値を示す。
For the ZrB 2 layers of the present invention coated inserts 1-16, the conventional coated inserts 1-16 and the reference coated inserts 1-4, the surface hardness was measured by an ultra micro indentation hardness tester (manufactured by Elionix, ENT-1100a ).
Tables 4 and 6 show the measured values.
また、上記の本発明被覆インサート1〜16、従来被覆インサート1〜16および参考被覆インサート1〜4の硬質被覆層を構成する耐摩耗硬質層の組成を、透過型電子顕微鏡を用いてのエネルギー分散X線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。
さらに、上記の硬質被覆層のZrB2層および耐摩耗硬質層の平均層厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値(5ヶ所の平均値)を示した。
Further, the composition of the wear-resistant hard layers constituting the hard coating layers of the present invention coated
Furthermore, when the average layer thickness of the ZrB 2 layer and the wear-resistant hard layer of the hard coating layer was subjected to cross-sectional measurement using a scanning electron microscope, the average value was substantially the same as the target layer thickness (average of 5 locations). Value).
つぎに、上記の各種の被覆インサートを、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆インサート1〜16、従来被覆インサート1〜16および参考被覆インサート1〜4について、
被削材:質量%で、Ti−6%Al−4%V合金の丸棒、
切削速度:100m/min.、
切り込み:1.5mm、
送り:0.2mm/rev.、
切削時間:5分、
の条件(切削条件Aという)でのTi系合金の乾式連続高速切削加工試験(通常の切削速度は60m/min.)、
を行い、切刃の逃げ面摩耗幅を測定した。
この測定結果を表7に示した。
Next, the above-mentioned various coated inserts are screwed to the tip of the tool steel tool with a fixing jig, and the
Work material: Ti-6% Al-4% V alloy round bar by mass%,
Cutting speed: 100 m / min. ,
Incision: 1.5mm,
Feed: 0.2 mm / rev. ,
Cutting time: 5 minutes
A dry continuous high-speed cutting test of a Ti-based alloy under the following conditions (referred to as cutting condition A) (normal cutting speed is 60 m / min.),
The flank wear width of the cutting blade was measured.
The measurement results are shown in Table 7.
原料粉末として、平均粒径:5.5μmを有するWC粉末、同0.8μmの微粒WC粉末、同1.3μmのTaC粉末、同1.2μmのNbC粉末、同1.2μmのZrC粉末、同2.3μmのCr3C2粉末、同1.5μmのVC粉末、同1.0μmの(Ti,W)C[質量比で、TiC/WC=50/50]粉末、および同1.8μmのCo粉末を用意し、これら原料粉末をそれぞれ表8に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、100MPaの圧力で所定形状の各種の圧粉体にプレス成形し、これらの圧粉体を、6Paの真空雰囲気中、7℃/分の昇温速度で1370〜1470℃の範囲内の所定の温度に昇温し、この温度に1時間保持後、炉冷の条件で焼結して、直径が6mmの工具基体形成用丸棒焼結体を形成し、さらに前記丸棒焼結体から、研削加工にて、切刃部の直径×長さが
それぞれ6mm×12mmの寸法並びにねじれ角30度の2枚刃スクエア形状をもった工具基体(エンドミル)C−1〜C−8をそれぞれ製造した。
As raw material powder, WC powder having an average particle size of 5.5 μm, 0.8 μm fine WC powder, 1.3 μm TaC powder, 1.2 μm NbC powder, 1.2 μm ZrC powder, 2.3 μm Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [by mass ratio, TiC / WC = 50/50] powder, and 1.8 μm Co powder was prepared, and these raw material powders were blended in the blending composition shown in Table 8 respectively. Further, wax was added, ball milled in acetone for 24 hours, dried under reduced pressure, and then dried into various shapes at a pressure of 100 MPa. The green compact was press-molded, and these green compacts were heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a temperature increase rate of 7 ° C./min in a 6 Pa vacuum atmosphere. After holding time, sintering under furnace cooling conditions, A tool bar forming round bar sintered body having a diameter of 6 mm is formed, and further, the diameter x length of the cutting edge portion is 6 mm x 12 mm and the helix angle 30 by grinding from the round bar sintered body. Tool bases (end mills) C-1 to C-8 having a two-blade square shape were manufactured.
