JP2011255472A - Machining device - Google Patents

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JP2011255472A
JP2011255472A JP2010133013A JP2010133013A JP2011255472A JP 2011255472 A JP2011255472 A JP 2011255472A JP 2010133013 A JP2010133013 A JP 2010133013A JP 2010133013 A JP2010133013 A JP 2010133013A JP 2011255472 A JP2011255472 A JP 2011255472A
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display monitor
processing apparatus
processing
housing
information
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Harunobu Yuzawa
治信 湯澤
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Disco Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a machining device equipped with a display monitor the inputting of a command and the reading of an operation screen of which are easy regardless of a height of a worker.SOLUTION: The machining device includes a machining device body containing a machining means for machining a work piece and a housing for housing the machining means, and a display monitor which is provided at the housing for displaying an operation screen in which an operation condition of the machining means is inputted. The display monitor is detachable from the housing and includes a first radio transmission/reception part which transmits the inputted operation information to the machining device body and receives information from the machining device body. The machining device body includes a control means that contains a second radio transmission/reception part that receives the operation information from the display monitor and transmits the information to the display monitor.

Description

本発明は、被加工物に加工を施す加工手段と、加工手段の動作条件を入力設定する操作画面を表示する表示モニタとを備えた加工装置に関する。   The present invention relates to a processing apparatus including processing means for processing a workpiece and a display monitor for displaying an operation screen for inputting and setting operating conditions of the processing means.

多くの産業機械や製造装置では、加工手段等の駆動機構はハウジング中に収容されている。そして、ハウジングには加工手段の動作条件等を入力するための操作ボタンや、入力設定された動作条件や加工手段の動作状況を表示するための表示手段が配設されている。   In many industrial machines and manufacturing apparatuses, a drive mechanism such as a processing means is accommodated in a housing. The housing is provided with operation buttons for inputting the operating conditions of the processing means, and display means for displaying the input operating conditions and the operating status of the processing means.

例えば、半導体製造工程等で使用される切削装置や研削装置では、特開２００１−１０８４０１号公報に開示されるように、切削ブレードや研削ホイールが装着されたスピンドルやチャックテーブル等の動作条件、被加工物を洗浄する洗浄ユニットの動作条件等を入力する操作ボタンと、入力された動作条件や顕微鏡で撮像した加工結果を表示する表示モニタを有している。   For example, in a cutting device or a grinding device used in a semiconductor manufacturing process or the like, as disclosed in Japanese Patent Laid-Open No. 2001-108401, operating conditions such as a spindle or a chuck table on which a cutting blade or a grinding wheel is mounted, An operation button for inputting an operation condition and the like of a cleaning unit for cleaning the workpiece and a display monitor for displaying the input operation condition and a processing result imaged by a microscope are provided.

一方、近年では装置の小型化や見栄えを考慮して、動作条件を入力する操作ボタンに替わって、入力された動作条件や加工結果の表示のみでなく、動作条件を入力可能なタッチパネル式の表示モニタが広く採用されており、一般的に表示モニタはハウジングの側壁に固定されている（例えば、特開２００９−１９４３２６号公報）。   On the other hand, in recent years, considering the downsizing and appearance of the device, instead of the operation buttons for inputting the operating conditions, not only the input operating conditions and processing results but also the touch panel type display that can input the operating conditions. A monitor is widely used, and a display monitor is generally fixed to a side wall of a housing (for example, JP 2009-194326 A).

特開２００１−１０８４０１号公報JP 2001-108401 A 特開２００９−１９４３２６号公報JP 2009-194326 A

しかし、多くの産業機械や製造装置では、ハウジングの側壁は垂直であり、このような側壁にタッチパネル式の表示モニタを配設すると、作業者の身長によっては入力がしづらい上、表示が読みがたいという問題がある。   However, in many industrial machines and manufacturing equipment, the side wall of the housing is vertical, and if a touch panel display monitor is provided on such a side wall, it is difficult to input depending on the height of the operator, and the display is difficult to read. There is a problem of wanting.

