JP2012008051A5 - - Google Patents
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- JP2012008051A5 JP2012008051A5 JP2010145424A JP2010145424A JP2012008051A5 JP 2012008051 A5 JP2012008051 A5 JP 2012008051A5 JP 2010145424 A JP2010145424 A JP 2010145424A JP 2010145424 A JP2010145424 A JP 2010145424A JP 2012008051 A5 JP2012008051 A5 JP 2012008051A5
- Authority
- JP
- Japan
- Prior art keywords
- moving
- inclined surface
- drive mechanism
- elevating
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Description
昇降機構17Aは、図1〜図3に示すように、支持柱16の上面に固定された基体17Bと、基体17B上面に沿って移動可能に配置された傾斜面を有する移動体17Cと、ヘッドプレート15に締結部材17Dによって連結され且つ移動体17Cの傾斜面に沿って昇降可能に配置された傾斜面を有する昇降体17Eと、移動体17Cを支持柱16の上面に沿って移動させる駆動機構17Fと、を備え、駆動機構17Fが制御装置の制御下で駆動して移動体17Cを前後方向へ(図1〜図3では左右方向)に所定の寸法だけ移動させることにより昇降体17Eが移動体17Cの傾斜面を介して所定の寸法だけ昇降するように構成されている。制御装置は、測定機器の測定結果に基づいて駆動機構17Fを制御するようにしてある。 As shown in FIGS. 1 to 3, the elevating mechanism 17 </ b> A includes a base body 17 </ b> B fixed to the upper surface of the support column 16, a moving body 17 </ b> C having an inclined surface movably disposed along the upper surface of the base body 17 </ b> B, Elevating body 17E having an inclined surface connected to plate 15 by fastening member 17D and arranged so as to be movable up and down along the inclined surface of moving body 17C, and a drive mechanism for moving moving body 17C along the upper surface of support column 16 17F, and the drive mechanism 17F is driven under the control of the control device to move the moving body 17C by a predetermined dimension in the front-rear direction (left-right direction in FIGS. 1 to 3), thereby moving the elevating body 17E. It is configured to move up and down by a predetermined dimension via the inclined surface of the body 17C. The control device controls the drive mechanism 17F based on the measurement result of the measuring device.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010145424A JP5826466B2 (en) | 2010-06-25 | 2010-06-25 | Probe card parallel adjustment mechanism and inspection device |
KR1020110058525A KR101256306B1 (en) | 2010-06-25 | 2011-06-16 | Parallelism adjusting mechanism of probe card and inspection apparatus |
TW100122209A TWI503549B (en) | 2010-06-25 | 2011-06-24 | Parallel adjustment mechanism of probe card and probe inspection device |
CN201110179929A CN102298079A (en) | 2010-06-25 | 2011-06-24 | Parallel adjusting mechanism and inspecting device of probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010145424A JP5826466B2 (en) | 2010-06-25 | 2010-06-25 | Probe card parallel adjustment mechanism and inspection device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012008051A JP2012008051A (en) | 2012-01-12 |
JP2012008051A5 true JP2012008051A5 (en) | 2013-06-27 |
JP5826466B2 JP5826466B2 (en) | 2015-12-02 |
Family
ID=45358635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010145424A Active JP5826466B2 (en) | 2010-06-25 | 2010-06-25 | Probe card parallel adjustment mechanism and inspection device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5826466B2 (en) |
KR (1) | KR101256306B1 (en) |
CN (1) | CN102298079A (en) |
TW (1) | TWI503549B (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5277827B2 (en) * | 2008-09-22 | 2013-08-28 | 東京エレクトロン株式会社 | Probe device |
JP2013175572A (en) * | 2012-02-24 | 2013-09-05 | Tokyo Electron Ltd | Probe device and parallelism adjustment mechanism of probe card |
JP5819880B2 (en) * | 2013-05-08 | 2015-11-24 | 本田技研工業株式会社 | Parallelism adjusting device and parallelism adjusting method |
CN104183515A (en) * | 2013-05-24 | 2014-12-03 | 标准科技股份有限公司 | Wafer testing machine stand |
KR101607087B1 (en) * | 2014-09-24 | 2016-03-29 | 주식회사 디이엔티 | Probe |
JP6890921B2 (en) * | 2015-10-21 | 2021-06-18 | 株式会社日本マイクロニクス | Probe card and contact inspection device |
KR102446953B1 (en) * | 2016-02-24 | 2022-09-23 | 세메스 주식회사 | Alignment jig and method of aligning test head with probe station using the same |
CN107422241B (en) * | 2016-03-23 | 2019-10-15 | 创意电子股份有限公司 | Method and system for using probe card |
TWI616664B (en) * | 2016-03-23 | 2018-03-01 | 創意電子股份有限公司 | Method, system for utilizing a probe card device, and the probe card device |
TWI610080B (en) * | 2016-05-12 | 2018-01-01 | 中華精測科技股份有限公司 | Probe card assembly |
CN106206355B (en) * | 2016-08-30 | 2018-11-27 | 重庆市妙格半导体研究院有限公司 | Semiconductor detection system based on graphene sensing unit |
KR102654604B1 (en) * | 2016-11-22 | 2024-04-03 | 세메스 주식회사 | Probe station |
CN108387759B (en) * | 2018-01-15 | 2020-10-16 | 北京时代民芯科技有限公司 | Universal 1553B bus circuit anti-fuse adjusting clamp |
KR102115179B1 (en) * | 2018-11-20 | 2020-06-08 | 주식회사 탑 엔지니어링 | Probe device and method for calibrating probe |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03185327A (en) * | 1989-12-15 | 1991-08-13 | Sanwa Musen Sokki Kenkyusho:Kk | Vaccum measuring apparatus |
JP3163221B2 (en) * | 1993-08-25 | 2001-05-08 | 東京エレクトロン株式会社 | Probe device |
JPH08320389A (en) * | 1995-05-26 | 1996-12-03 | Dainippon Screen Mfg Co Ltd | Measuring stage |
JP4300003B2 (en) * | 2002-08-07 | 2009-07-22 | 東京エレクトロン株式会社 | Mounting table driving apparatus and probe method |
JP2006098296A (en) * | 2004-09-30 | 2006-04-13 | Optrex Corp | Lighting inspection device of display panel |
JP4102884B2 (en) * | 2005-05-13 | 2008-06-18 | 東京エレクトロン株式会社 | Probe card adjustment mechanism and probe device |
JP4685559B2 (en) * | 2005-09-09 | 2011-05-18 | 東京エレクトロン株式会社 | Method for adjusting parallelism between probe card and mounting table, inspection program storage medium, and inspection apparatus |
JP4860242B2 (en) * | 2005-11-11 | 2012-01-25 | 東京エレクトロン株式会社 | Probe device |
JP2007183194A (en) * | 2006-01-10 | 2007-07-19 | Micronics Japan Co Ltd | Probing apparatus |
JP2008294292A (en) * | 2007-05-25 | 2008-12-04 | Tokyo Seimitsu Co Ltd | Prober, contacting method and program for prober |
KR101093646B1 (en) * | 2009-05-01 | 2011-12-15 | 가부시키가이샤 니혼 마이크로닉스 | A testing apparatus for a plate-shaped object |
-
2010
- 2010-06-25 JP JP2010145424A patent/JP5826466B2/en active Active
-
2011
- 2011-06-16 KR KR1020110058525A patent/KR101256306B1/en active IP Right Grant
- 2011-06-24 CN CN201110179929A patent/CN102298079A/en active Pending
- 2011-06-24 TW TW100122209A patent/TWI503549B/en active
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