ついで、これらの工具基体(エンドミル)C−1〜C−8の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示される蒸着装置に装入し、上記実施例1と同一の条件で、表9に示される目標組成および目標層厚の(Ti,Al)N層からなる耐摩耗硬質層と、同じく表9に示される目標層厚のZrB2層からなる表面層で構成された硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明表面被覆エンドミル(以下、本発明被覆エンドミルという)1〜8をそれぞれ製造した。 Next, the surfaces of these tool bases (end mills) C-1 to C-8 were ultrasonically cleaned in acetone and dried, and then charged into the vapor deposition apparatus shown in FIG. Under the same conditions, a wear-resistant hard layer composed of a (Ti, Al) N layer having a target composition and a target layer thickness shown in Table 9 and a surface layer composed of a ZrB 2 layer having a target layer thickness also shown in Table 9 The surface coating end mills (hereinafter referred to as the present invention coated end mills) 1 to 8 as the present invention coated tools were produced by vapor-depositing the constituted hard coating layers, respectively.
また、比較の目的で、上記の工具基体(エンドミル)C−1〜C−8の表面をアセトン中で超音波洗浄し、乾燥した状態で、上記実施例1と同一の条件で、同じく表10に示される目標組成および目標層厚の(Ti,Al)N層からなる耐摩耗硬質層を硬質被覆層として蒸着することにより、従来被覆工具としての従来表面被覆エンドミル(以下、従来被覆エンドミルという)1〜8をそれぞれ製造した。
さらに、参考のため、上記の工具基体(エンドミル)C−1,C−3,C−5,C−7の表面をアセトン中で超音波洗浄し、乾燥した状態で、上記実施例1と同一の条件で、本発明被覆エンドミル1〜8と異なる組成、膜厚、スパッタ条件で成膜することにより、表10に示される参考被覆工具としての参考表面被覆エンドミル(以下、参考被覆エンドミルという)1〜4をそれぞれ製造した。
Further, for comparison purposes, the surfaces of the tool bases (end mills) C-1 to C-8 were ultrasonically cleaned in acetone and dried, under the same conditions as in Example 1 above. A conventional surface-coated end mill (hereinafter referred to as a conventional coated end mill) as a conventional coated tool by depositing a hard-wearing hard layer comprising a (Ti, Al) N layer having a target composition and a target layer thickness shown in FIG. 1 to 8 were produced.
Further, for reference, the surfaces of the tool bases (end mills) C-1, C-3, C-5, and C-7 are ultrasonically cleaned in acetone and dried, and the same as in Example 1 above. The reference surface-coated end mill (hereinafter referred to as the reference coated end mill) 1 as a reference coated tool shown in Table 10 is formed by forming a film with a composition, film thickness, and sputtering conditions different from those of the
上記の本発明被覆エンドミル1〜8、従来被覆エンドミル1〜8および参考被覆エンドミル1〜4のZrB2層について、その結晶粒組織を走査型電子顕微鏡(Curl zeiss社製、ultra55)により10万倍の視野で観察し、一次結晶粒、二次結晶粒および三次結晶粒の平均粒径を結晶粒の粒子断面の面積を円の面積として置き換えた場合の直径を10点測定し、その平均値とした。
表9、表10に、その測定値を示す。
The ZrB two layers of the present invention-coated
Tables 9 and 10 show the measured values.
上記の本発明被覆エンドミル1〜8、従来被覆エンドミル1〜8および参考被覆エンドミル1〜4のZrB2層について、その表面硬さを超微小押し込み硬さ試験機(エリオニクス社製、ENT-1100a)により測定した。
表9、表10に、その測定値を示す。
For the ZrB two layers of the present invention
Tables 9 and 10 show the measured values.
また、上記の本発明被覆エンドミル1〜8、従来被覆エンドミル1〜8および参考被覆エンドミル1〜4の硬質被覆層を構成する耐摩耗硬質層の組成を、透過型電子顕微鏡を用いてのエネルギー分散X線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。
さらに、上記の硬質被覆層のZrB2層および耐摩耗硬質層の平均層厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値(5ヶ所の平均値)を示した。
Further, the composition of the hard coating layer constituting the hard coating layer of the present invention
Furthermore, when the average layer thickness of the ZrB 2 layer and the wear-resistant hard layer of the hard coating layer was subjected to cross-sectional measurement using a scanning electron microscope, the average value was substantially the same as the target layer thickness (average of 5 locations). Value).