一方、近年の半導体デバイス製造プロセスでは、従来複数の加工装置で行っていた加工を一台の加工装置で行うべく、例えば切削装置と研削装置、テープマウンタなど複数の加工装置を組み合わせた所謂「インライン加工装置」が普及しつつある。また、半導体ウエーハの大口径化に伴って加工装置は大型化の傾向にある。   On the other hand, in recent semiconductor device manufacturing processes, so-called “in-line” is a combination of a plurality of processing devices such as a cutting device, a grinding device, and a tape mounter, for example, in order to perform processing that has conventionally been performed by a plurality of processing devices with one processing device. "Processing equipment" is becoming widespread. Further, as the diameter of semiconductor wafers increases, the processing apparatus tends to increase in size.

これらのインライン加工装置や大型化した加工装置では、表示モニタが加工装置の一部に固定されていると、表示モニタから離れている場所のメンテナンスや調整時に加工装置を稼動させながら動作確認や作業を行うことが難しいという問題がある。   In these in-line processing equipment and larger processing equipment, if the display monitor is fixed to a part of the processing equipment, operation check and work can be performed while the processing equipment is operating during maintenance or adjustment of a place away from the display monitor. There is a problem that it is difficult to do.

本発明はこのような点に鑑みてなされたものであり、その目的とするところは、作業者の身長によらず動作条件等の入力及び表示画面の読み取りが容易で作業し易い表示モニタを備えた加工装置を提供することである。   The present invention has been made in view of the above points, and an object of the present invention is to provide a display monitor that allows easy input of operating conditions and reading of the display screen and easy operation regardless of the height of the operator. It is to provide a processing apparatus.

本発明によると、被加工物に加工を施す加工手段と該加工手段を収容するハウジングとを有する加工装置本体と、該加工手段の動作条件を入力する操作画面を表示する該ハウジングに配設された表示モニタとを備えた加工装置であって、該表示モニタは、該ハウジングに対して着脱可能に構成され、入力された操作情報を該加工装置本体へ送信するとともに該加工装置本体からの情報を受信する第１無線送受信部を有し、該加工装置本体は、該表示モニタからの該操作情報を受信するとともに該表示モニタへ情報を送信する第２無線送受信部を有する制御手段を備えたことを特徴とする加工装置が提供される。   According to the present invention, a processing apparatus main body having a processing means for processing a workpiece and a housing for housing the processing means, and a housing for displaying an operation screen for inputting operating conditions of the processing means are provided. The display monitor is configured to be detachable from the housing, and transmits input operation information to the processing apparatus main body and information from the processing apparatus main body. The processing apparatus main body includes a control unit having a second wireless transmission / reception unit that receives the operation information from the display monitor and transmits information to the display monitor. The processing apparatus characterized by this is provided.

本発明の加工装置では、表示モニタを加工装置本体から取り外すことができるため、どの作業者でも動作条件等の入力及び表示画面の読み取りが容易となる。また、メンテナンスや調整時にも任意の場所へと表示モニタを持ち運ぶことができるため、加工装置が大型化しても作業性が悪化することがない。   In the processing apparatus of the present invention, since the display monitor can be detached from the processing apparatus main body, any operator can easily input operating conditions and read the display screen. Further, since the display monitor can be carried to any place during maintenance and adjustment, workability is not deteriorated even if the processing apparatus is enlarged.

更に、複数の加工装置を並べて生産加工を行っている工場等では、複数台の加工装置の表示モニタを一箇所で操作することが可能となるため、作業者の負荷や人数を低減できる。   Furthermore, in a factory or the like where a plurality of processing devices are arranged and processed, it is possible to operate the display monitors of the plurality of processing devices at a single location, thereby reducing the load and number of workers.

表示モニタを具備した加工装置の一例を示す斜視図である。It is a perspective view which shows an example of the processing apparatus provided with the display monitor. 表示モニタを取り外した状態の加工装置の斜視図である。It is a perspective view of the processing apparatus of the state which removed the display monitor.

以下、本発明の実施形態を図面を参照して詳細に説明する。図１を参照すると、加工装置の一例であるレーザ加工装置２の外観斜視図が示されている。図２は扉を開くとともに表示モニタを取り外した状態のレーザ加工装置の外観斜視図である。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a laser processing apparatus 2 which is an example of a processing apparatus is shown. FIG. 2 is an external perspective view of the laser processing apparatus with the door opened and the display monitor removed.

レーザ加工装置２は、レーザビーム発生ユニット及びレーザ加工ヘッド（集光器）１０等の加工手段がハウジング８内に収容された加工装置本体４と、加工装置本体４のハウジング８に着脱可能に装着された表示モニタ６とから構成される。   The laser processing apparatus 2 is detachably mounted on a processing apparatus main body 4 in which processing means such as a laser beam generating unit and a laser processing head (concentrator) 10 are accommodated in a housing 8 and on the housing 8 of the processing apparatus main body 4. Display monitor 6.

加工装置本体４はスライド式に開閉される扉１４，１６を備えており、扉１４，１６を開けると図２に示すように、レーザ加工ヘッド１０及びチャックテーブル１２が現れる。チャックテーブル１２はＸ軸方向とＹ軸方向に移動可能に配設されている。   The processing apparatus body 4 includes doors 14 and 16 that are opened and closed in a sliding manner. When the doors 14 and 16 are opened, the laser processing head 10 and the chuck table 12 appear as shown in FIG. The chuck table 12 is disposed so as to be movable in the X-axis direction and the Y-axis direction.

１８は内部に複数枚のウエーハを収容したカセットを載置するカセット載置台であり、上下方向に移動可能に構成されている。２０はレーザ加工装置２の稼働状況を表示する表示ランプであり、レーザ加工装置２が正常作動時には例えば緑色で点灯し、何らかの故障が生じた場合には赤色が点滅する。２２，２４は非常停止ボタンであり、作業者がこの非常停止ボタン２２，２４を押すとレーザ加工装置２の作動を直ちに停止することができる。   Reference numeral 18 denotes a cassette mounting table on which a cassette containing a plurality of wafers is mounted, and is configured to be movable in the vertical direction. Reference numeral 20 denotes a display lamp for displaying the operating status of the laser processing apparatus 2, which is lit in green, for example, when the laser processing apparatus 2 is operating normally, and flashes red when some failure occurs. 22 and 24 are emergency stop buttons. When the operator presses the emergency stop buttons 22 and 24, the operation of the laser processing apparatus 2 can be stopped immediately.

表示モニタ６は、図２に示すハウジング８の嵌合凹部２６中に嵌合することにより加工装置本体４に搭載され、更に矢印Ａに示すように加工装置本体４から取り外すことができる。   The display monitor 6 is mounted on the processing apparatus main body 4 by being fitted in the fitting recess 26 of the housing 8 shown in FIG. 2, and can be further detached from the processing apparatus main body 4 as indicated by an arrow A.

表示モニタ６は第１無線送受信部２８を有しており、この第１無線送受信部２８を介して表示モニタ６に入力された操作情報を加工装置本体４に送信するとともに、加工装置本体４からの情報を受信して表示モニタ６に表示する。   The display monitor 6 includes a first wireless transmission / reception unit 28, and the operation information input to the display monitor 6 via the first wireless transmission / reception unit 28 is transmitted to the processing apparatus body 4, and from the processing apparatus body 4. Is received and displayed on the display monitor 6.

表示モニタ６に入力された操作情報は、例えば、レーザビームの平均出力や繰り返し周波数、チャックテーブルの送り速度等の加工条件、ウエーハをチャックテーブルまで搬送する図示しない搬送手段の移動速度等、装置の各種設定値を含むものである。   The operation information input to the display monitor 6 includes, for example, processing conditions such as an average output and repetition frequency of the laser beam, a feed rate of the chuck table, and a moving speed of a conveying means (not shown) that conveys the wafer to the chuck table. Includes various set values.

また、加工装置本体４からの情報は、例えば、加工装置の動作条件の設定状況や図示しない顕微鏡で撮像した被加工物の撮像画像等を含むものである。   Moreover, the information from the processing apparatus main body 4 includes, for example, a setting state of operation conditions of the processing apparatus, a captured image of a workpiece captured by a microscope (not shown), and the like.

一方、加工装置本体４の制御手段３０は第２無線送受信部３２を有しており、この第２無線送受信部３２を介して表示モニタ６からの操作情報を受信するとともに、表示モニタ６に加工装置本体４の稼動情報を送信する。加工装置本体４と表示モニタ６との間の無線通信は、ブルートゥス、ミリ波等の狭帯域通信を用いるのが好ましい。狭帯域通信により誤作動を防止することができる。   On the other hand, the control means 30 of the processing apparatus main body 4 includes a second wireless transmission / reception unit 32, receives operation information from the display monitor 6 via the second wireless transmission / reception unit 32, and processes the display monitor 6. The operation information of the apparatus body 4 is transmitted. The wireless communication between the processing apparatus body 4 and the display monitor 6 preferably uses narrowband communication such as Bluetooth or millimeter wave. Malfunctions can be prevented by narrowband communication.