つぎに、上記本発明被覆エンドミル1〜8、従来被覆エンドミル1〜8および参考被覆エンドミル1〜4について、
被削材−平面:100mm×250mm、厚さ:50mmの寸法をもったTi系合金(質量%で、Ti−6%Al−4%V合金)の板材、
切削速度:150m/min.、
溝深さ(切り込み):4mm、
テーブル送り:960mm/分、
の条件(切削条件Bという)でのTi系合金の乾式高速溝切削加工試験(通常の切削速度は80m/min.)、
を行い、溝切削加工試験における切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる0.1mmに至るまでの切削溝長を測定した。
この測定結果を表11にそれぞれ示した。
Next, for the above-described
Work material-plane: 100 mm × 250 mm, thickness: 50 mm Ti-based alloy (mass%, Ti-6% Al-4% V alloy) plate material,
Cutting speed: 150 m / min. ,
Groove depth (cut): 4 mm
Table feed: 960 mm / min,
A dry high-speed grooving test of a Ti-based alloy under the conditions (cutting condition B) (normal cutting speed is 80 m / min.),
The cutting groove length was measured until the flank wear width of the outer peripheral edge of the cutting edge in the groove cutting test reached 0.1 mm, which is a guide for the service life.
The measurement results are shown in Table 11, respectively.
表3〜11に示される結果から、ZrB2層がすぐれた耐溶着性と硬さを有する本発明被覆工具は、各種のTi系合金や高Si含有Al−Si系合金などの硬質難削材の高熱発生を伴う高速切削で、すぐれた耐剥離性と耐摩耗性を発揮する。
これに対して、従来被覆工具では、表6、表10に示されるように、該複合組織を形成していないため耐溶着性に劣り、硬質難削材の高熱発生を伴う高速切削条件で硬質被覆層の剥離を抑制することができず、硬さも十分でないために耐摩耗性に劣る。また、本発明で規定する範囲から外れるZrB2層を有する参考被覆工具においては、硬質難削材の高熱発生を伴う高速切削加工では切刃部の摩耗進行が速く、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Tables 3 to 11, the present coated tool having excellent welding resistance and hardness with a ZrB 2 layer is a hard difficult-to-cut material such as various Ti-based alloys and high Si-containing Al-Si based alloys. Excellent peeling resistance and wear resistance by high-speed cutting with high heat generation.
On the other hand, as shown in Tables 6 and 10, in the conventional coated tool, the composite structure is not formed, so that the welding resistance is inferior, and the hard tool is hard under high-speed cutting conditions with high heat generation. Since peeling of the coating layer cannot be suppressed and the hardness is not sufficient, the wear resistance is poor. In the case of a reference coated tool having a ZrB 2 layer that is out of the range specified in the present invention, the wear of the cutting edge portion is fast in high-speed cutting with high heat generation of hard difficult-to-cut materials, and the service life is relatively short. It is clear that
上述のように、この発明の被覆工具およびその製造方法によれば、各種の鋼や鋳鉄などの通常の切削条件での切削加工は勿論のこと、特に高い発熱を伴う上記の硬質難削材の高速切削加工でもすぐれた耐剥離性と耐摩耗性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工装置の高性能化および自動化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, according to the coated tool and the manufacturing method thereof of the present invention, the hard hard-to-cut material having a particularly high heat generation as well as cutting under normal cutting conditions such as various steels and cast irons. Excellent peeling resistance and wear resistance even in high-speed cutting, and excellent cutting performance over a long period of time. High performance and automation of cutting equipment, labor saving and energy saving of cutting. It is possible to cope with the reduction of cost and cost.
Claims (1)
上記Zr硼化物層は、複数の平均粒径を有する結晶粒組織の複合組織として構成され、該複合組織は、5〜30nmの平均粒径を有する一次結晶粒の集合体からなる平均粒径50〜100nmの二次結晶粒と、該二次結晶粒の集合体からなる平均粒径200〜1000nmの三次結晶粒とから構成されていることを特徴とする表面被覆切削工具。 A cutting tool in which a Zr boride layer having an average layer thickness of at least 0.5 to 5 μm is coated on the outermost surface of a tool base made of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
The Zr boride layer is configured as a composite structure of a crystal grain structure having a plurality of average grain sizes, and the composite structure has an average grain size of 50 consisting of an aggregate of primary crystal grains having an average grain size of 5 to 30 nm. A surface-coated cutting tool comprising secondary crystal grains of ˜100 nm and tertiary crystal grains having an average grain size of 200 to 1000 nm composed of aggregates of the secondary crystal grains.
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