より好ましくは、通信範囲を狭帯域に制限し、無線情報に装置固有情報（固有アドレス等）を持たせておくことにより、各表示モニタに対応する加工装置の識別をし、他の表示モニタからの情報による加工装置の誤作動を防止することができる。   More preferably, the processing range corresponding to each display monitor is identified by limiting the communication range to a narrow band and providing wireless information with device-specific information (unique address, etc.) from other display monitors. It is possible to prevent malfunction of the processing apparatus due to the information of the above.

上述した実施形態によると、表示モニタ６を加工装置本体４から取り外すことができるため、どの作業者でも動作条件等の入力及び表示画面の読み取りが容易となる。また、メンテナンスや調整時にも任意の場所へと表示モニタ６を持ち運ぶことができるため、加工装置が大型化しても作業性が悪化することがない。   According to the above-described embodiment, since the display monitor 6 can be detached from the processing apparatus main body 4, any operator can easily input operating conditions and read the display screen. Further, since the display monitor 6 can be carried to any place during maintenance or adjustment, workability is not deteriorated even if the processing apparatus is enlarged.

更に、無線情報に装置固有情報（固有アドレス等）を持たせることにより、複数の加工装置を並べて生産加工を行っている工場等では、加工装置の誤作動を起こすことなく複数台の加工装置の表示モニタを一箇所で操作することが可能となるため、作業員の負荷や人数を低減することができる。   Furthermore, by giving device specific information (such as unique address) to the wireless information, in a factory where production processing is performed by arranging a plurality of processing devices, a plurality of processing devices can be operated without causing malfunction of the processing devices. Since the display monitor can be operated at one place, the load and the number of workers can be reduced.

上述した実施形態では、本発明をレーザ加工装置２に適用した例について説明したが、本発明はこれに限定されるものではなく、例えば切削装置、研削装置等の他の加工装置にも本発明を同様に適用することができる。   In the above-described embodiment, the example in which the present invention is applied to the laser processing apparatus 2 has been described. However, the present invention is not limited to this, and the present invention is also applied to other processing apparatuses such as a cutting apparatus and a grinding apparatus. Can be applied as well.

２ レーザ加工装置
４ 装置本体
６ 表示モニタ
８ ハウジング
１０ レーザ加工ヘッド
１２ チャックテーブル
２６ 嵌合凹部
２８ 第１無線送受信部
３２ 第２無線送受信部 2 Laser processing device 4 Device main body 6 Display monitor 8 Housing 10 Laser processing head 12 Chuck table 26 Fitting recess 28 First wireless transmission / reception unit 32 Second wireless transmission / reception unit

Claims (1)

被加工物に加工を施す加工手段と該加工手段を収容するハウジングとを有する加工装置本体と、該加工手段の動作条件を入力する操作画面を表示する該ハウジングに配設された表示モニタとを備えた加工装置であって、
該表示モニタは、該ハウジングに対して着脱可能に構成され、入力された操作情報を該加工装置本体へ送信するとともに該加工装置本体からの情報を受信する第１無線送受信部を有し、
該加工装置本体は、該表示モニタからの該操作情報を受信するとともに該表示モニタへ情報を送信する第２無線送受信部を有する制御手段を備えたことを特徴とする加工装置。 A processing apparatus main body having processing means for processing a workpiece and a housing for housing the processing means, and a display monitor disposed on the housing for displaying an operation screen for inputting operating conditions of the processing means. A processing device comprising:
The display monitor is configured to be detachable from the housing, and includes a first wireless transmission / reception unit that transmits input operation information to the processing apparatus body and receives information from the processing apparatus body,
The processing apparatus includes a control unit having a second wireless transmission / reception unit that receives the operation information from the display monitor and transmits the information to the display monitor.
JP2010133013A 2010-06-10 2010-06-10 Machining device Pending JP2011255472A (en)

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